Polishing Equipment for Large-Aperture Optical Elements

Abstract

The present invention discloses a polishing device for large-diameter optical elements, comprising: a transfer rack, in which a lifting rack, a positioning tooling and a vacuum tank are arranged. The positioning tooling is placed on the lifting rack, and a T-shaped hook is arranged on the positioning tooling. A universal transfer flatbed truck and a horizontal transfer overhead crane are arranged in the transfer rack, and a T-shaped groove buckle is arranged on the horizontal transfer overhead crane; The vacuum tank includes: a tank body, an inlet is arranged on the top wall of the tank body, a lifting mechanism is arranged in the tank body, a positioning block is arranged on the lifting mechanism, a three-axis motion system is arranged in the tank body, an ion beam generator is arranged on the three-axis motion system, a hanging frame is arranged on the transfer rack above the tank body, a sealing cover is connected downward on the hanging frame, and a vacuum pump is connected to the tank body. The advantage of the present invention is that it can clamp, position, transport and polish optical elements with a diameter exceeding 1500 mm.

Description

Technical Field

[0001] The present invention relates to a polishing device for large-diameter optical elements. Background Art

[0002] With the development of the optical industry, the demand for optical elements is increasing, and the demand is developing from small diameters to large diameters. However, the processing equipment in this field is almost monopolized by foreign countries. With the breakthroughs in the technical field in recent years in China, the polishing process for small-diameter optical elements in China has become mature, but the ion beam polishing process for optical elements in the large-diameter or extra-large-diameter field is still blank. Currently, the existing equipment in China can process optical elements with a diameter within 1500 mm. For large-diameter optical elements with a diameter exceeding 1500 mm, there is currently no equipment in China that can process them. The main reason is that the existing optical element lifting and transfer mechanism in China is only applicable to optical elements with a maximum diameter less than 1500 mm. There is no lifting and transfer mechanism that can perform non-destructive clamping and transfer for large-diameter optical elements with a diameter greater than 1500 mm. Moreover, most of the vacuum chambers on the market are applicable to optical elements with a diameter less than 1500 mm. Since the feeding port of the existing vacuum chambers on the market is opened on the side wall, if the feeding port is opened larger, the volume of the vacuum chamber needs to be increased to ensure the side wall strength of the vacuum chamber. Moreover, the hinge door installed on the feeding port will also be very large. After the volume of the hinge door increases, its weight will become larger, which not only makes it difficult to open and close, but also the hinge door is prone to deformation under the influence of gravity after long-term use, affecting the sealing effect of the vacuum chamber. Therefore, general vacuum chambers cannot meet the requirements of large-diameter optical elements with a diameter exceeding 1500 mm. Summary of the Invention

[0003] The object of the present invention is to provide a polishing device for large-diameter optical elements that can perform ion beam polishing on optical elements with a diameter exceeding 1500 mm, so as to solve the clamping, transfer problems of large-diameter optical elements and the strength problem of the vacuum chamber.

[0004] To achieve the above object, the technical solution adopted by the present invention is: a polishing device for large-diameter optical elements, including: a transfer rack, in which a lifting rack, a positioning tooling and a vacuum tank are arranged. The lifting rack is arranged in the transfer rack through a first lifting mechanism. The positioning tooling is arranged in the lifting rack. The positioning tooling includes: a protection frame and a force-bearing hanging frame. Along the periphery of the protection frame, four base positioning blocks are evenly distributed. The four base positioning blocks are placed on the lifting rack. On the outer bottom wall of the base positioning block, a trapezoidal step is arranged. On the base positioning block, a support adjusting rod is arranged upward. An external thread is arranged on the support adjusting rod. A support nut is threadedly connected to the external thread of the support adjusting rod. At the top of each support adjusting rod, a T-shaped hook is arranged. The force-bearing hanging frame includes: a central seat and four connecting arms. After the four connecting arms are connected to the central seat, a cross shape is formed. The four connecting arms are respectively sleeved on the four support adjusting rods. The support nuts on the support adjusting rods support the connecting arms. On each connecting arm, a positioning bracket is slidably arranged. A number of lifting holes are evenly spaced on the connecting arm. In any one of the lifting holes on each connecting arm, a suspension rod capable of connecting with the optical element is arranged. The suspension rod extends upward from the connecting arm and is threadedly connected with a locking nut. A universal transfer flatbed truck is arranged in the transfer rack below the protection frame. Two parallel guide rails are arranged in the transfer rack above the force-bearing hanging frame. A horizontal transfer overhead crane is slidably arranged on the two guide rails. Four T-shaped slot fasteners are arranged downward on the horizontal transfer overhead crane. The four T-shaped slot fasteners on the horizontal transfer overhead crane are respectively adapted to the T-shaped hooks on the four support adjusting rods one by one. The two guide rails extend to the transfer rack above the vacuum tank. The vacuum tank includes: a tank body. An inlet is arranged on the top wall of the tank body. A sealing ring is arranged on the top wall of the tank body. Four lifting mechanisms are arranged in the tank body. A positioning block is arranged on the lifting mechanism. A first trapezoidal groove is arranged on each of the four positioning blocks. The first trapezoidal grooves on the four positioning blocks are respectively adapted to the trapezoidal steps on the four base positioning blocks one by one. A three-axis motion system is arranged in the tank body. An ion beam generator is arranged on the three-axis motion system. A hanging frame is arranged on the transfer rack above the tank body. The hanging frame is arranged in the transfer rack through a second lifting mechanism. A sealing cover is connected downward on the hanging frame. The sealing cover is downwardly aligned with the inlet of the tank body. A vacuum pump is connected to the tank body.

[0005] Further, for the above-mentioned polishing device for large-diameter optical elements, the first lifting mechanism includes: a first screw rod, a first reduction motor and a first nut. Four first screw rods are rotatably arranged on the transfer rack around the lifting rack. A first reduction motor is respectively connected to the four first screw rods. A first nut is respectively threadedly connected to the four first screw rods. The lifting rack is connected to the four first nuts.

[0006] Further, for the polishing equipment of the large-diameter optical element described above, wherein the lifting mechanism is a lifting cylinder, and the positioning block is arranged on the piston rod of the lifting cylinder.

[0007] Further, for the polishing equipment of the large-diameter optical element described above, wherein the second lifting mechanism includes: a second screw rod, a second reduction motor, and a second nut. Four second screw rods are rotatably arranged on the transfer frame around the hanging frame. A second reduction motor is connected to each of the four second screw rods. A second nut is threadedly connected to each of the four second screw rods, and the hanging frame is connected to the four second nuts.

[0008] Further, for the polishing equipment of the large-diameter optical element described above, wherein the connection structure between the base positioning block and the lifting frame is as follows: Four fixing plates aligned with the base positioning block are arranged on the lifting frame. A second trapezoidal groove adapted to the trapezoidal step is arranged on the fixing plate. The trapezoidal step on the base positioning block is clamped into the second trapezoidal groove on the fixing plate.

[0009] Further, for the polishing equipment of the large-diameter optical element described above, wherein a slide plate wider than the connecting arm is arranged on the connecting arm. A chute capable of being clamped on the slide plate is arranged on the positioning bracket. The chute on the positioning bracket is adapted to the slide plate. A number of threaded through holes are arranged on the positioning bracket, and the threaded through holes communicate with the chute. A set screw is threadedly connected in the threaded through hole, and the set screw abuts against the slide plate after passing through the threaded through hole.

[0010] Further, for the polishing equipment of the large-diameter optical element described above, wherein a rubber pad is arranged on the positioning bracket.

[0011] Further, for the polishing equipment of the large-diameter optical element described above, wherein a protective sleeve is fixedly arranged in the lifting hole.

[0012] Further, for the polishing equipment of the large-diameter optical element described above, wherein a maintenance hole is arranged on the side wall of the tank body, and a hinge door is arranged on the maintenance hole.

[0013] Further, for the polishing equipment of the large-diameter optical element described above, wherein a step is arranged on the side wall of the tank body on one side of the hinge door.

[0014] The advantages of the present invention are as follows: It can clamp, position, transport, and polish optical elements with a diameter exceeding 1500 mm. First, a universal transfer flatbed truck is used in cooperation with a positioning tooling to quickly clamp and position large-diameter optical elements. A lifting frame can be used to dock the positioning tooling with a horizontal transfer overhead crane. Then, the horizontal transfer overhead crane can transport the positioning tooling and the large-diameter optical element fixed on the positioning tooling into a vacuum chamber for polishing. By the coordinated work of the universal transfer flatbed truck, the positioning tooling, the lifting frame, and the horizontal transfer overhead crane, the problems of difficult clamping, positioning, and transportation of large-diameter optical elements in the prior art can be solved. The feeding port of the vacuum chamber is arranged on the top wall of the chamber body, which can not only cooperate with the horizontal transfer overhead crane to smoothly transport the positioning tooling and the large-diameter optical element into the vacuum chamber, but also does not require increasing the volume of the chamber body to ensure the strength of the chamber body. Setting the sealing cover as a liftable structure facilitates controlling the sealing of the sealing cover and the feeding port on the chamber body, improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 FIG. is a perspective structural schematic diagram of a polishing device for large-diameter optical elements according to the present invention.

[0016] Figure 2 FIG. Figure 1 is a structural schematic diagram in the A direction in FIG.

[0017] Figure 3 FIG. Figure 2 is a partial structural schematic diagram in the B direction in FIG. with the positioning tooling and the vacuum chamber removed.

[0018] Figure 4 FIG. Figure 2 is a partial cross-sectional structural schematic diagram in the C-C direction in FIG. with the horizontal transfer overhead crane and the vacuum chamber removed.

[0019] Figure 5 FIG. is a cross-sectional structural schematic diagram of a vacuum chamber in a polishing device for large-diameter optical elements according to the present invention.

[0020] Figure 6 FIG. Figure 1 is a perspective structural schematic diagram of the positioning tooling in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0021] The following further describes the technical solution of the present invention in conjunction with the accompanying drawings and preferred embodiments.

[0022] As shown in Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6As shown in the figure, the polishing equipment for large-aperture optical elements according to the present invention includes: a transfer rack 1, in which a lifting rack 11, a positioning tooling and a vacuum tank 2 are arranged. The lifting rack 11 is arranged in the transfer rack 1 through a first lifting mechanism. The first lifting mechanism includes: a first screw rod 12, a first reduction motor 13 and a first nut 14. Four first screw rods 12 are rotatably arranged on the transfer rack 1 around the lifting rack 11. A first reduction motor 13 is respectively connected to the four first screw rods 12. A first nut 14 is respectively threadedly connected to the four first screw rods 12. The lifting rack 11 is connected to the four first nuts 14. When the first reduction motor 13 drives the first screw rod 12 to rotate forward or backward, the first screw rod 12 drives the first nut 14 to move upward or downward through screw transmission, so as to drive the lifting rack 11 to rise or fall. The positioning tooling is arranged in the lifting rack 11. The positioning tooling includes: a protection frame 3 and a force-bearing hanging frame. Four base positioning blocks 31 are evenly distributed along the periphery of the protection frame 3 on the protection frame 3. The four base positioning blocks 31 are placed on the lifting rack 11. A trapezoidal step is arranged on the outer bottom wall of the base positioning block 31. A support adjusting rod 32 is arranged upward on the base positioning block 31. An external thread is arranged on the support adjusting rod 32. A support nut 33 is threadedly connected to the external thread of the support adjusting rod 32. A T-shaped hook 321 is arranged at the top of each support adjusting rod 32. The connection structure between the base positioning block 31 and the lifting rack 11 is: four fixing plates 111 aligned with the base positioning blocks 31 are arranged on the lifting rack 11. A second trapezoidal groove 112 adapted to the trapezoidal step on the base positioning block 31 is arranged on the fixing plate 111. The trapezoidal step on the base positioning block 42 is engaged into the second trapezoidal groove 112 on the fixing plate 111. The force-bearing hanging frame includes: a central seat 4 and four connecting arms 5. The four connecting arms 5 are connected to the central seat 4 to form a cross shape. The four connecting arms 5 are respectively sleeved on the four support adjusting rods 32. The support nut 33 on the support adjusting rod 32 supports the connecting arm 5. A positioning bracket 51 is slidably arranged on each connecting arm 5. A rubber pad 52 is arranged on the positioning bracket 51. A slide plate 53 wider than the connecting arm 5 is arranged on the connecting arm 5. A chute 54 capable of being clamped on the slide plate 53 is arranged on the positioning bracket 51. The chute 54 on the positioning bracket 51 is adapted to the slide plate 53. A number of threaded through holes 511 are arranged on the positioning bracket 51. The threaded through holes 511 are communicated with the chute 54. A set screw is threadedly connected in the threaded through hole 511. The set screw passes through the threaded through hole 511 and abuts against the slide plate 53, so as to fix the positioning bracket 51 on the connecting arm 5. A number of lifting holes are evenly spaced on the connecting arm 5. A protective sleeve 55 is fixedly arranged in the lifting hole. A suspension rod 6 capable of being connected to the optical element is inserted into any one of the lifting holes on each connecting arm 5. The suspension rod 6 extends upward from the connecting arm 5 and is threadedly connected with a locking nut 61;A universal transfer flatbed cart 7 is provided in the transfer rack 1 below the protection frame 3. The universal transfer flatbed cart 7 is a prior art and will not be elaborated here. Two mutually parallel guide rails 15 are provided in the transfer rack 1 above the force-bearing hanging frame. A horizontal transfer overhead crane 8 is slidably arranged on the two guide rails 15. Two rows of rollers 81 are provided on the horizontal transfer overhead crane 8. The two rows of rollers 81 are respectively adapted to the two guide rails 15. Four T-slot fasteners 82 are arranged downward on the horizontal transfer overhead crane 8. The four T-slot fasteners 82 on the horizontal transfer overhead crane 8 are respectively adapted to the T-hooks 321 on the four support adjusting rods 32 one by one; the two guide rails 15 extend to the transfer rack 1 above the vacuum chamber 2. The vacuum chamber 2 includes: a chamber body 21. A feed inlet is provided on the top wall of the chamber body 21. A sealing ring 211 is provided on the top wall of the chamber body 21. Four jacking mechanisms are provided in the chamber body 21. A positioning block 22 is provided on the jacking mechanism. The jacking mechanism is a lifting cylinder 23. The positioning block 22 is arranged on the piston rod of the lifting cylinder 23. A first trapezoidal groove 221 is respectively provided on the four positioning blocks 22. The first trapezoidal grooves 221 on the four positioning blocks 22 are respectively adapted to the trapezoidal steps on the four base positioning blocks 31. A three-axis motion system 9 is provided in the chamber body 21. The three-axis motion system 9 is a prior art and will not be elaborated here. An ion beam generator 91 is provided on the three-axis motion system 9. A hanging frame 16 is provided on the transfer rack 1 above the chamber body 21. The hanging frame 16 is arranged in the transfer rack 1 through a second lifting mechanism. The second lifting mechanism includes: a second screw rod 17, a second reduction motor 18 and a second nut 19. Four second screw rods 17 are rotatably arranged on the transfer rack 1 around the hanging frame 16. A second reduction motor 18 is respectively connected to the four second screw rods 17. A second nut 19 is respectively threadedly connected to the four second screw rods 17. The hanging frame 16 is connected to the four second nuts 19. When the second reduction motor 18 drives the second screw rod 17 to rotate forward or backward, the second screw rod 17 drives the second nut 19 to move upward or downward through screw transmission, thereby driving the hanging frame 16 to rise or fall. A sealing cover 24 is connected downward on the hanging frame 16. The sealing cover 24 is downwardly aligned with the feed inlet of the chamber body 21. A vacuum pump 212 is connected to the chamber body 21. An inspection hole is provided on the side wall of the chamber body 21. A hinge door 25 is provided on the inspection hole. A step 26 is provided on the side wall of the chamber body 21 on one side of the hinge door 25.;

[0023] The working process of the present invention is as follows: Place the optical element on the universal transfer flatbed truck 7. Four suspension rods 6 are respectively connected to the four hoisting parts of the optical element. Then, according to the thickness of the optical element, first adjust the positions of the support nuts 33 on the four support adjusting rods 32 in the positioning tooling. Start the first lifting mechanism to drive the lifting frame 11 and the positioning tooling connected to the lifting frame 11 to rise into the air. Then drive the universal transfer flatbed truck 7 to transport the optical element to the lower part of the positioning tooling. Then start the first lifting mechanism to drive the lifting frame 11 and the positioning tooling to descend until the four suspension rods 6 respectively pass through the hoisting holes of their corresponding connecting arms 5 upward. Then use the locking nuts 61 to lock the suspension rods 6 on their corresponding connecting arms 5. Then slide the positioning bracket 51 along the slide plate 53 so that the rubber pad 52 on the positioning bracket 51 abuts against the side wall of the optical element. Finally, pass the set screw through the threaded through hole 511 on the positioning bracket 51 to fix the positioning bracket 51. The four positioning brackets 51 respectively abut against the four side walls of the optical element to ensure that the optical element does not shake in the horizontal direction. Then start the first lifting mechanism to drive the lifting frame 11 to drive the positioning tooling and the optical element to rise together until the T-shaped hooks 321 on the four support adjusting rods 32 in the positioning tooling respectively engage with the four T-shaped slot buckles 82 on the horizontal transfer overhead crane 8. At this time, the positioning tooling is hoisted on the horizontal transfer overhead crane 8, and the universal transfer flatbed truck 7 drives away from the transfer rack 1. Then start the first lifting mechanism to drive the lifting frame 11 to descend and reset. In the above process, start the second lifting mechanism to drive the hanging frame 16 to drive the sealing cover 24 to rise until it passes over the guide rail 15 upward. Then the horizontal transfer overhead crane 8 can transport the positioning tooling and the optical element on the positioning tooling together to directly above the tank body 21 along the guide rail 15. At the same time, start the lifting cylinder 23 so that the piston rods in the four lifting cylinders 23 jack up the positioning blocks 22 upward until the first trapezoidal grooves 221 on the four positioning blocks 22 respectively cooperate with the trapezoidal steps on the base positioning blocks 31. Then disengage the four T-shaped slot buckles 82 on the horizontal transfer overhead crane 8 from the T-shaped hooks 321 on the four support adjusting rods 32. The horizontal transfer overhead crane 8 resets along the guide rail 15. Then start the four lifting cylinders 23 simultaneously so that the piston rods in the four lifting cylinders 23 descend simultaneously, thereby driving the positioning tooling and the optical element on the positioning tooling to descend into the tank body 21 together. Then the second lifting mechanism drives the hanging frame 16 to drive the sealing cover 24 to descend until the sealing cover 24 covers the feed port of the tank body 21 and is tightly sealed against the sealing ring 211. Then use a vacuum pump to evacuate the vacuum tank 2. After the evacuation is completed, start the three-axis motion system 9 and the ion beam generator 91 to perform ion beam polishing on the optical element.

[0024] The advantages of the present invention are as follows: It can clamp, position, transport, and polish optical elements with a diameter exceeding 1500 mm. First, a universal transfer flatbed truck and a positioning tooling can be used to quickly clamp and position large-diameter optical elements. A lifting frame can be used to dock the positioning tooling with a horizontal transfer overhead crane. Then, the horizontal transfer overhead crane can transport the positioning tooling and the large-diameter optical element fixed on the positioning tooling into a vacuum chamber for polishing. By the coordinated work among the universal transfer flatbed truck, the positioning tooling, the lifting frame, and the horizontal transfer overhead crane, the problems of difficult clamping, positioning, and transportation of large-diameter optical elements in the prior art can be solved. The feed inlet of the vacuum chamber is arranged on the top wall of the chamber body, which can not only cooperate with the horizontal transfer overhead crane to smoothly transport the positioning tooling and the large-diameter optical element into the vacuum chamber, but also does not require increasing the volume of the chamber body to ensure the strength of the chamber body. Setting the sealing cover as a liftable structure facilitates controlling the sealing of the sealing cover and the feed inlet on the chamber body, improving work efficiency.

Claims

1. Polishing equipment for large-aperture optical elements, comprising: Transfer rack, characterized in that: a lifting frame, a positioning tooling and a vacuum tank are arranged in the transfer rack; the lifting frame is arranged in the transfer rack through a first lifting mechanism; the positioning tooling is arranged in the lifting frame; the positioning tooling includes: a protection frame and a force-bearing hanging frame; four base positioning blocks are evenly distributed along the periphery of the protection frame; the four base positioning blocks are placed on the lifting frame; a trapezoidal step is arranged on the outer side wall at the bottom of the base positioning block; a support adjusting rod is arranged upward on the base positioning block; an external thread is arranged on the support adjusting rod; a support nut is threadedly connected to the external thread of the support adjusting rod; a T-shaped hook is arranged at the top of each support adjusting rod; the force-bearing hanging frame includes: a center seat and four connecting arms; the four connecting arms are connected to the center seat to form a cross shape; the four connecting arms are respectively sleeved on the four support adjusting rods; the support nuts on the support adjusting rods support the connecting arms; a positioning bracket is slidably arranged on each connecting arm; a plurality of lifting holes are evenly spaced on the connecting arms; a suspension rod capable of being connected to an optical element is arranged in any one of the lifting holes on each connecting arm; the suspension rod extends upward from the connecting arm and is threadedly connected with a locking nut; a universal transfer flatbed truck is arranged in the transfer rack below the protection frame; two parallel guide rails are arranged in the transfer rack above the force-bearing hanging frame; a horizontal transfer overhead crane is slidably arranged on the two guide rails; four T-shaped slot buckles are arranged downward on the horizontal transfer overhead crane; the four T-shaped slot buckles on the horizontal transfer overhead crane are respectively adapted to the T-shaped hooks on the four support adjusting rods; the two guide rails extend to the transfer rack above the vacuum tank; the vacuum tank includes: a tank body; a feed inlet is arranged on the top wall of the tank body; a sealing ring is arranged on the top wall of the tank body; four lifting mechanisms are arranged in the tank body; a positioning block is arranged on the lifting mechanism; a first trapezoidal groove is arranged on each of the four positioning blocks; the first trapezoidal grooves on the four positioning blocks are respectively adapted to the trapezoidal steps on the four base positioning blocks; a three-axis motion system is arranged in the tank body; an ion beam generator is arranged on the three-axis motion system; a hanging frame is arranged on the transfer rack above the tank body; the hanging frame is arranged in the transfer rack through a second lifting mechanism; a sealing cover is connected downward to the hanging frame; the sealing cover is downwardly aligned with the feed inlet of the tank body; a vacuum pump is connected to the tank body; The first lifting mechanism includes: a first screw rod, a first reduction motor and a first nut; four first screw rods are rotatably arranged on the transfer rack around the lifting frame; a first reduction motor is respectively connected to the four first screw rods; a first nut is respectively threadedly connected to the four first screw rods; the lifting frame is connected to the four first nuts; The lifting mechanism is a lifting cylinder; the positioning block is arranged on the piston rod of the lifting cylinder; The second lifting mechanism includes: a second screw rod, a second reduction motor and a second nut; four second screw rods are rotatably arranged on the transfer rack around the hanging frame; a second reduction motor is respectively connected to the four second screw rods; a second nut is respectively threadedly connected to the four second screw rods; the hanging frame is connected to the four second nuts.

2. The polishing equipment for large-aperture optical elements according to claim 1, characterized in that: The connection structure between the base positioning block and the lifting frame is as follows: Four fixing plates aligned with the base positioning block one by one are arranged on the lifting frame, and second trapezoidal grooves adapted to the trapezoidal steps are arranged on the fixing plates. The trapezoidal steps on the base positioning block are inserted into the second trapezoidal grooves on the fixing plates.

3. The polishing equipment for large-aperture optical elements according to claim 1, characterized in that: A sliding plate wider than the connecting arm is arranged on the connecting arm, and a chute capable of being clamped on the sliding plate is arranged on the positioning bracket. The chute on the positioning bracket is adapted to the sliding plate. A number of threaded through holes are arranged on the positioning bracket, and the threaded through holes are communicated with the chute. A set screw is threadedly connected in the threaded through hole, and the set screw abuts against the sliding plate after passing through the threaded through hole.

4. The polishing equipment for large-aperture optical elements according to claim 1, characterized in that: A rubber pad is arranged on the positioning bracket.

5. The polishing equipment for large-aperture optical elements according to claim 1, characterized in that: A protective sleeve is fixedly arranged in the lifting hole.

6. The polishing equipment for large-aperture optical elements according to claim 1, characterized in that: An inspection hole is arranged on the side wall of the tank body, and a hinged door is arranged on the inspection hole.

7. The polishing equipment for large-aperture optical elements according to claim 6, characterized in that: Steps are arranged on the side wall of the tank body on one side of the hinged door.

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