A high frequency plasma light source generating device and system

Abstract

The present invention provides a high-frequency plasma light source generating device and system, the device comprises: a lifting mechanism, an atomizer, a torch tube and an induction coil, the top of the atomizer is provided with an air outlet pipe, the upper part of the air outlet pipe extends into the torch tube, the air outlet pipe and the torch tube are connected through a ferrule convenient for clamping by a manipulator, the induction coil is arranged above the torch tube, the atomizer is arranged on the lifting mechanism through a fixed bracket convenient for clamping by a manipulator, the lifting mechanism is used to drive the atomizer and the torch tube to move as a whole, so that the torch tube extends into the induction coil. By modifying the device for applicability, it is convenient for the manipulator to perform remote operation, and it is combined with a shielding room or other radioactive chambers to design water, electricity, gas, etc. from outside the shielding room into the shielding room, so that remote direct analysis of highly radioactive samples can be realized, and it has the characteristics of simple operation, easy maintenance, good safety, etc.

Description

Technical Field

[0001] The present invention specifically relates to a high-frequency plasma light source generating device and system. Background Art

[0002] High-frequency plasma light source is the most widely used plasma light source at present. It is usually used as an excitation light source for elemental analysis. It has the advantages of high excitation efficiency and good stability. In some nuclear facilities, such as post-processing plants, radiochemical analysis laboratories, etc., it is usually necessary to perform elemental analysis on radioactive samples to obtain key data on the composition of the samples. Because the samples are radioactive, personnel cannot operate directly and need to operate in a shielded room (a box room with a certain thickness of concrete or carbon steel shielding). In particular, the analysis of highly radioactive samples requires a manipulator to assist in the operation. At present, there is no high-frequency plasma light source generator specifically for use in radioactive environments such as shielded rooms. The existing commercially available generators are difficult to meet the operating requirements of the manipulator, and the use, inspection, and maintenance operations are difficult to achieve. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a high-frequency plasma light source generating device suitable for use in radioactive environments such as shielded rooms and convenient for manipulator operation, and also provide a system having the device accordingly.

[0004] The technical solution adopted to solve the technical problem of the present invention is:

[0005] The present invention provides a high-frequency plasma light source generating device, comprising: a lifting mechanism, an atomizer, a torch tube and an induction coil.

[0006] The top of the atomizer is provided with an air outlet pipe, the upper part of which extends into the torch tube, and the air outlet pipe and the torch tube are connected by a ferrule that is convenient for the robot to clamp.

[0007] The induction coil is arranged above the torch tube, and the atomizer is arranged on the lifting mechanism through a fixed bracket which is convenient for the robot to clamp. The lifting mechanism is used to drive the atomizer and the torch tube to move as a whole so that the torch tube extends into the induction coil.

[0008] The lower part of the gas outlet pipe and the lower part of the torch tube are both sleeved in a ferrule, and the outer wall of the ferrule is provided with a groove for facilitating clamping by a robot.

[0009] The ferrule and fixing bracket are made of, but not limited to, polyetheretherketone (PEEK ) , plastic, polyethylene, and polypropylene.

[0010] Optionally, the lower part of the ferrule is sleeved on the gas outlet pipe, and the upper part of the ferrule is sleeved in the torch tube, and the middle part is provided with a groove for easy clamping by a robot.

[0011] Optionally, the lifting mechanism includes a chassis, a driving mechanism and a lifting platform, the fixed bracket is slidably disposed on the lifting platform, and the driving mechanism is connected between the chassis and the lifting platform to drive the lifting platform to rise and fall relative to the chassis.

[0012] The present invention also provides a high-frequency plasma light source generating system, comprising a shielding room, a high-voltage discharge device, a gas source, and the high-frequency plasma light source generating device.

[0013] The high-voltage discharge device and the gas source are both arranged outside the shielding room, the high-frequency plasma light source generating device is arranged inside the shielding room, the gas source is connected to the atomizer, and is used to deliver the working gas into the atomizer, and the atomizer is also used to be connected to the sample source sent into the shielding room, and is used to atomize the sample entering therein,

[0014] The high-voltage discharge device is electrically connected to the induction coil and is used to input high-voltage current into the induction coil so that the induction coil generates an alternating magnetic field and generates high-frequency sparks in the torch tube so that the working gas and aerosol sample in the torch tube are continuously ionized under the action of the alternating magnetic field.

[0015] Optionally, the high-voltage discharge device includes a high-frequency generator and a high-voltage igniter.

[0016] A high-frequency cable is provided between the high-frequency generator and the induction coil, one end of the high-frequency cable is electrically connected to the high-frequency generator, and the other end of the high-frequency cable is electrically connected to the induction coil after passing through the shielding room.

[0017] A high-voltage cable is arranged between the high-voltage igniter and the torch tube, one end of the high-voltage cable is electrically connected to the high-voltage igniter, and the other end of the high-voltage cable passes through the shielding room and is arranged close to the torch tube.

[0018] Optionally, the high-frequency cable includes a first high-frequency cable segment and a second high-frequency cable segment, one end of the first high-frequency cable segment is electrically connected to the high-frequency generator after passing through the shielding room, one end of the second high-frequency cable segment is electrically connected to the induction coil, and the other end of the first high-frequency cable segment and the other end of the second high-frequency cable segment are electrically connected via a first quick-change connector.

[0019] Optionally, the high-voltage cable includes a first high-voltage cable segment and a second high-voltage cable segment, one end of the first high-voltage cable segment is electrically connected to the high-voltage igniter after passing through the shielding room, one end of the second high-voltage cable segment is arranged close to the torch tube, and the other end of the first high-voltage cable segment and the other end of the second high-voltage cable segment are electrically connected through a second quick-change connector.

[0020] Optionally, an air pipe is connected between the air source and the nebulizer, and the air pipe includes a first air pipe segment and a second air pipe segment, one end of the first air pipe segment is connected to the air source after passing through the shielding room, one end of the second air pipe segment is connected to the nebulizer, and the other end of the first air pipe segment and the other end of the air pipe segment are connected through a third quick-change connector.

[0021] Optionally, the second air pipe segment is also connected to a third air pipe segment and a fourth air pipe segment, and the third air pipe segment and the fourth air pipe segment are both connected to the torch tube.

[0022] Optionally, a water source is further included, and the water source is connected to the induction coil through a water pipe for cooling the induction coil.

[0023] The water pipe includes a first water pipe section and a second water pipe section. One end of the first water pipe section is connected to a water source after passing through the shielding room, one end of the second water pipe section is connected to the induction coil, and the other end of the first water pipe section is connected to the other end of the water pipe section through a fourth quick-change connector.

[0024] In the present invention, since both the atomizer and the torch are made of fragile quartz glass, a fixing bracket which is convenient for a robot to operate is provided at the bottom of the atomizer, and a clamping sleeve which is convenient for a robot to clamp is provided between the atomizer and the torch, so that the atomizer and the base, and the atomizer and the torch can be simply and quickly installed and removed, and a lifting mechanism can be provided to accurately insert the torch into the coil of the high-voltage discharge device, so that the present invention can realize the rapid installation, use, inspection and maintenance of the high-frequency plasma light source generating device, and the device is particularly suitable for radioactive environments such as shielding rooms.

[0025] By combining it with a shielded room or other radioactive chambers, and introducing water, electricity, gas, etc. into the shielded room from outside the shielded room, remote and direct analysis of highly radioactive samples can be achieved, avoiding dilution of the samples to reduce the radioactivity level. It has the characteristics of simple operation, easy maintenance, and good safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a schematic structural diagram of the high-frequency plasma light source generating device provided in Example 1 of the present invention.

[0027] In the figure: 1. atomizer; 2. torch tube; 3. induction coil; 4. ferrule; 5. fixing bracket; 6. exhaust pipe; 7. driving mechanism; 8. lifting platform; 9. shielding room; 10. gas source; 11. high-frequency generator; 12. high-voltage igniter; 13. high-frequency cable; 14. high-voltage cable; 15. first quick-change connector; 16. second quick-change connector; 17. gas pipe; 18. third quick-change connector; 19. water source; 20. water pipe; 21. penetration. DETAILED DESCRIPTION

[0028] The following will be combined with the accompanying drawings in the present invention to clearly and completely describe the technical solutions in the invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of the present invention.

[0029] In the description of the present invention, it should be noted that the directions or positional relationships indicated by “upper” and the like are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience and simplification of the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0030] In the description of the present invention, the terms “first” and “second” are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connect", "set", "install", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] The present invention provides a high-frequency plasma light source generating device, comprising: a lifting mechanism, an atomizer, a torch tube and an induction coil.

[0033] The top of the atomizer is provided with an air outlet pipe, the upper part of which extends into the torch tube, and the air outlet pipe and the torch tube are connected by a ferrule that is convenient for the robot to clamp.

[0034] The induction coil is arranged above the torch tube, and the atomizer is arranged on the lifting mechanism through a fixed bracket which is convenient for the robot to clamp. The lifting mechanism is used to drive the atomizer and the torch tube to move as a whole so that the torch tube extends into the induction coil.

[0035] The present invention also provides a high-frequency plasma light source generating system, comprising a shielding room, a high-voltage discharge device, a gas source, and the high-frequency plasma light source generating device.

[0036] The high-voltage discharge device and the gas source are both arranged outside the shielding room, the high-frequency plasma light source generating device is arranged inside the shielding room, the gas source is connected to the atomizer, and is used to deliver the working gas into the atomizer, and the atomizer is also used to be connected to the sample source sent into the shielding room, and is used to atomize the sample entering therein,

[0037] The high-voltage discharge device is electrically connected to the induction coil and is used to input high-voltage current into the induction coil so that the induction coil generates an alternating magnetic field and generates high-frequency sparks in the torch tube so that the working gas and aerosol sample in the torch tube are continuously ionized under the action of the alternating magnetic field.

[0038] Embodiment 1:

[0039] like Figure 1 As shown, this embodiment provides a high-frequency plasma light source generating device, including: a lifting mechanism, an atomizer 1, a torch tube 2 and an induction coil 3,

[0040] An air outlet pipe 6 is provided at the top of the atomizer 1, and the upper part of the air outlet pipe 6 extends into the torch tube 2. The air outlet pipe 6 and the torch tube 2 are connected through a ferrule 4 that is convenient for the robot to clamp.

[0041] The induction coil 3 is arranged above the torch tube 2, and the atomizer 1 is arranged on the lifting mechanism through a fixed bracket 5 which is convenient for the robot to clamp. The lifting mechanism is used to drive the atomizer 1 and the torch tube 2 to move as a whole so that the upper part of the torch tube extends into the induction coil 3.

[0042] Since the atomizer 1 and the torch tube 2 are both made of fragile quartz glass, this embodiment provides a fixing bracket 5 that is easy to operate mechanically at the bottom of the atomizer 1, and provides a clamping sleeve 4 that is easy to clamp by a robot between the atomizer 1 and the torch tube 2, so as to achieve simple and rapid installation and removal of the atomizer 1 and the base, and the atomizer 1 and the torch tube 2. In addition, a lifting mechanism is provided to enable the torch tube 2 to be accurately inserted into the induction coil 3 of the high-voltage discharge device, so that the present invention can achieve rapid installation, use, inspection and maintenance operations of the high-frequency plasma light source generating device, and the device is particularly suitable for radioactive environments such as shielded rooms.

[0043] By combining it with a shielded room or other radioactive chambers, water, electricity, gas, etc. can be introduced into the shielded room from outside the shielded room, so that remote and direct analysis of highly radioactive samples can be achieved. It has the characteristics of simple operation, easy maintenance and good safety.

[0044] In this embodiment, the lower part of the gas outlet pipe 6 and the lower part of the torch tube 2 are both sleeved in the ferrule 4, and the outer wall of the ferrule 4 is provided with a groove for easy clamping by a robot.

[0045] Therefore, the connection between the nebulizer and the torch tube is designed to be a structure that is easily disassembled by a robot. The robot only needs to clamp the torch tube 2 and pull it upward to separate the torch tube 2 from the nebulizer 1.

[0046] Specifically, the ferrule 4 is made of acid-, alkali-, and radiation-resistant materials such as PEEK, plastic, polyethylene, and polypropylene. A groove is arranged on the outside of the ferrule 4 to facilitate clamping by the fingers of the robot, thereby preventing the torch tube 2 and the ferrule 4 from slipping. The ferrule 4 extends out from the bottom of the torch tube 2. The robot clamps the ferrule 4 and inserts the air outlet pipe 6 at the top of the nebulizer 1 into the ferrule 4 by pressing, thereby connecting the nebulizer 1 to the bottom of the torch tube 2. When dismantling, the robot clamps the ferrule 4 and pulls it outward to separate the torch tube 2 and the nebulizer 1.

[0047] In this embodiment, the lifting mechanism includes a chassis, a driving mechanism 7 and a lifting platform 8. The fixed bracket 5 is slidably arranged on the lifting platform 8. The driving mechanism 7 is connected between the chassis and the lifting platform 8 and is used to drive the lifting platform 8 to rise and fall relative to the chassis.

[0048] The high-frequency generator is one of the key components for generating a plasma light source. The induction coil 3 on the high-frequency generator needs to be wrapped around the upper part of the torch tube 2. The manipulator cannot directly remove the torch tube 2 or the induction coil 3. In order to facilitate the installation and maintenance of the components, a lifting mechanism is provided in this embodiment, and the atomizer 1 and the torch tube 2 are lifted and lowered by the lifting mechanism so that the torch tube 2 and the induction coil 3 can be positioned or detached.

[0049] The chassis, lifting platform 8 and driving mechanism 7 are all made of stainless steel. The legs of the chassis are fixed to the floor of the shielding room. The chassis is used to fix the position of the entire lifting mechanism and provide support. The atomizer and torch tube are placed on the lifting platform 8. The driving mechanism 7 is used to drive the lifting platform 8 to move in the vertical direction and can be fixed at any position in the stroke. It is used for positioning and disassembling the torch tube 2. The driving mechanism 7 can be manual, electric or pneumatic. The moving stroke of the lifting platform 8 is greater than or equal to 40 mm, and the positioning accuracy is less than or equal to 0.1 mm.

[0050] When the driving mechanism 7 is driven manually, the driving mechanism 7 can be in the form of a bottom counterweight, and stainless steel counterweights, steel wire ropes and stainless steel pulleys of different weights are set under the chassis. The difference in the weight of the counterweights drives the steel wire rope to move on the pulley, and the steel wire rope pulls the slide bar to move. The slide bar is welded and fixed to the lifting platform 8, thereby driving the lifting platform 8 to move up and down. It can also be driven by a sprocket drive, and a manipulator can be set to clamp and rotate a handle, a sprocket and a chain are set at the bottom of the handle, and a lead screw is set at the bottom of the lifting platform 8. The sprocket and chain drive the lead screw to rotate, so that the lifting platform 8 moves up and down. Regardless of the bottom counterweight or sprocket drive, a mechanical limit block can be used to ensure that the moving stroke of the lifting platform 8 does not exceed the design range.

[0051] When the above-mentioned driving mechanism 7 adopts an electric mode, a radiation-resistant motor is selected, and the motor is placed in the shielding room. The rapid rotation of the motor drives the screw to rotate; when the pneumatic mode is adopted, a cylinder is set in the shielding room, and compressed air is introduced into the shielding room from outside the shielding room. The cylinder drives the movement of the lifting platform 8.

[0052] The lifting platform 8 is provided with guide rails, limit blocks, lockers, slots and ribs. When installing the atomizer 1, the manipulator clamps the fixed bracket 5 at the bottom of the atomizer 1, places the atomizer 1 on the lifting platform 8, pushes the atomizer 1 to the limit block through the guide rails, and then locks the fixed bracket 5 at the bottom of the atomizer 1 with the slot on the lifting platform 8 through the locker to achieve accurate positioning of the atomizer 1. The function of the rib is to prevent the atomizer 1 from falling.

[0053] Embodiment 2:

[0054] The high-frequency plasma light source generating system of this embodiment includes a shielding room 9, a high-voltage discharge device, a gas source 10, and the high-frequency plasma light source generating device of embodiment 1.

[0055] The high-voltage discharge device and the gas source 10 are both arranged outside the shielding room 9, and the high-frequency plasma light source generating device is arranged inside the shielding room 9. The gas source 10 is connected to the atomizer 1 for conveying working gas into the atomizer 1. The atomizer 1 is also used to be connected to a sample source sent into the shielding room 9 and to atomize the sample entering therein.

[0056] The high-voltage discharge device is electrically connected to the induction coil 3 and is used to input a high-voltage current into the induction coil 3 so that the induction coil 3 generates an alternating magnetic field and generates a high-frequency spark in the torch tube 2 so that the working gas and aerosol sample in the torch tube 2 are continuously ionized under the action of the alternating magnetic field.

[0057] In this embodiment, the high-voltage discharge device includes a high-frequency generator 11 and a high-voltage igniter 12.

[0058] A high-frequency cable 13 is provided between the high-frequency generator 11 and the induction coil 3. One end of the high-frequency cable 13 is electrically connected to the high-frequency generator 11, and the other end of the high-frequency cable 13 is electrically connected to the induction coil 3 after passing through the shielding room 9.

[0059] A high voltage cable 14 is provided between the high voltage igniter 12 and the torch tube 2 . One end of the high voltage cable 14 is electrically connected to the high voltage igniter 12 , and the other end of the high voltage cable 14 passes through the shielding room 9 and is provided close to the torch tube 2 .

[0060] In this embodiment,

[0061] The high-frequency cable 13 includes a first high-frequency cable segment and a second high-frequency cable segment. One end of the first high-frequency cable segment is electrically connected to the high-frequency generator 11 after passing through the shielding room 9, one end of the second high-frequency cable segment is electrically connected to the induction coil 3, and the other end of the first high-frequency cable segment and the other end of the second high-frequency cable segment are electrically connected through a first quick-change connector 15.

[0062] In this embodiment,

[0063] The high-voltage cable 14 includes a first high-voltage cable segment and a second high-voltage cable segment. One end of the first high-voltage cable segment is electrically connected to the high-voltage igniter 12 after passing through the shielding room 9. One end of the second high-voltage cable segment is arranged close to the torch tube 2. The other end of the first high-voltage cable segment and the other end of the second high-voltage cable segment are electrically connected through a second quick-change connector 16.

[0064] In this embodiment, an air pipe 17 is connected between the air source 10 and the nebulizer 1. The air pipe 17 includes a first air pipe section and a second air pipe section. One end of the first air pipe section is connected to the air source 10 after passing through the shielding room 9, one end of the second air pipe section is connected to the nebulizer 1, and the other end of the first air pipe section and the other end of the air pipe section are connected through a third quick-change connector 18.

[0065] In this embodiment, the second air pipe segment is also connected to a third air pipe segment and a fourth air pipe segment, and the third air pipe segment and the fourth air pipe segment are both connected to the torch tube 2 .

[0066] In this embodiment, a water source 19 is also included. The water source 19 and the induction coil 3 are connected through a water pipe 20 for cooling the induction coil 3.

[0067] The water pipe 20 includes a first water pipe section and a second water pipe section. One end of the first water pipe section passes through the shielding room 9 and is connected to the water source 19, one end of the second water pipe section is connected to the induction coil 3, and the other end of the first water pipe section and the other end of the second water pipe section are connected through a fourth quick-change connector.

[0068] The water, gas and electricity required for the device are introduced from outside the shielding room 9. The cables pass through the shielding room 9 through the penetration piece 21 and are connected to the components in the shielding room through the quick-change connector. The interface between the cable and the shielding room is sealed by welding, sealing gaskets, sealing rings, etc. to prevent leakage of radioactive atmosphere. The quick-change connector is easy for the robot to operate, and the robot can quickly disconnect and connect the cables through simple pressing and plugging operations.

[0069] The above-mentioned water, electricity and gas cables are radiation-resistant cables, and can be made of acid-, alkali-resistant and radiation-resistant materials such as stainless steel, PEEK, plastic, polyethylene, or have radiation-resistant coatings applied externally.

[0070] The sample analysis process is as follows: argon gas is introduced into the shielding room 9 through the gas source 10 outside the shielding room 9, and acts on the torch tube 2 and the nebulizer 1 respectively; a high-frequency signal is introduced into the shielding room 9 through the high-frequency generator 11 outside the shielding room 9 via the high-frequency cable 13, acts on the induction coil 3 and generates a strong oscillating magnetic field; a high-voltage igniter 12 outside the shielding room 9 acts on the torch tube 2 through the high-voltage cable 14, and then a plasma light source is formed above the torch tube 2; the sample to be tested enters the nebulizer 1 through the reagent tube, is atomized in the nebulizer 1, and then enters the torch tube 2; the element to be tested in the sample is excited on the plasma light source and emits characteristic light.

[0071] The system of this embodiment improves the high-frequency plasma light source generating device to be suitable for robot operation and combines it with a shielded room design to facilitate remote installation, use, inspection and maintenance operations by the robot. It is particularly suitable for radioactive environments where personnel cannot operate directly and require robot assistance to achieve analysis of radioactive samples.

[0072] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A high-frequency plasma light source generating system, characterized in that: It includes a shielding room (9), a high-voltage discharge device, a gas source (10), and a high-frequency plasma light source generating device, The high-frequency plasma light source generating device comprises: a lifting mechanism, an atomizer (1), a torch (2) and an induction coil (3). An air outlet pipe (6) is provided on the top of the atomizer (1), the upper portion of the air outlet pipe (6) extends into the torch tube (2), and the air outlet pipe (6) and the torch tube (2) are connected via a ferrule (4) that is convenient for a robot to clamp. The induction coil (3) is arranged above the torch tube (2), and the atomizer (1) is arranged on a lifting mechanism through a fixed bracket (5) that is convenient for a robot to clamp, and the lifting mechanism is used to drive the atomizer (1) and the torch tube (2) to move as a whole, so that the torch tube extends into the induction coil (3); The lower part of the gas outlet pipe (6) and the lower part of the torch tube (2) are both sleeved in the ferrule (4), and the outer wall of the ferrule (4) is provided with a groove for facilitating clamping by a manipulator; the ferrule extends out of the bottom of the rectangular tube; The lifting mechanism comprises a lifting platform (8), on which a guide rail, a limit block, a locker, a slot and a retaining edge are arranged. The atomizer (1) is pushed to the limit block by the guide rail, and then the fixed bracket (5) at the bottom of the atomizer is locked and fixed to the slot on the lifting platform by the locker; The lifting mechanism further comprises a chassis and a driving mechanism (7), the fixed bracket (5) is slidably mounted on the lifting platform (8), and the driving mechanism (7) is connected between the chassis and the lifting platform (8) and is used to drive the lifting platform (8) to move up and down relative to the chassis; The high-voltage discharge device and the gas source (10) are both arranged outside the shielding room (9), and the high-frequency plasma light source generating device is arranged inside the shielding room (9). The gas source (10) is connected to the atomizer (1) and is used to deliver working gas into the atomizer (1). The atomizer (1) is also used to be connected to a sample source sent into the shielding room (9) and is used to atomize the sample entering the atomizer. The high-voltage discharge device is electrically connected to the induction coil (3) and is used to input a high-voltage current into the induction coil (3) so that the induction coil (3) generates an alternating magnetic field and generates a high-frequency spark in the torch tube (2) so that the working gas and the aerosol sample in the torch tube (2) are continuously ionized under the action of the alternating magnetic field; The high-voltage discharge device comprises a high-frequency generator (11) and a high-voltage igniter (12). A high-frequency cable (13) is provided between the high-frequency generator (11) and the induction coil (3), one end of the high-frequency cable (13) is electrically connected to the high-frequency generator (11), and the other end of the high-frequency cable (13) is electrically connected to the induction coil (3) after passing through the shielding room (9). A high-voltage cable (14) is provided between the high-voltage igniter (12) and the torch tube (2), one end of the high-voltage cable (14) is electrically connected to the high-voltage igniter (12), and the other end passes through the shielding room (9) and is provided close to the torch tube (2); An air pipe (17) is connected between the air source (10) and the atomizer (1), and the air pipe (17) includes a first air pipe section and a second air pipe section, one end of the first air pipe section passes through the shielding room (9) and is connected to the air source (10), one end of the second air pipe section is connected to the atomizer (1), and the other end of the first air pipe section and the other end of the second air pipe section are connected via a third quick-change joint (18); The second air pipe section is also connected to a third air pipe section and a fourth air pipe section, and the third air pipe section and the fourth air pipe section are both connected to the torch tube (2).

2. The high-frequency plasma light source generating system according to claim 1, characterized in that: The high-frequency cable (13) includes a first high-frequency cable segment and a second high-frequency cable segment, one end of the first high-frequency cable segment is electrically connected to the high-frequency generator (11) after passing through the shielding room (9), one end of the second high-frequency cable segment is electrically connected to the induction coil (3), and the other end of the first high-frequency cable segment and the other end of the second high-frequency cable segment are electrically connected via a first quick-change connector (15).

3. The high-frequency plasma light source generating system according to claim 1, characterized in that: The high-voltage cable (14) includes a first high-voltage cable segment and a second high-voltage cable segment, one end of the first high-voltage cable segment passes through the shielding room (9) and is electrically connected to the high-voltage igniter (12), one end of the second high-voltage cable segment is arranged close to the torch tube (2), and the other end of the first high-voltage cable segment and the other end of the second high-voltage cable segment are electrically connected via a second quick-change connector (16).

4. The high-frequency plasma light source generating system according to any one of claims 1 to 3, characterized in that: It also includes a water source (19), wherein the water source (19) and the induction coil (3) are connected via a water pipe (20) for cooling the induction coil (3). The water pipe (20) comprises a first water pipe section and a second water pipe section, one end of the first water pipe section passes through the shielding room (9) and is connected to the water source (19), one end of the second water pipe section is connected to the induction coil (3), and the other end of the first water pipe section and the other end of the water pipe section are connected via a fourth quick-change joint.

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