Method of manufacturing a mask frame assembly

Abstract

A method of manufacturing a mask frame assembly can include the steps of: providing a first bar extending in a first direction on a frame; providing a second bar extending in a second direction intersecting the first direction on the first bar; providing a mask on the second bar, the mask including a plurality of deposition pattern portions arranged in the second direction; fixing the mask to the second bar; and correcting a shape of the mask by welding the second bar.

Description

Technical Field

[0001] This invention relates to a mask frame assembly for deposition. More specifically, this invention relates to a mask frame assembly for precise deposition and a method for manufacturing the mask frame assembly. Background Technology

[0002] Organic light-emitting display devices may include organic light-emitting elements that emit light based on electrical signals. The organic light-emitting elements may include: electrodes facing each other; and a light-emitting layer disposed between the electrodes, generating light based on an electric field formed between the electrodes. To form the light-emitting layer, a vacuum deposition method is typically used, which utilizes a deposition source and a mask frame assembly.

[0003] In the deposition process utilizing the mask frame assembly, the mask contained within the assembly may deform due to thermal expansion or weight. This can result in a shadow effect, where the light-emitting layer is not precisely deposited on the electrodes. Summary of the Invention

[0004] One object of the present invention is to provide a method for manufacturing a mask frame assembly that enables relatively simple mask repair.

[0005] However, the purpose of this invention is not limited to this purpose, and various extensions can be made without departing from the spirit and scope of this invention.

[0006] To achieve the aforementioned objective of the present invention, a method for manufacturing a mask frame assembly according to an embodiment may include the following steps: providing a first rod extending along a first direction on a frame; providing a second rod extending along a second direction intersecting the first direction on the first rod; providing a mask on the second rod, the mask including a plurality of deposited pattern portions arranged along the second direction; fixing the mask to the second rod; and correcting the shape of the mask by welding the second rod.

[0007] In one embodiment, during the step of welding the second rod, the mask can be deformed from a curved shape to a flat shape.

[0008] In one embodiment, the step of welding the second rod may include irradiating the second rod with a pulsed laser.

[0009] In one embodiment, the pulsed laser may be directed to the center of the second rod along the second direction.

[0010] In one embodiment, the pulsed laser can be irradiated onto the portion of the center of the second rod that does not overlap with the mask.

[0011] In one embodiment, during the welding of the second rod, the second rod can be deformed from a flat shape to a curved shape.

[0012] In one embodiment, the step of fixing the mask to the second rod may include: cross-welding the mask onto the second rod.

[0013] In one embodiment, the method of manufacturing the mask frame assembly may further include the following steps: after the step of setting the mask and before the step of fixing the mask to the second rod, depositing a deposition material onto the substrate through the deposition pattern portion.

[0014] To achieve the aforementioned objective of the present invention, a method for manufacturing a mask frame assembly according to an embodiment may include the following steps: providing a second rod extending along a first direction on a frame; providing a plurality of first rods on the second rod, the plurality of first rods extending along a second direction intersecting the first direction and arranged along the first direction; providing a mask on the plurality of first rods, the mask including a plurality of deposited pattern portions arranged along the first direction; fixing the mask to the plurality of first rods; and correcting the shape of the mask by welding the plurality of first rods.

[0015] In one embodiment, during the step of welding the plurality of first rods, the mask can be deformed from a curved shape to a flat shape.

[0016] In one embodiment, the step of welding the plurality of first bars may include irradiating the plurality of first bars with a pulsed laser.

[0017] In one embodiment, the plurality of first rods may include: a central first rod that overlaps with the central portion of the second rod along the first direction; and a peripheral first rod that overlaps with the peripheral portion of the second rod along the first direction, wherein the pulsed laser may irradiate the central first rod.

[0018] In one embodiment, the pulsed laser can be irradiated onto the portion of the central first rod that does not overlap with the mask.

[0019] In one embodiment, during the step of welding the plurality of first rods, the length of the central first rod along the second direction may be increased.

[0020] In one embodiment, the step of fixing the mask to the plurality of first rods may include: cross-welding the mask onto the central first rod.

[0021] In one embodiment, the method of manufacturing the mask frame assembly may further include the following steps: after the step of setting the mask and before the step of fixing the mask to the first rod, depositing a deposition material onto a substrate through the deposition patterning portion.

[0022] To achieve the aforementioned objective of the present invention, a mask frame assembly according to an embodiment may include: a frame; a first rod disposed on the frame and extending along a first direction; a second rod disposed on the first rod and extending along a second direction intersecting the first direction; and a mask disposed on the second rod and including a plurality of deposited pattern portions arranged along the second direction. A first weld portion may be formed on the mask to join the mask to the second rod, and a second weld portion may be formed on the portion of the second rod that does not overlap with the mask.

[0023] In one embodiment, the second weld portion may be formed at the center of the second rod along the second direction.

[0024] In one embodiment, the second weld portion may include a plurality of weld points arranged along the second direction.

[0025] In one embodiment, the mask may have a flat shape, and the second rod may have a curved shape.

[0026] In one embodiment, the first rod and the second rod can be separable from each other.

[0027] In the method for manufacturing a mask frame assembly according to an embodiment of the present invention, since the deformed mask is not replaced or separated from the frame for repair, but is repaired while the deformed mask is attached to the frame, the mask repair process can be simplified and the mask repair cost can be reduced.

[0028] However, the effects of the present invention are not limited to those described above, and various extensions can be made without departing from the spirit and scope of the present invention. Attached Figure Description

[0029] Figure 1 This is a diagram illustrating a deposition apparatus including a mask frame assembly according to an embodiment of the present invention.

[0030] Figure 2 It is shown Figure 1 An exploded perspective view of the mask frame component.

[0031] Figures 3 to 8 This is a top view illustrating a method for manufacturing a mask frame assembly according to an embodiment of the present invention.

[0032] Figure 9This is an exploded perspective view showing a mask frame assembly according to an embodiment of the present invention.

[0033] Figures 10 to 15 This is a top view illustrating a method for manufacturing a mask frame assembly according to an embodiment of the present invention.

[0034] Figure 16 It is shown Figure 1 A cross-sectional view of an example substrate. Detailed Implementation

[0035] Hereinafter, with reference to the accompanying drawings, a mask frame assembly and a method for manufacturing the mask frame assembly according to embodiments of the present invention will be described in more detail. The same or similar reference numerals are used for the same structural elements in the drawings.

[0036] Figure 1 This is a diagram illustrating a deposition apparatus including a mask frame assembly according to an embodiment of the present invention.

[0037] Reference Figure 1 The deposition apparatus may include a chamber 400, a mask frame assembly 100 disposed within the chamber 400, and a deposition source 200. A substrate 300, which is the object of deposition, may be disposed on the mask frame assembly 100, and the deposition source 200 may exhaust deposition gas toward the substrate 300 within the chamber 400. When the deposition source 200 exhausts the deposition gas within the chamber 400, the deposition gas may pass through the mask frame assembly 100 and be deposited onto the substrate 300, forming the desired pattern on the substrate 300.

[0038] Figure 2 It is shown Figure 1 Exploded perspective view of the mask frame component 100.

[0039] Reference Figure 1 and Figure 2 The mask frame assembly 100 may include a frame 110, a first rod 120, a second rod 130, and a mask 140.

[0040] Frame 110 may form the outer periphery of mask frame assembly 100. In one embodiment, frame 110 may have a quadrilateral frame shape including a quadrilateral opening OP at the center. In this case, frame 110 may include a pair of first sides 111 opposite each other in a first direction DR1 and a pair of second sides 112 opposite each other in a second direction DR2 intersecting the first direction DR1. The first sides 111 and the second sides 112 may be connected to each other.

[0041] The first rod 120 may be arranged on the frame 110. The first rod 120 may be located on a third direction DR3 of the frame 110 that intersects the first direction DR1 and the second direction DR2. The first rod 120 may extend along the first direction DR1 and be arranged along the second direction DR2.

[0042] Each of the pair of first sides 111 of the frame 110 may be formed with a first engagement groove, and both ends of each first rod 120 may be fixed to the first engagement groove. The first rod 120 may support the second rod 130 and the mask 140. The first rod 120 may be formed of stainless steel (SUS) or the like.

[0043] The second rod 130 may be placed on the first rod 120. The second rod 130 may be located on the third direction DR3 of the first rod 120. The second rod 130 may extend along the second direction DR2 and be arranged along the first direction DR1. In a top view, the second rod 130 may intersect with the first rod 120.

[0044] Each of the pair of second sides 112 of the frame 110 may be formed with a second engagement groove, and both ends of each second rod 130 may be fixed to the second engagement groove. The second rod 130 may support the mask 140. The second rod 130 may be formed of stainless steel (SUS) or the like.

[0045] exist Figure 2 The illustration exemplarily depicts the second rod 130 having a rectangular planar shape, but the invention is not limited thereto. For example, the planar shape of the second rod 130 may vary depending on the shape of the mask 140.

[0046] In one embodiment, the second rod 130 may be separate from the first rod 120. In other words, the first rod 120 and the second rod 130 may not be integrally formed structures.

[0047] Mask 140 may be arranged on the second rod 130. Mask 140 may be located on the third direction DR3 of the second rod 130. Mask 140 may extend along the second direction DR2 and be arranged along the first direction DR1. In top view, each mask 140 may be arranged between two adjacent second rods 130.

[0048] Each mask 140 may include deposited pattern portions PP arranged along a second direction DR2. For example, each deposited pattern portion PP may have multiple patterned holes. In top view, each deposited pattern portion PP may be located between intersecting first rods 120 and second rods 130. For example, the deposited pattern portion PP may not overlap with the first rod 120 and the second rod 130.

[0049] Each mask 140 can be fixed at both ends to a pair of second sides 112 of the frame 110. In the deposition process, deposition gas can pass through the deposition pattern portion PP of each mask 140 and form a thin film layer on the substrate 300. The mask 140 can be formed of nickel (Ni), nickel (Ni)-cobalt (Co) alloy, etc.

[0050] Figures 3 to 8This is a top view illustrating a method for manufacturing a mask frame assembly according to an embodiment of the present invention. For example, Figures 3 to 8 Can be shown Figure 2 The manufacturing method of the mask frame assembly 100. Hereinafter, refer to... Figures 3 to 8 The description will focus on a mask 140 included in the mask frame assembly 100.

[0051] Reference Figure 3 A first rod 120 may be provided on the frame 110. The first rod 120 extends along a first direction DR1 and is arranged along a second direction DR2. The two ends of each first rod 120 may be fixed to the frame 110 by welding.

[0052] Reference Figure 4 A second rod 130 may be provided on the first rod 120. The second rod 130 extends along the second direction DR2 and is arranged along the first direction DR1. The two ends of each second rod 130 may be fixed to the frame 110 by welding. The second rod 130 may include a second-first rod 131 and a second-second rod 132 located on the first direction DR1 of the second-first rod 131.

[0053] Reference Figure 5 A mask 140 extending along the second direction DR2 can be disposed on the second rod 130. The first side 141 of the mask 140 can overlap with the second-first rod 131, and the second side 142 of the mask 140, which is opposite to the first side 141 (located on the first direction DR1 of the first side 141), can overlap with the second-second rod 132. The two ends of the mask 140 can be fixed to the frame 110 by welding.

[0054] Reference Figure 6 The deposition material can be deposited onto the substrate through the deposition pattern portion PP of the mask 140. Figure 1 On (300). Due to heat and other factors generated during the deposition of the deposited material, the shape of the mask 140 may be deformed. For example, the mask 140 may be deformed from a flat shape to a shape that bends in the direction opposite to the first direction DR1. The first side 141 of the mask 140 may be bent in the direction outward of the mask 140, and the second side 142 of the mask 140 may be bent in the direction inward of the mask 140.

[0055] When the shape of the mask 140 is deformed, the shape of the deposited pattern portion PP of the mask 140 may be deformed or the position of the deposited pattern portion PP may be moved, which may result in the deposited material not being accurately deposited onto the substrate 300. Therefore, it may be necessary to deform the curved shape of the mask 140 back to its original flat shape.

[0056] Reference Figure 7The mask 140 can be fixed to the second rod 130. In one embodiment, the second side 142 of the mask 140 can be cross-welded to a second-second rod 132 of the second rod 130 that overlaps with the second side 142 of the mask 140. At this time, at least one first weld portion WP1 can be formed on the mask 140 to attach the mask 140 to the second-second rod 132. By attaching the mask 140 to the second-second rod 132, the shape of the mask 140 can be corrected according to the deformation of the second-second rod 132.

[0057] Reference Figure 8 The shape of the mask 140 can be corrected by welding the second rod 130 attached to the mask 140.

[0058] In one embodiment, the second-2nd rod 132 can be welded by irradiating it with a laser. For example, the laser can be a pulsed laser.

[0059] In one embodiment, the pulsed laser can be irradiated onto the center portion of the second-2 rod 132, which is coupled to the mask 140, along the second direction DR2. Furthermore, the pulsed laser can be irradiated onto the portion of the center portion of the second-2 rod 132 that does not overlap with the mask 140. Thus, only the second-2 rod 132 can be welded by the pulsed laser, while the mask 140 may not be welded by the pulsed laser. In this case, a second weld portion WP2 can be formed on the portion of the second-2 rod 132. The second weld portion WP2 can be formed at the center portion of the second-2 rod 132 along the second direction DR2.

[0060] In one embodiment, the second weld portion WP2 may include a plurality of weld points WD arranged along the second direction DR2. The weld points WD may be formed on the portion irradiated by the pulsed laser. In one embodiment, the weld points WD may be formed at predetermined intervals along the second direction DR2.

[0061] By welding the second-2 rod 132 using the pulsed laser, the second-2 rod 132 can be deformed from a flat shape to a curved shape, and the mask 140 can be deformed from a curved shape to a flat shape. When welding the second-2 rod 132 by irradiating it with the pulsed laser onto one side of the second-2 rod 132 along the first direction DR1, the second-2 rod 132 can be bent in the direction of that side along the first direction DR1 due to the expansion of the second-2 rod 132 caused by the welding heat of the welding part. Therefore, when welding the second-2 rod 132 by irradiating it with the pulsed laser onto the center of the second-2 rod 132 along the second direction DR2, the second-2 rod 132 can be bent in the first direction DR1, and the mask 140, which is bonded to the second-2 rod 132 by the first welding part WP1, can also be bent in the first direction DR1. Thus, the mask 140, which bends in the direction opposite to the first direction DR1, can be deformed into a flat shape.

[0062] In the manufacturing method of the mask frame assembly 100 according to this embodiment, the shape of the mask 140 can be corrected by welding the second rod 130 while the mask 140 is attached to the frame 110. Since the deformed mask 140 is not replaced or separated from the frame 110 for repair, but is repaired while the deformed mask 140 is attached to the frame 110, the repair process of the mask 140 can be simplified and the repair cost of the mask 140 can be reduced.

[0063] Figure 9 This is an exploded perspective view showing a mask frame assembly according to an embodiment of the present invention.

[0064] Reference Figure 9 According to an embodiment of the present invention, a mask frame assembly 101 may include a frame 110, a first rod 120, a second rod 130, and a mask 140. (See also...) Figure 9 The mask frame assembly 101 described herein, except for the positions of the first rod 120 and the second rod 130 on the third-direction DR3, can be referenced. Figure 1 and Figure 2 The mask frame assembly 100 described herein is substantially the same or similar. Therefore, the description of the repeating structure is omitted.

[0065] The second rod 130 may be arranged on the frame 110. The second rod 130 may be located on the third direction DR3 of the frame 110. The second rod 130 may extend along the first direction DR1 and be arranged along the second direction DR2.

[0066] Each of the pair of first sides 111 of frame 110 may be formed with a first engagement groove, and both ends of each second rod 130 may be fixed to the first engagement groove. The second rod 130 may support the first rod 120 and the mask 140.

[0067] The first rod 120 may be placed on the second rod 130. The first rod 120 may be located on the third direction DR3 of the second rod 130. The first rod 120 may extend along the second direction DR2 and be arranged along the first direction DR1.

[0068] Each of the pair of second sides 112 of the frame 110 may be formed with a second engagement groove, and both ends of each first rod 120 may be fixed to the second engagement groove. The first rod 120 may support the mask 140.

[0069] Mask 140 may be disposed on first rod 120. Mask 140 may be located on third direction DR3 of first rod 120. Mask 140 may extend along first direction DR1 and be arranged along second direction DR2.

[0070] Each mask 140 may include a deposited pattern portion PP arranged along a first direction DR1. The two ends of each mask 140 may be fixed to a pair of first sides 111 of the frame 110, respectively.

[0071] Figures 10 to 15 This is a top view illustrating a method for manufacturing a mask frame assembly according to an embodiment of the present invention. For example, Figures 10 to 15 Can be shown Figure 9 The manufacturing method of the mask frame assembly 101. Hereinafter, refer to... Figures 10 to 15 The description will primarily focus on a mask 140 included in the mask frame assembly 101. Additionally, in reference to... Figures 10 to 15 In the manufacturing method of the mask frame assembly 101 described herein, references are omitted. Figures 3 to 8 The manufacturing method of the mask frame assembly 100 described herein is substantially the same as or similar to that of the structure.

[0072] Reference Figure 10 A second rod 130 can be set on the frame 110. The second rod 130 extends along the first direction DR1 and is arranged along the second direction DR2.

[0073] Reference Figure 11 A first rod 120 may be provided on the second rod 130. The first rod 120 extends along the second direction DR2 and is arranged along the first direction DR1. The first rod 120 may include: a central first rod 121, which overlaps with the central portion of the second rod 130 along the first direction DR1; and a peripheral first rod 122, which overlaps with the peripheral portion of the second rod 130 along the first direction DR1.

[0074] Reference Figure 12 A mask 140 extending along the first direction DR1 can be provided on the first rod 120.

[0075] Reference Figure 13The deposition material can be deposited onto the substrate through the deposition pattern portion PP of the mask 140. Figure 1 On (300). Due to heat and other factors generated during the deposition of the deposited material, the shape of the mask 140 may be deformed. For example, the mask 140 may be deformed from a flat shape to a shape that bends in the direction opposite to the second direction DR2. The first side 141 of the mask 140 may be bent outward, and the second side 142 of the mask 140, which is opposite to the first side 141 (located on the second direction DR2 of the first side 141), may be bent inward.

[0076] Reference Figure 14 The mask 140 can be fixed to the first rod 120. In one embodiment, the second side portion 142 of the mask 140 can be cross-welded to the central first rod 121. At this time, a plurality of first weld portions WP1 can be formed on the mask 140 to connect the mask 140 to the central first rod 121. For example, the first weld portions WP1 can overlap with the central first rod 121 respectively. By connecting the mask 140 to the central first rod 121, the shape of the mask 140 can be corrected according to the deformation of each central first rod 121.

[0077] Reference Figure 15 The shape of the mask 140 can be corrected by welding the first rod 120.

[0078] In one embodiment, the first rod 120 can be welded by irradiating it with a laser. For example, the laser can be a pulsed laser.

[0079] In one embodiment, the pulsed laser can be irradiated onto the central first rod 121 that is coupled to the mask 140. Furthermore, the pulsed laser can be irradiated onto the portion of the central first rod 121 that does not overlap with the mask 140. Thus, only the central first rod 121 can be welded by the pulsed laser, while the mask 140 may not be welded by the pulsed laser. In this case, a second weld portion WP2 can be formed on the portion of the central first rod 121 that does not overlap with the mask 140.

[0080] In one embodiment, the second weld portion WP2 may be formed on the portion of the central first rod 121 adjacent to the second side portion 142 of the mask 140. For example, the second weld portion WP2 may be formed on the portion of the central first rod 121 adjacent to the first weld portion WP1.

[0081] By welding the central first rod 121 using the pulsed laser, the length of the central first rod 121 along the second direction DR2 increases, and the mask 140 can be deformed from a curved shape to a flat shape. When welding the central first rod 121 by irradiating one end of each central first rod 121 along the second direction DR2 with the pulsed laser, the length of each central first rod 121 can be extended in the second direction DR2 due to the expansion of the central first rod 121 caused by the welding heat of the welded portion. Therefore, when welding the central first rod 121 by irradiating the portion of each central first rod 121 adjacent to the second side 142 of the mask 140 with the pulsed laser, the length of the central first rod 121 increases in the second direction DR2, and the mask 140, which is joined to the central first rod 121 by the first weld portion WP1, can be bent in the second direction DR2. Thus, the mask 140, bent in the direction opposite to the second direction DR2, can be deformed into a flat shape.

[0082] In one embodiment, the increase in length of the first central first rod 121a in the central first rod 121 may be greater than the increase in length of the second central first rod 121b in the central first rod 121. Here, the first central first rod 121a may be adjacent to the center of the mask 140 along the first direction DR1, and the second central first rod 121b may be adjacent to the edge of the mask 140 along the first direction DR1. For example, the second central first rod 121b may be located between the first central first rod 121a and the peripheral first rod 122. When the number of pulsed laser irradiations on the first central first rod 121a is greater than the number of pulsed laser irradiations on the second central first rod 121b, the increase in length of the first central first rod 121a may be greater than the increase in length of the second central first rod 121b in the central first rod 121. Therefore, the degree of deformation of the part of mask 140 that is combined with the first center first rod 121a can be greater than the degree of deformation of the part of mask 140 that is combined with the second center first rod 121b, thereby mask 140 can be deformed from a curved shape to a flat shape.

[0083] In the manufacturing method of the mask frame assembly 101 according to this embodiment, the shape of the mask 140 can be corrected by welding the first rod 120 while the mask 140 is attached to the frame 110. Since the deformed mask 140 is not replaced or separated from the frame 110 for repair, but is repaired while the deformed mask 140 is attached to the frame 110, the repair process of the mask 140 can be simplified and the repair cost of the mask 140 can be reduced.

[0084] Figure 16 It is shown Figure 1 A cross-sectional view of an example of substrate 300. Figure 16 Display device 500 as Figure 1 An example of the substrate 300 is shown below.

[0085] Reference Figure 16 The display device 500 may include a substrate 510, a buffer layer 511, an active pattern 520, a gate insulating layer 512, a gate electrode 530, an interlayer insulating layer 513, a source electrode 541, a drain electrode 542, a planarization layer 514, a pixel electrode 550, a pixel defining film 515, a light-emitting layer 560, and a counter electrode 570.

[0086] A buffer layer 511 may be disposed on a substrate 510. An active pattern 520 may be disposed on the buffer layer 511, and a gate insulating layer 512 may cover the active pattern 520 on the buffer layer 511.

[0087] The gate electrode 530 may be disposed on the gate insulating layer 512 and overlap with the active pattern 520. The interlayer insulating layer 513 may cover the gate electrode 530 on the gate insulating layer 512.

[0088] The source electrode 541 and drain electrode 542 can be disposed on the interlayer insulating layer 513 and connected to the active pattern 520. The planarization layer 514 can cover the source electrode 541 and drain electrode 542 on the interlayer insulating layer 513. The active pattern 520, gate electrode 530, source electrode 541 and drain electrode 542 can form a transistor TR.

[0089] Pixel electrode 550 may be disposed on planarization layer 514 and connected to drain electrode 542. Pixel defining film 515 may cover pixel electrode 550 on planarization layer 514. Pixel defining film 515 may include pixel opening PO that exposes at least a portion of pixel electrode 550.

[0090] The light-emitting layer 560 may be disposed on the pixel electrode 550 exposed by the pixel opening PO. The light-emitting layer 560 may be formed of at least one light-emitting material selected from red, green, and blue light-emitting materials. The light-emitting layer 560 can be referenced... Figure 1 The deposition process described herein is used to form the deposition pattern. If the deposition pattern portion of the mask 140 of the mask frame assembly 100 is arranged in a manner corresponding to the pixel opening PO... Figure 2 After the patterned holes of the PP are formed, the light-emitting material is discharged from the deposition source 200, and then the light-emitting layer 560 can be formed in the pixel opening PO on the pixel electrode 550.

[0091] The counter electrode 570 can be disposed on the light-emitting layer 560. The pixel electrode 550, the light-emitting layer 560, and the counter electrode 570 can form a light-emitting element EL.

[0092] Industrial applicability

[0093] The mask frame assembly according to an exemplary embodiment of the present invention can be applied to a method for manufacturing a display device, such as an organic light-emitting display device or a liquid crystal display device.

[0094] The mask frame assembly and the method for manufacturing the mask frame assembly according to exemplary embodiments of the present invention have been described above with reference to the accompanying drawings. However, the described embodiments are exemplary, and modifications and alterations can be made by those skilled in the art without departing from the technical concept of the present invention as set forth in the appended claims.

[0095] Explanation of reference numerals in the attached figures

[0096] 110: Frame 120: First bar

[0097] 130: Second rod 140: Mask

[0098] PP: Deposited pattern section; WP1: First welding section

[0099] WP2: Second welding section.

Claims

1. A method for manufacturing a mask frame assembly, comprising the following steps: A first rod extending in the first direction is set on the frame; A second rod is provided on the first rod, extending in a second direction that intersects the first direction; A mask is provided on the second rod, the mask comprising a plurality of deposited pattern portions arranged along the second direction; Fix the mask to the second rod; and The shape of the mask is corrected by welding the second rod. The welded portion is formed on the part of the second rod that does not overlap with the mask.

2. The method for manufacturing the mask frame assembly according to claim 1, wherein, In the step of welding the second rod, the mask is deformed from a curved shape to a flat shape.

3. The method for manufacturing the mask frame assembly according to claim 1, wherein, The step of welding the second rod includes irradiating the second rod with a pulsed laser.

4. The method for manufacturing the mask frame assembly according to claim 3, wherein, The pulsed laser is irradiated onto the center of the second rod along the second direction.

5. The method for manufacturing the mask frame assembly according to claim 4, wherein, The pulsed laser is irradiated onto the portion of the center of the second rod that does not overlap with the mask.

6. A method for manufacturing a mask frame assembly, comprising the following steps: A second rod extending along the first direction is set on the frame; A plurality of first rods are provided on the second rod, and the plurality of first rods extend along a second direction that intersects the first direction and are arranged along the first direction; A mask is disposed on the plurality of first rods, the mask comprising a plurality of deposited pattern portions arranged along the first direction; Fix the mask to the plurality of first rods; and The shape of the mask is corrected by welding the plurality of first rods. Multiple welded portions are formed on the portions of the multiple first rods that do not overlap with the mask.

7. The method for manufacturing the mask frame assembly according to claim 6, wherein, In the step of welding the plurality of first rods, the mask is deformed from a curved shape to a flat shape.

8. The method for manufacturing the mask frame assembly according to claim 6, wherein, The welding of the plurality of first rods includes the step of irradiating the plurality of first rods with a pulsed laser.

9. The method for manufacturing the mask frame assembly according to claim 8, wherein, The plurality of first bars includes: a central first bar that overlaps with the central portion of the second bar along the first direction; and a peripheral first bar that overlaps with the peripheral portion of the second bar along the first direction. The pulsed laser is irradiated onto the central first rod.

10. The method for manufacturing the mask frame assembly according to claim 9, wherein, The pulsed laser is irradiated onto the portion of the central first rod that does not overlap with the mask and corresponds to the plurality of welded parts.

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