Excimer lamp, ultraviolet irradiation device, and ozone generation device

Abstract

Provided are an excimer lamp, an ultraviolet irradiation device, and an ozone generation device that effectively irradiate an object to be irradiated with ultraviolet light. In an excimer lamp (10) having a discharge vessel (10T) in which an inner electrode (40) is covered with an inner tube (30), the tip end portion (31) of the inner tube (30) is made to enter the inside of a small-diameter portion (21), whereas the inner electrode (40) is made not to enter the small-diameter portion, and the position of the tip end portion (41) of the inner electrode (40) along the lamp axis (E) is made to be located at a position that is more toward the rear end side (discharge vessel center side) than the small-diameter portion (21).

Description

Technical Field

[0001] This invention relates to excimer lamps, ultraviolet irradiation devices having excimer lamps, and ozone generating devices, and more particularly to the structure of the front end of the discharge capacitor of an excimer lamp. Background Technology

[0002] In an excimer lamp, a rare gas is sealed inside a discharge capacitor (light-emitting tube). Discharge is achieved by applying a voltage between an outer electrode located on the outer surface of the light-emitting tube and an inner electrode located inside the tube, emitting excimer light. As excimer light, it can irradiate ultraviolet light and can be used as a light source for ultraviolet-based ozone generation, etc.

[0003] To reduce the starting voltage of excimer lamps, the following electrode configuration is known: the front end of the internal electrode extends into the end head formed at one end of the discharge capacitor, and the external electrode extends to the outer surface of the end head (see Patent Document 1). This electrode configuration can also be used in excimer lamps with a dual-tube structure (see Patent Document 2).

[0004] Patent Document 1: Japanese Patent Application Publication No. 2014-154274

[0005] Patent Document 2: Japanese Patent Application Publication No. 2016-91618

[0006] On the one hand, a high voltage is applied to the inner electrode of the excimer lamp; on the other hand, the end cap is the remaining portion of the exhaust path within the discharge capacitor from the excimer lamp manufacturing process, and its inner diameter is smaller than that of the discharge capacitor (outer tube). Therefore, insulation failure is easily generated between the inner electrode extending to the front end of the end cap and the outer electrode extending to the outer surface of the end cap. Furthermore, insulation failure is also easily generated when a conductor at the same potential (grounded) as the outer electrode approaches the end cap. Summary of the Invention

[0007] Therefore, the goal is to find a structure that can suppress the discharge capacitor caused by insulation failure.

[0008] The excimer lamp of the present invention comprises: a discharge capacitor having a small-diameter portion at its front end; an inner electrode disposed within the discharge capacitor; and an inner tube covering the inner electrode. Here, "front end" refers to one end of the discharge capacitor. Furthermore, the "small-diameter portion" is a portion with a diameter smaller than the constant diameter portion of the discharge capacitor (the portion with both constant inner and outer diameters), and various shapes of small-diameter portions can be formed along the axis of the discharge capacitor (lamp axis). It can be a structure protruding from the container end toward the front end side (outside the container), or it can be a portion that partially protrudes toward the rear end side (inside the container).

[0009] The inner electrode can be a structure extending along the lamp axis, for example, it can be configured as a foil-shaped electrode. Alternatively, the inner tube can taper at the front end, and the inner electrode can be embedded in the inner tube in a manner that concentrates the electric field.

[0010] In this invention, the front end of the inner tube enters the small-diameter section, and the front end of the inner electrode along the lamp axis is located further back than the small-diameter section. The shape of entering the small-diameter section varies, depending on the shape of the inner tube, the shape of the small-diameter section, etc.

[0011] For example, if the front end of the inner tube is tapered, at least a portion of the side surface of the front end can be configured to contact the inner surface of the small-diameter portion. The contact portion of the small-diameter portion that contacts at least a portion of the side surface of the front end can be curved.

[0012] Additionally, the narrow diameter portion may be provided with a cylindrical part protruding toward the outside and / or inside of the container, which can be configured such that the inner tube contacts the cylindrical part.

[0013] For example, it is sufficient that the distance between the front end of the inner tube and the front end of the inner electrode along the lamp axis is greater than the distance between the inner electrode and the outer peripheral surface of the inner tube along the lamp radial direction.

[0014] Alternatively, the distance between the front end of the inner tube and the front end of the inner electrode along the lamp axis can be longer than the distance between the front end of the inner tube and the front end of the small diameter portion along the lamp axis.

[0015] As one aspect of the present invention, the ultraviolet irradiation device can be configured as a device having any of the features of the excimer lamp described above, wherein the excimer lamp is disposed within the device housing in a state in which the outer electrode or a conductor having the same potential as the outer electrode is in contact with or close to the end of the small-diameter portion or the discharge capacitor.

[0016] As an embodiment of the present invention, an ozone generating device can be configured as a device having any of the features of the excimer lamp described above. The ozone generating device has a support member that is at the same potential as the outer electrode. The support member supports the excimer lamp, which is positioned so that the small diameter portion faces the intake fan, at the front end of the small diameter portion or the end of the discharge capacitor.

[0017] According to the present invention, insulation breakdown can be suppressed in excimer lamps, ozone generating devices having excimer lamps, etc. Attached Figure Description

[0018] Figure 1 This is a diagram showing the schematic internal structure of an ozone generating device having an excimer lamp according to the first embodiment.

[0019] Figure 2 This is an enlarged view showing the front end of the excimer lamp.

[0020] Figure 3 This is a diagram showing a modified example of the discharge capacitor according to the first embodiment.

[0021] Figure 4 The figure shows other variations of the discharge capacitor of the first embodiment.

[0022] Figure 5 This is a schematic structural diagram of the excimer lamp installed in the ultraviolet irradiation device according to the second embodiment.

[0023] Label Explanation

[0024] 10, 10-1, 10-2: Excimer lamps; 10T, 10'T: Discharge capacitors; 20, 20': Outer tubes; 30, 30': Inner tubes; 40, 40': Inner electrodes; 50, 50': Outer electrodes; 100: Ozone generator; L1, L1', L1”: Distance along lamp axis E between the apex 31T of the inner tube and the apex 21T of the end tube; L2, L2', L2”: Apex of the inner tube. The distance between 31T and the front end 41 of the inner electrode 40 along the lamp axis E; K1, K1', K1”: the length of the small diameter portions 21, 21-1, 21-2 along the lamp axis E; 22, 22': small diameter portions; 21B, 21'B: bottom; 21T, 21'T: apex of the front end of the end tube; 31T, 31'T: apex of the front end of the inner tube; 60, 60': power supply line; 21K: cylindrical portion; 20TM: flat portion. Detailed Implementation

[0025] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0026] Figure 1 This is a diagram showing the schematic internal structure of the ozone generating device according to the first embodiment. Additionally, in Figure 1 The excimer lamp and housing are depicted in cross-section.

[0027] The ozone generating device 100 includes an ultraviolet irradiation device that houses an excimer lamp 10 within a housing 100K, the excimer lamp 10 being configured such that its lamp axis E is along the vertical direction. A blower (not shown) is located below the excimer lamp 10, and the gas drawn into the housing 100K flows vertically (lamp axis E) within the housing 100K and exits from the opening 100P on the upper surface.

[0028] The excimer lamp 10 irradiates ultraviolet light, for example, ultraviolet light with a wavelength of 172 nm. Ozone is generated by irradiating the oxygen-containing gas flowing around the excimer lamp 10 with ultraviolet light, and the ozone-containing gas is released from the opening 100P. This performs sterilization and disinfection.

[0029] The excimer lamp 10 is supported within the housing 100K by support members 70, 71, and 72. Support members 70, 71, and 72 are respectively mounted on the wall portion 75 disposed within the housing 100K. Support members 71 and 72 clamp the excimer lamp 10 across the outer electrode 50 to prevent primarily radial displacement. Support member 70 supports one end of the excimer lamp 10 from below (hereinafter referred to as the front end) to prevent primarily axial displacement.

[0030] The excimer lamp 10 has a discharge capacitor (light-emitting tube) 10T with an outer tube 20 made of a dielectric material such as quartz glass and having a generally cylindrical cross-section. An inner tube 30 with a generally cylindrical cross-section is disposed inside the outer tube 20, and a foil electrode (hereinafter referred to as the inner electrode) 40 extending along the tube axis, i.e., the lamp axis E, is embedded (covered) in the inner tube 30. The discharge space S within the discharge capacitor 10T is sealed with a rare gas such as xenon, or a mixture of a rare gas and a halogen gas, as the discharge gas.

[0031] The inner tube 30, serving as the dielectric, is coaxially arranged with the outer tube 20, and a discharge space S is formed by heating and bonding it at the rear end of the discharge capacitor 10T. When viewed from the end of the inner tube 30, the inner electrode 40 is arranged inside the inner tube 30 with the lamp axis E as the center. The inner electrode 40 is not exposed in the discharge space S formed between the inner tube 30 and the outer tube 20. Alternatively, the inner electrode can be arranged inside the inner tube by heating and bonding it instead of embedding it.

[0032] An outer electrode 50 is provided on the outer surface 20S of the outer tube 20. Here, the outer electrode 50 is made of a metal wire wound into a spiral shape, a portion of which is electrically connected to a grounded power supply line (not shown) via support members 70, 71 and wall portion 75.

[0033] A power supply unit (not shown) is provided within the housing 100K. This power supply unit converts commercial AC voltage to DC voltage, and then converts the DC voltage to a high-frequency voltage via a switching circuit before supplying it to a step-up transformer. The step-up transformer boosts the high-frequency voltage and applies it to the space between the inner electrode 40 and the outer electrode 50 via power supply line 60. Alternatively, the power supply unit can be configured to convert the commercial AC voltage to DC voltage via a frequency converter before supplying it to the step-up transformer.

[0034] The discharge capacitor 10T has protruding portions (hereinafter referred to as small diameter portions) 21 and 22 at both ends of the constant diameter portion 20M surrounding the discharge space S. The small diameter portion 22 is a part of the rear end side of the inner tube 30 that protrudes along the lamp axis E toward the rear end of the lamp and is not covered by the outer tube 20. The power supply line 60 passes through the interior of the small diameter portion 22.

[0035] The small-diameter portion 21 is formed during lamp manufacturing, protruding from the discharge capacitor 10T (outside the container) along the lamp axis E toward the lamp front end. Here, the small-diameter portion 21, smaller than the diameter of the constant-diameter portion 20M, is integrally formed by heating and deforming the front end of the outer tube 20 to reduce its diameter and fusing it with an end tube with a smaller diameter than the outer tube 20. Alternatively, the end tube used in lamp manufacturing may be positioned at a different location than the small-diameter portion.

[0036] In this embodiment, the front end portion 31 of the inner tube 30 enters the small-diameter portion 21, and the front end portion 31 of the inner tube 30 contacts and is supported by the small-diameter portion 21. On the one hand, this fitting state is formed, and on the other hand, the front end portion 41 of the inner electrode 40 does not enter the small-diameter portion 21. This will be described in detail below.

[0037] Figure 2 This is an enlarged view showing the area near the small diameter portion of the 10T discharge capacitor.

[0038] The front end 31 of the inner tube 30 tapers, and here it has a projectile-shaped shape. On the other hand, on the front end side of the outer tube 20, the reduced diameter portion 20T, which narrows from the constant diameter portion 20M toward the small diameter portion 21, is formed by a bowl-shaped curved surface, and the small diameter portion 21 protrudes from the center of the reduced diameter portion 20T.

[0039] Here, the inner surface 21S of the reduced diameter portion 20T and the small diameter portion 21 of the outer tube 20 is a continuous and smooth curved shape, making it impossible to distinguish the connection between the reduced diameter portion 20T and the small diameter portion 21. Two curvature change points Q11 and Q12 appear on the cross-sectional shape of the inner surface of the discharge capacitor 10T from the reduced diameter portion 20T to the small diameter portion 21.

[0040] When a circle (circle of curvature) is used to approximate the curve of the inner surface cross-sectional shape of the discharge capacitor 10T from the narrow diameter portion 20T to the small diameter portion 21, the curvature change portion (change point) Q11 corresponds to the boundary position where the center of curvature of the circle of curvature shifts from the discharge space S to the outside of the lamp. That is, it corresponds to the boundary position where the inner surface cross-sectional shape portion that is concave in the discharge space S shifts to the inner surface cross-sectional shape portion that is concave on the outside of the lamp.

[0041] On the other hand, the curvature change portion Q12 corresponds to the boundary position where the center of curvature of the curvature circle shifts again from the outside of the lamp towards the discharge space S side. That is, it corresponds to the boundary position where the inner surface cross-sectional shape portion that is concave on the outside of the lamp shifts towards the inner surface cross-sectional shape portion that is concave on the discharge space S side.

[0042] If the curvature-changing portion Q11 is used to define the small-diameter portion 21, then the small-diameter portion 21 represents the portion of the axial range between the apex 21T of the end tube of the discharge capacitor 10T and the curvature-changing portion Q11, and has a length K1 along the lamp axis E. The reduced-diameter portion 20T is formed at a position closer to the rear end of the discharge capacitor 10T than the curvature-changing portion Q11, and represents the portion that is reduced in diameter toward the small-diameter portion 21.

[0043] The inner tube 30, arranged vertically, is positioned by contacting the contact portion 23 via a portion of the side surface (outer surface along the circumferential direction) 31S of its front end portion 31, and is supported by the discharge capacitor 10T. The contact portion 23 refers to the curved surface portion between the curvature-changing portions Q11 and Q12 of the small-diameter portion 21. The distance L1 along the lamp axis E between the vertex 31T of the inner tube 30's front end portion and the vertex 21T of the end tube's front end portion is shorter than the distance L2 along the lamp axis E between the vertex 31T of the inner tube 30's front end portion and the front end portion 41 of the inner electrode 40.

[0044] Furthermore, the distance L2 is longer than the shortest distance T between the edge 40L of the radial end of the foil-shaped inner electrode 40 and the outer peripheral surface 30S of the inner tube 30. That is, the insulation distance of the inner electrode 40 embedded in the inner tube 30 along the lamp axis E is longer than the insulation distance along the radial direction.

[0045] As described above, the excimer lamp 10 is supported by a grounded support member 70 at the apex 21T of the end tube of its small-diameter portion 21. Furthermore, the edge 40L of the foil-shaped inner electrode 40 is a blade shape that sharpens from the center towards the edge in the width direction. When a high voltage is applied to the inner electrode 40 with this electrode shape, an electric field concentration occurs at the edge 40L (especially the front end 41).

[0046] However, since the distance interval L2 (the thickness of the inner tube 30 along the lamp axis) and the distance interval L1 (the distance between the apex 31T of the inner tube and the apex 21T of the end tube along the lamp axis) are ensured as insulation distances, insulation failure with the support member 70 can be prevented. As a result, discharge is well generated between the inner electrode 40 and the outer electrode 50, and ultraviolet light is emitted from the discharge capacitor 10T as a whole.

[0047] In this way, on the one hand, the front end 31 of the inner tube 30 reaches the internal space of the small-diameter portion 21 of the discharge capacitor and becomes fitted, and on the other hand, the position of the front end 41 of the inner electrode 40 along the lamp axis E does not reach the internal space of the small-diameter portion 21, but is located on the rear end (center of the discharge capacitor) side of the small-diameter portion 21. Therefore, the length of the inner electrode 40 along the lamp axis E and the length of the outer electrode 50 can be included near the narrowed diameter portion 20T of the outer tube 20, and the light-emitting length can be increased without changing the overall length of the lamp.

[0048] Furthermore, since the inner tube 30 is supported by contact with the small-diameter portion 21, the inner tube 30 can be stably and coaxially held within the outer tube 20. And because the inner surface of the small-diameter portion, which serves as the contact portion 23, is curved, contact can be achieved without damaging the front end 31 of the inner tube 30. Moreover, because the front end 31 of the inner tube 30 is curved and tapers at the front, contact can be achieved in a way that stably maintains coaxiality even with dimensional errors caused by individual heat forming processes.

[0049] In the discharge capacitor 10T, the portion along the lamp axis from the reduced diameter portion 20T to the small diameter portion 21 contributes almost no to discharge (radiation of ultraviolet rays). Therefore, the reduced diameter portion 20T of the discharge capacitor 10T can also be made into a generally flat shape rather than a bowl-shaped curved surface.

[0050] Figure 3 This diagram shows a modified example of the discharge capacitor according to the first embodiment. A flat portion 20TM is formed as a generally flat surface along the direction perpendicular to the lamp axis E (lamp radial direction). By shortening the length (protrusion height) K1' of the small diameter portion 21-1 along the lamp axis E, a compact excimer lamp 10-1 can be formed along the lamp axis E. By bringing the discharge region closer to the reduced diameter portion 20T of the discharge capacitor 10T, the luminous length can be increased relative to the total length of the lamp.

[0051] The structure in which the inner tube 30 is supported (positioned) in contact with the small-diameter portion 21-1 of the discharge capacitor 10T can be of various types. For example, the structure can be such that the inner diameter of the small-diameter portion 21-1 is increased relative to the outer diameter of the front end portion 31 of the inner tube 30, so that the vertex 31T of the front end portion of the inner tube is located near the vertex 21T of the front end portion of the end tube, thereby being supported in contact with the curvature variation portion Q12 of the inner surface of the small-diameter portion 21-1 at the position near the vertex 31T or the bottom 21B of the front end portion of the inner tube.

[0052] Alternatively, on the inner surface of the small-diameter portion 21-1, at the boundary position where the center of curvature of the curvature circle shifts from the outside of the lamp to the discharge space S side, i.e., the inner surface portion with the curvature change portion Q12, a cylindrical portion along the lamp axis E can be formed, increasing the length (protrusion height) K1' of the small-diameter portion 21-1 along the lamp axis E, and setting it to a fitted state where the cylindrical portion contacts the front end portion 31. Furthermore, it is also possible to taper the front end portion 31 of the inner tube 30, and fit it with the small-diameter portion by tapering the inner surface of the small-diameter portion without using a curved shape. In this case, the inner surface portion with the curvature change portions Q11 and Q12 does not need to be curved. It is sufficient that the axial range of the front end portion 31 of the inner tube 30 and the small-diameter portion 21-1 overlaps radially.

[0053] Figure 4 This figure shows another variation of the discharge capacitor according to the first embodiment. Here, the small-diameter portion 21-2 is formed at one end such that the front end of the reduced-diameter portion 20T protrudes along the lamp axis E toward the rear end of the lamp (inner side of the container). The small-diameter portion 21-2 has a cylindrical portion 21K that protrudes at least partially toward the discharge space side, and the front end portion 31 of the inner tube 30 engages with the cylindrical portion 21K of the small-diameter portion 21-2. Furthermore, the side surface of the front end portion 31 can contact the inner surface of the small-diameter portion 21-2, and the apex 31T of the front end portion of the inner tube can contact the inner surface of the bottom 21B of the small-diameter portion 21-2. Alternatively, the small-diameter portion may not protrude outwards but only inwards.

[0054] Next, use Figure 5 An ultraviolet irradiation apparatus having an excimer lamp according to the second embodiment will be described. In the second embodiment, outer electrodes are provided all the way to the small diameter portion, and are electrically connected to a power supply unit for the outer electrodes via the small diameter portion.

[0055] Figure 5 This is a schematic internal configuration diagram of the excimer lamp in the ultraviolet irradiation device of the second embodiment.

[0056] The ultraviolet irradiation device 100' has an excimer lamp. Here, the excimer lamp is disposed inside a translucent sleeve 11 arranged laterally (horizontally) within the housing (not shown) of the ultraviolet irradiation device, and a fluid such as cleaning water, which is the object of ultraviolet irradiation, flows on the outer periphery of the sleeve 11.

[0057] An outer electrode 50', made of a metal film such as an aluminum film, is provided on the outer surface 20'S of the discharge capacitor 10'T. The outer electrode 50' covers the entire outer surface at both ends of the discharge capacitor 10'T; however, only a portion of the surface is covered in the constant diameter portion 20'M between these two ends to avoid obstructing ultraviolet radiation. The outer electrode 50' covering the small diameter portion 21' is connected to the outer electrode via a power supply line through a metal socket (not shown). Furthermore, in... Figure 3 The thickness of the outer electrode 50' is exaggerated in the text.

[0058] Similar to the first embodiment, the range of the minor diameter portion 21', etc., can be defined using the curvature variation portions in the cross-sectional view. The inner surface of the outer tube 20', which connects from the constant diameter portion 20'M to the minor diameter portion 21' via the reduced diameter portion 20'T, is a continuous and smooth curved surface shape, and curvature variation portions Q20, Q21, Q22, and Q23 exist in its cross-section. The minor diameter portion 21' has a cylindrical portion.

[0059] The curvature-changing section Q20 is the boundary between the constant diameter section 20'M of the outer tube 20 and the reduced diameter section 20T. The curvature-changing section Q21 corresponds to the boundary between the reduced diameter section 20T and the flat section along the lamp radial direction. The curvature-changing section Q22 is the boundary between the flat section along the lamp radial direction and the small diameter section 21'. The curvature-changing section Q23 corresponds to the boundary between the reduced diameter section on the lamp rear end side of the small diameter section 21 and the cylindrical section. The curvature-changing section Q24 is the boundary between the cylindrical section in the small diameter section 21' and the reduced diameter section on the lamp front end side. The bottom 21B is the bottom of the recess on the inner surface of the small diameter section 21'.

[0060] The small diameter portion 21', as defined here, is the length along the lamp axis E from the curvature change portion Q22 to the vertex 21T of the end tube (excluding the flat portion). Along the lamp axis, the vertex 31T of the inner tube 30 is positioned closer to the lamp front end (inside) than the curvature change portion Q22 of the small diameter portion 21, forming a fitted state. On the other hand, the end 41' of the inner electrode 40 is located closer to the rear end (center of the discharge capacitor) than the curvature change portion Q22 of the small diameter portion 21. That is, it does not enter the small diameter portion 21'. This prevents insulation damage.

[0061] The engagement state between the inner tube 30' and the small-diameter portion 21' of the discharge capacitor 10'T can be achieved using various structures where the front end portion 31' of the inner tube 30' contacts the small-diameter portion 21'. Alternatively, similar to the first embodiment, a flat or cylindrical portion can be omitted. Furthermore, the inner surface of the outer tube 20', which connects from the constant-diameter portion 20'M to the small-diameter portion 21 via the reduced-diameter portion 20'T, may not have a continuous and smooth curved shape.

[0062] For example, the curved surface between the curvature-changing section Q20 and Q21 can be omitted to connect the constant diameter section 20'M and the flat section of the outer tube 20'. Alternatively, the curved surface between the curvature-changing section Q22 and Q23 can be omitted to connect the flat section and the cylindrical section. Or, the curved surface between the curvature-changing section Q24 and the bottom 21B can be omitted, and a flat bottom can be used instead.

[0063] The configuration of the excimer lamp is not limited to the first and second embodiments, and various modifications can be made. In this case, although a situation may arise where the lamp is configured close to a conductor at the same potential as the outer electrode, the above-described structure can prevent insulation failure. The excimer lamp assembly shown in the first embodiment can also be incorporated into an ultraviolet irradiation device, and the excimer lamp assembly shown in the second embodiment can also be incorporated into an ozone generating device.

Claims

1. An excimer lamp, characterized in that, This excimer lamp has: The capacitor has an internal space in a small-diameter portion that protrudes towards the front end. The inner electrode is disposed inside the discharge capacitor; A power supply line, which is connected to the inner electrode; and An inner tube, which covers the inner electrode, has a portion that is not covered by the discharge capacitor and protrudes towards the rear end, and the power supply line passes through the interior of this portion. The front end of the inner tube enters the internal space of the small-diameter portion. The inner electrode is located at the front end of the lamp axis, which is further back than the small diameter portion.

2. The excimer lamp according to claim 1, characterized in that, The inner tube tapers at its front end. At least a portion of the side of the front end portion contacts the inner surface of the small diameter portion.

3. The excimer lamp according to claim 2, characterized in that, The contact portion of the small diameter portion that contacts at least a portion of the side surface of the front end portion is curved.

4. The excimer lamp according to claim 1, characterized in that, The narrow-diameter portion has a cylindrical section that protrudes toward the outside and / or inside of the container. The inner tube is in contact with the cylindrical portion.

5. The excimer lamp according to claim 1, characterized in that, The distance between the front end of the inner tube and the front end of the inner electrode along the lamp axis is greater than the distance between the inner electrode and the outer circumferential surface of the inner tube along the lamp radial direction.

6. The excimer lamp according to claim 1, characterized in that, The distance between the front end of the inner tube and the front end of the inner electrode along the lamp axis is longer than the distance between the front end of the inner tube and the front end of the small diameter portion along the lamp axis.

7. The excimer lamp according to claim 1, characterized in that, The inner tube tapers at its front end. The inner electrode is in the form of a foil and is embedded in the inner tube in a way that concentrates the electric field.

8. An ultraviolet irradiation device comprising an excimer lamp as described in any one of claims 1 to 7, characterized in that, The excimer lamp is positioned within the device housing such that the outer electrode or a conductor at the same potential as the outer electrode is in contact with or close to the end of the small-diameter portion or the discharge capacitor.

9. An ozone generating device comprising an excimer lamp as described in any one of claims 1 to 7, characterized in that, The ozone generating device has a support member that is at the same potential as the outer electrode, which supports the excimer lamp that is positioned so that the small diameter section is directed toward the intake fan at the front end of the small diameter section or at the end of the discharge capacitor.

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