Industrial robot

Abstract

The present application provides an industrial robot, which is provided with a loading mechanism having a plurality of hands overlapping in the up-down direction at a prescribed interval, wherein even if the loading portions of the respective hands can be individually attached and detached without detaching the loading portions of the other hands, the base end side portion of the loading mechanism can be miniaturized. In the industrial robot, for example, on the hand (15), the fixed portion (38) constituting a part of the loading portion of the hand (15) is fixed to the fixed portion (50) of the hand (15) by the bolt (62) disposed on the lower side of the head portion (62a). In all the fixed portions (51-59) and the fixed portions (39-47) disposed on the lower side of the bolt (62), a through-hole (h1) for engaging the tool (T) from the lower side of the hand (24) disposed on the lowermost side to the head portion (62a) is formed, and the inner diameter of the through-hole (h1) is larger than the outer diameter of the head portion (62a).

Description

Technical Field

[0001] This invention relates to an industrial robot for transporting objects such as semiconductor wafers. Background Technology

[0002] Currently, an industrial robot for transporting substrates such as semiconductor wafers is known (for example, see Patent Document 1). The industrial robot described in Patent Document 1 includes: a substrate loading mechanism for loading multiple substrates; and a first arm that supports the base end side of the substrate loading mechanism and is rotatable. The substrate loading mechanism includes: five hands having forks for loading substrates and overlapping at predetermined intervals in the vertical direction. Each hand includes: a fork fixing portion for fixing the forks; and headed bolts for fixing the forks to the fork fixing portions. The fork fixing portions constitute the base end side portion of the hand.

[0003] The fork of the topmost hand and the second hand from the top are secured to the fork fixing part by bolts screwed in from the top. The fork fixing parts of the topmost hand and the second hand from the top are positioned offset in the front-back direction. The fork fixing part of the second hand from the top is positioned in a position not covered from the top by the top hand.

[0004] Furthermore, the forks of the bottommost and second-to-bottom hand are secured to the fork fixing parts by bolts screwed in from below. The fork fixing parts of the bottommost and second-to-bottom hand are positioned offset in the front-to-back direction. The fork fixing part of the second-to-bottom hand is positioned in a position not covered from below by the bottommost hand.

[0005] Furthermore, the fork fixing part of the third hand from the top is positioned offset from the fork fixing parts of the other four hands in the front-back direction. The fork fixing part is positioned so as not to be covered by the other four hands from at least either the top or bottom side.

[0006] Therefore, in the industrial robot described in Patent Document 1, even if the five hands are arranged to overlap vertically, and even if the forks of all hands are fixed to the fork fixing parts, the bolts of each of the five hands can be individually installed and removed. Thus, in this industrial robot, even if the five hands are arranged to overlap vertically, the forks of each of the five hands can be individually installed and removed relative to the fork fixing parts without removing the forks of the other hands, improving the maintainability of the industrial robot.

[0007] Existing technical documents

[0008] Patent documents

[0009] Patent Document 1: Japanese Patent Application Publication No. 2010-179420 Summary of the Invention

[0010] The technical problem that the invention aims to solve

[0011] In the industrial robot described in Patent Document 1, the fork fixing parts of the uppermost hand and the second hand from the top are arranged offset in the front-back direction, and the fork fixing parts of the lowermost hand and the second hand from the bottom are also arranged offset in the front-back direction. Furthermore, the fork fixing part of the third hand from the top is arranged offset in the front-back direction from the fork fixing parts of the other four hands. This allows the forks of each of the five hands to be individually attached and detached relative to the fork fixing parts without removing the forks of the other hands. Therefore, in the industrial robot described in Patent Document 1, maintainability can be improved. On the other hand, the base end portion of the substrate loading mechanism is enlarged, resulting in the possibility of making the industrial robot larger.

[0012] Furthermore, in the industrial robot described in Patent Document 1, when the number of hands in the substrate loading mechanism is increased so that more substrates can be transported at once, if the fork fixing parts of each hand are arranged in a state where the fork fixing parts of each hand do not overlap in the vertical direction, so that the forks of multiple hands can be individually attached and detached relative to the fork fixing parts without removing the forks of other hands, the base end side of the substrate loading mechanism becomes larger. As a result, it is possible to make the industrial robot larger.

[0013] Therefore, the objective of this invention is to provide an industrial robot having a loading mechanism having a plurality of hands overlapping at a predetermined interval in the vertical direction and loading a plurality of transportable objects, wherein the base end portion of the loading mechanism can be miniaturized even if the loading portions of the plurality of hands can be individually attached and detached without removing the loading portions of the other hands.

[0014] Technical solutions adopted to solve technical problems

[0015] To address the aforementioned technical problems, the present invention provides an industrial robot comprising: a loading mechanism for loading multiple objects to be transported; wherein the loading mechanism includes at least three or more hands having loading portions for transporting objects and overlapping each other in the vertical direction at predetermined intervals. Each hand includes: a fixing portion for fixing a portion of the loading portion; and a headed bolt for fixing the fixed portion to the fixing portion. The fixing portions of the multiple hands overlap in the vertical direction at predetermined intervals. The fixed portion is fixed to the fixing portion by bolts arranged axially in the vertical direction, overlapping the fixing portion in the vertical direction. The bolt with its head positioned on the lower side is designated as an upward bolt, and the bolt with its head positioned on the upper side is designated as a downward bolt. Among the multiple hands (excluding the topmost and bottommost hands) with upward bolts, the first hand is designated as one of the hands. The second hand is designated as one of the multiple hands (excluding the topmost and bottommost hands) with downward bolts. When the loading mechanism has the first hand, through holes are formed in the fixing and fixed parts of all hands below the upward bolt of the first hand for engaging tools from below the bottommost hand to the head of the upward bolt of the first hand. When the loading mechanism has the second hand, through holes are formed in the fixing and fixed parts of all hands above the downward bolt of the second hand for engaging tools from above the topmost hand to the head of the downward bolt of the second hand. The inner diameter of the through holes is larger than the outer diameter of the head.

[0016] In the industrial robot of the present invention, the hand comprises: a fixing part for fixing a fixed part of a loading part; and a headed bolt for fixing the fixed part to the fixing part. The fixed part is fixed to the fixing part by means of a bolt arranged axially in the vertical direction, so as to overlap with the fixing part in the vertical direction. In addition, in the present invention, the fixing parts of multiple hands overlap at a predetermined interval in the vertical direction. However, when the loading mechanism has a first hand, through holes are formed in the fixing parts and fixed parts of all hands located below the upward bolt of the first hand for engaging a tool from the lower side of the lowermost hand to the head of the upward bolt of the first hand. When the loading mechanism has a second hand, through holes are formed in the fixing parts and fixed parts of all hands located above the downward bolt of the second hand for engaging a tool from the upper side of the uppermost hand to the head of the downward bolt of the second hand. Furthermore, in the present invention, the inner diameter of the through hole is larger than the outer diameter of the head.

[0017] Therefore, in this invention, even if the fixing parts of multiple hands overlap vertically, and even if the loading parts of all hands are fixed to the fixing parts, tools can be used to install or remove the bolts of each of the multiple hands from the lower side of the lowermost hand or from the upper side of the uppermost hand. Therefore, in this invention, even if the fixing parts of multiple hands overlap vertically, the loading parts of each of the multiple hands can be installed or removed individually without removing the loading parts of the other hands. Furthermore, in this invention, since the fixing parts of multiple hands overlap vertically, the base end portion of the loading mechanism can be miniaturized. That is, in this invention, even if the loading parts of each of the multiple hands can be installed or removed individually without removing the loading parts of the other hands, the base end portion of the loading mechanism can be miniaturized.

[0018] In this invention, ideally, the bolt on the uppermost hand is a downward bolt, while the bolts on the remaining hands (excluding the uppermost hand) are upward bolts. With this configuration, any upward bolts that are loosened using a tool will fall under their own weight to the underside of the lowermost hand. Therefore, the bolts on the remaining hands (excluding the uppermost hand) can be easily removed, resulting in easy bolt removal.

[0019] In this invention, ideally, the hand moves in a straight line in the horizontal direction when transporting the object. The direction orthogonal to both the hand's movement direction and the vertical direction is defined as the orthogonal direction. The fixed part is then fixed to the fixing part by bolts positioned on both sides of the orthogonal direction relative to the center of the hand in that direction. The bolts on the hands other than the topmost hand gradually shift inwards towards the orthogonal direction as the hand moves from the top to the bottom. With this configuration, the fixing parts of the multiple hands overlap at a predetermined interval in the vertical direction. Even if the position of the bolts on each hand (excluding the topmost hand) cannot be visually confirmed from above, it is easy to determine the horizontal position of the bolts on each hand (excluding the topmost hand).

[0020] In this invention, ideally, the loading section comprises a loading section main body for loading and transporting objects, and the loading section main body is integrally formed with the fixed section. While this invention results in a situation where the shape of the fixed section must be changed for each of the multiple hands depending on the number of through holes, etc., formed in the fixed section, this configuration allows the loading section main body to have a common shape in all hands. Therefore, the component cost of the hands can be reduced.

[0021] Invention Effects

[0022] As described above, in this invention, an industrial robot is provided, which includes a loading mechanism having a plurality of hands overlapping at a predetermined interval in the vertical direction and loading a plurality of transportable objects. The loading mechanism can be miniaturized even if the loading parts of the plurality of hands can be individually attached and detached without removing the loading parts of the other hands. Attached Figure Description

[0023] Figure 1 This is a perspective view of an industrial robot according to an embodiment of the present invention.

[0024] Figure 2 yes Figure 1 A perspective view of the loading mechanism, linear drive mechanism, and tilt correction mechanism shown.

[0025] Figure 3 yes Figure 1 A three-dimensional view of the loading mechanism shown.

[0026] Figure 4 It is represented from different directions Figure 3 A three-dimensional view of the loading mechanism shown.

[0027] Figure 5 yes Figure 3 A bottom view of a portion of the loading mechanism shown.

[0028] Figure 6 It is used for explanation Figure 5 A sectional view of the structure at section E-E.

[0029] Figure 7 It is used for explanation Figure 5 A sectional view of the structure at section F-F.

[0030] Figure 8 It is used for explanation Figure 5 A cross-sectional view of the structure at section G-G.

[0031] Figure 9 It is used for explanation Figure 5 A cross-sectional view of the structure at section H-H.

[0032] Figure 10 It is used for explanation Figure 5 A cross-sectional view of the structure at section J-J.

[0033] Figure 11 It is used for explanation Figure 5 A cross-sectional view of the structure at section K-K.

[0034] Figure 12 It is used to explain in Figure 3 The bottom view of the structure of the second hand from the top.

[0035] Figure 13 It is used to explain in Figure 3 The bottom view of the structure of the fifth hand from the top.

[0036] Figure 14 It is used to explain in Figure 3 The bottom view of the hand structure positioned at the bottom.

[0037] Figure 15 yes Figure 3 Side view of the base end of the loading mechanism shown.

[0038] Figure 16 yes Figure 3 The rear view of the loading mechanism shown.

[0039] Figure 17 yes Figure 3 The rear view of the loading mechanism shown.

[0040] [Explanation of reference numerals in the attached figures]

[0041] 1… Robot (industrial robot); 2… Wafer (semiconductor wafer, object to be transported); 3… Loading mechanism; 14… Hand; 15-23… Hand (first hand); 24… Hand; 36… Blade (main body of loading part, part of loading part); 37-47… Blade holding part (fixed part, part of loading part); 49-59… Fixing part (fixed part); 61… Bolt (downward bolt); 61a-71a… Head; 62-71… Bolt (upward bolt); h1-h9… Through hole; T… Tool; X… Direction of hand movement; Y… Orthogonal direction. Detailed Implementation

[0042] The embodiments of the present invention will now be described with reference to the accompanying drawings.

[0043] (Overall structure of industrial robots)

[0044] Figure 1 This is a perspective view of an industrial robot 1 according to an embodiment of the present invention. Figure 2 yes Figure 1 The three-dimensional view shows the loading mechanism 3, the linear drive mechanisms 5-7, and the tilt correction mechanism 8. Figure 3 yes Figure 1 The three-dimensional view of the loading mechanism 3 shown.

[0045] The industrial robot 1 (hereinafter referred to as "robot 1") in this embodiment is a robot used to transport semiconductor wafers 2 (hereinafter referred to as "wafers 2"), which are the objects to be transported. The wafers 2 are formed in the shape of thin disks. For example, the robot 1 simultaneously removes multiple wafers 2 from a cassette (not shown) in which multiple wafers 2 are stacked at a predetermined interval, and transfers the multiple wafers 2 removed from the cassette into a predetermined processing apparatus constituting a semiconductor manufacturing system (not shown). In addition, the robot 1 simultaneously removes multiple wafers 2 from a handling apparatus in which multiple wafers 2 are stacked at a predetermined interval, and transfers the removed multiple wafers 2 into a cassette.

[0046] Robot 1 includes: a loading mechanism 3 that carries multiple wafers 2; a hand 4 that carries one wafer 2; a linear drive mechanism 5 for moving the loading mechanism 3 in a horizontal direction; a linear drive mechanism 6 for moving the hand 4 in a horizontal direction; a linear drive mechanism 7 for moving the linear drive mechanisms 5 and 6 in a horizontal direction; a tilt correction mechanism 8 for correcting the tilt of the loading mechanism 3 and the hand 4; a main body 9 that holds the tilt correction mechanism 8; and a base member 10 that supports the main body 9 so that it can move in a horizontal direction.

[0047] Multiple wafers 2 are loaded onto a loading mechanism 3, overlapping each other at a constant spacing in the vertical direction. The loading mechanism 3 includes multiple hands 14 to 24 for loading wafers 2. The loading mechanism 3 of this embodiment includes 11 hands 14 to 24. Each of the hands 14 to 24 has one wafer 2 loaded on it. The 11 hands 14 to 24 overlap at a predetermined spacing in the vertical direction. Specifically, the 11 hands 14 to 24 overlap at a constant spacing. The 11 hands 14 to 24 face the same direction.

[0048] Additionally, the loading mechanism 3 includes a spacing changing mechanism 25 for altering the vertical spacing of the 11 hands 14-24. Hands 4 are positioned higher than hands 14-24. Hands 4 face the same direction as hands 14-24. The specific structures of hands 14-24 and the spacing changing mechanism 25 will be described later. Furthermore, the base portion of the loading mechanism 3 is covered by a cover 27 (see reference). Figure 2 ),exist Figure 3 The illustration of cover 27 is omitted in the text.

[0049] Linear drive mechanism 5 causes loading mechanism 3 to reciprocate linearly. That is, linear drive mechanism 5 causes 11 hands 14-24 to reciprocate linearly. Linear drive mechanism 5 is positioned lower than hands 14-24. Linear drive mechanism 5 includes, for example, a motor, a ball screw, and a guide mechanism. Linear drive mechanism 6 causes hand 4 to reciprocate linearly in the same direction as the reciprocating movement of hands 14-24 moved by linear drive mechanism 5. Linear drive mechanism 6 is positioned lower than hands 14-24. Linear drive mechanism 6, like linear drive mechanism 5, includes, for example, a motor, a ball screw, and a guide mechanism.

[0050] The linear drive mechanism 7 causes the linear drive mechanisms 5 and 6 to reciprocate linearly in the same direction as the reciprocating movement direction of the hands 4, 14-24 moved by the linear drive mechanisms 5 and 6. That is, the linear drive mechanism 7 causes the hands 14-24 to reciprocate further together with the linear drive mechanism 5 in the same direction as the reciprocating movement direction of the hands 4, 14-24 moved by the linear drive mechanisms 5 and 6, and causes the hands 4 to reciprocate further together with the linear drive mechanism 6. The linear drive mechanism 7 is located below the linear drive mechanisms 5 and 6. Like the linear drive mechanisms 5 and 6, the linear drive mechanism 7 includes, for example, two electric motors, two ball screws, and a guide mechanism.

[0051] A tilt correction mechanism 8 is disposed below the linear drive mechanism 7. The linear drive mechanism 7 is mounted on the tilt correction mechanism 8. The tilt correction mechanism 8 corrects the tilt of the hands 4, 14-24, which are loaded with the wafer 2, by tilting the linear drive mechanism 7. The tilt correction mechanism 8 includes: a first tilt correction mechanism that rotates along with the linear drive mechanism 7 in a predetermined first direction that is tilted relative to the vertical direction; and a second tilt correction mechanism that rotates along with the linear drive mechanism 7 in a second direction that is tilted relative to both the vertical and vertical directions and relative to the first direction. The first direction is substantially consistent with the reciprocating movement direction of the loading mechanism 3 and the hands 4. The second direction is orthogonal to the first direction.

[0052] The main body 9 includes a columnar frame 31 that holds the tilt correction mechanism 8 in a vertically movable manner. The columnar frame 31 is formed as an elongated column in the vertical direction. Additionally, the main body 9 includes a base 32 that forms the lower end of the main body 9 and is horizontally movable relative to the base member 10; and a rotating base 33 to which the lower end of the columnar frame 31 is fixed and which is rotatable relative to the base 32. The robot 1 includes a lifting mechanism that raises and lowers the tilt correction mechanism 8 relative to the columnar frame 31; a rotating mechanism that rotates the rotating base 33 relative to the base 32 with the vertical direction as the axis of rotation; and a horizontal moving mechanism that moves the base 32 horizontally relative to the base member 10.

[0053] (Structure of the hand)

[0054] Figure 4 It is represented from different directions Figure 3 The three-dimensional view of the loading mechanism 3 shown. Figure 5 yes Figure 3 Bottom view of a portion of the loading mechanism 3 shown. Figure 6 It is used for explanation Figure 5 A sectional view of the structure at section E-E. Figure 7 It is used for explanation Figure 5 A sectional view of the structure at section F-F. Figure 8 It is used for explanation Figure 5 A cross-sectional view of the structure at section G-G. Figure 9 It is used for explanation Figure 5 A cross-sectional view of the structure at section H-H. Figure 10 It is used for explanation Figure 5 A cross-sectional view of the structure at section J-J.

[0055] Figure 11 It is used for explanation Figure 5 A cross-sectional view of the structure at section K-K. Figure 12 It is used for explanation Figure 3 The bottom view of the structure of hand 15 shown. Figure 13 It is used for explanation Figure 3 The bottom view of the structure of hand 18 shown. Figure 14 It is used for explanation Figure 3 The bottom view of the structure of hand 24 shown. Figure 15 yes Figure 3 Side view of the base end of the loading mechanism 3 shown. Figure 16 , Figure 17 yes Figure 3 The rear view of the loading mechanism 3 shown.

[0056] As described above, the loading mechanism 3 includes 11 hands 14 to 24. The hands 14 to 24 are arranged in the order described above, from top to bottom. The hands 14 to 24 move linearly in the horizontal direction when transporting the wafer 2. In the following description, the direction of movement (reciprocating direction) of the hands 14 to 24 will be referred to as... Figure 3 When the X-direction is set to the "front-back direction", it will be perpendicular to both the up / down and front-back directions. Figure 3 The Y-direction in the above is defined as the "left-right direction". In this embodiment, the left-right direction (Y-direction) is an orthogonal direction that is orthogonal to the movement direction of the hands 14-24 and the up-down direction.

[0057] Additionally, for ease of explanation, the side in the front-to-back direction will be referred to below. Figure 3 In the equation, the X1 direction side is designated as the "front" side, and its opposite side is... Figure 3In the equation, the X2 direction side is set as the "rear" side, and the left and right sides are... Figure 3 In the equation, the Y1 direction side is designated as the "right" side, and its opposite side is... Figure 3 The Y2 direction side is designated as the "left" side. In this embodiment, the front side is the front end side of the hands 14-24, and the rear side is the base end side of the hands 14-24.

[0058] Hands 14-24 are equipped with: blades 36 for loading chip 2. For example... Figure 6 As shown, hand 14 includes: a blade retaining member 37 for fixing the blade 36; a fixing member 49 for fixing the blade retaining member 37; and a headed bolt 61 for fixing the blade retaining member 37 to the fixing member 49. Similarly, hand 15 includes: a blade retaining member 38 for fixing the blade 36; a fixing member 50 for fixing the blade retaining member 38; and a headed bolt 62 for fixing the blade retaining member 38 to the fixing member 50.

[0059] Similarly, hand 16 includes: a blade retaining member 39 for fixing the blade 36; a fixing member 51 for fixing the blade retaining member 39; and a headed bolt 63 for fixing the blade retaining member 39 to the fixing member 51. Hand 17 includes: a blade retaining member 40 for fixing the blade 36; a fixing member 52 for fixing the blade retaining member 40; and a headed bolt 64 for fixing the blade retaining member 40 to the fixing member 52. Hand 18 includes: a blade retaining member 41 for fixing the blade 36; a fixing member 53 for fixing the blade retaining member 41; and a headed bolt 65 for fixing the blade retaining member 41 to the fixing member 53 (see reference). Figure 6 and Figure 7 ).

[0060] Additionally, hand 19 includes: a blade retaining member 42 for fixing the blade 36; a fixing member 54 for fixing the blade retaining member 42; and a headed bolt 66 for fixing the blade retaining member 42 to the fixing member 54. Hand 20 includes: a blade retaining member 43 for fixing the blade 36; a fixing member 55 for fixing the blade retaining member 43; and a headed bolt 67 for fixing the blade retaining member 43 to the fixing member 55. Hand 21 includes: a blade retaining member 44 for fixing the blade 36; a fixing member 56 for fixing the blade retaining member 44; and a headed bolt 68 for fixing the blade retaining member 44 to the fixing member 56 (see reference). Figure 8 and Figure 9 ).

[0061] In addition, hand 22 includes: a blade retaining member 45 for fixing the blade 36; a fixing member 57 for fixing the blade retaining member 45; and a headed bolt 69 for fixing the blade retaining member 45 to the fixing member 57. Hand 23 includes: a blade retaining member 46 for fixing the blade 36; a fixing member 58 for fixing the blade retaining member 46; and a headed bolt 70 for fixing the blade retaining member 46 to the fixing member 58. Hand 24 includes: a blade retaining member 47 for fixing the blade 36; a fixing member 59 for fixing the blade retaining member 47; and a headed bolt 71 for fixing the blade retaining member 47 to the fixing member 59 (see reference). Figures 9-11 ).

[0062] In this embodiment, the loading section of the wafer 2 is composed of each of the blade holding members 37 to 47 and the blade 36. Furthermore, in this embodiment, the blade 36 is the main body of the loading section for loading the wafer 2, and the blade holding members 37 to 47 are the fixed parts of the loading section. Additionally, the fixing members 49 to 59 are fixing parts that fix the fixed parts of the blade holding members 37 to 47. Furthermore, similar to the hands 14 to 24, the hand 4 includes: a blade 73 for loading the wafer 2 (see reference). Figure 2 ).

[0063] The blade 36 is formed in a flat plate shape. The blade 36 is configured such that its thickness direction is consistent with its vertical direction. When viewed from the vertical direction, the shape of the blade 36 is approximately U-shaped. The blade 36 and the blade retaining components 37-47 are formed separately.

[0064] The blade holding members 37-47 are formed into a generally rectangular flat plate. The blade holding members 37-47 are arranged such that their thickness direction and vertical direction are aligned. The hand 14 of this embodiment has two blade holding members 37, which are arranged spaced apart in the left-right direction. Similarly, each of the hands 15-24 has two blade holding members 38-47, which are also arranged spaced apart in the left-right direction.

[0065] The two blade holding members 37 have the same shape and are symmetrically arranged with respect to the center line of the hand 14 in the left-right direction when viewed from above. Similarly, the two blade holding members 38-47 each have the same shape and are symmetrically arranged with respect to the center lines of the hands 15-24 in the left-right direction when viewed from above. In addition, the outer shapes of the blade holding members 37-47 are the same.

[0066] The rear end (base end) of blade 36 is fixed to the front end of two blade retaining members 37-47 by bolts such as countersunk bolts. The rear end of blade 36 is positioned above the front end of blade retaining members 37-47 and is fixed to them in a manner that overlaps with the front end of blade retaining members 37-47 in the vertical direction. The lower surface of the rear end of blade 36 contacts the upper surface of the front end of blade retaining members 37-47. The upper surface of the front end of blade retaining members 37-47 is slightly concave downwards.

[0067] The fixing members 49-59 are formed in a flat plate shape. The fixing members 49-59 are arranged such that their thickness direction and vertical direction are aligned. The fixing members 49-59 have approximately the same shape. The fixing members 49-59 overlap at a predetermined interval in the vertical direction. As described above, the hands 14-24 are arranged from top to bottom in the aforementioned order, and the fixing members 49-59 are arranged from top to bottom in the same order. From the top of the fixing member 49, the fixing members 50-59 disposed on the lower side of the fixing member 49 are not visible.

[0068] The blade retaining member 37 is fixed to the front end of the fixing member 49 by bolts 61 arranged axially in the vertical direction. The blade retaining member 37 is fixed to the fixing member 49 in a state of overlapping with the fixing member 49 in the vertical direction. Specifically, the blade retaining member 37 is disposed on the upper side of the front end of the fixing member 49 and is fixed to the fixing member 49 in a state of overlapping with the front end of the fixing member 49. The lower surface of the blade retaining member 37 contacts the upper surface of the front end of the fixing member 49. The upper surface of the front end of the fixing member 49 is slightly concave downward. In addition, a height adjustment shim may be provided between the lower surface of the blade retaining member 37 and the upper surface of the front end of the fixing member 49.

[0069] Similarly, the blade retaining member 38 is fixed to the front end of the fixing member 50 by bolts 62 arranged axially in the vertical direction; the blade retaining member 39 is fixed to the front end of the fixing member 51 by bolts 63 arranged axially in the vertical direction; the blade retaining member 40 is fixed to the front end of the fixing member 52 by bolts 64 arranged axially in the vertical direction; the blade retaining member 41 is fixed to the front end of the fixing member 53 by bolts 65 arranged axially in the vertical direction; and the blade retaining member 42 is fixed to the front end of the fixing member 54 by bolts 66 arranged axially in the vertical direction.

[0070] In addition, the blade retaining member 43 is fixed to the front end of the fixing member 55 by bolts 67 arranged axially in the vertical direction; the blade retaining member 44 is fixed to the front end of the fixing member 56 by bolts 68 arranged axially in the vertical direction; the blade retaining member 45 is fixed to the front end of the fixing member 57 by bolts 69 arranged axially in the vertical direction; the blade retaining member 46 is fixed to the front end of the fixing member 58 by bolts 70 arranged axially in the vertical direction; and the blade retaining member 47 is fixed to the front end of the fixing member 59 by bolts 71 arranged axially in the vertical direction.

[0071] Blade retaining components 38-47 are respectively disposed on the upper side of the front end portion of each of the fixing components 50-59, and are fixed to the fixing components 50-59 in a vertically overlapping manner with the front end portion of each of the fixing components 50-59. The lower surface of each of the blade retaining components 38-47 contacts the upper surface of the front end portion of each of the fixing components 50-59. The upper surface of the front end portion of the fixing components 50-59 is slightly concave downwards. Alternatively, a height adjustment shim may be disposed between the lower surface of each of the blade retaining components 38-47 and the upper surface of the front end portion of each of the fixing components 50-59.

[0072] Except for the front ends of the fixing parts 49-59 of the fixing parts 37-47, most of the fixing parts 49-59 are disposed on the lower frame 75 constituting the lower surface of the loading mechanism 3 and the upper frame 76 constituting the upper surface of the loading mechanism 3. Figures 15-17 (Refer to) The lower frame 75 is fixed to the movable part of the linear drive mechanism 5. Multiple upright supports are fixed to the upper surface of the lower frame 75, and the upper frame 76 is fixed to the upper ends of these supports. Furthermore, in Figure 3 and Figure 4 The illustration of the upper frame 76 is omitted in the text.

[0073] Bolt 61 is a bolt with a hexagonal recess and a hexagonal hole formed in its head 61a. Bolts 62 to 71 are also bolts with hexagonal recesses and hexagonal holes formed in their heads 62a to 71a. The head 61a of bolt 61 is located on the upper side of its shaft portion. The heads 62a to 71a of bolts 62 to 71 are located on the lower side of their shaft portions. In this embodiment, bolts 62 to 71 are bolts with their heads 62a to 71a located on the lower side (i.e., upward bolts), and bolt 61 is a bolt with its head 61a located on the upper side (i.e., downward bolt).

[0074] That is, in this embodiment, the bolt 61 of the uppermost hand 14 is a downward bolt. Furthermore, the bolts 62 to 71 of the remaining hands 15 to 24 (excluding the uppermost hand 14) are upward bolts. In this embodiment, the hands 15 to 23, excluding the uppermost hand 14 and the lowermost hand 24, are the first hands with upward bolts.

[0075] like Figure 3 As shown, the blade retaining component 37 is fixed to the fixing component 49 by four bolts 61. Specifically, one of the two blade retaining components 37 is fixed to the fixing component 49 by two bolts 61, and the other blade retaining component 37 is fixed to the fixing component 49 by two bolts 61. The two bolts 61 fixing one blade retaining component 37 are positioned on one side of the left-right direction relative to the center of the hand 14, and the two bolts 61 fixing the other blade retaining component 37 are positioned on the other side of the left-right direction relative to the center of the hand 14. That is, the blade retaining component 37 is fixed to the fixing component 49 by bolts 61 positioned on both sides of the left-right direction relative to the center of the hand 14.

[0076] Similarly, each of the blade retaining components 38 to 47 is fixed to each of the fixing components 50 to 59 by four bolts 62 to 71. In addition, each of the blade retaining components 38 to 47 is fixed to each of the fixing components 50 to 59 by bolts 62 to 71 arranged on both sides in the left and right directions relative to the center of each of the hands 15 to 24.

[0077] Two bolts 61 located on one side in the left-right direction are arranged with a gap between them in the front-back direction. Two bolts 61 located on the other side in the left-right direction are also arranged with a gap between them in the front-back direction. The two bolts 61 located on one side in the left-right direction and the two bolts 61 located on the other side in the left-right direction are located at the same position in the front-back direction.

[0078] Similarly, the two bolts 62 located on one side in the left-right direction are arranged with a gap in the front-back direction. The two bolts 62 located on the other side in the left-right direction are also arranged with a gap in the front-back direction. The two bolts 62 located on one side in the left-right direction and the two bolts 62 located on the other side in the left-right direction are located at the same position in the front-back direction.

[0079] Similarly, the two bolts 63-71 located on one side in the left-right direction are each arranged at a distance from each other in the front-back direction, and the two bolts 63-71 located on the other side in the left-right direction are also arranged at a distance from each other in the front-back direction. In addition, each of the two bolts 63-71 located on one side in the left-right direction and each of the two bolts 63-71 located on the other side in the left-right direction are located at the same position in the front-back direction.

[0080] On both sides in the left-right direction, two bolts 61 are disposed on the outer ends of the blade retaining component 37 in the left-right direction (see reference). Figure 3 On both sides in the left-right direction, two bolts 61 and two bolts 62 are positioned in the same location in both the left-right and front-back directions, with two bolts 62 positioned directly below the two bolts 61. On both sides in the left-right direction, two bolts 62 and two bolts 63 are positioned in the same location in the left-right direction, but staggered in the front-back direction. Bolts 62 and 63 are arranged alternately from the rear to the front in the aforementioned sequence.

[0081] Additionally, on both sides in the left-right direction, two bolts 64 and two bolts 65 are positioned at the same location in the left-right direction, and staggered in the front-back direction. Bolts 64 and 65 are arranged alternately from the rear to the front in the aforementioned order. Bolts 64 and 65 are positioned inside the bolts 62 and 63 in the left-right direction. Furthermore, on both sides in the left-right direction, two bolts 66 and two bolts 67 are positioned at the same location in the left-right direction, and staggered in the front-back direction. Bolts 66 and 67 are arranged alternately from the rear to the front in the aforementioned order. Bolts 66 and 67 are positioned inside the bolts 64 and 65 in the left-right direction.

[0082] Furthermore, on both sides in the left-right direction, two bolts 68 and two bolts 69 are positioned at the same location in the left-right direction, and staggered in the front-back direction. Bolts 68 and 69 are arranged alternately from the rear to the front in the aforementioned order. Bolts 68 and 69 are positioned inside the bolts 66 and 67 in the left-right direction. Bolt 70 is positioned inside the bolts 68 and 69 in the left-right direction. Bolt 71 is positioned inside the bolt 70 in the left-right direction.

[0083] Thus, bolts 61 and 62 are positioned at the same horizontal position, while bolts 62 to 71 are each positioned at a staggered horizontal position. That is, when viewed from above, bolts 61 and 62 overlap, while bolts 62 to 71 are each positioned at a staggered position and do not overlap.

[0084] Furthermore, bolts 64 and 65 are positioned more inward in the left-right direction than bolts 62 and 63; bolts 66 and 67 are positioned more inward in the left-right direction than bolts 64 and 65; bolts 68 and 69 are positioned more inward in the left-right direction than bolts 66 and 67; bolt 70 is positioned more inward in the left-right direction than bolts 68 and 69; and bolt 71 is positioned more inward in the left-right direction than bolt 70. The bolts 62 to 71 on the remaining hands 15 to 24 (excluding the uppermost hand 14) are gradually staggered in the left-right direction from the upper hand 15 towards the lower hand 24. In this embodiment, bolts 62, 64, 66, 68, 70, and 71 are positioned in the same position in the front-back direction, as are bolts 63, 65, 67, and 69.

[0085] like Figure 6 As shown, a mounting hole 37a is formed on the blade retaining member 37 for mounting the head 61a of the bolt 61. A threaded hole is formed on the fixing member 49 for engaging the external thread of the bolt 61. The bolt 61 is screwed into the fixing member 49 from above. Furthermore, in this embodiment, the bolt 61 is positioned such that even if the hand 4 and the hand 14 overlap, the bolt 61 does not cover the hand 4 from above.

[0086] A threaded hole is formed on the blade retaining member 38 for engaging the external thread of the bolt 62. Similarly, each of the blade retaining members 39 to 47 has a threaded hole for engaging the external thread of each of the bolts 63 to 71. A mounting hole 50a is formed on the fixing member 50 for mounting the head 62a of the bolt 62. Similarly, each of the fixing members 51 to 59 has mounting holes 51a to 59a for mounting the heads 63a to 71a of each of the bolts 63 to 71 (see reference). Figures 6 to 11 Bolts 62 to 71 are screwed into the blade retaining components 38 to 47 from the bottom.

[0087] like Figure 6 As shown, through holes h1 are formed on each blade retaining member 39-47 and each fixing member 51-59 located on the lower side of the bolt 62, for engaging the tool T from the lower side of the fixing member 59 with the head 62a of the bolt 62. That is, through holes h1 are formed on the blade retaining members 39-47 and fixing members 51-59 of all the hands 16-24 located on the lower side of the bolt 62, for engaging the tool T from the lower side of the lowest hand 24 with the head 62a. The through holes h1 are formed directly below the head 62a.

[0088] Furthermore, through holes h2 are formed on each blade retaining member 40-47 and each fixing member 52-59 located on the lower side of the bolt 63, for engaging the tool T from the lower side of the fixing member 59 with the head 63a of the bolt 63. That is, through holes h2 are formed on the blade retaining members 40-47 and fixing members 52-59 of all the hands 17-24 located on the lower side of the bolt 63, for engaging the tool T from the lower side of the lowest hand 24 with the head 63a. The through holes h2 are formed directly below the head 63a.

[0089] like Figure 7 As shown, through holes h3 are formed on each blade retaining member 41-47 and each fixing member 53-59 located on the lower side of the bolt 64, for engaging the tool T from the lower side of the fixing member 59 with the head 64a of the bolt 64. That is, through holes h3 are formed on the blade retaining members 41-47 and fixing members 53-59 of all the hands 18-24 located on the lower side of the bolt 64, for engaging the tool T from the lower side of the lowest hand 24 with the head 64a. The through holes h3 are formed directly below the head 64a.

[0090] Furthermore, through holes h4 are formed on each blade retaining member 42-47 and each fixing member 54-59 located on the lower side of the bolt 65, for engaging the tool T from the lower side of the fixing member 59 with the head 65a of the bolt 65. That is, through holes h4 are formed on all the blade retaining members 42-47 and fixing members 54-59 of all the hands 19-24 located on the lower side of the bolt 65, for engaging the tool T from the lower side of the lowest hand 24 with the head 65a. The through holes h4 are formed directly below the head 65a.

[0091] like Figure 8 As shown, through holes h5 are formed on each blade retaining member 43-47 and each fixing member 55-59 located on the lower side of the bolt 66, for engaging the tool T from the lower side of the fixing member 59 with the head 66a of the bolt 66. That is, through holes h5 are formed on all the blade retaining members 43-47 and fixing members 55-59 of all the hands 20-24 located on the lower side of the bolt 66, for engaging the tool T from the lower side of the lowest hand 24 with the head 66a. The through holes h5 are formed directly below the head 66a.

[0092] Furthermore, through holes h6 are formed on each blade retaining member 44-47 and each fixing member 56-59 located on the lower side of the bolt 67, for engaging the tool T from the lower side of the fixing member 59 with the head 67a of the bolt 67. That is, through holes h6 are formed on all the blade retaining members 44-47 and fixing members 56-59 of all the hands 21-24 located on the lower side of the bolt 67, for engaging the tool T from the lower side of the lowest hand 24 with the head 67a. The through holes h6 are formed directly below the head 67a.

[0093] like Figure 9 As shown, through holes h7 are formed on each blade retaining member 45-47 and each fixing member 57-59 located on the lower side of the bolt 68, for engaging the tool T from the lower side of the fixing member 59 with the head 68a of the bolt 68. That is, through holes h7 are formed on all the blade retaining members 45-47 and fixing members 57-59 of all the hands 22-24 located on the lower side of the bolt 68, for engaging the tool T from the lower side of the lowest hand 24 with the head 68a. The through holes h7 are formed directly below the head 68a.

[0094] Furthermore, through holes h8 are formed on the blade retaining members 46 and 47 and the fixing members 58 and 59 located on the lower side of the bolt 69, for the tool T to engage with the head 69a of the bolt 69 from the lower side of the fixing member 59. That is, through holes h8 are formed on the blade retaining members 46 and 47 and the fixing members 58 and 59 of all the hands 23 and 24 located on the lower side of the bolt 69, for the tool T to engage with the head 69a from the lower side of the lowest hand 24. The through holes h8 are formed directly below the head 69a.

[0095] like Figure 10 As shown, a through hole h9 is formed on the blade retaining member 47 and the fixing member 59 disposed on the lower side of the bolt 70 for engaging the tool T from the lower side of the fixing member 59 with the head 70a of the bolt 70. That is, a through hole h9 is formed on the blade retaining member 47 and the fixing member 59 of all the hands 24 disposed on the lower side of the bolt 70 for engaging the tool T from the lower side of the lowest hand 24 with the head 70a. The through hole h9 is formed directly below the head 70a.

[0096] Thus, through holes h1 are formed in the blade holding member 39 and the fixing member 51, through holes h1 and h2 are formed in the blade holding member 40 and the fixing member 52, and through holes h1 to h3 are formed in the blade holding member 41 and the fixing member 53 (see reference). Figure 13Through holes h1 to h4 are formed in the blade holding member 42 and the fixing member 54, and through holes h1 to h5 are formed in the blade holding member 43 and the fixing member 55. Furthermore, through holes h1 to h6 are formed in the blade holding member 44 and the fixing member 56, through holes h1 to h7 are formed in the blade holding member 45 and the fixing member 57, through holes h1 to h8 are formed in the blade holding member 46 and the fixing member 58, and through holes h1 to h9 are formed in the blade holding member 47 and the fixing member 59 (see reference). Figure 14 ).

[0097] Through holes h1 to h9 are circular holes that extend vertically. The inner diameter of through holes h1 to h9 is larger than the outer diameter of the head 62a to 70a of bolts 62 to 70. Tool T is a T-shaped wrench. At the front end of tool T, a hexagonal prism-shaped engaging portion is formed that engages with the recess of the head 62a to 70a.

[0098] A support member 78 having a support portion 78a for supporting the fixed member 50 from below is fixed to the fixed member 49. That is, the hand 14 has a support portion 78a for supporting the hand 15 from below. In this embodiment, support members 78 are fixed to the fixed member 49 on both sides in the left-right direction, so that the fixed member 50 can be supported from below on both sides in the left-right direction by the two support portions 78a.

[0099] Similarly, support members 79 are fixed to both ends of the fixing member 50 in the left-right direction. The support members 79 have support portions 79a for supporting the fixing member 51 from below on both sides in the left-right direction. Support members 80 are fixed to both ends of the fixing member 51 in the left-right direction. The support members 80 have support portions 80a for supporting the fixing member 52 from below on both sides in the left-right direction. Support members 81 are fixed to both ends of the fixing member 52 in the left-right direction. The support members 81 have support portions 81a for supporting the fixing member 53 from below on both sides in the left-right direction. Support members 82 are fixed to both ends of the fixing member 53 in the left-right direction. The support members 82 have support portions 82a for supporting the fixing member 54 from below on both sides in the left-right direction.

[0100] Additionally, support members 83 are fixed to both ends of the fixing member 54 in the left-right direction. The support members 83 have support portions 83a for supporting the fixing member 55 from below on both sides in the left-right direction. Support members 84 are fixed to both ends of the fixing member 55 in the left-right direction. The support members 84 have support portions 84a for supporting the fixing member 56 from below on both sides in the left-right direction. Support members 85 are fixed to both ends of the fixing member 56 in the left-right direction. The support members 85 have support portions 85a for supporting the fixing member 57 from below on both sides in the left-right direction. Support members 86 are fixed to both ends of the fixing member 57 in the left-right direction. The support members 86 have support portions 86a for supporting the fixing member 58 from below on both sides in the left-right direction. Support members 87 are fixed to both ends of the fixing member 58 in the left-right direction. The support members 87 have support portions 87a for supporting the fixing member 59 from below on both sides in the left-right direction.

[0101] That is, each of the hands 15 to 23 has two support portions 79a to 87a for supporting each of the hands 16 to 24 from below. The support portions 78a to 87a are formed in the shape of a flat plate. The support portions 78a to 87a are arranged such that the thickness direction of the support portions 78a to 87a is the same as the vertical direction. On the lower surface of the two end portions in the left-right direction of the fixing members 50 to 59, recesses 50b to 59b are formed for arranging each support portion 78a to 87a.

[0102] Recesses 50b to 59b extend upwards from the lower surface of each of the fixing members 50 to 59, and are recessed inwards in the left-right direction from both end faces of each of the fixing members 50 to 59. The upper surface of recesses 50b to 59b is a plane orthogonal to the vertical direction. The thickness (vertical thickness) of the support portions 78a to 87a is thinner than the vertical width of the recesses 50b to 59b. The position of each support member 79 to 87 relative to each fixing member 49 to 58 in the vertical direction can be adjusted by adjusting bolts 88.

[0103] Additionally, a support member 89 is fixed to the upper frame 76 of the loading mechanism 3. This support member 89 has support portions 89a for supporting the fixed member 49 from below on both sides in the left-right direction. The support portions 89a are formed in a flat plate shape, and are configured such that the thickness direction of the support portion 89a is consistent with the vertical direction. Furthermore, besides… Figure 15 Aside from that, the illustration of support component 89 is omitted.

[0104] On the lower surface of the two end portions of the fixing member 49 in the left-right direction, recesses 49b are formed for accommodating support portions 89a. Similar to recesses 50b to 59b, recesses 49b are recessed upwards from the lower surface of the fixing member 49 and inwards in the left-right direction from both end faces of the fixing member 49. The upper surface of the recesses 49b is a plane orthogonal to the vertical direction. The thickness of the support portion 89a (thickness in the vertical direction) is thinner than the width of the recesses 49b in the vertical direction. The position of the support member 89 relative to the upper frame 76 in the vertical direction can be adjusted using adjusting bolts.

[0105] (Structure of the spacing adjustment mechanism)

[0106] The spacing adjustment mechanism 25 changes the spacing of the 11 blades 36 in the vertical direction. Specifically, the spacing adjustment mechanism 25 changes the vertical spacing of the loading parts of the 11 hands 14-24. Specifically, the spacing adjustment mechanism 25 sets the vertical spacing of the 11 blades 36 to a predetermined first spacing (refer to...). Figure 17 ), and a second spacing wider than the first spacing (refer to Figure 16 The first spacing is, for example, about 8 mm, and the second spacing is, for example, about 10 mm. The spacing changing mechanism 25 includes: a lifting mechanism 91 for raising and lowering the hand 24; and a guide mechanism 92 for linearly guiding the hand 14 to 24 in the vertical direction.

[0107] The lifting mechanism 91 includes: a cylinder 93 as a drive source; and a connecting member 94 connecting the cylinder 93 and the hand 24. The cylinder 93 is a low-speed cylinder with a slow rod (piston) movement speed. The cylinder 93 is fixed to the upper surface of the lower frame 75. The cylinder 93 is configured such that the rod of the cylinder 93 protrudes downward. The connecting member 94 is fixed to the lower end of the rod of the cylinder 93 and the lower surface of the fixing member 59 of the hand 24.

[0108] The guide mechanism 92 is a ball spline mechanism comprising multiple spline shafts 95-98 and multiple outer cylinders 99 through which the spline shafts 95-98 are inserted. In this embodiment, the guide mechanism 92 comprises four spline shafts 95-98 and 22 outer cylinders 99. The spline shafts 95-98 are arranged such that their axial direction and vertical direction are aligned. The lower ends of the spline shafts 95-98 are fixed to the lower frame 75, and the upper ends are fixed to the upper frame 76. The outer cylinders 99 are formed in a cylindrical shape. Each of the hands 14-24 is fixed with an outer cylinder 99. Specifically, two outer cylinders 99 are fixed to each of the fixing members 49-59.

[0109] In this embodiment, when the spacing between the 11 blades 36 is the first spacing, the rod of cylinder 93 retracts, becoming the upward-pushing hand 24. At this time, as... Figure 17As shown, the upper surface of the fixing component 49 is in contact with the lower surface of the upper frame 76, the upper surface of the fixing component 50 is in contact with the lower surface of the fixing component 49, the upper surface of the fixing component 51 is in contact with the lower surface of the fixing component 50, the upper surface of the fixing component 52 is in contact with the lower surface of the fixing component 51, the upper surface of the fixing component 53 is in contact with the lower surface of the fixing component 52, the upper surface of the fixing component 54 is in contact with the lower surface of the fixing component 53, the upper surface of the fixing component 55 is in contact with the lower surface of the fixing component 54, the upper surface of the fixing component 56 is in contact with the lower surface of the fixing component 55, the upper surface of the fixing component 57 is in contact with the lower surface of the fixing component 56, the upper surface of the fixing component 58 is in contact with the lower surface of the fixing component 57, and the upper surface of the fixing component 59 is in contact with the lower surface of the fixing component 58.

[0110] Furthermore, when the spacing between the 11 blades 36 is the first spacing, gaps are formed in the vertical direction between the upper surfaces of the fixing member 49 and the support 89a, between the upper surfaces of the fixing member 50 and the support 78a, between the upper surfaces of the fixing member 51 and the support 79a, between the upper surfaces of the fixing member 52 and the support 80a, between the upper surfaces of the fixing member 53 and the support 81a, between the upper surfaces of the fixing member 54 and the support 82a, between the upper surfaces of the fixing member 55 and the support 83a, between the upper surfaces of the fixing member 56 and the support 84a, between the upper surfaces of the fixing member 57 and the support 85a, between the upper surfaces of the fixing member 58 and the support 86a, and between the upper surfaces of the fixing member 59 and the support 87a.

[0111] Furthermore, when the spacing between the 11 blades 36 is the first spacing, gaps are formed in the vertical direction between the lower surfaces of the fixing member 50 and the support 89a, between the lower surfaces of the fixing member 51 and the support 78a, between the lower surfaces of the fixing member 52 and the support 79a, between the lower surfaces of the fixing member 53 and the support 80a, between the lower surfaces of the fixing member 54 and the support 81a, between the lower surfaces of the fixing member 55 and the support 82a, between the lower surfaces of the fixing member 56 and the support 83a, between the lower surfaces of the fixing member 57 and the support 84a, between the lower surfaces of the fixing member 58 and the support 85a, and between the lower surfaces of the fixing member 59 and the support 86a.

[0112] On the other hand, when the spacing of the 11 blades 36 is the second spacing, the rod of cylinder 93 protrudes, putting hand 24 in the pull-down position. At this time, as... Figure 16 As shown, fixing component 49 contacts the upper surface of support portion 89a, fixing component 50 contacts the upper surface of support portion 78a, fixing component 51 contacts the upper surface of support portion 79a, fixing component 52 contacts the upper surface of support portion 80a, fixing component 53 contacts the upper surface of support portion 81a, fixing component 54 contacts the upper surface of support portion 82a, fixing component 55 contacts the upper surface of support portion 83a, fixing component 56 contacts the upper surface of support portion 84a, fixing component 57 contacts the upper surface of support portion 85a, fixing component 58 contacts the upper surface of support portion 86a, and fixing component 59 contacts the upper surface of support portion 87a.

[0113] Furthermore, when the spacing of the 11 blades 36 is the second spacing, gaps are formed in the vertical direction between the upper surface of the fixing member 49 and the lower surface of the upper frame 76, between the upper surface of the fixing member 50 and the lower surface of the fixing member 49, between the upper surface of the fixing member 51 and the lower surface of the fixing member 50, between the upper surface of the fixing member 52 and the lower surface of the fixing member 51, and between the upper surface of the fixing member 53 and the lower surface of the fixing member 52. A gap is formed between the upper surface of the fixing member 54 and the lower surface of the fixing member 53, a gap is formed between the upper surface of the fixing member 55 and the lower surface of the fixing member 54, a gap is formed between the upper surface of the fixing member 56 and the lower surface of the fixing member 55, a gap is formed between the upper surface of the fixing member 57 and the lower surface of the fixing member 56, a gap is formed between the upper surface of the fixing member 58 and the lower surface of the fixing member 57, and a gap is formed between the upper surface of the fixing member 59 and the lower surface of the fixing member 58.

[0114] With the spacing of the 11 blades 36 at the second spacing, when the lifting mechanism 91 raises the hand 24 (specifically, when the cylinder 93 raises the hand 24), the upper surface of the fixing member 59 contacts the lower surface of the fixing member 58, lifting the fixing member 58; the upper surface of the fixing member 58 contacts the lower surface of the fixing member 57, lifting the fixing member 57; the upper surface of the fixing member 57 contacts the lower surface of the fixing member 56, lifting the fixing member 56; the upper surface of the fixing member 56 contacts the lower surface of the fixing member 55, lifting the fixing member 55; and the upper surface of the fixing member 55 contacts the fixing part... The lower surface of component 54 contacts and lifts the fixing component 54; the upper surface of fixing component 54 contacts and lifts the fixing component 53; the upper surface of fixing component 53 contacts and lifts the fixing component 52; the upper surface of fixing component 52 contacts and lifts the fixing component 51; the upper surface of fixing component 51 contacts and lifts the fixing component 50; the upper surface of fixing component 50 contacts and lifts the fixing component 49; the spacing of the 11 blades 36 becomes the first spacing.

[0115] Thus, with the spacing of the 11 blades 36 at the second spacing, when the lifting mechanism 91 raises the hand 24, the upper surfaces of hands 24-15 sequentially contact the lower surfaces of hands 23-14, lifting hands 23-14 in the aforementioned order, and the spacing of the 11 blades 36 becomes the first spacing. That is, with the spacing of the 11 blades 36 at the second spacing, when the lifting mechanism 91 raises the hand 24, hands 14-23 rise along with the hand 24, and the spacing of the 11 blades 36 in the vertical direction becomes the first spacing.

[0116] On the other hand, with the spacing of the 11 blades 36 at the first spacing, when the lifting mechanism 91 lowers the hand 24 (specifically, when the cylinder 93 lowers the hand 24), the fixing member 59 contacts the upper surface of the support portion 87a, pulling down the fixing member 58; the fixing member 58 contacts the upper surface of the support portion 86a, pulling down the fixing member 57; the fixing member 57 contacts the upper surface of the support portion 85a, pulling down the fixing member 56; the fixing member 56 contacts the upper surface of the support portion 84a, pulling down the fixing member 55; the fixing member 55... The upper surface of the contact support 83a pulls down the fixing member 54, the upper surface of the contact support 82a pulls down the fixing member 53, the upper surface of the contact support 81a pulls down the fixing member 52, the upper surface of the contact support 80a pulls down the fixing member 51, the upper surface of the contact support 79a pulls down the fixing member 50, and the upper surface of the contact support 78a pulls down the fixing member 49. The spacing of the 11 blades 36 becomes the second spacing.

[0117] Thus, with the spacing of the 11 blades 36 at the first spacing, when the lifting mechanism 91 lowers the hand 24, hands 24-15 sequentially contact the upper surfaces of the support portions 87a-78a, pulling hands 23-14 down in sequence, and the spacing of the 11 blades 36 becomes the second spacing. That is, with the spacing of the 11 blades 36 at the first spacing, when the lifting mechanism 91 lowers the hand 24, hands 14-23 descend along with the hand 24, and the spacing of the 11 blades 36 in the vertical direction becomes the second spacing.

[0118] (Main effects of this implementation method)

[0119] As described above, in this embodiment, through holes h1 are formed in the blade holding members 39-47 and the fixing members 51-59 for engaging the tool T from the underside of the lowermost hand 24 with the head 62a of the bolt 62. Additionally, in this embodiment, through holes h2 are formed in the blade holding members 40-47 and the fixing members 52-59 for engaging the tool T from the underside of the hand 24 with the head 63a of the bolt 63. Through holes h3 are formed in the blade holding members 41-47 and the fixing members 53-59 for engaging the tool T from the underside of the hand 24 with the head 64a of the bolt 64. Through holes h4 are formed in the blade holding members 42-47 and the fixing members 54-59 for engaging the tool T from the underside of the hand 24 with the head 65a of the bolt 65.

[0120] Furthermore, in this embodiment, through holes h5 are formed in the blade holding members 43-47 and the fixing members 55-59 for engaging the tool T from the underside of the hand 24 with the head 66a of the bolt 66. Through holes h6 are formed in the blade holding members 44-47 and the fixing members 56-59 for engaging the tool T from the underside of the hand 24 with the head 67a of the bolt 67. Through holes h7 are formed in the blade holding members 45-47 and the fixing members 57-59 for engaging the tool T from the underside of the hand 24 with the head 68a of the bolt 68. Through holes h8 are formed in the blade holding members 46, 47 and the fixing members 58, 59 for engaging the tool T from the underside of the hand 24 with the head 69a of the bolt 69. On the blade holding member 47 and the fixing member 59, through holes h9 are formed for engaging the tool T with the head 70a of the bolt 70 from the underside of the hand 24. In addition, in this embodiment, the inner diameter of the through holes h1 to h9 is larger than the outer diameter of the heads 62a to 70a of the bolts 62 to 70.

[0121] Therefore, in this embodiment, even if the fixing members 49 to 59 overlap vertically, and even if the blade holding members 38 to 46 are fixed to the fixing members 50 to 58, the bolts 62 to 70 can be installed or removed from the lower side of the lowermost hand 24 using the tool T. Furthermore, in this embodiment, since the bolt 61 is screwed into the fixing member 49 from the top, the bolt 61 can be installed or removed from the upper side of the uppermost hand 14, and since the bolt 71 is screwed into the blade holding member 47 from the bottom, the bolt 71 can be installed or removed from the bottom of the hand 24.

[0122] Therefore, in this embodiment, even if the fixing members 49-59 overlap in the vertical direction, any one of the blade holding members 37-47 can be individually attached to and detached from the fixing members 49-59 along with the blade 36 without removing the other blade holding members 37-47 from the fixing members 49-59. Furthermore, in this embodiment, since the fixing members 49-59 overlap in the vertical direction, the base end portion (rear end portion) of the loading mechanism 3 can be miniaturized. That is, in this embodiment, even if any one of the blade holding members 37-47 can be individually attached to and detached from the fixing members 49-59 along with the blade 36 without removing the other blade holding members 37-47 from the fixing members 49-59, the base end portion of the loading mechanism 3 can be miniaturized.

[0123] In this embodiment, bolts 62 to 70 are bolts with heads 62a to 70a positioned on the lower side, i.e., upward-facing bolts. Therefore, in this embodiment, bolts 62 to 70 that have been loosened using tool T can fall under their own weight to the lower side of the hand 24 located at the bottom. Therefore, in this embodiment, even if the fixing parts 49 to 59 overlap in the vertical direction, bolts 62 to 70 can be easily removed, resulting in easy removal of bolts 62 to 70.

[0124] In this embodiment, bolts 62-71 are gradually offset inward in the left-right direction as they move from the upper hand 15 toward the lower hand 24. Therefore, in this embodiment, even if the fixing members 49-59 overlap in the vertical direction and the position of bolts 62-70 is difficult to visually confirm, it is easy to determine the position of bolts 62-70 in the horizontal direction.

[0125] In this embodiment, although the shape of the blade holding members 37-47 must be changed according to each of the hands 14-24 due to the influence of the position of the configuration hole 37a formed on the blade holding member 37, the threaded holes formed on the blade holding members 38-47, and the number of through holes h1-h9, the blade 36, which is separately formed from the blade holding members 37-47, is shared by all the hands 14-24. Therefore, in this embodiment, the component cost of the hands 14-24 can be reduced.

[0126] (Other implementation methods)

[0127] The above-described embodiments are examples of preferred embodiments of the present invention, but are not limited thereto. Various modifications can be made without changing the spirit of the present invention.

[0128] In the above embodiment, the head 61a of the bolt 61 may also be disposed on the lower side of the shaft portion of the bolt 61. In this case, a mounting hole for the head 61a of the bolt 61 is formed in the fixing member 49, and a threaded hole for engaging the external thread of the bolt 61 is formed in the blade retaining member 37. Furthermore, in this case, the bolts 61 and 62 are disposed at least in a staggered position in either the left-right or front-back direction. That is, the bolts 61 and 62 are disposed at a staggered position in the horizontal direction. Additionally, in this case, all blade retaining members 38-47 and fixing members 50-59 disposed on the lower side of the bolt 61 have through holes for engaging the tool T from the lower side of the fixing member 59 with the head 61a.

[0129] In the above embodiment, among the bolts 62 to 70, there may also be downward bolts with heads 62a to 70a disposed on the upper side of the shaft, as long as the loose bolts 62 to 70 can be removed. In this case, all blade holding members 37 to 45 and fixing members 49 to 57 disposed on the upper side of the downward bolt are provided with through holes for engaging the tool T from the upper side of the blade holding member 37 (i.e., from the upper side of the uppermost hand 14) with the head of the downward bolt.

[0130] Even in this case, similar to the embodiments described above, any one of the blade holding members 37-47 can be individually attached to and detached from the fixed members 49-59 along with the blade 36 without removing the other blade holding members 37-47 from the fixed members 49-59. Furthermore, even in this case, the base end portion of the loading mechanism 3 can be miniaturized. Additionally, if a hand with a downward bolt exists among the hands 15-23, the hand with the downward bolt is a second hand.

[0131] In the above embodiment, the head 71a of the bolt 71 may also be disposed on the upper side of the shaft portion of the bolt 71. In this case, through holes are formed on all the blade holding members 37-46 and fixing members 49-58 disposed on the upper side of the bolt 71 for engaging the tool T with the head 71a from the upper side of the blade holding member 37. In addition, in the above embodiment, the bolts 62-71 are gradually offset inward in the left-right direction as they move from the upper hand 15 toward the lower hand 24, but the bolts 62-71 may also be randomly disposed in the left-right direction.

[0132] In the above embodiments, each blade holding component 37-47 and the blade 36 can also be integrally formed. That is, the loading part of the wafer 2 can also be constituted by an integrally formed component. In addition, in the above embodiments, the bolts 61-71 can also be bolts other than those with hexagonal holes. In addition, in the above embodiments, the blade holding components 37-47 can also be fixed to the fixing components 49-59 by two or three bolts 61-71, or by five or more bolts 61-71.

[0133] In the above embodiment, each blade holding member 37-47 may also be disposed on the lower side of the front end of each fixing member 49-59. In this case, each blade holding member 37 and fixing member 50-59 has a threaded hole, and the blade holding members 38-47 and fixing member 49 have mounting holes for mounting heads 61a-71a, etc. Furthermore, in the above embodiment, the number of hands provided by the loading mechanism 3 may be ten or less or twelve or more, as long as it is three or more.

[0134] In the above embodiments, robot 1 may also omit hand 4. In this case, linear drive mechanism 6 is unnecessary. Furthermore, in the above embodiments, robot 1 may also omit tilt correction mechanism 8. Additionally, in the above embodiments, robot 1 may be a horizontal multi-joint robot. In this case, robot 1 uses a multi-joint arm with loading mechanism 3 rotatably connected to the front end and a multi-joint arm with hand 4 rotatably connected to the front end instead of linear drive mechanisms 5-7. Furthermore, in the above embodiments, robot 1 can also transport objects other than wafer 2. For example, robot 1 can transport glass substrates for liquid crystal display devices.

Claims

1. An industrial robot comprising: a loading mechanism for loading multiple objects to be transported, wherein the industrial robot is characterized in that, The loading mechanism comprises: at least three or more hands having a loading section for the object to be transported and overlapping each other at a predetermined interval in the vertical direction. The hand has: The blade holding component of the loading section; The fixing part, the blade holding member that fixes the loading part; and A headed bolt is used to secure the blade retaining component to the fixing part. The fixing parts of the plurality of hands overlap at a predetermined interval in the vertical direction. The blade retaining component is fixed to the fixing part by bolts arranged axially in the vertical direction, so as to overlap with the fixing part in the vertical direction. The bolt with its head positioned on the lower side is designated as an upward bolt, and the bolt with its head positioned on the upper side is designated as a downward bolt. Among the plurality of hands, excluding the uppermost and lowermost hands, the hand with the upward bolt is designated as the first hand. Among the plurality of hands, excluding the uppermost and lowermost hands, the hand with the downward bolt is designated as the second hand. When the loading mechanism is equipped with the first hand, the fixing portion and the blade retaining member of all the hands located below the upward bolt of the first hand are formed with through holes for engaging the tool from below the lowermost hand to the head of the upward bolt of the first hand. When the loading mechanism is equipped with a second hand, the fixing portion and the blade retaining member of all the hands located above the downward bolt of the second hand are formed with through holes for engaging the tool from the uppermost hand to the head of the downward bolt of the second hand. The inner diameter of the through hole is larger than the outer diameter of the head.

2. The industrial robot according to claim 1, characterized in that, The bolt on the hand positioned at the top is the downward bolt. The bolts on the remaining hands, except for the hand positioned at the top, are upward bolts.

3. The industrial robot according to claim 2, characterized in that, The hand moves in a straight line along the horizontal direction when carrying the object being carried. The direction orthogonal to the direction of hand movement and the up-down direction is defined as the orthogonal direction. The blade retaining component is then fixed to the fixing part by bolts positioned on both sides of the orthogonal direction relative to the center of the hand in the orthogonal direction. The bolts in the hands other than the uppermost hand are gradually offset inward in the orthogonal direction as they move from the upper hand toward the lower hand.

4. The industrial robot according to any one of claims 1 to 3, characterized in that, The loading unit includes: a loading unit body for loading the object to be transported. The loading section body and the blade retaining component are formed separately.

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