Detection device and detection method

Abstract

A detection device and a detection method, the device comprises: a loading module, comprising a loading platform with a bearing surface, the bearing surface having a reflective surface; a light source module, comprising a light source with a power setting value, the light source module is used to generate a first incident light projected onto the reflective surface using the outgoing light emitted by the light source, the reflective surface causes the first incident light to reflect to form a first detection light; a signal detection module, comprising a light source monitoring detector, the light source monitoring detector is arranged on the optical path of the first detection light, and is used to detect the first detection light, and obtain the light intensity detection value of the first detection light using the light intensity distribution information of the first detection light; a processor module, comprising a power comparison unit and a power control unit, the power comparison unit is used to compare the power value corresponding to the light intensity detection value and the power setting value, and the power control unit is used to adjust the output power of the light source to the power setting value. The present invention improves the detection accuracy.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of optical detection technology, and in particular to a detection device and a detection method. Background Art

[0002] Defect detection refers to the detection of defects such as grooves, particles, scratches, etc. in the wafer and the location of the defects. Wafer defect detection is widely used. Defects on the wafer may cause the formed device to fail. Therefore, when manufacturing wafers, defect detection is usually required to ensure the product qualification rate of the wafer. In addition, during the semiconductor manufacturing process, defect detection of wafers is also required to ensure the product qualification rate.

[0003] Currently, the commonly used defect detection methods mainly include electron beam detection and optical detection. Optical detection is a general term for methods that use the interaction between light sources and chips to achieve detection. Optical detection methods have the characteristics of fast detection speed and no additional pollution, and are widely used in defect detection. Among them, the light scattering method is one of the most important optical detection methods. Its basic principle is to determine the presence and size of defects by scanning and detecting the presence of incident light and defect scattered light and the intensity of the defect scattered light. Summary of the invention

[0004] The problem solved by the embodiments of the present invention is to provide a detection device and a detection method to improve the detection accuracy.

[0005] To solve the above problems, an embodiment of the present invention provides a detection device, including: a loading module, including a loading platform with a carrying surface, the carrying surface is used to place the object to be tested, and a reflecting surface is provided on the carrying surface; a light source module, including a light source with a power setting value, the light source module is used to use the outgoing light emitted by the light source to generate a first incident light projected onto the reflecting surface, and the reflecting surface causes the first incident light to reflect to form a first detection light; a signal detection module, including a light source monitoring detector, the light source monitoring detector is arranged on the optical path of the first detection light, and is used to detect the first detection light, and obtain the light intensity detection value of the first detection light using the light intensity distribution information of the first detection light; a processor module, including a power comparison unit and a power control unit connected to the power comparison unit, the power comparison unit is used to compare the power value corresponding to the light intensity detection value with the power setting value to obtain a comparison result; the power control unit is used to adjust the output power of the light source to the power setting value according to the comparison result.

[0006] Correspondingly, an embodiment of the present invention also provides a detection method for a detection device according to an embodiment of the present invention, including: using the outgoing light emitted by the light source to generate a first incident light projected onto a reflecting surface, the reflecting surface causes the first incident light to reflect to form a first detection light; detecting the first detection light, and using the light intensity distribution information of the first detection light to obtain a light intensity detection value of the first detection light; after obtaining the light intensity detection value, performing a detection pre-adjustment process, the detection pre-adjustment process including: comparing the power value corresponding to the light intensity detection value with the power setting value to obtain a comparison result; and adjusting the output power of the light source to the power setting value according to the comparison result.

[0007] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0008] An embodiment of the present invention provides a detection device, which includes a loading module, a light source module, a signal detection module and a processor module. The loading module includes a loading platform with a carrying surface, and a reflecting surface is provided on the carrying surface. The light source module is used to generate a first incident light projected onto the reflecting surface using the outgoing light emitted by the light source, and the reflecting surface causes the first incident light to reflect to form a first detection light. The light source monitoring detector in the signal detection module is arranged on the optical path of the first detection light, and is used to detect the first detection light, and obtain the light intensity detection value of the first detection light using the light intensity distribution information of the first detection light. The power comparison unit is used to compare the power value corresponding to the light intensity detection value with the power setting value to obtain a comparison result, and the power control unit is used to adjust the output power of the light source to the power setting value according to the comparison result; therefore, by arranging the reflecting surface on the carrying surface of the loading platform and using the light source module to generate the first detection light, the first detection light can be detected before the object to be detected, and the output power of the light source can be monitored and adjusted according to the light intensity distribution information of the first detection light, thereby reducing the detection error caused by the output power fluctuation of the light source, and correspondingly improving the detection accuracy of the object to be detected. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 is a functional block diagram of an embodiment of a detection device of the present invention;

[0010] Figure 2 It is a structural schematic diagram and an optical path diagram of an embodiment of a detection device of the present invention;

[0011] Figure 3 It is a structural schematic diagram and an optical path diagram of another embodiment of the detection device of the present invention;

[0012] Figure 4 It is a structural schematic diagram and optical path diagram of another embodiment of the detection device of the present invention;

[0013] Figure 5 yes Figure 4 The structural schematic diagram and optical path diagram of the detection device shown in the plane direction where the optical axes of multiple scattered light detectors are located;

[0014] Figure 6 It is a flow chart of an embodiment of the detection method of the present invention. DETAILED DESCRIPTION

[0015] As can be seen from the background technology, optical detection method is a commonly used detection technology for objects to be detected. However, the detection accuracy of existing optical detection methods used for detection needs to be improved.

[0016] Specifically, taking the detection method used for defect detection of an object to be detected as an example, when the object to be detected is detected, the degree of match between the detection result obtained and the actual situation is low. For example, there is a defect at a certain position of the object to be detected, but the defect is not detected, or the defect size obtained by detection is smaller than its actual size.

[0017] Research has found that during the defect detection process, if the power of the light source incident on the surface of the object to be tested changes, it will cause changes in the intensity of the scattered signal and the size of the detected defect, ultimately leading to deviations in the detection results.

[0018] Specifically, in practical applications, as the power of the light source decays (permanent degradation), the output power of the light source gradually decreases. Moreover, in a specific period, the output power of the light source is also prone to fluctuate with changes in operating temperature, resulting in short-term fluctuations in the output power of the light source.

[0019] In order to solve the technical problem, an embodiment of the present invention provides a detection device, including: a loading module, including a loading platform with a carrying surface, the carrying surface is used to place the object to be tested, and a reflecting surface is provided on the carrying surface; a light source module, including a light source with a power setting value, the light source module is used to use the outgoing light emitted by the light source to generate a first incident light projected onto the reflecting surface, and the reflecting surface causes the first incident light to reflect to form a first detection light; a signal detection module, including a light source monitoring detector, the light source monitoring detector is arranged on the optical path of the first detection light, and is used to detect the first detection light, and obtain the light intensity detection value of the first detection light using the light intensity distribution information of the first detection light; a processor module, including a power comparison unit and a power control unit connected to the power comparison unit, the power comparison unit is used to compare the power value corresponding to the light intensity detection value with the power setting value to obtain a comparison result; the power control unit is used to adjust the output power of the light source to the power setting value according to the comparison result.

[0020] The embodiment of the present invention sets a reflective surface on the carrying surface of the loading platform and uses the light source module to generate the first detection light, so that before the object to be tested is detected, the first detection light can be detected first, and the output power of the light source can be monitored and adjusted according to the light intensity distribution information of the first detection light, thereby reducing the detection error caused by the output power fluctuation of the light source, and correspondingly improving the detection accuracy of the object to be tested.

[0021] In order to make the above-mentioned purposes, features and advantages of the embodiments of the present invention more obvious and understandable, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0022] Combined with reference Figure 1 and Figure 2 , Figure 1 is a functional block diagram of an embodiment of a detection device of the present invention, Figure 2 It is a structural schematic diagram and an optical path diagram of an embodiment of a detection device of the present invention.

[0023] The detection device 10 comprises: a loading module 100, comprising a loading platform 110 having a carrying surface 115, wherein the carrying surface 115 is used to place the object to be tested, and a reflecting surface 120 is provided on the carrying surface 115; a light source module 300, comprising a light source 210 having a power setting value, wherein the light source module 300 is used to generate a first incident light projected onto the reflecting surface 120 using the outgoing light emitted by the light source 210, and the reflecting surface 120 reflects the first incident light to form a first detection light; a signal detection module 400, comprising a light source monitoring detector 430, wherein the light source monitoring detector The device 430 is arranged on the optical path of the first detection light, and is used to detect the first detection light, and obtain the light intensity detection value of the first detection light by using the light intensity distribution information of the first detection light; the processor module 500 includes a power comparison unit 510 and a power control unit 520 connected to the power comparison unit 510, and the power comparison unit 510 is used to compare the power value corresponding to the light intensity detection value and the power setting value to obtain a comparison result; the power control unit 520 is used to adjust the output power of the light source 210 to the power setting value according to the comparison result.

[0024] In this embodiment, a reflective surface 120 is provided on the carrying surface 115 of the loading platform 110, and a first detection light is generated by using a light source module 300. Therefore, before using the detection device 10 to detect the object to be detected, the first detection light can be detected first, and based on the light intensity distribution information of the first detection light, the output power of the light source 210 can be monitored and adjusted. Therefore, when the object to be detected is detected, the detection error caused by the output power fluctuation of the light source 210 can be reduced, thereby correspondingly improving the detection accuracy of the object to be detected.

[0025] In this embodiment, the light source module 300 is also used to generate a second incident light projected onto the object to be tested using the outgoing light emitted by the light source 210, and scatter the second incident light to form a second detection light. Correspondingly, the signal detection module 400 also includes an object to be tested detector 410, which is arranged on the optical path of the second detection light, and is used to detect the second detection light, and obtain the signal intensity value of the target to be tested on the object to be tested using the light intensity distribution information of the second detection light.

[0026] The detection device described in this embodiment is described in detail below with reference to the accompanying drawings.

[0027] The loading module 100 is used to fix the object to be tested when performing defect detection on the object to be tested, thereby providing a process platform for optical detection of the object to be tested. In this embodiment, the loading module 100 includes a loading platform 110 having a carrying surface 115, and the carrying surface 115 is used to place the object to be tested. The loading platform 110 can be moved along the X-axis direction (such as Figure 2 The loading module 100 can be moved by moving the loading platform 110, so that during the process of testing the object to be tested, the area for testing the object to be tested can be adjusted by moving the loading platform 110. For example, the loading module 100 can also include a stationary base (not shown), and the loading platform 110 is arranged on the stationary base in a manner that it can move along the X-axis direction. As an example, the loading platform 110 is a chuck (i.e., a stage chuck), and the object to be tested is a wafer.

[0028] In this embodiment, a third reflector 130 is fixed on the bearing surface 115, and the surface of the third reflector 130 is a reflective surface 120. By adopting the third reflector 130 to provide the reflective surface 120, it is easy to replace the third reflector 130 so that the optical characteristics of the reflective surface 120 always meet the detection requirements, thereby improving the detection accuracy. As an example, the third reflector 130 can be embedded in the loading platform 110 from the bearing surface 115, thereby reducing the overall thickness of the loading module 100. Specifically, the reflective surface 120 and the bearing surface 115 are flush, thereby improving the space utilization of the loading platform 110, that is, when the object to be tested is to be tested for defects, the object to be tested is placed on the loading platform 110 and the reflective surface 120 is covered, and the defect detection can be performed normally.

[0029] In some other embodiments, the bearing surface may have a reflective coating, and the surface of the reflective coating is the reflective surface; in other embodiments, a silicon wafer is fixed on the bearing surface, and the surface of the silicon wafer is the reflective surface.

[0030] In this embodiment, the reflective surface 120 is a plane. By making the reflective surface 120 a plane, it is helpful to simplify the optical path complexity of the detection device. In this embodiment, the reflective surface 120 is located at the edge of the carrying surface 115, thereby reducing the impact on the detection process of the object to be tested, that is, ensuring that the remaining carrying surface 115 exposed by the reflective surface 120 can be used to place the object to be tested.

[0031] In this embodiment, the loading module 100 is coupled to the processor module 500, and the processor module 500 is integrated with a central control system, so that the loading platform 110 can move under the control of the processor module 500, and then can move the object to be tested along a specified trajectory to achieve scanning detection.

[0032] In this embodiment, the detection device 10 has the functions of defect detection and defect detection pre-adjustment at the same time, so that the monitoring and adjustment operations of the output power of the light source 210 and the defect detection operations on the object to be detected can be completed in the same detection device 10, thereby reducing the complexity of the entire detection process and correspondingly helping to improve the detection efficiency.

[0033] Correspondingly, the light source module 200 is used to generate a first incident light projected onto the reflective surface 120 using the outgoing light emitted by the light source 210, and the reflective surface 120 reflects the first incident light to form a first detection light, thereby monitoring and adjusting the output power of the light source 210. The light source module 200 is also used to generate a second incident light projected onto the object to be tested using the outgoing light emitted by the light source 210, and scatter the second incident light to form a second detection light, thereby realizing optical detection of the object to be tested. To this end, the light source module 200 includes at least one light source 210, and the light source 210 is used to emit the outgoing light. In this embodiment, the light source module 200 includes one light source 210.

[0034] As an example, the emitted light from the light source 210 is parallel to the carrying surface 115. Specifically, the direction parallel to the carrying surface 115 and perpendicular to the X-axis direction is the Y-axis direction (not shown), the direction perpendicular to the surface of the carrying surface 115 is the Z-axis direction (not shown), and the direction of the emitted light is perpendicular to the plane formed by the Y-axis and the Z-axis.

[0035] In this embodiment, the light source 210 is a laser. In this embodiment, the light source 210 has a power setting value. The power setting value refers to: when the detection device is working, the preset value of the output power of the light source 210. Therefore, before detecting the object to be detected, the output power of the light source 210 needs to be controlled to reach the power setting value.

[0036] In this embodiment, the light source 210 has a maximum power, and the power setting value is less than the maximum power. The maximum power refers to the maximum output power that the light source 210 can reach. The detection device 10 can correct the output power of the light source 210. Therefore, by making the power setting value less than the maximum power, a certain adjustment space is reserved for the power adjustment of the light source 210, so that after the output power of the light source 210 is corrected, the output power of the light source 210 can reach the power setting value.

[0037] It should be noted that the ratio of the power setting value to the maximum power of the light source 210 should not be too small or too large. If the ratio of the power setting value to the maximum power of the light source 210 is too small, it is easy to cause the output power of the light source 210 to be too small, so that it is easy to cause detection errors when detecting the object to be detected; if the ratio of the power setting value to the maximum power of the light source 210 is too large, it is difficult to reserve enough adjustment space for the subsequent power adjustment of the light source 210. Accordingly, as the number of times the light source 210 is used increases, it is difficult to adjust the output power of the light source 210 to the power setting value, thereby affecting the normal use of the light source 210, and correspondingly, detection errors will also occur. For this reason, in this embodiment, the power setting value is 70% to 80% of the maximum power of the light source 210. For example, the maximum power of the light source 210 is 3.5W (watts), and the power setting value can be set to 3W, thereby reserving 0.5W of power adjustment space.

[0038] In this embodiment, the light source 210 further has a power lower limit threshold, which is less than the power setting value. The power lower limit threshold is set as follows: when the output power of the light source 210 is less than the power lower limit threshold, after the subsequent detection of the object to be detected, it is difficult to compensate the signal strength value of the target to be detected on the object to be detected by calculation, thereby causing significant detection errors.

[0039] In this embodiment, the power lower limit threshold is used as a standard for whether to adjust the output power of the light source 210. That is, after the light intensity detection value of the first detection light is obtained by the signal detection module 400, the power control unit 520 is used to adjust the output power of the light source 210 to the power setting value when the power value corresponding to the light intensity detection value is less than the power lower limit threshold.

[0040] It should be noted that the ratio of the power lower limit threshold to the power setting value should not be too small or too large. If the ratio of the power lower limit threshold to the power setting value is too small, after the object to be tested is detected, it is easy to have difficulty in compensating the signal strength value of the target to be tested on the object to be tested by calculation, resulting in excessive detection error; if the ratio of the power lower limit threshold to the power setting value is too large, it is easy to have a misjudgment problem, resulting in an excessively high frequency of adjusting the output power of the light source 210, which is easy to reduce the machine yield and shorten the life of the light source 210. For this reason, in this embodiment, in order to obtain a higher detection accuracy, the power lower limit threshold is 90% to 95% of the power setting value.

[0041] In this embodiment, the light source module 300 is coupled to the processor module 500 , so that the processor module 500 controls the turning on or off of the light source 210 , and the output power of the light source 210 is set by the processor module 500 .

[0042] Before testing the object to be tested, the testing device 10 is used to perform a pre-test adjustment process. During the pre-test adjustment process, the light source module 300 uses the outgoing light emitted by the light source 210 to generate a first incident light projected onto the reflective surface 120, and reflects the first incident light to form a first testing light.

[0043] After the detection pre-adjustment process is completed, when the detection device 10 is used to perform defect detection on the object to be detected, the light source module 300 uses the outgoing light emitted by the light source 210 to generate a second incident light projected onto the object to be detected, and scatters the second incident light to form a second detection light, thereby using the light intensity distribution information of the second detection light to obtain the physical information of the target to be detected on the object to be detected. The physical information includes: the film thickness, width, coordinates, etc. of the target to be detected, and the target to be detected includes defects, film layers, metal wires, etc. Taking the target to be detected as a defect as an example, the generated second detection light changes according to the type, size or other parameters of the defect.

[0044] In this embodiment, the first incident light includes one or both of normal incident light and oblique incident light, so that the corresponding type of incident light can be selected according to actual needs. Accordingly, the first detection light corresponding to the normal incident light is the first normal detection light, and the first detection light corresponding to the oblique incident light is the first oblique detection light; the light source monitoring detector correspondingly includes the first light source monitoring detector 401, the second light source monitoring detector 403 and the second light source monitoring detector 403.

[0045] When the outgoing light emitted by the light source 210 is used to form the normal incident light vertically incident on the reflective surface 120, the normal incident light is reflected by the reflective surface 120 to form the first positive detection light; the first light source monitoring detector 401 is used to detect the first positive detection light.

[0046] When the outgoing light emitted by the light source 210 is used to form oblique incident light that is obliquely incident on the reflecting surface 120, there is an acute angle between the incident direction of the oblique incident light and the reflecting surface 120, and the oblique incident light is reflected by the reflecting surface 120 to form a first oblique detection light; the second light source monitoring detector 403 or the second light source monitoring detector 402 is used to detect the first oblique detection light.

[0047] In this embodiment, the first incident light includes normal incident light and oblique incident light, so the light source module 300 includes two optical branches for forming normal incident light and oblique incident light respectively. Correspondingly, the light source module 300 also includes a first beam splitter 330 and an optical path switching component (not shown), and the first beam splitter 330 and the optical path switching component are used to adjust the optical path direction of the outgoing light.

[0048] In this embodiment, the first beam splitter 330 is arranged on the optical path of the outgoing light, and is used to reflect the outgoing light to form normal incident light. After the normal incident light is reflected by the reflecting surface 120 to form the first positive detection light, it is also used to allow the first positive detection light to pass through; the optical path switching component is used to make the outgoing light form one of the normal incident light and the oblique incident light, or a combination of the two.

[0049] In this embodiment, the optical path switching component is used to switch the outgoing light between forming normal incident light and oblique incident light. In other embodiments, the optical path switching component can be used to split the outgoing light to form normal incident light and oblique incident light, so that the normal incident light and oblique incident light can be incident on the reflecting surface at the same time. In this embodiment, the optical path switching component is used to reflect the outgoing light to form oblique incident light.

[0050] It should be noted that, in other embodiments, the first beam splitter can also be used to allow the outgoing light to pass through to form normal incident light. After the reflective surface reflects the normal incident light to form the first reflected light, it is also used to reflect the first reflected light to form the first positive detection light.

[0051] In this embodiment, the optical path switching component includes: a movable first reflector 310, which is used to reflect the outgoing light to form a second reflected light when moving into the optical path between the light source 210 and the first beam splitter 330, and reflect the outgoing light to form a third reflected light when moving out of the optical path between the light source 210 and the first beam splitter 330; wherein the second reflected light and the third reflected light are respectively used to form oblique incident light and normal incident light.

[0052] In this embodiment, when the movable first reflector 310 moves out of the light path between the light source 210 and the first beam splitter 330 , the outgoing light is reflected by the first beam splitter 330 to form a third reflected light. Therefore, the third reflected light is the normal incident light.

[0053] In this embodiment, the optical path switching component further includes: a second reflector 320, which is arranged on the optical path of the second reflected light, and is used to reflect the second reflected light to form oblique incident light. Accordingly, the light source 210 and the first beam splitter 330 constitute a first optical branch, and the light source 210, the movable first reflector 310 and the second reflector 320 constitute a second optical branch. The first optical branch is used to form normal incident light, and the second optical branch is used to form oblique incident light.

[0054] In other embodiments, a second beam splitter may be used instead of the first reflector. Accordingly, the second beam splitter is disposed between the light source and the first beam splitter, and is used to split the emitted light into a second reflected light and a third reflected light, and the second reflected light and the third reflected light are used to form oblique incident light and normal incident light, respectively.

[0055] The beam splitter has the characteristics of both transmitting and reflecting light, so by using the second beam splitter, the second beam splitter can be fixed to the light source and the first beam splitter without moving in and out. Accordingly, a shading component that can be moved in and out is provided between the second beam splitter and the first beam splitter, and between the second beam splitter and the second reflector, so as to control the transmission or blocking of light according to actual needs.

[0056] In this embodiment, the detection device 10 can not only monitor the output power of the light source 210, but also detect the object to be detected. Therefore, the same light source module 300 is used to form the first detection light and the second detection light. Correspondingly, in the light source module 300, one optical branch enables the outgoing light emitted by the light source 210 to form the first incident light, and the other optical branch enables the outgoing light emitted by the light source 210 to form the second incident light. Among them, when the normal incident light is used as the first incident light, the oblique incident light is used as the second incident light, and when the normal incident light is used as the second incident light, the oblique incident light is used as the first incident light. In other words, the light source module 300 is used to generate normal incident light and oblique incident light using the light source 210, and any one of the normal incident light and the oblique incident light is used as the first incident light, and the other incident light is used as the second incident light.

[0057] In this embodiment, the example of using the first optical branch to detect the object to be measured and using the second optical branch to monitor the output power of the light source 210 is used for explanation. Specifically, when the second optical branch is used to monitor the output power of the light source 210, the movable first reflector 310 is moved into the optical path of the outgoing light, so that the outgoing light is reflected to form the second reflected light, and the second reflector 320 reflects the second reflected light to form oblique incident light, and the oblique incident light is incident on the reflecting surface 120 to form the first oblique detection light. Correspondingly, when the first optical branch is used to detect the object to be measured, the movable first reflector 310 is moved out of the optical path of the outgoing light, and the first beam splitter 330 reflects the outgoing light to form normal incident light, and the normal incident light is incident on the object to be measured to form the second detection light, wherein the normal incident light is used as the second incident light.

[0058] In other embodiments, the second optical branch may be used to detect the object to be tested, and the first optical branch may be used to monitor the output power of the light source 210. Specifically, when the first optical branch is used to monitor the output power of the light source 210, the movable first reflector 310 is moved out of the optical path of the outgoing light, and the beam splitter 330 reflects the outgoing light to form a normal incident light. After the normal incident light is reflected by the reflecting surface 120 to form a first positive detection light, the beam splitter 330 is also used to allow the first positive detection light to pass. Correspondingly, when the second optical branch is used to detect the object to be tested, the movable first reflector 310 is moved into the optical path of the outgoing light, so that the outgoing light is reflected to form a second reflected light, and the second reflector 320 reflects the second reflected light to form an oblique incident light, and the oblique incident light is incident on the object to be tested to form a second detection light, wherein the oblique incident light is used as the second incident light.

[0059] In this embodiment, the light source module 300 is coupled to the processor module 500 , so that the processor module 500 controls the start of the light source 210 and the position of the movable first reflector 310 .

[0060] Correspondingly, in this embodiment, the signal detection module 400 includes a light source monitoring detector 430 and an object to be detected detector 410. The light source monitoring detector 430 is arranged on the optical path of the first detection light, and is used to detect the first detection light, and obtain the light intensity detection value of the first detection light using the light intensity distribution information of the first detection light. The object to be detected detector 410 is arranged on the optical path of the second detection light, and is used to detect the second detection light, and obtain the signal intensity value of the target to be detected on the object to be detected using the light intensity distribution information of the second detection light. By first using the light source monitoring detector 430 to obtain the light intensity detection value of the first detection light, it is determined whether it is necessary to adjust the output power of the light source 210 before detecting the object to be detected, thereby improving the detection accuracy of the object to be detected.

[0061] In this embodiment, taking the signal detection module 400 including three detectors as an example, the light source monitoring detector 430 includes a first light source monitoring detector 401, a second light source monitoring detector 403 and a second light source monitoring detector 402. The optical axes of the first light source monitoring detector 401, the second light source monitoring detector 403 and the second light source monitoring detector 402 are located in the same plane, and are all located on the plane formed by the X-axis and the Z-axis (not indicated). Among them, the Z-axis is the surface normal direction of the bearing surface 115. Specifically, the first light source monitoring detector 401 is located directly above the spectroscope 330, the optical axis of the first light source monitoring detector 401 is perpendicular to the bearing surface 115, and the optical axes of the second light source monitoring detector 403 and the second light source monitoring detector 402 have an angle with the bearing surface 115. For example, the angle between the second light source monitoring detector 403 and the bearing surface 115 is greater than the angle between the second light source monitoring detector 402 and the bearing surface 115.

[0062] In this embodiment, one optical branch uses the outgoing light emitted by the light source 210 to form the first incident light, and the other optical branch uses the outgoing light emitted by the light source 210 to form the second incident light. Therefore, any one of the first light source monitoring detector 401, the second light source monitoring detector 403 and the second light source monitoring detector 402 can be used as the object detector 410.

[0063] As an example, the first optical branch is used to detect the object to be tested, and the second optical branch is used to monitor the output power of the light source 210. Therefore, the second light source monitoring detector 403 is used as the light source monitoring detector 430, and the second light source monitoring detector 402 is used as the object to be tested detector 410. In other embodiments, the second optical branch may be used to detect the object to be tested, and the first optical branch may be used to monitor the output power of the light source 210. Accordingly, the first light source monitoring detector 401 is used as the light source monitoring detector, and one or both of the second light source monitoring detector 403 and the second light source monitoring detector 402 are used as the object to be tested detector. In other embodiments, when the second optical branch is used to detect the object to be tested, and the first optical branch is used to monitor the output power of the light source 210, the detection device may not include the second light source monitoring detector 403.

[0064] It should be noted that in order to detect the first detection light and the second detection light respectively, different detection channels need to be used for detection, that is, each detector can only be used to detect one signal light of the first detection light and the second detection light.

[0065] In this embodiment, the signal detection module 400 is coupled to the processor module 500 , so that the processor module 500 controls the opening or closing of each detector and receives and processes the detection information obtained by each detector.

[0066] The processor module 500 is coupled to the loading module 100, the light source module 200, the beam adjustment module 300 and the signal detection module 400. The processor module 500 is used to control each module, obtain detection information from the signal detection module 400, and control the adjustment of the output power of the light source 210. In addition, when the object to be detected is detected, it is also used to obtain detection information from the signal detection module 400, so as to determine the physical information of the object to be detected.

[0067] In this embodiment, the processor module 500 includes a power comparison unit 510 and a power control unit 520 connected to the power comparison unit 510. The power comparison unit 510 is used to compare the power value corresponding to the light intensity detection value and the power setting value to obtain a comparison result; the power control unit 520 is used to adjust the output power of the light source 210 to the power setting value when the power value corresponding to the light intensity detection value is less than the power setting value. There is a relationship model between light intensity and power. After obtaining the light intensity detection value, the corresponding power value can be obtained through the relationship model, and the power value is the actual output power of the light source 210. Specifically, the power control unit 520 is used to adjust the output power of the light source 210 to the power setting value when the power value corresponding to the light intensity detection value is less than the power lower limit threshold.

[0068] In this embodiment, the power control unit 520 includes a PID controller. PID is the abbreviation of proportion, integral and differential. PID control has the advantages of simple algorithm, good robustness and high reliability.

[0069] After adjusting the output power of the light source 210, it takes a certain amount of time (for example, more than 10 minutes) for the output power of the light source 210 to reach a stable value. Therefore, the power control unit 520 is used to adjust the output power of the light source 210 to the power setting value when the power value corresponding to the light intensity detection value is less than the power lower limit threshold, thereby facilitating the improvement of the machine productivity and the extension of the laser life. Accordingly, when the output power deviation of the light source 210 is small, the power variation is compensated by calculation, thereby improving the defect detection accuracy of the object to be tested.

[0070] To this end, the power comparison unit 510 is also used to compare the power value corresponding to the light intensity detection value and the power lower limit threshold to obtain the comparison result. The processor module 500 also includes: a power compensation unit 530 connected to the power comparison unit 510, which is used to calculate the ratio of the power value corresponding to the light intensity detection value to the power setting value as a compensation coefficient when the power value corresponding to the light intensity detection value is less than the power setting value and greater than or equal to the power lower limit threshold, and compensate the signal intensity value of the target to be measured on the object to be measured according to the compensation coefficient. By using the software and algorithm, the signal intensity value of the target to be measured obtained by detection is compensated in proportion according to the compensation coefficient. Among them, the smaller the compensation coefficient, the greater the output power deviation of the light source 210, and correspondingly, the greater the compensation amount for the signal intensity value of the target to be measured obtained by detection.

[0071] Specifically, the signal strength value of the target to be detected obtained by detection can be compensated through the corresponding relationship between the compensation coefficient and the compensation amount.

[0072] In this embodiment, the processor module 500 is integrated into a computer system.

[0073] refer to Figure 3 , showing a structural schematic diagram and an optical path diagram of another embodiment of the detection device of the present invention.

[0074] The similarities between the embodiment of the present invention and the above-mentioned embodiment are not repeated here. The difference between the embodiment of the present invention and the above-mentioned embodiment is that the light source module 300 includes multiple light sources, the multiple light sources include a first light source 210a and a second light source 220a, the outgoing light emitted by the first light source 210a is used to form normal incident light, and the outgoing light emitted by the second light source 220a forms oblique incident light. Accordingly, the light source module 300 does not include an optical path switching component.

[0075] In this embodiment, the first light source 210a and the beam splitter 330a constitute a first optical branch, and the second light source 220a constitutes a second optical branch. Any one of the first optical branch and the second optical branch is used to form a first detection light, and the other optical branch is used to form a second detection light. Among them, the light source corresponds to the optical branch one by one, so that the two light sources can be used to provide normal incident light and oblique incident light respectively, thereby simplifying the optical path structure, and the processor module (not marked) can control the corresponding light source. Accordingly, in the detection process, the step of moving the movable first reflector into or out of the outgoing light path is omitted.

[0076] In this embodiment, the first light source 210a and the second light source 220a are of the same light source type and have the same output power. Therefore, after power monitoring is performed using either the first light source 210a or the second light source 220a, the monitoring result obtained can be used to characterize the actual output power of the other light source.

[0077] In the present embodiment, the outgoing light emitted by the first light source 210a is parallel to the bearing surface 115a, and the outgoing light emitted by the second light source 220a has an angle with the bearing surface 115a. In the present embodiment, the outgoing light emitted by the second light source 220a is used as the first incident light or the second incident light, the first incident light is used to be obliquely incident on the reflecting surface 120a to form the first oblique detection light, and the second incident light is used to be obliquely incident on the object to be measured to form the second oblique detection light. Among them, when the outgoing light emitted by the first light source 210a is used to generate the first incident light, the outgoing light emitted by the second light source 220a is used to generate the second incident light. Similarly, when the outgoing light emitted by the first light source 210a is used to generate the second incident light, the outgoing light emitted by the second light source 220a is used to generate the first incident light.

[0078] Specifically, the light source module 300 further includes: a spectroscope 330a, which is arranged on the optical path of the outgoing light generated by the first light source 210a, and is used to reflect the outgoing light generated by the first light source 210a to form a normal incident light. After the normal incident light is reflected by the reflecting surface 120a to form a first positive detection light, the spectroscope 330a is also used to transmit the first positive detection light. In other embodiments, the spectroscope can also be used to transmit the outgoing light generated by the first light source to form a normal incident light. After the reflecting surface reflects the normal incident light to form a first reflected light, the spectroscope is also used to reflect the first reflected light to form the first positive detection light.

[0079] In this embodiment, the detection device 10 can not only monitor the output power of the light source 210, but also detect the object to be detected. Therefore, when the normal incident light is used as the first incident light, the oblique incident light is used as the second incident light, and when the normal incident light is used as the second incident light, the oblique incident light is used as the first incident light.

[0080] Specifically, when the first optical branch is used to detect the object to be tested and the second optical branch is used to monitor the output power of the light source, the spectrometer 330a reflects the outgoing light generated by the first light source 210a to form normal incident light, and the normal incident light is incident on the object to be tested to form a second detection light; the outgoing light generated by the second light source 220a is used as oblique incident light, and the oblique incident light is incident on the reflecting surface 120a to form a first oblique detection light.

[0081] When the second optical branch is used to detect the object to be tested and the first optical branch is used to monitor the output power of the light source, the spectroscope 330a reflects the outgoing light generated by the first light source 210a to form normal incident light, and makes the normal incident light incident on the reflecting surface 120a to form the first positive detection light, and is also used to make the first positive detection light pass through; the outgoing light generated by the second light source 220a is used as oblique incident light, and the oblique incident light is incident on the object to be tested to form the second detection light.

[0082] In this embodiment, the signal detection module 400a includes three detectors as an example, namely, a first light source monitoring detector 401a, a second light source monitoring detector 403a, and a second light source monitoring detector 402a. The optical axes of the first light source monitoring detector 401a, the second light source monitoring detector 403a, and the second light source monitoring detector 402a are located in the same plane, and are all located on the plane formed by the X-axis and the Z-axis (not indicated). Specifically, the first light source monitoring detector 401a is located directly above the spectroscope 330a, and the optical axis of the first light source monitoring detector 401a is perpendicular to the bearing surface 115a, and the optical axes of the second light source monitoring detector 403a and the second light source monitoring detector 402a are both at an angle to the bearing surface 115a. For example, the angle between the second light source monitoring detector 403a and the bearing surface 115 is greater than the angle between the second light source monitoring detector 402a and the bearing surface 115a.

[0083] For the detailed description of the signal detection module 400a, reference may be made to the corresponding description of the aforementioned embodiment, which will not be repeated here.

[0084] The specific description of the detection device described in this embodiment can be combined with reference to the corresponding description of the previous embodiment, and will not be repeated here.

[0085] Combined with reference Figure 4 and Figure 5 , Figure 4 The structure diagram and optical path diagram of another embodiment of the detection device of the present invention are shown. Figure 5 yes Figure 4 The structure diagram and optical path diagram of the detection device shown in the plane direction where the optical axes of multiple detectors of the object to be detected are located.

[0086] The similarities between the embodiment of the present invention and the aforementioned embodiment are not repeated here. The difference between the embodiment of the present invention and the aforementioned embodiment lies in that: there are multiple object detectors 410b to be tested, the optical axes of the multiple object detectors 410b to be tested are located in the same plane, and the plane where the optical axes of the multiple object detectors 410b to be tested are located is perpendicular to the direction of the emitted light.

[0087] By making the plane where the optical axes of the multiple object-to-be-detected detectors 410 b are located perpendicular to the direction of the emitted light, it is beneficial to improve the signal-to-noise ratio when detecting the object to be detected, thereby improving the detection accuracy.

[0088] In this embodiment, the direction parallel to the carrying surface 115b and perpendicular to the X-axis direction is the Y-axis direction, the direction perpendicular to the carrying surface 115b is the Z-axis direction (not shown), and the direction of the emitted light is perpendicular to the plane formed by the Y-axis and the Z-axis.

[0089] In this embodiment, the signal detection module (not shown) includes six detectors as an example, and the six detectors are respectively a first detector 401b, a second detector 402b, a third detector 403b, a fourth detector 404b, a fifth detector 405b and a sixth detector 406b. The optical axis of the first detector 401b is perpendicular to the bearing surface 115b, and the first detector 401b is located directly above the spectroscope 330b.

[0090] Specifically, the optical axes of the first detector 401b, the second detector 402b, the third detector 403b, the fourth detector 404b and the fifth detector 405b are located in the same plane, all located on the plane formed by the Y axis and the Z axis, and the optical axes of the second detector 402b, the third detector 403b, the fourth detector 404b and the fifth detector 405b have angles with the carrying surface 115b, and the angles are different. Specifically, the optical axes of the first detector 401b and the sixth detector 406b are located in the same plane, all located on the plane formed by the X axis and the Z axis, and the optical axis of the sixth detector 406b has an angle with the carrying surface 115b.

[0091] In this embodiment, the second detector 402b, the third detector 403b, the fourth detector 404b and the fifth detector 405b are all used as the object detector 410b to detect the second detection light, and the physical information of the target to be detected on the object to be detected is obtained by using the light intensity distribution information of the second detection light. In this embodiment, the first detector 401b and the sixth detector 406b are all used as the light source monitoring detector 430b to detect the first detection light, and the light intensity distribution information of the first detection light is used to obtain the light intensity detection value of the first detection light.

[0092] The light source monitoring detector 430b includes a first light source monitoring detector and a second light source monitoring detector, wherein the first light source monitoring detector is used to detect the first positive detection light, and the second light source monitoring detector is used to detect the first oblique detection light. In this embodiment, the first detector 401b is used as the first light source monitoring detector, and the sixth detector 406b is used as the second light source monitoring detector.

[0093] It should be noted that, in other embodiments, when the light source module is not provided with the optical path switching component, the signal detection module may not include the sixth detector.

[0094] For the specific description of the detection device described in this embodiment, reference can be made to the corresponding description of the aforementioned embodiments, which will not be repeated here.

[0095] Correspondingly, this embodiment also provides a detection method of the detection device according to the above embodiment.

[0096] refer to Figure 6 , Figure 6 It is a flow chart of an embodiment of the detection method of the present invention.

[0097] In this embodiment, the detection method comprises the following steps:

[0098] Step S1: using the outgoing light emitted by the light source to generate a first incident light projected onto a reflective surface, and the reflective surface reflects the first incident light to form a first detection light;

[0099] Step S2: detecting the first detection light, and obtaining a light intensity detection value of the first detection light by using light intensity distribution information of the first detection light;

[0100] Step S3: After obtaining the light intensity detection value, perform detection pre-adjustment processing.

[0101] The detection pre-adjustment process includes: comparing the power value corresponding to the light intensity detection value with the power setting value to obtain a comparison result; and adjusting the output power of the light source to the power setting value according to the comparison result.

[0102] The embodiment of the present invention utilizes the outgoing light emitted by the light source to generate the first incident light projected onto the reflecting surface, and causes the first incident light to be reflected to form the first detection light, and then detects the first detection light, so that before detecting the object to be detected, the output power of the light source can be monitored and adjusted according to the light intensity distribution information of the first detection light, thereby reducing the detection error caused by the output power fluctuation of the light source, and correspondingly improving the detection accuracy of the object to be detected.

[0103] The various steps of the detection method are described below in conjunction with the detection device.

[0104] Combined with reference Figure 1 and Figure 2 , Figure 1 is a functional block diagram of an embodiment of a detection device of the present invention, Figure 2 It is a structural schematic diagram and an optical path diagram of an embodiment of a detection device of the present invention. Taking the detection device described in the first embodiment as an example, the detection method described in this embodiment is described in detail.

[0105] Step S1 is executed to generate a first incident light projected onto the reflective surface 120 using the outgoing light emitted by the light source 210 . The reflective surface 120 reflects the first incident light to form a first detection light.

[0106] Specifically, the light source module 300 is turned on, and the outgoing light emitted by the light source 210 is used to generate the first incident light projected onto the reflective surface, and the first incident light is reflected to form the first detection light. By forming the first detection light, it is used to prepare for the subsequent use of the light intensity distribution information of the first detection light to obtain the light intensity detection value of the first detection light. In this embodiment, the outgoing light emitted by the light source 210 is parallel to the bearing surface 115.

[0107] In this embodiment, the second optical branch is used to form the first detection light as an example. Specifically, the movable first reflector 310 is moved into the optical path of the outgoing light to reflect the outgoing light to form the second reflected light, and the second reflector 320 reflects the second reflected light to form oblique incident light, and the oblique incident light is incident on the reflective surface 120 to form the first oblique detection light.

[0108] In other embodiments, the first optical branch may also be used to form the first detection light. Accordingly, the movable first reflector 310 is moved out of the optical path of the outgoing light, and the beam splitter 330 reflects the outgoing light to form normal incident light, which is incident on the reflecting surface 120, and the normal incident light is reflected by the reflecting surface 120 to form the first positive detection light, and the beam splitter 330 allows the first positive detection light to pass.

[0109] Execute step S2 to detect the first detection light and obtain a light intensity detection value of the first detection light by using the light intensity distribution information of the first detection light.

[0110] Specifically, the light source monitoring detector 430 is used to detect the first detection light, and the light intensity detection value of the first detection light is obtained by using the light intensity distribution information of the first detection light.

[0111] By detecting the first detection light and obtaining the light intensity detection value of the first detection light, it is determined whether it is necessary to adjust the output power of the light source 210 before detecting the object to be detected based on the power value corresponding to the light intensity detection value, so as to monitor the output power of the light source 210 and improve the detection accuracy when the object to be detected is subsequently detected.

[0112] In this embodiment, it is taken as an example that the signal detection module 400 includes three detectors, namely a first light source monitoring detector 401 , a second light source monitoring detector 403 and a second light source monitoring detector 402 .

[0113] In this embodiment, one optical branch uses the outgoing light emitted by the light source 210 to form the first incident light, and the other optical branch uses the outgoing light emitted by the light source 210 to form the second incident light. Therefore, any one of the first light source monitoring detector 401, the second light source monitoring detector 403 and the second light source monitoring detector 402 can be used as the object detector 410.

[0114] In this embodiment, the second optical branch is used to form the first detection light. Therefore, the second light source monitoring detector 403 is used as the light source monitoring detector 430, and the second light source monitoring detector 403 is used to detect the first oblique detection light.

[0115] In other embodiments, when the first optical branch is used to form the first detection light, the first light source monitoring detector 401 is correspondingly used as the light source monitoring detector, and the first light source monitoring detector 401 is used to detect the first positive detection light.

[0116] Execute step S3 to perform detection pre-adjustment processing after obtaining the light intensity detection value.

[0117] The detection pre-adjustment process includes: comparing the power value corresponding to the light intensity detection value with the power setting value to obtain a comparison result; and adjusting the output power of the light source to the power setting value according to the comparison result. Specifically, after obtaining the light intensity detection value, the detection pre-adjustment process is performed using the processor module 500.

[0118] Accordingly, during the detection pre-adjustment process, the power comparison unit 510 is used to compare the power value corresponding to the light intensity detection value with the power setting value; when the power value corresponding to the light intensity detection value is less than the power setting value, the power control unit 520 is used to adjust the output power of the light source 210 to the power setting value. There is a relationship model between light intensity and power. After obtaining the light intensity detection value, the corresponding power value can be obtained through the relationship model, and the power value is the actual output power of the light source 210.

[0119] By performing the detection pre-adjustment process, it is ensured that when the object to be detected is subsequently detected, the output power of the light source 210 reaches the power setting value, thereby improving the detection accuracy of the object to be detected.

[0120] Specifically, the step of obtaining the comparison result further includes: comparing the power value corresponding to the light intensity detection value and the power lower limit threshold; accordingly, when the power value corresponding to the light intensity detection value is less than the power lower limit threshold, the output power of the light source 210 is adjusted to the power setting value by using the power control unit 520. After the output power of the light source 210 is adjusted, it takes a certain time (for example, more than 10 minutes) for the output power of the light source 210 to reach a stable value. Therefore, under the condition that the power value corresponding to the light intensity detection value is less than the power lower limit threshold, the output power of the light source 210 is adjusted to the power setting value, which is beneficial to improve the machine productivity and extend the laser life.

[0121] Correspondingly, when the output power deviation of the light source 210 is small, the power change is compensated by calculation after the object to be tested is subsequently tested. To this end, after obtaining the comparison result, the detection pre-adjustment process also includes: when the power value corresponding to the light intensity detection value is less than the power setting value and greater than or equal to the power lower limit threshold, the ratio of the power value corresponding to the light intensity detection value to the power setting value is calculated as a compensation coefficient, and the signal strength value of the target to be tested on the object to be tested is compensated according to the compensation coefficient.

[0122] In this embodiment, the power compensation unit 530 is used to calculate the ratio of the power value corresponding to the light intensity detection value to the power setting value as a compensation coefficient, and the signal intensity value of the target to be measured on the object to be measured is compensated according to the compensation coefficient. Specifically, by using the software and algorithm, the signal intensity value of the target to be measured obtained by detection is proportionally compensated by software according to the compensation coefficient. Among them, the smaller the compensation coefficient, the greater the output power deviation of the light source 210, and correspondingly, the greater the compensation amount for the signal intensity value of the target to be measured.

[0123] In this embodiment, after completing the detection pre-adjustment processing, the detection method also includes: using the outgoing light emitted by the light source 210 to generate a second incident light projected onto the object to be tested, and the object to be tested causes the second incident light to scatter to form a second detection light; detecting the second detection light, and using the light intensity distribution information of the second detection light to obtain the physical information of the target to be tested on the object to be tested.

[0124] Specifically, the object to be tested is placed on the carrying surface 115; the outgoing light emitted by the light source 210 is used to generate a second incident light projected onto the object to be tested, and the second incident light is scattered to form a second detection light; the object to be tested detector 410 is used to receive the second detection light, and the light intensity distribution information of the second detection light is used to obtain the physical information of the target to be tested on the object to be tested.

[0125] In this embodiment, the monitoring and adjustment operation of the output power of the light source 210 is compatible with the detection operation of the object to be detected, so that the detection accuracy when the object to be detected is improved. Moreover, in the same detection device 10, the monitoring and adjustment operation of the output power of the light source 210 and the detection operation of the object to be detected are completed, which reduces the complexity of the entire detection process and is correspondingly conducive to improving the detection efficiency.

[0126] In this embodiment, the second detection light is detected by a light source monitoring detector, and the physical information of the target to be detected on the object to be detected is obtained by using the light intensity distribution information of the second detection light. Detecting the second detection light by a light source monitoring detector means: selecting at least one detector from a plurality of light source monitoring detectors 420 as the object to be detected detector 410. By using a light source monitoring detector to detect the second detection light, different optical branches in the same group of optical path structures can be used to monitor and adjust the output power of the light source 210 and perform detection operations on the object to be detected, thereby simplifying the operation flow of the detection method.

[0127] In this embodiment, the second optical branch is used to form the first detection light, and thus the first optical branch is used to form the second detection light, so as to detect the object to be detected. Specifically, the movable first reflector 310 is moved out of the optical path of the outgoing light, and the first beam splitter 330 reflects the outgoing light to form a normal incident light, and the normal incident light is incident on the object to be detected to form the second detection light, wherein the normal incident light is used as the second incident light. Accordingly, the second light source monitoring detector 402 is used as the object to be detected detector 410 to detect the second detection light.

[0128] In other embodiments, when the first optical branch is used to form the first detection light, the second optical branch is correspondingly used to form the second detection light. Specifically, the movable first reflector 310 is moved into the optical path of the outgoing light, the first reflector 310 reflects the outgoing light to form the second reflected light, the second reflector 320 reflects the second reflected light to form an oblique incident light, the oblique incident light is incident on the object to be tested to form the second detection light, wherein the oblique incident light is used as the second incident light. Accordingly, one or both of the second light source monitoring detector 403 and the second light source monitoring detector 402 are used as the object to be tested detector to detect the corresponding second detection light.

[0129] In this embodiment, when the object to be tested is tested, the processor module 500 is used to obtain detection information from the signal detection module 400, so as to determine the physical information of the target to be tested on the object to be tested. Moreover, before the object to be tested is tested, when it is determined that the power value corresponding to the light intensity detection value of the light source 210 is less than the power setting value and greater than or equal to the power lower limit threshold, the processor module 500 is also used to compensate the signal intensity value of the target to be tested according to the compensation coefficient, so as to facilitate obtaining accurate physical information.

[0130] Correspondingly, this embodiment also provides another detection method using the detection device described in the above embodiment.

[0131] Combined with reference Figure 3 , Figure 3 It is a structural schematic diagram and an optical path diagram of another embodiment of the detection device of the present invention.

[0132] The similarities between the embodiment of the present invention and the aforementioned embodiment are not repeated here. The difference between the embodiment of the present invention and the aforementioned embodiment is that the light source module 200 includes multiple light sources, the multiple light sources include a first light source 210a and a second light source 220a, the outgoing light emitted by the first light source 210a is used to form normal incident light, and the outgoing light emitted by the second light source 220a forms oblique incident light.

[0133] Correspondingly, in the step of turning on the light source module 300, any one of the first light source 210a and the second light source 220a is turned on, and the outgoing light emitted by the turned-on light source is used to generate the first incident light projected onto the reflective surface 120a, and the first incident light is reflected to form the first detection light.

[0134] In this embodiment, the first light source 210a and the beam splitter 330a constitute a first optical branch, and the second light source 220a constitutes a second optical branch. The light sources correspond to the optical branches one by one, so that the two light sources can be used to provide normal incident light and oblique incident light respectively, and the processor module (not shown) can control the corresponding light sources, thereby eliminating the step of moving the movable first reflector into or out of the outgoing light path, and correspondingly simplifying the operation process.

[0135] Correspondingly, in this embodiment, after the detection pre-adjustment processing is performed, when defect detection is performed on the object to be tested, the other light source among the first light source 210a and the second light source 220a is turned on, and the outgoing light emitted by the turned-on light source is used to generate a second incident light projected onto the object to be tested, and the second incident light is scattered to form a second detection light.

[0136] The specific description of the detection method described in this embodiment can be combined with reference to the corresponding description of the previous embodiment, and will not be repeated here.

[0137] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A detection device, characterized in that: include: A loading module, comprising a loading platform having a loading surface, wherein the loading surface is used to place the object to be tested, and a reflecting surface is provided on the loading surface; A light source module, comprising a light source with a power setting value, the light source module is used to generate a first incident light projected onto the reflection surface using the outgoing light emitted by the light source, and the reflection surface reflects the first incident light to form a first detection light; A signal detection module, comprising a light source monitoring detector, which is arranged on the optical path of the first detection light, and is used to detect the first detection light, and obtain a light intensity detection value of the first detection light by using light intensity distribution information of the first detection light; The processor module includes a power comparison unit and a power control unit connected to the power comparison unit, wherein the power comparison unit is used to compare the power value corresponding to the light intensity detection value with the power setting value to obtain a comparison result; and the power control unit is used to adjust the output power of the light source to the power setting value according to the comparison result; Wherein, the power control unit is used to adjust the output power of the light source to the power setting value when the power value corresponding to the light intensity detection value is less than the power setting value; The light source also has a power lower limit threshold, and the power lower limit threshold is less than the power setting value; The power comparison unit is further used to compare the power value corresponding to the light intensity detection value with the power lower limit threshold to obtain the comparison result; The power control unit is used to adjust the output power of the light source to the power setting value when the power value corresponding to the light intensity detection value is less than the power lower limit threshold; The processor module also includes: a power compensation unit connected to the power comparison unit, which is used to calculate the ratio of the power value corresponding to the light intensity detection value to the power setting value as a compensation coefficient when the power value corresponding to the light intensity detection value is less than the power setting value and greater than or equal to the power lower limit threshold, and compensate the signal strength value of the target to be measured on the object to be measured according to the compensation coefficient.

2. The detection device according to claim 1, characterized in that The power lower limit threshold is 90% to 95% of the power setting value.

3. The detection device according to claim 1, characterized in that: The first incident light includes one or both of normal incident light and oblique incident light; the light source monitoring detector includes a first light source monitoring detector and a second light source monitoring detector; wherein, The outgoing light emitted by the light source is used to form a normal incident light vertically incident on the reflecting surface, and the normal incident light is reflected by the reflecting surface to form a first positive detection light; the first light source monitoring detector is used to detect the first positive detection light; The outgoing light emitted by the light source is used to form an oblique incident light that is obliquely incident to the reflecting surface, and there is an acute angle between the incident direction of the oblique incident light and the reflecting surface. The oblique incident light is reflected by the reflecting surface to form a first oblique detection light; the second light source monitoring detector is used to detect the first oblique detection light.

4. The detection device according to claim 3, characterized in that: The light source module further includes: a first beam splitter, arranged on the optical path of the outgoing light, used to reflect the outgoing light to form the normal incident light, and after the normal incident light is reflected by the reflecting surface to form the first positive detection light, further used to transmit the first positive detection light; or used to transmit the outgoing light to form the normal incident light, and after the reflecting surface reflects the normal incident light to form the first reflected light, further used to reflect the first reflected light to form the first positive detection light; The optical path switching component is used to make the outgoing light form one of the normal incident light and the oblique incident light or a combination of the two.

5. The detection device according to claim 4, characterized in that: The optical path switching assembly comprises: a movable first reflector, which is used to reflect the outgoing light to form a second reflected light when it moves into the optical path between the light source and the first beam splitter, and to reflect the outgoing light to form a third reflected light when it moves out of the optical path between the light source and the first beam splitter; Alternatively, the second beam splitter is used to split the outgoing light into a second reflected light and a third reflected light, and the second reflected light and the third reflected light are used to form the oblique incident light and the normal incident light respectively.

6. The detection device according to claim 3, characterized in that: The light source module includes a plurality of light sources, and the plurality of light sources include a first light source and a second light source, the outgoing light emitted by the first light source is used to form the normal incident light, and the outgoing light emitted by the second light source forms the oblique incident light: The light source module also includes: a spectroscope, which is arranged on the optical path of the outgoing light generated by the first light source, and is used to reflect the outgoing light generated by the first light source to form the normal incident light, and after the normal incident light is reflected by the reflecting surface to form the first positive detection light, it is also used to allow the first positive detection light to pass through; or, it is used to allow the outgoing light generated by the first light source to pass through to form the normal incident light, and after the reflecting surface reflects the normal incident light to form the first reflected light, it is also used to reflect the first reflected light to form the first positive detection light.

7. The detection device according to claim 1, characterized in that: The light source module is further used to generate a second incident light projected onto the object to be tested using the outgoing light emitted by the light source, and the object to be tested scatters the second incident light to form a second detection light; The signal detection module further includes an object to be detected detector, which is arranged on the optical path of the second detection light and is used to detect the second detection light and obtain physical information of the target to be detected on the object to be detected using light intensity distribution information of the second detection light.

8. The detection device according to claim 7, characterized in that: There are multiple detectors for the object to be tested, and the optical axes of the multiple detectors for the object to be tested are located in the same plane, and the plane where the optical axes of the multiple detectors for the object to be tested are located is perpendicular to the direction of the emitted light.

9. The detection device according to claim 1, characterized in that: A third reflector is fixed on the bearing surface, and a surface of the third reflector is the reflective surface; Alternatively, a silicon wafer is fixed on the carrying surface, and the surface of the silicon wafer is the reflecting surface; Alternatively, the bearing surface has a reflective coating, and the surface of the reflective coating is the reflective surface.

10. The detection device according to claim 1, characterized in that: The reflecting surface is a plane.

11. The detection device according to claim 1, characterized in that: The reflective surface is located at an edge of the bearing surface.

12. The detection device according to claim 1, characterized in that: The light source includes a laser, and the power control unit includes a PID controller.

13. The detection device according to claim 1, characterized in that: The power setting value is 70% to 80% of the maximum power of the light source.

14. A detection method according to any one of claims 1 to 13, characterized in that: include: Using the outgoing light emitted by the light source to generate a first incident light projected onto a reflective surface, the reflective surface reflects the first incident light to form a first detection light; detecting the first detection light, and obtaining a light intensity detection value of the first detection light by using light intensity distribution information of the first detection light; After obtaining the light intensity detection value, performing detection pre-adjustment processing, the detection pre-adjustment processing includes: comparing the power value corresponding to the light intensity detection value with the power setting value to obtain a comparison result; and adjusting the output power of the light source to the power setting value according to the comparison result; Wherein, in the step of adjusting the output power of the light source to the power setting value according to the comparison result, when the power value corresponding to the light intensity detection value is less than the power setting value, the output power of the light source is adjusted to the power setting value; The light source also has a power lower limit threshold, and the power lower limit threshold is less than the power setting value; The step of obtaining the comparison result further includes: comparing the power value corresponding to the light intensity detection value with the power lower limit threshold; In the step of adjusting the output power of the light source to the power setting value, when the power value corresponding to the light intensity detection value is less than the power lower limit threshold, adjusting the output power of the light source to the power setting value; After obtaining the comparison result, the detection pre-adjustment processing also includes: when the power value corresponding to the light intensity detection value is less than the power setting value and greater than or equal to the power lower limit threshold, calculating the ratio of the power value corresponding to the light intensity detection value to the power setting value as a compensation coefficient, and compensating the signal intensity value of the target to be measured on the object to be measured according to the compensation coefficient.

15. The detection method according to claim 14, characterized in that: After the detection pre-adjustment process is completed, the detection method further includes: using the outgoing light emitted by the light source to generate a second incident light projected onto the object to be detected, and the object to be detected causes the second incident light to be scattered to form a second detection light; The second detection light is detected, and the physical information of the target to be detected on the object to be detected is obtained by using the light intensity distribution information of the second detection light.

16. The detection method according to claim 14, characterized in that: After the detection pre-adjustment process is completed, the detection method further includes: using the outgoing light emitted by the light source to generate a second incident light projected onto the object to be detected, and the object to be detected causes the second incident light to be scattered to form a second detection light; The second detection light is detected by the light source monitoring detector, and the physical information of the target to be detected on the object to be detected is obtained by using the light intensity distribution information of the second detection light.

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