Centering Detection Device and Centering Device Applied to Wafer Heating Plate

Abstract

The present invention provides a centering detection device, which is applied to a device to be detected. The device to be detected includes a first device to be detected and a second device to be detected. The centering detection device includes a base and at least three position measurement mechanisms. The position measurement mechanism includes a measurement part and a data reading part which are electrically connected. The base is arranged on the first device to be detected. The measurement part is used for measuring the distance between the measurement end of the measurement part and the second device to be detected. The data reading part is used for reading the distance measured by the measurement part, so as to adjust the position of the first device to be detected according to the distance, and make the first device to be detected and the second device to be detected achieve centering, solving the problem that the centering device cannot center the devices to be detected sleeved together, and this device can center the device to be detected under vacuum conditions. The present invention also provides a centering device applied to a wafer heating plate.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor devices, and in particular, to a centering detection device and a centering device applied to a wafer heating plate. Background Art

[0002] Semiconductor devices, namely the devices applied in the chip manufacturing and packaging and testing processes, also generally include the machinery and equipment required for producing semiconductor raw materials. During the entire chip manufacturing and packaging and testing process, there will be thousands of processing steps, involving a large variety of equipment types. For some equipment during the assembly process, the entire equipment requires precise centering.

[0003] Chinese Patent with publication number CN106918286A discloses a micro-miniature simple centering instrument, which includes two discs with the same diameter, one being an infrared emission disc and the other being an infrared reception disc; the infrared reception disc includes: a ring, an annular groove, and a telescopic arm; an annular groove concentric with the ring is provided on the ring; a groove is provided on the inner hole side wall of the ring and extends outward; the telescopic arm is installed in the groove and can move back and forth to achieve expansion and contraction; the infrared emission disc includes: a ring, a telescopic arm, an infrared emitter, and an infrared emission hole; a groove is provided on the inner hole side wall of the ring and extends outward; the telescopic arm is installed in the groove and can move back and forth to achieve expansion and contraction; an infrared emission hole is provided on the ring for placing the infrared emitter; the distance from the center point of the emission disc to the infrared emission hole; the emission holes are distributed on a circumference concentric with the ring, and its radius is the same as the radius of the annular groove of the reception disc.

[0004] Chinese Patent with publication number CN105352419A discloses a centering device, which includes a first adjusting tool and a second adjusting tool. The first adjusting tool has an annular part. When the first adjusting tool is connected to a first transmission shaft, the axis of the annular part coincides with the axis of the first transmission shaft. The second adjusting tool includes a measuring member that can be connected to a second transmission shaft and a dial indicator or a micrometer installed on the measuring member. When the measuring member rotates around the axis of the second transmission shaft, the contact of the dial indicator or the micrometer slides in contact with the annular surface of the annular part.

[0005] However, the centering devices in the above two patents are installed on two relatively different devices, so that the central axes of the two relatively different devices coincide, and it is impossible to center the devices sleeved together.

[0006] Therefore, it is necessary to develop a centering detection device to avoid the above problems existing in the prior art. Summary of the Invention

[0007] The object of the present invention is to provide a centering detection device, which solves the problem that the centering device cannot center the devices to be detected sleeved together, and the device can center the devices to be detected under vacuum conditions.

[0008] To achieve the above object, the present invention provides a centering detection device, which is applied to the device to be detected. The device to be detected includes a first device to be detected and a second device to be detected, and the first device to be detected is sleeved on the second device to be detected. The centering detection device includes a base and at least three position measurement mechanisms. The position measurement mechanism includes a measurement part and a data reading part which are electrically connected. The measurement part is arranged on the base, and each measurement part is arranged circumferentially with the center of the base as the center of the circle. The base is arranged on the first device to be detected. The measurement part is used to measure the distance between the measurement end of the measurement part and the second device to be detected, and the data reading part is used to read the distance measured by the measurement part, so as to adjust the position of the first device to be detected according to the distance, and make the first device to be detected and the second device to be detected achieve centering.

[0009] The beneficial effect of the centering detection device of the present invention is that: by arranging the base on the first device to be detected, the centering detection device is attached to the first device to be detected; by using the measurement part to measure the distance between the measurement end of the measurement part and the second device to be detected, and the data reading part to read the distance measured by the measurement part, so as to adjust the position of the first device to be detected according to the distance, and make the first device to be detected and the second device to be detected achieve centering. When the distances read by each data reading part are the same, the central axis of the first device to be detected coincides with the central axis of the second device to be detected, that is, the first device to be detected and the second device to be detected achieve centering; by electrically connecting the measurement part and the data reading part, no matter the measurement part is under vacuum conditions or atmospheric pressure conditions, the data reading part can be under atmospheric pressure conditions, so that the centering detection device can perform centering detection on the device to be detected under vacuum conditions or atmospheric pressure conditions. This device solves the problem that the centering device cannot center the devices to be detected sleeved together, and the device can center the devices to be detected under vacuum conditions.

[0010] Optionally, the centering detection device further includes a zero point calibration component, and the zero point calibration component is arranged on the base. The zero point calibration component is used to calibrate the measurement part. Its beneficial effect is that: the setting of the zero point calibration device is beneficial to determining the zero point position of the measurement part and reducing errors.

[0011] Optionally, the zero-point calibration component is detachably connected to the base, and a distance from the zero-point calibration component to the center of the base is greater than a distance from the measuring end to the center of the base.

[0012] Optionally, the zero-point calibration assembly includes at least three zero-point calibration pieces, which are arranged on the side walls of the base and are arranged opposite to the measuring part. The beneficial effect is that the number of zero-point calibration pieces is equal to that of the measuring part, and the zero-point calibration pieces are arranged on the side walls of the base, so that the measurement of the measuring part is more accurate.

[0013] Optionally, the centering detection device further comprises a fixing component, which is arranged on the base and used to fix the measuring part. The beneficial effect is that the measuring part and the base are more tightly fixed by the setting of the fixing component.

[0014] Optionally, the fixing assembly includes at least three fixing members to fix the measuring parts respectively, and the fixing members are detachably connected to the base. The beneficial effect is that the number of fixing members is the same as that of the measuring parts, which reduces the use of materials and saves costs.

[0015] Optionally, the fixing assembly includes a first fixing connector and a second fixing connector, the first fixing connector is arranged on the base, the second fixing connector is fixed to the measuring part, and the second fixing connector is movably connected to the first fixing connector to adjust the distance of the measuring part relative to the base. The beneficial effect is that the height of the fixing assembly can be adjusted, so that the measuring part can move up and down, so that the measuring part can detect the devices to be detected at different heights.

[0016] Optionally, the first fixed connection member is provided with any one of a sliding rod and a sliding groove, and the second fixed connection member is provided with the other of the sliding rod and the sliding groove, and the first fixed connection member and the second fixed connection member are adapted to each other through the sliding rod and the sliding groove to achieve sliding connection. The beneficial effect is that the measuring part can move up and down, so that the measuring part can detect the device to be detected at different heights.

[0017] Optionally, the angles between the structures formed by the adjacent measuring parts extending toward the center of the base are equal. The beneficial effect is that the distance measured by the measuring parts is more accurate and the error is reduced.

[0018] Optionally, the position measurement mechanism is at least one of a contact sensor and a non-contact sensor.

[0019] Optionally, the base is provided with a connection structure, and the base is fixed to the first device to be detected through the connection structure. The beneficial effect is that by providing the connection structure, the base is prevented from sliding on the first device to be detected.

[0020] The centering device applied to the wafer heating plate according to the present invention includes a cavity, a wafer heating plate, and the centering detection device. The wafer heating plate is placed in the cavity, and the base is adapted to the wafer heating plate; the measuring part is used to measure the distance between the measuring end and the side wall of the cavity, so as to adjust the position of the wafer heating plate according to the distance read by the data reading part, so that the wafer heating plate is centered with the cavity.

[0021] The beneficial effect of the centering device applied to the wafer heating plate according to the present invention is that: by adapting the base to the wafer heating plate, the centering detection device is attached to the wafer heating plate; by using the measuring part to measure the distance between the measuring end and the side wall of the cavity, so as to adjust the position of the wafer heating plate according to the distance read by the data reading part, so that the wafer heating plate is centered with the cavity. When the distances read by each data reading part are the same, the central axis of the wafer heating plate coincides with the central axis of the cavity, that is, the wafer heating plate is centered with the cavity; by electrically connecting the measuring part and the data reading part, so that no matter the measuring part is under vacuum conditions or atmospheric pressure conditions, the data reading part can be under atmospheric pressure conditions, so that the centering detection device can perform centering detection between the wafer heating plate and the cavity under vacuum conditions or atmospheric pressure conditions.

[0022] Optionally, the centering device applied to the wafer heating plate further includes a centering conversion component, and the centering conversion component is arranged at the top end of the side wall of the cavity, so that the measuring part measures the distance between the measuring end and the centering conversion component. The beneficial effect is that when the highest point of the cavity is lower than the measuring end, by providing the centering conversion component, the measuring end can accurately measure whether the central axis of the wafer heating plate coincides with the central axis of the cavity. Description of the Drawings

[0023] Figure 1 It is a schematic structural diagram of the centering detection device in the embodiment of the present invention;

[0024] Figure 2 It is a partial structural schematic diagram of the centering device applied to the wafer heating plate in the embodiment of the present invention. Detailed Embodiments

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings as understood by those of ordinary skill in the art to which the present invention pertains. The words such as "including" used herein are intended to mean that the elements or items appearing before this word cover the elements or items listed after this word and their equivalents, without excluding other elements or items.

[0026] In an embodiment of the present invention, the centering detection device is applied to a device to be detected. The device to be detected includes a first device to be detected and a second device to be detected, and the first device to be detected is sleeved on the second device to be detected. The centering detection device includes a base and at least three position measurement mechanisms. The position measurement mechanism includes a measurement part and a data reading part that are electrically connected. The measurement part is arranged on the base, and each of the measurement parts is arranged circumferentially with the center of the base as the center of the circle. The base is arranged on the first device to be detected. The measurement part is used to measure the distance between the measurement end of the measurement part and the second device to be detected, and the data reading part is used to read the distance measured by the measurement part to adjust the position of the first device to be detected according to the distance, so that the first device to be detected and the second device to be detected are centered.

[0027] Specifically, by arranging the base on the first device to be detected, the centering detection device is attached to the first device to be detected. By using the measurement part to measure the distance between the measurement end of the measurement part and the second device to be detected, and the data reading part to read the distance measured by the measurement part to adjust the position of the first device to be detected according to the distance, so that the first device to be detected and the second device to be detected are centered. When the distances read by each of the data reading parts are the same, the central axis of the first device to be detected coincides with the central axis of the second device to be detected, that is, the first device to be detected and the second device to be detected are centered. By electrically connecting the measurement part and the data reading part, the data reading part can be under atmospheric pressure conditions whether the measurement part is under vacuum conditions or atmospheric pressure conditions, so that the centering detection device can perform centering detection on the device to be detected under vacuum conditions or atmospheric pressure conditions. This device solves the problem that the centering device cannot center the devices to be detected sleeved together, and this device can center the device to be detected under vacuum conditions.

[0028] Figure 1 This is a schematic structural diagram of the centering detection device in the embodiments of the present invention.

[0029] In some possible embodiments of the present invention, referring to Figure 1 , the centering detection device 1 includes a base 11 and three position measurement mechanisms (not shown in the figure). The three position measurement mechanisms (not shown in the figure) include three measurement parts (not shown in the figure) and three data reading parts (not shown in the figure) that are electrically connected. The three measurement parts (not shown in the figure) are arranged on the base 11. The three measurement parts (not shown in the figure) are respectively a first measurement part 21, a second measurement part 22, and a third measurement part 23. The first measurement part 21, the second measurement part 22, and the third measurement part 23 are arranged circumferentially on the base 11 and centered on the center of the base 11.

[0030] In some embodiments of the present invention, the centering detection device further includes a zero point calibration component. The zero point calibration component is arranged on the base, and the zero point calibration component is used to calibrate the measurement part. By setting the zero point calibration device, the measurement part measures the initial distance between the measurement end part and the zero point calibration component, and then zeros the initial distance read by the data reading part to complete the zero point calibration of each position measurement mechanism.

[0031] In some possible embodiments of the present invention, the zero point calibration component is integrally formed with the base, reducing the error caused during zero point calibration.

[0032] Specifically, the integrally formed setting means that the zero point calibration component and the base are completed through an integrally formed process, that is, the zero point calibration component and the base are made of the same material, and this material can be completed through a single processing without more than two secondary processes. The product using the integrally formed process has no welding marks as a whole, better quality, and longer service life.

[0033] In some embodiments of the present invention, the zero point calibration component is detachably connected to the base, and the distance from the zero point calibration component to the center of the base is greater than the distance from the measurement end part to the center of the base.

[0034] In some possible embodiments of the present invention, the measurement end part is the end of the measurement part far from the center of the base.

[0035] In some embodiments of the present invention, the zero point calibration component and the base are detachably connected by screws and nuts.

[0036] In some possible embodiments of the present invention, the zero-point calibration component is an integral structure, and the distance from the zero-point calibration component to the center of the base is greater than or equal to the distance from the top end of the measuring part to the center of the base, and the distances from the measuring ends of the respective measuring parts to the zero-point calibration component are equal.

[0037] In some specific embodiments of the present invention, the shape of the centering detection device is circular, that is, the shape of the base is circular, and the zero-point calibration component is an integral annular calibration piece.

[0038] In some embodiments of the present invention, the zero-point calibration component includes at least 3 zero-point calibration pieces, the zero-point calibration pieces are arranged on the side wall of the base, and the zero-point calibration pieces are arranged opposite to the measuring parts. The number of the zero-point calibration pieces is equal to the number of the measuring parts, and the zero-point calibration pieces are arranged on the side wall of the base, so that the measurement of the measuring parts is more accurate.

[0039] In some possible embodiments of the present invention, referring to Figure 1 , the zero-point calibration component (not marked in the figure) includes 3 zero-point calibration pieces (not marked in the figure), the 3 zero-point calibration pieces (not marked in the figure) are respectively a first zero-point calibration piece 31, a second zero-point calibration piece 32 and a third zero-point calibration piece 33, the first zero-point calibration piece 31, the second zero-point calibration piece 32 and the third zero-point calibration piece 33 are respectively detachably connected to the side wall of the base 1 through screws 12 and nuts 13, and the first zero-point calibration piece 31 is arranged opposite to the first measuring part 21, the second zero-point calibration piece 32 is arranged opposite to the second measuring part 22, and the third zero-point calibration piece 33 is arranged opposite to the third measuring part 23. When the height of the zero-point calibration piece (not marked in the figure) does not match the height of the measuring part (not marked in the figure), it is convenient to replace the zero-point calibration piece (not marked in the figure) with a height matching the height of the measuring part (not marked in the figure).

[0040] In some embodiments of the present invention, referring to Figure 1 , the first measuring part 21 includes a first measuring end 211, the second measuring part 22 includes a second measuring end 221, and the third measuring part 23 includes a third measuring end 231.

[0041] In some possible embodiments of the present invention, the data reading unit includes a first data reading unit, a second data reading unit, and a third data reading unit. The first data reading unit is configured to read the distance measured by the first measuring unit 21 between the first measuring end 211 and the second device to be detected. The second data reading unit is configured to read the distance measured by the second measuring unit 22 between the second measuring end 221 and the second device to be detected. The third data reading unit is configured to read the distance measured by the third measuring unit 23 between the third measuring end 231 and the second device to be detected.

[0042] In some other possible embodiments of the present invention, when the first measuring end 211 abuts against the first zero calibration member 31, the first data reading unit is a first value; when the second measuring end 221 abuts against the second zero calibration member 32, the second data reading unit is a second value; when the third measuring end 231 abuts against the third zero calibration member 33, the third data reading unit is a third value. Adjusting the first value, the second value, and the third value to zero completes the zero calibration of the measuring unit.

[0043] In some embodiments of the present invention, the centering detection device further includes a fixing component. The fixing component is disposed on the base, and the fixing component is used to fix the measuring unit. By providing the fixing member, the measuring unit is more firmly fixed to the base.

[0044] In some other specific embodiments of the present invention, the fixing component is an annular fixing member, and the distance from the annular fixing member to the center of the base is less than or equal to the distance from the measuring end to the center of the base.

[0045] In some possible embodiments of the present invention, the fixing component and the base are integrally formed, reducing the error caused when the fixing component is fixed to the base. The integrally formed setting means that the fixing component and the base are completed through an integrally formed process, that is, the fixing component and the base are made of the same material, and this material can be completed by a single processing without more than two times of processing. The product using the integrally formed process has no welding marks as a whole, better quality, and longer service life.

[0046] In some possible embodiments of the present invention, the fixing component and the base are detachably connected by screws and nuts. When the height of the fixing component is not compatible with the height of the reference device, it is convenient to replace the fixing component with a height compatible with the height of the reference device.

[0047] In some embodiments of the present invention, the fixing component includes at least three fixing members to respectively fix the measuring part, and the fixing members are detachably connected to the base. The number of the fixing members is the same as that of the measuring parts, which reduces the use of materials and saves costs.

[0048] In some embodiments of the present invention, referring to Figure 1 , the fixing component (not labeled in the figure) includes three fixing members (not labeled in the figure), the three fixing members (not labeled in the figure) are respectively a first fixing member 41, a second fixing member 42 and a third fixing member 43, the first fixing member 41, the second fixing member 42 and the third fixing member 43 respectively fixedly support the first measuring part 21, the second measuring part 22 and the third measuring part 23, and the first fixing member 41, the second fixing member 42 and the third fixing member 43 are respectively detachably connected to the base 1 through screws 12 and nuts 13.

[0049] In other embodiments of the present invention, the fixing component includes a first fixing connecting member and a second fixing connecting member. The first fixing connecting member is arranged on the base, the second fixing connecting member is fixed to the measuring part, and the second fixing connecting member is movably connected to the first fixing connecting member to adjust the distance between the measuring part and the base. The height of the fixing component can be adjusted, so that the measuring part can move up and down, so that the measuring part can detect the device to be detected at different heights.

[0050] In some embodiments of the present invention, the first fixing connecting member is provided with either a sliding rod or a sliding groove, and the second fixing connecting member is provided with the other of the sliding rod and the sliding groove. The first fixing connecting member and the second fixing connecting member are slidably connected through the matching of the sliding rod and the sliding groove. The measuring part can move up and down, so that the measuring part can detect the device to be detected at different heights.

[0051] In other embodiments of the present invention, the first fixing connecting member is provided with a sliding rod, the second fixing connecting member is provided with a sliding groove, and the first fixing connecting member and the second fixing connecting member are slidably connected through the matching of the sliding rod and the sliding groove.

[0052] In still other embodiments of the present invention, the first fixing connecting member is provided with a sliding groove, the second fixing connecting member is provided with a sliding rod, and the first fixing connecting member and the second fixing connecting member are slidably connected through the matching of the sliding rod and the sliding groove.

[0053] In some embodiments of the present invention, the angles between the structures formed by adjacent measuring parts extending towards the center of the base are equal. This makes the distance measured by the measuring part more accurate and reduces errors.

[0054] In some possible embodiments of the present invention, with reference to Figure 1 , the included angle between the structure formed after the first measuring part 21 extends towards the center of the base and the structure formed after the second measuring part 22 extends towards the center of the base is 120°, the included angle between the structure formed after the second measuring part 22 extends towards the center of the base and the structure formed after the third measuring part 23 extends towards the center of the base is 120°, and the included angle between the structure formed after the third measuring part 23 extends towards the center of the base and the structure formed after the first measuring part 21 extends towards the center of the base is 120°.

[0055] In some embodiments of the present invention, the position measuring mechanism is at least one of a contact sensor and a non-contact sensor.

[0056] In some possible embodiments of the present invention, the position measuring mechanism is a contact sensor. The contact sensor includes a measuring part and a data reading part. The first measuring part 21, the second measuring part 22, and the third measuring part 23 are respectively cylinders with position detection functions. The first cylinder is the measuring end part 221 of the first measuring part 21, the second cylinder is the measuring end part 221 of the second measuring part 22, the third cylinder is the measuring end part 231 of the third measuring part 23. The base 11 is provided with a first sub-gas 51, a second sub-gas 52, and a third sub-gas 53. The first sub-gas 51, the second sub-gas 52, and the third sub-gas 53 are used to supply gas to the first cylinder, the second cylinder, and the third cylinder.

[0057] In some other possible embodiments of the present invention, the contact sensor is any one of a potentiometer type displacement sensor and a differential voltage type displacement sensor.

[0058] In some possible embodiments of the present invention, the position measuring mechanism is a non-contact sensor. The non-contact sensor is any one of TF1 series linear displacement sensors, LS1 series linear displacement sensors, TP1 series linear displacement sensors, TIM series linear displacement sensors, TH1 series linear displacement sensors, LS1 series linear displacement sensors, FTI10 series linear displacement sensors, and F200g series linear displacement sensors. The LS1 series linear displacement sensor is an LS1 series linear displacement sensor with a return spring.

[0059] In some possible embodiments of the present invention, the position measuring mechanism is a non-contact sensor, and the measuring end part is the transmitting part of the non-contact sensor.

[0060] In some embodiments of the present invention, the base is provided with a connection structure, and the base is fixed to the device to be detected through the connection structure. By providing the connection structure, the base is prevented from sliding on the device to be detected.

[0061] In some specific embodiments of the present invention, the connection structure is any one of a magnet assembly, a buckle assembly, a Velcro assembly, and an adhesive assembly.

[0062] In an embodiment of the present invention, an alignment device for a wafer heating plate includes a cavity, a wafer heating plate, and the alignment detection device. The wafer heating plate is placed in the cavity, and the base is adapted to the wafer heating plate; the measuring portion is used to measure the distance between the measuring end portion and the side wall of the cavity, so as to adjust the position of the wafer heating plate according to the distance read by the data reading portion, so that the wafer heating plate is aligned with the cavity.

[0063] Specifically, by adapting the base to the wafer heating plate, the alignment detection device is attached to the wafer heating plate; by using the measuring portion to measure the distance between the measuring end portion and the side wall of the cavity, and adjusting the position of the wafer heating plate according to the distance read by the data reading portion, so that the wafer heating plate is aligned with the cavity. When the distances read by each data reading portion are the same, the central axis of the wafer heating plate coincides with the central axis of the cavity, that is, the wafer heating plate is aligned with the cavity; by electrically connecting the measuring portion and the data reading portion, so that the data reading portion can be in the atmospheric pressure condition whether the measuring portion is in the vacuum condition or the atmospheric pressure condition, so that the alignment detection device can perform alignment detection between the wafer heating plate and the cavity under the vacuum condition or the atmospheric pressure condition.

[0064] In some embodiments of the present invention, the alignment device for a wafer heating plate further includes an alignment conversion component, and the alignment conversion component is arranged at the top end of the side wall of the cavity, so that the measuring portion measures the distance between the measuring end portion and the alignment conversion component. When the highest point of the cavity is lower than the measuring end portion, by providing the alignment conversion component, the measuring end portion can accurately measure whether the central axis of the wafer heating plate coincides with the central axis of the cavity.

[0065] In some possible embodiments of the present invention, the alignment conversion component is used to adjust the measuring point of the measuring portion, which means changing the measuring point position from the inner wall of the cavity to the inner wall of the alignment conversion mechanism to compensate for the insufficient height of the side wall of the cavity.

[0066] Figure 2 It is a partial structural schematic diagram of the alignment device for a wafer heating plate in an embodiment of the present invention.

[0067] In some possible embodiments of the present invention, with reference to Figure 2 , the centering device 5 applied to the wafer heating plate includes a cavity 61, a wafer heating plate 62, a centering conversion component 63, and the centering detection device 1. The wafer heating plate 62 is placed in the cavity 61. A groove 621 is provided on the upper surface of the wafer heating plate 62. A bump 111 is provided on the lower surface of the base 11. The base 11 and the wafer heating plate 62 are connected through the matching bump 111 and groove 621. The centering conversion component 63 is arranged at the top of the cavity 61. The centering detection device 1 is used to align the central axis of the wafer heating plate 62 with the central axis of the cavity 61.

[0068] The detection method of the centering device applied to the wafer heating plate: Zero calibration of the centering detection device is performed under atmospheric pressure. Three zero calibration parts are removed from the centering detection device. The base of the centering detection device and the wafer heating plate are tightly attached through the groove and the bump. At this time, the value of the data reading part is zero. Since the wafer heating plate is under vacuum conditions, an air pipe channel and a wire channel are provided on the side wall of the cavity. The air pipe channel is tightly attached to the air pipe, and the wire is tightly attached to the wire channel, so that the entire cavity is under vacuum conditions. Since the measuring part is under vacuum conditions and the data reading part is under atmospheric pressure, it does not affect the reading of the measured distance. Each measuring part is a cylinder with a position detection function. By introducing gas into each measuring part, the cylinder extends and retracts outwards until it touches the centering conversion component. At this time, the value of the data reading part is read. If the values are the same, the central axis of the wafer heating plate coincides with the central axis of the cavity, and centering stops; if the values are different, the gas introduction is stopped, the cylinder is retracted to its original position, then the position of the wafer heating plate is adjusted. After the position is adjusted, gas is introduced again, the cylinder extends and retracts outwards until it touches the centering conversion component, and the value of the data reading part is read. If the values are the same, centering stops; if the values are different, the position of the wafer heating plate is adjusted in a loop until the values of the data reading part are the same.

[0069] Although the embodiments of the present invention have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present invention described in the claims. Moreover, the present invention described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A centering detection device, applied to a device to be detected, characterized in that, The device to be detected includes a first device to be detected and a second device to be detected, and the first device to be detected is sleeved on the second device to be detected; the centering detection device includes a base and at least three position measurement mechanisms, and the position measurement mechanism includes a measurement part and a data reading part which are electrically connected. The measurement part is arranged on the base, and each measurement part is arranged in a circumferential manner with the center of the base as the center of the circle; the base is arranged on the first device to be detected, the measurement part is used to measure the distance between the measurement end of the measurement part and the second device to be detected, and the data reading part is used to read the distance measured by the measurement part, so as to adjust the position of the first device to be detected according to the distance, so that the first device to be detected and the second device to be detected are centered; It further includes a zero point calibration component, and the zero point calibration component is arranged on the base, and the zero point calibration component is used to calibrate the measurement part; The zero point calibration component includes at least three zero point calibration parts, the zero point calibration parts are arranged on the side wall of the base, and the zero point calibration parts are arranged opposite to the measurement part.

2. The centering detection device according to claim 1, wherein The zero point calibration component is detachably connected to the base, and the distance from the zero point calibration component to the center of the base is greater than the distance from the measurement end to the center of the base.

3. The centering detection device according to claim 1, wherein It further includes a fixing component, and the fixing component is arranged on the base, and the fixing component is used to fix the measurement part.

4. The centering detection device according to claim 3, wherein The fixing component includes at least three fixing parts to respectively fix the measurement part, and the fixing parts are detachably connected to the base.

5. The centering detection device according to claim 3, characterized in that The fixing component includes a first fixing connecting piece and a second fixing connecting piece. The first fixing connecting piece is arranged on the base, the second fixing connecting piece is fixed to the measurement part, and the second fixing connecting piece is movably connected to the first fixing connecting piece to adjust the distance of the measurement part relative to the base.

6. The centering detection device according to claim 5, characterized in that The first fixing connecting piece is provided with either a sliding rod or a sliding groove, and the second fixing connecting piece is provided with the other of the sliding rod and the sliding groove. The first fixing connecting piece and the second fixing connecting piece are slidably connected through the sliding rod and the sliding groove being adapted to each other.

7. The centering detection device according to claim 1, characterized in that The angles between the structures formed after adjacent measurement parts extend towards the center of the base are equal.

8. The centering detection device according to claim 1, characterized in that, The position measurement mechanism is at least one of a contact sensor and a non-contact sensor.

9. The centering detection device according to claim 1, wherein The base is provided with a connecting structure, and the base is fixed to the first device to be detected through the connecting structure.

10. A centering device applied to a wafer heating plate, characterized in that, It includes a cavity, a wafer heating plate and the centering detection device according to any one of claims 1-9. The wafer heating plate is placed in the cavity, and the base is adapted to the wafer heating plate; the measurement part is used to measure the distance between the measurement end and the side wall of the cavity, so as to adjust the position of the wafer heating plate according to the distance read by the data reading part, so that the wafer heating plate and the cavity are centered.

11. The centering device applied to a wafer heating plate according to claim 10, wherein, It further includes a centering conversion component, and the centering conversion component is arranged at the top end of the side wall of the cavity, so that the measurement part measures the distance between the measurement end and the centering conversion component.

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