Vacuum sample transfer system, transfer method and vacuum processing system

Abstract

The present disclosure provides a vacuum sample transfer system, comprising: a vacuum transfer chamber; a track, arranged in the vacuum transfer chamber; a vacuum sample carrier, slidably arranged on the track; a sampling device, arranged above the vacuum transfer chamber and at least partially located in the vacuum transfer chamber; and a sample transfer device, at least partially located in the vacuum transfer chamber, wherein the sampling device is used to grab the sample carried by the vacuum sample carrier and place it on the sample transfer device.

Description

Technical Field

[0001] The present disclosure relates to the field of vacuum technology, and in particular to a vacuum sample transfer system, a transfer method and a vacuum processing system. Background Art

[0002] In vacuum processing technology, different vacuum processing systems are often interconnected so that samples can be transferred to different growth systems or analysis systems in a vacuum environment, thereby processing and analyzing the samples. In traditional vacuum systems, sample transfer devices are generally used for sample transfer, but sample transfer is difficult during the sample transfer process. It takes very cumbersome steps to remove the sample from the sample transfer device and then send it to the vacuum processing system. The operation is difficult, the risk of sample loss is high, and the sample transfer efficiency is low, which further causes low experimental or production efficiency. Summary of the invention

[0003] The present disclosure provides a vacuum sample transfer system, comprising: a vacuum transfer chamber; a track, arranged in the vacuum transfer chamber; a vacuum sample carrier, slidably arranged on the track; a sampling device, arranged above the vacuum transfer chamber and at least partially located in the vacuum transfer chamber; and a sample transfer device, at least partially located in the vacuum transfer chamber, wherein the sampling device is used to grab the sample carried by the vacuum sample carrier and place it on the sample transfer device.

[0004] The present disclosure provides a vacuum processing system including: a vacuum sample transfer system according to any one of the embodiments of the present disclosure, wherein a vacuum transfer chamber of the vacuum sample transfer system includes one or more transfer windows; and one or more vacuum processing chambers, the vacuum processing chambers being vacuum-sealed and connected to the transfer windows.

[0005] The present disclosure provides a vacuum sample transfer method, which is characterized by comprising: grabbing a sample vertically carried on a vacuum sample carrier from above a vacuum transfer chamber by a sampling device; placing the sample on a sample transfer device; and transferring the sample to a vacuum processing chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0007] Figure 1 A schematic diagram showing the structure of a vacuum sample transfer system according to some embodiments of the present disclosure is shown;

[0008] Figure 2 A partial structural schematic diagram of a vacuum sample transfer system according to some embodiments of the present disclosure is shown;

[0009] Figure 3 A schematic diagram showing the structure of a sampling device according to some embodiments of the present disclosure is shown;

[0010] Figure 4 A schematic diagram showing the structure of a vacuum sample carrier according to some embodiments of the present disclosure is shown;

[0011] Figure 5 A top view of a vacuum sample carrier according to some embodiments of the present disclosure is shown;

[0012] Figure 6 A partial structural schematic diagram of a sample transfer device according to some embodiments of the present disclosure is shown;

[0013] Figure 7 A schematic structural diagram of a vacuum processing system according to some embodiments of the present disclosure is shown;

[0014] Figure 8 A side view showing a vacuum processing system according to some embodiments of the present disclosure; and

[0015] Fig. 9 A flow chart of a vacuum transfer method according to some embodiments of the present disclosure is shown.

[0016] In the above drawings, the reference numerals represent:

[0017] 1 Vacuum treatment system

[0018] 101, 101a, 101b transfer window

[0019] 102 Processing Chamber

[0020] 1000 Vacuum Sample Transfer System

[0021] 500 Vacuum transfer chamber

[0022] 400 tracks

[0023] 100 Vacuum sample carrier

[0024] 10 Car body

[0025] 11a, 11b opening

[0026] 12 Reinforcement ribs

[0027] 20 Slide device

[0028] 21 Pulley

[0029] 211a, 211b Centering pulley

[0030] 212a Eccentric pulley

[0031] 30 Sample loading device

[0032] 30a First sample loading device

[0033] 30b Second sample loading device

[0034] 30c The third sample loading device

[0035] 30d Fourth sample loading device

[0036] 31 Boss

[0037] 31a first boss

[0038] 32b Second boss

[0039] 33c The third boss

[0040] 34d Fourth Boss

[0041] 32, 32a, 32b, 32c, 32d bracket

[0042] 40a, 40b Additional sample loading device

[0043] 50 drive device

[0044] 51a, 51b driving magnet

[0045] 53a, 53b C-type mounting seat

[0046] 531a, 531b C-type opening

[0047] 200 samples

[0048] 300 additional items

[0049] 600 Sampling Device

[0050] 610 Sampling Arm

[0051] 611 control components

[0052] 612 Sampling Components

[0053] 6121 outer sleeve

[0054] 6122 inner rod

[0055] 6123 Sampling Parts

[0056] 620 seals

[0057] 630 bellows

[0058] 640, 640a, 640b columns

[0059] 650 parking tray

[0060] 651, 651a, 651b parking slots

[0061] 700 sample transfer device

[0062] 710 Sample Transfer Arm

[0063] 720 sample transmission

[0064] 721, 721a, 721b, 721c sample transfer slot DETAILED DESCRIPTION

[0065] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0066] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection", "connected", and "coupling" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances.

[0067] Figure 1 A schematic structural diagram of a vacuum sample transfer system 1000 according to some embodiments of the present disclosure is shown. Figure 2 A partial structural schematic diagram of a vacuum sample transfer system 1000 according to some embodiments of the present disclosure is shown. Figure 2 For the sake of clarity, the vacuum transfer chamber 500 is omitted.

[0068] like Figure 1 and Figure 2As shown, the vacuum sample transfer system 1000 may include a vacuum transfer chamber 500, a track 400, a vacuum sample carrier 100, a sampling device 600, and a sample transfer device 700. The track 400 is disposed in the vacuum transfer chamber, and the vacuum sample carrier 100 is slidably disposed on the track 400 and can slide along the track 400. The sampling device 600 is disposed above the vacuum transfer chamber 500 and is at least partially located in the vacuum transfer chamber 500. The sample transfer device 700 is at least partially located in the vacuum transfer chamber 500. The sampling device 600 can be used to grab the sample 200 carried by the vacuum sample carrier 100 and place it on the sample transfer device 700.

[0069] Those skilled in the art will appreciate that the above disclosure should be understood broadly and does not only refer to Figure 1 , Figure 2 The directly above shown in the figure may also include the above that forms a certain angle (for example, 0-30 degrees) with the directly above.

[0070] Figure 3 A schematic structural diagram of a sampling device 600 according to some embodiments of the present disclosure is shown.

[0071] like Figure 2 and Figure 3 As shown, in some embodiments of the present disclosure, the sampling device 600 may include a sampling arm 610 and a sealing member 620. The sampling arm 610 may include a control component 611 and a sampling component 612, and the control component 611 may be used to control the sampling of the sampling component 612. The sealing member 620 may be used to at least partially seal the sampling component 612 in the vacuum transfer chamber 500.

[0072] like Figure 1-3 As shown, the sealing member 620 may be a sealing flange, the sampling arm 610 is passed through the sealing flange, and is vacuum-sealed and connected to the window of the vacuum transfer chamber 500 through the sealing flange.

[0073] like Figure 3 As shown, in some embodiments of the present disclosure, the sampling device 600 may further include a bellows 630 , which can be used to seal the sampling arm 610 and the sealing member 620 .

[0074] The bellows 630 may be located in the vacuum transfer chamber 500, with one end sealed to the seal 620 and the other end sealed to the sampling arm 610, so that the vacuum environment of the vacuum transfer chamber 500 can be maintained under the telescopic and swinging movement of the sampling arm 610. In some embodiments, the bellows 630 may also be located above the vacuum transfer chamber 500.

[0075] like Figure 2 and Figure 3As shown, in some embodiments of the present disclosure, the sampling assembly 612 may include an outer sleeve 6121 and an inner rod 6122, and the inner rod 6122 is at least partially disposed in the outer sleeve 6121. The control assembly 611 may include a magnetic transmission assembly (not shown in the figure) disposed along the circumference of the upper end of the inner rod 6122 and a magnetic drive assembly (not shown in the figure) disposed along the circumference of the upper end of the outer sleeve 6121. The magnetic drive assembly may be magnetically coupled with the magnetic transmission assembly, and may rotate and slide up and down along the outer sleeve 6121.

[0076] The movement of the magnetic drive assembly drives the movement of the magnetic transmission assembly, which in turn drives the inner rod 6122 to rotate and retract in the outer sleeve 6121, so that the sampling assembly 612 moves to a suitable sampling position and grabs the sample.

[0077] like Figure 2 and Figure 3 As shown, in some embodiments of the present disclosure, the sampling assembly 612 may further include a sampling piece 6123 , which is disposed at the end of the inner rod 6122 and can be used to grab or release the sample 200 .

[0078] The sampling member 6123 may include an outer snap-fit ​​member and an inner snap-fit ​​member disposed in the outer snap-fit ​​member. The outer snap-fit ​​member is connected to the inner rod 6122 and can rotate under the drive of the inner rod 6122. The inner snap-fit ​​member is flexibly connected to the outer snap-fit ​​member through a spring. An outer snap-fit ​​groove is provided on the outer snap-fit ​​member, and an inner snap-fit ​​groove is provided on the inner snap-fit ​​member. Before sampling of the sampling assembly 612, the outer snap-fit ​​groove is parallel to the inner snap-fit ​​groove, so that the protrusion on the sample 200 can smoothly pass through the outer snap-fit ​​groove and be embedded in the inner snap-fit ​​groove. After the sample 200 is embedded in the inner snap-fit ​​groove, the outer snap-fit ​​groove rotates and forms a cross with the inner snap-fit ​​groove, and the protrusion of the sample 200 is snap-fitted and fixed on the sampling member 6123 to complete the sampling.

[0079] like Figure 2 and Figure 3 As shown, in some embodiments of the present disclosure, the sampling device 600 may further include one or more columns 640 (e.g., columns 640a, 640b) and a parking disk 650. The columns 640 (e.g., columns 640a, 640b) are detachably connected to the seal, and the parking disk 650 is disposed on one or more columns 640 (e.g., columns 640a, 640b), and may include one or more parking slots 651 (e.g., parking slots 651a, 651b), which can be used to park the sampling arm 610.

[0080] When the sampling arm 610 is not in use, it can be placed in the parking slot 651 (e.g., the parking slot 651b) to prevent damage to the equipment caused by overturning due to being suspended in the air, thereby extending the service life of the equipment. During the sampling process using the sampling arm 610, the columns 640 (e.g., the columns 640a, 640b) and the parking plate 650 (see FIG. 1 ) can be disassembled. Figure 1 ), so that the sampling arm 610 can move flexibly to facilitate sampling.

[0081] Those skilled in the art will appreciate that although Figure 2 and Figure 3 Only two pillars 640 are shown in FIG. 1 , but the number of pillars 640 may be one or more than two. Figure 2 and Figure 3 Only two parking slots 651a and 651b are shown in the figure, but the number of the parking slots 651 may be one or more than two.

[0082] like Figure 3 As shown, the bellows 630 can be located in the vacuum transfer chamber 500, with one end sealed to the seal 620 and the other end sealed to the outer sleeve 6121 of the sampling arm 610, so that the inner rod 6122 and the sampling member 6123 are in the vacuum environment of the vacuum transfer chamber 500. In this way, the inner rod 6122 and the sampling member 6123 can swing, slide up and down, and rotate under the drive of the control component 611, while maintaining the vacuum environment of the vacuum transfer chamber 500. In some embodiments, the bellows 630 can also be located above the vacuum transfer chamber 500, with the lower end sealed to the seal 620 and the upper end sealed to the outer sleeve 6121 of the sampling arm 610.

[0083] Figure 4 A schematic structural diagram of a vacuum sample carrier 100 according to some embodiments of the present disclosure is shown. Figure 5 A top view of a vacuum sample carrier 100 according to some embodiments of the present disclosure is shown.

[0084] like Figure 4 and Figure 5 As shown, the vacuum sample carrier 100 may include: a vehicle body 10, a sliding device 20, and one or more sample carriers 30 (e.g., sample carriers 30a, 30b, 30c, 30d). The sliding device 20 is connected to the vehicle body 10 and is slidably disposed on a track 400 (e.g., Figure 2 400). One or more sample loading devices 30 are provided on the vehicle body 10, and can be used to carry the sample 200 upright on the vehicle body 10. It can be understood by those skilled in the art that the sample referred to in the present disclosure, such as the sample 200, should be understood broadly, and may include the sample itself, and may also include a sample tray or other components for holding the sample.

[0085] like Figure 4 and Figure 5As shown, in some embodiments of the present disclosure, the sample loading device 30 (e.g., sample loading devices 30a, 30b, 30c, 30d) may include a boss 31 (e.g., bosses 31a, 31b, 31c, 31d) and one or more brackets 32 (e.g., brackets 32a, 32b, 32c, 32d). The boss 31 (e.g., bosses 31a, 31b, 31c, 31d) is disposed on the vehicle body 10, and one or more brackets 32 (e.g., brackets 32a, 32b, 32c, 32d) are disposed on the boss 31 (e.g., bosses 31a, 31b, 31c, 31d), which may be used to allow the sample 200 to stand upright in the bracket 32. Those skilled in the art may appreciate that the bracket 32 ​​(e.g., brackets 32a, 32b, 32c, 32d) may include various suitable structures. For example, Figure 4 As shown, the bracket 32 ​​(e.g., brackets 32a, 32b, 32c, 32d) may include a frame fixedly disposed on the boss 31 (e.g., bosses 31a, 31b, 31c, 31d). For another example, the bracket 32 ​​(e.g., brackets 32a, 32b, 32c, 32d) may include a groove disposed on the boss 31 (e.g., bosses 31a, 31b, 31c, 31d).

[0086] In some embodiments of the present disclosure, the boss 31 (for example, the bosses 31a, 31b, 31c, 31d) extends along an arc as a whole, and the upper surface of the boss 31 is inclined toward the inside of the arc. Figure 1 and Figure 2 As shown, the boss 31 (e.g., bosses 31a, 31b, 31c, 31d) is crescent-shaped as a whole, with a surface slightly inclined inward, and is fixedly connected to the upper surface of the vehicle body 10, for example, by bolts or screws. In this way, the sample carried in the bracket 32 ​​can be tilted inward, which is convenient for sampling operations. Those skilled in the art will understand that although Figure 1 The bosses 31 (e.g., bosses 31a, 31b, 31c, 31d) shown in FIG. 3 are crescent-shaped, but the crescent shape is only an exemplary structure, and the bosses 31 may also be other arc-shaped structures or straight lines or other curved lines. Figure 1 The bosses 31 (eg, bosses 31 a , 31 b , 31 c , 31 d ) shown in FIG. 1 are fixedly connected to the upper surface of the vehicle body 10 , but the bosses 31 may also be integrally formed with the vehicle body 10 .

[0087] like Figure 4As shown, in some embodiments of the present disclosure, one or more brackets 32 (e.g., brackets 32a, 32b, 32c, 32d) are radially distributed along an arc on a boss 31 (e.g., boss 31a). The brackets 32 radially distributed along the arc make the sample 200 inserted upright in the bracket 32 ​​also distributed in an arc shape, which can better cooperate with the grabbing member of the vacuum system to grab the sample, so that the vehicle body 10 does not need to move during grabbing, and the sample on the sample loading device 30 (e.g., sample loading devices 30a and 30b or sample loading devices 30c and 30d) can be grabbed by swinging the sampling arm 610, thereby reducing the sample transfer steps and increasing the number of samples grabbed each time.

[0088] Those skilled in the art will appreciate that although Figure 1 and Figure 2 The bracket 32 ​​(e.g., brackets 32a, 32b, 32c, 32d) shown in the figure is mounted on the boss 31 (e.g., boss 31a) by screws, but the bracket 32 ​​(e.g., brackets 32a, 32b, 32c, 32d) can also be a recess on the boss 31 (e.g., boss 31a) or be integrally formed with the boss 31 (e.g., boss 31a).

[0089] Those skilled in the art will appreciate that although Figure 4 and Figure 5 The brackets 32 (e.g., brackets 32a, 32b, 32c, 32d) shown in the figure cooperate with the inclined surface of the boss 31 (e.g., boss 31a) to be radially distributed along the arc, but this is only an exemplary structure. The brackets 32 can also cooperate with bosses 31 of other shapes to be distributed, for example, distributed in parallel and spaced apart.

[0090] like Figure 4 , Figure 5 As shown, in some embodiments of the present disclosure, one or more sample loading devices 30 may include a first sample loading device 30a and a second sample loading device 30b, and the first sample loading device 30a and the second sample loading device 30b are symmetrically arranged and spaced apart. The symmetrical arrangement of the first sample loading device 30a and the second sample loading device 30b can facilitate the sampling arm 610 to take samples by swinging, such as Figure 2 The first sample loading device 30a is separated from the second sample loading device 30b and can be used to dock the sample transfer member 720 of the sample transfer device 700 so as to collect the sample grabbed by the sampling arm 610. Figure 2 and Figure 6 shown.

[0091] The first sample loading device 30a includes a first boss 31a, and the second sample loading device 30b includes a second boss 31b. The first boss 31a and the second boss 31b may be provided with a plurality of brackets, respectively, for vertically carrying samples. For example, brackets 32a, 32b, 32c, and 32d may be radially provided on the boss 31a. Similarly, a plurality of brackets 32 may be provided on the boss 31b, such as Figure 4 and Figure 5 shown.

[0092] The first boss 31a and the bracket 32 ​​thereon and the second boss 31b and the bracket 32 ​​thereon can be symmetrically arranged to form an overall enclosed distribution and spaced a certain distance apart to facilitate the sampling operation. In addition, the upper surfaces of the first boss 31a and the second boss 31b can both be tilted inwards to form an overall approximately elliptical concave structure. In this way, the samples carried in the multiple brackets 32 on the first boss 31a and the second boss 31b are tilted inwards and gathered inwards, which can better match the swing angle of the gripping member of the vacuum system, making it easier to grab.

[0093] like Figure 4 and Figure 5 As shown, in some embodiments of the present disclosure, one or more sample loading devices 30 may further include a third sample loading device 30c and a fourth sample loading device 30d, and the third sample loading device 30c and the fourth sample loading device 30d are symmetrically arranged and spaced apart. Similar to the first sample loading device 30a and the second sample loading device 30b, the symmetrical arrangement of the third sample loading device 30c and the fourth sample loading device 30d can facilitate the sampling arm 610 to take samples by swinging, such as Figure 2 The third sample loading device 30c is separated from the fourth sample loading device 30d and can be used to dock the sample transfer member 720 of the sample transfer device 700 so as to collect the sample grabbed by the sampling arm 610. Figure 2 and Figure 6 shown.

[0094] The third sample loading device 30c includes a third boss 31c, and the fourth sample loading device 30d includes a fourth boss 31d. Those skilled in the art can understand that the structure formed by the third boss 31c and the fourth boss 31d is similar to the structure formed by the first boss 31a and the second boss 31b, and only the structure formed by the first boss 31a and the second boss 31b is used as an example for description, and no further description is given here.

[0095] like Figure 4 and Figure 5As shown, in some embodiments of the present disclosure, the first sample loading device 30a and the second sample loading device 30d are symmetrically arranged with the third sample loading device 30c and the fourth sample loading device 30d relative to the center of the vehicle body 10. In this way, after the sampling and transferring of the first sample loading device 30a and the second sample loading device 30d are completed, the samples carried on the third sample loading device 30c and the fourth sample loading device 30d can continue to be sampled. The first sample loading device 30a and the second sample loading device 30d can be spaced a certain distance from the third sample loading device 30c and the fourth sample loading device 30d to provide space for the sampling operation.

[0096] Those skilled in the art will appreciate that although Figure 4 and Figure 5 The one or more sample loading devices 30 shown in the figure may include four sample loading devices, but the number of sample loading devices 40 may be greater than four or less than four.

[0097] like Figure 4 and Figure 5 As shown, in some embodiments of the present disclosure, the vacuum sample carrier 100 may further include one or more additional sample carriers 40a, 40b. The additional sample carriers 40a, 40b are disposed at both ends of the vehicle body 10 and may be used to carry additional items 300. The additional sample carriers 40a, 40b may include additional bosses and one or more additional brackets disposed on the bosses, such as Figure 4 As shown. The additional boss is disposed on at least one end of the vehicle body 10, and one or more additional brackets are disposed on the additional boss for vertically carrying additional sample items. In some embodiments, the boss may be in a shape adapted to one end of the vehicle body 10, and the upper surface may be inclined or concave so that the item 300 carried in the bracket may be tilted inwards for easy extraction.

[0098] The vacuum sample carrier 100 can carry different samples or articles through different sample carriers, such as the sample carrier 30 and the additional sample carriers 40a and 40b, and can transfer samples at different sample transfer ports without using more vacuum sample carriers 100, thereby reducing equipment costs. In the present disclosure, the article can be of the same nature as the sample, such as both are samples to be vacuum-treated, or different, such as the sample is a sample to be vacuum-treated, and the article is a component or consumable that assists in vacuum treatment, such as a thermocouple.

[0099] like Figure 4 As shown, in some embodiments of the present disclosure, the sliding device 20 may include a plurality of pulleys 21, and the pulleys 21 are arranged on the vehicle body 10. In some embodiments of the present disclosure, the plurality of pulleys 21 may include at least two pairs of centering pulleys 211a, 211b and at least one pair of eccentric pulleys 212a.

[0100] like Figure 4As shown, two pairs of centering pulleys 211a and 211b are respectively installed at both ends of the vehicle body 10 by bolts. For example, the centering pulley 211a can be installed between the first sample loading device 30a and the second sample loading device 30d, and the centering pulley 211b can be installed between the third sample loading device 30c and the fourth sample loading device 30d. The eccentric pulley 212a is installed in the middle of the vehicle body 10 by bolts. Therefore, the two pairs of centering pulleys 211a and 211b and at least one pair of eccentric pulleys 212a enable the vehicle body 10 to be slidably connected with the vacuum track 400, so that the vehicle body 10 can slide along the vacuum track 400 driven by the sliding device 20 to transfer samples. The combination of the centering pulleys 211a and 211b and the eccentric pulley 212a can reduce the error generated during the sliding process of the vacuum sample loading vehicle 100, and prevent the problem that a pair of pulleys 211 are suspended in the air and lose their function.

[0101] Those skilled in the art will appreciate that although Figure 4 The two pairs of centering pulleys 211a, 211b shown in the figure are arranged at both ends of the vehicle body 10, and the eccentric pulley 212a is arranged in the middle of the vehicle body 10, but this arrangement is only exemplary, and the positions of the two pairs of centering pulleys 211a, 211b and the eccentric pulley 212a can be interchanged.

[0102] like Figure 2 As shown, a plurality of pulleys (eg, centering pulleys 211 a , 211 b and an eccentric pulley 212 a ) of the sliding device 20 may be slidably disposed on the track 400 so that the vacuum sample carrier 100 can slide on the track 400 .

[0103] Those skilled in the art will appreciate that the sliding device 20 may also adopt other structures. For example, the sliding device 20 may include a slider that cooperates with the track 400 to slide on the track 400 .

[0104] like Figure 4 As shown, in some embodiments of the present disclosure, the vacuum sample carrier 100 may further include a driving device 50. The driving device 50 is disposed on the vehicle body 10 and can be used to receive a drive to drive the vehicle body 10 to slide.

[0105] like Figure 4 As shown, in some embodiments of the present disclosure, the driving device 50 may include driving magnets 51 a and 51 b . The driving magnets 51 a and 51 b may be installed on the vehicle body 10 , so as to receive a drive to drive the vehicle body 10 to slide on the vacuum track 400 .

[0106] like Figure 4As shown, in some embodiments of the present disclosure, the drive device 50 may further include C-shaped mounting seats 53a, 53b. The C-shaped mounting seats 53a, 53b are arranged laterally on the vehicle body 10, for example, at both ends. The C-shaped openings 531a, 531b are used to accommodate the vacuum track 400. The driving magnets 51a, 51b may be respectively arranged at the bottom of the C-shaped mounting seats 53a, 53b. In some embodiments, the driving magnets 51a, 51b may include an outer arc surface on the lower surface. The outer arc surface of the driving magnets 51a, 51b can enable the magnets to generate stronger magnetic lines of force, thereby better receiving the drive.

[0107] The C-shaped mounting seat can accommodate the track 400 to allow the vacuum transfer vehicle 100 to slide smoothly, and can also place the driving magnets 51a and 51b directly under the vehicle body 10, thereby preventing the vehicle body 10 from tipping over during movement and reducing the risk of sample dropping.

[0108] In other embodiments of the present disclosure, the driving device 50 may include a magnetizer, and the driving magnets 51a and 51b may be mounted on the vehicle body 10 through the magnetizer, such as at the bottom of the C-shaped mounting seats 53a and 53b. The driving magnets 51a and 51b are mounted through the magnetizer, so that the magnetic force can be better transmitted and the driving efficiency can be increased. The magnetizer may be made of 440C stainless steel.

[0109] Those skilled in the art will appreciate that the driving magnets 51a and 51b including an outer arc surface is only an exemplary structure, and the driving magnets 51a and 51b may also include an outer flat surface or an outer concave surface. Accordingly, the driving magnets 51a and 51b are installed through a magnetic conductor, which is also an exemplary structure.

[0110] like Figure 4 and Figure 5 As shown, in some embodiments of the present disclosure, the vehicle body 10 may include a plurality of openings 11a, 11b and a plurality of reinforcing ribs 12. The openings 11a, 11b may be located in the middle of the vehicle body 10 in a cross shape, which can reduce the deadweight of the vehicle body 10, reduce the load of the drive device 50, and extend the life of the equipment. The reinforcing ribs 12 may be fixed on both longitudinal sides of the vehicle body 10, so that the vehicle body 10 maintains strength when opened and avoids bending during the sample transfer process.

[0111] Figure 6 A partial structural schematic diagram of a sample transfer device 700 according to some embodiments of the present disclosure is shown.

[0112] like Figure 6As shown, in some embodiments of the present disclosure, the sample transfer device 700 is disposed on the side of the vacuum transfer chamber 500, and the sample transfer device 700 may include a sample transfer arm 710 and a sample transfer member 720. The sample transfer member 720 is disposed at the end of the sample transfer arm 710 and can be used to stop above the vacuum sample carrier 100. The sampling device 600 can be used to grab the sample 200 or the object 300 carried by the vacuum sample carrier 100 and place it on the sample transfer member 720, as shown in FIG. Figure 2 shown.

[0113] like Figure 2 , Figure 4 and Figure 6 As shown, the sample transfer member 720 may include a sample transfer slot 721 (eg, sample transfer slots 721a, 721b, 721c), and the sample transfer slot 721 (eg, sample transfer slots 721a, 721b, 721c) matches the sample 200 or the object 300. The sample transfer arm 710, driven by the linear drive device, transfers the sample transfer member 720 to between the bosses 31 (e.g., the first boss 31a and the second boss 31b) of the sample loading device 30. The control component 611 of the sampling arm 610 controls the inner rod 6122 to swing, approach or rotate, so as to drive the sampling member 6123 to grab the sample 200 or the object 300 carried by the vacuum sample carrier 100 and place it in the sample transfer slot 721 (e.g., the sample transfer slot 721a) until the sample transfer slot 721 is completely filled. After the vacuum sample carrier 100 retreats, the sample transfer arm 720, driven by the linear drive device, transfers the sample 200 or the object 300 into the processing chamber 102 (e.g., the sample transfer slot 721a). Figure 7 shown).

[0114] Figure 7 A schematic structural diagram of a vacuum processing system 1 according to some embodiments of the present disclosure is shown. Figure 8 A side view of a vacuum processing system 1 according to some embodiments of the present disclosure is shown.

[0115] like Figure 7 and Figure 8 As shown, the vacuum processing system 1 may include a vacuum sample transfer system 1000 and one or more vacuum processing chambers 102. The vacuum sample transfer system 1000 may include one or more transfer windows 101 (e.g., transfer windows 101a, 101b). One or more transfer windows 101 (e.g., transfer windows 101a, 101b) may be disposed above, to the side, below, etc., the vacuum transfer chamber 500, and the processing chamber 102 is vacuum-sealed and connected to the transfer windows 101 (e.g., transfer windows 101a, 101b).

[0116] Those skilled in the art will appreciate that although Figure 7 and Figure 8Only two transfer windows 101 (eg, 101a, 101b) are shown in the figure, but one transfer window or more than two transfer windows may be provided on the vacuum transfer chamber 500. Figure 7 and Figure 8 Only one processing chamber 102 is shown, but the vacuum processing system 1 may also include multiple vacuum processing chambers 102. Those skilled in the art may understand that the vacuum processing chamber 102 in the present disclosure should be broadly understood, and the vacuum processing chamber 102 may include a processing chamber such as an evaporation chamber and a cleavage chamber.

[0117] Fig. 9 A flow chart of a vacuum transfer method 800 according to some embodiments of the present disclosure is shown. Those skilled in the art may understand that the vacuum transfer method 800 may be performed by a vacuum sample transfer system (e.g., vacuum sample transfer system 1000) or a vacuum processing system (e.g., vacuum processing system 1) according to some embodiments of the present disclosure.

[0118] In step 802, the vacuum transfer method 800 may include grabbing a sample carried upright on a vacuum sample carrier from above the vacuum transfer chamber by a sampling device. For example, the control component 611 of the sampling arm 610 of the sampling device 600 controls the inner rod 6122 and the sampling member 6123 of the sampling component 612 to grab the sample 200 carried on the vacuum sample carrier 100 from above the vacuum transfer chamber 500.

[0119] In step 804, the vacuum transfer method 800 may include placing the sample on the sample transfer device. For example, the control component 611 controls the inner rod 6122 and the sampling member 6123 of the sampling component 612 to place the sample 200 on the sample transfer slot 721 (e.g., the sample transfer slots 721a, 721b, 721c) of the sample transfer device 700. Steps 802 and 804 may be repeated to obtain multiple samples. For example, a predetermined number of samples may be taken or multiple sample transfer slots 721 of the sample transfer device 700 may be filled.

[0120] At step 806 , the vacuum transfer method 800 may include transferring the sample to the vacuum processing chamber. For example, the linear drive device may drive the sample transfer arm 710 to transfer the sample transfer slot 721 (eg, the sample transfer slots 721a , 721b , 721c ) into the vacuum processing chamber 102 .

[0121] In some embodiments, the vacuum transfer method 800 may optionally include driving the vacuum sample carrier to slide in the vacuum transfer chamber to transfer the sample. For example, driving the vacuum sample carrier 100 to slide in the vacuum transfer chamber 500 to transfer the sample 200 to facilitate the sampling steps 802 and 804.

[0122] In some embodiments, the vacuum transfer method 800 may optionally include stopping the sample transfer device above the sample carrier. For example, the sample transfer member 720 of the sample transfer device 700 may be stopped above the vacuum sample carrier 100 and located between the bosses 31 (e.g., the first boss 31a and the second boss 31b), such as Figure 2 As shown, it is convenient to collect the sample 200 captured by the sampling assembly 612.

[0123] In some embodiments, the vacuum transfer method 800 may optionally include transferring multiple samples to the vacuum processing chamber. For example, steps 802 and 804 may be repeated to grab multiple samples 200 and place them in the sample transfer slots 721 (e.g., sample transfer slots 721a, 721b, 721c) of the sample transfer arm 710. The sample transfer arm 710 may transfer the multiple samples 200 in the sample transfer slots 721 to the vacuum processing chamber 102.

[0124] In some embodiments, the vacuum transfer method 800 may optionally include swinging the sampling device to grab samples carried at different positions on the vacuum sample carrier and place the samples on the sample transfer device. For example, during the sampling process (e.g., before or after step 802, or before or after step 804), the sampling component 612 of the sampling device 600 is swung by the control component 611 of the sampling device 600 to approach the sample 200 carried at different positions (e.g., brackets 32a, 32b, 32c, 32d) on the same or different sample carriers 30 on the sample carrier 100, and grab the sample 200, such as Figure 2 The captured sample 200 can be placed on the sample transfer slot 721 (e.g., 721a, 721b, 721c) of the sample transfer device 700. These steps can be repeated to capture multiple samples 200 and place them in the sample transfer slot 721 (e.g., sample transfer slots 721a, 721b, 721c) of the sample transfer arm 710.

[0125] Those skilled in the art will appreciate that the steps of the vacuum transfer method 800 or a portion of the steps may be executed cyclically so that multiple samples can be transferred multiple times. Moreover, the order in which the steps of the vacuum transfer method 800 are described above does not necessarily represent the order of execution. For example, before the sample carried upright on the vacuum transfer vehicle is grabbed from above the vacuum transfer chamber by the sampling device, the vacuum sample carrier may be driven to slide in the vacuum transfer chamber so as to transfer the sample to the transfer area.

[0126] According to some embodiments of the present disclosure, the vacuum sample transfer system and method, and the vacuum processing system can bring beneficial technical effects. For example, the vacuum sample transfer system and method, and the vacuum processing system of some embodiments of the present disclosure can solve the problems of difficult sample transfer and handover, complicated steps, difficult operation, high risk of sample drop, low sample transfer efficiency, and further low experimental or production efficiency in conventional technologies, and can achieve the technical effects of concise operation steps, convenient sample transfer and handover operation, simple operation and effective prevention of sample drop, high sample transfer efficiency, and high experimental production efficiency.

[0127] It should be pointed out that the above are only preferred embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A vacuum sample transfer system, characterized in that: include: Vacuum transfer chamber; A track, arranged in the vacuum transfer chamber; A vacuum sample carrier, slidably disposed on the track; A sampling device, disposed above the vacuum transfer chamber and at least partially located in the vacuum transfer chamber; and a sample transfer device, at least partly located in the vacuum transfer chamber, wherein the sampling device is used to grab the sample carried by the vacuum sample carrier and place it on the sample transfer device; The sampling device comprises: The sampling arm comprises a control component and a sampling component, wherein the control component is used to control the sampling of the sampling component; a seal for at least partially sealing the sampling assembly within the vacuum transfer chamber; one or more posts removably connected to the seal; and The parking plate is arranged on the one or more columns and includes one or more parking slots for parking the sampling arm.

2. The vacuum sample transfer system according to claim 1, characterized in that: The sampling device further comprises: a bellows for sealingly connecting the sampling arm and the sealing member.

3. The vacuum sample transfer system according to claim 2, characterized in that: The sampling assembly comprises: an outer sleeve; The inner rod is at least partially disposed in the outer sleeve, and the control assembly includes: A magnetic transmission component is arranged along the circumference of the upper end of the inner rod; and a magnetic drive component is arranged along the circumference of the upper end of the outer sleeve and is magnetically coupled with the magnetic transmission component.

4. The vacuum sample transfer system according to claim 3, characterized in that: The sampling assembly comprises: a sampling piece, which is arranged at the end of the inner rod and is used to grab or release the sample.

5. The vacuum sample transfer system according to any one of claims 1 to 4, characterized in that: The vacuum sample carrier comprises: a vehicle body, A sliding device is connected to the vehicle body and slidably arranged on the track for sliding the vehicle body; and one or more sample loading devices are arranged on the vehicle body for vertically carrying samples.

6. The vacuum sample transfer system according to claim 5, characterized in that: The sample loading device comprises: a boss, which is arranged on the vehicle body; and One or more brackets are arranged on the boss and are used for making the sample stand upright in the brackets.

7. The vacuum sample transfer system according to claim 6, characterized in that: The one or more brackets are radially distributed on the boss along an arc.

8. The vacuum sample transfer system according to claim 7, characterized in that: The boss extends entirely along the arc line, and the upper surface of the boss is inclined toward the inside of the arc line.

9. The vacuum sample transfer system according to claim 5, characterized in that: The one or more sample loading devices include: a first sample loading device and a second sample loading device, The first sample loading device and the second sample loading device are symmetrically arranged and spaced apart.

10. The vacuum sample transfer system according to claim 9, characterized in that: The one or more sample loading devices further include: a third sample loading device and a fourth sample loading device, The third sample loading device and the fourth sample loading device are symmetrically arranged and spaced apart from each other, and the first sample loading device and the second sample loading device and the third sample loading device and the fourth sample loading device are symmetrically arranged relative to the center of the vehicle body.

11. The vacuum sample transfer system according to claim 5, characterized in that: The vacuum sample carrier also includes: one or more additional sample carriers, arranged at at least one end of the vehicle body, and the additional sample carrier includes: an additional boss, arranged on at least one end of the vehicle body; and one or more additional brackets, arranged on the additional boss, for uprightly carrying additional items.

12. The vacuum sample transfer system according to claim 5, characterized in that: The sliding device comprises: a plurality of pulleys arranged on the vehicle body.

13. The vacuum sample transfer system according to claim 12, characterized in that: The plurality of pulleys include: at least two pairs of centering pulleys; and At least one pair of eccentric pulleys.

14. The vacuum sample transfer system according to claim 5, characterized in that: The vacuum sample carrier comprises: a driving magnet including an outer arc surface; A magnetizer, the driving magnet is arranged at the bottom of the magnetizer; and a C-shaped mounting seat, which is arranged horizontally on the vehicle body, and the C-shaped opening is used to accommodate the track, wherein the magnetizer is arranged at the bottom of the C-shaped mounting seat.

15. The vacuum sample transfer system according to any one of claims 1 to 4, characterized in that: The sample transfer device is arranged at the side of the vacuum transfer chamber, and includes: a sample transfer arm; and The sample transfer piece is arranged at the end of the sample transfer arm and is used to stop above the vacuum sample carrier, wherein the sampling device is used to grab the sample carried on the vacuum sample carrier and place it on the sample transfer piece.

16. A vacuum processing system, characterized in that: include: The vacuum sample transfer system according to any one of claims 1 to 15, wherein the vacuum transfer chamber of the vacuum sample transfer system comprises one or more transfer windows; and one or more vacuum processing chambers, wherein the vacuum processing chamber is vacuum-sealed and connected to the transfer window.

17. A vacuum sample transfer method, characterized in that: The vacuum processing system according to claim 16 comprises: grabbing the sample carried upright on the vacuum sample carrier from above the vacuum transfer chamber by a sampling device; placing the sample on the sample transfer device; and The sample is transferred to a vacuum processing chamber.

18. The vacuum sample transfer method according to claim 17, characterized in that: Also includes: The vacuum sample carrier is driven to slide in the vacuum transfer chamber to transfer the sample.

19. The vacuum sample transfer method according to claim 18, characterized in that: Also includes: Stopping the sample transfer device above the vacuum sample carrier; and transferring a plurality of samples to the vacuum processing chamber.

20. The vacuum sample transfer method according to claim 19, characterized in that: It also includes: swinging the sampling device; Grab the samples carried at different positions on the vacuum sample carrier; and place the samples on the sample transfer device.

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