Treatment liquid supply device, notification method, and storage medium

Abstract

A processing liquid supply device, a notification method, and a storage medium are provided. When a storage container of a processing liquid in a processing liquid supply device is replaced, it is notified whether the replaced storage container is appropriate in a manner that an operator in a replacement work can immediately visually recognize. The processing liquid supply device supplies a processing liquid to a substrate processing device that processes a substrate using the processing liquid, and includes: a housing portion having a plurality of sub-zones, each sub-zone housing a storage container storing the processing liquid from a side surface side; an acquisition portion provided for each sub-zone, the acquisition portion acquiring identification information of the storage container from an identification information holding portion attached to a side surface of the storage container provided in the corresponding sub-zone; and a notification portion provided for each sub-zone, the notification portion notifying a setting state of the storage container in the corresponding sub-zone in a light emission state of a light emitting element based on an acquisition result of the acquisition portion of the corresponding sub-zone, wherein the light emitting element of the notification portion emits light toward the side surface side.

Description

Technical Field

[0001] This disclosure relates to a processing fluid supply device, a notification method, and a storage medium. Background Technology

[0002] Patent Document 1 discloses a method for replacing a medicine container. In this method, an LED display unit with LEDs arranged in a manner substantially similar to that of the container is used. When the medicine in the container is empty, the corresponding LED in the LED display unit is illuminated. Before replacing the container 71, the operator reads the barcode of the unused container using a barcode reader. The barcode reader compares the barcode data of the unused container with the barcode data of the container corresponding to the illuminated LED, which is registered in a database. Furthermore, if the barcode reader determines that the two containers contain the same type of medicine, the LED display changes from an illuminated display to a flashing display.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2006-218391 Summary of the Invention

[0006] The problem the invention aims to solve

[0007] The technology disclosed herein allows for immediate visual identification by the operator during the replacement of the storage container for the processing fluid in a processing fluid supply device, informing them whether the replacement storage container is appropriate.

[0008] Solution for solving the problem

[0009] One aspect of this disclosure is a processing liquid supply device for supplying processing liquid to a substrate processing apparatus that uses a processing liquid to process a substrate. The processing liquid supply device includes: a receiving section having multiple partitions, each partition having a storage container storing processing liquid disposed on one side; an acquisition section having the acquisition section disposed for each partition, the acquisition section acquiring identification information of the storage container from an identification information holding section attached to the side of the storage container disposed in the corresponding partition; and a notification section having the notification section disposed for each partition, the notification section notifying the storage container in the partition of its setting state by the light emission state of a light-emitting element based on the acquisition result of the acquisition section of the corresponding partition, wherein the light-emitting element of the notification section emits light towards the side.

[0010] The effects of the invention

[0011] According to this disclosure, when the storage container of the processing fluid is replaced in the processing fluid supply device, the operator can be notified whether the replacement storage container is appropriate in a manner that is immediately visually recognizable to the operator during the replacement operation. Attached Figure Description

[0012] Figure 1 This is an explanatory diagram showing a general outline of the internal structure of a wafer processing system equipped with the processing liquid supply device according to this embodiment.

[0013] Figure 2 This is a schematic diagram showing the outline of the internal structure of the front side of a wafer processing system.

[0014] Figure 3 This is a schematic diagram showing the outline of the internal structure on the back side of a wafer processing system.

[0015] Figure 4 This is a front view showing an overview of the appearance of the crystal processing system.

[0016] Figure 5 This is an example of a display screen shown on a touch panel.

[0017] Figure 6 This is a perspective view showing the outline of the structure of the storage container for the treatment liquid.

[0018] Figure 7 It is a side view showing the outline of the structure of the containment device and the state in which the storage container is set.

[0019] Figure 8 This is a side view showing the outline of the structure of the containment device, and showing the state without the storage container installed.

[0020] Figure 9 This is a perspective view showing the outline of the structure of the retainer provided on the second mounting platform.

[0021] Figure 10 This is a perspective view showing the outline of the structure of the retainer provided on the first mounting platform.

[0022] Figure 11 This is an explanatory diagram showing the structural outline of a mechanism for supplying processing fluid from a storage container located in a containment device.

[0023] Figure 12 This is a flowchart illustrating the process of replacing the storage container. Detailed Implementation

[0024] In the manufacturing processes of semiconductor devices, etc., in order to form resist patterns on semiconductor wafers (hereinafter referred to as "wafers"), various liquid processing is performed, such as coating the wafer with resist to form a resist film, and supplying a developer to the wafer to develop the resist film. These liquid processing are performed by a substrate processing system equipped with various liquid processing devices and a conveying mechanism for transporting wafers between devices.

[0025] In this substrate processing system, various processing liquids are supplied to various liquid processing devices from a storage container storing the processing liquid. Furthermore, multiple types of processing liquids are used in the processing liquid, such as photoresist and developer, and the photoresist itself also uses multiple types. Therefore, the substrate processing system is equipped with numerous storage containers for processing liquids.

[0026] One method for replacing the storage containers of the treatment fluid in a configuration with many storage containers is the method disclosed in the aforementioned Patent Document 1. However, in the method disclosed in Patent Document 1, the wrong treatment fluid is sometimes supplied when the operator places an unused storage container whose barcode is read by a barcode reader in the wrong location, as the operator is unaware of this.

[0027] Furthermore, regarding the situation described above where the operator has placed unused storage containers in the wrong location, it is preferable that the operator can identify this immediately (i.e., on the spot). This is to minimize the time required for replacement operations.

[0028] Therefore, the technology disclosed herein informs the operator whether the replacement storage container is appropriate in a way that allows for immediate visual identification during the replacement operation when the storage container of the treatment fluid is being replaced.

[0029] The following is a reference to the appendix. Figure 1 The processing fluid supply device and notification method involved in this embodiment will be described in detail. Furthermore, in this specification, elements having substantially the same functional structure are labeled with the same reference numerals, thereby omitting redundant descriptions.

[0030] <Wafer Processing System>

[0031] Figure 1 This is an explanatory diagram showing a general outline of the internal structure of a wafer processing system 1 equipped with the processing liquid supply device according to this embodiment. Figure 2 and Figure 3 These are schematic diagrams showing the outlines of the internal structures of the front and back sides of the wafer processing system 1. Figure 4 This is a front view showing an outline of the appearance of the wafer processing system 1. Figure 5 This is an example of a display screen shown on the touch panel described later. Figure 6This is a perspective view showing the outline of the structure of the storage container for the processing liquid. Furthermore, in the example below, wafer processing system 1 is a coating and developing system for performing coating and developing processes on wafer W.

[0032] like Figure 1 As shown, the wafer processing system 1 includes: a cassette transfer station 10, which handles the loading and unloading of cassettes C containing multiple wafers W; and a processing station 11, which has multiple processing devices for performing prescribed processing on the wafers W. Furthermore, the wafer processing system 1 has a structure that integrates the cassette transfer station 10, the processing station 11, and an interface station 13 for handling the wafers W between the cassette transfer station 10, the processing station 11, and the exposure device 12 adjacent to the processing station 11.

[0033] A cassette loading stage 20 is provided at the cassette transfer station 10. Multiple cassette loading plates 21 are provided on the cassette loading stage 20. The cassette loading plates 21 are used to load the cassette C when it is moved in and out of the wafer processing system 1.

[0034] A wafer transport device 23 is provided at the cassette transfer station 10, which moves freely on the transport path 22 extending in the X direction. The wafer transport device 23 is also free to move in the vertical direction and around the vertical axis (θ direction), and can transport wafers W between the cassette C on each cassette mounting plate 21 and the transfer device of the third sub-block G3 of the processing station 11 described later.

[0035] Processing station 11 is equipped with multiple sub-blocks, such as four sub-blocks G1, G2, G3, and G4. For example, on the front side of processing station 11... Figure 1 The first sub-block G1 is set on the negative X-direction side, on the back side of the processing station 11. Figure 1 A second sub-block G2 is provided on the positive X-direction side. Additionally, on the box handover station 10 side of processing station 11 ( Figure 1 A third sub-block G3 is provided on the negative Y-direction side of the processing station 11, on the interface station 13 side. Figure 1 The fourth sub-block G4 is set on the positive Y-direction side.

[0036] like Figure 2 As shown, in the first sub-block G1, multiple liquid processing devices, such as a developing device 30, a lower antireflective film forming device 31, a resist coating device 32, and an upper antireflective film forming device 33, are arranged from bottom to top in this order. The developing device 30 is a device for developing wafer W. The lower antireflective film forming device 31 is a device for forming an antireflective film (hereinafter referred to as "lower antireflective film") on the lower layer of the resist film on wafer W. The resist coating device 32 is a device for coating the wafer W with resist liquid to form a resist film. The upper antireflective film forming device 33 is a device for forming an antireflective film (hereinafter referred to as "upper antireflective film") on the upper layer of the resist film on wafer W.

[0037] For example, three of each of the developing apparatus 30, the lower antireflective film forming apparatus 31, the resist coating apparatus 32, and the upper antireflective film forming apparatus 33 are arranged horizontally. Furthermore, the number and arrangement of these developing apparatus 30, lower antireflective film forming apparatus 31, resist coating apparatus 32, and upper antireflective film forming apparatus 33 can be arbitrarily selected.

[0038] In these developing apparatus 30, lower antireflective film forming apparatus 31, resist coating apparatus 32, and upper antireflective film forming apparatus 33, a prescribed processing solution is supplied to the wafer W, for example, by spin coating. In spin coating, for example, the processing solution is sprayed onto the wafer W from an ejector nozzle while the wafer W is rotated, thereby causing the processing solution to spread on the surface of the wafer W.

[0039] like Figure 3 As shown, the second sub-block G2 is equipped with a heat treatment device 40 for heating and cooling the wafer W, an adhesion device 41 for improving the adhesion of the resist to the wafer W, and a peripheral exposure device 42 for exposing the outer periphery of the wafer W. These heat treatment devices 40, adhesion devices 41, and peripheral exposure devices 42 are arranged in both vertical and horizontal directions, and their number and configuration can be arbitrarily selected.

[0040] For example, in the third sub-block G3, multiple handover devices are arranged from bottom to top in the order of handover devices 50, 51, 52, 53, 54, and 55. Similarly, in the fourth sub-block G4, multiple handover devices are arranged from bottom to top in the order of handover devices 60, 61, and 62.

[0041] like Figure 1 As shown, a wafer transport region D, which serves as a substrate transport region, is formed in the area surrounded by the first sub-block G1 to the fourth sub-block G4. A wafer transport device 70, which serves as a substrate transport device, is disposed in the wafer transport region D.

[0042] The wafer transport device 70, for example, has a transport arm 70a that can move freely along the Y, X, θ directions and the vertical direction. The wafer transport device 70 moves within the wafer transport area D and can transport wafers W to designated devices within the surrounding first sub-block G1, second sub-block G2, third sub-block G3, and fourth sub-block G4. Figure 3 As shown, multiple wafer transport devices 70 are arranged in the vertical direction, for example, and are capable of transporting wafers W to devices of the same horizontal height for each sub-block G1 to G4.

[0043] In addition, a shuttle conveyor 80 is provided in the wafer conveying area D to linearly convey wafers W between the third sub-block G3 and the fourth sub-block G4.

[0044] Shuttle conveyor 80, for example, in Figure 3 It can move freely in a straight line in the Y direction. The shuttle conveyor 80 moves in the Y direction while supporting the wafer W, and can transport the wafer W between the transfer device 52 of the third sub-block G3 and the transfer device 62 of the fourth sub-block G4.

[0045] like Figure 1 As shown, a wafer transport device 90 is arranged adjacent to the positive X-direction side of the third sub-block G3. The wafer transport device 90 has, for example, a transport arm 90a that can move freely along the X-direction, the θ-direction, and the vertical direction. The wafer transport device 90 moves vertically while supporting the wafer W, thereby enabling the transport of wafer W to each transfer device within the third sub-block G3.

[0046] Interface station 13 is provided with a wafer transport device 100 and a transfer device 101. The wafer transport device 100 has, for example, a transport arm 100a that can move freely in the Y direction, the θ direction, and the up and down direction. The wafer transport device 100 can, for example, support the wafer W on the transport arm 100a to transport the wafer W between the transfer devices, the transfer device 101, and the exposure device 12 within the fourth sub-block G4.

[0047] like Figure 4 As shown, a touch panel 110 is provided in the aforementioned box transfer station 10, which also functions as a display device for displaying screens showing various information. The touch panel 110 has a display device composed of a liquid crystal panel, an organic EL panel, or the like. Furthermore, the touch panel 110, for example, has its display surface facing the front side (…). Figure 4 It is set on the processing station 11 side of the box handover station 10 in the manner of (X direction negative direction side).

[0048] The display screen shown on the touch panel 110 is, for example, Figure 5 The display screen P shown has areas R1 and R2 for each RFID reader (described later), and areas R1 and R2 are marked with " The "" and "0" indicate whether the RFID tag described later was detected by the RFID reader described later. For example, " "0" indicates detected, and "0" indicates not detected. In display screen P, the upper area R1 shows information about the top RFID reader among multiple RFID readers. Additionally, in display screen P, the lower area R2 shows information about the bottom RFID reader among multiple RFID readers.

[0049] Touch panel 110 Figure 5In addition to the display screen P, it can also display a setting screen for making settings related to RFID tags (described later), an error screen for displaying information about errors currently generated in the wafer processing system 1, and so on.

[0050] In addition, such as Figure 1 and Figure 4 As shown, the processing station 11 is also equipped with a receiving device 201 belonging to the processing fluid supply device 200. The receiving device 201 is a storage container B for storing the processing fluid (see reference). Figure 6 ) devices, such as Figure 1 and Figure 4 As shown, for example, it is located at a lower position on the side of the box handover station 10 of the processing station 11.

[0051] The containment device 201 is configured to be able to move along the front-back direction ( Figure 1 and Figure 4 The guide rail (not shown) extending in the X direction moves freely in the front-back direction. Normally, the housing 201 is housed in the processing station 11. When the storage container B is replaced, it is pulled out from the processing station 11 to the front side, so that the operator can remove the storage container B from the housing 201 or place the storage container B in the housing 201.

[0052] The storage container B, contained by the housing device 201, contains, for example, an anti-corrosion solution as a treatment solution. Additionally, as... Figure 6 As shown, an RFID tag B1 is attached to the storage container B as an identification information holding part. Specifically, the RFID tag B1 is affixed to the side of the storage container B, for example. The RFID tag B1 holds the identification information of the storage container B to which the RFID tag B1 is attached. The identification information of the storage container B held by the RFID tag B1 is, for example, the product name information of the storage container.

[0053] like Figure 1 As shown, in the wafer processing system 1 equipped with the above-described structural elements, a control device U is provided. The control device U is, for example, a computer equipped with a CPU, memory, etc., and has a program storage unit (not shown). The program storage unit stores the program for controlling the wafer processing in the wafer processing system 1 (described later), and the program for notifying whether the replaced storage container B is appropriate (described later). Alternatively, a PLC (Programmable Logic Controller) may be used to perform part or all of the control performed by the control device U. Furthermore, the above-mentioned program may be recorded in a computer-readable storage medium H and installed from that storage medium H onto the control device U. Alternatively, a part or all of the program may be implemented by dedicated hardware (circuit board).

[0054] <Wafer Processing>

[0055] Next, the wafer processing performed using wafer processing system 1 will be described.

[0056] First, a cassette C containing multiple wafers W is placed on a designated cassette mounting plate 21 in the cassette transfer station 10. Then, the wafer transfer device 23 sequentially removes each wafer W from the cassette C and transfers it to, for example, the transfer device 52 of the third sub-block G3 in the processing station 11.

[0057] Next, wafer W is transported by wafer transport device 70 to, for example, the lower antireflective film forming apparatus 31 of the first sub-block G1, where a lower antireflective film is formed on wafer W. Afterward, wafer W is transported by wafer transport device 70 to the heat treatment apparatus 40 of the second sub-block G2 for heat treatment.

[0058] Next, wafer W is transported by wafer transport device 70 to resist coating device 32, where a resist film is formed on wafer W. Afterward, wafer W is transported by wafer transport device 70 to heat treatment device 40 for pre-baking. Furthermore, the same treatment as the heat treatment after the formation of the lower anti-reflective film is performed in the pre-baking process, and the same treatment is also performed in the heat treatment after the formation of the anti-reflective film, the PEB treatment, and the post-baking process, which will be described later. However, the heat treatment devices 40 used for each heat treatment are different.

[0059] Next, wafer W is transported by wafer transport device 70 to upper antireflective film forming device 33, where an upper antireflective film is formed on wafer W. Afterward, wafer W is transported to heat treatment device 40 for heat treatment. Then, wafer W is transported by wafer transport device 70 to peripheral exposure device 42 for peripheral exposure treatment.

[0060] Next, wafer W is transported by wafer transport device 70 to transfer device 52, and then by shuttle transport device 80 to transfer device 62 of the fourth sub-block G4. Afterwards, wafer W is transported by wafer transport device 100 of interface station 13 to exposure device 12, where it undergoes exposure processing with a predetermined pattern. Next, wafer W is transported by wafer transport device 100 to transfer device 60 of the fourth sub-block G4. Afterwards, wafer W is transported by wafer transport device 70 to heat treatment device 40 for PEB processing.

[0061] Next, wafer W is transported by wafer transport device 70 to developing device 30 for developing. After developing, wafer W is transported by wafer transport device 70 to heat treatment device 40 for post-baking.

[0062] Next, wafer W is transported by wafer transfer device 70 to transfer device 50 of third sub-block G3. Afterwards, wafer W is transported by wafer transfer device 23 of box transfer station 10 to box C of designated box carrier 21, thereby completing a series of photolithography processes. Then, the same series of photolithography processes are performed on subsequent wafers W within the same box C.

[0063] <Containment Facility>

[0064] Next, the structure of the containment device 201 will be explained. Figure 7 and Figure 8 This is a side view showing an outline of the structure of the containment device 201. Figure 7 This shows the state where storage container B is installed. Figure 8 This indicates that storage container B is not installed. Figure 9 and Figure 10 These are perspective views showing the outline of the structure of the retaining member, which will be described later, of the housing device 201.

[0065] like Figure 7 and Figure 8 As shown, the housing device 201 includes a shelf 210 as a housing section, which has multiple partitions (hereinafter sometimes referred to as "setting partitions") K, and each partition K is provided with a storage container B from one side (the positive side of the Y direction in the figure).

[0066] The shelf 210 has a first mounting platform 220 and a second mounting platform 221, each with a mounting section K. The second mounting platform 221 is located at a lower position than the first mounting platform 220. The space within the shelf 210 is divided into three parts vertically by shelf panels 211 and 212. For example, the upper shelf panel 211 constitutes the first mounting platform 220, and the lower shelf panel 212 constitutes the second mounting platform 221. The height of the second mounting platform 221 is, for example, 80cm to 105cm, while the height of the first mounting platform 220 is, for example, relatively higher, 140cm to 165cm.

[0067] In addition, the first setting station 220 and the second setting station 221 each have multiple (three in the example) setting partitions K arranged in the horizontal direction (X direction in the figure). Hereinafter, the three setting partitions K of the first setting station 220 will be referred to as setting partition K11, setting partition K12, and setting partition K13 from the negative X direction in the figure, and the three setting partitions K of the second setting station 221 will be referred to as setting partition K21, setting partition K22, and setting partition K23 from the negative X direction in the figure.

[0068] Additionally, the storage device 201 includes RFID readers 230 and 231 as acquisition units that read (i.e., acquire) the identification information of the storage container B from the RFID tag B1 affixed to the side of the storage container B. RFID readers 230 and 231 are provided for each of the setting zones K. Specifically, RFID readers 230, serving as first acquisition units, are provided for each setting zone K of the first setting station 220, and RFID readers 231, serving as second acquisition units, are provided for each setting zone K of the second setting station 221. The acquisition results of the RFID readers 230 and 231 are output to the control device U (see reference) via at least one of wireless communication and wired communication. Figure 1 The communication between RFID readers 230 and 231 and the control device U can also be partially or entirely conducted via the IO-Link master station.

[0069] The control device U determines the setting status of the storage container B in the corresponding setting partition K based on the acquisition results of each RFID reader 230, 231. Among the determinations made by the control device U are, for example, the following.

[0070] (1) Determine whether the storage container B located in the corresponding setting partition K is the storage container B that should be set in the setting partition K.

[0071] (2) Determine whether the RFID tag of storage container B has been detected.

[0072] Regarding the determination in (1) above, for example, it is based on the acquisition results of RFID readers 230 and 231, and is performed by referring to a table pre-stored in the storage unit (not shown) that associates the identification information of each setting partition K with the identification information of the appropriate storage container B. The identification information of the appropriate storage container B is registered in the table above, for example, when the identification information is registered in the registration mode prepared in the wafer processing system 1. Specifically, when the operator selects the registration mode from the selection screen (not shown) displayed on the touch panel and sets the appropriate storage container B in the appropriate setting partition K, the result read by the RFID reader 230 (or RFID reader 231) corresponding to the setting partition K is registered in the table above as the identification information of the appropriate storage container B. This registration is performed, for example, when the wafer processing system 1 is started up, or when the processing process is changed along with the change of processing fluid. In addition, the above registration can also be performed each time the storage container B is replaced.

[0073] Furthermore, the containment device 201 also provides notification units 240 and 241 for each setting zone K. Specifically, a notification unit (sometimes referred to as the "first notification unit") 240 is provided for each setting zone K of the first setting station 220, and a notification unit (sometimes referred to as the "second notification unit") 241 is provided for each setting zone K of the second setting station 221.

[0074] Each notification unit 240, 241, based on the acquisition results of the RFID readers 230, 231 of the corresponding setting partition K, notifies the storage container B in the setting partition K of its setting status by the illumination state of two light-emitting elements 250, 251. The light-emitting elements 250, 251 are, for example, LEDs.

[0075] The light-emitting elements 250 and 251 of the notification units 240 and 241 are configured to emit light toward the side where the operator is located during the replacement operation of storage container B, that is, the side side mentioned above (the positive side in the Y direction in the figure).

[0076] Light-emitting elements 250 and 251 emit light in different colors. For example, light-emitting element 250 emits green light, and light-emitting element 251 emits red light.

[0077] The light emission of light-emitting elements 250 and 251 is controlled by the control device U.

[0078] When the storage container B, for example, is located in the corresponding setting partition K, the notification units 240 and 241 shall, in an appropriate manner, turn on the green light-emitting element 250, and in an inappropriate manner, turn on the red light-emitting element 251.

[0079] Furthermore, notification units 240 and 241, for example, from the start of the RFID reader 230 and 231 detecting the RFID tag B1 in the corresponding setting partition K until the determination of whether the storage container B in the corresponding setting partition K is appropriate is completed, cause the green light-emitting element 250 and the red light-emitting element 251 to flash simultaneously at short intervals. Thus, notification units 240 and 241 notify that the aforementioned determination is in progress.

[0080] Furthermore, when, for example, the RFID readers 230 and 231 located in the corresponding setting partition K fail to detect the RFID tag B1, that is, when the storage container B is not located in the corresponding setting partition K (or when the method of placing the storage container B in the corresponding setting partition K is incorrect), the notification units 240 and 241 cause the light-emitting elements 250 and 251 to flash simultaneously at long intervals. Thus, the notification units 240 and 241 notify that the RFID tag B1 has not been detected, as described above.

[0081] Notification units 240 and 241 can also notify information other than the setting status of the storage container B located in the corresponding setting partition K by the light emission status of the light-emitting elements 250 and 251.

[0082] For example, if an RFID reader 230 or 231 malfunctions, the notification units 240 and 241 cause the light-emitting elements 250 and 251 to flash alternately at short intervals to notify the user of the situation.

[0083] For example, if the device responsible for communication between the notification units 240 and 241 and the control device U (e.g., an IO-Link master station) malfunctions, the light-emitting elements 250 and 251 of the notification units 240 and 241 using that device will be made to flash alternately at short intervals to notify the situation.

[0084] Additionally, for example, if an abnormality occurs in the control section of the control device U related to the processing fluid supply device 200, the light-emitting elements 250 and 251 of all notification sections 240 and 241 are turned off to notify the user of the situation.

[0085] In this way, the notification units 240 and 241 can notify various information by the light-emitting states of the light-emitting elements 250 and 251 that emit light of different colors.

[0086] In addition, the control device U makes the following determinations: whether the RFID readers 230 and 231 have malfunctioned, whether the equipment responsible for communication between the notification units 240 and 241 and the control device U has malfunctioned, and whether the control part of the control device U related to the processing liquid supply device 200 has malfunctioned.

[0087] In addition, the height positions of the first notification unit 240 and the second notification unit 241 are as follows.

[0088] That is, the height of the first notification unit 240, based on the height of the first mounting platform 220, is lower than the height of the second notification unit 241, based on the height of the second mounting platform 221. Specifically, the relative height of the first notification unit 240, which is located for the mounting partition K based on the position of the storage container B located on the first mounting platform 220, is lower than the relative height of the second notification unit 241, which is located for the mounting partition K based on the position of the storage container B located on the second mounting platform 221.

[0089] Therefore, with the first setting platform 220 positioned at a relatively high height as described above, even a worker of short stature can visually identify the light-emitting state of the light-emitting elements 250 and 251 of the first notification unit 240 and grasp the setting state of the storage container B in the corresponding setting partition K.

[0090] In addition, the first notification unit 240 is centrally located on the side of the first setting station 220, while the second notification unit 241 is located around each setting zone K in the second setting station 221.

[0091] The first notification unit 240 is located on the front side of the body. Figure 7 The second notification unit 241 is located on the rear side (on the positive side of the Y direction). Figure 7 (The negative side of the Y direction). As a reason for the different positions of the first notification unit 240 and the second notification unit 241 in the depth direction (the Y direction in the figure), the following reasons are given for example. That is, the reason is that, for the second notification unit 241, which is provided around the corresponding setting partition K for each setting partition K, if it is provided on the front side (the positive side of the Y direction in the figure), the wiring of the notification unit 241 may hinder the replacement operation of the storage container B.

[0092] Furthermore, the first notification units 240 are arranged, for example, in a vertical direction. The upper first notification unit 240 corresponds to the setting partition K11, the central first notification unit 240 corresponds to the setting partition K12, and the lower first notification unit 240 corresponds to the setting partition K13.

[0093] Furthermore, the housing device 201 is provided with a retainer 260 or a retainer 261 for each setting partition K. Moreover, the retainer 260 provided for the setting partition K of the first setting platform 220 has a different structure than the retainer 261 provided for the setting partition K of the second setting platform 221.

[0094] like Figure 9 As shown, the retainer 261 has individual receiving portions 300 that individually receive the storage container B, and the individual receiving portions 300 are fixed to the second mounting platform 221 (see reference). Figure 7 Each receiving section 300 has: a base plate 301 supporting the bottom surface of the storage container B, side panels 302 and 303 surrounding the sides of the storage container B supported by the base plate 301, a front panel 304, and a back panel 305.

[0095] Located on the rear side ( Figure 9 The back panel of the Y-direction negative side (305) on the front side of the body ( Figure 9 An RFID reader 231 is installed on the positive side of the Y direction.

[0096] Additionally, a support member 310 for supporting the light-emitting elements 250 and 251 of the notification section 241 is connected to the back panel 305.

[0097] like Figure 10 As shown, similar to the retainer 261, the retainer 260 has individual receiving portions 400 that individually receive the storage container B. However, the individual receiving portions 400 are not fixed to the first mounting platform 220 (see reference). Figure 7 Instead, it can move freely between the supply position, which is located on the first setting platform 220, and the replacement position, which is located below the first setting platform 220, for changing the storage container B. Specifically, the replacement position is located further forward than the supply position. Figure 10 The position diagonally below the positive side of the Y direction.

[0098] To enable the movement described above, the retaining member 260 has a lifting member 410. The lifting member 410 is a member that moves the individual receiving portion 400 up and down between the supply position and the changing position. This lifting member 410 is configured, for example, in a foldable manner, with the individual receiving portion 400 fixed at its tip and supported by a shaft on the base member 420. When the lifting member 410 is folded, the position of the individual receiving portion 400 becomes the supply position; when the lifting member 410 is extended, the position of the individual receiving portion 400 becomes the changing position.

[0099] The fixing component 420 is fixed to the first mounting platform 220. In addition, an RFID reader 230 is also fixed to the fixing component 420.

[0100] When replacing the storage container B held by the retainer 260, the operator moves the individual receiving section 400 from the supply position to the replacement position, and then replaces the storage container B within the individual receiving section 400. After replacement, the operator returns the individual receiving section 400 to the supply position.

[0101] As previously described, by configuring the retainer 260 for the first setting platform 220, which is located at a higher height, as described above, even a worker of short stature can easily replace the storage container B of the first setting platform 220.

[0102] Furthermore, a locking mechanism for maintaining the position of the individual receiving section 400 in the aforementioned supply position or the aforementioned replacement position, and an unlocking mechanism for releasing the locking mechanism may also be provided on the retaining member 260. Additionally, a locking mechanism may be provided on the front side of the individual receiving section 400. Figure 10 A handle is provided on the underside of the face (positive side in the Y direction) so that the operator can easily move the individual receiving part 400 between the supply position and the replacement position.

[0103] In addition, each receiving section 400 includes: a base plate 401 supporting the bottom surface of the storage container B; a cylindrical wall 402 surrounding the lower part of the storage container B supported by the base plate 401; and an upper back panel 403 opposite to the upper part of the rear side (negative side in the Y direction in the figure) of the storage container B. Furthermore, cutouts 404 and 405 are respectively provided at the center of the upper end of the rear side (negative side in the Y direction in the figure) of the cylindrical wall 402 and at the center of the lower end of the upper back panel 403.

[0104] When the individual receiving section 400 is in the aforementioned supply position, the RFID reader 230, which is fixed to the fixing member 420, is housed within the cutouts 404 and 405. Therefore, the RFID reader 230's reading of the RFID tag B1 of the storage container B contained in the individual receiving section 400 at the aforementioned supply position is not obstructed by the cylindrical wall 402 and the upper back panel 403.

[0105] <Supply mechanism for supplies from storage container B>

[0106] Figure 11 This is an explanatory diagram showing the structural outline of the mechanism for supplying processing liquid from the storage container B provided in the containment device 201.

[0107] The storage container B is placed in the housing device 201 (see reference). Figure 7 Afterwards, a cover B2 is installed to seal the opening at the top of the storage container B. A supply pipe 501 for pressurized gas (such as nitrogen) and a supply pipe 502 for the processing liquid are provided on cover B2. When pressurized gas is supplied to the storage container B via supply pipe 501, the processing liquid in the storage container B flows into supply pipe 502 and is pressurized and transported to buffer tank 503. The processing liquid is then supplied from buffer tank 503 to each liquid processing unit of the wafer processing system 1.

[0108] Additionally, an on / off valve 510 is provided in the supply pipe 501 to switch between supplying and stopping the pressurized gas passing through the supply pipe 501. A solenoid 511 is provided in the on / off valve 510 to perform the opening and closing action of the supply pipe 501. A control circuit 512 controlling the solenoid 511 is connected to the solenoid 511 via wiring 513.

[0109] Furthermore, in this embodiment, a relay 514 is provided in the wiring 513 to block communication between the control circuit 512 and the solenoid 511. The relay 514 can also be configured to block the power supply from the control circuit 512 to the solenoid 511. By providing the relay 514 in this way, an interlock can be achieved, preventing the supply of pressurized gas to the storage container B, i.e., preventing the supply of processing liquid from the storage container B. In other words, the relay 514 is the mechanism for performing the aforementioned interlock.

[0110] The aforementioned interlock is enabled, for example, if the storage container B located in the setting partition K is not the storage container that should be located in the setting partition K.

[0111] Furthermore, the control circuit 512 and the relay 514 operate under the control of the control device U.

[0112] <Replacement Method>

[0113] Next, an example of a method for replacing storage container B, including a method for notifying whether storage container B is appropriate when it has been replaced, will be described. Figure 12 This is a flowchart illustrating the process of replacing storage container B.

[0114] When the control device U determines that the storage container B is empty, in order to prompt the replacement of the storage container B, a warning screen indicating that the storage container B is empty is displayed on the touch panel 110 (step S1). In addition to the warning, the screen also shows, for example, the location of the storage container B that should be replaced within the housing 201, information about the new storage container B that should be prepared, etc. Furthermore, the following explanation assumes that the storage container B in the setting partition K11 is empty.

[0115] Furthermore, the method for determining whether storage container B is empty is as follows: When the liquid level sensor (not shown) installed in buffer tank 503 detects a decrease in the amount of processing liquid in buffer tank 503, pressurized gas is supplied to the corresponding storage container B via supply pipe 501 to replenish the processing liquid. If a predetermined time has elapsed since the start of pressurized gas supply but the detection result of the liquid level sensor remains unchanged, it is determined that the corresponding storage container B is empty.

[0116] Subsequently, when the storage container B located in setting partition K11 is removed, the RFID reader 230 of setting partition K11 cannot detect the RFID tag B1. When it cannot be detected, the relay 514 is activated, and the aforementioned interlock is enabled (step S2).

[0117] In addition, when the RFID reader 230 of partition K11 fails to detect the RFID tag B1, the light-emitting elements 250 and 251 of the notification unit 240 of partition K11 are set to flash simultaneously at long intervals to convey the meaning from the notification unit 240 (step S3).

[0118] When the operator places the new storage container B in the setting zone K11, the RFID reader 230 in setting zone K11 detects the RFID tag B1. Therefore, in step S3, the control device U then determines whether the RFID reader 230 in setting zone K11 has detected the RFID tag B1 (step S4). This determination is repeated until the RFID tag B1 is detected. Specifically, the replaced storage container B is placed in setting zone K11, and the determination is repeated until the RFID reader 230 in setting zone K11 obtains the identification information of the replaced storage container B.

[0119] Furthermore, when the RFID reader 230 has a narrow readable range, it is sometimes necessary to align the RFID reader 230 with the RFID tag B1 of the new storage container B when setting up a new storage container B. In this case, a message prompting the RFID reader 230 to align with the RFID tag B1 of the new storage container B can be displayed on the display screen shown in step S1.

[0120] When a new storage container B is installed in the setting partition K11, and the RFID reader 230 of the setting partition K11 detects the RFID tag B1 (if "yes" is true in step S4), the control device U determines whether the storage container B installed in the setting partition K11 is appropriate (step S5). Specifically, for example, the control device U determines whether the new storage container B is appropriate based on the identification information of the new storage container B held by the RFID tag B1 obtained by the RFID reader 230 of the setting partition K11. More specifically, for example, the control device U determines whether the identification information of the new storage container B held by the RFID tag B1 obtained by the RFID reader 230 of the setting partition K11 is consistent with the identification information of the appropriate storage container B for the setting partition K11 registered in the aforementioned table. Furthermore, when determining whether they are consistent, the control device U converts the identification information obtained by the RFID reader 230 of the setting partition K11 into a predetermined character code as needed.

[0121] The result of the determination in step S5 is notified by the notification unit 240 of the partition K11 as described below.

[0122] If the result of the determination in step S5 is appropriate, that is, if the identification information is consistent (if it is "yes"), then the green light-emitting element 250 in the light-emitting element 250 and 251 of the notification unit 240 of partition K11 is turned on, so as to notify from the notification unit 240 that it is appropriate (step S6).

[0123] In addition, relay 514 is activated, and the aforementioned interlock is released (disabled) (step S7).

[0124] Then, the display of a screen indicating that the storage container B of setting partition K11 is empty is deactivated (step S8). This deactivation can also be performed at the following time: that is, after the interlock is deactivated, pressurized gas is restarted to supply pressurized gas to the storage container B of setting partition K11 to supply appropriate processing liquid from the storage container B, and the warning screen display in step S8 is deactivated when the corresponding buffer tank 503 is replenished with a predetermined amount.

[0125] In step S5, if the identification information of the storage container B set in the setting partition K11 is inconsistent with the information registered in the aforementioned table and the storage container B is inappropriate (in the case of "No"), the only red light-emitting element 251 of the light-emitting elements 250 and 251 of the notification unit 240 of the setting partition K11 is set to the lit state so as to notify the meaning from the notification unit 240 (step S9).

[0126] Subsequently, when the operator who received the above notification removes the inappropriate storage container B set in the setting partition K11, the RFID reader 230 of the setting partition K11 cannot detect the RFID tag B1, so it returns to step S3 to notify the operator of the notification again.

[0127] As described above, in this embodiment, the processing fluid supply device 200 includes a shelf 210 having multiple partitions K, each partition K having a storage container B disposed on one side. Furthermore, the processing fluid supply device 200 includes RFID readers 230 and 231 respectively provided for each partition K. These RFID readers 230 and 231 acquire identification information of the storage container B from the RFID tag B1 disposed on the corresponding storage container B in the partition K. Additionally, the processing fluid supply device 200 includes notification units 240 and 241 respectively provided for each partition K. These notification units 240 and 241, based on the acquisition results of the RFID readers 230 and 231 for the corresponding partition K, notify the storage container B in that partition K of its placement status by emitting light through light-emitting elements 250 and 251. Therefore, according to the processing fluid supply device 200, when the storage container B is replaced, the operator in the replacement operation can visually identify whether the replaced storage container B is appropriate.

[0128] Furthermore, in the processing fluid supply device 200, the light-emitting elements 250 and 251 of the notification units 240 and 241 emit light towards one side, i.e., the operator side. Therefore, the following effect exists. As a technology different from the technology disclosed herein (an alternative technology), a technology is considered that notifies by displaying information notified by the notification unit 240 in this embodiment on the touch panel 110.

[0129] In the aforementioned alternative technology, the operator needs to move to the touch panel 110 to confirm the notification content. In contrast, in this embodiment, since the light-emitting elements 250 and 251 emit light toward the operator as described above, the operator can immediately confirm the notification content of the light-emitting elements 250 and 251 without moving.

[0130] In other words, according to the processing fluid supply device 200, when the storage container B is replaced, the operator can be notified whether the replaced storage container B is appropriate in a way that can be immediately visually identified during the replacement operation.

[0131] In particular, according to this embodiment, regardless of the operator's skill level, the operator can determine on the spot whether the storage container B set in partition K is appropriate.

[0132] Furthermore, in this embodiment, the notification unit 240 for the first mounting base 220 is centrally located on the side of the first mounting base 220. Therefore, even if the notification unit 240 is located on the front side ( Figure 7 (On the Y-direction positive side, i.e., the operator's side), the replacement of the storage container B in the setting section K of the first setting station 220 will not be obstructed by wiring or other obstructions to the notification unit 240. Furthermore, since the notification unit 240 is located in front of the operator, the operator can more easily visually recognize the notifications from the notification unit 240. In particular, if the notification unit 240 for the first setting station 220, which is positioned at a higher height, were located at the rear, the operator might not be able to visually recognize the notifications from the notification unit 240; however, by placing the notification unit 240 in front of the operator, this situation can be prevented.

[0133] Furthermore, in this embodiment, the notification unit 241 for the second setting station 221 is arranged around the corresponding setting partition K for each setting partition K. This makes it easier for the operator to grasp the correspondence between the notification unit 241 and the setting partition K.

[0134] Additionally, the notification unit 241 is located on the rear side ( Figure 7 Since the second mounting platform 221, where the notification unit 241 is located, is situated on the negative Y-direction (i.e., the position furthest from the operator), the replacement of the storage container B in the mounting section K of the second mounting platform 221 will not be obstructed by wiring or other obstacles related to the notification unit 241. Furthermore, because the second mounting platform 221 with the notification unit 241 is positioned low, even short operators can visually recognize the notifications from the rear-mounted notification unit 241.

[0135] Furthermore, in this embodiment, the notification units 240 and 241 have a simple structure consisting of two light-emitting elements 250 and 251 that emit light in different colors. Moreover, by observing the light emission states of these two light-emitting elements 250 and 251, notifications can be sent regarding various states related to the processing fluid supply device 200, including whether the storage containers B located in each partition K are appropriate. In other words, in this embodiment, the notification units 240 and 241 can communicate various states related to the processing fluid supply device 200 using a simple structure.

[0136] Furthermore, in this embodiment, a relay 514 is provided for interlocking. The interlock prevents the supply of processing liquid from the storage container B. If the storage container B in the installation zone K is not properly installed, the interlock is activated. Therefore, the supply of unsuitable processing liquid can be prevented. As a result, it is possible to prevent the mixing of suitable and unsuitable processing liquid in the buffer tank 503, thus preventing product defects.

[0137] <Variation Example>

[0138] Furthermore, the number of light-emitting elements in each notification unit 240 and 241 is not limited to two; it can also be one or more than three.

[0139] In the above example, the product name information of storage container B was used in determining whether it was appropriate to set up storage container B in partition K during replacement. Sometimes, RFID tag B1 stores other identification information of storage container B (such as the type of processing liquid, batch number, etc.) instead of the product name information, or it stores other identification information of storage container B in addition to the product name information. In this case, the other identification information can also be used in the above-mentioned appropriateness determination. Alternatively, the above-mentioned appropriateness determination can be based on multiple pieces of information from the identification information of storage container B stored in RFID tag B1.

[0140] For example, by observing the setting screen displayed on the touch panel 110 and operating the touch panel 110, the operator can set which of the identification information of the storage container B held by the RFID tag B1 will be used for the above-mentioned appropriate determination.

[0141] In the above example, the status of the light emitted by the notification units 240 and 241 is used to notify the storage container B in the setting partition K whether it is appropriate. Alternatively, the status of the storage container B in the setting partition K can also be notified by the sound output unit or the sound output unit.

[0142] Furthermore, in the above example, a warning indicating that the storage container B is empty is displayed on the touch panel 110. However, it is also possible to notify the above warning by sound from the audio output unit or the sound output unit, or to notify the above warning by sound from the audio output unit or the sound output unit instead of the touch panel 110 display. This can prevent the warning from being missed.

[0143] In the above example, shelf 210 is in the depth direction ( Figure 7 In the Y direction (as shown in the diagram), only one row of storage containers B is provided, but two rows of storage containers B can also be provided in the depth direction. In this case, the rear side ( Figure 7 The storage container B (on the negative side of the Y direction, etc.) is provided from the rear side of the shelf 210, and the notification parts 240 and 241 of the storage container B emit light toward the rear.

[0144] Furthermore, in the above example, the shelf 210 has two mounting platforms arranged in the height direction, namely the first mounting platform 220 and the second mounting platform 221, but it may also have three or more mounting platforms arranged in the height direction. In this case, the mounting platform higher than the first mounting platform 220 is provided with the same RFID reader 230, notification unit 240, and retainer 260 as the first mounting platform 220, and the mounting platform lower than the second mounting platform 221 is provided with the same RFID reader 231, notification unit 241, and retainer 261 as the second mounting platform 221.

[0145] The embodiments disclosed herein should be considered illustrative rather than restrictive in all respects. The above embodiments may be omitted, substituted, or modified in various ways without departing from the appended claims and their spirit.

[0146] Explanation of reference numerals in the attached figures

[0147] 30: Developing apparatus; 31: Lower antireflective film forming apparatus; 32: Resist coating apparatus; 33: Upper antireflective film forming apparatus; 200: Processing solution supply apparatus; 210: Shelf; 230, 231: RFID reader; 240, 241: Notification unit; 250, 251: Light-emitting element; B: Storage container; B1: RFID tag; H: Storage medium; K: Partition; W: Wafer.

Claims

1. A processing liquid supply apparatus for supplying processing liquid to a substrate processing apparatus that uses processing liquid to process a substrate, characterized in that it comprises: The containment section has multiple partitions, each partition having a storage container for the treatment fluid installed on one side. An acquisition unit is provided for each of the partitions, and the acquisition unit acquires the identification information of the storage container from an identification information holding unit attached to the side of the storage container provided in the corresponding partition; and The notification unit is configured for each of the partitions. Based on the acquisition result of the acquisition unit of the corresponding partition, the notification unit notifies the storage container in that partition of its setting status by the emission state of the light-emitting element. in, The light-emitting element of the notification unit emits light towards one side. The receiving section has a first mounting platform and a second mounting platform, and the first mounting platform and the second mounting platform each have the aforementioned partitions. The acquisition unit has a first acquisition unit for the first setting station and a second acquisition unit for the second setting station. The notification unit has a first notification unit for the first setting station and a second notification unit for the second setting station. The second setting platform is located at a lower position than the first setting platform. The height of the first notification unit, based on the height of the first mounting platform, is lower than the height of the second notification unit, based on the height of the second mounting platform.

2. The treatment fluid supply device according to claim 1, characterized in that, The first setting station and the second setting station each have a plurality of partitions arranged in a horizontal direction. The first notification unit is centrally located on the side of the first setting platform. The second notification unit is configured around each of the partitions in the second setting unit.

3. The treatment fluid supply device according to claim 1 or 2, characterized in that, The first setting station has: Individual containment sections, each containing the aforementioned storage containers; as well as A lifting component that allows the individual receiving portion to move up and down between a position on the first mounting platform and a position below the first mounting platform.

4. The treatment fluid supply device according to claim 1, characterized in that, It also has an interlocking mechanism that prevents the supply of processing liquid from the storage container located in the partition from taking place. The interlock is enabled if the replaced storage container in the partition is not the storage container that should be installed in that partition.

5. The treatment fluid supply device according to claim 1, characterized in that, The notification unit has two light-emitting elements that emit light in different colors.

6. A notification method for notifying a processing liquid supply device in a substrate processing apparatus that supplies processing liquid to a substrate processing apparatus that processes a substrate using a processing liquid, whether the storage container of the processing liquid is appropriate when it has been replaced. The processing fluid supply device includes: The containment section has multiple partitions, each partition having the storage container disposed on one side; The acquisition unit is provided for each of the partitions, and the acquisition unit acquires the identification information of the storage container from the identification information holding unit attached to the side of the storage container provided in the corresponding partition. as well as The notification unit is configured for each of the partitions. Based on the acquisition result of the acquisition unit of the corresponding partition, the notification unit notifies the storage container in that partition of its setting status information by the light emission state of the light-emitting element. The light-emitting element of the notification unit emits light towards one side. The receiving section has a first mounting platform and a second mounting platform, and the first mounting platform and the second mounting platform each have the aforementioned partitions. The acquisition unit has a first acquisition unit for the first setting station and a second acquisition unit for the second setting station. The notification unit has a first notification unit for the first setting station and a second notification unit for the second setting station. The second setting platform is located at a lower position than the first setting platform. The height of the first notification unit, based on the height of the first mounting platform, is lower than the height of the second notification unit, based on the height of the second mounting platform. The method includes the following steps: The identification information of the storage container is obtained by the acquisition unit that is provided for the partition of the storage container after the replacement. Based on the acquired identification information, it is determined whether the replaced storage container located in the partition is the storage container that should be located in that partition; and The notification department then notifies the results of the determination.

7. A readable computer storage medium storing a program that operates on a computer controlling a processing fluid supply device to cause the processing fluid supply device to perform the notification method according to claim 6.

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