A device for controlling overflow of cleaning liquid droplets and regulating atmosphere

Abstract

The present invention discloses a device for controlling the overflow of cleaning liquid droplets and regulating the atmosphere, which relates to the technical field of single crystal cleaning, and includes: a mounting seat, a first spray device, a second spray device, a third spray device, a clamping device and a waste liquid collection mechanism. The mounting seat is provided with a waste liquid collection mechanism, the waste liquid collection mechanism is provided with a mounting groove, a placement mechanism is provided in the mounting groove, a clamping device is provided on the placement mechanism, a first spray device and a second spray device are provided on both sides of the waste liquid collection mechanism, a third spray device is provided at one end of the waste liquid collection mechanism, and the first spray device, the second spray device and the third spray device are all located at the upper end of the mounting seat. The three spray devices spray the crystal in all directions, and the reaction is more uniform and comprehensive. The clamping device clamps the crystal and moves in a circle, so that the crystal can be sprayed by the three spray devices in all directions to react. The structure is simple, the operation is convenient, and the coordination is high.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal cleaning, and in particular to a device for controlling overflow of cleaning liquid droplets and regulating atmosphere. Background Art

[0002] In the single wafer cleaning process, the integrated spray device is usually used to perform circular swing and relative rotation of the centrally rotating wafer to form a uniform diffusion action for the cleaning liquid or chemical reaction solution.

[0003] However, the corresponding actions need to be coordinated with the phase movement of the cavity and the coordinated movement of the central wafer supporting platform. The process configuration of wafer edge washing is different from the design method of the general spray system. It is necessary to consider the chemical spraying process with the rotation movement of the wafer. The coordination is not coordinated and it is very inconvenient to use. Summary of the invention

[0004] The object of the present invention is to provide a device for controlling the overflow of cleaning liquid droplets and regulating the atmosphere, so as to solve the above-mentioned technical problems.

[0005] The technical solution adopted by the present invention is as follows:

[0006] A device for controlling the overflow of cleaning liquid droplets and regulating the atmosphere, comprising a mounting seat, a first spray device, a second spray device, a third spray device, a clamping device and a waste liquid collection mechanism, wherein the mounting seat is provided with the waste liquid collection mechanism, the waste liquid collection mechanism is provided with a mounting groove, a placement mechanism is provided in the mounting groove, the placement mechanism is provided with the clamping device, the first spray device and the second spray device are provided on both sides of the waste liquid collection mechanism, respectively, the third spray device is provided at one end of the waste liquid collection mechanism, and the first spray device, the second spray device and the third spray device are all located at the upper end of the mounting seat;

[0007] The third spray device comprises a third support frame, a third connecting seat, a rotating motor and a third spray head. The third connecting seat is provided on one side of the waste liquid collection mechanism, and the third support frame is provided on the upper end of the third connecting seat. A placement slot is provided at one end of the third support frame close to the placement mechanism, and the rotating motor is provided in the placement slot. The third spray head is provided at one end of the rotating motor close to the placement mechanism, and the third spray head is connected to the telescopic rod of the rotating motor.

[0008] The first spray device comprises a first support frame, a first connecting seat and a first spray head, the first connecting seat is provided at the upper end of the mounting seat, the first connecting seat is located at one side of the waste liquid collection mechanism, the first support frame is provided at the upper end of the first connecting seat, and the first spray head is rotatably provided at the lower end of the first support frame;

[0009] The second spray device comprises a second support frame, a second connecting seat and a second spray head, the second connecting seat is provided at the upper end of the mounting seat, the second connecting seat is provided at a side of the waste liquid collecting mechanism away from the first connecting seat, the second support frame is provided at the upper end of the second connecting seat, and the second spray head is rotatably provided at a side of the second support frame close to the placement mechanism;

[0010] The waste liquid collection mechanism comprises: a collection box, a support rod is provided at the upper end of the mounting seat, the collection box is provided at the upper end of the support rod, the mounting groove is provided on the collection box, a through hole is provided at the bottom of the collection box, and the through hole is communicated with the mounting groove;

[0011] The placement mechanism includes a connecting frame and a placement plate, the connecting frame is provided at the upper end of the bottom side wall of the installation groove, the placement plate is provided at the upper end of the connecting frame, a sliding groove is provided on the placement plate, and a clamping device is provided in the sliding groove;

[0012] Among them, the clamping device includes: a sliding column, a driving motor and a clamping plate, the sliding column is arranged in the sliding groove, a support block is arranged at the upper end of the sliding column, the driving motor is arranged in the support block, and two clamping plates are arranged at one end of the support block close to the placement plate, and the driving motor can drive the two clamping plates to slide along the length direction of the support block.

[0013] As a further preference, a drainage pipe is provided at the lower end of the collection box, the drainage pipe is connected with the through hole and the mounting groove, a mounting hole is provided on the mounting seat, and the drainage pipe passes through the mounting hole.

[0014] As a further preference, the first support frame, the second support frame, the third support frame, the first connecting seat, the second connecting seat and the third connecting seat are all provided with connecting pipes, the connecting pipes are connected to the first nozzle, the second nozzle and the third nozzle, and the connecting pipes are used to connect to external solutions.

[0015] As a further preference, the sliding column is slidably connected to the sliding groove.

[0016] The above technical solution has the following advantages or beneficial effects:

[0017] The device for controlling the overflow of cleaning liquid droplets and adjusting the atmosphere of the present application has three spray devices that spray the crystal in all directions, and the reaction is more uniform and comprehensive. The clamping device clamps the crystal and moves in a circle, so that the crystal can receive the spray from the three spray devices in all directions to react. The structure is simple, the operation is convenient, and the coordination is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structure of the device for controlling the overflow of cleaning liquid droplets and regulating the atmosphere of the present invention.

[0019] In the figure: 1. mounting seat; 2. first spray device; 21. first support frame; 22. first connecting seat; 23. first nozzle; 3. second spray device; 31. second support frame; 32. second connecting seat; 33. second nozzle; 4. third spray device; 41. third support frame; 42. third connecting seat; 43. third nozzle; 5. clamping device; 51. sliding column; 52. clamping plate; 53. supporting block; 6. waste liquid collecting mechanism; 61. collecting box; 62. supporting rod; 63. drainage pipe; 7. placing mechanism; 71. connecting frame; 72. placing plate; 721. sliding groove. DETAILED DESCRIPTION

[0020] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] In the description of the present invention, it should be noted that, if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, if the terms "first", "second", "third" appear, they are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0022] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] Figure 1 This is a schematic diagram of the structure of the device for controlling the overflow of cleaning liquid droplets and regulating the atmosphere of the present invention, see Figure 1As shown, a preferred embodiment is shown, which shows a device for controlling the overflow of cleaning liquid droplets and adjusting the atmosphere, comprising: a mounting seat 1, a first spray device 2, a second spray device 3, a third spray device 4, a clamping device 5 and a waste liquid collection mechanism 6. The mounting seat 1 is provided with a waste liquid collection mechanism 6, which is used to collect the waste liquid of the solution sprayed by the first spray device 2, the second spray device 3 and the third spray device 4. The waste liquid collection mechanism 6 is provided with a mounting groove, and a placement mechanism 7 is provided in the mounting groove, and the placement mechanism 7 is used to place the crystal that reacts with the solution. The placement mechanism 7 is provided with a clamping device 5, and the first spray device 2 and the second spray device 3 are respectively provided on both sides of the clamping device 5, and the third spray device 4 is provided at one end of the clamping device 5. The first spray device 2, the second spray device 3 and the third spray device 4 are all located at the upper end of the mounting seat 1; the clamping device 5 is used to clamp the crystal.

[0024] Further, as a preferred embodiment, the third spray device 4 includes a third support frame 41, a third connection seat 42, a rotating motor and a third spray head 43. A third connection seat 42 is provided on one side of the waste liquid collection mechanism 6, and a third support frame 41 is provided on the upper end of the third connection seat 42. A placement slot is provided at one end of the third support frame 41 close to the placement mechanism 7, and a rotating motor is provided in the placement slot. A third spray head 43 is provided at one end of the rotating motor close to the placement mechanism, and the third spray head 43 is connected to the telescopic rod of the rotating motor. The rotating motor drives the telescopic rod to extend or rotate, and drives the third spray head 43 to extend and retract along the lower end of the crystal, thereby spraying the lower end of the crystal, and the telescopic rod is extended and retracted. The rotating motor rotates to make the third spray head 43 vertical, and sprays the side of the crystal.

[0025] Further, as a preferred embodiment, the first spray device 2 includes a first support frame 21, a first connection seat 22 and a first spray head 23. The upper end of the mounting seat 1 is provided with the first connection seat 22, and the first connection seat 22 is located on one side of the placement mechanism 7. The upper end of the first connection seat 22 is provided with a first support frame 21, and the lower end of the first support frame 21 is rotatably provided with a first spray head 23. The first spray head 23 is arranged directly above the crystal to spray the upper end of the crystal.

[0026] Further, as a preferred embodiment, the second spray device 3 includes a second support frame 31, a second connection seat 32 and a second nozzle 33. The upper end of the mounting seat 1 is provided with a second connection seat 32, and the second connection seat 32 is arranged on the side of the waste liquid collection mechanism 6 away from the first connection seat 22. The upper end of the second connection seat 32 is provided with a second support frame 31, and the side of the second support frame 31 close to the placement mechanism 7 is rotatably provided with a second nozzle 33. The lower end of the collection box 61 is provided with a drainage pipe 63, and the drainage pipe 63 is connected to the through hole and the mounting groove. The mounting seat 1 is provided with a mounting hole, and the drainage pipe 63 passes through the mounting hole. The first support frame 21, the second support frame 31, the third support frame 41, the first connection seat 22, the second connection seat 32 and the third connection seat 42 are all provided with connecting pipes, which are connected to the first nozzle 23, the second nozzle 33 and the third nozzle 43, and the connecting pipes are used to connect to the external solution. The external solution flows from the connecting pipe through the first nozzle 23, the second nozzle 33 and the third nozzle 43 and is sprayed on the crystal surface.

[0027] Further, as a preferred embodiment, the waste liquid collection mechanism 6 includes a collection box 61, a support rod 62 is provided at the upper end of the mounting seat 1, a collection box 61 is provided at the upper end of the support rod 62, a mounting groove is provided on the collection box 61, a through hole is provided at the bottom of the collection box 61, and the through hole is connected to the mounting groove. The solution entering the placement groove flows into the drainage tube 63 from the through hole and is discharged.

[0028] Further, as a preferred embodiment, the placement mechanism 7 includes a connecting frame 71 and a placement plate 72. The connecting frame 71 is provided at the upper end of the bottom side wall of the mounting groove, and the placement plate 72 is provided at the upper end of the connecting frame 71. A sliding groove 721 is provided on the placement plate 72, and a clamping device 5 is provided in the sliding groove 721.

[0029] Further, as a preferred embodiment, the clamping device 5 includes a sliding column 51, a driving motor and a clamping plate 52. The sliding column 51 is arranged in the sliding groove 721, and the upper end of the sliding column 51 is arranged with a support block 53. The driving motor is arranged in the support block 53. The support block 53 is provided with two clamping plates 52 at one end close to the placement plate 72. The driving motor can drive the two clamping plates 52 to slide along the length direction of the support block 53. The sliding column 51 is slidably connected to the sliding groove. The sliding column 51 slides along the placement groove, driving the clamping plate 52 and the crystal clamped by the clamping plate 52 to move, thereby rotating the crystal, so that the solution and the crystal react more evenly. In this embodiment, the crystal is fixed in the mounting groove by the clamping device 5 during cleaning.

[0030] Further, as a preferred embodiment, it also includes a fourth spray device (not shown in the figure), the fourth spray device includes a fourth nozzle and a liquid inlet pipe connected to the fourth nozzle, and the fourth spray device is used to spray acid etching liquid onto the surface of the crystal, for etching the surface of the crystal. Among them, the fourth spray device can be used for etching crystals with flat surfaces or crystals with step structures on the outer edge of the surface. When used for etching crystals with flat surfaces, the acid etching liquid is directly sprayed onto the surface of the crystal through the fourth nozzle, and the acid etching liquid is evenly diffused in conjunction with the rotation of the crystal. When applied to the etching of crystals with a trapezoidal structure, the fourth nozzle is set between the edge of the crystal and the mounting groove, and the fourth nozzle can be slightly swung between the mounting groove and the edge of the crystal, and the rotation of the crystal can be mutually adjusted to spray only on the outer edge of the crystal. Secondly, the fourth nozzle can be set at an angle, and the specific inclination angle can be selected as needed. For example, the angle between the axis of the fourth nozzle and the normal of the center of the crystal is 60-80°, which can accurately spray the acid etching liquid onto the step surface of the step structure of the crystal.

[0031] The above description is only a preferred embodiment of the present invention, and does not limit the implementation mode and protection scope of the present invention. For those skilled in the art, it should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A device for controlling the overflow of cleaning liquid droplets and regulating the atmosphere, characterized in that: The invention comprises a mounting seat, a first spray device, a second spray device, a third spray device, a clamping device and a waste liquid collecting mechanism, wherein the mounting seat is provided with the waste liquid collecting mechanism, the waste liquid collecting mechanism is provided with a mounting groove, a placing mechanism is provided in the mounting groove, the placing mechanism is provided with the clamping device, the first spray device and the second spray device are provided on both sides of the waste liquid collecting mechanism, the third spray device is provided at one end of the waste liquid collecting mechanism, and the first spray device, the second spray device and the third spray device are all located at the upper end of the mounting seat; The third spray device comprises a third support frame, a third connecting seat, a rotating motor and a third spray head. The third connecting seat is provided on one side of the waste liquid collection mechanism, and the third support frame is provided on the upper end of the third connecting seat. A placement slot is provided at one end of the third support frame close to the placement mechanism, and the rotating motor is provided in the placement slot. The third spray head is provided at one end of the rotating motor close to the placement mechanism, and the third spray head is connected to the telescopic rod of the rotating motor. The first spray device comprises a first support frame, a first connecting seat and a first spray head, the first connecting seat is provided at the upper end of the mounting seat, the first connecting seat is located at one side of the waste liquid collection mechanism, the first support frame is provided at the upper end of the first connecting seat, and the first spray head is rotatably provided at the lower end of the first support frame; The second spray device comprises a second support frame, a second connecting seat and a second spray head, the second connecting seat is provided at the upper end of the mounting seat, the second connecting seat is provided at a side of the waste liquid collecting mechanism away from the first connecting seat, the second support frame is provided at the upper end of the second connecting seat, and the second spray head is rotatably provided at a side of the second support frame close to the placement mechanism; The waste liquid collection mechanism comprises: a collection box, a support rod is provided at the upper end of the mounting seat, the collection box is provided at the upper end of the support rod, the mounting groove is provided on the collection box, a through hole is provided at the bottom of the collection box, and the through hole is communicated with the mounting groove; The placement mechanism includes a connecting frame and a placement plate, the connecting frame is provided at the upper end of the bottom side wall of the installation groove, the placement plate is provided at the upper end of the connecting frame, a sliding groove is provided on the placement plate, and a clamping device is provided in the sliding groove; Among them, the clamping device includes: a sliding column, a driving motor and a clamping plate, the sliding column is arranged in the sliding groove, a support block is arranged at the upper end of the sliding column, the driving motor is arranged in the support block, and two clamping plates are arranged at one end of the support block close to the placement plate, and the driving motor can drive the two clamping plates to slide along the length direction of the support block.

2. A device for controlling overflow of cleaning liquid droplets and regulating atmosphere as claimed in claim 1, characterized in that: A drainage pipe is provided at the lower end of the collecting box, the drainage pipe is communicated with the through hole and the mounting groove, a mounting hole is provided on the mounting seat, and the drainage pipe passes through the mounting hole.

3. A device for controlling overflow of cleaning liquid droplets and regulating atmosphere as claimed in claim 1, characterized in that: The first support frame, the second support frame, the third support frame, the first connecting seat, the second connecting seat and the third connecting seat are all provided with connecting pipes, the connecting pipes are connected with the first nozzle, the second nozzle and the third nozzle, and the connecting pipes are used to connect external solutions.

4. A device for controlling overflow of cleaning liquid droplets and regulating atmosphere as claimed in claim 1, characterized in that: The sliding column is slidably connected to the sliding groove.

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