Industrial robot

Abstract

Provided is an industrial robot capable of teaching in a narrow space. A first sensor (14) is configured such that the optical axis of the light emitting element and the optical axis of the light receiving element of the first sensor (14) are parallel to the left-right direction. A second sensor (15) is configured such that the optical axis of the light emitting element and the optical axis of the light receiving element of the second sensor (15) are parallel to the front-back direction. When teaching the position of a wafer (2) loaded on a loading portion (3), the hand (4) is moved in the front-back direction by a moving mechanism (9), the position of the loading portion (3) or a teaching jig loaded on the loading portion (3) in the front-back direction is detected by the first sensor (14), and the hand (4) is moved in the left-right direction by the moving mechanism (9), and the position of the loading portion (3) or the teaching jig in the left-right direction is detected by the second sensor (15).

Description

TECHNICAL FIELD

[0001] The present application relates to an industrial robot. BACKGROUND

[0002] Conventionally, an industrial robot that transports a semiconductor wafer is known (for example, refer to Patent Literature 1). In addition, in the reference of Patent Literature 1, an industrial robot that automatically teaches a position of a transport object loaded on a loading section is described. The industrial robot of Patent Literature 1 is provided with a first sensor having a light emitting element and a light receiving element whose optical axes are parallel to a left-right direction, and a second sensor having a light emitting element and a light receiving element whose optical axes are inclined with respect to a front-rear direction and a left-right direction and are horizontal.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT LITERATURE

[0005] Patent Literature 1: Japanese Patent Application Laid-Open No. 2016-107378 SUMMARY

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] In the conventional structure, when one sensor for teaching is provided on the hand, the hand needs to change the entering angle and perform sensing multiple times, so the moving range of the hand becomes large, and a large space for teaching needs to be ensured.

[0008] In addition, in the structure of Patent Literature 1, for example, in the case where the object of teaching is plural, multiple sensing needs to be performed while changing the entering position of the hand, so the moving range of the hand becomes large, and a large space for teaching needs to be ensured.

[0009] The present application has been made in view of the above-described circumstances, and has an object to provide an industrial robot that can perform teaching in a narrow place.

[0010] TECHNICAL SOLUTION

[0011] An industrial robot according to the present application performs the transfer of an object to be conveyed into a loading section in which the object to be conveyed is loaded, and the transfer of the object to be conveyed from the loading section, wherein the industrial robot includes a hand that grips the object to be conveyed and moves linearly in a horizontal direction, a movement mechanism that sets a direction in which the hand moves when the object to be conveyed is transferred to the loading section as a first direction, sets a direction orthogonal to the first direction and an up-down direction as a second direction, and moves the hand in the first direction and the second direction, and first and second sensors that are installed on the hand and have a light emitting element and a light receiving element, wherein the first sensor is configured so that an optical axis of the light emitting element and an optical axis of the light receiving element of the first sensor are parallel to the second direction, the second sensor is configured so that an optical axis of the light emitting element and an optical axis of the light receiving element of the second sensor are parallel to the first direction, when a position of the object to be conveyed loaded in the loading section is taught, the hand is moved in the first direction by the movement mechanism, a position of the loading section or a teaching jig loaded in the loading section in the first direction is detected by the first sensor, and the hand is moved in the second direction by the movement mechanism, and a position of the loading section or the teaching jig in the second direction is detected by the second sensor.

[0012] Effects of the Invention

[0013] According to the present application, an industrial robot that can perform teaching in a narrow space can be provided. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is a side view showing the general structure of an industrial robot 1 according to an embodiment of the present application.

[0015] Figure 2 is Figure 1 is a plan view of the hand 4 shown in FIG. 1.

[0016] Figure 3 is a view for explaining Figure 1 is a view for explaining

[0017] Figure 4 is a view for explaining Figure 1 is a view for explaining

[0018] Figure 5 is a view for explaining Figure 1 is a view for explaining

[0019] Figure 6is a view for explaining Figure 1 is a view for explaining the operation of the hand 4 when the robot 1 detects the position of the first loading section 3a in the left-right direction.

[0020] Figure 7 is a view for explaining Figure 1 is a view for explaining the operation of the hand 4 when the robot 1 detects the position of the second loading section 3b in the left-right direction.

[0021] Figure 8 is a plan view showing an example of a horizontal multi-joint robot to which the hand 4 is applied.

[0022] [Explanation of Reference Numerals]

[0023] 1 … robot (industrial robot); 2 … wafer (semiconductor wafer); 3 … loading section; 3a … first loading section; 3b … second loading section; 4 … hand; 5 … column section; 6 … base section; 8 … lifting mechanism; 9 … moving mechanism; 10 … rotating mechanism; 11 … fork section; 12 … fork support section; 14 … first sensor; 15 … second sensor; 16, 18 … light emitting section; 17, 19 … light receiving section; 81 … industrial robot; 85 … main body section; 87 … arm; 88 … first arm section; 89 … second arm section. DETAILED DESCRIPTION

[0024] Hereinafter, an embodiment of the present application will be described with reference to the drawings.

[0025] (Structure of Industrial Robot)

[0026] Figure 1 is a side view showing the outline structure of an industrial robot 1 of the embodiment of the present application. Figure 2 is Figure 1 is a plan view of the hand 4. Figure 3 is a view for explaining Figure 1 is a view for explaining the operation of the industrial robot 1.

[0027] The industrial robot 1 of the embodiment (hereinafter, referred to as "robot 1") is a robot that transports a semiconductor wafer 2 (hereinafter, referred to as "wafer 2") as a transport target object. Specifically, the robot 1 is a robot that performs the carrying-in of the wafer 2 into a loading section 3 that loads the wafer 2, and the carrying-out of the wafer 2 from the loading section 3. The wafer 2 is formed in a disc shape. The loading section 3 is disposed, for example, inside a processing device that performs a prescribed process on the wafer 2. Further, the loading section 3 of the embodiment is formed in a disc shape.

[0028] The robot 1 is provided with: a hand 4 that grips the wafer 2; a column portion 5 that holds the hand 4 so as to be able to be raised and lowered; a base portion 6 that holds the column portion 5 so as to be able to be moved in the horizontal direction; and a raising and lowering mechanism 8 that raises and lowers the hand 4 with respect to the column portion 5. In addition, the robot 1 is provided with: a moving mechanism 9 that linearly moves the hand 4 and the column portion 5 in the horizontal direction with respect to the base portion 6, the hand 4 being linearly moved in the horizontal direction when the wafer 2 is transported.

[0029] In the following description, a direction parallel to the direction of gravity is set as the up-down direction. In addition, a direction in which the hand 4 moves when the wafer 2 is transported to the loading portion 3 (i.e., when the wafer 2 is carried into the loading portion 3 and carried out from the loading portion 3) is set as the front-rear direction (Y direction indicated by arrows in FIG. 1). In addition, a direction orthogonal to the up-down direction and the front-rear direction (X direction indicated by arrows in FIG. 1) is set as the left-right direction. In the present embodiment, the front-rear direction is a first direction, and the left-right direction is a second direction. Figure 1 Figure 1 In the following description, a direction parallel to the direction of gravity is set as the up-down direction. In addition, a direction in which the hand 4 moves when the wafer 2 is transported to the loading portion 3 (i.e., when the wafer 2 is carried into the loading portion 3 and carried out from the loading portion 3) is set as the front-rear direction (Y direction indicated by arrows in FIG. 1). In addition, a direction orthogonal to the up-down direction and the front-rear direction (X direction indicated by arrows in FIG. 1) is set as the left-right direction. In the present embodiment, the front-rear direction is a first direction, and the left-right direction is a second direction.

[0030] The column portion 5 is formed in a columnar shape that is elongated in the up-down direction. The raising and lowering mechanism 8 is provided with, for example: a ball screw that is rotatably attached to the column portion 5; a nut member that is engaged with the ball screw and fixed to the hand 4; a motor that rotates the ball screw; and a guide portion that guides the hand 4 in the up-down direction. The raising and lowering mechanism 8 is disposed inside the column portion 5 that is formed in a hollow shape.

[0031] The base portion 6 is formed in a block shape that is elongated in the front-rear direction. The moving mechanism 9 is provided with, for example: a ball screw that is rotatably attached to the base portion 6; a nut member that is engaged with the ball screw and fixed to the column portion 5; a motor that rotates the ball screw; and a guide portion that guides the column portion 5 in the front-rear direction. The moving mechanism 9 is disposed inside the base portion 6 that is formed in a hollow shape, and moves the hand 4 and the column portion 5 in the front-rear direction. In addition, the moving mechanism 9 includes a mechanism that moves the column portion 5 in the left-right direction.

[0032] In addition, the hand 4 is rotatable about a rotation axis T1 that is parallel to the front-rear direction. For example, the column portion 5 is provided with a rotation mechanism 10, such as a motor, that rotates the hand 4 about the rotation axis T1 with respect to the column portion 5.

[0033] The hand 4 is provided with, for example: two fork portions 11 that are formed in a bar shape; and a fork support portion 12 that supports base ends of the fork portions 11. The fork portions 11 are formed in a linear shape. The two fork portions 11 are disposed substantially parallel to each other, and are disposed at a prescribed interval in the left-right direction. The interval between the two fork portions 11 is greater than the diameter of the loading portion 3. In addition, the two fork portions 11 are disposed at the same position in the up-down direction. As described above, the two fork portions 11 are disposed so as to be able to grip the wafer 2. Figure 2 ​As shown, the wafer 2 is mounted on the upper surface of the two fork sections 11. Additionally, a gripping mechanism (not shown) for gripping the wafer 2 is installed on the upper surface of the fork section 11. The fork support section 12 is formed in a block shape and is held in place by the column section 5 to allow for lifting and lowering.

[0034] like Figure 2 As shown, a first sensor 14 and a second sensor 15 are mounted on the hand 4. The first sensor 14 is a transmissive optical sensor, comprising a light-emitting part 16 having a light-emitting element and a light-receiving part 17 having a light-receiving element. Similarly, the second sensor 15 is a transmissive optical sensor, comprising a light-emitting part 18 having a light-emitting element and a light-receiving part 19 having a light-receiving element.

[0035] The light-emitting part 16 is mounted on the front end of one of the two fork parts 11, and the light-receiving part 17 is mounted on the front end of the other fork part 11. The light-emitting part 16 and the light-receiving part 17 are configured to face each other in the left-right direction. That is, the first sensor 14 is configured such that the optical axis L1 of the light-emitting part 16 and the light-receiving part 17 (specifically, the optical axis L1 of the light-emitting element of the light-emitting part 16 and the light-receiving element of the light-receiving part 17) is parallel to the left-right direction.

[0036] The light-emitting part 18 and the light-receiving part 19 are mounted on the side portion of the hand 4, specifically on the left side of the fork support part 12. Figure 2 In the example, a light-emitting part 18 and a light-receiving part 19 are installed at both ends of the recess on the side of the hand 4, but the light-emitting part 18 and the light-receiving part 19 can also be installed on the two protrusions on the side of the hand 4.

[0037] The light-emitting part 18 and the light-receiving part 19 are arranged opposite each other in the front-back direction. That is, the second sensor 15 is configured such that the optical axis L2 of the light-emitting part 18 and the light-receiving part 19 (specifically, the optical axis of the light-emitting element of the light-emitting part 18 and the light-receiving element of the light-receiving part 19) is parallel to the front-back direction. In addition, the distance between the light-emitting part 18 and the light-receiving part 19 is greater than the diameter of the mounting part 3.

[0038] The robot 1, constructed as described above, achieves its functions through a combination of up-and-down movements of its hand 4 and horizontal movements in the forward and backward directions, such as... Figure 3 (A) Figure 3 As shown in (C), the wafer 2 is moved into the loading section 3 and the wafer 2 is moved out of the loading section 3.

[0039] (Teaching method for the position of the chip loaded in the loading section)

[0040] Figure 4 It is used for explanation Figure 1 The diagram shows the action of the hand 4 of the robot 1 when it detects the position of the first loading part 3a in the vertical direction.Figure 5 is a view for explaining Figure 1 the operation of the hand 4 when the robot 1 detects the position of the first loading section 3a in the front-rear direction. Figure 6 is a view for explaining Figure 1 the operation of the hand 4 when the robot 1 detects the position of the first loading section 3a in the left-right direction. Figure 7 is a view for explaining Figure 1 the operation of the hand 4 when the robot 1 detects the position of the second loading section 3b in the left-right direction. Here, as the loading section 3, a case where the positions of the two first loading sections 3a and the second loading section 3b arranged in the horizontal direction are detected is explained.

[0041] In the present embodiment, based on the detection results of the positions of the first loading section 3a and the second loading section 3b in the up-down direction, in the front-rear direction, and in the left-right direction, automatic teaching of the positions of the wafers (for example, the wafer 2) loaded on the first loading section 3a and the second loading section 3b to the robot 1 is performed. That is, in the present embodiment, when the positions of the wafers loaded on the first loading section 3a and the second loading section 3b are taught to the robot 1, the positions of the first loading section 3a and the second loading section 3b in the up-down direction, in the front-rear direction, and in the left-right direction are detected.

[0042] Specifically, as shown in Figure 4 the hand 4 is raised by the lifting mechanism 8 so that the optical axis L1 of the first sensor 14 passes through the first loading section 3a, and the position of the first loading section 3a in the up-down direction is detected by the first sensor 14. More specifically, the hand 4 is raised by the lifting mechanism 8, and the position of the lower surface or the upper surface of the first loading section 3a is detected by the first sensor 14. As for the position of the second loading section 3b in the up-down direction, it can also be detected by the same method.

[0043] In addition, in the case where the positions of the first loading section 3a and the second loading section 3b in the up-down direction are the same, the detected position of the first loading section 3a in the up-down direction can be recognized as the position of the second loading section 3b in the up-down direction, and the detection operation of the position of the second loading section 3b in the up-down direction can be omitted.

[0044] In addition, as shown in Figure 5 the hand 4 is moved in the front-rear direction by the moving mechanism 9 so that the optical axis L1 of the first sensor 14 passes through the loading section 3, and the position of the loading section 3 in the front-rear direction is detected by the first sensor 14. More specifically, the hand 4 is moved in the front-rear direction by the moving mechanism 9, and the position of the side surface of the loading section 3 is detected by the first sensor 14. As for the position of the second loading section 3b in the front-rear direction, it can also be detected by the same method.

[0045] In addition, as shown in FIG. 6, after moving the hand 4 between the first loading section 3a and the second loading section 3b, the hand 4 is moved in the up-and-down direction by the moving mechanism 8 so that the optical axis Ll of the first sensor 14 passes through the first loading section 3a, and the position of the first loading section 3a in the up-and-down direction is detected by the first sensor 14. Figure 6 More specifically, the hand 4 is moved in the up-and-down direction by the moving mechanism 8, and the position of the side surface of the first loading section 3a is detected by the first sensor 14.

[0046] In addition, as shown in FIG. 7, the hand 4 is reversed from the state shown in FIG. 6 about the rotation axis Tl by the rotating mechanism 10, and the hand 4 is moved in the left-and-right direction by the moving mechanism 9 so that the optical axis L2 of the second sensor 15 passes through the second loading section 3b, and the position of the second loading section 3b in the left-and-right direction is detected by the second sensor 15. Figure 7 More specifically, the hand 4 is moved in the left-and-right direction by the moving mechanism 9, and the position of the side surface of the second loading section 3b is detected by the first sensor 14. Thus, it is possible to reduce the moving range of the hand 4 while detecting the positions of the first loading section 3a and the second loading section 3b. Figure 6 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order.

[0047] The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 4 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 5 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 6 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 7 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 4 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 5 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 6 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 7 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order.

[0048] The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 4 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 6 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 7 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 5 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 5 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 6 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 7 The up-and-down direction position detection shown in FIG. 6, the front-and-back direction position detection shown in FIG. 8, and the left-and-right direction position detection shown in FIG. 7 can be performed in any order. Figure 4The up-and-down direction position detection.

[0049] (Primary effect of the embodiment)

[0050] Thus, in the present embodiment, the hand 4 is provided with not only the first sensor 14 in which the optical axis of the light emitting element and the optical axis of the light receiving element are parallel to the left-and-right direction (second direction), but also the second sensor 15 in which the optical axis of the light emitting element and the optical axis of the light receiving element are parallel to the front-and-back direction (first direction).

[0051] Thus, for example, first, the position detection of the loading portion 3 in the front-and-back direction is performed using the first sensor 14, and thereafter, the position detection of the loading portion 3 in the left-and-right direction can be performed using the second sensor 15 without changing the posture (direction) of the hand 4 almost at all. Alternatively, first, the position detection of the loading portion 3 in the left-and-right direction is performed using the second sensor 15, and thereafter, the position detection of the loading portion 3 in the front-and-back direction can be performed using the first sensor 14 without changing the posture (direction) of the hand 4 almost at all. Therefore, the entry angle of the hand 4 (the swing range of the hand 4) required for teaching can be reduced. Thus, teaching can be performed in a narrow place.

[0052] In addition, since the rotation mechanism 10 that rotates the hand 4 about the rotation axis T1 parallel to the front-and-back direction (first direction) is provided, after the position detection of the first loading portion 3a in the left-and-right direction is performed, the hand 4 can be reversed about the rotation axis T1 by the rotation mechanism 10, and the position detection of the second loading portion 3b in the left-and-right direction can be performed. Thus, in the case where there are a plurality of objects to be taught (for example, the first loading portion 3a and the second loading portion 3b), even if the second sensor 15 is provided on only one of the side surfaces of the hand 4, the positions of the first loading portion 3a and the second loading portion 3b can be detected while reducing the movement range of the hand 4.

[0053] (Other embodiments)

[0054] The above-described embodiment is an example of the best mode of the present application, but is not limited thereto, and various modifications can be made within the scope of the gist of the present application.

[0055] In the above-described embodiment, the position of the wafer 2 loaded to the loading section 3 is taught to the robot 1 based on the detection results of the positions of the loading section 3 in the up-down direction, the front-rear direction, and the left-right direction detected by the first sensor 14 and the second sensor 15. Further, for example, when the position of the wafer 2 loaded to the loading section 3 is taught to the robot 1, the teaching jig can be loaded to the loading section 3. In this case, the positions of the teaching jig in the up-down direction, the front-rear direction, and the left-right direction are detected by the first sensor 14 and the second sensor 15, and the position of the wafer 2 loaded to the loading section 3 is taught to the robot 1 based on the detection results.

[0056] In the above-described embodiment, the wafer 2 is loaded to the upper surface of the hand 4 (specifically, the upper surfaces of the two fork sections 11) and gripped. In addition to this, for example, the wafer 2 can be fixed to a prescribed wafer holder, the two fork sections 11 can be configured to be movable in the left-right direction, and the prescribed portion of the wafer holder can be sandwiched between the two fork sections 11, whereby the wafer 2 is gripped by the hand 4. That is, the wafer 2 can be gripped by the hand 4 via the wafer holder. In this case as well, the prescribed portion of the wafer holder can be loaded to the loading section 3. That is, the wafer 2 can be loaded to the loading section 3 via the wafer holder.

[0057] In the above-described embodiment, the first sensor 14 and the second sensor 15 are transmission-type optical sensors, but the first sensor 14 and the second sensor 15 can be reflection-type optical sensors.

[0058] In the above-described embodiment, the loading section 3 is formed in a disc shape, but the loading section 3 can be formed in a shape other than a disc shape. For example, the loading section 3 can be formed in an elliptical disc shape, a polygonal disc shape such as a square disc shape, or a block shape constituting a prescribed shape. In the case where the loading section 3 is formed in a shape other than a disc shape, the teaching jig can be loaded to the loading section 3, the positions of the teaching jig in the up-down direction, the front-rear direction, and the left-right direction can be detected by the first sensor 14 and the second sensor 15, and the position of the wafer 2 loaded to the loading section 3 can be taught to the robot 1 based on the detection results.

[0059] In the above-described embodiment, the robot 1 can also have an arm that is capable of stretching and contracting, to which the hand 4 is connected in a rotatable manner on the front end side thereof. In that case, the base end side of the arm is connected to the column portion 5 in a rotatable manner. Further, the hand 4 moves linearly in the front-rear direction by the stretching and contracting action of the arm. Further, in the above-described embodiment, the robot 1 can also have a rotation mechanism that rotates the column portion 5 in the up-down direction as the axis of rotation. Further, in the above-described embodiment, the transport target object transported by the robot 1 is the wafer 2, but the transport target object transported by the robot 1 can also be an object other than the wafer 2, such as a glass substrate.

[0060] The structure in which the above-described hand 4 is applied to the robot 1 has been described, but the hand 4 is not limited to the robot 1, and can also be applied to various robots that have a hand that transports a transport target object such as the wafer 2 and performs teaching (automatic teaching). Figure 8 is a plan view that shows an example of a horizontal multi-joint robot to which the hand 4 is applied. The above-described hand 4 can also be applied to, for example, Figure 8 the industrial robot 81 shown in

[0061] The industrial robot 81 is a horizontal multi-joint robot for transporting the wafer 2 as a transport target object. The industrial robot 81 has the hand 4 that loads the semiconductor wafer 2, the arm 87 that is connected to the hand 4 in a rotatable manner on the front end side, and the main body portion 85 to which the base end side of the arm 87 is connected in a rotatable manner.

[0062] The main body portion 85 is formed in a substantially quadrangular prism shape. Inside the main body portion 85, an arm lifting mechanism (omitted from the drawing) that lifts the arm 87 is housed. The arm 87 is composed of a first arm portion 88 and a second arm portion 89. The first arm portion 88 and the second arm portion 89 are formed in a hollow shape. The base end side of the first arm portion 88 is connected to the main body portion 85 in a rotatable manner. The base end side of the second arm portion 89 is connected to the front end side of the first arm portion 88 in a rotatable manner. Further, the industrial robot 81 has a first arm drive mechanism (omitted from the drawing) that rotates the first arm portion 88 with respect to the main body portion 85, and a second arm drive mechanism (omitted from the drawing) that rotates the second arm portion 89 with respect to the first arm portion 88.

[0063] The hand 4 is connected to the front end side of the second arm portion 89 in a rotatable manner. When viewed in the up-down direction, the hand 4 is rotatable about the rotation center Cl (refer to Figure 1 ) as the center. The main body portion 85, the first arm portion 88, the second arm portion 89, and the hand 4 are arranged in that order from the lower side in the up-down direction. Further, the industrial robot 81 has a hand drive mechanism (omitted from the drawing) that includes a motor for rotating the hand 4.

[0064] In this industrial robot 81, teaching using the hand 4 can also be performed similarly to the robot 1.

[0065] As described above, the following matters are disclosed in the present specification. (1)

[0067] An industrial robot which carries in a conveyance object to a loading part where the conveyance object is loaded and carries out the conveyance object from the loading part, the industrial robot comprising:

[0068] a hand which grips the conveyance object and moves linearly in a horizontal direction;

[0069] a moving mechanism which sets a moving direction of the hand when the conveyance object is conveyed to the loading part as a first direction, sets a direction orthogonal to the first direction and an up-down direction as a second direction, and moves the hand in the first direction and the second direction; and

[0070] a first sensor and a second sensor which are installed on the hand and have a light emitting element and a light receiving element,

[0071] wherein

[0072] the first sensor is configured so that an optical axis of the light emitting element and an optical axis of the light receiving element of the first sensor are parallel to the second direction,

[0073] the second sensor is configured so that an optical axis of the light emitting element and an optical axis of the light receiving element of the second sensor are parallel to the first direction,

[0074] when teaching a position of the conveyance object loaded on the loading part, the hand is moved in the first direction by the moving mechanism, a position of the loading part or a teaching jig loaded on the loading part in the first direction is detected by the first sensor, and the hand is moved in the second direction by the moving mechanism, and a position of the loading part or the teaching jig in the second direction is detected by the second sensor.

[0075] If configured as described in (1), for example, first, position detection of the loading part in the first direction is performed using the first sensor, and thereafter, position detection of the loading part in the second direction can be performed using the second sensor, without having to change the posture (direction) of the hand almost at all. Alternatively, first, position detection of the loading part in the second direction is performed using the second sensor, and thereafter, position detection of the loading part in the first direction can be performed using the first sensor, without having to change the posture (direction) of the hand almost at all. Therefore, the entry angle of the hand (the swing amplitude of the hand) required for teaching can be reduced. Therefore, teaching can be performed in a narrow place. (2)

[0077] The industrial robot according to (1), further comprising:

[0078] a lifting mechanism that lifts the hand,

[0079] The position of the transport object loaded on the loading section is taught, and the hand is lifted by the lifting mechanism, and the position of the loading section or the teaching jig loaded on the loading section in the vertical direction is detected by the first sensor.

[0080] If configured as described in (2), the position of the transport object loaded on the loading section in the vertical direction can also be taught. (3)

[0082] The industrial robot according to (1) or (2), further comprising:

[0083] a rotating mechanism that rotates the hand around a rotation axis parallel to the first direction,

[0084] The second sensor is provided on either one of the side surfaces of the hand when the first direction is set as the front-back direction,

[0085] The loading section includes a first loading section and a second loading section whose positions in the horizontal direction are different from each other,

[0086] The position of each transport object loaded on the first loading section and the second loading section is taught, and the hand is moved to the second direction by the moving mechanism, and the position of the first loading section or the teaching jig loaded on the first loading section in the second direction is detected by the second sensor, and then the hand is reversed around the rotation axis by the rotating mechanism, and the hand is moved to the second direction by the moving mechanism, and the position of the second loading section or the teaching jig loaded on the second loading section in the second direction is detected by the second sensor.

[0087] If configured as described in (3), the position detection of the second loading section in the left-right direction can be performed by reversing the hand by the rotating mechanism after the position detection of the first loading section in the left-right direction is performed. Thus, in the case where there are a plurality of objects to be taught, even if the second sensor is provided on only one of the side surfaces of the hand, the positions of the first loading section and the second loading section can be detected while reducing the moving range of the hand.

Claims

1. An industrial robot for moving an object into a loading section containing the object and removing the object from the loading section, characterized in that, Comprising: a hand having two fork portions formed in a bar shape, and a fork support portion that mounts base ends of the fork portions, the hand gripping the conveyance object and moving linearly in a horizontal direction; a movement mechanism that sets a movement direction of the hand when conveying the conveyance object to the loading portion as a first direction, sets a direction orthogonal to the first direction and an up-down direction as a second direction, and moves the hand in the first direction and the second direction; and a first sensor and a second sensor mounted on the hand, and each having a light emitting portion having a light emitting element and a light receiving portion having a light receiving element, the light emitting portion of the first sensor is mounted on a front end portion of one of the two fork portions, the light receiving portion is mounted on a front end portion of the other of the two fork portions, and the light emitting portion and the light receiving portion are arranged to face each other in the second direction; the light emitting portion and the light receiving portion of the second sensor are mounted on a side surface portion of the hand, and are mounted on one of both side surface portions of the fork support portion, and the light emitting portion and the light receiving portion are arranged to face each other in the first direction; wherein the first sensor is arranged such that an optical axis of the light emitting element and an optical axis of the light receiving element of the first sensor are parallel to the second direction, the second sensor is arranged such that an optical axis of the light emitting element and an optical axis of the light receiving element of the second sensor are parallel to the first direction, when teaching a position of the conveyance object loaded on the loading portion, the hand is moved in the first direction by the movement mechanism, a position of the loading portion or a teaching jig loaded on the loading portion in the first direction is detected by the first sensor, and the hand is moved in the second direction by the movement mechanism, and a position of the loading portion or the teaching jig in the second direction is detected by the second sensor.

2. The industrial robot according to claim 1, characterized in that, Further comprising: a lifting mechanism that lifts the hand, when teaching a position of the conveyance object loaded on the loading portion, the hand is lifted by the lifting mechanism, and a position of the loading portion or the teaching jig in the up-down direction is detected by the first sensor.

3. An industrial robot according to claim 1 or 2, characterized in that, Further comprising: a rotation mechanism that rotates the hand about a rotation axis parallel to the first direction, the second sensor is provided on either one of both side surface portions of the hand when the first direction is set as a front-rear direction, the loading portion includes a first loading portion and a second loading portion whose positions in the horizontal direction are different from each other, When the positions of the respective transport objects loaded on the first loading section and the second loading section are taught, the hand is moved in the second direction by the movement mechanism, and after the position of the first loading section or the teaching jig loaded on the first loading section in the second direction is detected by the second sensor, the hand is inverted about the rotation axis by the rotation mechanism, and the position of the second loading section or the teaching jig loaded on the second loading section in the second direction is detected by the second sensor.

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