A compression ring assembly for securing a wafer and a wafer processing chamber

Abstract

The application discloses a compression ring assembly for fixing a wafer and a wafer processing chamber, and belongs to the technical field of semiconductor manufacturing, and aims to solve the problem that the wafer is damaged due to the movement between the unfastened top ring and bottom ring in the prior art. The compression ring assembly comprises a bottom ring and a top ring arranged above the bottom ring, and the bottom ring and the top ring are detachably connected through a locking piece. The compression ring assembly for fixing a wafer and the wafer processing chamber can be used for wafer processing.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing technology, and particularly relates to a pressure ring assembly for fixing wafers and a wafer processing chamber. Background Technology

[0002] In current wafer fabrication processes, a clamping ring assembly is typically used to fix the wafer. This clamping ring assembly consists of a bottom ring and a top ring located above the bottom ring. The wafer is placed in the inner area of ​​the top ring, and there is no connecting joint between the top ring and the bottom ring, so it is in an unfixed state.

[0003] Due to structural flaws in the wafer processing chamber (e.g., a vacuum exhaust chamber), pressure concentration can easily occur, causing movement between the unfixed top and bottom rings, and resulting in top ring misalignment. See [link to relevant documentation]. Figure 1 This causes the wafer to change position, resulting in wafer defects. Summary of the Invention

[0004] Based on the above analysis, the present invention aims to provide a pressure ring assembly for fixing wafers and a wafer processing chamber, so as to solve the problem of wafer defects caused by movement between the unfixed top ring and bottom ring in the prior art.

[0005] The objective of this invention is mainly achieved through the following technical solutions:

[0006] The present invention provides a pressure ring assembly for fixing a wafer, including a bottom ring and a top ring disposed above the bottom ring, wherein the bottom ring and the top ring are fixedly and detachably connected by a locking member.

[0007] Furthermore, the bottom ring and top ring are provided with holes for accommodating the locking member. The bottom ring is provided with a through hole for accommodating the locking member, and the top ring is provided with a blind hole for accommodating the locking member. The locking member passes through the through hole on the bottom ring and is inserted into the blind hole of the top ring.

[0008] Furthermore, the locking component includes a body and a locking block. The body passes through a through hole and is inserted into a blind hole. A cavity for accommodating the locking block is formed on the body. Locking grooves are formed on the wall of the through hole and the wall of the blind hole, respectively. The locking block protrudes partially or completely from the cavity and is inserted into the locking groove.

[0009] Furthermore, the number of locked blocks is even, and the number of locked blocks is at least 4.

[0010] Furthermore, there are 4 locking blocks, which are divided into two groups. The two locking blocks in each group are arranged symmetrically. One group of locking blocks is inserted into the locking groove on the wall of the through hole, and the other group of locking blocks is inserted into the locking groove on the wall of the blind hole.

[0011] Furthermore, the cross-sectional shape of the locking block along the radial direction of the bottom ring or top ring is circular, triangular, square, rectangular, or trapezoidal; correspondingly, the cross-sectional shape of the locking groove along the radial direction of the bottom ring or top ring is semi-circular, triangular, square, rectangular, or trapezoidal.

[0012] Furthermore, the aforementioned locking block and locking groove are fitted together with each other.

[0013] Furthermore, the outer peripheral surface of the locking block conforms to the groove wall of the locking groove, and the locking block and the locking groove are in clearance fit.

[0014] Furthermore, the gap is 0 to 0.1 cm.

[0015] Furthermore, the aforementioned locking component also includes a driving component for driving the locking block into or out of the cavity. The driving component includes a button, a locking lever, and a spring lever. The locking blocks are respectively located at both ends of the spring lever. The button drives the spring lever to deform through the locking lever, causing the locking block to enter or protrude from the cavity.

[0016] Furthermore, the end where the locking lever connects to the elastic lever is stepped, with the stepped platform surface abutting against the elastic lever.

[0017] Furthermore, a connecting hole is provided at one end of the locking rod that connects to the elastic rod, and the elastic rod passes through the connecting hole.

[0018] Furthermore, the aforementioned pressure ring assembly for fixing the wafer also includes a limiting member, which includes a limiting protrusion on the body and a limiting groove on the wall of the through hole and / or the wall of the blind hole.

[0019] Furthermore, the cross-sectional shape of the aforementioned limiting protrusion along the radial direction of the bottom ring or top ring is a right trapezoid, with the inclined waist of the right trapezoid facing the bottom of the blind hole.

[0020] Furthermore, the aforementioned limiting protrusion includes a rigid protrusion disposed on the side wall of the body and an elastic protrusion surrounding the rigid protrusion. The cross-sectional shape of the contact surface between the rigid protrusion and the elastic protrusion along the axial direction of the bottom ring or top ring is an arc shape, and the cross-sectional shape of the contact surface between the elastic protrusion and the limiting groove along the axial direction of the bottom ring or top ring is a right trapezoid.

[0021] Furthermore, an internal thread is machined at one end of the through hole and the blind hole adjacent to each other, and the internal thread is used as a locking groove.

[0022] The present invention also provides a wafer processing chamber, including the above-mentioned pressure ring assembly for fixing the wafer, wherein the wafer is placed in the inner region of the top ring during wafer processing.

[0023] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0024] a) The pressure ring assembly for fixing wafers provided by the present invention fixes the bottom ring and the top ring together by locking components. The bottom ring and the top ring will not move before, during and after wafer processing, thus achieving stable fixing of the wafer.

[0025] b) The pressure ring assembly for fixing wafers provided by the present invention has a detachable connection between the bottom ring and the top ring through the above-mentioned locking member. When the top ring or the top ring is damaged and needs to be replaced, it is only necessary to pull the locking member away from the bottom ring and the top ring to separate the bottom ring and the top ring, so that the bottom ring or the top ring can be disassembled and replaced. The operation is convenient and simple.

[0026] c) The pressure ring assembly for fixing wafers provided by the present invention uses an internal thread as a locking groove. The machining of the internal thread is relatively simple, thereby reducing the machining difficulty of the pressure ring assembly and facilitating industrial production.

[0027] d) The pressure ring assembly for fixing wafers provided by the present invention limits the radial movement of the bottom ring and the top ring through the interaction between the locking member and the through hole wall of the bottom ring and the blind hole wall of the top ring, thereby achieving a fixed and detachable connection between the bottom ring and the top ring.

[0028] e) The pressure ring assembly for fixing wafers provided by the present invention, through the cooperation of the locking block and the locking groove, can not only limit the radial direction of the bottom ring and the top ring, but also limit the axis of the bottom ring and the top ring, thereby improving the fixing stability of the wafer by the pressure ring assembly.

[0029] f) The clamping ring assembly for fixing wafers provided by this invention, when the main body needs to pass through a through hole and be inserted into a blind hole, if the locking block interferes with the hole wall of the through hole, pressing the button moves the locking rod towards the bottom of the blind hole. The elastic rod deforms under the drive of the locking rod, reducing its linear length. This reduces the distance between the locking blocks at both ends of the elastic rod, allowing the locking block to enter the cavity. The locking block no longer interferes with the hole wall of the through hole, and the main body can smoothly pass through the through hole and be inserted into the blind hole. When the main body reaches the designated position (i.e., inserted into the blind hole), releasing the button returns the elastic rod to its original length, increasing the distance between the locking blocks at both ends of the elastic rod, causing it to partially or completely protrude from the cavity again and be inserted into the locking groove. Using the above-described driving structure, the axial movement of the button along the bottom or top ring can be converted into the radial movement of the locking block along the bottom or top ring, allowing the locking block to enter or protrude from the cavity. This avoids interference between the protruding locking block and the hole walls of the through hole and blind hole during the main body's passage through the through hole and insertion into the blind hole.

[0030] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the written description and the accompanying drawings. Attached Figure Description

[0031] The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Throughout the drawings, the same reference numerals denote the same parts.

[0032] Figure 1 This is a schematic diagram illustrating the deflection of the top ring in the prior art;

[0033] Figure 2 This is a schematic diagram of the pressure ring assembly for a wafer processing cavity provided in Embodiment 1 of the present invention, wherein the locking member is not inserted into the blind hole;

[0034] Figure 3 This is a schematic diagram of the pressure ring assembly for a wafer processing cavity provided in Embodiment 1 of the present invention, wherein the locking member passes through the through hole and is inserted into the blind hole;

[0035] Figure 4 This is a schematic diagram of the limiting element in the pressure ring assembly for a wafer processing cavity provided in Embodiment 1 of the present invention.

[0036] Figure label:

[0037] 1-Bottom ring; 2-Top ring; 3-Through hole; 4-Blind hole; 5-Body; 6-Locking block; 7-Locking groove; 8-Wafer; 9-Button; 10-Locking rod; 11-Elastic rod; 12-Limiting protrusion; 121-Rigid protrusion; 122-Elastic protrusion. Detailed Implementation

[0038] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form part of the present invention and, together with the embodiments of the present invention, serve to illustrate the principles of the present invention.

[0039] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the term "connected" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art,

[0040] Throughout the text, the terms “top,” “bottom,” “above,” “below,” and “on top” refer to the relative positions of components of the device, such as the relative positions of the top and bottom substrates within the device. It is understood that the device is multifunctional and independent of its spatial orientation.

[0041] The working surface of this invention can typically be a plane or a curved surface, and can be inclined or horizontal. For ease of explanation, the embodiments of this invention are placed on a horizontal surface and used on a horizontal surface, thereby defining "height" and "vertical".

[0042] Example 1

[0043] This embodiment provides a clamping ring assembly for fixing a wafer, see [link to previous document]. Figures 2 to 4 It includes a bottom ring 1 and a top ring 2 located above the bottom ring 1. The bottom ring 1 and the top ring 2 are detachably connected by a locking member.

[0044] Compared with the prior art, the pressure ring assembly for fixing the wafer provided in this embodiment fixes the bottom ring 1 and the top ring 2 together with a locking member. The bottom ring 1 and the top ring 2 will not move before, during and after wafer processing, thus achieving stable fixing of the wafer.

[0045] Furthermore, the bottom ring 1 and the top ring 2 are detachably connected by the aforementioned locking mechanism. When the top ring 2 is damaged and needs to be replaced, it is only necessary to remove the locking mechanism from the bottom ring 1 and the top ring 2 to separate the bottom ring 1 and the top ring 2, which makes the bottom ring 1 or the top ring 2 easy to disassemble and replace.

[0046] It is understandable that in order to achieve a fixed and detachable connection between the bottom ring 1 and the top ring 2, the bottom ring 1 and the top ring 2 need to have holes for accommodating the locking member. For example, the bottom ring 1 has a through hole 3 and the top ring 2 has a blind hole 4. The locking member passes through the through hole 3 on the bottom ring 1 and is inserted into the blind hole 4 of the top ring 2. Through the interaction between the locking member and the hole wall of the through hole 3 of the bottom ring 1 and the hole wall of the blind hole 4 of the top ring 2, the radial direction of the bottom ring 1 and the top ring 2 is limited, thereby achieving a fixed and detachable connection between the bottom ring 1 and the top ring 2.

[0047] Specifically, the locking component includes a body 5 and a locking block 6. The body 5 passes through the through hole 3 and is inserted into the blind hole 4. A cavity for accommodating the locking block 6 is formed on the body 5. Locking grooves 7 are formed in the walls of the through hole 3 and the blind hole 4, respectively. The locking block 6 protrudes partially or completely from the cavity and is inserted into the locking grooves 7. In this way, through the cooperation of the locking block 6 and the locking grooves 7, not only can the radial direction of the bottom ring 1 and the top ring 2 be limited, but also the axis of the bottom ring 1 and the top ring 2 can be limited, thereby improving the stability of the aforementioned pressure ring assembly in fixing the wafer.

[0048] Specifically, the number of locking blocks 6 is an even number, and the number of locking blocks 6 is at least 4. Taking a number of locking blocks 6 as an example, the 4 locking blocks 6 are divided into two groups, with 2 locking blocks 6 in each group arranged symmetrically. One group of locking blocks 6 is inserted into the locking groove 7 on the wall of the through hole 3, and the other group of locking blocks 6 is inserted into the locking groove 7 on the wall of the blind hole 4.

[0049] For example, the cross-sectional shape of the locking block 6 along the radial direction of the bottom ring 1 or the top ring 2 is circular, triangular, square, rectangular or trapezoidal; correspondingly, the cross-sectional shape of the locking groove 7 along the radial direction of the bottom ring 1 or the top ring 2 is semi-circular, triangular, square, rectangular or trapezoidal.

[0050] To further improve the stability of the aforementioned clamping ring assembly in fixing the wafer, the locking block 6 and the locking groove 7 are fitted together with a clearance. Specifically, the fit means that the outer peripheral surface of the locking block 6 is conformal to the groove wall of the locking groove 7, and the locking block 6 and the locking groove 7 are fitted with a clearance of 0 to 0.1 cm.

[0051] It is worth noting that during the process of the body 5 passing through the through hole 3 and inserting into the blind hole 4, the protruding locking block 6 will interfere with the hole wall of the through hole 3 and the hole wall of the blind hole 4. Therefore, the above-mentioned locking member also includes a driving member for driving the locking block 6 into or out of the cavity. For example, the above-mentioned driving member includes a button 9, a locking rod 10 and an elastic rod 11. The locking block 6 is respectively disposed at both ends of the elastic rod 11. The button 9 drives the elastic rod 11 to deform through the locking rod 10, so that the locking block 6 enters or protrudes from the cavity. That is, one end of the locking rod 10 is connected to the button 9, and the other end of the locking rod 10 is connected to the elastic rod 11. Thus, when the main body 5 needs to pass through the through hole 3 and be inserted into the blind hole 4, and when the locking block 6 interferes with the wall of the through hole 3, the button 9 is pressed, and the locking rod 10 moves towards the bottom of the blind hole 4. The elastic rod 11 deforms under the drive of the locking rod 10, and the straight length of the elastic rod 11 decreases, so that the distance between the locking blocks 6 at both ends of the elastic rod 11 decreases. The locking block 6 enters the cavity, and the locking block 6 no longer interferes with the wall of the through hole 3. The main body 5 can then pass through the through hole 3 and be inserted into the blind hole 4 smoothly. When the main body 5 reaches the designated position (i.e., inserted into the blind hole 4), the button 9 is released, the elastic rod 11 returns to its original length, the distance between the locking blocks 6 at both ends of the elastic rod 11 increases, and it protrudes partially or completely from the cavity again and is inserted into the locking groove 7. By adopting the above-mentioned driving structure, the axial movement of button 9 along bottom ring 1 or top ring 2 can be transformed into the radial movement of locking block 6 along bottom ring 1 or top ring 2, so that locking block 6 enters or protrudes from the cavity, thereby avoiding interference between the protruding locking block 6 and the hole wall of through hole 3 and blind hole 4 during the process of body 5 passing through through hole 3 and inserting into blind hole 4.

[0052] To achieve the elastic deformation of the elastic rod 11 driven by the locking rod 10, the end of the locking rod 10 connected to the elastic rod 11 can adopt one of the following two structures: In one case, the end of the locking rod 10 connected to the elastic rod 11 is stepped, with the stepped platform surface abutting against the elastic rod 11. When the locking rod 10 moves towards the bottom of the blind hole 4, the platform surface abuts against the elastic rod 11, thereby driving the elastic rod 11 to bend towards the bottom of the blind hole 4, and reducing the straight length of the elastic rod 11; In the other case, a connecting hole is opened at the end of the locking rod 10 connected to the elastic rod 11, and the elastic rod 11 passes through the connecting hole. When the locking rod 10 moves towards the bottom of the blind hole 4, the wall of the connecting hole abuts against the elastic rod 11, thereby driving the elastic rod 11 to bend towards the bottom of the blind hole 4, and reducing the straight length of the elastic rod 11.

[0053] To reduce the likelihood of the locking block 6 disengaging from the locking groove 7, the aforementioned pressure ring assembly for fixing the wafer further includes a limiting member. This limiting member includes a limiting protrusion 12 on the body 5 and a limiting groove (not shown in the figure) on the wall of the through hole 3 and / or the wall of the blind hole 4. Thus, along the axial direction of the bottom ring 1 or the top ring 2, the mutually cooperating limiting protrusion 12 and limiting groove can limit the body 5, reducing the likelihood of the locking block 6 disengaging from the locking groove 7.

[0054] For example, the cross-sectional shape of the aforementioned limiting protrusion 12 along the radial direction of the bottom ring 1 or the top ring 2 is a right trapezoid, with the inclined waist of the right trapezoid facing the bottom of the blind hole 4. That is, along the insertion direction of the body 5, the inclined waist of the limiting protrusion 12 contacts the bottom ring 1 first. In this way, during the process of the body 5 passing through the through hole 3 and being inserted into the blind hole 4, the inclined waist of the limiting protrusion 12 can guide the insertion of the body 5. When the body 5 reaches the designated position, the limiting protrusion 12 and the limiting groove cooperate with each other, and the right waist can lock the body 5, thereby basically preventing the locking block 6 from coming out of the locking groove 7.

[0055] Specifically, the structure of the limiting protrusion 12 may include a rigid protrusion 121 provided on the side wall of the body 5 and an elastic protrusion 122 surrounding the rigid protrusion 121. The cross-sectional shape of the contact surface between the rigid protrusion 121 and the elastic protrusion 122 along the axial direction of the bottom ring 1 or the top ring 2 is an arc shape, and the cross-sectional shape of the contact surface between the elastic protrusion 122 and the limiting groove along the axial direction of the bottom ring 1 or the top ring 2 is a right trapezoid. Among them, the rigid protrusion 121 can ensure that the limiting protrusion 12 has a certain mechanical strength, which can basically prevent the locking block 6 from coming out of the locking groove 7. In addition, the arc-shaped rigid protrusion 121 can facilitate the insertion and removal of the body 5. As for the elastic protrusion 122, during the process of the body 5 passing through the through hole 3 and inserting into the blind hole 4, the inclined waist of the elastic protrusion 122 can guide the insertion of the body 5. When the body 5 reaches the designated position, the elastic protrusion 122 and the limiting groove cooperate with each other, and the right-angle waist can lock the body 5, thereby basically preventing the locking block 6 from coming out of the locking groove 7.

[0056] It should be noted that when the main body 5 is pulled out, since the elastic protrusion 122 can deform appropriately according to the magnitude of the force applied, in actual application, the limiting protrusion 12 will basically not hinder the pulling out of the main body 5, and the user only needs to apply a little force.

[0057] Example 2

[0058] This embodiment provides a pressure ring assembly for fixing a wafer. Its structure is basically the same as that of the pressure ring assembly for fixing a wafer provided in Embodiment 1. The difference is that an internal thread is machined at one end of the through hole 3 and the blind hole 4 adjacent to each other, and the internal thread is used as the locking groove 7.

[0059] Compared with the prior art, the beneficial effects of the pressure ring assembly for fixing wafers provided in this embodiment are basically the same as those of the pressure ring assembly for fixing wafers provided in Embodiment 1, and will not be described in detail here.

[0060] In addition, the use of internal threads as the locking groove 7 makes the machining of internal threads relatively simple, thereby reducing the machining difficulty of the above-mentioned pressure ring assembly and facilitating industrial production.

[0061] Example 3

[0062] This embodiment provides a wafer processing chamber, including a pressure ring assembly for fixing the wafer as provided in Embodiment 1 or Embodiment 2. During the wafer processing, the wafer is placed in the inner region of the top ring.

[0063] Compared with the prior art, the beneficial effects of the wafer processing chamber provided in this embodiment are basically the same as those of the pressure ring assembly for fixing wafers provided in Embodiment 1 or Embodiment 2, and will not be described in detail here.

[0064] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A clamping ring assembly for fixing a wafer, characterized in that, It includes a bottom ring and a top ring located above the bottom ring, wherein the bottom ring and the top ring are detachably connected by a locking member; The top ring has a blind hole, the bottom ring has a through hole, and the locking member passes through the through hole on the bottom ring and is inserted into the blind hole on the top ring. The locking element includes a body and a locking block, wherein the body passes through a through hole and is inserted into a blind hole; The main body has a cavity for accommodating the locking block, and the walls of the through hole and the blind hole are respectively provided with locking grooves. The locking block protrudes partially or completely from the cavity and is inserted into the locking groove. The locking element also includes a driving element for driving the locking block into or out of the cavity; The driving component includes a button, a locking lever, and an elastic lever. The locking blocks are respectively located at both ends of the elastic lever. The button drives the elastic lever to deform through the locking lever, causing the locking blocks to enter or protrude from the cavity. It also includes a limiting member, which includes a limiting protrusion on the body and a limiting groove on the wall of the through hole and the wall of the blind hole. The limiting protrusion includes a rigid protrusion on the side wall of the body and an elastic protrusion surrounding the rigid protrusion. The cross-sectional shape of the contact surface between the rigid protrusion and the elastic protrusion along the axial direction of the bottom ring or top ring is an arc shape, and the cross-sectional shape of the contact surface between the elastic protrusion and the limiting groove along the axial direction of the bottom ring or top ring is a right trapezoid.

2. The clamping ring assembly for fixing a wafer according to claim 1, characterized in that, The end of the through hole and the blind hole adjacent to each other is machined with an internal thread, which is used as a locking groove.

3. The clamping ring assembly for fixing a wafer according to claim 1, characterized in that, The cross-sectional shape of the locking block along the radial direction of the bottom ring or top ring is circular, triangular, square, rectangular, or trapezoidal; The cross-sectional shape of the locking groove along the radial direction of the bottom ring or top ring is semi-circular, triangular, square, rectangular or trapezoidal.

4. The clamping ring assembly for fixing a wafer according to claim 1, characterized in that, The locking rod is connected to the elastic rod at one end in a stepped shape, and the stepped platform surface abuts against the elastic rod. Alternatively, a connecting hole may be provided at one end of the locking rod that connects to the elastic rod, and the elastic rod may pass through the connecting hole.

5. A wafer processing chamber, characterized in that, The wafer includes a pressure ring assembly for fixing a wafer as described in any one of claims 1 to 4, wherein the wafer is placed in the inner region of the top ring during wafer processing.

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