Particle counter measurement method, device, equipment and storage medium

Abstract

The present application discloses a particle counter measurement method, device, equipment and storage medium, including: obtaining the particle scattering light signal of the particles in the gas to be measured that passes through the measurement cavity of the photoelectric sensor within a preset collection period through the photoelectric detector in the photoelectric sensor, and converting the particle scattering light signal into a particle scattering photocurrent; converting the particle scattering photocurrent into a voltage pulse signal through amplification and filtering, and counting the voltage pulse signal through the counting channel of the particle counter to obtain actual channel particle measurement data; taking the sum of the difference between the actual channel particle measurement data on all the same counting channels and the locally pre-stored system channel noise data value as the real particle measurement data. The present application can effectively reduce the system noise of the particle counter and improve the accuracy of the particle counter counting by taking the difference between the actual particle measurement data detected by the particle counter and the pre-stored system noise data value as the real particle measurement data.

Description

Technical Field

[0001] The present application relates to the field of metrology technology, and in particular to a particle counter metrology method, device, equipment and storage medium. Background Art

[0002] At present, in order to avoid product failure caused by particulate matter contamination during the production process, the production fields such as drug preparation, semiconductor, optics or precision machining have increasingly stringent requirements for environmental cleanliness. In order to obtain the situation of particles in the air of the production environment, the application of particle counters in the above fields is indispensable. The working principle of the particle counter is based on the Mie scattering principle. The photoelectric detector outputs the detected particle scattered light as a photocurrent, which is then amplified and filtered by the amplifier circuit to convert it into a voltage pulse signal, and then the particle counting results of each channel are obtained by the comparator.

[0003] However, due to the presence of system noise in the particle counter (such as power supply noise, circuit board noise, etc.), the particle measurement results in the production environment air are prone to errors. For example, after the particle counter converts the photocurrent of the particle scattered light into a voltage pulse signal, the technicians usually count by setting a counting threshold in the particle counter, such as counting the signal whose amplitude or width in the voltage pulse signal exceeds the set threshold. This one-size-fits-all counting method will invisibly miss the particles below the threshold and miscount the system noise signal above the threshold. For example, a particle counter that can accurately measure 0.3 micron level will still obtain a signal within its performance range when there are 0.1 micron and 0.2 micron particles in the system, but because the signal may be close to the amplitude of the noise signal, the system cannot identify whether the signal is a particle signal or a noise signal.

[0004] In summary, how to reduce the system noise of the particle counter and improve the counting accuracy of the particle counter is a problem that needs to be further solved. Summary of the invention

[0005] In view of this, the purpose of this application is to provide a particle counter measurement method, device, equipment and storage medium, which can reduce the system noise of the particle counter and improve the accuracy of the particle counter counting. The specific scheme is as follows:

[0006] In a first aspect, the present application discloses a particle counter measurement method, comprising:

[0007] Acquiring, by means of a photoelectric detector in the photoelectric sensor, a particle scattered light signal of particles in the gas to be measured that passes through the measuring cavity of the photoelectric sensor within a preset collection period, and converting the particle scattered light signal into a particle scattered light current;

[0008] The particle scattered photocurrent is converted into a voltage pulse signal through amplification and filtering, and the voltage pulse signal is counted through a counting channel of a particle counter to obtain actual channel particle measurement data;

[0009] The sum of the differences between the actual channel particle measurement data on all the same counting channels and the system channel noise data value of the particle counter pre-stored locally is used as the real particle measurement data of the gas to be measured.

[0010] Optionally, the process of acquiring the system channel noise data value of the particle counter includes:

[0011] Measuring the multiple calibration gases introduced into the particle counter respectively according to the preset acquisition period to obtain multiple system channel noise measurement data corresponding to each of the calibration gases;

[0012] The system channel noise measurement data of each calibration gas on the same counting channel are added and averaged to obtain the system channel noise data value of the corresponding counting channel.

[0013] Optionally, the step of taking the sum of the differences between the actual channel particle measurement data on all identical counting channels and the system channel noise data value of the particle counter pre-stored locally as the real particle measurement data of the gas to be measured includes:

[0014] Calculate the difference between the actual channel particle measurement data on the same counting channel and the system channel noise data value of the particle counter pre-stored locally to obtain the real particle measurement value of each counting channel;

[0015] The sum of the real particle measurement values ​​of all counting channels is calculated to obtain the real particle measurement data of the gas to be measured.

[0016] Optionally, the process of acquiring the system channel noise data value of the particle counter includes:

[0017] The clean gas introduced into the particle counter according to the preset collection period is measured respectively through each counting channel in the particle counter to obtain clean gas measurement data of multiple channels;

[0018] The standard particle gas introduced into the particle counter according to the preset collection period is measured through each counting channel to obtain a plurality of channel standard particle measurement data, and the theoretical measurement data of the plurality of channel standard particle gases are calculated to obtain a plurality of channel standard particle theoretical data;

[0019] The channel standard particle measurement data and the channel standard particle theoretical data located in the same counting channel are respectively calculated to obtain the channel standard particle system noise data value corresponding to each counting channel;

[0020] The channel standard particle system noise data value and the channel clean gas measurement data located in the same counting channel are added and averaged to obtain the calibration gas channel noise data value corresponding to each counting channel, and the calibration gas channel noise data value is used as the system channel noise data value of the particle counter.

[0021] Optionally, the particle counter measurement method further includes:

[0022] Calculate the difference between the channel standard particle system noise data value and the channel clean gas measurement data located on the same counting channel respectively, and divide the difference by the channel clean gas measurement data to obtain the system channel noise error value corresponding to each counting channel;

[0023] Calculate the difference between the sum of the system channel noise error values ​​corresponding to each counting channel and the sum of the clean gas measurement data of each channel, and divide the difference by the sum of the clean gas measurement data of each channel to obtain a total system noise error value;

[0024] respectively determining whether the system channel noise error value exceeds a preset system noise error coefficient, and if the system channel noise error value does not exceed the system noise error coefficient, determining whether the system total noise error value exceeds the system noise error coefficient;

[0025] If the system total noise error value does not exceed the system noise error coefficient, the system channel noise data value is saved to the particle counter.

[0026] Optionally, the particle counter includes the photoelectric sensor, an amplifier circuit, a counter, a microprocessor and a display terminal; wherein the microprocessor includes a storage module and a data processing module, and the system channel noise data value is stored in the storage module.

[0027] Optionally, the particle counter measurement method further includes:

[0028] The actual channel particle measurement data, the system channel noise data value and the real particle measurement data are displayed through the display end of the particle counter, and the configuration input of the particle counter is performed through the display end; wherein the content of the configuration input includes the system channel noise data value.

[0029] In a second aspect, the present application discloses a particle counter metering device, comprising:

[0030] A signal acquisition module, used for acquiring, through a photoelectric detector in a photoelectric sensor, a particle scattered light signal of particles in the gas to be measured that passes through a measuring cavity of the photoelectric sensor within a preset acquisition period, and converting the particle scattered light signal into a particle scattered light current;

[0031] A conversion module, used for converting the particle scattered photocurrent into a voltage pulse signal through amplification and filtering processing;

[0032] A counting module, used for counting the voltage pulse signal through a counting channel of a particle counter to obtain actual channel particle measurement data;

[0033] The calculation module is used to take the sum of the differences between the actual channel particle measurement data on all the same counting channels and the system channel noise data value of the particle counter pre-stored locally as the real particle measurement data of the gas to be measured.

[0034] In a third aspect, the present application discloses an electronic device, comprising a processor and a memory; wherein the processor implements the aforementioned particle counter measurement method when executing a computer program stored in the memory.

[0035] In a fourth aspect, the present application discloses a computer-readable storage medium for storing a computer program; wherein, when the computer program is executed by a processor, the aforementioned particle counter metering method is implemented.

[0036] It can be seen that the present application first obtains the particle scattering light signal of the particles in the gas to be measured that passes through the measuring cavity of the photoelectric sensor within a preset acquisition period through the photoelectric detector in the photoelectric sensor, and converts the particle scattering light signal into a particle scattering photocurrent, and then converts the particle scattering photocurrent into a voltage pulse signal through amplification and filtering processing, and counts the voltage pulse signal through the counting channel of the particle counter to obtain the actual channel particle measurement data, and then takes the sum of the difference between the actual channel particle measurement data on all the same counting channels and the system channel noise data value of the particle counter pre-stored locally as the real particle measurement data of the gas to be measured. It can be seen that the present application takes the sum of the difference between the actual particle measurement data detected by the particle counter and the system noise data value pre-stored in the particle counter as the real particle measurement data of the gas to be measured, which can effectively reduce the system noise of the particle counter and improve the accuracy of the particle counter counting. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0038] Figure 1 A flow chart of a particle counter measurement method disclosed in this application;

[0039] Figure 2 A specific working structure block diagram of a particle counter disclosed in this application;

[0040] Figure 3 A specific particle counter measurement method flow chart disclosed in this application;

[0041] Figure 4 This is a schematic diagram of the structure of a particle counter metering device disclosed in this application;

[0042] Figure 5 This is a structural diagram of an electronic device disclosed in this application. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0044] The present application embodiment discloses a particle counter measurement method, see Figure 1 As shown, the method includes:

[0045] Step S11: obtaining, by means of a photoelectric detector in a photoelectric sensor, particle scattered light signals of particles in the gas to be measured that pass through the measuring cavity of the photoelectric sensor within a preset collection period, and converting the particle scattered light signals into particle scattered light currents.

[0046] In this embodiment, when the gas to be measured is passed into the measuring cavity of the photoelectric sensor according to a preset collection period, the particles in the gas to be measured are scattered under the irradiation of the laser, and the scattered light is received by a photodetector (such as a photodiode) to obtain a particle scattered light signal, and the above-mentioned particle scattered light signal is further converted into a current signal to obtain a particle scattered light current; wherein, the particle scattered light signal can reflect the size characteristics of the particles.

[0047] Step S12: converting the particle scattered photocurrent into a voltage pulse signal through amplification and filtering processing, and counting the voltage pulse signal through the counting channel of the particle counter to obtain actual channel particle measurement data.

[0048] In this embodiment, a photoelectric detector in a photoelectric sensor is used to obtain a particle scattering light signal of particles in the gas to be measured that passes through the measuring cavity of the photoelectric sensor within a preset collection period, and after converting the particle scattering light signal into a particle scattering photocurrent, the particle scattering photocurrent is sent to an amplifier circuit in a particle counter, and the amplifier circuit amplifies, converts and filters the particle scattering photocurrent, converts the particle scattering photocurrent into a voltage pulse signal, and then inputs the voltage pulse signal into a counter, wherein the counter includes a plurality of comparators and a plurality of counting channels, each of the comparator output ends is connected to a counting channel, and after the voltage pulse signal is compared by the comparator, counting channels of different particle sizes perform particle number statistics according to the amplitude of the voltage pulse signal, and obtain the voltage pulse signal counting result corresponding to each counting channel, that is, the actual channel particle measurement data of the particle counter corresponding to each counting channel.

[0049] Step S13: taking the sum of the differences between the actual channel particle measurement data on all the same counting channels and the system channel noise data value of the particle counter pre-stored locally as the real particle measurement data of the gas to be measured.

[0050] In this embodiment, after the particle scattering photocurrent is converted into a voltage pulse signal through amplification and filtering processing, and the voltage pulse signal is counted through the counting channel of the particle counter to obtain actual channel particle measurement data, the actual channel particle measurement data on the same counting channel is subtracted from the system channel noise data value of the particle counter stored locally, and the sum of all calculation results is used as the real particle measurement data of the gas to be measured.

[0051] In this embodiment, the process of acquiring the system channel noise data value of the particle counter may specifically include: measuring the multiple calibration gases introduced into the particle counter according to the preset acquisition cycle to obtain multiple system channel noise measurement data corresponding to each calibration gas; adding and averaging the system channel noise measurement data of each calibration gas on the same counting channel to obtain the system channel noise data value of the corresponding counting channel. In this embodiment, the multiple calibration gases introduced into the particle counter may be measured according to the preset acquisition cycle to obtain multiple system channel noise measurement data corresponding to each calibration gas, that is, one calibration gas corresponds to multiple system channel noise measurement data, and then the system channel noise measurement data of each calibration gas on the same counting channel are summed and calculated, and the summed result is divided by the number of types of the multiple gases to obtain the system channel noise data value of the corresponding counting channel. Wherein, the calibration gas is a gas with known parameters such as particle size and quantity, and the system channel noise measurement data corresponding to the calibration gas can be obtained according to the difference between the data measured by the calibration gas in the counting channel of the particle counter and the theoretical calculation data of the calibration gas. Specifically, the calibration gas can be selected from clean gas without particles and standard particle gas formed by standard particles. The particle size and gas density of the standard particles can be prepared according to requirements.

[0052] In this embodiment, the sum of the differences between the actual channel particle measurement data on all the same counting channels and the system channel noise data values ​​of the particle counter pre-stored locally is used as the real particle measurement data of the gas to be measured, which may specifically include: respectively calculating the differences between the actual channel particle measurement data on the same counting channel and the system channel noise data values ​​of the particle counter pre-stored locally to obtain the real particle measurement values ​​of each counting channel; calculating the sum of the real particle measurement values ​​of all the counting channels to obtain the real particle measurement data of the gas to be measured. It can be understood that, since the particle counter may include multiple counting channels with different particle sizes, the gas to be measured passing into the particle counter can be measured through each counting channel with different particle sizes, thereby obtaining the actual channel particle measurement data of multiple counting channels corresponding to the gas to be measured, and then respectively calculating the differences between the multiple actual channel particle measurement data of the gas to be measured and the system channel noise data values ​​of the multiple particle counters pre-stored locally, and taking the sum of all the calculated differences as the real particle measurement data of the gas to be measured.

[0053] In this embodiment, the particle counter includes the photoelectric sensor, the amplifier circuit, the counter, the microprocessor and the display terminal; wherein the microprocessor includes a storage module and a data processing module, and the system channel noise data value is stored in the storage module. For details, see Figure 2 As shown, Figure 2 A specific working structure block diagram of a particle counter is shown, which specifically includes: a photoelectric sensor, an amplifier circuit, a counter, a microprocessor and a display terminal; wherein the photoelectric sensor is used to generate a scattered light signal reflecting the particle size characteristics of the particles entering the measurement cavity of the photoelectric sensor and convert it into a photocurrent; the amplifier circuit is connected to the output end of the photoelectric sensor, and is used to amplify, convert and filter the photocurrent output by the photoelectric sensor to obtain a voltage pulse signal; the counter is connected to the output end of the amplifier circuit, and includes a plurality of comparators and counting channels corresponding to the comparators one by one; the microprocessor is connected to the output end of the counter, and includes a storage module and a data processing module, the storage module is used to store the system channel noise data value, and the data processing module is used to calculate the real particle measurement data; the display terminal is connected to the microprocessor, and is used to display the direct and indirect data measured by the particle counter, and can configure the particle counter at the display terminal, and the content of the configuration input includes the system channel noise data value.

[0054] It can be seen that the embodiment of the present application obtains the particle scattering light signal of the particles in the gas to be measured that passes through the measuring cavity of the photoelectric sensor within a preset acquisition period through the photoelectric detector in the photoelectric sensor, and converts the particle scattering light signal into a particle scattering photocurrent, and then converts the particle scattering photocurrent into a voltage pulse signal through amplification and filtering processing, and counts the voltage pulse signal through the counting channel of the particle counter to obtain the actual channel particle measurement data, and then takes the sum of the difference between the actual channel particle measurement data on all the same counting channels and the system channel noise data value of the particle counter pre-stored locally as the real particle measurement data of the gas to be measured. It can be seen that the present application takes the sum of the difference between the actual particle measurement data detected by the particle counter and the system channel noise data value pre-stored in the particle counter as the real particle measurement data of the gas to be measured, which can effectively reduce the system noise of the particle counter and improve the accuracy of the particle counter counting.

[0055] The present application embodiment discloses a specific method for calculating the system channel noise data value of the particle counter, see Figure 3 As shown, the method includes:

[0056] Step S21: measuring the clean gas introduced into the particle counter according to the preset collection period through each counting channel in the particle counter respectively, and obtaining clean gas measurement data of multiple channels.

[0057] In this embodiment, clean gas is first introduced into the particle counter according to a preset collection period, and then the particles of the clean gas are measured respectively through each counting channel of the particle counter to obtain clean gas measurement data of each counting channel of the particle counter. For example, in an application environment, a clean gas with a flow rate of 28.3 L is introduced into a particle counter having 0.1 μm (micrometer), 0.2 μm, 0.3 μm, 0.5 μm, 1 μm, and 5 μm counting channels at a rate of 28.3 L / min, and clean gas channel measurement data s1, s2, s3, s4, s5, and s6 corresponding to each counting channel are obtained, and the s1, s2, s3, s4, s5, and s6 are used as system noise measurement data of the clean gas on each counting channel; wherein s1 is the counting measurement value of the clean gas in the 0.1 μm counting channel, s2 is the counting measurement value of the clean gas in the 0.2 μm counting channel, s3 is the counting measurement value of the clean gas in the 0.3 μm counting channel, s4 is the counting measurement value of the clean gas in the 0.5 μm counting channel, s5 is the counting measurement value of the clean gas in the 1 μm counting channel, and s6 is the counting measurement value of the clean gas in the 5 μm counting channel. Furthermore, the total measurement value of the clean gas can be obtained through the measurement values ​​of each counting channel, and the total measurement value of the clean gas is S=s1+s2+s3+s4+s5+s6.

[0058] Step S22: measuring the standard particle gas introduced into the particle counter according to the preset collection period through each counting channel to obtain multiple channel standard particle measurement data, and calculating the theoretical measurement data of the multiple channel standard particle gases to obtain multiple channel standard particle theoretical data.

[0059] In this embodiment, the clean gas introduced into the particle counter according to the preset collection period is measured respectively through each counting channel in the particle counter. After the clean gas measurement data of multiple channels are obtained, the known particles whose particle diameters meet the counting channel standards are used as standard particles according to the preset collection period, wherein the standard particle gas can be a gas with a known particle concentration per unit volume formed by uniformly mixing standard particles with the above-mentioned clean gas, and then the standard particle gas is introduced into the particle counter, and then the standard particle gas entering each counting channel of the particle counter is measured respectively to obtain multiple channel standard particle measurement data, and the theoretical measurement data of the standard particle gas of the multiple channels are calculated to obtain multiple channel standard particle theoretical data. For example, the standard particle gas is passed into the above-mentioned 6-channel particle counter at a rate of 28.3 L / min for 1 min to obtain the measurement data p1, p2, p3, p4, p5 and p6 of the standard particle gas, and further, the total measurement data P = p1 + p2 + p3 + p4 + p5 + p6 of the standard particle gas can be obtained, and the theoretical data of the standard particles when the gas is passed into the particle counter at a rate of 28.3 L / min for 1 min are calculated to obtain q1, q2, q3, q4, q5 and q6, and the total theoretical data of the standard particles Q = q1 + q2 + q3 + q4 + q5 + q6 can be further obtained.

[0060] Step S23: performing difference calculation on the channel standard particle measurement data and the channel standard particle theoretical data located in the same counting channel respectively, to obtain the channel standard particle system noise data value corresponding to each counting channel.

[0061] In this embodiment, the standard particle gas introduced into the particle counter according to the preset acquisition period is measured through each counting channel to obtain multiple channel standard particle measurement data, and the theoretical measurement data of the multiple channel standard particle gases are calculated. After obtaining the multiple channel standard particle theoretical data, the channel standard particle measurement data and the channel standard particle theoretical data located on the same counting channel are respectively calculated to obtain the corresponding multiple channel standard particle system noise data values. For example, the channel standard particle system noise data value corresponding to the 0.1μm counting channel is obtained by subtracting q1 from p1 measured in the above 6-channel particle counter; the channel standard particle system noise data value corresponding to the 0.2μm counting channel is obtained by subtracting q2 from p2; the channel standard particle system noise data value corresponding to the 0.3μm counting channel is obtained by subtracting q3 from p3; the channel standard particle system noise data value corresponding to the 0.5μm counting channel is obtained by subtracting q4 from p4; the channel standard particle system noise data value corresponding to the 1μm counting channel is obtained by subtracting q5 from p5; and the channel standard particle system noise data value corresponding to the 5μm counting channel is obtained by subtracting q6 from p6.

[0062] Step S24: respectively add the channel standard particle system noise data value and the channel clean gas measurement data located in the same counting channel and take the average to obtain the calibration gas channel noise data value corresponding to each counting channel, and use the calibration gas channel noise data value as the system channel noise data value of the particle counter.

[0063] In this embodiment, the channel standard particle measurement data and the channel standard particle theoretical data located in the same counting channel are respectively calculated for difference, and after obtaining the channel standard particle system noise data value corresponding to each counting channel, the channel standard particle system noise data value and the channel clean gas measurement data located in the same counting channel are respectively added and averaged, thereby obtaining the calibration gas channel noise data value corresponding to each counting channel of the particle counter, and then the calibration gas channel noise data value is used as the system channel noise data value of the particle counter. For example, the channel standard particle system noise data value measured in the above 6-channel particle counter is respectively added to the channel clean gas measurement data of the corresponding counting channel and the average is taken, that is, (p1-q 1+ s1) / 2, (p2-q 2+ s2) / 2, (p3-q 3+ s3) / 2, (p4-q 4+ s4) / 2, (p5-q 5+ s5) / 2, (p6-q 6+ s6) / 2, and (p1-q 1+ s1) / 2+(p2-q 2+s2) / 2+(p3-q 3+ s3) / 2+(p4-q 4+ s4) / 2+(p5-q 5+ s5) / 2+(p6-q 6+ s6) / 2 is taken as the system total noise data value X of the above 6-channel particle counter.

[0064] In this embodiment, the particle counter metering method specifically also includes: respectively calculating the difference between the channel standard particle system noise data value and the channel clean gas measurement data located on the same counting channel, and dividing the difference by the channel clean gas measurement data to obtain the channel system channel noise error value corresponding to each counting channel; calculating the difference between the sum of the system channel noise error values ​​corresponding to each counting channel and the sum of the clean gas measurement data of each channel, and dividing the difference by the sum of the clean gas measurement data of each channel to obtain the total system noise error value; respectively judging whether the system channel noise error value exceeds the preset system noise error coefficient; if the system channel noise error value does not exceed the system noise error coefficient, judging whether the total system noise error value exceeds the system noise error coefficient; if the total system noise error value does not exceed the system noise error coefficient, saving the system channel noise data value to the particle counter. It can be understood that in order to further ensure that the obtained system channel noise data values ​​are obtained under the normal operation of the particle counter system, a system noise error coefficient a needs to be set in advance. The system noise error coefficient a can be set according to the specific situation, including but not limited to ±25%, ±20%, ±15%, ±10%, ±5%, etc. For example, the system noise error coefficient a is set to ±10%. After obtaining the system channel noise data values ​​of the above-mentioned 6-channel particle counter, first determine (p1-q1- Whether (P-QS) / S exceeds ±10% is determined; if (P-Q+S) / S does not exceed ±10%, (P-Q+S) / 2 is used as the total system noise data value of the 6-channel particle counter and saved in the storage module of the 6-channel particle counter.

[0065] For more specific processing procedures of the above steps, reference may be made to the corresponding contents disclosed in the aforementioned embodiments, which will not be repeated here.

[0066] It can be seen that the embodiment of the present application simulates the noise gas existing in the actual system by passing clean gas and standard particle gas into the particle counter, and obtains the system channel noise data value corresponding to each counting channel of the particle counter by calculation. The system channel noise data value can effectively reduce the system noise of the particle counter and improve the counting accuracy of the particle counter.

[0067] Correspondingly, the present application also discloses a particle counter measuring device, see Figure 4 As shown, the device comprises:

[0068] The signal acquisition module 11 is used to acquire the particle scattered light signal of the particles in the gas to be measured passing through the measuring cavity of the photoelectric sensor within a preset acquisition period through the photoelectric detector in the photoelectric sensor, and convert the particle scattered light signal into a particle scattered light current;

[0069] A conversion module 12, used for converting the particle scattered photocurrent into a voltage pulse signal through amplification and filtering processing;

[0070] A counting module 13, used for counting the voltage pulse signal through a counting channel of a particle counter to obtain actual channel particle measurement data;

[0071] The calculation module 14 is used to take the sum of the differences between the actual channel particle measurement data on all the same counting channels and the system channel noise data value of the particle counter pre-stored locally as the real particle measurement data of the gas to be measured.

[0072] Among them, the specific working processes of the above-mentioned modules can refer to the corresponding contents disclosed in the aforementioned embodiments, which will not be repeated here.

[0073] It can be seen that in the embodiment of the present application, the particle scattering light signal of the particles in the gas to be measured that passes through the measuring cavity of the photoelectric sensor within a preset acquisition period is first obtained through the photoelectric detector in the photoelectric sensor, and the particle scattering light signal is converted into a particle scattering photocurrent, and then the particle scattering photocurrent is converted into a voltage pulse signal through amplification and filtering processing, and the voltage pulse signal is counted through the counting channel of the particle counter to obtain the actual channel particle measurement data, and then the sum of the difference between the actual channel particle measurement data on all the same counting channels and the system channel noise data value of the particle counter pre-stored locally is used as the real particle measurement data of the gas to be measured. It can be seen that the embodiment of the present application can effectively reduce the system noise of the particle counter and improve the accuracy of the particle counter counting by taking the difference between the actual particle measurement data detected by the particle counter and the system channel noise data value pre-stored in the particle counter as the real particle measurement data of the gas to be measured.

[0074] In some specific embodiments, the process of obtaining the system channel noise data value of the particle counter may specifically include:

[0075] A first measuring unit is used to measure the multiple calibration gases introduced into the particle counter according to the preset collection period to obtain multiple system channel noise measurement data corresponding to each of the calibration gases;

[0076] The first calculation unit is used to add the system channel noise measurement data of each calibration gas on the same counting channel and take the average value to obtain the system channel noise data value of the corresponding counting channel.

[0077] In some specific embodiments, the calculation module 14 may specifically include:

[0078] A first difference calculation unit is used to respectively calculate the difference between the actual channel particle measurement data on the same counting channel and the system channel noise data value of the particle counter pre-stored locally, so as to obtain the real particle measurement value of each counting channel;

[0079] The summing calculation unit is used to calculate the sum of the real particle measurement values ​​of all the counting channels to obtain the real particle measurement data of the gas to be measured.

[0080] In some specific embodiments, the process of obtaining the system channel noise data value of the particle counter may specifically include:

[0081] A second measuring unit is used to measure the clean gas introduced into the particle counter according to the preset collection period through each counting channel in the particle counter, so as to obtain clean gas measurement data of multiple channels;

[0082] a third measuring unit, configured to measure the standard particle gas introduced into the particle counter according to the preset collection period through each counting channel to obtain a plurality of channel standard particle measurement data, and calculate a plurality of theoretical measurement data of the channel standard particle gas to obtain a plurality of channel standard particle theoretical data;

[0083] A second difference calculation unit is used to perform difference calculation on the channel standard particle measurement data and the channel standard particle theoretical data located in the same counting channel, so as to obtain the channel standard particle system noise data value corresponding to each counting channel;

[0084] The second calculation unit is used to add the channel standard particle system noise data value and the channel clean gas measurement data located in the same counting channel and take the average, so as to obtain the calibration gas channel noise data value corresponding to each counting channel, and use the calibration gas channel noise data value as the system channel noise data value of the particle counter.

[0085] In some specific embodiments, the particle counter metering device may further include:

[0086] A third calculation unit is used to respectively calculate the difference between the channel standard particle system noise data value and the channel clean gas measurement data located on the same counting channel, and divide the difference by the channel clean gas measurement data to obtain the system channel noise error value corresponding to each counting channel;

[0087] a fourth calculation unit, configured to calculate a difference between a sum of the system channel noise error values ​​corresponding to each counting channel and a sum of the clean gas measurement data of each channel, and divide the difference by the sum of the clean gas measurement data of each channel to obtain a total system noise error value;

[0088] A first judging unit, used to respectively judge whether the system channel noise error value exceeds a preset system noise error coefficient;

[0089] A second judgment unit, configured to judge whether the system total noise error value exceeds the system noise error coefficient if the system channel noise error value does not exceed the system noise error coefficient;

[0090] A data storage unit is used to store the system channel noise data value to the particle counter if the system total noise error value does not exceed the system noise error coefficient.

[0091] In some specific embodiments, the particle counter includes the photoelectric sensor, the amplifier circuit, the counter, the microprocessor and the display terminal; wherein the microprocessor includes a storage module and a data processing module, and the system channel noise data value is stored in the storage module.

[0092] In some specific embodiments, the particle counter metering device may further include:

[0093] A data display unit is used to display the actual channel particle measurement data, the system channel noise data value and the real particle measurement data through the display end of the particle counter, and to input configuration to the particle counter through the display end; wherein the content of the configuration input includes the system channel noise data value.

[0094] Furthermore, the present application also discloses an electronic device. Figure 5 This is a structural diagram of an electronic device 20 according to an exemplary embodiment. The content in the diagram cannot be regarded as any limitation on the scope of use of the present application.

[0095] Figure 5 A schematic diagram of the structure of an electronic device 20 provided in an embodiment of the present application. The electronic device 20 may specifically include: at least one processor 21, at least one memory 22, a power supply 23, a communication interface 24, an input / output interface 25, and a communication bus 26. The memory 22 is used to store a computer program, which is loaded and executed by the processor 21 to implement the relevant steps in the particle counter measurement method disclosed in any of the aforementioned embodiments. In addition, the electronic device 20 in this embodiment may specifically be an electronic computer.

[0096] In this embodiment, the power supply 23 is used to provide working voltage for each hardware device on the electronic device 20; the communication interface 24 can create a data transmission channel between the electronic device 20 and the external device, and the communication protocol it follows is any communication protocol that can be applied to the technical solution of the present application, and is not specifically limited here; the input and output interface 25 is used to obtain external input data or output data to the outside world, and its specific interface type can be selected according to specific application needs and is not specifically limited here.

[0097] In addition, the memory 22, as a carrier for storing resources, can be a read-only memory, a random access memory, a disk or an optical disk, etc. The resources stored thereon can include an operating system 221, a computer program 222, etc., and the storage method can be temporary storage or permanent storage.

[0098] The operating system 221 is used to manage and control the hardware devices and computer program 222 on the electronic device 20, and can be Windows Server, Netware, Unix, Linux, etc. In addition to including a computer program that can be used to complete the particle counter measurement method performed by the electronic device 20 disclosed in any of the aforementioned embodiments, the computer program 222 can further include a computer program that can be used to complete other specific tasks.

[0099] Furthermore, the present application also discloses a computer-readable storage medium for storing a computer program; wherein, when the computer program is executed by a processor, the particle counter measurement method disclosed above is implemented. The specific steps of the method can refer to the corresponding contents disclosed in the above embodiments, and will not be repeated here.

[0100] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0101] Professionals may further appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the interchangeability of hardware and software, the composition and steps of each example have been generally described in the above description according to function. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians may use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of this application.

[0102] The steps of the method or algorithm described in conjunction with the embodiments disclosed herein may be implemented directly using hardware, a software module executed by a processor, or a combination of the two. The software module may be placed in a random access memory (RAM), a memory, a read-only memory (ROM), an electrically programmable ROM, an electrically erasable programmable ROM, a register, a hard disk, a removable disk, a CD-ROM, or any other form of storage medium known in the art.

[0103] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0104] The above is a detailed introduction to a particle counter measurement method, device, equipment and storage medium provided by the present application. Specific examples are used in this article to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method of the present application and its core idea; at the same time, for general technical personnel in this field, according to the idea of ​​the present application, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A particle counter measurement method, characterized in that: include: Acquiring, by means of a photoelectric detector in the photoelectric sensor, a particle scattered light signal of particles in the gas to be measured that passes through the measuring cavity of the photoelectric sensor within a preset collection period, and converting the particle scattered light signal into a particle scattered light current; The particle scattered photocurrent is converted into a voltage pulse signal through amplification and filtering, and the voltage pulse signal is counted through a counting channel of a particle counter to obtain actual channel particle measurement data; The sum of the differences between the actual channel particle measurement data on all the same counting channels and the system channel noise data value of the particle counter pre-stored locally is used as the real particle measurement data of the gas to be measured; The process of obtaining the system channel noise data value of the particle counter includes: Measuring the multiple calibration gases introduced into the particle counter respectively according to the preset acquisition period to obtain multiple system channel noise measurement data corresponding to each of the calibration gases; Adding the system channel noise measurement data of each calibration gas on the same counting channel and taking the average value to obtain the system channel noise data value of the corresponding counting channel; The process of obtaining the system channel noise data value of the particle counter includes: The clean gas introduced into the particle counter according to the preset collection period is measured respectively through each counting channel in the particle counter to obtain clean gas measurement data of multiple channels; The standard particle gas introduced into the particle counter according to the preset collection period is measured through each counting channel to obtain a plurality of channel standard particle measurement data, and the theoretical measurement data of the plurality of channel standard particle gases are calculated to obtain a plurality of channel standard particle theoretical data; The channel standard particle measurement data and the channel standard particle theoretical data located in the same counting channel are respectively calculated to obtain the channel standard particle system noise data value corresponding to each counting channel; The channel standard particle system noise data value and the channel clean gas measurement data located in the same counting channel are added and averaged to obtain the calibration gas channel noise data value corresponding to each counting channel, and the calibration gas channel noise data value is used as the system channel noise data value of the particle counter.

2. The particle counter measurement method according to claim 1, characterized in that: The method of taking the sum of the differences between the actual channel particle measurement data on all the same counting channels and the system channel noise data value of the particle counter pre-stored locally as the real particle measurement data of the gas to be measured includes: Calculate the difference between the actual channel particle measurement data on the same counting channel and the system channel noise data value of the particle counter pre-stored locally to obtain the real particle measurement value of each counting channel; The sum of the real particle measurement values ​​of all counting channels is calculated to obtain the real particle measurement data of the gas to be measured.

3. The particle counter measurement method according to claim 1, characterized in that: Also includes: Calculate the difference between the channel standard particle system noise data value and the channel clean gas measurement data located on the same counting channel respectively, and divide the difference by the channel clean gas measurement data to obtain the system channel noise error value corresponding to each counting channel; Calculate the difference between the sum of the system channel noise error values ​​corresponding to each counting channel and the sum of the clean gas measurement data of each channel, and divide the difference by the sum of the clean gas measurement data of each channel to obtain a total system noise error value; respectively determining whether the system channel noise error value exceeds a preset system noise error coefficient, and if the system channel noise error value does not exceed the system noise error coefficient, determining whether the system total noise error value exceeds the system noise error coefficient; If the system total noise error value does not exceed the system noise error coefficient, the system channel noise data value is saved to the particle counter.

4. The particle counter measurement method according to claim 1, characterized in that: The particle counter includes the photoelectric sensor, an amplifier circuit, a counter, a microprocessor and a display terminal; wherein the microprocessor includes a storage module and a data processing module, and the system channel noise data value is stored in the storage module.

5. The particle counter measurement method according to any one of claims 1 to 4, characterized in that: Also includes: The actual channel particle measurement data, the system channel noise data value and the real particle measurement data are displayed through the display end of the particle counter, and the configuration input of the particle counter is performed through the display end; wherein the content of the configuration input includes the system channel noise data value.

6. A particle counter measuring device, characterized in that: include: A signal acquisition module, used for acquiring, through a photoelectric detector in a photoelectric sensor, a particle scattered light signal of particles in the gas to be measured that passes through a measuring cavity of the photoelectric sensor within a preset acquisition period, and converting the particle scattered light signal into a particle scattered light current; A conversion module, used for converting the particle scattered photocurrent into a voltage pulse signal through amplification and filtering processing; A counting module, used for counting the voltage pulse signal through a counting channel of a particle counter to obtain actual channel particle measurement data; A calculation module, used for taking the sum of the differences between the actual channel particle measurement data on all the same counting channels and the system channel noise data value of the particle counter pre-stored locally as the real particle measurement data of the gas to be measured; The process of obtaining the system channel noise data value of the particle counter specifically includes: A first measuring unit, used to measure the multiple calibration gases introduced into the particle counter according to the preset collection period, so as to obtain multiple system channel noise measurement data corresponding to each of the calibration gases; A first calculation unit, used for adding and averaging the system channel noise measurement data of each calibration gas on the same counting channel to obtain a system channel noise data value of the corresponding counting channel; The process of obtaining the system channel noise data value of the particle counter specifically includes: A second measuring unit is used to measure the clean gas introduced into the particle counter according to the preset collection period through each counting channel in the particle counter, so as to obtain clean gas measurement data of multiple channels; a third measuring unit, configured to measure the standard particle gas introduced into the particle counter according to the preset collection period through each counting channel to obtain a plurality of channel standard particle measurement data, and calculate a plurality of theoretical measurement data of the channel standard particle gas to obtain a plurality of channel standard particle theoretical data; A second difference calculation unit is used to perform difference calculation on the channel standard particle measurement data and the channel standard particle theoretical data located in the same counting channel, so as to obtain the channel standard particle system noise data value corresponding to each counting channel; The second calculation unit is used to add the channel standard particle system noise data value and the channel clean gas measurement data located in the same counting channel and take the average, so as to obtain the calibration gas channel noise data value corresponding to each counting channel, and use the calibration gas channel noise data value as the system channel noise data value of the particle counter.

7. An electronic device, characterized in that: It comprises a processor and a memory; wherein, when the processor executes the computer program stored in the memory, the particle counter measurement method according to any one of claims 1 to 5 is implemented.

8. A computer-readable storage medium, characterized in that: Used to store computer programs; wherein, when the computer program is executed by a processor, the particle counter measurement method according to any one of claims 1 to 5 is implemented.

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