A moving mechanism and a die bonding swing arm for positioning an object

Abstract

The application provides a moving mechanism and a die bonding swing arm for positioning an object. The moving mechanism comprises a first driving device, a carrier platform, a second driving device and a third driving device. The first driving device comprises a first mover and a first stator. The first mover is movable relative to the first stator along a first direction. The first mover and the first stator are connected with the second driving device. The second driving device drives the first mover and the first stator to move along a second direction. The third driving device drives the first mover to move along a third direction. The first direction, the second direction and the third direction are perpendicular to each other. The carrier platform is connected with the first mover. The die bonding swing arm comprises the moving mechanism. The application can improve the moving speed of the carrier platform and increase the moving distance of the carrier platform in a preset direction.

Description

Technical Field

[0001] This invention relates to the field of moving mechanisms, and more specifically to a moving mechanism for positioning an object and a die-bonded swing arm. Background Technology

[0002] Die bonding typically involves using a dispensing machine to dispense adhesive onto the wafer mounting position on a wafer tray. The dispensing machine then moves to the bonding position, where a die-bonding arm picks up the wafer from the supply platform, rotates it, and places it onto the tray to achieve die bonding. When the die-bonding arm places the wafer onto the tray, due to the limited travel distance of the arm itself, after arranging multiple wafers in a row, a conveyor mechanism beneath the tray is needed to move the tray so that the position of the wafer to be placed is within the working range of the die-bonding arm, facilitating subsequent wafer placement. Because of the small size of the wafers, the corresponding single travel distance of the tray is also very small, thus requiring high positional accuracy for the tray. Relying solely on a conveyor mechanism to move the tray is unlikely to achieve this level of precision. Summary of the Invention

[0003] The first objective of this invention is to provide a moving mechanism for positioning objects that can increase the moving speed and the moving distance in a preset direction.

[0004] A second objective of the present invention is to provide a die-bonding swing arm that includes the above-described moving mechanism.

[0005] To achieve the aforementioned first objective, the present invention provides a moving mechanism for positioning an object, comprising a first driving device, a carrying platform, a second driving device, and a third driving device. The first driving device includes a first moving element and a first stator. The first moving element can move relative to the first stator along a first direction. Both the first moving element and the first stator are connected to the second driving device. The second driving device drives the first moving element and the first stator to move along a second direction. The third driving device drives the first moving element to move along a third direction. The first direction, the second direction, and the third direction intersect each other. The carrying platform is connected to the first moving element.

[0006] As can be seen from the above scheme, by setting a first driving device, a second driving device, and a third driving device to drive the first moving part to move along the first direction, the second direction, and the third direction, respectively; by setting the first stator to be connected to the second driving device to drive the first stator to move along the second direction, the first stator and the first moving part can move synchronously along the second direction, which is beneficial to increasing the moving distance of the first moving part in the second direction; in this embodiment, the first driving device, the second driving device, and the third driving device all use the cooperation of the moving part and the stator to achieve the driving effect. Since the moving part and the stator do not directly contact each other, that is, the load of the stator will not be transferred to the moving part, which is beneficial to reduce the load and friction of the moving part and improve the moving speed of the moving part and the loading platform.

[0007] A further option is that the first direction, the second direction, and the third direction are perpendicular to each other, or the first direction is perpendicular to the second direction and the third direction is perpendicular to the first direction.

[0008] A further option is that, in the second direction, the first moving part and the first stator can move synchronously, and a preset distance is set between the first moving part and the first stator. The moving distance of the first moving part in the second direction is greater than or equal to the preset distance.

[0009] As can be seen from the above scheme, the movement distance of the first mover is no longer limited by the preset distance between the first mover and the first stator.

[0010] A further proposed solution is that the first stator extends along a first direction, and the first mover is disposed adjacent to the first stator at least at one end.

[0011] A further embodiment is that the second drive device includes a second mover and a second stator, the second stator extending along a second direction, and the second mover being arranged adjacent to the second stator at least at one end, and the second mover being able to move relative to the second stator along the second direction.

[0012] A further proposed solution is that the second driving device has a first support and a second support at one end of the second mover. The first support is fixedly connected to the first stator, and the second support drives the first mover to move along the second direction.

[0013] As can be seen from the above scheme, by setting up a first support and a second support to drive the first stator and the first mover to move respectively, it has the advantages of simple structure and convenient operation.

[0014] A further embodiment is that the third drive unit includes a third mover and a third stator, the third stator extends along a third direction, at least one end of the third mover is arranged adjacent to the third stator, and the third mover can move relative to the third stator along a third direction.

[0015] A further embodiment is that the first driving device is connected to a first movable frame at one end of the first moving part; the third driving device is connected to a second movable frame at one end of the third moving part, the first movable frame is slidably connected to the second movable frame along a first direction, and the second support is slidably connected to the second movable frame along a third direction.

[0016] A further embodiment is that a first guide fixing frame is provided between the second drive device and the first stator, the first guide fixing frame extends along the second direction, and the first bracket is slidably connected to the first guide fixing frame; a second guide fixing frame is also provided between the second drive device and the second movable frame, the second guide fixing frame extends along the second direction, and the second bracket is slidably connected to the second guide fixing frame.

[0017] A further option is that the second drive device and the third drive device are both located on the same side of the first drive device, and the third drive device is located between the first bracket and the second bracket, or the third drive device is located on the same side of the first bracket and the second bracket.

[0018] As can be seen from the above scheme, by setting both the second and third drive devices on the same side of the first drive device, it is beneficial to reduce the size of the moving mechanism itself.

[0019] To achieve the second objective mentioned above, the present invention provides a die-bonding swing arm, including a rotating arm, a wafer pick-up assembly, and the aforementioned moving mechanism. The moving mechanism is disposed on the rotating arm, and the wafer pick-up assembly is disposed on the carrying platform of the moving mechanism.

[0020] As can be seen from the above scheme, applying the moving mechanism to the die bonding arm of the die bonding machine is beneficial to increasing the working range of the wafer pick-up assembly. It is convenient that the die bonding arm places multiple rows of wafers on the support to form a rectangular array before the support moves once. On the one hand, this helps to reduce the number of times the support moves and improve the efficiency of wafer placement. On the other hand, the moving distance of the support is greater than that in the prior art, which facilitates the positioning of the support itself and helps to improve its positioning accuracy. Attached Figure Description

[0021] Figure 1 This is a structural diagram of the first embodiment of the moving mechanism of the present invention.

[0022] Figure 2 This is a structural diagram of the second embodiment of the moving mechanism of the present invention.

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments. Detailed Implementation

[0024] First embodiment of the mobile mechanism:

[0025] See Figure 1 This embodiment provides a moving mechanism for positioning objects, including a first driving device, a loading platform 3, a second driving device, and a third driving device. The first driving device, the second driving device, and the third driving device are equivalent to linear motors.

[0026] The first driving device includes a first mover 1 and a first stator 2. The first mover 1 is movable relative to the first stator 2 along a first direction. The first mover 1 is configured as a coil support with multiple coils wound around it, and the first stator 2 is configured as a magnet support with multiple permanent magnets; alternatively, the first mover 1 is configured as a magnet support with multiple permanent magnets, and the first stator 2 is configured as a coil support with multiple coils wound around it. When the coils on the coil support are energized, they generate an electromagnetic field. The electromagnetic field interacts with the magnet support to drive the first mover 1 to move relative to the first stator 2 along the first direction.

[0027] Both the first mover 1 and the first stator 2 are connected to the second driving device, which drives the first mover 1 and the first stator 2 to move along the second direction. The third driving device drives the first mover 1 to move along the third direction, and the first direction, the second direction, and the third direction intersect each other. Specifically, the first direction, the second direction, and the third direction are perpendicular to each other, or the first direction is perpendicular to the second direction and also perpendicular to the third direction. In this case, the second direction and the third direction may be perpendicular or not perpendicular. In this embodiment, it is preferred that the first direction, the second direction, and the third direction are perpendicular to each other. The loading platform 3 is connected to the first mover 1 to enable the loading platform 3 to move upwards in the first direction, the second direction, and the third direction. For ease of explanation, in this embodiment, the first direction is defined as the Z direction, the second direction as the X direction, and the third direction as the Y direction. Figure 1 The direction perpendicular to the paper.

[0028] In the X direction, the first mover 1 and the first stator 2 move synchronously. The first stator 2 has a U-shaped structure and a first mounting groove 21 is formed inside the first stator 2. The first mounting groove 21 extends along the Z direction and has a downward-facing opening. One end of the first mover 1 is parallel to the first mounting groove 21, and the other end of the first mover 1 protrudes out of the first mounting groove 21. The loading platform 3 is connected to the end of the first mover 1 that protrudes out of the first mounting groove 21.

[0029] In the X direction, the two side surfaces of the first moving element 1 are arranged parallel to and adjacent to the groove wall of the first mounting groove 21, and a first preset distance is provided between the surface of the first moving element 1 and the groove wall of the first mounting groove 21. The moving distance of the first moving element 1 and the first stator 2 in the X direction is greater than or equal to the first preset distance, that is, the moving distance of the first moving element 1 and the first stator 2 in the X direction is not affected by the first preset distance.

[0030] The second driving device includes a second mover 4 and a second stator 5. The second mover 4 is movable relative to the second stator 5 along the X-direction. The second mover 4 is configured as a coil support with multiple coils wound around it, and the second stator 5 is configured as a magnet support with multiple permanent magnets, or the second mover 4 is configured as a magnet support with multiple permanent magnets, and the second stator 5 is configured as a coil support with multiple coils wound around it. When the coils on the coil support are energized, they generate an electromagnetic field. The electromagnetic field interacts with the magnet support, driving the second mover 4 to move relative to the second stator 5 along the X-direction. The second stator 5 is arranged along the X-direction and has a "U"-shaped structure. A second mounting groove 51 is formed inside the second stator 5, extending along the X-direction. The end of the second mounting groove 51 facing the first stator 2 has a second opening, or the end of the second mounting groove 51 facing away from the first stator 2 has a second opening. In this embodiment, the former is preferred. One end of the second moving part 4 is inserted parallel to the second mounting groove 51, and the two side groove walls of the second moving part 4 are arranged parallel to and adjacent to the groove wall of the second mounting groove 51 respectively; the other end of the second moving part 4 protrudes out of the second mounting groove 51.

[0031] The second drive device has a first bracket 6 and a second bracket 7 at one end of the second mover 4 that protrudes from the second mounting groove 51. The first bracket 6 and the second bracket 7 are respectively connected to the two sides of the second mover 4. The first bracket 6 is directly fixed to the first stator 2, and the second bracket 7 is used to drive the first mover 1 to move along the X direction.

[0032] The third driving device includes a third mover 8 and a third stator 9. The third mover 8 is movable relative to the third stator 9 along the Y-direction. The third stator 9 extends along the Y-direction, that is, the third stator 9 is perpendicular to the extension direction of the first stator 2, or the third stator 9 is parallel to the extension direction of the first stator 2; the former is preferred in this embodiment. The third mover 8 is configured as a coil support with multiple coils wound around it, and the third stator 9 is configured as a magnet support with multiple permanent magnets, or the third mover 8 is configured as a magnet support with multiple permanent magnets, and the third stator 9 is configured as a coil support with multiple coils wound around it. When the coils on the coil support are energized, they generate an electromagnetic field. The electromagnetic field interacts with the magnet support, driving the third mover 8 to move relative to the third stator 9 along the Y-direction. The third stator 9 is designed with a "U" shape. A third mounting groove 91 is provided inside the third stator 9. The third mounting groove 91 extends along the Y direction and has a second slot. One end of the third mover 8 is inserted into the third mounting groove 91 in parallel. The two side surfaces of the third mover 8 are arranged parallel to and adjacent to the groove wall of the third mounting groove 91. The other end of the third mover 8 protrudes out of the third mounting groove 91.

[0033] The first drive device has a first moving frame 12 at one end of the first mover 1 that protrudes from the first mounting groove 21. The first moving frame 12 and the loading platform 3 are respectively located on both sides of the first mover 1.

[0034] The third drive device has a second movable frame 13 at one end of the third mover 8 that protrudes from the third mounting groove 91. The second movable frame 13 is located between the first movable frame 12 and the second support 7, and extends along the Z direction. Specifically, the first movable frame 12 is slidably connected to the first side of the second movable frame 13 along the Z direction, and one end of the second support 7 is slidably connected to the second side of the second movable frame 13 along the Y direction, so that the second mover 4 can drive the first mover 1 to move along the X direction, and the third mover 8 can drive the first mover 1 to move along the Y direction.

[0035] To ensure that the first support 6 can slide accurately along the X-direction, a first guide fixing frame 10 is also provided between the second mover 4 and the first stator 2. The first guide fixing frame 10 extends along the X-direction, and the first support 6 is slidably connected to the first guide fixing frame 10. The first guide fixing frame 10 is preferably a first guide rail, and a first slider is provided on the first support 6, which is connected to the first guide rail.

[0036] To ensure that the second support 7 can slide accurately along the X-direction, a second guide frame 11 is also provided between the second drive device and the second movable frame 13. The second guide frame 11 extends along the X-direction, and the second support 7 is slidably connected to the second guide frame 11. The second guide frame 11 is preferably a second guide rail, and a second slider is provided on the second support 7, which is connected to the second guide rail.

[0037] In this embodiment, the second driving device and the third driving device are both located on the same side of the first driving device, and the third driving device is located between the first bracket 6 and the second bracket 7. Alternatively, the third driving device is located on the same side of the first bracket 6 and the second bracket 7. In this embodiment, the former is preferred to reduce the volume of the moving mechanism.

[0038] In this embodiment, the first driving device, the second driving device and the third driving device all use the cooperation of the mover and the stator to achieve the driving effect. Since the mover and the stator do not directly contact each other, that is, the load of the stator will not be transferred to the mover, which helps to reduce the load and friction of the mover and improve the moving speed of the mover and the loading platform 3.

[0039] Second embodiment of the mobile mechanism:

[0040] See Figure 2 Based on the first embodiment of the moving mechanism described above, the first stator 2a, the second stator 5a and the third stator 9a of this embodiment can be appropriately modified.

[0041] The first stator 2a is a flat plate structure extending along the Z-direction. The first end of the first mover 1 is parallel to and adjacent to the first stator 2a. There is a first preset distance between the surface of the first end of the first mover 1 and the surface of the first stator 2a, which is sufficient to allow the first mover 1 to move relative to the first stator 2a along the Z-direction. The second end of the first mover 1 extends beyond the end of the first stator 2a, and the loading platform 3 is connected to the second end of the first mover 1. In this embodiment, both ends of the first mover 1 are on the same straight line. In other embodiments, the second end of the first mover 1 may intersect with or be parallel to its first end.

[0042] The second stator 5a is a flat plate structure extending along the X direction. The first end of the second mover 4 is parallel to and adjacent to the second stator 5a. There is a second preset distance between the second end surface of the second mover 4 and the surface of the second stator 5a. This second preset distance is designed to allow the second mover 4 to move relative to the second stator 5a along the X direction. The second end of the second mover 4 extends beyond the end of the second stator 5a and is used to connect with the first bracket 6 and the second bracket 7, respectively.

[0043] The third stator 9a is a flat plate structure, extending along the Y direction, and is either perpendicular to or parallel to the first stator 2a. The first end of the third mover 8 is parallel to and adjacent to the third mover 8. A third preset distance exists between the second end surface of the third mover 8 and the surface of the third stator 9a, sufficient to allow the third mover 8 to move relative to the third stator 9a along the Y direction. The second end of the third mover 8 extends beyond the end of the third stator 9a and is used to connect with the second moving frame 13.

[0044] The first and second embodiments of the moving mechanism described above are only two feasible implementation methods. In other embodiments, the stator with a "U" shape and the stator with a flat plate shape can be set in different driving devices in the same embodiment to drive the platform to move along the X / Y / Z directions, which will not be described in detail here.

[0045] Example of a die-bonding rocker arm:

[0046] This embodiment also provides a die-bonding swing arm for a die-bonding machine. The die-bonding machine includes a die-supply platform, a conveying mechanism, a bracket, and a die-bonding swing arm. The bracket is mounted on the conveying mechanism, which drives the bracket to move along the X-axis. A die-bonding position is provided on the bracket. The first end of the die-bonding swing arm can move back and forth between the die-bonding position and the die-supply platform.

[0047] The die-bonding arm includes a rotating arm, a wafer pick-up assembly, and a moving mechanism as described in the above embodiment. The first end of the rotating arm can rotate around its second end. The moving mechanism is disposed on the first end of the rotating arm, and the wafer pick-up assembly is disposed on the carrying platform of the moving mechanism. During the rotation of the rotating arm and the moving mechanism, the moving mechanism drives the wafer pick-up assembly to move in the X / Y / Z directions to realize wafer pick-up and wafer placement operations.

[0048] In this embodiment, the moving mechanism is applied to the die bonding arm of the die bonding machine, which helps to increase the working range of the wafer pick-up assembly in the X direction. This allows the die bonding arm to place multiple rows of wafers on the carrier to form a rectangular array before the carrier moves once in the X direction. On the one hand, this increases the single movement distance of the carrier, reduces the number of times the carrier moves, and improves the efficiency of wafer placement. On the other hand, the single movement distance of the carrier is larger than that in the prior art, which facilitates the positioning of the carrier itself and helps to improve its positioning accuracy.

[0049] In this embodiment, the bracket moves along the X-axis, which is consistent with the direction of the movement of the platform in the moving mechanism, which is beneficial for coordinating the placement of the wafer.

[0050] In other embodiments, the bracket can move along the Y or Z direction. In this case, the movement distance of the platform in the Y or Z direction can be increased by the above structure and principle to match the placement of the wafer. This will not be described in detail here.

[0051] In summary, the present invention uses a first driving device, a second driving device, and a third driving device to drive the first moving part to move along the first direction, the second direction, and the third direction; and connects the first stator to the second driving device to drive the first stator to move along the second direction, so that the first stator and the first moving part can move synchronously along the second direction, which is beneficial to increasing the moving distance of the first moving part in the second direction.

[0052] Finally, it should be emphasized that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A movement mechanism for positioning an object, characterized by: The moving mechanism comprises a first driving device, a carrier platform, a second driving device and a third driving device, the first driving device comprises a first mover and a first stator, the first mover is movable relative to the first stator along a first direction, the first mover and the first stator are connected with the second driving device, the second driving device drives the first mover and the first stator to move along a second direction, the third driving device drives the first mover to move along a third direction, the first direction, the second direction and the third direction intersect with each other in pairs; The second driving device comprises a second mover and a second stator, the second mover is movable relative to the second stator along a second direction, the second driving device is provided with a first support and a second support, the first support is fixedly connected with the first stator, the second support drives the first mover to move along the second direction, a first guide fixed frame is further arranged between the second driving device and the first stator, the first guide fixed frame extends along the second direction, and the first support is in sliding connection with the first guide fixed frame; The carrier platform is connected with the first mover.

2. The moving mechanism according to claim 1, wherein: The first direction, the second direction and the third direction are perpendicular to each other, or the first direction is perpendicular to the second direction, and the first direction is perpendicular to the third direction.

3. The moving mechanism according to claim 1, wherein: In the second direction, the first mover and the first stator move synchronously, a preset distance is arranged between the first mover and the first stator, and the moving distance of the first mover in the second direction is greater than or equal to the preset distance.

4. The moving mechanism according to claim 3, wherein: The first stator extends along the first direction, and at least one end of the first mover is arranged adjacent to the first stator.

5. The moving mechanism according to claim 1, wherein: The second stator extends along the second direction, and at least one end of the second mover is arranged adjacent to the second stator.

6. The moving mechanism according to claim 1, wherein: The third driving device comprises a third mover and a third stator, the third stator extends along the third direction, at least one end of the third mover is arranged adjacent to the third stator, and the third mover is movable relative to the third stator along the third direction.

7. The moving mechanism according to claim 6, wherein: The first driving device is connected with a first moving frame at one end of the first mover; The third driving device is connected with a second moving frame at one end of the third mover, the first moving frame is in sliding connection with the second moving frame along the first direction, and the second support is in sliding connection with the second moving frame along the third direction.

8. The moving mechanism according to claim 7, wherein: A second guide fixed frame is further arranged between the second driving device and the second moving frame, the second guide fixed frame extends along the second direction, and the second support is in sliding connection with the second guide fixed frame.

9. The moving mechanism according to claim 1, wherein: The second driving device and the third driving device are arranged on the same side of the first driving device, and the third driving device is arranged between the first support and the second support, or the third driving device is arranged on the same side of the first support and the second support.

10. A die bonder swing arm characterized by: The moving mechanism according to any one of claims 1 to 9 is arranged on the rotating arm, and the wafer taking assembly is arranged on the object table of the moving mechanism.

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