A mobile platform and a die bonder swing arm for positioning an object

Abstract

The application provides a mobile platform and a die bonding swing arm for positioning an object. The mobile platform comprises a first driving device, a second driving device, a third driving device, a carrier platform and a fourth driving device. The first driving device comprises a first mover and a first stator. The first mover is movable relative to the first stator along a first direction. The first mover is connected with the second driving device and the third driving device respectively. The second driving device drives the first mover to move along a second direction. The third driving device drives the first mover to move along a third direction. The first direction, the second direction and the third direction intersect with each other. The first mover is connected with the carrier platform. The first stator is connected with the fourth driving device. The fourth driving device drives the first stator to move along the third direction. The die bonding swing arm comprises the mobile platform. The application can improve the moving speed of the carrier platform and increase the moving distance of the carrier platform in a preset direction.

Description

Technical Field

[0001] This invention relates to the field of mobile platforms, and more specifically to a mobile platform for positioning objects and a die-bonding swing arm. Background Technology

[0002] Die bonding typically involves using a dispensing machine to dispense adhesive onto the wafer mounting position on a support. The dispensing machine then moves to the bonding position, where a die-bonding arm picks up the wafer from the supply platform, rotates it, and places it onto the support to achieve die bonding. When placing the wafer onto the support, due to the limited travel distance of the die-bonding arm itself, after arranging multiple wafers in a row, a conveyor mechanism beneath the support needs to move the support so that the position of the wafer to be placed on the support is within the working range of the die-bonding arm, facilitating subsequent wafer placement. Because of the small size of the wafer, the corresponding travel distance of the support is also very small, thus requiring high positional accuracy for the support. Relying solely on the conveyor mechanism to move the support is unlikely to achieve this accuracy. Summary of the Invention

[0003] The first objective of this invention is to provide a mobile platform for positioning objects that can increase the moving speed and the moving distance in a preset direction.

[0004] A second objective of the present invention is to provide a die-bonding swing arm comprising the aforementioned moving platform.

[0005] To achieve the aforementioned first objective, the present invention provides a mobile platform for positioning objects, comprising a first driving device, a second driving device, a third driving device, a loading platform, and a fourth driving device. The first driving device includes a first moving element and a first stator. The first moving element is movable relative to the first stator along a first direction. The first moving element is connected to both the second and third driving devices. The second driving device drives the first moving element to move along a second direction, and the third driving device drives the first moving element to move along a third direction. The first, second, and third directions intersect each other. The first moving element is connected to the loading platform, and the first stator is connected to the fourth driving device. The fourth driving device drives the first stator to move along a third direction.

[0006] As can be seen from the above scheme, by setting a first driving device, a second driving device, and a third driving device to drive the first moving part to move along the first direction, the second direction, and the third direction; by setting a fourth driving device to drive the first stator to move along the third direction, the first stator and the first moving part can move synchronously along the third direction, which is beneficial to increasing the moving distance of the first moving part in the third direction; in this embodiment, the first driving device, the second driving device, and the third driving device all use the cooperation of the moving part and the stator to achieve the driving effect. Since the moving part and the stator do not directly contact each other, that is, the load of the stator will not be transferred to the moving part, which is beneficial to reduce the load and friction of the moving part and improve the moving speed of the moving part and the loading platform.

[0007] A further option is that the first direction, the second direction, and the third direction are perpendicular to each other, or the first direction is perpendicular to the second direction and the third direction is perpendicular to the first direction.

[0008] A further proposed solution is that, in the third direction, the first moving part and the first stator can move synchronously, and a preset gap is provided between the first moving part and the first stator, and the moving distance of the first moving part is greater than or equal to the preset gap.

[0009] As can be seen from the above scheme, the moving distance of the first mover is no longer limited by the preset gap between the first mover and the first stator.

[0010] A further proposed solution is that, in the direction of the third party, the first moving part can also move relative to the first stator.

[0011] As can be seen from the above scheme, by setting the first mover to move relative to the first stator, it is beneficial to further increase the moving distance of the first mover in the third direction.

[0012] A further embodiment is that a guide moving frame and a guide fixing seat are provided between the fourth drive device and the first stator. The guide fixing seat extends along a third direction, and the guide moving frame is slidably mounted on the guide fixing seat. The guide moving frame is connected to the fourth drive device and the first stator respectively.

[0013] A further option is to extend along the first direction, with at least one end of the first mover adjacent to the first stator.

[0014] A further embodiment is that the second driving device includes a second mover and a second stator, the second stator extends along a second direction, at least one end of the second mover is disposed adjacent to the second stator, and the second mover can move relative to the second stator along the second direction.

[0015] A further embodiment is that the third drive device includes a third mover and a third stator, the third stator extends along a third direction, at least one end of the third mover is disposed adjacent to the third stator, and the third mover can move relative to the third stator along a third direction.

[0016] A further embodiment is that the end of the first mover extending beyond the end of the first stator is connected to a first movable frame, the end of the second mover extending beyond the end of the second stator is connected to a second movable frame, and the end of the third mover extending beyond the end of the third stator is connected to a third movable frame. The first movable frame is movably connected to the second movable frame in a first direction, and the second movable frame is movably connected to the third movable frame in a second direction.

[0017] A further option is that the fourth drive device, the second drive device, and the third drive device are all located on the same side of the first drive device, or the fourth drive device, the second drive device, and the third drive device are located on opposite sides of the first drive device.

[0018] As can be seen from the above scheme, by setting the fourth drive device, the second drive device and the third drive device on the same side of the first drive device, it is beneficial to reduce the size of the mobile platform itself. Setting the fourth drive device, the second drive device and the third drive device on opposite sides of the first drive device allows for adaptive adjustment of the position of each drive device according to the actual site conditions.

[0019] To achieve the second objective mentioned above, the present invention provides a die-bonding swing arm, including a rotating arm, a wafer pick-up assembly, and the aforementioned moving platform. The moving platform is disposed on the rotating arm, and the wafer pick-up assembly is disposed on the loading platform of the moving platform.

[0020] As can be seen from the above scheme, applying the mobile platform to the die bonding arm of the die bonding machine is beneficial to increasing the working range of the wafer pick-up assembly. It is convenient that the support only moves once after the die bonding arm has placed multiple rows of wafers on the support to form a rectangular array. On the one hand, this helps to reduce the number of times the support moves and improve the efficiency of wafer placement. On the other hand, the moving distance of the support is greater than that in the prior art, which facilitates the positioning of the support itself and helps to improve its positioning accuracy. Attached Figure Description

[0021] Figure 1 This is a structural diagram of the first embodiment of the mobile platform of the present invention.

[0022] Figure 2 This is a structural diagram of the second embodiment of the mobile platform of the present invention.

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments. Detailed Implementation

[0024] First embodiment of mobile platform:

[0025] See Figure 1 This embodiment provides a mobile platform for positioning objects, including a first driving device, a second driving device, a third driving device, a loading platform 3, and a fourth driving device 4. The first driving device, the second driving device, and the third driving device are equivalent to linear motors, and the fourth driving device 4 can be a linear motor, a cylinder, or a hydraulic cylinder.

[0026] The first driving device includes a first mover 1 and a first stator 2. The first mover 1 is movable relative to the first stator 2 along a first direction. The first mover 1 is configured as a coil support with multiple coils wound around it, and the first stator 2 is configured as a magnet support with multiple permanent magnets; alternatively, the first mover 1 is configured as a magnet support with multiple permanent magnets, and the first stator 2 is configured as a coil support with multiple coils wound around it. When the coils on the coil support are energized, they generate an electromagnetic field. The electromagnetic field interacts with the magnet support to drive the first mover 1 to move along the first direction.

[0027] The first moving part 1 is connected to the second driving device and the third driving device respectively. The second driving device drives the first moving part 1 to move along the second direction, and the third driving device drives the first moving part 1 to move along the third direction. The first direction, the second direction, and the third direction intersect each other. Specifically, the first direction, the second direction, and the third direction are perpendicular to each other, or the first direction is perpendicular to the second direction and also perpendicular to the third direction. In this case, the second direction and the third direction may or may not be perpendicular. In this embodiment, it is preferred that the first direction, the second direction, and the third direction are perpendicular to each other. For ease of explanation, in this embodiment, the first direction is set as the Z direction and the second direction is set as the Y direction, that is... Figure 1 In the direction perpendicular to the paper, set the third direction as the X direction.

[0028] The first moving element 1 is connected to the loading platform 3, and the first stator 2 is connected to the fourth driving device 4. The fourth driving device 4 drives the first stator 2 to move along the X direction. In the X direction, the first moving element 1 and the first stator 2 can move synchronously. A preset gap is provided between the first moving element 1 and the first stator 2. The moving distance of the first moving element 1 is greater than or equal to the preset gap, so that the moving distance of the first moving element 1 in the X direction is no longer limited by the preset gap, which is beneficial to increasing the moving distance of the first rotating shaft in the X direction.

[0029] In the X-direction, the first moving element 1 can also move relative to the first stator 2. First, the third driving device drives the first moving element 1 to move along the X-direction, while the fourth driving device 4 drives the first stator 2 and the first moving element 1 to move synchronously along the X-direction to a preset position. The distance that the first moving element 1 and the first stator 2 move synchronously is greater than or equal to the preset gap between the first moving element 1 and the first stator 2. Then, the fourth driving device 4 keeps the position of the first stator 2 unchanged, and the third driving device continues to drive the first moving element 1 to move along the X-direction by a preset distance. This preset distance is less than the preset gap between the first moving element 1 and the first stator 2, so as to further increase the movement distance of the first rotating shaft in the X-direction.

[0030] The first stator 2 is designed with a "U" shape. A first mounting groove 21 is provided inside the first stator 2, which extends along the Z direction. The first mounting groove 21 has a downward-facing opening. One end of the first mover 1 is disposed parallel to the first mounting groove 21. The two side surfaces of the first mover 1 are respectively arranged adjacent to the corresponding groove walls of the first mounting groove 21. The other end of the first mover 1 protrudes beyond the first opening.

[0031] A guide moving frame 41 and a guide fixing seat 42 are provided between the fourth drive device 4 and the first stator 2. The guide fixing seat 42 extends along the third direction, and the guide moving frame 41 is slidably disposed on the guide fixing seat 42. The guide moving frame 41 is connected to the fourth drive device 4 and the first stator 2 respectively.

[0032] The second driving device includes a second mover 5 and a second stator 6. The second stator 6 extends along the Y direction and is perpendicular to the extension direction of the first stator 2, or parallel to the extension direction of the first stator 2. In this embodiment, the former is preferred. The second mover 5 is configured as a coil support with multiple coils wound on it, and the second stator 6 is configured as a magnet support with multiple permanent magnets, or the second mover 5 is configured as a magnet support with multiple permanent magnets, and the second stator 6 is configured as a coil support with multiple coils wound on it. When the coils on the coil support are energized, they generate an electromagnetic field. The electromagnetic field interacts with the magnet support, driving the second mover 5 to move along the Y direction. The second stator 6 has a "U"-shaped structure. A second mounting groove 61 is provided inside the second stator 6. The second mounting groove 61 extends along the Y direction and has a second opening facing the first stator 2. One end of the second mover 5 is inserted parallel to the second mounting groove 61. The two side surfaces of the second mover 5 are respectively arranged adjacent to the corresponding groove walls of the second mounting groove 61, and the other end of the second mover 5 protrudes beyond the second opening.

[0033] The third driving device includes a third mover 7 and a third stator 8. The third stator 8 extends along the X-direction. The third mover 7 is configured as a coil support with multiple coils wound around it, and the third stator 8 is configured as a magnet support with multiple permanent magnets. Alternatively, the third mover 7 is configured as a magnet support with multiple permanent magnets, and the third stator 8 is configured as a coil support with multiple coils wound around it. When the coils on the coil support are energized, they generate an electromagnetic field. The electromagnetic field interacts with the magnet support, driving the third mover 7 to move along the X-direction. The third stator 8 has a "U"-shaped structure. A third mounting groove 81 is formed inside the third stator 8. The third mounting groove 81 extends along the X-direction and has a third opening facing the first stator 2. One end of the third mover 7 is inserted parallel to the third mounting groove 81. The two side surfaces of the third mover 7 are respectively arranged adjacent to the corresponding groove walls of the third mounting groove 81. The other end of the third mover 7 protrudes beyond the third opening.

[0034] The first moving part 1, protruding from the first mounting groove 21, is connected to a first movable frame 9, which extends along the Z-direction. The loading platform 3 is mounted on the first movable frame 9 and extends away from the third driving device. The second moving part 5, protruding from the second mounting groove 61, is connected to a second movable frame 10, which extends along the Z-direction. The third moving part 7, protruding from the third mounting groove 81, is connected to a third movable frame 11, which extends along the X-direction. The first movable frame 9 is movably connected to the second movable frame 10 along the Z-direction, and the second movable frame 10 is movably connected to the third movable frame 11 along the Y-direction. A fixed frame 12 is fixedly mounted below the third movable frame 11, extending along the X-direction, and the third movable frame 11 is movably connected to the fixed frame 12 along the X-direction.

[0035] In this embodiment, the fourth drive device 4, the second drive device, and the third drive device are all located on the same side of the first drive device, which helps to reduce the size of the mobile platform. The second drive device is located between the fourth drive device 4 and the third drive device, or the second drive device is located on the same side of the fourth drive device 4 and the third drive device; the former is preferred in this embodiment.

[0036] In other embodiments, the second, third, and fourth drive devices 4 can be disposed on opposite sides of the first drive device, and the positions of each drive device can be adaptively adjusted according to actual site conditions. For example, the third and fourth drive devices 4 can be disposed on the same side of the first drive device, and the second drive device can be disposed on the other side of the first drive device.

[0037] In this embodiment, the first driving device, the second driving device and the third driving device all use the cooperation of the mover and the stator to achieve the driving effect. Since the mover and the stator do not directly contact each other, that is, the load of the stator will not be transferred to the mover, which helps to reduce the load and friction of the mover and increase the moving speed of the mover.

[0038] Second embodiment of the mobile platform:

[0039] See Figure 2 Based on the first embodiment of the mobile platform described above, the first stator 2a, the second stator 6a and the third stator 8a of this embodiment can be appropriately modified.

[0040] The first stator 2a is a flat plate structure extending along the Z-direction. The first end of the first mover 1 is parallel to and adjacent to the first stator 2a. There is a first preset distance between the surface of the first end of the first mover 1 and the surface of the first stator 2a, which is sufficient to allow the first mover 1 to move relative to the first stator 2a along the Z-direction. The second end of the first mover 1 extends beyond the end of the first stator 2a, and the loading platform 3 is connected to the second end of the first mover 1. In this embodiment, both ends of the first mover 1 are on the same straight line. In other embodiments, the second end of the first mover 1 may intersect with or be parallel to its first end.

[0041] The second stator 6a is a flat plate structure, extending along the Y direction, that is, the second stator 6a is perpendicular to the first stator 2a, or parallel to the first stator 2a. The first end of the second mover 5 is parallel to and adjacent to the second stator 6a. There is a second preset distance between the second end surface of the second mover 5 and the surface of the second stator 6a. This second preset distance is designed to allow the second mover 5 to move relative to the second stator 6a along the Y direction. The second end of the second mover 5 extends beyond the end of the second stator 6a and is used to connect with the first bracket 9 and the second bracket 10 respectively.

[0042] The third stator 8a is a flat plate structure, extending along the X direction. The first end of the third mover 7 is parallel to and adjacent to the third mover 8a. There is a third preset distance between the surface of the second end of the third mover 7 and the surface of the third stator 8a. This third preset distance is designed to allow the third mover 7 to move relative to the third stator 8a along the X direction. The second end of the third mover 7 extends beyond the end of the third stator 8a and is used to connect with the second moving frame 11.

[0043] The first and second embodiments of the mobile platform described above are only two feasible implementation methods. In other embodiments, the stator with a "U" shape and the stator with a flat plate shape can be set in different driving devices in the same embodiment to drive the platform to move along the X / Y / Z directions, which will not be described in detail here.

[0044] Example of a die-bonding rocker arm:

[0045] This embodiment also provides a die-bonding swing arm for a die-bonding machine. The die-bonding machine includes a die-supply platform, a conveying mechanism, a support, and a die-bonding swing arm. The support is mounted on the conveying mechanism, which drives the support to move along the X-axis. A die-bonding position is provided on the support. The first end of the die-bonding swing arm can move back and forth between the die-bonding position and the die-supply platform.

[0046] The die-bonding arm includes a rotating arm, a wafer pick-up assembly, and a moving platform as described in the above embodiment. The first end of the rotating arm can rotate around its second end. The moving platform is disposed on the first end of the rotating arm, and the wafer pick-up assembly is disposed on the carrier platform of the moving platform. During the rotation of the rotating arm and the moving platform, the moving platform drives the wafer pick-up assembly to move in the X / Y / Z directions to realize wafer pick-up and wafer placement operations.

[0047] In this embodiment, the mobile platform is applied to the die bonding arm of the die bonding machine, which helps to increase the working range of the wafer pick-up assembly in the X direction. It is convenient that the support only moves once after the die bonding arm has placed multiple rows of wafers on the support to form a rectangular array. On the one hand, this helps to reduce the number of times the support moves and improve the efficiency of wafer placement. On the other hand, the moving distance of the support is greater than that in the prior art, which facilitates the positioning of the support itself and helps to improve its positioning accuracy.

[0048] In this embodiment, the support moves along the X-axis, which is consistent with the direction of the movement of the increased carrying platform in the moving platform, which is beneficial for coordinating the placement of the wafer.

[0049] In other embodiments, the support can move along the Y or Z direction. In this case, the movement distance of the platform in the Y or Z direction can be increased by the above structure and principle to match the placement of the wafer. This will not be described in detail here.

[0050] In summary, the present invention uses a first driving device, a second driving device, and a third driving device to drive the first moving part to move along a first direction, a second direction, and a third direction; and uses a fourth driving device to drive the first stator to move along a third direction, so that the first stator and the first moving part can move synchronously along the third direction, which is beneficial to increasing the moving distance of the first moving part in the third direction. In this embodiment, the first driving device, the second driving device, and the third driving device all use the cooperation of the moving part and the stator to achieve the driving effect. Since the moving part and the stator do not directly contact each other, that is, the load of the stator will not be transferred to the moving part, which is beneficial to reduce the load and friction of the moving part and improve the moving speed of the moving part and the loading platform.

[0051] Finally, it should be emphasized that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A mobile platform for positioning an object, characterized by: The moving platform comprises a first driving device, a second driving device, a third driving device, a carrying platform and a fourth driving device, the first driving device comprises a first mover and a first stator, the first mover is movable relative to the first stator along a first direction, the first mover is connected with the second driving device and the third driving device respectively, the second driving device drives the first mover to move along a second direction, the third driving device drives the first mover to move along a third direction, the first direction, the second direction and the third direction intersect with each other in pairs; The first mover is connected with the carrying platform, the first stator is connected with the fourth driving device, and the fourth driving device drives the first stator to move along the third direction; In the third direction, the first mover and the first stator are synchronously movable, and the first mover is further movable relative to the first stator; A guide moving frame and a guide fixed base are arranged between the fourth driving device and the first stator, the guide fixed base extends along the third direction, the guide moving frame is slidingly arranged on the guide fixed base, and the guide moving frame is connected with the fourth driving device and the first stator respectively.

2. The moving platform according to claim 1, wherein: The first direction, the second direction and the third direction are perpendicular to each other, or the first direction is perpendicular to the second direction, and the first direction is perpendicular to the third direction.

3. The moving platform according to claim 1, wherein: A preset gap is arranged between the first mover and the first stator, and the moving distance of the first mover is greater than or equal to the preset gap.

4. The moving platform according to any one of claims 1 to 3, wherein: The first stator extends along the first direction, and at least one end of the first mover is arranged adjacent to the first stator.

5. The moving platform according to claim 4, wherein: The second driving device comprises a second mover and a second stator, the second stator extends along the second direction, at least one end of the second mover is arranged adjacent to the second stator, and the second mover is movable relative to the second stator along the second direction.

6. The moving platform according to claim 5, wherein: The third driving device comprises a third mover and a third stator, the third stator extends along the third direction, at least one end of the third mover is arranged adjacent to the third stator, and the third mover is movable relative to the third stator along the third direction.

7. The moving platform according to claim 6, wherein: One end of the first mover beyond the end of the first stator is connected with a first moving frame, one end of the second mover beyond the end of the second stator is connected with a second moving frame, and one end of the third mover beyond the end of the third stator is connected with a third moving frame, the first moving frame is movably connected to the second moving frame along the first direction, and the second moving frame is movably connected to the third moving frame along the second direction.

8. The moving platform according to any one of claims 1 to 3, wherein: The fourth driving device, the second driving device and the third driving device are arranged on the same side of the first driving device, or the fourth driving device, the second driving device and the third driving device are arranged on two sides of the first driving device.

9. A die bonder swing arm characterized by: The rotating arm, the wafer taking assembly and the moving platform according to any one of claims 1 to 8 are arranged on the rotating arm, and the wafer taking assembly is arranged on the object carrying platform of the moving platform.

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