Modulation Device and Method for Quartz Tuning Fork

Abstract

The present invention relates to the technical field of modulation of quartz tuning forks, and provides a modulation device and method for quartz tuning forks. The modulation device for the quartz tuning fork includes a first detection circuit, a second detection circuit, and a third detection circuit. The present invention adopts a design for detecting the single-ended tuning fork electrodes of the quartz tuning fork in a limited space, enabling the tuning fork frequencies at each end of the quartz tuning fork to be detected and enabling precise modulation; the tuning fork frequencies at both ends of the quartz tuning fork can be modulated jointly, ensuring the frequency accuracy of the resonance of the quartz tuning fork and a high Q value, and improving the quality of the quartz tuning fork.

Description

Technical Field

[0001] The present invention relates to the technical field of modulation of quartz tuning forks, and particularly to a modulation device and method for quartz tuning forks. Background Art

[0002] The quartz tuning fork oscillator is the heart component of a quartz electronic watch, and its performance directly affects the quality of the quartz electronic watch. There are many technical indicators required for quartz tuning forks. Among them, the quality factor Q and the equivalent resistance R are one of the main indicators of the quartz oscillator, and the imbalance of the quartz tuning fork is the main factor affecting the quality factor and the equivalent resistance. The quartz tuning fork oscillator utilizes the principle that at any instant of vibration, the vibration forces and torques of the two opposite moving fork arms are balanced with each other to eliminate the action of the resonator on the base, thereby ensuring the frequency accuracy and high Q value of the tuning fork resonator.

[0003] However, due to the limitations of processing accuracy and material uniformity, the vibration parameters of the two arms of the tuning fork cannot be completely consistent, and the mutual balance of the vibration forces and torques of the two fork arms required in principle cannot be fully achieved. In this way, the root of the tuning fork will be subjected to forces and torques, causing the vibration of the tuning fork base. This will not only cause instability of the resonance system frequency, but also inevitably lead to the loss of vibration energy, resulting in a decrease in the quality factor of the tuning fork resonator and an increase in the equivalent resistance. Summary of the Invention

[0004] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, the present invention provides a modulation device for a quartz tuning fork, which is used for high-precision modulation of the tuning fork electrodes at both ends of the quartz tuning fork to ensure the same frequency.

[0005] An embodiment of the present invention also provides a modulation method for a quartz tuning fork.

[0006] According to a modulation device for a quartz tuning fork provided by an embodiment of the first aspect of the present invention, it includes a first detection circuit, a second detection circuit, and a third detection circuit. The positive electrode of the first detection circuit is respectively connected to a first electrode plate and a second electrode plate arranged oppositely, and the negative electrode of the first detection circuit is respectively connected to a third electrode plate and a fourth electrode plate arranged oppositely. The first electrode plate, the second electrode plate, the third electrode plate, and the fourth electrode plate enclose a first detection area;

[0007] The positive electrode of the second detection circuit is respectively connected to a fifth electrode plate and a sixth electrode plate arranged oppositely, and the negative electrode of the second detection circuit is respectively connected to a seventh electrode plate and an eighth electrode plate arranged oppositely. The fifth electrode plate, the sixth electrode plate, the seventh electrode plate, and the eighth electrode plate enclose a second detection area;

[0008] The positive electrode of the third detection circuit is respectively connected to the first electrode plate, the second electrode plate, the fifth electrode plate and the sixth electrode plate, and a first on-off switch is provided on the positive electrode connection line. The negative electrode of the third detection circuit is respectively connected to the third electrode plate, the fourth electrode plate, the seventh electrode plate and the eighth electrode plate, and a second on-off switch is provided on the negative electrode connection line.

[0009] According to the modulation device of the quartz tuning fork of the embodiment of the present invention, a design for detecting the single-ended tuning fork electrodes of the quartz tuning fork in a limited space is adopted, so that the frequencies of the tuning fork electrodes at each end of the quartz tuning fork can be detected, and precise modulation can be achieved; the tuning fork frequencies at both ends of the quartz tuning fork can be jointly modulated to ensure the resonance frequency accuracy and high Q value of the quartz tuning fork, and improve the quality of the quartz tuning fork.

[0010] A modulation method of a quartz tuning fork according to a second aspect embodiment of the present invention includes the following steps:

[0011] Place the first tuning fork electrode in the first detection area and place the second tuning fork electrode in the second detection area;

[0012] Disconnect the first on-off switch and the second on-off switch. The first detection circuit performs resonance driving on the first tuning fork in the first detection area, and the second detection circuit performs resonance driving on the second tuning fork in the second detection area. By adjusting the first mass area of the first tuning fork electrode and the second mass area of the second tuning fork electrode, the frequencies of the first tuning fork and the second tuning fork are made the same;

[0013] Close the first on-off switch and the second on-off switch. The third detection circuit performs resonance detection on the first tuning fork in the first detection area and the second tuning fork in the second detection area;

[0014] Place the third tuning fork electrode in the first detection area and place the fourth tuning fork electrode in the second detection area;

[0015] Disconnect the first on-off switch and the second on-off switch. The first detection circuit performs resonance driving on the third tuning fork in the first detection area, and the second detection circuit performs resonance driving on the fourth tuning fork in the second detection area. By adjusting the third mass area of the third tuning fork electrode and the fourth mass area of the fourth tuning fork electrode, the frequencies of the third tuning fork and the fourth tuning fork are made the same;

[0016] Close the first on-off switch and the second on-off switch. The third detection circuit performs resonance detection on the third tuning fork in the first detection area and the fourth tuning fork in the second detection area.

[0017] According to an embodiment of the present invention, the first tuning fork electrode and the third tuning fork electrode are prepared by a coating and photolithography method.

[0018] According to an embodiment of the present invention, the second tuning fork electrode and the fourth tuning fork electrode are prepared by a mask and evaporation method.

[0019] According to an embodiment of the present invention, the first tuning fork electrode, the second tuning fork electrode, the third tuning fork electrode, and the fourth tuning fork electrode are all prepared by a mask and evaporation or coating and lift-off method.

[0020] According to an embodiment of the present invention, the first tuning fork electrode and the second tuning fork electrode are disposed at the first end of the quartz tuning fork, the third tuning fork electrode and the fourth tuning fork electrode are disposed at the second end of the quartz tuning fork opposite to the first end, the polarities of the first tuning fork electrode and the third tuning fork electrode are the same, and the polarities of the second tuning fork electrode and the fourth tuning fork electrode are the same.

[0021] According to an embodiment of the present invention, the first mass region, the second mass region, the third mass region, and the fourth mass region are trimmed by a laser etching or chemical etching or plasma etching method.

[0022] According to an embodiment of the present invention, the following steps are further included:

[0023] Install the modulated first tuning fork electrode and the second tuning fork electrode at the first end of the quartz tuning fork, and install the modulated third tuning fork electrode and the fourth tuning fork electrode at the second end of the quartz tuning fork, wherein the first tuning fork electrode and the third tuning fork electrode are collinear, and the second tuning fork electrode and the fourth tuning fork electrode are collinear;

[0024] Install the quartz tuning fork on a base, and pins corresponding to the first tuning fork electrode, the second tuning fork electrode, the third tuning fork electrode, and the fourth tuning fork electrode are provided on the base.

[0025] According to an embodiment of the present invention, the first tuning fork electrode, the second tuning fork electrode, the third tuning fork electrode, and the fourth tuning fork electrode are respectively connected to the corresponding pins by eutectic bonding or wire bonding.

[0026] According to an embodiment of the present invention, the first mass region, the second mass region, the third mass region, and the fourth mass region are all prepared by electroplating.

[0027] The additional aspects and advantages of the present invention will be given in part in the following description, will become apparent in part from the following description, or will be understood through the practice of the present invention. Description of the Drawings

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings.

[0029] Figure 1 It is a structural block diagram of a modulation device for a quartz tuning fork according to an embodiment of the present invention.

[0030] Reference numerals:

[0031] 100, the first detection circuit; 110, the first electrode plate; 120, the second electrode plate; 130, the third electrode plate; 140, the fourth electrode plate; 200, the second detection circuit; 210, the fifth electrode plate; 220, the sixth electrode plate; 230, the seventh electrode plate; 240, the eighth electrode plate; 300, the third detection circuit; 310, the first on-off switch; 320, the second on-off switch. Specific embodiments

[0032] The following will further describe in detail the embodiments of the present invention in conjunction with the accompanying drawings and embodiments. The following embodiments are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0033] In the description of the embodiments of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0034] In the description of the embodiments of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific situations.

[0035] In the embodiments of the present invention, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may mean that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "below" and "beneath" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the horizontal height of the first feature is less than that of the second feature.

[0036] In the description of this specification, the descriptions with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0037] As Figure 1 shown, an embodiment of the present invention provides a modulation device for a quartz tuning fork, including a first detection circuit 100, a second detection circuit 200, and a third detection circuit 300. The positive electrode of the first detection circuit 100 is respectively connected to a relatively arranged first electrode plate 110 and a second electrode plate 120, and the negative electrode of the first detection circuit 100 is respectively connected to a relatively arranged third electrode plate 130 and a fourth electrode plate 140. The first electrode plate 110, the second electrode plate 120, the third electrode plate 130, and the fourth electrode plate 140 enclose a first detection area;

[0038] The positive electrode of the second detection circuit 200 is respectively connected to a relatively arranged fifth electrode plate 210 and a sixth electrode plate 220, and the negative electrode of the second detection circuit 200 is respectively connected to a relatively arranged seventh electrode plate 230 and an eighth electrode plate 240. The fifth electrode plate 210, the sixth electrode plate 220, the seventh electrode plate 230, and the eighth electrode plate 240 enclose a second detection area;

[0039] The positive electrode of the third detection circuit 300 is respectively connected to the first electrode plate 110, the second electrode plate 120, the fifth electrode plate 210 and the sixth electrode plate 220, and a first on-off switch 310 is provided on the positive electrode connection line. The negative electrode of the third detection circuit 300 is respectively connected to the third electrode plate 130, the fourth electrode plate 140, the seventh electrode plate 230 and the eighth electrode plate 240, and a second on-off switch 320 is provided on the negative electrode connection line. It can be understood that the first electrode plate 110 and the second electrode plate 120 are arranged oppositely and are both connected to the positive electrode of the first detection circuit 100. The third electrode plate 130 and the fourth electrode plate 140 are arranged oppositely and are both connected to the negative electrode of the first detection circuit 100. The first electrode plate 110, the second electrode plate 120, the third electrode plate 130 and the fourth electrode plate 140 are spaced apart to enclose a quadrilateral first detection area, which generates an inverse piezoelectric effect on the two tuning fork electrodes at the first end of the quartz tuning fork placed in the first detection area, and then resonates, and the vibration directions are opposite, and the frequencies of the two tuning fork electrodes at the first end of the quartz tuning fork and the comprehensive output error can be determined in real time during modulation.

[0040] Further, the fifth electrode plate 210 and the sixth electrode plate 220 are arranged oppositely and are both connected to the positive electrode of the second detection circuit 200. The seventh electrode plate 230 and the eighth electrode plate 240 are arranged oppositely and are both connected to the negative electrode of the second detection circuit 200. The fifth electrode plate 210, the sixth electrode plate 220, the seventh electrode plate 230 and the eighth electrode plate 240 are spaced apart to enclose a quadrilateral second detection area, which generates an inverse piezoelectric effect on the two tuning fork electrodes at the second end of the quartz tuning fork placed in the second detection area, and then resonates, and the vibration directions are opposite, and the frequencies of the two tuning fork electrodes at the second end of the quartz tuning fork and the comprehensive output error can be determined in real time during modulation.

[0041] Among them, the positive electrode of the third detection circuit 300 is respectively connected to the first electrode plate 110, the second electrode plate 120, the fifth electrode plate 210 and the sixth electrode plate 220, and the negative electrode of the third detection circuit 300 is respectively connected to the third electrode plate 130, the fourth electrode plate 140, the seventh electrode plate 230 and the eighth electrode plate 240. Closing the first on-off switch 310 and the second on-off switch 320 realizes the modulation of the two tuning fork electrodes at the first end of the quartz tuning fork corresponding to the first detection area and the two tuning fork electrodes at the second end of the quartz tuning fork corresponding to the second detection area, ensuring high-precision modulation of the frequencies of the tuning fork electrodes at both ends of the quartz tuning fork and the comprehensive output error, and improving the quality of the quartz tuning fork.

[0042] The modulation device of the quartz tuning fork according to the embodiment of the present invention adopts the design of detecting the single-ended tuning fork electrode of the quartz tuning fork in a limited space, enabling the frequency of the tuning fork electrode at each end of the quartz tuning fork to be detected, achieving precise modulation; the frequencies of the tuning fork electrodes at both ends of the quartz tuning fork can be jointly modulated to ensure the resonance frequency accuracy and high Q value of the quartz tuning fork, and improve the quality of the quartz tuning fork.

[0043] A modulation method of a quartz tuning fork according to the second aspect embodiment of the present invention includes the following steps:

[0044] Place the first tuning fork electrode in the first detection area and place the second tuning fork electrode in the second detection area;

[0045] Disconnect the first on-off switch 310 and the second on-off switch 320. The first detection circuit 100 performs resonance drive on the first tuning fork in the first detection area, and the second detection circuit 200 performs resonance drive on the second tuning fork in the second detection area. By trimming the first mass area of the first tuning fork electrode and the second mass area of the second tuning fork electrode, the frequencies of the first tuning fork and the second tuning fork are made the same;

[0046] Close the first on-off switch 310 and the second on-off switch 320. The third detection circuit 300 performs resonance detection on the first tuning fork in the first detection area and the second tuning fork in the second detection area. Determine whether the tuning fork system reaches the optimal state by detecting whether the Q value reaches the maximum value;

[0047] Place the third tuning fork electrode in the first detection area and place the fourth tuning fork electrode in the second detection area;

[0048] Disconnect the first on-off switch 310 and the second on-off switch 320. The first detection circuit 100 performs resonance drive on the third tuning fork in the first detection area, and the second detection circuit 200 performs resonance drive on the fourth tuning fork in the second detection area. By trimming the third mass area of the third tuning fork electrode and the fourth mass area of the fourth tuning fork electrode, the frequencies of the third tuning fork and the fourth tuning fork are made the same;

[0049] Close the first on-off switch 310 and the second on-off switch 320. The third detection circuit performs resonance detection on the third tuning fork in the first detection area and the fourth tuning fork in the second detection area. Determine whether the tuning fork system reaches the optimal state by detecting whether the Q value reaches the maximum value.

[0050] According to an embodiment of the present invention, when the tuning fork electrodes are processed first and then the quartz tuning fork is processed, the first tuning fork electrode and the third tuning fork electrode are prepared by coating and photolithography methods; the second tuning fork electrode and the fourth tuning fork electrode are prepared by masking and evaporation methods. The materials for coating and masking are preferably gold, which can achieve high-precision lines and resist etching solutions.

[0051] According to an embodiment of the present invention, when the quartz tuning fork is processed first and then the tuning fork electrodes are processed, the first tuning fork electrode, the second tuning fork electrode, the third tuning fork electrode, and the fourth tuning fork electrode are all prepared by masking and evaporation or coating and stripping methods.

[0052] According to an embodiment of the present invention, the first tuning fork electrode and the second tuning fork electrode are disposed at the first end of the quartz tuning fork, the third tuning fork electrode and the fourth tuning fork electrode are disposed at the second end of the quartz tuning fork opposite to its first end, the polarities of the first tuning fork electrode and the third tuning fork electrode are the same, and the polarities of the second tuning fork electrode and the fourth tuning fork electrode are the same.

[0053] According to an embodiment of the present invention, the first mass region, the second mass region, the third mass region, and the fourth mass region are adjusted by laser etching, chemical etching, or plasma etching methods. It should be noted that the thicknesses of the first mass region, the second mass region, the third mass region, and the fourth mass region are greater than the thicknesses of the corresponding tuning fork electrodes to achieve the purpose of mass adjustment.

[0054] According to an embodiment of the present invention, the following steps are further included:

[0055] Install the modulated first tuning fork electrode and the second tuning fork electrode at the first end of the quartz tuning fork, and install the modulated third tuning fork electrode and the fourth tuning fork electrode at the second end of the quartz tuning fork, wherein the first tuning fork electrode and the third tuning fork electrode are collinear, and the second tuning fork electrode and the fourth tuning fork electrode are collinear;

[0056] Install the quartz tuning fork on a base, and pins electrically connected to the first tuning fork electrode, the second tuning fork electrode, the third tuning fork electrode, and the fourth tuning fork electrode one by one are provided on the base. The base can be a ceramic base or a metal base.

[0057] According to an embodiment of the present invention, the first tuning fork electrode, the second tuning fork electrode, the third tuning fork electrode, and the fourth tuning fork electrode are respectively connected to the corresponding pins by eutectic bonding or gold wire bonding.

[0058] According to an embodiment of the present invention, the first quality region, the second quality region, the third quality region, and the fourth quality region are all prepared by electroplating.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

[0060] The above embodiments are only used to illustrate the present invention, rather than to limit the present invention. Although the present invention has been described in detail with reference to the embodiments, those of ordinary skill in the art should understand that various combinations, modifications, or equivalent replacements of the technical solutions of the present invention do not depart from the spirit and scope of the technical solutions of the present invention, and should all be covered by the scope of the claims of the present invention.

Claims

1. A modulation device for a quartz tuning fork, characterized in that It includes a first detection circuit, a second detection circuit and a third detection circuit. The positive electrode of the first detection circuit is respectively connected to a first electrode plate and a second electrode plate which are oppositely arranged, and the negative electrode of the first detection circuit is respectively connected to a third electrode plate and a fourth electrode plate which are oppositely arranged. The first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate enclose a first detection area; The positive electrode of the second detection circuit is respectively connected to a fifth electrode plate and a sixth electrode plate which are oppositely arranged, and the negative electrode of the second detection circuit is respectively connected to a seventh electrode plate and an eighth electrode plate which are oppositely arranged. The fifth electrode plate, the sixth electrode plate, the seventh electrode plate and the eighth electrode plate enclose a second detection area; The positive electrode of the third detection circuit is respectively connected to the first electrode plate, the second electrode plate, the fifth electrode plate and the sixth electrode plate, and a first on-off switch is provided on the positive electrode connection line. The negative electrode of the third detection circuit is respectively connected to the third electrode plate, the fourth electrode plate, the seventh electrode plate and the eighth electrode plate, and a second on-off switch is provided on the negative electrode connection line.

2. A modulation method for a modulation device of a quartz tuning fork as described in claim 1, characterized in that, It includes the following steps: Place the first tuning fork electrode in the first detection area and place the second tuning fork electrode in the second detection area; Open the first on-off switch and the second on-off switch. The first detection circuit performs resonant driving on the first tuning fork in the first detection area, and the second detection circuit performs resonant driving on the second tuning fork in the second detection area. By adjusting the first mass area of the first tuning fork electrode and the second mass area of the second tuning fork electrode, the frequencies of the first tuning fork and the second tuning fork are made the same; Close the first on-off switch and the second on-off switch. The third detection circuit performs resonant detection on the first tuning fork in the first detection area and the second tuning fork in the second detection area; Place the third tuning fork electrode in the first detection area and place the fourth tuning fork electrode in the second detection area; Open the first on-off switch and the second on-off switch. The first detection circuit performs resonant driving on the third tuning fork in the first detection area, and the second detection circuit performs resonant driving on the fourth tuning fork in the second detection area. By adjusting the third mass area of the third tuning fork electrode and the fourth mass area of the fourth tuning fork electrode, the frequencies of the third tuning fork and the fourth tuning fork are made the same; Close the first on-off switch and the second on-off switch. The third detection circuit performs resonant detection on the third tuning fork in the first detection area and the fourth tuning fork in the second detection area.

3. The modulation method of the quartz tuning fork modulation device according to claim 2, characterized in that The first tuning fork electrode and the third tuning fork electrode are prepared by coating and lithography methods.

4. The modulation method of the quartz tuning fork modulation device according to claim 3, characterized in that The second tuning fork electrode and the fourth tuning fork electrode are prepared by mask and evaporation methods.

5. The modulation method of the quartz tuning fork modulation device according to claim 2, characterized in that, The first tuning fork electrode, the second tuning fork electrode, the third tuning fork electrode and the fourth tuning fork electrode are all prepared by mask and evaporation methods, or coating and stripping methods.

6. The modulation method of the quartz tuning fork modulation device according to claim 2, characterized in that, The first tuning fork electrode and the second tuning fork electrode are disposed at the first end of the quartz tuning fork, the third tuning fork electrode and the fourth tuning fork electrode are disposed at the second end of the quartz tuning fork opposite to the first end, the polarities of the first tuning fork electrode and the third tuning fork electrode are the same, and the polarities of the second tuning fork electrode and the fourth tuning fork electrode are the same.

7. The modulation method of the quartz tuning fork modulation device according to claim 2, characterized in that The first mass region, the second mass region, the third mass region, and the fourth mass region are trimmed by a method of laser etching, chemical etching, or plasma etching.

8. The modulation method of the modulation device of the quartz tuning fork according to claim 6, characterized in that, It further includes the following steps: Mount the modulated first tuning fork electrode and the second tuning fork electrode at the first end of the quartz tuning fork, and mount the modulated third tuning fork electrode and the fourth tuning fork electrode at the second end of the quartz tuning fork, wherein the first tuning fork electrode and the third tuning fork electrode are collinear, and the second tuning fork electrode and the fourth tuning fork electrode are collinear; Mount the quartz tuning fork on a base, and pins corresponding to and electrically connected to the first tuning fork electrode, the second tuning fork electrode, the third tuning fork electrode, and the fourth tuning fork electrode are provided on the base.

9. The modulation method of the quartz tuning fork modulation device according to claim 8, characterized in that The first tuning fork electrode, the second tuning fork electrode, the third tuning fork electrode, and the fourth tuning fork electrode are respectively connected to the corresponding pins by eutectic bonding or gold wire bonding.

10. The modulation method of the modulation device of the quartz tuning fork according to any one of claims 2 to 9, characterized in that, The first mass region, the second mass region, the third mass region, and the fourth mass region are all prepared by electroplating.

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