Magnetic sensor and inspection device

Abstract

Provided are a magnetic sensor and an inspection device capable of achieving improved sensitivity. According to an embodiment, the magnetic sensor comprises 1st to 4th magnetic elements, 1st to 4th conductive components, and 1st to 5th magnetic components. The 1st magnetic element and the 1st conductive component overlap with the region between the 1st magnetic component and the 3rd magnetic component. The 2nd magnetic element and the 2nd conductive component overlap with the region between the 4th magnetic component and the 2nd magnetic component. The 3rd magnetic element and the 3rd conductive component overlap with the region between the 3rd magnetic component and the 5th magnetic component. The 4th magnetic element and the 4th conductive component overlap with the region between the 5th magnetic component and the 4th magnetic component.

Description

[0001] This application is based on Japanese Patent Application No. 2020-201001 (filing date December 3, 2020), and claims the benefit of priority from the aforementioned application. The present application incorporates all the contents of the aforementioned application by reference. Technical Field

[0002] Embodiments of the present invention relate to a magnetic sensor and an inspection device. Background Art

[0003] There is a magnetic sensor using a magnetic layer. There is a testing device using a magnetic sensor. In the magnetic sensor, improvement in sensitivity is desired. Summary of the invention

[0004] Embodiments of the present invention provide a magnetic sensor and an inspection device capable of improving sensitivity.

[0005] Means for solving problems

[0006] According to an embodiment of the present invention, the magnetic sensor includes: a first magnetic element; a second magnetic element; a third magnetic element disposed between the first magnetic element and the second magnetic element in a first direction; a fourth magnetic element disposed between the third magnetic element and the second magnetic element in the first direction; a first conductive component; a second conductive component; a third conductive component disposed between the first conductive component and the second conductive component in the first direction; a fourth conductive component disposed between the third conductive component and the second conductive component in the first direction; a first magnetic component; a second magnetic component; a third magnetic component disposed between the first magnetic component and the second magnetic component in the first direction; a fourth magnetic component disposed between the third magnetic component and the second magnetic component in the first direction; and a fifth magnetic component disposed between the third magnetic component and the fourth magnetic component in the first direction. The first magnetic element and the first conductive component overlap with a region between the first magnetic component and the third magnetic component in a second direction intersecting the first direction. The second magnetic element and the second conductive component overlap with the region between the fourth magnetic component and the second magnetic component in the second direction. The third magnetic element and the third conductive component overlap with the region between the third magnetic component and the fifth magnetic component in the second direction. The fourth magnetic element and the fourth conductive component overlap with the region between the fifth magnetic component and the fourth magnetic component in the second direction.

[0007] According to the sensor having the above configuration, it is possible to provide a magnetic sensor and an inspection device capable of achieving improved sensitivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 (a) and Figure 1 (b) is a schematic diagram illustrating the magnetic sensor according to the first embodiment.

[0009] Figure 2 (a) and Figure 2 (b) is a schematic cross-sectional view illustrating the magnetic sensor according to the first embodiment.

[0010] Figure 3 It is a schematic plan view illustrating the magnetic sensor according to the first embodiment.

[0011] Figure 4 It is a schematic plan view illustrating the magnetic sensor according to the first embodiment.

[0012] Figure 5 (a) and Figure 5 (b) is a schematic diagram illustrating the characteristics of the magnetic sensor according to the first embodiment.

[0013] Figure 6 (a) and Figure 6 (b) is a schematic diagram illustrating the characteristics of the magnetic sensor according to the first embodiment.

[0014] Figure 7 (a)~ Figure 7 (c) is a graph illustrating the characteristics of the magnetic sensor according to the first embodiment.

[0015] Figure 8 This is a schematic cross-sectional view illustrating the magnetic sensor according to the first embodiment.

[0016] Fig. 9 (a) and Fig. 9 (b) is a schematic plan view illustrating the magnetic sensor according to the first embodiment.

[0017] Fig.10 is a graph illustrating the characteristics of the magnetic sensor.

[0018] Fig.11 is a graph illustrating the characteristics of the magnetic sensor.

[0019] Fig.12 is a graph illustrating the characteristics of the magnetic sensor.

[0020] Fig.13 (a) and Fig.13 (b) is a schematic cross-sectional view illustrating the magnetic sensor according to the first embodiment.

[0021] Fig.14 This is a schematic cross-sectional view illustrating the magnetic sensor according to the first embodiment.

[0022] Fig.15It is a schematic perspective view showing an inspection device according to a second embodiment.

[0023] Fig.16 It is a schematic plan view showing an inspection device according to a second embodiment.

[0024] Fig.17 It is a schematic diagram showing a magnetic sensor and an inspection device according to a second embodiment.

[0025] Fig.18 It is a schematic diagram showing the inspection device according to the sixth embodiment.

[0026] Description of symbols

[0027] 11 to 14 ... 1st to 4th magnetic layers, 11E to 14E ... 1st to 4th magnetic elements, 11Ep to 14Ep ... a part, 11Eq to 14Eq ... the other part, 11e to 14e ... one end, 11f to 14f ... the other end, 11n to 14n ... 1st to 4th non-magnetic layers, 11o to 14o ... 1st to 4th relative magnetic layers, 21 to 24 ... 1st to 4th conductive components, 21e to 24e ... one end, 21f to 24f ... the other end, 21p to 24p ... a part, 21q to 24q ... the other part, 51 to 55…1st to 5th magnetic components, 51a, 52a…1st and 2nd magnetic component ends, 51b, 52b…the other ends of the first to second magnetic components, 51p to 52p…a portion, 53q to 55q…the other portion, 65…insulating component, 66a to 66d…area, 70…processing unit, 71 to 73…1st to 3rd circuits, 110 to 115, 150, 150a…magnetic sensor, 301…sensor unit, 302…substrate, 303…input / output line, 305…substrate, 500…inspection device, 502…control mechanism, 504…signal input / output unit, 506…sensor driving unit, 508…signal processing unit, 510…signal analysis unit, 512…data processing unit, 516…imaging diagnosis unit, 600…battery system, 610…battery, 680…inspection object, 710…inspection device, 770…processing unit, B1…magnetic flux density, BR…ratio, CP1~CP4…1st to 4th connection points, H…magnetic field, Hac…AC magnetic field, Hex…external magnetic field, Hex1~Hex3…1st to 3rd magnetic fields , Hsig…signal magnetic field, I1…1st current, Ia1~Ia3…1st~3rd value current, Is…detection current, L1~L4…length, L51~L55…1st~5th magnetic component length, R…resistance, R1~R4…1st~4th value, Ro…low resistance, Rx…resistance, WR1, WR2…ratio, d1~d4, dx1~dx4…width, dz…distance, g1~g4…distance, t1~t5…thickness, w1~w4…width, w51~w55…1st~5th magnetic component width. DETAILED DESCRIPTION

[0028] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0029] The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the ratio of the size between parts, etc. are not necessarily the same as in reality. Even when the same part is shown, there are cases where the size and ratio are different from each other depending on the drawings.

[0030] In the present specification and each drawing, the same elements as those previously described with respect to an already-appeared drawing are denoted by the same reference numerals, and detailed description thereof will be appropriately omitted.

[0031] (First embodiment)

[0032] Figure 1 (a) and Figure 1 (b) is a schematic diagram illustrating the magnetic sensor according to the first embodiment.

[0033] Figure 2 (a) and Figure 2 (b) is a schematic cross-sectional view illustrating the magnetic sensor according to the first embodiment.

[0034] Figure 1 (a) is a top view. Figure 1 (b) Figure 2 (a) and Figure 2 (b) Yes Figure 1 (a) A1-A2 line cross-sectional view. Figure 1 (a) Figure 2 In order to make the figure easier to understand, some elements are omitted.

[0035] like Figure 1 (a) and Figure 1 As shown in FIG. 5( b ), the magnetic sensor 110 of the embodiment includes first to fourth magnetic elements 11E to 14E, first to fourth conductive members 21 to 24 , and first to fifth magnetic members 51 to 55 .

[0036] The third magnetic element 13E is provided between the first magnetic element 11E and the second magnetic element 12E in the first direction. The fourth magnetic element 14E is provided between the third magnetic element 13E and the second magnetic element 12E in the first direction.

[0037] The first direction is defined as the X-axis direction. A direction perpendicular to the X-axis direction is defined as the Z-axis direction. A direction perpendicular to the X-axis direction and the Z-axis direction is defined as the Y-axis direction.

[0038] The third conductive member 23 is provided between the first conductive member 21 and the second conductive member 22 in the first direction (X-axis direction). The fourth conductive member 24 is provided between the third conductive member 23 and the second conductive member 22 in the first direction.

[0039] The third magnetic member 53 is provided between the first magnetic member 51 and the second magnetic member 52 in the first direction (X-axis direction). The fourth magnetic member 54 is provided between the third magnetic member 53 and the second magnetic member 52 in the first direction. The fifth magnetic member 55 is provided between the third magnetic member 53 and the fourth magnetic member 54 in the first direction.

[0040] like Figure 1 As shown in (b), the first magnetic element 11E and the first conductive component 21 overlap with the area 66a between the first magnetic component 51 and the third magnetic component 53 in the second direction. The second direction intersects with the first direction. The second direction is, for example, the Z-axis direction. The second magnetic element 12E and the second conductive component 22 overlap with the area 66b between the fourth magnetic component 54 and the second magnetic component 52 in the second direction (for example, the Z-axis direction). The third magnetic element 13E and the third conductive component 23 overlap with the area 66c between the third magnetic component 53 and the fifth magnetic component 55 in the second direction. The fourth magnetic element 14E and the fourth conductive component 24 overlap with the area 66d between the fifth magnetic component 55 and the fourth magnetic component 54 in the second direction.

[0041] like Figure 1 As shown in (b), in this example, the magnetic sensor 110 includes an insulating member 65. The insulating member 65 is provided around the first to fourth magnetic elements 11E to 14E, the first to fourth conductive members 21 to 24, and the first to fifth magnetic members 51 to 55. The regions 66a to 66d are, for example, a part of the insulating member 65. Figure 1 In (a), the insulating member 65 is omitted.

[0042] like Figure 2 As shown in (a), a portion 11Ep of the first magnetic element 11E and a portion 21p of the first conductive component 21 overlap with at least a portion 51p of the first magnetic component 51 in the second direction (Z-axis direction). The other portion 11Eq of the first magnetic element 11E and the other portion 21q of the first conductive component 21 overlap with a portion 53p of the third magnetic component 53 in the second direction.

[0043] A portion 12Ep of the second magnetic element 12E and a portion 22p of the second conductive member 22 overlap at least a portion 52p of the second magnetic member 52 in the second direction. Another portion 12Eq of the second magnetic element 12E and another portion 22q of the second conductive member 22 overlap a portion 54p of the fourth magnetic member 54 in the second direction.

[0044] A portion 13Ep of the third magnetic element 13E and a portion 23p of the third conductive member 23 overlap with another portion 53q of the third magnetic member 53 in the second direction. Another portion 13Eq of the third magnetic element 13E and another portion 23q of the third conductive member 23 overlap with a portion 55p of the fifth magnetic member 55 in the second direction.

[0045] A portion 14Ep of the fourth magnetic element 14E and a portion 24p of the fourth conductive member 24 overlap with another portion 55q of the fifth magnetic member 55 in the second direction. Another portion 14Eq of the fourth magnetic element 14E and another portion 24q of the fourth conductive member 24 overlap with another portion 54q of the fourth magnetic member 54 in the second direction.

[0046] In this example, at least a portion of the first magnetic element 11E is located between the first conductive component 21 and the first magnetic component 51. At least a portion of the second magnetic element 12E is located between the second conductive component 22 and the second magnetic component 52. At least a portion of the third magnetic element 13E is located between the third conductive component 23 and the third magnetic component 53. At least a portion of the fourth magnetic element 14E is located between the fourth conductive component 24 and the fourth magnetic component 54.

[0047] In an embodiment, the magnetic field of the detection object (e.g., an external magnetic field) is collected by the first to fifth magnetic components 51 to 55. The collected magnetic field is efficiently applied to the first to fourth magnetic elements 11E to 14E. Thus, the magnetic field of the detection object can be detected with high sensitivity. As described later, a current is supplied to the first to fourth conductive components 21 to 24. The magnetic field generated by the current flowing to the first to fourth conductive components 21 to 24 is efficiently applied to the first to fourth magnetic elements 11E to 14E through the first to fifth magnetic components 51 to 55. A higher sensitivity can be obtained. For example, the current supplied to the conductive component can be reduced. For example, power consumption can be reduced. For example, current leakage to the magnetic element caused by capacitive coupling can be suppressed. Through the embodiment, a magnetic sensor that can achieve improved sensitivity can be provided. The first to fifth magnetic components 51 to 55 function as an MFC (Magnetic Flux Concentrator), for example.

[0048] The resistance of the first to fourth magnetic elements 11E to 14E changes according to the magnetic field of the detection target (for example, the external magnetic field). This is because the magnetization direction of the magnetic layer included in the magnetic element changes according to the magnetic field of the detection target.

[0049] like Figure 2As shown in (b), the first magnetic element 11E includes the first magnetic layer 11, the first relative magnetic layer 11o, and the first non-magnetic layer 11n disposed between the first magnetic layer 11 and the first relative magnetic layer 11o. The direction from the first magnetic layer 11 to the first relative magnetic layer 11o is along the second direction (for example, the Z-axis direction). The second magnetic element 12E includes the second magnetic layer 12, the second relative magnetic layer 12o, and the second non-magnetic layer 12n disposed between the second magnetic layer 12 and the second relative magnetic layer 12o. The direction from the second magnetic layer 12 to the second relative magnetic layer 12o is along the second direction. The third magnetic element 13E includes the third magnetic layer 13, the third relative magnetic layer 13o, and the third non-magnetic layer 13n disposed between the third magnetic layer 13 and the third relative magnetic layer 13o. The direction from the third magnetic layer 13 to the third relative magnetic layer 13o is along the second direction. The fourth magnetic element 14E includes a fourth magnetic layer 14, a fourth counter magnetic layer 14o, and a fourth nonmagnetic layer 14n provided between the fourth magnetic layer 14 and the fourth counter magnetic layer 14o. The direction from the fourth magnetic layer 14 to the fourth counter magnetic layer 14o is along the second direction.

[0050] For example, at least one of the orientation of the magnetization of the first magnetic layer 11 and the orientation of the magnetization of the first relative magnetic layer 11o changes according to the applied magnetic field. For example, at least one of the orientation of the magnetization of the second magnetic layer 12 and the orientation of the magnetization of the second relative magnetic layer 12o changes according to the applied magnetic field. For example, at least one of the orientation of the magnetization of the third magnetic layer 13 and the orientation of the magnetization of the third relative magnetic layer 13o changes according to the applied magnetic field. For example, at least one of the orientation of the magnetization of the fourth magnetic layer 14 and the orientation of the magnetization of the fourth relative magnetic layer 14o changes according to the applied magnetic field. In each of the plurality of magnetic elements, the resistance of each of the plurality of magnetic elements changes according to the change in the angle between the magnetizations of the two magnetic layers.

[0051] In one example, the first to fourth non-magnetic layers 11n to 14n include at least one selected from the group consisting of Cu, Ag, and Au. The magnetic element is, for example, a GMR (Giant Magnetic Resistance) element.

[0052] In one example, the first to fourth non-magnetic layers 11n to 14n are insulating. The first to fourth non-magnetic layers 11n to 14n include, for example, MgO, etc. The magnetic element may be, for example, a TMR (Tunnel Magneto Resistance) element.

[0053] like Figure 2As shown in (b), the first magnetic element 11E has a width w1 along the first direction (X-axis direction). The second magnetic element 12E has a width w2 along the first direction (X-axis direction). The third magnetic element 13E has a width w3 along the first direction (X-axis direction). The fourth magnetic element 14E has a width w4 along the first direction (X-axis direction).

[0054] like Figure 1 As shown in (a), the first magnetic element 11E has a length L1 along the third direction. The third direction intersects with a plane including the first direction and the second direction. The third direction is, for example, the Y-axis direction. The second magnetic element 12E has a length L2 along the third direction. The third magnetic element 13E has a length L3 along the third direction. The fourth magnetic element 14E has a length L4 along the third direction.

[0055] The length L1 is greater than the width w1. The length L2 is greater than the width w2. The length L3 is greater than the width w3. The length L4 is greater than the width w4. For example, in the magnetic layer included in the magnetic element, stable magnetization can be obtained.

[0056] Figure 3 It is a schematic plan view illustrating the magnetic sensor according to the first embodiment.

[0057] like Figure 3 As shown, the magnetic sensor 110 may include a first circuit 71. The first circuit 71 can supply a first current I1 including an AC component to the first conductive member 21, the second conductive member 22, the third conductive member 23, and the fourth conductive member 24. The first circuit 71 may be included in the control unit 70, for example.

[0058] like Figure 3 As shown, the direction from one end 21e of the first conductive component 21 to the other end 21f of the first conductive component 21 is along the third direction. As already described, the third direction intersects the plane including the first direction and the second direction. The third direction is, for example, the Y-axis direction. The direction from one end 22e of the second conductive component 22 to the other end 22f of the second conductive component 22 is along the third direction. The direction from one end 23e of the third conductive component 23 to the other end 23f of the third conductive component 23 is along the third direction. The direction from one end 24e of the fourth conductive component 24 to the other end 24f of the fourth conductive component 24 is along the third direction.

[0059] In this example, the other end 21f of the first conductive member 21 is electrically connected to the other end 23f of the third conductive member 23. The one end 23e of the third conductive member 23 is electrically connected to the one end 24e of the fourth conductive member 24. The other end 24f of the fourth conductive member 24 is electrically connected to the other end 22f of the second conductive member 22.

[0060] The first circuit 71 can supply the first current I1 including an AC component between the end 21e of the first conductive member 21 and the end 22e of the second conductive member 22. As described later, the magnetic field generated by the first current I1 including an AC component is applied to the magnetic element, thereby enabling detection with higher sensitivity.

[0061] Figure 4 It is a schematic plan view illustrating the magnetic sensor according to the first embodiment.

[0062] like Figure 4 As shown, the magnetic sensor 110 may include a second circuit 72. The second circuit 72 can supply a detection current Is to the first magnetic element 11E, the second magnetic element 12E, the third magnetic element 13E, and the fourth magnetic element 14E. The second circuit 72 may be included in the control unit 70, for example.

[0063] like Figure 4 As shown, the direction from one end 11e of the first magnetic element 11E to the other end 11f of the first magnetic element 11E is along the third direction (for example, the Y-axis direction). The direction from one end 12e of the second magnetic element 12E to the other end 12f of the second magnetic element 12E is along the third direction. The direction from one end 13e of the third magnetic element 13E to the other end 13f of the third magnetic element 13E is along the third direction. The direction from one end 14e of the fourth magnetic element 14E to the other end 14f of the fourth magnetic element 14E is along the third direction.

[0064] In this example, the other end 11f of the first magnetic element 11E is electrically connected to the other end 12f of the second magnetic element 12E. One end 11e of the first magnetic element 11E is electrically connected to one end 13e of the third magnetic element 13E. The other end 13f of the third magnetic element 13E is electrically connected to the other end 14f of the fourth magnetic element 14E. One end 14e of the fourth magnetic element 14E is electrically connected to one end 12e of the second magnetic element 12E. The second circuit 72 is capable of supplying a detection current Is between a first connection point CP1 between the other end 11f of the first magnetic element 11E and the other end 12f of the second magnetic element 12E and a second connection point CP2 between the other end 13f of the third magnetic element 13E and the other end 14f of the fourth magnetic element 14E.

[0065] like Figure 4 As shown, the magnetic sensor 110 may further include a third circuit 73. The third circuit 73 may be included in the control unit 70, for example.

[0066] The third circuit 73 can detect a change in potential between the third connection point CP3 between one end 11e of the first magnetic element 11E and one end 13e of the third magnetic element 13E and the fourth connection point CP4 between one end 14e of the fourth magnetic element 14E and one end 12e of the second magnetic element 12E. The third circuit 73 can output a signal Sig1 corresponding to the change in potential. The third connection point CP3 and the fourth connection point CP4 correspond to the two midpoints of the bridge circuit.

[0067] Hereinafter, an example of a change in the resistance of the first magnetic element 11E when a current flows through the first conductive member 21 will be described. The following description of an example of a change in the resistance of the first magnetic element 11E is also applicable to other magnetic elements.

[0068] Figure 5 (a) and Figure 5 (b) is a schematic diagram illustrating the characteristics of the magnetic sensor according to the first embodiment.

[0069] The horizontal axis of these graphs corresponds to the value of the current (for example, the first current I1) flowing to the first conductive member 21. The vertical axis is the resistance Rx of the first magnetic element 11E. Figure 5 (a) and Figure 5 As shown in (b), in the embodiment, the resistance Rx exhibits an even function characteristic with respect to the change in current (first current I1).

[0070] For example, the resistance Rx of the first magnetic element 11E is the first value R1 when the first value current Ia1 is supplied to the first conductive component 21. The resistance Rx is the second value R2 when the second value current Ia2 is supplied to the first conductive component 21. The resistance Rx is the third value R3 when the third value current Ia3 is supplied to the first conductive component 21. The absolute value of the first value current Ia1 is smaller than the absolute value of the second value current Ia2, and smaller than the absolute value of the third value current Ia3. The first value current Ia1 can be substantially 0, for example. The direction of the second value current Ia2 is opposite to the direction of the third value current Ia3.

[0071] exist Figure 5 In the example (a), the first value R1 is lower than the second value R2, which is lower than the third value R3. Figure 5 In the example (a), the resistor Rx has a "valley-shaped" characteristic. The first value R1 is, for example, the lowest value of the resistor. Figure 5 In the example (b), the first value R1 is higher than the second value R2, which is higher than the third value R3. Figure 5 In the example of (b), the resistor Rx has a "hill-shaped" characteristic. The first value R1 is, for example, the highest value of the resistor.

[0072] For example, when the external magnetic field is substantially zero, the magnetization of the first magnetic layer 11 and the magnetization of the first relative magnetic layer 11o are "parallel", and for example, a "valley-shaped" characteristic can be obtained under the action of interlayer magnetic coupling. At this time, for example, the thickness of the first non-magnetic layer 11n is greater than 2.5nm. For example, when the external magnetic field is substantially zero, the magnetization of the first magnetic layer 11 and the magnetization of the first relative magnetic layer 11o are "anti-parallel", and for example, a "mountain-shaped" characteristic can be obtained under the action of interlayer magnetic coupling. In this case, the thickness of the first non-magnetic layer 11n is, for example, greater than 1.9nm and less than 2.1nm.

[0073] For example, when no current flows to the first conductive member 21, the resistance Rx is the fourth value R4. For example, the first value R1 is substantially the same as the fourth value R4 when no current flows. For example, the absolute value of the difference between the first value R1 and the fourth value R4 is less than 0.01 relative to the fourth value R4. The ratio may also be less than 0.001. With respect to positive and negative currents, the characteristics of an even function can be substantially obtained.

[0074] Such a relationship between the first current I1 and the resistance Rx is based on the fact that a magnetic field caused by the first current I1 is applied to the first magnetic element 11E, and the resistance Rx of the first magnetic element 11E changes according to the intensity of the magnetic field.

[0075] The resistance Rx when an external magnetic field is applied to the first magnetic element 11E is also Figure 5 (a) or Figure 5 The example shown in (b) also exhibits even function characteristics. The external magnetic field includes, for example, a component along the X-axis direction.

[0076] Figure 6 (a) and Figure 6 (b) is a schematic diagram illustrating the characteristics of the magnetic sensor according to the first embodiment.

[0077] The horizontal axis of these graphs is the intensity of the external magnetic field Hex applied to the first magnetic element 11E. The vertical axis is the resistance Rx of the first magnetic element 11E. These graphs correspond to RH characteristics. Figure 6 (a) and Figure 6 As shown in (b), the resistor Rx has an even function characteristic with respect to the magnetic field (external magnetic field Hex, for example, the magnetic field in the X-axis direction) applied to the first magnetic element 11E.

[0078] like Figure 6 (a) and Figure 6As shown in (b), the resistance Rx of the first magnetic element 11E is the first value R1 when the first magnetic field Hex1 is applied to the first magnetic element 11E. The resistance Rx is the second value R2 when the second magnetic field Hex2 is applied to the first magnetic element 11E. The resistance Rx is the third value R3 when the third magnetic field Hex3 is applied to the first magnetic element 11E. The absolute value of the first magnetic field Hex1 is smaller than the absolute value of the second magnetic field Hex2, and smaller than the absolute value of the third magnetic field Hex3. The direction of the second magnetic field Hex2 is opposite to the direction of the third magnetic field Hex3.

[0079] exist Figure 6 In the example (a), the first value R1 is lower than the second value R2, which is lower than the third value R3. Figure 6 In the example of (b), the first value R1 is higher than the second value R2 and higher than the third value R3. For example, when no external magnetic field is applied to the first magnetic element 11E, the resistance Rx is the fourth value R4. The first value R1 is substantially the same as the fourth value R4 when no external magnetic field is applied. For example, the absolute value of the difference between the first value R1 and the fourth value R4 is less than 0.01 relative to the fourth value R4. The ratio may also be less than 0.001. With respect to positive and negative external magnetic fields, the characteristics of an even function can be substantially obtained.

[0080] By utilizing the characteristics of such an even function, high-sensitivity detection can be achieved as follows.

[0081] Hereinafter, an example of a case where the first current I1 is an alternating current and substantially does not include a direct current component will be described. The first current I1 (alternating current) is supplied to the first conductive member 21, and an alternating magnetic field caused by the alternating current is applied to the first magnetic element 11E. An example of a change in the resistance Rx at this time will be described.

[0082] Figure 7 (a)~ Figure 7 (c) is a graph illustrating the characteristics of the magnetic sensor according to the first embodiment.

[0083] Figure 7 (a) shows the characteristics when the signal magnetic field Hsig (external magnetic field) applied to the first magnetic element 11E is zero. Figure 7 (b) shows the characteristics when the signal magnetic field Hsig is positive. Figure 7 (c) shows the characteristics when the signal magnetic field Hsig is negative. These graphs show the relationship between the magnetic field H and the resistance R (corresponding to the resistance Rx).

[0084] like Figure 7As shown in (a), when the signal magnetic field Hsig is 0, the resistance R exhibits symmetrical characteristics with respect to the positive and negative magnetic fields H. When the AC magnetic field Hac is zero, the resistance R is a low resistance Ro. For example, the magnetization of the magnetization free layer rotates in substantially the same manner with respect to the positive and negative magnetic fields H. Thus, a symmetrical change in resistance can be obtained. The change in resistance R with respect to the AC magnetic field Hac becomes the same value under positive and negative polarities. The period of the change in resistance R becomes 1 / 2 times the period of the AC magnetic field Hac. The change in resistance R does not substantially have a frequency component of the AC magnetic field Hac.

[0085] like Figure 7 As shown in (b), when a positive signal magnetic field Hsig is applied, the characteristics of the resistor R shift to the positive magnetic field H. In the positive AC magnetic field Hac, for example, the resistor R becomes high, and in the negative AC magnetic field Hac, the resistor R becomes low.

[0086] like Figure 7 As shown in (c), when a negative signal magnetic field Hsig is applied, the characteristic of the resistor R shifts to the negative magnetic field H. In the positive AC magnetic field Hac, for example, the resistor R decreases, and in the negative AC magnetic field Hac, the resistor R increases.

[0087] When a signal magnetic field Hsig of a predetermined magnitude is applied, a change in resistance R that is different from the positive and negative sides of the AC magnetic field Hac is generated. The period of the change in resistance R relative to the positive and negative sides of the AC magnetic field Hac is the same as the period of the AC magnetic field Hac. An output voltage having an AC frequency component corresponding to the signal magnetic field Hsig is generated.

[0088] The above characteristics can be obtained when the signal magnetic field Hsig does not change with time. When the signal magnetic field Hsig changes with time, it becomes as follows. The frequency of the signal magnetic field Hsig is set to the signal frequency fsig. The frequency of the AC magnetic field Hac is set to the AC frequency fac. At this time, at the frequency of fac±fsig, an output corresponding to the signal magnetic field Hsig is generated.

[0089] When the signal magnetic field Hsig changes with time, the signal frequency fsig is, for example, 1 kHz or less. On the other hand, the AC frequency fac is sufficiently higher than the signal frequency fsig. For example, the AC frequency fac is 10 times or more of the signal frequency fsig.

[0090] For example, by extracting the output voltage of the component (AC frequency component) of the same period (frequency) as the period (frequency) of the AC magnetic field Hac, the signal magnetic field Hsig can be detected with high accuracy. In the magnetic sensor 111 of the embodiment, such characteristics can be used to detect the external magnetic field Hex (signal magnetic field Hsig) as the detection object with high sensitivity. In the embodiment, the external magnetic field Hex (signal magnetic field Hsig) and the AC magnetic field Hac caused by the first current I1 can be efficiently applied to the first magnetic element 11E using the first magnetic component 51 and the second magnetic component 52. High sensitivity can be obtained.

[0091] For example, the phase of the magnetic field applied to the first magnetic element 11E by the first current I1 supplied to the first conductive component 21 is opposite to the phase of the magnetic field applied to the third magnetic element 13E by the first current I1 supplied to the third conductive component 23. For example, the phase of the magnetic field applied to the second magnetic element 12E by the first current I1 supplied to the second conductive component 22 is opposite to the phase of the magnetic field applied to the fourth magnetic element 14E by the first current I1 supplied to the fourth conductive component 24. For example, the phase of the magnetic field applied to the first magnetic element 11E by the first current I1 supplied to the first conductive component 21 is opposite to the phase of the magnetic field applied to the second magnetic element 12E by the first current I1 supplied to the second conductive component 22. By such a bridge circuit, the noise component is suppressed and higher sensitivity can be obtained.

[0092] In the embodiment, as described below, the structure of the first magnetic component 51 may be different from the structure of the third to fifth magnetic components 53 to 55. The structure of the second magnetic component 52 may be different from the structure of the third to fifth magnetic components 53 to 55. Thus, a more uniform magnetic field can be applied to the four magnetic elements. A higher sensitivity can be obtained. It is known that the magnetic field between the first magnetic component 51 and the third magnetic component 53 and between the fourth magnetic component 54 and the second magnetic component 52 is weaker than that of other parts. By making the structure of the first magnetic component 51 and the second magnetic component 52 different from that of other magnetic components, a more uniform magnetic field can be obtained.

[0093] For example, Figure 1As shown in (a), the first magnetic component width w51 of the first magnetic component 51 along the first direction (X-axis direction) is larger than the fifth magnetic component width w55 of the fifth magnetic component 55 along the first direction. The second magnetic component width w52 of the second magnetic component 52 along the first direction (X-axis direction) is larger than the fifth magnetic component width w55. The third magnetic component width w53 of the third magnetic component 53 along the first direction is smaller than the first magnetic component width w51. The fourth magnetic component width w54 of the fourth magnetic component 54 along the first direction is smaller than the second magnetic component width w52. With such a configuration, a more uniform magnetic field can be obtained.

[0094] Figure 8 This is a schematic cross-sectional view illustrating the magnetic sensor according to the first embodiment.

[0095] like Figure 8 As shown, in the magnetic sensor 111 of the embodiment, the first to fourth magnetic elements 11E to 14E, the first to fourth conductive members 21 to 24 and the first to fifth magnetic members 51 to 55 are also provided. In the magnetic sensor 111, the thicknesses of the first to fifth magnetic members 51 to 55 are different from each other. The other structures in the magnetic sensor 111 may be the same as those of the magnetic sensor 110.

[0096] In the magnetic sensor 111, the first magnetic component thickness t1 of the first magnetic component 51 along the second direction (Z-axis direction) is thicker than the fifth magnetic component thickness t5 of the fifth magnetic component 55 along the second direction. The second magnetic component thickness t2 of the second magnetic component 52 along the second direction (Z-axis direction) is thicker than the fifth magnetic component thickness t5. The third magnetic component thickness t3 of the third magnetic component 53 along the second direction is thinner than the first magnetic component thickness t1. The fourth magnetic component thickness t4 of the fourth magnetic component 54 along the second direction is thinner than the second magnetic component thickness t2. With such a structure, a more uniform magnetic field can be obtained.

[0097] like Figure 8 As shown, in the magnetic sensor 111, the widths of the first to fifth magnetic members 51 to 55 may be the same as each other. In the magnetic sensor 111, similarly to the magnetic sensor 110, the widths of the first to fifth magnetic members 51 to 55 may be different from each other.

[0098] Fig. 9 (a) and Fig. 9 (b) is a schematic plan view illustrating the magnetic sensor according to the first embodiment.

[0099] like Fig. 9As shown in (a), in the magnetic sensor 112 of the embodiment, the first to fourth magnetic elements 11E to 14E, the first to fourth conductive members 21 to 24 and the first to fifth magnetic members 51 to 55 are also provided. In the magnetic sensor 112, the lengths of the first to fifth magnetic members 51 to 55 in the Y-axis direction are different from each other. The other structures in the magnetic sensor 112 can be the same as those in the magnetic sensor 110.

[0100] like Fig. 9 As shown in (b), the first magnetic component length L51 of the first magnetic component 51 along the third direction (for example, the Y-axis direction) is longer than the fifth magnetic component length L55 of the fifth magnetic component 55 along the third direction. The second magnetic component length L52 of the second magnetic component 52 along the third direction (for example, the Y-axis direction) is longer than the fifth magnetic component length L55. The third magnetic component length L53 of the third magnetic component 53 along the third direction is shorter than the first magnetic component length L51. The fourth magnetic component length L54 of the fourth magnetic component 54 along the third direction is shorter than the second magnetic component length L52. Through such a configuration, a more uniform magnetic field can be obtained. In practice, the above-mentioned length can be set to the length of the third direction (Y-axis direction) at the center of the first direction (X-axis direction) of each of the multiple magnetic components.

[0101] like Fig. 9 As shown in (b), the length of the first magnetic component 51 along the Y-axis direction may also vary along the X-axis direction. For example, the first magnetic component 51 includes a first magnetic component end 51a and a first magnetic component other end 51b. The first magnetic component other end 51b is between the first magnetic component end 51a and the third magnetic component 53 in the first direction (X-axis direction). The first magnetic component length L51 of the first magnetic component 51 along the third direction (Y-axis direction) may also increase in the direction from the first magnetic component other end 51b to the first magnetic component end 51a.

[0102] For example, the second magnetic component 52 includes a second magnetic component end 52a and a second magnetic component other end 52b. The second magnetic component end 52a is located between the fourth magnetic component 54 and the second magnetic component other end 52b in the first direction (X-axis direction). The second magnetic component length L52 of the second magnetic component 52 along the third direction (Y-axis direction) can also increase in the direction from the second magnetic component end 52a to the second magnetic component other end 52b. The length of the third magnetic component 53 and the fourth magnetic component 54 in the Y-axis direction can also change along the X-axis direction.

[0103] Fig.10 is a graph illustrating the characteristics of the magnetic sensor.

[0104] Fig.10The simulation results of the characteristics when the first magnetic component width w51 of the first magnetic component 51 along the first direction (X-axis direction) is changed in the configuration of the magnetic sensor 110 are illustrated. In the simulation, the third magnetic component width w53 of the third magnetic component 53 along the first direction is the same as the fifth magnetic component width w55 of the fifth magnetic component 55 along the first direction. The fourth magnetic component width w54 of the fourth magnetic component 54 along the first direction is the same as the fifth magnetic component width w55. The second magnetic component width w52 of the second magnetic component 52 along the first direction is the same as the first magnetic component width w51 of the first magnetic component 51 along the first direction. Fig.10 The horizontal axis is the ratio WR1 of the width w51 of the first magnetic component to the width w55 of the fifth magnetic component. The vertical axis is the ratio BR of the magnetic flux density at the position of the first magnetic element 11E to the magnetic flux density at the position of the second magnetic element 12E when an external magnetic field is applied. When the ratio BR is 1, the magnetic flux density is uniform.

[0105] like Fig.10 As shown in FIG. 1 , when the ratio WR1 is 1 and the width of the magnetic member is the same, the ratio BR is as low as about 0.85. When the ratio WR1 is 2 or more and 3 or less, the ratio BR is close to 1.

[0106] In the embodiment, the ratio WR1 of the first magnetic member width w51 to the fifth magnetic member width w55 is preferably not less than 2 and not more than 3. A uniform magnetic field can be applied to the first to fourth magnetic elements 11E to 14E.

[0107] For example, the first magnetic member thickness t1 (see Figure 8 ) is, for example, greater than twice and less than four times the thickness t5 of the fifth magnetic component 55 along the second direction.

[0108] For example, the first magnetic member 51 has a first magnetic member length L51 (see Fig. 9 (b)) is not less than 2 times and not more than 3 times the fifth magnetic member length L55 of the fifth magnetic member 55 along the third direction.

[0109] Hereinafter, examples of the overlapping amounts of the first to fourth magnetic elements 11E to 14E and the magnetic member and the overlapping amounts of the first to fourth conductive members 21 to 24 and the magnetic member will be described.

[0110] like Figure 2 As shown in (a), a portion 11Ep of the first magnetic element 11E overlaps a portion 51p of the first magnetic member 51 in the second direction (Z-axis direction). Figure 2As shown in (b), the width of a portion 11Ep of the first magnetic element 11E along the first direction (X-axis direction) is defined as a width d1. Figure 2 As shown in (a), the other portion 11Eq of the first magnetic element 11E overlaps with a portion 53p of the third magnetic component 53 in the second direction (Z-axis direction). The width of the other portion 11Eq of the first magnetic element 11E along the first direction (X-axis direction) is set to be substantially the same as the width d1. As already described, the first magnetic element 11E has a width w1 along the first direction (see Figure 2 (b)) In the embodiment, the ratio of the width d1 to the width w1 is preferably 0.1 or more and 0.4 or less.

[0111] like Figure 2 As shown in (a), a portion 12Ep of the second magnetic element 12E overlaps a portion 52p of the second magnetic member 52 in the second direction (Z-axis direction). Figure 2 As shown in (b), the width of a portion 12Ep of the second magnetic element 12E along the first direction (X-axis direction) is set to width d2. Figure 2 As shown in (a), the other part 12Eq of the second magnetic element 12E overlaps with a part 54p of the fourth magnetic component 54 in the second direction (Z-axis direction). The width of the other part 12Eq of the second magnetic element 12E along the first direction (X-axis direction) is set to be substantially the same as the width d2. As already described, the second magnetic element 12E has a width w2 along the first direction (refer to Figure 2 (b)) In the embodiment, the ratio of the width d2 to the width w2 is preferably 0.1 or more and 0.4 or less.

[0112] like Figure 2 As shown in (a), a portion 13Ep of the third magnetic element 13E overlaps with the other portion 53q of the third magnetic member 53 in the second direction (Z-axis direction). Figure 2 As shown in (b), the width of a portion 13Ep of the third magnetic element 13E along the first direction (X-axis direction) is defined as a width d3. Figure 2 As shown in (a), the other part 13Eq of the third magnetic element 13E overlaps with a part 55p of the fifth magnetic component 55 in the second direction (Z-axis direction). The width of the other part 13Eq of the third magnetic element 13E along the first direction (X-axis direction) is set to be substantially the same as the width d3. As already described, the third magnetic element 13E has a width w3 along the first direction (see Figure 2 (b)) In the embodiment, the ratio of the width d3 to the width w3 is preferably 0.1 or more and 0.4 or less.

[0113] like Figure 2As shown in (a), a portion 14Ep of the fourth magnetic element 14E overlaps with the other portion 55q of the fifth magnetic member 55 in the second direction (Z-axis direction). Figure 2 As shown in (b), the width of a portion 14Ep of the fourth magnetic element 14E along the first direction (X-axis direction) is set to width d4. Figure 2 As shown in (a), the other portion 14Eq of the fourth magnetic element 14E overlaps with the other portion 54q of the fourth magnetic component 54 in the second direction (Z-axis direction). The width of the other portion 14Eq of the fourth magnetic element 14E along the first direction (X-axis direction) is set to be substantially the same as the width d4. As already described, the fourth magnetic element 14E has a width w4 along the first direction (refer to Figure 2 (b)) In the embodiment, the ratio of the width d4 to the width w4 is preferably 0.1 or more and 0.4 or less.

[0114] With such a configuration, the magnetic field collected by the magnetic member is more efficiently applied to the magnetic element.

[0115] Fig.11 is a graph illustrating the characteristics of the magnetic sensor.

[0116] Fig.11 The characteristics when the width (width d1 ) of the overlapping portion of the first magnetic element 11E and the first magnetic member 51 is changed in the configuration of the magnetic sensor 110 will be exemplified. Fig.11 The horizontal axis is the width d1 relative to the width w53 of the third magnetic component (refer to Figure 1 (a)) is the ratio WR2. The vertical axis is the magnetic flux density B1 (relative value) at the position of the first magnetic element 11E when a uniform external magnetic field is applied. Fig.11 In the example of , the widths of the first to fifth magnetic components 51 to 55 are the same as each other. Fig.11 In the example of , the widths of the first to fourth magnetic elements 11E to 14E are the same. Fig.11 2 shows the results when the width w1 of the element is 4 μm, 6 μm or 8 μm.

[0117] like Fig.11 As shown, when the ratio WR2 is greater than 0.1 and less than 0.4, a high magnetic flux density B1 can be obtained. When the ratio WR2 is less than 0.1, for example, it can be considered that the magnetic flux is difficult to go to the magnetic element and will flow directly between multiple magnetic components. If the ratio WR2 exceeds 0.4, it can be considered that the leakage of the magnetic flux becomes larger.

[0118] like Figure 2 As shown in (a), a portion 21p of the first conductive member 21 overlaps a portion 51p of the first magnetic member 51 in the second direction (Z-axis direction). Figure 2As shown in (b), the width of a portion 21p of the first conductive member 21 along the first direction (X-axis direction) is defined as a width dx1. Figure 2 As shown in (a), the other portion 21q of the first conductive component 21 overlaps with a portion 53p of the third magnetic component 53 in the second direction (Z-axis direction). The width of the other portion 21q of the first conductive component 21 along the first direction (X-axis direction) is set to be substantially the same as the width dx1. In the embodiment, the width dx1 is equal to the width w53 of the third magnetic component (see Figure 1 The ratio of (a)) is preferably 0.4 or less.

[0119] like Figure 2 As shown in (a), a portion 22p of the second conductive member 22 overlaps a portion 52p of the second magnetic member 52 in the second direction (Z-axis direction). Figure 2 As shown in (b), the width of a portion 22p of the second conductive member 22 along the first direction (X-axis direction) is defined as a width dx2. Figure 2 As shown in (a), the other portion 22q of the second conductive component 22 overlaps with a portion 54p of the fourth magnetic component 54 in the second direction (Z-axis direction). The width of the other portion 22q of the second conductive component 22 along the first direction (X-axis direction) is set to be substantially the same as the width dx2. In the embodiment, the width dx2 is equal to the width w54 of the fourth magnetic component (see Figure 1 The ratio of (a)) is preferably 0.4 or less.

[0120] like Figure 2 As shown in (a), a portion 23p of the third conductive member 23 overlaps with the other portion 53q of the third magnetic member 53 in the second direction (Z-axis direction). Figure 2 As shown in (b), the width of a portion 23p of the third conductive member 23 along the first direction (X-axis direction) is defined as a width dx3. Figure 2 As shown in (a), the other part 23q of the third conductive component 23 overlaps with a part 55p of the fifth magnetic component 55 in the second direction (Z-axis direction). The width of the other part 23q of the third conductive component 23 along the first direction (X-axis direction) is set to be substantially the same as the width dx3. In the embodiment, the width dx3 is preferably substantially the same as the width dx1. For example, the width dx3 is greater than 0.8 times and less than 1.2 times the width dx1.

[0121] like Figure 2 As shown in (a), a portion 24p of the fourth conductive member 24 overlaps with the other portion 55q of the fifth magnetic member 55 in the second direction (Z-axis direction). Figure 2As shown in (b), the width of a portion 24p of the fourth conductive member 24 along the first direction (X-axis direction) is defined as a width dx4. Figure 2 As shown in (a), the other part 24q of the fourth conductive component 24 overlaps with the other part 54q of the fourth magnetic component 54 in the second direction (Z-axis direction). The width of the other part 24q of the fourth conductive component 24 along the first direction (X-axis direction) is set to be substantially the same as the width dx4. In the embodiment, the width dx4 is preferably substantially the same as the width dx2. For example, the width dx4 is greater than 0.8 times and less than 1.2 times the width dx2.

[0122] With such a configuration, the magnetic field generated in the conductive member is efficiently applied to the magnetic element via the magnetic member.

[0123] Fig.12 is a graph illustrating the characteristics of the magnetic sensor.

[0124] Fig.12 The following is an example of a characteristic when the width (relative width) of the portion where the conductive component and the magnetic component overlap is changed in the configuration of the magnetic sensor 110. The width dx1 of the portion where the first conductive component 21 overlaps the first magnetic component 51 is the same as the width of the portion where the first conductive component 21 overlaps the third magnetic component 53. In this example, the width of the third magnetic component 53 is fixed, and the width of the first conductive component 21 is changed. Fig.12 In the example of , the current density supplied to the first conductive member 21 is constant. In accordance with the change in the width of the first conductive member 21, the supplied current is changed. Fig.12 The horizontal axis is the ratio WR3. The ratio WR3 is the width dx1 of the portion where the first conductive component 21 and the first magnetic component 51 overlap (see Figure 2 (b)) relative to the width w53 of the third magnetic member (refer to Figure 1 (a)) ratio. Fig.12 The vertical axis represents the magnetic flux density B2 (relative value) at the position of the first magnetic element 11E of the external magnetic field generated by the current supplied to the first conductive member 21 .

[0125] from Fig.12It can be seen that if the ratio WR3 becomes higher in the range of 0 to 0.32 of the ratio WR3, the magnetic flux density B2 becomes higher. That is, within this range, if the width of the portion where the conductive component overlaps the magnetic component becomes larger, the magnetic flux density B2 becomes higher. If the ratio WR3 exceeds 0.32, the magnetic flux density B2 is saturated. If the ratio WR3 is increased when the ratio WR3 exceeds 0.32, more current is required. Therefore, in practical terms, the ratio WR3 is preferably less than 0.32. From the perspective of reducing current consumption, the ratio WR3 may also be less than 0.2. Even in this case, a higher magnetic flux density B2 can be obtained than when the ratio WR3 is 0. For example, the ratio WR3 may also be greater than 0.02. For example, the ratio of the width of the overlap between the first conductive component 21 and the third magnetic component 53 to the width w53 of the third magnetic component along the first direction is preferably less than 0.32. The ratio may also be greater than 0.02.

[0126] like Figure 2 As shown in (b), the distance between the first magnetic component 51 and the third magnetic component 53 along the first direction (X-axis direction) is set to distance g1. The distance between the fourth magnetic component 54 and the second magnetic component 52 along the first direction (X-axis direction) is set to distance g2. The distance between the third magnetic component 53 and the fifth magnetic component 55 along the first direction (X-axis direction) is set to distance g3. The distance between the fifth magnetic component 55 and the fourth magnetic component 54 along the first direction (X-axis direction) is set to distance g4. The distances g1 to g4 are, for example, greater than 1 μm and less than 5 μm. As a result, the concentrated magnetic field is efficiently applied to the magnetic element.

[0127] like Figure 2 As shown in (b), the distance between the magnetic element and the magnetic member along the second direction (Z-axis direction) is defined as a distance dz. In the embodiment, the distance dz is preferably 0.01 μm or more and 0.5 μm or less. Thus, the concentrated magnetic field is efficiently applied to the magnetic element.

[0128] Fig.13 (a) and Fig.13 (b) is a schematic cross-sectional view illustrating the magnetic sensor according to the first embodiment.

[0129] like Fig.13 (a) and Fig.13As shown in (b), in the magnetic sensor 113 and the magnetic sensor 114 of the embodiment, the thickness of the magnetic component varies depending on the location. For example, the thickness at the end of a magnetic component in the X-axis direction (the length along the Z-axis direction) is thinner than the thickness at the center of the magnetic component in the X-axis direction. The magnetic field can be more concentrated at the end of the magnetic component in the X-axis direction. As in the magnetic sensor 113, the end may also be conical. The surface of the end may also be inclined relative to the X-axis direction. The configurations other than the above in the magnetic sensors 113 and 114 may be the same as those of the magnetic sensors 110 to 112.

[0130] Fig.14 This is a schematic cross-sectional view illustrating the magnetic sensor according to the first embodiment.

[0131] like Fig.14 As shown, in the magnetic sensor 115 of the embodiment, a portion of the first magnetic component 51 is located between the first magnetic element 11E and the first conductive component 21. A portion of the second magnetic component 52 is located between the second magnetic element 12E and the second conductive component 22. A portion of the third magnetic component 53 is located between the third magnetic element 13E and the third conductive component 23. A portion of the fourth magnetic component 54 is located between the fourth magnetic element 14E and the fourth conductive component 24. The configuration other than the above in the magnetic sensor 115 may be the same as that of the magnetic sensors 110 to 114. In the magnetic sensors 113 to 115, a magnetic sensor capable of achieving improved sensitivity can also be provided.

[0132] In the embodiment, the first to fourth magnetic layers 11 to 14 and the first to fourth counter magnetic layers 11o to 14o include at least one selected from the group consisting of Fe, Co and Ni, for example. The first to fifth magnetic components 51 to 55 include at least one selected from the group consisting of NiFe and CoZrNb, for example. The first to fourth conductive components 21 to 24 include at least one selected from the group consisting of Cu, Au and Al, for example.

[0133] (Second embodiment)

[0134] The second embodiment relates to an inspection device. As described later, the inspection device may include a diagnostic device.

[0135] Fig.15 It is a schematic perspective view showing an inspection device according to a second embodiment.

[0136] like Fig.15As shown, the inspection device 710 of the embodiment includes a magnetic sensor 150a and a processing unit 770. The magnetic sensor 150a can be a magnetic sensor of any of the first to fifth embodiments and its deformation. The processing unit 770 processes the output signal obtained from the magnetic sensor 150a. In the processing unit 770, the signal obtained from the magnetic sensor 150a can be compared with a reference value. The processing unit 770 can output the inspection result based on the processing result.

[0137] For example, the inspection device 710 inspects the inspection object 680. The inspection object 680 is, for example, an electronic device (including a semiconductor circuit, etc.). The inspection object 680 may also be, for example, a battery 610, etc.

[0138] For example, the magnetic sensor 150a of the embodiment may be used together with the battery 610. For example, the battery system 600 includes the battery 610 and the magnetic sensor 150a. The magnetic sensor 150a can detect a magnetic field generated by a current flowing through the battery 610.

[0139] Fig.16 It is a schematic plan view showing an inspection device according to a second embodiment.

[0140] like Fig.16 As shown, the magnetic sensor 150a includes, for example, a plurality of magnetic sensors of the embodiment. In this example, the magnetic sensor 150a includes a plurality of magnetic sensors (for example, the magnetic sensor 110, etc.). The plurality of magnetic sensors are arranged, for example, along two directions (for example, the X-axis direction and the Y-axis direction). The plurality of magnetic sensors 110 are, for example, disposed on a substrate.

[0141] The magnetic sensor 150a can detect the magnetic field generated by the current flowing to the inspection object 680 (for example, it can also be a battery 610). For example, if the battery 610 is close to an abnormal state, an abnormal current may flow to the battery 610. By using the magnetic sensor 150a to detect the abnormal current, the change in the state of the battery 610 can be known. For example, in a state where the magnetic sensor 150a is placed close to the battery 610, the entire battery 610 can be inspected in a short time using a sensor group drive unit in two directions. The magnetic sensor 150a can also be used to inspect the battery 610 during the manufacture of the battery 610.

[0142] The magnetic sensor according to the embodiment can be applied to, for example, an inspection device 710 such as a diagnostic device. Fig.17 It is a schematic diagram showing a magnetic sensor and an inspection device according to a second embodiment.

[0143] like Fig.17As shown, the diagnostic device 500 as an example of the inspection device 710 includes the magnetic sensor 150. The magnetic sensor 150 includes the magnetic sensors described in the first to fifth embodiments and their modifications.

[0144] In the diagnostic device 500, the magnetic sensor 150 is, for example, a brain magnetometer. The brain magnetometer detects the magnetic field emitted by the cranial nerves. When the magnetic sensor 150 is used as a brain magnetometer, the size of the magnetic element included in the magnetic sensor 150 is, for example, greater than 1 mm and less than 10 mm. This size is, for example, the length including the MFC.

[0145] like Fig.17 As shown, the magnetic sensor 150 (brain magnetometer) is, for example, mounted on the head of a human body. The magnetic sensor 150 (brain magnetometer) includes a sensor unit 301. The magnetic sensor 150 (brain magnetometer) may also include a plurality of sensor units 301. The number of the plurality of sensor units 301 is, for example, about 100 (e.g., more than 50 and less than 150). The plurality of sensor units 301 are provided on a flexible substrate 302.

[0146] The magnetic sensor 150 may include, for example, a circuit for differential detection, etc. The magnetic sensor 150 may include a sensor (for example, a potential terminal or an acceleration sensor, etc.) independent of the magnetic sensor.

[0147] The size of the magnetic sensor 150 is smaller than that of a conventional SQUID magnetic sensor. Therefore, it is easy to install the plurality of sensor units 301. It is easy to install the plurality of sensor units 301 and other circuits. It is easy for the plurality of sensor units 301 to coexist with other sensors.

[0148] The base 302 may include an elastic body such as silicone resin. For example, a plurality of sensor units 301 are continuously provided on the base 302. The base 302 can be closely attached to the head, for example.

[0149] The input / output line 303 of the sensor unit 301 is connected to the sensor driving unit 506 and the signal input / output unit 504 of the diagnostic device 500. Based on the power from the sensor driving unit 506 and the control signal from the signal input / output unit 504, the magnetic field is measured in the sensor unit 301. The result is input to the signal input / output unit 504. The signal obtained by the signal input / output unit 504 is supplied to the signal processing unit 508. In the signal processing unit 508, for example, noise removal, filtering, amplification, and signal calculation are performed. The signal processed by the signal processing unit 508 is supplied to the signal analysis unit 510. The signal analysis unit 510, for example, extracts a specific signal for brain magnetometry. In the signal analysis unit 510, for example, signal analysis is performed to match the signal phase.

[0150] The output of the signal analysis unit 510 (data after the signal analysis is completed) is supplied to the data processing unit 512. In the data processing unit 512, data analysis is performed. In this data analysis, for example, image data such as MRI (Magnetic Resonance Imaging) can be introduced. In this data analysis, for example, scalp potential information such as EEG (Electroencephalogram) can be introduced. Through data analysis, for example, neural discharge point analysis or inverse problem analysis is performed.

[0151] The result of data analysis is supplied to, for example, the imaging diagnosis unit 516. The imaging diagnosis unit 516 performs imaging. The imaging assists the diagnosis.

[0152] The above series of operations are controlled by, for example, the control unit 502. For example, necessary data such as primary signal data or metadata in the middle of data processing is stored in the data server. The data server and the control unit may be integrated.

[0153] The diagnostic device 500 of the embodiment includes the magnetic sensor 150 and a processing unit that processes an output signal obtained from the magnetic sensor 150. The processing unit includes, for example, at least one of a signal processing unit 508 and a data processing unit 512. The processing unit includes, for example, a computer.

[0154] exist Fig.17 In the magnetic sensor 150 shown, the sensor unit 301 is arranged on the head of the human body. The sensor unit 301 can also be arranged on the chest of the human body. Thus, the magnetocardiogram can be measured. For example, the sensor unit 301 can also be arranged on the abdomen of a pregnant woman. Thus, the heart rhythm of the fetus can be checked.

[0155] The magnetic sensor device including the subject is preferably installed in a shielded room, thereby suppressing the influence of, for example, geomagnetism or magnetic noise.

[0156] For example, a mechanism may be provided to partially shield the measurement site of the human body or the sensor unit 301. For example, a shielding mechanism may be provided in the sensor unit 301. For example, effective shielding may be performed in signal analysis or data processing.

[0157] In an embodiment, the substrate 302 may be flexible or substantially inflexible. Fig.17 In the example shown, the base 302 is obtained by processing a continuous film into a hat shape. The base 302 may also be a mesh. Thus, for example, good assembly properties can be obtained. For example, the close fit of the base 302 to the human body is improved. The base 302 may also be a helmet shape and be hard.

[0158] Fig.18It is a schematic diagram showing the inspection device according to the embodiment.

[0159] Fig.18 is an example of a magnetometer. Fig.18 In the example shown, the sensor unit 301 is provided on a flat plate-shaped hard base 305 .

[0160] exist Fig.18 In the example shown, the input and output of the signal obtained from the sensor unit 301 are related to Fig.17 The input and output of the instructions are the same. Fig.18 In the example shown, the processing of the signal obtained from the sensor unit 301 is similar to that of Fig.17 The processing of the description is the same.

[0161] As a device for measuring weak magnetic fields such as magnetic fields generated by living organisms, there is a reference example using a SQUID (Superconducting Quantum Interference Device) magnetic sensor. In this reference example, since superconductivity is used, the device is large and consumes a lot of power. The burden on the measurement object (patient) is large.

[0162] According to the embodiment, the device can be made small. The power consumption can be suppressed. The burden on the measurement object (patient) can be reduced. According to the embodiment, the SN ratio of magnetic field detection can be improved. The sensitivity can be improved.

[0163] The implementation method may include the following technical solutions.

[0164] (Technical Solution 1)

[0165] A magnetic sensor,

[0166] The first magnetic element;

[0167] A second magnetic element;

[0168] a third magnetic element, disposed between the first magnetic element and the second magnetic element in the first direction;

[0169] a fourth magnetic element, disposed between the third magnetic element and the second magnetic element in the first direction;

[0170] a first conductive member;

[0171] a second conductive member;

[0172] a third conductive component, disposed between the first conductive component and the second conductive component in the first direction;

[0173] a fourth conductive component disposed between the third conductive component and the second conductive component in the first direction;

[0174] A first magnetic component;

[0175] A second magnetic component;

[0176] a third magnetic component disposed between the first magnetic component and the second magnetic component in the first direction;

[0177] a fourth magnetic member disposed between the third magnetic member and the second magnetic member in the first direction; and

[0178] a fifth magnetic member disposed between the third magnetic member and the fourth magnetic member in the first direction,

[0179] The first magnetic element and the first conductive component overlap with a region between the first magnetic component and the third magnetic component in a second direction intersecting the first direction.

[0180] The second magnetic element and the second conductive component overlap with a region between the fourth magnetic component and the second magnetic component in the second direction.

[0181] The third magnetic element and the third conductive component overlap with a region between the third magnetic component and the fifth magnetic component in the second direction.

[0182] The fourth magnetic element and the fourth conductive member overlap with a region between the fifth magnetic member and the fourth magnetic member in the second direction.

[0183] (Technical Solution 2)

[0184] According to the magnetic sensor described in technical solution 1,

[0185] The device further includes a first circuit capable of supplying a first current including an AC component to the first conductive member, the second conductive member, the third conductive member, and the fourth conductive member.

[0186] (Technical Solution 3)

[0187] According to the magnetic sensor described in technical solution 2,

[0188] A direction from one end of the first conductive component to the other end of the first conductive component is along a third direction intersecting a plane including the first direction and the second direction.

[0189] A direction from one end of the second conductive component to the other end of the second conductive component is along the third direction,

[0190] A direction from one end of the third conductive component to the other end of the third conductive component is along the third direction,

[0191] A direction from one end of the fourth conductive component to the other end of the fourth conductive component is along the third direction,

[0192] The other end of the first conductive member is electrically connected to the other end of the third conductive member.

[0193] The one end of the third conductive component is electrically connected to the one end of the fourth conductive component,

[0194] The other end of the fourth conductive member is electrically connected to the other end of the second conductive member,

[0195] The first circuit can supply the first current between the one end of the first conductive member and the one end of the second conductive member.

[0196] (Technical Solution 4)

[0197] According to the magnetic sensor described in technical solution 3,

[0198] further comprising a second circuit capable of supplying a detection current to the first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element,

[0199] A direction from one end of the first magnetic element to the other end of the first magnetic element is along the third direction,

[0200] A direction from one end of the second magnetic element to the other end of the second magnetic element is along the third direction,

[0201] A direction from one end of the third magnetic element to the other end of the third magnetic element is along the third direction,

[0202] A direction from one end of the fourth magnetic element to the other end of the fourth magnetic element is along the third direction,

[0203] The other end of the first magnetic element is electrically connected to the other end of the second magnetic element,

[0204] The one end of the first magnetic element is electrically connected to the one end of the third magnetic element,

[0205] The other end of the third magnetic element is electrically connected to the other end of the fourth magnetic element,

[0206] The one end of the fourth magnetic element is electrically connected to the one end of the second magnetic element,

[0207] The second circuit can supply the detection current between a first connection point between the other end of the first magnetic element and the other end of the second magnetic element and a second connection point between the other end of the third magnetic element and the other end of the fourth magnetic element.

[0208] (Technical Solution 5)

[0209] According to the magnetic sensor described in technical solution 4,

[0210] It also has a third circuit.

[0211] The third circuit can detect a change in potential between a third connection point between the one end of the first magnetic element and the one end of the third magnetic element and a fourth connection point between the one end of the fourth magnetic element and the one end of the second magnetic element.

[0212] (Technical Solution 6)

[0213] The magnetic sensor according to any one of technical solutions 1 to 5,

[0214] A portion of the first magnetic element and a portion of the first conductive component overlap at least a portion of the first magnetic component in the second direction.

[0215] The other part of the first magnetic element and the other part of the first conductive component overlap with a part of the third magnetic component in the second direction.

[0216] A portion of the second magnetic element and a portion of the second conductive component overlap at least a portion of the second magnetic component in the second direction.

[0217] The other part of the second magnetic element and the other part of the second conductive component overlap with a part of the fourth magnetic component in the second direction.

[0218] A portion of the third magnetic element and a portion of the third conductive component overlap with other portions of the third magnetic component in the second direction.

[0219] The other part of the third magnetic element and the other part of the third conductive component overlap with a part of the fifth magnetic component in the second direction.

[0220] A portion of the fourth magnetic element and a portion of the fourth conductive component overlap with other portions of the fifth magnetic component in the second direction.

[0221] The other portions of the fourth magnetic element and the other portions of the fourth conductive component overlap with the other portions of the fourth magnetic component in the second direction.

[0222] (Technical Solution 7)

[0223] The magnetic sensor according to any one of technical solutions 1 to 6,

[0224] The first magnetic element has a first width along the first direction,

[0225] a portion of the first magnetic element overlaps with the at least a portion of the first magnetic component in the second direction,

[0226] A ratio of a width of the portion of the first magnetic element along the first direction to the first width is greater than or equal to 0.1 and less than or equal to 0.4.

[0227] (Technical Solution 8)

[0228] The magnetic sensor according to any one of technical solutions 1 to 7,

[0229] A first magnetic member thickness of the first magnetic member along the second direction is thicker than a fifth magnetic member thickness of the fifth magnetic member along the second direction.

[0230] (Technical Solution 9)

[0231] According to the magnetic sensor described in technical solution 8,

[0232] A thickness of the third magnetic member along the second direction is thinner than a thickness of the first magnetic member.

[0233] (Technical Solution 10)

[0234] The magnetic sensor according to any one of technical solutions 1 to 7,

[0235] A first magnetic member width of the first magnetic member along the first direction is greater than a fifth magnetic member width of the fifth magnetic member along the first direction.

[0236] (Technical Solution 11)

[0237] According to the magnetic sensor described in technical solution 10,

[0238] A third magnetic member width of the third magnetic member along the first direction is smaller than a width of the first magnetic member.

[0239] (Technical Solution 12)

[0240] The magnetic sensor according to any one of technical solutions 3 to 5,

[0241] A first magnetic member length of the first magnetic member along the third direction is longer than a fifth magnetic member length of the fifth magnetic member along the third direction.

[0242] (Technical Solution 13)

[0243] According to the magnetic sensor described in technical solution 12,

[0244] A third magnetic member length of the third magnetic member along the third direction is shorter than a length of the first magnetic member.

[0245] (Technical Solution 14)

[0246] The magnetic sensor according to any one of technical solutions 3 to 5,

[0247] The first magnetic component includes a first magnetic component end and a first magnetic component other end,

[0248] The other end of the first magnetic component is located between the first magnetic component end and the third magnetic component in the first direction.

[0249] The length of the first magnetic member along the third direction increases in a direction from the other end of the first magnetic member toward the end of the first magnetic member.

[0250] (Technical Solution 15)

[0251] The magnetic sensor according to any one of technical solutions 1 to 14,

[0252] The resistance of the first magnetic element is a first value when a first magnetic field is applied to the first magnetic element.

[0253] The resistance has a second value when a second magnetic field is applied to the first magnetic element.

[0254] The resistance has a third value when a third magnetic field is applied to the first magnetic element.

[0255] The absolute value of the first magnetic field is smaller than the absolute value of the second magnetic field and smaller than the absolute value of the third magnetic field.

[0256] The direction of the second magnetic field is opposite to the direction of the third magnetic field.

[0257] The first value is lower than the second value and lower than the third value, or,

[0258] The first value is higher than the second value and higher than the third value.

[0259] (Technical Solution 16)

[0260] The magnetic sensor according to any one of technical solutions 1 to 14,

[0261] The resistance of the first magnetic element is a first value when a first value current is supplied to the first conductive member.

[0262] The resistance has a second value when a second value current is supplied to the first conductive member.

[0263] The resistance has a third value when a third value current is supplied to the first conductive member.

[0264] The absolute value of the first value current is smaller than the absolute value of the second value current, and smaller than the absolute value of the third value current.

[0265] The direction of the second value current is opposite to the direction of the third value current.

[0266] The first value is lower than the second value and lower than the third value, or,

[0267] The first value is higher than the second value and higher than the third value.

[0268] (Technical Solution 17)

[0269] The magnetic sensor according to any one of technical solutions 1 to 14,

[0270] The resistance of the first magnetic element changes as an even function with respect to a magnetic field applied to the first magnetic element.

[0271] (Technical Solution 18)

[0272] The magnetic sensor according to any one of technical solutions 1 to 17,

[0273] At least a portion of the first magnetic element is located between the first conductive member and the first magnetic member.

[0274] (Technical Solution 19)

[0275] The magnetic sensor according to any one of technical solutions 1 to 18,

[0276] The first magnetic element comprises:

[0277] 1st magnetic layer;

[0278] a first relative magnetic layer; and

[0279] a first non-magnetic layer disposed between the first magnetic layer and the first counter magnetic layer;

[0280] A direction from the first magnetic layer to the first opposing magnetic layer is along the second direction,

[0281] The second magnetic element comprises:

[0282] The second magnetic layer;

[0283] a second relative magnetic layer; and

[0284] a second non-magnetic layer disposed between the second magnetic layer and the second relative magnetic layer;

[0285] A direction from the second magnetic layer to the second opposing magnetic layer is along the second direction,

[0286] The third magnetic element comprises:

[0287] 3rd magnetic layer;

[0288] a third relative magnetic layer; and

[0289] a third non-magnetic layer disposed between the third magnetic layer and the third relative magnetic layer;

[0290] A direction from the third magnetic layer to the third relative magnetic layer is along the second direction,

[0291] The fourth magnetic element comprises:

[0292] 4th magnetic layer;

[0293] a fourth relative magnetic layer; and

[0294] a fourth non-magnetic layer disposed between the fourth magnetic layer and the fourth relative magnetic layer,

[0295] A direction from the fourth magnetic layer to the fourth counter magnetic layer is along the second direction.

[0296] (Technical Solution 20)

[0297] The magnetic sensor according to any one of technical solutions 1 to 19,

[0298] A ratio of a width of an overlap between the first conductive member and the third magnetic member to a width of the third magnetic member along the first direction is 0.32 or less.

[0299] (Technical Solution 21)

[0300] An inspection device comprising:

[0301] The magnetic sensor according to any one of technical solutions 1 to 20; and

[0302] The processing unit is capable of processing the signal output from the magnetic sensor.

[0303] According to the embodiment, it is possible to provide a magnetic sensor and an inspection device capable of improving sensitivity.

[0304] In the present application specification, “perpendicular” and “parallel” are not only strictly perpendicular and strictly parallel, but also include, for example, unevenness in the manufacturing process, as long as they are substantially perpendicular and substantially parallel.

[0305] The embodiments of the present invention are described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configuration of each element such as a magnetic element, a magnetic layer, a non-magnetic layer, a magnetic component, a conductive component, and a circuit included in a magnetic sensor is included in the scope of the present invention as long as it can be appropriately selected from the known range by a person skilled in the art to implement the present invention in the same manner and obtain the same effect.

[0306] Furthermore, any technology obtained by combining any two or more elements of each specific example within a technically possible range is also included in the scope of the present invention as long as it includes the gist of the present invention.

[0307] In addition, all magnetic sensors and testing devices that can be implemented by those skilled in the art by appropriately designing and modifying the magnetic sensors and testing devices described above as embodiments of the present invention also belong to the scope of the present invention as long as they include the gist of the present invention.

[0308] In addition, within the scope of the concept of the present invention, a person skilled in the art can conceive of various changes and modifications, and it should be understood that these changes and modifications also belong to the scope of the present invention.

[0309] Although some embodiments of the present invention are described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the scope of the subject matter of the invention. These embodiments and their variations are included in the scope and subject matter of the invention, and are included in the invention described in the claims and their equivalents.

Claims

1. A magnetic sensor comprising: The first magnetic element; A second magnetic element; a third magnetic element, disposed between the first magnetic element and the second magnetic element in the first direction; a fourth magnetic element, disposed between the third magnetic element and the second magnetic element in the first direction; a first conductive member; a second conductive member; a third conductive component, disposed between the first conductive component and the second conductive component in the first direction; a fourth conductive component disposed between the third conductive component and the second conductive component in the first direction; A first magnetic component; A second magnetic component; a third magnetic component disposed between the first magnetic component and the second magnetic component in the first direction; a fourth magnetic member disposed between the third magnetic member and the second magnetic member in the first direction; and a fifth magnetic member disposed between the third magnetic member and the fourth magnetic member in the first direction, The first magnetic element and the first conductive component overlap with a region between the first magnetic component and the third magnetic component in a second direction intersecting the first direction. The second magnetic element and the second conductive component overlap with a region between the fourth magnetic component and the second magnetic component in the second direction. The third magnetic element and the third conductive component overlap with a region between the third magnetic component and the fifth magnetic component in the second direction. The fourth magnetic element and the fourth conductive component overlap with a region between the fifth magnetic component and the fourth magnetic component in the second direction. The device further includes a first circuit capable of supplying a first current including an AC component to the first conductive member, the second conductive member, the third conductive member, and the fourth conductive member.

2. The magnetic sensor according to claim 1, A direction from one end of the first conductive component to the other end of the first conductive component is along a third direction intersecting a plane including the first direction and the second direction. A direction from one end of the second conductive component to the other end of the second conductive component is along the third direction, A direction from one end of the third conductive component to the other end of the third conductive component is along the third direction, A direction from one end of the fourth conductive component to the other end of the fourth conductive component is along the third direction, The other end of the first conductive member is electrically connected to the other end of the third conductive member. The one end of the third conductive component is electrically connected to the one end of the fourth conductive component, The other end of the fourth conductive member is electrically connected to the other end of the second conductive member, The first circuit can supply the first current between the one end of the first conductive member and the one end of the second conductive member.

3. The magnetic sensor according to claim 2, further comprising a second circuit capable of supplying a detection current to the first magnetic element, the second magnetic element, the third magnetic element, and the fourth magnetic element, A direction from one end of the first magnetic element to the other end of the first magnetic element is along the third direction, A direction from one end of the second magnetic element to the other end of the second magnetic element is along the third direction, A direction from one end of the third magnetic element to the other end of the third magnetic element is along the third direction, A direction from one end of the fourth magnetic element to the other end of the fourth magnetic element is along the third direction, The other end of the first magnetic element is electrically connected to the other end of the second magnetic element, The one end of the first magnetic element is electrically connected to the one end of the third magnetic element, The other end of the third magnetic element is electrically connected to the other end of the fourth magnetic element, The one end of the fourth magnetic element is electrically connected to the one end of the second magnetic element, The second circuit can supply the detection current between a first connection point between the other end of the first magnetic element and the other end of the second magnetic element and a second connection point between the other end of the third magnetic element and the other end of the fourth magnetic element.

4. The magnetic sensor according to claim 3, It also has a third circuit. The third circuit can detect a change in potential between a third connection point between the one end of the first magnetic element and the one end of the third magnetic element and a fourth connection point between the one end of the fourth magnetic element and the one end of the second magnetic element.

5. The magnetic sensor according to claim 1, A first magnetic member thickness of the first magnetic member along the second direction is thicker than a fifth magnetic member thickness of the fifth magnetic member along the second direction.

6. The magnetic sensor according to claim 1, A first magnetic member width of the first magnetic member along the first direction is greater than a fifth magnetic member width of the fifth magnetic member along the first direction.

7. A magnetic sensor comprising: The first magnetic element; A second magnetic element; a third magnetic element, disposed between the first magnetic element and the second magnetic element in the first direction; a fourth magnetic element, disposed between the third magnetic element and the second magnetic element in the first direction; a first conductive member; a second conductive member; a third conductive component, disposed between the first conductive component and the second conductive component in the first direction; a fourth conductive component disposed between the third conductive component and the second conductive component in the first direction; A first magnetic component; A second magnetic component; a third magnetic component disposed between the first magnetic component and the second magnetic component in the first direction; a fourth magnetic member disposed between the third magnetic member and the second magnetic member in the first direction; and a fifth magnetic member disposed between the third magnetic member and the fourth magnetic member in the first direction, The first magnetic element and the first conductive component overlap with a region between the first magnetic component and the third magnetic component in a second direction intersecting the first direction. The second magnetic element and the second conductive component overlap with a region between the fourth magnetic component and the second magnetic component in the second direction. The third magnetic element and the third conductive component overlap with a region between the third magnetic component and the fifth magnetic component in the second direction. The fourth magnetic element and the fourth conductive component overlap with a region between the fifth magnetic component and the fourth magnetic component in the second direction. A portion of the first magnetic element and a portion of the first conductive component overlap at least a portion of the first magnetic component in the second direction. The other part of the first magnetic element and the other part of the first conductive component overlap with a part of the third magnetic component in the second direction. A portion of the second magnetic element and a portion of the second conductive component overlap at least a portion of the second magnetic component in the second direction. The other part of the second magnetic element and the other part of the second conductive component overlap with a part of the fourth magnetic component in the second direction. A portion of the third magnetic element and a portion of the third conductive component overlap with other portions of the third magnetic component in the second direction. The other part of the third magnetic element and the other part of the third conductive component overlap with a part of the fifth magnetic component in the second direction. A portion of the fourth magnetic element and a portion of the fourth conductive component overlap with other portions of the fifth magnetic component in the second direction. The other portions of the fourth magnetic element and the other portions of the fourth conductive component overlap with the other portions of the fourth magnetic component in the second direction.

8. The magnetic sensor according to claim 7, The first magnetic element has a first width along the first direction, a portion of the first magnetic element overlaps with the at least a portion of the first magnetic component in the second direction, A ratio of a width of the portion of the first magnetic element along the first direction to the first width is greater than or equal to 0.1 and less than or equal to 0.

4.

9. The magnetic sensor according to claim 7, A first magnetic member thickness of the first magnetic member along the second direction is thicker than a fifth magnetic member thickness of the fifth magnetic member along the second direction.

10. The magnetic sensor according to claim 7, A first magnetic member width of the first magnetic member along the first direction is greater than a fifth magnetic member width of the fifth magnetic member along the first direction.

11. An inspection device comprising: The magnetic sensor according to any one of claims 1 to 10; and The processing unit is capable of processing the signal output from the magnetic sensor.

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