Spectrometer and imaging device

Abstract

The spectrometer according to the present embodiment includes: a first diffraction grating for splitting the provided light; a first detection unit for condensing the light split by the first diffraction grating and outputting a corresponding electrical signal; a second diffraction grating for splitting the 0th-order light output from the first diffraction grating; and a second detection unit for condensing the light split by the second diffraction grating and outputting a corresponding electrical signal.

Description

Technical Field

[0001] The present technology relates to spectrometers and imaging devices. Background Art

[0002] A spectrometer is a device that decomposes light (i.e., electromagnetic waves) absorbed or emitted by a target material into different wavelengths and measures the intensity distribution of each wavelength. A spectrometer can use a diffraction grating, a prism, an interferometer, a filter, etc. to disperse electromagnetic waves of each wavelength.

[0003] Conventional spectrometers are designed and configured to output light of a specific order that has the strongest intensity relative to the input light. Conventional spectrometers are designed and manufactured such that the intensity of light of a predetermined specific order is large, so that light of another unwanted order is neither spectroscopically processed nor otherwise processed. Summary of the Invention

[0004] Technical Problem

[0005] Therefore, the present disclosure has been made in view of the above problems arising in the related art. Specifically, in a conventional spectrometer, the proportion of light that is discarded without being spectroscopically processed is high, and when it is necessary to perform various processes using the provided light, the process needs to be performed multiple times, which is cumbersome and takes a long time.

[0006] The present embodiment aims to solve the above disadvantages of the related art and provide a spectrometer capable of performing multiple processing cases with the same light. In addition, the present embodiment aims to provide an imaging device capable of simultaneously performing imaging by spectroscopic processing with the same light.

[0007] Technical Solution

[0008] To achieve the above object, a spectrometer according to the present embodiment can be provided, the spectrometer including: a first diffraction grating configured to spectroscopically process provided light; a first detection unit configured to condense the light spectroscopically processed by the first diffraction grating and configured to output an electrical signal corresponding to the condensed light; a second diffraction grating configured to spectroscopically process the 0th order light provided by the first diffraction grating; and a second detection unit configured to condense the light spectroscopically processed by the second diffraction grating and configured to output an electrical signal corresponding to the condensed light.

[0009] In one aspect of the spectrometer embodiment, the first detection unit may include: a first condenser configured to condense the light spectrally processed by the first diffraction grating; and a first detector configured to detect the light condensed and provided by the first condenser and configured to output an electrical signal corresponding to the detected light. And the second detection unit may include: a second condenser configured to condense the light spectrally processed by the second diffraction grating; and a second detector configured to detect the light condensed and provided by the second condenser and configured to output an electrical signal corresponding to the detected light.

[0010] In one aspect of the spectrometer embodiment, the first detector and the second detector may be different from each other in at least one of the following characteristics: sensitivity, detection wavelength band, and resolution.

[0011] In one aspect of the spectrometer embodiment, the first detector and the second detector may have the same characteristics as each other in terms of sensitivity, detection wavelength band, and resolution.

[0012] In one aspect of the spectrometer embodiment, the spectrometer may further include: a housing; and a slit configured to provide light into the housing.

[0013] In one aspect of the spectrometer embodiment, the spectrometer may further include a collimator configured to collimate the light provided from the slit into parallel light and provide the parallel light to the first diffraction grating.

[0014] In one aspect of the spectrometer embodiment, the spectrometer may further include an optical delivery unit configured to provide the light provided from the target T to the slit. Wherein, the optical delivery unit may include: an objective lens configured to condense the light provided from the target T; and a focusing lens configured to provide the light condensed by the objective lens to the slit.

[0015] In one aspect of the spectrometer embodiment, the first diffraction grating may be any one of a transmission diffraction grating and a reflection diffraction grating, and the second diffraction grating may be any one of a transmission diffraction grating and a reflection diffraction grating.

[0016] In one aspect of the spectrometer embodiment, the first diffraction grating may include any one of a diffraction grating in the form of a concave mirror and a diffraction grating in the form of a convex lens.

[0017] In one aspect of the spectrometer embodiment, the first diffraction grating and the second diffraction grating may be different from each other in terms of resolution.

[0018] In one aspect of the spectrometer embodiment, the first diffraction grating and the second diffraction grating may have the same resolution as each other.

[0019] In one aspect of the spectrometer embodiment, the spectrometer can be configured to allow adjustment of the position of the first detection unit relative to the first diffraction grating.

[0020] In one aspect of the spectrometer embodiment, the spectrometer can be configured to allow adjustment of the position of the second detection unit relative to the second diffraction grating.

[0021] A spectrometer according to another embodiment can be provided, which includes: a diffraction grating configured to spectrally process the provided light; a first detection unit configured to condense the light spectrally processed by the diffraction grating and configured to output an electrical signal corresponding to the condensed light; a mirror configured to reflect the 0th-order light output from the diffraction grating back to the diffraction grating; and a second detection unit, wherein the diffraction grating is configured to spectrally process the light reflected by the mirror and configured to provide the spectrally processed light to the second detection unit.

[0022] In one aspect of the spectrometer embodiment, the first detection unit can include: a first condenser configured to condense the light spectrally processed by the diffraction grating; and a first detector configured to detect the light condensed by the first condenser and configured to output the detected light as an electrical signal, and the second detection unit can include: a second condenser configured to condense the light, which is the reflected 0th-order light spectrally processed by the diffraction grating; and a second detector configured to detect the light condensed by the second condenser and configured to output the detected light as an electrical signal.

[0023] In one aspect of the spectrometer embodiment, the first detector and the second detector can have the same characteristics as each other in terms of sensitivity, detection wavelength range, and resolution.

[0024] In one aspect of the spectrometer embodiment, the first detector and the second detector can be different from each other in any one of sensitivity, detection wavelength range, and resolution.

[0025] In one aspect of the spectrometer embodiment, the spectrometer can further include: a housing; a slit configured to provide light into the housing; and a collimator configured to modify the light provided from the slit into parallel light.

[0026] In one aspect of the spectrometer embodiment, the spectrometer further includes an optical delivery unit configured to provide the light provided from the target T to the slit, wherein the optical delivery unit can further include: an objective lens configured to condense the light provided from the target T; and a focusing lens configured to provide the light condensed by the objective lens to the slit.

[0027] In one aspect of the spectrometer embodiment, the diffraction grating can be either a transmissive diffraction grating or a reflective diffraction grating.

[0028] In one aspect of the spectrometer embodiment, the diffraction grating can include either a diffraction grating in the form of a concave mirror or a diffraction grating in the form of a convex lens.

[0029] In one aspect of the spectrometer embodiment, the spectrometer can be configured to allow adjustment of at least any one of the position of the first detection unit and the position of the second diffraction grating relative to the diffraction grating.

[0030] An imaging device according to the present embodiment can be provided, the imaging device including: a diffraction grating configured to spectrally process the provided light; a detection unit configured to condense the light spectrally processed by the diffraction grating and configured to output the condensed light as an electrical signal; and an imaging unit configured to image the zero-order light output from the diffraction grating, wherein the imaging unit can include a focusing lens configured to focus the zero-order light.

[0031] In one aspect of the imaging device embodiment, the detection unit can include: a condenser configured to condense the light spectrally processed by the diffraction grating; and a detector configured to detect the light condensed by the condenser and configured to output the detected light as an electrical signal.

[0032] In one aspect of the imaging device embodiment, the spectrometer can further include: a housing; a slit configured to provide light into the housing; and a collimator configured to modify the light provided from the slit into parallel light.

[0033] In one aspect of the imaging device embodiment, the diffraction grating can include either a diffraction grating in the form of a concave mirror or a diffraction grating in the form of a convex lens.

[0034] In one aspect of the imaging device embodiment, the diffraction grating can be either a transmissive diffraction grating or a reflective diffraction grating.

[0035] In one aspect of the imaging device embodiment, the imaging device can further include an optical delivery unit configured to provide the light provided from the target T to the slit, wherein the optical delivery unit can include: an objective lens configured to condense the light provided from the target T; and a focusing lens configured to provide the light condensed by the objective lens to the slit.

[0036] Beneficial effects

[0037] As described above, according to the present embodiment, a spectrometer capable of performing two or more spectroscopic analyses with the same light is provided. Further, according to the present embodiment, an imaging device capable of performing spectroscopic analysis and imaging with the same light is provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 is a block diagram showing an outline of a spectrometer according to a first embodiment.

[0039] Figure 2 is a view showing an outline of an optical delivery unit according to the present embodiment.

[0040] Figure 3 (a) of is a view explaining an outline of the operation of a diffraction grating, Figure 3 and (b) of is a view showing an outline of a reflection type diffraction grating, and Figure 3 and (c) of is a view showing an outline of a transmission type diffraction grating.

[0041] Figure 4 is a block diagram showing an outline of a spectrometer according to a second embodiment.

[0042] Figure 5 is a block diagram showing an outline of an imaging device according to a third embodiment. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0043] First Embodiment

[0044] Hereinafter, a spectrometer 1 according to a first embodiment will be described with reference to the drawings. Figure 1 is a block diagram showing an outline of a spectrometer according to a first embodiment. Referring to Figure 1 , the spectrometer 1 according to the present embodiment includes: a first diffraction grating 130 configured to spectrally process the provided light; a first detection unit 150 configured to condense the light spectrally processed by the first diffraction grating 130 and output an electrical signal corresponding to the condensed light; a second diffraction grating 140 configured to spectrally process the 0th order light provided by the first diffraction grating; and a second detection unit 160 configured to condense the light spectrally processed by the second diffraction grating 140 and output an electrical signal corresponding to the condensed light.

[0045] In one embodiment, the spectrometer 1 according to the present embodiment may further include a housing. For example, the housing may have a light blocking structure and thus shield its inside. Further, the housing may include a slit 110 through which the light to be spectrally processed is provided.

[0046] In one embodiment, the first detection unit 150 includes: a first condenser 152 configured to condense light spectrally processed by the first diffraction grating 130; and a first detector 154 configured to be provided with the light condensed by the first condenser and detect the provided light to output the detected light as an electrical signal corresponding to the detected light. Further, the second detection unit 160 includes: a second condenser 162 configured to condense light spectrally processed by the second diffraction grating 140; and a second detector 164 configured to detect the light condensed and provided by the second condenser 162 and output an electrical signal corresponding to the detected light.

[0047] Figure 2 is a view showing an outline of the light delivery unit 180 according to the present embodiment. Referring to Figure 2 , the spectrometer 1 according to the present embodiment may further include a light delivery unit 180 configured to condense the light reflected from the target T and provide the condensed light to the slit 110. Here, the light delivery unit 180 may include at least any one of the following: an objective lens 182 configured to condense the light provided from the target T; and a focusing lens 184 configured to provide the light condensed by the objective lens 182 to the slit 110.

[0048] Referring again to Figure 1 , in Figure 1 the illustrated embodiment, the spectrometer 1 includes a collimator 120. The light provided to the housing through the slit 110 is diffused by diffraction or diffused after being condensed and incident on the slit, so the collimator 120 forms parallel light from the diffused light to provide it to the first diffraction grating 130. According to an embodiment not shown, the spectrometer 1 may not include a collimator 120, and the light provided to the housing through the slit 110 may be condensed and spectrally processed by a reflective diffraction grating in the form of a concave mirror or a transmissive diffraction grating in the form of a convex lens.

[0049] Figure 3 (a) of is a view explaining an outline of the operation of a diffraction grating, Figure 3 (b) of is a view showing an outline of a reflective diffraction grating, and Figure 3 (c) of is a view showing an outline of a transmissive diffraction grating. The diffraction grating can be divided into transmissive and reflective types, and Figure 3The diffraction grating shown in (a) is a reflective type. In a reflective diffraction grating, light of various diffraction orders is formed by reflection from the diffraction grating. When the difference between two adjacent diffracted light rays is an odd multiple of λ / 2, destructive interference occurs and the amplitude of the diffracted light becomes minimum; when the difference between two adjacent diffracted light rays is an even multiple of λ / 2, constructive interference occurs and the amplitude of the diffracted light becomes maximum. When generalized, the condition for generating maximum diffracted light can be expressed by Equation 1 below.

[0050] [Equation 1]

[0051] mλ = d(sinθ i - sinθ m )

[0052] where d is the distance between the diffraction gratings, λ is the wavelength of the incident light, θ i is the angle of the incident light with respect to the plane of the diffraction grating, θ m is the angle between the diffracted light and the perpendicular vector of the diffraction grating, and m is an integer value representing the order of the diffracted light.

[0053] Figure 3 (b) is a view showing an outline of the reflective diffraction grating, and Figure 3 (c) is a view showing an outline of the transmissive diffraction grating. Referring to Figure 3 (b), in the reflective diffraction grating, the 0th order light is equal to the reflection performed on the mirror surface. That is, the reflection angle θ m of the 0th order light is equal to the incident angle θ i of the incident light. However, as the order increases (e.g., 1st order light, 2nd order light, 3rd order light, etc.), the angle θ m formed by the light with respect to the normal of the reflection surface increases. In addition, there can be -1st order light, -2nd order light, etc., and the absolute values of the angles formed by such light with respect to the normal of the reflection surface are respectively equal to the values formed by the 1st order light, 2nd order light, 3rd order light, etc., but the signs of the values of such angles are opposite. Therefore, such light is formed in the opposite direction with respect to the light having a positive value with the incident light as a reference.

[0054] Referring to Figure 3 (c), even when incident light is provided to the transmissive diffraction grating, lights such as 0th order light, 1st order light, and 2nd order light are formed. The 0th order light is the light that penetrates the transmissive diffraction grating, and the angle formed by the 0th order light with respect to the normal of the transmissive surface of the diffraction grating is equal to the angle θ i formed by the incident light with respect to the normal of the surface of the transmissive diffraction grating.

[0055] Although not shown, as described above, the reflective diffraction grating may have the form of a concave mirror, and the transmissive diffraction grating may have the form of a convex lens. In this case, it is possible to perform light concentration and spectral processing without a collimator.

[0056] Referring to Figure 1 and Figure 3 , the light provided to the first diffraction grating 130 is spectrally processed and provided to the first condenser 152. In one embodiment, the first diffraction grating 130 spectrally processes the light provided through the slit 110 and provides light of a predetermined order to the first condenser 152. For example, the first condenser 152 may be arranged to correspond to the angle at which the light of a specific order provided by the first diffraction grating 130 is located, so that the target light of the specific order can be concentrated and provided to the first detector 154. The angle θ m at which the light of a specific order m is located can be expressed as the following Equation 2 according to Equation 1.

[0057] [Equation 2]

[0058]

[0059] In an embodiment in which the first diffraction grating 130 is Figure 3 the transmissive diffraction grating shown in (c) of

[0060] and spectrally processes the first light, the first detection unit 150 is arranged at an angle equal to θ1 with respect to the normal of the transmissive surface of the first diffraction grating 130, whereby the desired first light can be concentrated.

[0061] The first condenser 152 concentrates the light spectrally processed by the first diffraction grating 130 and provides it to the first detector 154. The first detector 154 forms and outputs an electrical signal corresponding to the concentrated light. Figure 3 Figure 1 The 0th order light from the first diffraction grating 130 is provided to the second diffraction grating 140. The second diffraction grating 140 may be

[0062] any one of the reflective diffraction grating and the transmissive diffraction grating shown in (a) to (c) of Figure 1 Figure 1 In the embodiment shown in

[0062] Figure 1 , the spectrometer 1 may have a first diffraction grating 130 and a second diffraction grating 140 having different characteristics from each other, whereby the resolutions of the first spectral processing and the second spectral processing may be different. In another embodiment, the spectrometer 1 may have a first diffraction grating 130 and a second diffraction grating 140 having the same characteristics as each other.The zero-order light provided to the second diffraction grating 140 is spectrally processed by the second diffraction grating 140. The second detection unit 160 can be arranged to condense the light of a desired order from the second diffraction grating 140. The second condenser 162 included in the second detection unit provides the condensed light to the second detector 164.

[0063] In one embodiment, the first detector 154 and the second detector 164 can include elements such as photodiodes, CCDs, CMOSs, etc. configured to output an electrical signal corresponding to light. The first detector 154 and the second detector 164 have the following characteristics: resolution, detection band, and sensitivity, and at least one of these characteristics is different from each other. Therefore, the same light can be spectrally processed and the spectrally processed light can be processed to obtain different characteristics. In another embodiment, the first detector 154 and the second detector 164 have the same characteristics of resolution, detection band, and sensitivity as each other. For example, the first detector 154 and the second detector 164 can use the same detector to improve signal correction or signal-to-noise ratio.

[0064] In one embodiment, spectral processing can be performed by adjusting the position of the first detection unit 150 relative to the first diffraction grating 130, the analysis target wavelength region can be adjusted, and by adjusting the position of the second detection unit 160 relative to the second diffraction grating 140, the analysis target wavelength region to be spectrally processed can be adjusted. In addition, the spectral processing characteristics measured by each detector can be adjusted by changing the measurement conditions of the first detector 154 and the second detector 164. For example, the signal-to-noise ratio measured by each of the first detector 154 and the second detector 164 can be made different by changing the signal measurement time (detection time or integration time). In addition, the first detector 154 uses a Si semiconductor, and the second detector 164 uses an InGaAs semiconductor, where the Si detector can detect wavelengths of 1.1 μm or less, and the InGaAs semiconductor detector can detect wavelengths of 1.1 μm or more.

[0065] The detection materials of the first detector 154 and the second detector 164 can measure ultraviolet light, visible light, infrared light, etc. of different wavelengths, and the detection materials are selected from semiconductor materials such as Si, Ge, InGaAs, GaN, GaAs, InAs, InGaAsP, PbS, PbSe, PtSi, InSb, mercury cadmium telluride (MCT) HgCdTe, mercury zinc telluride (MZT) HgZnTe, etc. and oxides such as vanadium pentoxide.

[0066] Figure 1An example using two diffraction gratings is shown, but a configuration in which the 0th-order light provided from the second diffraction grating is spectrally processed by the third diffraction grating and the spectrally processed light is detected by the third detection unit is naturally also possible. That is, when the intensity of the provided light is sufficient, three or more diffraction gratings and detection units can be provided so that spectral processing and analysis can be performed multiple times with the same light.

[0067] In addition, in the illustrated embodiment, two diffraction gratings are used, so the resolution of the two detectors can be easily changed, and spectral processing conditions such as resolution and wavelength band can be adjusted by changing the size of the photodiode array or the pixel pitch of the first detector and the second detector.

[0068] In the embodiment described above with reference to the drawings, the collimator 120, the first condenser 152, the second condenser 162, the objective lens 182, and the focusing lens 184 are all illustrated as convex lenses. However, such convex lenses can be used in combination with concave lenses to reduce the influence of non-ideal characteristics of the lenses, such as reducing chromatic aberration. In addition, the convex lenses can be replaced with concave mirrors (and vice versa), and the concave lenses can be replaced with convex mirrors (and vice versa).

[0069] Second Embodiment

[0070] Hereinafter, the spectrometer 2 according to the second embodiment will be described with reference to the drawings. For simplicity and clarity of description, the description of elements that are the same as or similar to those described in the first embodiment may be omitted. Figure 4 is a block diagram showing an outline of the spectrometer according to the second embodiment. Referring to Figure 4 , the spectrometer 2 according to the present embodiment includes: a diffraction grating 130 configured to spectrally process the provided light; a first detection unit 150 configured to condense the light spectrally processed by the diffraction grating 130 and output an electrical signal corresponding to the condensed light; a mirror 170 configured to reflect the 0th-order light output from the diffraction grating 130 back to the diffraction grating 130; and a second detection unit 160, wherein the diffraction grating 130 is configured to spectrally process the light reflected by the mirror 170 and provide the spectrally processed light to the second detection unit 160.

[0071] In one embodiment, the spectrometer 2 according to the present embodiment may further include a housing. For example, the housing may have a light-blocking structure and thus shield the inside thereof. In addition, the housing may include a slit 110 through which the light to be spectrally processed is provided.

[0072] In one embodiment, the first detection unit 150 includes: a first condenser 152 configured to condense the light spectrally processed by the diffraction grating 130; and a first detector 154 configured to be provided with the light condensed by the first condenser and detect the condensed light so as to output the detected light as an electrical signal corresponding to the detected light. In addition, the second detector 160 includes: a second condenser 162 configured to condense the light, which is the reflected 0th order light spectrally processed by the diffraction grating 130; and a second detector 164 configured to detect the light condensed and provided by the second condenser 162 and output an electrical signal corresponding to the detected light.

[0073] In one embodiment, the spectrometer 2 according to the present embodiment may further include an optical delivery unit 180 (refer to Figure 2 ), which is configured to condense the light provided from the target T to provide the condensed light to the slit 110. Here, the optical delivery unit 180 may include at least any one of the following: an objective lens 182 configured to condense the light provided from the target T as described above; and a condenser lens 184 configured to provide the light condensed by the objective lens 182 to the slit 110.

[0074] The light provided through the slit 110 diffuses after being condensed and incident on the slit or diffuses by being diffracted. Therefore, the spectrometer 2 may further include a collimator 120 that converts the diffused light into parallel light. According to the above another embodiment, when using a diffraction grating 130 in the form of a concave mirror or a diffraction grating in the form of a convex lens, the condensing and spectral processing can be performed together, so the collimator 120 may not be necessary.

[0075] The diffraction grating 130 spectrally processes the light provided through the slit 110 and provides it to the first detection unit 150. As described above, the first detection unit 150 is provided at a position capable of detecting the desired order of the light spectrally processed by the diffraction grating 130. The light spectrally processed by the diffraction grating 130 is provided to the first condenser 152, and the first detector 154 receives the light condensed and provided by the first condenser 152 and outputs an electrical signal corresponding to the received light. The light provided by the diffraction grating 130 has angles provided according to the order, and these angles are different from each other. Therefore, the position of the first detection unit 150 can be adjusted to receive the desired order of light.

[0076] The 0th order light provided by the diffraction grating 130 is reflected by the mirror 170 and provided to the diffraction grating 130 again at a desired incident angle. The 0th order light is incident on the diffraction grating 130 and spectrally processed. The second detection unit 160 is provided at a position capable of condensing the desired order of light.

[0077] The first detector 154 and the second detector 164 may include elements configured to output an electrical signal corresponding to light, such as a CCD, a CMOS, etc. The first detector 154 and the second detector 164 may have the following characteristics: resolution, detection band, and sensitivity, at least one of which is different from each other to simultaneously obtain multiple characteristics from the same light. In another embodiment, the first detector 154 and the second detector 164 may use the same detector, whereby signal correction or signal-to-noise ratio characteristics can be improved.

[0078] Although Figure 4 An example using a single mirror and a single diffraction grating is shown, but naturally, the following configuration may also be provided, in which the 0th-order light reflected by the mirror is provided to the diffraction grating, and the 0th-order light formed at this time is provided to the diffraction grating again by a second mirror for spectral processing, and is detected by a third detector. When the intensity of the provided light is sufficient, two or more mirrors and detection units may be provided so that spectral processing and analysis can be performed multiple times with the same light.

[0079] In the present embodiment, since a single diffraction grating is used, it may be difficult to change the resolution of the first spectral processing and the second spectral processing. However, by changing the size of the photodiode array or the pixel pitch of the first detector and the second detector, spectral processing conditions such as resolution, sensitivity, and spectral area can be adjusted.

[0080] In the embodiments described above with reference to the drawings, the collimator 120, the first condenser 152, the second condenser 162, the objective lens 182, and the focusing lens 184 are all illustrated as convex lenses. However, such convex lenses may be used in combination with concave lenses to reduce the influence of non-ideal characteristics of the lenses, such as reducing chromatic aberration. In addition, the convex lens may be replaced with a concave mirror (and vice versa), and the concave lens may be replaced with a convex mirror (and vice versa).

[0081] Third Embodiment

[0082] Hereinafter, the imaging device 3 according to the third embodiment will be described with reference to the drawings. For simplicity and clarity of description, the description of elements that are the same as or similar to those described in the first embodiment and the second embodiment may be omitted. Figure 5 is a block diagram showing an outline of the imaging device according to the third embodiment. Refer to Figure 5, the imaging device 3 according to the present embodiment includes: a diffraction grating 130 configured to spectrally process the provided light; a condenser 152 configured to condense the light spectrally processed by the diffraction grating 130; a detector 154 configured to detect the light condensed by the condenser to output an electrical signal corresponding to the detected light; and an imaging unit 190 configured to image the 0th order light output from the diffraction grating 130, wherein the imaging unit 190 includes: a condenser lens (not shown) configured to condense the 0th order light and a focusing lens 194 configured to collect the light condensed by the condenser lens.

[0083] In one embodiment, the imaging device 3 according to the present embodiment may further include an optical delivery unit 180 (refer to Figure 2 ), and the optical delivery unit 180 is configured to condense the light provided from the target T to provide the condensed light to the slit 110. Here, the optical delivery unit 180 (refer to Figure 2 ) may include at least any one of the following as described above: an objective lens 182 (refer to Figure 2 ) configured to condense the light provided from the target T; and a focusing lens 184 (refer to Figure 2 ) configured to provide the light condensed by the objective lens 182 (refer to Figure 2 ) to the slit 110.

[0084] The condenser 152 is arranged to condense the light of a desired order from the diffraction grating 130. The condenser 152 is configured to condense the light of the desired order to provide it to the detector 154, and the detector 154 is configured to output an electrical signal corresponding to the provided light.

[0085] The diffraction grating 130 is configured to provide the 0th order light to the imaging unit 190. The imaging unit 190 includes a focusing lens 194 configured to focus the provided 0th order light. In one embodiment, the diffraction grating 130 may have non-ideal characteristics, and thus, the 0th order light provided by the diffraction grating 130 may diverge or converge from the diffraction grating. For the purpose of correcting such non-ideal characteristics or reducing aberration, the imaging unit 190 may further include a condenser lens (not shown), and the condenser lens is configured to form the 0th order light provided by diverging or converging from the diffraction grating 130 into parallel light.

[0086] The imaging unit 190 is configured to image the light provided from the diffraction grating 130, thereby allowing the provided imaged light to be used for eye observation and / or shooting. In one embodiment, the light imaged by the imaging unit 190 may be provided to a microscope for eye observation of the target, or may be provided to a photographing device for photographing the target. According to Figure 5In an embodiment not shown, the imaging unit 190 may further include a beam splitter configured to allow the light provided by the focusing lens 194 to be split, and the split light is provided for eye observation and shooting.

[0087] Similar to the above embodiment of the spectrometer, the wavelength region to be analyzed can be adjusted by splitting the light by adjusting the position of the detection unit 150 relative to the diffraction grating 130.

[0088] In the embodiments described above with reference to the drawings, the collimator 120, the condenser 152, the objective lens 182, and the focusing lens 184 are all illustrated as convex lenses. However, such convex lenses can be used in combination with concave lenses to reduce the influence of non-ideal characteristics of the lenses, such as reducing chromatic aberration. In addition, the convex lenses can be replaced with concave mirrors (and vice versa), and the concave lenses can be replaced with convex mirrors (and vice versa).

[0089] Although the description has been made with reference to the embodiments shown in the drawings to assist in understanding the present disclosure, these are embodiments for implementation and are merely examples. Therefore, those of ordinary skill in the art will understand that other embodiments with various modifications and equivalent solutions to the above embodiments are possible. Therefore, the true technical protection scope of the present disclosure should be defined by the appended claims.

[0090] Industrial applicability

[0091] This has been described above.

Claims

1. A spectrometer, comprising: A first diffraction grating configured to spectrally process provided light; A first detection unit configured to condense the light spectrally processed by the first diffraction grating and configured to output an electrical signal corresponding to the condensed light; A second diffraction grating configured to spectrally process the zero-order light provided by the first diffraction grating; And A second detection unit configured to condense the light spectrally processed by the second diffraction grating and configured to output an electrical signal corresponding to the condensed light, Wherein the spectrometer is configured to allow adjustment of the position of the first detection unit relative to the first diffraction grating such that light of a predetermined order provided by the first diffraction grating is provided to the first detection unit.

2. The spectrometer according to claim 1, wherein, The first detection unit includes: A first condenser configured to condense the light spectrally processed by the first diffraction grating; and A first detector configured to detect the light condensed and provided by the first condenser and configured to output an electrical signal corresponding to the detected light, and The second detection unit includes: A second condenser configured to condense the light spectrally processed by the second diffraction grating; and A second detector configured to detect the light condensed and provided by the second condenser and configured to output an electrical signal corresponding to the detected light.

3. The spectrometer according to claim 2, wherein, The first detector and the second detector are different from each other in at least one of the following characteristics: sensitivity, detection wavelength band, and resolution.

4. The spectrometer according to claim 2, wherein, The first detector and the second detector have the same characteristics in terms of sensitivity, detection wavelength band, and resolution.

5. The spectrometer according to claim 1, wherein, The spectrometer further includes: A housing; and A slit configured to provide light into the housing.

6. The spectrometer according to claim 5, wherein, The spectrometer further includes a collimator configured to form the light provided from the slit into parallel light and configured to provide the parallel light to the first diffraction grating.

7. The spectrometer according to claim 5, wherein, The spectrometer further includes an optical delivery unit configured to provide the light provided from a target to the slit, Wherein the optical delivery unit includes: An objective lens configured to condense the light provided from the target; and A focusing lens configured to provide the light condensed by the objective lens to the slit.

8. The spectrometer according to claim 1, wherein, The first diffraction grating is any one of a transmission-type diffraction grating and a reflection-type diffraction grating, and The second diffraction grating is any one of the transmission-type diffraction grating and the reflection-type diffraction grating.

9. The spectrometer according to claim 1, wherein, The first diffraction grating includes any one of a diffraction grating in the form of a concave mirror and a diffraction grating in the form of a convex lens.

10. The spectrometer according to claim 1, wherein, The first diffraction grating and the second diffraction grating are different from each other in terms of resolution.

11. The spectrometer according to claim 1, wherein, The first diffraction grating and the second diffraction grating have the same resolution.

12. The spectrometer according to claim 1, wherein, The spectrometer is configured to allow adjustment of the position of the second detection unit relative to the second diffraction grating.

13. The spectrometer according to claim 1, wherein, The spectrometer further includes: A third diffraction grating configured to spectrally process the zero-order light provided from the second diffraction grating; and A third detection unit, configured to condense the light spectrally processed by the third diffraction grating and configured to output an electrical signal corresponding to the condensed light.

14. A spectrometer, comprising: A diffraction grating, configured to spectrally process the provided light; A first detection unit, configured to condense the light spectrally processed by the diffraction grating and configured to output an electrical signal corresponding to the condensed light; A mirror, configured to reflect the zero-order light output from the diffraction grating back to the diffraction grating; And A second detection unit, wherein the diffraction grating is configured to spectrally process the zero-order light reflected by the mirror and configured to provide the spectrally processed light to the second detection unit, wherein the spectrometer is configured to allow adjustment of at least any one of the position of the first detection unit and the position of the second detection unit relative to the diffraction grating such that the light of a predetermined order provided by the diffraction grating is provided to the first detection unit.

15. The spectrometer according to claim 14, wherein, The first detection unit includes: A first condenser, configured to condense the light spectrally processed by the diffraction grating; and A first detector, configured to detect the light condensed by the first condenser and configured to output the detected light as an electrical signal, and The second detection unit includes: A second condenser, configured to condense the light, which is the reflected zero-order light spectrally processed by the diffraction grating; and A second detector, configured to detect the light condensed by the second condenser and configured to output the detected light as an electrical signal.

16. The spectrometer according to claim 15, wherein, The first detector and the second detector have the same characteristics as each other in terms of sensitivity, detection wavelength band, and resolution.

17. The spectrometer according to claim 15, wherein, The first detector and the second detector are different from each other in any one of sensitivity, detection wavelength band, and resolution.

18. The spectrometer according to claim 14, wherein, The spectrometer further includes: A housing; A slit, configured to provide light into the housing; and A collimator, configured to modify the light provided from the slit into parallel light.

19. The spectrometer according to claim 18, wherein, The spectrometer further includes an optical delivery unit, the optical delivery unit being configured to provide the light provided from a target T to the slit, wherein the optical delivery unit includes: An objective lens, configured to condense the light provided from the target T; and A focusing lens, configured to provide the light condensed by the objective lens to the slit.

20. The spectrometer according to claim 14, wherein, The diffraction grating is any one of a transmission-type diffraction grating and a reflection-type diffraction grating.

21. The spectrometer according to claim 14, wherein, The diffraction grating includes any one of a diffraction grating in the form of a concave mirror and a diffraction grating in the form of a convex lens.

22. The spectrometer according to claim 14, wherein, The spectrometer further includes: A second mirror, configured to reflect the zero-order light provided from the diffraction grating back to the diffraction grating; and A third detection unit, configured to condense the light, which is the reflected zero-order light reflected by the second mirror and spectrally processed, and the third detection unit is configured to output an electrical signal corresponding to the condensed light.

23. An imaging device, comprising: A diffraction grating, configured to spectrally process the provided light; A detection unit configured to condense the light spectrally processed by the diffraction grating and configured to output the condensed light as an electrical signal; and An imaging unit configured to image the zero-order light output from the diffraction grating, wherein the imaging unit includes a focusing lens configured to focus the zero-order light, wherein the imaging device is configured to allow the position of the detection unit to be adjusted relative to the diffraction grating such that light of a predetermined order provided by the diffraction grating is provided to the detection unit.

24. The imaging device according to claim 23, wherein, The detection unit includes: A condenser configured to condense the light spectrally processed by the diffraction grating; and A detector configured to detect the light condensed by the condenser and configured to output the detected light as an electrical signal.

25. The imaging device according to claim 23, wherein, The imaging device further includes: A housing; A slit configured to provide light into the housing; and A collimator configured to modify the light provided from the slit into parallel light.

26. The imaging device according to claim 23, wherein, The diffraction grating includes either a diffraction grating in the form of a concave mirror or a diffraction grating in the form of a convex lens.

27. The imaging device according to claim 23, wherein, The diffraction grating is either a transmission type diffraction grating or a reflection type diffraction grating.

28. The imaging device according to claim 24, wherein The imaging device further includes an optical delivery unit configured to provide the light provided from the target to the slit, wherein the optical delivery unit includes: An objective lens configured to condense the light provided from the target; and A focusing lens configured to provide the light condensed by the objective lens to the slit.

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