Vacuum valve

Abstract

A vacuum valve comprises: a valve body (1); a closing member (4); at least one valve stem (9) carrying the closing member (4); at least one guide block (15a, 15b), wherein the at least one valve stem (9) is movably guided by the guide block parallel to the longitudinal displacement direction (13); a longitudinal stroke drive (17), wherein the at least one valve stem (9) is movable relative to the at least one guide block (15a, 15b) parallel to the longitudinal displacement direction (13); a transverse stroke drive (23); and at least one sliding component (24) different from the transverse stroke drive (23), wherein the sliding component is movably guided relative to the valve body (1) by at least one primary linear guide (26) and movably guided relative to the at least one guide block (15a, 15b) by at least one secondary linear guide (27). The primary and secondary linear guides (26, 27) each have an angle of less than 45° relative to the longitudinal displacement direction (13), and the primary linear guide (26) encloses an angle of greater than 3° and less than 45° with the secondary linear guide (27).

Description

Technical Field

[0001] The present invention relates to a vacuum valve, comprising: a valve body with a valve opening surrounded by a valve seat; a closing member, which is movable between an open position and an intermediate position parallel to a longitudinal displacement direction, and is movable between an intermediate position and a closed position parallel to a lateral displacement direction, the closing member opening the valve opening in the open position, covering the valve opening but lifting off the valve seat in the intermediate position, and resting on the valve seat in the closed position; at least one valve stem, which carries the closing member and is parallel to the longitudinal displacement direction; at least one guide block, by which the at least one valve stem is movably guided parallel to the longitudinal displacement direction; a longitudinal stroke drive, by which the at least one valve stem can be moved relative to the at least one guide block parallel to the longitudinal displacement direction in order to allow the closing member to be displaced between the open position and the intermediate position; and a lateral stroke drive, by which the at least one guide block can be moved parallel to the lateral displacement direction in order to allow the closing member to be displaced between the intermediate position and the closed position. Background Art

[0002] The vacuum valve is also called an L-type valve, in which, in order to close the vacuum valve, the closing member is first moved along a longitudinal displacement direction parallel to the valve stem from an open position to an intermediate position, in which the closing member covers the valve opening but is still lifted off the valve seat, and then rests on the valve seat in a transverse displacement direction at an angle to the longitudinal displacement direction.

[0003] In a non-common construction of an L-type valve, the valve stem is pivotably mounted about an axis perpendicular to the longitudinal displacement direction in order to enable the valve plate to be displaced from its intermediate position to its closed position and back. In order to pivot the valve stem about the axis, a connecting rod guide can be used, as is known, for example, from US 6,237,892 B1, US 7,066,443 B2 or US 2012 / 0258242 A1.

[0004] In the case of an L-type valve, in order to adjust the closing member between the intermediate position and the closed position, the closing member is parallelly displaced in a transverse adjustment direction which is angled with the longitudinal adjustment direction, in particular perpendicularly, and according to a conventional embodiment, in order to adjust the closing member between the intermediate position and the closed position, a drive component is arranged on a carrier unit which carries the closing member, wherein the carrier unit is located in a valve housing of the vacuum valve and is arranged on a valve stem which extends out of the vacuum region of the vacuum valve. Such designs of L-type valves are known, for example, from US 6,056,266 A, US 6,899,316 B2, US 7,611,122 B2, US 6,056,266 A, US 7,611,122 B2 and US 8,177,190 B2.

[0005] Valves of the type mentioned at the outset are known from WO 2010 / 034046 A1, WO 2015 / 139818 A1, WO 2014 / 075757 A1 and US 9,732,860 B2. These are L-shaped valves, the closure member of which is linearly displaceable between an intermediate position and a closed position, wherein both the drive for displacing the closure member between the open position and the intermediate position and the drive for displacing the closure member between the intermediate position and the closed position are arranged outside the vacuum region of the vacuum valve.

[0006] In the vacuum valve known from WO 2010 / 034046 A1, there is a guide outside the vacuum region, which supports the valve rod so that it can be moved in the longitudinal displacement direction, and the guide block also has a cylinder chamber for the piston of the longitudinal stroke drive and can be moved linearly in a transverse displacement direction perpendicular to the longitudinal displacement direction, wherein the linear movement is carried out by the piston-cylinder unit acting in this direction. A similar vacuum valve is known from WO 2015 / 139818 A1.

[0007] In the case of the vacuum valve known from WO 2014 / 075757 A1, a block is arranged on the valve stem outside the vacuum region, which is guided displaceably in the longitudinal displacement direction by a guide block having rod-shaped guide elements. These rod-shaped guide elements can be displaced in a transverse displacement direction perpendicular to the longitudinal displacement direction, more precisely by means of a transverse stroke drive formed by a piston-cylinder unit. The piston-cylinder unit connected to the block serves to displace the valve stem in the longitudinal displacement direction.

[0008] US 7,762,527 B2 also discloses an embodiment of an L-type valve, in which a drive for linearly adjusting the closing member in the longitudinal adjustment direction and the transverse adjustment direction is arranged outside the vacuum region of the vacuum valve. A possible design provides that the piston-cylinder unit for adjusting the closing member in the longitudinal adjustment direction is movably arranged relative to the valve body in the transverse adjustment direction perpendicular to the longitudinal adjustment direction via a linear guide.

[0009] From WO 2016 / 142150 A1, a vacuum valve is known, in which a block mounted on a valve stem outside the vacuum region can be moved parallel to the longitudinal displacement direction by linear guides mounted on both sides of the block, more precisely by piston-cylinder units acting on the block. These linear guides themselves are movably guided by further linear guides mounted on both sides thereof and inclined relative to the longitudinal and transverse displacement directions, wherein the movement of these further linear guides is carried out by further piston-cylinder units. Similar vacuum valves with such linear guides inclined relative to each other are also known from US 10,234,059 B2 and US 9,957,745 B2, wherein in the first document mentioned, two valve plates can alternately abut against opposite valve seats to close opposite valve openings, while in the second document mentioned, there is only one drive, and the movement coupling of these linear guides is carried out by coupling springs, which are pressed together after the block mounted on the valve stem abuts against the stop.

[0010] Other types of vacuum valves are known which have a wedge-shaped closing member which is pressed into the wedge-shaped surface of the valve seat when the vacuum valve is closed, see for example WO 2011 / 088482 A1, DE 2013 / 006123 A1, US 9,664,293B2 and WO 2017 / 025329 A1, or have a closing member with two plates which have inclined surfaces and can be expanded relative to each other by means of components which cooperate with these inclined surfaces, see for example US 4,560,141 A, US 4,052,036 A and US 4,470,576 A.

[0011] AT 511 372 A1 discloses a vacuum valve in which a closure element can be displaced linearly in the closing direction from an open position to a closed position. Valve rods arranged on both sides of the closure element extend from the closure element in the closing direction, i.e. the closure element is located on the side of the valve opening facing away from the drive in the open position. Summary of the invention

[0012] The object of the present invention is to provide a vacuum valve of the type mentioned at the outset, in which a relatively large closing force can be applied in an advantageous manner. This is achieved according to the invention by a vacuum valve having the features of claim 1 .

[0013] In the vacuum valve according to the present invention, at least one valve stem is guided by at least one guide block in a linearly movable manner parallel to the longitudinal displacement direction. The longitudinal stroke drive is used to move at least one valve stem relative to at least one guide block in a linearly movable manner parallel to the longitudinal displacement direction. The transverse stroke drive is used to move at least one guide block in a linearly movable manner parallel to the transverse displacement direction, which is at a certain angle, preferably at a right angle, to the longitudinal displacement direction. For this purpose, at least one sliding component is provided, which is guided by a primary linear guide in a linearly movable manner relative to the valve body and by a secondary linear guide in a linearly movable manner relative to at least one guide block. The primary and secondary linear guides have an angle of less than 45°, preferably less than 25°, respectively, relative to the longitudinal displacement direction, and are sandwiched at an angle of greater than 3°, preferably greater than 4° and less than 45°, preferably less than 25°. In order to adjust the closing member between the intermediate position and the closed position, at least one sliding component is moved by the transverse stroke drive. As a result, the at least one guide shoe and thus the at least one valve rod are linearly displaced parallel to the transverse displacement direction, thereby pressing the closure element against the valve seat.

[0014] Since the vacuum valve according to the invention can exert a high closing force, the vacuum valve can advantageously have a relatively large valve opening.

[0015] In an advantageous embodiment of the invention, the closure member is located in the open position on the side of the valve opening remote from the longitudinal and transverse stroke drive. The closure member can therefore be relatively close to the at least one guide block in the intermediate position and in the closed position, whereby an advantageous lever ratio can be achieved by the transverse displacement of the at least one guide block when the closure member is pressed against the valve seat.

[0016] In order to guide at least one valve stem movably by means of at least one guide block, it is advantageously provided that the respective valve stem passes through the opening of the respective guide block. In an advantageous embodiment, there are two valve stems which are connected at one end to the closure member, preferably via a support frame which connects the valve stems, and at their other end are connected via a yoke. The longitudinal stroke drive advantageously acts on the yoke, wherein at least one drive element of the longitudinal stroke drive which is movable in the longitudinal displacement direction is preferably connected to the yoke so that the drive element can be moved in the transverse displacement direction relative to the yoke. The longitudinal stroke drive, i.e. at least one housing part of the longitudinal stroke drive, can then be rigidly connected to the valve body.

[0017] Advantageously, the main linear guide is parallel to the longitudinal displacement direction. The transverse stroke drive, ie at least one housing part of the transverse stroke drive, can then be rigidly connected to the valve body.

[0018] In a preferred embodiment of the present invention, two sliding parts are provided, which are respectively guided movably by a primary linear guide relative to the valve body, and respectively guided movably by a secondary linear guide relative to the guide block or a corresponding guide block, and are connected by a yoke, on which a transverse stroke drive acts.

[0019] In order to guide the at least one valve stem in the end region opposite the closure member, at least one longitudinal linear guide is advantageously provided, which is fixed to the valve body and parallel to the longitudinal displacement direction. At least one connecting element is provided, which enables the at least one valve stem to be moved parallel to the transverse displacement direction. For example, the connecting element can be a leaf spring. The surface normal of the leaf spring is at right angles to the longitudinal displacement direction.

[0020] If in this context one speaks of the position of a linear guide or the angle at which a linear guide is situated, this refers to the direction parallel to which a carriage of the linear guide can be moved in the guide part of the linear guide.

[0021] As linear guides for the primary and / or secondary linear guides and / or longitudinal linear guides, guide rails can advantageously be used, i.e. the guide element along which the carriage can move consists of the guide rail. In particular, the carriage of the linear guide can be arranged on rolling bodies relative to the guide rail, for example by means of rolling bodies surrounding the guide or by means of rolling bodies arranged in a roller cage. In principle, the carriage can also be guided in a sliding manner relative to the guide rail. Preferably, conventional linear guides can be used, which are used in large quantities as standard components, for example in mechanical engineering. Such linear guides are inexpensive, run smoothly and have little or no play (due to them being preloaded).

[0022] It is also conceivable and feasible to use linear guides designed in other ways, for example in the form of wave-shaped guides, wherein the guide element consists of a rod, in particular of a circular cross section. It is also conceivable and feasible to use at least one guide track, into which at least one guide projection (pin or roller) projects, i.e. a design in the form of a connecting rod guide. The guide track can be formed, for example, by an elongated hole, a groove or a ridge. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Other advantages and details of the present invention are explained below with reference to the accompanying drawings, wherein:

[0024] Figure 1 and Figure 2 is an oblique view of a vacuum valve according to an embodiment of the present invention when the closing member is in an open position and viewed from different viewing directions;

[0025] Figure 3 and Figure 4 are front and side views of the closure member in the open position;

[0026] Figure 5 is along Figure 4 The cross-sectional view of line AA;

[0027] Figure 6 is along Figure 3 The cross-sectional view of line BB;

[0028] Figure 7 is along Figure 5 The cross-sectional view of the CC line;

[0029] Figure 8 is along Figure 3 The cross-sectional view of the DD line;

[0030] Figures 9 to 12 is with Figures 5 to 8 A cross-sectional view corresponding to the cross-sectional view of , but in the middle of the closed member;

[0031] Figures 13 to 16 is with Figures 5 to 8 but in the closed position of the closure member;

[0032] Fig.17 is an exploded view (portions of the valve housing and actuator housing are omitted for clarity);

[0033] Fig.18 , 19 and 20 are oblique views of the closure member in the open position, the intermediate position and the closed position with the valve housing removed;

[0034] Fig.21 , 22 and 23 is similar to Fig.18 , 19 and an oblique view of 20 observed from another viewing direction. DETAILED DESCRIPTION

[0035] An embodiment of a vacuum valve according to the invention is shown in the drawings.

[0036] The vacuum valve has a valve body 1, which has a wall 1a, which has a valve opening 2 with an axis 3. In the closed state of the vacuum valve, the valve opening 2 is closed by a closure member 4, which is in particular a plate-shaped structure, which is then in its closed position. In the closed position of the closure member 4, it is pressed against a valve seat 5, which surrounds the valve opening 2 on the side facing the closure member 4. In the open state of the vacuum valve, the closure member 4 releases the valve opening 2, and the closure member 4 is then in its open position. The closure member 4 is displaced between the closed position and the open position via an intermediate position, in which, seen in the direction of the axis 3 of the valve opening 2, the closure member covers the valve opening 2, but is lifted off (= away from) the valve seat 5.

[0037] An elastic sealing ring 6 (for example made of FKM or FFKM) arranged on the closing member 4 is used to seal between the closing member 4 of the valve body 1 and the wall with the valve opening 2 in the closed position of the closing member 4, and the valve seat 5 has a sealing surface, and the sealing ring 6 is pressed against the sealing surface.

[0038] In principle, the sealing ring 6 can also be arranged on the sealing seat and pressed against the sealing surface of the closure component 4 .

[0039] The valve body 1 has an inner space 7 in which the closing member 4 is arranged. This inner space 7 of the valve body 1 constitutes the vacuum region (= region in which a vacuum can exist) of the vacuum valve. The valve body 1 has a further opening 8 in the further wall 1b, thereby forming a through passage through the inner space 7 that passes through the valve body 1. In this embodiment, the through passage extends straight in the direction of the axis 3.

[0040] The walls 1a, 1b and the other parts surrounding the interior space 7, including in particular the bottom 1c, thus together form the valve housing of the valve body 1 in this embodiment, which has the interior space 7. The valve housing is rigidly connected to the drive housing of the valve body 1, which accommodates the components of the valve drive described below. The drive housing has in particular side jaws 1d, 1e.

[0041] The valve body 1 can be connected to other parts of the vacuum device, such as a vacuum chamber and / or a pipeline. Then, in the open position of the closing member 4, the inner space 7 of the valve body 1 is communicated with the inner space of the first part of the vacuum device through the valve opening 2, and the inner space 7 is communicated with the inner space of another part of the vacuum device through the opening 8.

[0042] In principle, the vacuum valve can also be designed as a so-called insert, wherein the valve body 1 can be arranged in the interior of the vacuum chamber on the wall of the vacuum chamber in the operating state of the vacuum valve and sealed relative to it, so that the valve opening 2 is aligned with the opening in the vacuum chamber wall. The opposing wall of the vacuum valve with the opening 8 can then be omitted. The closure component 4 is then also arranged in the vacuum region of the vacuum valve.

[0043] The closing member 4 is supported by two valve rods 9, in this embodiment, by a support 12 connecting these valve rods, to which the closing member 4 is fixed. The valve rods 9 are led out of the vacuum region of the vacuum valve through an opening in the bottom 1c of the valve body 1, wherein these valve rods are movable in the direction of their mutually parallel longitudinal axes 10 (which are parallel to the longitudinal displacement direction 13) and in a transverse displacement direction 14 that is at an angle, in particular perpendicular thereto. In this embodiment, a bellows 11 is used for this purpose. In principle, another type of vacuum feedthrough can also be provided for this purpose, for example another type of bellows or a linear feedthrough, which itself is arranged in a sealing manner and movably relative to the bottom 1c in the transverse displacement direction 14.

[0044] The valve rod 9 is arranged displaceably in the direction of its longitudinal axis 10, i.e. parallel to the longitudinal displacement direction 13, by means of at least one guide block 15a, 15b, which is located outside the vacuum region of the vacuum valve, i.e. outside the valve housing in this embodiment. The at least one guide block 15a, 15b itself is displaceable in the transverse displacement direction 14, as will be explained in more detail below.

[0045] In this embodiment, each of the two valve stems 7 has a separate guide block 15a, 15b. Each guide block 15a, 15b has an opening for longitudinally guiding the corresponding valve stem 9, and the corresponding valve stem 9 extends through the opening. The guide blocks 15a, 15b can also be designed integrally with each other, or connected to each other by a connecting piece, for example.

[0046] The longitudinal stroke drive 17 serves to adjust the valve rod 9 along and against the longitudinal adjustment direction 13. In the exemplary embodiment, the longitudinal stroke drive is composed of two piston-cylinder units, whose housings are rigidly connected to the valve body 1. For example, the longitudinal stroke drive can also have only one single piston-cylinder unit or be composed of an actuator designed in another way.

[0047] In this embodiment, the valve stems 9 are connected to each other at their ends facing away from the closure member 4 via a yoke 16. In this embodiment, a longitudinal stroke drive 17 acts on the yoke 16. The piston-cylinder unit can be equipped, for example, with a rodless piston, as is generally known, wherein the movement of the piston is transmitted to a driven drive component 18 located outside the cylinder housing. The connecting component 20 is connected to these drive components via a pin 19. The connecting component 20 has a recess 20a (see, for example, Fig.17 ), the protrusion 16a on the lower side of the yoke 16 (see, for example Figure 6In this way, it is possible to achieve that the yoke 16 and thus the valve stem 9 can be moved parallel to the transverse displacement direction 14 relative to the corresponding drive part 18 of the longitudinal stroke drive 17 when the closure member 4 is moved from the intermediate position to the closed position and vice versa, as described in more detail below.

[0048] In this embodiment, the longitudinal linear guides 21 are used to support the movable guidance of the valve stem 9 in the longitudinal displacement direction 13. These longitudinal linear guides are rigidly connected to the valve body 1 with their stationary parts, in this embodiment, the track-shaped guide parts 21a, and are connected with their movable parts, in this embodiment, the carriages 21b, via connecting parts 22 to the valve stem 9, more precisely, to the yoke 16 in this embodiment. In this embodiment, the connecting parts 22 are leaf springs. As a result, a movement of the valve stem 9 parallel to the transverse displacement direction 14 can be achieved.

[0049] The transverse stroke drive 23, which cooperates with two sliding parts 24, serves to displace the guide blocks 15, 15b and therefore also the valve rods 9 and the closure member 4 carried by these valve rods along and against a transverse displacement direction, which in this embodiment is parallel to the axis 3 of the valve opening 2, as is preferred. The two sliding parts 25 are located on both sides of the transverse stroke drive 23 and are connected to each other via a yoke 25. In this embodiment, the transverse stroke drive 23 consists of a piston-cylinder unit, wherein the cylinder housing is rigidly connected to the valve body 1. The piston rod of the piston-cylinder unit is connected to the yoke 25. For example, two piston-cylinder units or at least one actuator designed in another way can also be provided for the transverse stroke drive 23.

[0050] As shown in the figures, the transverse stroke drive 23 preferably acts parallel to the longitudinal displacement direction 13. In the case of a design as a piston-cylinder unit, at least one piston (in the exemplary embodiment there are two pistons) can thus be moved parallel to the longitudinal displacement direction 13.

[0051] The respective sliding element 24 is guided linearly displaceably relative to the valve body 1 by the respective main linear guide 26. The carriage (=guide carriage) 26b of the main linear guide is rigidly connected to the sliding element 24 and the linearly extending guide element 26a of the main linear guide is rigidly connected to the valve body 1. In this embodiment, the guide element 26a is fixed to the respective side jaw 1d, 1e for this purpose. The opposite design is also conceivable and possible, in which the guide element 26a is rigidly connected to the sliding element 24 and the carriage 24b is rigidly connected to the valve body.

[0052] Furthermore, the respective sliding element 24 is guided linearly displaceably relative to the respective guide block 15a, 15b by the respective secondary linear guide 27. In this embodiment, the linearly extending guide element 27 of the secondary linear guide is rigidly connected to the sliding element 24 for this purpose, and the carriage (=guide carriage) 27b of the secondary linear guide is rigidly connected to the respective guide block 15a, 15b. The opposite design is also conceivable and possible, i.e. the carriage 27b is rigidly connected to the sliding element 24, and the guide element 27a is rigidly connected to the respective guide block 15a, 15b.

[0053] The primary linear guides 26 and the secondary linear guides 27 are parallel to each other and form an angle 28 greater than 3° and less than 45° (at Fig.12 Preferably, the angle 28 is in the range of 5° to 20°.

[0054] The primary linear guide 26 and the secondary linear guide 27 are located in a plane spanned by the longitudinal adjustment direction 13 and the transverse adjustment direction 14 .

[0055] The guide directions of the primary and secondary linear guides 26 , 27 are therefore wedge-shaped with respect to one another, wherein the tip of the wedge is preferably located on the side of the linear guides 26 , 27 facing the closure member 4 .

[0056] In this exemplary embodiment, the primary linear guide 26 is parallel to the longitudinal adjustment direction 13 .

[0057] In modified embodiments, an orientation of the primary linear guide 26 at an angle to the longitudinal adjustment direction 13 is also conceivable and possible. The secondary linear guide 27 can then be arranged parallel to the longitudinal adjustment direction 13 or likewise at an angle to the longitudinal adjustment direction 13 (but in any case wedge-shaped with respect to the primary linear guide 26). However, the angle at which the primary and secondary linear guides 26, 27 are arranged with respect to the longitudinal adjustment direction 13 is in any case less than 45°, preferably less than 25°.

[0058] In this embodiment, two sliding members 24 are located between two valve stems 9 .

[0059] To close the vacuum valve, Figures 1 to 8 Starting from the open position shown, in which the closing element 4 is in the open position, the closing element 4 is first moved in the longitudinal adjustment direction 13 by the longitudinal stroke drive 17 until the closing element reaches its position in the longitudinal direction 13. Figures 9 to 12 The intermediate position is shown in FIG.

[0060] In the open position, in this embodiment, the closing member 4 is located on the side of the valve opening 2 that is away from the drive, that is, the valve stem 9 protrudes from the closing member 4 in the longitudinal displacement direction, in which the closing member is displaced from the open position to the intermediate position. In other words, the closing member 4 is displaced from the open position to the intermediate position by the pulling force acting on the valve stem 9, and is displaced from the intermediate position to the open position by the thrust acting on the valve stem 9.

[0061] In order to move the closure member from the intermediate position to the closed position, in which the vacuum valve is closed and the closed position is Figures 13 to 16 , the slide 24 is shown to be linearly moved from a starting position to an end position by the transverse stroke drive 23. In this case, the guide blocks 15, 15b are linearly moved in the transverse displacement direction 14 by the movement of the slide 24 and the primary and secondary linear guides 26, 27 which are wedge-shaped relative to each other. In this embodiment, as already mentioned, the slide 24 is moved in the longitudinal displacement direction 13 relative to the valve body 1. When the primary linear guide 26 is tilted relative to the valve body 1, the slide 24 is moved relative to the valve body 1 in an inclined displacement direction which is at an angle to the longitudinal displacement direction.

[0062] The vacuum valve is opened in the reverse order. First, the slide 24 is moved from the end position to the start position by the transverse stroke drive 23, wherein the guide blocks 15a, 15b are linearly displaced counter to the transverse displacement direction 14, and thus the closure member 4 is displaced from the closed position to the intermediate position counter to the transverse displacement direction 14. As a result, the valve rod 9 and thus the closure member 4 are moved counter to the longitudinal displacement direction 13 by the longitudinal stroke drive 17, thereby displacing the closure member 4 from the intermediate position to the open position.

[0063] Without departing from the scope of the invention, various other modifications of the embodiment shown are conceivable and possible. Thus, the closure member 4 can, for example, be located on the side of the valve opening 2 facing the drive in the open position (so that the closure member is pushed when shifting from the open position to the intermediate position and pulled when shifting from the intermediate position to the open position).

[0064] In order to adjust the guide blocks 15a, 15b in the transverse adjustment direction 14, there can be only one slide element 24 loaded by the transverse stroke drive 23, wherein the guide blocks 15a, 15b can be rigidly connected to each other. Then, there can be only one single primary linear guide 26 and / or one single secondary linear guide 27 for displaceably guiding the slide element 26.

[0065] Only one valve rod may be provided for holding the closure element 4 , which valve rod is mounted displaceably parallel to the longitudinal displacement direction by a guide block, wherein only one sliding element 24 cooperating with the guide block may be present.

[0066] As mentioned, the linear guides 21, 26, 27 are designed as rail guides in this embodiment, which is preferred. The carriage here has a channel which is open at both ends and towards the longitudinal sides and which surrounds the widened head region of the guide rail. In particular, the channel has a region of larger diameter, in which the head region of the guide rail is located, and a region of smaller diameter, through which the narrower neck region of the guide rail extends, relative to a cross section perpendicular to the longitudinal extension of the guide rail. The carriage is thus fixed in a form-fitting manner in all directions at right angles to the longitudinal extension of the guide rail to prevent being pulled out of the guide rail.

[0067] In this embodiment, the side of the carriage channel which is open at right angles to the longitudinal extension of the guide rail with reference to the cross section points in each of the primary and secondary linear guides 26, 27 in a direction which lies in a plane spanned by the longitudinal and transverse displacement directions 13, 14. Alternatively, the direction can also be at an angle, in particular a right angle, to this plane.

[0068] It is also conceivable and possible to design individual or all linear guides 21 , 26 , 27 differently, for example in the form of wave guides (wherein rods, in particular with a circular cross section, are provided instead of guide rails) or connecting rod guides.

[0069] In principle, the longitudinal linear guide 21 can also be omitted.

[0070] List of Reference Numerals

[0071] 1 Valve body

[0072] 1a wall

[0073] 1b Wall

[0074] 1c Bottom

[0075] 1d Side jaw

[0076] 1e Side Jaw

[0077] 2 Valve opening

[0078] 3 Axis

[0079] 4 Closing components

[0080] 5 Valve seat

[0081] 6 Sealing ring

[0082] 7. Internal Space

[0083] 8 Opening

[0084] 9 Valve stem

[0085] 10 Longitudinal axis

[0086] 11 Bellows

[0087] 12 Bracket

[0088] 13 Vertical transposition direction

[0089] 14 Horizontal transposition direction

[0090] 15a Boot block

[0091] 15b Boot Block

[0092] 16 Yoke

[0093] 16a Raised

[0094] 17 Longitudinal travel drive

[0095] 18 Drive components

[0096] 19 Pins

[0097] 20 Connecting parts

[0098] 20a Concave

[0099] 21 Longitudinal linear guide

[0100] 21a Guide component

[0101] 21b Slide

[0102] 22 Connecting parts

[0103] 23 Transverse travel drive

[0104] 24 Sliding parts

[0105] 25 Yoke

[0106] 26 Main stage linear guide

[0107] 26a Guide component

[0108] 26b Slide

[0109] 27 Secondary linear guide

[0110] 27a Guide component

[0111] 27b Slide

[0112] 28 Angle

Claims

1. A vacuum valve, comprising: - a valve body (1) with a valve opening (2) surrounded by a valve seat (5); a closure member (4) which is displaceable parallel to a longitudinal displacement direction (13) between an open position and an intermediate position, in which the closure member releases the valve opening (2), but is lifted off the valve seat (5), and between the intermediate position and a closed position, in which the closure member rests against the valve seat (5); - at least one valve stem (9) carrying the closure member (4) and parallel to the longitudinal displacement direction (13); at least one guide block (15a, 15b), by which the at least one valve stem (9) is guided so as to be movable relative to the at least one guide block parallel to the longitudinal displacement direction (13); a longitudinal stroke drive (17) by which the at least one valve stem (9) can be moved relative to the at least one guide block (15a, 15b) parallel to the longitudinal displacement direction (13) in order to displace the closure member (4) between the open position and the intermediate position; a transverse stroke drive (23) by which the at least one guide block (15a, 15b) can be displaced parallel to the transverse displacement direction (14) in order to displace the closure element (4) between the intermediate position and the closed position, Characterized in that at least one sliding component (24) is provided, which is movably guided by at least one primary linear guide (26) relative to the valve body (1) and movably guided by at least one secondary linear guide (27) relative to the at least one guide block (15a, 15b), wherein the primary and secondary linear guides (26, 27) respectively have an angle of less than 45° relative to the longitudinal displacement direction (13), and the at least one primary linear guide (26) and the at least one secondary linear guide (27) form an angle greater than 3° and less than 45°, wherein in order to make the at least one guide block (15a, 15b) displaceable parallel to the transverse displacement direction (14), the at least one sliding component (24) can be moved by the transverse stroke drive (23).

2. The vacuum valve according to claim 1, characterized in that: The at least one primary linear guide (26) is parallel to the longitudinal displacement direction (13), and the at least one sliding element (24) is moved by the transverse stroke drive (23) parallel to the longitudinal displacement direction (13).

3. The vacuum valve according to claim 1 or 2, characterized in that: The longitudinal stroke drive (17) is rigidly connected to the valve body (1), and at least one movable drive part (18) of the longitudinal stroke drive (17) is movably connected to the at least one valve rod (9) in the transverse displacement direction (14).

4. The vacuum valve according to any one of claims 1 to 3, characterized in that: Two valve stems (9) are provided which carry the closure member (4) and are connected to one another at the end remote from the closure member (4) by a yoke (16) on which the longitudinal stroke drive (17) acts.

5. The vacuum valve according to any one of claims 1 to 4, characterized in that: The at least one guide block (15a, 15b) has an opening through which the valve stem (9) passes, respectively, for movably guiding the corresponding valve stem (9).

6. The vacuum valve according to any one of claims 1 to 5, characterized in that: A first and a second sliding member (24) are provided, each of which is movably guided relative to the valve body (1) by at least one primary linear guide (26) and is movably guided relative to the at least one guide block (15a, 15b) by at least one secondary linear guide (27), and is connected by a yoke (25) on which the transverse stroke drive (23) acts.

7. The vacuum valve according to any one of claims 1 to 6, characterized in that: The transverse stroke drive (23) is rigidly connected to the valve body (1).

8. The vacuum valve according to any one of claims 1 to 7, characterized in that: The longitudinal stroke drive (17) has at least one piston-cylinder unit, the transverse stroke drive (23) has at least one piston-cylinder unit, and the piston-cylinder units of the longitudinal stroke drive (17) and the transverse stroke drive (23) are parallel to each other.

9. The vacuum valve according to any one of claims 1 to 8, characterized in that: The guide direction defined by the at least one secondary linear guide (27) is wedge-shaped relative to the guide direction defined by the at least one primary linear guide (26), wherein the tip of the wedge is located on the side of the primary and secondary linear guides (26, 27) facing the closing member (4).

10. The vacuum valve according to any one of claims 1 to 9, characterized in that: The at least one valve rod (9) is movably mounted outside the vacuum region of the vacuum valve by the at least one guide block (15a, 15b).

11. The vacuum valve according to any one of claims 1 to 10, characterized in that: In the open position, the closure element (4) is located on a side of the valve opening (2) remote from the longitudinal and transverse stroke drive (17, 23).

12. The vacuum valve according to any one of claims 1 to 11, characterized in that: At least one longitudinal linear guide (21) is provided for guiding the at least one valve stem (9) in an end region remote from the closing member (4), wherein a guide component (21a) or a slide (21b) is rigidly connected to the valve body (1), and the other of the two components (21a, 21b) is connected to the at least one valve stem (9), wherein at least one connecting component (22) is provided which enables the at least one valve stem (9) to move parallel to the lateral displacement direction (14).

13. The vacuum valve according to claim 12, characterized in that: The at least one connecting component (22) enabling the at least one valve rod (9) to move parallel to the transverse displacement direction (14) is a leaf spring having a surface normal perpendicular to the longitudinal displacement direction.

14. The vacuum valve according to any one of claims 1 to 13, characterized in that The at least one primary linear guide (26) and the at least one secondary linear guide (27) enclose an angle of less than 25° with the longitudinal displacement direction (13).

15. The vacuum valve according to claim 14, characterized in that The at least one primary linear guide (26) encloses an angle (28) greater than 4° and less than 25° with the at least one secondary linear guide (27).

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