Energy harvesting device

Abstract

An energy harvesting device mainly consists of a high-potential metal, a low-potential metal, and multiple electrode spacings. The high-potential metal is composed of a ferromagnetic material disposed at an odd number of positions, and multiple high-charge particles exist within the ferromagnetic material. The low-potential metal is composed of a paramagnetic material disposed at an even number of positions, and multiple negatively charged particles exist within the paramagnetic material for collecting electron conduction. The high-potential metal and the low-potential metal have different potentials, creating a potential difference. The high-potential metal and the low-potential metal work together to capture an external time-varying magnetic field from the surrounding environment. This external time-varying magnetic field drives the high-charge particles to flow towards the negatively charged particles, forming electron transitions to generate electrical energy. After the low-potential metal reaches electron saturation, it outputs electrical energy.

Description

Technical Field

[0001] This invention relates to an energy harvesting device, and more particularly to an energy harvesting device in which high-potential metal and low-potential metal are arranged in a finger electrode configuration. Background Technology

[0002] Existing thermoelectric conversion elements, such as those described in Taiwan Patent No. TWI623118, primarily feature a thermoelectric conversion element capable of efficiently imparting a temperature difference to a thermoelectric conversion material. This existing thermoelectric conversion element alternately comprises a thermally conductive resin layer A and a thermally conductive resin layer B with a lower thermal conductivity than layer A, in direct contact with the first surface of a thermoelectric conversion module composed of P-type and N-type thermoelectric elements and electrodes. Furthermore, it alternately comprises a thermally conductive resin layer a and a thermally conductive resin layer b with a lower thermal conductivity than layer a, in direct contact with the second surface located on the opposite side of the first surface of the thermoelectric conversion module.

[0003] Existing energy harvesting devices include those listed in Announcements TWI610015, TWI604711, TWI596937, TWI595724, TWI589111, TWI586071, TWI566725, TWI560436, TWI555319, TWI550380, TWI550381, TWI542962, TWI515364, TWI506946, TWI505523, TWI488401, TW202026939, and TW20193. Patents 3392, TW201810741, TW201743480, WO2020218844, WO2020213034, WO2020214320, WO2020181695, US2020343817, US2020336006, US2020333004, US2020321912, US2020321514, US2020287222, and KR20200110584 are related to the present invention's selection of two magnetic fluxes. The flux of a magnetic field can produce different reactions in two metals. Due to the change of the magnetic field, the high-potential metal and the low-potential metal are generated by electromagnetic induction, which causes the magnetic field (or electromagnetic mass) to change the magnetic flux density. This allows the energy harvesting device developed according to Faraday's law to perform the energy conversion from magnetic energy to electrical energy, thereby obtaining the output of the voltage difference. Summary of the Invention

[0004] The purpose of this invention is to provide an energy harvesting device. Existing devices use a high-potential metal and a low-potential metal together to capture an external time-varying magnetic field in the surrounding environment. This external time-varying magnetic field drives the high-charged particles to flow toward the negative-charged particles, forming an electron transition to generate electrical energy.

[0005] An energy harvesting device capable of achieving the above-mentioned objectives includes:

[0006] A high-potential metal is a ferromagnetic material composed of a first upper surface and a first lower surface having a width and a stripe shape, and two first boundary surfaces having a height, which are arranged at an odd number of equal intervals. Multiple high-charge particles exist inside the ferromagnetic material.

[0007] A low-potential metal is a paramagnetic material composed of a second upper surface and a second lower surface having a width and a stripe shape, and two second boundary surfaces having a height, which are arranged at an even number of positions at equal intervals. Multiple negatively charged particles exist inside the paramagnetic material for collecting electron conduction. The high-potential metal and the low-potential metal have different potentials, which gives rise to a potential difference. The high-potential metal and the low-potential metal are used together to capture an external time-varying magnetic field in the surrounding environment. The external time-varying magnetic field drives the high-charged particles to flow from the first upper surface and the first lower surface to the negatively charged particles on the second upper surface and the second lower surface, forming an electron transition to generate an electrical energy. After the low-potential metal reaches an electron saturation state, it outputs an electrical energy.

[0008] Multiple electrode spacings, forming a stripe width, are disposed between the first upper surface of the ferromagnetic material and the second upper surface of the paramagnetic material. Attached Figure Description

[0009] Figure 1 This is a top view of the first embodiment of the energy harvesting device of the present invention;

[0010] Figure 2 for Figure 1 An enlarged schematic diagram of the AA section;

[0011] Figure 3 for Figure 2 A magnified view of part A;

[0012] Figure 4 This is a cross-sectional schematic diagram of the second embodiment of the present invention;

[0013] Figure 5 for Figure 4 A magnified view of part B;

[0014] Figure 6 This is a cross-sectional schematic diagram of the third embodiment of the present invention;

[0015] Figure 7 for Figure 6 A magnified view of part C;

[0016] Figure 8 This is a cross-sectional schematic diagram of the fourth embodiment of the present invention;

[0017] Figure 9 for Figure 8 A magnified view of part D;

[0018] Figure 10 This is a cross-sectional schematic diagram of the coating process of the present invention;

[0019] Figure 11 This is a cross-sectional schematic diagram of a single exposure step of the present invention;

[0020] Figure 12 This is a cross-sectional schematic diagram of the developing step of the present invention;

[0021] Figure 13 This is a cross-sectional schematic diagram of the first metal deposition step of the present invention;

[0022] Figure 14 This is a cross-sectional schematic diagram of the photoresist stripping step of the present invention;

[0023] Figure 15 This is a cross-sectional schematic diagram of the secondary coating process of the present invention;

[0024] Figure 16 This is a cross-sectional schematic diagram of the alignment exposure step of the present invention;

[0025] Figure 17 This is a cross-sectional schematic diagram of the alignment and development step of the present invention;

[0026] Figure 18 This is a cross-sectional schematic diagram of the second metal deposition step of the present invention;

[0027] Figure 19 This is a cross-sectional schematic diagram of the secondary photoresist stripping step of the present invention; and

[0028] Figure 20 This is a cross-sectional schematic diagram of the dielectric deposition step of the present invention;

[0029] Figure 21 The stripe width of the high-potential metal (or the stripe width of the low-potential metal) confirmed by an electron microscope in this invention is close to 100 micrometers (μm), while the stripe width of the electrode spacing is close to 30 micrometers (μm).

[0030] Figure 22The voltage measurement results of the high-potential metal and the low-potential metal at different thicknesses;

[0031] Figure 23 The voltage measurement results of this high dielectric constant dielectric material at different thicknesses;

[0032] Figure 24 A comparison diagram of the series capacitance values ​​of the high-potential metal and the low-potential metal after filling them with the high-dielectric-constant dielectric material;

[0033] Figure 25 A comparison of the parallel capacitance values ​​of the high-potential metal and the low-potential metal after filling them with the high-dielectric-constant dielectric material.

[0034] List of reference numerals in the attached figures: 1-High-potential metal; 11-First upper surface; 12-First lower surface; 13-First boundary surface; 14-Strip width; 15-Strip shape; 16-Height; 17-High-charge particle; 2-Low-potential metal; 21-Second upper surface; 22-Second lower surface; 23-Second boundary surface; 24-Strip width; 25-Strip shape; 26-Height; 27-Negatively charged particle; 3-Electrode spacing; 4-High dielectric constant dielectric material; 5-Substrate; 51-Negative photoresist; 52-Photoresist; 6-Electron transition. Detailed Implementation

[0035] Please see Figures 1 to 3 The energy harvesting device of the first embodiment provided by the present invention mainly comprises: a high-potential metal 1, a low-potential metal 2 and multiple electrode spacings 3;

[0036] The high potential metal 1 is a ferromagnetic substance composed of a first upper surface 11 with a bar width 14 and a fringe shape 15, a first lower surface 12, and two first boundary surfaces 13 with an altitude 16, which are arranged at equal intervals in an odd number of locations. Multiple highly charged particles 17 exist inside the ferromagnetic substance. The width-to-depth ratio of the bar width 14 to the altitude 16 is in the range of 0.5 to 2.5 (100 length units: 50 length units to 100 length units: 250 length units).

[0037] The low-potential metal 2 is a paramagnetic substance composed of a second upper surface 21 with a width of 24 and a fringe shape 25, a second lower surface 22, and two second boundary surfaces 23 with a height of 26, arranged at evenly spaced even locations. Multiple negatively charged particles 27 are present within this paramagnetic substance for collecting electron conduction. The aspect ratio of the width 24 to the height 26 is in the range of 0.5 to 2.5 (100 units: 50 units to 100 units: 250 units). The different potentials of the high-potential metal 1 and the low-potential metal 2 create an electric potential difference. The high-potential metal 1 and the low-potential metal 2 together are used to capture an external time-varying magnetic field from the surrounding environment. The external time-varying magnetic field drives the high-charge particles 17 to flow from the first upper surface 11 and the first lower surface 12 toward the negative-charge particles 27 on the second upper surface 21 and the second lower surface 22 to form an electron transition 6 to generate an electrical energy, so that the low-potential metal 2 reaches the electron saturated state and outputs an electrical energy.

[0038] Multiple electrode spacings 3 are formed between the first upper surface 11 of the ferromagnetic material and the second upper surface 21 of the paramagnetic material, such that the ratio of the fringe width 14 of the first upper surface 11 to the fringe width of the electrode spacing 3 is 4 to 2.5 (100 length units: 25 length units to 100 length units: 40 length units), and the ratio of the fringe width 24 of the second upper surface 21 to the fringe width of the electrode spacing 3 is 4 to 2.5 (100 length units: 25 length units to 100 length units: 40 length units).

[0039] Please see Figure 4 and Figure 5The energy harvesting device of the second embodiment provided by the present invention is an extension of the first embodiment, and mainly includes: a high-potential metal 1, a low-potential metal 2, multiple electrode spacings 3 and a high dielectric constant dielectric material 4.

[0040] The high-potential metal 1 is a ferromagnetic material composed of a first upper surface 11 with a width 14 and a stripe shape 15, a first lower surface 12, and two first boundary surfaces 13 with a height 16, which are arranged at an odd number of equal intervals. Multiple high-charge particles 17 exist inside the ferromagnetic material.

[0041] The low-potential metal 2 is a paramagnetic material composed of a second upper surface 21 and a second lower surface 22 having a width 24 and a stripe shape 25, and two second boundary surfaces 23 having a height 26, which are arranged at an even number of positions at equal intervals. There are multiple negatively charged particles 27 inside the paramagnetic material for collecting electron conduction. The high-potential metal 1 and the low-potential metal 2 have different potentials, which gives rise to a potential difference. The high-potential metal 1 and the low-potential metal 2 are used together to capture an external time-varying magnetic field in the surrounding environment. The external time-varying magnetic field drives the high-charge particles 17 to flow from the first upper surface 11 and the first lower surface 12 toward the negatively charged particles 27 on the second upper surface 21 and the second lower surface 22 to form an electron transition 6 to generate an electrical energy. After the low-potential metal 2 reaches an electron saturation state, it outputs an electrical energy.

[0042] Multiple electrode spacings 3 are formed with a stripe width and are disposed between the first upper surface 11 of the ferromagnetic material and the second upper surface 21 of the paramagnetic material;

[0043] The high-k dielectric material 4, which has complex permittivity, is added into the electrode spacing 3 to store a negative electron and a positive electron generated by the high-potential metal 1 and the low-potential metal 2, thereby providing a stable energy output.

[0044] Please see Figure 6 and Figure 7 The energy harvesting device of the third embodiment provided by the present invention mainly comprises: a substrate 5, a high-potential metal 1, a low-potential metal 2, and multiple electrode spacings 3.

[0045] The substrate 5 is made of a single-sided board, a double-sided board, or a multi-layer board, and multiple odd-numbered positions and multiple even-numbered positions are formed on the substrate 5.

[0046] The high-potential metal 1 is a ferromagnetic material composed of a first upper surface 11 and a first lower surface 12 having a width 14 and a stripe shape 15, and two first boundary surfaces 13 having a height 16, which are arranged at equal intervals in the odd number of positions. Multiple high-charge particles 17 exist inside the ferromagnetic material. The width-to-depth ratio of the width 14 to the height 16 is in the range of 0.5 to 2.5 (100 length units: 50 length units to 100 length units: 250 length units).

[0047] The low-potential metal 2 is a paramagnetic material composed of a second upper surface 21 and a second lower surface 22 having a width 24 and a stripe shape 25, and two second boundary surfaces 23 having a height 26, which are arranged at equal intervals at the even-numbered positions. Multiple negatively charged particles 27 exist within the paramagnetic material for collecting and conducting electrons. The width-to-depth ratio of the stripe width 24 to the height 26 is between 0.5 and 2.5 (100 length units: 50 length units to 100 length units: 250 length units). Within a certain range, the high-potential metal 1 and the low-potential metal 2 have different potentials, which creates a potential difference. The high-potential metal 1 and the low-potential metal 2 are used together to capture an external time-varying magnetic field in the surrounding environment. The external time-varying magnetic field drives the high-charge particles 17 to flow from the first upper surface 11 and the first lower surface 12 toward the negative-charge particles 27 on the second upper surface 21 and the second lower surface 22 to form an electron transition 6 to generate an electrical energy. After the low-potential metal 2 reaches the electron saturation state, it outputs an electrical energy.

[0048] Multiple electrode spacings 3 are formed with a stripe width and disposed between the first upper surface 11 of the ferromagnetic material and the second upper surface 21 of the paramagnetic material, such that the ratio of the stripe width 14 of the first upper surface 11 to the stripe width of the electrode spacing 3 is 4 to 2.5 (100 length units: 25 length units to 100 length units: 40 length units), and the ratio of the stripe width 24 of the second upper surface 21 to the stripe width of the electrode spacing 3 is 4 to 2.5 (100 length units: 25 length units to 100 length units: 40 length units).

[0049] Please see Figure 8 and Figure 9The energy harvesting device of the fourth embodiment provided by the present invention is an extension of the third embodiment, and mainly includes: a substrate 5, a high-potential metal 1, a low-potential metal 2, multiple electrode spacings 3, and a high dielectric constant dielectric material 4.

[0050] Multiple odd-numbered positions and multiple even-numbered positions are formed on the substrate 5;

[0051] The high-potential metal 1 is a ferromagnetic material composed of a first upper surface 11 with a width 14 and a stripe shape 15, a first lower surface 12, and two first boundary surfaces 13 with a height 16, which are arranged at equal intervals in the odd number of positions. Multiple high-charge particles 17 exist inside the ferromagnetic material.

[0052] The low-potential metal 2 is a paramagnetic material composed of a second upper surface 21 and a second lower surface 22 having a width 24 and a stripe shape 25, and two second boundary surfaces 23 having a height 26, which are arranged at equal intervals at the even-numbered positions. There are multiple negatively charged particles 27 inside the paramagnetic material for collecting electron conduction. The high-potential metal 1 and the low-potential metal 2 have different potentials, which gives rise to a potential difference. The high-potential metal 1 and the low-potential metal 2 are used together to capture an external time-varying magnetic field in the surrounding environment. The external time-varying magnetic field drives the high-charge particles 17 to flow from the first upper surface 11 and the first lower surface 12 toward the negatively charged particles 27 on the second upper surface 21 and the second lower surface 22 to form an electron transition 6 to generate an electrical energy. After the low-potential metal 2 reaches the electron saturation state, it outputs an electrical energy.

[0053] Multiple electrode spacings 3 are formed with a stripe width and are disposed between the first upper surface 11 of the ferromagnetic material and the second upper surface 21 of the paramagnetic material;

[0054] The high dielectric constant dielectric material 4 is added to the electrode spacing 3 to store a negative electron and a positive electron generated by the high potential metal 1 and the low potential metal 2, thereby increasing the output of a stable electrical energy provided by the low potential metal 2.

[0055] The high-potential metal 1 may contain the ferromagnetic material, such as at least one of copper (Cu), cobalt (Co), iron (Fe), nickel (Ni), and zinc (Zn), or a combination thereof. The low-potential metal 2 may contain the paramagnetic material, such as at least one of aluminum (Al), chromium (Cr), titanium (Ti), tungsten (W), molybdenum (Mo), and neodymium (Nd), or a combination thereof.

[0056] In the above invention, the widths 14 and 24 of the first upper surface 11 and the second upper surface 21 are preferably 100 length units. The heights 16 and 26 of the first boundary surface 13 and the second boundary surface 23 are specifically in the range of 50 to approximately 250 length units, preferably greater than 50 length units, more preferably more than 100 length units, particularly more than 150 length units, and most preferably more than 200 length units. Under this height 16 and 26, when driven by the external time-varying magnetic field, the output electrical energy value, compared to other thicknesses when the magnetic field is constant, has the largest difference in output value. The width-to-depth ratio of the widths 14 and 24 to the heights 16 and 26 is in the range of 0.5 to 2.5 (100 length units: 50 length units to 100 length units: 250 length units). Figure 21 In one embodiment of the present invention, the stripe width 14 of the high-potential metal 1 (or the stripe width 24 of the low-potential metal 2) is close to 100 length units (i.e., 100 micrometers (μm)) as confirmed by an electron microscope (SEM), and the stripe width of the electrode spacing 3 is close to 30 length units (i.e., 30 micrometers (μm)).

[0057] The high-dielectric-constant dielectric material 4 may include one or more layers, which are patterned parallel strips. This prevents short circuits between the high-potential metal 1 and the low-potential metal 2 and controls the separation distance between them. The high-dielectric-constant dielectric material 4 has strong polarizability, generating more polarization charges in the same electric field, thus storing more negative and positive electrons and converting their voltage potential. This high-dielectric-constant dielectric material 4 stabilizes the output voltage and acts as an energy storage device, and its dielectric constant is between 10 and 200. Containing tantalum pentoxide (Ta₂O₅), titanium dioxide (TiO₂), hafnium dioxide (HfO₂), zirconium dioxide (ZrO₂), aluminum oxide (Al₂O₃), lanthanum oxide (La₂O₃), and praseodymium trioxide (Pr₂O₃), this high-dielectric-constant dielectric material 4 can be composed of powder, flakes, or strips, and has an average particle size of approximately 1 to 10 length units. The average thickness of this high-dielectric-constant dielectric material 4 is approximately 10 to 70 length units; if the average thickness is too small, the electrical properties will be affected. The average weight per unit area of ​​this high-dielectric-constant dielectric material 4 can be approximately 0.2 mg / cm². 2 Up to 3.5 mg / cm 2If the average weight per unit area of ​​the dielectric material is too small, the isolation structure of the high dielectric constant dielectric material 4 cannot achieve the purpose of uniform electric field distribution, thereby reducing the coulombic efficiency, capacitance and cycle life of the energy harvesting device.

[0058] Figure 23 The high dielectric constant dielectric material is filled into the electrode spacing 3. The high dielectric constant dielectric material is compared with different thicknesses, namely 50 nanometers (nm), 100 nanometers (nm), 150 nanometers (nm), and 200 nanometers (nm), to measure the output voltage.

[0059] Specifically, Figure 23 The meanings of the four lines are as follows:

[0060] The square icon ■ indicates that the high dielectric constant dielectric material with a thickness of 50 nanometers (nm) is filled into the electrode spacing 3 to compare the output voltage measurement results.

[0061] The line marked with an upward triangle ▲ means: the high dielectric constant dielectric material is filled into the electrode spacing 3, and the thickness of the high dielectric constant dielectric material is 100 nanometers (nm) to compare the output voltage measurement results;

[0062] The circle icon ● indicates that the high dielectric constant dielectric material with a thickness of 150 nanometers (nm) is filled into the electrode spacing 3 to compare the output voltage measurement results.

[0063] The downward triangle icon ▼ means: the high dielectric constant dielectric material with a thickness of 200 nanometers (nm) is filled into the electrode spacing 3 to compare the output voltage measurement results.

[0064] Figure 24 A comparison of the series capacitance values ​​of the high-potential metal and the low-potential metal after filling them with the high-dielectric-constant dielectric material.

[0065] Figure 25 A comparison of the parallel capacitance values ​​of the high-potential metal and the low-potential metal after filling them with the high-dielectric-constant dielectric material.

[0066] The units of length are nanometers (nm), micrometers (μm), millimeters (mm), and centimeters (cm). For example, the first interpretation of 100 units of length is 25 units of length, and the second interpretation is 100 nanometers: 25 nanometers to 100 nanometers: 40 nanometers; and so on.

[0067] The external time-varying magnetic field is an electromagnetic field within an electromagnetic environment. This invention cites one source of this external time-varying magnetic field: when an alternating current flows through a multi-turn coil, the coil generates a magnetic field due to the magnetic effect of the current. The direction of the alternating current constantly changes, causing the resulting magnetic field to change direction up and down over time, with a frequency of 20 kHz. If a metal pot is placed above this coil, according to Lenz's law, the bottom of the pot will have a changing magnetic field induced by the magnetic field below. However, according to Faraday's law of electromagnetic induction, this time-varying magnetic field will generate the external time-varying magnetic field on the bottom of the pot. Finally, because the bottom of the pot has resistance, heat will be generated according to the heating effect of the current to heat the food.

[0068] When the external time-varying magnetic field in the surrounding environment is activated, when the high-potential metal 1 and the low-potential metal 2 come into contact with the external time-varying magnetic field, an electromagnetic mass of the external time-varying magnetic field is moved relative to the high-potential metal 1 and the low-potential metal 2. When the electromagnetic mass causes a change in magnetic flux, it generates an alternating voltage (or induces an alternating current) through the high-potential metal 1 and the low-potential metal 2. In one state, the different materials of the high-potential metal 1 and the low-potential metal 2 cause the external time-varying magnetic field to form a voltage potential difference when it comes into contact with the different materials. The potential difference causes the negatively charged particles 27, which are driven by the high-charge particles 17, to flow from the first upper surface 11 and the first lower surface 12 to the second upper surface 21 and the second lower surface 22, and then the low-potential metal 2 outputs the electrical energy (or the alternating voltage) to complete a circuit.

[0069] The arrangement of the high-potential metal 1 and the low-potential metal 2 forms a unique interlaced shape, which results in the formation of both uniform and non-uniform electric fields and magnetic lines of force. This electromagnetic mass (or magnetic field) obeys Faraday's law, Ampere's law, Gauss's law of electricity, and Gauss's law of magnetism, except for the influence of the external time-varying magnetic field. This external time-varying magnetic field induces an electron transition 6, causing the high-charge particle 17 to flow towards the negative-charge particle 27 through an induced electromotive force. Figure 22 As shown, the small induced voltage difference generated by the high-potential metal 1 and the low-potential metal 2 follows Lenz's law. Therefore, when the electromagnetic mass (or magnetic field) initially increases (rising from 0T to 0.8T in the first 50 seconds), the high-potential metal 1 and the low-potential metal 2 generate an output (i.e., back electromotive force) against the direction of the electromagnetic mass (or magnetic field), resulting in a voltage boost, which is negative. Then, when the electromagnetic mass (or magnetic field) is balanced (remaining balanced for 50 seconds), the overall output of the high-potential metal 1 and the low-potential metal 2 does not change significantly, resulting in voltage balance. Finally, when the electromagnetic mass (or magnetic field) decreases (spending another 50 seconds to reduce it from 0.8T to 0T), the output of the high-potential metal 1 and the low-potential metal 2 decreases, resulting in a voltage drop, which is positive.

[0070] Based on the above, this application also provides a method for manufacturing an energy harvesting device, which uses photoresist to define the patterns of the high-potential metal 1 and the low-potential metal 2. The photoresist is divided into positive photoresist 51 and negative photoresist 51. Both have the same lithography process, but due to the characteristics of the photosensitive materials, the imaging results are completely different. This invention is illustrated using positive photoresist 51, which includes the following steps:

[0071] Step 1: Coating finish, such as... Figure 10As shown, a layer of positive photoresist 51 is uniformly coated on a substrate 5; the substrate 5 can be made of a glass substrate, a glass-fiber board, or an epoxy bonded fiber-glass board.

[0072] Step 2: Single exposure, such as Figure 11 As shown, at the even-numbered positions of the substrate 5, the positive photoresist 51 is defined with a pattern opposite to the desired one.

[0073] Step 3: Development, such as Figure 12 As shown, when a photoresist 52 is irradiated, the portion of the photoresist 52 that is irradiated will dissolve in the positive photoresist 51, while the portion that is not irradiated will not dissolve in the positive photoresist 51.

[0074] Step 4: First metal deposition, such as... Figure 13 As shown, in order to deposit the low-potential metal 2 (or deposit the high-potential metal 1 first) on the substrate 5 "without the positive photoresist 51" and "with the positive photoresist 51", as in the prior art, the low-potential metal 2 (or the high-potential metal 1) can be formed by physical vapor deposition (PVD), such as sputtering, pulsed laser deposition (PLD), electron beam evaporation (EBE), thermal evaporation or laser molecular beam epitaxy (LMBE); or by chemical vapor deposition (CVD), such as metal-organic chemical vapor deposition (MOCVD), hydride liquid phase epitaxy (HVPE), initiated chemical vapor deposition (iCVD), plasma-enhanced chemical vapor deposition (PECVD), atomic layer deposition (ALD) or molecular layer deposition (MLD);

[0075] Step 5: Photoresist lift-off, such as... Figure 14 As shown, in order to remove the remaining positive photoresist 51 using a lift-off technology, the low-potential metal 2 covering the positive photoresist 51 will also be lifted off, and the stripe shape 25 of the remaining low-potential metal 2 will form a desired first pattern.

[0076] Step 6: Secondary coating process (quadratic coating finish), such as... Figure 15As shown, a layer of positive photoresist 51 is uniformly coated on the substrate 5 and the low-potential metal 2 after step 5 is completed.

[0077] Step 7: Para-position exposure, such as... Figure 16 As shown, the positive photoresist 51 between the two low-potential metals 2 in step 6 defines a pattern opposite to the desired pattern at the odd-numbered position of the substrate 5.

[0078] Step 8: Para-position development, such as... Figure 17 As shown, the substrate 5 in step 7 is irradiated with a photoresist 52. The portion of the substrate 5 that is irradiated by the photoresist 52 will dissolve in the positive photoresist 51, while the portion that is not irradiated by the photoresist 52 will not dissolve in the positive photoresist 51.

[0079] Step 9: Second metal deposition, such as... Figure 18 As shown, in order to deposit the high-potential metal 1 (or the low-potential metal 2) on the substrate 5 in step 8 "without the positive photoresist 51" and "with the positive photoresist 51", the high-potential metal 1 (or the low-potential metal 2) can be formed by physical vapor deposition (PVD) or chemical vapor deposition (CVD).

[0080] Step 10: Quadratic photoresist lift-off, such as... Figure 19 As shown, a lift-off technique is used to remove the remaining positive photoresist 51 from step 9. The high-potential metal 1 covering the positive photoresist 51 is also peeled off, leaving the high-potential metal 1 with stripe shape 15 forming a desired second pattern. The first pattern and the second pattern form a stripe width; thus, the energy harvesting device of the third embodiment is completed. If the substrate 5 is removed in a subsequent step, the energy harvesting device of the first embodiment is completed.

[0081] Step 11: Dielectric deposition, such as... Figure 20 As shown, a high dielectric constant dielectric material 4 is filled into the stripe width; thus, the energy harvesting device of the fourth embodiment is completed. If the substrate 5 is removed in a subsequent step, the energy harvesting device of the second embodiment is completed.

[0082] Figure 22The high-potential metal is made of nickel (Ni), and the low-potential metal is made of aluminum (Al). Comparisons were made at different thicknesses: 50 nanometers (nm), 100 nanometers (nm), 150 nanometers (nm), and 200 nanometers (nm). The metal was placed in the external time-varying magnetic field of the high-current electromagnet measurement system for measurement. The X-axis represents the magnetic field. The magnetic field was raised to 0.8T for the first 50 seconds, kept constant for the middle 50 seconds, and lowered to 0T for the last 50 seconds. The total measurement time was 150 seconds. The Y-axis represents the output voltage measurement result.

[0083] Specifically, Figure 22 The meanings of the four lines are as follows:

[0084] The downward triangle icon ▼ indicates that the high-potential metal is made of nickel (Ni) and the low-potential metal is made of aluminum (Al), with a thickness of 50 nanometers (nm). It is placed in the external time-varying magnetic field of the high-current electromagnet measurement system for measurement. The X-axis represents the magnetic field, which rises to 0.8T for the first 50 seconds, remains flat for the middle 50 seconds, and then drops to 0T for the last 50 seconds. The total measurement time is 150 seconds. The Y-axis represents the output voltage measurement result.

[0085] The square icon (■) indicates that the high-potential metal is made of nickel (Ni) and the low-potential metal is made of aluminum (Al), with a thickness of 100 nanometers (nm). It is placed in the external time-varying magnetic field of the high-current electromagnet measurement system for measurement. The X-axis represents the magnetic field, which is raised to 0.8T for the first 50 seconds, kept flat for the middle 50 seconds, and lowered to 0T for the last 50 seconds. The total measurement time is 150 seconds. The Y-axis represents the output voltage measurement result.

[0086] The line marked with an upward-pointing triangle ▲ indicates that the high-potential metal is made of nickel (Ni) and the low-potential metal is made of aluminum (Al), with a thickness of 150 nanometers (nm). It is placed in the external time-varying magnetic field of the high-current electromagnet measurement system for measurement. The X-axis represents the magnetic field, which rises to 0.8T for the first 50 seconds, remains constant for the middle 50 seconds, and then drops to 0T for the last 50 seconds. The total measurement time is 150 seconds. The Y-axis represents the output voltage measurement result.

[0087] The circular icon ● indicates that the high-potential metal is made of nickel (Ni) and the low-potential metal is made of aluminum (Al), with a thickness of 200 nanometers (nm). It is placed in the external time-varying magnetic field of the high-current electromagnet measurement system for measurement. The X-axis represents the magnetic field, which is raised to 0.8T for the first 50 seconds, kept constant for the next 50 seconds, and lowered to 0T for the last 50 seconds. The total measurement time is 150 seconds. The Y-axis represents the output voltage measurement result.

Claims

1. An energy harvesting device, characterized in that, include: A high-potential metal is a ferromagnetic material composed of a first upper surface and a first lower surface having a width and a stripe shape, and two first boundary surfaces having a height, which are arranged at an odd number of equal intervals. Multiple high-charge particles exist inside the ferromagnetic material. A low-potential metal is a paramagnetic material composed of a second upper surface and a second lower surface having a width and a stripe shape, and two second boundary surfaces having a height, arranged at an even number of equally spaced positions. Multiple negatively charged particles exist inside the paramagnetic material for collecting electrons. The high-potential metal and the low-potential metal have different potentials, which creates a potential difference. The high-potential metal and the low-potential metal are used together to capture an external time-varying magnetic field from the surrounding environment. The external time-varying magnetic field drives the high-charged particles to flow from the first upper surface and the first lower surface to the negatively charged particles on the second upper surface and the second lower surface, forming electron transitions to generate electrical energy. After the low-potential metal reaches an electron saturation state, it outputs electrical energy. Multiple electrode spacings, forming a stripe width, are disposed between the first upper surface of the ferromagnetic material and the second upper surface of the paramagnetic material.

2. An energy harvesting device, characterized in that, include: A high-potential metal is a ferromagnetic material composed of a first upper surface and a first lower surface having a width and a stripe shape, and two first boundary surfaces having a height, which are arranged at an odd number of equal intervals. Multiple high-charge particles exist inside the ferromagnetic material. A low-potential metal is a paramagnetic material composed of a second upper surface and a second lower surface having a width and a stripe shape, and two second boundary surfaces having a height, arranged at an even number of equally spaced positions. Multiple negatively charged particles exist inside the paramagnetic material for collecting electrons. The high-potential metal and the low-potential metal have different potentials, which creates a potential difference. The high-potential metal and the low-potential metal are used together to capture an external time-varying magnetic field from the surrounding environment. The external time-varying magnetic field drives the high-charged particles to flow from the first upper surface and the first lower surface to the negatively charged particles on the second upper surface and the second lower surface, forming electron transitions to generate electrical energy. After the low-potential metal reaches an electron saturation state, it outputs electrical energy. Multiple electrode spacings form a stripe width disposed between the first upper surface of the ferromagnetic material and the second upper surface of the paramagnetic material; A high dielectric constant dielectric material is added in the electrode spacing to store a negative electron and a positive electron generated by the high-potential metal and the low-potential metal to provide a stable output of electrical energy.

3. An energy harvesting device, characterized in that, include: A substrate on which a plurality of odd-numbered positions and a plurality of even-numbered positions are formed; A high-potential metal is a ferromagnetic material composed of a first upper surface and a first lower surface having a width and a stripe shape, and two first boundary surfaces having a height, which are arranged at an odd number of equal intervals. Multiple high-charge particles exist inside the ferromagnetic material. A low-potential metal is a paramagnetic material composed of a second upper surface and a second lower surface having a width and a stripe shape, and two second boundary surfaces having a height, arranged at an even number of equally spaced positions. Multiple negatively charged particles exist inside the paramagnetic material for collecting electrons. The high-potential metal and the low-potential metal have different potentials, which creates a potential difference. The high-potential metal and the low-potential metal are used together to capture an external time-varying magnetic field from the surrounding environment. The external time-varying magnetic field drives the high-charged particles to flow from the first upper surface and the first lower surface to the negatively charged particles on the second upper surface and the second lower surface, forming electron transitions to generate electrical energy. After the low-potential metal reaches an electron saturation state, it outputs electrical energy. Multiple electrode spacings, forming a stripe width, are disposed between the first upper surface of the ferromagnetic material and the second upper surface of the paramagnetic material.

4. An energy harvesting device, characterized in that, include: A substrate on which a plurality of odd-numbered positions and a plurality of even-numbered positions are formed; A high-potential metal is a ferromagnetic material composed of a first upper surface and a first lower surface having a width and a stripe shape, and two first boundary surfaces having a height, which are arranged at equal intervals at the odd number of positions. Multiple high-charge particles exist inside the ferromagnetic material. A low-potential metal is a paramagnetic material composed of a second upper surface and a second lower surface having a width and a stripe shape, and two second boundary surfaces having a height, which are arranged at equal intervals at the even-numbered positions. Multiple negatively charged particles exist inside the paramagnetic material to collect electrons for conduction. The high-potential metal and the low-potential metal have different potentials, which gives rise to a potential difference. The high-potential metal and the low-potential metal are used together to capture an external time-varying magnetic field from the surrounding environment. The external time-varying magnetic field drives the high-charged particles to flow from the first upper surface and the first lower surface to the negatively charged particles on the second upper surface and the second lower surface, forming an electron transition to generate an electrical energy. After the low-potential metal reaches an electron saturation state, it outputs an electrical energy. Multiple electrode spacings form a stripe width disposed between the first upper surface of the ferromagnetic material and the second upper surface of the paramagnetic material; A high dielectric constant dielectric material is added to the electrode spacing to store a negative electron and a positive electron generated by the high-potential metal and the low-potential metal, thereby increasing the output of a stable electrical energy provided by the low-potential metal.

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