Multi-axis control adjustment device, system, and method

Abstract

The present application provides a multi-axis control adjustment device, system and method capable of improving versatility. A parameter adjustment device (5) has: an adjustment axis selection section (51) that selects two or more axes that are targets of control parameter adjustment by a servo amplifier (9, 11, 13) in a multi-axis control system (3A, 3B) having a plurality of axes that are combinations of one servo amplifier and one motor, and that controls two or more axes synchronously according to an instruction from a controller (7A, 7B); an adjustment action execution section (53) that performs an adjustment action on the selected two or more axes according to a common instruction or individual instructions; and a first control parameter setting section (55) that changes a timing at which a control parameter is set for the two or more axes according to the adjustment action.

Description

TECHNICAL FIELD

[0001] Embodiments of the present disclosure relate to a multi-axis control adjustment device, a multi-axis control adjustment system, and a multi-axis control adjustment method. BACKGROUND

[0002] A multi-axis control system setting / adjustment function assisting device is described in Patent Literature 1. The multi-axis control system setting / adjustment function assisting device, for a multi-axis control system having a plurality of axes each being a combination of one servo amplifier and one servo motor, and performing positioning control in which the plurality of axes are synchronized in accordance with an instruction from a motion controller, has a setting / adjustment function of setting / adjusting a control parameter set in the servo amplifier, groups the plurality of axes constituting a mechanical axis in which the plurality of axes are mechanically linked as one group, adjusts the control parameter for the plurality of axes constituting the group, and displays an average value of the adjustment results of the control parameter for all of the plurality of axes constituting the group as a control parameter value for the mechanical axis for each item of the control parameter.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT LITERATURE

[0005] Patent Literature 1: Japanese Patent No. 5523643 SUMMARY

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] In the above-described prior art, the object of setting / adjusting the control parameter is limited to the multi-axis control system having a plurality of axes mechanically linked, and there is a demand for an adjustment device for a multi-axis control system having higher versatility.

[0008] The present invention has been achieved in view of such a problem, and has an object to provide a multi-axis control adjustment device, a multi-axis control adjustment system, and a multi-axis control adjustment method capable of improving versatility.

[0009] MEANS FOR SOLVING THE PROBLEMS

[0010] To solve the above-described problem, according to one aspect of the present invention, there is provided a multi-axis control adjustment device including: an adjustment axis selection section that selects two or more axes as an object of adjustment of a control parameter in a multi-axis control system having a plurality of axes each being a combination of one motor control device and one motor, and in which two or more of the axes are synchronously controlled in accordance with an instruction from a higher-level controller, the control parameter being a control parameter of the motor control device; an adjustment operation execution section that executes an adjustment operation on the selected two or more axes in accordance with a common instruction or individual instructions; and a first control parameter setting section that changes a timing at which the control parameter is set for the two or more axes in accordance with the adjustment operation.

[0011] In addition, according to another aspect of the present application, a multi-axis control adjustment system can be applied, which has a multi-axis control system having a plurality of axes and synchronously controlling the plurality of axes according to an instruction from a higher-level controller, the axes being a combination of a motor control device and a motor, and a multi-axis control adjustment device adjusting a control parameter of the motor control device for the two or more axes of the multi-axis control system.

[0012] In addition, according to another aspect of the present application, a multi-axis control adjustment method can be applied, which includes selecting two or more axes, which are a combination of a motor control device and a motor, as objects of adjustment of a control parameter, which is a control parameter of the motor control device, in a multi-axis control system having a plurality of axes and synchronously controlling the two or more axes according to an instruction from a higher-level controller, performing an adjustment operation on the selected two or more axes according to a common instruction or individual instructions, and changing a timing at which the control parameter is set to the two or more axes according to the adjustment operation.

[0013] (EFFECT OF INVENTION)

[0014] The multi-axis control adjustment device and the like according to the present application can improve versatility. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 FIG. 1 is a diagram showing an example of the overall structure of a multi-axis control adjustment system in a case where two or more axes, which are adjustment objects, are mechanically constrained.

[0016] Figure 2 FIG. 2 is a diagram showing an example of the overall structure of a multi-axis control adjustment system in a case where two or more axes, which are adjustment objects, are not mechanically constrained.

[0017] Figure 3 FIG. 3 is a block diagram showing an example of the structure of a feedback control system in a servo amplifier.

[0018] Figure 4 FIG. 4 is a block diagram showing an example of the functional structure of a parameter adjustment device and a servo amplifier.

[0019] Figure 5 FIG. 5 is a diagram showing an example of a selection screen used by a user to select an adjustment mode of a control parameter.

[0020] Figure 6 FIG. 6 is a table comparing the contents of a first adjustment mode with the contents of a second adjustment mode.

[0021] Figure 7is a flowchart showing an example of control steps performed by the parameter adjustment device and the plurality of servo amplifiers in a case where the first adjustment mode is selected.

[0022] Figure 8 is a flowchart showing an example of control steps performed by the parameter adjustment device and the plurality of servo amplifiers in a case where the second adjustment mode is selected.

[0023] Figure 9 is a block diagram showing an example of a hardware structure of the parameter adjustment device. DETAILED DESCRIPTION

[0024] Hereinafter, one embodiment will be described with reference to the drawings.

[0025] <1. General structure of multi-axis control adjustment system>

[0026] Use Figure 1 and Figure 2 , an example of the general structure of the multi-axis control adjustment system having the multi-axis control adjustment device of the present embodiment will be described.

[0027] The multi-axis control adjustment system 1 of the present embodiment is a system for automatically performing adjustment of control parameters of servo amplifiers with respect to a multi-axis control system 3, that is, two or more axes as an adjustment target. The multi-axis control adjustment system 1 can perform adjustment of control parameters with respect to both a case where the axes of the adjustment target are mechanically constrained and a case where the axes of the adjustment target are not mechanically constrained. Hereinafter, the multi-axis control adjustment system in the case where the axes of the adjustment target are mechanically constrained will be referred to as a multi-axis control adjustment system 1A, and the multi-axis control adjustment system in the case where the axes of the adjustment target are not mechanically constrained will be referred to as a multi-axis control adjustment system 1B.

[0028] First, an example of the multi-axis control adjustment system 1A in the case where two or more axes as an adjustment target are mechanically constrained will be described using Figure 1 , as shown in Figure 1 , the multi-axis control adjustment system 1A has a multi-axis control system 3A and a parameter adjustment device 5. The multi-axis control system 3A has a controller 7A, three servo amplifiers 9, 11A, 13A, and a gantry mechanism 15. The multi-axis control system 3A has a plurality of (three in this example) axes, and synchronously controls the plurality of axes, which are combinations of one servo amplifier and one linear motor, based on an instruction from the controller 7A.

[0029] The controller 7A (an example of an upper-level controller) is a control device that performs control of the entire multi-axis control system 3A, and is also referred to as an upper-level controller or a motion controller, for example. The controller 7A transmits a position command to each servo amplifier 9, 11A, 13A.

[0030] The servo amplifiers 9, 11A, 13A (one example of a motor control device) supply electric power to linear motors provided in the gantry mechanism 15 based on the position command received from the controller 7A, and control the operation of the gantry mechanism 15. In Figure 1 In the example shown, the gantry mechanism 15 has, for example, three linear motors 17, 19, 21, and three servo amplifiers 9, 11A, 13A are provided corresponding to each of the linear motors 17, 19, 21.

[0031] The gantry mechanism 15 has the linear motors 19, 21 arranged in parallel in the Y-axis direction, one linear motor 17 arranged in the X-axis direction in such a manner that it supports a beam at both ends between the movable members of the linear motors 19, 21, and an end effector 29. The shaft constituted by the servo amplifier 11A and the linear motor 19 and the shaft constituted by the servo amplifier 13A and the linear motor 21 are mechanically constrained. The linear motor 19 and the linear motor 21 are arranged in parallel with the Y-axis direction in a repeating manner with substantially the same length of linear movable range, and are controlled synchronously so that each movable member moves at the same position in the Y-axis direction. The linear motor 17 is moved as a whole in the Y-axis direction by the driving of the linear motors 19, 21, and moves the movable member to which the end effector 29 is linked in the X-axis direction.

[0032] The three linear motors 17, 19, 21 have linear encoders 23, 25, 27 for detecting the axial position of each movable member. The linear encoder 23 has a linear scale 23a and a scale head 23b. The linear encoder 25 has a linear scale 25a and a scale head 25b. The linear encoder 27 has a linear scale 27a and a scale head 27b. The linear encoders 23, 25, 27 detect the position of each movable member of the linear motors 17, 19, 21, and transmit the detected position to the corresponding servo amplifiers 9, 11A, 13A, respectively. The controller 7A transmits a position command of the X-axis to the servo amplifier 9, and transmits the same position command of the Y-axis to the servo amplifiers 11A, 13A. Each servo amplifier 9, 11A, 13A controls the supplied electric power with reference to the detected position received from the linear encoders 23, 25, 27, so that the position of the movable member of the corresponding linear motor 17, 19, 21 coincides with the position command. With the above structure, the gantry mechanism 15 moves the position of the end effector 29 in the X-Y coordinates in correspondence with the position command of the X-axis and the position command of the Y-axis transmitted from the controller 7A.

[0033] The parameter adjustment device 5 (an example of a multi-axis control adjustment device) automatically adjusts the control parameters of the servo amplifiers for the user-selected axis among the multiple axes of the multi-axis control system 3A. The parameter adjustment device 5 is communicatively connected to the controller 7A and also communicatively connected to each of the servo amplifiers 9, 11A, and 13A. The parameter adjustment device 5 can be, for example, a general-purpose personal computer or a specially designed engineering tool.

[0034] Next, use Figure 2 The multi-axis control adjustment system 1B will be described in the case where two or more axes being adjusted are not mechanically constrained. Furthermore, "not mechanically constrained" includes not only cases where two or more axes are not mechanically constrained, but also cases where they are constrained but the constraint is weaker than that of the aforementioned gantry mechanism 15. For example... Figure 2 As shown, the multi-axis control and adjustment system 1B includes a multi-axis control system 3B and a parameter adjustment device 5. The multi-axis control system 3B includes a controller 7B, two servo amplifiers 11B and 13B, and an XY stage mechanism 31. The multi-axis control system 3B has multiple axes (two in this example) and synchronously controls multiple axes based on instructions from the controller 7B. Each axis is a combination of a servo amplifier and a linear motor.

[0035] Controller 7B (an example of a host controller) is a control device that performs overall control of the multi-axis control system 3B; it is also referred to as a host controller or motion controller. Controller 7B sends position commands to each servo amplifier 11B and 13B.

[0036] Servo amplifiers 11B and 13B (an example of a motor control device) supply power to the linear motor of the XY table mechanism 31 based on position commands received from the controller 7B, thereby controlling the movement of the XY table mechanism 31. Figure 2 In the example shown, the XY stage mechanism 31 has, for example, two linear motors 33 and 35, and two servo amplifiers 11B and 13B are respectively set to correspond to each linear motor 33 and 35.

[0037] The XY stage mechanism 31 includes a linear motor 33 arranged along the X-axis, a linear motor 35 arranged along the Y-axis, and a movable stage 37. The axis formed by the servo amplifier 11B and the linear motor 33 is mechanically connected to, but not constrained by, the axis formed by the servo amplifier 13B and the linear motor 35. The linear motors 33 and 35 are arranged approximately orthogonally. The movable parts of the linear motors 35 and 33 are connected, and the entire assembly moves along the X-axis driven by the linear motor 33. The movable stage 37 is connected to the movable parts of the linear motor 35, and moves along the Y-axis driven by the linear motor 35. The linear motors 33 and 35 are controlled synchronously to move the movable stage 37 to the desired position.

[0038] Two linear motors 33 and 35 have linear encoders 39 and 41 for detecting the axial position of each movable component. Linear encoder 39 has a linear scale 39a and a scale head 39b. Linear encoder 41 has a linear scale 41a and a scale head 41b. Linear encoders 39 and 41 detect the position of each movable component of linear motors 33 and 35 and send the detected position to the corresponding servo amplifiers 11B and 13B, respectively. Controller 7B sends an X-axis position command to servo amplifier 11B and a Y-axis position command to servo amplifier 13B. Each servo amplifier 11B and 13B, referring to the detected position received from linear encoders 39 and 41, controls the power supply to ensure that the position of the movable component of the corresponding linear motor 33 and 35 matches the position command. Through this structure, the XY table mechanism 31, in accordance with the X-axis and Y-axis position commands sent by controller 7B, moves the movable table 37 in the XY coordinate system.

[0039] Parameter adjustment device 5 and Figure 1 Similarly, the control parameters of the servo amplifiers are automatically adjusted for the user-selected axes among the multiple axes of the multi-axis control system 3B. The parameter adjustment device 5 is communicatively connected to the controller 7B and also communicatively connected to each of the servo amplifiers 11B and 13B.

[0040] <2. Structure of the Feedback Control System for a Servo Amplifier>

[0041] Next, use Figure 3 An example of the structure of the feedback control system in each servo amplifier will be explained. Additionally, in Figure 3 The illustration uses servo amplifier 11A as an example, but other servo amplifiers 9, 11B, 13A, and 13B have the same structure. Additionally, in Figure 3 Control blocks are represented in the form of transfer functions.

[0042] The servo amplifier 11A has a subtracter 43, a position loop gain Kp, a subtracter 45, an integrator (1 / T-s), an adder 47, a velocity loop gain Kv, and a velocity calculator 49.

[0043] The subtracter 43 outputs a position deviation Pe by subtracting a detected position Pfb detected by the linear encoder 25 from a position command Pr received by the controller 7A. The position loop gain Kp outputs a velocity command Vr by multiplying the position deviation Pe by the position loop gain Kp. The position loop gain Kp performs so-called position proportional control.

[0044] The subtracter 45 outputs a velocity deviation Ve by subtracting a detected velocity Vfb output from the velocity calculator 49 from the velocity command Vr. The integrator (1 / T-s) performs an integration calculation based on a velocity loop integration time constant T with respect to the velocity deviation Ve. The adder 47 adds the output of the integrator (1 / T-s) to the velocity deviation Ve and outputs. The velocity loop gain Kv outputs a torque command Tr by multiplying the output of the adder 47 by the velocity loop gain Kv. The integrator (1 / T-s) and the velocity loop gain Kv perform so-called velocity integral proportional control.

[0045] The velocity calculator 49 outputs the detected velocity Vfb based on the detected position Pfb detected by the linear encoder 25. The velocity calculator 49 is constituted by, for example, a differentiator s.

[0046] The motor / drive mechanism 19, 15 corresponds to the linear motor 19 and the gantry mechanism 15, and is a mathematical model based on an inertia moment J of the movable mechanism as a whole that links the movable member of the linear motor 19 and the movable portion of the gantry mechanism 15. Further, in the case where the velocity loop gain Kv is further multiplied by the inertia moment of the movable member of the linear motor 19, for example, the mathematical model in the motor / drive mechanism 19, 15 can also be defined with an inertia moment ratio.

[0047] As described above, the feedback control system constituted by the servo amplifier 11A and the motor / drive mechanism 19, 15 becomes a double loop structure of the feedback loop of the position proportional control system and the feedback loop of the velocity integral proportional control system (so-called P-IP control). Further, in Figure 3 In the above, a feedback loop of a current control section that outputs a drive current under PWM control to the motor / drive mechanism 19, 15 based on the torque command Tr and a current control system provided inside thereof are omitted for the sake of simplifying the explanation.

[0048] <3. Parameter adjustment device and functional structure of servo amplifier>

[0049] Next, using Figures 4-6An example of the functional structure of the parameter adjustment device 5 and servo amplifiers 11 and 13 will be described. Furthermore, hereinafter, without distinguishing between servo amplifiers 11A and 11B and servo amplifiers 13A and 13B, they will be abbreviated as servo amplifiers 11 and 13 (…). Figure 4 (The same applies).

[0050] like Figure 4 As shown, the parameter adjustment device 5 includes an adjustment axis selection unit 51, an adjustment action execution unit 53, a first control parameter setting unit 55, a control parameter calculation unit 57, a control parameter acquisition unit 59, a control parameter determination unit 61, and an adjustment mode setting unit 63. Additionally, servo amplifiers 11 and 13 each have a second control parameter setting unit 65.

[0051] In the multi-axis control systems 3A and 3B, the axis selection unit 51 selects two or more axes as the objects for adjusting the control parameters of the servo amplifier. The axis selection unit 51 selects two or more axes based on the user's selection operation.

[0052] Figure 5 This shows an example of a selection screen where the user chooses the axis to adjust. Figure 5 In the multi-axis control system, all adjustable axes are displayed in the adjustment axis overview display unit 67. The user can select the axes to perform automatic adjustment simultaneously by checking checkbox 69. Figure 5 In the example shown, five axes, such as AXIS001A to AXIS004A, are displayed as adjustable axes, with AXIS001A, AXIS001B, and AXIS004A being the three axes selected.

[0053] The axis selected in checkbox 69 is automatically added to the detailed settings display unit 71. The user can further select axes to have their control parameters adjusted to the same value by checking checkbox 73. The axis selection unit 51 selects two or more axes selected in checkbox 73. Figure 5 In the example shown, among the three axes AXIS001A, AXIS001B, and AXIS004A that are automatically adjusted simultaneously, axes AXIS001A and AXIS001B are selected as axes to be adjusted to the same value. Furthermore, AXIS004A, which is not selected, is adjusted simultaneously with AXIS001A and AXIS001B, but is allowed to be adjusted to different values.

[0054] For example, in the case of the multi-axis control system 3A having the gantry mechanism 15, three axes corresponding to the servo amplifiers 9, 11A, 13A in which adjustment is simultaneously performed are selected in the aforementioned check box 69, and two axes corresponding to the servo amplifiers 11A, 13A in which the control parameters are adjusted to the same value are selected in the aforementioned check box 73. In addition, in the case of the multi-axis control system 3B having the XY table mechanism 31, two axes corresponding to the servo amplifiers 11B, 13B in which adjustment is simultaneously performed are selected in the aforementioned check box 69, and the two axes are selected as the axes in which the control parameters are adjusted to the same value in the aforementioned check box 73.

[0055] In the detailed setting display section 71, a setting button 75 for making detailed settings is provided for each axis. The user opens a detailed setting screen (omitted from the drawing) by operating the setting button 75, and can make detailed settings of the settings of the command (for example, the moving distance, the moving speed, and the like of the adjustment operation), the range of the parameter (for example, the upper limit value of each gain), and the like.

[0056] Returning to Figure 4 , the adjustment operation execution section 53 performs an adjustment operation on two or more axes selected by the aforementioned adjustment axis selection section 51 based on a common command or separate commands. Specifically, the adjustment operation execution section 53 performs an adjustment operation on the selected two or more axes by a common command in the case where the axes that are adjustment targets are mechanically constrained as in the aforementioned multi-axis control adjustment system 1A (in the case where the first adjustment mode described later is selected by the user). In addition, the adjustment operation execution section 53 performs an adjustment operation on the selected two or more axes by separate commands in the case where the axes that are adjustment targets are not mechanically constrained as in the aforementioned multi-axis control adjustment system 1B (in the case where the second adjustment mode described later is selected by the user). In the case where an adjustment operation is performed based on separate commands, the adjustment operation execution section 53 makes the timing of the start of adjustment and the timing of the completion of adjustment consistent for the two or more axes, and simultaneously and in parallel performs adjustment operations. That is, regardless of which axis completes adjustment, the adjustment operation is continued until the adjustment of all of the selected axes is completed. Furthermore, the command can be received by the parameter adjustment device 5 from the controller 7 and transmitted to each servo amplifier 11, 13, or the parameter adjustment device 5 can transmit the command to each servo amplifier 11, 13 from the controller 7 by controlling the controller 7.

[0057] The first control parameter setting section 55 changes the timing of setting the control parameters for the two or more axes selected by the above-mentioned adjustment axis selection section 51 in accordance with the adjustment operation. Specifically, the first control parameter setting section 55 sets the control parameters to the same value for the two or more axes at the time of execution of the adjustment operation in the case where the adjustment operation is performed by the above-mentioned adjustment operation execution section 53 based on the common instruction (in the case where the first adjustment mode described later is selected by the user). In addition, the first control parameter setting section 55 sets the control parameters to the same value for the two or more axes after completion of the adjustment operation in the case where the adjustment operation is performed by the above-mentioned adjustment operation execution section 53 based on the individual instruction (in the case where the second adjustment mode described later is selected by the user). In addition, the control parameters set by the first control parameter setting section 55 are control parameters related to responsiveness, for example, include the above-mentioned position loop gain Kp, the velocity loop gain Kv, the velocity loop integral time constant T, parameters related to various filters, and the like.

[0058] The control parameter calculation section 57 calculates the control parameters based on the observation values of the two or more axes at the time of execution of the adjustment operation in the case where the adjustment operation is performed by the above-mentioned adjustment operation execution section 53 based on the common instruction. The "observation value" is a state quantity of the linear motor, for example, is the detected position Pfb detected by the above-mentioned linear encoders 23, 25, 27, 39, 41, the detected velocity Vfb output from the velocity calculator 49, and the like. The above-mentioned first control parameter setting section 55 reflects the control parameters calculated by the control parameter calculation section 57 for the two or more axes in the execution of the adjustment operation, thereby being set to the same value.

[0059] The control parameter acquisition section 59 acquires the control parameters calculated by the servo amplifiers 11, 13 of the two or more axes, respectively, after completion of the adjustment operation in the case where the adjustment operation is performed by the above-mentioned adjustment operation execution section 53 based on the individual instruction.

[0060] The control parameter determination section 61 determines and decides the control parameter having the lowest responsiveness among the control parameters acquired by the above-mentioned control parameter acquisition section 59. The above-mentioned first control parameter setting section 55 causes the two or more axes to reflect the control parameter decided by the control parameter determination section 61 after completion of the adjustment operation, thereby being set to the same value.

[0061] The adjustment mode setting section 63 sets the adjustment mode of the control parameter to the first adjustment mode in a case where two or more axes selected by the adjustment axis selection section 51 are mechanically constrained, and sets the adjustment mode of the control parameter to the second adjustment mode in a case where two or more axes selected by the adjustment axis selection section 51 are not mechanically constrained. The "first adjustment mode" is an adjustment mode in which the control parameter related to responsiveness is always set to the same setting for all axes in the adjustment operation. The "second adjustment mode" is an adjustment mode in which the control parameter related to responsiveness is adjusted individually in the adjustment operation, and the final adjustment value is set to the same value for all axes.

[0062] The adjustment operation execution section 53 performs the adjustment operation based on the common instruction in a case where the adjustment mode is set to the first adjustment mode by the adjustment mode setting section 63, and performs the adjustment operation based on the individual instruction in a case where the adjustment mode is set to the second adjustment mode by the adjustment mode setting section 63. In addition, the first control parameter setting section sets the control parameter to the same value for two or more axes in the execution of the adjustment operation in a case where the adjustment mode is set to the first adjustment mode by the adjustment mode setting section 63, and sets the control parameter to the same value for two or more axes after the completion of the adjustment operation in a case where the adjustment mode is set to the second adjustment mode by the adjustment mode setting section 63.

[0063] The adjustment mode setting section 63 sets the adjustment mode of the control parameter to either the first adjustment mode or the second adjustment mode according to a selection operation by the user.

[0064] An example of a selection screen for the user to select the adjustment mode of the control parameter is shown in FIG. 8. Figure 5 In FIG. 8, an adjustment mode selection section 77 is provided below the detailed setting display section 71. The adjustment mode selection section 77 is configured as a pull-down menu, for example, and the user can select either the first adjustment mode or the second adjustment mode by operating the adjustment mode selection section 77. Figure 5 In the example shown in FIG. 8, the first adjustment mode is selected. Figure 5 A set-all button 79 is provided below the adjustment mode selection section 77. The user can open a detailed setting screen (omitted from illustration) to make detailed settings for all axes with respect to the setting of the instruction (such as the movement distance, movement speed, and the like of the adjustment operation), the range of the parameter (such as the upper limit value of the gain), and the like by operating the set-all button 79. In addition, in a case where detailed settings are made individually for each axis, the detailed settings are made by the aforementioned setting buttons 75. A button 81 to "close detailed settings" is a button for closing the detailed settings of the selection screen shown in FIG. 8.

[0065] Figure 5

[0066] Figure 6 ​​a table showing contents of the first adjustment mode and contents of the second adjustment mode. As shown in Figure 6 The processing of searching for the control parameters (gains described in Figure 6 and Figure 7 ) related to responsiveness based on the observation values of the axes is executed by the parameter adjustment device 5 in the first adjustment mode, and, in contrast, is executed by the respective servo amplifiers 11, 13 in the second adjustment mode. In addition, the processing related to vibration suppression is executed by the second control parameter setting sections 65 of the respective servo amplifiers 11, 13 in either of the first adjustment mode and the second adjustment mode. Further, the set values of the inertia are individually set for the respective axes in either of the first adjustment mode and the second adjustment mode. In addition, the processing of finally setting the control parameters related to the adjusted responsiveness is executed by the parameter adjustment device 5 in both the first adjustment mode and the second adjustment mode. In addition, the instructions from the controllers 7A, 7B are the same instructions for all the axes selected in the first adjustment mode, and, in contrast, are individual instructions for the respective axes selected in the second adjustment mode. In addition, specific examples of the application device are, in the first adjustment mode, a gantry mechanism or the like that mechanically constrains the axes and operates with the same instructions, and, in contrast, in the second adjustment mode, an XY table mechanism or the like that does not mechanically constrain the axes and operates with different instructions but is finally set to the same parameter setting.

[0067] Returning to Figure 4 , in a case where the adjustment operation execution section 53 of the parameter adjustment device 5 performs an adjustment operation based on common instructions or individual instructions for two or more selected axes, the second control parameter setting sections 65 of the respective servo amplifiers 11, 13 individually set the control parameters related to vibration suppression at the time of execution of the adjustment operation. The control parameters related to vibration suppression are, for example, the inertia (inertial moment J described above), the vibration frequency, and the like. With respect to these control parameters related to vibration suppression, it is preferable to immediately change and reflect in order to prevent generation of vibrations, mechanical damage due to oscillation, and the like, and thus the control parameters are individually set by the servo amplifiers 11, 13 of the respective axes rather than by the parameter adjustment device 5.

[0068] Further, the processing and the like in the respective processing sections of the above-described parameter adjustment device 5 (the same also for the servo amplifiers 11, 13) are not limited to the example of division of the processing, and, for example, the processing can be performed by a smaller number of processing sections (for example, one processing section), and, in addition, the processing can be performed by further subdivided processing sections. In addition, the functions of the above-described parameter adjustment device 5 (the same also for the servo amplifiers 11, 13) can be realized by a program executed by the CPU 901 (refer to Figure 9 ) described later, and can be realized by an actual device such as an ASIC, an FPGA, other circuitry, or the like for a part or all of the functions.

[0069] <4. Control steps based on the parameter adjustment device and the servo amplifiers>

[0070] Next, an example of the control steps performed by the parameter adjustment device 5 and the servo amplifiers 11, 13 will be described. Figure 7 and Figure 8 Fig. 8 is a flowchart showing an example of the control steps in the case where the first adjustment mode is selected, Figure 7 Fig. 9 is a flowchart showing an example of the control steps in the case where the second adjustment mode is selected. Figure 8

[0071] First, the case where the first adjustment mode is selected will be described. In the case where the first adjustment mode is selected, Figure 7 the user completes the selection of the adjustment axes and the detailed settings in the selection screen shown in Fig. 6, for example, by operating the adjustment start button (omitted from the drawing) or the like, the parameter adjustment device 5 starts the control of the adjustment of the parameters. Figure 5 In step S1, the parameter adjustment device 5 acquires the adjustment axis information selected by the user in the selection screen shown in Fig. 6 in relation to the adjustment axes and the detailed settings. The aforementioned adjustment axis selection section 51 selects, based on the acquired adjustment axis information, two or more axes (two axes corresponding to the servo amplifiers 11A, 13A in this example) as the objects of the control of the adjustment of the parameters, and the adjustment mode setting section 63 sets the adjustment mode of the control of the parameters to the first adjustment mode in this example based on the acquired adjustment axis information.

[0072] Figure 5 In step S2, the parameter adjustment device 5 transmits the detailed setting information for each axis included in the information acquired in step S1 to the servo amplifiers 11A, 13A, respectively.

[0073] In step S3, the servo amplifier 11A performs the setting of the associated parameters required for the execution of the adjustment operation based on the received detailed setting information. Similarly, in step S4, the servo amplifier 13A performs the setting of the associated parameters required for the execution of the adjustment operation based on the received detailed setting information. The servo amplifiers 11A, 13A transmit a response signal to the parameter adjustment device 5 after completing the setting of the associated parameters.

[0074] In step S5, the parameter adjustment device 5 receives the response signals from the servo amplifiers 11A, 13A and confirms that the parameter setting has been completed. In addition, in the case where the parameter setting is not completed due to the fact that either one or both of the axes is not in the servo-ready state or the like, the parameter adjustment device 5 displays an alarm and does not start the adjustment operation of all the axes.

[0075] In step S5, the parameter adjustment device 5 receives the response signals from the servo amplifiers 11A, 13A and confirms that the parameter setting has been completed. In addition, in the case where the parameter setting is not completed due to the fact that either one or both of the axes is not in the servo-ready state or the like, the parameter adjustment device 5 displays an alarm and does not start the adjustment operation of all the axes.

[0076] ​​In step S6, the parameter adjustment device 5 performs a calculation process of searching for a control parameter (gain in Figure 7 described below) related to responsiveness by the control parameter calculation section 57 based on the state quantity calculated and transmitted by the servo amplifiers 11A, 13A (refer to steps S15, S20 described below), and transmits the calculated control parameters to the servo amplifiers 11A, 13A respectively by the first control parameter setting section 55. Further, the control parameters transmitted to the servo amplifiers 11A, 13A respectively in this step S6 are the same value.

[0077] In step S7, the servo amplifier 11A sets a control parameter (gain in Figure 7 described below) related to responsiveness based on the received control parameter. Similarly, in step S8, the servo amplifier 13A sets a control parameter (gain in Figure 7 described below) related to responsiveness based on the received control parameter. The servo amplifiers 11A, 13A transmit an acknowledgement signal to the parameter adjustment device 5 after completion of the setting of the gain.

[0078] In step S9, the parameter adjustment device 5 receives the acknowledgement signal from the servo amplifiers 11A, 13A, and confirms that the setting of the control parameter (gain in Figure 7 described below) related to responsiveness has been completed.

[0079] In step S10, the parameter adjustment device 5 starts the adjustment operation by the adjustment operation execution section 53 by transmitting the upper command (position command) to the servo amplifiers 11A, 13A respectively. Further, the command transmitted to the servo amplifiers 11A, 13A respectively in this step S10 is the same command.

[0080] In step Sll, the servo amplifier 11A starts the adjustment operation of the linear motor 19 based on the received position command.

[0081] In step S12, the servo amplifier 11A performs a vibration detection process, and in step S13, it is determined whether the detected vibration is greater than a prescribed threshold value. In the case where the detected vibration is equal to or less than the prescribed threshold value (step S13: No), the processing proceeds to step S15 described below. On the other hand, in the case where the detected vibration is greater than the prescribed threshold value (step S13: Yes), the processing proceeds to step S14.

[0082] In step S14, the servo amplifier 11A sets a control parameter related to vibration suppression by the second control parameter setting section 65.

[0083] In step S15, the servo amplifier 11A calculates the state quantities such as the detected position Pfb, the detected velocity Vfb based on the detection signal of the linear encoder 25 described above, and sequentially sends the calculated state quantities to the parameter adjustment device 5.

[0084] On the other hand, in step S16, the servo amplifier 13A starts the adjustment operation of the linear motor 21 based on the received position command.

[0085] In step S17, the servo amplifier 13A performs the vibration detection processing, and in step S18, it is determined whether the detected vibration is greater than a prescribed threshold value. In the case where the detected vibration is equal to or less than the prescribed threshold value (step S18: No), the processing proceeds to step S20 described later. On the other hand, in the case where the detected vibration is greater than the prescribed threshold value (step S18: Yes), the processing proceeds to step S19.

[0086] In step S19, the servo amplifier 13A sets the control parameters related to vibration suppression by the second control parameter setting section 65.

[0087] In step S20, the servo amplifier 13A calculates the state quantities such as the detected position Pfb, the detected velocity Vfb based on the detection signal of the linear encoder 27 described above, and sequentially sends the calculated state quantities to the parameter adjustment device 5.

[0088] In step S21, the parameter adjustment device 5 determines whether the vibration is within a prescribed allowable range (for example, equal to or less than the threshold value described above) by updating the control parameters related to vibration suppression in steps S14 and S19 described above. In the case where the vibration is outside the allowable range (step S21: No), the processing returns to step S10. In this way, steps S10 to S15 and steps S21, and steps S10 and steps S16 to S21 are repeated while sequentially changing the control parameters related to vibration suppression until the vibration is within the prescribed allowable range. In the case where the vibration is within the allowable range (step S21: Yes), the processing proceeds to step S22.

[0089] In step S22, the parameter adjustment device 5 determines whether the adjustment operation for both of the servo amplifiers 11A, 13A is completed. In the case where the adjustment operation is not completed (step S22: No), the processing returns to step S6. In this way, the processing of steps S6 to S22 described above is repeated until the adjustment operation is completed while sequentially changing the control parameters related to responsiveness (described as gain in Figure 7 On the other hand, in the case where the adjustment operation is completed (step S22: Yes), the processing proceeds to step S23.

[0090] In step S23, the parameter adjustment device 5 performs adjustment end processing by ending the adjustment operation of the servo amplifiers 11A, 13A on the linear motors 19, 21, and the like. By the above steps, the present flowchart ends.

[0091] Further, the setting of the control parameters (Kp, Kv, T, and the like) related to responsiveness also has an influence on the processing related to vibration suppression. Therefore, in the above control step, during the period in which the parameter adjustment device 5 performs adjustment of the control parameters related to vibration suppression on the servo amplifiers 11A, 13A side (step S10 to step S21), the parameter adjustment device 5 does not transmit the calculated control parameters to the servo amplifiers 11A, 13A but stands by, and after the vibration becomes within the permissible range (step S21: YES), the parameter adjustment device 5 transmits the control parameters calculated in step S6 to the servo amplifiers 11A, 13A.

[0092] Next, a case in which the second adjustment mode is selected will be described. In the above control step, the parameter adjustment device 5 performs adjustment of the control parameters related to vibration suppression on the servo amplifiers 11A, 13A side (step S10 to step S21). In this case, the parameter adjustment device 5 performs adjustment of the control parameters related to vibration suppression on the servo amplifiers 11A, 13A side in the same manner as in the first adjustment mode. Figure 8 In this case, the user completes selection of the adjustment axes and detailed setting in the selection screen shown in Fig. 6, for example, and the parameter adjustment device 5 starts adjustment of the control parameters by operating an adjustment start button (omitted from illustration) or the like. Figure 5 In step S31, the parameter adjustment device 5 acquires the adjustment axis information selected by the user in the selection screen shown in Fig. 6 in relation to the adjustment axes and detailed setting. The aforementioned adjustment axis selection section 51 selects two or more axes (two axes corresponding to the servo amplifiers 11B, 13B in this example) that are the objects of adjustment of the control parameters based on the acquired adjustment axis information, and the adjustment mode setting section 63 sets the adjustment mode of the control parameters to the second adjustment mode in this example based on the acquired adjustment axis information.

[0093] Figure 5 In step S32, the parameter adjustment device 5 transmits the detailed setting information for each axis included in the information acquired in step S21 to the servo amplifiers 11B, 13B, respectively.

[0094] In step S33, the servo amplifier 11B sets the associated parameters required for execution of the adjustment operation based on the received detailed setting information. Similarly, in step S34, the servo amplifier 13B sets the associated parameters required for execution of the adjustment operation based on the received detailed setting information. The servo amplifiers 11B, 13B transmit an acknowledgement signal to the parameter adjustment device 5 after completion of the setting of the associated parameters.

[0095] In step S33, the servo amplifier 11B sets the associated parameters required for execution of the adjustment operation based on the received detailed setting information. Similarly, in step S34, the servo amplifier 13B sets the associated parameters required for execution of the adjustment operation based on the received detailed setting information. The servo amplifiers 11B, 13B transmit an acknowledgement signal to the parameter adjustment device 5 after completion of the setting of the associated parameters.

[0096] ​In step S35, the parameter adjustment device 5 receives the response signals from the servo amplifiers 1 IB, 13B, and confirms that the parameter setting has been completed. In addition, in the case where the parameter setting is not completed due to, for example, one or both of the axes not being in a servo-ready state, or the like, the parameter adjustment device 5 displays an alarm, and the adjustment operation is not started for all of the axes.

[0097] In step S36, the parameter adjustment device 5 starts the adjustment operation by the adjustment operation execution section 53 sending the upper command (position command) to the servo amplifiers 1 IB, 13B, respectively. In addition, the commands sent to the servo amplifiers 1 IB, 13B, respectively, in this step S36 are different commands.

[0098] In step S37, the servo amplifier 1 IB executes the calculation process of searching for the control parameter (gain, described in Figure 8 in step S32) related to responsiveness, based on the state quantity calculated in the aforementioned step S32, and sets the calculated control parameter.

[0099] In step S38, the servo amplifier 1 IB starts the adjustment operation of the linear motor 33, based on the received position command and the set control parameter.

[0100] In step S39, the servo amplifier 1 IB executes the vibration detection process, and in step S40, it is determined whether the detected vibration is greater than a prescribed threshold value. In the case where the detected vibration is equal to or less than the prescribed threshold value (step S40: No), the routine is transferred to the aforementioned step S42. On the other hand, in the case where the detected vibration is greater than the prescribed threshold value (step S40: Yes), the routine is transferred to step S41.

[0101] In step S41, the servo amplifier 1 IB sets the control parameter related to vibration suppression by the second control parameter setting section 65.

[0102] In step S42, the servo amplifier 1 IB calculates the state quantity such as the detected position Pfb, the detected velocity Vfb, and the like, based on the detection signal of the aforementioned linear encoder 39.

[0103] In step S43, the servo amplifier 1 IB determines whether the vibration is within a prescribed allowable range (for example, equal to or less than the aforementioned threshold value) by updating the control parameter related to vibration suppression in the aforementioned step S31. In the case where the vibration is outside the allowable range (step S43: No), the routine is returned to step S38. In this way, steps S38 to S43 are repeated while changing the control parameter related to vibration suppression sequentially until the vibration becomes within the prescribed allowable range. In the case where the vibration is within the allowable range (step S43: Yes), the routine is transferred to step S44.

[0104] In step S44, the servo amplifier 1 IB determines whether the adjustment operation is completed. In the case where the adjustment operation is not completed (step S44: No), the process returns to step S37. Thus, the above-described steps S37 to S44 are repeated until the adjustment operation is completed, while changing the control parameter (described as gain in the above) related to responsiveness sequentially. Figure 8 On the other hand, in the case where the adjustment operation is completed (step S44: Yes), the process proceeds to step S53 described later.

[0105] On the other hand, in step S45, the servo amplifier 13B performs a calculation process of searching for the control parameter (described as gain in the above) related to responsiveness based on the state quantity calculated in step S50 described later, and sets the calculated control parameter. Figure 8

[0106] In step S46, the servo amplifier 13B starts the adjustment operation of the linear motor 35 based on the received position command and the set control parameter.

[0107] In step S47, the servo amplifier 13B performs a vibration detection process, and in step S48, it is determined whether the detected vibration is greater than a prescribed threshold value. In the case where the detected vibration is equal to or less than the prescribed threshold value (step S48: No), the process proceeds to step S50 described later. On the other hand, in the case where the detected vibration is greater than the prescribed threshold value (step S48: Yes), the process proceeds to step S49.

[0108] In step S49, the servo amplifier 13B sets the control parameter related to vibration suppression by the second control parameter setting section 65.

[0109] In step S50, the servo amplifier 13B calculates the state quantity such as the detected position Pfb, the detected velocity Vfb, and the like based on the detection signal of the linear encoder 41 described above.

[0110] In step S51, the servo amplifier 13B determines whether the vibration is within a prescribed allowable range (for example, equal to or less than the threshold value described above) by updating the control parameter related to vibration suppression in step S49 described above. In the case where the vibration is outside the allowable range (step S51: No), the process returns to step S46. Thus, steps S46 to S51 are repeated until the vibration becomes within the prescribed allowable range, while changing the control parameter related to vibration suppression sequentially. In the case where the vibration is within the allowable range (step S51: Yes), the process proceeds to step S52.

[0111] ​In step S52, the servo amplifier 13B determines whether the adjustment operation is completed. In the case where the adjustment operation is not completed (step S52: No), the process returns to step S45. In this way, the above-described steps S45 to S52 are repeated until the adjustment operation is completed, while changing the control parameter (described as gain in the specification) related to the responsiveness step by step. Figure 8 On the other hand, in the case where the adjustment operation is completed (step S52: Yes), the process proceeds to step S53.

[0112] In the case where the adjustment operation is completed in both of the servo amplifiers 11B, 13B (step S44: Yes, step S52: Yes) as above, the process proceeds to step S53.

[0113] In step S53, the parameter adjustment device 5 acquires the control parameter (described as gain in the specification) related to the final responsiveness from the servo amplifiers 11B, 13B through the control parameter acquisition section 59. At this time, the parameter adjustment device 5 does not perform the process until the control parameter of the other axis is acquired when the control parameter of either of the servo amplifiers 11B, 13B is acquired first. That is, the axis whose adjustment is completed first becomes a completion waiting state, and does not implement the update of the control parameter until the adjustment operation of the other axis is completed. Figure 8

[0114] Then, the parameter adjustment device 5 discriminates the control parameter of the lowest responsiveness from the acquired control parameters through the control parameter determination section 61, and determines it as the control parameter related to the final responsiveness. Then, the determined control parameter is transmitted to the servo amplifiers 11B, 13B through the first control parameter setting section 55. In addition, the control parameters transmitted to the servo amplifiers 11B, 13B in this step S53 are the same value.

[0115] In step S54, the servo amplifier 11B finally sets the control parameter (described as gain in the specification) related to the responsiveness on the basis of the received control parameter. Similarly, in step S55, the servo amplifier 13B finally sets the control parameter (described as gain in the specification) related to the responsiveness on the basis of the received control parameter. Thus, in the servo amplifiers 11B, 13B, the control parameters (Kp, Kv, T, etc.) related to the responsiveness are set to the same value. The servo amplifiers 11B, 13B transmit an acknowledgement signal to the parameter adjustment device 5 after the setting of the control parameters is completed. Figure 8 Figure 8

[0116] ​​​In step S56, the parameter adjustment device 5 receives the response signals from the servo amplifiers 1 IB, 13B, and confirms that the setting of the final control parameters has been completed. Then, the parameter adjustment device 5 performs adjustment completion processing by ending the adjustment operation of the servo amplifiers 1 IB, 13B on the linear motors 33, 35, and the like. By the above steps, the present flow is ended.

[0117] <5. Effects of the Embodiment>

[0118] As explained above, the parameter adjustment device 5 of the present embodiment has an adjustment axis selection section 51 that selects, in a multi-axis control system 3A, 3B having a plurality of axes each of which is a combination of one servo amplifier and one motor, and that synchronously controls the plurality of axes according to an instruction from a controller 7A, 7B, two or more axes that are objects of adjustment of control parameters of the servo amplifiers; an adjustment operation execution section 53 that performs an adjustment operation on the selected two or more axes according to a common instruction or separate instructions; and a first control parameter setting section 55 that changes a timing of setting control parameters to the two or more axes according to the adjustment operation. Thereby, the following effects are exerted.

[0119] That is, in a multi-axis control system that synchronously controls two or more axes based on an instruction from a controller, there are a case where the two or more axes are mechanically constrained, such as a gantry mechanism, and a case where the two or more axes are not mechanically constrained, such as an XY table mechanism.

[0120] In the former case, in order to suppress generation of vibration caused by interference between the axes, and mechanical damage caused by oscillation, it is preferable that the adjustment operation on the two or more axes be performed with the same instruction and the same control parameters. In the present embodiment, in such a case, the adjustment operation execution section 53 performs the adjustment operation on the two or more axes based on the common instruction, and the timing at which the control parameters are set to the same value by the first control parameter setting section 55 is set to the execution of the adjustment operation. Thereby, it is possible to prevent generation of vibration, and mechanical damage caused by oscillation, and it is possible to automatically adjust the control parameters to appropriate values for the selected two or more axes.

[0121] In addition, in the latter case, the adjustment operation is instructed differently according to the axes, and thus the control parameters do not need to be the same, but in order to improve the accuracy of the synchronous control after adjustment, it is preferable that the final setting of the control parameters be the same. In the present embodiment, in such a case, the adjustment operation execution section 53 performs the adjustment operation on the two or more axes based on the separate instructions, and the timing at which the control parameters are set to the same value by the first control parameter setting section 55 is set to after the completion of the adjustment operation. Thereby, it is possible to automatically adjust the control parameters to appropriate values for the selected two or more axes.

[0122] As described above, according to the parameter adjustment device 5 of the present embodiment, it is possible to automatically adjust the control parameters, regardless of whether the two or more axes that are adjustment targets are mechanically constrained or not. Thus, it is possible to expand the range of the multi-axis control system that can adjust the control parameters, and it is possible to improve the versatility.

[0123] In addition, in the present embodiment, in particular, the first control parameter setting section 55 sets the control parameters to the same value for the two or more axes at the time of performing the adjustment action, in the case where the adjustment action is performed based on the common instruction, and sets the control parameters to the same value for the two or more axes after the adjustment action is completed, in the case where the adjustment action is performed based on the individual instruction.

[0124] Thus, for example, in the case where the two or more axes are mechanically constrained like the gantry mechanism 15, it is possible to perform the adjustment action for the two or more axes with the same instruction and the same control parameters. Thus, it is possible to prevent the generation of vibrations, the mechanical damage due to oscillation, and it is possible to automatically adjust the control parameters to appropriate values for the two or more axes. In addition, for example, in the case where the two or more axes are not mechanically constrained like the XY table mechanism 31, it is possible to allow the control parameters to be set differently for the two or more axes in the adjustment action, and to set the final setting of the control parameters to the same value. Thus, it is possible to improve the accuracy of the synchronized control after adjustment.

[0125] In addition, in the present embodiment, in particular, the parameter adjustment device 5 further has a control parameter calculation section 57 that calculates the control parameters based on the observation values of the two or more axes at the time of performing the adjustment action, in the case where the adjustment action is performed based on the common instruction.

[0126] In the present embodiment, the calculation of the control parameters in the adjustment action is performed by the parameter adjustment device 5 based on the observation values of the respective axes, and the calculated control parameters are reflected to the servo amplifiers 11A, 13A of the respective axes. By so doing, it is possible to improve the reliability of setting the control parameters of the respective axes in the adjustment action to the same value.

[0127] In addition, in the present embodiment, in particular, the parameter adjustment device 5 further has a control parameter acquisition section 59 that acquires the control parameters calculated by the servo amplifiers 11B, 13B of the two or more axes, respectively, after the adjustment action is completed, in the case where the adjustment action is performed based on the individual instruction, and a control parameter determination section 61 that determines the control parameter with the lowest responsiveness among the acquired control parameters.

[0128] In the present embodiment, the calculation of the control parameter in the adjustment operation is performed by the servo amplifiers 1 IB, 13B of each axis, and after the adjustment operation is completed, the calculated control parameter is acquired by the parameter adjustment device 5 to determine the final control parameter, which is reflected to the servo amplifiers 1 IB, 13B of each axis. Thus, it is possible to suppress the control parameter related to responsiveness from becoming too low. In addition, by determining the control parameter with the lowest responsiveness among the acquired control parameters as the final control parameter, it is possible to suppress the axis for which the control parameter cannot be set due to the constraint of the functionality of the servo amplifiers 1 IB, 13B of each axis.

[0129] In addition, in the present embodiment, particularly when the adjustment operation execution section 53 performs the adjustment operation on two or more axes based on separate instructions, the adjustment operation is performed in parallel while the timing of the start of adjustment and the timing of the completion of adjustment are made uniform for the two or more axes.

[0130] Assuming that when the adjustment operation is performed on each axis of the XY table mechanism 31, the other axes are stopped, and thus the adjustment result is in a specific posture. In the present embodiment, the adjustment operation is performed in parallel while the timing of the start of adjustment and the timing of the completion of adjustment are made uniform for two or more axes of the XY table mechanism 31, and thus it is possible to perform the adjustment of the control parameter taking into account the change in the posture (change in load inertia) of the XY table mechanism 31.

[0131] In addition, in the present embodiment, particularly the parameter adjustment device 5 further has an adjustment mode setting section 63 that sets the adjustment mode of the control parameter to the first adjustment mode when the selected two or more axes are mechanically constrained, and sets the adjustment mode of the control parameter to the second adjustment mode when the selected two or more axes are not mechanically constrained, the adjustment operation execution section 53 performs the adjustment operation based on the common instruction when set to the first adjustment mode, and performs the adjustment operation based on the separate instructions when set to the second adjustment mode, and the first control parameter setting section 55 sets the control parameter to the same value for the two or more axes when the adjustment operation is performed when set to the first adjustment mode, and sets the control parameter to the same value for the two or more axes after the adjustment operation is completed when set to the second adjustment mode.

[0132] Thus, for example, by the user selecting the adjustment mode or the like, it is possible to change the setting of the adjustment mode of the control parameter depending on the presence or absence of mechanical constraint. As a result, it is possible to improve the convenience of the user, and automatically adjust the control parameter to an appropriate value regardless of whether the two or more axes as the adjustment target are mechanically constrained or not.

[0133] In addition, in the present embodiment, the control parameter is particularly a control parameter related to responsiveness. Thus, for example, in a case where two or more axes are mechanically constrained like the gantry mechanism 15, it is possible to cause the adjustment operation for the two or more axes to be performed with the same responsiveness. Thus, it is possible to prevent generation of vibration, mechanical damage due to oscillation, and automatically adjust the control parameter to an appropriate value for two or more axes. In addition, for example, in a case where two or more axes are not mechanically constrained like the XY table mechanism 31, the responsiveness is allowed to be different in the adjustment operation for the two or more axes, and finally the same responsiveness can be caused after adjustment. Thus, it is possible to improve the precision of the synchronous control after adjustment.

[0134] In addition, in the present embodiment, the multi-axis control adjustment system 1A, 1B particularly has the multi-axis control system 3A, 3B, and the parameter adjustment device 5 that adjusts the control parameter of the servo amplifier for two or more axes of the multi-axis control system 3A, 3B.

[0135] Thus, it is possible to expand the range of the multi-axis control system for which the control parameter can be adjusted, and realize a multi-axis control adjustment system with high versatility.

[0136] In addition, in the present embodiment, the servo amplifier 9, 11A, 11B, 13A, 13B particularly has the second control parameter setting section 65 that individually sets the control parameter related to vibration suppression at the time of execution of the adjustment operation in a case where the adjustment operation is performed based on the common command or the individual command for the selected two or more axes by the adjustment operation execution section 53 of the parameter adjustment device 5.

[0137] In the present embodiment, the control parameter related to vibration suppression is individually set by the servo amplifier of each axis, not by the parameter adjustment device 5. Thus, it is possible to immediately change and reflect the control parameter related to vibration suppression, and quickly perform the vibration suppression process with high urgency.

[0138] <6. Modification>

[0139] Furthermore, the disclosed embodiments are not limited to the above, and various modifications can be made without departing from the scope and spirit of the present invention.

[0140] For example, the gantry mechanism in which two axes are mechanically constrained is described as an example of a case where two or more axes are mechanically constrained, but can also be applied to mechanisms other than the gantry mechanism, such as a mechanism in which three or more axes are mechanically constrained. In addition, the motor that constitutes the axis is not limited to a linear motor, and can also be a rotary motor.

[0141] In addition, the above has been described as an example of a case where two or more axes are not mechanically constrained, but as long as the mechanism is one in which two or more axes are controlled synchronously, it can be applied to various mechanisms. For example, it can be applied to an XYZ table mechanism in which three or more axes are controlled synchronously, an SCARA robot, a vertical multi-joint robot, and the like. At this time, the motor constituting the axis is not limited to a linear motor, and can be a rotary motor.

[0142] In addition, the above has been described as a case where the parameter adjustment device is provided separately from the multi-axis control system, but for example, various functions of the parameter adjustment device described above can be installed in the controller of the multi-axis control system and used as a parameter adjustment device. In this case, the controller of the multi-axis control system corresponds to an example of a multi-axis control adjustment device.

[0143] <7. Example of hardware structure of parameter adjustment device>

[0144] Next, with reference to Figure 9 , an example of a hardware structure of the parameter adjustment device 5 that realizes the processing performed by the program of the parameter adjustment device 5 described above will be described. In addition, the parts other than the parts that supply power in the servo amplifiers 9, 11, 13 can be provided with the same hardware structure.

[0145] As shown in Figure 9 , the parameter adjustment device 5 has, for example, a CPU 901, a ROM 903, a RAM 905, an application specific integrated circuit 907 constructed for a specific purpose such as an ASIC or an FPGA, an input device 913, an output device 915, a recording device 917, a drive 919, a connection port 921, and a communication device 923. These structures are connected in a manner that enables them to transmit signals to each other via a bus 909 and an input / output interface 911.

[0146] The program can be recorded in the ROM 903, the RAM 905, the recording device 917 constituted by a hard disk or the like, and the like in advance, for example.

[0147] In addition, the program can be temporarily or non-temporarily (permanently) recorded in a removable recording medium 925 such as a magnetic disk such as a floppy disk, various CDs, MO disks, DVDs, and the like, and semiconductor memories, for example. Such a recording medium 925 can be provided as so-called packaged software. In this case, the program recorded in these recording media 925 can be read out by the drive 919 and recorded in the recording device 917 described above via the input / output interface 911, the bus 909, and the like.

[0148] Further, the program can also be recorded in advance in a download site, other computer, other recording device, and the like (not illustrated), for example. In this case, the program is transmitted via a network NW such as a LAN, the Internet, and the like, and the communication device 923 receives the program. Also, the program received by the communication device 923 can also be recorded in the above-described recording device 917 via the input-output interface 911, the bus 909, and the like.

[0149] Further, the program can also be recorded in the appropriate external connection equipment 927, for example. In this case, the program can also be transferred via the appropriate connection port 921 and recorded in the above-described recording device 917 via the input-output interface 911, the bus 909, and the like.

[0150] Also, the CPU 901 performs various processes in accordance with the program recorded in the above-described recording device 917, whereby the processes of the above-described adjustment axis selection section 51, adjustment action execution section 53, first control parameter setting section 55, control parameter calculation section 57, control parameter acquisition section 59, control parameter determination section 61, adjustment mode setting section 63, and the like are implemented. At this time, the CPU 901 can directly read out the program from the above-described recording device 917 and execute it, for example, or can execute it after temporarily loading it to the RAM 905. Further, the CPU 901 can also directly execute the program received without recording it in the recording device 917, for example, in the case where the program is received via the communication device 923, the driver 919, the connection port 921.

[0151] Further, the CPU 901 can also perform various processes as needed, for example, based on signals, information input from an input device 913 such as a mouse, a keyboard, a microphone (not illustrated), and the like.

[0152] Also, the CPU 901 can output the results of the above-described processes from an output device 915 such as a display device, a sound output device, and the like, for example, and further, the CPU 901 can also transmit the process results as needed via the communication device 923, the connection port 921, or can record them in the above-described recording device 917, the recording medium 925.

[0153] Further, in the above description, in the case where "vertical", "parallel", "plane", and the like are described, the description is not strict. That is, these "vertical", "parallel", "plane" allow design, manufacturing tolerances, errors, and refer to "substantially vertical", "substantially parallel", "substantially plane".

[0154] In addition, in the above description, in the case where there is a description of "identical", "same", "equivalent", "different", and the like in terms of appearance, the description is not strictly meant. That is, these "identical", "same", "equivalent", "different" allow for design and manufacturing tolerances, errors, and refer to "substantially identical", "substantially same", "substantially equivalent", "substantially different".

[0155] Further, in the above description, in the case where there is a description of "consistent", the description is not strictly meant. That is, the "consistent" allows for design tolerances, errors, and refers to "substantially consistent".

[0156] However, for example, in the case where there is a description of a threshold value (refer to the flowchart of FIG. 1A), a reference value, an instruction value, a parameter value, and the like as a value that becomes a criterion for determination or as a value that becomes a division, "identical", "equivalent", "different", and the like with respect to them are strictly meant. Figure 7 Figure 8 Further, in addition to the above, the method of the above embodiment and each modification example can be appropriately combined. Further, although not exemplified one by one, the above embodiment and each modification example are implemented with various changes within a range not departing from the gist thereof.

[0157] Further, in addition to the above, the method of the above embodiment and each modification example can be appropriately combined. Further, although not exemplified one by one, the above embodiment and each modification example are implemented with various changes within a range not departing from the gist thereof.

[0158] Symbol explanation:

[0159] 1A Multi-axis control adjustment system

[0160] 1B Multi-axis control adjustment system

[0161] 3A Multi-axis control system

[0162] 3B Multi-axis control system

[0163] 5 Parameter adjustment device (multi-axis control adjustment device)

[0164] 7A Controller (upper-level controller)

[0165] 7B Controller (upper-level controller)

[0166] 9 Servo amplifier (motor control device)

[0167] 11A Servo amplifier (motor control device)

[0168] 11B Servo amplifier (motor control device)

[0169] 13A Servo amplifier (motor control device)

[0170] 13B Servo amplifier (motor control device)​

[0171] 15 gantry mechanism

[0172] 19 linear motor

[0173] 21 linear motor

[0174] 31 xy table mechanism

[0175] 33 linear motor

[0176] 35 linear motor

[0177] 51 adjustment axis selection section

[0178] 53 adjustment action execution section

[0179] 55 first control parameter setting section

[0180] 57 control parameter calculation section

[0181] 59 control parameter acquisition section

[0182] 61 control parameter determination section

[0183] 63 adjustment mode setting section

[0184] 65 second control parameter setting section

Claims

1. A polyaxial control adjustment device, comprising: has: an adjustment axis selection section that, in a multi-axis control system having a plurality of axes and synchronously controlling the plurality of axes according to an instruction from a higher-level controller, selects two or more of the axes as targets of adjustment control parameters, the axes being combinations of one motor control device and one motor, the control parameters being control parameters of the motor control devices; an adjustment mode setting section that sets an adjustment mode of the control parameters to a first adjustment mode or a second adjustment mode according to a selection operation by a user; an adjustment operation execution section that, in a case where the first adjustment mode is set, executes an adjustment operation of the control parameters according to a common instruction from the higher-level controller with respect to the selected two or more axes, and that, in a case where the second adjustment mode is set, executes an adjustment operation of the control parameters according to separate instructions from the higher-level controller with respect to the selected two or more axes; and a first control parameter setting section that, in a case where the first adjustment mode is set, sets the control parameters to the same value with respect to the two or more axes at the time of executing the adjustment operation, and that, in a case where the second adjustment mode is set, sets the control parameters to the same value with respect to the two or more axes after the adjustment operation is completed, the adjustment operation execution section, in a case where an adjustment operation is executed with respect to the two or more axes according to the separate instructions, making the timing of the start of adjustment and the timing of the completion of adjustment with respect to the two or more axes coincide, and executing the adjustment operation simultaneously in parallel.

2. The multi-axis control adjustment device according to claim 1, further having: a control parameter calculation section that, in a case where the adjustment operation is executed according to the common instruction, calculates the control parameters according to observation values of the two or more axes at the time of executing the adjustment operation.

3. The multi-axis control adjustment device of claim 1 or 2, wherein, further has: a control parameter acquisition section that, in a case where the adjustment operation is executed according to the separate instructions, acquires the control parameters calculated by the motor control devices of the two or more axes respectively after the adjustment operation is completed; and a control parameter determination section that determines the control parameter that is the least responsive among the acquired control parameters.

4. The multi-axis control adjustment device according to claim 1 or 2, wherein the adjustment mode setting section sets the adjustment mode of the control parameters to the first adjustment mode in a case where the selected two or more axes are mechanically constrained, and sets the adjustment mode of the control parameters to the second adjustment mode in a case where the selected two or more axes are not mechanically constrained, according to the selection operation by the user.

5. The multi-axis control adjustment device according to claim 1 or 2, wherein the control parameters are control parameters related to responsiveness. has:

6. A multi-axis control adjustment system, characterized by, a multi-axis control system having a plurality of axes and synchronously controlling the plurality of axes according to an instruction from a higher-level controller, the axes being combinations of one motor control device and one motor; and ​ The multi-axis control adjustment device according to any one of claims 1 to 5, which performs adjustment of the control parameters of the motor control device for two or more of the axes of the multi-axis control system.

7. The multi-axis control adjustment system according to claim 6, wherein the motor control device has a second control parameter setting section which individually sets the control parameter related to vibration suppression at the time of execution of the adjustment operation, in the case where the adjustment operation is performed on the selected two or more axes according to the common instruction or the individual instruction by the adjustment operation execution section of the multi-axis control adjustment device.

8. A multi-axis control adjustment method, characterized by, including: in a multi-axis control system having a plurality of axes and synchronously controlling the plurality of axes according to an instruction from a higher-level controller, selecting two or more of the axes as objects of adjustment of a control parameter, wherein the axes are combinations of one motor control device and one motor, and the control parameter is a control parameter of the motor control device; setting an adjustment mode of the control parameter to a first adjustment mode or a second adjustment mode according to a selection operation by a user; in the case where the first adjustment mode is set, performing an adjustment operation of the control parameter according to a common instruction from the higher-level controller for the selected two or more axes, and in the case where the second adjustment mode is set, performing an adjustment operation of the control parameter according to individual instructions for the selected two or more axes, in the case where adjustment operations are performed on the two or more axes according to individual instructions from the higher-level controller, making the timing of start of adjustment and the timing of completion of adjustment uniform for the two or more axes, and performing adjustment operations simultaneously in parallel; and in the case where the first adjustment mode is set, setting the control parameter to the same value for the two or more axes at the time of execution of the adjustment operation, and in the case where the second adjustment mode is set, setting the control parameter to the same value for the two or more axes after completion of the adjustment operation.

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