Method for spectrophotometry device, spectrophotometry system, and storage medium

Abstract

A method, a spectroscopic measurement system, and a storage medium for a spectroscopic measurement device capable of suppressing the influence of a relative positional offset between the spectroscopic measurement device and a measurement object when acquiring multiple spectroscopic images. The method comprises: a first step of determining a common feature point between a first spectroscopic image and at least one second spectroscopic image other than the first spectroscopic image, among the multiple spectroscopic images acquired by the spectroscopic element; a second step of detecting the relative positional offset between the first spectroscopic image and the second spectroscopic image; and a third step of performing positioning between the first and second spectroscopic images based on the detected relative positional offset. The positioning performed in the third step includes correcting the position of the second spectroscopic image relative to the position of the first spectroscopic image based on the common feature point.

Description

Technical Field

[0001] The present invention relates to a spectroscopic measurement method, a spectroscopic measurement system, and a computer program. Background Art

[0002] For example, Patent Document 1 discloses a technique for acquiring multiple spectral images using a spectrometer and calculating spectral data at a desired location. For example, as a positioning method using multiple spectral images, this method extracts the same pattern between a reference image and the positioning image to be positioned.

[0003] Patent Document 1: Japanese Patent Application Laid-Open No. 2014-173919

[0004] However, there are cases where the same pattern cannot be obtained in the reference image and the positioning image, which leads to a problem that positioning of a plurality of spectral images cannot be performed. Summary of the Invention

[0005] A method for a spectroscopic measurement device, characterized in that the spectroscopic measurement device includes: a spectroscopic element capable of changing the wavelength of light to be selected and separating light from an object; and an imaging element for receiving light separated into a plurality of wavelengths by the spectroscopic element and acquiring a plurality of spectroscopic images. The method comprises: a first step of determining a common feature point between a first spectroscopic image and at least one second spectroscopic image other than the first spectroscopic image, among the plurality of spectroscopic images acquired by the spectroscopic element; a second step of detecting an amount of relative positional misalignment between the first spectroscopic image and the second spectroscopic image; and a third step of positioning the first spectroscopic image and the second spectroscopic image based on the detected amount of relative positional misalignment. The positioning performed in the third step includes correcting the position of the second spectroscopic image relative to the position of the first spectroscopic image based on the common feature point, such that a distance between a center wavelength of a first transmission peak of the light corresponding to the first spectroscopic image and a center wavelength of a second transmission peak of the light corresponding to the second spectroscopic image is no greater than twice a first half-value width at half-maximum of the first transmission peak or a second half-value width at half-maximum of the second transmission peak.

[0006] A spectrometric measurement system, characterized in that the spectrometric measurement system comprises: a spectroscopic element capable of changing the wavelength of light to be selected and spectroscopically analyzing light from an object; an imaging element for receiving the light separated into a plurality of wavelengths by the spectroscopic element and acquiring a plurality of spectroscopic images; and one or more processors, the processors being configured to perform the following steps: a first step of determining a common feature point between a first spectroscopic image and at least one second spectroscopic image other than the first spectroscopic image, among the plurality of spectroscopic images acquired by the spectroscopic element; a second step of detecting an amount of relative positional misalignment between the first spectroscopic image and the second spectroscopic image; and a third step of positioning the first spectroscopic image and the second spectroscopic image based on the detected amount of relative positional misalignment, wherein the positioning performed in the third step includes correcting the position of the second spectroscopic image relative to the position of the first spectroscopic image based on the common feature point, wherein the interval between a center wavelength of a first transmission peak of the light corresponding to the first spectroscopic image and a center wavelength of a second transmission peak of the light corresponding to the second spectroscopic image is no greater than twice a first half-value width at half-maximum of the first transmission peak or a second half-value width at half-maximum of the second transmission peak.

[0007] A computer non-transitory storage medium, characterized in that it stores a program for causing one or more processors to execute a method for a spectroscopic measurement system, wherein the spectroscopic measurement system comprises: a spectroscopic element capable of changing the wavelength of light to be selected and spectroscopically analyzing light from an object; and an imaging element for receiving light that has been spectroscopically analyzed into a plurality of wavelengths by the spectroscopic element and acquiring a plurality of spectroscopic images, the method comprising: a first step of determining common feature points between a first spectroscopic image and at least one second spectroscopic image other than the first spectroscopic image, among the plurality of spectroscopic images acquired by the spectroscopic element; and a second step of detecting a feature point in the first spectroscopic image. and the relative position misalignment between the first and second spectral images; and a third step, positioning the first spectral image and the second spectral image based on the detected relative position misalignment, the positioning performed in the third step including: correcting the position of the second spectral image relative to the position of the first spectral image based on the common feature point, the interval between the center wavelength of the first transmission peak of the light corresponding to the first spectral image and the center wavelength of the second transmission peak of the light corresponding to the second spectral image is less than 2 times the first half-value total width of the first transmission peak or the second half-value total width of the second transmission peak. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 This is a block diagram showing the configuration of a spectroscopic measurement system.

[0009] Figure 2 It is a cross-sectional view showing the structure of a spectrophotometer.

[0010] Figure 3 It is a cross-sectional view showing the structure of a spectroscopic element.

[0011] Figure 4 This is a flowchart showing a spectroscopic measurement method.

[0012] Figure 5 This is a diagram showing the optical spectrum for each wavelength.

[0013] Figure 6 Graphs showing spectral images obtained for each wavelength.

[0014] Figure 7 A diagram showing a first spectroscopic image.

[0015] Figure 8 A diagram showing a second spectroscopic image.

[0016] Figure 9 A diagram showing a third spectroscopic image.

[0017] Figure 10A 3 is a diagram showing a method of correcting the position of the second spectral image.

[0018] Figure 10B 3 is a diagram showing a method of correcting the position of the second spectral image.

[0019] Figure 11A 3 is a diagram showing a method of correcting the position of the third spectral image.

[0020] Figure 11B 3 is a diagram showing a method of correcting the position of the third spectral image.

[0021] Figure 12 It is a cross-sectional view showing the structure of a spectroscopic element according to a modified example.

[0022] 1…Spectrophotometry system; 2…Spectrophotometry device; 3…Photosensor unit; 4…Optical filter device; 5…Spectroscopic element; 6…Circuit board; 7…Terminal device; 21…Light source; 22…Communication unit; 23…Battery; 24…Casing; 25…Light shielding unit; 31…Optical system; 32…Image pickup element; 33…Voltage control unit; 34…Optical component housing; 40…Housing; 51…First substrate; 52…Second substrate; 53…Bonding film; 54…Fixed reflector Film; 55… Movable reflective film; 56… Electrostatic actuator; 61… Storage unit; 62… Filter control unit; 63… Light intensity acquisition unit; 64… Light source control unit; 71… Display unit; 72… Input unit; 73… Communication unit; 74… Control unit; 101… First substrate; 102… Second substrate; 103… Third substrate; 104… Reflective film; 105… Electrostatic actuator; 106… Bonding layer; 112… Spectroscopic element; 200… Spectroscopic image; 201… First spectroscopic element Light pattern; 202…Second spectral pattern; 203…Third spectral pattern; 241…Light incident port; 301…First half-value width; 302…Second half-value width; 303…Third half-value width; 511…Electrode arrangement groove; 511A…Electrode setting surface; 511B…Electrode extraction groove; 512…Reflection film setting portion; 512A…Reflection film setting surface; 513…First joint portion; 514…First electrical mounting surface; 521…Moveable portion; 521A…Moveable surface; 5 22…holding portion; 523…second bonding portion; 524…second electrical mounting surface; 525…peripheral portion of substrate; 531…first bonding film; 532…second bonding film; 561…first electrode; 562…second electrode; 563…fixed lead-out electrode; 563P…fixed electrode pad; 564…movable lead-out electrode; 564P…movable electrode pad; 741…display control portion; 742…positioning point selection portion; 743…misalignment detection portion; 744…positioning portion. DETAILED DESCRIPTION

[0023] First, refer to Figure 1 The configuration of the spectrometric measurement system 1 will be described.

[0024] A spectrophotometric system 1 includes a spectrophotometric device 2 and a terminal device 7, and is configured to communicate with each other. The spectrophotometric system 1 measures measurement target light (incident light) from a measurement target X, which is an object, and outputs the measurement result. The measurement target X may be, for example, an image printed on a medium such as paper by a printing device or an image displayed on a display such as a liquid crystal panel. The measurement target X is not limited to images and may also be the surface of an object.

[0025] The spectroscopic measurement device 2 is used to capture an image of the measurement object X and obtain a spectroscopic image 200 (see Figure 6), comprising: a light sensor unit 3 for capturing the measurement object light from the measurement object X; a circuit substrate 6 provided with various hardware for controlling the spectroscopic measurement device 2 (such as an integrated circuit such as a CPU and a memory); a light source 21; and a communication unit 22.

[0026] The optical sensor unit 3 includes: an optical filter device 4, which is composed of a spectroscopic element 5 (also called a wavelength-variable interference filter) housed inside a housing 40; an optical system 31, which guides the measured object light to the spectroscopic element 5; a camera element 32, which receives the light transmitted through the spectroscopic element 5; and a voltage control unit 33, which allows the wavelength λ of the light transmitted through the spectroscopic element 5 to be changed.

[0027] The optical system 31 is an optical system that guides the incident light to the spectroscopic element 5 and is composed of a plurality of optical components such as lenses. The optical system 31 is configured so that the principal ray of the incident light is parallel to the optical axis and is aligned with the first substrate 51 of the spectroscopic element 5 (see FIG. Figure 3 ) is emitted vertically.

[0028] The imaging element 32 is provided on the circuit board 6 (see FIG. 1 ) so as to be located on the focal plane of the optical system 31. Figure 2 The object light emitted by the object X is guided through the optical system 31 and formed into an image on the imaging element 32. The imaging element 32 includes a plurality of detection elements (not shown) arranged in an array. These detection elements are composed of photoelectric conversion elements such as CCD (Charge Coupled Device) elements or CMOS (Complementary Metal Oxide Semiconductor), and generate an electrical signal corresponding to the amount of light received, and output it to the light amount acquisition unit 63 described later.

[0029] The voltage control unit 33 applies a driving voltage corresponding to the wavelength λ (measurement wavelength) of light transmitted through the spectroscopic element 5 to the spectroscopic element 5 under the control of the filter control unit 62 described later.

[0030] The circuit board 6 includes various control units for controlling the spectroscopic measurement device 2. Specifically, the circuit board 6 includes a storage unit 61, a filter control unit 62, a light intensity acquisition unit 63, and a light source control unit 64. The various control units provided on the circuit board 6 are constructed by appropriately combining arithmetic circuits, memories, various electrical circuits, and the like.

[0031] The storage unit 61 stores various programs and various data as computer programs for controlling the spectrophotometer 2. The various data, for example, indicates the voltage applied to the electrostatic actuator 56 (see Figure 3) and information related to the measurement wavelength when measuring the measurement object X (such as the measurement start wavelength, the interval for changing the wavelength λ, and the measurement end wavelength). Furthermore, the storage unit 61 stores a spectral image 200, which is obtained by associating the received light amount acquired by the light amount acquisition unit 63 with the pixel position (coordinate value) of each detection element and the measurement wavelength during detection.

[0032] The filter control unit 62 obtains the voltage value (input value) of the driving voltage corresponding to the measurement wavelength based on the V-λ data stored in the storage unit 61, and outputs the obtained voltage value to the voltage control unit 33, thereby changing the gap interval of the spectroscopic element 5. Furthermore, based on the various data stored in the storage unit 61, the filter control unit 62 detects the timing of changing the measurement wavelength, changes the measurement wavelength, changes the driving voltage corresponding to the change in the measurement wavelength, and determines the end of measurement, and controls the voltage control unit 33 based on this determination.

[0033] The light intensity acquisition unit 63 acquires the amount of light received by the transmitted light for each detection element of the imaging element 32, thereby acquiring a spectral image 200. The spectral image 200, which corresponds to the pixel position and the amount of light received, is stored in the storage unit 61 in association with the measurement wavelength during detection. The imaging element 32 and the light intensity acquisition unit 63 correspond to the imaging unit of the present invention.

[0034] The light source control unit 64 controls the lighting and extinguishing of the light source 21 according to the user's instruction. The light source 21 is a light source such as an LED that emits white and purple light, for example.

[0035] The communication unit 22 communicates with the terminal device 7 and other external devices. The communication unit 22 is configured to be capable of communication via wired communication such as a LAN, Wi-Fi (registered trademark), Bluetooth (registered trademark), or various wireless communications such as infrared communication.

[0036] The terminal device 7 includes a display unit 71 , an input unit 72 , a communication unit 73 , and a control unit 74 which is a computer for controlling the terminal device 7 .

[0037] The display unit 71 is a liquid crystal display, an organic EL display, or other display device. The input unit 72 inputs user operation instructions to the control unit 74. Examples of the input unit 72 include various touch panels, such as infrared, capacitance, and electromagnetic induction, that can detect user operations on the surface of the display unit 71, or various input devices, such as a mouse and keyboard. The communication unit 73 communicates with the spectroscopic measurement device 2 and other external devices. The communication unit 73 is configured to enable communication via wired communication such as a LAN, Wi-Fi, Bluetooth, or various wireless communications such as infrared communication.

[0038] The control unit 74 includes various control units for controlling the terminal device 7 and the spectroscopic measurement system 1. Specifically, it includes a display control unit 741, a positioning point selection unit 742, a misalignment detection unit 743, and a positioning unit 744. The various control units included in the control unit 74 are formed by appropriately combining a calculation circuit, memory, various electrical circuits, and the like.

[0039] The display control unit 741 controls the display content of the display unit 71. Examples of display content include a reference image synthesized from the spectroscopic image 200 captured by the spectroscopic measurement device 2. Other display content includes, for example, an operation screen for operating the spectroscopic measurement system 1 and a notification screen for notifying the user of the operating status and measurement results of the spectroscopic measurement device 2.

[0040] The anchor point selection unit 742 selects an anchor point, based on the light intensity of each pixel in the spectral image 200, to serve as a reference for positioning between the multiple spectral images 200 acquired by the spectroscopic measurement device 2. In this embodiment, the pixel with the largest difference in light intensity between adjacent pixels is selected as the anchor point. The method by which the anchor point selection unit 742 selects an anchor point will be described later.

[0041] The misalignment detection unit 743 detects the amount of offset between each spectral image 200 during positioning, based on the positioning points selected by the positioning point selection unit 742. In this embodiment, the misalignment detection unit 743 detects the relative positional misalignment between the spectral images 200 with the closest measurement wavelengths, among the spectral images 200 with the multiple measurement wavelengths. The detection of the misalignment by the misalignment detection unit 743 will be described later.

[0042] The positioning unit 744 positions each spectral image 200 based on the relative positional misalignment amount detected by the misalignment amount detection unit 743 .

[0043] Below, refer to Figure 2 The structure of the spectroscopic measurement device 2 will be described.

[0044] like Figure 2 As shown, the spectrophotometric device 2 includes: a light sensor unit 3 for capturing the measurement target light from the measurement target X; a circuit board 6 having various hardware components for controlling the spectrophotometric device 2; a light source 21; a communication unit 22 (see Figure 1 ) and a battery 23, these various components are housed in a housing 24.

[0045] The housing 24 is formed with a light inlet 241 for admitting the target light into the optical sensor unit 3. A cylindrical light shielding portion 25 is provided around the light inlet 241, protruding from the housing 24. The light shielding portion 25 is a light-shielding member that, by adhering closely to the surface of the target light, prevents any light other than the target light from entering the light inlet 241. Furthermore, the light shielding portion 25 is formed, for example, from a relatively rigid member that does not elastically deform. This facilitates securing the spectroscopic measurement device 2 relative to the target light.

[0046] As described above, the optical sensor unit 3 includes: an optical filter device 4, which is formed by accommodating the spectroscopic element 5 in the housing 40; an optical system 31, which guides the measurement target light to the spectroscopic element 5 (see FIG. Figure 1 ); imaging element 32 receives light transmitted through the spectroscopic element 5; voltage control unit 33, so that the wavelength λ of the light transmitted through the spectroscopic element 5 can be changed (reference Figure 1 ).

[0047] The optical filter device 4, optical system 31, and imaging element 32 are arranged at predetermined positions in an optical component housing 34 that is open at both ends. The imaging element 32 is arranged at the end of the optical component housing 34 on the circuit board 6 side, and the optical components constituting the optical system 31 are arranged at the opposite end. The opposite end is connected to a light incident port 241 formed in the housing 24.

[0048] Circuit board 6 Figure 1 As shown, a storage unit 61 , a filter control unit 62 , a light quantity acquisition unit 63 , and a light source control unit 64 are provided.

[0049] The light source 21 is provided around the light incident port 241 of the housing 24 and in a region surrounded by the light shielding portion 25. The light source 21 emits light toward the measurement object X, and the spectroscopic measurement device 2 measures the reflected light.

[0050] The battery 23 is a secondary battery that can be charged by a charging circuit (not shown) and supplies power to the spectrometer 2. Alternatively, the spectrometer 2 can be connected to an external device such as the terminal device 7 to receive power from the external device.

[0051] Refer to the following Figure 3 The structure of the spectroscopic element 5 will be described.

[0052] like Figure 3 As shown, the spectroscopic element 5 is housed in a housing 40 (see Figure 1 ), the interior of the housing 40 becomes a sealed space. Specifically, the sealed space is maintained in a vacuum environment (or an environment reduced in pressure compared to atmospheric pressure).

[0053] The spectroscopic element 5 includes a first substrate 51 and a second substrate 52. The first bonding portion 513 of the first substrate 51 and the second bonding portion 523 of the second substrate 52 are bonded together by a bonding film 53 (a first bonding film 531 and a second bonding film 532), thereby integrating the first substrate 51 and the second substrate 52. The bonding film 53 is formed, for example, of a plasma bonding film containing siloxane as a main component.

[0054] The direction viewed from the thickness direction of the first substrate 51 or the second substrate 52 , that is, the direction in which the spectroscopic element 5 is viewed from the stacking direction of the first substrate 51 , the bonding film 53 , and the second substrate 52 , is referred to as a plan view.

[0055] When viewed from above, one side of the first substrate 51 protrudes outward from the second substrate 52. The surface of this protruding portion that is exposed when the spectroscopic element 5 is viewed from the second substrate 52 constitutes a first electrical installation surface 514. Furthermore, when viewed from above, one side of the second substrate 52 that is opposite the first electrical installation surface 514 protrudes outward from the first substrate 51. The surface of this protruding portion that is exposed when the spectroscopic element 5 is viewed from the first substrate 51 constitutes a second electrical installation surface 524.

[0056] The first substrate 51 is formed with an electrode arrangement groove 511 and a reflective film installation portion 512. The first substrate 51 is formed to have a greater thickness than the second substrate 52, so that the first substrate 51 is not deflected by electrostatic attraction when a voltage is applied between the first electrode 561 and the second electrode 562, or by internal stress in the first electrode 561.

[0057] The electrode arrangement groove 511 is formed into a ring shape centered on the center point C of the spectroscopic element 5 when viewed from above. The reflective film installation portion 512 is formed so as to protrude from the center of the electrode arrangement groove 511 toward the second substrate 52 when viewed from above. The bottom surface of the electrode arrangement groove 511 serves as an electrode installation surface 511A, on which the first electrode 561 is installed. Furthermore, the protruding front end surface of the reflective film installation portion 512 serves as a reflective film installation surface 512A, on which the fixed reflective film 54 is installed.

[0058] Furthermore, the first substrate 51 is provided with an electrode lead-out groove 511B extending from the electrode arrangement groove 511 toward the first electrical installation surface 514 and the second electrical installation surface 524 .

[0059] A first electrode 561 is provided on the electrode installation surface 511A of the electrode arrangement groove 511. This first electrode 561 is provided in a region of the electrode installation surface 511A that faces a second electrode 562 of the movable portion 521, described later. Furthermore, a fixed extraction electrode 563 is provided on the first substrate 51. This fixed extraction electrode 563 extends from the outer periphery of the first electrode 561 through the annular electrode extraction groove 511B to the first electrical installation surface 514. The extended tip of this fixed extraction electrode 563 forms a fixed electrode pad 563P on the first electrical installation surface 514.

[0060] In addition, although this embodiment shows a structure in which one first electrode 561 is provided on the electrode installation surface 511A, a structure in which two electrodes forming concentric circles centered on the plane center point C (a dual electrode structure) is provided may also be possible.

[0061] Furthermore, the surface of the first substrate 51 that faces the second substrate 52 and is not formed with the electrode arrangement groove 511, the reflective film installation portion 512, and the electrode lead-out groove 511B constitutes a first bonding portion 513. A first bonding film 531 is provided on the first bonding portion 513, and this first bonding film 531 is bonded to a second bonding film 532 provided on the second substrate 52, thereby bonding the first substrate 51 and the second substrate 52 together as described above.

[0062] When viewed from above, the second substrate 52 includes: a circular movable portion 521 centered at the plane center point C; a holding portion 522 disposed outside the movable portion 521 to hold the movable portion 521 ; and a substrate peripheral portion 525 disposed outside the holding portion 522 .

[0063] The movable portion 521 is formed to have a greater thickness than the holding portion 522. The movable portion 521 is formed to have a diameter greater than at least the outer peripheral diameter of the reflective film installation surface 512A in a plan view. Furthermore, the movable portion 521 is provided with a second electrode 562 and a movable reflective film 55.

[0064] The second electrode 562 is opposed to the first electrode 561 with an inter-electrode gap G2 therebetween and is formed in a ring shape having the same shape as the first electrode 561. Furthermore, the second substrate 52 includes a movable extraction electrode 564 extending from the outer periphery of the second electrode 562 toward the second electrical installation surface 524. The extended tip of the movable extraction electrode 564 forms a movable electrode pad 564P on the second electrical installation surface 524.

[0065] The movable reflection film 55 is provided at the center of the movable surface 521A of the movable portion 521 so as to face the fixed reflection film 54 with an inter-reflection film gap G1 therebetween.

[0066] The holding portion 522 is a diaphragm surrounding the movable portion 521 and is formed to have a smaller thickness than the movable portion 521. The holding portion 522 is more flexible than the movable portion 521 and can displace the movable portion 521 toward the first substrate 51 by a slight electrostatic attraction.

[0067] As described above, the substrate peripheral portion 525 is provided outside the holding portion 522 in a plan view. The surface of the substrate peripheral portion 525 that faces the first substrate 51 includes a second bonding portion 523 that faces the first bonding portion 513. Furthermore, the second bonding portion 523 is provided with a second bonding film 532. As described above, the first substrate 51 and the second substrate 52 are bonded together by the second bonding film 532 being bonded to the first bonding film 531.

[0068] Refer to the following Figures 4 to 11A 、 Figure 11B The spectroscopic measurement method will be described.

[0069] First, in step S11, a spectral image 200 is acquired. Specifically, a plurality of spectral images 200 are acquired for each predetermined wavelength λ.

[0070] To perform spectroscopic measurement processing using the spectroscopic measurement system 1, the filter control unit 62 first reads the drive voltage corresponding to the measurement wavelength by referring to the V-λ data stored in the storage unit 61. The filter control unit 62 then controls the voltage control unit 33 to apply the read drive voltage to the electrostatic actuator 56 of the spectroscopic element 5.

[0071] When a driving voltage is applied to the electrostatic actuator 56, the inter-reflective film gap G1 between the reflective films 54 and 55 changes to a size corresponding to the driving voltage. Furthermore, light of the measured wavelength passes through the spectroscopic element 5 and is detected by the imaging element 32. The light intensity acquisition unit 63 acquires a spectroscopic image 200, and the received light intensity, pixel position, and measured wavelength are associated and stored in the storage unit 61.

[0072] Here, the spectral image 200 of the first wavelength is referred to as the first spectral image 201. The spectral image 200 of the second wavelength is referred to as the second spectral image 202. The spectral image 200 of the third wavelength is referred to as the third spectral image 203. Figure 5 As shown, the interval between the center wavelength λ1 of the first transmission peak of light corresponding to the first spectral image 201 and the center wavelength λ2 of the second transmission peak of light corresponding to the second spectral image 202 is less than twice the first half-value width 301 of the first transmission peak or the second half-value width 302 of the second transmission peak.

[0073] Figure 5 The transmission peak value for each wavelength λ of the light passing through the spectroscopic element 5 is shown. Figure 5The horizontal axis shows the wavelength λ, and here, three wavelengths are shown: a first wavelength λ1 , a second wavelength λ2 , and a third wavelength λ3 . Figure 5 The vertical axis shows transmittance, and the transmittance increases from the lower side toward the upper side.

[0074] The full width at half maximum (FWHM) refers to the width of the wavelength λ at the transmission peak Tmax / 2, which is half the transmission peak Tmax of the transmitted light. By capturing the spectral image 200 at a wavelength where the interval between the first wavelength λ1 and the second wavelength λ2 is less than or equal to twice the first full width at half maximum 301 or the second full width at half maximum 302, the overlapping area, i.e., the common feature points A and B (or feature points C and D) can be obtained (see Figure 10A 、 Figure 10B 、 Figure 11A 、 Figure 11B ).

[0075] And, as Figure 5 As shown, the interval between the center wavelength λ2 of the second transmission peak of light corresponding to the second spectral image 202 and the center wavelength λ3 of the third transmission peak of light corresponding to the third spectral image 203 is less than twice the second half-value width 302 of the second transmission peak or the third half-value width 303 of the third transmission peak.

[0076] By acquiring the spectral images 200 at such wavelength intervals, for example, overlapping regions can be obtained in the first spectral image 201 and the second spectral image 202, and common feature points A and B can be obtained (see Figure 10A 、 Figure 10B ). Thus, the position of the second spectral image 202 can be corrected and positioned based on the position of the common feature points A and B relative to the first spectral image 201.

[0077] Furthermore, an overlapping area can be obtained in the second spectroscopic image 202 and the third spectroscopic image 203, and common feature points C and D can be obtained ( Figure 11A 、 Figure 11B Thus, the position of the third spectral image 203 can be corrected and positioned based on the position of the common characteristic points C and D relative to the second spectral image 202. This allows positioning in all spectral images 200, enabling acquisition of high-precision spectral data.

[0078] in addition, Figure 6 A plurality of spectral images 200 acquired at the aforementioned wavelength intervals are shown. Figure 7 A first spectral image 201 at a first wavelength is shown among the plurality of acquired spectral images 200 . Figure 8 A second spectral image 202 at a second wavelength is shown among the plurality of acquired spectral images 200 . Figure 9The third spectral image 203 of the third wavelength among the acquired spectral images 200 is shown. Figure 6 Only three spectral images 201 , 202 , and 203 are shown, but there are actually spectral images 200 as many as the wavelengths to be measured.

[0079] Then, in step S12, the characteristic points A and B of the two spectroscopic images 201 and 202 are determined. Specifically, for example, the first spectroscopic image 201 and the second spectroscopic image 202 are compared to determine the common characteristic points A and B. Figure 5 As shown, a portion of the waveform at the bottom of the peak of the first spectral image 201 overlaps a portion of the waveform at the bottom of the peak of the second spectral image 202 , and therefore both include common characteristic points A and B.

[0080] The common feature points A and B refer to the parts where the combined patterns of the light intensity differences of adjacent pixels in a certain area show the same tendency when the first spectral image 201 and the second spectral image 202 are divided into a plurality of pixels for observation. Figure 10A and Figure 10B As shown, common characteristic points A and B can be identified. The method for identifying common characteristic points A and B is not particularly limited, and known methods can be used. Furthermore, when identifying common characteristic points A and B, it is preferred to use a combination of at least two shapes corresponding to displacement in a linear direction or a rotational direction as characteristic points.

[0081] In step S13, the amount of misalignment is calculated. Specifically, the amount of misalignment between the common feature points A and B of the first spectral image 201 and the second spectral image 202 is calculated. Misalignment can be caused, for example, by camera movement due to hand tremors while scanning the spectral image 200. This can cause the common feature points A and B to shift relative to each other. For example, the second spectral image 202 is superimposed on the first spectral image 201, which serves as a reference, and the amount of misalignment is calculated based on the difference in the coordinate values ​​of the common feature points A and B.

[0082] The misalignment detection unit 743 calculates the misalignment between the first spectral image 201 and the second spectral image 202. Using this misalignment, the positioning unit 744 aligns the position of the second spectral image 202 with respect to the first spectral image 201. The corrected image is then acquired and stored in a storage unit such as a memory.

[0083] In step S14, the misalignment of the spectral image 200 is aligned. Specifically, to align the relative positions of the first spectral image 201 and the second spectral image 202, for example, a correction is performed by parallel shifting the position of the second spectral image 202 based on the common feature points A and B with the first spectral image 201 as a reference.

[0084] As the positioning point (in other words, the positioning reference point), for example, the pixel with the largest light intensity difference between adjacent pixels among the common feature points A and B is set as the positioning point. Note that the positioning point is not limited to the above, and other points may be used as reference points.

[0085] The method for calculating the amount of displacement is not particularly limited. For example, feature points A and B detected using the Shift, SURF, ORB, or Canny method may be tracked between two or more spectral images 200 to detect the relative position displacement.

[0086] In step S15, it is determined whether the positioning of all the spectral images 200 is completed. If the positioning of all the spectral images 200 is completed, the processing of the spectroscopic measurement method is terminated. If it is not completed, the processing proceeds to step S12 to perform the positioning of the next spectral image 200. For example, as described above, the position of the second spectral image 202 is used as a reference, and the position of the third spectral image 203 is corrected (refer to Figure 11A and Figure 11B ) In this way, the process is repeated until all the spectral images 200 are positioned.

[0087] As described above, the spectroscopic measurement method of this embodiment comprises: a spectroscopic element 5, which is capable of changing the wavelength λ of the light to be selected and spectroscopically analyzing the light from the object X; an imaging element 32 and a light quantity acquisition unit 63, which respectively receive the light that has been spectroscopically analyzed into a plurality of wavelengths λ by the spectroscopic element 5 and acquire a plurality of spectroscopic images 200; a displacement amount detection unit 743, which detects the relative position displacement between a first spectroscopic image 201 among the plurality of spectroscopic images 200 acquired by the imaging element 32 and the light quantity acquisition unit 63 and the first spectroscopic image 201 and at least one second spectroscopic image 202 other than the first spectroscopic image 201; and a positioning unit 744, which detects the relative position displacement between the first spectroscopic image 201 and the second spectroscopic image 202 acquired by the imaging element 32 and the light quantity acquisition unit 63 according to the displacement amount; The relative position misalignment amount detected by the amount detection unit 743 is used to position the first spectral image 201 and the second spectral image 202. The interval between the center wavelength λ1 of the first transmission peak of the light corresponding to the first spectral image 201 and the center wavelength λ2 of the second transmission peak of the light corresponding to the second spectral image 202 is less than twice the first half-value width 301 of the first transmission peak or the second half-value width 302 of the second transmission peak. The common feature points A and B of the first spectral image 201 and the second spectral image 202 are determined, and the position of the second spectral image 202 is corrected relative to the position of the first spectral image 201 based on the common feature points A and B.

[0088] According to this method, the first and second spectral images 201 and 202 are acquired so as to be no greater than twice the first full width at half maximum 301 or the second full width at half maximum 302. This allows for the identification of common characteristic points A and B between the first and second spectral images 201 and 202. Consequently, the position of the second spectral image 202 can be corrected relative to the position of the first spectral image 201 based on these common characteristic points A and B. This allows for the alignment of multiple spectral images 200 and the acquisition of highly accurate spectral data. Furthermore, accurate analysis can be performed based on the acquired spectral data.

[0089] Furthermore, the spectroscopic measurement system 1 of this embodiment comprises: a spectroscopic element 5 capable of changing the wavelength λ of light to be selected and spectroscopically analyzing light from an object X; an imaging element 32 and a light quantity acquisition unit 63 respectively receiving light spectroscopically analyzed into a plurality of wavelengths λ by the spectroscopic element 5 and acquiring a plurality of spectroscopic images 200; and a misalignment amount detection unit 743 detecting a first spectroscopic image 201 among the plurality of spectroscopic images 200 acquired by the imaging element 32 and the light quantity acquisition unit 63, and at least one of the first spectroscopic images 201 and the first spectroscopic image 201. a relative position misalignment between the first and second spectral images 202; and a positioning unit 744, which performs positioning between the first spectral image 201 and the second spectral image 202 according to the relative position misalignment detected by the misalignment detection unit 743, and an interval between a center wavelength λ1 of a first transmission peak of light corresponding to the first spectral image 201 and a center wavelength λ2 of a second transmission peak of light corresponding to the second spectral image 202 is less than 2 times the first half-value total width 301 of the first transmission peak or the second half-value total width 302 of the second transmission peak.

[0090] With this configuration, the first and second spectral images 201 and 202 are acquired so as to be no greater than twice the first full width at half maximum 301 or the second full width at half maximum 302. This allows for the acquisition of common characteristic points A and B between the first and second spectral images 201 and 202. Consequently, the position of the second spectral image 202 can be corrected relative to the position of the first spectral image 201 based on these common characteristic points A and B. This allows for the alignment of multiple spectral images 200, enabling the acquisition of highly accurate spectral data. Furthermore, accurate analysis can be performed based on the acquired spectral data.

[0091] Furthermore, the computer program of this embodiment comprises: a spectroscopic element 5 capable of changing the wavelength λ of the light to be selected and spectroscopically analyzing the light from the object X; an imaging element 32 and a light quantity acquisition unit 63 respectively receiving the light that has been spectroscopically analyzed into a plurality of wavelengths λ by the spectroscopic element 5 and acquiring a plurality of spectroscopic images 200; a displacement amount detection unit 743 detecting the relative position displacement between a first spectroscopic image 201 among the plurality of spectroscopic images 200 acquired by the imaging element 32 and the light quantity acquisition unit 63 and the first spectroscopic image 201 and at least one second spectroscopic image 202 other than the first spectroscopic image 201; and a positioning unit 744 detecting the relative position displacement between the first spectroscopic image 201 and the second spectroscopic image 202 according to the relative position detected by the displacement amount detection unit 743. The computer program causes the computer (control unit 74) to perform the following processing: the center wavelength λ1 of the first transmission peak of the light corresponding to the first spectral image 201 and the center wavelength λ of the second transmission peak of the light corresponding to the second spectral image 202 are made to be less than 2 times the first half-value width 301 of the first transmission peak or the second half-value width 302 of the second transmission peak, and the common characteristic points A and B of the first spectral image 201 and the second spectral image 202 are determined; and the position of the second spectral image 202 is corrected relative to the position of the first spectral image 201 based on the common characteristic points A and B.

[0092] With this configuration, the first and second spectral images 201 and 202 are acquired so as to be no greater than twice the first full width at half maximum 301 or the second full width at half maximum 302. This allows for the acquisition of common characteristic points A and B between the first and second spectral images 201 and 202. Consequently, the position of the second spectral image 202 can be corrected relative to the position of the first spectral image 201 based on these common characteristic points A and B. This allows for the alignment of multiple spectral images 200, enabling the acquisition of highly accurate spectral data. Furthermore, accurate analysis can be performed based on the acquired spectral data.

[0093] Next, modifications of the above-described embodiment will be described.

[0094] As described in the above embodiment, the method of correcting the second spectral image 202 relative to the first spectral image 201 is not limited to parallel displacement, and correction may be performed by any or all of position, rotation, and scaling.

[0095] According to this method, corrections including position, rotation, and magnification and reduction are performed, so the second spectral image 202 can be positioned relative to the first spectral image 201 .

[0096] Furthermore, the spectroscopic element 5 is not limited to the above-mentioned structure, and may also be Figure 12 The structure shown. Figure 12 1 is a cross-sectional view showing the structure of a modified example of a spectroscopic element 112. The spectroscopic element 112 of the modified example is different from the spectroscopic element 5 of the embodiment in that it is constituted by a first substrate 101, a second substrate 102, and a third substrate 103.

[0097] like Figure 12 As shown, a modified example of a spectroscopic element 112 is described above. The first substrate 101, the second substrate 102, and the third substrate 103 are bonded together, for example, via a bonding layer 106. A pair of reflective films 104 are disposed on the opposing surfaces of the second substrate 102 and the third substrate 103. An electrostatic actuator 105 capable of changing the gap size between the reflective films 104 is disposed on the opposing surfaces of the first substrate 101 and the second substrate 102. Even with this structure, a spectroscopic element 112 having the same function as the aforementioned spectroscopic element 5 can be provided.

[0098] Furthermore, the spectroscopic measurement system 1 is configured to include the spectroscopic measurement device 2 and the terminal device 7 , but is not limited thereto. A configuration in which the above-described image processing can be performed in a spectroscopic camera alone such as the optical sensor unit 3 may be employed.

Claims

1. A method for a spectrophotometric device, characterized in that The spectrophotometric measuring device comprises: A spectroscopic element capable of changing the wavelength of light to be selected and splitting the light from the object; as well as The imaging element receives the light separated into a plurality of wavelengths by the spectroscopic element and acquires a plurality of spectroscopic images. The method comprises: The first step is to determine common feature points between a first spectral image among the plurality of spectral images acquired by the spectral element and at least one second spectral image other than the first spectral image; The second step is to detect the relative position misalignment between the first spectroscopic image and the second spectroscopic image; and The third step is to perform positioning between the first spectral image and the second spectral image according to the detected relative position misalignment. The positioning performed in the third step includes: correcting the position of the second spectral image relative to the position of the first spectral image based on the common feature point, The interval between the center wavelength of the first transmission peak of the light corresponding to the first spectral image and the center wavelength of the second transmission peak of the light corresponding to the second spectral image is less than twice the first half-value total width of the first transmission peak or the second half-value total width of the second transmission peak, and a portion of the waveform at the bottom of the peak of the first spectral image overlaps with a portion of the waveform at the bottom of the peak of the second spectral image.

2. The method according to claim 1, characterized in that The correction includes any one or all of position, rotation, and scaling.

3. A spectrophotometric measurement system, characterized in that: The spectrophotometric measurement system comprises: A spectroscopic element capable of changing the wavelength of light to be selected and splitting the light from the object; an imaging element that receives the light separated into a plurality of wavelengths by the spectroscopic element and acquires a plurality of spectroscopic images; and one or more processors, The processor is configured to perform the following steps: The first step is to determine common feature points between a first spectral image among the plurality of spectral images acquired by the spectral element and at least one second spectral image other than the first spectral image; The second step is to detect the relative position misalignment between the first spectral image and the second spectral image; as well as The third step is to perform positioning between the first spectral image and the second spectral image according to the detected relative position misalignment. The positioning performed in the third step includes: correcting the position of the second spectral image relative to the position of the first spectral image based on the common feature point, The interval between the center wavelength of the first transmission peak of the light corresponding to the first spectral image and the center wavelength of the second transmission peak of the light corresponding to the second spectral image is less than twice the first half-value total width of the first transmission peak or the second half-value total width of the second transmission peak, and a portion of the waveform at the bottom of the peak of the first spectral image overlaps with a portion of the waveform at the bottom of the peak of the second spectral image.

4. A non-temporary computer storage medium, characterized in that: A program is stored, the program being configured to cause one or more processors to execute the method for a spectrophotometric device, The spectrophotometric measuring device comprises: A spectroscopic element capable of changing the wavelength of light to be selected and splitting the light from the object; as well as The imaging element receives the light separated into a plurality of wavelengths by the spectroscopic element and acquires a plurality of spectroscopic images. The method comprises: The first step is to determine common feature points between a first spectral image among the plurality of spectral images acquired by the spectral element and at least one second spectral image other than the first spectral image; The second step is to detect the relative position misalignment between the first spectroscopic image and the second spectroscopic image; and The third step is to perform positioning between the first spectral image and the second spectral image according to the detected relative position misalignment. The positioning performed in the third step includes: correcting the position of the second spectral image relative to the position of the first spectral image based on the common feature point, The interval between the center wavelength of the first transmission peak of the light corresponding to the first spectral image and the center wavelength of the second transmission peak of the light corresponding to the second spectral image is less than twice the first half-value total width of the first transmission peak or the second half-value total width of the second transmission peak, and a portion of the waveform at the bottom of the peak of the first spectral image overlaps with a portion of the waveform at the bottom of the peak of the second spectral image.

Images