Inductive position sensing configuration including coil misalignment compensation

Abstract

An inductive position detector for probe position measurement in a scanning probe includes a coil plate configuration positioned along a central axis in the probe. The coil plate configuration includes a field generating coil configuration and top and bottom axial and rotational sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and the coil signal indicates a conductive perturbator element and / or probe position. At least one misalignment compensation element is configured to reduce a signal offset caused by misalignment of at least one coil of the coil plate configuration (e.g., the coil plate configuration may include a printed circuit board having a plurality of layers in which the coils are located, and the misalignment of at least one coil may be caused by a registration error in a layer-to-layer registration as part of a manufacturing process, e.g., within manufacturing tolerances).

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application is a continuation-in-part of U.S. patent application No. 16 / 557,719, entitled “INDUCTIVE POSITION DETECTION CONFIGURATION FOR INDICATING AMEASUREMENT DEVICE STYLUS POSITION,” filed on August 30, 2019, which is a continuation-in-part of U.S. patent application No. 16 / 178,295, entitled “INDUCTIVE POSITION DETECTION CONFIGURATION FOR INDICATING AMEASUREMENT DEVICE STYLUS POSITION,” filed on November 1, 2018, the disclosures of which are incorporated herein by reference. Technical Field

[0003] The present disclosure relates to precision metrology and, more particularly, to inductive sensing arrangements for probes used with coordinate measuring machines. Background Art

[0004] A coordinate measuring machine (CMM) can obtain measurements of an inspected workpiece. An exemplary prior art CMM described in U.S. Pat. No. 8,438,746, the entire contents of which are incorporated herein by reference, includes a probe for measuring the workpiece, a probe for detecting the workpiece, a moving mechanism for moving the probe, and a controller for controlling the motion. U.S. Pat. No. 7,652,275 describes a CMM including a surface scanning probe, the entire contents of which are incorporated herein by reference. As disclosed therein, a mechanical contact probe or an optical probe can scan across the surface of a workpiece.

[0005] U.S. Patent 6,971,183 also describes a CMM using a mechanical contact probe, and the entire contents of U.S. Patent 6,971,183 are incorporated herein by reference. The probe disclosed therein includes a probe having a surface contact portion, an axial motion mechanism, and a rotary motion mechanism. The axial motion mechanism includes a moving member that allows the contact portion to move in a direction perpendicular to the center of the measuring probe (also referred to as the Z direction or the axial direction). The rotary motion mechanism includes a rotating member that allows the contact portion to move perpendicular to the Z direction. The axial motion mechanism is embedded in the interior of the rotary motion mechanism. The contact portion position and / or the workpiece surface coordinates are determined based on the displacement of the rotating member and the axial displacement of the axial motion moving member.

[0006] Inductive sensing technology is known to be environmentally robust and has various desirable sensing characteristics. It is known to use precision LVDTs and the like to measure the displacement or position of various internal components in mechanical contact probes similar to those described above. However, LVDTs and other known inductive sensors that are sufficiently accurate for CMM probes may be too large or difficult to incorporate, and the associated motion mechanisms and / or displacement detector arrangements may be relatively expensive and / or susceptible to various "cross-coupling" errors (e.g., due to common configurations and / or mechanism and / or detector defects, etc.). U.S. Patent No. 4,810,966, (the '966 patent), the entire contents of which are incorporated herein by reference, discloses a relatively flat and relatively economical inductive sensor configuration, and it can detect the three-dimensional position of a nearby conductive target. However, the configuration disclosed in the '966 patent has some design flaws in providing the accuracy and / or form factor necessary to successfully adapt to a CMM scanning probe. In short, the configuration of the '966 patent lacks the complexity and features necessary to provide a reasonable level of accuracy in modern metrology instruments such as CMM probes. Other problems associated with using known inductive sensing systems (such as those outlined above in CMM probes) may include signal / response nonlinearities inherent to the system's displacement response, position errors due to assembly and alignment imperfections, and signal drift due to environmental factors on mechanical and electrical components (e.g., due to temperature changes, etc.) There is a need for improved inductive sensing arrangements for CMM probes (e.g., where the displacement detector arrangement may be less susceptible to the above-mentioned errors, and / or may be relatively inexpensive, etc.). Summary of the invention

[0007] This Summary is provided to introduce some concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.

[0008] A scanning probe with 3-axis response is provided, which is used in a measuring machine (eg, CMM). The scanning probe includes a probe suspension part, a probe position detection part, and a signal processing and control circuit.

[0009] The probe suspension portion is attached to a frame of the scanning probe and includes a probe coupling portion configured to be rigidly coupled to the probe and a probe movement mechanism configured to allow axial movement of the probe coupling portion along an axial direction and rotational movement of the probe coupling portion about a rotation center.

[0010] The probe position detection part is arranged along a central axis parallel to the axial direction and nominally aligned with the rotation center, and is based on the inductive sensing principle. The probe position detection part includes a coil plate configuration, at least one misalignment compensation element and a disruptor configuration. The coil plate configuration includes a field generating coil configuration including at least one field generating coil, a top axial sensing coil configuration (TASCC) including at least one top axial sensing coil, a bottom axial sensing coil configuration (BASCC) including at least one bottom axial sensing coil, N top rotation sensing coils (TRSC) and N bottom rotation sensing coils (BRSC), wherein N is an integer greater than 3. The coil plate configuration includes a printed circuit board having a plurality of layers in which the coils of the coil plate configuration are located.

[0011] At least one misalignment compensation element is configured to reduce signal offset caused by misalignment of at least one coil of the coil plate configuration. The misalignment of the at least one coil may be caused by registration errors in layer-to-layer registration as part of a manufacturing process.

[0012] The perturbator configuration includes a conductive perturbator element providing a perturbator region, which is located in a perturbator motion volume along a central axis. The perturbator element is coupled to the probe suspension portion by a coupling configuration, and moves relative to an undeflected position in the perturbator motion volume in response to deflection of the probe suspension portion. The perturbator element can be described as moving over an operational range of motion + / -Rz along an axial direction in response to axial motion, and over a corresponding operational range of motion + / -Rx and + / -Ry along orthogonal X and Y directions orthogonal to the axial direction in response to rotational motion. The field generating coil configuration generates a magnetic flux that varies substantially in the axial direction in the perturbator motion volume in response to a coil drive signal.

[0013] The signal processing and control circuit is operatively connected to the coils of the probe position detection portion to provide coil drive signals and is configured to input signals from the receiver coil portion, the signals including respective signal components provided by respective rotational and axial sensing coils, and is further configured to output signals indicating the axial position or rotational position of the perturbator element or probe relative to the frame or housing of the scanning probe.

[0014] In some embodiments, at least one misalignment compensation element can be added to the coil plate configuration, and at least one compensation element is added to reduce the signal offset based at least in part on a determination of a signal offset caused by misalignment of at least one coil. In some such embodiments, at least one misalignment compensation element includes a first misalignment compensation element, and the first misalignment compensation element is added at a first position in the coil plate configuration based at least in part on a determination that adding the first misalignment compensation element reduces the signal offset. The first position can be selected from the plurality of possible positions based on a determination that positioning the first misalignment compensation element at the first position results in a greater reduction in the signal offset than positioning the first misalignment compensation element at other positions in the plurality of possible positions.

[0015] In some such embodiments, at least one misalignment compensation element includes one or more pads or pins that, in operation, increase or decrease the magnetic field through at least one coil and correspondingly reduce the signal offset. The one or more pads or pins include a plurality of pins located on one side of the coil plate configuration relative to a plane including the central axis, wherein the pins are substantially parallel to the central axis.

[0016] In some such embodiments, at least one misalignment compensation element includes one or more conductive shorts that, in operation, adjust the size of the coils of the coil plate configuration.

[0017] In some embodiments, the field generating coil configuration includes a top field generating coil configuration and a bottom field generating coil configuration; and at least one misalignment compensation element includes one or more conductive shields positioned proximate to the top field generating coil configuration and one or more conductive shields positioned proximate to the bottom field generating coil configuration. In some such embodiments, the one or more conductive shields positioned proximate to the top field generating coil configuration include: an inner conductive shield configuration whose area roughly corresponds to an area inside the top rotation sensing coil; and an outer conductive shield configuration whose area roughly corresponds to an area outside the top rotation sensing coil. The one or more conductive shields positioned proximate to the bottom field generating coil configuration similarly include: an inner conductive shield configuration whose area roughly corresponds to an area inside the bottom rotation sensing coil; and an outer conductive shield configuration whose area roughly corresponds to an area outside the bottom rotation sensing coil.

[0018] In some embodiments, a method includes moving a scanning probe disclosed herein along a surface of a workpiece, and generating three-dimensional position information based on inductive sensing signals generated by the scanning probe as the scanning probe moves along the surface of the workpiece.

[0019] In some embodiments, a system includes a scanning probe disclosed herein, a drive mechanism, and an attachment portion configured to couple the drive mechanism to the scanning probe.

[0020] Previously known inductive sensors utilizing nominally flat sensing elements are too inaccurate for application in precision scanning probes. In contrast, inductive sensors utilizing nominally flat sensing elements configured in accordance with various principles disclosed herein provide a robust set of signals and can be used to provide sufficient accuracy for application in precision scanning probes. In particular, embodiments and / or configurations such as those outlined above can provide signal components that are particularly advantageous in eliminating or allowing correction of certain signal errors and / or signal cross-coupling errors that previously limited the accuracy of position determination in previous economical three-dimensional position indicators based on inductive sensing. In various embodiments, the signal components provided by the various receiver coils are particularly advantageous because they can be processed using relatively fast and simple signal processing to provide a robust and highly accurate three-dimensional position indication. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a diagram showing various typical components of a measurement system including a CMM utilizing a scanning probe such as disclosed herein;

[0022] Figure 2 is a block diagram showing the various elements of a scanning probe coupled to a CMM and providing rotational and axial position signals;

[0023] Figure 3 is a diagram showing a portion of a first exemplary embodiment of a probe suspension portion coupled to a probe and a first exemplary embodiment of a probe position detection portion for detecting a position of the probe suspension portion;

[0024] Figure 4 It shows Figure 3 An illustration of a cross-section of one embodiment of a probe suspension portion, as contained within a main frame of a scanning probe;

[0025] Figure 5 yes Figure 3 and Figure 4 A partially schematic isometric view of an alternative embodiment of a probe position detection portion is shown, which emphasizes certain aspects according to the principles disclosed herein;

[0026] Figure 6 yes Figure 5 A partial schematic isometric view of certain elements of the probe position detection portion shown, including connections to a schematic representation of a block diagram of one exemplary embodiment of processing and control circuitry in accordance with the principles disclosed herein;

[0027] Figures 7A-7E is a diagram showing a corresponding "4 complementary pairs" embodiment of a pattern of receiver coil portions and a perturbator element configuration according to the principles disclosed herein, which may be used Figure 3 and / or Figure 4 In the various embodiments of the probe position detection portion shown;

[0028] Figures 8A-8F is a diagram showing a corresponding "3 (or 6) complementary pairs" embodiment of a receiver coil portion pattern and a perturbator element configuration according to the principles disclosed herein, which can be used Figure 3 and / or Figure 4 Various embodiments of the probe position detection portion are shown.

[0029] Fig. 9A and 9B is a diagram showing a portion of an exemplary embodiment of a probe position detection portion for detecting a position of a probe suspending portion;

[0030] Fig.10 yes Fig. 9A and Fig. 9B A partially schematic isometric view of an alternative embodiment of a probe position detection portion is shown, which emphasizes certain aspects according to the principles disclosed herein;

[0031] Fig.11 yes Fig.10 A partially schematic isometric view of an alternative embodiment of a probe position detection portion is shown, which emphasizes certain aspects according to the principles disclosed herein;

[0032] Fig. 12A and 12B is a diagram showing a portion of an exemplary embodiment of a probe position detection portion for detecting a position of a probe suspending portion;

[0033] Fig.13A is a partially schematic isometric illustration of an exemplary embodiment of a probe position detection portion, emphasizing certain aspects according to the principles disclosed herein;

[0034] Figures 13B to 13F is a diagram showing a portion of an exemplary embodiment of a probe position detection portion, emphasizing certain aspects in accordance with the principles disclosed herein;

[0035] Figures 14A to 14D shows exemplary frequency shift and off-axis crosstalk characteristics associated with various embodiments of a probe position detection portion;

[0036] Figures 15A to 15Cis a diagram showing a portion of an exemplary embodiment of a probe position detection portion, emphasizing certain aspects in accordance with the principles disclosed herein;

[0037] Fig.16 is a partially schematic isometric illustration of an exemplary embodiment of a probe position detection portion, emphasizing certain aspects according to the principles disclosed herein;

[0038] Fig.17A and 17B is a diagram showing a portion of an exemplary embodiment of a probe position detection portion, emphasizing certain aspects in accordance with the principles disclosed herein; and

[0039] Figures 18A to 18C is a diagram showing a portion of an exemplary embodiment of a probe position detection portion, emphasizing certain aspects in accordance with principles disclosed herein. DETAILED DESCRIPTION

[0040] Figure 1 1 is a diagram showing various typical components of a measurement system 100 including a CMM 200 utilizing a scanning probe 300 such as disclosed herein. The measurement system 100 includes an operation unit 110, a motion controller 115 that controls the motion of the CMM 200, a host computer 120, and the CMM 200. The operation unit 110 is coupled to the motion controller 115, and may include a joystick 111 for manually operating the CMM 200. The host computer 120 is coupled to the motion controller 115, and operates the CMM 200 and processes measurement data of a workpiece W. The host computer 120 includes an input device 125 (e.g., a keyboard, etc.) for inputting, for example, measurement conditions, and an output device 130 (e.g., a display, a printer, etc.) for outputting, for example, measurement results.

[0041] The CMM 200 includes a drive mechanism 220 located on a surface plate 210 and an attachment portion 224 for attaching a scanning probe 300 to the drive mechanism 220. The drive mechanism 220 includes X-axis, Y-axis, and Z-axis sliding mechanisms 222, 221, and 223, respectively, for moving the scanning probe 300 three-dimensionally. The probe 306 attached to the end of the scanning probe 300 includes a contact portion 348. As will be described in more detail below, the probe 306 is attached to a probe suspension portion of the scanning probe 300, which allows the contact portion 348 to freely change its position in three directions when the contact portion 348 moves along a measurement path on the surface of the workpiece W.

[0042] Figure 2is a block diagram showing various elements of a scanning probe 300 that is coupled to a CMM 200 and provides rotational (e.g., X, Y) and axial (e.g., Z) position signals. The scanning probe 300 includes a probe body 302 (e.g., including a frame) that incorporates a probe suspension portion 307 and a probe position detection portion 311. The probe suspension portion 307 includes a probe connection portion 342 and a probe motion mechanism 309. The probe connection portion 342 is rigidly coupled to the probe 306. The probe motion mechanism 309 is configured to allow axial movement of the probe connection portion 342 and the attached probe 306 in an axial direction, and to allow rotational movement of the probe connection portion 342 and the attached probe 306 around a center of rotation, which will be described below in conjunction with the present invention. Figure 3 and Figure 4 The signal processing and control circuit 380 included in the scanning probe 300 is connected to the probe position detection part 311 and controls the operation thereof, and can perform related signal processing, all of which will be described in more detail below.

[0043] like Figure 2 As shown, the probe position detection portion 311 adopts the inductive sensing principle and includes a receiver coil portion 370, a field generating coil configuration 360 and a perturbator element 351 (which can be part of the perturbator configuration 350, which can include multiple parts in some embodiments). The receiver coil portion 370 can include a rotational sensing coil portion (also referred to as a rotational sensing coil) RSC and an axial sensing coil configuration ASCC. In short, the moving perturbator element 351 (or more generally, the perturbator configuration 350) causes position-related changes in the changing magnetic field generated by the field generating coil configuration 360. The receiver coil portion 370 responds to the changing magnetic field and the changes caused therein by the perturbator element 351. In particular, the rotational sensing coil portion RSC outputs at least a first and a second rotational signal component RSig on corresponding signal lines, which indicates the rotational position of the probe coupling portion 342 (e.g., X and Y position signals), and the axial sensing coil configuration ASCC outputs one or more axial signal components ASig on corresponding signal lines, which indicates the axial position of the probe coupling portion 342 (e.g., Z position signal), as will be described below, for example, with reference to Figure 3 , 5and 6 are described in more detail. In various embodiments, the signal processing and control circuit 380 receives the rotational signal component RSig and the axial signal component ASig, and various levels of related signal processing can be performed in various embodiments. For example, in one embodiment, the signal processing and control circuit 380 can cause the signal components from the various receiver coils to be combined and / or processed in various relationships, and provide the results in a desired output format through the attached connection portion 224 as rotational and axial position signal outputs RPSOut and APSOut. One or more receiving portions (e.g., in the CMM 200, the motion controller 115, the host computer 120, etc.) can receive the rotational and axial position signal outputs RPSOut and APSOut, and one or more related processing and control portions can be used to determine the three-dimensional position of the contact portion of the probe coupling portion 342 and / or the attached probe 206 when the contact portion 348 of the probe 306 moves along the surface of the workpiece W being measured.

[0044] Figure 3 4 is a partial schematic diagram showing a portion of a first exemplary embodiment of a schematically shown probe suspension portion 407 coupled to a probe 406, and a partial schematic cross-section of a first exemplary embodiment of a probe position detection portion 411 for detecting the position of the probe suspension portion 407 and / or the probe 406. It will be understood that Figure 3 Certain numbered components 4XX may correspond to and / or have similar Figure 2 The same numbering scheme for indicating components of similar design and / or function also applies to the following: Figure 4-8F .like Figure 3 As shown, the probe suspension portion 407 includes a probe movement mechanism 409 and a probe coupling portion 442. The probe coupling portion 442 is configured to rigidly couple to the probe 406 having a contact portion 448 for contacting a surface S of a workpiece W (not shown).

[0045] As will be discussed below Figure 4 Described in more detail, the probe movement mechanism 409 is attached to the frame of the scanning probe and is configured to allow axial and rotational movement of the probe coupling portion 442 and the attached probe 406 so that the contact portion 448 can change its position in three directions along the shape of the surface S. For ease of explanation, Figure 3 The vertical and horizontal directions on the paper are defined as Z and Y directions, respectively, and the direction perpendicular to the paper is defined as X. In this figure, the direction of the central axis CA of the measurement probe 300 (also referred to as the axial direction) coincides with the Z direction.

[0046] exist Figure 3 , the rotary motion portion of the probe motion mechanism 409 is shown, including a rotary member 436, a flexure element 440, and a mobile member 412 disposed within the rotary member 436. As will be described below with reference to Figure 4 Described in more detail, the flexure element 440 allows rotational movement of the rotating member 436 about the rotation center RC. As will be described in more detail below, in various embodiments, the rotational sensing coils TRSCi and BRSCi (where i is an index integer identifying a specific coil) and the probe position detection portion 411 are capable of sensing the rotational position of the perturbator element 451 and thereby the rotational position of the moving member 412 (e.g., in the X and Y directions), and the axial sensing coil configurations (also referred to as axial sensing coils) TASCC and BASCC are capable of sensing the axial position of the perturbator element 451 and thereby the axial position of the moving member 412 (e.g., in the Z direction).

[0047] like Figure 3 As shown, a first exemplary embodiment of the probe position detection portion 411 includes a perturbator element 451 (or more generally, a perturbator arrangement 450) coupled to a moving member 412 and which moves relative to a scanning probe frame (e.g., where the frame is included as part of a scanning probe body, etc.) within a perturbator motion volume MV located between top and bottom coil substrates 471T and 471B, respectively. Figure 3 As shown, the moving member 412 extends through and moves in a hole 472 in the bottom coil substrate (471B) along the central axis CA. In response to the deflection of the probe suspension portion 407 and the moving member 412, the attached perturbator element 451 moves in the perturbator motion volume MV relative to the undeflected position UNDF.

[0048] Various other components of the probe position detection portion 411, such as the receiver coil portion 470 and the field generating coil arrangement 460, may be fixed relative to the frame unless otherwise noted. Figure 3 In the illustrated embodiment, the field generating coil arrangement 460 comprises a single flat field generating coil 461 which is located approximately at the mid-plane of the perturbator motion volume MV and which is nominally flat and orthogonal to the central axis CA. Figure 2 In summary, the receiver coil portion 470 can generally include a rotation sensing coil portion (also referred to as a rotation sensing coil) RSC and an axial sensing coil configuration ASCC. The rotation position detection configuration RSC generally includes a top rotation sensing coil TRSCi and a bottom rotation sensing coil BRSCi. Figure 3In the cross section shown, only the two top rotation sensing coils TRSC1 and TRSC2, and the two bottom rotation sensing coils BRSC1 and BRSC2 are shown. These rotation sensing coils can provide signal components that indicate the position of the perturbator element 451 along the Y direction. In particular, their signal components vary according to the amount of displacement ΔY of the perturbator element 451 along the Y direction, and therefore indicate the amount of displacement ΔY. The displacement ΔY determines the amount of relative "overlap" between the perturbator element 451 and the respective rotation sensing coils TRSCi and BRSCi, and thereby determines the amount of coupling between them and the changing magnetic field generated by the field generating coil 461 (which determines the generated signal components). Other rotation sensing coils (not shown) can provide signal components that indicate the position of the perturbator element 451 along the X-axis direction. The various rotation sensing coil signal components may also be undesirably sensitive to their local "operating gap" OG relative to the perturbator element 451, such as Figure 3 For the top rotation sensing coil TRSC2, however, as further described below, in accordance with various principles disclosed herein, this undesirable gap sensitivity can be substantially eliminated or compensated.

[0049] The axial sensing coil configuration generally includes a top axial sensing coil configuration TASCC and a bottom axial sensing coil configuration BASCC. Figure 3 In the exemplary embodiment shown, the top axial sensing coil configuration TASCC includes a single top axial sensing coil that at least partially surrounds the central axis CA, and at least one bottom axial sensing coil includes a single bottom axial sensing coil that at least partially surrounds the central axis, as shown. These axial sensing coils are typically completely "overlapped" by the perturbator element 451. Therefore, their signal components are nominally responsive only to the position of the perturbator element 451 in the axial or Z direction, and are indicative of the position of the perturbator element 451 in the Z direction. Figure 5 and 6 The generation of the various signal components is described in more detail.

[0050] With previous reference Figure 2 The operation is similar to that outlined, in that in operation, the moving perturbator element 451 induces position-dependent local changes in the varying magnetic field in the axial direction generated by the field generating coil 461. The receiver coil portion 470 responds to the varying magnetic field and the changes induced therein by the perturbator element 451, and outputs a rotational signal component RSigs and an axial signal component ASig, which can be processed to determine the rotational position (e.g., Y and X positions, and corresponding signals) of the perturbator element 451 and its axial position (e.g., Z position), as previously described with reference to Figure 2As will be appreciated, the position of the perturbator element 451 is related to the position of the probe coupling portion 442 and / or its contact portion 448 by known geometry. For example, for small rotation angles, for the illustrated motion or position of the perturbator element 451 in the Y direction away from zero (e.g., from the undeflected position UNDF):

[0051] ΔY=Hθ Y (Equation 1)

[0052] Where H is the distance from the center of rotation RC to the nominal plane of the perturbator element 451, θ Y is the rotational motion tilt of the rotating member 436 (and the moving member 142) in a plane parallel to the Y direction (i.e., rotation about an axis parallel to the X axis at the rotation center RC). If a larger rotation angle is used in various embodiments, a similar expression that is accurate for the larger rotation angle can be used, as is known in the art. With respect to the rotational motion tilt component θ Y , a Y-direction movement or displacement Y away from a zero point (eg, corresponding to an undeflected position UNDF) of the contact portion 448 of the probe 406 STYLUS It can be approximated as:

[0053] ΔY STYLUS =θ Y *(h S +l S ) (Equation 2)

[0054] where h S is the distance from the end of the probe coupling portion 442 to the rotation center RC, l S is the length of the probe 406. Combining equations 1 and 2, the ratio of the displacement ΔY of the perturbator element 451 to the Y-direction displacement at the contact portion 448 can be approximated as:

[0055] ΔY / ΔY STYLUS =H / (h S +l S ) (Equation 3)

[0056] It is understood that the X-coordinate motion component is similar to the above expression and will not be described in detail here. The probe length l of various probes can be used in the equation S (e.g., with respect to the trigonometry of the system) to determine the XY position of the contact portion 448 based on the XY detected spot position. With respect to the Z coordinate displacement or position component, the displacement ΔZ at the probe contact portion (e.g., contact portion 448) relative to the Z direction is STYLUS, the displacement ΔZ (not shown) of the perturbator element 451 in the axial or Z direction away from the zero point (eg, corresponding to the undeflected position UNDF) can be approximated by:

[0057] ΔZ / ΔZ STYLUS ≈1 (Equation 4)

[0058] Figure 4 is a partial schematic diagram showing a Figure 3 The cross-sectional view of one embodiment of the probe suspension portion 407' of the probe suspension portion 407 is shown similar to Figure 3 One embodiment of the probe position detection portion 511 of the probe position detection portion 411 shown, and the signal processing and control circuit 480. The aforementioned elements are shown as being included within the frame 408 of the probe body 402 of the scanning probe 400. The alignment and mounting portion 417 or other techniques can be used to position the substrates 571T, 571B of the probe position detection portion 511, and the field generating coil 561 or its substrate (e.g., a printed circuit type substrate) for proper operation in the scanning probe 400. According to known techniques, various signal connections associated with the probe position detection portion 511 can be provided by connectors (e.g., flexible print and / or wire connections) 419 and the like. In some embodiments, some or all of the signal processing and control circuit 480 can be provided as Figure 4 In other embodiments, some or all of the signal processing and control circuitry 480 may be incorporated on the substrate of the probe position detection portion 511, if desired.

[0059] like Figure 4 As shown, the probe suspension portion 407' includes a probe movement mechanism 409 and a probe connection portion 442 connected to the probe 406. The probe movement mechanism 409 may include a moving member 412, a rotating member 436, a flexure element 440, which is connected to the main frame 408 to support and realize the rotational movement of the rotating member 436, and flexure elements 414 and 415 (i.e., referred to as first flexure elements) that support the moving member 412 and connect it to the rotating member 36 to realize the axial movement of the moving member 412. The scanning probe 400 includes a probe position detection portion 511, which has the following reference Figure 5 The components and operation described in more detail are used to determine the position and / or movement of the probe motion mechanism 409 and / or the contact portion 448 of the probe 406.

[0060] The flexure element 440 (i.e., referred to as the second flexure element) can be arranged between the corresponding planes of a pair of flexure elements 414 and 415 (i.e., referred to as the first flexure element) in the axial direction O. The flexure design suitable for the flexure elements 414, 415 and 440 can be determined according to principles known in the art. For example, a possible embodiment is shown in U.S. Patent Application No. 14 / 973,376, entitled "Measurement Device With Multiplexed Position Signals", which was filed on December 17, 2015 and is jointly assigned, and the entire contents of the application are incorporated herein by reference. The rotating member 436 can have a symmetrical shape about the second flexure element 440, and can integrally include: two ring portions 436A, two connecting portions 436B, and a cylindrical portion 436C. The peripheral portion of the first flexure element 414 is fixed to the ring portion 436A. The connecting portion 436B extends inside the ring portion 436A to connect to the cylindrical portion 436C having a hollow center. The first flexure elements 414 and 415 may be disposed at symmetrical distances relative to the second flexure element 440 , although such an implementation is merely exemplary and not limiting.

[0061] The axial motion mechanism 410 including the moving member 412 is supported inside the rotating member 436, and the rotating member 436 and the axial motion mechanism 410 together constitute a motion module as a part of the probe motion mechanism 409. The axial motion mechanism 410 allows the contact portion 448 to move in the axial direction O. The rotating motion mechanism 434 including the rotating member 436 allows the contact portion 448 of the probe 406 to move transversely (e.g., approximately perpendicularly) to the axial direction O through rotational motion around the rotation center RC.

[0062] The moving member 412 integrally includes: a lower portion 412A, a rod portion 412B and an upper portion 412C. Figure 3 As outlined below, and as referenced below Figure 5The probe position detection portion 511 shown is described in more detail, and the perturbator element 551 attached to the upper portion 412C of the moving member 412 is used as a rotational and axial position indicating element. The rod portion 412B is disposed between a pair of first flexure elements 414 and 415. The rod portion 412B is accommodated in the rotating member 436. The lower portion 412A is formed below the rod portion 412B, and the probe coupling portion 442 (e.g., a flange member) is attached to the lower portion 412A. The flange portion 444 is provided for attaching the probe 406. The flange portion 444 and the probe coupling portion 442 can together constitute a detachable coupling mechanism (e.g., a known type of kinematic joint or coupling) that allows various probes 406 and the probe coupling portion 442 to be attached or detached with repeatable positioning (e.g., in the case of knocking off the probe in a collision, or deliberately changing the probe).

[0063] Figure 5 is similar to Figure 4 1 is a partially schematic isometric view of an alternative embodiment of a probe position detection portion 511' of the probe position detection portion 511 shown in FIG. 5, which emphasizes certain aspects according to the principles disclosed herein. The probe position detection portion 511' is similar to 511, except that the field generating coil configuration 560 is different, which will be further described below. In general, the probe position detection portion 511' includes Figure 2 , 3 Certain components are similar to those of the probe position detection portions 311, 411, and 511 of 4 and will be understood to operate similarly unless otherwise noted below.

[0064] exist Figure 5 In the illustrated embodiment, the probe position detection portion 511 ′ comprises a receiver coil portion 570 , a perturbator arrangement 550 comprising a perturbator element 551 , and a field generating coil arrangement 560 .

[0065] In various embodiments, the perturbator element 551 (or more generally, the perturbator configuration 550) may include a conductive plate or conductive loop, or parallel conductive plates or conductive loops (e.g., fabricated on both sides of a printed circuit board, patterned by printed circuit board manufacturing techniques) or any other desired operational configuration that provides a perturbator region (e.g., an interior region thereof). The perturbator element 551 is positioned in the perturbator motion volume MV between the top and bottom coil substrates 571T and 571B along the central axis CA and is coupled to the probe suspension portion 507 by a coupling configuration (e.g., including a moving member 512). For purposes of explanation, we may describe the perturbator element 551 as being responsive to deflection of the probe suspension portion 507 and / or the probe 506 and / or the moving member 512 relative to the probe suspension portion 507. Figure 5 The undeflected position shown (see Figure 3The perturbator element may be described as moving in response to axial motion in an axial direction within an operating motion range of + / -Rz by displacement increments ΔZ, and in response to rotational motion in orthogonal X and Y directions orthogonal to the axial direction (Z direction) within respective operating motion ranges of + / -Rx and + / -Ry by displacement increments ΔX and ΔY. The prescribed or intended operating motion ranges are described in more detail below.

[0066] The receiver coil portion 570 may include a planar top coil substrate 571T including N top rotational sensing coils TRSC (e.g., TRSC1-TRSC4, where N=4), a top axial sensing coil configuration TASCC (e.g., in this embodiment, including a single individual coil as shown), and a planar bottom coil substrate 571B including N bottom rotational sensing coils BRSC (e.g., BRSC1-BRSC4, where N=4), and a bottom axial sensing coil configuration BASCC (e.g., in this embodiment, including a single individual coil as shown). The top and bottom coil substrates 571T and 571B are mounted to a frame of the scanning probe in a fixed relationship, with the bottom coil substrate being closer to the probe 506 and / or the probe suspension portion 507. The top and bottom coil substrates 571T and 571B may be nominally parallel to each other and nominally orthogonal to the central axis CA, and spaced apart along the central axis CA with the perturbator motion volume MV located therebetween. It should be understood that, although for simplicity of illustration, Figure 5 The various sensing coils shown are represented by "closed loops", but all coils include a first and second connection end (e.g., Figure 6 A winding or conductor (as shown) configured to operate as one or more inductively coupled "turns".

[0067] The field generating coil configuration (eg, field generating coil configuration 560) generally includes at least a first field generating coil that is located near the perturbator motion volume MC and that is nominally flat and orthogonal to the central axis CA. Figure 3 A single flat field generating coil 461 in the illustrated embodiment (which is approximately located at the mid-plane of the perturbator motion volume MV) is provided at Figure 5In the illustrated embodiment, the field generating coil configuration 560 includes a pair of flat field generating coils 561T and 561B (located on top and bottom coil substrates 571T and 571B, respectively) that are approximately equidistant from the midplane of the perturbator motion volume MV along the central axis CA, and that are nominally flat and orthogonal to the central axis CA. Generally speaking, the field generating coil configuration 460 or 560 can be used with the receiver coil portion 570 (or other receiver coil portions disclosed herein) if the field generating coil configuration includes at least a first field generating coil that is configured such that the projection of its coil area along the axial direction (Z direction) includes the conductive plate or loop that provides the perturbator area of ​​the perturbator configuration 560 (e.g., of the perturbator element 551) and the coil areas of all the rotational and axial sensing coils RSCi and ASCC located on the top and bottom coil substrates 571T and 571B. In this case, the field generating coil arrangement is configured to generate a varying magnetic flux substantially in the axial direction in the perturbator motion volume MV in response to the coil drive signal, as required for the operation of the probe position detection portion 511'. It should be understood that although for simplicity of description, Figure 5 The various field generating coils shown in FIG. 1 are represented by a single "closed loop" comprising a wide flat conductive trace (the edges of which are shown), but in actual devices all coils include a first and a second connection end (e.g., as shown in FIG. 1 ). Figure 6 ) and configured to operate as one or more field generating "turns".

[0068] like Figure 5 As shown, the perturbator element 551 is arranged in an axial direction (e.g., Figure 5 The projection of the perturbator element 551 through the inner coil area of ​​the top axial sensing coil configuration TASCC (as indicated by the thin dashed line PRJ in FIG. 1 ) defines the top axial sensing overlap area TASOA (indicated by the dot pattern filling the inner coil area), and the projection of the perturbator element 551 through the inner coil area of ​​the bottom axial sensing coil configuration BASCC along the axial direction defines the bottom axial sensing overlap area BASOA (indicated by the dot pattern filling the inner coil area). Similarly, the projection of the perturbator element 551 through the inner coil area of ​​any corresponding top rotating sensing coil TRSCi (e.g., TRSC1-TRSC4) along the axial direction defines the corresponding top rotating coil sensing overlap area TRSCOAi (e.g., TRSCOA1-TRSCOA4), as shown in FIG. Figure 5The dot pattern filling each corresponding overlap area is represented by , where i is an individual coil identification index ranging from 1 to N. The projection of the perturbator element 551 in the axial direction through the inner coil area of ​​any corresponding bottom rotating sensing coil BRSCi defines the corresponding bottom rotating coil sensing overlap area BRSCOAi (e.g., TRSCOA1-TRSCOA4), as shown Figure 5 The dot patterns shown fill each corresponding overlapping area.

[0069] In accordance with the principles described and claimed herein, with respect to an axial detection position in a probe position detection portion (e.g., 511'), a receiver coil portion (e.g., 570) and a perturbator element are configured to provide a top axial sensing overlap area TASOA and a bottom axial sensing overlap area BASOA, wherein the amount of each of the overlap areas TASOA and BASOA is constant or independent of the position of the perturbator element 551 within the operating range of motion + / -Rz, + / -Rx, and + / -Ry. (It will be appreciated that for a particular scanning probe, the operating range of motion may be specified or designated in conjunction with the configuration of the particular probe position detection portion of the probe to meet this requirement.) In this manner, the signal components generated in the top and bottom axial sensing coil configurations TASCC and BASCC are nominally independent of rotational motion (which is the position of the perturbator element 551 along the X and Y directions), and are nominally only sensitive to changes in the "closeness" or gap of the perturbator element 551, which varies according to the axial (Z) displacement or displacement ΔZ of the perturbator element 551. In operation, the current induced in the perturbator element 551 by the changing magnetic field of the field generating arrangement 560 causes an opposite magnetic field. Figure 5 Moving upward in the axial (Z) direction in the image, the opposing magnetic field couples more strongly to the top axial sensing coil configuration TASCC, thereby reducing its signal component due to the changing magnetic field. Conversely, the opposing magnetic field couples more weakly to the bottom axial sensing coil configuration BASCC, thereby increasing its signal component due to the changing magnetic field. Following the convention used in this disclosure, we may refer to the signal component SIGTASCC as the signal component generated by a particular top sensing coil configuration (or coil) TASCC, and so on.

[0070] It should be appreciated that at the undeflected position UNDF, the net signal components SIGTASCC and SIGBASCC may be approximately balanced. For smaller displacements ΔZ (such as expected in operation), the net signal components SIGTASCC and SIGBASCC may vary approximately linearly and inversely to each other. Certain considerations related to the degree of nonlinearity of these signals are discussed further below. In one embodiment, the axial displacement or position ΔZ may be represented by or correspond to the following signal relationship:

[0071] ΔZ = function of [(SIGBASCC-SIGTASCC) / (SIGBASCC+SIGTASCC)] (Equation 5)

[0072] This signal relationship is exemplary only and not limiting. In various embodiments, if necessary, the signal relationship can be adjusted or compensated by additional calibration or signal processing operations, including operations to reduce the effects of geometry and / or signal cross-coupling between various displacement directions or signal components. In various embodiments, the top axial sensing coil configuration may include at least one top axial sensing coil that is not one of the N top rotational sensing coils and is arranged closer to the central axis than the top rotational sensing coil, and at least one top axial sensing coil and the perturbator element are characterized in that at least one top axial sensing coil has an inner coil area that is smaller than the perturbator element, and for any position of the perturbator element within the operating motion range + / -Rz, + / -Rx, and + / -Ry, the projection of the perturbator element along the axial direction completely fills the inner coil area of ​​at least one top axial sensing coil, wherein the top axial sensing overlap area TASOA does not change due to the position of the perturbator element. Similarly, in various such embodiments, the bottom axial sensing coil configuration may include at least one bottom axial sensing coil that is not one of the N bottom rotational sensing coils and that is arranged closer to the center axis than the bottom rotational sensing coil, and the at least one bottom axial sensing coil and the perturbator element are characterized in that the at least one bottom axial sensing coil has an internal coil area that is smaller than that of the perturbator element, and for any position of the perturbator element within the operating motion range + / -Rz, + / -Rx, and + / -Ry, the projection of the perturbator element along the axial direction completely fills the internal coil area of ​​the at least one bottom axial sensing coil, wherein the bottom axial sensing overlap area BASOA does not change due to the position of the perturbator element. It can be seen that Figure 5 The specific embodiment of the probe position detection portion 511' shown (wherein the top axial sensing coil configuration TASCC and the bottom axial sensing coil configuration BASCC each include a single sensing coil) conforms to this description. It should be understood that various configurations of the top and bottom sensing coil configurations TASCC and BASCC may be used, Figure 5 The particular configuration shown in is exemplary only and is not limiting. Various alternative configurations are described below with reference to other figures.

[0073] In accordance with the principles described and claimed herein, with respect to rotational position detection in a probe position detection portion (e.g., 511'), a receiver coil portion (e.g., 570) and a perturbator element (e.g., 551) are generally configured to provide N complementary pairs CPi (e.g., CP1-CP4, where N=4) of rotational sensing coils, each of which includes a top rotational sensing coil TRSCi and a bottom rotational sensing coil BRSCi, wherein for any complementary pair CPi, and for any perturbator element displacement increment within an operating motion range of + / -Rz, + / -Rx, and + / -Ry, the magnitude of the change in the overlap region TRSCOAi and BRSCOAi associated with the perturbator displacement increment is nominally the same in that complementary pair. (It will be appreciated that for a particular scanning probe, the operating motion range may be specified or designated in conjunction with the configuration of its particular probe position detection portion to satisfy this requirement.) Figure 5 The table CPTable in Figure 5 The respective components TRSCi and BRSCi of each respective complementary pair CPi of the embodiment shown in FIG.

[0074] By complying with the above principles, Figure 5 The complementary pairs CPi shown may be used to compensate or eliminate certain cross-coupling errors, and / or simplify the signal processing required to provide accurate rotational position or position measurements (e.g., along the X and / or Y directions). Figure 5 The pairs of signal components induced in the complementary pair CPi of rotational sensing coils in the illustrated embodiment may be combined or processed in a relationship that provides a resulting signal that is nominally insensitive to changes in the "proximity" or gap between the individual coils of the complementary pair and the perturbator element 551. That is, the resulting signal may be insensitive to the axial (Z) position or displacement ΔZ of the perturbator element 551, and nominally only sensitive to rotational position or displacement (e.g., in the X and / or Y directions), as described in more detail below. Figure 5 In the particular embodiment shown, it will be appreciated that the position of the perturbator element 551 (which has a displacement component ΔY along the Y-axis direction) will increase (or decrease) the overlapping areas TRSCOA2 and BRSCOA2 in the complementary pair CP2, and decrease (or increase) the overlapping areas TRSCOA1 and BRSCOA1 in the complementary pair CP1. Similarly, the displacement of the perturbator element 551 (which has a position component ΔX along the X-axis direction) will increase (or decrease) the overlapping areas TRSCOA3 and BRSCOA3 in the complementary pair CP3, and decrease (or increase) the overlapping areas TRSCOA4 and BRSCOA4 in the complementary pair CP4.

[0075] As previously outlined, in operation, the current induced in the perturbator element 551 by the changing magnetic field of the field generating arrangement 560 causes an opposite magnetic field. Generally speaking, as the proximal portion of the perturbator element 551 approaches the rotating sensing coil along the axial direction, the signal component SIGTRSCi (or SIGBRSCi) generated in any rotating sensing coil TRSCi (or BRSCi) will reduce, or increase, its overlap with the rotating sensing coil TRSCOAi (or BRSCOAi).

[0076] It should be understood that Figure 5 For the complementary pairs CP1-CP4 shown (where the coils in complementary pair CPi can be identical and aligned along the axial direction), the signal components (e.g., SIGTRSC1 and SIGBRSC1) in each complementary pair can be approximately balanced at the undeflected position UNDF shown. In accordance with the principles outlined previously, for a portion of the disruptor element 551 proximal to the complementary pair (e.g., CP1), for small displacements ΔZ (such as expected in operation), the net signal components (e.g., SIGTRSC1 and SIGBRSC1) can vary approximately linearly and opposite to each other. Thus, the sum of such signals for the complementary pair CPi can be nominally insensitive to ΔZ associated with the proximal portion of the disruptor element 551. Additionally, at Figure 5 In the illustrated embodiment, the perturbator element 551 may be parallel to the X and Y directions, such that within the operational motion range + / -Rx and + / -Ry, the Y direction displacement component does not change the rotating coil sensing overlap area TRSCOA3, BRSCOA3, and / or TRSCOA4 and BRSCOA4, and the X direction displacement component does not change the rotating coil sensing overlap area TRSCOA2, BRSCOA2, and / or TRSCOA1 and BRSCOA1. Thus, in one embodiment, the rotational displacement or position component ΔX in the X direction may be represented or correspond to the following signal relationship, ideally independent of ΔZ and / or ΔY:

[0077] ΔX=[(SIGTRSC3+SIGBRSC3)-(SIGTRSC4+SIGBRSC4)]÷

[0078] Function of [(SIGTRSC3+SIGBRSC3)+(SIGTRSC4+SIGBRSC4)]

[0079] (Equation 6)

[0080] Similarly, in one embodiment, the rotational displacement or position component ΔY along the Y direction may be represented by or correspond to the following signal relationship, ideally independent of ΔZ and / or ΔX:

[0081] ΔY=[(SIGTRSC2+SIGBRSC2)-(SIGTRSC1+SIGBRSC1)]÷

[0082] Function of [(SIGTRSC2+SIGBRSC2)+(SIGTRSC1+SIGBRSC1)]

[0083] (Equation 7)

[0084] These signal relationships are exemplary only and are not limiting. In various embodiments, if desired, the signal relationships may be adjusted or compensated for by additional calibration or signal processing operations, including operations to reduce the effects of geometry and / or signal cross-coupling between various displacement directions or signal components.

[0085] In some particularly advantageous embodiments, the receiver coil portion (e.g., 570) and the perturbator element (e.g., 551) are configured such that for any complementary pair CPi and any perturbator element displacement increment within the operating motion range + / -Rz, + / -Rx, and + / -Ry, the magnitude and sign of the change in the overlap area TRSCOAi and BRSCOAi associated with the perturbator element displacement increment are the same in the complementary pair. In some such embodiments, the receiver coil portion is configured such that each complementary pair CPi includes a top rotation sensing coil TRSCi and a bottom rotation sensing coil BRSCi, characterized in that the shapes of their interior areas are nominally coincident when projected along the axial direction. It can be seen that Figure 5 The specific embodiment of the probe position detection portion 511' shown conforms to this description. However, it should be understood that various configurations of complementary pairs may be used, and Figure 5 The particular configuration shown is exemplary only and is not limiting. Various alternative configurations are described below with reference to other figures.

[0086] In some particularly advantageous embodiments, the receiver coil portion (e.g., 570) and the perturbator element (e.g., 551) can be configured such that the perturbator element includes at least N straight sides, and for any corresponding complementary pair CPi, a corresponding one of the straight sides of the perturbator element intersects both the top rotation sensing coil TRSCi and the bottom rotation sensing coil BRSCi of the corresponding complementary pair. In some such embodiments, N=4 and the at least N straight sides include 4 sides arranged parallel to the sides of the rectangle or square. It can be seen that Figure 5 The specific embodiment of the probe position detection portion 511' shown conforms to this description. However, it should be understood that various combinations of complementary pair configurations and perturbator element edge configurations may be used, and Figure 5The particular configuration combinations shown are merely exemplary and not limiting. Various alternative combinations of configurations are described below with reference to other figures.

[0087] Figure 6 yes Figure 5 A partial schematic isometric view of certain elements of the probe position detection portion 511' shown, including connections CONN to a schematic representation of a block diagram of an exemplary embodiment of a signal processing and control circuit 680 according to the principles disclosed herein; Figure 6 As shown, the signal processing and control circuit 680 is operably connected to each coil of the probe position detection portion 511'. Figure 6 In the illustrated embodiment, the signal processing and control circuit 680 includes a digital controller / processor 681 that can control various timing and signal connection or switching operations between its various interconnected components, including a drive signal generator 682, an amplification / switching section 683, a sample and hold section 684, a multiplexing section 685, and an A / D converter section 686. The digital controller / processor 681 can also perform various digital signal processing operations to determine the output signals APSOut and RPSOut, as previously described with reference to Figure 2 680 . The design and operation of the signal processing and control circuit 680 are generally known and understood by those of ordinary skill in the art according to known principles. For example, in one embodiment, the various elements of the signal processing and control circuit 680 may be designed and operated similarly to the corresponding elements disclosed in U.S. Patent No. 5,841,274, the entire contents of which are incorporated herein by reference. Therefore, only a brief description of the operation of the illustrated signal processing and control circuit 680 is provided herein.

[0088] In operation, the drive signal generator 682 operates to provide a varying coil drive signal Dsig (e.g., pulses) to the field generating coil configuration 560, which generates a varying magnetic flux in the perturbator motion volume MV in response to the coil drive signal, generally in the axial direction. In the configuration shown, the top field generating coil 561T and the bottom field generating coil 561B are configured to provide varying magnetic flux that reinforce each other. The amplification / switching portion 683 is configured to input signals RSIG and ASIG from the receiver coil portion 570, including corresponding signal components provided by corresponding rotational and axial sensing coils located on the top and bottom coil substrates (e.g., the signal components SIGTASCC, SIGBASCC, SIGTRSC1-SIGTRSC4 and SIGBRSC1-SIGBRSC4 outlined above). In some embodiments, the amplification / switching portion 683 may include switching circuits that can combine various analog signals to provide various desired resultant signals or differential signals (e.g., by appropriate series or parallel connections, etc.), for example, as specified in the relationship shown in Equations 5-7, etc. However, in other embodiments, the amplification / switching portion 683 may perform only amplification and signal conditioning operations (and possibly signal inversion operations), with all signal combining operations being performed in other circuit portions.

[0089] The sample and hold section 684 inputs various analog signals from the amplification / switching section 683 and performs sample and hold operations according to known principles, for example, to simultaneously sample and hold all corresponding signal components from the corresponding sensing coils of the receiver coil section 570. In one embodiment, the multiplexing section 685 can connect the various signals to the A / D converter section 686 sequentially and / or in combination with respect to various desired signal relationships (e.g., as specified by the relationships shown in Equations 5-7, etc.). The A / D converter section 686 outputs corresponding digital signal values ​​to the digital controller / processor 681. The digital controller / processor 681 can then process and / or combine the digital signal values ​​according to various desired relationships (e.g., as specified by the relationships shown in Equations 5-7, etc.) to determine and output output signals APSOut and RPSOut, which indicate the axial position and rotational position of at least one of the perturbator element 551 or the probe 506 relative to the frame or housing of the scanning probe. In some embodiments, the digital controller / processor 681 can be configured so that the output signals APSOut and RPSOut directly indicate the three-dimensional position of the probe 506 or its contact portion 548 relative to the frame of the scanning probe. In other embodiments, it can be configured to output signals that indirectly indicate the three-dimensional position of the probe 506 or its contact portion 548 relative to the frame of the scanning probe, and the host system (e.g., CMM) outputs such signals and performs additional processing to further combine or refine such signals and determine the three-dimensional position of the probe 506 or its contact portion 548 relative to the scanning coordinates and / or relative to the global coordinate system used for CMM measurement.

[0090] It should be understood that for embodiments of the probe position detection portion (e.g., 511') according to the various principles disclosed and claimed herein, the signal components provided by the individual receiver coils of the receiver coil portion (e.g., 570) are particularly advantageous in that they eliminate or allow correction of certain signal errors and / or signal cross-coupling errors while using relatively fast and simple signal processing to provide a robust and highly accurate three-dimensional position indication.

[0091] One consideration with respect to using relatively fast and simple signal processing to provide a robust and highly accurate three-dimensional position indication is the linearity of the position or displacement signal components (or the linearity of certain combined signals, such as the Z signal relationship represented by Equation 5). It should be understood that signals or signal relationships that vary with displacement based on significant third-order and / or fifth-order signal variation contributions typically require more complex signal processing and / or compensation and / or calibration in order to provide an accurate displacement or position indication. The inventors have discovered that certain desired configurations may tend to suppress higher order signal variation contributions in the axial sensing coil signal component ASig, and / or combinations thereof. As one way of describing these ideal configurations, the sensing coils of the top and bottom axial sensing coil configurations TASCC and BASCC can be viewed as being positioned as "axial sensing coil area inscribed cylinders" that are defined as being concentric with the central axis CA and having a radius that satisfies such that the top and bottom axial sensing coils (e.g., Figure 5 The top and bottom axial sensing coil configurations shown are the minimum requirements for the sensing coils of TASCC and BASCC to fit in. The "disturbance inscribed cylinder" is defined as being concentric with the central axis CA and having a radius that is the maximum radius that can be inscribed within the edge of a perturbator element (e.g., perturbator element 551, etc.). In various embodiments, it may be desirable (but not required) that the radius of the perturbation inscribed cylinder be at least 1.1 times the radius of the inscribed cylinder in the axial sensing coil area. In some embodiments, it may be desirable (but not required) that the radius of the perturbation inscribed cylinder be at least 1.2 times or 1.5 times the radius of the inscribed cylinder in the axial sensing coil area.

[0092] Figures 7A-7E A "plan view" illustration (looking along the axial or Z direction) of a probe position detection portion component is shown, which shows a "4 complementary pairs" implementation of the probe position detection portion components, including receiver coil portions 770A-770E and perturbator elements 751A-751E, respectively, according to the principles disclosed herein. The components shown can be used in various implementations of the probe position detection portion according to the principles disclosed herein. The field generating coil is not in the Figures 7A-7E It is shown in the figure, but it should be understood that it is provided according to the principles disclosed previously. Figures 7A-7E The various components shown in FIG. 1 are similar or analogous to similarly numbered components in the previously described probe position detection portions 311, 411, 511, and / or 511' and can generally be understood in a similar manner thereto. Figures 7A-7E Certain unique or important features of the "4 complementary pairs" implementation included in.

[0093] Fig. 7AAn embodiment of a receiver coil portion 770A and a perturbator element 751A is shown which is similar to those previously described with reference to the probe position detection portion 511' and will be understood in a similar manner. In addition to showing circular top and bottom axial sensing coil configurations TASCC and BASCC similar to those previously described with reference to the probe position detection portion 511', Fig. 7A Also shown are alternative square top and bottom axial sensing coil configurations TASCC' and BASCC', which are shown in dashed lines. More generally, it should be understood that any desired shapes may be used for the top and bottom axial sensing coil configurations so long as they are configured to provide the desired operation according to the various principles disclosed and / or claimed herein.

[0094] It may be noted that the shape of the perturbator element 751A includes "trimmed corners" for compactness. It will be appreciated that in order to satisfy the principles disclosed previously herein, wherein the magnitude of the variation in the overlap regions TRSCOAi and BRSCOAi associated with the perturbator displacement increments is nominally the same in any of the complementary pairs shown, the ranges of operational motion + / -Rx and + / -Ry along the orthogonal X and Y directions may be specified or designated to not extend beyond the straight edge portions transverse to each complementary pair in order to satisfy this principle.

[0095] Figure 7B An embodiment of a receiver coil portion 770B and a perturbator element 751B is shown, which is similar to the previously described embodiment of the present invention. Fig. 7A Those described, except that the complementary pairs CP1-CP4 in the receiver coil portion 770B include larger rotational sensing coils that overlap the sensing coils of the top and bottom axial sensing coil configurations TASCC and BASCC, which is not prohibited according to the various principles disclosed herein. To manufacture such a configuration, the rotational and axial sensing coils can be manufactured, for example, on corresponding layers of a multi-layer printed circuit board.

[0096] Figure 7C An embodiment of a receiver coil portion 770C and a perturbator element 751C is shown, similar to that previously described with reference to Figure 7BThose described, except that the top and bottom axial sensing coil configurations TASCC and BASCC are not provided by axial sensing coils separate from the individual rotational sensing coils TRSCi and BRSCi. Instead, it should be understood that the top axial sensing coil configuration TASCC includes a combination of N (N=4) top rotational sensing coils TRSC1-TRSC4, wherein the top axial sensing overlap area TASOA includes the sum of the individual overlap areas TRSCOAi associated with the N top rotational sensing coils. It can be observed that due to the similar shapes of the N top rotational sensing coils TRSC1-TRSC4, and the overlap of the two pairs of parallel sides of the perturbator element, any overlap area lost in the overlap area TRSCOA1 due to the displacement increment of the perturbator element 751C is gained in the overlap area TRSCOA2, and vice versa. Similarly, any overlap area lost in the overlap area TRSCOA3 is gained from the overlap area TRSCOA4, and vice versa. Therefore, the sum of the overlap regions TRSCOAi remains constant or independent of the position of the perturbator element 751C within the operating motion range + / -Rz, + / -Rx and + / -Ry, even though the individual overlap regions TRSCOAi that make up it vary depending on the position of the perturbator element 751C. Similarly, the bottom axial sensing coil configuration BASCC includes a combination of N (N=4) bottom rotation sensing coils BRSC1-BRSC4, wherein the bottom axial sensing overlap area BASOA includes a combination of individual overlap regions BRSCOAi associated with the N bottom rotation sensing coils. This sum of the overlap regions BRSCOAi remains constant or independent of the position of the perturbator element 751C within the operating motion range + / -Rz, + / -Rx and + / -Ry, even though the individual overlap regions BRSCOAi that make up it vary depending on the position of the perturbator element 751C. Therefore, although it is different from the previously described configuration, Figure 7C The embodiment shown in provides a configuration according to the general principles disclosed herein, wherein the receiver coil portion 770C and the disturber element 751C are configured to provide a top axial sensing overlap area TASOA and a bottom axial sensing overlap area BASOA, wherein the amount of each of the overlap areas TASOA and BASOA is constant, or independent of the position of the disturber element within the operating motion range of + / -Rz, + / -Rx, and + / -Ry.

[0097] Fig.7D An embodiment of a receiver coil portion 770D and a perturbator element 751D is shown, which operates in a manner similar to that previously described with reference to Figure 7CAs described, wherein the axial sensing coil configurations TASCC and BASCC are not provided by axial sensing coils separate from the individual rotation sensing coils TRSCi and BRSCi. Alternatively, it should be understood that the top and bottom axial sensing coil configurations TASCC and BASCC include corresponding combinations of N (N=4) top and bottom rotation sensing coils TRSC1-TRSC4 and BRSC1-BRSC4, wherein the top axial sensing overlap area TASOA includes the sum of the individual overlap areas TRSCOAi associated with the N top rotation sensing coils, and the bottom axial sensing overlap area BASOA includes the combination of the individual overlap areas BRSCOAi associated with the N bottom rotation sensing coils. Similar to Figure 7C In the configuration shown, the sum of the overlap regions TRSCOAi is constant or independent of the position of the perturbator element 751D within the operating range of motion + / -Rz, + / -Rx, and + / -Ry, even though the individual overlap regions TRSCOAi that make it up vary depending on the position of the perturbator element 751D, and the sum of the overlap regions BRSCOAi is constant or independent of the position of the perturbator element 751D within the operating range of motion + / -Rz, + / -Rx, and + / -Ry, even though the individual overlap regions BRSCOAi that make it up vary depending on the position of the perturbator element 751D. Therefore, although it is different from the configuration described previously, Fig.7D The embodiment shown in provides a configuration according to the general principles disclosed herein, wherein the receiver coil portion 770D and the perturbator element 751D are configured to provide a top axial sensing overlap area TASOA and a bottom axial sensing overlap area BASOA, wherein the amount of each of the overlap areas TASOA and BASOA is constant or independent of the position of the perturbator element within the operating range of motion + / -Rz, + / -Rx, and + / -Ry. Due to the illustrated shape of the perturbator element 751D, it should be understood that in order to meet the principles previously disclosed herein, wherein the magnitude of the change in the overlap areas TRSCOAi and BRSCOAi associated with the perturbator displacement increment is nominally the same in any illustrated complementary pair, the operating range of motion + / -Rx and + / -Ry along the orthogonal X and Y directions can be specified or designated such that no corner of the perturbator element 751D moves from its illustrated position to an extent that it crosses the boundary of the sensing coils of any complementary pair CP1-CP4.

[0098] Fig. 7E shows a similar Fig. 7A(or probe position detection portion 511'), except that the top and bottom rotational sensing coils of each complementary pair are rotated relative to each other about the central axis by an angle of 2*NAA, where NAA is the "misalignment angle". However, as the misalignment angle NAA increases, this embodiment becomes increasingly disadvantageous compared to the previously outlined configuration in which the top and bottom rotational sensing coils of each complementary pair CPi are aligned along the axial direction. The reason why it becomes increasingly disadvantageous is that the operating gap (e.g., operating gap OG, in Figure 3 The sum of its signals may not be ideally independent of the axial displacement ΔZ, as previously outlined with reference to Equation 6. However, according to the various principles disclosed herein, Fig. 7E The configurations shown in and outlined above are also not prohibited. It should be understood that such configurations can still satisfy the most basic principles disclosed and claimed herein and provide signal components that at least partially retain the various advantages outlined above compared to previously known inductive sensor configurations. Fig. 7E In one embodiment of the configuration shown in , the receiver coil portion 770E is configured such that each complementary pair CPi includes a top rotation sensing coil TRSCi and a bottom rotation sensing coil BRSCi, characterized in that if the shape of one of them is rotated around the central axis to coincide with the angular position of the other around the central axis (e.g., angle 2*NAA) and then projected along the axial direction, the shapes of their inner regions will nominally coincide. In various embodiments, the receiver coil portion 770E and the perturbator element 751E can be configured such that the perturbator element 751E includes at least N straight sides (e.g., N=4), and for any corresponding complementary pair CPi (e.g., CP1-CP4), a corresponding one of the straight sides of the perturbator element 751E intersects the top rotation sensing coil TRSCi and the bottom rotation sensing coil BRSCi of the corresponding complementary pair CPi. In such an embodiment where N=4, the at least N straight sides of the perturbator element 751E include 4 sides that are arranged parallel to the sides of a rectangle or square.

[0099] Figures 8A-8FA "plan view" illustration (looking in the axial or Z direction) of a "3 (or 6) complementary pairs" embodiment of probe position detection portion components is shown, according to the principles disclosed herein, including receiver coil portions 870A-870F and perturbator elements 851A-851F, respectively. The components shown can be used in various embodiments of the probe position detection portion according to the principles disclosed herein. The field generating coil is not in the Figures 8A-8F , but should be understood to be provided according to the principles previously disclosed. Figures 8A-8F The various elements shown in the "3 (or 6) complementary pairs" configuration shown in some of the previous references are similar or similar to Figures 7A-7E The corresponding elements shown in the corresponding "4 complementary pairs" configuration described above are generally understood in a similar manner. Therefore, only the following description Figures 8A-8F Certain unique or important features of the "3 complementary pairs" implementation included in.

[0100] Figures 8A-8C is a "3-complementary pair", which is similar to the corresponding Figures 7A-7C Based on the following additional description, it can be generally described by their corresponding configurations (e.g., Fig. 8A The corresponding Fig. 7A , etc.) to understand them.

[0101] The 4 complementary pairs oriented at 90 degrees to each other as previously described (e.g. Fig. 7A By comparing the above (shown in FIG. 1 ), it can be appreciated that using 3 complementary pairs oriented at 120 degrees to each other, any displacement increment or position of the perturbator element (e.g., 851A) is easily obtained by the following considerations: Figures 8A-8F , VC1, VC2, and VC3, as shown in the figures, just as they are characterized by the displacement or position vector components or coordinates oriented along the X and Y axis directions shown in the various figures herein. Methods for converting vector components from one coordinate system to another are well known and therefore need not be discussed in detail herein. Based on this, it can be understood that Figures 8A-8C The complementary pairs CPi shown in are configured according to the same principles outlined in the previous description of complementary pairs, and their respective overlapping areas indicate the displacement or position of the perturbator elements along their corresponding vector component directions VC1, VC2 and VC3. Fig. 8A The representative overlap regions TRSCOA1 and BRSCOA1 shown in FIG. 1 produce associated signal components SIGTRSC1 and SIGBRSC1 in accordance with the principles outlined previously, which indicate the displacement or position of the perturbator element along the corresponding vector component direction VC1, etc. Figures 8A-8C and Fig. 8EIn the embodiment shown, in one embodiment, the rotational displacement or position component ΔVC1 in the VC1 direction may be indicated by or correspond to the following signal relationship, which is nominally independent of ΔZ according to the principle of comparable complementary pairs outlined previously:

[0102] ΔVC1=[(SIGTRSC1+SIGBRSC1)-(SIGTRSC1 UNDF +SIGBRSC1 UNDF ] is a function of (Equation 8)

[0103] where SIGTRSC1 UNDF and SIGBRSC1 UNDF is the reference signal value generated by the overlapping regions TRSCOA1 and BRSCOA1, which corresponds to the undeflected position UNDF of the perturbator element (eg, 851A, etc.).

[0104] Similarly, the rotational displacement or position component ΔVC2 in the VC2 direction and ΔVC3 in the VC3 direction may be indicated by or correspond to the following signal relationship:

[0105] ΔVC2=[(SIGTRSC2+SIGBRSC2)-(SIGTRSC2 UNDF +SIGBRSC2 UNDF ] function (Equation 9)

[0106] ΔVC3=[(SIGTRSC3+SIGBRSC3)-(SIGTRSC3 UNDF +SIGBRSC3 UNDF ] function (Equation 10)

[0107] It should be understood that Figures 8A-8C The axial sensing coil configurations TASCC and BASCC shown in are substantially the same as those previously described herein with reference to their corresponding configurations, and can be determined based on the same types of signal components and signal relationships. The signal relationships outlined above are exemplary only and not limiting. In various embodiments, if desired, the signal relationships can be adjusted or compensated by additional calibration or signal processing operations, including operations to reduce the effects of geometry and / or signal cross-coupling between various displacement directions or signal components.

[0108] Fig.8D shows a similar Fig. 8AThe embodiment of the receiver coil portion 870D and the perturbator element 851D described above differs in that additional complementary pairs CP4-CP6 are provided, which are symmetrically arranged across the central axis from the complementary pairs CP1-CP3 to provide a total of 6 complementary pairs. In particular, CP1 and CP4 are oriented opposite to each other along the VC1 direction, CP2 and CP5 are oriented opposite to each other along the VC2 direction, and CP3 and CP6 are oriented opposite to each other along the VC3 direction. These opposing pairs are similar to Figures 7A-7D oriented along the X and Y axis directions. Such a configuration does not require reliance on the reference signal values ​​used in equations 8-10 (e.g., SIGTRSC1 UNDF , etc.). Therefore, such a configuration can be more robust and accurate (e.g., inherently compensate for signal drift due to various reasons, etc.). Fig.8D In the embodiment shown, in one embodiment, the rotational displacement or position component ΔVC1 in the VC1 direction may be indicated by or correspond to the following signal relationship, which is nominally independent of ΔZ according to the principle of comparable complementary pairs outlined previously:

[0109] ΔX=[(SIGTRSC1+SIGBRSC1)-(SIGTRSC4+SIGBRSC4)]÷

[0110] Function of [(SIGTRSC1+SIGBRSC1)+(SIGTRSC4+SIGBRSC4)]

[0111] (Equation 11)

[0112] ΔVC2=[(SIGTRSC2+SIGBRSC2)-(SIGTRSC5+SIGBRSC5)]÷

[0113] Function of [(SIGTRSC2+SIGBRSC2)+(SIGTRSC5+SIGBRSC5)]

[0114] (Equation 12)

[0115] ΔVC3=[(SIGTRSC3+SIGBRSC3)-(SIGTRSC6+SIGBRSC6)]÷

[0116] Function of [(SIGTRSC3+SIGBRSC3)+(SIGTRSC6+SIGBRSC6)]

[0117] (Equation 13)

[0118] It should be understood that Figure 8B and 8CThe "3 complementary pairs" embodiment shown can be similarly adapted to include 6 complementary pairs and use similar signal processing with similar benefits.

[0119] Fig. 8E shows a similar Fig. 7E The receiver coil portion 870E and the perturbator element 851E described herein are implemented in combination with Figures 8A-8C The foregoing description can usually be understood by analogy with this description. To briefly explain this description, Fig. 8E In the embodiment, the top and bottom rotation sensing coils of each complementary pair CPi are rotated relative to each other about the central axis by an angle of 2*NAA, where NAA is the "misalignment angle". As the misalignment angle NAA increases, this embodiment becomes increasingly disadvantageous compared to the previously outlined configuration (in which the top and bottom rotation sensing coils of each complementary pair CPi are aligned along the axial direction), as previously described with reference to Fig. 7E As described, where it is interpreted that the sum of the signals from the complementary pairs may not be ideally independent of the axial displacement ΔZ, as previously outlined with reference to Equation 6. However, according to the various principles disclosed herein, Fig. 8E It should be appreciated that such a configuration may still satisfy the most basic principles disclosed and claimed herein and provide a signal component that at least partially retains the various advantages outlined above compared to previously known inductive sensor configurations.

[0120] Figure 8F An embodiment of a receiver coil portion 870F and a perturbator element 851F is shown in which the complementary pair CPi of sensing coils has the same complementary pair as previously described (e.g., Fig. 8A The sensing coils are configured differently as shown in FIG. 1 , except that they are symmetrically positioned relative to each other across the central axis. Thus, they may be characterized similarly to the complementary pairs described previously in that for at least one complementary pair CPi and any perturber element displacement increment within the operating motion range + / -Rz, + / -Rx, and + / -Ry, the magnitude of the change in the overlap regions TRSCOAi and BRSCOAi associated with the perturber displacement increment is the same in the complementary pair. Additionally, in Figure 8F In the illustrated embodiment, the receiver coil portion is similar to some complementary pair configurations previously described herein, wherein each complementary pair CPi includes a top rotating sensing coil TRSCi and a bottom rotating sensing coil BRSCi, characterized in that if the shape of one of them is rotated around a central axis by an offset angle (e.g., 180 degrees) to coincide with the angular position of the other around the central axis and then projected along the axial direction, the shapes of their internal areas will nominally coincide.

[0121] However, in contrast to the complementary pairs described previously, the signs of the changes in the overlap regions TRSCOAi and BRSCOAi associated with the perturbator displacement increments are similar to Figure 8F Such an embodiment may have certain disadvantages compared to an embodiment in which the sign of the change in the overlap region TRSCOAi and BRSCOAi associated with the perturbator displacement increment is the same in each complementary pair. However, according to various principles disclosed herein, Figure 8F The configuration shown in is not prohibited. With appropriate signal processing, such an embodiment may still provide certain advantages for use in a scanning probe compared to known inductive sensing configurations. The signal processing may need to be more complex than required for the embodiments previously described herein (e.g., using more complex signal components to indicate various displacement or position vector components) in order to correct or compensate for various cross-coupling effects, etc. However, for the receiver coil portion 870F, such effects can generally be compensated based on known geometric and / or signal relationship constraints and the fact that the amplitude of the change in the overlap area for a given displacement of the perturbator element 851F is the same in each complementary pair of sensor coils. For example, in Figure 8F In the embodiment shown in , the perturbator element 851F includes 3 pairs of parallel straight sides (e.g., arranged parallel to the sides of a regular hexagon), and for any corresponding complementary pair CPi, the first of a pair of parallel straight sides intersects the top rotating sensing coil TRSCi, and the second of the pair of parallel straight sides intersects the bottom rotating sensing coil BRSCi of the corresponding complementary pair. Based on the rigid body translation and rotation characteristics of the perturbator element 851F, the corresponding overlap area and local operating gap of each sensing coil contained in the receiver coil portion 870F are constrained with known relationships to each other, which known relationships can be used to determine the precise displacement vector in the signal processing of the signal components provided by the receiver coil portion 870F.

[0122] It should be understood that Figures 7A-7E and Figures 8A-8F The variations shown indicate the possibility of further rearranging and / or adjusting the configuration and combination of the various elements in the probe position detection portion in accordance with the various principles disclosed and claimed herein, while retaining many or all of the advantages previously outlined associated with these principles. In general, it will be understood that the various embodiments disclosed herein are exemplary only and not restrictive.

[0123] Fig. 9A and 9B An alternative configuration of the probe position detection portion 911 is shown, which may be used, for example, Figure 2 The scanning probe 300 is used as the probe position detection part 311. Figure 3 In the embodiment of the present invention, the probe position detection part 411 is replaced. Figure 4 In the embodiment of the present invention, the probe position detection part 511 is replaced, and so on. The sensing component is Fig. 9B The probe position detection portion 911 uses an inductive sensing principle and includes a coil plate configuration 990 having a receiver coil portion 970 and a field generating coil configuration 960 (which is shown as including a transmitter coil), and a perturbator configuration 950 (which is shown as including a first and a second perturbator element 951. The receiver coil portion 970 may include a rotational sensing coil portion (also referred to as a rotational sensing coil) RSC and an axial sensing coil configuration ASCC. In short, the moving perturbator element 951 (or more generally, the perturbator configuration 950) causes position-related changes in the changing magnetic field generated by the field generating coil configuration 960. The receiver coil portion 970 responds to the changing magnetic field and the changes caused therein by the perturbator element 951.

[0124] The coil plate configuration 990 includes a first plate portion 992, which includes N top rotating sensing coil portions (as shown, TRSC1 to TRSC4, in this example, N=4) and a top axial sensing coil configuration (as shown, TASCC), and the coil plate configuration 990 also includes a second plate portion 994, which includes N bottom rotating sensing coil portions (as shown, BRSC1 to BRSC4, in this example, N=4) and a bottom axial sensing coil configuration (as shown, BASCC). The coil plate configuration 990 also includes a center plate portion 996 located between the first plate portion 992 and the second plate portion 994. The center plate portion 996 includes at least a first field generating coil configuration 960 (as shown, including a transmitter coil 961). The coil plate configuration 990 is mounted to the frame of the scanning probe in a fixed relationship (see Figure 2 The scanning probe 300 and Figure 4 The second plate portion 994 of the coil plate configuration 990 is closer to the probe suspension portion 307 / 407 (see Figure 2 and Figure 3 ). The first plate portion 992, the second plate portion 994 and the center plate portion 996 of the coil plate configuration 990 are nominally parallel to each other and nominally orthogonal to the scanning probe 300 (see Figure 2 )'s central axis CA (see Figure 3 ). The coil board configuration 990 may, for example, include a double-sided substrate or printed circuit board with coils fabricated as printed conductors in layers of the substrate or printed circuit board, independent coils fastened to the substrate or printed circuit board, etc., and / or various combinations thereof.

[0125] In various embodiments, the perturbator elements 951 of the perturbator configuration 950 each include at least one of a conductive plate or a conductive loop providing a perturbator area, and the perturbator elements 951 are arranged along a central axis CA (see Figure 3 ) are positioned in a perturbator motion volume that extends on opposite sides of the coil plate arrangement 990. The perturbator element 951 is coupled to the probe suspension portion 307 / 407 in a fixed relationship relative to each other by a coupling arrangement 953 (see Figure 2 and Figure 3 ), the coupling arrangement 953 includes a mobile member 912 (e.g., similar to Figure 3 The perturbator element 951 is responsive to the deflection of the probe suspension portion 307 / 407 (see Figure 2 and 3 ) moves in the perturbator motion volume relative to the undeflected position, the perturbator element moves in the axial direction within an operating motion range of + / -Rz in response to axial motion, and moves in the orthogonal X and Y directions orthogonal to the axial direction within a corresponding operating motion range of + / -Rx and + / -Ry in response to rotational motion. The projection of the coil area of ​​the first field generating coil 961 in the axial direction includes the conductive plate or loop providing the perturbator area and the coil areas of all the rotational and axial sensing coils located on the coil plate configuration 990. The field generating coil configuration 960 generates a changing magnetic flux in the perturbator motion volume generally along the axial direction in response to the coil drive signal.

[0126] Fig.10 is similar to Fig. 9A and 9B 1 is a partial schematic isometric view of an embodiment of a probe position detection portion 911' of a probe position detection portion 1011 shown in FIG. 1 , which emphasizes certain aspects of the principles disclosed herein. In general, the probe position detection portion 1011 includes Figure 2 , 3 , 4, 9A and 9B, and will be understood to operate similarly unless otherwise noted below. The configuration of the probe position detection portion 1011 can be used, for example, Figure 2 The scanning probe 300 is used as the probe position detection part 311. Figure 3 In the embodiment of the present invention, the probe position detection part 411 is replaced. Figure 4 In the embodiment of the present invention, the probe position detection part 511 is replaced. Fig. 9A and 9B In the embodiment of the present invention, the probe position detection part 911 is replaced, and so on.

[0127] exist Fig.10In the illustrated embodiment, the probe position detection portion 1011 includes a coil plate configuration portion 1090 and a perturbator configuration 1050. The coil plate configuration portion 1090 includes top and bottom receiver coil plate portions 1070T, 1070B, and a field generating coil plate portion 1060 is located between the top receiver coil plate portion 1070T and the receiver coil plate portion 1070B. In various embodiments, the top and bottom receiver coil plate portions 1070T, 1070B may also be referred to as first and second plate portions 1070T, 1070B, and the field generating coil plate portion 1060 may also be referred to as a center plate portion 1060. The perturbator configuration 1050 includes perturbator elements 1051T, 1051B or scales. In various embodiments, the perturbator elements 1051T, 1051B may also be referred to as first and second perturbator elements 1051T, 1051B.

[0128] In various embodiments, the perturbator elements 1051T, 1051B (or more generally, the perturbator configuration 1050) may each include at least one of: a conductive plate or conductive loop, or parallel conductive plates or conductive loops (e.g., as fabricated on both sides of a printed circuit board, patterned by printed circuit board manufacturing techniques) or any other desired operational configuration that provides a perturbator area (e.g., an interior area thereof). Fig.10 As shown, the perturbator elements 1051T and 1051B each include a conductive plate. The perturbator elements 1051T and 1051B are positioned along the central axis CA in the perturbator motion volume MV (which extends on opposite sides of the coil plate configuration 1090) and are connected by a coupling configuration (e.g., at least including a conductive plate similar to Figure 3 The upper portion of the moving member 1012 of the moving member 412) is coupled to the probe suspension portion 1007. For the purpose of explanation, the perturbator elements 1051T, 1051B are responsive to the probe suspension portion 1007 and / or the probe 1006 and / or the moving member 1012 (e.g., which may be coupled to the probe suspension portion 1007). Figure 3 The deflection of the probe suspension portion 407, the probe 406 and the moving member 412 (similar or identical) relative to Fig.10 The unbiased position shown (e.g., similar to Figure 3 The perturbator elements 1051T, 1051B can be described as moving in response to axial motion by displacement increments ΔZ in the axial direction within an operating motion range + / -Rz, and in response to rotational motion by respective displacement increments ΔX and ΔY in orthogonal X and Y directions orthogonal to the axial direction (Z direction) within a respective operating motion range + / -Rx.

[0129] The top receiver coil plate portion 1070T includes N top rotational sensing coils TRSC (e.g., TRSC1-TRSC4 as shown, where N=4), and a top axial sensing coil configuration TASCC (e.g., in this embodiment, including a single separate coil as shown), and the top receiver coil plate portion 1070B includes N bottom rotational sensing coils BRSC (e.g., BRSC1-BRSC4 as shown, where N=4), and a bottom axial sensing coil configuration BASCC (e.g., in this embodiment, including a single separate coil as shown).

[0130] The coil plate arrangement 1090 is mounted in a fixed relationship to a frame of a scanning probe (e.g., Figure 4 The bottom receiver coil plate portion 1070B is closer to the probe 1006 and / or the probe suspension portion 1007. Fig.10 The various sensing coils shown, all of which include at least one of the following: a winding or conductor having a first and a second connection end (e.g., Figure 6 1051B), they are configured to operate as one or more inductively coupled "turns". As shown, the top and bottom axial sensing coil configurations TASCC and BASCC, and the top and bottom rotational sensing coil configurations TRSC and BRSC, are nominally symmetrically spaced relative to the corresponding portions of the perturbator configuration 1050 and perturbator elements 1051T, 1051B. Other configurations are also possible (e.g., in some embodiments, the rotational sensing coil configurations TRSC and BRSC may not be nominally centered relative to the perturbator configuration 1050).

[0131] The field generating coil plate portion 1060 generally includes at least a first field generating coil 1061 and is located between the top receiver coil plate portion 1070T and the bottom receiver coil plate portion 1070B. Fig.10 As shown, at least the first generating coil comprises a single field generating coil 1061 having an area greater than the area of ​​the perturbator elements 1051T, 1051B. The top receiver coil plate portion 1070T, the field generating coil plate portion 1060 and the bottom receiver coil plate portion 1070B are nominally flat, nominally parallel to each other and nominally orthogonal to the central axis CA.

[0132] exist Figure 3 , 4 In the embodiments shown in and 5, the perturbator element is located within the field generating coil element (e.g., Figure 4 The disturber element 551 is mounted in the field generating coil 561, and the area of ​​the disturber element is smaller than the area of ​​the field generating coil element. Fig. 9A , 9BIn the illustrated embodiments of FIGS. 10 and 10 , the perturbator elements are positioned parallel to the field generating coil elements (eg, perturbator elements 1051T, 1051B are positioned above and below the field generating coil 1061). Fig. 9A , 9B The configuration of 10 provides greater flexibility with respect to the relative sizes of the perturbator element and the field coil element. In addition, utilizing a single printed circuit board (e.g., where the first board portion, the second board portion, and the center board portion may comprise portions of a single multi-layer printed circuit board) may reduce cost and complexity relative to configurations utilizing multiple printed circuit boards.

[0133] Fig.11 is similar to Fig.10 1011 ' of an alternative embodiment of the probe position detection portion 1111 shown in FIG. 1011 , which emphasizes certain aspects of the principles disclosed herein. In general, the probe position detection portion 1111 includes Fig.10 The components of the probe position detection portion 1011 are similar to certain components and will be understood to operate similarly unless otherwise stated below. The configuration of the probe position detection portion 1111 can be used, for example, Figure 2 The scanning probe 300 is used as the probe position detection part 311. Figure 3 In the embodiment of the present invention, the probe position detection part 411 is replaced. Figure 4 In the embodiment of the present invention, the probe position detection part 511 is replaced. Fig. 9A and 9B In the embodiment of the present invention, the probe position detection part 911 is replaced. Fig.10 In the embodiment of the present invention, the probe position detection part 1011 is replaced, and so on.

[0134] exist Fig.11 In the illustrated embodiment, the probe position detection portion 1111 includes a coil plate configuration portion 1190 and a perturbator configuration 1150. The coil plate configuration portion 1190 includes top and bottom receiver coil plate portions 1170T, 1170B, and the field generating coil plate portion 1160 is located between the top receiver coil plate portion 1170T and the receiver coil plate portion 1170B. In various embodiments, the top and bottom receiver coil plate portions 1170T, 1170B may also be referred to as first and second plate portions 1170T, 1170B, and the field generating coil plate portion 1160 may also be referred to as a center plate portion 1160. The perturbator configuration 1150 includes perturbator elements 1151T, 1151B or scales. In various embodiments, the perturbator elements 1151T, 1151B may also be referred to as first and second perturbator elements 1151T, 1151B. The top and bottom receiver coil plate portions 1170T, 1170B as shown are substantially similar to Fig.10 The corresponding top and bottom receiver coil plate portions 1070T, 1070B (in Fig.11 ). More details of the conductive vias and pads are shown in ).

[0135] In various embodiments, the perturbator elements 1151T, 1151B (or more generally, the perturbator configuration 1150) may each include at least one of: a conductive plate or conductive loop, or parallel conductive plates or conductive loops (e.g., as fabricated on both sides of a printed circuit board, patterned by printed circuit board manufacturing techniques) or any other desired operational configuration that provides a perturbator area (e.g., an interior area thereof). In various embodiments, the configuration with conductive loops may include at least one of concentric loops, spiral patterns, etc. As Fig.11 As shown, the perturbators 1151T and 1151B each include multiple concentric conductive loops 1153, instead of Fig.10 The conductive plate used in the illustrated embodiment. The perturbator elements 1151T and 1151B are positioned along the central axis CA in the perturbator motion volume MV, which is on the opposite side of the coil plate configuration 1190 and can be referred to above. Fig.10 The probe suspension is connected to the probe in a similar manner as discussed above (see Fig.10 The probe suspension portion 1007).

[0136] The field generating coil plate portion 1160 typically includes at least a first field generating coil. As shown, the field generating coil plate portion 1160 includes a top field generating coil portion 1161T and a bottom field generating coil portion 1161B, which are located between the top receiver coil plate portion 1170T and the bottom receiver coil plate portion 1170B. The top receiver coil plate portion 1170T, the field generating coil plate portion 1160, and the bottom receiver coil plate portion 1170B are nominally flat, nominally parallel to each other and nominally orthogonal to the central axis CA. Fig.11 In an example embodiment, the field generating coil plate portion 1160 includes a multi-turn field generating coil (having two turns), and wherein two corresponding field generating coil portions 1161T and 1161B are connected by a through hole and are positioned approximately equidistant from the midplane of the perturbator motion volume along the central axis, and are nominally flat and orthogonal to the central axis.

[0137] like Fig.11As shown, the area of ​​the top field generating coil portion 1161T and the bottom field generating coil portion 1161B is smaller than the area of ​​the perturbator elements 1151T, 1151B. Using a field generating coil having an area smaller than the area of ​​the perturbator element helps to reduce the sensitivity of the probe position detection portion 1111 to the size of the perturbator element or scale. Using a conductive loop (e.g., concentric loops, spiral patterns, etc.) instead of a conductive plate or a single conductive loop in the perturbator element also helps to reduce the sensitivity of the probe position detection portion 1111 to the size of the perturbator element or scale while maintaining good X and Y position signal strength. Reducing the sensitivity of the probe portion to the perturbator element or scale can help to increase the accuracy of the measurement and can reduce the processing costs associated with generating the results in the desired output format.

[0138] In some embodiments, because the receiver coils (e.g., coils BRSC1-BRSC4, TRSC1-TRSC4) are in close proximity to the transmitter (e.g., coils 1161T, 1161B), unconnected vias / pads may be added to balance out offsets that may be created by connecting traces (e.g., for transmitter and receiver leads) or other components. As an illustrative example, in Fig.11 In embodiments, certain connected vias / pads / leads (e.g., connected to and / or as part of an electronic circuit or configuration) are shown within coil BRSC3 / TRSC3 (e.g., for connecting traces) that have no symmetrically connected counterparts (e.g., symmetrical about a center axis) within symmetrical coil BRSC4 / TRSC4 (e.g., within Fig.11 In the example configuration of FIG. 5 , five such through holes and upper and lower transmitter leads are shown within coil BRSC3 / TRSC3, including three through holes for connection of the axial sensing coil configurations TASCC, BASCC, and for connection of the normalizing coil R N1161B, and upper and lower transmitter leads for field generating coil portions 1161T, 1161B). In some embodiments, such traces / vias / pads / leads can reduce magnetic fields entering the receiver coil, which can cause signal offsets if not compensated. In some embodiments, these offsets can be addressed by mirroring these features with unconnected vias / pads / leads within a symmetrical receiver coil (e.g., on opposite sides of the center axis). For example, in one embodiment, unconnected vias / pads / leads can be added within coil BRSC4 / TRSC4, each of which can be mirrored / symmetrical with a corresponding connected via / pad / lead within coil BRSC3 / TRSC3 (e.g., five unconnected vias and upper and lower pads can be added within coil BRSC4 / TRSC4, each of which is symmetrical / mirrored with the corresponding connected via / pad / lead shown within coil BRSC3 / TRSC3).

[0139] As a specific illustrative example of this concept, in Fig.11 For connecting the normalized coil R N The through hole is designated as the electrically connected through hole VIA1C and is shown as being within the coil BRSC3 / TRSC3. Based on the above principles, the unconnected through hole VIA1D can be included within the coil BRSC4 / TRSC4, which is symmetrical / mirrored with respect to the corresponding connected through hole shown within the coil BRSC3 / TRSC3 (e.g., symmetrical and mirrored with respect to the central axis of the configuration). More specifically, the position of the through hole VIA1D within the BRSC4 / TRSC4 is symmetrical / mirrored with respect to the position of the through hole VIA1C within the coil BRSC3 / TRSC3 (e.g., such that a straight line between the position of the through hole VIA1C and the position of the through hole VIA1D will pass through the central axis of the configuration, and each position is equidistant from the central axis). The through hole VIA1D can balance the offset that the through hole VIA1C may produce as described above. More specifically, the unconnected element VIA1D is located within the rotation sensing coil BRSC4 / TRSC4 and is symmetrically opposite (i.e., relative to the center axis and / or axial direction) to a similar electrically connected element VIA1C located within the rotation sensing coil BRSC3 / TRSC3, and wherein the unconnected element VIA1D reduces a signal offset caused by the presence of the connected element VIA1C in the rotation sensing coil BRSC3 / TRSC3, which signal offset may otherwise result in signal components provided by the rotation sensing coils BRSC3 / TRSC3 and BRSC4 / TRSC4.

[0140] exist Fig.11 In the embodiment, for connecting the normalizing coil R NThe through hole VIA1C of the portion is shown close to the through hole for connecting the axial sensing coil configuration TASCC, BASCC. Normalized coil R N The upper portion includes an upper portion and a lower portion, wherein the upper portion is straight and extends radially and is connected to the lower portion through a through hole VIA1C, and the lower portion is also straight and extends radially (wherein the lower portion is located directly below the upper portion, but for the sake of simplicity of description, due to the obstruction of other components, Fig.11 In various embodiments, the normalized coil R N Used to provide a measurement of the transmitter field (e.g., corresponding to the changing magnetic flux generated by the field generating coil configuration 1160), wherein the measured signal can be relatively independent of (e.g., can be only nominally affected by) the position of the perturbator elements 1151T, 1151B. In various embodiments, the position measurements can be scaled to the measured signals so that they are relatively insensitive to changes in transmitter amplitude (from the field generating coil configuration 1160). In various embodiments, such processing can be performed by signal processing and control circuitry (e.g., Figure 2 signal processing and control circuit 380).

[0141] refer to Fig. 9A , 9B , 10 and 11, with reference to the above Figure 2-8F In a similar manner, the rotation sensing coil portion RSC (as shown, TRSC1 to TRSC4 and BRSC1 to BRSC4) outputs at least first and second rotation signal components RSig through corresponding signal lines, which indicate the probe coupling portion 342 (see Figure 2 ) of the probe coupling portion (e.g., X and Y position signals), and the axial sensing coil configuration ASCC (as shown, TASCC and BASCC) outputs one or more signal components ASig through corresponding signal lines, which indicate the axial position of the probe coupling portion (e.g., Z position signal). In various embodiments, the signal processing and control circuit 380 (see Figure 2 ) receives the rotational signal component RSig and the axial signal component ASig, and may perform various levels of related signal processing in various embodiments. For example, in one embodiment, the signal processing and control circuitry may cause the signal components from the various receiver coils to be combined and / or processed in various relationships and provide the results in a desired output format as provided by the attachment portion 224 (see Figure 2 )’s rotational and axial position signal outputs RPSOut and APSOut. Figure 2, one or more receiving parts (e.g., in CMM 200, motion controller 115, host computer 120, etc.) can receive the rotational and axial position signal outputs RPSOut and APSOut, and one or more related processing and control parts can be used to determine the three-dimensional position of the probe coupling part 342 and / or the contact portion of the attached probe 206 as the contact portion 348 of the probe 306 moves along the surface of the workpiece W being measured. The number, size and shape of the receiver coils, field generating coils, and conductive plates or loops of the perturbator elements employed in various embodiments can be selected based on the desired operating characteristics (e.g., improved position sensing and reduced high-order nonlinearity). It should be noted that low-order nonlinearity can be calibrated by the CMM.

[0142] Fig. 9A , 9B , 10 and 11 can help to use fewer mechanical parts, for example, only one board needs to be installed in some embodiments (for example, a flexible cable between separate boards may not be required). Such embodiments can also help to improve repeatability and reduce assembly costs because the receiver coil can have less freedom with respect to alignment, and thus can be less sensitive to tilt and rotation problems that may occur in multiple board embodiments, such as with respect to XY positioning signals.

[0143] Fig. 12A and 12B An alternative configuration of the probe position detection portion 1211 is shown, which may be used in, for example Figure 2 The scanning probe 300 is used as the probe position detection part 311, Figure 3 In the embodiment of the present invention, the probe position detection part 411 is replaced. Figure 4 In the embodiment of the present invention, the probe position detection part 511 is replaced. The probe position detection part 1211 uses the inductive sensing principle and includes a perturbator configuration 1250 and a coil plate configuration 1290. The perturbator configuration 1250 shown includes a generally cylindrical perturbator 1251. The coil plate configuration 1290 shown includes a generally disk-shaped structure and Fig. 12B is shown in more detail in .

[0144] As shown, the perturbator 1251 is located within the central opening 1291 of the coil plate configuration 1290 and extends in the Z direction of the disc-shaped coil plate configuration 1290. Fig. 12A and 12BIn the example of FIG. 1 , the perturbator 1251 is shown as extending above and below the coil plate configuration 1290 in the Z direction, although it should be understood that this may not be the case in other embodiments (e.g., in various alternative embodiments, the perturbator 1251 may be flush with or shorter than the coil plate configuration 1290 in the Z direction). In various embodiments, the more important factor is not the height along the Z direction, but the cylindrical shape of the perturbator 1251 (e.g., this leads to various desired operating characteristics, as will be described in more detail below, such as with respect to FIG. 1 ). Figures 14A-14D wait).

[0145] The coil plate arrangement 1290 includes a field generating coil arrangement 1260, as shown, having two transmitting coils 1261T and 1261B, and a receiver coil portion 1270. The receiver coil portion 1270 may include a rotation sensing coil portion (also referred to as a rotation sensing coil) RSC (e.g., for sensing motion transverse to the axial direction, as described above with reference to Figure 3-6 The like) and an axial sensing coil configuration ASCC (e.g. for sensing motion in the axial direction, as described above with reference to Figure 3-6 mentioned etc.).

[0146] In short, the moving perturbator element 1251 (or more generally, the perturbator arrangement 1250) induces position-dependent changes in the changing magnetic field generated by the field generating coil structure 1260. The receiver coil portion 1270 responds to the changing magnetic field and the changes therein induced by the perturbator element 1251.

[0147] As shown, coil plate configuration 1290 includes: a first plate portion 1292 including a top axial sensing coil TASCC and a field generating coil 1261T; a second plate portion 1294 including a bottom axial sensing coil BASCC and a field generating coil 1261B; and a center plate portion 1296 located between the first plate portion 1292 and the second plate portion 1294. The center plate portion 1296 includes a top rotation sensing coil TRSC1-4, a top normalization coil TRN, a bottom normalization coil BRN, and a bottom rotation sensing coil BRSC1-4.

[0148] The coil plate arrangement 1290 is mounted in fixed relation to the frame of the scanning probe (see Figure 2 The scanning probe 300 and Figure 4 408), wherein the second plate portion 1294 of the coil plate configuration 1290 is closer to the probe suspension portion 307 / 407 (see Figure 2 and 3 ). The first plate portion 1292, the second plate portion 1294, and the center plate portion 1296 of the coil plate configuration 1290 are nominally parallel to each other and nominally orthogonal to the scanning probe 300 (see Figure 2)'s central axis CA (see Figure 3 ). For example, the coil board configuration 1290 may include a double-sided substrate or printed circuit board having coils fabricated as printed conductors in layers of the substrate or printed circuit board, freestanding coils secured to the substrate or printed circuit board, etc., and / or various combinations thereof.

[0149] In various embodiments, the perturbator element 1251 of the perturbator configuration 1250 may include a conductive cylinder providing a perturbator region, and the perturbator element 1251 is disposed along a central axis CA (see Figure 3 ) is located in a perturbator motion volume extending on opposite sides of the coil plate arrangement 1290. The perturbator element 1251 is coupled to the probe suspension portion 307 / 407 in a fixed relationship relative to each other by a coupling arrangement 1253 (see Figure 2 and 3 ), including an upper portion of the mobile member 1212 (e.g., similar to Figure 3 In response to the probe suspension portion 307 / 407 (see Figure 2 and 3 ), the perturbator element 1251 moves in the perturbator motion volume relative to an undeflected position, the perturbator element moves in response to axial motion over an operational range of motion + / -Rz in the axial direction, and moves in response to rotational motion over a respective operational range of motion + / -Rx and + / -Ry in respective orthogonal X and Y directions orthogonal to the axial direction. The field generating coil arrangement 1260 generates a magnetic flux that generally varies in the axial direction in the perturbator motion volume in response to the coil drive signal.

[0150] As above about Fig.11 As described, in various embodiments, the top and bottom normalized coils TRN and BRN can be used to provide a measurement of the transmitter field (e.g., corresponding to the changing magnetic flux generated by the field generating coil configuration 1260), for which the measured signal can be relatively independent of (e.g., can be only nominally affected by) the position of the perturbator element 1251. In various embodiments, the position measurement can be scaled to the measured signals so that they are relatively insensitive to changes in the transmitter amplitude (from the field generating coil configuration 1260). In various embodiments, this processing can be performed by signal processing and control circuits (e.g., Figure 2 signal processing and control circuit 380).

[0151] Figures 13A to 13F Shows something like Fig. 12A and 12B The illustrated implementations of the probe position detection portion 1211 and the probe position detection portion 1311 highlight certain aspects in accordance with the principles disclosed herein.

[0152] Fig.13A is similar to Fig. 12A and 12B The partially schematic isometric view of an embodiment of the probe position detection portion 1311 of the probe position detection portion 1211 is shown to highlight certain aspects according to the principles disclosed herein. In general, the probe position detection portion 1311 includes Figure 2 , 3 , 4, 9A and 9B, and will be understood to operate similarly unless otherwise described below. For example, the configuration of the probe position detection portion 1311 can be used in Figure 2 The scanning probe 300 is used as the probe position detection part 311, Figure 3 In the embodiment of the present invention, the probe position detection part 411 is replaced. Figure 4 In the embodiment of the present invention, the probe position detection part 511 is replaced. Fig. 9A and 9B In the embodiment of the present invention, the probe position detection part 911 is replaced. Fig. 12A and 12B In the embodiment, the probe position detection part 1211, etc. is replaced.

[0153] exist Fig.13A In the illustrated embodiment, the probe position detection portion 1311 includes a coil plate configuration portion 1390 and a perturbator configuration 1350. In various embodiments, the perturbator element 1351 (or more generally, the perturbator configuration 1350) includes a conductive cylinder, or any other desired operating configuration that provides a perturbator region (e.g., an interior region thereof). Fig.13A As shown, the perturbator element 1351 comprises a conductive cylinder. The perturbator element 1351 is located in the perturbator motion volume MV along a central axis CA extending on opposite sides of the coil plate configuration 1390 and is connected to the perturbator element 1351 by a coupling configuration (e.g., comprising a conductive cylinder similar to Figure 3 For purposes of explanation, the perturbator element 1350 is responsive to the probe suspension 1307 and / or the probe 1306 and / or the mobile member 1312 (e.g., which may be similar to or identical to Figure 3 The deflection of the probe suspension portion 407, the probe 406 and the moving member 412 relative to Fig.13A The undeflected position shown (e.g. similar to Figure 3The perturbator element 1351 can be described as moving in response to axial motion over an operational range of motion + / -Rz in the axial direction by displacement increments ΔZ, and in response to rotational motion over corresponding operational ranges of motion + / -Rx and + / -Ry in orthogonal X and Y directions orthogonal to the axial direction (Z direction) by respective displacement increments ΔX and ΔY.

[0154] The coil plate configuration 1390 includes a top coil plate portion 1390T and a bottom coil plate portion 1390B. The top coil plate portion 1390T includes a top axial sensing coil configuration TASCC (e.g., including a single individual coil as shown in this embodiment), at least a first top field generating coil configuration 1361T, N top rotation sensing coils TRSC (e.g., TRSC1-TRSC4 as shown, where N=4), and a top normalization coil configuration TR N The bottom coil plate portion 1390B includes a bottom normalized coil configuration BR N , N bottom rotational sensing coils BRSC (eg BRSC1 - BRSC4 as shown, where N=4), at least a first bottom field generating coil configuration 1361B and a bottom axial sensing coil configuration BASCC (eg comprising a single individual coil as shown in this embodiment).

[0155] The coil plate arrangement 1390 is mounted in fixed relation to a frame of a scanning probe (eg Figure 4 408), wherein the bottom coil plate portion 1390B is closer to the probe 1306 and / or the probe suspension portion 1307. It should be understood that Fig.13A The various sensing coils shown all include at least one winding or conductor having first and second connection ends (e.g. Figure 6 1350) are configured to operate as one or more inductively coupled "turns". As shown, the top and bottom axial sensing coil configurations TASCC and BASCC and the top and bottom rotational sensing coil configurations TRSC and BRSC are nominally symmetrically spaced relative to the respective positions of the perturbator configuration 1350 and the perturbator element 1351. Other configurations are possible (e.g., in some embodiments, the rotational sensing coil configurations TRSC and BRSC may not be nominally centered relative to the perturbator configuration 1350).

[0156] like Fig.13AAs shown, at least the first top field generating coil configuration includes a single field generating coil 1361T, whose area is larger than the area of ​​the perturbator element 1351, and at least the first bottom field generating coil configuration includes a single field generating coil 1361B, whose area is larger than the area of ​​the perturbator element 1351. The top coil plate portion 1390T and the bottom coil plate portion 1390B are nominally planar, nominally parallel to each other and nominally orthogonal to the central axis CA.

[0157] Figures 13B to 13E Shows Fig.13A An example implementation of a coil of the coil plate configuration 1390 . Fig.13F Shows Fig.13A An example layering of coils in coil plate configuration 1390 . Figures 13A to 13E shows connection pads or vias (see Fig. 13B ), which can be similar to the above Fig.11 The connection pads or through holes discussed in the description.

[0158] exist Fig. 13B , an example implementation of a top axial induction coil configuration TASCC or a bottom axial induction coil configuration BASCC is shown. As shown, a single coil is used as the top axial coil configuration TASCC and a single coil is used as the bottom axial coil configuration BASCC.

[0159] exist Fig. 13C , an example implementation of a top field generating coil configuration 1361T or a bottom field generating coil configuration 1361B is shown. As shown, a single coil is used as the top field generating coil configuration 1361T and a single coil is used as the bottom field generating coil configuration 1361B.

[0160] exist Fig.13D , an example implementation of a top rotation sensing coil configuration TRSC or a bottom rotation sensing coil configuration BRSC is shown. As shown, four coils TRSC1-4 are used as the top rotation sensing coil configuration TRSC, and four coils BRSC1-4 are used as the bottom rotation sensing coil configuration BRSC.

[0161] exist Fig.13E , shows the top normalized coil configuration TR N or bottom normalized coil configuration TR B As shown in the figure, a single coil is used as the top normalized coil configuration TR N , a single coil is used as the bottom normalized coil configuration TR B .

[0162] exist Fig.13F , an example implementation of the layers of the coil configuration 1390 is shown. Fig.13AAs described, the coil plate configuration 1390 includes a top coil plate portion 1390T and a bottom coil plate portion 1390B. The top coil plate portion 1390 sequentially includes a first layer having a top axial sensing coil configuration TASCC, a second layer including at least a first top field generating coil configuration 1361T, a third layer including N top rotation sensing coils TRSC, and a third layer including a top normalization coil configuration TRSC. N The bottom coil plate portion 1390B is generally a mirror image of the top coil plate configuration and includes a bottom normalized coil configuration BR N The first layer has N bottom rotating sensing coils BRSC, the second layer has at least a first bottom field generating coil configuration 1361B, and the fourth layer has a bottom axial sensing coil configuration BASCC. The illustrated perturbator element 1351 is a conductive cylinder extending above and below the coil plate configuration.

[0163] As mentioned above, in Figure 3 , 4 In the embodiment shown in FIG. 5 , the perturbator element is located inside the field generating coil element (eg Figure 4 The disturber element 551 is mounted inside the field generating coil 561, and the area of ​​the disturber element is smaller than the area of ​​the field generating coil element. Fig. 9A , 9B In the embodiments shown in 10 and 10, the disturber elements are positioned parallel to the field generating coil elements (for example, the disturber elements 1051T and 1051B are located above and below the field generating coil 1061). Fig. 12A , 12B In the embodiments shown in Figures 13A to 13F, a single tall cylindrical perturber element 1251 / 1351 is assembled within a hole 1291 surrounded by a coil element, and this configuration provides increased flexibility in the relative size and position of the coil configuration board elements, while also utilizing a single printed circuit board (for example, the top plate portion and the bottom plate portion may include portions of a single multi-layer printed circuit board), which can reduce cost and complexity relative to configurations utilizing multiple printed circuit boards. In addition, as described below with reference to Figures 14A to 14D For more detailed discussion, Fig. 12A , 12B In the embodiments of 13A to 13F, a significant reduction in resonant frequency change (RFC) occurring as a result of displacement along the Z-axis can be achieved, as well as a reduction in off-axis crosstalk, resulting in better overall performance of the CMM.

[0164] Fig. 12A , 12BThe embodiments of 13A to 13F may facilitate the use of fewer mechanical parts because, in some embodiments, only one board may need to be installed (e.g., flex cables between separate boards may not be required), and a single high-disturbance element may be employed that does not require disassembly to install or remove boards. Such embodiments may also facilitate improved repeatability and lower assembly costs because the receiver coil may have fewer degrees of freedom regarding alignment and may therefore be less sensitive to tilt and rotation issues that may arise in multi-board embodiments, such as relative to XY positioning signals. Such embodiments may also improve off-axis crosstalk, frequency stability, and linearity.

[0165] Figures 14A to 14C Shows Figure 3 , 4 and the embodiment shown in 5, Fig. 9A , 9B and the embodiment shown in 10 and Fig. 12A , 12B 13A to 13F illustrate exemplary frequency shift and off-axis crosstalk errors for the embodiments shown in FIG. Fig.14A It is shown that when the perturbator (e.g. Figure 4 The displacement of the perturbator 551 along the Z axis is scanned from -1 mm to +1 mm and U, V = 1.1 degrees Figure 3 , 4 5 and 5 show example off-axis crosstalk errors for the embodiments shown. Fig. 14B It is shown that when the perturbator (e.g. Fig. 9A The displacement of the perturbator 950 along the Z axis is scanned from -1 mm to +1 mm and U, V = 1.1 degrees Fig. 9A , 9B 10 and 11 illustrate example off-axis crosstalk errors of the embodiments shown in FIG. Fig. 14C It is shown that when the perturbator (e.g. Fig. 12A The displacement of the perturbator 1250 along the Z axis is scanned from -1 mm to +1 mm and U, V = 1.1 degrees Fig. 12A , 12B 13A to 13F show exemplary off-axis crosstalk errors for the embodiments. Figures 14A-14C In the figure, the V-shaped Z signal is the main (linear) positioning signal, and the X and Y signals illustrate the magnitude of the crosstalk in the U and V directions. Fig. 9A , 9B For the embodiments of 10 and 11, the off-axis crosstalk error is highest and is in the range of 32-45 mV / V for the X-axis and Y-axis, for which 40% of the nominal signal range is therefore crosstalk (ie, (45-32) / 32=40%). Figure 3 , Figure 4 and Figure 5The embodiment of has an off-axis crosstalk error in the range of 16-20 mV / V for both the X-axis and the Y-axis, for which 25% of the nominal signal range is therefore crosstalk (i.e. (20-16) / 16=25%), providing some improvement. Fig. 12A , 12B 13A to 13F, the off-axis crosstalk error is lowest and is in the range of 15-16 mV / V for both the X-axis and the Y-axis, for which 7% of the nominal signal range is therefore crosstalk (ie, (16-15) / 15=7%).

[0166] Fig.14D Shown for Figure 3 , 4 and the embodiment shown in 5, Fig. 9A , 9B and the embodiment shown in 10 and Fig. 12A , 12B 13A to 13F, the example resonant transmitter frequency changes when the displacement of the probe position detection portion (SPDP) changes between 0 mm and 2 mm. At a displacement of 0 mm, the resonant frequency is the same for the different embodiments. The resonant frequency change (RFC) for a 2 mm displacement of the SPDP is Fig. 9A , 9B and 10 embodiments (in Fig.14D The maximum value is marked as SPDP 1011. Fig. 12A , 12B and 13A to 13F (in Fig.14D The smallest one is marked as SPDP 1311, where Figure 3 , 4 and 5 embodiments (in Fig.14D RFC marked as 411) is slightly larger than Fig. 12A , 12B and 13A to 13F, but significantly less than Fig. 9A , 9B and 10. It can be seen that when the displacement along the Z axis changes, Fig. 12A , 12B The embodiments of 13A to 13F have smaller inductance variations, which in addition to having minimal off-axis crosstalk, also results in a small RFC with the perturbator location.

[0167] In various embodiments, at least some signal offset errors may occur due to printed circuit board (PCB) manufacturing tolerances, such as layer-to-layer coil registration errors, particularly for single board embodiments. For example, due to PCB manufacturing tolerances, misalignment may occur between the field generating coil configuration and the rotation sensing coil configuration (RSC). According to the principles disclosed herein, one or more misalignment compensation elements may be added to the coil plate configuration to compensate for the misalignment of the coils (e.g., coils of the coil configuration of the first, second and / or center plate portions, etc.) relative to each other. More specifically, as will be described in more detail below, in various embodiments, one or more misalignment compensation elements may be configured / used to reduce the signal offset caused by the misalignment of at least one coil of the coil plate configuration (e.g., the coil plate configuration may include a PCB having multiple layers in which the coils are located, and the misalignment of at least one coil may be caused by a registration error in the layer-to-layer registration as part of the manufacturing process, such as within manufacturing tolerances).

[0168] Figures 15A to 15C An embodiment is shown in which the misalignment compensation element takes the form of increased shielding to reduce the field generating coil configuration (e.g. Fig. 12B Field generating coils 1261T and 1261B) and a rotation sensing coil configuration (eg Fig. 12B The impact of the registration error between TRSC1-4 and BRSC1-4). Fig.15A An inner shield 1261' is shown where a copper pad is added to the field generating coil (eg Fig. 12B 1261T and 1261B), and an external shield 1263, wherein a copper pad is located outside the shielded field generating coil 1261'. Fig. 15B FIG. 1 is a diagram showing the shielding field generating coil 1261′ and the outer shield 1263 with a rotating sensing coil configuration RSC (eg, TRSC1-4 or BRSC1-4) relative to the central axis of the probe position detection portion (eg, Fig.13A As shown, copper pads are added to the field generating coil 1261 to widen the area of ​​the shielding field generating coil 1261' to roughly match the area of ​​the inner loop of the rotating sensing coil RSC, and the copper pads of the outer shield are shaped and positioned to roughly match the area of ​​the outer loop of the rotating sensing coil RSC.

[0169] exist Fig. 15C, an example implementation of the layers of a coil plate configuration 1590 is shown. As shown, the coil plate configuration 1590 includes a top coil plate portion 1590T and a bottom coil plate portion 1590B. The top coil plate portion 1590 sequentially includes a first layer having a top axial sensing coil configuration TASCC, a second layer including at least a first shield top field generating coil configuration 1261T' and an outer shield 1263T, a third layer including N top rotation sensing coils TRSC, and a top normalization coil configuration TRSC. N The bottom coil plate portion 1590B is generally a mirror image of the top coil plate configuration and includes a bottom normalized coil configuration BR N a first layer having N bottom rotating sensing coils BRSC, a second layer having at least a first shielded bottom field generating coil configuration 1261B′ and an outer shield 1263B, and a fourth layer having a bottom axial sensing coil configuration BASCC.

[0170] Some embodiments may employ an internal shield (e.g., shielding field generating coil 1261') without an external shield (e.g., external shield 1263), some embodiments may employ an external shield (e.g., external shield 1263) without an internal shield (e.g., shielding field generating coil 1261'), and some embodiments may employ an internal shield (e.g., shielding field generating coil 1261') and an external shield (e.g., external shield 1263). Shields 1261', 1263 make the field generated at the edge of the rotating sensing coil smaller and more uniform, reducing the effects of registration errors between the field generating coil and the rotating sensing coil. As shown in the table below, including both internal and external shields may help reduce offset by 77% while only reducing gain by 5%.

[0171]

[0172] refer to Fig. 12B , Fig.16 An exemplary embodiment of a probe position detection portion 1211' is shown, wherein a misalignment compensation element in the form of a pin 1298 (e.g., which may include a pin, a pad, etc. in various embodiments) is added to the coil plate configuration to compensate for the signal offset error by introducing a compensating offset signal. In various embodiments, the pin may extend through the entire coil plate configuration or only through a portion thereof, or may be located in a layer of the coil plate configuration. As shown, the one or more pins may include a plurality of pins positioned on one side of the coil plate configuration 1290' relative to a plane including the central axis (e.g., see Fig.13A ), wherein the pins are generally parallel to the central axis and compensate for misalignment of one or more rotational sensing coils relative to the field generating coil configuration. More specifically, in various embodiments, the placement of the pins can be used to increase or decrease the magnetic field through each coil in order to compensate for misalignment of the coils.

[0173] refer to Fig. 12B , Fig.17A An exemplary embodiment of a probe position detection portion 1211" is shown, in which a mechanical adjustment mechanism 1297 is used to adjust the relative position of the coil plate configuration 1290" and / or the perturbator configuration 1250 (e.g., the relative X, Y and / or Z position of the coil plate configuration 1290" or the perturbator configuration 1250 relative to each other and / or relative to the shell / housing of the coil plate configuration, etc.). In various embodiments, the coil plate configuration 1290" may include additional spacing (e.g., around the edge and / or in the center, etc.) to allow an adjustable positioning range. It should be understood that the mechanical adjustment mechanism 1297 can be used to reduce misalignment. In exemplary embodiments, one or more other misalignment compensation elements (e.g., Fig.16 pad or pin 1298, Figures 15A to 15C Shielding 1261', 1263, Figures 18A to 18C Adjustable coils TASCC (discussed below), etc., and / or various combinations thereof) are used to provide total compensation for misalignment, with position fine-tuning provided by mechanical adjustment mechanism 1297 to reduce any residual misalignment error or to increase the effectiveness of other misalignment compensation elements.

[0174] As shown, the mechanical position adjustment mechanism 1297 includes positioning screws 1297A, 1297B. The first positioning screw 1297A (or multiple first positioning screws 1297A) helps to adjust the relative XY position of the coil plate configuration 1290", and the second positioning screw 1297B helps to adjust the Z position of the perturbator configuration 1250 relative to the coil plate configuration 1290". In various embodiments, the positioning screw 1297A passes through and adjusts the position of the alignment and mounting portion 1217 to which the coil plate configuration 1290" is attached or otherwise coupled. The housing 1208' (e.g., which can be coupled to or be part of the main frame, for example Figure 4 The frame 408 of the coil plate configuration 1290 "encloses the coil plate configuration 1290", and includes a spacer SP that operates with respect to the relative movement. As described above (e.g., with respect to Fig. 12A ), the perturbator element 1251 moves within the hole 1291 of the coil plate arrangement 1290" and is coupled to the probe suspension portion via the coupling arrangement 1253 (see, for example, Figure 2-4 The suspension portion 307 / 407 / 407') includes an upper portion of the mobile member 1212 (e.g., similar to Figure 3 and 4In various embodiments, the second positioning screw 1297B can be included as part of the connection configuration 1253, or operate in conjunction with the connection configuration 1253, and the connection configuration 1253 can therefore be at least partially adjustable, and as described above, the second positioning screw 1297B helps to adjust the Z position of the perturbator element 1251 relative to the coil plate configuration 1290".

[0175] refer to Figure 4 , Fig. 17B An exemplary embodiment of a probe position detection portion 511" is shown, in which a mechanical adjustment mechanism 597 is used to adjust the relative position of the coil plate configuration 590" and / or the perturbator configuration 550 (e.g., the relative X, Y and / or Z position of the coil plate configuration or the perturbator configuration 550 relative to each other and / or the shell / housing of the coil plate configuration, etc.). In various embodiments, the coil plate configuration 590" (e.g., including substrates 571T, 571B and field generating coils 561 and / or their substrates) may include additional spacing (e.g., around the edges and / or in the center, etc.) to allow an adjustable positioning range. It should be understood that the mechanical adjustment mechanism 597 can be used to reduce misalignment, similar to the above reference. Fig.17A Describes the operation.

[0176] As shown, the mechanical position adjustment mechanism 597 includes positioning screws 597A, 597B. The first positioning screw 597A (or multiple first positioning screws 597A) helps to adjust the relative XY position of the coil plate configuration 590", and the second positioning screw 597B helps to adjust the Z position of the perturbator structure 550 relative to the coil plate configuration 590". In various embodiments, the positioning screw 597A passes through and adjusts the position of the alignment and mounting portion 517 to which the coil plate configuration 590" is attached or otherwise coupled. The housing 508' (e.g., which can be coupled to or is part of the main frame, such as Figure 4 The frame 408 of the coil plate configuration 590″ is surrounded by a spacer SP that operates with respect to relative motion. In various embodiments, the perturbator element 551 moves within the hole 591 of the coil plate configuration 590″ (e.g., within the field generating coil 561 and its substrate) and is coupled to the probe suspension portion (e.g., see Figure 2-4The suspended portion 307 / 407 / 407') includes an upper portion of the movable member 412. In various embodiments, the second positioning screw 597B can be included as part of the connection configuration 553, or operate in conjunction with the connection configuration 553, and the connection configuration 553 can therefore be at least partially adjustable, and as described above, the second positioning screw 597B helps to adjust the Z position of the disturber element 551 relative to the coil plate configuration 590". In various embodiments, a portion of the second positioning screw 597B, the movable member 412 and / or other portions of the connection configuration 553 can be moved within the hole 591B of the substrate 571B (for example and in some embodiments, the substrate 571T can include a similar hole 591T, which can provide access to the second positioning screw 597B for adjustment). Fig.17A and 17B , it should be understood that certain elements shown with or without hash lines may include holes or openings (e.g., such as to enable certain relative movement, etc.). Examples of such relative movement of the perturbator elements 551, 1251 within the respective probe position detection portions 511', 1211' may be based at least in part on Figure 3 This is understood with respect to the illustration of the relative movement of the perturbator element 451 within the probe position detection portion 411 .

[0177] refer to Fig. 12B , Figures 18A to 18C 1 shows an exemplary embodiment in which a misalignment compensation element in the form of a conductive short 1299 (e.g., a zero-ohm resistor) can be added to the coil plate configuration 1290″′ to compensate for misalignment errors. More specifically, in various embodiments, a conductive short 1299 (e.g., in the form of a Fig.18B and 18C The adjustable coils are located at the top and / or bottom of the outer coil plate configuration (e.g., Fig. 12B axial sensing coil configuration TASCC' or BASCC' in the vicinity or a portion thereof), to which the conductive short 1299 can be easily added or removed without the need to access the inner layers of the coil plate configuration.

[0178] In various embodiments, when the coil plate configuration is initially manufactured / produced, certain misalignment compensation elements (e.g. Figures 15A to 15CShields 1261', 1263) may be included as part of manufacturing / production (e.g., as a general technique to reduce any misalignment errors that may occur due to any misalignment of the coils). In various embodiments, after the coil plate configuration is manufactured / produced, measurements may be taken and / or testing may be performed to determine what offsets may exist (e.g., due to coil misalignment that may have occurred during manufacturing / production). Based on such testing / measurements, certain determinations may be made regarding the application of one or more offset compensation techniques (e.g., as described above with respect to Fig.16 , 17A , 17B and 18A to 18C). For example, Fig.16 , 18B Based on such testing / measurements, it can be determined where misalignment compensation elements (e.g., pins, conductive shorts, etc.) should be placed / positioned / added in order to compensate for the offset and achieve the desired offset compensation configuration. As another example, with respect to Fig.17A and 17B technology, based on such tests / measurements (e.g., which may be initially and / or in Fig.16 , 18B and 18C technology has been implemented to perform greater regulation, and for this Fig.17A and 17B Techniques are then performed to make finer adjustments), it can be determined what and / or how much adjustment should be made in order to compensate for the offset (e.g., the remaining offset) and achieve the desired offset compensation configuration. In various embodiments, multiple iterations of one or more compensation techniques (e.g., including repeated testing and / or active monitoring of any indicated offset, etc.) can be performed, including continuing to make adjustments until the desired offset compensation configuration (e.g., a configuration in which the respective offset errors have been reduced to acceptable levels, etc.) is obtained.

[0179] Although Figures 15A to 15C , 16, 17A and 18A to 18C have been referenced Fig. 12B and 13A Although the techniques for compensating and reducing / solving offset errors discussed herein may be used in other embodiments, such as those described above with reference to Figure 3 , 4 and 5 and reference Fig. 9A , 9B and 10 discuss implementation methods.

[0180] As described above, in some embodiments, the scanning probe includes one or more mechanical position adjustment mechanisms to adjust the position of at least one of the coil plate configuration or the perturbator configuration to further reduce signal offset. In some embodiments, the one or more mechanical position adjustment mechanisms may include one or more positioning screws.

[0181] In some embodiments, the misalignment of at least one coil of the coil plate configuration comprises a misalignment of one or more rotational sensing coils relative to the field generating coil configuration.

[0182] In some embodiments of the scanning probe, the coil plate arrangement further comprises a normalizing coil arrangement for providing a measurement of a varying magnetic flux generated by the field generating coil arrangement.

[0183] In some embodiments of the scanning probe, the field generating coil arrangement surrounds a hole in the coil plate arrangement, and the conductive agitator element is cylindrical and configured to move and fit within the hole of the coil plate arrangement.

[0184] In some embodiments, a method includes generating a drive control signal to control a drive mechanism that moves a scanning probe as disclosed herein along a workpiece surface, and generates three-dimensional position information based on an inductive sensing signal generated by the scanning probe as the scanning probe moves along the workpiece surface.

[0185] In some embodiments, a method includes adding at least one misalignment compensation element to a coil plate configuration of a scanning probe based at least in part on a determination of a signal offset caused by misalignment of at least one coil of the coil plate configuration, and adding at least one compensation element thereto to reduce the signal offset. The scanning probe moves along the surface of a workpiece, and when the scanning probe moves along the surface of the workpiece, three-dimensional position information is generated based on an inductive sensing signal generated by the scanning probe. In some such embodiments, at least one misalignment compensation element includes a first misalignment compensation element, and the first misalignment compensation element is added at the first position based at least in part on a determination that adding the first misalignment compensation element to a first position in the coil plate configuration reduces the signal offset. The first position can be selected from a plurality of possible positions based on a determination that the positioning of the first misalignment compensation element at the first position results in a greater reduction in the signal offset than the positioning of the first misalignment compensation element at other positions in the plurality of possible positions.

[0186] Although the preferred embodiments of the present disclosure have been illustrated and described, based on the present disclosure, many changes in the feature arrangement shown and described and the sequence of operations will be apparent to those skilled in the art. Various alternative forms can be used to implement the principles disclosed herein. In addition, the various embodiments described above can be combined to provide further embodiments. The entire contents of all U.S. patents and U.S. patent applications mentioned in this specification are incorporated herein by reference. If necessary, various aspects of the embodiments can be modified to provide further embodiments using the concepts of each patent and application.

[0187] These and other changes can be made to the embodiments in light of the above detailed description. In general, in the following claims, the terms used should not be interpreted to limit the claims to the specific embodiments disclosed in the specification and claims, but should be interpreted to include all possible embodiments along with equivalents claimed by these claims.

Claims

1. A scanning probe for a coordinate measuring machine, the scanning probe comprising: A probe suspension portion coupled to a frame of a scanning probe includes: a probe coupling portion configured to rigidly couple to the probe; and a probe moving mechanism configured to enable the probe coupling portion to move axially in an axial direction and to enable the probe coupling portion to move rotationally about a rotation center; and A probe position detection portion arranged along a central axis parallel to the axial direction and nominally aligned with the center of rotation, the probe position detection portion comprising: A coil plate configuration, comprising a plurality of coils, comprising: a field generating coil arrangement comprising at least one field generating coil; a top axial sensing coil configuration, comprising at least one top axial sensing coil; a bottom axial sensing coil configuration, comprising at least one bottom axial sensing coil; and N top rotation sensing coils and N bottom rotation sensing coils, where N is an integer greater than 3; at least one misalignment compensation element configured to compensate for a signal offset caused by a misalignment of at least one coil of a coil plate configuration, wherein the coil plate configuration includes a printed circuit board having a plurality of layers in which the coils are located, and the misalignment of the at least one coil is caused by a registration error in layer-to-layer registration as part of a manufacturing process; a perturbator arrangement comprising an electrically conductive perturbator element providing a perturbator region, wherein the perturbator element is located in a perturbator motion volume along a central axis and the perturbator element is coupled to a probe suspension portion by a coupling arrangement, wherein in response to deflection of the probe suspension portion the perturbator element moves in the perturbator motion volume relative to an undeflected position, in response to axial motion the perturbator element moves over an operational range of motion + / -Rz along an axial direction, and in response to rotational motion the perturbator element moves over respective operational ranges of motion + / -Rx and + / -Ry along orthogonal X and Y directions orthogonal to the axial direction, the field generating coil arrangement generating a magnetic flux in the perturbator motion volume that varies substantially in the axial direction in response to a coil drive signal; and A signal processing and control circuit is operably connected to the coils of the probe position detection portion to provide coil drive signals and is configured to input a signal from the coil plate configuration, the signal including corresponding signal components provided by the corresponding rotational and axial sensing coils of the coil plate configuration, and output a signal indicating the axial position and rotational position of at least one of the perturbator element or the probe relative to the frame of the scanning probe.

2. The scanning probe according to claim 1, wherein: Based at least in part on a determination of a signal offset caused by misalignment of the at least one coil, the at least one misalignment compensation element is added to the coil plate configuration, and at least one compensation element is added thereto to reduce the signal offset.

3. The scanning probe according to claim 2, wherein: The at least one misalignment compensation element includes a first misalignment compensation element, and the first misalignment compensation element is added at the first position in the coil plate configuration based at least in part on a determination that adding the first misalignment compensation element at the first position reduces signal offset.

4. The scanning probe according to claim 3, wherein: A first position is selected from the plurality of possible positions based on a determination that positioning of the first misalignment compensation element at the first position results in a greater reduction in signal offset than positioning of the first misalignment compensation element at other positions of the plurality of possible positions.

5. The scanning probe according to claim 2, wherein: The at least one misalignment compensation element includes one or more pads or pins that, in operation, increase or decrease the magnetic field through the at least one coil and correspondingly reduce the signal offset.

6. The scanning probe according to claim 5, wherein: The one or more pads or pins include a plurality of pins located on one side of the coil plate configuration relative to a plane including the central axis, wherein the pins are substantially parallel to the central axis.

7. The scanning probe according to claim 2, wherein: The at least one misalignment compensation element includes one or more conductive shorts that, in operation, adjust the size of the coils of the coil plate configuration.

8. The scanning probe according to claim 1, wherein: The field generating coil configuration comprises a top field generating coil configuration and a bottom field generating coil configuration; and The at least one misalignment compensating element includes one or more conductive shields positioned proximate to the top field generating coil configuration and one or more conductive shields positioned proximate to the bottom field generating coil configuration.

9. The scanning probe according to claim 8, wherein: One or more conductive shields positioned proximate to the top field generating coil arrangement include: an inner conductive shield configuration having an area substantially corresponding to an area of ​​an interior of the top rotation sensing coil; and an outer conductive shield configuration having an area substantially corresponding to an area outside of the top rotation sensing coil; and One or more conductive shields positioned proximate to the bottom field generating coil arrangement include: an inner conductive shield configuration having an area substantially corresponding to an area of ​​an interior of the bottom rotation sensing coil; and An outer conductive shield is configured having an area substantially corresponding to an area outside of the bottom rotation sensing coil.

10. The scanning probe of claim 1, further comprising one or more mechanical position adjustment mechanisms for adjusting the position of at least one of the coil plate configuration or the perturbator configuration to further reduce signal offset.

11. The scanning probe according to claim 1, wherein: The misalignment of at least one coil of the coil plate arrangement comprises a misalignment of one or more of the rotation sensing coils relative to the field generating coil arrangement.

12. The scanning probe according to claim 1, wherein: The coil plate arrangement further comprises a normalising coil arrangement for providing a measure of the varying magnetic flux produced by the field generating coil arrangement.

13. The scanning probe according to claim 1, wherein: The field generating coil arrangement surrounds the aperture in the coil plate arrangement; and The conductive agitator element is cylindrical and is configured to move and fit within a hole of the coil plate configuration.

14. A method comprising: Moving the scanning probe along the surface of the workpiece; as well as When the scanning probe moves along the surface of the workpiece, three-dimensional position information is generated based on the inductive sensing signal generated by the scanning probe, wherein the scanning probe includes: A probe suspension portion coupled to a frame of a scanning probe includes: a probe coupling portion configured to rigidly couple to the probe; and a probe moving mechanism configured to enable the probe coupling portion to move axially in an axial direction and to enable the probe coupling portion to move rotationally about a rotation center; and A probe position detection portion arranged along a central axis parallel to the axial direction and nominally aligned with the center of rotation, the probe position detection portion comprising: A coil plate configuration, comprising a plurality of coils, comprising: a field generating coil arrangement comprising at least one field generating coil; a top axial sensing coil configuration, comprising at least one top axial sensing coil; a bottom axial sensing coil configuration, comprising at least one bottom axial sensing coil; and N top rotation sensing coils and N bottom rotation sensing coils, where N is an integer greater than 3; at least one misalignment compensation element configured to compensate for a signal offset caused by a misalignment of at least one coil of a coil plate configuration, wherein the coil plate configuration includes a printed circuit board having a plurality of layers in which the coils are located, and the misalignment of the at least one coil is caused by a registration error in layer-to-layer registration as part of a manufacturing process; a perturbator arrangement comprising an electrically conductive perturbator element providing a perturbator region, wherein the perturbator element is located in a perturbator motion volume along a central axis and the perturbator element is coupled to a probe suspension portion by a coupling arrangement, wherein in response to deflection of the probe suspension portion the perturbator element moves in the perturbator motion volume relative to an undeflected position, in response to axial motion the perturbator element moves over an operational range of motion + / -Rz along an axial direction, and in response to rotational motion the perturbator element moves over respective operational ranges of motion + / -Rx and + / -Ry along orthogonal X and Y directions orthogonal to the axial direction, the field generating coil arrangement generating a magnetic flux in the perturbator motion volume that varies substantially in the axial direction in response to a coil drive signal; and A signal processing and control circuit is operably connected to the coils of the probe position detection portion to provide coil drive signals and is configured to input a signal from the coil plate configuration, the signal including corresponding signal components provided by the corresponding rotational and axial sensing coils of the coil plate configuration, and output a signal indicating the axial position and rotational position of at least one of the perturbator element or the probe relative to the frame of the scanning probe.

15. A system comprising: Scanning probe; Driving mechanism; as well as Attaching a scanning probe to the attachment portion of the drive mechanism, wherein the scanning probe comprises: A probe suspension portion coupled to a frame of a scanning probe includes: a probe coupling portion configured to rigidly couple to the probe; and a probe moving mechanism configured to enable the probe coupling portion to move axially in an axial direction and to enable the probe coupling portion to move rotationally about a rotation center; and A probe position detection portion arranged along a central axis parallel to the axial direction and nominally aligned with the center of rotation, the probe position detection portion comprising: A coil plate configuration, comprising a plurality of coils, comprising: a field generating coil arrangement comprising at least one field generating coil; a top axial sensing coil configuration, comprising at least one top axial sensing coil; a bottom axial sensing coil configuration, comprising at least one bottom axial sensing coil; and N top rotation sensing coils and N bottom rotation sensing coils, where N is an integer greater than 3; at least one misalignment compensation element configured to compensate for a signal offset caused by a misalignment of at least one coil of a coil plate configuration, wherein the coil plate configuration includes a printed circuit board having a plurality of layers in which the coils are located, and the misalignment of the at least one coil is caused by a registration error in layer-to-layer registration as part of a manufacturing process; a perturbator arrangement comprising an electrically conductive perturbator element providing a perturbator region, wherein the perturbator element is located in a perturbator motion volume along a central axis and the perturbator element is coupled to a probe suspension portion by a coupling arrangement, wherein in response to deflection of the probe suspension portion the perturbator element moves in the perturbator motion volume relative to an undeflected position, in response to axial motion the perturbator element moves over an operational range of motion + / -Rz along an axial direction, and in response to rotational motion the perturbator element moves over respective operational ranges of motion + / -Rx and + / -Ry along orthogonal X and Y directions orthogonal to the axial direction, the field generating coil arrangement generating a magnetic flux in the perturbator motion volume that varies substantially in the axial direction in response to a coil drive signal; and A signal processing and control circuit is operably connected to the coils of the probe position detection portion to provide coil drive signals and is configured to input a signal from the coil plate configuration, the signal including corresponding signal components provided by the corresponding rotational and axial sensing coils of the coil plate configuration, and output a signal indicating the axial position and rotational position of at least one of the perturbator element or the probe relative to the frame of the scanning probe.

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