Test device for the relationship between environmental control and positioning error

Abstract

The present invention discloses a testing device for the relationship between environmental control and positioning error, comprising: a main body, the main body is provided with a test space and an air inlet connected to the test space; a heat exchanger, the heat exchanger is installed on the main body and is located outside the test space; a gas power unit, the gas power unit is installed on the main body and drives the gas flow to form a test airflow, and the test airflow flows through the heat exchanger, the air inlet and the test space in sequence; a motion component, the motion component is arranged in the test space; a displacement sensor, the displacement sensor is arranged in the test space, and is used to detect the current position of the motion component; a laser interferometer component, the laser interferometer component is arranged in the test space, and is used to detect the current position of the motion component; a control and recording unit, the control and recording unit is arranged outside the test space and is respectively connected to the heat exchanger, the gas power unit, the motion component, the displacement sensor and the laser interferometer component. The testing device can test the influence of different environmental controls on the positioning error of the motion component.

Description

Technical Field

[0001] The present invention relates to the field of precision instrument technology, and in particular to a testing device for the relationship between environmental control and positioning error. Background Art

[0002] The precision of micro-nano manufacturing equipment has reached the technical level of nanometer, sub-nanometer and even picometer. With the continuous improvement of science and technology, the impact of environmental factors and positioning errors on these high-precision instruments and equipment is becoming more and more significant. Whether in ultra-precision processing equipment or in measuring equipment, when the design accuracy reaches sub-nanometer or even nanometer level, the positioning error caused by environmental factors, especially temperature, becomes one of the main barriers to further improving the accuracy of equipment. Taking the lithography machine as an example, the positioning accuracy of the exposure workbench directly determines the quality of the product. The position feedback system of the exposure workbench is easily affected by the environment. When the environmental factors fluctuate, the position feedback system of the exposure workbench will expand and contract, thereby causing positioning errors.

[0003] Micro-nano manufacturing equipment in related technologies usually designs the temperature control algorithm of the temperature control recording unit and optimizes the air outlet alone, or measures the positioning error of the moving component alone, and does not organically combine the environmental control and the positioning error measurement of the platform component. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the present invention is to provide a test device for the relationship between environmental control and positioning error, which can test the influence of different environmental controls on the positioning error of the motion component, which is conducive to improving the motion accuracy of the motion component of the micro-nano manufacturing equipment.

[0005] In order to achieve the above-mentioned purpose, a testing device for the relationship between environmental control and positioning error is proposed according to an embodiment of the present invention, comprising: a main body, the main body being provided with a test space and an air inlet communicating with the test space; a heat exchanger, the heat exchanger being installed on the main body and being located outside the test space; a gas power unit, the gas power unit being installed on the main body and driving gas flow to form a test airflow, the test airflow flowing through the heat exchanger, the air inlet and the test space in sequence; a motion component, the motion component being arranged in the test space; a displacement sensor, the displacement sensor being arranged in the test space and being used to detect a current position of the motion component; a laser interferometer component, the laser interferometer component being arranged in the test space and being used to detect a current position of the motion component; a control and recording unit, the control and recording unit being arranged outside the test space and being connected to the heat exchanger, the gas power unit, the motion component, the displacement sensor and the laser interferometer component respectively, and being used to control the temperature of the heat exchanger, the flow rate of the test airflow, the movement of the motion component and to obtain the detection results of the displacement sensor and the laser interferometer component.

[0006] The testing device for the relationship between environmental control and positioning error in the embodiment of the present invention can test the influence of different environmental controls on the positioning error of the motion component, which is beneficial to improving the motion accuracy of the motion component of the micro-nano manufacturing equipment.

[0007] According to some embodiments of the present invention, the displacement sensor is a grating ruler, and the grating ruler extends along the movement direction of the moving component.

[0008] According to some embodiments of the present invention, the laser interferometer component includes: a laser, which is arranged at one end of the movement direction of the moving component and has a transmitting end and a receiving end, and the transmitting end emits a detection laser that propagates in the direction of the moving component; a spectrometer, which is arranged between the laser and the moving component and is located in the optical path of the detection laser, and the spectrometer splits the detection laser into a reference light and a measurement light whose propagation directions are not parallel, and the measurement light propagates in the direction of the moving component; a movable reflector, which is arranged at the moving component and is used to reflect the measurement light to the spectrometer; a fixed reflector, which has a fixed relative position to the spectrometer and is used to reflect the reference light to the spectrometer; wherein the spectrometer propagates the reference light and the measurement light to the receiving end, and the laser obtains the current position of the object to be measured based on the interference result of the reference light and the measurement light at the receiving end.

[0009] According to some embodiments of the present invention, the laser, the beam splitter and the movable reflector are located on a first straight line, which is parallel to the movement direction of the moving component; the beam splitter and the fixed reflector are located on a second straight line perpendicular to the first straight line.

[0010] According to some embodiments of the present invention, the motion component includes: a guide rail assembly, the guide rail assembly is provided with a first lens group mounting structure, the first lens group mounting structure has a first threaded hole; a first height adjustment stud, the first height adjustment stud is threadedly matched with the first threaded hole, the beam splitter and the fixed reflector are mounted on the first height adjustment stud; a motion seat, the motion seat is slidably connected to the guide rail assembly and is provided with a second lens group mounting structure, the second lens group mounting structure has a second threaded hole; a second height adjustment stud, the second height adjustment stud is threadedly matched with the second threaded hole, and the movable reflector is mounted on the second height adjustment stud.

[0011] According to some embodiments of the present invention, the first mirror group mounting structure includes a first mounting plate and a first magnetic seat, the first mounting plate is connected to the guide rail assembly, the first magnetic seat is magnetically attracted to the first mounting plate and is provided with the first threaded hole; the second mirror group mounting structure includes a second mounting plate and a second magnetic seat, the second mounting plate is connected to a side of the moving seat facing the laser, the second magnetic seat is magnetically attracted to a side of the second mounting plate facing the laser and is provided with the second threaded hole.

[0012] According to some embodiments of the present invention, the first mounting plate includes: a vertical portion, which extends in a vertical direction and is connected to a side of the guide rail assembly facing the laser; a horizontal portion, which extends in a horizontal direction and extends from an upper end of the vertical portion toward a direction close to the laser, and the first magnetic seat is magnetically attracted to an upper surface of the horizontal portion.

[0013] According to some embodiments of the present invention, the moving assembly further includes: a stator, which is arranged along the length direction of the guide rail assembly, the moving seat has a power-on coil connected to the control and recording unit, and the control and recording unit controls the power on and off of the power-on coil; a drag chain bracket, which is arranged on the moving seat; and a drag chain, which is connected to the drag chain bracket, and the wire between the control and recording unit and the power-on coil is arranged in the drag chain.

[0014] According to some embodiments of the present invention, the guide rail assembly includes: a guide rail; a slider, which is slidably connected to the guide rail and fixedly connected to the moving seat; a sensor, which is arranged on the guide rail and connected to the control and recording unit, and is used to detect whether the moving seat has moved into place, and the control and recording unit controls the power on and off of the energized coil according to the electrical signal of the sensor; an end plate, which is arranged at both ends of the guide rail; a wing plate, which is arranged on opposite sides of the guide rail in the width direction; and a cover plate, which is arranged above the guide rail and below the moving seat.

[0015] According to some embodiments of the present invention, the testing device for the relationship between environmental control and positioning error also includes: a temperature controller, which is arranged outside the test space and includes a heating unit, a refrigeration unit and a circulation loop, the circulation loop is connected to the heat exchanger, the heating unit heats the circulating fluid in the circulation loop, and the refrigeration unit cools the circulating fluid in the circulation loop; a filter, which is arranged on the side of the gas power unit facing the air inlet, and is used to rectify and filter the gas guided by the gas power unit into the test space; a water receiving plate, A water receiving plate is connected to the main body and is provided with a water receiving trough, wherein the water receiving trough is used to receive condensed water dripping from the heat exchanger; an air duct plate, wherein the air duct plate is located on the side of the gas power unit and the heat exchanger facing away from the main body and covers the gas power unit and the heat exchanger, and an air duct is provided on the side of the air duct plate facing the main body, and the gas power unit guides the gas in the direction of the heat exchanger to flow from the air duct to the air inlet; wherein the thermostat is connected to the control and recording unit, and the control and recording unit controls the temperature of the heat exchanger by controlling the outlet water temperature of the circulating fluid in the thermostat.

[0016] According to some embodiments of the present invention, the gas power unit is a fan, the axial direction of the fan is perpendicular to the air inlet, one end of the fan corresponds to the position of the air inlet and the other end corresponds to the position of the air duct; the heat exchanger is spaced from the main body to form an air inlet gap, the heat exchanger has a heat exchange channel that passes through the axial direction of the fan, and the two ends of the heat exchange channel are respectively connected to the air inlet gap and the air duct.

[0017] According to some embodiments of the present invention, the testing device for the relationship between environmental control and positioning error also includes: a base, which is arranged in the test space and the moving component is installed on the base; an exposure system, which includes an exposure lens, a first column, a second column and a supporting beam, the first column and the second column are respectively connected to the base and are located on both sides of the width direction of the moving component, the two ends of the supporting beam are respectively connected to the first column and the second column and are located above the moving component, and the exposure lens is arranged on the supporting beam to expose the object to be tested.

[0018] According to some embodiments of the present invention, the testing device for the relationship between environmental control and positioning error also includes: an anemometer, which is arranged in the test space and is used to detect the inlet wind speed of the air inlet; a first temperature detection unit, which is arranged in the test space and is used to detect the inlet air temperature of the air inlet; a second temperature detection unit, which is arranged in the test space and is used to detect at least one of the temperature of the base and the temperature of the supporting beam; and a third temperature detection unit, which is arranged in the test space and is used to detect the air temperature in the test space.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0021] Figure 1 is a schematic structural diagram of a testing device according to an embodiment of the present invention.

[0022] Figure 2 is an exploded view of a heat exchanger, a gas power unit and an air duct plate of a test device according to an embodiment of the present invention.

[0023] Figure 3 1 is a diagram showing the coordination of a heat exchanger, a gas power unit and an air duct plate of a test device according to an embodiment of the present invention.

[0024] Figure 4 Schematic diagram of the structure of the motion component of the testing device according to an embodiment of the present invention.

[0025] Figure 5 yes Figure 4 A partial enlarged view of area A in the middle.

[0026] Figure 6 yes Figure 4A partial enlarged view of area B in the middle.

[0027] Figure 7 yes Figure 4 A partial enlarged view of area C in the middle.

[0028] Figure 8 is a schematic structural diagram of an exposure system of a testing device according to an embodiment of the present invention.

[0029] Fig. 9 is a layout diagram of a laser interferometer component and a motion component of a testing device according to an embodiment of the present invention.

[0030] Fig.10 yes Fig. 9 A partial enlarged view of area D in the middle.

[0031] Fig.11 yes Fig.10 A partial enlarged view of area E in the middle.

[0032] Fig.12 is an optical path diagram of a laser interferometer assembly of a testing device according to an embodiment of the present invention.

[0033] Fig.13 is a schematic structural diagram of the main body of a testing device according to an embodiment of the present invention.

[0034] Reference numerals:

[0035] Test device 1,

[0036] Main body 100, test space 110, air inlet 120, chassis 130, anchor bolts 131, frame 140, side sealing door panel 150, door panel lock 151, opening and closing door 160, hinge 161,

[0037] Heat exchanger 200, thermostat 210, circulation loop 211, water receiving plate 220, water receiving tank 221, air inlet gap 230, heat exchange channel 240, heat exchange plate 250,

[0038] Gas power unit 300, filter 310, air duct plate 320,

[0039] The motion assembly 400, the guide rail assembly 410, the guide rail 411, the slider 412, the sensor 413, the end plate 414, the wing plate 415, the cover plate 416, the first height adjustment stud 420, the motion seat 430, the second height adjustment stud 440, the first lens group mounting structure 450, the first mounting plate 451, the vertical portion 451a, the horizontal portion 451b, the first magnetic seat 452, the second lens group mounting structure 460, the second mounting plate 461, the second magnetic seat 462, the stator 470, the drag chain bracket 480, the drag chain 481, the lifting platform 490,

[0040] Displacement sensor 500,

[0041] Laser interferometer assembly 600, laser 610, transmitting end 611, receiving end 612, laser bracket 613, beam splitter 620, movable reflector 630, fixed reflector 640,

[0042] Control the recording unit 700 , the base 800 , the second temperature detection unit 810 , the third temperature detection unit 820 , the compensation unit 830 , the exposure system 900 , the exposure lens 910 , the first column 920 , the second column 930 , and the supporting beam 940 . DETAILED DESCRIPTION

[0043] Embodiments of the present invention are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. Embodiments of the present invention are described in detail below.

[0044] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0045] In the description of the present invention, "plurality" means two or more.

[0046] In the description of the present invention, “on”, “over” and “above” a first feature from a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.

[0047] The following describes a testing device 1 for the relationship between environmental control and positioning error according to an embodiment of the present invention with reference to the accompanying drawings.

[0048] like Figure 1-Figure 13 As shown, the testing device 1 according to the embodiment of the present invention includes a main body 100 , a heat exchanger 200 , a gas power unit 300 , a motion component 400 , a displacement sensor 500 , a laser interferometer component 600 and a control and recording unit 700 .

[0049] The main body 100 is provided with a test space 110 and an air inlet 120 communicating with the test space 110. The heat exchanger 200 is installed on the main body 100 and is located outside the test space 110. The gas power unit 300 is installed on the main body 100 and drives the gas to flow to form a test airflow. The test airflow flows through the heat exchanger 200, the air inlet 120 and the test space 110 in sequence. The motion component 400 is arranged in the test space 110. The displacement sensor 500 is arranged in the test space 110 and is used to detect the current position of the motion component 400. The laser interferometer component 600 is arranged in the test space 110 and is used to detect the current position of the motion component 400. The control and recording unit 700 is arranged outside the test space 110 and is respectively connected to the heat exchanger 200, the gas power unit 300, the motion component 400, the displacement sensor 500 and the laser interferometer component 600, and is used to control the temperature of the heat exchanger 200, the flow rate of the test air flow, the movement of the motion component 400, and obtain the detection results of the displacement sensor 500 and the laser interferometer component 600.

[0050] For example, Fig.13 As shown, the main body 100 includes a chassis 130 , a frame 140 , a side sealing door plate 150 and an opening and closing door 160 . The chassis 130 , the frame 140 , the side sealing door plate 150 and the opening and closing door 160 together define a test space 110 , and the air inlet 120 is constructed on the top surface of the frame 140 .

[0051] The lower side of the chassis 130 is placed on a horizontal plane by anchor bolts 131, and the chassis 130 can be kept in a horizontal state by adjusting the height of the anchor bolts 131. A buckle is welded on the chassis 130, and the frame 140 is fixed to the buckle by screws. The side sealing door panel 150 is fixed to the frame 140 by a door panel lock 151. The door panel lock 151 is used to connect the frame 140 and the side sealing door panel 150, which is convenient for disassembly and assembly of the side sealing door panel 150, thereby facilitating maintenance of the test space 110. The opening and closing door 160 is fixed to the frame 140 by a hinge 161. The opening and closing structure design facilitates the disassembly and assembly of the motion component 400, the displacement sensor 500, and the laser interferometer component 600, as well as the observation of the inside of the test space 110.

[0052] According to the test device 1 of the embodiment of the present invention, the speed of the test airflow can be changed by changing the gear position of the gas power unit 300, and the temperature of the test airflow can be changed by changing the temperature of the heat exchanger 200. Two working conditions of the relationship between the positioning error of the test device and the environmental control are described by way of example in conjunction with the accompanying drawings:

[0053] Working condition one: adjust the gear of the gas power unit 300 so that the gear of the gas power unit 300 becomes a test variable, and keep the temperature of the heat exchanger 200 unchanged. The gear of the gas power unit 300 can be determined according to the test requirements. In the present invention, the gear of the gas power unit 300 is divided into three types: low gear, medium gear, and high gear. After each adjustment of the gear of the gas power unit 300, the heat exchanger 200 and the gas power unit 300 are allowed to run stably for a period of time, and the displacement sensor 500 and the laser interferometer assembly 600 are used to measure the positioning accuracy and repeatability accuracy of the current position of the object to be tested.

[0054] Working condition two: adjust the temperature of the heat exchanger 200 so that the temperature of the heat exchanger 200 becomes the test variable, and keep the gear position of the gas power unit 300 unchanged. The temperature of the heat exchanger 200 can be determined according to the test requirements. In the present invention, the temperature of the heat exchanger 200 is divided into 16°C, 18°C, 20°C, 22°C and 24°C for example. After each adjustment of the temperature of the heat exchanger 200, the heat exchanger 200 and the gas power unit 300 are allowed to run stably for a period of time, and the displacement sensor 500 and the laser interferometer assembly 600 are used to measure the positioning accuracy and repeatability accuracy of the current position of the object to be tested.

[0055] In the above two working conditions, the specific measurement method of the laser interferometer assembly 600 is as follows:

[0056] Positioning control is to make the motion component 400 drive the object to be measured to move forward from the zero position in sequence of 100㎜, 500㎜, 1000㎜ and 2000㎜. In each movement interval, the motion component 400 is stationary for about 10 seconds (that is, the object to be measured is stationary for about 10 seconds). The movement speed of the motion component 400 is controlled at 100㎜ / s. The laser interferometer component 600 collects the current position of the object to be measured when the motion component 400 is stationary.

[0057] Repeated control is to make the moving assembly 400 drive the object to be measured to move forward 100 mm from the zero position, the moving assembly 400 pauses for about 0.2 seconds (that is, the object to be measured pauses for about 0.2 seconds), and the laser interferometer assembly 600 collects the current position of the object to be measured when the moving assembly 400 is stationary. Then the moving assembly 400 drives the object to be measured to move forward 100 mm again, and the laser interferometer assembly 600 collects the current position of the object to be measured again when the moving assembly 400 is stationary; then the moving assembly 400 drives the object to be measured to move 100 mm in the direction of the zero position, and the moving assembly 400 is stopped. The moving component 400 pauses for about 0.2 seconds (i.e., the object to be measured pauses for about 0.2 seconds), and the laser interferometer component 600 collects the current position of the object to be measured when the moving component 400 is stationary. The moving component 400 again drives the object to be measured to move 100 mm in the direction of the zero position, and the moving component 400 pauses for about 0.2 seconds (i.e., the object to be measured pauses for about 0.2 seconds), and the laser interferometer component 600 collects the current position of the object to be measured when the moving component 400 is stationary. Thereafter, the above movement is repeated 30 times, and the movement speed of the moving component 400 is controlled at 100 mm / s.

[0058] Under the above two working conditions, the positioning accuracy and repeatability accuracy of the motion component 400 are measured by the laser interferometer assembly 600, and the positioning error of the motion platform assembly 400 under different environmental control conditions can be analyzed. That is, by changing at least one of the gear position of the gas power unit 300 and the temperature of the heat exchanger 200, the influence of different environmental control conditions on the positioning error of the motion component 400 when the object to be measured is the same can be studied.

[0059] In this way, the testing device 1 for the relationship between environmental control and positioning error of the embodiment of the present invention can test the influence of different environmental controls on the positioning error of the motion component 400, which is beneficial to improving the motion accuracy of the motion component of the micro-nano manufacturing equipment.

[0060] According to some specific embodiments of the present invention, Figure 9-12 As shown, the laser interferometer assembly 600 includes a laser 610 , a beam splitter 620 , a movable mirror 630 , and a fixed mirror 640 .

[0061] The laser 610 is arranged at one end of the motion component 400 and has a transmitting end 611 and a receiving end 612. The transmitting end 611 emits a detection laser that propagates in the direction of the motion component 400. The spectroscope 620 is arranged between the laser 610 and the motion component 400 and is located in the optical path of the detection laser. The spectroscope 620 splits the detection laser into a reference light and a measurement light whose propagation directions are not parallel. The measurement light propagates in the direction of the motion component 400. The movable reflector 630 is arranged at the motion component 400 and is used to reflect the measurement light to the spectroscope 620. The fixed reflector 640 is fixed in a relative position to the spectroscope 620 and is used to reflect the reference light to the spectroscope 620. Among them, the spectroscope 620 propagates the measurement light and the reference light to the receiving end 612, and the laser 610 obtains the current position of the motion component 400 according to the interference result of the measurement light and the reference light at the receiving end 612.

[0062] The beam splitter 620 has a semi-transmissive and semi-reflective function, that is, the beam splitter 620 reflects a portion of the detection laser to the fixed reflector 640 , and another portion of the detection laser can pass through the beam splitter 620 to propagate to the movable reflector 630 .

[0063] The laser 610 can be connected to the control and recording unit 700, which controls whether the laser 610 emits a detection laser. The detection laser can be a single-frequency light. A laser bracket 613 can be connected to the bottom of the laser 610. The laser bracket 613 fine-tunes the laser 610 up, down, left and right to ensure that the propagation direction of the detection laser is the same as the movement direction of the motion component 400.

[0064] When the motion component 400 drives the object to be measured to move relative to the spectroscope 620, the relative position of the movable reflector 630 and the spectroscope 620 changes, so that the interference result between the measuring light and the reference light at the receiving end 612 will change accordingly. The distance between the movable reflector 630 and the spectroscope 620 can be obtained through the interference result, so that the current position of the object to be measured can be determined.

[0065] Furthermore, if Figure 9-12 As shown, the laser 610, the beam splitter 620 and the movable reflector 630 are located on a first straight line, and the first straight line is parallel to the moving direction of the motion component 400, so that the test accuracy is higher, which is conducive to ensuring that the position of the object to be measured can always be accurately measured during the entire motion stroke of the motion component 400. The beam splitter 620 and the fixed reflector 640 are located on a second straight line perpendicular to the first straight line, wherein the movable reflector 630 and the fixed reflector 640 can be a corner reflector, which can reflect the input light beam back in a direction parallel to the input light beam, so that it is easy to arrange, and the positions of the movable reflector 630 and the fixed reflector 640 can be interchangeable, which is highly substitutable and easy to assemble.

[0066] According to some specific embodiments of the present invention, Figure 4-Figure 7 As shown, the motion assembly 400 includes a guide rail assembly 410 , a first height adjustment stud 420 , a motion seat 430 and a second height adjustment stud 440 .

[0067] The guide rail assembly 410 is provided with a first lens assembly mounting structure 450, the first lens assembly mounting structure 450 has a first threaded hole, the first height adjustment stud 420 is threadedly matched with the first threaded hole, and the beam splitter 620 and the fixed reflector 640 are mounted on the first height adjustment stud 420. The motion seat 430 is slidably connected to the guide rail assembly 410 and is provided with a second lens assembly mounting structure 460, the second lens assembly mounting structure 460 has a second threaded hole, the second height adjustment stud 440 is threadedly matched with the second threaded hole, and the movable reflector 630 is mounted on the second height adjustment stud 440.

[0068] For example, the displacement sensor 500 is a grating ruler, and the grating ruler extends along the movement direction of the moving assembly 400. The guide rail 411 has a receiving groove in its width direction, and the grating ruler is located in the receiving groove. The length of the grating ruler can be greater than the stroke of the moving seat 430, and in the length direction of the guide rail 411, both ends of the grating ruler exceed the stroke range of the moving seat 430. By using the grating ruler to detect the position of the moving seat 430, the detection accuracy of the moving seat 430 in its entire stroke is more consistent, which is conducive to improving the accuracy of the position detection of the moving seat 430.

[0069] By rotating the first height adjustment stud 420, a relative displacement can occur between the first height adjustment stud 420 and the first lens group mounting structure 450 in the axial direction of the first height adjustment stud 420, so that the heights of the beam splitter 620 and the fixed reflector 640 can be changed, wherein the beam splitter 620 can be installed on the first height adjustment stud 420, and the fixed reflector 640 is installed on the side of the beam splitter 620 that is away from the first height adjustment stud 420.

[0070] By rotating the second height adjustment screw 440 , a relative displacement can occur between the second height adjustment screw 440 and the second mirror assembly mounting structure 460 in the axial direction of the second height adjustment screw 440 , thereby changing the height of the movable reflector 630 .

[0071] In this way, it is helpful to adjust the beam splitter 620, the movable reflector 630 and the laser 610 to the same height, thereby ensuring the measurement accuracy.

[0072] Furthermore, if Figure 4-Figure 7As shown, the first mirror assembly mounting structure 450 includes a first mounting plate 451 and a first magnetic seat 452, the first mounting plate 451 is connected to the guide rail assembly 410, the first magnetic seat 452 is magnetically attracted to the first mounting plate 451 and is provided with a first threaded hole. The second mirror assembly mounting structure 460 includes a second mounting plate 461 and a second magnetic seat 462, the second mounting plate 461 is connected to the side of the moving seat 430 facing the laser 610, the second magnetic seat 462 is magnetically attracted to the side of the second mounting plate 461 facing the laser 610 and is provided with a second threaded hole, so that the moving reflector 630 is closer to the laser 610, which is conducive to improving the measurement accuracy of the laser interferometer assembly 600, and there will be no problem of interference between the second mirror assembly mounting structure 460 and the guide rail assembly 410 when the moving seat 430 is farthest from the laser 610.

[0073] The first magnetic seat 452 and the first mounting plate 451 are connected by magnetic attraction, so that the first magnetic seat 452 and the first mounting plate 451 can be easily disassembled and assembled, thereby facilitating the assembly of the motion component 400, and when the motion component 400 does not need to be equipped with a spectrometer 620 and a fixed reflector 640, the first magnetic seat 452 can be removed from the first mounting plate 451 to reduce the volume of the guide rail assembly 410 and facilitate the arrangement of the motion component 400.

[0074] The second magnetic seat 462 and the second mounting plate 461 are connected by magnetic attraction, so that the second magnetic seat 462 and the second mounting plate 461 can be easily disassembled and assembled, thereby facilitating the assembly of the motion component 400, and when the motion component 400 does not need to be provided with a movable reflector 630, the second magnetic seat 462 can be removed from the second mounting plate 461 to reduce the volume of the motion seat 430 and facilitate the arrangement of the motion component 400.

[0075] For example, the second mounting plate 461 can be a fixed card, which is clamped with the second magnetic seat 462. In this way, in addition to the magnetic attraction force, the second magnetic seat 462 and the second mounting plate 461 are also fixed by a clamping force, which is beneficial to improve the relative position stability between the second magnetic seat 462 and the second mounting plate 461.

[0076] Alternatively, if Figure 4-Figure 7 As shown, the first mounting plate 451 includes a vertical portion 451a and a horizontal portion 451b. The vertical portion 451a extends in a vertical direction and is connected to the side of the guide rail assembly 410 facing the laser 610. The horizontal portion 451b extends in a horizontal direction and extends from the upper end of the vertical portion 451a toward the direction of the laser 610. The first magnetic seat 452 is magnetically attracted to the upper surface of the horizontal portion 451b.

[0077] By providing the vertical portion 451a, the connection area between the first mounting plate 451 and the guide rail assembly 410 can be increased, and the connection strength between the first mounting plate 451 and the guide rail assembly 410 can be improved, and the horizontal portion 451b can provide reliable support for the first magnetic seat 452, the first height adjustment stud 420, the beam splitter 620 and the fixed reflector 640 below the first magnetic seat 452, the first height adjustment stud 420, the beam splitter 620 and the fixed reflector 640, thereby preventing the beam splitter 620 and the fixed reflector 640 from being separated from the guide rail assembly 410, and there is no need to worry about the beam splitter 620 and the fixed reflector 640 being displaced relative to the guide rail assembly 410 in the vertical direction. In addition, the horizontal portion 451b extends from the vertical portion 451a in a direction away from the moving seat 430, so that the horizontal portion 451b does not extend into the movement stroke of the moving seat 430, thereby preventing the horizontal portion 451b from interfering with the movement of the moving seat 430.

[0078] According to some specific embodiments of the present invention, Figure 4-Figure 7 As shown, the motion assembly 400 further includes a stator 470 , a drag chain bracket 480 and a drag chain 481 .

[0079] The stator 470 is arranged along the length direction of the guide rail assembly 410, the moving seat 430 has a power-on coil connected to the control and recording unit 700, the control and recording unit 700 controls the power on and off of the power-on coil, the drag chain bracket 480 is arranged on the moving seat 430, the drag chain 481 is connected to the drag chain bracket 480, and the wire between the control and recording unit 700 and the power-on coil is arranged in the drag chain 481.

[0080] The stator 470 is used to form a stable magnetic field. When the energized coil is energized, a Lorentz force is generated in the magnetic field formed by the stator 470. The Lorentz force pushes the moving seat 430 to move along the length direction of the guide rail assembly 410. In addition, the drag chain bracket 480 plays the role of fixing the drag chain 481 and the moving seat 430 together. The drag chain 481 can prevent the wire between the control recording unit 700 and the energized coil from rubbing against other objects, thereby reducing the probability of the wire being worn due to the movement of the moving seat 430.

[0081] According to some specific embodiments of the present invention, Figure 4-Figure 7 As shown, the guide rail assembly 410 includes a guide rail 411 , a slider 412 , a sensor 413 , an end plate 414 , a wing plate 415 , and a cover plate 416 .

[0082] The slider 412 is slidably connected to the guide rail 411 and fixedly connected to the moving seat 430. The sensor 413 is arranged on the guide rail 411 and connected to the control and recording unit 700, and is used to detect whether the moving seat 430 moves to the right position. The control and recording unit 700 controls the power-on and power-off of the energized coil according to the electrical signal of the sensor 413. The end plates 414 are arranged at both ends of the guide rail 411, the wing plates 415 are arranged at opposite sides of the width direction of the guide rail 411, and the cover plate 416 is arranged above the guide rail 411 and below the moving seat 430.

[0083] The slider 412 can be transitionally matched with the guide rail 411 to ensure reliable fixation between the slider 412 and the guide rail 411 and low movement resistance. In addition, the sensor 413 is used to stop the motion seat 430 in an emergency to avoid collision and improve the reliability of the motion assembly 400. When the sensor 413 senses the motion seat 430, it can output an electrical signal to the control and recording unit 700, and the control and recording unit 700 controls the power-on coil to be de-energized. At this time, the power-on coil will not generate Lorentz force in the magnetic field of the stator 700, and the motion seat 430 will stop moving relative to the guide rail 411.

[0084] In addition, the end plates 414 seal and protect the guide rail 411 and the grating scale from both ends of the guide rail 411, the wing plates 415 seal and protect the guide rail 411 and the grating scale from both sides in the width direction of the guide rail 411, and the cover plate 416 seals and protects the guide rail 411 and the grating scale from the top of the guide rail 411, and the cover plate 416 will not interfere with the connection between the slider 412 and the moving seat 430.

[0085] In addition, the end plate 414 also has the function of limiting the movement range of the moving seat 430, so that the sensor 413 soft-limits the moving seat 430 through an electrical signal, and the end plate 414 hard-limits the moving seat 430 through a stop collision, thereby preventing the moving seat 430 from separating from the guide rail 411, and limiting the travel range of the moving seat 430 is more reliable.

[0086] According to some specific embodiments of the present invention, Figure 1-Figure 3 As shown, the testing device 1 further includes a temperature controller 210 , a filter 310 , a water receiving plate 220 and an air duct plate 320 .

[0087] The temperature controller 210 is arranged outside the test space 110 and includes a heating unit, a refrigeration unit and a circulation loop 211. The circulation loop 211 is connected to the heat exchanger 200. The heating unit heats the circulating fluid in the circulation loop 211, and the refrigeration unit cools the circulating fluid in the circulation loop 211. The temperature controller 210 is connected to the control and recording unit 700. The control and recording unit 700 controls the temperature of the heat exchanger 200 by controlling the outlet water temperature of the circulating fluid in the temperature controller 210.

[0088] The filter 310 is disposed on one side of the gas power unit 300 facing the air inlet 120, and is used to rectify and filter the gas guided by the gas power unit 300 to the test space 110, wherein the filter 310 may be a high-efficiency filter 310. The water receiving plate 220 is connected to the main body 100 and is provided with a water receiving groove 221. The water receiving plate 220 is located below the heat exchanger 200, and is used to receive the condensed water dripping from the heat exchanger 200 to prevent the condensed water from falling into the test space 110.

[0089] The air duct plate 320 is located on the side of the gas power unit 300 and the heat exchanger 200 facing away from the main body 100 and covers the gas power unit 300 and the heat exchanger 200. An air duct is provided on the side of the air duct plate 320 facing the main body 100. The gas power unit 300 guides the gas in the direction of the heat exchanger 200 to flow from the air duct to the air inlet 120. The setting of the air duct plate 320 can make the driving force generated by the gas power unit 300 mainly act on the air near the heat exchanger 200, so as to improve energy utilization and ensure that the temperature entering the test space 110 is more controlled.

[0090] According to some specific embodiments of the present invention, Figure 1-Figure 3 As shown, the gas power unit 300 is a fan, the axial direction of the fan is perpendicular to the air inlet 120, one end of the fan corresponds to the position of the air inlet 120 and the other end corresponds to the position of the air duct, so that the fan can guide the gas in the air duct to the air inlet 120. In addition, the heat exchanger 200 is spaced from the main body 100 to form an air inlet gap 230, and the heat exchanger 200 has a heat exchange channel 240 that passes through the axial direction of the fan, and the two ends of the heat exchange channel 240 are respectively connected to the air inlet gap 230 and the air duct, and the gas at the air inlet gap 230 will pass through the heat exchange channel 240 and then enter the air duct to achieve heat exchange between the gas and the heat exchanger 200, and the heat exchanger 200 may have a heat exchange plate 250, and the heat exchange channel 240 is formed between the heat exchange plates 250.

[0091] According to some specific embodiments of the present invention, Figure 8 As shown, the testing device 1 further includes a base 800 and an exposure system 900 .

[0092] The base 800 is arranged in the test space 110, the moving component 400 is installed on the base 800, and the exposure system 900 includes an exposure lens 910, a first column 920, a second column 930 and a supporting beam 940. The first column 920 and the second column 930 are respectively connected to the base 800 and are located on both sides of the width direction of the moving component 400. The two ends of the supporting beam 940 are respectively connected to the first column 920 and the second column 930 and are located above the moving component 400. The exposure lens 910 is arranged on the supporting beam 940 to expose the object to be tested on the moving component 400.

[0093] Among them, the first column 920, the second column 930 and the supporting beam 940 provide a stable support for the exposure lens 910 to prevent the exposure lens 910 from relative displacement with respect to the base 800. The moving seat 430 of the moving assembly 400 can be provided with a lifting platform 490 for carrying the object to be tested. Through the setting of the lifting platform 490, the distance between the object to be tested and the exposure lens 910 can be adjusted to make the object to be tested be in the optimal exposure position of the exposure lens 910. The object to be tested can be a circuit board.

[0094] In addition, the base 800 , the first column 920 , the second column 930 and the supporting beam 940 may be supported by marble material. Marble has a small thermal expansion coefficient and is not easily affected by temperature, which has a good positioning effect on the moving component 400 and the exposure system 900 .

[0095] According to some specific embodiments of the present invention, the testing device 1 further includes an anemometer, a first temperature detection unit, a second temperature detection unit and a third temperature detection unit 820 .

[0096] The anemometer is disposed in the test space 110 to detect the wind speed of the air inlet 120. The first temperature detection unit is disposed in the test space 110 to detect the air temperature of the air inlet 120. The second temperature detection unit 810 is disposed in the test space 110 to detect at least one of the temperature of the base 800 and the temperature of the supporting beam 940. The third temperature detection unit 820 is disposed in the test space 110 to detect the air temperature in the test space 110.

[0097] For example, the anemometer and the first temperature detection unit can be integrated into one as a thermal anemometer, which includes a working host and a handheld probe, and the handheld probe has a first temperature sensor and a speed sensor, which can measure the inlet wind speed and inlet wind temperature of the air inlet 120, and the working host can display the measured inlet wind speed and inlet wind temperature in real time. In this way, it can be ensured that the temperature and wind speed of the air inlet 120 meet the test expectations.

[0098] The second temperature detection unit 810 may be a material temperature sensor, used to detect the temperature of the base 800 and the temperature of the supporting beam 940, and the second temperature detection unit 810 may be bonded to the base 800 or the supporting beam 940. The third temperature detection unit 820 is an air temperature sensor, and the third temperature detection unit 820 may be fixed to the base 800 by adhesive, and is used to detect the temperature of the gas in the test space 110.

[0099] In addition, the laser interferometer assembly 600 also includes a compensation unit 830. The second temperature detection unit 810 and the third temperature detection unit 820 are connected to the compensation unit 830 via wires. The compensation unit 830 is connected to the control and recording unit 700. The compensation unit 830 can transmit the temperature signals collected by the second temperature detection unit 810 and the third temperature detection unit 820 to compensate for the change in laser wavelength caused by the temperature change in the test space 110, thereby improving the test accuracy of the laser interferometer assembly 600.

[0100] The second temperature detection unit 810 and the third temperature detection unit 820 may be platinum resistance temperature sensors, and each temperature sensor is composed of a temperature probe and a data acquisition device.

[0101] Two environmental test conditions of the test device 1 are described with examples in conjunction with the accompanying drawings:

[0102] Working condition 1: adjusting the gear of the gas power unit 300 so that the gear of the gas power unit 300 becomes a test variable, keeping the outlet water temperature of the circulating fluid of the thermostat 210 unchanged, that is, the temperature of the heat exchanger 200 unchanged, the gear of the gas power unit 300 can be determined according to the test requirements, and in the present invention, the gear of the gas power unit 300 is divided into three types: low gear, medium gear, and high gear. After each adjustment of the gear of the gas power unit 300, the thermostat 210 and the gas power unit 300 are allowed to run stably for a period of time, and the wind speed and temperature of the air outlet surface of the filter 310 at three different gears are measured respectively by using a thermal anemometer, and at least the temperature of the base 800, the temperature of the supporting beam 940, and the gas temperature in the test space 110 are collected by using a platinum resistance temperature sensor;

[0103] Working condition two: adjusting the outlet water temperature of the circulating fluid of the thermostat 210, that is, adjusting the temperature of the heat exchanger 200, so that the temperature of the heat exchanger 200 becomes a test variable, and keeping the gear position of the gas power unit 300 unchanged, the temperature of the heat exchanger 200 can be determined according to the test requirements. In the present invention, the temperature of the heat exchanger 200 is divided into 16°C, 18°C, 20°C, 22°C and 24°C for example. After each adjustment of the temperature of the heat exchanger 200, the heat exchanger 200 and the gas power unit 300 are allowed to run stably for a period of time, and the wind speed and temperature of the air outlet surface of the filter 310 at three different gears are respectively measured by a thermal anemometer, and at least the temperature of the base 800, the temperature of the supporting beam 940 and the gas temperature in the test space 110 are collected by a platinum resistance temperature sensor.

[0104] Through the measurement data under the above-mentioned environmental test conditions, the temperature change patterns of the exposure system 900 and the base 800 in the test device 1 can be analyzed respectively when the gear position of the gas power unit 300 is changed and the temperature of the heat exchanger 200 remains unchanged, and when the temperature of the heat exchanger 200 is changed and the gear position of the gas power unit 300 remains unchanged.

[0105] In addition, the changes in wind speed and wind temperature at the outlet surface of the filter 310 when the gear of the gas power unit 300 and the temperature of the heat exchanger 200 are changed can be obtained, and the uniformity of wind speed and temperature at the outlet surface of the filter 310 can be analyzed.

[0106] In other words, under different combinations of the temperatures of the gas power unit 300 and the heat exchanger 200, combined with the airflow parameters of the air outlet surface of the filter 310, on the one hand, the environment in the test space 110 can be controlled, and on the other hand, the influence of changing the gear of the gas power unit 300 and the temperature of the heat exchanger 200 on different areas in the test space 110 can be analyzed.

[0107] Other structures and operations of the testing device 1 for the relationship between environment control and positioning error according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0108] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example.

[0109] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A test device for the relationship between environmental control and positioning error, characterized in that: include: A main body, wherein the main body is provided with a test space and an air inlet communicating with the test space; a heat exchanger, the heat exchanger being mounted on the main body and located outside the test space; A gas power unit, which is installed on the main body and drives gas to flow to form a test airflow, and the test airflow flows through the heat exchanger, the air inlet and the test space in sequence; A motion component, which is disposed in the test space and is used to carry the object to be tested; A displacement sensor, the displacement sensor is arranged in the test space and is used to detect the current position of the object to be tested; A laser interferometer component, the laser interferometer component is arranged in the test space and is used to detect the current position of the object to be tested; A control and recording unit is arranged outside the test space and is respectively connected to the heat exchanger, the gas power unit, the motion component, the displacement sensor and the laser interferometer component, and is used to control the temperature of the heat exchanger, the flow rate of the test airflow, and obtain the detection results of the displacement sensor and the detection results of the laser interferometer component.

2. The device for testing the relationship between environmental control and positioning error according to claim 1, characterized in that: The displacement sensor is a grating ruler, and the grating ruler extends along the moving direction of the moving component.

3. The device for testing the relationship between environmental control and positioning error according to claim 1, characterized in that: The laser interferometer assembly comprises: A laser, which is disposed at one end of the motion component and has a transmitting end and a receiving end, and the transmitting end emits a detection laser that propagates in the direction of the motion component; A beam splitter, which is disposed between the laser and the motion component and is located in the optical path of the detection laser, and which splits the detection laser into a reference light and a measurement light whose propagation directions are not parallel, and the measurement light propagates in the direction of the motion component; A movable reflector, the movable reflector is arranged at a fixed relative position between the moving component and the object to be measured, and is used to reflect the measuring light to the spectroscope; A fixed reflector, wherein the relative position of the fixed reflector and the beam splitter is fixed, and is used for reflecting the reference light to the beam splitter; The spectroscope transmits the reference light and the measuring light to the receiving end, and the laser obtains the current position of the object to be measured according to the interference result between the reference light and the measuring light at the receiving end.

4. The device for testing the relationship between environmental control and positioning error according to claim 3, characterized in that: The laser, the beam splitter and the movable reflector are located on a first straight line, and the first straight line is parallel to the moving direction of the moving component; The beam splitter and the fixed reflector are located on a second straight line perpendicular to the first straight line.

5. The device for testing the relationship between environmental control and positioning error according to claim 4, characterized in that: The motion components include: A guide rail assembly, wherein the guide rail assembly is provided with a first lens group mounting structure, and the first lens group mounting structure has a first threaded hole; a first height adjustment stud, the first height adjustment stud is threadedly matched with the first threaded hole, and the beam splitter and the fixed reflector are mounted on the first height adjustment stud; A moving seat, the moving seat is slidably connected to the guide rail assembly and is provided with a second lens group mounting structure, the moving seat is used to carry the object to be measured, and the second lens group mounting structure has a second threaded hole; A second height adjustment stud is threadedly matched with the second threaded hole, and the movable reflector is mounted on the second height adjustment stud.

6. The device for testing the relationship between environmental control and positioning error according to claim 5, characterized in that: The first lens assembly mounting structure comprises a first mounting plate and a first magnetic seat, the first mounting plate is connected to the guide rail assembly, the first magnetic seat is magnetically attracted to the first mounting plate and is provided with the first threaded hole; The second mirror assembly mounting structure includes a second mounting plate and a second magnetic seat, the second mounting plate is connected to the side of the moving seat facing the laser, the second magnetic seat is magnetically attracted to the side of the second mounting plate facing the laser and is provided with the second threaded hole.

7. The device for testing the relationship between environmental control and positioning error according to claim 6, characterized in that: The first mounting plate comprises: A vertical portion extending in a vertical direction and connected to a side of the guide rail assembly facing the laser; The horizontal portion extends in a horizontal direction and extends from the upper end of the vertical portion toward the direction close to the laser, and the first magnetic seat is magnetically attracted to the upper surface of the horizontal portion.

8. The device for testing the relationship between environmental control and positioning error according to claim 5, characterized in that: The motion assembly also includes: A stator, wherein the stator is arranged along the length direction of the guide rail assembly, and the moving seat has an energized coil connected to the control and recording unit, and the control and recording unit controls the on and off of power to the energized coil; A drag chain bracket, the drag chain bracket is arranged on the moving seat; A drag chain is connected to the drag chain bracket, and a wire between the control and recording unit and the energized coil is arranged in the drag chain.

9. The device for testing the relationship between environmental control and positioning error according to claim 8, characterized in that: The guide rail assembly comprises: guide; A slider, the slider being slidably connected to the guide rail and fixedly connected to the moving seat; A sensor, which is arranged on the guide rail and connected to the control and recording unit, and is used to detect whether the motion seat has moved into place, and the control and recording unit controls the on and off of the energized coil according to the electrical signal of the sensor; End plates, the end plates being arranged at both ends of the guide rail; Wing plates, the wing plates are arranged on opposite sides of the guide rail in the width direction; A cover plate is arranged above the guide rail and below the moving seat.

10. The device for testing the relationship between environmental control and positioning error according to claim 1, characterized in that: Also includes: a temperature controller, the temperature controller being arranged outside the test space and comprising a heating unit, a refrigeration unit and a circulation loop, the circulation loop being in communication with the heat exchanger, the heating unit heating the circulating fluid in the circulation loop, and the refrigeration unit cooling the circulating fluid in the circulation loop; A filter, the filter being arranged on a side of the gas power unit facing the air inlet, and being used for rectifying and filtering the gas guided into the test space by the gas power unit; A water receiving plate, the water receiving plate is connected to the main body and is provided with a water receiving groove, the water receiving groove is used to receive condensed water dripping from the heat exchanger; An air duct plate, the air duct plate is located on a side of the gas power unit and the heat exchanger facing away from the main body and covers the gas power unit and the heat exchanger, a side of the air duct plate facing the main body is provided with an air duct, and the gas power unit guides the gas in the direction of the heat exchanger to flow from the air duct to the air inlet; Wherein, the temperature controller is connected to the control and recording unit, and the control and recording unit controls the temperature of the heat exchanger by controlling the outlet water temperature of the circulating fluid in the temperature controller.

11. The device for testing the relationship between environmental control and positioning error according to claim 10, characterized in that: The gas power unit is a fan, the axial direction of the fan is perpendicular to the air inlet, one end of the fan corresponds to the position of the air inlet and the other end corresponds to the position of the air duct; The heat exchanger is spaced from the main body to form an air inlet gap. The heat exchanger has a heat exchange channel that penetrates along the axial direction of the fan. Both ends of the heat exchange channel are respectively connected to the air inlet gap and the air duct.

12. The device for testing the relationship between environmental control and positioning error according to claim 1, characterized in that: Also includes: A base, the base is arranged in the test space, and the motion component is installed on the base; An exposure system, the exposure system comprising an exposure lens, a first column, a second column and a supporting beam, the first column and the second column are respectively connected to the base and are located on both sides of the width direction of the moving component, the two ends of the supporting beam are respectively connected to the first column and the second column and are located above the moving component, and the exposure lens is arranged on the supporting beam to expose the object to be tested.

13. The device for testing the relationship between environmental control and positioning error according to claim 12, characterized in that: Also includes: An anemometer, the anemometer is arranged in the test space and is used to detect the wind speed of the air inlet; A first temperature detection unit, the first temperature detection unit is arranged in the test space and is used to detect the inlet air temperature of the air inlet; a second temperature detection unit, the second temperature detection unit being disposed in the test space and configured to detect at least one of a temperature of the base and a temperature of the supporting beam; A third temperature detection unit is disposed in the test space and is used to detect the air temperature in the test space.

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