Peeling apparatus and peeling method for peeling apparatus

Abstract

A peeling apparatus includes a peeling bath containing a first solution; a support portion disposed in the peeling bath and configured to include a laminate of a base layer extending in a first direction and a film bonded to the base layer; and a suction device that suctions the base layer to peel the film, the suction device including a suction portion that suctions the base layer and a moving portion that moves the suction portion in conjunction with the suction portion to bend the base layer toward a second direction that intersects the first direction, thereby peeling the base layer and the film.

Description

Technical Field

[0001] The present invention relates to a peeling device and a peeling method thereof, and more particularly to a peeling device and a peeling method thereof for peeling a substrate layer from a membrane. Background Technology

[0002] Various forms of display devices are used to provide image information. Recently, display devices including flexible display panels that can be folded or bent have been used. Unlike rigid display devices, flexible display devices can be folded, rolled, or bent in various ways, and therefore have the characteristic of being portable without being limited by the size of the displayed screen.

[0003] Such flexible display devices require a window that can cover the display panel and protect it from external impacts without hindering folding or bending operations. Therefore, there is a need to develop a flexible window that possesses strong and high durability against external impacts while still allowing for folding or bending operations. Summary of the Invention

[0004] The purpose of this invention is to provide a peeling device and method for peeling a flexible substrate layer from an adhesive film.

[0005] A peeling device according to an embodiment of the present invention includes: a peeling tank containing a first solution; a support portion disposed in the peeling tank and configured to include a substrate layer extending in a first direction and a membrane bonded to the substrate layer; and an adsorption device for adsorbing the substrate layer and peeling it off from the membrane. Alternatively, the adsorption device may include: an adsorption portion for adsorbing the substrate layer; and a moving portion coupled to the adsorption portion to move the adsorption portion so that the substrate layer bends toward a third direction intersecting the first direction, thereby peeling the membrane off from the substrate layer.

[0006] As an embodiment of the present invention, the first solution may include water, and the temperature of the water may be between 50°C and 90°C.

[0007] In one embodiment of the present invention, the substrate layer may include: an upper surface for adsorption onto the adsorption portion; and a lower surface for bonding with the membrane. Alternatively, the adsorption device may detach the lower surface of the substrate layer from the membrane.

[0008] In one embodiment of the present invention, the peeling device may further include a first nozzle. Alternatively, when the substrate layer bends in a third direction through the adsorption device, the first nozzle may face the peeling area of ​​the lower surface. Or, the first nozzle may spray a second solution toward the peeling area of ​​the lower surface and the membrane, the second solution containing the same substance as the first solution.

[0009] In one embodiment of the present invention, the stripping device may further include a second nozzle. The second nozzle may spray a third solution toward the upper surface, the third solution containing the same substance as the first solution.

[0010] In one embodiment of the present invention, the substrate layer includes: a first substrate layer; and a second substrate layer, and the membrane includes: an adhesive membrane disposed between the first substrate layer and the second substrate layer to bond the first substrate layer and the second substrate layer. Alternatively, the adsorption portion may be adsorbed onto the second substrate layer.

[0011] As an embodiment of the present invention, the stripping device may further include a gripper, which, after the second substrate layer is stripped from the membrane by the adsorption device, grips the membrane and removes the membrane from the stripping tank.

[0012] As an embodiment of the present invention, after the adsorption portion adsorbs onto the second substrate layer, the moving portion moves from a first position to a second position to separate the first substrate layer and the membrane before moving the adsorption portion to cause the second substrate layer to bend in the third direction.

[0013] As an embodiment of the present invention, the third direction may be a direction orthogonal to the first direction.

[0014] As an embodiment of the present invention, the substrate layer may include thin-film glass.

[0015] In one embodiment of the present invention, the adsorption part may include: a plurality of suction cups adsorbed onto the base layer; and a connecting part connecting the moving part and the suction cups. The base layer may include: a first region located in the central portion of the base layer; and a second region located around the first region. When the position where the suction cups adsorb onto the base layer is defined as the adsorption point, the adsorption point may be included in the second region.

[0016] A peeling method of a peeling apparatus according to an embodiment of the present invention includes: a step of disposing in a support portion disposed in a peeling tank containing a first solution a laminate comprising a base layer extending in a first direction and a membrane bonded to the base layer; and a step of peeling the base layer from the membrane by adsorbing the base layer using an adsorption device. The peeling step may include: adsorbing the adsorption portion onto the base layer; and moving the adsorption portion by a moving portion to bend the base layer toward a third direction intersecting the first direction, thereby peeling the base layer and the membrane.

[0017] As an embodiment of the present invention, the first solution may include water, and the temperature of the water may be between 50°C and 90°C.

[0018] In one embodiment of the present invention, the substrate layer may include: an upper surface for adsorption onto the adsorption portion; and a lower surface for bonding with the membrane. The adsorption device detaches the lower surface of the substrate layer from the membrane.

[0019] As an embodiment of the present invention, the peeling method of the peeling device may further include: when the substrate layer bends in a third direction through the adsorption portion, a second solution is sprayed toward the peeling area of ​​the lower surface and the membrane through a first nozzle facing the peeling area of ​​the lower surface. In this case, the second solution may contain the same substance as the first solution.

[0020] In one embodiment of the present invention, the peeling method of the peeling device may further include the step of spraying a third solution toward the upper surface through a second nozzle. In this case, the third solution may contain the same substance as the first solution.

[0021] As an embodiment of the present invention, the base layer may include: a first base layer; and a second base layer, and the film may include: an adhesive film disposed between the first base layer and the second base layer to bond the first base layer and the second base layer.

[0022] In one embodiment of the present invention, in the step of adsorbing the adsorption portion onto the substrate layer, the second substrate layer is adsorbed onto the adsorption portion. In the step of peeling off the substrate layer and the membrane, the second substrate layer is peeled off from the membrane. Alternatively, the peeling method of the peeling device may, after the step of peeling off the substrate layer from the membrane, further include a step of removing the membrane from the peeling tank by gripping the membrane with a gripper.

[0023] As an embodiment of the present invention, the peeling method of the peeling device may include, before the step of peeling the substrate layer from the membrane, a step of moving the adsorption portion from a first position to a second position.

[0024] As one embodiment of the present invention, the substrate layer may include thin-film glass.

[0025] (Invention Effects)

[0026] According to the present invention, in a laminate comprising a flexible substrate layer and a membrane bonded to said substrate layer, the substrate layer can be peeled off from the membrane using a peeling device. Specifically, the peeling device can be used to peel off the substrate layer from the membrane while minimizing potential damage to the substrate layer. Therefore, the reliability of the process for peeling the substrate layer off the membrane can be ensured and process efficiency can be improved. Attached Figure Description

[0027] Figure 1a This is a perspective view showing the unfolded state of a display device according to an embodiment of the present invention.

[0028] Figure 1b It is shown Figure 1a A perspective view of the folding process of the display device shown.

[0029] Figure 2 It is along Figure 1a The cross-sectional view shown is taken by the intercept line II′.

[0030] Figure 3 This is a cross-sectional view of a laminate including a substrate layer and a membrane according to an embodiment of the present invention.

[0031] Figure 4 This is a process diagram illustrating the process of arranging a laminate in a support portion according to an embodiment of the present invention.

[0032] Figure 5a This is a process diagram illustrating the process of adsorbing an adsorption device onto a second substrate layer according to an embodiment of the present invention.

[0033] Figure 5b This is a plan view of the second substrate layer illustrating the adsorption points according to an embodiment of the present invention.

[0034] Figure 6 This is a process diagram illustrating the process of separating the membrane and the first substrate layer according to an embodiment of the present invention.

[0035] Figure 7a This is a process diagram illustrating a process according to an embodiment of the present invention, in which the adsorption portion is moved to cause the second substrate layer to bend toward a third direction.

[0036] Figure 7b The enlarged view is shown to illustrate the first to third nozzles. Figure 7a A process diagram of a part of the stripping device corresponding to AA′.

[0037] Figure 8 This is a process diagram illustrating the process of removing the second substrate layer from the stripping tank according to an embodiment of the present invention.

[0038] Figure 9This is a process diagram illustrating the process of removing a membrane from a stripping tank using a gripper according to an embodiment of the present invention.

[0039] Figure 10 This is a flowchart illustrating a peeling method using a peeling apparatus according to an embodiment of the present invention.

[0040] Figure 11 This is a flowchart illustrating the steps of peeling off the substrate layer and the membrane according to an embodiment of the present invention, and the steps of spraying the second and third solutions through the first and second nozzles.

[0041] (Explanation of reference numerals in the attached diagram)

[0042] PD: Stripping device; PT: Stripping tank

[0043] SL1: First solution; BS: Basal layer

[0044] BS1: First basal layer; BS2: Second basal layer

[0045] FL: Membrane; LM: Laminated composite

[0046] SPT: Support section; ADD: Adsorption device

[0047] ACP: Adsorption Unit; MVP: Movement Unit

[0048] US: Upper surface; DS: Lower surface

[0049] NZ1: First nozzle; NZ2: Second nozzle

[0050] PR: Stripping region; SL2: Second solution

[0051] SL3: Third solution; GRP: Grabber

[0052] PS1: First position PS2: Second position

[0053] SP: Suction Cup CNP: Connecting Part

[0054] AR1: Area 1 AR2: Area 2

[0055] AP: Adsorption point Detailed Implementation

[0056] In this specification, when a constituent element (or region, layer, part, etc.) is referred to as being "on", "connected to", or "integrated with" another constituent element, it means that the constituent element can be directly configured / connected / integrated on the other constituent element, or that a third constituent element can be configured between them.

[0057] The same reference numerals refer to the same constituent elements. Furthermore, in the drawings, the thickness, scale, and dimensions of the constituent elements are enlarged for the purpose of effectively illustrating the technical content.

[0058] "And / or" includes all combinations that can be defined by the relevant composition.

[0059] The terms "first," "second," etc., can be used to describe multiple constituent elements, but the constituent elements described above are not limited by these terms. These terms are used only to distinguish one constituent element from another. For example, without departing from the scope of the invention, a first constituent element may be named a second constituent element, and similarly, a second constituent element may be named a first constituent element. Singular expressions include plural expressions unless explicitly stated otherwise in the context.

[0060] In addition, terms such as "below," "lower side," "above," and "upper side" are used to describe the relational relationships of the components shown in the accompanying drawings. These terms are relative concepts and are explained based on the directions indicated in the accompanying drawings.

[0061] Unless otherwise defined, all terms used in this specification (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Furthermore, terms such as those defined in commonly used dictionaries shall be interpreted as having the same meaning in the context of the relevant art, and may be explicitly defined herein unless interpreted as having an idealized or overly formal meaning.

[0062] Terms such as “including” or “having” should be understood as indicating the presence of features, figures, steps, operations, constituent elements, components, or combinations thereof as described in the specification, and do not preclude the presence or additional possibilities of one or more other features or figures, steps, operations, constituent elements, components, or combinations thereof.

[0063] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0064] Figure 1a This is a perspective view showing the unfolded state of a display device according to an embodiment of the present invention. Figure 1b It is shown Figure 1a A perspective view of the folding process of the display device shown.

[0065] Reference Figure 1a The display device DD can be a device activated by an electrical signal. The display device DD can include various embodiments. For example, the display device DD can include a tablet, a laptop, a computer, a smart TV, etc. In this embodiment, an exemplary case is shown where the display device DD is a foldable smartphone.

[0066] The display device DD has a rectangular shape, with a short side extending in a first direction DR1 and a long side extending in a second direction DR2 that intersects the first direction DR1. The second direction DR2 can be perpendicular to the first direction DR1. However, the shape of the display device DD is not limited to this; various shapes of display devices DD can be provided.

[0067] The display device DD can display an image IM on a first display surface FS parallel to each of the first direction DR1 and the second direction DR2, facing a third direction DR3. The first display surface FS for displaying the image IM can correspond to the front surface of the display device DD. The image IM can include both moving and still images. Figure 1a In the example of image-based instant messaging, an internet search window and a time window are shown.

[0068] In this embodiment, the front (or top) and back (or bottom) of each component are defined based on the direction of the displayed image IM. Alternatively, the front and back may be opposite each other on a third-party DR3, with their respective normal directions parallel to the third-party DR3.

[0069] The spacing between the front and back sides on the third-direction DR3 can correspond to the thickness / height of the display device DD on the third-direction DR3. On the other hand, the directions indicated by the first to third-direction DR1, DR2, and DR3 are relative concepts and can be converted to other directions.

[0070] The display device DD can sense external input applied from the outside. External input can include various forms of input provided from outside the display device DD. For example, external input can include contact caused by a part of the user's body such as a hand, and external input applied when the display device DD is close to or adjacent to it at a predetermined distance (e.g., hovering). In addition, it can be in various forms such as force, pressure, temperature, light, etc.

[0071] The display device DD according to this embodiment may include a first display surface FS and a second display surface RS. The first display surface FS may include an active area F-AA, a peripheral area F-NAA, and an electronic module area EMA. The second display surface RS may be defined as a surface facing at least a portion of the first display surface FS. That is, the second display surface RS may be defined as a portion of the rear surface of the display device DD.

[0072] The active region F-AA can be an area activated by an electrical signal. The active region F-AA is the area that displays the image IM and can sense various forms of external input. The peripheral region F-NAA is adjacent to the active region F-AA. The peripheral region F-NAA can have a predetermined color. The peripheral region F-NAA can surround the active region F-AA. Thus, the shape of the active region F-AA can be substantially defined by the peripheral region F-NAA. However, as illustrated by example, the peripheral region F-NAA can also be configured to be adjacent only to one side of the active region F-AA, or it can be omitted. A display device DD according to an embodiment of the present invention can include active regions of various shapes, and is not limited to any particular embodiment.

[0073] The Electronic Module Area (EMA) can be configured with various electronic modules. For example, an electronic module may include at least one of a camera, a speaker, a light sensor, and a thermal sensor. The EMA may sense an external subject received through the first or second display surface (FS, RS), or provide audio signals such as voice to the outside through the first or second display surface (FS, RS). The electronic module may also include multiple configurations, and is not limited to any one embodiment.

[0074] The electronic module area (EMA) can be surrounded by the active area (F-AA) and the surrounding area (F-NAA). However, it is not limited to this; the electronic module area (EMA) can be configured within the active area (F-AA), and is not limited to any particular embodiment.

[0075] The display device DD according to this embodiment may include at least one folded region FA1 and a plurality of non-folded regions NFA1, NFA2 extending from the folded region FA1. The non-folded regions NFA1, NFA2 may be configured to be spaced apart from each other across the folded region FA1.

[0076] Reference Figure 1b According to one embodiment, the display device DD includes a virtual folding axis AX1 extending in a second direction DR2. The folding axis AX1 can extend along the second direction DR2 on a first display surface FS. That is, the folding axis AX1 can extend along the long axis direction of the display device DD.

[0077] In this embodiment, the non-foldable regions NFA1 and NFA2 can be configured to be adjacent to the foldable region FA1 across the foldable region FA1. For example, the first non-foldable region NFA1 can be configured along the first direction DR1 on one side of the foldable region FA1, and the second non-foldable region NFA2 can be configured along the first direction DR1 on the other side of the foldable region FA1.

[0078] The display device DD can be folded around the folding axis AX1 to deform into an in-folding state where one region of the first display surface FS overlaps with the first non-folding region NFA1 and another region overlaps with the second non-folding region NFA2, with each region facing the other. However, the present invention is not limited to in-folding. The display device DD can also be folded around the folding axis AX1 to deform into an out-folding state where one region of the second display surface RS overlaps with the first non-folding region NFA1 and another region overlaps with the second non-folding region NFA2, with each region facing the other.

[0079] Figure 2 It is along Figure 1a The cross-sectional view shown is taken by the intercept line II′.

[0080] Reference Figure 2 The display device DD may include a display module DM, an adhesive film AF, and a window WM. The display module DM may include a display panel DP and an input sensor ISP.

[0081] According to an embodiment of the present invention, the display panel DP can be a light-emitting display panel, and is not particularly limited. For example, the display panel DP can be an organic light-emitting display panel.

[0082] The input sensor ISP can be directly disposed on the display panel DP. According to one embodiment of the invention, the input sensor ISP can be formed on the display panel DP via a continuous process. That is, when the input sensor ISP is directly disposed on the display panel DP, an internal adhesive film (not shown) is not disposed between the input sensor ISP and the display panel DP. However, an internal adhesive film can be disposed between the input sensor ISP and the display panel DP. In this case, the input sensor ISP is not manufactured with the display panel DP via a continuous process, but can be manufactured via a separate process from the display panel DP, and then fixed to the display panel DP by the internal adhesive film.

[0083] The display panel (DP) generates an image, and the input sensor (ISP) obtains the coordinate information of external inputs (e.g., touch events). The display module (DM) can be flexible. Therefore, the display panel (DP) and the input sensor (ISP) can be rolled up as a whole or folded or unfolded around the folding axis AX1.

[0084] A window (WM) can be configured on the display module (DM). The window WM can contain an optically transparent insulating material. Therefore, the image generated from the display module (DM) can pass through the window WM and be easily recognized by the user. While transmitting the image from the display module (DM), the window WM also mitigates external impacts, thereby preventing damage or malfunction of the display module (DM) due to external impacts. External impacts are forces that can be represented as pressure, stress, etc., and refer to forces that cause defects in the display module (DM).

[0085] The window WM can be made of a flexible material. Therefore, the window WM can be folded or unfolded around the folding axis AX1. That is, the shape of the window WM can deform along with the shape of the display module DM.

[0086] The window WM can include the base layer BS (see reference) Figure 3 The substrate layer BS can include flexible glass or a synthetic resin film. Specifically, when the substrate layer BS includes flexible glass, the thickness of the glass can be less than 80 μm. Therefore, flexible glass can refer to thin-film glass. For example, the thickness of the substrate layer BS can be 30 μm, but the thickness of the substrate layer BS is not limited to this. When the substrate layer BS includes a synthetic resin film, the substrate layer BS can include a polyimide (Pl) film or a polyethylene terephthalate (PET) film. When the substrate layer BS is a synthetic resin film, the thickness of the substrate layer BS can be 50 μm. The substrate layer BS can have a multilayer structure or a single-layer structure. Hereinafter, the substrate layer BS will be described using thin-film glass.

[0087] The display module DM and the substrate layer BS can be bonded together by an adhesive film AF. As an example of the present invention, the adhesive film AF may include an optically clear adhesive film (OCA). However, the adhesive film AF is not limited to this and may include conventional adhesives or bonding agents. For example, the adhesive film AF may include an optically clear resin (OCR) or a pressure-sensitive adhesive film (PSA).

[0088] Figure 3 This is a cross-sectional view of a laminate including a substrate layer and a membrane according to an embodiment of the present invention.

[0089] Reference Figure 3 The laminate LM includes a flexible substrate layer BS extending in a first direction DR1 and a membrane FL disposed between the substrate layers BS. The substrate layers BS and the membrane FL may be laminated in a third direction DR3.

[0090] Two adjacent basal layers BS in the basal layer BS can be bonded by a membrane FL configured between them.

[0091] The film FL may include an optically clear adhesive film (OCA). As an example of the present invention, a film FL disposed between two adjacent substrate layers BS can be cured at room temperature to bond the two substrate layers BS.

[0092] A base layer BS can be peeled off from the laminate LM using the peeling device PD (described later) to create a window WM (see Figure 1) for use in the display device DD (see Figure 1). Figure 2 The laminate LM can be formed by cutting a laminated mother substrate, which is formed by bonding multiple mother substrates with films stacked on top of each other, into unit sizes (sizes corresponding to the display device). When cutting the laminated mother substrate to generate the laminate LM, a peeling process is required to peel off the film FL from the base layer BS. However, compared with the method of cutting a single mother substrate to form the base layer BS corresponding to the unit size, the work efficiency of the base layer BS manufacturing process can be improved.

[0093] The laminate LM may also include a dummy substrate layer. The dummy substrate layer may provide a substrate layer configured at the uppermost end and a substrate layer configured at the lowermost end within the substrate layer BS. (As will be described later...) Figures 4 to 8 The process of the stripping device PD peeling the substrate layer BS from the membrane FL can be a process that occurs after the dummy substrate layer is removed from the stack LM.

[0094] Figure 4 This is a process diagram illustrating the process of arranging a laminate in a support portion according to an embodiment of the present invention.

[0095] Reference Figure 4 The stripping device PD includes a stripping tank containing a first solution SL1 and a support portion SPT that supports the laminate LM within the stripping tank PT. For ease of explanation, the following description will use a structure where the laminate LM includes two substrate layers (hereinafter referred to as the first substrate layer BS1 and the second substrate layer BS2) and a membrane FL disposed between the first and second substrate layers BS1 and BS2 to bond the first and second substrate layers BS1 and BS2. However, the number of substrate layers included in the laminate LM is not particularly limited.

[0096] The stripping device PD also includes an adsorption device ADD for adsorbing the second substrate BS2 to be stripped from the first and second substrates BS1 and BS2 included in the laminate LM.

[0097] As an example of the present invention, the first solution SL1 may be a solution that does not affect the physical and chemical properties of the first and second substrate layers BS1 and BS2. As an example of the present invention, the first solution SL1 may include water. The first solution SL1 may be maintained at an appropriate temperature to reduce the cohesive force of the substances constituting the membrane FL. When the cohesive force of the substances constituting the membrane FL is reduced, the adhesive force of the membrane FL may be reduced. Therefore, it becomes easier to peel the first and second substrate layers BS1 and BS2 from the membrane FL. As an example of the present invention, the temperature of the first solution SL1 may include 50°C to 90°C.

[0098] The support unit SPT may include a support platform SPT_1 and a moving platform SPT_2.

[0099] The laminate LM can be configured on the support platform SPT_1. The moving stage SPT_2 connects the stripping tank PT and the support platform SPT_1. The moving stage SPT_2 can move the support platform SPT_1 in either the third direction DR3 or the opposite direction. Figure 6 as well as Figure 9 The operation of the mobile station SPT_2 will be described later in the explanation.

[0100] The adsorption device ADD includes an adsorption section ADP that adsorbs the second substrate layer BS2 and a moving section MVP that is combined with the adsorption section ADP to move the adsorption section ADP.

[0101] The adsorption unit ADP includes multiple suction cups SP that are adsorbed onto the second base layer BS2, and a connecting part CNP that connects the moving part MVP and the suction cups SP. As an example of the present invention, the adsorption unit ADP can create a vacuum in the space between the suction cups SP and the second base layer BS2 to adsorb the suction cups SP and the second base layer BS2.

[0102] The moving part MVP may include a first moving part MVP_1, a second moving part MVP_2, and a third moving part MVP_3. When the first to third moving parts MVP_1, MVP_2, and MVP_3 move, the adsorption part ADP combined with the moving part MVP also moves together. As an example of the present invention, the moving part MVP may combine with the adsorption part ADP to move the adsorption part ADP so that the second substrate layer BS2 adsorbed on the adsorption part ADP bends toward a third direction DR3 that intersects with the first direction DR1, thereby peeling the second substrate layer BS2 off from the membrane FL.

[0103] Specifically, the first moving part MVP_1 can move in the first direction DR1 or the opposite direction of the first direction DR1, thereby causing the adsorption part ADP to move in the first direction DR1 or the opposite direction of the first direction DR1. The second moving part MVP_2 can move in the third direction DR3 or the opposite direction of the third direction DR3, thereby causing the adsorption part ADP to move in the third direction DR3 or the opposite direction of the third direction DR3.

[0104] The third moving part MVP_3 may include a first sub-moving part MVP_3a, a second sub-moving part MVP_3b, and a third sub-moving part MVP_3c. The first sub-moving part MVP_3a may be connected to the second and third sub-moving parts MVP_3b and MVP_3c. The second sub-moving part MVP_3b may be connected to the first sub-moving part MVP_3a and the second moving part MVP_2. The third sub-moving part MVP_3c may be connected to the adsorption part ADP and the first sub-moving part MVP_3a. The second and third sub-moving parts MVP_3b and MVP_3c may extend in a first direction DR1 or a third direction DR3. The first sub-moving part MVP_3a may rotate the third sub-moving part MVP_3c. As an example of the present invention, the first sub-moving part MVP_3a may rotate the third sub-moving part MVP_3c in a counterclockwise direction. However, the direction in which the first sub-moving part MVP_3a rotates the third sub-moving part MVP_3c may vary depending on the shape of the adsorption part ADP connected to the third sub-moving part MVP_3c.

[0105] The stripping device PD may also include a first nozzle NZ1, a second nozzle NZ2, a third nozzle NZ3, a track RL, and a controller CTL. (In response to...) Figure 7b The description will later refer to the first to third nozzles NZ1, NZ2, and NZ3.

[0106] The track RL can connect the first moving part MVP_1 and the stripping tank PT. The first moving part MVP_1 can move along the track RL in a first direction DR1 or in the opposite direction to the first direction DR1.

[0107] The controller CTL can be combined with the moving part MVP to control the movement of the moving part MVP used for moving the adsorption part ADP. In addition, the controller CTL can control the position of the support part SPT, the temperature of the first solution SL1 in the stripping water tank PT, and the operation of the first to third nozzles NZ1, NZ2, and NZ3.

[0108] Figure 5a This is a process diagram illustrating the process of adsorbing an adsorption device onto a second substrate layer according to an embodiment of the present invention. Figure 5b This is a plan view of the second substrate layer illustrating the adsorption points according to an embodiment of the present invention.

[0109] The following is in response to Figures 5a to 9 The description omits "target" and "reference". Figure 4 The description is the same as the detailed description of the structure.

[0110] Reference Figure 5a As an example of the present invention, the second base layer BS2 includes an upper surface US adsorbed onto the adsorption portion ADP and a lower surface DS bonded to the membrane FL.

[0111] The second moving part MVP_2 can move in the opposite direction to DR3 to allow the suction cup SP of the adsorption part ADP to adsorb onto the second substrate layer BS2. At this time, the second moving part MVP_2 can move the adsorption part ADP to the first position PS1.

[0112] Reference Figure 5b The second base layer BS2 includes a first region AR1 located in the central portion of the second base layer BS2 and a second region AR2 located around the first region AR1. When the position where the suction cup SP is adsorbed onto the second base layer BS2 is defined as the adsorption point AP, the adsorption point AP can be located in the second region AR2. As an example of the present invention, the suction cup SP can be adsorbed onto the second base layer BS2 at either end of the long side extending toward the second base layer BS2 in the first direction DR1. In addition, the suction cup SP can include three suction cups. However, the number of suction cups SP is not particularly limited.

[0113] Figure 6 This is a process diagram illustrating the process of separating the membrane and the first substrate layer according to an embodiment of the present invention.

[0114] As an example of the present invention, in order to move the adsorption portion ADP from the first position PS1 to the second position PS2, the second moving portion MVP_2 can move to the third direction DR3. The specific gravity of the first and second substrate layers BS1 and BS2, which include the thin film glass, is greater than the specific gravity of the first solution SL1, which includes water. Therefore, the second substrate layer BS2, which is adsorbed onto the adsorption portion ADP, moves to the third direction DR3 together with the adsorption portion ADP; however, the first substrate layer BS1, which is not adsorbed onto the adsorption portion ADP, does not move on the configured support stage SPT_1. Conversely, the specific gravity of the membrane FL is less than the specific gravity of the first solution SL1. Therefore, when the second substrate layer BS2 moves to the third direction DR3, the membrane FL disposed below the second substrate layer BS2 can also move to the third direction DR3. Finally, the second moving portion MVP_2 can move the adsorption portion ADP from the first position PS1 to the second position PS2 to separate the membrane FL and the first substrate layer BS1, and the second substrate layer BS2 and the first substrate layer BS1 can also be separated.

[0115] As an example of the present invention, the adsorption unit ADP can be moved from the first position PS1 to the second position PS2 by the second moving part MVP_2, while the support stage SPT_1 is moved in the opposite direction to the third direction DR3 by the moving stage SPT_2. When the support stage SPT_1 is moved in the opposite direction to the third direction DR3, the first substrate layer BS1 disposed on the support stage SPT_1 also moves in the opposite direction to the third direction DR3. Therefore, an additional separation distance can be added to ensure the separation distance between the membrane FL and the first substrate layer BS1, as well as the separation distance between the second substrate layer BS2 and the first substrate layer BS1. The greater the separation distance added to ensure the separation distance between the first substrate layer BS1 and the second substrate layer BS2, the less likely the second substrate layer BS2 will be damaged by the first substrate layer BS1 during the rotation of the second substrate layer BS2 in the third direction DR3. As an example of the present invention, the separation distance between the separated membrane FL and the first substrate layer BS1 can be tens of centimeters.

[0116] As an example of the present invention, the first and second substrate layers BS1 and BS2 are flexible. Therefore, it is possible that the portion of the second substrate layer BS2 closest to the portion adsorbed onto the adsorption portion ADP moves in a third direction DR3 together with the adsorption portion ADP, while the portion of the second substrate layer BS2 furthest from the portion adsorbed onto the adsorption portion ADP droops downwards due to gravity. In this case, it is possible that only a portion of the membrane FL disposed at the lower end of the second substrate layer BS2 closest to the portion adsorbed onto the adsorption portion ADP separates from the first substrate layer BS1, while the remaining portion of the membrane FL disposed at the lower end of the second substrate layer BS2 furthest from the portion adsorbed onto the adsorption portion ADP does not separate from the first substrate layer BS1.

[0117] Figure 7a This is a process diagram illustrating the process of moving the adsorption portion to cause the second substrate layer to bend in a third direction according to an embodiment of the present invention. Figure 7b The enlarged view is shown to illustrate the first to third nozzles. Figure 7a A process diagram of a part of the stripping device corresponding to AA′.

[0118] Reference Figure 7a As an example of the present invention, the first sub-moving part MVP_3a can rotate the third sub-moving part MVP_3c in a counterclockwise direction. The third sub-moving part MVP_3c is connected to the adsorption part ADP adsorbed onto the second substrate layer BS2, so the first sub-moving part MVP_3a can rotate the third sub-moving part MVP_3c to move the adsorption part ADP and cause the second substrate layer BS2 to bend.

[0119] As an example of the present invention, while the first sub-moving part MVP_3a moves the adsorption part ADP, the first moving part MVP_1 moves in the opposite direction to the first direction DR1, and the second moving part MVP_2 moves in the third direction DR3. However, the moving directions of the first and second moving parts MVP_1 and MVP_2, as well as the rotation direction of the first sub-moving part MVP_3a, may vary depending on the shape of the peeling device PD.

[0120] As an example of the present invention, the third direction DR3 can be a direction orthogonal to the first direction DR1. That is, the first sub-moving part MVP_3a can move the adsorption part ADP to bend the second base layer BS2 in a direction orthogonal to the first direction DR1. However, the third direction DR3 is not limited to a direction orthogonal to the first direction DR1. As an example of the present invention, the third direction DR3 can be a direction forming an angle of about 70° or more with the first direction DR1.

[0121] The portion of the second substrate layer BS2 that is close to the part adsorbed onto the suction cup SP can bend in the third direction DR3 and exposed above the water surface of the first solution SL1 contained in the peeling tank PT. At this time, the membrane FL disposed at the lower end of the exposed portion of the second substrate layer BS2 may experience drag in the opposite direction of the third direction DR3 due to the surface resistance of the first solution SL1. Therefore, the exposed portion of the second substrate layer BS2 and the membrane FL disposed at the lower end of the exposed portion peel off. The area on the lower surface DS of the second substrate layer BS2 that is bonded to the membrane FL and peeled off from the membrane FL can be defined as the peeling region PR. The portion on the upper surface US of the second substrate layer BS2 that bends in the third direction DR3 through the adsorption device ADD can be defined as the bending region CR.

[0122] Reference Figure 7b The first nozzle NZ1 and the second nozzle NZ2 can be located above the water surface of the first solution SL1 in the stripping tank PT. When the second substrate layer BS2 bends towards the third direction DR3 through the adsorption device ADD, the first nozzle NZ1 can be configured to face the stripping area PR of the lower surface DS of the second substrate layer BS2. When the second substrate layer BS2 bends towards the third direction DR3 through the adsorption device ADD, the second nozzle NZ2 can be configured to face the bending area CR of the upper surface US of the second substrate layer BS2.

[0123] To peel the second substrate layer BS2 from the membrane FL, the adsorption section ADP moves, causing the second substrate layer BS2 to bend in a third direction DR3. At this time, the peeling of the second substrate layer BS2 and the membrane FL can be facilitated by spraying a second solution SL2 towards the peeling area PR and the membrane FL through the first nozzle NZ1. A third solution SL3 can be sprayed onto the upper surface US of the second substrate layer BS2 through the second nozzle NZ2 to prevent impurities that may be present in the peeling tank PT from remaining in the second substrate layer BS2. As an example of the present invention, the second and third solutions SL2 and SL3 may contain the same substances as the first solution SL1. The second and third solutions SL2 and SL3 may include water.

[0124] As an example of the present invention, a third nozzle NZ3 may be disposed at the lower end of the stripping tank PT. The third nozzle NZ3 can prevent the second substrate layer BS2 and the membrane FL from sinking in the opposite direction to the third-direction DR3 by spraying a fourth solution SL4 into the third-direction DR3. The fourth solution SL4 may contain the same substance as the first solution SL1.

[0125] Figure 8 This is a process diagram illustrating the process of removing the second substrate layer from the stripping tank according to an embodiment of the present invention.

[0126] Reference Figure 8 As an example of the present invention, in order to move the adsorption portion ADP toward the third direction DR3, the second moving portion MVP_2 can move toward the third direction DR3. The second substrate layer BS2 is adsorbed onto the adsorption portion ADP, so the second moving portion MVP_2 moves the adsorption portion ADP toward the third direction DR3, thereby allowing the second substrate layer BS2 to be removed from the stripping tank PT.

[0127] At this time, refer to Figure 7a as well as Figure 7bThe portion of the second substrate layer BS2 closest to the portion adsorbed onto the suction cup SP can be exposed above the surface of the first solution SL1 contained in the stripping tank PT. Therefore, during the removal of the second substrate layer BS2 from the stripping tank PT by moving the adsorption portion ADP toward the third direction DR3, the portion of the second substrate layer BS2 exposed above the surface of the first solution SL1 moves sequentially toward the third direction DR3, rather than the entire second substrate layer BS2 located below the surface of the first solution SL1 moving toward the third direction DR3. When the second substrate layer BS2 located below the surface of the first solution SL1 moves toward the third direction DR3 due to the surface resistance of the first solution SL1, it experiences resistance in the opposite direction of the third direction DR3. Therefore, when the second substrate layer BS2 is removed from the stripping tank PT without the process of bending the second substrate layer BS2 toward the third direction DR3 using the adsorption device ADD of the present invention, the entire second substrate layer BS2 may be damaged by resistance from the first solution SL1. Conversely, when the second base layer BS2 is removed from the stripping tank PT after being bent toward the third direction DR3 by the adsorption device ADD of the present invention, the resistance encountered by the second base layer BS2 from the first solution SL1 can be reduced, thus preventing damage to the second base layer BS2.

[0128] Figure 9 This is a process diagram illustrating the process of removing a membrane from a stripping tank using a gripper according to an embodiment of the present invention.

[0129] Reference Figure 9 As an example of the present invention, the stripping device PD may further include a gripper GRP that grips the membrane FL and removes the membrane FL from the stripping tank PT.

[0130] The second substrate layer BS2 is peeled off from the membrane FL using the adsorption device ADD (see reference). Figure 8 After the second substrate layer BS2 was removed from the stripping tank PT, membrane FL and the first substrate layer BS1, separated due to their specific gravity difference, remained in the stripping tank PT. Although in Figures 4 to 9 The diagram shows a laminate LM comprising first and second substrate layers BS1 and BS2, and a membrane FL disposed between the first and second substrate layers BS1 and BS2. However, the laminate LM may include multiple substrate layers and multiple membranes bonded to the multiple substrate layers. Therefore, even after removing the second substrate layer BS2 from the stripping tank PT, the stripping process of removing the first substrate layer BS1 from the stripping tank PT (not shown) can be repeated. At this time, in order to adsorb the adsorbent ADP onto the first substrate layer BS1, the adsorbent ADP is positioned on the upper end of the first substrate layer BS1, and the membrane FL remaining in the stripping tank PT needs to be removed. Therefore, the membrane FL can be removed from the stripping tank PT by gripping the remaining membrane FL with a gripper GRP. However, Figure 9 The shape of the gripper GRP shown is merely one example of the invention. The gripper GRP can include various shapes to perform the task of removing the membrane FL.

[0131] After the membrane FL is removed by the gripper GRP, the adsorption device ADD can adsorb the first substrate layer BS1 onto the adsorption unit ADP. At this time, the support stage SPT_1 can be moved in the third direction DR3 by the moving stage SPT_2. When the support stage SPT_1 is moved in the third direction DR3, the first substrate layer BS1 disposed on the support stage SPT_1 also moves in the third direction DR3. Therefore, the adsorption of the first substrate layer BS1 and the adsorption unit ADP can be facilitated.

[0132] The present invention allows the second base layer BS2 to be peeled from the membrane FL using a peeling device PD, instead of the operator manually peeling the second base layer BS2 from the membrane FL, thereby ensuring the reliability of the second base layer BS2 peeling process and improving the efficiency of the process.

[0133] Figure 10 This is a flowchart illustrating a peeling method using a peeling apparatus according to an embodiment of the present invention.

[0134] Figure 11 This is a flowchart illustrating the steps of peeling off the substrate layer and the membrane according to an embodiment of the present invention, and the steps of spraying the second and third solutions through the first and second nozzles.

[0135] Reference Figure 4 as well as Figure 10 The stripping method performed by the stripping device PD includes: a step (S100) of placing a stack LM comprising first and second substrate layers BS1 and BS2 extending in a first direction DR1 and a membrane FL bonded to the first and second substrate layers BS1 and BS2 in a support portion SPT disposed in a stripping tank PT containing a first solution SL1. Additionally, the stripping method performed by the stripping device PD further includes: a step (S200) of stripping the membrane FL by adsorbing the second substrate layer BS2 and a step (see GSP) of stripping the membrane FL by adsorbing the second substrate layer BS2. Figure 9 Step S300: Grab the membrane FL and remove the membrane FL from the stripping tank PT.

[0136] Reference Figure 5a as well as Figure 10 The step of peeling off the membrane FL by adsorbing the second substrate layer BS2 (S200) includes the step of adsorbing the adsorbent ADP onto the second substrate layer BS2 (S201).

[0137] Reference Figure 6 as well as Figure 10The step of peeling off the membrane FL by adsorbing the second substrate layer BS2 (S200) further includes the step of separating the first substrate layer BS1 and the membrane FL by moving the adsorption part ADP from the first position PS1 to the second position PS2 (S202).

[0138] Reference Figure 7a as well as Figure 10 The step of peeling the second substrate layer BS2 off the membrane FL by adsorbing it (S200) further includes the step of moving the adsorption part ADP to bend the second substrate layer BS2 toward the third direction DR3 that intersects the first direction DR1, thereby peeling off the second substrate layer BS2 and the membrane FL (S203).

[0139] Reference Figure 8 as well as Figure 10 The step of peeling the second substrate layer BS2 from the membrane FL by adsorbing it (S200) may further include the step of moving the adsorption section ADP to the third direction DR3 to remove the second substrate layer BS2 from the peeling tank PT.

[0140] Reference Figure 9 as well as Figure 10 After the step of peeling the membrane FL by adsorbing the second substrate layer BS2 (S200), the step of removing the membrane FL from the stripping tank PT by grabbing the membrane FL by the grabber GSP (S300) can be performed.

[0141] Reference Figure 7b as well as Figure 11 The step of peeling off the second substrate layer BS2 from the membrane FL by adsorption (S200) may further include: spraying a second solution SL2 onto the membrane FL through the first nozzle NZ1 toward the peeling region PR of the lower surface DS of the second substrate layer BS2. (S204) Additionally, the step of peeling off the second substrate layer BS2 from the membrane FL by adsorption (S200) may further include: spraying a third solution SL3 onto the upper surface US of the second substrate layer BS2 through the second nozzle NZ2. (S205)

[0142] As an example of the present invention, the steps of spraying the second solution SL2 through the first nozzle NZ1 (S204) and spraying the third solution SL3 through the second nozzle NZ2 (S205) can be performed simultaneously with the step of peeling off the second substrate layer BS2 and the membrane FL (S203).

[0143] The above description refers to preferred embodiments of the present invention. However, it will be understood by those skilled in the art or those with ordinary knowledge in the art that various modifications and alterations can be made to the present invention without departing from the concept and scope of the invention as set forth in the following claims.

[0144] Therefore, the technical scope of this invention is not limited by the details described in the specification, but rather by the claims.

Claims

1. A stripping device, wherein, include: The stripping tank contains the first solution; A support portion is disposed in the stripping tank and is configured to include a substrate layer extending in a first direction and a laminate of a membrane bonded to the substrate layer. as well as The adsorption device adsorbs the substrate layer and peels it off from the membrane. The adsorption device includes: Adsorption section, for adsorbing the substrate layer; and The moving part is combined with the adsorption part. The adsorption section includes: Multiple suction cups are attached to the substrate layer; and The connecting part connects the movable part and the suction cup. The base layer includes: A first region, located in the central portion of the base layer; and The second region is located around the first region. When the location where the suction cup adheres to the base layer is defined as the adhesion point, the adhesion point is located in the second region. The moving part rotates the adsorption part with a rotation axis defined in the moving part as a reference, and moves the adsorption part to bend the substrate layer toward a second direction that intersects the first direction, thereby peeling the film off the substrate layer.

2. The stripping device according to claim 1, wherein, The first solution includes water. The temperature of the water ranges from 50°C to 90°C.

3. The stripping device according to claim 1, wherein, The base layer includes: The upper surface is adsorbed onto the adsorption part; and The lower surface is bonded to the membrane. The adsorption device peels the lower surface of the substrate layer from the membrane.

4. The stripping device according to claim 3, wherein, The stripping device also includes a first nozzle. When the base layer bends in the second direction through the adsorption device, the first nozzle faces the peeling area of ​​the lower surface. The first nozzle sprays a second solution toward the peeling area on the lower surface and the membrane. The second solution contains the same substance as the first solution.

5. The stripping device according to claim 4, wherein, The stripping device also includes a second nozzle. The second nozzle sprays the third solution toward the upper surface. The third solution contains the same substance as the first solution.

6. The stripping device according to claim 1, wherein, The base layer includes: First basal layer; and Second basal layer, The membrane is an adhesive membrane disposed between the first substrate layer and the second substrate layer to bond the first substrate layer and the second substrate layer, and the adsorption portion is adsorbed onto the second substrate layer.

7. The stripping device according to claim 6, wherein, The stripping device further includes: After the second substrate layer is peeled off from the membrane by the adsorption device, the gripper grasps the membrane and removes it from the peeling tank.

8. The stripping device according to claim 6, wherein, After the adsorption portion adsorbs onto the second substrate layer, the moving portion moves the adsorption portion from a first position to a second position to separate the first substrate layer and the membrane before moving the adsorption portion to bend the second substrate layer in the second direction.

9. The stripping device according to claim 1, wherein, The second direction is a direction orthogonal to the first direction.

10. The stripping device according to claim 1, wherein, The substrate layer includes thin-film glass.

11. A peeling method using a peeling device, wherein, include: The step of configuring a stack comprising a base layer extending in a first direction and a membrane bonded to the base layer in a support portion configured in a stripping tank containing a first solution; as well as The step of peeling the substrate layer off the membrane by adsorbing it with an adsorption device. The stripping step includes: The step of adsorbing the adsorption portion onto the substrate layer; and The step involves rotating the adsorption section with respect to a rotation axis defined in the moving section, and moving the adsorption section via the moving section to bend the substrate layer toward a second direction intersecting the first direction, thereby peeling the film off the substrate layer. The adsorption section includes: Multiple suction cups are attached to the substrate layer; and The connecting part connects the movable part and the suction cup. The base layer includes: A first region, located in the central portion of the base layer; and The second region is located around the first region. When the location where the suction cup is attached to the base layer is defined as the adsorption point, the adsorption point is located in the second region.

12. The peeling method of the peeling device according to claim 11, wherein, The first solution includes water. The temperature of the water ranges from 50°C to 90°C.

13. The peeling method of the peeling device according to claim 11, wherein, The base layer includes: The upper surface is adsorbed onto the adsorption part; and The lower surface is bonded to the membrane. The adsorption device peels the lower surface of the substrate layer from the membrane.

14. The peeling method of the peeling device according to claim 13, wherein, The peeling method of the peeling device further includes the step of spraying a second solution toward the peeling area of ​​the lower surface and the membrane through a first nozzle facing the peeling area of ​​the lower surface when the substrate layer is bent in the second direction by the adsorption device. The second solution contains the same substance as the first solution.

15. The peeling method of the peeling device according to claim 14, wherein, The peeling method of the peeling device further includes the step of spraying a third solution toward the upper surface through a second nozzle. The third solution contains the same substance as the first solution.

16. The peeling method of the peeling device according to claim 14, wherein, The base layer includes: a first base layer; and a second base layer. The membrane includes an adhesive membrane disposed between the first substrate layer and the second substrate layer to bond the first substrate layer and the second substrate layer.

17. The peeling method of the peeling device according to claim 16, wherein, In the step of adsorbing the adsorption portion onto the substrate layer, the second substrate layer is adsorbed onto the adsorption portion. In the step of peeling off the substrate layer and the membrane, the second substrate layer is peeled off from the membrane. The peeling method of the peeling device, after the step of peeling the substrate layer from the membrane, further includes the step of removing the membrane from the peeling tank by gripping the membrane with a gripper.

18. The peeling method of the peeling device according to claim 11, wherein, The peeling method of the peeling device further includes, before the step of peeling the substrate layer from the membrane, a step of moving the adsorption portion from a first position to a second position.

19. The peeling method of the peeling device according to claim 11, wherein, The substrate layer includes thin-film glass.

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