An automatic feeding device for a single crystal furnace

By designing automatic feeding devices and filtration systems, the problems of manual operation and difficulty in filtering impurities during the feeding process of single crystal furnace are solved, and automated feeding and efficient impurity filtration are realized, which improves the working efficiency of the furnace.

CN114753009BActive Publication Date: 2025-06-13EAST CHINA JIAOTONG UNIVERSITY
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Patent Information

Application Number
CN202210493905.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-05-08
Publication Date
2025-06-13
Estimated Expiration
2042-05-08

AI Technical Summary

Technical Problem

The existing single crystal furnace needs to be operated manually during the feeding process, resulting in wasted time and difficult to filter impurities, which reduces the working effect of the furnace.

Method used

An automatic feeding device for single crystal furnace is designed, including a filter box, a discharge box, a loading box and a limiting mechanism. Automatic feeding is achieved through a pressure sensor and a spring mechanism, and filtering of impurities is achieved through a filter net and a cam driven by a motor.

Benefits of technology

Automatic feeding is realized, saving manpower and time, and at the same time, impurities in silicon material are effectively removed through the filter, improving the working effect of the single crystal furnace.

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Abstract

The present invention discloses an automatic feeding device for a single crystal furnace, which relates to the technical field of single crystal furnaces and includes a filtering box. The lower surface of the filtering box is fixedly connected with a blanking box. A loading box is arranged inside the blanking box. A second slider is fixedly installed on the outer side of the loading box, and a second sliding groove is formed inside the blanking box. The second slider is slidably connected with the second sliding groove. A second telescopic spring is fixedly connected inside the second sliding groove. The beneficial effect of the present invention is that silicon materials can fall into the inside of the loading box through the first through hole. As the gravity of the loading box continuously increases, at this time, the sealing plate can close the first through hole, and the arranged plug moves out from the inside of the second through hole. Thus, the silicon materials inside the loading box are discharged into the bottom of the blanking box through the second through hole and finally discharged into the single crystal furnace through the discharge pipe, thereby achieving the effect of automatic feeding and saving a large amount of manpower and time.
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Description

Technical Field

[0001] The present invention relates to the technical field of single crystal furnaces, and particularly to an automatic feeding device for a single crystal furnace. Background Art

[0002] Crystalline silicon material is one of the main raw materials for solar panels in the photovoltaic industry, and is also the raw material for semiconductor chips and wafer processing and manufacturing. It is an indispensable part of the green energy and semiconductor industries. Nowadays, most single crystal furnaces usually manually feed silicon materials into the furnace body regularly, wasting a lot of time and manpower, and unable to filter impurities contained in the silicon materials, thus reducing the working effect of the single crystal furnace. Therefore, we propose an automatic feeding device for a single crystal furnace. Summary of the Invention

[0003] Aiming at the deficiencies of the prior art, the present invention provides an automatic feeding device for a single crystal furnace, which solves the problems raised in the above background art.

[0004] To achieve the above object, the present invention is realized through the following technical solutions: An automatic feeding device for a single crystal furnace includes a filtering box, the lower surface of the filtering box is fixedly connected with a blanking box, a loading box is arranged inside the blanking box, a second slider is fixedly installed on the outside of the loading box, a second sliding groove is opened on the inner side of the blanking box, the second slider is slidably connected with the second sliding groove, a second telescopic spring is fixedly connected inside the second sliding groove, one end of the second telescopic spring is fixedly connected with the second slider, a pressure sensor is arranged inside the loading box, a support rod is fixedly installed on the upper surface of the loading box, a first through hole is opened on the lower surface of the filtering box, the support rod penetrates through the first through hole and extends into the inner cavity of the filtering box, one end of the support rod is fixedly connected with a sealing plate, a second through hole is opened on the lower surface of the loading box, a plug is fixedly connected inside the blanking box, and a limiting mechanism is arranged on the lower surface of the loading box.

[0005] Preferably, the limiting mechanism includes a limiting block, a spring groove is opened inside the limiting block, a third telescopic spring is fixedly connected inside the spring groove, one end of the third telescopic spring is fixedly connected with a clamping block, a limiting groove is opened inside the blanking box, a clamping groove is opened on the inner side of the limiting groove, and the clamping block is adapted to the clamping groove.

[0006] Preferably, an electromagnet is arranged inside the limiting block, one side of the clamping block is fixedly connected with a connecting rod, and one end of the connecting rod is fixedly connected with a magnetic block.

[0007] Preferably, a support frame is fixedly connected to the outside of the blanking box, a discharge pipe is arranged on the lower surface of the blanking box, and a feeding port is arranged on the upper surface of the filtering box.

[0008] Preferably, one side of the filter box is fixedly connected with a motor, the output end of the motor is fixedly connected with a rotating shaft, and the outside of the rotating shaft is fixedly connected with a cam.

[0009] Preferably, a filter screen is arranged inside the filter box. A first slider is fixedly installed on the outside of the filter screen. A first sliding groove is formed on the inner side of the filter box. The first slider is slidably connected with the first sliding groove. A first telescopic spring is fixedly connected inside the first sliding groove, and one end of the first telescopic spring is fixedly connected with the first slider.

[0010] The present invention provides a single crystal furnace automatic feeding device, which has the following beneficial effects.

[0011] 1. In this single crystal furnace automatic feeding device, silicon materials can fall into the inside of the loading box through the first through hole. As the gravity of the loading box continuously increases, the second slider on the outside of the loading box slides inside the second sliding groove. Finally, the set limiting mechanism can be stuck in the inner cavity of the limiting groove. At this time, the sealing plate can close the first through hole, and the set plug is removed from the inside of the second through hole. Thus, the silicon materials inside the loading box are discharged to the bottom of the blanking box through the second through hole and finally discharged into the single crystal furnace through the discharge pipe. When the pressure sensor detects that the pressure received is lower than the set value, the limiting mechanism is automatically controlled to release the limit, and the second slider is reset under the elastic force of the second telescopic spring. At this time, the first through hole is in an open state, and the second through hole is in a closed state, so as to achieve the effect of automatic feeding, saving a large amount of manpower and time.

[0012] 2. In this single crystal furnace automatic feeding device, through the set filter screen, impurities with larger volumes in the silicon materials can be intercepted on the surface of the filter screen. And through the set motor, the rotating shaft and the outside cam are controlled to rotate, so as to repeatedly squeeze the filter screen. The first slider on the outside of the filter screen is squeezed and slides inside the first sliding groove, and the first telescopic spring is squeezed. The first telescopic spring gives a certain elastic force to the first slider by using its own toughness, thus realizing the up-and-down reciprocating vibration of the filter screen and preventing the filter screen from being blocked. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] FIG. 1 is a schematic structural diagram of the present invention.

[0014] FIG. 2 is an enlarged view of part A in FIG. 1 of the present invention.

[0015] FIG. 3 is an enlarged view of part B in FIG. 1 of the present invention.

[0016] In the figure: 1, filtering box; 2, blanking box; 3, first sliding groove; 4, first telescopic spring; 5, first slider; 6, rotating shaft; 7, cam; 8, injection port; 9, support rod; 10, second slider; 11, second telescopic spring; 12, second sliding groove; 13, support frame; 14, discharge pipe; 15, card slot; 16, limit groove; 17, pressure sensor; 18, motor; 19, filter screen; 20, sealing plate; 21, first through hole; 22, loading box; 23, limit block; 24, spring groove; 25, clamping block; 26, third telescopic spring; 27, connecting rod; 28, magnetic block; 29, electromagnet; 30, second through hole; 31, plug. Specific embodiments

[0017] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0018] Embodiment 1.

[0019] Please refer to FIGS. 1 to 3. A single crystal furnace automatic feeding device includes a filter box 1. A feeding box 2 is fixedly connected to the lower surface of the filter box 1. A loading box 22 is arranged inside the feeding box 2. A second slider 10 is fixedly installed on the outer side of the loading box 22. A second sliding groove 12 is opened on the inner side of the feeding box 2. The second slider 10 is slidably connected to the second sliding groove 12. A second telescopic spring 11 is fixedly connected inside the second sliding groove 12. One end of the second telescopic spring 11 is fixedly connected to the second slider 10. A pressure sensor 17 is arranged inside the loading box 22. A support rod 9 is fixedly installed on the upper surface of the loading box 22. A first through hole 21 is opened on the lower surface of the filter box 1. The support rod 9 passes through the first through hole 21 and extends into the inner cavity of the filter box 1. One end of the support rod 9 is fixedly connected to a sealing plate 20. A second through hole 30 is opened on the lower surface of the loading box 22. A plug 31 is fixedly connected inside the feeding box 2. A limiting mechanism is arranged on the lower surface of the loading box 22. Silicon material can fall into the inside of the loading box 22 through the first through hole 21. As the gravity of the loading box 22 continuously increases, the second slider 10 on the outer side of the loading box 22 slides inside the second sliding groove 12. Finally, the set limiting mechanism can be stuck in the inner cavity of the limiting groove 16. At this time, the sealing plate 20 can seal the first through hole 21, and the set plug 31 is removed from the inside of the second through hole 30. Thus, the silicon material inside the loading box 22 is discharged to the bottom of the feeding box 2 through the second through hole 30 and finally discharged into the single crystal furnace through the discharge pipe 14. When the pressure sensor 17 detects that the pressure it receives is lower than the set value, the limiting mechanism is automatically controlled to release the limit. The second slider 10 is reset under the elastic force of the second telescopic spring 11. At this time, the first through hole 21 is in an open state, and the second through hole 30 is in a closed state. Thus, the effect of automatic feeding is achieved, saving a large amount of manpower and time. The limiting mechanism includes a limiting block 23. A spring groove 24 is opened inside the limiting block 23. A third telescopic spring 26 is fixedly connected inside the spring groove 24. One end of the third telescopic spring 26 is fixedly connected to a clamping block 25. One side of the clamping block 25 is provided with an inclined surface. When being squeezed, the clamping block 25 automatically moves towards the direction of the spring groove 24. A limiting groove 16 is opened inside the feeding box 2. A clamping groove 15 is opened on the inner side of the limiting groove 16. The clamping block 25 is adapted to the clamping groove 15. When the limiting block 23 is inserted into the limiting groove 16, the clamping block 25 automatically moves towards the direction of the spring groove 24. When the limiting block 23 completely coincides with the limiting groove 16, the clamping block 25 is tightly clamped inside the clamping groove 15 under the elastic force of the third telescopic spring 26. An electromagnet 29 is arranged inside the limiting block 23.One side of the clamping block 25 is fixedly connected to a connecting rod 27, and one end of the connecting rod 27 is fixedly connected to a magnetic block 28. When the pressure sensor 17 detects that the pressure it receives is lower than the set value, that is, when all the silicon material inside the loading box 22 is discharged, the electromagnet 29 is automatically driven to be energized, thereby generating a certain attraction force to adsorb the magnetic block 28, and the clamping block 25 is controlled to move away from the clamping groove 15 by using the connecting rod 27, so that the limiting mechanism releases the limit. And when the pressure sensor 17 detects that the pressure it receives is higher than the set value, that is, when the inside of the loading box 22 contains silicon material, the electromagnet 29 is automatically powered off.,

[0020] Embodiment 2.

[0021] A support frame 13 is fixedly connected to the outside of the blanking box 2, a discharge pipe 14 is arranged on the lower surface of the blanking box 2, and the silicon material inside the blanking box 2 can be discharged into the single crystal furnace through the discharge pipe 14. A feeding port 8 is arranged on the upper surface of the filtering box 1, and the silicon material can be put into the inner cavity of the filtering box 1 through the feeding port 8. A motor 18 is fixedly connected to one side of the filtering box 1, the output end of the motor 18 is fixedly connected to a rotating shaft 6, a cam 7 is fixedly connected to the outside of the rotating shaft 6, a filter screen 19 is arranged inside the filtering box 1, a first slider 5 is fixedly installed on the outside of the filter screen 19, a first sliding groove 3 is formed on the inner side of the filtering box 1, the first slider 5 is slidably connected to the first sliding groove 3, a first telescopic spring 4 is fixedly connected to the inside of the first sliding groove 3, and one end of the first telescopic spring 4 is fixedly connected to the first slider 5. By arranging the filter screen 19, impurities with larger volume in the silicon material can be intercepted on the surface of the filter screen 19, and by arranging the motor 18, the rotating shaft 6 and the cam 7 on the outside are controlled to rotate, so as to repeatedly squeeze the filter screen 19. The first slider 5 on the outside of the filter screen 19 is squeezed and slides inside the first sliding groove 3, and the first telescopic spring 4 is squeezed. The first telescopic spring 4 gives a certain elastic force to the first slider 5 by using its own toughness, thereby realizing the up and down reciprocating vibration of the filter screen 19 and preventing the filter screen 19 from being blocked.

[0022] In summary, when the automatic feeding device of the single crystal furnace is in use, first, silicon materials are injected into the interior of the filter box 1 through the feeding port 8. After being filtered by the filter screen 19, impurities with larger volumes can be intercepted on the surface of the filter screen 19. By starting the motor 18, the rotating shaft 6 and the outer cam 7 are controlled to rotate, thereby repeatedly squeezing the filter screen 19. The first slider 5 on the outer side of the filter screen 19 is squeezed and slides inside the first chute 3, and the first telescopic spring 4 is squeezed. The first telescopic spring 4 gives a certain elastic force to the first slider 5 by virtue of its own toughness, thus realizing the reciprocating up-and-down vibration of the filter screen 19, preventing the filter screen 19 from being blocked. The filtered silicon materials then fall into the interior of the loading box 22 through the first through hole 21. As the gravity of the loading box 22 continuously increases, the second slider 10 on the outer side of the loading box 22 slides inside the second chute 12. When the limiting block 23 is inserted into the limiting groove 16, the clamping block 25 automatically moves towards the direction of the spring groove 24. When the limiting block 23 completely coincides with the limiting groove 16, the clamping block 25 is tightly clamped inside the clamping groove 15 under the elastic force of the third telescopic spring 26. At this time, the sealing plate 20 can close the first through hole 21, and the provided plug 31 is removed from the interior of the second through hole 30. Thus, the silicon materials inside the loading box 22 are discharged to the bottom of the blanking box 2 through the second through hole 30 and finally discharged into the single crystal furnace through the discharge pipe 14. When the pressure sensor 17 detects that the pressure it receives is lower than the set value, the electromagnet 29 is automatically driven to be energized, thereby generating a certain attraction force to adsorb the magnetic block 28. The connecting rod 27 is used to control the clamping block 25 to move away from the clamping groove 15. The second slider 10 is reset under the elastic force of the second telescopic spring 11. At this time, the first through hole 21 is in an open state, and the second through hole 30 is in a closed state. When the pressure sensor 17 detects that the pressure it receives is higher than the set value, the electromagnet 29 is automatically powered off, thus achieving the effect of automatic feeding.

[0023] As described above, the above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and all should be covered by the protection scope of the present invention.

Claims

1. An automatic feeding device for a single crystal furnace, Characterized in that: It includes a filter box (1), the lower surface of the filter box (1) is fixedly connected with a blanking box (2), a loading box (22) is arranged inside the blanking box (2), a second slider (10) is fixedly installed on the outside of the loading box (22), a second chute (12) is opened on the inner side of the blanking box (2), the second slider (10) is slidably connected with the second chute (12), a second telescopic spring (11) is fixedly connected inside the second chute (12), one end of the second telescopic spring (11) is fixedly connected with the second slider (10), a pressure sensor (17) is arranged inside the loading box (22), a support rod (9) is fixedly installed on the upper surface of the loading box (22), a first through hole (21) is opened on the lower surface of the filter box (1), the support rod (9) penetrates through the first through hole (21) and extends into the inner cavity of the filter box (1), one end of the support rod (9) is fixedly connected with a sealing plate (20), a second through hole (30) is opened on the lower surface of the loading box (22), a plug (31) is fixedly connected inside the blanking box (2), and a limiting mechanism is arranged on the lower surface of the loading box (22); The limiting mechanism includes a limiting block (23), a spring groove (24) is opened inside the limiting block (23), a third telescopic spring (26) is fixedly connected inside the spring groove (24), one end of the third telescopic spring (26) is fixedly connected with a clamping block (25), a limiting groove (16) is opened inside the blanking box (2), a clamping groove (15) is opened on the inner side of the limiting groove (16), and the clamping block (25) is adapted to the clamping groove (15); An electromagnet (29) is arranged inside the limiting block (23), a connecting rod (27) is fixedly connected to one side of the clamping block (25), and a magnetic block (28) is fixedly connected to one end of the connecting rod (27); A support frame (13) is fixedly connected to the outside of the blanking box (2), a discharge pipe (14) is arranged on the lower surface of the blanking box (2), and a feeding port (8) is arranged on the upper surface of the filter box (1).

2. The automatic feeding device for a single crystal furnace according to claim 1, Characterized in that: A motor (18) is fixedly connected to one side of the filter box (1), the output end of the motor (18) is fixedly connected with a rotating shaft (6), and a cam (7) is fixedly connected to the outside of the rotating shaft (6).

3. The automatic feeding device for a single crystal furnace according to claim 1, Characterized in that: A filter screen (19) is arranged inside the filter box (1), a first slider (5) is fixedly installed on the outside of the filter screen (19), a first chute (3) is opened on the inner side of the filter box (1), the first slider (5) is slidably connected with the first chute (3), a first telescopic spring (4) is fixedly connected inside the first chute (3), and one end of the first telescopic spring (4) is fixedly connected with the first slider (5).

Citation Information

Patent Citations

  • Automatic feeding device of single crystal furnace

    CN218232651U