Diffusion flowmeter consistency test method

Abstract

The present application is about a method for checking the consistency of a diffusion flowmeter, and relates to the field of solar cell manufacturing. The method includes: controlling the air pressure in an experimental loop to a first air pressure; using a diffusion flowmeter, and determining the displayed flow of the diffusion flowmeter, wherein the preset type corresponds to the type of the diffusion flowmeter; determining a test time; determining the consistency of the displayed flow of the diffusion flowmeter and the output flow of the diffusion flowmeter based on the test time, wherein the output flow of the diffusion flowmeter indicates the flow of the preset type of gas injected into the intake pipe controlled by the diffusion flowmeter. The intake pipe controlled by the flowmeter, as the only outlet of the closed air circuit, is the only reason for the change in air pressure in the experimental loop, and the actual flow of the diffusion flowmeter can be directly determined by the test time, thereby obtaining whether the displayed flow of the diffusion flowmeter is consistent with the output flow of the diffusion flowmeter. In an environment such as a solar cell factory, it is possible to determine whether there is a problem with the diffusion flowmeter without disassembling the flowmeter.

Description

Technical Field

[0001] The present application relates to the field of solar cell manufacturing, and in particular to a diffusion flowmeter consistency inspection method. Background Art

[0002] Solar cells are devices that directly convert solar energy into electrical energy. They mainly use the photovoltaic effect of pn junctions to convert solar energy into electrical energy. In the production process of solar cells, thermal diffusion is generally used to make pn junctions. Diffusion furnaces are special equipment for making pn junctions of solar cells. Therefore, the stability of diffusion equipment spare parts is particularly important for diffusion quality and solar cell photoelectric conversion efficiency. Taking the thermal diffusion process of doping trivalent boron elements on the surface of n-type semiconductors as an example, liquid BCL3 or BBr3 is used as a diffusion source. Under high temperature and oxygen conditions, the reaction is fully decomposed to generate silicon dioxide and boron atoms. The method of boron atoms (P type) diffusing into the inside of the silicon wafer (N type) is used to change the conductivity type of the silicon wafer surface layer to form a pn junction. In the entire thermal diffusion process, at least three gases, oxygen, nitrogen, source gas (generally also nitrogen, called small nitrogen) or BCL3 gaseous source, are required, and the gas flowmeter controls the output of the above three gases. Whether each gas flowmeter is accurate, especially whether the displayed gas flow of the gas flowmeter is consistent with the actual output gas flow, is an important factor affecting the quality of the diffusion-made pn junction.

[0003] In the related art, solar cell factories usually need to take out the flow meters in the system regularly and outsource them for unified inspection and calibration. During the unified inspection process, the tester will calibrate, detect abnormalities and replace the flow meters so that the flow meters can be calibrated and continue to work stably.

[0004] However, in the related art, each flow meter inspection process needs to be outsourced, and if a problem occurs in the flow meter between two calibration processes, the problem of the flow meter cannot be discovered in time, resulting in a waste of raw materials. Summary of the invention

[0005] This application is about a diffusion flowmeter consistency test method, which can be used for self-testing in solar cell factories to promptly find problems with the flowmeter. The diffusion flowmeter consistency test method includes:

[0006] Controlling the air pressure in the experimental loop to a first air pressure, wherein the experimental loop includes a furnace tube and at least one air inlet pipe, wherein the furnace tube and the air inlet pipe form a sealed air path in the experimental loop;

[0007] Using a diffusion flowmeter, injecting a preset type of gas into the experimental loop through the intake pipe when only the intake pipe corresponding to the diffusion flowmeter is opened, and determining the displayed flow rate of the diffusion flowmeter, the preset type corresponding to the type of the diffusion flowmeter;

[0008] In response to the air pressure of the experimental circuit reaching the second air pressure, determining a test time;

[0009] The consistency of the displayed flow rate of the diffusion flowmeter and the output flow rate of the diffusion flowmeter is determined based on the test time, and the output flow rate of the diffusion flowmeter indicates that the diffusion flowmeter controls the flow rate of the gas of the intake pipe, such as a preset type.

[0010] In an optional embodiment, controlling the air pressure in the experimental loop to a first air pressure includes:

[0011] Performing a leakage rate test on the furnace tube to obtain a leakage rate test result of the furnace tube;

[0012] Performing a leak rate test on the air intake pipe to obtain an air intake pipe leak rate test result;

[0013] In response to the furnace tube leakage rate detection result being consistent with the intake pipe leakage rate detection result, controlling the air pressure in the experimental loop to a first air pressure;

[0014] In response to the furnace tube leakage rate detection result being inconsistent with the intake pipe leakage rate detection result, the intake pipe is repaired.

[0015] In an optional embodiment, performing a leakage rate detection on the furnace tube to obtain a leakage rate detection result of the furnace tube includes:

[0016] In response to all air inlet pipes in the experimental loop being closed, controlling the air pressure in the experimental loop to a third air pressure;

[0017] Stop the gas exchange between the experimental circuit and the outside world;

[0018] In response to the time of suspending the gas exchange between the experimental circuit and the outside reaching the first leak rate detection result time, determining a fourth gas pressure in the experimental circuit;

[0019] The difference between the fourth gas pressure and the third gas pressure is used as the furnace tube leakage rate detection result.

[0020] In an optional embodiment, the air intake pipe is subjected to a leak rate test to obtain an air intake pipe leak rate test result, including:

[0021] In response to other air intake pipes in the experimental loop being closed and the air intake pipe being opened, controlling the air pressure in the experimental loop to a fifth air pressure;

[0022] Stop the gas exchange between the experimental circuit and the outside world;

[0023] In response to the time of terminating the gas exchange between the experimental circuit and the outside reaching the second leak rate detection result time, determining a sixth gas pressure in the experimental circuit;

[0024] The difference between the sixth air pressure and the fifth air pressure is used as the intake pipe leakage rate detection result.

[0025] In an optional embodiment, the method further comprises:

[0026] The test time is processed based on the furnace tube leakage rate detection result to obtain the normalized test time.

[0027] In an optional embodiment, the experimental loop includes at least two air inlet furnace tubes, and each air inlet furnace tube corresponds to a diffusion flowmeter;

[0028] The method further includes:

[0029] Determine the test time corresponding to each diffusion flow meter.

[0030] In an optional embodiment, after determining the displayed flow rate of the diffusion flow meter and the consistency of the output flow rate of the diffusion flow meter based on the test time, the method includes:

[0031] In response to a discrepancy between a displayed flow rate of the diffusion flow meter and an output flow rate of the diffusion flow meter, determining a difference between the displayed flow rate and the output flow rate;

[0032] Adjusting the displayed flow rate of the diffusion flowmeter based on the difference to obtain a corrected displayed flow rate, and determining an ideal corrected flow rate time corresponding to the corrected displayed flow rate;

[0033] Using a diffusion flowmeter, when only the air inlet pipe corresponding to the diffusion flowmeter is opened, a preset type of gas is injected into the experimental loop at a calibrated displayed flow rate;

[0034] Determine the actual corrected flow time when the air pressure of the experimental loop reaches the second air pressure;

[0035] The ideal correction flow time is compared with the actual correction flow time to obtain a compensation correction result, which is used to indicate an abnormal state of the diffusion flowmeter.

[0036] The beneficial effects of the technical solution provided by this application include at least:

[0037] In the experimental loop composed of the furnace tube and the air intake pipe, when a sealed air path is formed and only the pipe corresponding to the diffusion flowmeter is allowed to exchange gas, the gas input of the air intake pipe is performed through the diffusion flowmeter, and after the air pressure changes from the first air pressure to the second air pressure, the test time is determined, and the test time is used to estimate whether there is a difference between the displayed flow rate of the diffusion flowmeter and the actual output flow rate. In this process, the air intake pipe controlled by the flowmeter is the only outlet of the closed air path and is the only reason for the change in air pressure in the experimental loop. The actual flow rate of the diffusion flowmeter can be directly determined by the test time, and then the displayed flow rate of the diffusion flowmeter and the output flow rate of the diffusion flowmeter can be obtained. It can be quickly and accurately determined whether there is a problem with the diffusion flowmeter without disassembling the flowmeter in an environment such as a solar cell factory. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0039] Figure 1 A schematic flow chart of a diffusion flowmeter consistency inspection method provided by an exemplary embodiment of the present application is shown;

[0040] Figure 2 A flow chart showing another method for checking consistency of a diffusion flowmeter provided by an exemplary embodiment of the present application is shown;

[0041] Figure 3 A process schematic diagram of a diffusion flowmeter consistency inspection method provided by an exemplary embodiment of the present application is shown. DETAILED DESCRIPTION

[0042] In order to make the objectives, technical solutions and advantages of the present application clearer, the implementation methods of the present application will be further described in detail below with reference to the accompanying drawings.

[0043] First, a brief introduction is given to the terms involved in the embodiments of the present application:

[0044] Diffusion flowmeter, and thermal gas mass flowmeter, is a flowmeter made based on thermal diffusion technology. In the embodiment of the present application, the diffusion flowmeter is used to measure the gas mass flow rate, and is used to control the gas to be transported into the pipeline. In the present application, the diffusion flowmeter is used to transport gas into the furnace tube, and is implemented as a diffusion flowmeter in a diffusion furnace dedicated to manufacturing solar pn junctions. Taking the thermal diffusion process of doping trivalent boron elements on the surface of n-type semiconductors as an example, liquid BCL3 or BBr3 is used as a diffusion source, and the reaction is fully decomposed under high temperature and oxygen conditions to generate silicon dioxide and boron atoms, and the method of using boron atoms (P type) to diffuse into the inside of the silicon wafer (N type) changes the conductivity type of the silicon wafer surface layer to form a pn junction. In the entire thermal diffusion process, at least three gases, oxygen, nitrogen, source gas (generally also nitrogen, called small nitrogen) or BCL3 gaseous source, are required. Therefore, in the embodiment of the present application, the diffusion flowmeter is used to control the delivery of the above three gases. Optionally, there are different types of diffusion flowmeters in one corresponding furnace tube. The present application can realize the detection of the diffusion flow meter without changing the structure of the diffusion furnace used for preparing the pn junction, that is, without taking out the diffusion flow meter.

[0045] Figure 1 A flow chart of a diffusion flowmeter consistency inspection method provided by an exemplary embodiment of the present application is shown, and the method comprises:

[0046] Step 101, controlling the air pressure in the experimental loop to a first air pressure.

[0047] In an embodiment of the present application, the experimental loop includes a furnace tube and at least one air inlet pipe. Optionally, the experimental loop is implemented as a diffusion furnace dedicated to manufacturing a pn junction of a solar cell. In an embodiment of the present application, the air pressure in the experimental loop can be detected in real time. In one example, a pressure gauge is provided in the experimental loop. The pressure gauge can be used to detect the flow rate in the experimental loop in real time. In an embodiment of the present application, the air inlet pipe is opened and closed by a solenoid valve. When all the air inlet pipes are closed, the experimental loop forms a sealed air path.

[0048] The process described in step 101 can be implemented as a vacuuming process. By vacuuming, the air pressure in the experimental loop is controlled to be low pressure. In one example, the air pressure in the furnace tube is 100 mbar.

[0049] Step 102, using a diffusion flowmeter, injecting a preset type of gas into the experimental loop through the intake pipe when only the intake pipe corresponding to the diffusion flowmeter is opened, and determining the displayed flow of the diffusion flowmeter.

[0050] In the embodiment of the present application, the diffusion flowmeter is used as the only gas source, and the gas is injected into the experimental loop through the gas inlet pipe opened by the solenoid valve to increase the gas pressure in the furnace tube. Optionally, the diffusion flowmeter will display the current gas input flow rate measured by itself, and there may be an error between the displayed flow rate and the actual flow rate.

[0051] In the embodiment of the present application, corresponding to the actual working conditions, the preset types of gases include oxygen, nitrogen, source-carrying gas and special gases such as boron trichloride, phosphorus trichloride and boron tribromide. Optionally, when the preset type of gas is a characteristic gas, nitrogen is used instead of the special gas.

[0052] Step 103, in response to the air pressure of the experimental loop reaching the second air pressure, determining the test time.

[0053] In the embodiment of the present application, the second air pressure is the air pressure value read by the pressure measuring device and is the air pressure value set for the experiment. The second air pressure is greater than the first air pressure. When the air pressure in the experimental loop reaches the second air pressure, the test time can be determined.

[0054] Step 104 , determining the consistency of the displayed flow rate of the diffusion flow meter and the output flow rate of the diffusion flow meter based on the test time.

[0055] In the embodiment of the present application, the output flow rate indicates the actual gas mass flow rate output by the diffusion flowmeter, and the actual gas mass flow rate output can be deduced from the change in the pressure in the pipeline and the time corresponding to the change. In one example, it is determined by calculation whether the displayed flow rate can change the first pressure value in the furnace tube to the second pressure value within the test time; in another example, by replacing the flowmeter and conducting the same experiment with the same displayed flow rate, it is determined by comparison whether the displayed flow rate can change the first pressure value in the furnace tube to the second pressure value within the test time. The present application does not limit the method for determining the consistency between the displayed flow rate and the output flow rate.

[0056] In the embodiment of the present application, the consistency of the diffusion flowmeter indicates the consistency of the displayed flow rate of the diffusion flowmeter and the output flow rate of the diffusion flowmeter. Optionally, the determination result of the consistency includes two possibilities: the displayed flow rate of the diffusion flowmeter is consistent with the output flow rate, and the displayed flow rate of the diffusion flowmeter is inconsistent with the output flow rate.

[0057] In summary, the method provided by the embodiment of the present application, in the experimental loop composed of the furnace tube and the air inlet pipe, forms a sealed air path and only allows the pipeline corresponding to the diffusion flowmeter to exchange gas, performs gas input to the air inlet pipe through the diffusion flowmeter, and after the air pressure changes from the first air pressure to the second air pressure, determines the test time, and infers whether there is a difference between the displayed flow rate of the diffusion flowmeter and the actual output flow rate by the test time. In this process, the air inlet pipe controlled by the flowmeter, as the only outlet of the closed air path, is the only reason for the change in air pressure in the experimental loop, and the actual flow rate of the diffusion flowmeter can be directly determined by the test time, and then it can be obtained whether the displayed flow rate of the diffusion flowmeter is consistent with the output flow rate of the diffusion flowmeter. In the environment of the solar cell factory, it is not necessary to disassemble the flowmeter to quickly and accurately determine whether there is a problem with the diffusion flowmeter.

[0058] Figure 2 A flowchart showing another diffusion flowmeter consistency inspection method provided by an exemplary embodiment of the present application is shown. Figure 2 , the method comprising:

[0059] Step 201, in response to all air intake pipes in the experimental loop being closed, controlling the air pressure in the experimental loop to a third air pressure.

[0060] Step 202, terminate the gas exchange between the experimental loop and the outside world.

[0061] Step 203, in response to the time of terminating the gas exchange between the experimental loop and the outside reaching the first leak rate detection result time, determining the fourth gas pressure in the experimental loop.

[0062] Step 204: taking the difference between the fourth air pressure and the third air pressure as the furnace tube leakage rate detection result.

[0063] Steps 201 to 204 are the furnace tube leakage rate detection process performed in the pre-experimental stage. The purpose of this process is to determine the furnace tube leakage rate before the consistency test of the diffusion flowmeter is performed to calibrate the final data. Therefore, in this process, when all the air inlet pipes are closed, the gas pressure in the experimental loop is adjusted to a preset value. Optionally, the preset value is 100 mbar. After adjusting the gas pressure, the gas exchange between the experimental loop and the outside world is terminated and after a preset time, the furnace tube leakage rate can be determined.

[0064] Step 205 , in response to other air intake pipes in the experimental loop being closed and the air intake pipe being opened, controlling the air pressure in the experimental loop to a fifth air pressure.

[0065] Step 206, terminate the gas exchange between the experimental loop and the outside world.

[0066] Step 207, in response to the time of terminating the gas exchange between the experimental circuit and the outside reaching the second leak rate detection result time, determining the sixth gas pressure in the experimental circuit.

[0067] Step 208: taking the difference between the sixth air pressure and the fifth air pressure as the intake pipe leakage rate detection result.

[0068] The process shown in step 205 to step 208 is the same as the process shown in step 201 to step 204, that is, determining the sum of the leakage rates of the intake pipe and the furnace pipe when the intake pipe corresponding to the diffusion flowmeter is opened.

[0069] Step 209 , in response to the furnace tube leakage rate detection result being consistent with the intake pipe leakage rate detection result, controlling the air pressure in the experimental loop to a first air pressure.

[0070] Step 210: In response to the inconsistency between the furnace tube leakage rate detection result and the intake pipe leakage rate detection result, the intake pipe is repaired.

[0071] In the embodiment of the present application, the content shown in step 209 is the same as the content shown in step 101, and will not be described in detail here. When the furnace tube leakage rate detection result and the intake pipe leakage rate detection result are represented in numerical form, the two are inconsistent, which means that there is a gas leak in the gas path corresponding to the intake pipe. At this time, the subsequent process should be stopped and the intake pipe should be inspected.

[0072] Step 211, using a diffusion flowmeter, injecting a preset type of gas into the experimental loop through the intake pipe when only the intake pipe corresponding to the diffusion flowmeter is opened, and determining the displayed flow of the diffusion flowmeter.

[0073] Step 212, in response to the air pressure of the experimental loop reaching the second air pressure, determining the test time.

[0074] The contents shown in step 211 to step 212 correspond to the contents shown in step 102 to step 103 and are not described in detail here.

[0075] Step 213, processing the test time based on the furnace tube leakage rate detection result to obtain a normalized test time.

[0076] In the embodiment of the present application, the test time will be normalized with respect to the furnace tube leakage rate to improve data accuracy.

[0077] Step 214 , determining the consistency of the displayed flow rate of the diffusion flow meter and the output flow rate of the diffusion flow meter based on the test time.

[0078] It should be noted that in the embodiment of the present application, multiple air inlet pipes and corresponding diffusion flowmeters are set in the same experimental loop. By replacing the flowmeter and performing the same experiment with the same displayed flow rate, a comparison is made to determine whether the displayed flow rate can change the first pressure value in the furnace tube to the second pressure value within the test time. Optionally, after testing the test time corresponding to each diffusion flowmeter respectively, based on the test time, the most consistent test time is selected as the accurate test time, and the diffusion flowmeter corresponding to the few inconsistent test times is taken as the abnormal diffusion flowmeter, and a subsequent verification process is performed.

[0079] Step 215 : in response to the display flow rate of the diffusion flow meter and the output flow rate of the diffusion flow meter being inconsistent, determining the difference between the display flow rate and the output flow rate.

[0080] Step 216, adjusting the displayed flow rate of the diffusion flowmeter based on the difference to obtain a corrected displayed flow rate, and determining an ideal corrected flow rate time corresponding to the corrected displayed flow rate.

[0081] Step 217, using a diffusion flowmeter, when only the air inlet pipe corresponding to the diffusion flowmeter is opened, injecting a preset type of gas into the experimental loop at a calibrated displayed flow rate.

[0082] Step 218, determining the actual corrected flow time when the air pressure of the experimental loop reaches the second air pressure.

[0083] Step 219, compare the ideal correction flow time with the actual correction flow time to obtain a compensation correction result.

[0084] Steps 215 to 219 are the process of compensation correction of the diffusion flowmeter. In the embodiment of the present application, by referring to the test time of other accurate diffusion flowmeters and the corresponding actual flow, the difference is determined and the data is adjusted, and the failure of the diffusion flowmeter can be preliminarily determined. Optionally, the method shown in steps 215 to 219 can determine that the error generated by the diffusion flowmeter is proportional to the actual flow of the diffusion flowmeter.

[0085] In summary, the method provided by the embodiment of the present application, in the experimental loop composed of the furnace tube and the air inlet pipe, forms a sealed air path and only allows the pipeline corresponding to the diffusion flowmeter to exchange gas, performs gas input to the air inlet pipe through the diffusion flowmeter, and after the air pressure changes from the first air pressure to the second air pressure, determines the test time, and infers whether there is a difference between the displayed flow rate of the diffusion flowmeter and the actual output flow rate by the test time. In this process, the air inlet pipe controlled by the flowmeter, as the only outlet of the closed air path, is the only reason for the change in air pressure in the experimental loop, and the actual flow rate of the diffusion flowmeter can be directly determined by the test time, and then it can be obtained whether the displayed flow rate of the diffusion flowmeter is consistent with the output flow rate of the diffusion flowmeter. In the environment of the solar cell factory, it is not necessary to disassemble the flowmeter to quickly and accurately determine whether there is a problem with the diffusion flowmeter.

[0086] Figure 3 A process diagram of a diffusion flowmeter consistency inspection method provided by an exemplary embodiment of the present application is shown. Please refer to Figure 3 , the process includes:

[0087] Step 301, furnace tube leakage rate test.

[0088] This process corresponds to the furnace tube leakage rate calculation process shown in step 301 to step 304. In one example, all flow meter valves are closed, the furnace door is closed, the furnace tube is vacuumed to 100 mbar, the pressure is set to atmospheric pressure and the time is recorded, and the pressure change value is recorded after 15 minutes (including but not limited to the time), and the value is divided by the time to obtain the leakage rate of the furnace tube in 1 minute.

[0089] Step 302: testing the leakage rate of each gas path.

[0090] This process is the intake pipe leakage rate test process corresponding to step 305 to step 308. In one example, the solenoid valve corresponding to the flow meter to be tested is opened, all other flow meter valves are closed, the furnace door is closed, the furnace tube is vacuumed to 100mbar, the pressure is set to atmospheric pressure and the time is recorded, and the pressure change value is recorded after 15 minutes (including but not limited to this time), and the value is divided by the time to obtain the total leakage rate of the gas line + furnace tube in 1 minute. (Nitrogen should be used instead of special gas in the special gas pipeline to perform this step).

[0091] Step 303, running the flow meter test process.

[0092] Step 304, check the process operation record and record the time when each flow meter reaches the specified pressure.

[0093] The process shown in step 303 to step 304 corresponds to the process shown in step 101 to step 104, that is, it illustrates the synchronous detection process for the consistency of each flow meter.

[0094] Step 305, process the data, normalize the effect of the furnace tube leakage rate, generate a chart, and find out the abnormal flow meter.

[0095] The process shown in step 305 is the process of identifying abnormal flowmeters. Optionally, through the visualization icon, it can be obtained that when the data of most diffusion flowmeters are consistent, a small number of diffusion flowmeters with inconsistent data are abnormal flowmeters.

[0096] The above are only optional embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A method for checking the consistency of a diffusion flowmeter, characterized in that: The method comprises: Controlling the air pressure in an experimental loop to a first air pressure, wherein the experimental loop includes a furnace tube and at least one air inlet pipe, wherein the furnace tube and the air inlet pipe form a sealed air path in the experimental loop; Using a diffusion flowmeter, injecting a preset type of gas into the experimental loop through the intake pipe when only the intake pipe corresponding to the diffusion flowmeter is opened, and determining a displayed flow rate of the diffusion flowmeter, the preset type corresponding to the type of the diffusion flowmeter; In response to the air pressure of the experimental loop reaching a second air pressure, determining a test time; Determining the consistency of the displayed flow rate of the diffusion flowmeter and the output flow rate of the diffusion flowmeter based on the test time, wherein the output flow rate of the diffusion flowmeter indicates that the diffusion flowmeter controls the flow rate of the preset type of gas injected into the intake pipe; Wherein, controlling the air pressure in the experimental loop to a first air pressure comprises: Performing a leakage rate test on the furnace tube to obtain a furnace tube leakage rate test result; Performing a leak rate test on the air intake pipe to obtain an air intake pipe leak rate test result; In response to the furnace tube leakage rate detection result being consistent with the intake pipe leakage rate detection result, controlling the air pressure in the experimental loop to the first air pressure; In response to the furnace tube leakage rate detection result being inconsistent with the intake pipe leakage rate detection result, the intake pipe is repaired.

2. The method according to claim 1, characterized in that The step of performing a leakage rate detection on the furnace tube to obtain a leakage rate detection result of the furnace tube includes: In response to all air intake pipes in the experimental loop being closed, controlling the air pressure in the experimental loop to a third air pressure; Stopping the gas exchange between the experimental circuit and the outside world; In response to the time of suspending the gas exchange between the experimental circuit and the outside reaching the first leak rate detection result time, determining a fourth gas pressure in the experimental circuit; The difference between the fourth gas pressure and the third gas pressure is used as the furnace tube leakage rate detection result.

3. The method according to claim 1, characterized in that Performing a leak rate test on the air intake pipe to obtain an air intake pipe leak rate test result, including In response to other intake pipe walls in the experimental loop and the intake pipe being opened, controlling the air pressure in the experimental loop to a fifth air pressure; Stopping the gas exchange between the experimental circuit and the outside world; In response to the time of terminating the gas exchange between the experimental circuit and the outside reaching the second leak rate detection result time, determining a sixth gas pressure in the experimental circuit; The difference between the sixth air pressure and the fifth air pressure is used as the intake pipe leakage rate detection result.

4. The method according to claim 1, characterized in that: The method further comprises: The test time is processed based on the furnace tube leakage rate detection result to obtain a normalized test time.

5. The method according to claim 1, characterized in that: The experimental loop includes at least two air inlet furnace tubes, each of which corresponds to a diffusion flowmeter; The method further comprises: A test time corresponding to each of the diffusion flow meters is determined.

6. The method according to claim 1, characterized in that After determining the consistency of the displayed flow rate of the diffusion flowmeter and the output flow rate of the diffusion flowmeter based on the test time, the method includes: In response to a discrepancy between a displayed flow rate of the diffusion flow meter and an output flow rate of the diffusion flow meter, determining a difference between the displayed flow rate and the output flow rate; Adjusting the displayed flow rate of the diffusion flowmeter based on the difference to obtain a corrected displayed flow rate, and determining an ideal corrected flow rate time corresponding to the corrected displayed flow rate; Using the diffusion flowmeter, when only the air inlet pipe corresponding to the diffusion flowmeter is opened, injecting the preset type of gas into the experimental loop at a calibrated displayed flow rate; Determining the actual corrected flow time when the air pressure of the experimental loop reaches the second air pressure; The ideal correction flow time is compared with the actual correction flow time to obtain a compensation correction result, and the compensation correction result is used to indicate an abnormal state of the diffusion flowmeter.

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