Material scheduling method for semiconductor process equipment and semiconductor process equipment

Abstract

An embodiment of the present invention provides a material scheduling method for semiconductor process equipment and semiconductor process equipment. The semiconductor process equipment includes multiple modules, including a vacuum-to-atmosphere conversion module and a process module. The method comprises: generating a task list corresponding to the current material based on the material processing path, the tasks performed by each module, and the sequence of actions generated by executing the tasks; setting constraints and a solution target for a solution model; and inputting the task list into the solution model so that the solution model calculates and outputs the start and end times of each task based on the task list, constraints, and solution target. This method can meet the scheduling needs of equipment with more complex structural layouts and higher process precision requirements.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a scheduling control method for semiconductor process equipment and semiconductor process equipment. Background Art

[0002] During the processing of semiconductor process equipment, materials are processed through various modules of the semiconductor process equipment according to a set material path.

[0003] In the existing technology, when processing multiple materials, the goals and constraints are usually summarized and a mathematical model is established based on the set material transmission path, current situation, and set parameters of each equipment component (for example, the robot arm film transmission time). The solver uses mathematical knowledge such as constraint programming to solve the problem, thereby obtaining an accurate optimal solution and finding a scheduling plan with the shortest total time to complete all process tasks.

[0004] However, the equipment structure layout set by the existing technology is simple and the equipment process accuracy requirements are low. The scheduling algorithm cannot meet the scheduling needs of equipment with more complex structure layout and higher process accuracy requirements. Summary of the Invention

[0005] In view of the above problems, embodiments of the present invention are proposed to provide a scheduling control method for semiconductor process equipment and a semiconductor process equipment that overcome the above problems or at least partially solve the above problems.

[0006] To solve the above problems, an embodiment of the present invention discloses a material scheduling method for semiconductor process equipment, wherein the semiconductor process equipment includes multiple modules, including a vacuum-atmosphere conversion module and a process module. The method includes:

[0007] Generate a task list corresponding to the current material based on the material processing path, the tasks performed by each module, and the action sequence generated by executing the tasks;

[0008] Set constraints and solution goals for the solution model; the constraints include material processing time constraints, task sequence constraints between multiple modules, task sequence constraints within the same module, relationship constraints between parallel subtasks under the same task, and vacuum state and atmospheric state conversion constraints for the vacuum-atmosphere conversion module; the solution goal is to minimize the sum of the start and end times of all process module tasks executed by the material;

[0009] The task list is input into the solution model, so that the solution model calculates and outputs the start execution time and the end execution time of each task according to the task list, the constraint conditions and the solution goal.

[0010] Optionally, the relationship constraints between the parallel subtasks under the same task include:

[0011] For tasks that contain multiple parallel subtasks, set multiple parallel subtasks of the same task, and only one subtask is selected at a time.

[0012] Optionally, the sequential relationship constraints between tasks in the same module include:

[0013] For tasks in the same module, a corresponding task directed chain is generated as a sequence constraint condition between tasks in the same module; each node in the task directed chain corresponds to a task in the same module; the nodes in the task directed chain, except for the head node and the tail node, have only one parent node and one child node, the head node has only one child node, and the tail node has only one parent node; the task start time of the child node is not less than the task end time of the parent node.

[0014] Optionally, the vacuum-atmosphere conversion module includes an atmospheric state and a vacuum state; the vacuum state and atmospheric state conversion constraints of the vacuum-atmosphere conversion module include:

[0015] When the task states corresponding to the parent node and child node of the task directed chain of the vacuum atmosphere conversion module are inconsistent, a state transition task is added between the task corresponding to the parent node and the task corresponding to the child node as a state transition constraint condition for the conversion relationship between the vacuum state and the atmospheric state of the vacuum atmosphere conversion module.

[0016] Optionally, the vacuum-atmosphere conversion module includes an unprocessed layer and a processed layer; the vacuum state and atmospheric state conversion constraints of the vacuum-atmosphere conversion module further include:

[0017] For the tasks of the vacuum atmosphere conversion module, a corresponding task directed chain is generated as a sequence constraint condition between tasks within the vacuum atmosphere conversion module; the order between the tasks of the vacuum atmosphere conversion module is the interaction task between the vacuum atmosphere conversion module and the atmospheric transmission robot, and the interaction task between the vacuum atmosphere conversion module and the vacuum transmission robot.

[0018] Optionally, the sequential relationship constraints between tasks in the same module further include:

[0019] For the tasks of the process module, a corresponding task directed chain is generated as a sequence constraint condition between tasks in the process module; the sequence between the tasks of the process module is material process processing tasks and non-material process processing tasks.

[0020] Optionally, the multiple modules further include a vacuum transfer robot, the vacuum transfer robot is configured with an extraction task and a placement task, and the constraint conditions further include:

[0021] For a pair of extraction tasks and placement tasks of a vacuum transfer robot, a same-robot constraint condition is set that the extraction task and the placement task are completed by the same vacuum transfer robot.

[0022] Optionally, the vacuum transfer robot includes an unprocessed hand and a processed hand, and the constraint conditions further include:

[0023] For the tasks of the vacuum transfer robot, a corresponding task directed chain is generated as a sequence constraint condition between the tasks of the vacuum transfer robot; wherein, the order between the tasks of the vacuum transfer robot is unprocessed hand extraction task, unprocessed hand placement task, processed hand extraction task, and processed hand placement task.

[0024] Optionally, the multiple modules further include a loading and unloading module, and the constraint condition further includes:

[0025] For the tasks of the loading and unloading module, a corresponding task directed chain is generated as the order constraint condition between tasks in the loading and unloading module; the order between tasks in the loading and unloading module is loading and unloading unprocessed material tasks, and loading and unloading processed material tasks.

[0026] Optionally, the multiple modules further include an atmospheric transport manipulator, the atmospheric transport manipulator is configured with an extraction task and a placement task, and the constraint conditions further include:

[0027] For a pair of extraction tasks and placement tasks of an atmospheric transport manipulator, a same-manipulator constraint condition is set that the extraction task and the placement task are completed by the same atmospheric transport manipulator.

[0028] Optionally, the constraint condition further includes:

[0029] For the tasks of the atmospheric transmission manipulator, a corresponding task directed chain is generated as the sequence constraint condition between the tasks of the atmospheric transmission manipulator; the sequence between the tasks of the atmospheric transmission manipulator is the material extraction task of the atmospheric transmission manipulator in the loading and unloading module, the material placement task of the atmospheric transmission manipulator in the vacuum-atmosphere conversion module, the material extraction task of the atmospheric transmission manipulator in the vacuum-atmosphere conversion module, the material placement task of the atmospheric transmission manipulator in the cooling module, the material extraction task of the atmospheric transmission manipulator in the cooling module, and the material placement task of the atmospheric transmission manipulator in the loading and unloading module.

[0030] Optionally, there are multiple vacuum atmosphere conversion modules and the multiple vacuum atmosphere conversion modules are in a parallel relationship, and one task of the vacuum atmosphere conversion module includes multiple parallel subtasks;

[0031] For a task containing multiple parallel subtasks, the parallel task constraint condition of setting multiple parallel subtasks of the same task and only one subtask being selected at a time includes:

[0032] A plurality of parallel subtasks of the vacuum atmosphere conversion module are set, and a parallel task constraint condition is that only one subtask is selected at a time.

[0033] Optionally, there are multiple process modules and the multiple process modules are in a parallel relationship, and one task of the process module includes multiple parallel subtasks;

[0034] The parallel task constraint condition of setting multiple parallel subtasks of the same task and only one subtask being selected at a time for a task containing multiple parallel subtasks also includes:

[0035] A plurality of parallel subtasks of the process module are set, and a parallel task constraint condition is that only one subtask is selected at a time.

[0036] Optionally, the multiple modules further include a cooling module, the cooling module includes multiple layers and the multiple cooling layers are in a parallel relationship, and one task of the cooling module includes multiple parallel subtasks;

[0037] The parallel task constraint condition of setting multiple parallel subtasks of the same task and only one subtask being selected at a time for a task containing multiple parallel subtasks also includes:

[0038] A plurality of parallel subtasks of the cooling module are set, and a parallel task constraint condition is that only one subtask is selected at a time.

[0039] Optionally, it also includes:

[0040] Before generating the corresponding task list, the materials are grouped; the process module tasks of the materials in the same group have a priority order; the constraint conditions also include:

[0041] For materials in the same group, set the priority constraint condition that the start time of the process module task with a lower priority is not less than the end time of the process module task with a higher priority.

[0042] Optionally, it also includes:

[0043] When the remaining time for a material to complete the tasks in the process module reaches a preset time threshold, the remaining tasks of the material that has not completed the process module tasks are cleared;

[0044] Get all task progress of the current machine, add materials, and generate a new task list;

[0045] The new task list is input into the solution model, so that the solution model recalculates and outputs the start execution time and the end execution time of each task according to the new task list, the constraint conditions and the solution goal.

[0046] An embodiment of the present invention further discloses a semiconductor process device, which includes multiple modules, including a vacuum atmosphere conversion module and a process module. The semiconductor process device also includes:

[0047] The controller is used to generate a task list corresponding to the current material according to the material processing path, the tasks performed by each module and the action sequence generated by performing the tasks; set the constraint conditions and solution goals of the solution model; wherein the constraint conditions include material processing time relationship constraints, task sequence relationship constraints between multiple modules, task sequence relationship constraints within the same module, relationship constraints between parallel subtasks under the same task, and vacuum state and atmospheric state conversion constraints of the vacuum atmosphere conversion module; the solution goal is the shortest time of the sum of the start time of the material executing all process module tasks and the end time of all tasks; the task list is input into the solution model so that the solution model calculates and outputs the start execution time and execution end time of each task according to the task list, the constraint conditions and the solution goal.

[0048] Optionally, the controller is configured to set multiple parallel subtasks for a task including multiple parallel subtasks, with only one subtask being selected at a time.

[0049] Optionally, the controller is used to generate a corresponding task directed chain as a sequence constraint condition between tasks within the same module; each node in the task directed chain corresponds to a task within the same module; the nodes in the task directed chain, except for the head node and the tail node, have only one parent node and one child node, the head node has only one child node, and the tail node has only one parent node; the task start time of the child node is not less than the task end time of the parent node.

[0050] Optionally, the vacuum atmosphere conversion module includes an atmospheric state and a vacuum state, and the controller is used to add a state conversion task as a state conversion constraint condition for the conversion relationship between the vacuum state and the atmospheric state of the vacuum atmosphere conversion module between the task corresponding to the parent node and the task corresponding to the child node of the task directed chain of the vacuum atmosphere conversion module when the task states corresponding to the parent node and the child node are inconsistent.

[0051] Optionally, the vacuum atmosphere conversion module includes an unprocessed layer and a processed layer; the controller is used to generate a corresponding task directed chain as a sequence constraint condition between tasks in the vacuum atmosphere conversion module for the tasks of the vacuum atmosphere conversion module; the order between the tasks of the vacuum atmosphere conversion module is the interaction task between the vacuum atmosphere conversion module and the atmospheric transmission robot, and the interaction task between the vacuum atmosphere conversion module and the vacuum transmission robot.

[0052] Optionally, the controller is used to generate a corresponding task directed chain as a sequence constraint between tasks in the process module for the tasks of the process module; the sequence between the tasks of the process module is material process processing tasks and non-material process processing tasks.

[0053] Optionally, the multiple modules also include a vacuum transfer robot, which is configured with an extraction task and a placement task. The controller is used to set a same-robot constraint condition for a pair of extraction tasks and placement tasks of the vacuum transfer robot, so that the extraction task and the placement task are completed by the same vacuum transfer robot.

[0054] Optionally, the vacuum transfer robot includes an unprocessed hand and a processed hand, and the controller is used to generate a corresponding task directed chain as a sequence constraint condition between the tasks of the vacuum transfer robot for the tasks of the vacuum transfer robot; wherein the order between the tasks of the vacuum transfer robot is unprocessed hand extraction task, unprocessed hand placement task, processed hand extraction task, and processed hand placement task.

[0055] Optionally, the multiple modules also include a loading and unloading module, and the controller is used to generate a corresponding task directed chain as a sequence constraint condition between tasks in the loading and unloading module for the tasks of the loading and unloading module; the sequence between the tasks of the loading and unloading module is loading and unloading unprocessed material tasks and loading and unloading processed material tasks.

[0056] Optionally, the multiple modules also include an atmospheric transfer manipulator, which is configured with an extraction task and a placement task. The controller is used to set the same-manipulator constraint condition for a pair of extraction tasks and placement tasks of the atmospheric transfer manipulator, so that the extraction task and the placement task are completed by the same atmospheric transfer manipulator.

[0057] Optionally, the controller is used to generate a corresponding directed chain of tasks as a sequence constraint condition between the tasks of the atmospheric transmission manipulator for the tasks of the atmospheric transmission manipulator; the sequence between the tasks of the atmospheric transmission manipulator is the material extraction task of the atmospheric transmission manipulator in the loading and unloading module, the material placement task of the atmospheric transmission manipulator in the vacuum-atmosphere conversion module, the material extraction task of the atmospheric transmission manipulator in the vacuum-atmosphere conversion module, the material placement task of the atmospheric transmission manipulator in the cooling module, the material extraction task of the atmospheric transmission manipulator in the cooling module, and the material placement task of the atmospheric transmission manipulator in the loading and unloading module.

[0058] Optionally, there are multiple vacuum atmosphere conversion modules and the multiple vacuum atmosphere conversion modules are in a parallel relationship, and one task of the vacuum atmosphere conversion module includes multiple parallel subtasks; the controller is used to set the parallel task constraint condition that multiple parallel subtasks of the vacuum atmosphere conversion module are selected, and only one subtask is selected at the same time.

[0059] Optionally, there are multiple process modules and the multiple process modules are in a parallel relationship, and one task of the process module includes multiple parallel subtasks; the controller is used to set the parallel task constraint condition that multiple parallel subtasks of the process module are selected and only one subtask is selected at the same time.

[0060] Optionally, the multiple modules also include a cooling module, the cooling module includes multiple layers and the multiple cooling layers are in a parallel relationship, and one task of the cooling module includes multiple parallel subtasks; the controller is used to set the multiple parallel subtasks of the cooling module, and the parallel task constraint condition is that only one subtask is selected at the same time.

[0061] Optionally, before generating the corresponding task list, the materials are grouped; the process module tasks of the materials in the same group have a priority order; the controller is used to set a priority constraint condition for the materials in the same group, that is, the start time of the process module task with a lower priority is not less than the end time of the process module task with a higher priority.

[0062] Optionally, the controller is used to clear the remaining tasks of the material that has not performed the process module tasks when the remaining time for the material to complete the task in the process module reaches a preset time threshold; obtain the entire task progress of the current machine, add materials, and generate a new task list; input the new task list into the solution model, so that the solution model recalculates and outputs the start execution time and execution end time of each task based on the new task list, the constraints and the solution goal.

[0063] The embodiments of the present invention include the following advantages:

[0064] In an embodiment of the present invention, a task list corresponding to the current material is generated based on the material processing path, the tasks performed by each module, and the action sequence generated by executing the tasks. Constraints and solution objectives are set for the solution model. The constraints include constraints on material processing time, sequential relationships between tasks across multiple modules, sequential relationships between tasks within the same module, relationships between parallel subtasks within the same task, and constraints on the vacuum and atmospheric state transitions within the vacuum-to-atmosphere conversion module. The solution objective is the shortest time for the material to execute the tasks. The task list is input into the solution model, which calculates and outputs the start and end times of each task based on the task list, the set constraints, and the solution objective. This allows for scheduling requirements for equipment with more complex structural layouts and higher process precision requirements, such as dynamic state transitions for load lock components, and the parallel processing of multiple components and components with multiple capacities. BRIEF DESCRIPTION OF THE DRAWINGS

[0065] Figure 1 This is a structural diagram of a single-chip microcomputer device provided by an embodiment of the present invention;

[0066] Figure 2 This is a schematic diagram of the internal structure of a vacuum-to-atmosphere conversion module in a single-chip microcomputer device provided by an embodiment of the present invention;

[0067] Figure 3 This is a flow chart of the steps of a material scheduling method for semiconductor process equipment provided by an embodiment of the present invention;

[0068] Figure 4 This is a structural block diagram of a semiconductor process equipment provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0069] To make the above-mentioned objects, features, and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It is obvious that the embodiments described are only some embodiments of the present invention, rather than all embodiments. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments of the present invention are within the scope of protection of the present invention.

[0070] The equipment structure layout set by the existing technology is simple, the equipment process precision requirements are low, and the vacuum atmosphere conversion module components have no dynamic state conversion requirements; the number of components is small, the capacity is small, and there is no parallel demand for the same components. The scheduling algorithm cannot meet the scheduling needs of equipment with more complex structure layout and higher process precision requirements.

[0071] Based on this, the present invention intends to provide a material scheduling method and corresponding semiconductor process equipment that overcome the above problems or at least partially solve the above problems.

[0072] The scheduling control method of the semiconductor process equipment of the embodiment of the present invention can be applied to various types of semiconductor process equipment with more complex structures. Figure 1 The figure shows a schematic diagram of the structure of a single-chip microcomputer device provided by an embodiment of the present invention. Taking a single-chip microcomputer device as an example, the single-chip microcomputer device is a clustered device. The machine structure may include: a loading and unloading module (LoadPort), an atmospheric transfer robot (ATR), a vacuum-to-atmosphere conversion module (LoadLock), a vacuum transfer robot (VTR), a process module (PM), and a cooling module (Cooler). Its function is to transfer materials from the LoadPort to the process module for processing along a predetermined path, and then return them to the LoadPort after processing is completed. Multiple pieces of materials may need to be dispatched simultaneously at the same time.

[0073] The loading and unloading module is used to provide an operating platform for loading wafer boxes, which can hold 25 wafers. For example, the number of loading and unloading modules can be three.

[0074] The atmospheric transfer manipulator is used to transfer materials between the loading and unloading modules, the vacuum-atmosphere conversion module, and the cooling module. The atmospheric transfer manipulator can include two sheet picking positions.

[0075] The vacuum-atmosphere conversion module is a connector between the atmosphere end and the vacuum end, and is used for the transfer of materials between the vacuum area and the atmosphere. Therefore, the vacuum-atmosphere conversion module has two states, vacuum state and atmosphere state. Figure 2 This diagram illustrates the internal structure of a vacuum-to-atmosphere conversion module within a single-chip microcomputer device according to an embodiment of the present invention. The device includes two load locks, each independent and capable of parallel operation. Each load lock can be divided into two layers, each containing two chip access positions, with both layers maintaining consistent status.

[0076] The vacuum transfer robot is used to transfer materials between the vacuum atmosphere conversion module and the process module. The vacuum transfer robot is located in the vacuum transfer chamber (TM). The vacuum transfer robot can be divided into two levels, each level can include two sheet retrieval positions, for a total of four sheet retrieval positions.

[0077] Process modules are used to process materials. Multiple process modules can exist, and each PM is independent and can operate in parallel. Each process module can contain two stages, which can be processed simultaneously. Alternatively, one stage can be disabled, allowing the other to process independently. Disabling a stage is called ST disable.

[0078] The cooling module is used to cool the materials that have completed the process. The cooling module can have multiple layers, each layer can include 2 sheet taking positions, and each layer is independent of each other and can operate in parallel.

[0079] One of the core concepts of the embodiments of the present invention is to realize the scheduling requirements of equipment with more complex structural layout and higher process precision requirements, such as dynamic state conversion requirements of vacuum atmosphere conversion module components, parallel requirements of multiple components, and parallel requirements of multi-capacity components, by setting inter-task sequence relationship constraints between multiple modules, inter-task sequence relationship constraints within the same module, relationship constraints between parallel subtasks under the same task, vacuum state and atmospheric state conversion constraints of the vacuum atmosphere conversion module, and model solution objectives.

[0080] Reference Figure 3 , shows a flow chart of the steps of a material scheduling method for semiconductor process equipment provided by an embodiment of the present invention. The semiconductor process equipment includes multiple modules, including a vacuum atmosphere conversion module. The method may specifically include the following steps:

[0081] Step 101 : Generate a task list corresponding to the current material according to the material processing path, the tasks performed by each module, and the action sequence generated by performing the tasks.

[0082] Using the aforementioned single-chip microcomputer device as an example, the material processing path involves an atmospheric transfer robot removing the material to be processed from the loading and unloading module and transferring it to the vacuum-to-atmosphere conversion module. After the material completes the state transition from atmospheric to vacuum in the vacuum-to-atmosphere conversion module, the vacuum robot transfers the material from the vacuum-to-atmosphere conversion module to the process module for processing. After processing, the vacuum robot transfers the material from the process module back to the vacuum-to-atmosphere conversion module. The atmospheric robot transfers the material from the vacuum-to-atmosphere conversion module to the cooling module for cooling. After cooling, the atmospheric robot transfers the material to the loading and unloading module. The material is processed step by step according to the set path sequence: LP-ATR-Load Lock-TM(VTR)-PM-TM(VTR)-Load Lock-ATR-Cooler-ATR-LP.

[0083] The paths taken by materials vary depending on the process scenario. For example, materials can be processed in any one of multiple PM chambers, or processed sequentially in multiple PM chambers; materials can be cooled in any layer of a multi-layer cooler, or cooled sequentially in a predetermined sequence within the multi-layer cooler. The paths taken by materials vary in different process scenarios, and the present invention does not impose specific limitations on these paths.

[0084] The tasks performed by each module refer to the material transfer or processing performed by each module based on its own functionalities. A module can include multiple tasks, and each module performs the corresponding tasks sequentially as it transfers or processes materials. For example, an atmospheric conveying robot may first perform the material extraction task and then the material placement task.

[0085] It should be noted that, in the embodiment of the present invention, a module can also be called a component. A single-chip microcomputer machine can be composed of multiple components, including multiple quantity components (that is, the same component has multiple components, such as PM has multiple PM chambers, LoadLock has multiple vacuum atmosphere conversion modules), including multi-capacity components (that is, a component includes multiple identical containers or positions, such as Cooler has multiple layers of cooling positions).

[0086] As an example, a task list may include task categories and task attributes. Task categories may include: LP tasks, ATR tasks, Load Lock and ATR interaction tasks, Load Lock and TM (VTR) interaction tasks, PM tasks, TM (VTR) hand tasks, Cooler tasks, etc.; task attributes may include: occupied component ID, occupied component process duration (duration), required state type (RT), start time (start), end time (end), occupied component residence time (threshold) after task completion, etc. In addition, since a task corresponds to a parallel module (i.e., any component in the parallel module can be used to complete the task), the task contains multiple parallel subtasks. In addition to all task attributes, each subtask also contains a subtask attribute (Present) indicating whether it is selected.

[0087] Step 102, set the constraints and solution goals of the solution model; the constraints include material processing time relationship constraints, task sequence relationship constraints between multiple modules, task sequence relationship constraints within the same module, relationship constraints between parallel subtasks under the same task, and vacuum state and atmospheric state conversion constraints of the vacuum atmosphere conversion module; the solution goal is the shortest sum of the start time and end time of the material execution of all process module tasks.

[0088] In this embodiment of the present invention, constraints on material processing time can be set to ensure that the material completes all tasks. For example, for a task, task completion means that the material has completed processing and left. Constraints can be set based on the start and end time relationships. For example, the constraint of end = start + duration + threshold can be set to ensure that the material completes all tasks.

[0089] You can set inter-task order constraints across multiple modules to ensure that materials execute tasks sequentially according to the module path order. For example, if a task in a module cannot begin until the previous task is completed, set start(k+1)>=end(k) to enforce inter-task order constraints, ensuring that tasks proceed sequentially.

[0090] For example, multiple tasks may be generated in the same module according to the execution sequence of actions, and a sequence constraint may be set between tasks in the same module so that different tasks in the same module must be executed in sequence.

[0091] For example, when a task includes multiple parallel subtasks, relationship constraints between the parallel subtasks under the same task can be set so that only one module completes the task.

[0092] For example, the vacuum-to-atmosphere conversion module, serving as a transfer point for materials between the vacuum zone and the atmosphere, has two states: vacuum and atmosphere. When the load lock interacts with the vacuum zone (VTR), the load lock must maintain the vacuum state; similarly, when the load lock interacts with the atmosphere zone (ATR), the load lock must maintain the atmosphere state. When the load lock's current state is inconsistent with the desired state, the load lock must perform a state transition. Therefore, constraints can be set for the vacuum-to-atmosphere conversion module to enable dynamic state transitions of materials.

[0093] For example, a solution objective can be set to minimize the sum of the start time and the end time of all PM process tasks for a material. This objective can be used as a criterion for selecting the optimal output solution from the solver. The solver can be used to establish a mathematical model based on the relevant input parameters to calculate and output the optimal scheduling result.

[0094] It should be noted that the above-mentioned solver is a device for executing a model solving method. Since the device belongs to a well-known technology, it will not be described in detail here.

[0095] In one embodiment, the sequential relationship constraints between tasks in the same module may include:

[0096] For tasks in the same module, a corresponding task directed chain is generated as a sequence constraint condition between tasks in the same module; each node in the task directed chain corresponds to a task in the same module; the nodes in the task directed chain, except for the head node and the tail node, have only one parent node and one child node, the head node has only one child node, and the tail node has only one parent node; the task start time of the child node is not less than the task end time of the parent node.

[0097] For example, for a given component on a machine, only one task can be executed at a time, and different tasks must be executed sequentially. This is the relationship constraint between tasks within the same component: all selected tasks form a directed chain. Except for the head and tail nodes, each directed chain has only one parent node and one child node. The head node has only one child node, and the tail node has only one parent node. Any pair of parent and child nodes satisfies the condition: start(child node) >= end(parent node), allowing multiple tasks within the same component to be executed sequentially.

[0098] The following describes the task sequence constraints of each module one by one:

[0099] In one embodiment, the vacuum atmosphere conversion module includes an unprocessed layer and a processed layer; for the tasks of the vacuum atmosphere conversion module, a corresponding task directed chain is generated as a sequence constraint condition between tasks within the vacuum atmosphere conversion module; the order between the tasks of the vacuum atmosphere conversion module is the interaction task between the vacuum atmosphere conversion module and the atmospheric transmission robot, and the interaction task between the vacuum atmosphere conversion module and the vacuum transmission robot.

[0100] Exemplarily, the interactive tasks between the vacuum atmosphere conversion module and the atmospheric transfer robot can correspond to the vacuum atmosphere conversion module's unprocessed layer receiving atmospheric transfer robot placing material tasks, and the vacuum atmosphere conversion module's processed layer material transfer atmospheric transfer robot tasks; the interactive tasks between the vacuum atmosphere conversion module and the vacuum transfer robot can refer to the vacuum atmosphere conversion module's unprocessed layer material transfer vacuum transfer robot tasks, and the vacuum atmosphere conversion module's processed layer receiving vacuum transfer robot placing material tasks.

[0101] In actual applications, the vacuum-atmosphere conversion module may include an unprocessed layer and a processed layer. The unprocessed layer is used to store unprocessed materials, and the processed layer is used to store processed materials. The vacuum-atmosphere conversion module can be used to receive unprocessed materials transferred by the atmospheric transfer robot and place them in the unprocessed layer. The vacuum transfer robot then extracts the unprocessed materials from the unprocessed layer. After the material processing is completed, the module receives processed materials transferred by the vacuum transfer robot and places them in the processed layer. The atmospheric transfer robot then extracts the processed materials from the processed layer.

[0102] Exemplarily, for multiple tasks in the vacuum atmosphere conversion module, the interactive task between the vacuum atmosphere conversion module and the atmospheric transmission robot can be set as the head node of the directed chain of the vacuum atmosphere conversion module task; the interactive task between the vacuum atmosphere conversion module and the vacuum transmission robot can be set as the tail node of the directed chain of the process module task; the directed chain is set to have only one parent node and one child node except the head and tail nodes, the head node has only one child node, and the tail node has only one parent node; any pair of parent nodes and child nodes satisfies: start(child node)>=end(parent node), so that the vacuum atmosphere conversion module can only execute one task at a certain time, and different tasks must be executed in sequence, thereby realizing the scheduling order constraint of multiple tasks in the vacuum atmosphere conversion module.

[0103] In one embodiment, for the tasks of the process module, a corresponding task directed chain is generated as a sequence constraint between tasks in the process module; the sequence between the tasks of the process module is material process processing tasks and non-material process processing tasks.

[0104] In actual applications, the process module can be used to process unprocessed materials. After the materials have completed the process, they can be processed without materials, such as performing a cleaning process.

[0105] Exemplarily, for multiple tasks in a process module, the material process processing task can be set as the head node of a directed chain of process module tasks; the non-material process processing task can be set as the tail node of a directed chain of process module tasks; the directed chain is set to have only one parent node and one child node except for the head and tail nodes, the head node has only one child node, and the tail node has only one parent node; any pair of parent nodes and child nodes satisfies: start(child node)>=end(parent node), so that the process module can only execute one task at a time, and different tasks must be executed in sequence, thereby realizing the scheduling order constraint of multiple tasks in the process module.

[0106] In one embodiment, the multiple modules also include a vacuum transfer robot, which is configured with an extraction task and a placement task. For a pair of extraction tasks and placement tasks of the vacuum transfer robot, a same-robot constraint condition is set that the extraction task and the placement task are completed by the same vacuum transfer robot.

[0107] The vacuum transfer robot can be configured with extraction tasks and placement tasks. For example, the vacuum transfer robot's extraction task from the vacuum atmosphere conversion module and the task of placing the material in the process module can be used as a pair of extraction tasks and placement tasks of the vacuum transfer robot, and the extraction task from the process module and the task of placing the material in the vacuum atmosphere conversion module can be used as a pair of extraction tasks and placement tasks of the vacuum transfer robot; the extraction task from the vacuum atmosphere conversion module and the task of placing the material in the vacuum atmosphere conversion module can also be used as a pair of extraction tasks and placement tasks of the vacuum transfer robot, and the extraction task from the process module and the task of placing the material in the process module can be used as a pair of extraction tasks and placement tasks of the vacuum transfer robot. For the pair of extraction tasks and placement tasks of the vacuum transfer robot, those skilled in the art can set them according to the actual application scenario, and the embodiments of the present invention do not limit them here.

[0108] For example, the vacuum transfer robot ID (pick task) may be set to the vacuum transfer robot ID (place task), constraining a pair of extraction task and placement task to be completed by the same vacuum transfer robot.

[0109] In one embodiment, the vacuum transfer robot includes an unprocessed hand and a processed hand. For the vacuum transfer robot tasks, a corresponding task directed chain is generated as a sequence constraint condition between the vacuum transfer robot tasks; wherein, the order between the tasks of the vacuum transfer robot is unprocessed hand extraction task, unprocessed hand placement task, processed hand extraction task, and processed hand placement task.

[0110] The vacuum transfer robot can include an unprocessed arm and a processed arm. The unprocessed arm is used to pick up or place unprocessed materials, while the processed arm is used to pick up or place processed materials. In actual applications, the unprocessed arm and the processed arm are actually one component of the machine and cannot perform tasks simultaneously at a given time.

[0111] The vacuum transfer robot can be used to extract unprocessed materials from the vacuum atmosphere conversion module, and then place the extracted unprocessed materials in the process module. After the process module completes the processing of the materials, the processed materials are extracted from the process module, and then placed in the vacuum atmosphere conversion module.

[0112] Exemplarily, for multiple tasks in a vacuum transfer robot, the unprocessed extraction task can be set as the head node of the directed chain of vacuum transfer robot tasks; the processed placement task can be set as the tail node of the directed chain of vacuum transfer robot tasks; the directed chain is set to have only one parent node and one child node except the head and tail nodes, the head node has only one child node, and the tail node has only one parent node; any pair of parent nodes and child nodes satisfies: start(child node)>=end(parent node), so that the vacuum transfer robot can only execute one task at a time, and different tasks must be executed in sequence, thereby realizing the scheduling order constraint of multiple tasks in the vacuum transfer robot.

[0113] In one embodiment, the multiple modules also include a loading and unloading module. For the tasks of the loading and unloading module, a corresponding task directed chain is generated as a sequence constraint condition between tasks within the loading and unloading module; the order between the tasks of the loading and unloading module is loading and unloading unprocessed material tasks and loading and unloading processed material tasks.

[0114] In actual applications, the loading and unloading module can be used to load and unload unprocessed material tasks and load and unload processed material tasks.

[0115] Exemplarily, for multiple tasks in the loading and unloading module, the task of loading and unloading unprocessed materials can be set as the head node of the directed chain of the loading and unloading module tasks; the task of loading and unloading processed materials can be set as the tail node of the directed chain of the loading and unloading module tasks; the directed chain is set to have only one parent node and one child node except the head and tail nodes, the head node has only one child node, and the tail node has only one parent node; any pair of parent nodes and child nodes satisfies: start(child node)>=end(parent node), so that the loading and unloading module can only execute one task at a certain time, and different tasks must be executed in sequence, thereby realizing the scheduling order constraint of multiple tasks in the loading and unloading module.

[0116] In one embodiment, the multiple modules also include an atmospheric transfer manipulator, which is configured with an extraction task and a placement task. For a pair of extraction tasks and placement tasks of the atmospheric transfer manipulator, a same-manipulator constraint condition is set that the extraction task and the placement task are completed by the same atmospheric transfer manipulator.

[0117] The atmospheric transport robot can be configured with a pick task and a place task. For example, the atmospheric transport robot ID (pick task) = atmospheric transport robot ID (place task) can be set to constrain a pair of pick tasks and place tasks to be completed by the same atmospheric transport robot.

[0118] In one embodiment, for the tasks of the atmospheric transmission manipulator, a corresponding task directed chain is generated as a sequence constraint condition between the tasks of the atmospheric transmission manipulator; the sequence between the tasks of the atmospheric transmission manipulator is the material extraction task of the atmospheric transmission manipulator in the loading and unloading module, the material placement task of the atmospheric transmission manipulator in the vacuum-atmosphere conversion module, the material extraction task of the atmospheric transmission manipulator in the vacuum-atmosphere conversion module, the material placement task of the atmospheric transmission manipulator in the cooling module, the material extraction task of the atmospheric transmission manipulator in the cooling module, and the material placement task of the atmospheric transmission manipulator in the loading and unloading module.

[0119] For example, the material extraction task of the atmospheric transfer robot in the loading and unloading module and the material placement task of the atmospheric transfer robot in the vacuum-atmosphere conversion module can be regarded as a pair of extraction tasks and placement tasks of the atmospheric transfer robot; the material extraction task of the atmospheric transfer robot in the vacuum-atmosphere conversion module and the material placement task of the atmospheric transfer robot in the cooling module can be regarded as a pair of extraction tasks and placement tasks of the atmospheric transfer robot; the material extraction task of the atmospheric transfer robot in the cooling module and the material placement task of the atmospheric transfer robot in the loading and unloading module can be regarded as a pair of extraction tasks and placement tasks of the atmospheric transfer robot. It is also possible to regard the material extraction task of the atmospheric transfer robot in the vacuum-atmosphere conversion module and the material placement task of the atmospheric transfer robot in the vacuum-atmosphere conversion module as a pair of extraction tasks and placement tasks of the atmospheric transfer robot; the material extraction task of the atmospheric transfer robot in the cooling module and the material placement task of the atmospheric transfer robot in the cooling module can be regarded as a pair of extraction tasks and placement tasks of the atmospheric transfer robot; the material extraction task of the atmospheric transfer robot in the loading and unloading module and the material placement task of the atmospheric transfer robot in the loading and unloading module can be regarded as a pair of extraction tasks and placement tasks of the atmospheric transfer robot. For a pair of extraction tasks and placement tasks of the atmospheric transfer manipulator, those skilled in the art may set them according to actual application scenarios, and the embodiments of the present invention do not limit them here.

[0120] In actual applications, the atmospheric transfer robot can be used to extract materials from the loading and unloading module, and then place the extracted materials in the vacuum atmosphere conversion module. After the materials have completed the process, the processed materials are extracted from the vacuum atmosphere conversion module, and then the extracted processed materials are placed in the cooling module. After the materials are cooled, the cooled materials are extracted from the cooling module and then placed in the loading and unloading module.

[0121] Exemplarily, for multiple tasks in the atmospheric transmission robot, the material extraction task of the atmospheric transmission robot in the loading and unloading module can be set as the head node of the directed chain of the atmospheric transmission robot tasks; the material placement task of the atmospheric transmission robot in the loading and unloading module can be set as the tail node of the directed chain of the atmospheric transmission robot tasks; the directed chain is set to have only one parent node and one child node except the head and tail nodes, the head node has only one child node, and the tail node has only one parent node; any pair of parent nodes and child nodes satisfies: start (child node) > = end (parent node), so that the atmospheric transmission robot can only execute one task at a certain time, and different tasks must be executed in sequence, thereby realizing the scheduling order constraint of multiple tasks in the atmospheric transmission robot.

[0122] In one embodiment, for a task including multiple parallel subtasks, multiple parallel subtasks of the same task are set, and only one subtask is selected at a time.

[0123] For example, components within a machine with multiple quantities or capacities can operate in parallel. For these components, a task can have corresponding parallel modules. Any component within the parallel modules can complete the task, resulting in the task containing multiple parallel subtasks. For tasks containing multiple parallel subtasks, a parallel task constraint can be set, requiring only one subtask to be selected at a time.

[0124] For example, for a task that contains N parallel subtasks, set sum(Present1+…+PresentN)=1 to constrain that only one subtask will be selected.

[0125] In one embodiment, there are multiple vacuum atmosphere conversion modules and the multiple vacuum atmosphere conversion modules are in a parallel relationship, and one task of the vacuum atmosphere conversion module includes multiple parallel subtasks; and a parallel task constraint condition is set for the multiple parallel subtasks of the vacuum atmosphere conversion module, in which only one subtask is selected at the same time.

[0126] In practical applications, a machine can have multiple vacuum-to-atmosphere conversion modules, each of which is independent and can operate in parallel. This means that materials can enter any of these modules for transfer. Accordingly, a task in a vacuum-to-atmosphere conversion module can correspond to a parallel module, and any of these modules can complete the task, resulting in the task containing multiple parallel subtasks.

[0127] As an example, for multiple parallel subtasks in a vacuum-to-atmosphere conversion module, set sum(Present1+…+PresentN)=1 to constrain only one subtask to be selected at a time. This means that material can only enter one vacuum-to-atmosphere conversion module at a time. For example, for load locks in parallel mode, only one load lock can be selected for transfer when executing a load lock task. For example, if a machine has two load locks and load lock 1 is selected, load lock 2 cannot execute the load lock task. In this case, the start and end times of load lock 1 become the start and end times of the load lock task.

[0128] In one embodiment, there are multiple process modules and the multiple process modules are in a parallel relationship, and one task of the process module includes multiple parallel subtasks; the multiple parallel subtasks of the process module are set, and a parallel task constraint condition is that only one subtask is selected at the same time.

[0129] In practical applications, a machine can have multiple process modules, each of which is independent and can operate in parallel. This means that materials can be processed in any of the multiple modules. Accordingly, a task in a process module can correspond to a parallel module, and any of the parallel modules can complete the task, resulting in the task containing multiple parallel subtasks.

[0130] As an example, for multiple parallel subtasks within a process module, you can set sum(Present1+…+PresentN)=1 to constrain only one subtask to be selected at a time. This means that materials can only enter one process module at a time. For example, for PM chambers in parallel mode, only one PM chamber can be selected for processing when executing a PM task. For example, if a machine has three PM chambers and PM1 is selected, PM2 and PM3 cannot execute the PM task. In this case, PM1's start and end times become the start and end times of the PM task.

[0131] In one embodiment, the multiple modules also include a cooling module, the cooling module includes multiple layers and the multiple cooling layers are in a parallel relationship, a task of the cooling module includes multiple parallel subtasks; multiple parallel subtasks of the cooling module are set, and a parallel task constraint condition is that only one subtask is selected at the same time.

[0132] In practical applications, a machine can have multiple cooling modules, each independent and capable of parallel operation. This means that materials can be cooled in any of the multiple cooling layers. Accordingly, a task in a cooling module can correspond to a parallel module, and any cooling layer in the parallel module can complete the task, resulting in the task containing multiple parallel subtasks.

[0133] As an example, for multiple parallel subtasks in a cooling module, you can set sum(Present1+…+PresentN)=1 to constrain only one subtask to be selected at a time, meaning that materials can only enter one cooling layer at a time. For example, for a cooling module in parallel mode, only one cooling layer can be selected for process processing when executing a cooling task. For example, if a machine's cooling module has three cooling layers and Cooler1 is selected, Cooler2 and Cooler3 cannot execute cooling tasks. In this case, the start and end times of Cooler1 will become the start and end times of the cooling task.

[0134] In one embodiment, when the task states corresponding to the parent node and child node of the task directed chain of the vacuum atmosphere conversion module are inconsistent, a state transition task is added between the task corresponding to the parent node and the task corresponding to the child node as a state transition constraint condition for the conversion relationship between the vacuum state and the atmospheric state of the vacuum atmosphere conversion module.

[0135] In practical applications, to ensure process accuracy, the vacuum-to-atmosphere conversion module must dynamically transition between states during material transfer. For example, when the load lock interacts with the vacuum region (VTR), the load lock must maintain a vacuum state; similarly, when interacting with the atmospheric region (ATR), the load lock must maintain an atmospheric state. If the load lock's current state differs from the desired state, the load lock must undergo a state transition.

[0136] As an example, when the task states corresponding to the parent node and child node of the vacuum-atmosphere conversion module's task directed chain are inconsistent, a state transition task is added between the tasks corresponding to the parent node and the child node as a state transition constraint for the transition between the vacuum state and the atmospheric state of the vacuum-atmosphere conversion module. For example, setting start(child node) >= end(parent node) + transition implements a dynamic state transition constraint.

[0137] In an embodiment of the present invention, the method may further include: before generating the corresponding task list, grouping the materials; the tasks of the same process module of the materials in the same group have a priority order;

[0138] The constraint conditions of the model may also be set, for materials in the same group, a priority constraint condition is set such that the start time of a process module task with a lower priority is not less than the end time of a process module task with a higher priority.

[0139] For example, before generating the corresponding task list, materials can be grouped. Tasks in the same process module for materials in the same group have a priority order. A priority constraint condition can be set such that the start time of tasks in the process module with a lower priority is not less than the end time of tasks in the process module with a higher priority, so that materials in the same group can enter the same process module for processing in sequence. For example, for the same group of materials, set start(job priority low)>=end(job priority high), so that all jobs contained in the group of materials enter a certain PM in sequence.

[0140] Step 103: Input the task list into the solution model, so that the solution model calculates and outputs the start execution time and the end execution time of each task according to the task list, the constraint conditions and the solution goal.

[0141] For example, a task list can be input into the model. The model uses tasks as scheduling units and can calculate and output the start and end times of all scheduled tasks under the optimal solution based on the task list, constraints and solution goals.

[0142] In an embodiment of the present invention, the method may further include: when the remaining time for a material to complete the task in the process module reaches a preset time threshold, clearing the remaining tasks of the material that has not performed the process module task; obtaining the entire task progress of the current machine, adding materials, and generating a new task list; inputting the new task list into the model, so that the model recalculates and outputs the start execution time and task execution end time of each task based on the new task list, the constraints and the solution goal.

[0143] For example, when the machine is empty, the model can only calculate M=2*(PM quantity) groups of materials; when the remaining time for the material to complete the task in the process module reaches the preset time threshold, the task list calculated last time but not yet started is deleted, and a new group of materials is added. According to the current machine progress, M'=M+1 groups of materials are calculated in real time, and a new task list is generated; the new task list is input into the model so that the model recalculates and outputs the start execution time and end execution time of each task according to the new task list, constraints and solution goals; when the remaining time for the material to complete the PM process task reaches the set value again, the task list calculated last time but not yet started is deleted again, and a new group of materials is added, and then recalculated, and so on, until all materials are fully scheduled. For example, if the remaining preset time threshold for a material to complete a task in a process module is 20s, when the material has 20s left to complete the process within the process module, a new material is added, and a recalculation is initiated to clear the remaining tasks of the material that has not reached the PM process start time; all implementation progress of the current machine is obtained, a new task list is generated, and the new task list is input into the model, and the calculation is re-performed to output the start and end time of all scheduled tasks at this time, and the tasks are executed; when the next recalculation point is executed, the remaining tasks of the material that has not reached the PM process start time are cleared again, new materials are added again, and the remaining tasks of the material that has not reached the PM process start time are cleared, all implementation progress of the current machine is obtained, a new task list is generated, and the new task list is input into the model, and then the calculation is performed again.

[0144] It should be noted that M = 2*(number of PMs) to ensure that the PM chamber is fully loaded and there is a set of surplus materials so that the machine is always in a fully loaded state.

[0145] In an embodiment of the present invention, a task list corresponding to the current material is generated based on the material processing path, the tasks performed by each module, and the action sequence generated by executing the tasks; model constraints and solution objectives are set; wherein the constraints include material processing time relationship constraints, task sequence relationship constraints between multiple modules, task sequence relationship constraints within the same module, relationship constraints between parallel subtasks under the same task, and vacuum state and atmospheric state transition constraints of the vacuum-to-atmosphere conversion module; the solution objective is the shortest time for the material to execute the tasks; the task list is input into the solution model, so that the solution model calculates and outputs the start and end time of each task based on the task list, the set constraints, and the solution objective. This allows for scheduling requirements for equipment with more complex structural layouts and higher process precision requirements, such as dynamic state transition requirements for load lock components, parallel requirements for multiple components, and parallel requirements for components with multiple capacities.

[0146] It should be noted that for the sake of simplicity, the method embodiments are described as a series of actions. However, those skilled in the art should be aware that the embodiments of the present invention are not limited by the order of the actions described, because according to the embodiments of the present invention, certain steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in this specification are all preferred embodiments, and the actions involved are not necessarily required by the embodiments of the present invention.

[0147] Reference Figure 4 , shows a structural block diagram of a semiconductor process equipment provided by an embodiment of the present invention. The semiconductor process equipment 201 includes multiple modules, including a vacuum atmosphere conversion module and a process module. The semiconductor process equipment also includes:

[0148] Controller 2011 is used to generate a task list corresponding to the current material based on the material processing path, the tasks performed by each module, and the action sequence generated by performing the tasks; set the constraints and solution goals of the solution model; wherein the above constraints include material processing time relationship constraints, task sequence relationship constraints between multiple modules, task sequence relationship constraints within the same module, relationship constraints between parallel subtasks under the same task, and vacuum state and atmospheric state conversion constraints of the vacuum atmosphere conversion module; the above solution goal is the shortest time for the sum of the start time and end time of the material executing all process module tasks; the above task list is input into the above solution model, so that the above solution model calculates and outputs the start execution time and execution end time of each task according to the above task list, the above constraints and the above solution goal.

[0149] In an optional embodiment of the present invention, the controller is configured to set multiple parallel subtasks of the same task for a task including multiple parallel subtasks, with only one subtask being selected at a time.

[0150] In an optional embodiment of the present invention, the above-mentioned controller is used to generate a corresponding task directed chain as a sequence constraint condition between tasks in the same module; each node in the above-mentioned task directed chain corresponds to a task in the above-mentioned same module; the nodes in the above-mentioned task directed chain, except for the head node and the tail node, have only one parent node and one child node, the above-mentioned head node has only one child node, and the above-mentioned tail node has only one parent node; the task start time of the above-mentioned child node is not less than the task end time of the above-mentioned parent node.

[0151] In an optional embodiment of the present invention, the above-mentioned vacuum atmosphere conversion module includes an atmospheric state and a vacuum state. The above-mentioned controller is used to add a state conversion task as a state conversion constraint condition for the conversion relationship between the vacuum state and the atmospheric state of the vacuum atmosphere conversion module between the task corresponding to the above-mentioned parent node and the task corresponding to the above-mentioned child node when the task states corresponding to the parent node and the child node of the task directed chain of the vacuum atmosphere conversion module are inconsistent.

[0152] In an optional embodiment of the present invention, the above-mentioned vacuum atmosphere conversion module includes an unprocessed layer and a processed layer; the above-mentioned controller is used to generate a corresponding task directed chain as a sequence constraint condition between tasks in the vacuum atmosphere conversion module for the tasks of the above-mentioned vacuum atmosphere conversion module; the order between the tasks of the above-mentioned vacuum atmosphere conversion module is the interaction task between the vacuum atmosphere conversion module and the atmospheric transmission robot, and the interaction task between the vacuum atmosphere conversion module and the vacuum transmission robot.

[0153] In an optional embodiment of the present invention, the above-mentioned controller is used to generate a corresponding task directed chain as a sequence constraint condition between tasks in the process module for the tasks of the above-mentioned process module; the order between the tasks of the above-mentioned process module is material process processing tasks and non-material process processing tasks.

[0154] In an optional embodiment of the present invention, the above-mentioned multiple modules also include a vacuum transfer robot, and the above-mentioned vacuum transfer robot is configured with an extraction task and a placement task. The above-mentioned controller is used to set the same-robot constraint condition that the extraction task and the placement task are completed by the same vacuum transfer robot for a pair of extraction tasks and placement tasks of the vacuum transfer robot.

[0155] In an optional embodiment of the present invention, the above-mentioned vacuum transfer robot includes an unprocessed hand and a processed hand, and the above-mentioned controller is used to generate a corresponding task directed chain as a sequence constraint condition between the tasks of the vacuum transfer robot for the tasks of the above-mentioned vacuum transfer robot; wherein, the order between the tasks of the above-mentioned vacuum transfer robot is unprocessed hand extraction task, unprocessed hand placement task, processed hand extraction task, and processed hand placement task.

[0156] In an optional embodiment of the present invention, the above-mentioned multiple modules also include a loading and unloading module, and the above-mentioned controller is used to generate a corresponding task directed chain as a sequence constraint condition between tasks in the loading and unloading module for the tasks of the above-mentioned loading and unloading module; the order between the tasks of the above-mentioned loading and unloading module is the task of loading and unloading unprocessed materials and the task of loading and unloading processed materials.

[0157] In an optional embodiment of the present invention, the above-mentioned multiple modules also include an atmospheric transfer manipulator, and the above-mentioned atmospheric transfer manipulator is configured with an extraction task and a placement task. The above-mentioned controller is used to set the same-manipulator constraint condition for a pair of extraction tasks and placement tasks of the atmospheric transfer manipulator, so that the extraction task and the placement task are completed by the same atmospheric transfer manipulator.

[0158] In an optional embodiment of the present invention, the above-mentioned controller is used to generate a corresponding task directed chain as a sequence constraint condition between the tasks of the atmospheric transmission manipulator for the tasks of the above-mentioned atmospheric transmission manipulator; the sequence between the tasks of the above-mentioned atmospheric transmission manipulator is the material extraction task of the atmospheric transmission manipulator in the above-mentioned loading and unloading module, the material placement task of the atmospheric transmission manipulator in the above-mentioned vacuum-atmosphere conversion module, the material extraction task of the atmospheric transmission manipulator in the above-mentioned vacuum-atmosphere conversion module, the material placement task of the atmospheric transmission manipulator in the cooling module, the material extraction task of the atmospheric transmission manipulator in the cooling module, and the material placement task of the atmospheric transmission manipulator in the above-mentioned loading and unloading module.

[0159] In an optional embodiment of the present invention, there are multiple vacuum atmosphere conversion modules and the multiple vacuum atmosphere conversion modules are in a parallel relationship, and one task of the vacuum atmosphere conversion module includes multiple parallel subtasks; the controller is used to set the multiple parallel subtasks of the vacuum atmosphere conversion module, and the parallel task constraint condition is that only one subtask is selected at the same time.

[0160] In an optional embodiment of the present invention, there are multiple process modules and the multiple process modules are in a parallel relationship, and one task of the process module includes multiple parallel subtasks; the controller is used to set the multiple parallel subtasks of the process module, and the parallel task constraint condition that only one subtask is selected at the same time.

[0161] In an optional embodiment of the present invention, the above-mentioned multiple modules also include a cooling module, the above-mentioned cooling module includes multiple layers and the multiple cooling layers are in a parallel relationship, and one task of the above-mentioned cooling module includes multiple parallel subtasks; the above-mentioned controller is used to set the multiple parallel subtasks of the above-mentioned cooling module, and the parallel task constraint condition that only one subtask is selected at the same time.

[0162] In an optional embodiment of the present invention, before the corresponding task list is generated, the materials are grouped; the process module tasks of the materials in the same group have a priority order; the controller is used to set a priority constraint condition for the materials in the same group, that is, the start time of the process module task with a lower priority is not less than the end time of the process module task with a higher priority.

[0163] In an optional embodiment of the present invention, the controller is used to clear the remaining tasks of the material that has not completed the process module tasks when the remaining time for the material to complete the tasks in the process module reaches a preset time threshold; obtain the entire task progress of the current machine, add materials, and generate a new task list; input the new task list into the solution model, so that the solution model recalculates and outputs the start execution time and task execution end time of each task based on the new task list, the constraints and the solution goal.

[0164] As for the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0165] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0166] Those skilled in the art will appreciate that embodiments of the present invention may be provided as methods, apparatus, or computer program products. Thus, embodiments of the present invention may take the form of a fully hardware embodiment, a fully software embodiment, or an embodiment combining software and hardware. Furthermore, embodiments of the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to magnetic disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0167] The embodiments of the present invention are described with reference to the flowcharts and / or block diagrams of the methods, terminal devices (systems), and computer program products according to the embodiments of the present invention. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of the processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing terminal device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing terminal device generate instructions for implementing the process in the flowchart and / or block diagram. Figure 1 a process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0168] These computer program instructions may also be stored in a computer readable memory that can direct a computer or other programmable data processing terminal device to operate in a specific manner, so that the instructions stored in the computer readable memory produce a manufactured product including an instruction device, which implements the process Figure 1 a process or multiple processes and / or boxes Figure 1The function specified in one or more boxes.

[0169] These computer program instructions can also be loaded onto a computer or other programmable data processing terminal device so that a series of operating steps are executed on the computer or other programmable terminal device to produce a computer-implemented process, thereby providing instructions for executing on the computer or other programmable terminal device to implement the process. Figure 1 a process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0170] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they become aware of the basic creative concepts. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the embodiments of the present invention.

[0171] Finally, it should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or terminal device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or terminal device that includes the element.

[0172] The above is a detailed introduction to the material scheduling method and semiconductor process equipment provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A material scheduling method for semiconductor process equipment, characterized in that: The semiconductor process equipment includes a plurality of modules, including a vacuum atmosphere conversion module and a process module. The method includes: Generate a task list corresponding to the current material based on the material processing path, the tasks performed by each module, and the action sequence generated by executing the tasks; Set constraints and solution goals for the solution model; wherein, the constraints include material processing time relationship constraints, task sequence relationship constraints between multiple modules, task sequence relationship constraints within the same module, relationship constraints between parallel subtasks under the same task, and vacuum state and atmospheric state conversion constraints of the vacuum-atmosphere conversion module; the task sequence relationship constraints within the same module are used to ensure that different tasks in the same module are executed sequentially; the solution goal is to minimize the sum of the start time and end time of the material execution of all process module tasks; The task list is input into the solution model, so that the solution model calculates and outputs the start execution time and the end execution time of each task according to the task list, the constraint conditions and the solution goal.

2. The method according to claim 1, characterized in that The relationship constraints between the parallel subtasks under the same task include: For tasks that contain multiple parallel subtasks, set multiple parallel subtasks of the same task, and only one subtask is selected at a time.

3. The method according to claim 2, characterized in that The sequential relationship constraints between tasks in the same module include: For tasks in the same module, a corresponding task directed chain is generated as a sequence constraint condition between tasks in the same module; each node in the task directed chain corresponds to a task in the same module; the nodes in the task directed chain, except for the head node and the tail node, have only one parent node and one child node, the head node has only one child node, and the tail node has only one parent node; the task start time of the child node is not less than the task end time of the parent node.

4. The method according to claim 3, characterized in that The vacuum-atmosphere conversion module includes an atmospheric state and a vacuum state; the vacuum state and atmospheric state conversion constraints of the vacuum-atmosphere conversion module include: When the task states corresponding to the parent node and child node of the task directed chain of the vacuum atmosphere conversion module are inconsistent, a state transition task is added between the task corresponding to the parent node and the task corresponding to the child node as a state transition constraint condition for the conversion relationship between the vacuum state and the atmospheric state of the vacuum atmosphere conversion module.

5. The method according to claim 4, characterized in that The vacuum-atmosphere conversion module includes an unprocessed layer and a processed layer; the vacuum state and atmospheric state conversion constraints of the vacuum-atmosphere conversion module also include: For the tasks of the vacuum atmosphere conversion module, a corresponding task directed chain is generated as a sequence constraint condition between tasks within the vacuum atmosphere conversion module; the order between the tasks of the vacuum atmosphere conversion module is the interaction task between the vacuum atmosphere conversion module and the atmospheric transmission robot, and the interaction task between the vacuum atmosphere conversion module and the vacuum transmission robot.

6. The method according to claim 3, characterized in that The sequential relationship constraints between tasks in the same module also include: For the tasks of the process module, a corresponding task directed chain is generated as a sequence constraint condition between tasks in the process module; the sequence between the tasks of the process module is material process processing tasks and non-material process processing tasks.

7. The method according to claim 3, characterized in that The plurality of modules further include a vacuum transfer robot, the vacuum transfer robot being configured with an extraction task and a placement task, and the constraint conditions further include: For a pair of extraction tasks and placement tasks of a vacuum transfer robot, a same-robot constraint condition is set that the extraction task and the placement task are completed by the same vacuum transfer robot.

8. The method according to claim 7, characterized in that The vacuum transfer robot includes an unprocessed hand and a processed hand, and the constraint conditions also include: For the tasks of the vacuum transfer robot, a corresponding task directed chain is generated as a sequence constraint condition between the tasks of the vacuum transfer robot; wherein, the order between the tasks of the vacuum transfer robot is unprocessed hand extraction task, unprocessed hand placement task, processed hand extraction task, and processed hand placement task.

9. The method according to claim 3, characterized in that The multiple modules also include a loading and unloading module, and the constraint conditions also include: For the tasks of the loading and unloading module, a corresponding task directed chain is generated as the order constraint condition between tasks in the loading and unloading module; the order between tasks in the loading and unloading module is loading and unloading unprocessed material tasks, and loading and unloading processed material tasks.

10. The method according to claim 3, characterized in that The multiple modules further include an atmospheric transport manipulator, the atmospheric transport manipulator is configured with an extraction task and a placement task, and the constraint conditions further include: For a pair of extraction tasks and placement tasks of an atmospheric transport manipulator, a same-manipulator constraint condition is set that the extraction task and the placement task are completed by the same atmospheric transport manipulator.

11. The method according to claim 10, characterized in that The constraints also include: For the tasks of the atmospheric transmission manipulator, a corresponding task directed chain is generated as the sequence constraint condition between the tasks of the atmospheric transmission manipulator; the sequence between the tasks of the atmospheric transmission manipulator is the material extraction task of the atmospheric transmission manipulator in the loading and unloading module, the material placement task of the atmospheric transmission manipulator in the vacuum-atmosphere conversion module, the material extraction task of the atmospheric transmission manipulator in the vacuum-atmosphere conversion module, the material placement task of the atmospheric transmission manipulator in the cooling module, the material extraction task of the atmospheric transmission manipulator in the cooling module, and the material placement task of the atmospheric transmission manipulator in the loading and unloading module.

12. The method according to claim 3, characterized in that There are multiple vacuum atmosphere conversion modules and the multiple vacuum atmosphere conversion modules are in a parallel relationship, and one task of the vacuum atmosphere conversion module includes multiple parallel subtasks; For a task containing multiple parallel subtasks, the parallel task constraint condition of setting multiple parallel subtasks of the same task and only one subtask being selected at a time includes: A plurality of parallel subtasks of the vacuum atmosphere conversion module are set, and a parallel task constraint condition is that only one subtask is selected at a time.

13. The method according to claim 3, characterized in that There are multiple process modules and the multiple process modules are in a parallel relationship, and one task of the process module includes multiple parallel subtasks; The parallel task constraint condition of setting multiple parallel subtasks of the same task and only one subtask being selected at a time for a task containing multiple parallel subtasks also includes: A plurality of parallel subtasks of the process module are set, and a parallel task constraint condition is that only one subtask is selected at a time.

14. The method according to claim 3, characterized in that The multiple modules further include a cooling module, the cooling module includes multiple layers and the multiple cooling layers are in a parallel relationship, and one task of the cooling module includes multiple parallel subtasks; The parallel task constraint condition of setting multiple parallel subtasks of the same task and only one subtask being selected at a time for a task containing multiple parallel subtasks also includes: A plurality of parallel subtasks of the cooling module are set, and a parallel task constraint condition is that only one subtask is selected at a time.

15. The method according to claim 3, characterized in that Also includes: Before generating the corresponding task list, group the materials; The process module tasks of the same group of materials have a priority order; The constraints also include: For materials in the same group, set the priority constraint condition that the start time of the process module task with a lower priority is not less than the end time of the process module task with a higher priority.

16. The method according to claim 15, characterized in that Also includes: When the remaining time for a material to complete the process module task reaches a preset time threshold, the remaining tasks of the material that has not completed the process module task are cleared; Get all task progress of the current machine, add materials, and generate a new task list; The new task list is input into the solution model, so that the solution model recalculates and outputs the start execution time and the end execution time of each task according to the new task list, the constraint conditions and the solution goal.

17. A semiconductor process equipment, characterized in that: The semiconductor process equipment includes multiple modules, including a vacuum atmosphere conversion module and a process module. The semiconductor process equipment also includes: The controller is used to generate a task list corresponding to the current material according to the material processing path, the tasks performed by each module and the action sequence generated by executing the tasks; set the constraint conditions and solution goals of the solution model; wherein the constraint conditions include material processing time relationship constraints, task sequence relationship constraints between multiple modules, task sequence relationship constraints within the same module, relationship constraints between parallel subtasks under the same task, and vacuum state and atmospheric state conversion constraints of the vacuum atmosphere conversion module; the task sequence relationship constraints within the same module are used to enable different tasks in the same module to be executed in sequence; the solution goal is the shortest time for the sum of the start time and end time of the material executing all process module tasks; the task list is input into the solution model so that the solution model calculates and outputs the start execution time and execution end time of each task according to the task list, the constraint conditions and the solution goal.

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