Vacuum valve or vacuum door

Abstract

A vacuum valve or door, comprising a closing plate (7) for closing an opening (4, 29) in a wall (3, 32), the opening (4, 29) having first and second opposite longitudinal edges (4a, 4b; 29a, 29b) and first and second opposite transverse edges (4c, 4d) which are shorter in comparison. A sealing unit (12) is provided for sealing the closing plate (7) relative to the wall (3, 32) in the closed position of the closing plate (7), the sealing unit having a supporting frame (13) having first and second opposite longitudinal legs (14, 15) and first and second opposite transverse legs (17, 18) which are shorter in comparison, and on which a surrounding sealing plate-seal (18) is arranged on one side and a surrounding wall-seal (19) is arranged on the other side. The supporting frame (13) is fixed to the wall (3, 32) at a fixing point, wherein at least the middle section of the first and second longitudinal legs (14, 15) of the supporting frame (13) is free relative to the wall (3, 32), or the supporting frame (13) is fixed to the closing plate (7) at a fixing point, wherein at least the middle section of the first and second longitudinal legs (14, 15) of the supporting frame (13) is free relative to the closing plate (7).

Description

Technical Field

[0001] The invention relates to a vacuum valve or vacuum door, which has a closing plate for closing an opening arranged in a wall, the closing plate having opposite first and second longitudinal edges and opposite first and second transverse edges which are shorter in comparison, wherein the closing plate can be shifted between an open position, in which the opening in the wall is released, and a closed position, in which the opening in the wall is closed by the closing plate. Background Art

[0002] For vacuum equipment that must perform vacuum processes on relatively large, flat substrates such as screen panels, the vacuum chamber has a large slot-shaped opening on the wall so that the substrate can be introduced into the chamber. Accordingly, vacuum valves and vacuum doors with large slit-shaped openings are used, in particular as transfer valves. The vacuum valve is used in particular as a transfer valve between adjacent vacuum chambers connected by the valve. The vacuum door is used to close and open the opening of the chamber toward the outer chamber. Therefore, the substantially rectangular opening arranged in the wall of the chamber or the wall of the substrate of the vacuum valve or the wall of the substrate of the vacuum door has relative longitudinal edges and relative lateral edges that are significantly shorter in comparison. The longitudinal edge can, for example, have a length in the range of 1.5 to 3 m. The lateral edge can, for example, have a length in the range of 10 to 20 cm.

[0003] For such a vacuum valve, if the inner space of the vacuum chamber in which the vacuum valve or vacuum door is installed is evacuated from atmospheric pressure, the vacuum chamber will be deformed due to the negative pressure formed in the inner space of the vacuum chamber. As a result, the width of the narrow slot-shaped opening is slightly reduced toward the center, that is, the central sections of the longitudinal edges of the opening are moved toward each other, and correspondingly, the wall sections connected to the opening in these areas are also moved toward each other. The displacement of the longitudinal edges of the opening at its center can be, for example, in the range of 1.5 mm to 3 mm. Due to its spiral connection with the vacuum chamber, which exists between the wall with the vacuum chamber opening and the wall with the base opening of the vacuum valve or vacuum door, the base of the vacuum valve or vacuum door connected to the vacuum chamber is deformed in the same way in the area of ​​the wall with the opening of the base of the vacuum valve or vacuum door.

[0004] These displacements of the wall section of the base body adjoining the upper opening in the middle section of its longitudinal edge lead to shear loads on the sealing ring, which is mounted on the closing plate and rests on the wall with the opening. This leads to wear of the sealing ring during use. On the one hand, this means additional wear of the sealing ring, which must therefore be replaced within corresponding maintenance intervals. In addition, this wear leads to the generation of undesirable particles, which can deposit on the substrate to be processed and have a negative impact on its quality or function.

[0005] In order to reduce the deformation of the vacuum chamber, it can be equipped with additional reinforcement parts, but this is relatively expensive.

[0006] WO 2014 / 086458 A1 discloses a vacuum valve, wherein a housing wall with a valve opening is made of a thin metal sheet. The vacuum valve is arranged between vacuum units, such as vacuum chambers, which have solid walls with connecting flanges. The valve housing of the vacuum valve is stabilized by connecting the vacuum valve to the connecting flanges of the vacuum units. For this purpose, the vacuum valve has a solid flange ring, which is tightened with the connecting flange of the vacuum unit, wherein the housing wall composed of the metal sheet is clamped between the connecting flange and the flange ring. Here, an elastomeric sealing ring is respectively arranged between the corresponding flange ring and the corresponding housing wall. Another elastomeric sealing ring is located between the flange ring and the connecting flange. At least one of the flange rings of the vacuum valve simultaneously forms a valve seat on the side opposite to the connecting flange. The elastomeric sealing ring used to seal the closing component relative to the connecting flange in the closed state of the vacuum valve can be arranged on the closing component, or can also be arranged on the connecting flange. Since the flange ring used for sealing between the connecting flange and the flange ring and between the flange ring and the housing wall composed of metal sheets must be rigidly connected to the connecting flange on all sides, the flange ring will be carried away when the connecting flange is deformed when the vacuum unit is evacuated, so that the shear load problem of the sealing ring pressed between the flange ring and the closing component when the vacuum valve is closed also occurs here. Summary of the invention

[0007] The object of the invention is to provide an advantageous vacuum valve or an advantageous vacuum door or an advantageous combination of a vacuum chamber and a vacuum door mounted thereon of the type mentioned at the outset, wherein lower particle generation and / or longer maintenance intervals can be achieved in a more cost-effective manner.

[0008] According to the invention, this is achieved by a vacuum valve or vacuum door having the features of the solution described below.

[0009] In the vacuum valve or vacuum door or the combination of vacuum chamber and vacuum door according to the present invention, a sealing unit is provided for sealing the closing plate in the closed position relative to the wall with the opening, and the sealing unit has a supporting frame. The supporting frame has first and second opposite longitudinal legs and first and second opposite transverse legs that are shorter in comparison.

[0010] In particular, the opposite longitudinal edges of the opening are at least five times longer, preferably at least ten times longer, than the opposite transverse edges of the opening, and the opposite first and second longitudinal legs of the supporting frame are at least five times longer, preferably at least ten times longer, than the opposite first and second transverse legs of the supporting frame. Thus, the opening and, respectively, the frame opening enclosed by the supporting frame can be referred to as slot-shaped.

[0011] On one side of the supporting frame, a circumferential sealing plate seal is arranged for cooperation with the sealing plate, and on the other side of the supporting frame, a circumferential wall seal is arranged for cooperation with the wall having the opening.

[0012] According to a first design variant, the supporting frame is fixed at a fixing point on the base of the vacuum valve or the base of the vacuum door or on the wall with an opening of the vacuum chamber in which the vacuum door is installed. In this case, at least the middle section of the first and second longitudinal legs of the supporting frame is free relative to the wall. According to a second design variant, the supporting frame is fixed at a fixing point on the closing plate. Here, at least the middle section of the first and second longitudinal legs of the supporting frame is free relative to the closing plate.

[0013] These “free” middle sections of the longitudinal legs of the supporting frame advantageously extend over at least half, preferably at least two thirds, of the total length of the longitudinal legs.

[0014] In the middle section of the first and second longitudinal legs, the supporting frame is thus mobile relative to the wall (if the supporting frame is fixed to the wall) or relative to the closing plate (if it is fixed to the closing plate) while the supporting frame is bending, i.e. the middle section of the first and second longitudinal legs can be displaced relative to the wall when the supporting frame is fixed to the wall or relative to the closing plate when the supporting frame is fixed to the closing plate while the supporting frame is deformed. This displacement takes place in the plane of the supporting frame (= mid-plane of the supporting frame). This plane is parallel to the plane of the opening or the wall having the opening (= mid-plane of the wall) or to the plane of the closing plate (= mid-plane of the closing plate).

[0015] If, in the closed position of the closing plate, the vacuum chamber (to which the vacuum valve or vacuum door is connected and by which the opening can be closed) is evacuated from atmospheric pressure and this leads to a deformation of the wall with the opening, in which the first and second opposite longitudinal edges of the opening gradually move towards each other towards their longitudinal center, i.e. the opening becomes narrower towards the longitudinal center, then, by the design according to the invention, the middle section of the longitudinal leg of the supporting frame is entrained here over a portion of the displacement of the section of the wall connected to the opening, wherein in the longitudinal center region of the longitudinal edge, this portion is preferably between one third and two thirds of the total displacement of the section of the wall connected to the respective longitudinal edge of the opening in the longitudinal center of the respective longitudinal leg. Due to the friction between the wall seal and the wall, against which the wall seal rests in the closed position of the closing plate, this entrainment can occur overcoming the elastic restoring force of the supporting frame. However, due to the elastic restoring force possessed by the supporting frame, this entrainment is less than the total displacement of the section of the wall connected to the longitudinal edge of the opening.

[0016] In order to ensure that the middle section of the longitudinal legs of the supporting frame is driven within a specified area, a wall stop can be provided on the wall having an opening for cooperating with the middle section of the first and second longitudinal legs of the supporting frame, in particular in the area of ​​its longitudinal center; and / or a closing plate stop can be provided on the closing plate for cooperating with the middle section of the first and second longitudinal legs of the supporting frame, in particular in the area of ​​its longitudinal center.

[0017] In an advantageous embodiment of the invention, the fixing points at which the supporting frame is fixed to the wall or the closing plate can be located in the corner regions of the supporting frame, which are each formed between a longitudinal leg of the supporting frame and a transverse leg connected thereto. Alternatively or additionally, fixing points can be provided in the region of the transverse legs. For example, the fixing points can be formed by screws that penetrate holes in the supporting frame. For fixing the supporting frame, for example, snap-on elements can be provided alternatively or additionally. The corresponding fixing points can also extend over a more or less extended section of the supporting frame.

[0018] At least in the region of the free middle section of the first and second longitudinal legs of the supporting frame, the thickness of the supporting frame is less than the thickness of the wall with the opening, preferably less than half, preferably less than one third (wherein these thicknesses are measured perpendicularly to the plane of the wall with the opening, i.e. perpendicularly to the plane of the supporting frame).

[0019] At least in the area of ​​the free middle section of the longitudinal legs of the supporting frame, the width of the respective longitudinal leg measured parallel to the plane of the supporting frame and perpendicular to the longitudinal extension of the respective longitudinal leg is advantageously smaller than the thickness of the wall having the opening (wherein the thickness of the wall is measured perpendicularly to the wall plane).

[0020] A preferred embodiment of the invention provides that the supporting frame has support elements next to the closure plate seal and next to the wall seal. If the closure plate in its closed position is pressed against the wall with the opening, the support elements can rest with their contact surfaces on the one hand against the wall and on the other hand against the closure plate. This limits the maximum compression of the closure plate seal and the wall seal.

[0021] The support element can be formed by a protrusion of the base material of the support frame, which is formed from the base material. If the base material of the support frame is metal, in particular steel or aluminum, which is preferred, the support frame is coated with a sliding layer at least in the region of the contact surface of the support element, which sliding layer advantageously has low friction with respect to the wall and the closing plate. For example, a coating with PTFE (Teflon) or PFA can be provided.

[0022] In a modified embodiment, support parts made of plastic (eg PTFE or PFA or PEEK) can be provided, which are attached, for example adhesively bonded, to a base body of the supporting frame, which is made of metal in particular.

[0023] In an advantageous embodiment of the invention, the longitudinal edges of the opening of the wall of the base body or of the vacuum chamber have a length of more than 1 m. The transverse edges preferably have a length of less than 30 cm.

[0024] With reference to a viewing direction perpendicular to the wall plane, the carrying frame advantageously does not protrude inwardly beyond the edge of the opening in the wall. Thus, the carrying frame does not reduce the clear width of the opening.

[0025] The closing plate-seal can be formed by an O-ring arranged in a groove of the carrier frame. For example, the closing plate-seal can also be vulcanized onto the carrier frame.

[0026] The wall seal can be formed by an O-ring arranged in a groove of the carrier frame. For example, the wall seal can also be vulcanized onto the carrier frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Other advantages and details of the present invention are explained below with reference to the accompanying drawings, wherein:

[0028] Figure 1 An embodiment of a vacuum valve according to the present invention is shown in an oblique view;

[0029] Figure 2 It is an exploded view;

[0030] Figure 3 It is an exploded view from another viewing direction;

[0031] Figure 4 is a side view in the open position of the closing panel;

[0032] Figure 5 is along Figure 4 The cross-sectional view taken along line AA;

[0033] Figure 6 is along Figure 4 The cross-sectional view taken along line BB;

[0034] Figure 7 shows a closed plate in the middle position similar to Figure 5 sectional view of

[0035] Figure 8 shows a closed position of the closing plate (in the relaxed state of the base) similar to Figure 5 sectional view of

[0036] Fig. 9 Shows Figure 8 The enlarged detail of C;

[0037] Fig.10 is a side view of the sealing unit on a first side;

[0038] Fig.11 is a side view of the sealing unit on an opposite second side;

[0039] Fig.12 is an oblique view of the sealing unit;

[0040] Fig.13 is a side view of a sealing unit of a second embodiment of the present invention on a first side;

[0041] Fig.14 is along Fig.13 The cross-sectional view taken along the DD line;

[0042] Fig.15 Shows Fig.14 Enlarged detail E;

[0043] Fig.16 The third embodiment of the present invention is Figure 6 Similar cross-sections;

[0044] Fig.17 and 18 FIG. 4 shows a fourth embodiment of the present invention in a relaxed and deformed state of the substrate. Fig. 9 An enlarged part of

[0045] Fig.19 A load-bearing frame according to a fifth embodiment of the present invention is shown. Fig.15 sectional view of

[0046] Fig. 20 is an oblique view of a vacuum valve installed between two vacuum chambers according to a first embodiment of the present invention and a vacuum door installed on one of the vacuum chambers according to the present invention;

[0047] Fig.21 Shows Fig. 20 A cross-sectional view of the device in the open position of the closing plate of the vacuum valve and the vacuum door (similar to Figure 5 )

[0048] Fig. 22 The vacuum valve and the vacuum door are in the closed position of the sealing plate. Fig.21 The corresponding cross-section diagram;

[0049] Fig.23 is a perspective view of a vacuum door installed on a vacuum chamber according to another embodiment of the present invention;

[0050] Fig.24yes Fig.23 A cross-sectional view of the device in the open position of the closing plate of the vacuum door (similar to Figure 5 )

[0051] Fig.25 Shows a similar Fig.24 sectional view of

[0052] Fig.26 Shows something like Fig.24 A cross-sectional view of the vacuum door in the closed position of the closing plate;

[0053] Fig. 27 A further modified embodiment is shown similar to Fig.24 Cross-sectional view of .

[0054] The Figures are to different scales and are partially simplified and schematic. DETAILED DESCRIPTION

[0055] A first embodiment of the vacuum valve according to the present invention is Figure 1-12 The vacuum valve has a base body 1 representing the valve housing and an inner space 2 representing the vacuum region of the vacuum valve. Therefore, a vacuum can exist in the inner space 2.

[0056] The base body 1 has opposite walls 3 in which an opening 4 is respectively provided.

[0057] The carrying unit 6 is mounted on the valve stem 5 and carries two plate-shaped closing plates 7 in this exemplary embodiment.

[0058] These closing plates 7 can be respectively in the open position (see Figure 5 and 6 ), middle position (see Figure 7 ) and the closed position (see Figure 8 ), in which open position the corresponding assigned opening 4 is released, in the intermediate position the closing plate 7 is opposite to the corresponding assigned opening 4 (= covering the opening 4 as seen in the axial direction of the opening 4), but the closing plate 7 is not sealed relative to the wall 3 with the assigned opening 4 (so there is an open gap in the area between the closing plate and the wall), and in the closed position the closing plate 7 seals the corresponding assigned opening 4.

[0059] In order to adjust the closing plate 7 between the open position and the intermediate position, the valve rod 5 is moved parallel to its longitudinal axis 10 (=axially). In this embodiment, a piston-cylinder unit 8 is used for axially moving the valve rod 5, the piston rod of which unit forms the valve rod 5. Instead of the piston-cylinder unit 8, another actuator can also be provided as a valve drive.

[0060] The respective piston-cylinder units 9 are used to adjust the respective closing plates 7 between the intermediate position and the closed position. The cylinder spaces of these piston-cylinder units 9 are formed by the cavities of the carrier unit 6, in which the pistons of the piston-cylinder units 9 are arranged. The closing plates 7 are mounted on the piston rods of these piston-cylinder units.

[0061] The respective closing plate 7 is displaced between its intermediate position and its closed position at right angles to the longitudinal axis 10 of the valve rod 5 .

[0062] In the embodiment shown, the cylinder chambers of the piston-cylinder unit 9 are separate, i.e. the closing plates 7 can be individually adjusted between their intermediate positions and their closed positions. If a common adjustment is sufficient, the pistons of the piston-cylinder unit 9 can be arranged in a common, continuous cylinder chamber.

[0063] One of the two closing plates 7 can also be omitted, so that the vacuum valve will only have one closing plate 7 and one sealable opening 4. In particular, opposite the sealable opening 4, a non-sealable opening can be provided in the base body so that a through-channel through the base body is formed in the open position of the closing plate 7.

[0064] Therefore, in this embodiment, the displacement of at least one closing plate 7 between its open position and its closed position is carried out in the manner of an L valve. Other displacement modes of at least one closing plate of the vacuum valve between the open position and the closed position can be provided, in particular in the manner of an L valve, as is known. For example, it is also conceivable and possible that the vacuum valve has only a single actuator, by which at least one closing plate is shifted from the open position to the closed position via the intermediate position, and vice versa. In order to shift between the intermediate position and the closed position, the valve stem 5 can also be pivoted around a pivot axis perpendicular to the longitudinal axis 10 of the valve stem and perpendicular to the axis of at least one opening. This pivoting can be controlled in a known manner by a slider. In the case where the vacuum valve has two closing plates 7, these closing plates can be shifted to the corresponding closed position starting from the intermediate position, alternately by pivoting the valve stem 5 in the opposite direction.

[0065] In order to enable maintenance, the base body 1 in this embodiment has a removable cover 11 which is sealed by a seal (not shown) (the fastening screws are also not shown).

[0066] The respective opening 4 is bounded by opposing first and second longitudinal edges 4a, 4b and opposing first and second transverse edges 4c, 4d. Figure 4 ) observed, the corresponding opening 4 has a substantially rectangular shape, wherein the longitudinal edges 4a, 4b are significantly longer than the transverse edges 4c, 4d, in particular more than five times longer, particularly preferably more than ten times longer. The opening 4 can therefore be referred to as slot-shaped.

[0067] The longitudinal edges 4a, 4b may, for example, have a length in the range of 1 to 4 m. The transverse edges 4c, 4d may, for example, have a length in the range of 10 to 30 cm.

[0068] The sealing unit 12 is used for sealing between the respective closing plate 7 and the wall 3 with the correspondingly assigned opening 4. The sealing unit has a supporting frame 13 located in one plane. The supporting frame has first and second longitudinal legs 14, 15 which are spaced apart from each other and extend in parallel. The opposite longitudinal legs 14, 15 are connected at the edge by first and second opposite transverse legs 16, 17. The longitudinal and transverse legs 14-17 thus surround the frame opening. The longitudinal and transverse legs 14-17 are located on the sides of an imaginary rectangle. The longitudinal legs 14, 15 are significantly longer than the transverse legs 16, 17 here, corresponding to the shape of the opening 4. In particular, the length of the longitudinal legs 14, 15 is more than five times, preferably more than ten times, the length of the transverse legs 16, 17.

[0069] The thickness of the supporting frame 13 of the sealing unit 12 is less than the thickness of the wall 3 with the opening 4, advantageously less than half, preferably less than one third (wherein these thicknesses are measured perpendicularly to the corresponding plane of the wall with the opening, i.e. perpendicularly to the plane of the corresponding supporting frame).

[0070] At least the longitudinal legs 14 , 15 of the respective supporting frame 13 have a width, measured parallel to the plane of the supporting frame and at right angles to the longitudinal extension of the respective longitudinal leg 14 , 15 , which is smaller than the thickness of the respective wall 3 with the opening 4 , wherein the wall thickness is measured perpendicularly to the plane of the wall 3 .

[0071] Seals are provided on oppositely facing sides of the supporting frame 13 parallel to the center plane of the supporting frame 13. On one side, the seal is a circumferential (= annular) sealing plate seal 18, and on the other side, the seal is a circumferential (= annular) wall seal 19. The seals 18, 19 are each made of an elastomeric material, for example FKM (fluororubber) or FFKM.

[0072] In this exemplary embodiment, the closing plate seal 18 and the wall seal 19 are designed in the form of O-rings, which are arranged in grooves of the supporting frame 13 and are thus held on the supporting frame 13. In a modified embodiment, the closing plate seal 18 and / or the wall seal 19 can also be vulcanized on the supporting frame 13.

[0073] On the side of the supporting frame 13 on which the closing plate seal 18 and the wall seal 19 are mounted, the supporting frame 13 has elevations next to the seals 18, 19, which form support elements 20. These elevations limit the pressing of the closing plate seal 18 and the wall seal 19 in the closed position of the respective closing plate 7.

[0074] In this embodiment, the support part 20 is formed from the base material of the supporting frame 13, which is preferably metal, in particular steel or aluminum. This base material of the supporting frame 13 is coated with a sliding layer in order to reduce the friction with respect to the closing plate 7 and the wall 3 at least in the region of the contact surfaces of the support part 20, which are intended to rest against the closing plate 7 or the wall 3, the sliding layer having a lower coefficient of friction than the closing plate 7 or the wall 3. The friction coefficient of the material of the sliding layer, for example plastic, with respect to the closing plate 7 or the wall is in any case lower than the friction coefficient of the base material of the supporting frame 13 with respect to the closing plate 7 or the wall 3. For example, PTFE or PFA can be provided for coating the supporting frame 13.

[0075] It is also conceivable and possible to produce the entire structure of the supporting frame 13 from a plastic material, in particular from a thermosetting plastic.

[0076] The wall 3 and the closing plate 7 are preferably made of metal, in particular steel.

[0077] In this embodiment, a plurality of mutually spaced support members 20 are respectively arranged beside the first and second longitudinal legs 14, 15. For example, a continuous strip-shaped support member can also extend near the first longitudinal leg 14 and the second longitudinal leg 15. For example, the following design is also feasible, where, as the corresponding support member, an annular strip extends beside the corresponding seal 18, 19.

[0078] In this embodiment, the support member 20 is also arranged radially outside the seals 18, 19. Alternatively or additionally, the support member may be arranged radially inside the seals 18, 19.

[0079] In this embodiment, the respective supporting frame 13 is only fastened to the respective wall 3 so that the frame opening surrounds the respective opening 4. The fastening is carried out in such a way that the longitudinal legs 14, 15 of the supporting frame 13 remain free relative to the wall 3 at least in a middle section, which preferably occupies at least half, particularly preferably at least two thirds, of the length of the longitudinal legs 14, 15. In this embodiment, the fastening is carried out in the four corner regions between the longitudinal legs 14, 15 and the transverse legs 16, 17. For this purpose, the supporting frame 13 has holes 21 in these corner regions. The screws 22 are screwed through these holes into the threaded holes of the respective wall 3.

[0080] Since the longitudinal legs 14, 15 remain free at least in the middle section, the longitudinal legs 14, 15 of the elastically deformable supporting frame 13 can bend as the supporting frame deforms, so that these longitudinal legs gradually approach each other toward their longitudinal center, see Fig.10 The dashed line in FIG. 1 schematically and in an exaggerated manner shows such a possible bending of one of the longitudinal legs.

[0081] The vacuum valve according to the invention can be used, for example, as a transfer valve for arrangement between two vacuum chambers. The vacuum chamber then has an opening aligned with the opening 4 and is connected to the wall 3 via a screw connection and a seal, as is known and not shown in detail in the figure.

[0082] Now, the vacuum valve is arranged between the two vacuum chambers it connects. The connection is made by a plurality of screws arranged in the area around the corresponding opening 4, wherein the wall 3 with the opening 4 and the wall of the valve chamber with the corresponding opening aligned with the opening 4 are screwed to each other.

[0083] When the vacuum chamber connected to the vacuum valve in this way is evacuated from atmospheric pressure, the wall of the vacuum chamber connected to the wall 3 of the vacuum valve deforms so that the width of the slot-shaped opening in the wall decreases slightly toward the middle, i.e., the intermediate sections of the longitudinal edges of the opening move toward each other, and the sections of the wall connected to the opening in these areas also move toward each other accordingly. Due to its spiral connection to the wall 3 of the vacuum valve, the wall 3 deforms in the area around the opening in the same way. As a result, the width of the opening 4 in the wall 3 of the base body decreases slightly toward the middle, i.e., the intermediate sections of the longitudinal edges 4a, 4b of the opening 4 and the sections of the wall 3 connected to the opening 4 in these areas move accordingly, so that these sections move toward each other, i.e., approach each other.

[0084] In the region of the longitudinal center of the longitudinal edges 4a, 4b, the approach may be in the range of 1.5 mm to 6 mm, for example. Fig. 9 , the position of the longitudinal edge 4a of the opening 4 in the deformed state of the wall 3 is indicated by a dashed line. The movement relative to the relaxed state of the wall 3 is indicated by a.

[0085] If the closing plate is in its closed position when the wall 3 is deformed, i.e. the sealing unit 12 is pressed against the wall 3, then when the section of the wall 3 connected to the respective longitudinal edge 4a, 4b moves, the respective longitudinal legs 14, 15 of the supporting frame are at least partially carried along by the friction forces acting thereon. This carrying takes place here while overcoming the elastic restoring forces of the supporting frame 13. This carrying is therefore smaller than the movement a of the section of the wall 4 connected to the respective longitudinal edge 4a, 4b. The position of the longitudinal legs 14, 15 of the supporting frame 13 in the deformed state of the wall 3 is Fig. 9denoted by a dotted line in the middle, and the displacement relative to the relaxed state of the wall 3 (denoted by a solid line) is denoted by b.

[0086] The magnitude of the displacement b of the center of the respective longitudinal leg 14, 15 of the respective support arm 13 is preferably one third to two thirds of the magnitude of the displacement a of the assigned wall 3, wherein a value of approximately 1 / 2 is particularly preferred. Each of the two seals 18, 19 is thus subjected to a smaller shear load than a single seal acting between the wall 3 and the closing plate 7. This reduces wear during use and thus also reduces particle generation. It should be noted here that worn seals generate significantly more particles than unworn seals. Therefore, the reduction in particle generation achieved by the invention becomes increasingly evident during the use of the seal. As a result, maintenance intervals can also be extended, while still remaining below the particle generation of conventional valves.

[0087] A second embodiment of the sealing unit 12 is Figures 13 to 15 . The differences from the first embodiment are explained below, wherein the rest of the design corresponds to that of the first embodiment. In this embodiment, the support parts 20 are formed by plastic parts mounted on the base material of the supporting frame 13. These plastic parts have a lower coefficient of friction with respect to the wall 3 and the closing plate 7 than the base material of the supporting frame.

[0088] Fig.16 A third embodiment is shown in FIG. 1 . The differences from the first embodiment are explained below, wherein the design otherwise corresponds to that of the first embodiment. The respective supporting frame 13 is not fixed to the respective wall 3 here, but only to the respective closing plate 7. The mounting on the closing plate 7 is carried out in a similar manner to the mounting on the wall 3 in the first embodiment. In particular, the supporting frame 13 therefore has holes in the corner regions, through which the screws 22 screwed into the threaded holes of the closing plate 7 pass. At least the middle section of the longitudinal legs 14, 15 of the supporting frame 13, preferably at least half of the length of the longitudinal legs 14, 15, particularly preferably at least two thirds, is thus free relative to the closing plate 7.

[0089] In the closed position of the corresponding closing plate 7, the frame opening surrounds the opening 4 in the wall 3 and the middle sections of the longitudinal legs 14, 15 can be bent in a manner completely similar to the first embodiment by evacuating the vacuum chamber connected to the wall 3 when the wall 3 and thus the opening 4 are deformed.

[0090] A fourth embodiment of the present invention is shown in Fig.17 and 18 The differences from the first embodiment are explained below, and the rest of the design corresponds to the design of the first embodiment.

[0091] In this embodiment, a wall stop 23 and a closing plate stop 24 are provided to ensure that when the corresponding section of the wall 3 connected to the corresponding opening is deformed, the driven momentum of the corresponding longitudinal legs 14, 15 is within the desired range, in particular at the longitudinal center of the corresponding longitudinal legs 14, 15, between one third and two thirds of the displacement size of the longitudinal center of the corresponding longitudinal edge 4a, 4b of the corresponding opening 4.

[0092] The wall stop 23 and the closing plate stop 24 interact with the middle sections of the longitudinal legs 14 , 15 of the supporting frame 13 , in particular in their longitudinal center region.

[0093] Fig.17 2 shows the state which exists when the closing plate 7 is in the closed position and the base body 1 is relaxed. Fig.18 3 shows the state that occurs when the wall 3 is deformed by evacuating a vacuum chamber connected to the wall 3 .

[0094] exist Fig.17 In FIG. 4 , the displacement a of the longitudinal edge 4a of the opening 4 is indicated at its longitudinal center. The wall stop 23 is Fig.17 and 18 The value a is also shifted between the states of the support frame 13 and the support frame 13. Furthermore, the initial distance (=present in the relaxed state of the base body 1) between the wall stop 23 and the longitudinal leg 14 of the support frame 13 is indicated, as well as the initial distance d between the closing plate stop 24 of the support frame 13 and the longitudinal leg 14 of the support frame 13. The stops 23, 24 are therefore located on both sides of the relevant longitudinal leg 14, 15 of the support frame 13, wherein the distances c, d are smaller than the magnitude a of the displacement. The distances c, d are preferably each in the range of one third to two thirds of the magnitude a. The sum of the distances c and d is at least a, preferably slightly larger (in order to avoid jamming of the longitudinal legs 14, 15 in the case of a tolerance of the value a). Preferably, the sum of c and d is less than four thirds of the magnitude a.

[0095] If the friction with respect to the longitudinal legs 14, 15 is so low when the wall 3 is displaced in its section connected to the respective longitudinal edge 4a, 4b, so that it is not carried along or only slightly carried along, the stop 23 comes into contact with the relevant longitudinal leg 14, 15 during the displacement of the wall 3 (at the earliest after the displacement distance c) and displaces the longitudinal leg 14, 15 with the further displacement of the wall 3. The final state of this situation is Fig.18 Shown in.

[0096] If the friction relative to the relevant longitudinal leg 14, 15 is so great during the movement of the wall 3 that the longitudinal leg is at least largely carried along in accordance with the movement of the wall 3, the relevant longitudinal leg 14, 15 comes into contact with the closing plate stop 24 during the movement of the wall 3 (at the earliest after the displacement distance d) and is blocked against further displacement during further displacement of the wall 3. In this case, in the final state, the relevant longitudinal leg 14, 15 rests on the closing plate stop 24 (not shown in the figure).

[0097] The displacement b of the longitudinal leg 14 in its longitudinal center region is also shown in Fig.17 As already mentioned, the magnitude of the displacement b is in the range of one third to two thirds of the magnitude a.

[0098] Another modified embodiment is schematically shown in Fig.19 . Here, a sealing material is vulcanized onto the supporting frame 13, which extends continuously from one side of the supporting frame to the other side and here extends on the narrow side of the supporting frame. The sections of the sealing material located on the opposite side of the supporting frame 13 form the sealing plate seal 18 and the wall seal 19 here.

[0099] Figures 20 to 22 2. The vacuum valve 50 is shown installed between the two vacuum chambers 25. The vacuum valve 50 is designed corresponding to the first embodiment of the present invention and is Fig. 20 and 21 In the illustration, the closing plate 7 is in the open position, while Fig. 22 The base body 1 of the vacuum valve 50 is mounted on the adjacent wall 27 of the vacuum chamber 25 with the wall 3 having the opening 4. Here, the opening 4 in the wall 3 of the base body 1 of the vacuum valve 50 is aligned with the opening 28 in the wall 27 of the vacuum chamber 25, that is, the opening 4 of the base body 1 and the opening 28 of the wall 27 of the vacuum chamber 25 have the same shape and size, and their edges are flush with each other. In order to achieve a vacuum-tight connection between the wall 3 of the vacuum valve 50 and the wall 27 of the vacuum chamber 25, a vacuum seal is used. Fig. 20 The screws not shown and Fig. 20 28. The screws can be screwed, for example, from the interior 26 of the corresponding vacuum chamber 25 through the opening in the wall 27 into the threaded hole in the wall 3 of the base body 1 of the vacuum valve 50. Here, there are multiple screws annularly (inside or outside the sealing ring) around the openings 4, 28. It can also be provided to screw in the opposite direction, starting from the interior 2 of the base body 1, through the opening in the wall 3, and screwing into the threaded hole in the wall 27.

[0100] When one of the vacuum chambers 25 is evacuated from atmospheric pressure (to a pressure less than one tenth of atmospheric pressure), the opening 28 is deformed, wherein the longitudinal edges of the opening 28 move toward each other in the middle section. The sections of the wall 27 connected to the opening 28 in these areas move toward each other here and, by screwing to the associated wall 3 of the base body 1, bring along the corresponding section of the wall 3, so that the opening 4 is also deformed similarly to what has already been described.

[0101] Fig. 20 The vacuum chamber 25 shown on the right has a further opening 29 in the wall 32, which opening 29 can be closed by a vacuum door 51 according to the invention. In the open state of the vacuum door 51, the vacuum chamber 25 is therefore connected to the surrounding space via the opening 29. The substrate to be processed can be introduced into the vacuum device through the opening 29.

[0102] The vacuum door 51 is designed to a large extent similarly to the first embodiment of the vacuum valve described above. The differences from this vacuum valve are explained in particular below. For the vacuum door 51, at least partly the same reference numerals as for the vacuum valve are used.

[0103] In this embodiment of the vacuum door 51 according to the invention, the base body 30 is not designed as a housing with a closed interior space, in contrast to the vacuum valve. However, in a manner completely analogous to the vacuum valve, the base body has a wall 3 with an opening 4, which is designed in the same manner as described in conjunction with the vacuum valve. In order to release and close the opening 4 in the wall 3 of the base body 30, a closing plate 7 is used again, which can be shifted between an open position in which the opening 4 is released and a closed position in which the opening 4 is vacuum-tightly closed. This shifting can be carried out in the same manner as described in conjunction with the vacuum valve, via an intermediate position, for which a piston-cylinder unit 8, 9 is used here. The shifting can also be carried out in a modified manner, and reference is also made to the description associated with the vacuum valve for this.

[0104] For sealing between the closing plate 7 and the wall 3 in the closed position of the closing plate 7 , a sealing unit 12 is used which is designed in the same way as the sealing unit 12 described in conjunction with the vacuum valve.

[0105] In this embodiment, the sealing unit 12 is mounted on the wall 3, as described in conjunction with the first embodiment of the vacuum valve. In the case of the vacuum door 51, it can also be alternatively provided that the sealing unit 12 is mounted on the closing plate 7, as described in conjunction with the third embodiment of the vacuum valve (see Fig.16 ).

[0106] The other modifications described in connection with the vacuum valve are also possible on the vacuum door 51. Thus, for example, in order to ensure that the curvature of the longitudinal legs 14, 15 of the supporting frame 13 is within the desired range, there may be wall stops and valve disc stops similar to the wall stops 23 and valve disc stops 24 of the vacuum valve. The support part 20 may also be formed by a separate part.

[0107] However, in the case of a vacuum door, it is also conceivable and feasible to use the base body 1 in the form of a housing. The opening opposite the opening sealed by the valve disk and the closure unit can remain free here, or this opening can also be sealed by the valve disk. The above-mentioned embodiment of the vacuum valve can therefore also be used as a vacuum door.

[0108] Figure 23-26 Another modified embodiment of the vacuum door 51 is shown. Here, the difference from the previous embodiment of the vacuum door is that the sealing unit 12 cooperates directly with the wall 32 of the vacuum chamber 25. The vacuum door 51 is fixed to the vacuum chamber 51 via a base body 31. However, the base body 31 does not have a wall 3, which has an opening 4 aligned with the opening 29 of the wall 32 of the vacuum chamber 25.

[0109] When the vacuum chamber 25 is evacuated from atmospheric pressure, the opening deforms, wherein the middle sections of the first and second longitudinal edges 29a, 29b approach each other. The wall seal 19 of the sealing unit 12 here rests directly on the wall 32. The mode of operation is completely similar to that described in conjunction with the vacuum valve.

[0110] exist Figures 23 to 26 In the embodiment shown, a sealing unit 12 , which is again designed in the same way as described above, is mounted on the closing plate 7 (likewise already described).

[0111] Fig. 27 A further modification is shown. Here, the sealing unit is mounted on the wall 32 of the vacuum chamber 25, specifically in a manner completely similar to the case of mounting on the wall 3 of the base body 1. The supporting frame 13 thus surrounds the opening 29 of the wall 32 of the vacuum chamber 25 with its frame opening, and at least the middle sections of the first and second longitudinal legs 14, 15 of the supporting frame remain free relative to the wall 32. The fixing points on the wall 32 are therefore also located, in particular, in the corner region between the longitudinal legs and the transverse legs and / or in the region of the transverse legs.

[0112] The other modifications described in conjunction with the vacuum valve can also be applied here in an analogous manner.

[0113] List of Reference Numerals

[0114] 1 base 24 closing plate - stop

[0115] 2 Internal space 25 Valve body

[0116] 3 walls 26 internal spaces

[0117] 4 openings 27 walls

[0118] 4a The first longitudinal edge 28 is open

[0119] 4b The second longitudinal edge 29 is open

[0120] 4c first transverse edge 29a first longitudinal edge

[0121] 4d second transverse edge 29b second longitudinal edge

[0122] 5 stem 30 base

[0123] 6 bearing unit 31 base

[0124] 7 closed plate 32 wall

[0125] 8 piston-cylinder unit 50 vacuum valve

[0126] 9 Piston-cylinder unit 51 Vacuum door

[0127] 10 Longitudinal axis

[0128] 11. Lid

[0129] 12 Sealed Units

[0130] 13 Loading frame

[0131] 14 First Leg

[0132] 15 Second vertical leg

[0133] 16 First horizontal leg

[0134] 17 Second horizontal leg

[0135] 18 Closing plate - seal

[0136] 19 Wall-seal

[0137] 20 Support components

[0138] 21 holes

[0139] 22 screws

[0140] 23 wall - stop.

Claims

1. A vacuum valve or vacuum door, comprising a closing plate (7) for closing a first opening (4) arranged in a first wall (3) or a second opening (29) arranged in a second wall (32), the first opening or the second opening having opposite first and second longitudinal edges and opposite first and second transverse edges which are shorter in comparison, wherein: The closing plate is movable between an open position, in which the first opening (4) of the first wall (3) or the second opening (29) of the second wall (32) is released, and a closed position, in which the first opening (4) of the first wall (3) or the second opening (29) of the second wall (32) is closed by the closing plate (7), wherein a sealing unit (12) is provided for sealing the closing plate (7) relative to the first wall (3) or the second wall (32), the sealing unit having a supporting frame (13) with first and second opposing longitudinal legs (14, 15) and first and second opposing transverse legs (16, 17) which are shorter in comparison, and on which a circumferential wall seal (19) is arranged on one side. , wherein the supporting frame (13) is fixed or can be fixed to the first wall (3) or the second wall (32) at a fixing point, characterized in that a circumferential sealing plate-seal (18) is arranged on the supporting frame (13) on the other side, and at least the middle section of the first and second longitudinal legs (14, 15) of the supporting frame (13) is free relative to the first wall (3) or the second wall (32), wherein the middle section extends at least over at least two thirds of the length of the first and second longitudinal legs (14, 15), and the thickness of the supporting frame (13) measured at right angles to the plane of the supporting frame is smaller than the thickness of the first wall (3) with the first opening (4) or the second wall (32) with the second opening (29).

2. A vacuum valve or vacuum door having a closing plate (7) for closing a first opening (4) arranged in a first wall (3) or a second opening (29) arranged in a second wall (32), the first opening or the second opening having opposite first and second longitudinal edges and opposite first and second transverse edges which are shorter in comparison, wherein: The closing plate can be shifted between an open position and a closed position, in which the first opening (4) of the first wall (3) or the second opening (29) of the second wall (32) is released, and in the closed position, the first opening (4) of the first wall (3) or the second opening (29) of the second wall (32) is closed by the closing plate (7), wherein a sealing unit (12) is provided for sealing the closing plate (7) relative to the first wall (3) or the second wall (32), the sealing unit having a supporting frame (13), the supporting frame having first and second opposite longitudinal legs (14, 15) and first and second opposite transverse legs (16, 17) which are shorter in comparison, and wherein the first and second opposite longitudinal legs (14, 15) and the second and second transverse legs (16, 17) which are shorter in comparison are arranged on the supporting frame. The invention relates to a support frame (13) having a circumferential wall seal (19) arranged on one side, characterized in that the supporting frame (13) is fixed to the closing plate (7) at a fixing point, on which a circumferential sealing plate seal (18) is arranged on the other side, at least the middle section of the first and second longitudinal legs (14, 15) of the supporting frame (13) is free relative to the closing plate (7), and the thickness of the supporting frame (13) measured at right angles to the plane of the supporting frame is smaller than the thickness of the first wall (3) with the first opening (4) or the second wall (32) with the second opening (29) at least in the free middle area of ​​the first and second longitudinal legs (14, 15).

3. The vacuum valve or vacuum door according to claim 1, characterized in that: The fixing point is located in the corner region between the longitudinal legs (14, 15) and the transverse legs (16, 17) and / or in the region of the transverse legs (16, 17).

4. The vacuum valve or vacuum door according to claim 3, characterized in that: The supporting frame has holes (21) in the corner area between the longitudinal legs (14, 15) and the transverse legs (16, 17) and / or in the area of ​​the transverse legs (16, 17), through which screws for fixing the supporting frame (13) to the first wall (3) or the second wall (32) can be screwed into threaded holes in the first wall (3) or the second wall (32).

5. The vacuum valve or vacuum door according to claim 1 or 2, characterized in that: The first wall (3) having the first opening (4) or the second wall (32) having the second opening (29) and the supporting frame (13) are located in parallel planes.

6. The vacuum valve or vacuum door according to claim 1 or 2, characterized in that: The supporting frame (13) has a support part (20) which is arranged next to the closing plate seal (18) and next to the wall seal (19).

7. The vacuum valve or vacuum door according to claim 6, characterized in that: The support part (20) is made of plastic, or the supporting frame (13) is coated with a sliding layer at least in the region of the contact surface of the support part (20).

8. The vacuum valve or vacuum door according to claim 1 or 2, characterized in that: The thickness of the supporting frame (13), at least in the region of the free middle sections of the first and second longitudinal legs (14, 15), is less than half the thickness of the first wall (3) with the first opening (4) or the second wall (32) with the second opening (29).

9. The vacuum valve or vacuum door according to claim 1 or 2, characterized in that: At least in the region of a free middle section of the longitudinal legs (14, 15) of the supporting frame (13), the width of the respective longitudinal leg (14, 15) is smaller than the thickness of the first wall (3) with the first opening (4) or the thickness of the second wall (32) with the second opening (29), the width being measured parallel to the plane of the supporting frame (13) and perpendicular to the longitudinal extension of the respective longitudinal leg (14, 15).

10. The vacuum valve or vacuum door according to claim 1 or 2, characterized in that: The first wall (3) or the second wall (32) has a wall stop (23) which is arranged to cooperate with the middle section of the first and second longitudinal legs (14, 15) of the supporting frame (13), and these wall stops are respectively spaced apart from the corresponding longitudinal legs (14, 15) of the supporting frame (13) in the closed position of the closing plate (7) and in the relaxed state of the first wall (3) or the second wall (32).

11. The vacuum valve or vacuum door according to claim 1 or 2, characterized in that: The closing plate (7) has a closing plate stop (24) for cooperating with the middle section of the first and second longitudinal legs (14, 15), wherein the closing plate stop is spaced apart from the corresponding longitudinal legs (14, 15) of the supporting frame (13) in the closed position of the closing plate (7) and in the relaxed state of the first wall (3) or the second wall (32).

12. The vacuum valve or vacuum door according to claim 1 or 2, characterized in that: The closing plate (7) can be moved from the open position to the closed position via an intermediate position. The closing plate covers the opening (4, 29) in the intermediate position, but a gap exists between the closing plate (7) and a sealing unit (12) arranged on the first wall (3) or the second wall (32), or between the sealing unit (12) arranged on the closing plate (7) and the first wall (3) or the second wall (32).

13. The vacuum valve or vacuum door according to claim 1 or 2, characterized in that: The first opening (4) is arranged in a first wall (3) of a base body (1, 30) of the vacuum valve or vacuum door.

14. The vacuum door according to claim 1 or 2, characterized in that: The second opening (29) is arranged in a second wall (32) of the vacuum chamber (25), and the vacuum door is placed on the second wall.

15. The vacuum valve or vacuum door according to claim 2, characterized in that: The fixing point is located in the corner region between the longitudinal legs (14, 15) and the transverse legs (16, 17) and / or in the region of the transverse legs (16, 17).

16. The vacuum valve or vacuum door according to claim 15, characterized in that: The supporting frame has holes (21) in the corner area between the longitudinal legs (14, 15) and the transverse legs (16, 17) and / or in the area of ​​the transverse legs (16, 17), through which screws for fixing the supporting frame (13) to the closing plate (7) can be screwed into threaded holes in the closing plate (7).

17. A vacuum assembly having a vacuum valve or a vacuum door according to claim 13, characterized in that: The first wall (3) of the base body (1, 30) having the first opening (4) is connected to the second wall of the vacuum chamber by means of bolt connection.

Images