Liquid material coating device and liquid material coating method

Abstract

The present invention provides a liquid material coating device and a liquid material coating method that can discharge a predetermined amount of liquid material per unit time during a series of coating operations, regardless of the relative movement speed. A liquid material coating device and a coating method using the device, the liquid material coating device comprising: a discharging head; a robot that causes the discharging head to move relative to a workpiece; a movement control unit that controls the relative movement of the discharging head and the workpiece; and a discharging control unit that controls the discharging action of the liquid material from the discharging head; the discharging control unit can switch between a first mode of discharging control and a second mode of discharging control based on a coating program, the first mode of discharging control changing the amount of liquid material discharged per unit time by the discharging head based on the relative movement speed of the discharging head and the workpiece, and the second mode of discharging control causing the discharging head to discharge a predetermined amount of liquid material per unit time, regardless of the relative movement speed.

Description

[0001] This application is filed on May 25, 2017 、Application No. 201780091187.2 、The name of the invention is Liquid materials Liquid material coating device and liquid material coating method A divisional application for a patent application. Technical Field

[0002] The present invention relates to a liquid material coating device and a liquid material coating method for performing desired scribing coating (drawing coating) on a workpiece by relatively moving a discharging head and the workpiece. Background Art

[0003] In the manufacture of electronic devices, dispensing devices called dispensers are often used to apply liquid materials in a predetermined pattern. Dispensers are widely used in the manufacture of both large and small devices. For example, they are used in the linear application of phosphors or adhesives to flat-panel displays such as liquid crystal and organic EL displays, or in the linear application of adhesive to the outer periphery of smartphone cases.

[0004] The coating operation using a dispenser is performed by discharging the liquid material from the dispenser while the dispenser and the worktable are relatively moved according to a predetermined coating pattern. However, when performing line coating on a coating pattern having corners, the relative movement speed of the dispenser and the worktable varies at the corners, causing a problem in that the width of the coating line formed by the drawing is disturbed (for example, even in the case of a preferred method such as Figure 10 As shown in (A), when the line with the same thickness as the straight line is applied to the corner, if the relative moving speed of the dispenser and the worktable changes at the corner, the result is as follows: Figure 10 (B) The line at the corner portion is thicker than the straight line portion.)

[0005] Therefore, the following technology is proposed: the relative movement speed of the dispenser and the workbench is slowed down and the discharge pressure of the dispenser is reduced at the starting point of the corner, and then the relative movement speed of the dispenser and the workbench is accelerated and the discharge pressure of the dispenser is increased before reaching the end point of the corner, thereby applying an appropriate amount of liquid material to the corner.

[0006] However, the control of the discharge pressure (discharge volume) is based on the pattern data stored in the microcomputer. Therefore, in order to achieve the desired line coating in a coating device equipped with a robot (XYZ direction moving device) that moves the dispenser and the worktable relative to each other, the program design as described below is required.

[0007] That is, first, it is necessary to program the relative movement instructions for moving the dispenser and the workbench relative to each other according to the coating pattern. Secondly, it is necessary to program the discharge volume control instructions for controlling the discharge volume of each coating position on the coating pattern. The discharge volume control instructions are, for example, commands to reduce the air pressure used for discharge, or to make the distance between the annular valve seat connected to the discharge port and the valve body closer, or to reduce the rotation speed of the screw that imparts the discharge propulsion force. In addition, for places where the relative movement speed changes, such as corners, it is necessary to divide the marked trajectory at the corner into multiple parts, and program the relative movement speed and discharge pressure for each divided trajectory separately.

[0008] As described above, since programming the discharge amount at each coating position is laborious, a technique has been proposed for automatically controlling the discharge pressure (discharge amount) according to changes in the relative movement speed between the dispenser and the stage.

[0009] For example, Patent Document 1 discloses that when the linear movement speed of the liquid discharge device body is high, the valve stem is opened to increase the discharge flow rate, and conversely, when the linear movement speed of the liquid discharge device body is low, the valve stem is closed to reduce the discharge flow rate, thereby controlling the coating amount on the object to be fixed.

[0010] Patent Document 2 discloses that the conversion unit has a relational expression or conversion table indicating the relationship between the moving speed of the dispensing head and the control amount of the discharge amount control device, applies the moving speed to the relational expression or conversion table, and calculates the control amount for achieving the set line width.

[0011] Prior art literature

[0012] Patent Literature

[0013] Patent Document 1: Japanese Patent Application Laid-Open No. 5-285434

[0014] Patent Document 2: International Publication No. 2015 / 083722 Summary of the Invention

[0015] Problems to be solved by the invention

[0016] However, in the prior art (the inventions described in Patent Documents 1 and 2), the amount of liquid material discharged per unit time from the dispenser is determined by the relative movement speed between the dispenser and the worktable. Therefore, in order to discharge the liquid material in the amount desired by the operator, the dispenser and the worktable must be moved relative to each other at a relative movement speed corresponding to the desired discharge amount. Therefore, for example, when performing a preliminary spray or test spray during a coating operation, the dispenser and the worktable must be continuously moved at a relative movement speed corresponding to the operator's desired discharge amount in the preliminary spray or test spray area.

[0017] Furthermore, conventional techniques require setting the relationship between the relative movement speed of the dispenser and the worktable and the discharge volume per unit time based on the operator's desired line width. This allows coating of a constant line width to be achieved even when the relative movement speed of the dispenser and the worktable varies. Consequently, when coating a coating line with varying line widths in a series of coating operations, there is the problem of having to set the relationship between the relative movement speed and the discharge volume per unit time for each desired line width, which is laborious.

[0018] Furthermore, the conventional technology also has a problem in that it is impossible to stop the dispenser and perform dot-shaped coating.

[0019] An object of the present invention is to provide a liquid material coating apparatus and a liquid material coating method that can discharge a predetermined discharge amount of liquid material per unit time in a series of coating operations regardless of a relative movement speed.

[0020] Technical means to solve the problem

[0021] The liquid material coating device involved in the present invention comprises: a discharging head that discharges liquid material; a robot that causes the above-mentioned discharging head to move relative to the workpiece; a movement control unit that controls the relative movement of the above-mentioned discharging head and the above-mentioned workpiece based on a coating program; and a discharging control unit that controls the discharging action of the above-mentioned liquid material from the above-mentioned discharging head; the above-mentioned movement control unit and the above-mentioned discharging control unit work together to coat the above-mentioned liquid material on the above-mentioned workpiece in a prescribed coating pattern; the above-mentioned discharging control unit can switch between a first mode of discharging control and a second mode of discharging control based on the above-mentioned coating program, the first mode of discharging control changes the discharging amount of the above-mentioned liquid material per unit time from the above-mentioned discharging head based on the relative movement speed of the above-mentioned discharging head and the above-mentioned workpiece, and the second mode of discharging control causes the above-mentioned discharging head to discharge a predetermined amount of liquid material per unit time regardless of the above-mentioned relative movement speed.

[0022] In the liquid material coating apparatus, in the discharge control in the first mode, line coating may be performed based on the coating program to coat a coating line having a constant coating amount per unit length.

[0023] In the liquid material coating apparatus, in the discharge control in the first mode, line coating of a coating line having a constant coating line width may be performed based on the coating program.

[0024] In the above-mentioned liquid material coating device, in the discharge control of the above-mentioned second mode, at least one of line coating, pre-spray coating, trial spray coating and dot coating can be performed based on the above-mentioned coating procedure. Furthermore, at least two of line coating, pre-spray coating, trial spray coating and dot coating can be performed.

[0025] In the liquid material coating apparatus, the discharge control unit may switch between the first mode of discharge control and the second mode of discharge control by receiving a signal from a movement control unit based on the coating program.

[0026] In the above-mentioned liquid material coating device, the above-mentioned discharge control unit can also be set to have multiple first-mode discharge controls with different relationships between the above-mentioned relative moving speed and the discharge amount per unit time, or multiple second-mode discharge controls with predetermined different discharge amounts per unit time, and can select one discharge control from the above-mentioned multiple first-mode discharge controls or the above-mentioned multiple second-mode discharge controls and execute them.

[0027] In the above-mentioned liquid material coating device, the above-mentioned discharge control unit may also have the following function: based on the first relative moving speed and the discharge amount per first unit time corresponding to the first relative moving speed, and the second relative moving speed and the discharge amount per second unit time corresponding to the second relative moving speed, the discharge amount per third unit time corresponding to the third relative moving speed is automatically calculated; in the discharge control of the above-mentioned first mode, while the above-mentioned discharge head is moved at any one of the above-mentioned first to third relative moving speeds, the liquid material of the discharge amount per unit time corresponding to the relative moving speed is discharged from the above-mentioned discharge head.

[0028] In the above-mentioned liquid material coating device, the above-mentioned relative movement speed may include, in addition to the relative movement speed pre-input into the above-mentioned coating program in order to coat the above-mentioned liquid material with the above-mentioned coating pattern, a relative movement speed automatically calculated based on the relative movement speed pre-input into the above-mentioned coating program in order to supplement the relative movement speed pre-input into the above-mentioned coating program.

[0029] The present invention relates to a method for applying a liquid material, wherein the method is a method for applying a liquid material using a liquid material applying apparatus, the liquid material applying apparatus comprising: a discharging head for discharging a liquid material; a robot for moving the discharging head relative to a workpiece; a movement control unit for controlling the relative movement of the discharging head and the workpiece based on a coating program; and a discharging control unit for controlling the discharging of the liquid material from the discharging head; the movement control unit and the discharging control unit working in conjunction to apply the liquid material to the workpiece in a predetermined coating pattern; in the liquid material applying method, switching between a first mode of discharging control and a second mode of discharging control based on the coating program, the first mode of discharging control varying the amount of liquid material discharged per unit time by the discharging head based on the relative movement speed between the discharging head and the workpiece, and the second mode of discharging control causing the discharging head to discharge a predetermined amount of liquid material per unit time regardless of the relative movement speed.

[0030] In the liquid material coating method, in the discharge control of the first mode, line coating may be performed based on the coating program to coat a coating line having a constant coating amount per unit length.

[0031] In the liquid material coating method, in the discharge control in the first mode, line coating of a coating line having a constant coating line width may be performed based on the coating program.

[0032] In the above-mentioned liquid material coating method, in the discharge control of the above-mentioned second mode, at least one of line coating, pre-spray coating, trial spray coating and dot coating can be performed based on the above-mentioned coating procedure. Furthermore, at least two of line coating, pre-spray coating, trial spray coating and dot coating can be performed.

[0033] In the liquid material coating method, the discharge control unit may switch between the first mode discharge control and the second mode discharge control by receiving a signal from a movement control unit based on the coating program.

[0034] In the above-mentioned liquid material coating method, the above-mentioned discharge control unit may be set with multiple first-mode discharge controls having different relationships between the above-mentioned relative moving speed and the discharge amount per unit time, or multiple second-mode discharge controls having predetermined different discharge amounts per unit time, and one discharge control may be selected and executed from the multiple first-mode discharge controls or the multiple second-mode discharge controls.

[0035] In the above-mentioned liquid material coating method, the above-mentioned discharging control unit may also have the following function: based on the first relative moving speed and the discharging amount per first unit time corresponding to the first relative moving speed, and the second relative moving speed and the discharging amount per second unit time corresponding to the second relative moving speed, the discharging amount per third unit time corresponding to the third relative moving speed is automatically calculated; in the discharging control of the above-mentioned first mode, while the above-mentioned discharging head is moved at any one of the above-mentioned first to third relative moving speeds, the liquid material of the discharging amount per unit time corresponding to the relative moving speed is discharged from the above-mentioned discharging head.

[0036] In the above-mentioned liquid material coating method, the above-mentioned relative movement speed may include, in addition to the relative movement speed pre-input into the above-mentioned coating program in order to coat the above-mentioned liquid material with the above-mentioned coating pattern, a relative movement speed automatically calculated based on the relative movement speed pre-input into the above-mentioned coating program in order to supplement the relative movement speed pre-input into the above-mentioned coating program.

[0037] In the above-mentioned liquid material coating method, the above-mentioned first mode of discharge control may be performed when performing line coating in which the above-mentioned relative movement speed is changed according to the above-mentioned coating pattern, and the above-mentioned second mode of discharge control may be performed when performing line coating at a fixed relative movement speed.

[0038] In the liquid material coating method, the workpiece may be one or more semiconductor chips, one or more substrates carrying one semiconductor chip, or one or more substrates carrying a plurality of semiconductor chips.

[0039] Effects of the Invention

[0040] According to the present invention, the first mode of discharge control and the second mode of discharge control can be switched and executed based on the above-mentioned coating program. The first mode of discharge control changes the discharge amount of liquid material per unit time of the discharge head based on the relative movement speed of the discharge head and the workpiece. The second mode of discharge control makes the discharge head discharge a predetermined discharge amount of liquid material per unit time regardless of the relative movement speed, thereby reducing the program design work performed by the operator and allowing the coating operation to be performed appropriately. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 It is a perspective view showing the appearance of the coating device of the present invention.

[0042] Figure 2 This is a block diagram showing the control unit and related elements.

[0043] Figure 3 It is a graph showing the relationship between the speed signal and the relative moving speed.

[0044] Figure 4 This is a diagram for explaining an example of discharge rate control.

[0045] Figure 5 This is a diagram for explaining the discharge method of the dispenser.

[0046] Figure 6 This is a diagram for explaining a coating operation in which a series of coating operations are performed alternately, namely, line coating with a coating pattern having corners and preliminary spray coating.

[0047] Figure 7 These are diagrams for explaining a coating operation in a series of coating operations in which the line width of the coating line is changed in a straight line portion of a predetermined coating pattern.

[0048] Figure 8 This is a diagram for explaining a coating operation in which a series of coating operations are performed alternately, that is, line coating and dot coating in a predetermined coating pattern.

[0049] Figure 9 This is a diagram for explaining a coating operation that alternately repeats a series of coating operations including line coating of a predetermined coating pattern, line coating and pre-spray coating of a coating pattern having a line width different from that of the coating pattern, and line coating and pre-spray coating of a second coating pattern.

[0050] Figure 10 This is a diagram showing an example of line coating by a conventional coating apparatus. DETAILED DESCRIPTION

[0051] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0052] Furthermore, in the embodiments, as an example of a coating line with a constant coating amount per unit length, discharge control for achieving uniformity in line width when the coating line is viewed from above is disclosed. However, the technical concept of the present invention is not limited to application to line width uniformity. In order to achieve discharge control for achieving a constant coating amount per unit length, for example, the uniformity of the height of the coating line, the uniformity of both line width and height, or the uniformity of the cross-sectional area of the coating line may also be targeted for discharge control.

[0053] Coating device

[0054] Figure 1 : is a perspective view showing the appearance of the coating device of the present invention. Figure 2 This is a block diagram showing the control unit and related elements. Figure 1 As shown in FIG. 1 , the coating device 1 of the present invention includes a dispenser 10 and a robot 20 as main components. In addition, the dispenser 10 includes a dispensing head 50 and a dispensing controller 40. Figure 1As shown, the robot 20 and the dispensing controller 40 are electrically connected via cables A1 and A2 , and the dispensing head 50 and the dispensing controller 40 are electrically connected via a cable B.

[0055] "robot"

[0056] The robot 20 is a desktop device including an X-axis moving device 21 , a Y-axis moving device 22 , a robot head 23 , a pedestal 24 , and a robot controller 30 .

[0057] The X-axis moving device 21 is supported by two pillars and is driven by an X-axis driving source 61. The X-axis moving device 21 is provided with a robot head 23, which can move to any coordinate in the X direction.

[0058] The Y-axis moving device 22 is mounted on a base 24 and is driven by a Y-axis drive source 62. A worktable 25 is provided on the Y-axis moving device 22 as a workpiece holding device. The worktable 25 can be moved to any coordinate in the Y direction. A workpiece 26 is removably held on the loading surface of the worktable 25.

[0059] The robot head 23 constitutes a Z-axis moving device, which includes a moving member 28 and a Z-axis drive source 63, with the Z-axis drive source 63 serving as the driving source. Specifically, the robot head 23 uses the Z-axis drive source 63 to freely move the moving member 28 to any coordinate in the Z direction. The dispensing head 50 is detachably secured to the moving member 28, which is formed of a flat plate. The dispensing head 50 is also freely movable to any coordinate in the Z direction via the robot head 23 (Z-axis moving device).

[0060] The driving sources 61 to 63 are not particularly limited, and may be configured by, for example, a stepping motor, a servo motor, or a linear motor.

[0061] The pedestal 24 has a pre-spraying area (adjustment coating area) 27 for pre-spraying the liquid material at a position on its upper surface where the dispensing head 50 can move. In addition, the pedestal 24 has a built-in robot controller 30 for controlling the movement of the robot 20. Figure 2 As shown in FIG. 3 , the robot controller 30 includes a storage device 31 for storing a coating program and a computing device 32 for executing the coating program stored in the storage device 31. Figure 2 As shown, the robot controller 30 is electrically connected to the X-axis moving device 21 , the Y-axis moving device 22 , and the Z-axis moving device 23 via cables 81 .

[0062] The coating program stored in the robot controller 30 includes relative movement instructions, including instructions for linearly or curvilinearly moving the X, Y, and Z axis moving devices (21-23) to designated coordinates and instructions for the relative movement speed between the dispensing head 50 and the worktable 25 (or workpiece 26). Furthermore, the program includes a discharge start instruction for causing the dispenser 10 to begin discharging the liquid material, a discharge end instruction for causing the dispenser 10 to end discharging the liquid material, and instructions for setting the discharge control mode of the dispenser 10. Based on the coating program, the robot controller 30 can send relative movement instructions to the X axis moving device 21, the Y axis moving device 22, and the Z axis moving device 23 to relatively move the dispensing head 50 and the worktable 25. Instructions regarding the discharge amount of liquid material from the dispensing head 50 are not included in the coating program, but are included in the discharge control program stored in the dispensing controller 40. The coating program includes instructions for controlling the timing at which the discharge control program executes the discharge control in the first mode and the timing at which the discharge control program executes the discharge control in the second mode.

[0063] The robot controller 30 uses two types of movement methods to move the dispensing head 50 relative to the worktable 25 based on the coating program: PTP movement and interpolation movement. PTP movement involves relative movement of the dispensing head 50 to a specified coordinate on the workpiece 26, regardless of the path. This is performed when liquid material is not being dispensed, such as when the dispensing head 50 reaches the coating start point or returns to the origin. Interpolation movement involves relative movement along a predetermined path at a predetermined relative speed, and is used, for example, when applying liquid material based on a prescribed coating pattern.

[0064] like Figure 2 As shown, the robot controller 30 and the dispensing controller 40 are electrically connected via cables A1 and A2. The robot controller 30 then outputs signals such as a dispensing start command or a dispensing end command to the dispensing controller 40 via cable A1. Furthermore, the robot controller 30 outputs the relative movement speed V between the dispensing head 50 and the table 25 to the dispensing controller 40 via cable A2. Furthermore, while the dispensing head 50 is performing interpolation movement, the robot controller 30 continuously outputs the relative movement speed V between the dispensing head 50 and the table 25 to the dispensing controller 40 via cable A2.

[0065] Figure 3 Graph showing the relationship between (a) the relative moving speed V between the dispensing head 50 and the work table 25 and (b) the speed signal output from the robot controller 30 to the dispensing controller 40. Figure 3 As shown in FIG. 1 , the speed signal is a pulse signal in which two voltage values, large and small, are switched alternately. Figure 3As shown, the period of the velocity signal indicates the speed of the relative movement speed V. The shorter the period of the velocity signal, the faster the relative movement speed V. Furthermore, the relationship between the velocity signal and the relative movement speed V is not limited to the above relationship. For example, the longer the period of the velocity signal, the faster the relative movement speed V. Alternatively, the relative movement speed V may be varied according to the magnitude (amplitude) of the voltage value. In this embodiment, this velocity signal is continuously output from the robot controller 30 to the distribution controller 40 during the interpolation movement period.

[0066] Furthermore, the "relative moving speed" described in this embodiment is not the moving speed of each moving axis (X-axis, Y-axis, and Z-axis) of the robot 20, but the relative moving speed when the X-axis, Y-axis, and Z-axis are combined (the same applies hereinafter). Here, moving axes that do not significantly affect the formation of a coating line with a constant coating amount per unit length can be excluded as needed.

[0067] In addition, the coating program of this embodiment can be processed by an interpreter, but is not limited to this. Furthermore, the operator can use the computer included in the coating apparatus 1 or a computer located outside the coating apparatus 1 to set a new coating program in the storage device 31 of the robot controller 30 or change the coating program stored in the robot controller 30.

[0068] The robot 20 is not limited to the above-described configuration, as long as the dispensing head 50 and the worktable 25 (or workpiece 26) can move relative to each other in at least one dimension, and more preferably in two or more dimensions. For example, the robot 20 may be provided with a robot head 23 and an arm having one or more joints, or may be provided with a configuration in which only the dispensing head 50 is movable, rather than both the dispensing head 50 and the worktable 25. Alternatively, the robot 20 may be provided with a configuration in which only the worktable 25 (or workpiece 26) is movable. Furthermore, while the present embodiment illustrates a configuration in which the workpiece 26 is placed on the worktable 25 for coating, the present embodiment is not limited to this configuration. For example, the workpiece 26 may be coated using a workpiece holding device that grips and holds the edges of the workpiece 26. Furthermore, coating may be performed on a moving or temporarily stopped workpiece using a workpiece holding device (e.g., a belt conveyor) provided separately from the robot 20. In this case, the robot 20 does not have a means for holding the workpiece, and the dispensing head 50 moves relative to the workpiece held by an external workpiece holding device.

[0069] In the present embodiment, the cables A1 and A2 are each configured as a single cable. However, the cables A1 and A2 may be combined into a single cable or may be divided into three or more cables.

[0070] Distribution Head

[0071] like Figure 2 As shown, the dispensing head 50 includes a discharge portion 53, a nozzle 54, and a discharge drive device 64. The discharge portion 53 stores a liquid material to be discharged from the nozzle 54. The discharge drive device 64 will be described in detail below. It is a drive device for discharging the liquid material stored in the discharge portion 53 (for example, an actuator that drives a screw or a plunger provided in the discharge portion 53, or an air supply device that adjusts the air pressure in the discharge portion 53). The driving amount of the drive device can be controlled. Figure 2 As shown, the discharge drive device 64 is connected to the distribution controller 40 via a cable B, and receives a discharge control amount D corresponding to the driving amount of the discharge drive device 64 from the distribution controller 40. The discharge control amount D can be programmed by the operator, and the discharge drive device 64 is driven according to the received discharge control amount D to discharge the liquid material from the discharge port 55 of the nozzle 54 at a discharge amount per unit time desired by the operator.

[0072] Assigning Controllers

[0073] The dispensing controller 40 includes a storage device storing a dispensing control program for controlling the amount of liquid material discharged from the dispensing head 50, and a computing device for executing the dispensing control program. The dispensing controller 40 is detachably connected to the dispensing head 50 and the robot controller 30. Specifically, the dispensing controller 40 is electrically connected to the robot controller 30 via cables A1 and A2, and to the dispensing head 50 via cable B.

[0074] The distribution controller 40 sends a discharge action instruction to the distribution head 50 via the cable B. The discharge action instruction includes a discharge start instruction, a discharge end instruction, and a discharge amount control instruction. In the present embodiment, the robot controller 30 sends a discharge start instruction, a discharge end instruction, and an instruction for setting a discharge control mode to the distribution controller 40 based on the coating program. The distribution controller 40 can start / stop the discharge action of the liquid material performed by the distribution head 50 by outputting the discharge start instruction and the discharge end instruction received from the robot controller 30 to the distribution head 50. In addition, as described in detail below, when the distribution controller 40 receives the discharge action instruction and the discharge control mode from the robot controller 30, it determines the discharge control amount D based on the discharge control program and outputs the determined discharge control amount D to the discharge drive device 64. As a result, the distribution controller 40 can drive the discharge drive device 64 according to the discharge control amount D, and can discharge the liquid material from the nozzle 54 at the discharge amount per unit time desired by the operator.

[0075] The distribution head 50 and the distribution controller 40 can be replaced for each discharge method of the liquid material. That is, the discharge mechanism of the distribution head 50 is different for each discharge method of the liquid material. In addition, since the discharge mechanism is different, the value of the discharge control amount D indicated by the distribution controller 40 also changes. The operator can make the coating device 1 perform the discharge operation using the desired discharge method by installing the distribution head 50 and the distribution controller 40 corresponding to the desired discharge method. Figure 5 As the method of discharging the liquid material using the dispenser 10, a screw method, a jet method, a plunger method, and an air method are exemplified. In addition, the method of discharging the liquid material using the dispenser 10 is not limited to the above-mentioned methods.

[0076] (a) Screw method

[0077] Figure 5 (a) is a cross-sectional view of the main parts of the screw-type dispensing head 50. In the screw-type dispensing head 50, a screw 56 is provided in the flow path of the discharge portion 53. As a result, the liquid material is transported to the nozzle 54 by the rotation of the screw 56, and the liquid material can be continuously discharged from the discharge port 55 of the nozzle 54. The screw-type dispensing head 50 also includes a dispensing head obtained by performing special processing on the inner wall of the flow path or the screw 56, such as a dispensing head having two or more screws 56, or a dispensing head called a single-type or single-axis eccentric screw pump in which a single-threaded shaft rotates eccentrically within a double-threaded sleeve.

[0078] The amount of liquid material discharged per unit time from the screw-type dispensing head 50 is controlled by the rotational speed of the screw 56 per unit time, and the rotational speed of the screw 56 per unit time is controlled by the rotational speed of the rotary actuator that rotates the screw 56. Therefore, in order to discharge a desired amount of liquid material per unit time from the dispensing head 50, the operator sets a dispensing control program in which a dispensing control amount D that directly or indirectly controls the rotational speed of the rotary actuator per unit time is described in the screw-type dispensing controller 40.

[0079] Therefore, when the operator causes the dispenser 10 to perform a screw-type dispensing operation, the dispensing head 50 and the dispensing controller 40 corresponding to the screw-type operation are installed in the coating apparatus 1. The dispensing controller 40 can then transmit the discharge control amount D described in the discharge control program to the discharge drive 64, and rotate the rotary actuator serving as the discharge drive 64 in accordance with the discharge control amount D. This allows the operator to discharge the liquid material from the dispensing head 50 in a screw-type manner at the discharge amount per unit time desired by the operator. The rotary actuator primarily utilizes a motor, but the present invention is not limited to this.

[0080] (b) Injection method

[0081] Figure 5 (b) is a cross-sectional view of the main parts of a jet-type dispensing head 50. In the jet-type dispensing head 50, a plunger 57 is provided within a liquid chamber connected to the discharge port 55 of the nozzle 54. The plunger 57 is either in non-contact with the side walls of the liquid chamber or partially in contact with the side walls but does not obstruct the flow of the liquid material. Thus, by moving the plunger 57 forward and backward at high speed, an inertial force is imparted to the liquid material, causing the liquid material to splash and be discharged from the discharge port 55 of the nozzle 54 in the form of droplets. Among the jet-type dispensing heads 50, there are two types: a type in which the tip of the moving plunger 57 contacts a valve seat to form droplets (a seating type), and a type in which the tip of the moving plunger 57 does not contact the valve seat, forming droplets (a non-seating type).

[0082] The discharge rate per unit time of the jet-type dispensing head 50 is controlled by the number of times the plunger advances and retreats per unit time, while the number of times the plunger advances and retreats per unit time of the plunger 57 is controlled by the number of times the actuator advances and retreats per unit time. Therefore, in order to discharge a desired discharge rate per unit time of liquid material from the dispensing head 50, the operator sets a discharge control program in the jet-type dispensing controller 40 that describes the discharge control rate D, which directly or indirectly controls the number of times the actuator advances and retreats per unit time.

[0083] Therefore, when the operator performs a jet-type dispensing operation on the dispenser 10, the dispensing head 50 and the dispensing controller 40 corresponding to the jet-type dispensing operation are mounted on the coating apparatus 1. The dispensing controller 40 then transmits the discharge control amount D described in the discharge control program to the discharge drive device 64. The dispensing controller 40 advances and retracts the advance / retract actuator serving as the discharge drive device 64 in accordance with the discharge control amount D. This allows the dispensing head 50 to discharge the liquid material at the operator's desired discharge amount per unit time using the jet-type dispensing operation. The advance / retract actuator is not particularly limited and may be a structure that drives a piston located behind the plunger 57 using air or a spring, or a structure that uses an electromagnet to advance and retract the plunger 57.

[0084] (c) Plunger method

[0085] Figure 5 (c) is a cross-sectional view of the main components of a plunger-type dispensing head 50. In the plunger-type dispensing head 50, a plunger 58 is provided within a metering unit connected to a nozzle 54, sliding relative to the sidewall of a liquid chamber. Advancing the plunger 58 causes the liquid material to be discharged from a discharge port 55 of the nozzle 54. Alternatively, a valve 59 may be provided to switch the metering unit, including the plunger 58, between the liquid chamber and the discharge port 55, as needed. This valve 59 can be switched using a valve actuator (not shown).

[0086] The discharge rate per unit time of the plunger-type dispensing head 50 is controlled by the amount of plunger 58 entering the dispenser per unit time, which is in turn controlled by the rotational speed per unit time of the dispensing motor that reciprocates the plunger 58 within the measuring tube. Therefore, to discharge a desired amount of liquid material per unit time from the dispensing head 50, the operator sets a dispensing control program in the plunger-type dispensing controller 40 that describes the discharge control amount D, which directly or indirectly controls the rotational speed per unit time of the dispensing motor.

[0087] To enable the dispenser 10 to perform a plunger-type dispensing operation, the operator installs the dispensing head 50 and dispensing controller 40 corresponding to the plunger-type dispensing operation on the coating apparatus 1. The dispensing controller 40 then transmits the discharge control amount D described in the discharge control program to the discharge drive 64. Based on the discharge control amount D, the dispensing motor serving as the discharge drive 64 rotates, advancing the plunger 58. This allows the operator to discharge the liquid material from the dispensing head 50 at the desired discharge amount per unit time using the plunger method. Furthermore, as an example of a structure for converting the rotation of the dispensing motor into the forward and backward movement of the plunger 58, a structure in which a ball screw is rotated by a motor, thereby advancing and retracting a nut threaded onto the ball screw, is exemplified, but is not limited to this. Alternatively, the forward and backward movement of the plunger 58 can be controlled by controlling the forward and backward movement of the actuator per unit time using an actuator other than the dispensing motor.

[0088] (d) Air method

[0089] Figure 5 (d) is a cross-sectional view of the main parts of the air-type distribution head 50. The air-type distribution head 50 can discharge the liquid material from the discharge port 55 by supplying pressurized air to the liquid material in the liquid chamber connected to the nozzle 54. An intermediate member (float) called a plunger can also be placed between the liquid material and the air. The discharge amount per unit time of the air-type distribution head 50 can be controlled by the air supply pressure of the air supply device. Therefore, in order to discharge the liquid material of the desired discharge amount per unit time from the distribution head 50, the operator sets a discharge control program in the air-type distribution controller 40 that records the discharge control amount D that directly and indirectly controls the air supply pressure of the air supply device.

[0090] To enable the dispenser 10 to perform an air-dispensing operation, the operator installs the dispensing head 50 and dispensing controller 40 compatible with the air-dispensing method on the coating apparatus 1. The dispensing controller 40 then transmits the discharge control amount D described in the discharge control program to the discharge drive 64. The air supply pressure of the air supply device serving as the discharge drive 64 is increased or decreased based on the discharge control amount D. This allows the dispensing head 50 to discharge the liquid material at the discharge amount per unit time desired by the operator. The air supply device is not particularly limited, and an air supply device using a pressure reducing valve, etc., can be used.

[0091] Furthermore, the dispenser 10 is not limited to the above-mentioned discharge method. As long as the liquid material is discharged from the discharge port 55 of the nozzle 54 and the discharge amount per unit time is controllable, the liquid material can be discharged using the discharge method by using the dispenser 10 corresponding to the discharge method. In addition, depending on the structure of the distribution head 50, there is also a case where the nozzle 54 having the discharge port 55 and the discharge drive device 64 for discharging the liquid material are separately constructed. In this case, the distribution head 50 only needs to have at least the nozzle 54 including the discharge port 55. That is, the "discharge head" defined in this specification preferably has a drive unit such as an actuator, but it is sufficient to have a component including the nozzle 54. In addition, depending on the difference in the dispensing method between the distribution head 50 and the distribution controller 40, there are situations where the timing of the relative movement speed signal that needs to be sent from the robot controller 30 is different. However, as described above, by setting the relative movement speed signal output from the robot controller 30 to a continuously output signal during the execution of the interpolation movement, the relative movement speed signal can be obtained without delay when needed, regardless of the difference in the dispensing method of the distribution controller 40.

[0092] Furthermore, even within the same discharge mode, the dispensing controller 40 can perform discharge control in two different discharge modes: a first mode discharge control and a second mode discharge control. The first mode discharge control is a discharge control mode for line coating, and is particularly a discharge control mode in which the discharge amount of liquid material per unit time is varied according to the relative movement speed V of the dispensing head 50 and the worktable 25 to suppress fluctuations in the coating amount per unit length of the coating line caused by changes in the relative movement speed of the dispensing head 50 and the worktable 25 at the corners of a predetermined coating pattern. Furthermore, the second mode discharge control is a discharge control mode for performing preliminary spraying, test spraying, or dot coating, and is a discharge control mode in which the dispensing head 50 discharges a predetermined discharge amount of liquid material per unit time, regardless of the relative movement speed V of the dispensing head 50 and the worktable 25.

[0093] 《Discharge control in the first mode》

[0094] In order to perform the ejection control of the first mode, the distribution controller 40 has a relational expression or a conversion table representing the relationship between the relative moving speed V and the ejection control amount D of the ejection drive device 64. The relational expression or the conversion table representing the relationship between the relative moving speed V and the ejection control amount D of the ejection drive device 64 is pre-set with the relationship between the relative moving speed V and the ejection control amount D of the ejection drive device 64 so that a coating line with a line width desired by the operator can be drawn and coated. When performing the ejection control of the first mode, the distribution controller 40 receives a speed signal corresponding to the relative moving speed V of the distribution head 50 and the workbench 25 from the robot controller 30 via the cable A2. Then, the distribution controller 40 calculates the relative moving speed V based on the received speed signal, and applies the calculated relative moving speed V to the relational expression or the conversion table, thereby calculating the ejection control amount D for coating a coating line with a line width desired by the coating operator. Furthermore, the dispensing controller 40 outputs a discharge amount control command including the calculated discharge control amount D to the discharge driving device 64, thereby driving the discharge driving device 64 at an amount corresponding to the discharge control amount D. This allows the dispensing head 50 to discharge the liquid material at the coating amount per unit time desired by the operator. Furthermore, the relative movement speed V is a scalar quantity representing the relative movement speed between the dispensing head 50 and the worktable 25.

[0095] Here, refer to Figure 4 Next, the relative movement speed V between the dispensing head 50 and the table 25 under the discharge control of the first mode will be described. Figure 4 The upper part shows the relative moving speed V1 to V2 of the distribution head 50. n The corresponding discharge control amounts D1 to D n In addition, the relative moving speed V1~V n Since it is described as a scalar (absolute value), the same conversion table can be used during acceleration and deceleration. Figure 4 The lower part shows that the moving speed of the distribution head 50 is decelerated from V1 to V n . A graph of the discharge control amount D when . Furthermore, the following is an example for explanation: the dispensing head 50 and the dispensing controller 40 correspond to a plunger method, the discharge drive device 64 is a discharge motor that moves the plunger forward and backward, the discharge control amount D of the discharge drive device 64 is the rotation speed per unit time of the discharge motor, and the discharge amount of the liquid material from the dispensing head 50 is controlled by controlling the rotation speed per unit time of the discharge motor (dispensing control amount D).

[0096] exist Figure 4In the initial state (before time t1), the dispensing head 50 moves at a relative movement speed V1, and the dispensing motor serving as the dispensing drive device 64 is controlled at a rotational speed D1 per unit time. The relative movement speed V of the dispensing head 50 is transmitted from the robot controller 30 to the dispensing controller 40 for each Δt. If the relative movement speed V changes, the dispensing controller 40 converts the received relative movement speed V into the corresponding dispensing control amount D based on the conversion table.

[0097] When the relative moving speed V of the dispensing head 50 decreases to V2, the dispensing controller 40 issues a deceleration command, and the rotation speed per unit time of the dispensing drive device 64 decreases to D2. Similarly, when the relative moving speed V decreases to V3, V4, ..., V n When the self-distribution controller 40 issues a deceleration command in sequence, the discharge drive device 64 reduces the rotation speed per unit time to D3, D4, ..., D n In addition, when the relative moving speed V of the distribution head 50 reaches and maintains V n When the speed change command is not issued from the distribution controller 40, the ejection drive device 64 maintains the rotation speed per unit time at D n .

[0098] exist Figure 4 The lower section of FIGURE 2 illustrates a case where the relative movement speed V of the dispensing head 50 decreases linearly. However, even when the relative movement speed V of the dispensing head 50 changes nonlinearly, the same method as described above can be used to control the dispensing drive device 64. In other words, the dispensing control amount D corresponding to the relative movement speed V of the dispensing head 50 is selected from the conversion table, and the dispensing drive device 64 is controlled based on the dispensing control amount D.

[0099] In addition, it is also possible to use a relational expression and a conversion table together, for example, using a conversion table within a fixed speed range and using a relational expression when out of the fixed speed range. Furthermore, the relational expression or the conversion table needs to be prepared in advance based on theoretical values or experimental values. The relational expression or the conversion table preferably determines five or more different discharge volumes in stages. In addition, the relative movement speed V of the distribution head 50 continuously indicates the timing of the change of the relative movement speed V in the coating program during the interpolation movement, or is sent from the robot controller 30 to the distribution controller 40 at each specified time interval. The acquisition of the relative movement speed V by the distribution controller 40 can also be performed by a polling method in which a request is sent from the distribution controller 40 to the robot controller 30.

[0100] 《Discharge control in the second mode》

[0101] The second mode of discharge control is a discharge control mode in which the distribution head 50 discharges a predetermined discharge amount of liquid material per unit time, regardless of the relative movement speed V between the distribution head 50 and the worktable 25. The operator can determine the discharge control amount D corresponding to the desired discharge amount per unit time in the second mode of discharge control in advance through experiments, etc., and set the discharge control program. When the second mode of discharge control is set, the distribution controller 40 drives the discharge drive device 64 at the discharge control amount D under the second mode of discharge control based on the discharge control program. As a result, the operator can discharge the liquid material at the desired discharge amount per unit time in the second mode of discharge control.

[0102] Coating Operation

[0103] The coating device 1 automatically and continuously performs a series of coating operations by executing a pre-set coating program. Figure 6 The following describes a series of coating operations including line coating and pre-spray coating of a prescribed coating pattern with corners. In this coating operation, first, a pre-spray coating of a prescribed amount of liquid material is performed on the pre-spray area 27, and then line coating is performed according to a prescribed coating pattern. Thereafter, pre-spray coating and line discharge based on the prescribed coating pattern are continuously repeated. The illustrated coating procedure describes a series of coating operations including a combination of pre-spray coating and line coating. Furthermore, Figure 6 This is a diagram for explaining a coating operation in which a series of coating operations are performed alternately, namely, line coating with a coating pattern having corners and preliminary spray coating.

[0104] When performing the coating operation, the robot controller 30 first outputs a switching signal to the distribution controller 40 to switch to the second mode of discharge control based on the coating program. As a result, the distribution controller 40 switches the discharge action from the first mode of discharge control to the second mode of discharge control. Secondly, the robot controller 30 moves the distribution head 50 relatively to the pre-spraying area 27 based on the coating program. Under the second mode of discharge control, the discharge amount per unit time is predetermined regardless of the relative movement speed V between the distribution head 50 and the workbench 25. Therefore, even when pre-spraying is performed with the distribution head 50 stopped on the pre-spraying area 27, the liquid material of the specified discharge amount desired by the operator can be discharged in the pre-spraying area 27.

[0105] By performing the preliminary spraying in this manner, the liquid material adhering to the outer surface of the nozzle 54 or the liquid material solidified near the discharge port 55 can be pre-sprayed. This allows the state and discharge amount of the liquid material discharged from the nozzle 54 to be constant, and reduces the occurrence of coating defects during the line coating performed after the preliminary spraying.

[0106] In addition, when the preliminary spray coating is completed, the robot controller 30 outputs a switching signal from the second mode of discharge control to the first mode of discharge control to the distribution controller 40 based on the coating program. As a result, the distribution controller 40 can determine the discharge amount per unit time based on the relative movement speed V of the distribution head 50. Then, based on the coating program, the robot controller 30 causes the distribution head 50 to move relative to the trajectory of the prescribed coating pattern, and sends a speed signal corresponding to the relative movement speed V of the distribution head 50 to the distribution controller 40. The distribution controller 40 calculates the relative movement speed V based on the received speed signal, and calculates the discharge control amount D for driving the discharge drive device 64 based on the calculated relative movement speed V. Then, the discharge control amount D is output from the distribution controller 40 to the discharge drive device 64, and the discharge drive device 64 discharges the liquid material in the discharge portion 53 from the nozzle 54 based on the discharge control amount D. In this way, the distribution controller 40 performs the coating action of line coating through the discharge control of the first mode. Therefore, even when the prescribed coating pattern has a corner and the relative movement speed V of the distribution head 50 changes at the corner, line coating can be performed in a manner that makes the line width of the coating line fixed.

[0107] Below, refer to Figures 6-8 , a series of coating operations of the coating device 1 of this embodiment will be described. Furthermore, the coating device 1 of this embodiment starts the coating operation when the start button of the coating operation is pressed by the operator, and automatically and continuously repeats a fixed coating action until the coating operation is ended according to the command of the coating program or the end button of the coating operation is pressed by the operator, thereby coating a plurality of workpieces 26 with liquid material. Here, the so-called "series of coating operations" refers to the coating operations described in the coating program. When the coating operation is an operation with one workpiece as the object, it refers to the line coating and pre-spraying set for one workpiece. When the coating operation is an operation with multiple workpieces as the object, it refers to the line coating and pre-spraying set for multiple workpieces. The workpiece 26 as the coating object is not particularly limited. For example, one or more semiconductor chips, one or more substrates equipped with one semiconductor chip, and one or more substrates equipped with multiple semiconductor chips are set as the workpiece.

[0108] Example 1

[0109] First, yes Figure 6 The series of coating operations shown in FIG. Figure 6In the series of coating operations shown, line coating of a predetermined coating pattern on the workpiece 26 and pre-spray coating on the pre-spray area 27 are performed alternately. Before starting the actual coating operation, the operator first sets (programs) the distribution controller 40. Figure 6 The ejection amount per unit time of the rectangular coating pattern shown and the ejection amount per unit time of the preliminary ejection area 27 are shown.

[0110] The line coating of the quadrilateral coating pattern is performed by the discharge control of the first mode. The operator can set the discharge control of the first mode, for example, as follows. The operator repeatedly adjusts the discharge control amount D in such a way that the line width of the coating line becomes the desired line width Wa at the relative moving speed Va of the distribution head 50 desired in the line coating, and determines the discharge control amount Da at which the line width of the coating line becomes Wa. Secondly, the operator repeatedly adjusts the discharge control amount D in such a way that the line width of the coating line becomes the desired line width Wa at a relative moving speed Vb different from the relative moving speed Va, and determines the discharge control amount Db at which the line width of the coating line becomes Wa. Then, the operator inputs the obtained relative moving speeds Va, Vb, and the discharge control amounts Da, Db into the distribution controller 40. Thus, a linear function representing the relationship between the relative moving speed V at which the line width of the coating line becomes Wa and the discharge control amount D is calculated by the distribution controller 40. The distribution controller 40 stores the calculated linear function in the storage device 31 .

[0111] Furthermore, in the above embodiment, an example configuration is shown in which an operator inputs the relative movement speeds Va, Vb and the discharge control amounts Da, Db into the distribution controller 40, and the distribution controller 40 calculates a linear function representing the relationship between the relative movement speed V and the discharge control amount D corresponding to the line width Wa of the coating line desired by the operator. However, the present invention is not limited to this configuration. For example, a configuration may be provided in which an operator calculates a linear function representing the relationship between the relative movement speed V and the discharge control amount D corresponding to the desired coating line width Wa based on the relative movement speeds Va, Vb and the discharge control amounts Da, Db, and causes the distribution controller 40 to store this linear function.

[0112] In addition, when the relationship between the relative moving speed V and the discharge control amount D under the discharge control of the first mode is set for the distribution controller 40, it is preferred to set one of the relative moving speeds Va and Vb to a value greater than the actual maximum speed of the line coating of the coating pattern, and to set the other to a value less than the actual minimum speed. As a result, it is less likely that an error will occur between the line width W of the coating line desired by the operator and the line width of the coating line actually applied. In addition, by obtaining the relationship between the relative moving speed V and the discharge control amount D under the discharge control of the first mode outside the range of the relative moving speed V for actually performing line coating on the coating pattern, it is possible to effectively prevent the relative moving speed or discharge control amount obtained based on the above relationship from falling outside the range of the operation of the dispenser 10 or the robot 20 in order to perform coating with the line width of the coating line desired by the operator when the coating operation is actually performed.

[0113] Furthermore, if it is known in advance that the discharge control amount D becomes zero (D0) when the relative moving speed V is zero (V0), only one combination of the relative moving speed Va and the discharge control amount Da that can be used for coating with the line width desired by the operator can be obtained, and the above relationship can be calculated based on the combination of the relative moving speeds V0, Va and the discharge control amounts D0, Da. In this case, as described above, the relative moving speed Va is preferably set to a value greater than the actual maximum speed when the coating pattern is line-coated. Furthermore, the relationship between the relative moving speed V and the discharge control amount D under the discharge control of the first mode can also be defined by a function other than a linear function, and can also be obtained by a method other than the above method.

[0114] The ejection operation in the preliminary spraying area 27 is performed by the second mode ejection control that performs ejection regardless of the relative movement speed V. The ejection control amount D in the second mode ejection control can be set to the ejection control amount Dc per unit time according to the ejection amount desired by the operator for preliminary spraying.

[0115] Next, the operator sets up the robot controller 30. Specifically, the operator sets the coating program stored in the robot controller 30. The coating program primarily contains commands for PTP movement, interpolation movement, switching between discharge on / off, and switching between first and second mode discharge control, enabling the desired series of coating operations. For interpolation movement, the relative movement speed V is also set. The settings of the distribution controller 40 and the robot controller 30 can be performed either first or simultaneously.

[0116] Secondly, Figure 61 and 2 will now be described the operation of the coating device 1 in the series of coating operations shown. The robot controller 30 performs pre-spraying, and thus sends a switching signal for switching to the second mode to the distribution controller 40. Thus, the discharge control of the distribution controller 40 is set to the discharge control of the second mode for discharging a prescribed discharge amount of liquid material regardless of the relative movement speed V. Next, the robot controller 30 causes the distribution head 50 to move relatively to the pre-spraying area 27 through PTP movement. When the distribution head 50 moves to the pre-spraying area 27, the robot controller 30 sends a discharge start instruction to the distribution controller 40. Thus, the distribution controller 40 drives the discharge drive device 64 based on the discharge control amount Dc pre-set under the discharge control of the second mode, so that the distribution head 50 discharges the liquid material in the discharge amount per unit time required for the pre-spraying.

[0117] When the pre-spraying is finished, Figure 6 As shown, a rectangular coating pattern is applied by scribing, and therefore the robot controller 30 sends a switching signal for switching from the second mode of discharge control to the first mode of discharge control to the distribution controller 40 based on the coating program. As a result, the discharge control of the distribution controller 40 is set to the first mode of discharge control in which the discharge control amount D is determined based on the relative movement speed V received from the robot controller 30.

[0118] The robot controller 30 moves the dispensing head 50 relatively to the coating program by PTP movement. Figure 6 The coating pattern shown is at the starting point A. Then, the robot controller 30 moves the dispensing head 50 and the table 25 relative to each other at a preset relative movement speed V based on the coating program, and transmits a speed signal corresponding to the relative movement speed V to the dispensing controller 40 .

[0119] The distribution controller 40 converts the speed signal received from the robot controller 30 into a relative movement speed V. Then, the distribution controller 40 converts the speed signal received from the robot controller 30 into a relative movement speed V. Then, the distribution controller 40 converts the speed signal into a relative movement speed V based on the current relative movement speed V between the distribution head 50 and the worktable 25 according to the relationship between the relative movement speed V and the discharge control amount D stored in advance for the discharge control of the first mode. cur , and calculate the discharge control amount D for the coating line width W desired by the coating operator cur Then, the distribution controller 40 calculates the discharge control amount D cur The discharge drive device 64 is driven to cause the dispensing head 50 to discharge the liquid material in an amount per unit time required for line coating.

[0120] In addition, Figure 6In the coating pattern shown, line coating is performed in the order of ABCDEFGHIA. The robot controller 30 interpolates the dispensing head 50 in this order. In this case, the robot controller 30 controls the relative movement speed V between the dispensing head 50 and the worktable 25 so that the line width W of the coating line is not disturbed at the corners of the coating pattern.

[0121] Specifically, the robot controller 30 accelerates the dispensing head 50 from the coating start point A toward point B at an acceleration rate VA1 until the relative movement speed reaches V1. Once the relative movement speed reaches V1, the dispensing head 50 is moved relative to the remaining line AB at the relative movement speed V1, thereby performing line coating. Furthermore, when the dispensing head 50 reaches point B, the robot controller 30 decelerates the dispensing head 50 at a deceleration rate VA2 at the corner BC until the relative movement speed reaches V2. Once the relative movement speed reaches V2, the dispensing head 50 is moved relative to the remaining corner BC at the relative movement speed V2, thereby performing line coating. Furthermore, when the dispensing head 50 reaches point C, the robot controller 30 accelerates the dispensing head 50 at an acceleration rate VA1 at the line CD until the relative movement speed reaches V1. Once the relative movement speed reaches V1, the dispensing head 50 is moved relative to the remaining line CD at the relative movement speed V1, thereby performing line coating. Furthermore, the coating operation is similarly performed on the corners DE, FG, HI and the straight portions EF, GH, IA.

[0122] In addition, during the interpolation movement (at least during the period of line coating of the coating pattern), the robot controller 30 repeatedly outputs the current relative movement speed V to the distribution controller 40. cur The corresponding speed signal (pulse signal). Therefore, for example, Figure 6 In the example shown, the robot controller 30 continuously outputs the current relative movement speed V during the period of line coating of the coating pattern. cur The corresponding speed signal is the relative moving speed V of the dispensing head 50 near the corner. cur If the actual relative moving speed V near the corner changes, cur The corresponding speed signal is output to the distribution controller 40. Then, the distribution controller 40 calculates the current relative movement speed V according to the relationship between the relative movement speed V and the discharge control amount D under the discharge control of the first mode stored in the distribution controller 40 based on the received speed signal at a timing suitable for the distribution controller 40. cur Corresponding discharge control amount D cur Therefore, the distribution controller 40 can control the relative movement speed V of the distribution head 50 even near the corner. curWhen the actual relative movement speed V in the vicinity of the corner is changed, the actual relative movement speed V in the vicinity of the corner can be calculated immediately at a timing suitable for the distribution controller 40. cur Corresponding discharge control amount D cur , the dispenser 10 can immediately discharge the actual relative moving speed V near the corner at a timing suitable for the distribution controller 40 cur As a result, the dispenser 10 can discharge the liquid material in a discharge amount corresponding to the desired line width W, whether the dispensing head 50 moves at a constant speed or is accelerated or decelerated.

[0123] Then, when the dispensing head 50 reaches the coating end point A, it stops and the dispensing operation is completed through the first mode of dispensing control. The robot controller 30 then sends a switching signal to the dispensing controller 40 to switch to the second mode and causes the dispensing head 50 to move relative to the preliminary spraying area 27 through PTP movement. The preliminary spraying and line coating are then repeated in the same manner.

[0124] Furthermore, the robot controller 30 does not move the dispensing head 50 relative to the relative movement speed V set by the operator in the coating program, but can move the dispensing head 50 relative to the relative movement speed V that is optimized from the perspectives of safety or operating efficiency. Specifically, in addition to the relative movement speed set by the operator for the coating program, the robot controller 30 can automatically add the acceleration at the beginning of the coating operation or the deceleration at the end of the coating operation. In addition, in addition to the relative movement speed set by the operator for the coating program, the robot controller 30 can also automatically calculate and add the acceleration VA1 or deceleration VA2 between the straight portion and the corner of the coating pattern based on the difference between the relative movement speeds V set by the operator before and after the corner. Furthermore, the robot controller 30 can also optimize (correct) the relative movement speed V set by the operator so that the dispensing head 50 moves smoothly along the path of the coating pattern. In this way, when the robot controller 30 automatically corrects or adds the relative movement speed V or acceleration VA described by the operator in the coating program, it is preferred to output a speed signal corresponding to the relative movement speed V at which the robot controller 30 actually moves the dispensing head 50 relative to each other, rather than outputting a speed signal to the robot controller 30 corresponding to the relative movement speed set by the operator for the coating program.

[0125] exist Figure 6In the series of coating operations shown, the discharge control of the first mode and the discharge control of the second mode can be switched in the middle of the series of coating operations. Therefore, during the series of coating operations, the liquid material can be discharged while the dispensing head 50 is stopped. Even if the space in the preliminary spraying area 27 is narrow, preliminary spraying can be performed during the discharge operation. In addition, since the process can be continuously transferred from preliminary spraying to line coating, line coating can be performed while the nozzle 54 is in good condition after preliminary spraying, and the defect rate can be reduced.

[0126] Furthermore, acceleration VA1 and deceleration VA2 can be the same speed (scalar) or different speeds. Furthermore, the conditions at the start and end of coating are different from those at corners, so different acceleration and deceleration can be used for each. Alternatively, a test spray can be performed instead of a pre-spray. This test spray is used to measure the discharge and coating status using a scale or other measuring device placed in the pre-spray area 27. This measures the discharge volume and provides warnings or feedback.

[0127] Example 2

[0128] Then, to Figure 7 The operation of the coating device 1 in the series of coating operations shown in FIG. Figure 7 In the series of coating operations shown, Figure 7 The line width of the straight line portion JK in the quadrilateral coating pattern shown is coated thicker than that of other portions. Figure 7 In the series of coating operations shown, no preliminary spraying is performed, and the coating is repeated continuously. Figure 7 The coating action of the coating pattern on the quadrilateral shown in FIG. Figure 6 The following describes the different aspects of the series of coating operations shown. Figure 7 A series of coating operations are shown.

[0129] exist Figure 7 In the series of coating operations shown, the straight portion JK has no corners, so the dispensing head 50 can be relatively moved at a fixed relative movement speed V. Therefore, the operator sets the coating program of the robot controller 30 so that the second mode of discharge control is performed in the straight portion JK, dispensing the liquid material at a predetermined discharge amount regardless of the relative movement speed V. In addition, the operator predetermines, through experiments, the relative movement speed V of the dispensing head 50 that can be set in the straight portion JK. JK The desired line width W of the bottom coating JK The discharge control amount D of the coating line corresponding to the discharge amount per unit time JK , and set it as the discharge control amount per unit time D under the discharge control of the second mode JKThe distribution controller 40 is set. In addition, the portion other than the straight line portion JK of the coating pattern can also be set with Figure 6 The robot controller 30 and the dispenser controller 40 are set similarly to the coating operation of the coating pattern shown.

[0130] Secondly, Figure 7 The series of coating operations shown in FIG. Figure 7 In the series of coating operations shown, from coating start point A to point J, the Figure 6 In the illustrated coating pattern, the dispensing head 50 is relatively moved, and the dispensing control of the first mode is performed in which the dispensing control amount D per unit time is determined according to the relative movement speed V of the dispensing head 50 .

[0131] When the dispensing head 50 reaches point J, the robot controller 30 outputs a switching signal to the dispensing controller 40 to switch to the second mode of discharge control based on the coating program. As a result, the dispensing controller 40 is set to discharge the discharge control amount D corresponding to the discharge amount per unit time regardless of the relative movement speed V of the dispensing head 50. JK In addition, the robot controller 30 moves the dispensing head 50 at a relative movement speed V in the straight section JK based on the coating program. JK Relative movement. As mentioned above, the discharge control amount D JK When the dispensing head 50 is moved at a relative speed V JK In order to make the coating line width become the line width W of the straight portion JK desired by the operator when moving JK The control amount, therefore, the coating device 1 can be used to coat the line width W as desired by the operator. JK Coat the straight portion JK.

[0132] Thereafter, when the dispensing head 50 reaches point K, the robot controller 30 outputs a switching signal to the dispensing controller 40, switching to the first mode of discharge control, based on the coating program. The dispensing controller 40 is thereby set to the first mode of discharge control, in which the discharge control amount D is determined based on the relative movement speed V of the dispensing head 50. As a result, in portions of the coating pattern other than the linear portion JK, the dispensing controller 40 can control the discharge control amount D based on the relative movement speed V of the dispensing head 50. This allows the dispensing controller 40 to discharge a discharge amount of liquid material that achieves the desired line width W, even when the relative movement speed V of the dispensing head 50 varies.

[0133] like Figure 7As shown in FIG, when the line width of a part of the straight line portion is changed during a series of coating operations, the discharge control of the first mode and the discharge control of the second mode are switched during a series of coating operations, thereby enabling the coating of straight lines with different line widths to be continued in the coating operation. Figure 7 As shown, by performing the second mode of discharge control during the portion where the relative moving speed V does not change, there is no need to determine the relationship between the relative moving speed V and the discharge control amount D in this portion, thereby reducing the operator's effort in setting the discharge control program. Furthermore, by automatically switching between the first mode of discharge control and the second mode of discharge control based on the coating program, it is possible to continuously coat straight sections EJ and JK, or straight sections JK and KF, with different line widths without interruption.

[0134] Furthermore, in Figure 7 In the example shown, the relative movement speed V of the dispensing head 50 may be varied or maintained constant between the case of the first mode discharge control and the case of the second mode discharge control. Furthermore, the configuration is not limited to one in which the coating line width of the straight portion JK is thicker than that of other portions, and may be thinner than other portions, or may be the same as that of other portions.

[0135] Example 3

[0136] Then, to Figure 8 The series of coating operations shown in FIG. Figure 8 In the series of coating operations shown, pre-spray coating is not performed, and line coating of a quadrilateral coating pattern and dot coating of a dot shape consisting of three dots are performed alternately.

[0137] exist Figure 8 In the series of coating operations shown, the discharge control for line coating of the quadrilateral coating pattern is performed by the discharge control of the first mode, and the discharge control for dot coating is performed by the discharge control of the second mode. The operator can set the coating program of the robot controller 30 in such a way that the discharge control for line coating of the quadrilateral coating pattern is performed by the discharge control of the first mode, and the discharge control for dot coating is performed by the discharge control of the second mode. Here, the quadrilateral coating pattern and the Figure 6 Since the coating pattern shown is the same, the operator can set the robot controller 30 and the distribution controller 40 for the discharge control in the first mode in the same manner as in Example 1. Furthermore, for the discharge control in the second mode, the operator can determine the discharge control amount D in advance through experiments, etc., so that the discharge amount of liquid material required for the coating point can be discharged, and can set the distribution controller 40 accordingly.

[0138] exist Figure 8In the series of coating operations shown, the robot controller 30 and the distribution controller 40 are Figure 6 Similarly, as with the line coating of the coating pattern shown, line coating of the rectangular coating pattern is performed using the first mode of discharge control. Then, when the line coating of the four-sided coating pattern is completed, the robot controller 30 outputs a switching signal to the distribution controller 40 to switch to the second mode of discharge control based on the coating program. As a result, the discharge control performed by the distribution controller 40 is changed to the second mode of discharge control. Next, after the robot controller 30 relatively moves the distribution head 50 to point J through PTP movement, it stops the distribution head 50 at point J and sends a discharge start command to the distribution controller 40. Thus, with the distribution head 50 stopped at point J, the distribution controller 40 drives the discharge drive device 64 at the discharge control amount D predetermined in the second mode of discharge control. This allows the distribution head 50 to discharge the liquid material at the discharge amount per unit time desired by the operator. Similarly, the robot controller 30 and the distribution controller 40 also perform point coating at points K and L. Then, when dot coating is completed for points K and L, the robot controller 30 causes the dispensing head to move relatively to point A through PTP movement and sends a switching signal to the dispensing controller 40 to switch to the first mode of discharge control. This switches the discharge control performed by the dispensing controller 40 to the first mode of discharge control. Thereafter, line coating and dot coating are continuously repeated in a predetermined coating pattern.

[0139] like Figure 8 As shown, in a series of coating operations in which line coating and dot coating of a predetermined coating pattern including corners are alternately performed, the discharge control mode is automatically switched so that the line coating is performed by the discharge control of the first mode and the dot coating is performed by the discharge control of the second mode. Figure 8 As shown, a series of coating operations are automatically and continuously performed, and the series of coating operations alternately perform line coating and dot coating of a predetermined coating pattern including corners.

[0140] Example 4

[0141] Then, to Figure 9 The coating operation of the coating device 1 in the series of coating operations shown in FIG. Figure 9 In the series of coating operations shown in FIG, pre-spray coating, line coating of the first coating pattern P1, pre-spray coating and line coating of the second coating pattern P2 are repeated in sequence. Figure 9 As shown, both coating patterns P1 and P2 are coating patterns having corners, but the coating line width of the second coating pattern P2 is wider than the coating line width of the first coating pattern P1.

[0142] Here, the coating device 1 of this embodiment can set a plurality of different discharge methods as the discharge control of the first mode. Similarly, the coating device 1 can set a plurality of different discharge methods as the discharge control of the second mode. For example, Figure 9 In the example shown, the operator can set the relationship between the relative moving speed V and the discharge control amount D so that the line width of the coating line of the line coating becomes W1 in the distribution controller 40. W1 The relationship between the discharge control X1 in the first mode and the relative moving speed V and the discharge control amount D at which the line width of the coating line in the scribe coating becomes W2 is shown in R. W2 The first mode of discharge control X2 is shown.

[0143] Furthermore, in the coating device 1 of this embodiment, when multiple first-mode discharge controls or second-mode discharge controls are set with different discharge methods, any combination of the first-mode discharge control and the second-mode discharge control can be set as a channel. For example, when X1 and X2 are set as the first-mode discharge controls and Y1 and Y2 are set as the second-mode discharge controls, the first-mode discharge control X1 and the second-mode discharge control Y1 can be set as channel C1, and the first-mode discharge control X2 and the second-mode discharge control Y2 can be set as channel C2. Thus, by setting the coating program to repeatedly execute channel C1 and channel C2, the coating device 1 can repeatedly execute the first-mode discharge control X1, the second-mode discharge control Y1, the first-mode discharge control X2, and the second-mode discharge control Y2 in sequence. Furthermore, in the coating device 1, it is also possible to set multiple discharge controls for either the first mode or the second mode. Furthermore, the channel settings are not particularly limited. For example, the discharge control X1 for the first mode and the discharge control Y1 for the second mode may be set as channel C1, and the discharge control X2 for the first mode and the discharge control Y1 for the second mode may be set as channel C2. The same discharge control mode may be set for multiple channels, and multiple discharge controls of the same mode may be set for the same channel.

[0144] exist Figure 9In the series of coating operations shown, pre-spraying, line coating of the first coating pattern P1 with a coating line width of W1, pre-spraying, and line coating of the second coating pattern P2 with a coating line width of W2 (W2>W1) are repeated in sequence. In this case, the operator sets the ejection control Y1 of the second mode for pre-spraying and the ejection control X1 of the first mode with a coating line width of W1 to channel C1 in the distribution controller 40, and sets the ejection control Y1 of the second mode for pre-spraying and the ejection control X2 of the first mode with a coating line width of W2 to channel C2. In addition, the operator sets the coating program stored in the robot controller 30 in such a way that the ejection control of channel C1 is performed on the first coating pattern P1 and the ejection control of channel C2 is performed on the second coating pattern P2.

[0145] In this case, the robot controller 30 first sends an instruction to the distribution controller 40 in a manner that performs discharge control of the channel C1 based on the coating program. Then, the robot controller 30 moves the distribution head 50 relatively to the pre-spraying area 27 based on the coating program, and causes the distribution controller 40 to perform pre-spraying using the discharge control Y1 of the second mode. Next, the robot controller 30 moves the distribution head 50 relatively to the coating starting point of the first coating pattern P1, and causes the distribution controller 40 to perform line coating of the first coating pattern P1 using the discharge control X1 of the first mode. The discharge control X1 of the first mode determines the relationship R between the relative movement speed V of the distribution head 50 and the discharge control amount D in such a way that the line width of the coating line becomes W1. W1 , thus the coating device 1 can scribe a coating line having a coating line width W1 in the first coating pattern P1.

[0146] In addition, when the coating of the first coating pattern P1 is completed, the robot controller 30 sends an instruction to the distribution controller 40 in a manner of performing discharge control of the channel C2 based on the coating program. Then, the robot controller 30 moves the distribution head 50 relatively to the pre-spraying area 27 based on the coating program, and causes the distribution controller 40 to perform pre-spraying using the discharge control Y1 of the second mode. In addition, the robot controller 30 moves the distribution head 50 relatively to the coating starting point of the second coating pattern P2, and causes the distribution controller 40 to perform line coating of the second coating pattern P2 using the discharge control X2 of the first mode. The discharge control X2 of the first mode determines the relationship R between the relative movement speed V of the distribution head 50 and the discharge control amount D in such a way that the line width of the coating line becomes W2. W2 , thus the coating device 1 can scribe a coating line with a coating line width W2 in the second coating pattern P2.

[0147] Furthermore, the relative moving speed V of the dispensing head 50 may be the same or different in the first coating pattern P1 and the second coating pattern P2. Figure 9 In the example shown, the following structure may be adopted: the second mode ejection control Y1 for pre-spraying is described for only one of the channels C1 and C2, and the second mode ejection control Y1 is performed for the other channel by citing the channel in which the second mode ejection control Y1 is described.

[0148] Thus, in the coating device 1 of Example 4, multiple first-mode ejection controls and second-mode ejection controls with different ejection methods can be set, thereby combining multiple coating patterns with different line widths or multiple pre-spray coatings with different ejection amounts to perform a series of coating operations.

[0149] As described above, in the embodiment of the present invention, during a series of coating operations based on a coating program, it is possible to switch between a first mode of discharge control, in which the amount of liquid material discharged per unit time by the dispensing head 50 is changed based on the relative movement speed V between the dispensing head 50 and the worktable 25, and a second mode of discharge control, in which the dispensing head 50 discharges a predetermined amount of liquid material per unit time regardless of the relative movement speed V. This allows coating operations that have not been conventionally possible, such as, for example, Figures 6-8 As shown, there are a series of coating operations of repeating line coating and pre-spray coating of a specified coating pattern with corners, a series of coating operations of changing the line width of a part of the straight line portion in the line coating of the specified coating pattern with corners, a series of coating operations of repeating line coating and dot coating of the specified coating pattern with corners, and a series of coating operations of performing line coating of multiple coating patterns with different line widths.

[0150] While preferred embodiments of the present invention have been described above, the technical scope of the present invention is not limited to the above embodiments. Various changes and improvements can be made to the above embodiments, and such changes and improvements are also included in the technical scope of the present invention.

[0151] For example, in the above Figure 6 In the embodiment 1 shown, a series of coating operations of alternately performing line coating of a predetermined coating pattern and pre-spray coating is described, but it is not limited to this. For example, a structure may be set to alternately perform the following operations, that is, after performing line coating of a predetermined coating pattern on a plurality of workpieces 26 a predetermined number of times, pre-spray coating is performed, and then, similarly, after performing line coating of a predetermined coating pattern on the workpieces 26 a predetermined number of times, pre-spray coating is performed. For example, in Figure 9In the fourth embodiment shown, preliminary spraying, line coating of the first coating pattern P1, preliminary spraying, and line coating of the second coating pattern P2 are repeated in sequence. However, a configuration in which preliminary spraying, line coating of the first coating pattern P1, and line coating of the second coating pattern P2 are repeated in sequence is also possible. Furthermore, a configuration in which preliminary spraying is interrupted midway through line coating of a predetermined coating pattern and preliminary spraying is performed is also possible. Furthermore, a configuration in which preliminary spraying is performed at fixed intervals is also possible. The frequency or timing of preliminary spraying can be appropriately set by the operator based on the coating procedure and the liquid material being applied.

[0152] In addition, the timing of the robot controller 30 outputting the switching signal of the ejection control mode and the timing of the distribution controller 40 switching the ejection control mode after receiving the switching signal are not limited to the above timing. As long as it does not hinder the ejection / coating after the change of the ejection control mode, it can also be set to a timing different from the above embodiment.

[0153] Furthermore, in the above embodiment, a configuration is illustrated in which the first mode of discharge control is performed for line coating of a coating pattern having corners, in which the discharge control amount D is varied according to the relative movement speed V. However, a configuration may also be employed in which, when the relative movement speed varies in portions other than corners, the first mode of discharge control is performed in those portions. For example, when the relative movement speed needs to vary in a straight portion, the first mode of discharge control can be performed for such a coating pattern.

[0154] In addition, in the above embodiment, PTP movement and interpolation movement are used separately from the perspective of efficiency. However, a configuration in which interpolation movement is performed in part or all of the above PTP movement can also be used. In Examples 1 to 4, the second mode of coating is exemplified by the use of any of pre-spraying, test spraying, line coating, and dot coating. However, several coating methods can also be used in a series of coating operations as the second mode of coating. In addition, coating methods other than the above can also be used as the second mode of coating as needed.

[0155] Explanation of symbols

[0156] 1: Coating device

[0157] 10: Allocator

[0158] 20: Robot

[0159] 21: X-axis moving device

[0160] 22: Y-axis moving device

[0161] 23: Head (Z-axis moving device)

[0162] 24: Pedestal

[0163] 25: Workpiece holding device (workbench)

[0164] 26: Artifact

[0165] 27: Pre-spray area (adjust coating area)

[0166] 28: Mobile components

[0167] 30: Robot controller

[0168] 31: Storage device

[0169] 32: Computing device

[0170] 40: Assign Controller

[0171] 50: Distribution head

[0172] 53: Discharge unit

[0173] 54: Nozzle

[0174] 55: Spit out

[0175] 56: Screw

[0176] 57: Plunger

[0177] 58: Plunger

[0178] 59: Valve

[0179] 61: X-axis drive source

[0180] 62: Y-axis drive source

[0181] 63: Z-axis drive source

[0182] 64: Discharge drive device

[0183] 81. A1, A2, B: Cables.

Claims

1. A liquid material coating device, wherein: have: a dispensing head for dispensing liquid material; a robot that moves the dispensing head relative to the workpiece; a movement control unit that controls the relative movement of the dispensing head and the workpiece based on a coating program; and a discharge control unit that controls the discharge action of the liquid material from the discharge head, The movement control unit and the discharge control unit cooperate to apply the liquid material to the workpiece in a predetermined coating pattern. The movement control unit is configured on the robot, The discharging head is composed of a plurality of discharging heads with different discharging modes, and a selected discharging head can be attached to and detached from the robot. The discharge control unit is composed of a plurality of discharge control units corresponding to the discharge heads of the different discharge modes, and one discharge control unit corresponding to the selected discharge head is detachably connected to the robot. The movement control unit is configured to be capable of executing PTP movement for performing the relative movement to the designated coordinates regardless of the path and interpolation movement for performing the relative movement along a predetermined path. Furthermore, the movement control unit is configured to continuously output a speed signal corresponding to the relative movement speed of the ejection head and the workpiece to the ejection control unit during the interpolation movement. The discharge control unit calculates a discharge control amount corresponding to the selected one discharge head based on the speed signal received from the movement control unit, and outputs a discharge control command including the discharge control amount to the discharge head.

2. The liquid material coating device according to claim 1, wherein: The speed signal is a pulse signal whose period indicates the magnitude of the speed.

3. The liquid material coating device according to claim 1 or 2, wherein: The robot and the discharge control unit are connected by a cable, and a speed signal is transmitted from the movement control unit to the discharge control unit via the cable.

4. The liquid material coating device according to claim 1 or 2, wherein: The relative movement speed includes a relative movement speed pre-input into the coating program for coating the liquid material in the coating pattern, and a relative movement speed automatically calculated based on the relative movement speed pre-input into the coating program in order to supplement the relative movement speed pre-input into the coating program.

5. The liquid material coating device according to claim 1 or 2, wherein: The discharge control unit is configured to be capable of executing a first pattern of discharge control for changing a discharge amount per unit time of the discharge head based on the relative movement speed.

6. The liquid material coating device according to claim 5, wherein: In the first mode, the discharge amount per unit time of the discharge head is changed so that line coating is performed on a coating line having a fixed coating amount per unit length.

7. The liquid material coating device according to claim 5, wherein: The discharge control unit is configured to be capable of switching between a second mode of discharge control for causing the discharge head to discharge at a predetermined discharge amount per unit time regardless of the relative movement speed and the first mode of discharge control.

8. The liquid material coating device according to claim 7, wherein: The discharge control unit is configured to switch between the first mode of discharge control and the second mode of discharge control by receiving a signal from a movement control unit based on the coating program.

9. The liquid material coating device according to claim 1 or 2, wherein: The plurality of different discharge methods include two or more discharge methods selected from the group consisting of a screw method, an injection method, a plunger method, and an air method.

10. A method for applying a liquid material, wherein: A liquid material coating method using a liquid material coating device, The liquid material coating device comprises: a dispensing head for dispensing liquid material; a robot that moves the dispensing head relative to the workpiece; a movement control unit that controls the relative movement of the dispensing head and the workpiece based on a coating program; and a discharge control unit that controls the discharge action of the liquid material from the discharge head, In the liquid material coating device, the movement control unit and the discharge control unit cooperate to coat the workpiece with the liquid material in a predetermined coating pattern. The movement control unit is configured on the robot, The discharging head is composed of a plurality of discharging heads with different discharging modes, and a selected discharging head can be attached to and detached from the robot. The discharge control unit is composed of a plurality of discharge control units corresponding to the discharge heads of the different discharge modes, and one discharge control unit corresponding to the selected discharge head is detachably connected to the robot. The movement control unit selectively performs a PTP movement for performing the relative movement to the specified coordinates regardless of the path and an interpolation movement for performing the relative movement along a predetermined path. Furthermore, the movement control unit continuously outputs a speed signal corresponding to the relative movement speed of the ejection head and the workpiece to the ejection control unit during the interpolation movement. The discharge control unit calculates a discharge control amount corresponding to the selected one discharge head based on the speed signal received from the movement control unit, and outputs a discharge control command including the discharge control amount to the discharge head.

11. The liquid material coating method according to claim 10, wherein: The speed signal is a pulse signal whose period indicates the magnitude of the speed.

12. The liquid material coating method according to claim 10 or 11, wherein: The robot and the discharge control unit are connected by a cable, and a speed signal is transmitted from the movement control unit to the discharge control unit via the cable.

13. The liquid material coating method according to claim 10 or 11, wherein: In addition to the relative movement speed pre-input into the coating program for coating the liquid material with the coating pattern, the relative movement speed also includes a relative movement speed automatically calculated based on the relative movement speed pre-input into the coating program in order to supplement the relative movement speed pre-input into the coating program.

14. The liquid material coating method according to claim 10 or 11, wherein: The discharge control unit performs a first pattern of discharge control for changing a discharge amount per unit time of the discharge head based on the relative movement speed.

15. The liquid material coating method according to claim 14, wherein In the first mode, the discharge amount per unit time of the discharge head is changed so that line coating is performed on a coating line having a fixed coating amount per unit length.

16. The liquid material coating method according to claim 14, wherein: The discharge control unit switches and executes a second mode of discharge control for causing the discharge head to discharge at a predetermined discharge amount per unit time regardless of the relative movement speed, and the first mode of discharge control.

17. The liquid material coating method according to claim 16, wherein: The discharge control unit switches between the discharge control in the first mode and the discharge control in the second mode by receiving a signal from a movement control unit based on the coating program.

18. The liquid material coating method according to claim 10 or 11, wherein: The plurality of different discharge methods include two or more discharge methods selected from the group consisting of a screw method, an injection method, a plunger method, and an air method.

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