A galvanometer motor and a galvanometer system having the same

Abstract

The present invention discloses a galvanometer motor and a galvanometer system having the same. The galvanometer motor includes: a base and a galvanometer. A stator assembly and a rotor assembly are installed on the base. The stator assembly includes a permanent magnet, a stator core, and a coil winding. The permanent magnet is connected to the stator core, dividing the stator core into upper and lower parts. Coil windings are wound around both the upper and lower arms of the stator core. The rotor assembly includes a rotor. An installation hole for connecting a motor shaft is provided in the middle of the rotor. Stator assemblies are symmetrically provided on both sides of the rotor. Air gaps exist between the rotor and both the permanent magnet and the stator core. The air gaps, the permanent magnet, the stator core, and the rotor together form a magnetic circuit. A clamp is installed at the end of the motor shaft, and the clamp is used to hold the galvanometer to achieve the connection between the galvanometer and the motor shaft. The present invention has the advantages of compact structure, strong acceleration output ability, high control precision, wide application range, etc., and can be well applied to laser processing systems and high-precision imaging detection optical systems in various high-vibration environments.

Description

Technical Field

[0001] The present invention belongs to the technical field of motors, and particularly relates to a high-acceleration galvanometer motor and a galvanometer system having the same. Background Art

[0002] A galvanometer motor is an excellent optical-mechanical scanning device. Different from a rotary motor, it is a special swinging motor used to deflect a load by a limited angle. The galvanometer motors in the prior art usually adopt a galvanometric scanner or a current meter scanning motor or a scanning galvanometer technology, and its basic principle is that an Ampere torque is generated by a copper electric coil in a magnetic field, and the load is controlled to rotate a certain angle by the torque. A galvanometer system is a high-speed and high-precision servo control system composed of a control system, a galvanometer motor, a load, and a sensor, and is mainly applied to industries such as laser processing, stage lighting control, laser medical devices, optical-mechanical scanning imaging, and lidar at the present stage.

[0003] The galvanometer-type galvanometer motors in the prior art all adopt the Ampere force principle, and its electromechanical actuation principle can be expressed by the following formula:

[0004] T = r·nBlI

[0005] Wherein, T is the torque output by the motor, B is the magnetic induction intensity perpendicular to the current direction in the motor, l is the effective length of the coil capable of generating force, n is the number of turns of the coil, I is the current applied to the coil, and r is the equivalent force arm for converting the rotor output into torque. The acceleration of the galvanometer motor can be calculated by the following formula:

[0006]

[0007] Wherein, J a is the mass of the rotor assembly, and J m is the moment of inertia of the galvanometer.

[0008] A high servo bandwidth is an important technical index of the galvanometer motor. Usually, when the galvanometer motor tracks a sinusoidal command signal, the highest frequency of the sinusoidal signal that can be accurately tracked is used as a measurement standard. If you want to improve the servo bandwidth of the galvanometer motor, essentially you must find a way to improve the acceleration ability of the galvanometer motor, that is, improve the ability of the galvanometer motor to output acceleration. Since the galvanometer motors in the prior art all adopt the Ampere force principle, as can be seen from the above formula, the technical ways to improve the acceleration output ability are mainly: optimizing the structures, materials, and processes of the motor mover and rotor to increase r, n, B, and l, and reduce J a . However, due to limitations such as equipment volume, materials, and processes, the improvement of the acceleration output ability by the above technical ways is limited by the Ampere force principle.

[0009] The existing galvanometer type galvanometer motors are a type of motors based on the electromechanical actuation principle of Ampere's force. Any technical improvements made through structural, material, and process optimizations cannot change the physical essence of Ampere's force principle. Its acceleration output ability is determined by its own electromechanical actuation efficiency. This physical essence determines that it is difficult to further significantly improve the acceleration output ability of the galvanometer motors in the existing technology. Furthermore, it also determines that in the existing galvanometer systems, it is difficult to further significantly improve their servo bandwidth and the speed of responding to fast-changing commands. The servo bandwidth determines the accuracy of the galvanometer system in tracking high-frequency command signals. The inability to further improve the servo bandwidth limits the accuracy and efficiency of the galvanometer system when applied in laser processing systems for processing shapes such as acute angles and right angles, as well as micro-hole processing. On the other hand, the servo bandwidth also determines the ability of the galvanometer system to suppress environmental vibrations. Insufficiently high servo bandwidth causes the galvanometer system to be unable to achieve the nominal servo control accuracy in a strong vibration environment, greatly limiting the application of the galvanometer system in various high-vibration environments, such as in high-precision imaging detection optical systems in various vehicles, aircraft, and aerospace vehicles. Summary of the Invention

[0010] The technical problem to be solved by the present invention is to overcome the deficiencies of the existing technology and provide a high-acceleration galvanometer motor based on the principle of Maxwell's force, which has a compact structure, strong acceleration output ability, high control accuracy, and wide application range.

[0011] To solve the above technical problems, the present invention adopts the following technical solutions:

[0012] A galvanometer motor, comprising: a base, a galvanometer, a stator assembly, and a rotor assembly. The stator assembly and the rotor assembly are installed on the base; the stator assembly includes a permanent magnet, a stator core, and a coil winding. The permanent magnet is connected to the stator core, dividing the stator core into upper and lower parts, and coil windings are wound around both the upper and lower arms of the stator core; the rotor assembly includes a rotor. An installation hole for connecting the motor shaft is provided in the middle of the rotor. Stator assemblies are symmetrically arranged on both sides of the rotor, and there are air gaps between the rotor and the permanent magnet and the stator core. The air gaps, the permanent magnet, the stator core, and the rotor together form a magnetic circuit; a clamp is installed at the end of the motor shaft, and the clamp is used to hold the galvanometer to realize the connection between the galvanometer and the motor shaft.

[0013] As a further improvement of the present invention, the permanent magnet includes a first permanent magnet and a second permanent magnet which have the same structure and are symmetrically arranged. The stator core includes a first stator core and a second stator core which have the same structure and are symmetrically arranged. The rotor includes a first rotating body and a second rotating body located on both sides. The first permanent magnet is connected to the middle of the first stator core. There are air gaps between the upper and lower parts of the first rotating body and the first stator core respectively, and there is an air gap between the side part of the first rotating body and the first permanent magnet. The second permanent magnet is connected to the middle of the second stator core. There are air gaps between the upper and lower parts of the second rotating body and the second stator core respectively, and there is an air gap between the side part of the second rotating body and the second permanent magnet.

[0014] As a further improvement of the present invention, there are a first air gap and a second air gap between the upper and lower parts of the first rotating body and the first stator core respectively, and there is a third air gap between the side part of the first rotating body and the first permanent magnet. There are a fourth air gap and a fifth air gap between the upper and lower parts of the second rotating body and the second stator core respectively, and there is a sixth air gap between the side part of the second rotating body and the second permanent magnet.

[0015] As a further improvement of the present invention, the first permanent magnet and the second permanent magnet have opposite magnetization directions.

[0016] As a further improvement of the present invention, after magnetization, the permanent magnet includes four closed magnetic flux paths c1, c2, c3 and c4. c1 and c3 respectively pass through the upper half of the first rotating body and the upper half of the second rotating body from the first permanent magnet and the second permanent magnet, then respectively pass through the upper half of the first stator core and the upper half of the second stator core, and then return to the first permanent magnet and the second permanent magnet respectively. c2 and c4 respectively pass through the lower half of the first rotating body and the lower half of the second rotating body from the first permanent magnet and the second permanent magnet, then respectively pass through the lower half of the first stator core and the lower half of the second stator core, and then return to the first permanent magnet and the second permanent magnet respectively.

[0017] As a further improvement of the present invention, the coil winding includes a first winding, a second winding, a third winding and a fourth winding. The first winding and the third winding are respectively wound around the upper arm and the lower arm of the first stator core, and the second winding and the fourth winding are respectively wound around the upper arm and the lower arm of the second stator core.

[0018] As a further improvement of the present invention, the electromechanical actuation principle of the high-acceleration galvanometer motor is expressed by the following formula:

[0019] T = 2F·r (1)

[0020]

[0021] where, T is the torque output by the motor, B sat$B$ is the saturation magnetic induction intensity of the stator core material, $A$ is the pole area at the air gap, $r$ is the equivalent arm of force for converting the rotor output into torque, $\mu_0$ is the permeability of free space, and $F$ is the thrust acting on the motor rotor in the circumferential direction (tangential direction). $F$ max is the maximum thrust acting on the motor rotor in the circumferential direction (tangential direction).

[0022] As a further improvement of the present invention, the angular acceleration $\varepsilon$ of the high-acceleration galvanometer motor is calculated by the following formula:

[0023]

[0024] where $J$ is the equivalent moment of inertia of the galvanometer motor rotor and the load.

[0025] As a further improvement of the present invention, a lens holder for clamping the galvanometer is provided on the fixture; the fixture includes a first fixture and a second fixture, the first fixture is arranged on the base, and the second fixture is connected to the end of the motor shaft; the lens holder includes a first lens holder and a second lens holder, the first lens holder and the second lens holder are respectively connected to the first fixture and the second fixture, and the first lens holder and the second lens holder are used to clamp both sides of the galvanometer.

[0026] As a further improvement of the present invention, the stator core is integrally formed or assembled; the rotor is integrally formed or assembled.

[0027] As a general technical concept, the present invention further provides a galvanometer system, including an angular position sensor, a servo controller, and the above-mentioned galvanometer motor.

[0028] Compared with the prior art, the advantages of the present invention are as follows:

[0029] Based on the Maxwell force electromechanical actuation principle, the present invention proposes a novel high-acceleration galvanometer motor. A rotor is installed on a base, and a stator assembly composed of a permanent magnet, a stator core, and a coil winding is provided. The permanent magnet divides the stator core into upper and lower parts, and coil windings are wound around both the upper and lower arms of the stator core. An installation hole for connecting the motor shaft is provided in the middle of the rotor. Stator assemblies are symmetrically arranged on both sides of the rotor, and there are air gaps between the rotor and the permanent magnet and the stator core. It has the advantages of compact structure, ingenious design, and easy implementation. The air gap enables the rotor to deflect relative to the stator assembly without collision interference. At the same time, the air gap, the permanent magnet, the stator core, and the rotor together form a magnetic circuit, effectively improving the electromagnetic efficiency of the rotor, reducing the moment of inertia, significantly increasing the response speed of the galvanometer motor, and making the galvanometer system easier to control. Further, compared with the prior art, under the same volume and weight conditions, the present invention can increase the acceleration output capacity of the galvanometer motor by more than 5 times, significantly improving the servo bandwidth of the galvanometer motor. The improvement of the servo bandwidth can improve the accuracy and efficiency of the galvanometer system in laser processing systems when performing processing of shapes such as acute angles and right angles, as well as micro-hole processing. On the other hand, the improvement of the servo bandwidth also enhances the ability of the galvanometer system to work in a relatively harsh vibration environment, facilitating the expansion of the application range of the galvanometer system in various high-vibration environments. For example, it is more suitable for applications in high-precision imaging detection optical systems in various vehicle-mounted, airborne, and aerospace aircraft. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic structural principle diagram of the high-acceleration galvanometer motor of the present invention.

[0031] Figure 2 It is a cross-sectional view of the high-acceleration galvanometer motor of the present invention.

[0032] Figure 3 It is a top view of the high-acceleration galvanometer motor of the present invention.

[0033] Figure 4 It is a front view of the high-acceleration galvanometer motor of the present invention.

[0034] Figure 5 It is a schematic structural principle diagram of the rotor in the present invention.

[0035] Figure 6 It is a left view of the integrally formed rotor in the present invention.

[0036] Figure 7 It is a left view of the assembled rotor in the present invention.

[0037] Figure 8 It is one of the schematic structural principle diagrams of the assembly structure of the rotor and the stator in the present invention.

[0038] Figure 9 This is the second schematic diagram of the assembly structure principle of the rotor and stator in the present invention.

[0039] Figure 10 This is the schematic diagram of the magnetic flux circuit formed when the stator winding in the present invention is not energized.

[0040] Figure 11 This is the first schematic diagram of the magnetic flux circuit formed when the stator winding in the present invention is energized.

[0041] Figure 12 This is the second schematic diagram of the magnetic flux circuit formed when the stator winding in the present invention is energized.

[0042] Figure 13 This is the first schematic diagram of the principle of the change in the assembly structure of the rotor and stator in the present invention.

[0043] Figure 14 This is the second schematic diagram of the principle of the change in the assembly structure of the rotor and stator in the present invention.

[0044] Figure 15 This is the third schematic diagram of the principle of the change in the assembly structure of the rotor and stator in the present invention.

[0045] Legend: 1. Base; 2. Galvo scanner; 3. Fixture; 3A. First fixture; 3B. Second fixture; 4. Lens holder; 4A. First lens holder; 4B. Second lens holder; 5. Permanent magnet; 5A. First permanent magnet; 5B. Second permanent magnet; 51. Side surface of permanent magnet; 6. Stator core; 6A. First stator core; 6B. Second stator core; 61. Lower surface of core; 62. Upper surface of core; 7. Coil winding; 71A. First winding; 71B. Second winding; 72A. Third winding; 72B. Fourth winding; 8. Cable; 9. Rotor; 9A. First rotor body; 9B. Second rotor body; 91. Upper surface of rotor; 92. Lower surface of rotor; 93. Side surface of rotor; 94. Rotor body; 941. Mounting hole; 10. Motor shaft; 11. Bearing; 100A. First air gap; 100B. Second air gap; 120. Third air gap; 110A. Fourth air gap; 110B. Fifth air gap; 121. Sixth air gap. Detailed implementation mode

[0046] The present invention will be further described below in conjunction with the accompanying drawings of the specification and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0047] Embodiment

[0048] As Figures 1 to 12As shown in the figure, the high-acceleration galvanometer motor based on the Maxwell actuation principle of the present invention includes: a base 1, a galvanometer 2, two stator assemblies, a rotor assembly, and a motor housing (not shown in the figure). The stator assembly and the rotor assembly are installed on the base 1. The two stator assemblies can be arranged opposite to each other, one in front and one behind, along the Y direction, or one above and one below, along the Z direction, as shown in Figure 1 the figure. The stator assembly includes a permanent magnet 5, a stator core 6, and a coil winding 7. The permanent magnet 5 is connected to the stator core 6, dividing the stator core 6 into upper and lower parts. The upper and lower arms of the stator core 6 are both wound with coil windings 7. The rotor assembly includes a rotor 9. An installation hole 941 for connecting the motor shaft 10 is provided in the middle of the rotor 9. Stator assemblies are symmetrically arranged on both sides of the rotor 9. There are air gaps between the rotor 9 and the permanent magnet 5 and the stator core 6. The air gap, the permanent magnet 5, the stator core 6, and the rotor 9 together form a magnetic circuit. A clamp 3 is installed at the end of the motor shaft 10. The clamp 3 is used to clamp the galvanometer 2 to realize the connection between the galvanometer 2 and the motor shaft 10. The galvanometer 2 can be clamped and supported on both sides, as shown in Figure 1 the figure, to improve the anti-vibration performance. In other embodiments, the galvanometer 2 can also adopt a single-sided clamping method. It can be understood that in this embodiment, the galvanometer motor is externally coated with a motor housing (not shown in the figure). The material of the motor housing can be a light non-magnetic metal or non-metal, such as aluminum alloy, non-metal composite material, etc. The cable 8 passes through the motor housing and is connected to an external controller. Appropriate connectors can also be provided on the motor housing to connect with the cable.

[0049] In this embodiment, by installing the rotor 9 and the stator assembly composed of the permanent magnet 5, the stator core 6, and the coil winding 7 on the base 1, the long-strip permanent magnet 5 divides the stator core 6 into upper and lower parts, and the upper and lower arms of the stator core 6 are both wound with coil windings 7. An installation hole 941 for connecting the motor shaft is provided in the middle of the rotor 9. Stator assemblies are symmetrically arranged on both sides of the rotor 9. There are air gaps between the rotor 9 and the permanent magnet 5 and the stator core 6. It has the advantages of compact structure, ingenious design, and easy implementation. The air gap enables the rotor 9 to deflect relative to the stator assembly without collision interference. At the same time, the air gap, the permanent magnet, the stator core, and the rotor together form a magnetic circuit, effectively improving the electromagnetic efficiency of the rotor, reducing the moment of inertia, significantly improving the response speed of the galvanometer motor, and making the galvanometer system easier to control.

[0050] Further, a lens clip 4 for clamping the galvanometer 2 is provided on the fixture 3. Specifically, the fixture 3 includes a first fixture 3A and a second fixture 3B. The first fixture 3A is arranged on the base 1, and the second fixture 3B is connected to the end of the motor shaft 10. The lens clip 4 includes a first lens clip 4A and a second lens clip 4B. The first lens clip 4A and the second lens clip 4B are respectively connected to the first fixture 3A and the second fixture 3B, and the first lens clip 4A and the second lens clip 4B are used to clamp both sides of the galvanometer 2. In this embodiment, three bearings 11 are coaxially arranged on the swing shaft, and the bearings 11 are supported by the bearing seat holes of the base 1. The first lens clip 4A is supported in the bearing seat hole of the base 1 by the bearing 11, the second lens clip 4B is connected to the motor shaft 10 and supported in the bearing seat hole of the base 1 by the bearing 11, and the first lens clip 4A and the second lens clip 4B clamp from both sides of the galvanometer 2. The stator assembly is fixed on the base 1, and various fixing methods such as bonding, welding or threaded connection can be adopted, and it can be arranged front and back or up and down. The rotor 9 is supported in the base bearing hole by the motor shaft 10 and the bearing 11, and one end (the motion output end) of the motor shaft 10 is connected to the second lens clip 4B. It can be understood that when the galvanometer 2 adopts the single-sided clamping method, only the second fixture 3B and the second lens clip 4B are provided to achieve the single-sided support of the galvanometer 2.

[0051] As Figure 8 shown, in this embodiment, the permanent magnet 5 includes a first permanent magnet 5A and a second permanent magnet 5B which are identical in structure and symmetrically arranged. The stator core 6 includes a first stator core 6A and a second stator core 6B which are identical in structure and symmetrically arranged. The rotor 9 includes a first rotor body 9A and a second rotor body 9B located on both sides. The first permanent magnet 5A is connected to the middle of the first stator core 6A. There are air gaps respectively between the upper surface 91 and the lower surface 92 of the rotor of the first rotor body 9A and the lower surface 61 and the upper surface 62 of the core of the first stator core 6A. There is an air gap between the side surface 93 of the rotor of the first rotor body 9A and the side surface of the permanent magnet of the first permanent magnet 5A. The second permanent magnet 5B is connected to the middle of the second stator core 6B. There are air gaps between the upper part and the lower part of the second rotor body 9B and the second stator core 6B, and there is an air gap between the side part of the second rotor body 9B and the second permanent magnet 5B.

[0052] As Figure 9 shown, in this embodiment, there are respectively a first air gap 100A and a second air gap 100B between the upper part and the lower part of the first rotor body 9A and the first stator core 6A, and there is a third air gap 120 between the side part of the first rotor body 9A and the first permanent magnet 5A. There are respectively a fourth air gap 110A and a fifth air gap 110B between the upper part and the lower part of the second rotor body 9B and the second stator core 6B, and there is a sixth air gap 121 between the side part of the second rotor body 9B and the second permanent magnet 5B.

[0053] In this embodiment, the permanent magnet 5 can be a permanent magnet with a relatively strong residual magnetic flux density, such as neodymium iron boron, ferrite, etc. The magnetization directions of the first permanent magnet 5A and the second permanent magnet 5B are opposite to each other pairwise, that is, they point to or away from the rotation center of the rotor 9, and are parallel to the symmetry plane of the permanent magnet passing through the rotation center. Figure 9 and Figure 10 In, the directions indicated by arrow a and arrow b are the magnetization directions of the first permanent magnet 5A and the second permanent magnet 5B respectively. In other embodiments, the magnetization directions of the first permanent magnet 5A and the second permanent magnet 5B can also be opposite to the directions indicated by arrow a and arrow b, as long as the magnetization directions of the first permanent magnet 5A and the second permanent magnet 5B are opposite to each other. The permanent magnet 5 and the stator iron core 6 can be bonded, welded or fixed in position using other auxiliary parts.

[0054] such as Figures 10 to 12 As shown, in this embodiment, after magnetization, the permanent magnet 5 includes four closed magnetic flux paths c1, c2, c3, and c4. c1 and c3 respectively pass through the upper halves of the first rotor 9A and the second rotor 9B from the first permanent magnet 5A and the second permanent magnet 5B, then respectively pass through the upper halves of the first stator iron core 6A and the second stator iron core 6B, and then return to the first permanent magnet 5A and the second permanent magnet 5B respectively. c2 and c4 respectively pass through the lower halves of the first rotor 9A and the second rotor 9B from the first permanent magnet 5A and the second permanent magnet 5B, then respectively pass through the lower halves of the first stator iron core 6A and the second stator iron core 6B, and then return to the first permanent magnet 5A and the second permanent magnet 5B respectively.

[0055] The stator iron core 6 is wound with a coil winding 7. One pair of coil windings 7 can be wound on each stator iron core 6, or only one coil winding 7 can be wound. The specific form can be flexibly selected according to the product shape and size requirements. Insulation design is carried out between the coil winding 7 and the stator iron core 6 as required, and it can be in the form of paint, glue, plastic, ceramic or bushing, etc. that can meet the insulation requirements. such as Figure 8 As shown, in this embodiment, the coil winding 7 includes a first winding 71A, a second winding 71B, a third winding 72A, and a fourth winding 72B. The first winding 71A and the third winding 72A are respectively wound on the upper arm and the lower arm of the first stator iron core 6A, and the second winding 71B and the fourth winding 72B are respectively wound on the upper arm and the lower arm of the second stator iron core 6B.

[0056] In this embodiment, the stator core 6 can be manufactured by an integral molding or an assembled molding method, and can be a square structure or a sector structure. The stator core 6 is made of a suitable low-loss ferromagnetic material, which has a high saturation magnetic flux density and low hysteresis loss under high-frequency and high magnetic flux density conditions, such as crystalline and amorphous magnetic alloy sheets, SMC materials, etc. Specifically, the stator core 6 can be formed by laminating and bonding metal sheets made of the above materials, or can be sintered. The stator core 6 can be a whole, or can be cut into several segments, such as 5 segments (it can be less than 5 segments or more than 5 segments), and finally assembled by bonding or other positioning and fixing methods to facilitate the assembly of various accessory parts, such as the coil winding 7 or the permanent magnet 5.

[0057] As Figures 5 to 7 shown, in this embodiment, the rotor 9 can be Figure 6 a whole as shown in Figure 7 or a split body containing 3 parts as shown in Figure 7 . The rotor body 94 in the middle part is a rotating shaft, which can be directly designed as a rotating shaft, or can be designed as a structure with a through hole, an intermediate rotating shaft. The outer part, the first rotating body 91 and the second rotating body 92, are yoke structures, which are used to jointly form a magnetic flux path with the stator assembly and generate magnetic force. The number of the outer yoke structures is determined by the number of stator assemblies and is the same as the number of stator assemblies. When the rotor 9 is Figure 7 the split structure shown, the middle rotating shaft or rotating shaft structure can be made of common metal materials for shaft parts, such as various steels, or can be a metal or non-metal material with light weight, high stiffness, high strength, thermal stability and consistency with other parts of the overall system; the outer yoke structure is made of a material with a high saturation magnetic flux density and low loss and low hysteresis loss under high-frequency and high magnetic flux density conditions, such as crystalline and amorphous magnetic alloys, SMC materials, etc., which can be the same as or different from the material of the stator core 6. In most cases, the same material as the stator core 6 is used. When the rotor 9 is Figure 6 the split structure shown, any connection and assembly methods such as bonding, welding or nested connection can be used for the middle rotating shaft or rotating shaft structure parts and the outer yoke structure parts. When the rotor 9 is Figure 6 the integral structure shown, it is necessary to consider that the material should also meet the high stiffness, high strength, thermal stability, good machining performance and machining accuracy when used as a shaft element while meeting the aforementioned magnetic properties.

[0058] In other embodiments, the assembly forms between the permanent magnet 5, the stator core 6, the coil winding 7 and the rotor 9 can also be as Figures 13 to 15In the structure shown, the stator core 6 can also be set as an arc shape. The coil winding 7 can be wound around the upper and lower arms of the stator core 6, or can be arranged on the side arms of the stator core 6. The stator core 6 can be arranged on the left and right sides of the rotor 9, or can be arranged on the upper and lower sides of the rotor 9.

[0059] In this embodiment, the magnetic flux formed by the energization of the stator winding is as shown in Figure 11 and Figure 12 shown. As shown in Figure 11 shown, when energizing the coil winding 7 in the directions shown by d1, d2, d3, and d4, magnetic fluxes are formed in the stator core 6 and the rotor 9. The d1 and d2 currents form a magnetic flux e1 in the first stator core 6A and the first rotor body 9A, and the direction of the magnetic force lines is as shown by the arrows in e1; the d3 and d4 currents form a magnetic flux e2 in the second stator core 6B and the second rotor body 9B, and the direction of the magnetic force lines is as shown by the arrows in e2; at this time, a torque shown by an arrow f can be formed on the rotor 9, and the torque direction is counterclockwise.

[0060] As shown in Figure 12 shown, when energizing the coil winding 7 in the directions shown by g1, g2, g3, and g4, magnetic fluxes are formed in the stator core 6 and the rotor 9. The g1 and g2 currents form a magnetic flux h1 in the first stator core 6A and the first rotor body 9A, and the direction of the magnetic force lines is as shown by the arrows in h1; the g3 and g4 currents form a magnetic flux h2 in the second stator core 6B and the second rotor body 9B, and the direction of the magnetic force lines is as shown by the arrows in h2; at this time, a torque shown by an arrow k can be formed on the rotor 9, and the torque direction is clockwise.

[0061] The galvanometer motor of this embodiment changes the direction of the output torque by controlling the current direction in each coil winding 7, and changes the magnitude of the output torque by controlling the current magnitude in each coil winding 7.

[0062] The electromechanical actuation principle of the high-acceleration galvanometer motor of this embodiment is expressed by the following formula:

[0063] T = 2F·r (1)

[0064]

[0065] where, T is the torque output by the motor, B sat is the saturation magnetic induction intensity of the stator core material, A is the magnetic pole area at the air gap, r is the equivalent moment arm for converting the rotor output into torque, μ0 is the permeability of free space, F is the thrust acting on the motor rotor in the circumferential direction (tangential direction), F max is the maximum thrust acting on the motor rotor in the circumferential direction (tangential direction).

[0066] The angular acceleration ε of the high-acceleration galvanometer motor is calculated by the following formula:

[0067]

[0068] Among them, J is the equivalent moment of inertia of the rotor of the galvanometer motor and the load. Based on this electromagnetic torque generation principle, under similar actuator volume / weight and motor moment of inertia, the output torque and rotational acceleration of the actuator will be greatly improved.

[0069] Compared with the galvanometer motor based on Ampere force in the prior art, under the same volume and weight conditions, this embodiment can increase the acceleration output ability of the galvanometer motor by more than 5 times, which significantly improves the servo bandwidth of the galvanometer motor. The improvement of the servo bandwidth can improve the accuracy and efficiency of the galvanometer system in laser processing systems when processing shapes such as acute angles and right angles, as well as micro-hole processing. On the other hand, the improvement of the servo bandwidth also enhances the ability of the galvanometer system to work in a relatively harsh vibration environment, which is beneficial to expanding the application range of the galvanometer system in various high-vibration environments. For example, it is more suitable for applications in high-precision imaging detection optical systems in various vehicle-mounted, airborne, and aerospace aircraft.

[0070] This embodiment also provides a galvanometer system, including an angular position sensor, a servo controller, and the above-mentioned galvanometer motor. Specifically, the galvanometer motor of this embodiment, together with the angular position sensor and the servo controller, constitutes a closed-loop galvanometer swing angle servo control system with high acceleration output ability and high servo bandwidth performance. The angular position sensor can be any angular position sensor that can perform high-bandwidth and high-precision limited-angle measurement, such as a capacitive sensor, an inductive sensor, an optoelectronic sensor, a grating, an optoelectronic encoder, an optoelectronic code disk, a magnetic grating, a magnetic encoder, a capacitive grating, or a capacitive encoder.

[0071] Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make many possible changes and modifications to the technical solution of the present invention by using the above-disclosed methods and technical contents, or modify it into an equivalent embodiment with equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change, and modification made to the above embodiments based on the technical essence of the present invention without departing from the technical solution of the present invention still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A galvanometer motor, characterized in that, Including: a base (1), a galvanometer (2), a stator assembly, and a rotor assembly. The stator assembly and the rotor assembly are mounted on the base (1). The stator assembly includes a permanent magnet (5), a stator core (6), and a coil winding (7). The permanent magnet (5) is connected to the stator core (6), dividing the stator core (6) into upper and lower parts, and coil windings (7) are wound around the upper and lower arms of the stator core (6). The rotor assembly includes a rotor (9). An installation hole (941) for connecting to a motor shaft (10) is provided in the middle of the rotor (9). Stator assemblies are symmetrically provided on both sides of the rotor (9), and there are air gaps between the rotor (9) and the permanent magnet (5) and the stator core (6). The air gaps, the permanent magnet (5), the stator core (6), and the rotor (9) together form a magnetic circuit. A clamp (3) is installed at the end of the motor shaft (10), and the clamp (3) is used to clamp the galvanometer (2) to achieve the connection between the galvanometer (2) and the motor shaft (10). The electromechanical actuation principle of the high-acceleration galvanometer motor is expressed by the following formula: T = 2F·r (1) Among them, T is the torque output by the motor, B sat is the saturation magnetic induction intensity of the stator core material, A is the pole area at the air gap, r is the equivalent arm of force for converting the rotor output into torque, μ0 is the permeability of free space, F is the thrust acting on the motor rotor in the circumferential direction, F max is the maximum thrust acting on the motor rotor in the circumferential direction.

2. The galvanometer motor according to claim 1, characterized in that, The permanent magnet (5) includes a first permanent magnet (5A) and a second permanent magnet (5B) that are identical in structure and symmetrically arranged. The stator core (6) includes a first stator core (6A) and a second stator core (6B) that are identical in structure and symmetrically arranged. The rotor (9) includes a first rotor body (9A) and a second rotor body (9B) located on both sides. The first permanent magnet (5A) is connected to the middle of the first stator core (6A). There are air gaps between the upper and lower parts of the first rotor body (9A) and the first stator core (6A) respectively, and there is an air gap between the side of the first rotor body (9A) and the first permanent magnet (5A). The second permanent magnet (5B) is connected to the middle of the second stator core (6B). There are air gaps between the upper and lower parts of the second rotor body (9B) and the second stator core (6B) respectively, and there is an air gap between the side of the second rotor body (9B) and the second permanent magnet (5B).

3. The galvanometer motor according to claim 2, wherein, There are a first air gap (100A) and a second air gap (100B) between the upper and lower parts of the first rotor body (9A) and the first stator core (6A) respectively, and there is a third air gap (120) between the side of the first rotor body (9A) and the first permanent magnet (5A). There are a fourth air gap (110A) and a fifth air gap (110B) between the upper and lower parts of the second rotor body (9B) and the second stator core (6B) respectively, and there is a sixth air gap (121) between the side of the second rotor body (9B) and the second permanent magnet (5B).

4. The galvanometer motor according to claim 2, characterized in that, The first permanent magnet (5A) and the second permanent magnet (5B) have opposite magnetization directions.

5. The galvanometer motor according to claim 4, wherein, After magnetization, the permanent magnet (5) includes four closed magnetic flux paths c1, c2, c3, and c4. c1 and c3 respectively pass through the upper halves of the first rotating body (9A) and the second rotating body (9B) from the first permanent magnet (5A) and the second permanent magnet (5B), then respectively pass through the upper halves of the first stator core (6A) and the second stator core (6B), and then return to the first permanent magnet (5A) and the second permanent magnet (5B) respectively; c2 and c4 respectively pass through the lower halves of the first rotating body (9A) and the second rotating body (9B) from the first permanent magnet (5A) and the second permanent magnet (5B), then respectively pass through the lower halves of the first stator core (6A) and the second stator core (6B), and then return to the first permanent magnet (5A) and the second permanent magnet (5B) respectively.

6. The galvanometer motor according to claim 5, wherein, The coil winding (7) includes a first winding (71A), a second winding (71B), a third winding (72A), and a fourth winding (72B). The first winding (71A) and the third winding (72A) are respectively wound around the upper arm and the lower arm of the first stator core (6A), and the second winding (71B) and the fourth winding (72B) are respectively wound around the upper arm and the lower arm of the second stator core (6B).

7. The galvanometer motor according to claim 1, wherein The angular acceleration ε of the high-acceleration galvanometer motor is calculated by the following formula: Where J is the equivalent moment of inertia of the galvanometer motor rotor and the load.

8. The galvanometer motor according to any one of claims 1 to 6, characterized in that A lens clamp (4) for clamping the galvanometer (2) is provided on the fixture (3); the fixture (3) includes a first fixture (3A) and a second fixture (3B). The first fixture (3A) is arranged on the base (1), and the second fixture (3B) is connected to the end of the motor shaft (10); the lens clamp (4) includes a first lens clamp (4A) and a second lens clamp (4B). The first lens clamp (4A) and the second lens clamp (4B) are respectively connected to the first fixture (3A) and the second fixture (3B), and the first lens clamp (4A) and the second lens clamp (4B) are used to clamp both sides of the galvanometer (2).

9. A galvanometer system, characterized in that, It includes an angular position sensor, a servo controller, and the galvanometer motor according to any one of claims 1 to 8.

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