Magnetic Levitation Device and Semiconductor Processing Equipment

Abstract

A magnetic levitation device and a semiconductor processing apparatus. The magnetic levitation device includes a rotor and a stator. The stator includes at least three magnetic stator substrates, a permanent magnet, and a magnetic conductor. The at least three magnetic stator substrates are spaced apart from each other in the axial direction of the stator to define at least two gaps in the axial direction of the stator. In the axial direction of the stator, the permanent magnet and the magnetic conductor are alternately arranged in the at least two gaps; each of the at least three magnetic stator substrates includes a substrate body and a protrusion connected to the substrate body. The protrusion protrudes toward the rotor and protrudes from the permanent magnet and the magnetic conductor, and a magnetic levitation coil is wound around the protrusion; and the at least three magnetic stator substrates include a first magnetic stator substrate. The protrusion and the magnetic levitation coil of the first magnetic stator substrate apply an upward force along the axial direction of the stator to the rotor, and the ratio of the number of the first magnetic stator substrates to the total number of the at least three magnetic stator substrates is greater than or equal to 50%. The magnetic levitation device of the present disclosure can provide a large and adjustable axial support force.

Description

Technical Field

[0001] At least one embodiment of the present disclosure relates to the field of magnetic levitation technology, and particularly to a magnetic levitation device. Background Art

[0002] Levitation technologies mainly include magnetic levitation, optical levitation, acoustic levitation, air current levitation, electric levitation, particle beam levitation, etc. Among them, magnetic levitation technology has been relatively well developed. In magnetic levitation technology, the magnetic interaction force between the stator and the rotor enables the rotor to levitate and rotate evenly. There is no contact and no mechanical friction between the rotor and the stator, making magnetic levitation technology particularly suitable for occasions with high cleanliness requirements. Summary of the Invention

[0003] According to an embodiment of the present disclosure, there is provided a magnetic levitation device, including: a rotor; and a stator, wherein the stator is disposed around the rotor or the rotor is disposed around the stator. The stator includes at least three magnetic stator substrates, a permanent magnet, and a magnetic conductor. The at least three magnetic stator substrates are spaced apart from each other in the axial direction of the stator to define at least two gaps in the axial direction of the stator. In the axial direction of the stator, the permanent magnet and the magnetic conductor are alternately disposed in the at least two gaps; each of the at least three magnetic stator substrates includes a substrate body and a protrusion connected to the substrate body. The protrusion protrudes toward the rotor and protrudes from the permanent magnet and the magnetic conductor, and a magnetic levitation coil is wound around the protrusion; and the at least three magnetic stator substrates include a first magnetic stator substrate. The protrusion and the magnetic levitation coil of the first magnetic stator substrate apply an upward force along the axial direction of the stator to the rotor, and the ratio of the number of the first magnetic stator substrates to the total number of the at least three magnetic stator substrates is greater than or equal to 50%.

[0004] For example, the at least three magnetic stator substrates further include a second magnetic stator substrate. The protrusion and the magnetic levitation coil of the second magnetic stator substrate apply a downward force along the axial direction of the stator to the rotor, and the number of the first magnetic stator substrates is greater than or equal to the number of the second magnetic stator substrates.

[0005] For example, the number of the at least three magnetic stator substrates is four or more than four; in the axial direction of the stator, the magnetic properties of the opposite surfaces of two adjacent permanent magnets are the same.

[0006] For example, the stator includes at least two permanent magnets, and the magnetic field intensities of the at least two permanent magnets are equal to each other.

[0007] For example, the rotor includes a rotor body and at least three flanges protruding from the rotor body toward the stator; the number of the at least three magnetic stator substrates is equal to the number of the at least three flanges and they correspond to each other one by one; the at least three flanges include a first flange corresponding to the first magnetic stator substrate, and the midline of the protruding portion of the first magnetic stator substrate in the axial direction of the stator is higher than the midline of the first flange in the axial direction of the stator.

[0008] For example, the midline of the protruding portion of the first magnetic stator substrate in the axial direction being higher than the midline of the first flange in the axial direction includes one of the following situations: (1) In the axial direction of the stator, the upper surface of the protruding portion of the first magnetic stator substrate is higher than the upper surface of the first flange, and the lower surface of the protruding portion of the first magnetic stator substrate is higher than the upper surface of the first flange or at the same height as the upper surface of the first flange; (2) In the axial direction of the stator, the upper surface of the protruding portion of the first magnetic stator substrate is higher than the upper surface of the first flange or at the same height as the upper surface of the first flange, the lower surface of the first flange is lower than the lower surface of the protruding portion of the first magnetic stator substrate, and the upper surface of the first flange is higher than the lower surface of the protruding portion of the first magnetic stator substrate; (3) In the axial direction of the stator, the upper surface of the protruding portion of the first magnetic stator substrate is higher than the upper surface of the first flange, and the lower surface of the first flange is higher than the lower surface of the protruding portion of the first magnetic stator substrate or at the same height as the lower surface of the protruding portion of the first magnetic stator substrate; and (4) In the axial direction of the stator, the upper surface of the protruding portion of the first magnetic stator substrate is at the same height as the upper surface of the first flange or lower than the upper surface of the first flange, and the lower surface of the protruding portion of the first magnetic stator substrate is higher than the lower surface of the first flange.

[0009] For example, in the situation (2), the distance between the upper surface of the protruding portion of the first magnetic stator substrate and the upper surface of the first flange is H, and H ≤ 4 / 5 Ha, where Ha is the dimension of the first flange in the axial direction of the stator.

[0010] For example, H ≤ 1 / 5 Ha.

[0011] For example, the at least three flanges include a second flange corresponding to the second magnetic stator substrate, and the midline of the second flange in the axial direction of the stator is higher than the midline of the protruding portion of the second magnetic stator substrate in the axial direction of the stator.

[0012] For example, the midline of the second flange in the axial direction is higher than the midline of the protrusion of the second magnetic stator substrate in the axial direction, including one of the following situations: (1) In the axial direction of the stator, the upper surface of the second flange is higher than the upper surface of the protrusion of the second magnetic stator substrate, and the lower surface of the second flange is higher than the upper surface of the protrusion of the second magnetic stator substrate or is at the same height as the upper surface of the protrusion of the second magnetic stator substrate; (2) In the axial direction of the stator, the upper surface of the second flange is higher than the upper surface of the protrusion of the second magnetic stator substrate or is at the same height as the upper surface of the protrusion of the second magnetic stator substrate, the lower surface of the protrusion of the second magnetic stator substrate is lower than the lower surface of the second flange, and the lower surface of the second flange is lower than the upper surface of the protrusion of the second magnetic stator substrate; (3) In the axial direction of the stator, the upper surface of the second flange is higher than the upper surface of the protrusion of the second magnetic stator substrate, and the lower surface of the protrusion of the second magnetic stator substrate is higher than the lower surface of the second flange or is at the same height as the lower surface of the second flange; and (4) In the axial direction of the stator, the upper surface of the second flange is at the same height as the upper surface of the protrusion of the second magnetic stator substrate or is lower than the upper surface of the protrusion of the second magnetic stator substrate, and the lower surface of the second flange is higher than the lower surface of the protrusion of the second magnetic stator substrate.

[0013] For example, in the situation (2), the distance between the upper surface of the second flange and the upper surface of the protrusion of the second magnetic stator substrate is H, and H ≤ 4 / 5Ha, where Ha is the dimension of the second flange in the axial direction of the stator.

[0014] For example, H ≤ 1 / 5Ha.

[0015] For example, the distance between each of the at least three magnetic stator substrates and its corresponding flange in the radial direction of the stator is L; the dimension of each of the at least two gaps in the axial direction of the stator is at least three times that of L.

[0016] For example, the dimension of each of the at least two gaps in the axial direction of the stator is at least five times that of L.

[0017] For example, the dimension of each of the at least two gaps in the axial direction of the stator is at least ten times that of L.

[0018] For example, the distance between each of the at least three magnetic stator substrates and its corresponding flange in the radial direction of the stator is L, and L ≤ Ha, where Ha is the dimension of the flange in the axial direction of the stator.

[0019] For example, L ≤ 1 / 2Ha.

[0020] For example, at least one of the at least three magnetic stator substrates includes a plurality of teeth, which are connected to the substrate body, project toward the rotor from the permanent magnet and the magnetic conductor, and each tooth is wound with a magnetic rotating coil.

[0021] For example, the magnetic levitation coil is farther from the rotor than the magnetic rotating coil.

[0022] For example, the plurality of teeth are provided at an end of the protruding portion facing the rotor.

[0023] For example, the at least one magnetic stator substrate is one and is the magnetic stator substrate located at the uppermost or lowermost layer in the axial direction of the stator among the at least three magnetic stator substrates.

[0024] For example, the at least one magnetic stator substrate is one and is the magnetic stator substrate located at the middle layer in the axial direction of the stator among the at least three magnetic stator substrates.

[0025] For example, the number of the at least one magnetic stator substrate is an even number and is symmetrically arranged with respect to the center line of the stator in the axial direction of the stator; or the number of the at least one magnetic stator substrate is an odd number greater than 1, one of the magnetic stator substrates is the magnetic stator substrate located at the middle layer in the axial direction of the stator among the at least three magnetic stator substrates, and the remaining magnetic stator substrates are symmetrically arranged with respect to the center line of the stator in the axial direction of the stator.

[0026] For example, the rotor includes a rotor body and at least three flanges protruding from the rotor body toward the stator; the number of the at least three magnetic stator substrates is equal to the number of the at least three flanges and they correspond to each other one by one; the end of the flange corresponding to the at least one magnetic stator substrate facing the at least one magnetic stator substrate has a plurality of teeth.

[0027] For example, the number of the first magnetic stator substrates is at least two, and the number of the second magnetic stator substrates is at least one.

[0028] For example, the number of the second magnetic stator substrates is one.

[0029] For example, in the axial direction of the stator, the permanent magnet is arranged in the odd-numbered gap from top to bottom among at least two gaps, and the magnetic conductor is arranged in the even-numbered gap from top to bottom.

[0030] For example, the permanent magnet is in direct contact with the adjacent magnetic stator substrate, or the permanent magnet and the adjacent magnetic stator substrate are spaced apart by an air gap, or a magnetic conductor sheet is inserted between the permanent magnet and the adjacent magnetic stator substrate.

[0031] For example, the magnetic conductor is in direct contact with the adjacent magnetic stator substrate, or the magnetic conductor and the adjacent magnetic stator substrate are separated by an air gap, or a magnetic conductor sheet is inserted between the magnetic conductor and the adjacent magnetic stator substrate.

[0032] For example, in the axial direction of the stator, the at least three magnetic stator substrates are arranged at equal intervals.

[0033] For example, in the axial direction of the stator, the thickness of the permanent magnet is equal to the thickness of the magnetic conductor.

[0034] For example, in the axial direction of the stator, the thicknesses of the at least three magnetic stator substrates are the same as each other.

[0035] According to an embodiment of the present disclosure, there is also provided a semiconductor processing apparatus including the magnetic levitation device as described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments will be briefly introduced below. Obviously, the drawings in the following description only relate to some embodiments of the present invention and do not limit the present invention.

[0037] Figure 1 is a perspective schematic view of a magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0038] Figure 2 is Figure 1 an exploded schematic view of the magnetic levitation device shown;

[0039] Figure 3 is Figure 1 a schematic view of the interaction force between the protrusion 2012 of the magnetic stator substrate and the flange of the rotor in the magnetic levitation device shown;

[0040] Figure 4 is Figure 1 a schematic view of the magnetic field lines of the magnetic levitation device shown;

[0041] Figure 5 is a perspective schematic view of a magnetic levitation device according to an embodiment of the present disclosure Figure 2 ;

[0042] Figure 6 is Figure 5 an exploded schematic view of the magnetic levitation device shown;

[0043] Figure 7 is Figure 5 a schematic view of the interaction force between the protrusion 2012 of the magnetic stator substrate and the flange of the rotor in the magnetic levitation device shown;

[0044] Figure 8 is Figure 5 a schematic diagram of the magnetic field lines of the magnetic levitation device shown Figure 1 ;

[0045] Figure 9A is a three-dimensional schematic diagram of the rotor of the magnetic levitation device according to an embodiment of the present disclosure;

[0046] Figure 9B is a three-dimensional schematic diagram of the magnetic stator substrate of the magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0047] Figure 9C is a three-dimensional schematic diagram of the permanent magnet 202 of the magnetic levitation device according to an embodiment of the present disclosure;

[0048] Figure 9D is a three-dimensional schematic diagram of the magnetic conductor 203 of the magnetic levitation device according to an embodiment of the present disclosure;

[0049] Figure 9E is a three-dimensional schematic diagram of the magnetic stator substrate of the magnetic levitation device according to an embodiment of the present disclosure Figure 2 ;

[0050] Figure 9F is a three-dimensional schematic diagram of the magnetic rotating coil of the magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0051] Figure 10A is a schematic diagram of Case 1 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0052] Figure 10B is a schematic diagram of Case 1 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to an embodiment of the present disclosure Figure 2 ;

[0053] Figure 11A is a schematic diagram of Case 2 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0054] Figure 11B is a schematic diagram of Case 2 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to an embodiment of the present disclosure Figure 2 ;

[0055] Figure 12ASchematic diagram of Case 3 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0056] Figure 12B Schematic diagram of Case 3 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to an embodiment of the present disclosure Figure 2 ;

[0057] Figure 13A Schematic diagram of Case 4 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0058] Figure 13B Schematic diagram of Case 4 of the positional relationship between the protrusion 2012 of the first magnetic stator substrate 201a and the first flange of the rotor in the magnetic levitation device according to an embodiment of the present disclosure Figure 2 ;

[0059] Figure 14A Schematic diagram of Case 1 of the positional relationship between the second flange of the rotor and the protrusion 2012 of the second magnetic stator substrate in the magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0060] Figure 14B Schematic diagram of Case 1 of the positional relationship between the second flange of the rotor and the protrusion 2012 of the second magnetic stator substrate in the magnetic levitation device according to an embodiment of the present disclosure Figure 2 ;

[0061] Figure 15A Schematic diagram of Case 2 of the positional relationship between the second flange of the rotor and the protrusion 2012 of the second magnetic stator substrate in the magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0062] Figure 15B Schematic diagram of Case 2 of the positional relationship between the second flange of the rotor and the protrusion 2012 of the second magnetic stator substrate in the magnetic levitation device according to an embodiment of the present disclosure Figure 2 ;

[0063] Figure 16A Schematic diagram of Case 3 of the positional relationship between the second flange of the rotor and the protrusion 2012 of the second magnetic stator substrate in the magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0064] Figure 16BSchematic diagram of Case 3 of the positional relationship between the second flange of the rotor and the protrusion 2012 of the second magnetic stator substrate in the magnetic levitation device according to an embodiment of the present disclosure Figure 2 ;

[0065] Figure 17A Schematic diagram of Case 4 of the positional relationship between the second flange of the rotor and the protrusion 2012 of the second magnetic stator substrate in the magnetic levitation device according to an embodiment of the present disclosure Figure 1 ;

[0066] Figure 17B Schematic diagram of Case 4 of the positional relationship between the second flange of the rotor and the protrusion 2012 of the second magnetic stator substrate in the magnetic levitation device according to an embodiment of the present disclosure Figure 2 ;

[0067] Figure 18 is Figure 5 Schematic diagram of the magnetic field lines of the magnetic levitation device shown Figure 2 . Detailed implementation manners

[0068] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0069] Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the art to which the present invention pertains. The "first", "second", and similar terms used in the specification and claims of this patent application of the present invention do not denote any order, quantity, or importance, but are only used to distinguish different components. The terms such as "including" or "comprising" mean that the elements or items appearing before this term cover the elements or items listed after this term and their equivalents, without excluding other elements or items.

[0070] The accompanying drawings in the present disclosure are not drawn strictly according to the actual proportions, and the specific dimensions and quantities of each structure can be determined according to actual needs. The accompanying drawings described in the present disclosure are only schematic diagrams.

[0071] Embodiments of the present disclosure provide a magnetic levitation device. In the magnetic levitation device according to the embodiments of the present disclosure, the stator can apply a sufficient large axial supporting force to the rotor, so that even if the rotor itself has a large mass, the rotor can still rotate and levitate stably, and even if the rotor supports or lifts an object with a large mass, the rotor can still rotate and levitate stably, making the application scope of the magnetic levitation device according to the embodiments of the present disclosure very wide. Embodiments of the present disclosure also provide a semiconductor processing device, including the magnetic levitation device according to the embodiments of the present disclosure.

[0072] Figure 1 is a three-dimensional schematic diagram of the magnetic levitation device according to the embodiments of the present disclosure Figure 1 , Figure 2 is Figure 1 an exploded schematic diagram of the magnetic levitation device shown in Figure 3 is Figure 1 a schematic diagram of the interaction force between the protrusion of the magnetic stator substrate and the flange of the rotor in the magnetic levitation device shown in Figure 4 is Figure 1 a schematic diagram of the magnetic field lines of the magnetic levitation device shown in Figure 9A is a three-dimensional schematic diagram of the rotor of the magnetic levitation device according to the embodiments of the present disclosure; Figure 9B is a three-dimensional schematic diagram of the magnetic stator substrate of the magnetic levitation device according to the embodiments of the present disclosure Figure 1 ; Figure 9C is a three-dimensional schematic diagram of the permanent magnet of the magnetic levitation device according to the embodiments of the present disclosure; Figure 9D is a three-dimensional schematic diagram of the magnetic conductor of the magnetic levitation device according to the embodiments of the present disclosure. Referring to Figures 1 to 4 and 9A to 9D , the magnetic levitation device according to the embodiments of the present disclosure includes a rotor 10 and a stator 20, and the stator 20 is arranged around the rotor 10; the stator 20 includes at least three magnetic stator substrates 201, a permanent magnet 202 and a magnetic conductor 203, and the at least three magnetic stator substrates 201 are spaced apart from each other in the axial direction Z of the stator 20 to define at least two gaps 201' in the axial direction Z of the stator 20, and the permanent magnet 202 and the magnetic conductor 203 are alternately arranged in the at least two gaps 201' in the axial direction Z of the stator 20; each of the at least three magnetic stator substrates 201 includes a substrate main body 2011 and a protrusion 2012 connected to the substrate main body 2011, the protrusion 2012 protrudes towards the rotor 10 and protrudes from the permanent magnet 202 and the magnetic conductor 203, and a magnetic levitation coil 2012c is wound on the protrusion 2012; and the at least three magnetic stator substrates 201 include a first magnetic stator substrate 201a, and the protrusion 2012 and the magnetic levitation coil 2012c of the first magnetic stator substrate 201a apply a force upward along the axial direction Z of the stator 20 to the rotor 10, and the ratio of the number of the first magnetic stator substrates 201a to the total number of the at least three magnetic stator substrates 201 is greater than or equal to 50%.

[0073] It should be noted that in the embodiments of the present disclosure, "along the axial direction Z of the stator 20 upward" refers to the direction opposite to the gravitational direction of the rotor 10, and "along the axial direction Z of the stator 20 downward" refers to the direction same as the gravitational direction of the rotor 10.

[0074] According to an embodiment of the present disclosure, the protrusion 2012 of the first magnetic stator substrate 201a and the magnetic suspension coil 2012c apply a force along the axial direction Z of the stator 20 upward to the rotor 10, and the ratio of the number of the first magnetic stator substrates 201a to the total number of at least three magnetic stator substrates 201 is greater than or equal to 50%. That is, in the magnetic suspension device according to the embodiments of the present disclosure, at least half or more than half of the at least three magnetic stator substrates 201 are the first magnetic stator substrates 201a that apply a force along the axial direction Z of the stator 20 upward to the rotor 10, so that the magnetic suspension device can provide a sufficiently large axial support force to balance the gravity of the rotor 10 and the gravity of the object supported or lifted by the rotor 10, so that even in the case where the rotor 10 itself has a large mass and / or in the case where the rotor 10 supports or lifts an object with a large mass, the rotor 10 will not become unstable due to its own gravity and the gravity of the object it supports or lifts, and the rotor 10 can still rotate and levitate stably. Therefore, the application range of the magnetic suspension device according to the embodiments of the present disclosure is greatly expanded, which can include a rotor 10 with a large mass, and the rotor 10 can also support or lift an object with a large mass. From Figure 3 the interaction force between the stator 20 and the rotor 10 and Figure 4 the magnetic field line distribution, it can be clearly seen that the first magnetic stator substrate 201a applies a force along the axial direction Z of the stator 20 upward to the rotor 10 and the ratio of the number of the first magnetic stator substrates 201a to the total number of at least three magnetic stator substrates 201 is greater than or equal to 50%. For example, Figure 4 is a sectional view of the rotor 10, the magnetic stator substrate 201, the permanent magnet ②, and the magnetic conductor 203 taken along the A-A line of Figure 1 .

[0075] For example, when the rotor 10 supports an object, the object is placed on the upper surface of the rotor 10; in this case, the object can be in direct contact with the upper surface of the rotor 10, or the object can be in direct contact with the support structure provided on the upper surface of the rotor 10 without being in direct contact with the upper surface of the rotor 10. For example, when the rotor 10 lifts an object, the object can be connected to the lower surface of the rotor 10; in this case, the object can be directly connected to the lower surface of the rotor 10, or the object can be directly connected to the connection structure connected to the lower surface of the rotor 10 without being in direct contact with the lower surface of the rotor 10.

[0076] It should be noted that the protrusion 2012 of the first magnetic stator substrate 201a and the magnetic suspension coil 2012c exert a force on the rotor 10 in the axial direction Z of the stator 20, and the ratio of the number of the first magnetic stator substrates 201a to the total number of at least three magnetic stator substrates 201 is greater than or equal to 50%. This is for the normal operation of the magnetic suspension device. When the magnetic suspension device operates normally, the rotor 10 rotates and suspends stably under the action of the stator 20.

[0077] For example, according to an embodiment of the present disclosure, in order to enable the magnetic suspension device to provide a sufficiently large axial support force to balance the gravity of the rotor 10 and the gravity of the object supported or lifted by the rotor 10, the ratio of the number of the first magnetic stator substrates 201a to the total number of at least three magnetic stator substrates 201 is greater than or equal to 60%, further greater than or equal to 70%, still further greater than or equal to 80%, even further greater than or equal to 90%, and even equal to 100% (that is, all of the at least three magnetic stator substrates 201 are the first magnetic stator substrates 201a. See Figure 3 and Figure 4 , two of the three magnetic stator substrates 201 are the first magnetic stator substrates 201a, so that the ratio of the number of the first magnetic stator substrates 201a to the total number of the three magnetic stator substrates 201 is greater than 50%.

[0078] For example, a current is passed through the magnetic suspension coil 2012c; the rotor 10 is suspended under the action of the protrusion 2011 of the magnetic stator substrate 201 and the magnetic suspension coil 2012c. For example, the magnitude of the current in the magnetic suspension coil 2012c can be adjusted, so that the force exerted by the stator 20 on the rotor can be adjusted. For example, the magnitude of the current in the magnetic suspension coil 2012c wound around the protrusion 2012 of the first magnetic stator substrate 201a can be adjusted, so that the magnitude of the force exerted on the rotor 10 in the axial direction Z of the stator 20 by the protrusion 2012 of the first magnetic stator substrate 201a and the magnetic suspension coil 2012c can be adjusted. In this way, when the magnetic suspension device according to the embodiment of the present disclosure supports or lifts an object, different forces in the axial direction Z of the stator 20 can be applied to the rotor 10 according to different objects to be supported or lifted, improving the working flexibility of the magnetic suspension device according to the embodiment of the present disclosure. That is, the magnetic suspension device according to the embodiment of the present disclosure can provide a large and adjustable axial support force.

[0079] It should be noted that according to the embodiments of the present disclosure, the distribution position of the first magnetic stator substrate 201a among at least three magnetic stator substrates 201 is not limited, as long as the protrusion 2012 and the magnetic levitation coil 2012c of the first magnetic stator substrate 201a apply a force on the rotor 10 along the axial direction Z of the stator 20 and the ratio of the number of the first magnetic stator substrates 201a to the total number of at least three magnetic stator substrates 201 is greater than or equal to 50%. For example, in Figure 3 although the upper two magnetic stator substrates 201 are shown as the first magnetic stator substrates 201a, it may also be the lower two magnetic stator substrates that are the first magnetic stator substrates 201a.

[0080] It should be noted that, as an example, Figures 1 to 4 it is shown that the stator 20 is arranged around the rotor 10; however, the embodiments of the present disclosure are not limited thereto, and it may also be that the rotor 10 is arranged around the stator 20.

[0081] For example, according to the embodiments of the present disclosure, the rotor 10 and the stator 20 are spaced apart from each other; further, for example, in the normal working state of the magnetic levitation device, the rotor 110 and the stator 20 are spaced apart from each other so that the rotor 10 and the stator 20 do not contact each other, thereby avoiding a series of problems such as heat generation and pollution caused by mechanical friction. For example, in the case where the stator 20 and the rotor 10 are spaced apart from each other, other structures may be provided in the gap between the stator 20 and the rotor 10 as needed, or no other structures may be provided and the stator 20 and the rotor 10 are only spaced apart from each other through an air gap.

[0082] For example, according to the embodiments of the present disclosure, at least three magnetic stator substrates 201 are spaced apart from each other in the axial direction Z of the stator 20 to define at least two gaps 201' in the axial direction Z of the stator 20; in this case, for example, the number of the magnetic stator substrates 201 is N, N≥3, then the number of the gaps 201' defined by the magnetic stator substrates 201 is N - 1.

[0083] For example, according to the embodiments of the present disclosure, permanent magnets 202 and magnetic conductors 203 are alternately arranged in at least two gaps 201' in the axial direction Z of the stator 20; that is, for two adjacent gaps 201', a permanent magnet 202 is arranged in one gap 201' and a magnetic conductor 203 is arranged in the other gap 201'. Refer to Figure 4, by alternately arranging the permanent magnets 202 and the magnetic conductors 203 in at least two gaps 201' along the axial direction Z of the stator 20, a closed magnetic circuit acting on the rotor 10 can be formed in any two adjacent magnetic stator substrates 201, so that each of at least three magnetic stator substrates 201 can apply a force to the rotor 10, ensuring the controllability of the number of the first magnetic stator substrates 201a and the controllability of the ratio of the number of the first magnetic stator substrates 201a to the total number of at least three magnetic stator substrates 201. It should be noted that according to the embodiments of the present disclosure, either a permanent magnet 202 or a magnetic conductor 203 is arranged in a gap 201', so that any two adjacent magnetic stator substrates 201 among at least three magnetic stator substrates 201 do not directly contact each other.

[0084] For example, according to the embodiments of the present disclosure, the rotor 1 is formed of a magnetic material, and examples of the magnetic material include but are not limited to permanent magnetic materials or ferromagnetic materials. Further, for example, the ferromagnetic material is a soft magnetic material with a magnetic permeability much greater than the magnetic permeability of vacuum, and examples thereof include but are not limited to iron, cobalt, nickel and their alloys, carbon steel, silicon steel, and electrolytic iron. Examples of the permanent magnetic material include but are not limited to samarium cobalt, neodymium iron boron, and ferrite. For example, see Figure 9A , a support structure 102 is provided on the upper surface of the rotor 10, and the article to be supported by the rotor 10 can be placed on the support structure 102. For example, the rotor 10 is used to support a semiconductor wafer to be processed, and the semiconductor wafer is placed on the support structure 102.

[0085] For example, according to the embodiments of the present disclosure, at least three magnetic stator substrates 201 are formed of a magnetic material; further, for example, the magnetic material is a ferromagnetic material; furthermore, for example, the ferromagnetic material is a soft magnetic material with a magnetic permeability much greater than the magnetic permeability of vacuum, and examples thereof include but are not limited to iron, cobalt, nickel and their alloys, carbon steel, silicon steel, and electrolytic iron. For example, the materials of at least three magnetic stator substrates 201 may be the same as or different from each other. The materials of at least three magnetic stator substrates 201 being the same can simplify the processing technology of the magnetic levitation device. For example, see Figure 9B , the substrate body 2011 of each of at least three magnetic stator substrates 201 is a ring. For example, see Figure 9B , each of at least three magnetic stator substrates 201 includes a plurality of protrusions 2012, each protrusion 2012 is connected to the substrate body 2011 and a magnetic levitation coil 2012c is wound on each protrusion 2012. For example, see Figure 9B , the plurality of protrusions 2012 are arranged along the inner circumferential direction of the substrate body 2011 and are spaced apart from each other at equal intervals. For example, see Figure 9B, the dimensions of the multiple protrusions 2012 in the inner circumferential direction of the substrate body 2011 are equal to each other. For example, the multiple protrusions 2012 included in the same magnetic stator substrate 201 are arranged at the same height in the axial direction Z of the stator 20; more specifically, the upper surfaces of the multiple protrusions 2012 included in the same magnetic stator substrate 201 are located in the same plane in the axial direction Z of the stator 20, and the lower surfaces of the multiple protrusions 2012 included in the same magnetic stator substrate 201 are located in the same plane in the axial direction Z of the stator 20. For example, if no permanent magnet 202 and magnetic conductor 203 are provided between any two of the multiple protrusions 2012 in the axial direction Z of the stator 20, then the multiple protrusions 2012 belong to the same magnetic stator substrate 201. It should be noted that in Figure 9B , by way of example, it is shown that the same magnetic stator substrate 201 includes three protrusions 2012; however, the embodiments of the present disclosure are not limited thereto, and the same magnetic stator substrate 201 may include any number of protrusions 2012, which can be flexibly designed according to the situation. It should be noted that the number of protrusions 2012 included in at least three magnetic stator substrates 201 may be the same or different, and the embodiments of the present disclosure do not limit this. For example, the number of protrusions 2012 included in at least three magnetic stator substrates 201 is the same to simplify the processing technology of the magnetic levitation device.

[0086] For example, according to an embodiment of the present disclosure, the permanent magnet 202 is formed of a permanent magnetic material, and examples of the permanent magnetic material include but are not limited to samarium cobalt, neodymium iron boron, and ferrite. For example, referring to Figure 9C , the permanent magnet 202 is a ring. For example, the substrate body 2011 of each of at least three magnetic stator substrates 201 has the same dimension as the permanent magnet 202 in the radial direction, so that the substrate body 2011 and the permanent magnet 202 are completely coincident in the axial direction Z of the stator 20.

[0087] For example, according to an embodiment of the present disclosure, the magnetic conductor 203 may be formed of a magnetic material; further, for example, the magnetic material is a ferromagnetic material; furthermore, for example, the ferromagnetic material is a soft magnetic material with a magnetic permeability much greater than the vacuum magnetic permeability, and examples thereof include but are not limited to iron, cobalt, nickel and their alloys, carbon steel, silicon steel, and electrolytic iron. For example, referring to Figure 9D , the magnetic conductor 203 is a ring. For example, the substrate body 2011 of each of at least three magnetic stator substrates 201 has the same dimension as the magnetic conductor 203 in the radial direction, so that the substrate body 2011 and the magnetic conductor 203 are completely coincident in the axial direction Z of the stator 20. For example, the substrate body 2011, the permanent magnet 202, and the magnetic conductor 203 are completely coincident in the axial direction Z of the stator 20.

[0088] In Figures 1 to 4Among them, as an example, the magnetic levitation device includes three magnetic stator substrates 201, and the three magnetic stator substrates 201 define two gaps 201'. A permanent magnet 202 is disposed in one of the two gaps 201', and a magnetic conductor 203 is disposed in the other of the two gaps 201'. Two of the three magnetic stator substrates 201 are the first magnetic stator substrates 201a. However, the embodiments of the present disclosure are not limited thereto. The number of magnetic stator substrates 201 may be four, five, six or more; correspondingly, the number of gaps 201' also changes with the change in the number of magnetic stator substrates 201, and the permanent magnet 202 and the magnetic conductor 203 are alternately disposed. It should be noted that in Figure 4 Among them, the N pole of the permanent magnet 202 is on the upper side and the S pole is on the lower side, but the embodiments of the present disclosure are not limited thereto. It may also be that the N pole of the permanent magnet 202 is on the lower side and the S pole is on the upper side.

[0089] Figure 5 is a three-dimensional schematic diagram of the magnetic levitation device according to the embodiment of the present disclosure Figure 2 ; Figure 6 is Figure 5 the exploded schematic diagram of the magnetic levitation device shown; Figure 7 is Figure 5 the schematic diagram of the interaction force between the protruding portion of the magnetic stator substrate and the flange of the rotor in the magnetic levitation device shown; Figure 8 is Figure 5 the magnetic field line schematic diagram of the magnetic levitation device shown Figure 1 . For example, Figure 8 is along Figure 5 the sectional view of the rotor 10, the magnetic stator substrate 201, the permanent magnet 202 and the magnetic conductor 203 taken along the A-A line of. See Figures 5 to 8 , the magnetic levitation device includes four magnetic stator substrates 201, and the four magnetic stator substrates 201 define three gaps 201'. The permanent magnet 202 and the magnetic conductor 203 are alternately disposed in the gaps 201'. Three of the four magnetic stator substrates 201 are the first magnetic stator substrates 201a.

[0090] It should be noted that see Figures 5 to 8 , three of the four magnetic stator substrates 201 are the first magnetic stator substrates 201a; however, the embodiments of the present disclosure are not limited thereto. It may also be that all four magnetic stator substrates 201 are the first magnetic stator substrates 201a, or two of the four magnetic stator substrates 201 are the first magnetic stator substrates 201a. Both of these situations satisfy that the ratio of the number of the first magnetic stator substrates 201a to the total number of at least three magnetic stator substrates 201 is greater than or equal to 50%.

[0091] It should be noted that see Figures 5 to 8, the top two magnetic stator substrates 201 and the bottom magnetic stator substrate 201 are the first magnetic stator substrates 201a; however, the embodiments of the present disclosure are not limited thereto, and any three or any two of the four magnetic stator substrates 201 can be the first magnetic stator substrates 201a.

[0092] For example, referring to Figures 1 to 8 , in the magnetic levitation device according to the embodiment of the present disclosure, in the axial direction Z of the stator 20, permanent magnets 202 are arranged in the odd-numbered gaps 201' from top to bottom among at least two gaps 201', and magnetic conductors 203 are arranged in the even-numbered gaps 201' from top to bottom. In this way, the number of permanent magnets 202 is greater than or equal to the number of magnetic conductors 203, enhancing the acting force of the stator 20 on the rotor 10.

[0093] For example, referring to Figures 1 to 8 , in the magnetic levitation device according to the embodiment of the present disclosure, the permanent magnet 202 is in direct contact with the adjacent magnetic stator substrate 201. However, the embodiments of the present disclosure are not limited thereto. Figure 18 is Figure 5 a schematic diagram of the magnetic field lines of the magnetic levitation device shown Figure 2 . Referring to Figure 18 , the permanent magnet 202 and the adjacent magnetic stator substrate 201 are separated by an air gap or a magnetic conductor sheet 204 is inserted between the permanent magnet 202 and the adjacent magnetic stator substrate 201. In these two cases, the size of the permanent magnet 202 and the size of the gap 201' do not need to be tightly matched, thus greatly reducing the requirement for processing accuracy of the magnetic levitation device according to the embodiment of the present disclosure. In the case where there is an air gap between the permanent magnet 202 and the adjacent magnetic stator substrate 201 and they are not in direct contact, a magnetic conductor sheet 204 can be inserted into the air gap or the magnetic conductor sheet 204 can not be inserted into the air gap without affecting the magnetic field closure, and it can be flexibly handled according to the actual situation.

[0094] For example, referring to Figures 1 to 8 , in the magnetic levitation device according to the embodiment of the present disclosure, the magnetic conductor 203 is in direct contact with the adjacent magnetic stator substrate 201. However, the embodiments of the present disclosure are not limited thereto. Referring to Figure 18, the magnetic conductor 203 and the adjacent magnetic stator substrate 201 are separated by an air gap or a magnetic conductor sheet 204 is inserted between the magnetic conductor 203 and the adjacent magnetic stator substrate 201. In both cases, the size of the magnetic conductor 203 does not have to be exactly matched with the size of the gap 201', thus greatly reducing the requirement for processing accuracy of the magnetic levitation device according to the embodiments of the present disclosure. In the case where there is an air gap between the magnetic conductor 203 and the adjacent magnetic stator substrate 201 without direct contact therebetween, a magnetic conductor sheet 204 can be inserted into the air gap or the magnetic conductor sheet 204 can be not inserted into the air gap without affecting the magnetic field closure, and it can be flexibly dealt with according to the actual situation.

[0095] For example, refer to Figures 1 to 8 , in the magnetic levitation device according to the embodiments of the present disclosure, in the axial direction Z of the stator 20, at least three magnetic stator substrates 201 are arranged at equal intervals; in this way, the processing technology of the magnetic levitation device according to the embodiments of the present disclosure can be simplified and the control operation of the magnetic levitation device according to the embodiments of the present disclosure can be simplified. However, the embodiments of the present disclosure are not limited thereto, and in the axial direction Z of the stator 20, at least three magnetic stator substrates 201 can also be arranged at unequal intervals.

[0096] For example, refer to Figures 1 to 8 , in the magnetic levitation device according to the embodiments of the present disclosure, in the axial direction Z of the stator 20, the thickness of the permanent magnet 202 is equal to the thickness of the magnetic conductor 203; in this way, the processing technology of the magnetic levitation device according to the embodiments of the present disclosure can be simplified and the control operation of the magnetic levitation device according to the embodiments of the present disclosure can be simplified. However, the embodiments of the present disclosure are not limited thereto, and in the axial direction Z of the stator 20, the thickness of the permanent magnet 202 can also be not equal to the thickness of the magnetic conductor 203.

[0097] For example, refer to Figures 1 to 8 , in the magnetic levitation device according to the embodiments of the present disclosure, in the axial direction Z of the stator 20, the thicknesses of at least three magnetic stator substrates 201 are the same as each other; in this way, the processing technology of the magnetic levitation device according to the embodiments of the present disclosure can be simplified and the control operation of the magnetic levitation device according to the embodiments of the present disclosure can be simplified. However, the embodiments of the present disclosure are not limited thereto, and in the axial direction Z of the stator 20, the thicknesses of at least three magnetic stator substrates 201 can also be different from each other.

[0098] For example, refer to Figures 1 to 8, in the magnetic levitation device according to an embodiment of the present disclosure, at least three magnetic stator substrates 201 further include a second magnetic stator substrate 201b. The protrusion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c wound thereon apply a force downward along the axial direction Z of the stator 20 to the rotor 10, and the number of the first magnetic stator substrates 201a is greater than or equal to the number of the second magnetic stator substrates 201b. By providing the second magnetic stator substrate 201b and making the protrusion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c wound thereon apply a force downward along the axial direction Z of the stator 20 to the rotor 10, the position of the rotor 10 in the axial direction Z of the stator 20 can be adjusted under the action of the resultant force of the upward force and the downward force, enhancing the flexibility of the magnetic levitation device according to an embodiment of the present disclosure. By making the number of the first magnetic stator substrates 201a greater than or equal to the number of the second magnetic stator substrates 201b, it can be ensured that the ratio of the number of the first magnetic stator substrates 201a to the total number of the three magnetic stator substrates 201 is greater than 50%, so as to ensure that the magnetic levitation device can provide a sufficiently large axial support force to balance the gravity of the rotor 10 and the gravity of the object supported or lifted by the rotor 10, so that even in the case where the mass of the rotor 10 itself is relatively large and / or in the case where the rotor 10 supports or lifts an object with a relatively large mass, the rotor 10 will not become unstable due to its own gravity and the gravity of the object it supports or lifts, and the rotor 10 can still rotate and levitate stably.

[0099] For example, the magnitude of the current in the magnetic levitation coil 2012c wound around the protrusion 2012 of the second magnetic stator substrate 201b can be adjusted, so that the magnitude of the force downward along the axial direction Z of the stator 20 applied by the protrusion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c to the rotor 10 can be adjusted. In this way, the real-time adjustment of the position of the rotor in the axial direction Z of the stator 20 can be realized according to the actual situation, improving the working flexibility of the magnetic levitation device according to an embodiment of the present disclosure.

[0100] For example, according to an embodiment of the present disclosure, the number of the first magnetic stator substrates 201a is at least two, and the number of the second magnetic stator substrates 201b is at least one, to ensure that the number of the first magnetic stator substrates 201a is greater than the number of the second magnetic stator substrates 201b. Thus, while ensuring the adjustability of the position of the rotor 10 in the axial direction Z of the stator 20, it is ensured that the magnetic levitation device can provide a sufficiently large axial support force to balance the gravity of the rotor 10 and the gravity of the object supported or lifted by the rotor 10.

[0101] For example, according to an embodiment of the present disclosure, the number of the second magnetic stator substrates 201b is one. In this case, except for one magnetic stator substrate serving as the second magnetic stator substrate 201b, the other magnetic stator substrates all serve as the first magnetic stator substrates 201a, so that the magnetic levitation device can provide a more sufficient axial supporting force to balance the gravity of the rotor 10 with a larger mass and the gravity of the item with a larger mass supported or lifted by the rotor 10.

[0102] It should be noted that according to an embodiment of the present disclosure, at least three magnetic stator substrates 201 further include a magnetic stator substrate that neither serves as the first magnetic stator substrate 201a nor serves as the second magnetic stator substrate 201b; that is, such a magnetic stator substrate neither applies a force to the rotor 10 in the axial direction Z of the stator 20 nor applies a force to the rotor 10 in the axial direction Z of the stator 20. For example, a magnetic rotation coil is provided on such a magnetic stator substrate.

[0103] For example, referring to Figures 5 to 8 , according to an embodiment of the present disclosure, the number of at least three magnetic stator substrates 201 is four or more than four, and in the axial direction Z of the stator 20, the magnetic properties of the opposite surfaces of two adjacent permanent magnets 202 are the same; in this way, a closed magnetic circuit acting on the rotor 10 can be formed in any two adjacent magnetic stator substrates 201, so that each of the at least three magnetic stator substrates 201 can apply a force to the rotor 10, ensuring the controllability of the number of the first magnetic stator substrates 201a and the controllability of the ratio of the number of the first magnetic stator substrates 201a to the total number of the at least three magnetic stator substrates 201. As an example, in Figure 5 , it is shown that the magnetic properties of the opposite surfaces of two adjacent permanent magnets 202 are the same and both are N poles. However, the embodiment of the present disclosure is not limited thereto, and the magnetic properties of the opposite surfaces of two adjacent permanent magnets 202 are the same and both are S poles. It should be noted that "two adjacent permanent magnets 202" means that there are no other permanent magnets 202 between the two permanent magnets 202, but other components except the permanent magnets 202, such as magnetic stator substrates 201 and magnetic conductors 203, can be provided between the two permanent magnets 202.

[0104] For example, referring to Figures 5 to 8 , according to an embodiment of the present disclosure, the stator 20 includes at least two permanent magnets 202, and the magnetic field intensities of the at least two permanent magnets 202 are equal to each other; in this way, the processing technology of the magnetic levitation device according to the embodiment of the present disclosure can be simplified and the control operation of the magnetic levitation device according to the embodiment of the present disclosure can be simplified.

[0105] For example, referring to Figures 1 to 8 and Figure 9A, according to an embodiment of the present disclosure, the rotor 10 includes a rotor main body 100 and at least three flanges 101 protruding from the rotor main body 100 towards the stator 20; the number of at least three magnetic stator substrates 201 is equal to that of the at least three flanges 101 and they correspond to each other one by one; the at least three flanges 101 include a first flange 101a corresponding to the first magnetic stator substrate 201a, and the midline of the protruding portion 2012 of the first magnetic stator substrate 201a on the axial direction Z of the stator 20 is higher than the midline of the first flange 101a on the axial direction Z of the stator 20. The midline of the protruding portion 2012 of the first magnetic stator substrate 201a on the axial direction Z of the stator 20 being higher than the midline of the first flange 101a on the axial direction Z of the stator 20 can ensure that the protruding portion 2012 of the first magnetic stator substrate 201a and the magnetic levitation coil 2012c exert an upward force on the rotor 10 along the axial direction Z of the stator 20. For example, the relative relationship between the midline of the protruding portion 2012 of the first magnetic stator substrate 201a on the axial direction Z of the stator 20 and the midline of the first flange 101a on the axial direction Z of the stator 20 can be adjusted by adjusting the current in the magnetic levitation coil 2012c wound on the protruding portion 2012 of the first magnetic stator substrate 201a and / or by adjusting the current in the magnetic levitation coil 2012c wound on the protruding portion 2012 of the second magnetic stator substrate 201b.

[0106] For example, in the magnetic levitation device according to an embodiment of the present disclosure, the thickness of each of the at least three magnetic stator substrates 201 on the axial direction Z of the stator 20 may be equal to the thickness of each of the at least three flanges 101 on the axial direction Z of the stator 20; in this way, the processing technology of the magnetic levitation device according to the embodiment of the present disclosure can be simplified and the control operation of the magnetic levitation device according to the embodiment of the present disclosure can be simplified. However, the embodiments of the present disclosure are not limited thereto, and the thickness of each of the at least three magnetic stator substrates 201 on the axial direction Z of the stator also may not be equal to the thickness of each of the at least three flanges 101 on the axial direction Z of the stator 20.

[0107] Figures 10A-10B , Figures 11A-11B , Figures 12A-12B and Figures 13A-13B respectively show the positional relationship between the protruding portion 2012 of the first magnetic stator substrate 201a and the first flange 101a of the rotor 10 in the magnetic levitation device according to an embodiment of the present disclosure; in these figures, the midline of the protruding portion 2012 of the first magnetic stator substrate 201a on the axial direction Z of the stator 20 and the midline of the first flange 101a of the rotor 10 on the axial direction Z of the stator 20 are marked with dotted lines.

[0108] For example, according to an embodiment of the present disclosure, the midline of the protrusion 2012 of the first magnetic stator substrate 201a in the axial direction Z of the stator 20 is higher than the midline of the first flange 101a of the rotor 10 in the axial direction Z of the stator 20, including one of the following situations. Situation (1): In the axial direction Z of the stator 20, the upper surface of the protrusion 2012 of the first magnetic stator substrate 201a is higher than the upper surface of the first flange 101a, and the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a is higher than the upper surface of the first flange 101a (see Figure 10A ) or the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a is at the same height as the upper surface of the first flange 101a (see Figure 10B ). Situation (2): In the axial direction Z of the stator 20, the upper surface of the protrusion 2012 of the first magnetic stator substrate 201a is higher than the upper surface of the first flange 101a (see Figure 11A ) or at the same height as the upper surface of the first flange 101a (see Figure 11B ), the lower surface of the first flange 101a is lower than the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a, and the upper surface of the first flange 101a is higher than the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a. Situation (3): In the axial direction Z of the stator 20, the upper surface of the protrusion 2012 of the first magnetic stator substrate 201a is higher than the upper surface of the first flange 101a, and the lower surface of the first flange 101a is higher than the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a (see Figure 12A ) or at the same height as the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a ( Figure 12B ). Situation (4): In the axial direction Z of the stator 20, the upper surface of the protrusion 2012 of the first magnetic stator substrate 201a is at the same height as the upper surface of the first flange 101a (see Figure 13A ) or lower than the upper surface of the first flange 101a (see Figure 13B ), and the lower surface of the protrusion 2012 of the first magnetic stator substrate 201a is higher than the lower surface of the first flange 101a.

[0109] For example, according to an embodiment of the present disclosure, see Figure 11A, in the above-mentioned situation (2), the distance between the upper surface of the protruding portion 2012 of the first magnetic stator substrate 201a and the upper surface of the first flange 101a is H, where H ≤ 4 / 5 Ha, and Ha is the dimension of the first flange 101a in the axial direction Z of the stator 20; in this case, the stator 20 can stably control the rotor 10, and can stably ensure that the protruding portion 2012 of the first magnetic stator substrate 201a and the magnetic levitation coil 2012c apply an upward force along the axial direction Z of the stator 20 to the rotor 10 and ensure the stable rotation and suspension of the rotor 10. Further, H ≤ 1 / 5 Ha, which can more stably ensure that the protruding portion 2012 of the first magnetic stator substrate 201a and the magnetic levitation coil 2012c apply an upward force along the axial direction Z of the stator 20 to the rotor 10 and ensure the stable rotation and suspension of the rotor 10.

[0110] For example, refer to Figures 1 to 8 and Figure 9A , according to an embodiment of the present disclosure, at least three flanges 101 include a second flange 101b corresponding to the second magnetic stator substrate 201b, and the midline of the second flange 101b in the axial direction Z of the stator 20 is higher than the midline of the protruding portion 2012 of the second magnetic stator substrate 201b in the axial direction Z of the stator 20. In this way, it can be ensured that the protruding portion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c apply a downward force along the axial direction Z of the stator 20 to the rotor 10. For example, the relative relationship between the midline of the protruding portion 2012 of the second magnetic stator substrate 201b in the axial direction Z of the stator 20 and the midline of the second flange 101b in the axial direction Z of the stator 20 can be adjusted by adjusting the current in the magnetic levitation coil 2012c wound around the protruding portion 2012 of the first magnetic stator substrate 201a and / or adjusting the current in the magnetic levitation coil 2012c wound around the protruding portion 2012 of the second magnetic stator substrate 201b.

[0111] Figures 14A-14B 、 Figures 15A-15B 、 Figures 16A-16B and Figures 17A-17B respectively show the positional relationship between the second flange 101a of the rotor 10 and the protruding portion 2012 of the second magnetic stator substrate 201b in the magnetic levitation device according to an embodiment of the present disclosure; in these figures, the midline of the protruding portion 2012 of the second magnetic stator substrate 201b in the axial direction Z of the stator 20 and the midline of the second flange 101b of the rotor 10 in the axial direction Z of the stator 20 are marked with dashed lines.

[0112] For example, according to an embodiment of the present disclosure, the midline of the second flange 101b of the rotor 10 on the axial direction Z of the stator 20 is higher than the midline of the protrusion 2012 of the second magnetic stator substrate 201b on the axial direction Z of the stator 20, including one of the following situations. Situation (1): On the axial direction Z of the stator 20, the upper surface of the second flange 101b is higher than the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b, and the lower surface of the second flange 101b is higher than the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b (see Figure 14A ) or is at the same height as the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b (see Figure 14B ). Situation (2): On the axial direction Z of the stator 20, the upper surface of the second flange 101b is higher than the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b (see Figure 15A ) or is at the same height as the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b, the lower surface of the protrusion 2012 of the second magnetic stator substrate 201b is lower than the lower surface of the second flange 101b, and the lower surface of the second flange 101b is lower than the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b. Situation (3): On the axial direction Z of the stator 20, the upper surface of the second flange 101b is higher than the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b, and the lower surface of the protrusion 2012 of the second magnetic stator substrate 201b is higher than the lower surface of the second flange 101b (see Figure 16A ) or is at the same height as the lower surface of the second flange 101b (see Figure 16B ). Situation (4): On the axial direction Z of the stator 20, the upper surface of the second flange 101b is at the same height as the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b (see Figure 17A ) or is lower than the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b (see Figure 17B ), and the lower surface of the second flange 101b is higher than the lower surface of the protrusion 2012 of the second magnetic stator substrate 201b.

[0113] For example, according to an embodiment of the present disclosure, see Figure 15A, in the above situation (2), the distance between the upper surface of the second flange 101b and the upper surface of the protrusion 2012 of the second magnetic stator substrate 201b is H, and H ≤ 4 / 5Ha, where Ha is the dimension of the second flange 101b in the axial direction Z of the stator; in this case, the stator 20 can stably control the rotor 10, and can stably ensure that the protrusion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c apply a downward force along the axial direction Z of the stator 20 to the rotor 10 and ensure the stable rotation and suspension of the rotor 10. Further, H ≤ 1 / 5Ha, which can more stably ensure that the protrusion 2012 of the second magnetic stator substrate 201b and the magnetic levitation coil 2012c apply a downward force along the axial direction Z of the stator 20 to the rotor 10 and ensure the stable rotation and suspension of the rotor 10.

[0114] For example, according to an embodiment of the present disclosure, refer to Figure 11A and Figure 15A , the distance between each of at least three magnetic stator substrates 201 and its corresponding flange 101 in the radial direction of the stator 20 is L, and the dimension of each of at least two gaps 201' in the axial direction Z of the stator 20 is at least three times that of L, so that the stator 20 can more stably control the rotor 10. For example, further, the dimension of each of at least two gaps 201' in the axial direction Z of the stator 20 is at least five times that of L. For example, further, the dimension of each of at least two gaps 201' in the axial direction Z of the stator 20 is at least 10 times that of L. For example, the radial direction of the stator 20 is perpendicular to the axial direction Z of the stator 20.

[0115] For example, according to an embodiment of the present disclosure, refer to Figure 11A and Figure 15A , the distance between each of at least three magnetic stator substrates 201 and its corresponding flange 101 in the radial direction of the stator 20 is L, and L ≤ Ha, where Ha is the dimension of the flange 101 in the axial direction Z of the stator 20, so that the stator 20 can more stably control the rotor 10. Further, for example, L ≤ 1 / 2Ha.

[0116] Figure 9E is a three-dimensional schematic view of the magnetic stator substrate of the magnetic levitation device according to an embodiment of the present disclosure Figure 2 ; Figure 9F is a three-dimensional schematic view of the magnetic rotation coil of the magnetic levitation device according to an embodiment of the present disclosure Figure 1 . For example, refer to Figure 2 , Figure 6 and Figure 9E-9F, in the magnetic levitation device according to an embodiment of the present disclosure, at least one of the at least three magnetic stator substrates 201 includes a plurality of tooth portions 2013, the plurality of tooth portions 2013 are connected to the substrate body 2011, and the plurality of tooth portions 2013 protrude toward the rotor 10 beyond the permanent magnet 202 and the magnetic conductor 203. A magnetic rotation coil 2013c is wound around each tooth portion 2013. For example, a current is passed through the magnetic rotation coil 2013c. Under the action of the tooth portion 2013 and the magnetic rotation coil 2013c wound thereon, the rotor 10 rotates. For example, the magnitude of the current in the magnetic rotation coil 2013c can be adjusted, so that the rotational speed of the rotor 10 can be adjusted, enhancing the working flexibility of the magnetic levitation device according to an embodiment of the present disclosure. The at least one magnetic stator substrate 201 including the tooth portion 2013 and the magnetic rotation coil 2013c has both the functions of magnetic rotation and magnetic levitation. For example, the magnetic levitation coil 2012c is farther from the rotor 10 than the magnetic rotation coil 2013c. Since the circumferential span of the magnetic levitation coil 2012c is greater than the circumferential span of the magnetic rotation coil 2012c, setting the magnetic levitation coil 2012c farther from the rotor 10 than the magnetic rotation coil 2013c can prevent the magnetic rotation coil 2013c from affecting the magnetic field distribution of the magnetic levitation coil 2012c. For example, the plurality of tooth portions 2013 are provided at the end of the protrusion 2012 facing the rotor 10.

[0117] For example, the at least one magnetic stator substrate 201 including the tooth portion 2013 and the magnetic rotation coil 2013c may be the first magnetic stator substrate 201a, or may be the second magnetic stator substrate 201b, or may be neither the first magnetic stator substrate 201a nor the second magnetic stator substrate 201b, and the embodiments of the present disclosure do not limit this. For example, the magnetic levitation device according to an embodiment of the present disclosure includes another magnetic stator substrate in addition to the above-mentioned at least three magnetic stator substrates. This other magnetic stator substrate only includes the tooth portion 2013 and the magnetic rotation coil 2013c and does not include the protrusion 2012 and the magnetic levitation coil 2012c, so that this other magnetic stator substrate only has the function of magnetic rotation.

[0118] For example, according to an embodiment of the present disclosure, the at least one magnetic stator substrate 201 including the tooth portion 2013 and the magnetic rotation coil 2013c is one, and is the magnetic stator substrate 201 located at the uppermost layer or the lowermost layer in the axial direction Z of the stator 20 among the at least three magnetic stator substrates 201; in this case, it will make the processing of the stator 20 easier.

[0119] For example, according to an embodiment of the present disclosure, there is one magnetic stator substrate 201 including at least the tooth portion 2013 and the magnetic rotating coil 2013c, and it is the magnetic stator substrate 201 located in the middle layer in the axial direction Z of the stator 20 among at least three magnetic stator substrates 201; in this case, the rotational force exerted by the stator 20 on the rotor 10 is generally located in the middle part of the rotor 10 in the axial direction Z of the stator 20, making the rotation of the rotor 10 more stable.

[0120] For example, according to an embodiment of the present disclosure, the number of magnetic stator substrates 201 including at least the tooth portion 2013 and the magnetic rotating coil 2013c is an even number, and they are symmetrically arranged with respect to the midline of the stator 20 in the axial direction Z of the stator 20; in this case, the even number of magnetic stator substrates 201 including the tooth portion 2013 and the magnetic rotating coil 2013c are symmetrically arranged in the axial direction Z of the stator 20, making the rotation of the rotor 10 more stable. For example, according to an embodiment of the present disclosure, the number of magnetic stator substrates 201 including at least the tooth portion 2013 and the magnetic rotating coil 2013c is an odd number greater than 1, where one magnetic stator substrate 201 including the tooth portion 2013 and the magnetic rotating coil 2013c is the magnetic stator substrate 201 located in the middle layer in the axial direction Z of the stator 20 among the above at least three magnetic stator substrates 201, and the remaining magnetic stator substrates 201 including the tooth portion 2013 and the magnetic rotating coil 2013c are symmetrically arranged with respect to the midline of the stator 20 in the axial direction Z of the stator 20, making the rotation of the rotor 10 more stable.

[0121] For example, refer to Figure 2 , Figure 6 and Figure 9A , according to an embodiment of the present disclosure, the rotor 10 includes a rotor body 100 and at least three flanges 101 protruding from the rotor body 100 towards the stator 20; the number of at least three magnetic stator substrates 201 is equal to the number of at least three flanges 101 and they correspond to each other one by one; the end of the flange 101 corresponding to the above at least one magnetic stator substrate 201 facing the above at least one magnetic stator substrate 201 has a plurality of tooth portions 103; in this case, the tooth portion 2013 and the magnetic rotating coil 2013c can better apply the rotational force to the rotor 10, making the rotor 10 rotate efficiently.

[0122] According to an embodiment of the present disclosure, there is also provided a semiconductor processing device including the magnetic levitation device as described above.

[0123] In the field of semiconductor processing, semiconductor wafers or other semiconductor components to be processed will undergo semiconductor process steps such as rapid thermal processing (RTP), chemical vapor deposition (e.g., metal organic chemical vapor deposition (MOCVD)), sputtering, cleaning, photoresist coating, etching, and metrology. In these semiconductor process steps, fragile silicon wafers or other semiconductor material wafers or other semiconductor components must be processed in a controlled ultra-clean atmosphere, such as a vacuum, an inert gas, or a process gas. Microscopic contaminants in the atmosphere are a serious problem because they can be directly deposited on the semiconductor wafers or other semiconductor components to be processed, or they can be deposited on the wafers or other semiconductor components along with the processing gas. Microscopic particles on the wafers or other semiconductor components will contaminate them, and semiconductor products made from the contaminated wafers or other semiconductor components will have defects. Therefore, the cleanliness of the wafers or other semiconductor components to be processed is directly related to the yield, which in turn affects the cost of the final product. For example, during semiconductor processing, channels filled with a vacuum or an inert gas are used to connect multiple chambers, which are vacuum chambers or chambers filled with an inert gas and are specifically used for certain semiconductor process steps. According to an embodiment of the present disclosure, there is no contact and no mechanical friction between the rotor and the stator of the magnetic levitation device, so that the magnetic levitation device according to an embodiment of the present disclosure is very suitable for semiconductor processing equipment. For example, the magnetic levitation device according to an embodiment of the present disclosure is used as a support device in semiconductor processing equipment. For example, the rotor of the magnetic levitation device according to an embodiment of the present disclosure supports a rotatable platform, and the rotatable platform in turn supports the semiconductor wafers or other semiconductor components to be processed. As described above, the magnetic levitation device according to an embodiment of the present disclosure can provide a large axial support force; in this case, the magnetic levitation device according to an embodiment of the present disclosure can carry a rotatable platform with a large mass, ensuring that the rotatable platform rotates stably and uniformly, thereby favorably ensuring the qualification rate of semiconductor processing.

[0124] The above description is only an exemplary embodiment of the present invention and is not intended to limit the protection scope of the present invention. The protection scope of the present invention is determined by the appended claims.

Claims

1. A magnetic levitation device, comprising: a rotor; and a stator, wherein the stator is disposed around the rotor or the rotor is disposed around the stator, and the stator includes at least three magnetic stator substrates, a permanent magnet, and a magnetic conductor. The at least three magnetic stator substrates are spaced apart from each other in the axial direction of the stator to define at least two gaps in the axial direction of the stator. In the axial direction of the stator, the permanent magnet and the magnetic conductor are alternately disposed in the at least two gaps; each of the at least three magnetic stator substrates includes a substrate body and a protrusion connected to the substrate body. The protrusion protrudes toward the rotor and protrudes from the permanent magnet and the magnetic conductor, and a magnetic levitation coil is wound around the protrusion; and the at least three magnetic stator substrates include a first magnetic stator substrate. The protrusion and the magnetic levitation coil of the first magnetic stator substrate apply an upward force along the axial direction of the stator to the rotor, and the ratio of the number of the first magnetic stator substrates to the total number of the at least three magnetic stator substrates is greater than or equal to 50%; the at least three magnetic stator substrates further include a second magnetic stator substrate. The protrusion and the magnetic levitation coil of the second magnetic stator substrate apply a downward force along the axial direction of the stator to the rotor, and the number of the first magnetic stator substrates is greater than or equal to the number of the second magnetic stator substrates.

2. The magnetic levitation device according to claim 1, wherein the number of the at least three magnetic stator substrates is four or more than four; in the axial direction of the stator, the magnetic properties of the opposite surfaces of two adjacent permanent magnets are the same.

3. The magnetic levitation device according to claim 2, wherein the stator includes at least two permanent magnets, and the magnetic field intensities of the at least two permanent magnets are equal to each other.

4. The magnetic levitation device according to claim 1, wherein the rotor includes a rotor body and at least three flanges protruding from the rotor body toward the stator; the number of the at least three magnetic stator substrates is equal to the number of the at least three flanges and they correspond to each other one by one; the at least three flanges include a first flange corresponding to the first magnetic stator substrate, and the midline of the protrusion of the first magnetic stator substrate in the axial direction of the stator is higher than the midline of the first flange in the axial direction of the stator.

5. The magnetic levitation device according to claim 4, wherein the midline of the protrusion of the first magnetic stator substrate in the axial direction is higher than the midline of the first flange in the axial direction, including one of the following situations: (1) In the axial direction of the stator, the upper surface of the protrusion of the first magnetic stator substrate is higher than the upper surface of the first flange, and the lower surface of the protrusion of the first magnetic stator substrate is higher than the upper surface of the first flange or is flush with the upper surface of the first flange; (2) In the axial direction of the stator, the upper surface of the protrusion of the first magnetic stator substrate is higher than the upper surface of the first flange or is at the same level as the upper surface of the first flange, the lower surface of the first flange is lower than the lower surface of the protrusion of the first magnetic stator substrate, and the upper surface of the first flange is higher than the lower surface of the protrusion of the first magnetic stator substrate; (3) In the axial direction of the stator, the upper surface of the protrusion of the first magnetic stator substrate is higher than the upper surface of the first flange, and the lower surface of the first flange is higher than the lower surface of the protrusion of the first magnetic stator substrate or is at the same level as the lower surface of the protrusion of the first magnetic stator substrate; And (4) In the axial direction of the stator, the upper surface of the protrusion of the first magnetic stator substrate is at the same level as the upper surface of the first flange or lower than the upper surface of the first flange, and the lower surface of the protrusion of the first magnetic stator substrate is higher than the lower surface of the first flange.

6. The magnetic levitation device according to claim 5, wherein In the case of (2), the distance between the upper surface of the protrusion of the first magnetic stator substrate and the upper surface of the first flange is H, and H ≤ 4 / 5 Ha, where Ha is the dimension of the first flange in the axial direction of the stator.

7. The magnetic levitation device according to claim 6, wherein, H ≤ 1 / 5 Ha.

8. The magnetic levitation device according to claim 4, wherein the at least three flanges include a second flange corresponding to the second magnetic stator substrate, and the midline of the second flange in the axial direction of the stator is higher than the midline of the protrusion of the second magnetic stator substrate in the axial direction of the stator.

9. The magnetic levitation device according to claim 8, wherein the midline of the second flange in the axial direction being higher than the midline of the protrusion of the second magnetic stator substrate in the axial direction includes one of the following situations: (1) In the axial direction of the stator, the upper surface of the second flange is higher than the upper surface of the protrusion of the second magnetic stator substrate, and the lower surface of the second flange is higher than the upper surface of the protrusion of the second magnetic stator substrate or is at the same level as the upper surface of the protrusion of the second magnetic stator substrate; (2) In the axial direction of the stator, the upper surface of the second flange is higher than the upper surface of the protrusion of the second magnetic stator substrate or is at the same level as the upper surface of the protrusion of the second magnetic stator substrate, the lower surface of the protrusion of the second magnetic stator substrate is lower than the lower surface of the second flange, and the lower surface of the second flange is lower than the upper surface of the protrusion of the second magnetic stator substrate; (3) In the axial direction of the stator, the upper surface of the second flange is higher than the upper surface of the protrusion of the second magnetic stator substrate, and the lower surface of the protrusion of the second magnetic stator substrate is higher than the lower surface of the second flange or is at the same level as the lower surface of the second flange; And (4) In the axial direction of the stator, the upper surface of the second flange is at the same level as the upper surface of the protrusion of the second magnetic stator substrate or lower than the upper surface of the protrusion of the second magnetic stator substrate, and the lower surface of the second flange is higher than the lower surface of the protrusion of the second magnetic stator substrate.

10. The magnetic levitation device according to claim 9, wherein, in the case of (2), the distance between the upper surface of the second flange and the upper surface of the protruding portion of the second magnetic stator substrate is H, and H ≤ 4 / 5 Ha, where Ha is the dimension of the second flange in the axial direction of the stator.

11. The magnetic levitation device according to claim 10, wherein, H ≤ 1 / 5 Ha.

12. The magnetic levitation device according to claim 4, wherein, the distance between each of the at least three magnetic stator substrates and its corresponding flange in the radial direction of the stator is L; the dimension of each of the at least two gaps in the axial direction of the stator is at least three times that of the L.

13. The magnetic levitation device according to claim 12, wherein, the dimension of each of the at least two gaps in the axial direction of the stator is at least five times that of the L.

14. The magnetic levitation device according to claim 13, wherein, the dimension of each of the at least two gaps in the axial direction of the stator is at least ten times that of the L.

15. The magnetic levitation device according to claim 4, wherein, the distance between each of the at least three magnetic stator substrates and its corresponding flange in the radial direction of the stator is L, and L ≤ Ha, where Ha is the dimension of the flange in the axial direction of the stator.

16. The magnetic levitation device according to claim 15, wherein, L ≤ 1 / 2 Ha.

17. The magnetic levitation device according to claim 1, wherein, at least one of the at least three magnetic stator substrates includes a plurality of tooth portions, the plurality of tooth portions are connected to the substrate body, the plurality of tooth portions protrude toward the rotor and protrude from the permanent magnet and the magnetic conductor, and a magnetic rotation coil is wound around each tooth portion.

18. The magnetic levitation device according to claim 17, wherein, the magnetic levitation coil is farther from the rotor than the magnetic rotation coil.

19. The magnetic levitation device according to claim 17, wherein, the plurality of tooth portions are provided at the end of the protruding portion facing the rotor.

20. The magnetic levitation device according to claim 17, wherein the at least one magnetic stator substrate is one, and is the magnetic stator substrate located at the uppermost layer or the lowermost layer among the at least three magnetic stator substrates in the axial direction of the stator.

21. The magnetic levitation device according to claim 17, wherein, the at least one magnetic stator substrate is one, and is the magnetic stator substrate located at the middle layer among the at least three magnetic stator substrates in the axial direction of the stator.

22. The magnetic levitation device according to claim 17, wherein, the at least one magnetic stator substrate is an even number, and is symmetrically arranged with respect to the center line of the stator in the axial direction; or the at least one magnetic stator substrate is an odd number greater than 1, one of the magnetic stator substrates is the magnetic stator substrate located at the middle layer among the at least three magnetic stator substrates in the axial direction of the stator, and the remaining magnetic stator substrates are symmetrically arranged with respect to the center line of the stator in the axial direction.

23. The magnetic levitation device according to claim 17, wherein, the rotor includes a rotor body and at least three flanges protruding from the rotor body toward the stator; the number of the at least three magnetic stator substrates is equal to the number of the at least three flanges and they correspond to each other one by one; the end of the flange corresponding to the at least one magnetic stator substrate facing the at least one magnetic stator substrate has a plurality of tooth portions.

24. The magnetic levitation device according to claims 1-23, wherein, the number of the first magnetic stator substrates is at least two, and the number of the second magnetic stator substrates is at least one.

25. The magnetic levitation device according to claim 24, wherein, The number of the second magnetic stator substrates is one.

26. The magnetic levitation device according to any one of claims 1-23, wherein, In the axial direction of the stator, the permanent magnets are arranged in the odd-numbered gaps from top to bottom among at least two gaps, and the magnetic conductors are arranged in the even-numbered gaps from top to bottom.

27. The magnetic levitation device according to claims 1-23, wherein, the permanent magnet is in direct contact with the adjacent magnetic stator substrate, or the permanent magnet and the adjacent magnetic stator substrate are separated by an air gap, or a magnetic conductor sheet is inserted between the permanent magnet and the adjacent magnetic stator substrate.

28. The magnetic levitation device according to claims 1-23, wherein, the magnetic conductor is in direct contact with the adjacent magnetic stator substrate, or the magnetic conductor and the adjacent magnetic stator substrate are separated by an air gap, or a magnetic conductor sheet is inserted between the magnetic conductor and the adjacent magnetic stator substrate.

29. The magnetic levitation device according to claims 1-23, wherein, In the axial direction of the stator, the at least three magnetic stator substrates are arranged at equal intervals.

30. The magnetic levitation device according to claim 29, wherein, In the axial direction of the stator, the thickness of the permanent magnet is equal to the thickness of the magnetic conductor.

31. The magnetic levitation device according to any one of claims 1-23, wherein, In the axial direction of the stator, the thicknesses of the at least three magnetic stator substrates are the same as each other.

32. A semiconductor processing device, comprising the magnetic levitation device according to any one of claims 1-31.

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