MEMS mirror state detection method and MEMS laser radar

Abstract

The application is suitable for the field of radar technology, and provides a MEMS mirror state detection method and a MEMS laser radar. The MEMS mirror state detection method comprises the following steps: acquiring a sound signal when a MEMS mirror vibrates, and determining an amplitude of the sound signal in a time domain; if the amplitude is within a set range, determining a working state of the MEMS mirror according to a relationship between a frequency of the sound signal and a reference frequency of a reference sound signal and a first temperature when the sound signal is collected, wherein the working state comprises normal working or abnormality, so that the state of the MEMS mirror can be detected during the working process of the MEMS laser radar, data collection and target detection of the MEMS laser radar can be avoided when the MEMS mirror is abnormal, and the detection accuracy and reliability of the MEMS laser radar are improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of radars, and particularly relates to a MEMS mirror state detection method and a MEMS laser radar. BACKGROUND

[0002] The MEMS laser radar controls the deflection direction of laser by controlling the rotation of the MEMS mirror. When the circuit of the MEMS laser radar is abnormal or the mechanical structure changes, the vibration period or amplitude of the MEMS mirror changes, which causes the laser light emitting angle to deviate or the MEMS mirror to stop vibrating, and further affects the service life and detection accuracy of the MEMS laser radar. Therefore, if the working state of the MEMS mirror cannot be detected during use, the detection accuracy and reliability of the MEMS laser radar will be affected. SUMMARY

[0003] Therefore, the embodiments of the application provide a MEMS mirror state detection method and a MEMS laser radar, which can detect the working state of the MEMS mirror when the MEMS laser radar is working, so as to improve the detection accuracy and reliability of the MEMS laser radar.

[0004] The first aspect of the embodiments of the application provides a MEMS mirror state detection method, comprising:

[0005] acquiring a sound signal when the MEMS mirror vibrates;

[0006] determining the amplitude of the sound signal in the time domain;

[0007] if the amplitude is within a set range, determining the working state of the MEMS mirror according to the relationship between the frequency of the sound signal and the reference frequency of a reference sound signal, and the first temperature in the MEMS laser radar to which the MEMS mirror belongs when the sound signal is collected, wherein the working state includes normal working or abnormal.

[0008] In a possible implementation manner, determining the working state of the MEMS mirror according to the relationship between the frequency of the sound signal and the reference frequency of the reference sound signal, and the first temperature in the MEMS laser radar to which the MEMS mirror belongs when the sound signal is collected, comprises:

[0009] If there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a first preset value, or if there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a second preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal in the calibrated sound signal whose frequency difference from the reference frequency is less than or equal to the first preset value, it is determined that the working state of the MEMS mirror is normal working, and the second preset value is greater than the first preset value.

[0010] In a possible implementation, the abnormality includes that maintenance is needed or damage occurs, and the working state of the MEMS mirror is determined according to the relationship between the frequency of the sound signal and the reference frequency of the reference sound signal, and the first temperature in the MEMS laser radar to which the MEMS mirror belongs when the sound signal is collected, including:

[0011] If there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a second preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal in the calibrated sound signal whose frequency difference from the reference frequency is less than or equal to a first preset value, it is determined that the working state of the MEMS mirror is that maintenance is needed.

[0012] If there is no signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a second preset value, it is determined that the working state of the MEMS mirror is that maintenance is needed or damage occurs.

[0013] In a possible implementation, if there is no signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a second preset value, it is determined that the working state of the MEMS mirror is that maintenance is needed or damage occurs, including:

[0014] If there is no signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a second preset value, it is determined that the working state of the MEMS mirror is that maintenance is needed or damage occurs, including:

[0015] If there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a third preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is a signal in the calibrated sound signal whose frequency difference from the reference frequency is less than or equal to a first preset value, it is determined that the working state of the MEMS mirror is that maintenance is needed.

[0016] If there is a signal in the sound signal with a frequency difference from the reference frequency less than or equal to a third preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal in the calibrated sound signal with a frequency difference from the reference frequency less than or equal to a first preset value, or if there is no signal in the sound signal with a frequency difference from the reference frequency less than or equal to the third preset value, it is determined that the working state of the MEMS mirror is damaged.

[0017] In a possible implementation, the reference sound signal is a sound signal of the MEMS mirror vibrating in a preset time period, and the preset time period is a preset time length after the MEMS laser radar is powered on for the first time.

[0018] In a possible implementation, the frequency of the sound signal is calibrated according to the first temperature, including:

[0019] The frequency of the sound signal is calibrated according to the reference temperature in the MEMS laser radar, the frequency of the sound signal, the first temperature, and a preset linear relationship between temperature and frequency in the preset time period.

[0020] In a possible implementation, the sound signal of the MEMS mirror vibrating is obtained, including:

[0021] The sound signal is obtained.

[0022] If there is a signal in the preset frequency band of the sound signal with energy greater than a preset energy, it is determined that the sound signal is a sound signal of the MEMS mirror vibrating.

[0023] In a possible implementation, the method further includes:

[0024] If there is no signal in the preset frequency band of the sound signal with energy greater than a preset energy, it is determined that the MEMS mirror stops vibrating.

[0025] In a possible implementation, the MEMS laser radar drives the MEMS mirror by using a motor, and the method further includes:

[0026] If the amplitude is not in the set range, and there is a signal in the sound signal consistent with the rotation frequency of the motor, it is determined that the MEMS mirror is contaminated with water vapor.

[0027] If the amplitude is not in the set range, and there is no signal in the sound signal consistent with the rotation frequency of the motor, it is determined that the MEMS mirror is contaminated with oil.

[0028] A second aspect of the embodiment of the application provides a MEMS mirror state detection device, including:

[0029] an acquisition module configured to acquire a sound signal generated when the MEMS mirror vibrates;

[0030] a determination module configured to determine an amplitude of the sound signal in a time domain;

[0031] an analysis module configured to, if the amplitude is within a set range, determine a working state of the MEMS mirror according to a relationship between a frequency of the sound signal and a reference frequency of a reference sound signal and a first temperature in a MEMS laser radar to which the MEMS mirror belongs when the sound signal is acquired, the working state including normal working or abnormality.

[0032] A third aspect of the embodiment of the present application provides a MEMS laser radar, including a MEMS mirror, a sound signal acquisition module, a memory, a processor, and a computer program stored in the memory and executable on the processor, the sound signal acquisition module is configured to acquire a sound signal generated when the MEMS mirror vibrates, and the processor implements the MEMS mirror state detection method according to the first aspect.

[0033] A fourth aspect of the embodiment of the present application provides a computer readable storage medium, the computer readable storage medium stores a computer program, and the computer program is executed by a processor to implement the MEMS mirror state detection method according to the first aspect.

[0034] A fifth aspect of the embodiment of the present application provides a computer program product, when the computer program product is executed on an electronic device, the electronic device executes the MEMS mirror state detection method according to any one of the first aspect.

[0035] Compared with the prior art, the embodiment of the present application has the beneficial effects that: by acquiring a sound signal generated when the MEMS mirror vibrates, determining an amplitude of the sound signal in a time domain, if the amplitude is within a set range, determining a working state of the MEMS mirror according to a frequency of the sound signal and a first temperature in a MEMS laser radar to which the MEMS mirror belongs when the sound signal is acquired, the working state including normal working or abnormality, the state of the MEMS mirror can be detected during the working process of the MEMS laser radar, data acquisition and target detection of the MEMS laser radar when the MEMS mirror is abnormal are avoided, and the detection accuracy and reliability of the MEMS laser radar are improved. BRIEF DESCRIPTION OF DRAWINGS

[0036] Figure 1 is a structural schematic diagram of the MEMS laser radar provided by the embodiment of the present application;

[0037] Figure 2is a flowchart of a method for detecting a state of a MEMS mirror provided by an embodiment of the present application;

[0038] Figure 3 is a flowchart of a method for detecting a state of a MEMS mirror provided by an embodiment of the present application;

[0039] Figure 4 is a flowchart of a method for detecting a state of a MEMS mirror provided by an embodiment of the present application;

[0040] Figure 5 is a flowchart of a method for detecting a state of a MEMS mirror provided by an embodiment of the present application; DETAILED DESCRIPTION

[0041] In the following description, for the purposes of explanation and not limitation, specific details are set forth, such as particular system configurations, techniques, etc., in order to provide a thorough understanding of the embodiments of the application. However, it will be apparent to those skilled in the art that the application can be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known devices, circuits, and methods are omitted so as not to obscure the description of the application with unnecessary detail.

[0042] It should be understood that the term “comprises” when used in this specification and accompanying claims, indicates the presence of the stated features, integers, steps, operations, elements, and / or components but does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0043] It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used in this specification and the appended claims, the singular forms “a,” “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise.

[0044] It will be further understood that the terms “and / or,” as used herein, refers to a combination of one or more of the associated listed items, as well as all possible combinations of the associated listed items.

[0045] In addition, in the description of the application, the terms “first”, “second”, “third”, etc. are only used to distinguish descriptions, and cannot be understood as indicating or implying relative importance.

[0046] The existing MEMS laser radar cannot detect the working state of the MEMS mirror during use, so that the user cannot know whether the MEMS mirror is working normally, resulting in a decrease in the accuracy and reliability of the data measured by the MEMS laser radar.

[0047] To this end, the application provides a MEMS scanner state detection method, which acquires a sound signal when the MEMS scanner vibrates, and determines the working state of the MEMS scanner according to the amplitude and frequency of the sound signal. The working state includes normal working or abnormal working, so that it can be determined whether the MEMS scanner is working normally, and the test accuracy and reliability of the MEMS laser radar are improved.

[0048] The MEMS scanner state detection method provided by the application will be described below.

[0049] The MEMS scanner state detection method provided by the embodiments of the application can be executed on a MEMS laser radar, a computer, a tablet computer, a mobile phone or other electronic devices. As shown in Figure 1 The MEMS scanner state detection method can be executed on a MEMS laser radar, for example. The MEMS laser radar includes a processor 11, a memory 12, a computer program 13, a MEMS scanner 14, a light emitting module 15, a receiving module 16, a MEMS module 17 and a sound signal acquisition module 18.

[0050] The computer program 13 is stored in the memory 12 and can be run on the processor 11. The processor 11 runs the computer program to implement the MEMS scanner state detection method provided by the embodiments of the application.

[0051] The processor 11 can be a central processing unit (CPU), and can also be other general-purpose processors, digital signal processors (DSP), application specific integrated circuits (ASIC), field programmable gate arrays (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor can be a microprocessor or any conventional processor.

[0052] The memory 12 can be an internal storage unit of the MEMS laser radar, for example, a hard disk or a memory of the MEMS laser radar. The memory 12 can also be an external storage device of the MEMS laser radar, for example, a plug-in hard disk, a smart media card (SMC), a secure digital (SD) card, a flash card, etc. equipped on the MEMS laser radar. Further, the memory 12 can also include both the internal storage unit and the external storage device of the MEMS laser radar. The memory 12 is used to store the computer program and other programs and data required by the MEMS laser radar. The memory 12 can also be used to temporarily store data that has been output or will be output.

[0053] For example, the computer program 13 can be divided into one or more modules / units, which are stored in the memory 12 and executed by the processor 11 to complete the present application. The one or more modules / units can be a series of computer program instruction segments capable of completing a specific function, which are used to describe the execution process of the computer program 13 in the MEMS laser radar.

[0054] The laser emitted by the light emitting module 15 passes through the MEMS mirror 14 and is reflected by the obstacle, and is received by the receiving module 16, so as to realize the detection of the obstacle. The sound signal collecting module 18 is used to collect the sound signal when the MEMS mirror 14 vibrates, and store the sound signal to the memory 12. In an embodiment, the relative position between the sound signal collecting module 18 and the MEMS mirror 14 is less than 5 centimeters, and the relative position remains unchanged, which can improve the accuracy of the sound signal collected by the sound signal collecting module 18.

[0055] Those skilled in the art can understand that, Figure 1 The MEMS laser radar is only an example and does not constitute a limitation on the MEMS laser radar, and can include more or fewer components than the diagram, or combine certain components, or different components, for example, the electronic device can also include an input / output device, a network access device, a bus, etc.

[0056] Please refer to the accompanying Figure 2 The MEMS mirror state detection method provided by an embodiment of the present application comprises:

[0057] S201: Acquire the sound signal when the MEMS mirror vibrates.

[0058] Specifically, the sound signal collected by the sound signal collecting module when the MEMS mirror vibrates is the sound signal when the MEMS mirror vibrates.

[0059] In an embodiment, the sound signal is collected every preset time length during the working process of the MEMS laser radar, so that whether the MEMS scanner works normally can be detected in time. The preset time length can be 5 minutes, and the time length of the sound signal can be fixed, for example, 1 minute, 2 minutes or 5 minutes, or the time length of the sound signal collected each time can be increased in turn as the start-up time length of the MEMS laser radar increases, so that the accuracy of the sound signal analysis can be improved.

[0060] In a possible implementation, after the MEMS laser radar acquires the sound signal collected by the sound signal collection module, the sound signal is subjected to Fourier transform to obtain the sound signal in the frequency domain, and the energy in the preset frequency band is determined for the sound signal in the frequency domain. If there is a signal with energy greater than the preset energy in the preset frequency band of the sound signal, it is determined that the sound signal is the sound signal when the MEMS scanner vibrates, so that the sound signal when the MEMS scanner vibrates is ensured to be collected, and the accuracy of the sound signal analysis is improved. The preset frequency band is 7KHz-9KHz, and the preset energy is 20dbmv.

[0061] In a possible implementation, if there is no signal with energy greater than the preset energy in the preset frequency band of the sound signal acquired by the MEMS laser radar from the sound signal collection module, it is determined that the collected sound signal is not the sound signal when the MEMS scanner vibrates, and then it is determined that the MEMS scanner stops vibrating. In an embodiment, when it is determined that the MEMS scanner stops vibrating, the MEMS laser radar outputs alarm information that the MEMS scanner stops vibrating, wherein the alarm information can be output in the form of voice or text.

[0062] In an embodiment, if there is no signal with amplitude exceeding -20dbmv in the 7KHz-9KHz frequency band of the sound signal, it is determined that the MEMS scanner stops vibrating, and if there is a signal with amplitude exceeding 10dbmv in the 8.8KHz-9KHz frequency band of the sound signal, it is determined that the sound signal is the sound signal when the MEMS scanner vibrates.

[0063] S202: Determine the amplitude of the sound signal in the time domain.

[0064] The amplitude of the sound signal in the time domain can be the amplitude corresponding to a plurality of time periods, or the average amplitude in a preset time period.

[0065] S203: If the amplitude is within the set range, determine the working state of the MEMS scanner according to the relationship between the frequency of the sound signal and the reference frequency of the reference sound signal, and the first temperature in the MEMS laser radar to which the MEMS scanner belongs when the sound signal is collected, wherein the working state includes normal working or damage.

[0066] The set range is a threshold of a preset amplitude value, which can be a maintenance threshold or an alarm threshold preset according to the characteristics of the MEMS laser radar. The reference sound signal can be a sound signal recorded and stored in advance when the MEMS laser radar is shipped, or a sound signal stored before the MEMS laser radar is used. In an embodiment, the reference sound signal is a sound signal of the MEMS scanner vibrating in a preset period, and the preset period is a preset time length after the MEMS laser radar is powered on for the first time, wherein the preset time length can be 5 minutes. In the preset time length after the MEMS laser radar is powered on for the first time, the MEMS scanner works normally, and the frequency of the sound signal is not affected by the temperature at this time. Therefore, the reference sound signal collected at this time is the sound signal of the MEMS scanner working normally. Using the sound signal of the MEMS scanner working normally as the reference sound signal can improve the accuracy of fault detection.

[0067] In an embodiment, in the process of collecting the reference sound signal, the pre-stored sound signal can be used to detect the state of the MEMS scanner, so as to avoid collecting the reference sound signal in the case of abnormality of the MEMS scanner, and thus improve the accuracy of subsequent sound signal analysis.

[0068] The reference frequency can be an average frequency of the reference sound signal, or a frequency range of the reference sound signal, or an average frequency of a frequency band in the reference sound signal with an energy greater than a preset value. The frequency of the sound signal of the MEMS scanner vibrating is related to the temperature. According to the reference temperature corresponding to the reference sound signal and the first temperature when the sound signal of the MEMS scanner vibrating is collected, the frequency of the sound signal of the MEMS scanner vibrating can be calibrated. According to the relationship between the frequency of the calibrated sound signal and the reference frequency, the working state of the MEMS scanner can be determined.

[0069] In an embodiment, if there is a signal in the sound signal with a frequency difference from the reference frequency less than or equal to a first preset value, or if there is a signal in the sound signal with a frequency difference from the reference frequency less than or equal to a second preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is a signal in the calibrated sound signal with a frequency difference from the reference frequency less than or equal to the first preset value, it is determined that the working state of the MEMS scanner is normal, and the second preset value is greater than the first preset value.

[0070] In an embodiment, the abnormal working state of the MEMS scanner includes both maintenance and damage. If there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to the second preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal in the calibrated sound signal whose frequency difference from the reference frequency is less than or equal to the first preset value, it is determined that the working state of the MEMS scanner is maintenance; if there is no signal in the sound signal whose frequency difference from the reference frequency is less than or equal to the second preset value, it is determined that the working state of the MEMS scanner is maintenance or damage. The first preset value can be 5 Hz, and the second preset value can be 10 Hz.

[0071] In an embodiment, if there is no signal in the sound signal whose frequency difference from the reference frequency is less than or equal to the second preset value, it is determined whether there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a third preset value, the third preset value is greater than the second preset value, and the third preset value can be 100 Hz. If there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to the third preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is a signal in the calibrated sound signal whose frequency difference from the reference frequency is less than or equal to the first preset value, it is determined that the working state of the MEMS scanner is maintenance; if there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to the third preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal in the calibrated sound signal whose frequency difference from the reference frequency is less than or equal to the first preset value, or if there is no signal in the sound signal whose frequency difference from the reference frequency is less than or equal to the third preset value, it is determined that the working state of the MEMS scanner is damage.

[0072] By comparing the frequency of the sound signal when the MEMS scanner vibrates with the reference frequency, the working state of the MEMS scanner can be determined, so that whether the data detected by the MEMS laser radar is accurate can be determined according to the working state, and the detection accuracy of the MEMS laser radar is improved.

[0073] In a possible implementation, after the working state of the MEMS scanner is determined, the working state of the MEMS scanner can be output in the form of voice or text, so that the user can be reminded to repair or maintain the MEMS scanner in time when the working state of the MEMS scanner is abnormal, and the service life of the MEMS laser radar is improved.

[0074] In a possible implementation, the frequency of the sound signal when the MEMS scanner vibrates has a linear relationship with temperature, and the frequency of the sound signal when the MEMS scanner vibrates decreases as the temperature in the MEMS laser radar increases. The linear relationship between temperature and frequency is preset, that is, the corresponding relationship between the value of temperature increase and the value of frequency decrease is set, and the frequency of the sound signal can be calibrated according to the reference temperature, the reference frequency, the frequency of the sound signal, the first temperature in the MEMS laser radar collected in the preset time period, and the preset linear relationship between temperature and frequency. For example, the difference between the reference temperature and the first temperature is calculated, the difference is substituted into the preset linear relationship between temperature and frequency, the difference of the frequency is obtained, and the calibrated frequency of the sound signal can be determined according to the difference of the frequency and the frequency of the sound signal when the MEMS scanner vibrates. By calibrating the frequency of the sound signal, the accuracy of subsequent analysis of the sound signal is improved.

[0075] In the above embodiment, the sound signal when the MEMS scanner vibrates is collected, and the working state of the MEMS scanner is determined according to the sound signal, so that the detection data when the MEMS scanner works normally can be retained when target detection is performed, and the detection data when the MEMS scanner works abnormally can be removed, thereby improving the detection accuracy and reliability of the MEMS laser radar.

[0076] In an embodiment, if the amplitude of the sound signal in the time domain is not within the set range, it indicates that the working state of the MEMS scanner is abnormal. The MEMS laser radar drives the MEMS scanner by using a motor, and the specific abnormal information of the MEMS scanner can be determined according to the relationship between the sound signal and the rotation frequency of the motor.

[0077] Specifically, the rotation frequency of the motor is the frequency of the motor when the MEMS laser radar works normally, and can represent whether the motor rotates normally. If the amplitude of the sound signal in the time domain is not within the set range, and there is a signal consistent with the rotation frequency of the motor in the sound signal, it is determined that the abnormal information of the MEMS scanner is that the MEMS scanner is contaminated by water vapor. If the amplitude of the sound signal in the time domain is not within the set range, and there is no signal consistent with the rotation frequency of the motor in the sound signal, it is determined that the abnormal information of the MEMS scanner is that the MEMS scanner is contaminated by oil.

[0078] In a possible implementation, after determining the specific abnormal information of the MEMS scanner, the abnormal information of the MEMS scanner can be output in a voice or text manner, so that the user can be reminded to maintain the MEMS scanner in time, thereby improving the service life of the MEMS scanner. After the MEMS laser radar outputs the abnormal information, the corresponding processing instruction can be output, for example, if the abnormal information is that the MEMS scanner is contaminated by water vapor, the instruction to check the air tightness is output, and if the abnormal information is that the MEMS scanner is contaminated by oil, the instruction to clean the oil is output, thereby improving the efficiency of maintenance and repair.

[0079] In the above embodiment, by collecting the sound signal when the MEMS scanner vibrates, the specific abnormal information of the MEMS scanner is determined according to the sound signal, so that the abnormal information can be determined in time when the MEMS scanner is abnormal, and then the MEMS scanner can be maintained according to different abnormal information, thereby improving the test accuracy and reliability of the MEMS laser radar.

[0080] In an embodiment, the specific flow of the MEMS scanner state detection method is as shown in Figure 3 .

[0081] When the MEMS laser radar is powered on for the first time, the timing starts, and the sound signal collection module starts to collect the sound signal. After detecting that the MEMS laser radar works for 5 minutes, the collected sound signal is stored, and the temperature sensor is used to measure the temperature in the MEMS laser radar. The measured temperature is taken as a reference temperature, the stored sound signal is taken as a reference sound signal, and the reference frequency is determined according to the reference sound signal. The reference temperature and the reference frequency are bound as the characteristics of the sound signal when the MEMS scanner vibrates during the normal operation of the device, and are then loaded into the preset amplitude setting range. The sound signal collection module continues to collect the sound signal, and after collecting the sound signal for 5 minutes, the sound signal is stored, and the first temperature in the MEMS laser radar during the collection of the sound signal is obtained. The working state of the MEMS laser radar is determined according to the reference frequency, the reference temperature, the first temperature, the frequency of the sound signal when the MEMS scanner vibrates, and the rotation frequency of the motor. If it is determined that the working state of the MEMS scanner is normal, the sound signal continues to be collected. If it is determined that the working state of the MEMS scanner is abnormal, i.e., the working state of the MEMS scanner is damaged, needs to be maintained, the MEMS scanner is contaminated by oil, or the MEMS scanner is contaminated by water vapor, it is determined whether the alarm condition is reached. If the alarm condition is not reached, the maintenance information is output, and the sound signal continues to be collected. If the alarm condition is reached, the alarm information is output, and the fault detection is ended.

[0082] In an embodiment, the specific flow of determining the working state of the MEMS scanner is as shown in Figure 4 .

[0083] The MEMS laser radar performs Fourier transform on the sound signal collected by the sound signal collection module to obtain a sound signal in a frequency domain. It is determined whether there is a signal with an amplitude exceeding -20 dbmv in a 7KHz-9KHz frequency band in the sound signal in the frequency domain. If there is no signal with an amplitude exceeding -20 dbmv in the 7KHz-9KHz frequency band, it is determined that the MEMS scanner stops vibrating, and the analysis of the sound signal is ended. If there is a signal with an amplitude exceeding -20 dbmv in the 7KHz-9KHz frequency band, it is determined whether the amplitude of the sound signal in the time domain is within a set range.

[0084] If the amplitude of the sound signal in the time domain is within the set range, it is determined whether there is a signal with a frequency difference from a reference frequency less than or equal to 5 Hz in the sound signal. If there is a signal with a frequency difference from the reference frequency less than or equal to 5 Hz in the sound signal, it is determined that the working state of the MEMS scanner is normal, and the analysis of the sound signal is ended. If there is no signal with a frequency difference from the reference frequency less than or equal to 5 Hz in the sound signal, it is determined whether there is a signal with a frequency difference from the reference frequency less than or equal to 10 Hz in the sound signal. If there is a signal with a frequency difference from the reference frequency less than or equal to 10 Hz in the sound signal, the frequency of the sound signal is calibrated according to the first temperature, and it is determined whether there is a signal with a frequency difference from the reference frequency less than or equal to 5 Hz in the calibrated sound signal. If there is a signal with a frequency difference from the reference frequency less than or equal to 5 Hz in the calibrated sound signal, it is determined that the working state of the MEMS scanner is normal. If there is no signal with a frequency difference from the reference frequency less than or equal to 5 Hz in the calibrated sound signal, it is determined that the working state of the MEMS scanner needs to be maintained, and the analysis of the sound signal is ended. If there is no signal with a frequency difference from the reference frequency less than or equal to 10 Hz in the sound signal, it is determined whether there is a signal with a frequency difference from the reference frequency less than or equal to 100 Hz in the sound signal. If there is no signal with a frequency difference from the reference frequency less than or equal to 100 Hz in the sound signal, it is determined that the working state of the MEMS scanner is damaged, and the analysis of the sound signal is ended. If there is a signal with a frequency difference from the reference frequency less than or equal to 100 Hz in the sound signal, the frequency of the sound signal is calibrated according to the first temperature, and it is determined whether there is a signal with a frequency difference from the reference frequency less than or equal to 5 Hz in the calibrated sound signal. If there is a signal with a frequency difference from the reference frequency less than or equal to 5 Hz in the calibrated sound signal, it is determined that the working state of the MEMS scanner needs to be maintained. If there is no signal with a frequency difference from the reference frequency less than or equal to 5 Hz in the calibrated sound signal, it is determined that the working state of the MEMS scanner is damaged.

[0085] If the amplitude of the sound signal in the time domain is not within the set range, it is determined whether there is a signal consistent with the rotation frequency of the motor in the MEMS laser radar in the sound signal. If there is a signal consistent with the rotation frequency of the motor in the sound signal, it is determined that the MEMS scanner is contaminated with water vapor, and the analysis of the sound signal is ended. If there is no signal consistent with the rotation frequency of the motor in the MEMS laser radar in the sound signal, it is determined that the MEMS scanner is contaminated with oil, and the analysis of the sound signal is ended.

[0086] In the above embodiment, according to different characteristics of the frequency and amplitude of the sound signal when the MEMS scanner vibrates, the working state of the MEMS scanner is determined, so that specific abnormal information can be determined when the working state of the MEMS scanner is abnormal, and the user can conveniently repair or maintain the MEMS laser radar according to the abnormal information.

[0087] It should be understood that the size of the serial number of each step in the above embodiment does not mean the order of execution, and the execution order of each process should be determined according to its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0088] Corresponding to the MEMS scanner state detection method described in the above embodiment, Figure 5 The structure block diagram of the MEMS scanner state detection device provided by the embodiment of the present application is shown, and only the part related to the embodiment of the present application is shown for the convenience of description.

[0089] As Figure 5 shown, the MEMS scanner state detection device comprises:

[0090] The acquisition module 51 is configured to acquire a sound signal when the MEMS scanner vibrates.

[0091] The determination module 52 is configured to determine the amplitude of the sound signal in the time domain.

[0092] The analysis module 53 is configured to, if the amplitude is within the set range, determine the working state of the MEMS scanner according to the relationship between the frequency of the sound signal and the reference frequency of the reference sound signal, and the first temperature in the MEMS laser radar to which the MEMS scanner belongs when the sound signal is collected, the working state comprising normal working or abnormal.

[0093] In a possible implementation manner, the analysis module 53 is specifically configured to:

[0094] If there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a first preset value, or if there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a second preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal in the calibrated sound signal whose frequency difference from the reference frequency is less than or equal to the first preset value, it is determined that the working state of the MEMS scanning mirror is normal working, and the second preset value is greater than the first preset value.

[0095] In a possible implementation, the exception includes needing maintenance or being damaged, and the analysis module 53 is specifically configured to:

[0096] If there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a second preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal in the calibrated sound signal whose frequency difference from the reference frequency is less than or equal to a first preset value, it is determined that the working state of the MEMS scanning mirror is needing maintenance.

[0097] If there is no signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a second preset value, it is determined that the working state of the MEMS scanning mirror is needing maintenance or being damaged.

[0098] In a possible implementation, the analysis module 53 is specifically further configured to:

[0099] If there is no signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a second preset value, it is determined that the working state of the MEMS scanning mirror is needing maintenance or being damaged.

[0100] If there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a third preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal in the calibrated sound signal whose frequency difference from the reference frequency is less than or equal to a first preset value, or if there is no signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a third preset value, it is determined that the working state of the MEMS scanning mirror is damaged.

[0101] If there is a signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a third preset value, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal in the calibrated sound signal whose frequency difference from the reference frequency is less than or equal to a first preset value, or if there is no signal in the sound signal whose frequency difference from the reference frequency is less than or equal to a third preset value, it is determined that the working state of the MEMS scanning mirror is damaged.

[0102] In a possible implementation, the reference sound signal is a sound signal of the MEMS scanner vibrating in a preset time period, and the preset time period is a preset time length after the MEMS laser radar is powered on for the first time.

[0103] In a possible implementation, the analysis module 53 is specifically further configured to:

[0104] According to the reference temperature in the MEMS laser radar, the frequency of the sound signal, the first temperature, and a preset linear relationship between temperature and frequency, the frequency of the sound signal is calibrated.

[0105] In a possible implementation, the acquisition module 51 is specifically configured to:

[0106] acquire a sound signal;

[0107] If there is a signal with energy greater than a preset energy in a preset frequency band of the sound signal, it is determined that the sound signal is a sound signal of the MEMS scanner vibrating.

[0108] In a possible implementation, the acquisition module 51 is specifically further configured to:

[0109] If there is no signal with energy greater than a preset energy in a preset frequency band of the sound signal, it is determined that the MEMS scanner stops vibrating.

[0110] In a possible implementation, the MEMS laser radar drives the MEMS scanner by using a motor, and the analysis module 53 is specifically further configured to:

[0111] If the amplitude is not in a set range, and there is a signal consistent with a rotation frequency of the motor in the sound signal, it is determined that the MEMS scanner is contaminated by water vapor.

[0112] If the amplitude is not in a set range, and there is no signal consistent with a rotation frequency of the motor in the sound signal, it is determined that the MEMS scanner is contaminated by oil.

[0113] It should be noted that the information interaction, execution process, and the like between the above-described apparatuses / units are based on the same concept as the method embodiments, and the specific functions and the brought technical effects can be referred to the method embodiments, which will not be described here.

[0114] In the above-described embodiments, the description of each embodiment has its own focus, and the parts not described or recorded in a certain embodiment can be referred to the relevant description of other embodiments.

[0115] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the division of the above functional units and modules is taken as an example, and in actual application, the above functions can be completed by different functional units and modules according to needs, that is, the internal structure of the apparatus is divided into different functional units or modules to complete all or part of the functions described above. Each functional unit or module in the embodiment can be integrated in one processing unit, or each unit can exist physically, or two or more units can be integrated in one unit, and the integrated unit can be realized in the form of hardware or in the form of software functional unit. In addition, the specific names of each functional unit or module are only for convenient distinction, and do not limit the protection scope of the present application. The specific working process of the units and modules in the system can refer to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0116] In the embodiments provided in the present application, it should be understood that the disclosed apparatus / electronic device and method can be implemented in other ways. For example, the apparatus / electronic device embodiments described above are only schematic, for example, the division of the modules or units is only a logical function division, and actual implementation can have another division manner, for example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the coupling or direct coupling or communication connection between the units shown or discussed can be indirect coupling or communication connection through some interface, apparatus or unit, and can be electrical, mechanical or other forms.

[0117] The units described as separate components can or can not be physically separated, and the components shown as units can or can not be physical units, that is, they can be located in one place, or can be distributed on multiple network units. Part or all of the units can be selected according to actual needs to achieve the purpose of the present embodiment scheme.

[0118] The integrated modules / units, if implemented in the form of software functional units and sold or used as independent products, can be stored in a computer readable storage medium. Based on such understanding, all or part of the processes in the above-mentioned embodiments can also be implemented by a computer program instructing related hardware, and the computer program can be stored in a computer readable storage medium. When the computer program is executed by a processor, the steps of the above-mentioned various method embodiments can be implemented. The computer program includes computer program code, which can be in the form of source code, object code, executable files or some intermediate forms. The computer readable medium can include any entity or device capable of carrying the computer program code, recording medium, U disk, mobile hard disk, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signal, telecommunication signal and software distribution medium, etc.

[0119] Those skilled in the art can realize that the units and algorithm steps of the examples described in combination with the embodiments disclosed herein can be realized by electronic hardware or a combination of computer software and electronic hardware. Whether the functions are realized in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present application.

[0120] The above-described embodiments are only used to illustrate the technical solutions of the present application, but not limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application.

Claims

1. A MEMS scanner state detection method, characterized in that, The method comprises: acquiring a sound signal generated by a MEMS mirror when the MEMS mirror vibrates; determining an amplitude of the sound signal in a time domain; if the amplitude is within a set range, determining a working state of the MEMS mirror according to a relationship between a frequency of the sound signal and a reference frequency of a reference sound signal, and a first temperature in a MEMS laser radar to which the MEMS mirror belongs when the sound signal is collected, the working state including normal working or abnormality; the determining of the working state of the MEMS mirror according to the relationship between the frequency of the sound signal and the reference frequency of the reference sound signal, and the first temperature in the MEMS laser radar to which the MEMS mirror belongs when the sound signal is collected, comprises: if there is a signal with a frequency difference less than or equal to a first preset value from the reference frequency in the sound signal, or if there is a signal with a frequency difference less than or equal to a second preset value from the reference frequency in the sound signal, and after the frequency of the sound signal is calibrated according to the first temperature, there is a signal with a frequency difference less than or equal to the first preset value from the reference frequency in the calibrated sound signal, it is determined that the working state of the MEMS mirror is normal working, the second preset value being greater than the first preset value; the abnormality includes needing maintenance or being damaged, and the determining of the working state of the MEMS mirror according to the relationship between the frequency of the sound signal and the reference frequency of the reference sound signal, and the first temperature in the MEMS laser radar to which the MEMS mirror belongs when the sound signal is collected, comprises: if there is a signal with a frequency difference less than or equal to the second preset value from the reference frequency in the sound signal, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal with a frequency difference less than or equal to the first preset value from the reference frequency in the calibrated sound signal, it is determined that the working state of the MEMS mirror is needing maintenance; if there is no signal with a frequency difference less than or equal to the second preset value from the reference frequency in the sound signal, it is determined whether there is a signal with a frequency difference less than or equal to a third preset value from the reference frequency in the sound signal, the third preset value being greater than the second preset value; if there is a signal with a frequency difference less than or equal to the third preset value from the reference frequency in the sound signal, and after the frequency of the sound signal is calibrated according to the first temperature, there is a signal with a frequency difference less than or equal to the first preset value from the reference frequency in the calibrated sound signal, it is determined that the working state of the MEMS mirror is needing maintenance; if there is a signal with a frequency difference less than or equal to the third preset value from the reference frequency in the sound signal, and after the frequency of the sound signal is calibrated according to the first temperature, there is no signal with a frequency difference less than or equal to the first preset value from the reference frequency in the calibrated sound signal, or if there is no signal with a frequency difference less than or equal to the third preset value from the reference frequency in the sound signal, it is determined that the working state of the MEMS mirror is damaged. The MEMS laser radar drives the MEMS scanner by using a motor, and the method further comprises: If the amplitude is not within the set range and the sound signal contains a signal consistent with the rotation frequency of the motor, it is determined that the MEMS scanner is contaminated by water vapor; If the amplitude is not within the set range and the sound signal does not contain a signal consistent with the rotation frequency of the motor, it is determined that the MEMS scanner is contaminated by oil.

2. The method of claim 1, wherein, The reference sound signal is a sound signal generated when the MEMS scanner vibrates in a preset time period, and the preset time period is a preset time length after the MEMS laser radar is powered on for the first time.

3. The method of claim 2, wherein, According to the first temperature, the frequency of the sound signal is calibrated, comprising: According to the reference temperature, the frequency of the sound signal, the first temperature, and the preset linear relationship between the temperature and the frequency collected in the preset time period, the frequency of the sound signal is calibrated.

4. The method of claim 1, wherein, Obtaining a sound signal generated when the MEMS scanner vibrates, comprising: Obtaining a sound signal; If there is a signal with energy greater than a preset energy in a preset frequency band of the sound signal, it is determined that the sound signal is a sound signal generated when the MEMS scanner vibrates.

5. The method of claim 4, wherein, The method further comprises: If there is no signal with energy greater than a preset energy in a preset frequency band of the sound signal, it is determined that the MEMS scanner stops vibrating. 6.A MEMS laser radar, comprising a MEMS scanner, a sound signal acquisition module, a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, The sound signal acquisition module is used to acquire a sound signal generated when the MEMS scanner vibrates, and the processor executes the computer program to realize the method according to any one of claims 1 to 5.

7. A computer-readable storage medium storing a computer program, wherein the computer program comprises the following steps of: receiving a request for a resource from a client; determining whether the client is authorized to access the resource; and if the client is authorized to access the resource, providing the resource to the client. The computer program is executed by the processor to realize the method according to any one of claims 1 to 5.

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