Method for manufacturing thin film batteries

By unifying the preparation methods of substrates and thin-film batteries under a vacuum environment and utilizing vacuum deposition technology and extraterrestrial in-situ resources, the problem of complex thin-film battery preparation processes was solved, and the preparation of thin-film batteries for large-scale production was achieved.

CN114883446BActive Publication Date: 2025-09-05TSINGHUA UNIVERSITY
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Patent Information

Application Number
CN202210476378.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-04-29
Publication Date
2025-09-05
Estimated Expiration
2042-04-29

AI Technical Summary

Technical Problem

The existing thin-film battery preparation process is cumbersome and complicated, making it difficult to achieve large-scale production under restricted conditions. In particular, due to the different preparation environment factors of the substrate and thin-film battery, high equipment and cost requirements are required.

Method used

The substrate and thin-film battery are prepared simultaneously by vacuum deposition method in a vacuum environment, the production environment of the substrate and thin-film battery is unified, and continuous or simultaneous preparation is carried out by vacuum evaporation, magnetron sputtering, arc ion plating and other methods. The raw materials are obtained by combining extraterrestrial in-situ resources, simplifying the process and reducing the transportation load.

Benefits of technology

It has achieved large-scale preparation of thin-film batteries under restricted conditions such as extraterrestrial high vacuum environments, simplified the production process, reduced the demand for equipment and raw materials, and improved production efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention relates to the field of battery preparation and provides a method for manufacturing a thin-film battery, comprising: generating a detachable substrate on the surface of a base by vacuum deposition in a vacuum environment; and preparing a thin-film battery layer on the substrate by vacuum deposition in a vacuum environment. In the manufacturing method proposed by the present invention, both the manufacturing of the substrate and the manufacturing of the thin-film battery layer are carried out in a vacuum environment, and the manufacturing method of the substrate adopts vacuum deposition. Therefore, during the manufacturing process, the substrate and the thin-film battery layer can be prepared in the same environment, without setting up different manufacturing environments and separately manufacturing the substrate and the thin-film battery layer. Therefore, this method is suitable for large-scale production of thin-film batteries under restricted conditions. For example, this method can realize large-scale production of thin-film batteries in an extraterrestrial vacuum environment based on in-situ resources of the extraterrestrial environment, thereby simplifying the manufacturing process and reducing the amount of raw materials and equipment carried.
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Description

Technical Field

[0001] The present invention relates to the technical field of battery preparation, and in particular to a method for manufacturing a thin film battery. Background Art

[0002] In the related art, thin-film batteries need to be prepared by vapor deposition on the basis of a substrate. However, in the prior art, the production of substrates and thin-film batteries is carried out separately and individually. Because the environmental factors required for the preparation of thin-film batteries and substrates are different, the production process in the related art is cumbersome and complicated, and the requirements for cost and equipment are high, making it difficult to achieve large-scale production under restricted conditions. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a method for manufacturing a thin film battery, which is suitable for large-scale production of thin film batteries under restricted conditions.

[0004] A method for manufacturing a thin film battery according to an embodiment of the present invention includes:

[0005] In a vacuum environment, a detachable substrate is generated on the surface of the substrate by vacuum deposition;

[0006] In a vacuum environment, a thin film battery is prepared on the substrate by using a vacuum deposition method.

[0007] According to the method for manufacturing a thin-film battery in an embodiment of the present invention, the manufacturing of the substrate and the manufacturing of the thin-film battery layer are both carried out in a vacuum environment, and the substrate is manufactured by vacuum deposition. Since the manufacturing environment of the substrate and the thin-film battery layer is the same, the substrate and the thin-film battery layer can be prepared in the same environment during the manufacturing process. There is no need to set up different manufacturing environments and separately manufacture the substrate and the thin-film battery layer. Therefore, this method is suitable for large-scale preparation of thin-film batteries under restricted conditions. For example, this method can realize large-scale preparation of thin-film batteries in an extraterrestrial vacuum environment based on in-situ resources of the extraterrestrial environment, thereby simplifying the manufacturing process and reducing the scale of raw materials and equipment carried.

[0008] According to one embodiment of the present invention, the step of generating a substrate on the surface of the base by vacuum deposition and the step of preparing a thin film battery layer on the substrate by vacuum deposition are performed continuously.

[0009] According to one embodiment of the present invention, the substrate comprises at least a rollable substrate, a first conveying roller set and a second conveying roller, wherein the first conveying roller set comprises a plurality of first conveying rollers;

[0010] The step of forming a substrate on the surface of the substrate by vacuum deposition in a vacuum environment includes:

[0011] vaporizing a substrate raw material in a vacuum environment, and depositing the vaporized substrate raw material on the surface of the rollable base to form the substrate;

[0012] At least one of the first conveying roller group and the second conveying roller is driven to rotate to convey the composite of the rollable base and the substrate to the second conveying roller, or the substrate is peeled off from the substrate and conveyed to the second conveying roller.

[0013] According to one embodiment of the present invention, the step of preparing a thin film battery layer on the substrate by vacuum deposition in a vacuum environment includes:

[0014] Preparing a thin film battery layer on the substrate before being conveyed to the second conveying roller by vacuum deposition, and obtaining a thin film battery formed by combining the thin film battery layer and the substrate;

[0015] The second conveying roller is controlled to wind the thin film battery.

[0016] According to one embodiment of the present invention, the substrate comprises a molten pool and a liquid meltable component located in the molten pool;

[0017] The step of forming a substrate on the surface of the substrate by vacuum deposition in a vacuum environment includes:

[0018] In a vacuum environment, vaporizing a substrate raw material above a molten pool so that the substrate raw material is deposited on the surface of the liquid meltable component to form the substrate;

[0019] The substrate is peeled off from the liquid meltable component.

[0020] According to one embodiment of the present invention, the substrate comprises a molten pool and a solid meltable component located in the molten pool;

[0021] The step of forming a substrate on the surface of the substrate by vacuum deposition in a vacuum environment includes:

[0022] In a vacuum environment, vaporizing a substrate raw material so that the vaporized substrate raw material is deposited on the surface of the solid meltable component;

[0023] Heating the molten pool at a preset heating temperature so that the solid meltable component melts into a liquid state, wherein the preheating temperature is lower than the melting point of the substrate raw material and higher than the melting point of the meltable component;

[0024] The substrate is peeled off from the liquid meltable component.

[0025] According to one embodiment of the present invention, after the step of preparing a thin film battery layer on the substrate by an evaporation method under a vacuum environment, the method for manufacturing a thin film battery further includes:

[0026] peeling the thin film battery formed by the thin film battery layer and the substrate from the base and storing the thin film battery in a roll;

[0027] preparing a thin film battery again on the substrate by vacuum deposition;

[0028] The above two steps are repeated multiple times or performed in parallel for large-scale production.

[0029] According to one embodiment of the present invention, the thin film battery layer includes a buffer layer, and the buffer layer is close to the substrate in the thin film battery;

[0030] And / or, the thin film battery layer further includes a protective layer, and the protective layer is away from the substrate in the thin film battery.

[0031] According to one embodiment of the present invention, the vacuum environment is an extraterrestrial environment, and the substrate raw materials are obtained based on in-situ resources in the extraterrestrial environment.

[0032] According to one embodiment of the present invention, the thin film battery is a copper indium gallium selenide thin film solar cell or a cadmium telluride thin film solar cell.

[0033] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0035] Figure 1 This is one of the flow charts of the method for manufacturing a thin film battery provided by an embodiment of the present invention;

[0036] Figure 2 This is a second flow chart of a method for manufacturing a thin-film battery provided by an embodiment of the present invention;

[0037] Figure 3 This is a third flow chart of a method for manufacturing a thin film battery provided by an embodiment of the present invention;

[0038] Figure 4 This is a fourth flow chart of a method for manufacturing a thin film battery provided by an embodiment of the present invention;

[0039] Figure 5 It is a schematic structural diagram of a thin film battery provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0040] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention but are not intended to limit the scope of the present invention.

[0041] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0042] In the description of the embodiments of the present invention, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present invention based on the specific circumstances.

[0043] In the embodiments of the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, a first feature being "above," "above," or "above" a second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. A first feature being "below," "below," or "below" a second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0044] In the description of this specification, the reference terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0045] The following describes a method for manufacturing a thin film battery according to an embodiment of the present invention with reference to the accompanying drawings. It should be noted that the thin film battery mentioned in the present invention is generally a thin film photovoltaic cell.

[0046] like Figure 1 As shown, the method for manufacturing a thin film battery according to an embodiment of the present invention includes:

[0047] Step 100 , forming a detachable substrate 2 on the surface of a substrate 1 by vacuum deposition in a vacuum environment;

[0048] Step 200 : preparing a thin film battery layer 3 on a substrate 2 by vacuum deposition in a vacuum environment.

[0049] According to the method for manufacturing a thin-film battery in an embodiment of the present invention, the manufacturing of the substrate 2 and the manufacturing of the thin-film battery layer 3 are both carried out in a vacuum environment, and the manufacturing method of the substrate 2 adopts a vacuum deposition method. Since the manufacturing environment of the substrate 2 and the thin-film battery layer 3 is the same, the preparation of the substrate 2 and the thin-film battery layer 3 can be achieved in the same environment during the manufacturing process. There is no need to set up different manufacturing environments and separately manufacture the substrate 2 and the thin-film battery layer 3. Therefore, this method is suitable for large-scale preparation of thin-film batteries under restricted conditions. For example, this method can realize large-scale preparation of thin-film batteries in an extraterrestrial vacuum environment based on in-situ resources of the extraterrestrial environment, thereby simplifying the manufacturing process and reducing the scale of raw materials and equipment carried.

[0050] In the related art, thin-film batteries need to be prepared by vapor deposition on the basis of substrate 2, but the production of substrate 2 and thin-film batteries in the prior art is carried out separately and individually. Because the environmental factors required for the preparation of thin-film batteries and the preparation of substrate 2 are different, the production process in the related art is cumbersome and complicated, and the requirements for cost and equipment are high, making it difficult to achieve large-scale production under restricted conditions.

[0051] In order to solve the above technical problems, the thin-film battery manufacturing method of the present invention adopts the method of preparing the substrate 2 by vacuum deposition in a vacuum environment for the first time, so that the manufacturing environment of the substrate 2 and the manufacturing environment of the thin-film battery layer 3 can be unified, so that the substrate 2 and the thin-film battery layer 3 can be prepared continuously or simultaneously based on the vacuum environment, which greatly simplifies the manufacturing process and enables thin-film batteries to be produced on a large scale in a confined environment (such as an extraterrestrial high vacuum environment).

[0052] In some embodiments of the present invention, the above-mentioned vacuum deposition method includes but is not limited to vacuum evaporation, magnetron sputtering, arc ion plating and other deposition methods. That is, in a vacuum environment, the preparation of the substrate 2 can be carried out on the basis of the base 1 by vacuum evaporation, magnetron sputtering, arc ion plating and other methods. Furthermore, after obtaining the prepared substrate 2, the preparation of the thin film battery layer 3 can also be carried out on the basis of the substrate 2 by vacuum evaporation, magnetron sputtering, arc ion plating and other methods.

[0053] In some embodiments of the present invention, the thin-film battery manufacturing method of the present invention further requires the construction of a vacuum environment before the substrate 2 and the thin-film battery layer 3 are manufactured. The vacuum environment can be constructed directly based on a natural high vacuum environment. Specifically, researchers use space transportation vehicles such as rockets or space shuttles to transport the raw materials and related instruments required for the preparation of the thin-film battery layer 3 and the substrate 2 to an extraterrestrial environment, including but not limited to a space station environment or a lunar environment. Subsequently, the substrate 2 and the thin-film battery layer 3 can be prepared based on the extraterrestrial natural vacuum environment.

[0054] It should be noted that, in some embodiments, the raw materials required for manufacturing the substrate 2 can be obtained based on in-situ resources in an extraterrestrial environment. For example, when manufacturing thin-film batteries on the lunar surface, the raw materials required for manufacturing the substrate 2 can be obtained by collecting lunar resources. Specifically, after a collection robot collects lunar soil or mineral resources, the lunar resources are further refined and processed to obtain the materials required for manufacturing the substrate 2. For another example, when manufacturing thin-film batteries in a space station environment, the raw materials required for manufacturing the substrate 2 can be obtained by collecting resources from near-Earth asteroids or the asteroid belt.

[0055] In this way, obtaining the raw materials needed to prepare the substrate 2 from in-situ resources in an extraterrestrial environment can greatly reduce the amount of materials required for transportation to the extraterrestrial environment, lighten the load on transportation vehicles, and simultaneously enable large-scale production based on in-situ resources in an extraterrestrial environment. For example, if thin-film batteries are produced in a lunar environment, the abundant mineral resources on the moon make large-scale production of thin-film batteries on the moon possible.

[0056] According to some embodiments of the present invention, after the substrate 2 is manufactured, the substrate 2 can be separated from the base 1, and the separated substrate 2 enters the next manufacturing process, and the separated base 1 can be reused to manufacture the substrate 2 again.

[0057] According to some embodiments of the present invention, the preparation of the substrate 2 and the preparation of the thin-film battery layer 3 can be carried out continuously. It should be explained that the above-mentioned continuous preparation refers to continuous preparation in time and / or space. For example, the method first prepares the substrate 2 based on in-situ resources in an extraterrestrial environment. After the substrate 2 is prepared, the thin-film battery layer 3 is prepared on the basis of the prepared substrate 2 by evaporation or the like.

[0058] Alternatively, the production of the substrate 2 and the production of the thin-film battery layer 3 can also be carried out discontinuously. It should be explained that the above-mentioned discontinuous production refers to discontinuous production in time and / or space. For example, the present method first prepares a plurality of substrates 2 on a large scale. After the production of the plurality of substrates 2 is completed, the production of the plurality of thin-film battery layers 3 is then simultaneously achieved based on the plurality of substrates 2 by evaporation.

[0059] In a specific embodiment of the present invention, step 100 of forming a substrate 2 on the surface of a substrate 1 by vacuum deposition and step 200 of forming a thin-film battery layer 3 on the substrate 2 by vacuum deposition are performed continuously. This allows for one-step thin-film battery production, high production efficiency, and a short production time for a single thin-film battery.

[0060] According to some embodiments of the present invention, the substrate 2 manufacturing process in the present invention may include steps such as vacuum deposition, thin film peeling, and quality inspection. Furthermore, after the substrate 2 is manufactured, in order to meet the qualified quality requirements of the substrate 2, the substrate 2 may be further subjected to vacuum annealing, vacuum pre-annealing and other processes.

[0061] In the process of manufacturing the substrate 2 , the substrate 2 can be prepared continuously or discontinuously with the help of tools such as a conveyor roller, a reel substrate or a molten pool.

[0062] In one embodiment, the substrate 1 comprises at least a rollable substrate 1 , a first conveying roller set and a second conveying roller, wherein the first conveying roller set comprises a plurality of first conveying rollers.

[0063] like Figure 2 As shown, step 100 of forming a substrate 2 on a surface of a base 1 by vacuum deposition in a vacuum environment includes step 110 and step 120 .

[0064] Step 110 , vaporizing the substrate 2 raw material under a vacuum environment, and depositing the vaporized substrate 2 raw material on the surface of the rollable base 1 to form the substrate 2 ;

[0065] In step 120 , at least one of the first conveyor roller group and the second conveyor roller is driven to rotate, and the composite of the rollable substrate 1 and the substrate 2 is conveyed to the second conveyor roller, or the substrate 2 is peeled off from the substrate 1 and conveyed to the second conveyor roller.

[0066] In this embodiment, the substrate 2 is produced by means of a conveyor roller. Specifically, in one embodiment, the process for producing the substrate 2 is as follows: First, in a vacuum environment, the substrate 2 raw material is heated to a set temperature, causing the substrate 2 raw material to vaporize into a gaseous state. The gaseous substrate 2 raw material is deposited on the surface of the rollable base 1 by vacuum deposition, thereby obtaining a composite of the base 1 and the base 2. Subsequently, the first conveyor roller group and / or the second conveyor roller are driven, so that the composite of the base 1 and the base 2 is conveyed from the first conveyor roller group to the second conveyor roller, and the base 1 is bent and wound around the second conveyor roller, thereby achieving storage of the substrate 2.

[0067] In another embodiment, during the conveying process, the base 1 is separated from the substrate 2, and the separated substrate 2 flows out of the second conveying roller and is stored, while the separated substrate 2 rotates from the bottom of the conveying roller to the first conveying roller group, that is, the substrate 1 moves back and forth between the first conveying roller group and the second conveying roller, so that the substrate 1 can continuously and repeatedly undergo the preparation process of the next substrate 2.

[0068] It should be noted that the substrate 1 can be wound or not wound on the first conveyor roller group in the initial state, and the gaseous substrate 2 raw material is deposited on the substrate 1 on the first conveyor roller group, and the vacuum deposition step and the conveying and transportation step can be carried out simultaneously. At this time, while the substrate 2 is continuously deposited on its surface, the substrate 1 is transported to the second conveyor roller along with the conveyance of the first conveyor roller group, thereby realizing the roll preparation of the substrate 2 in the continuous preparation process, that is, the continuous preparation and storage process of the substrate 2 is realized through the roll-to-roll process.

[0069] For example, before the substrate 2 is produced, the rollable substrate 1 is wound around a first conveyor roller in the first conveyor roller group, and the gaseous substrate 2 raw material is deposited on the surface of a portion of the substrate 1 to form the substrate 2. While the substrate 2 raw material is continuously deposited, a portion of the substrate 1 with the substrate 2 is conveyed from the first conveyor roller to the second conveyor roller, so that the composite composed of the substrate 1 and the substrate 2 is wound and stored on the second conveyor roller, thereby achieving continuous processing from the production process to the storage process of the substrate 2 and improving the preparation efficiency through the roll-to-roll process. In addition, a plurality of intermediate conveyor rollers can be provided between the first conveyor roller and the second conveyor roller, thereby playing a guiding role in the conveyance process of the substrate 1 and realizing a large-area deposition process, which can not only help the substrate 1 to be conveyed to the second conveyor roller more stably, but also increase the deposition area.

[0070] For another example, the substrate 1 is unfolded between multiple first conveyor rollers. The multiple first conveyor rollers can not only guide the transportation of the substrate 1, but also unfold the substrate 1 so that the substrate 1 can achieve a larger deposition area. Specifically, the multiple first conveyor rollers are arranged along the length direction of the substrate 1, one end of the substrate 1 is connected to the outermost first conveyor roller, and the substrate 1 is unfolded toward the inner first conveyor roller and supported and guided by the inner multiple first conveyor rollers. In this way, the gaseous substrate 2 raw material can be deposited on the unfolded substrate 1, thereby realizing a large-area deposition process of the substrate 2 and improving the preparation efficiency of the substrate 2.

[0071] like Figure 2 As shown, according to one embodiment of the present invention, step 100 of preparing the thin film battery layer 3 on the substrate 2 by vacuum deposition under a vacuum environment further includes steps 130 and 140.

[0072] Step 130 , forming a thin film battery layer 3 on the substrate 2 before being conveyed to the second conveyor roller by a vacuum deposition method, and obtaining a thin film battery formed by combining the thin film battery layer 3 and the substrate 2 ;

[0073] Step 140: Control the second conveying roller to wind the thin film battery.

[0074] In this embodiment, if Figure 2 As shown, step 100 includes step 110, step 120, step 130 and step 140. In a specific embodiment, the specific process of step 100 is as follows:

[0075] Under a vacuum environment, the raw material for substrate 2 is first heated until it vaporizes. The gaseous raw material for substrate 2 is deposited on the surface of base 1, thereby forming a composite of base 1 and base 2. Subsequently, the first conveyor roller set and / or the second conveyor roller are driven to convey the composite of base 1 and base 2 from the first conveyor roller set to the second conveyor roller. Before substrate 2 is conveyed to the second conveyor roller, the vaporized raw material for thin-film battery layer 3 is deposited on substrate 2 by evaporation to form thin-film battery layer 3, thereby forming a composite of base 1, thin-film battery layer 3, and base 2. Finally, the composite of base 1, thin-film battery layer 3, and base 2 is wound and stored on the second conveyor roller.

[0076] In the above process, it should also be noted that after the substrate 2 is prepared on the base 1, the substrate 2 can be directly separated from the base 1 and the preparation process of step 130 and step 140 in this embodiment is carried out. Specifically, the substrate 2 is first separated from the base 1, and the separated base 1 is rotated to the first conveying roller group through the intermediate conveying roller for the next substrate 2 preparation. The separated substrate 2 realizes the thin film battery layer 3 on the surface of the substrate 2 during the conveying process, thereby obtaining a thin film battery formed by the substrate 2 and the thin film battery. Finally, the thin film battery is rolled onto the second conveying roller for roll storage.

[0077] In this way, the production of the substrate 2, the production of the thin-film battery layer 3, and the storage of the substrate 2 and the thin-film battery layer 3 are all carried out continuously, which can further improve the production efficiency of the battery, so that each process can be carried out continuously and uninterruptedly, and the preparation and storage of thin-film batteries can be achieved in one step.

[0078] According to some embodiments of the present invention, when the substrate 2 is produced with the aid of a molten pool, the base 1 includes a molten pool and a meltable component located within the molten pool, wherein the melting point of the metal material within the molten pool is lower than the melting point of the raw material of the substrate 2. In this way, when the meltable component within the molten pool is in a liquid state, the substrate 2 is still in a solid state, thereby facilitating the peeling of the solid substrate 2 from the liquid meltable component. It should be noted that in order to achieve the peeling process after the substrate 2 is prepared, the meltable component can be in a liquid molten state from the beginning, or the meltable component can be in a solid state from the beginning and then heated and melted into a liquid state after the substrate 2 is produced, thereby facilitating the peeling of the substrate 2.

[0079] In one embodiment of the present invention, the meltable component within the melt pool is initially in a liquid molten state.

[0080] like Figure 3 As shown, step 100 of forming a substrate 2 on a surface of a base 1 by vacuum deposition in a vacuum environment includes step 101a and step 102a.

[0081] Step 101a, vaporizing a substrate 2 raw material above a molten pool in a vacuum environment, so that the substrate 2 raw material is deposited on the surface of the liquid meltable component to form a substrate 2;

[0082] Step 102a: peeling the substrate 2 from the liquid meltable component.

[0083] In this embodiment, the meltable component remains in a liquid, molten state during the fabrication of substrate 2. Thus, after the subsequent fabrication of substrate 2 is complete, substrate 2 can be directly peeled from the liquid, meltable component without requiring additional steps, saving time and effort. It should be noted that to ensure that the meltable component remains in a liquid state and that substrate 2 can be properly fabricated, the heating temperature can be maintained within a temperature range between the melting point of the meltable component and the melting point of substrate 2.

[0084] In another embodiment of the present invention, the meltable component within the molten pool is initially in a solid state.

[0085] like Figure 4 As shown, step 100 of forming the substrate 2 on the surface of the base 1 by vacuum deposition in a vacuum environment includes step 101b, step 102b and step 103b.

[0086] Step 101b, vaporizing the substrate 2 raw material in a vacuum environment, so that the vaporized substrate 2 raw material is deposited on the surface of the solid base 1;

[0087] Step 102b, heating the substrate 1 at a preset heating temperature so that the substrate 1 melts into a liquid state, wherein the preheating temperature is lower than the melting point of the raw material of the substrate 2 and higher than the melting point of the substrate 1;

[0088] Step 103b: peeling the substrate 2 off the liquid base 1.

[0089] In this embodiment, the meltable component within the molten pool is initially solid. The vaporized substrate 2 raw material is deposited on the solid meltable component to form the substrate 2. After the substrate 2 is deposited, the molten pool is heated to liquefy the solid meltable component within the molten pool. Furthermore, the substrate 2 and the liquid meltable component are separated by physical means. Thus, in this embodiment, the substrate 2 is first evaporated onto the solidified, flat surface of the low-melting-point metal, and then the meltable component is separated from the substrate 2. This improves the manufacturing quality of the substrate 2 and ensures the flatness of the substrate 2.

[0090] In the above two embodiments, the meltable components in the molten pool can be made of low-melting-point metal materials. Specifically, the meltable components can be made of materials such as bismuth-tin alloy. Of course, the present invention does not make special limitations here. The meltable components can also be made of other metal materials, as long as the melting point of the meltable components is lower than the melting point of the substrate 2.

[0091] According to one embodiment of the present invention, after step 200 of preparing the thin film battery layer 3 on the substrate 2 by vacuum deposition in a vacuum environment, the manufacturing method further includes:

[0092] Step 300 , peeling the thin film battery from the substrate 1 and storing it in a roll;

[0093] Step 400 , preparing a thin film battery again on the substrate 1 by vacuum deposition method;

[0094] Step 500 , repeating the above two steps (ie, step 300 and step 400 ) multiple times or in parallel to perform large-scale production.

[0095] In this embodiment, the peeled substrate 1 can be used as a raw material for the next thin-film battery preparation. In this way, the substrate 1 produced in the first step can be reused in subsequent thin-film battery preparation processes, thereby achieving large-scale production of photovoltaic cells. In one embodiment, the method can achieve large-scale production by repeating the two processes represented by steps 300 and 400 multiple times; in another embodiment, the method can also achieve large-scale production by performing the two processes represented by steps 300 and 400 in parallel.

[0096] It should be explained that the above-mentioned “parallel” includes temporal parallelism (ie, continuous preparation in time) and / or spatial parallelism (ie, continuous preparation in space), and the present invention does not make any special limitation here.

[0097] According to another embodiment of the present invention, after the thin-film battery layer 3 is formed by evaporation on the substrate 2, the thin-film battery layer 3 and the substrate 2 remain in a mating state without being separated. Therefore, in the subsequent production process, the composite formed by the thin-film battery layer 3 and the substrate 2 can be directly cut and then assembled with other components to complete the production of the photovoltaic cell. In the above embodiment, the method can repeatedly perform steps 100 and 200 to achieve large-scale production of the battery.

[0098] According to one embodiment of the present invention, the thin film battery layer 3 includes a buffer layer, which is close to the substrate 2 in the thin film battery; and / or the thin film battery layer 3 further includes a protective layer, which is far away from the substrate 2 in the thin film battery.

[0099] According to one embodiment of the present invention, the vacuum environment is an extraterrestrial environment, and the raw materials for substrate 2 are obtained from in-situ resources in the extraterrestrial environment. Thus, in an extraterrestrial high vacuum environment, substrate 2 is fabricated by physical deposition of thin films, and thin-film photovoltaic cells are fabricated by evaporation of substrate 2. This utilizes the extraterrestrial high vacuum environment to achieve increased productivity, and by utilizing in-situ resources (local resources in the extraterrestrial environment), the required resources and equipment mass are significantly reduced.

[0100] According to one embodiment of the present invention, the thin-film battery layer 3 is a vapor-deposited thin-film photovoltaic cell such as a copper indium gallium selenide thin-film solar cell (i.e., CIGS) or a cadmium telluride thin-film solar cell (i.e., CdTe), wherein the CIGS coating is thinner, thereby meeting the requirement of lighter resource carrying, and a necessary buffer layer can be prepared between the thin-film battery layer 3 and the substrate 2.

[0101] Among them, for the thin-film photovoltaic cell prepared by the manufacturing method of the present invention, a protective film such as silicon dioxide or silicon nitride can be prepared on the surface of the cell, thereby improving environmental stability and achieving properties such as resistance to radiation and resistance to atomic oxygen in space.

[0102] According to some embodiments of the present invention, substrate 2 may be made of aluminum, titanium, an iron-nickel alloy, a metal oxide ceramic, or other suitable materials for use as a photovoltaic cell substrate 2 in the next step, without particular limitation in the present invention. Furthermore, the raw materials for substrate 2 may be obtained from extraterrestrial in-situ resources or may be brought with the user before transporting the material to the extraterrestrial environment.

[0103] A specific embodiment of the method for manufacturing a thin film battery according to the present invention is described below.

[0104] Taking the lunar environment as an example for the preparation of thin-film photovoltaic cells, the specific preparation process of thin-film photovoltaic cells is as follows: first, the raw material rods are prepared using the lunar soil electrophoresis separation metal compound preparation device. Specifically, the lunar soil is input into the suspension tank. At this time, the aluminum oxide mineral moves toward the electrode and is retained on the filter paper. The filter paper is then wound into a raw material rod; secondly, the metal element is prepared by electrolysis. Specifically, the aluminum oxide mineral is dissolved and electrolytically precipitated to separate aluminum and oxygen; thirdly, the solar metal is used. The thin film substrate preparation device deposits the substrate 2. Specifically, the aluminum raw material rod is placed in a water-cooled copper crucible and the raw material rod is heated. At this time, the molecules evaporate and deposit on the thick plate (i.e., substrate 1). The thick plate is then cooled to achieve the peeling of the substrate 2. Finally, the CIGS (i.e., copper indium gallium selenide) thin film battery layer 3 vacuum evaporation preparation device is used to realize the production of the CIGS thin film battery layer 3. Specifically, the metal aluminum film substrate 1 is unfolded section by section, and the CIGS functional layer raw material is vacuum evaporated on the lining plate to finally obtain a thin film solar cell roll.

[0105] After obtaining the thin-film solar cell roll, a robot on the lunar soil surface loaded the roll and laid a fixed CIGS thin-film solar cell array on the lunar surface.

[0106] The above embodiments are intended to illustrate the present invention only and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the embodiments, it should be understood by those skilled in the art that various combinations, modifications, or equivalent substitutions of the technical solutions of the present invention do not depart from the spirit and scope of the technical solutions of the present invention and should be encompassed by the scope of the claims of the present invention.

Claims

1. A method for manufacturing a thin film battery, characterized in that: include: In a vacuum environment, a detachable substrate is formed on a surface of a substrate by vacuum deposition, wherein the substrate includes a rollable substrate; In a vacuum environment, preparing a thin film battery layer on the substrate by vacuum deposition; The rollable substrate is driven by a first conveying roller group and a second conveying roller, so that the preparation and conveying processes of the substrate and the thin film battery layer are carried out in the same vacuum environment.

2. The method for manufacturing a thin film battery according to claim 1, wherein: The step of generating a substrate on the surface of a base by vacuum deposition and the step of preparing a thin film battery layer on the substrate by vacuum deposition are performed continuously.

3. The method for manufacturing a thin film battery according to claim 1, wherein: The first conveying roller group includes a plurality of first conveying rollers; The step of forming a substrate on the surface of the substrate by vacuum deposition in a vacuum environment includes: vaporizing a substrate raw material in a vacuum environment, and depositing the vaporized substrate raw material on the surface of the rollable base to form the substrate; At least one of the first conveying roller group and the second conveying roller is driven to rotate to convey the composite of the rollable base and the substrate to the second conveying roller, or the substrate is peeled off from the substrate and conveyed to the second conveying roller.

4. The method for manufacturing a thin film battery according to claim 3, wherein: The step of preparing a thin film battery layer on the substrate by vacuum deposition in a vacuum environment includes: Preparing a thin film battery layer on the substrate before being conveyed to the second conveying roller by vacuum deposition, and obtaining a thin film battery formed by combining the thin film battery layer and the substrate; The second conveying roller is controlled to wind the thin film battery.

5. The method for manufacturing a thin film battery according to claim 1, wherein: The substrate includes a molten pool and a liquid meltable component located in the molten pool; The step of forming a substrate on the surface of the substrate by vacuum deposition in a vacuum environment includes: In a vacuum environment, vaporizing a substrate raw material above a molten pool so that the substrate raw material is deposited on the surface of the liquid meltable component to form the substrate; The substrate is peeled off from the liquid meltable component.

6. The method for manufacturing a thin film battery according to claim 1, wherein: The substrate includes a molten pool and a solid meltable component located in the molten pool; The step of forming a substrate on the surface of the substrate by vacuum deposition in a vacuum environment includes: In a vacuum environment, vaporizing a substrate raw material so that the vaporized substrate raw material is deposited on the surface of the solid meltable component; Heating the molten pool at a preset heating temperature so that the solid meltable component melts into a liquid state, wherein the preheating temperature is lower than the melting point of the substrate raw material and higher than the melting point of the meltable component; The substrate is peeled off from the liquid meltable component.

7. The method for manufacturing a thin film battery according to any one of claims 1 to 6, characterized in that: After the step of preparing a thin film battery layer on the substrate by vacuum deposition in a vacuum environment, the method further includes: peeling the thin film battery formed by the thin film battery layer and the substrate from the base and storing the thin film battery in a roll; preparing the thin film battery again on the substrate by vacuum deposition; The above two steps are repeated multiple times or performed in parallel for large-scale production.

8. The method for manufacturing a thin film battery according to claim 7, wherein: The thin film battery layer includes a buffer layer, and the buffer layer is close to the substrate in the thin film battery; And / or, the thin film battery layer further includes a protective layer, and the protective layer is away from the substrate in the thin film battery.

9. The method for manufacturing a thin film battery according to any one of claims 1 to 6, characterized in that: The vacuum environment is an extraterrestrial environment, and the substrate raw materials are obtained based on in-situ resources in the extraterrestrial environment.

10. The method for manufacturing a thin film battery according to any one of claims 1 to 6, characterized in that: The thin film battery is a copper indium gallium selenide thin film solar cell or a cadmium telluride thin film solar cell.

Citation Information

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