A mounting platform and a mounting method using the same

Abstract

The present invention relates to a mounting platform and a mounting method using the mounting platform. The present invention includes a mounting platform body, a microscope, a middle cover plate, a product entrance cover plate, a microscope entrance cover plate, a first cover plate and a second cover plate respectively connected to the two side ends of the mounting platform body, and a bottom plate connected to the bottom end of the mounting platform body; the mounting platform body includes a straight plate perpendicular to the horizontal plane, an inclined plate connected to the straight plate and inclined to the horizontal plane, the straight plate is provided with an operation hole and an operation hole cover, the inclined plate is provided with a mounting groove, the middle cover plate is connected to the inclined plate through the mounting groove, the microscope is placed on the bottom plate, the middle cover plate is provided with a notch, and the eyepiece of the microscope is exposed on the outer surface of the middle cover plate through the notch; the first cover plate is provided with a first slot, the product entrance cover plate is detachably mounted on the first cover plate through the first slot, and the second cover plate is provided with a second slot. The present invention can ensure the capping requirements of small-size circuits, and the air tightness and reliability of the mounting platform meet the design requirements.

Description

Technical Field

[0001] The invention relates to the technical field of microelectronic packaging, in particular to a mounting platform and a mounting method using the mounting platform. Background Art

[0002] With the development of semiconductor circuit devices, the chip size is also shrinking, so the requirements for packaging technology are also increasing. Before the advent of the present invention, the capping process was carried out in a conventional nitrogen mounting station. At present, with the increase of small-sized chips, the difficulty of the capping process has greatly increased, and the requirements for the capping technology have also increased to a certain extent. In this case, if the conventional capping mounting station is still used for the capping process, due to the small size of the circuit, the difficulty of capping increases, and the reliability of the capping process cannot be guaranteed. Therefore, a new mounting method is needed to ensure the reliability of the circuit capping while meeting its airtightness. Summary of the invention

[0003] The purpose of the present invention is to supplement the deficiencies in the prior art and to provide a capping mounting platform for small-sized products on which a microscope can be placed to carry out the capping process. The mounting platform can ensure both the reliable use of the microscope and its sealing performance, thereby ensuring the normal progress of the capping process.

[0004] In order to solve the above technical problems, the present invention provides a mounting platform, comprising a mounting platform body, a microscope, a middle cover plate, a product entrance cover plate, a microscope entrance cover plate, a first cover plate and a second cover plate respectively connected to both side ends of the mounting platform body, and a bottom plate connected to the bottom end of the mounting platform body;

[0005] The mounting platform body includes a straight plate perpendicular to the horizontal plane, and an inclined plate connected to the straight plate and inclined to the horizontal plane, the straight plate is provided with an operation hole and an operation hole cover, the inclined plate is provided with a mounting groove, the middle cover plate is connected to the inclined plate through the mounting groove, the microscope is placed on the bottom plate, the middle cover plate is provided with a notch, and the eyepiece of the microscope is exposed on the outer surface of the middle cover plate through the notch;

[0006] The first cover plate is provided with a first slot, and the product inlet cover plate is detachably mounted on the first cover plate through the first slot; the second cover plate is provided with a second slot, and the microscope inlet cover plate is detachably mounted on the second cover plate through the second slot;

[0007] A cavity is formed between the mounting platform body, the base plate, the first cover plate and the second cover plate, and the cavity is connected with a nitrogen inflation pipe and an air pressure detection tube. The nitrogen inflation pipe is a nitrogen inflation pipe for introducing nitrogen, and the air pressure detection tube is connected to a barometer for detecting the air pressure in the cavity.

[0008] In one embodiment of the present invention, the shapes of the mounting groove, the notch, the first slot and the second slot all include rectangles.

[0009] In one embodiment of the present invention, the mounting platform body, the bottom plate, the first cover plate and the second cover plate are all made of stainless steel plates.

[0010] In one embodiment of the present invention, the mounting platform body is spliced ​​into one piece with the bottom plate, the first cover plate and the second cover plate by welding.

[0011] In one embodiment of the present invention, there are clamping grooves on the first cover plate at both sides of the first slot and on the second cover plate at both sides of the second slot.

[0012] In one embodiment of the present invention, it also includes a plate pressure strip and a movable scribing piece, wherein the plate pressure strip is connected to the middle cover plate, and the plate pressure strips are respectively provided on both sides of the notch, and the movable scribing piece is connected to the middle cover plate through two plate pressure strips and can move along the surface of the notch, and the movable scribing piece is provided with an opening, and the eyepiece of the microscope is exposed from the opening.

[0013] In one embodiment of the present invention, a rubber strip is provided around the opening, and the eyepiece of the microscope is in contact with the rubber strip.

[0014] In one embodiment of the present invention, the middle cover plate and the movable scribing sheet are both transparent acrylic plates.

[0015] The present invention also provides a mounting method using the mounting platform, comprising the following steps:

[0016] S1: Open the microscope entrance cover, place the microscope on the bottom plate at the bottom of the mounting platform body, cover the microscope entrance cover, and adjust the microscope so that its eyepiece is exposed in the notch of the middle cover;

[0017] S2: Open the product entrance cover, place the circuit components to be capped in the tray on the bottom plate at the bottom end of the mounting platform body, and cover the product entrance cover, wherein the capped circuit components include a tube shell chip and a capping plate, and a solder ring is provided on one side of the capping plate;

[0018] S3: nitrogen is filled into the cavity of the mounting platform through the nitrogen filling pipe until the air pressure counter value displays a preset value;

[0019] S4: Open the operating hole cover, use tweezers to pick up the cover plate through the operating hole, and check under a microscope to confirm that there are no scratches or stains on the surface of the cover plate and that the solder ring is not damaged;

[0020] S5: Use an ear-cleaning ball to blow around the tube shell chip through the operation hole, then use tweezers or a suction pen to fix the cover plate, use the ear-cleaning ball to blow the solder ring on the cover plate, place the cover plate with the solder ring facing down, place the cover plate on the welding frame of the tube shell chip, use tweezers to adjust the position of the cover plate so that it is in the middle of the welding frame, and perform capping. After the capping is completed, observe the capping effect through the eyepiece of the microscope;

[0021] S6: Stop filling nitrogen into the cavity of the mounting table, open the product entrance cover, place the capped circuit on the tray and then take it out.

[0022] In one embodiment of the present invention, in step S1, the eyepiece is exposed from the opening of the movable scribing sheet, and the position of the eyepiece is adjusted by moving the movable scribing sheet.

[0023] The above technical solution of the present invention has the following advantages compared with the prior art:

[0024] The mounting platform and the mounting method using the mounting platform described in the present invention can ensure that the product can be better capped under a microscope and the qualified rate of the product, and the air tightness and internal atmosphere of the mounting platform can meet the design requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to make the content of the present invention more clearly understood, the present invention is further described in detail below according to specific embodiments of the present invention in conjunction with the accompanying drawings, wherein

[0026] FIG. 1 is a schematic diagram of the overall structure of the mounting platform of the present invention.

[0027] FIG. 2 is a schematic diagram of the structure of the mounting platform of the present invention after omitting the microscope.

[0028] FIG. 3 is a schematic diagram of the structure of the mounting platform of the present invention after omitting the middle cover plate.

[0029] FIG. 4 is a schematic diagram of the mobile scribing installation structure of the present invention.

[0030] Explanation of the reference numerals in the drawings in the specification: 1. mounting platform body; 11. straight plate; 12. inclined plate; 121. mounting slot; 13. operating hole; 14. operating hole cover; 2. microscope; 21. eyepiece; 3. middle cover plate; 31. notch; 32. plate pressure strip; 33. movable scriber; 331. opening; 332. rubber strip; 4. product entrance cover plate; 5. microscope entrance cover plate; 6. first cover plate; 61. first slot; 7. second cover plate; 70. slot; 71. second slot; 8. bottom plate; 9. cavity; 91. barometer. DETAILED DESCRIPTION

[0031] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0032] Example 1

[0033] Reference Figures 1 to 3 As shown, a mounting platform includes a mounting platform body 1, a microscope 2, a middle cover plate 3, a product entrance cover plate 4, a microscope entrance cover plate 5, a first cover plate 6 and a second cover plate 7 respectively connected to both side ends of the mounting platform body 1, and a bottom plate 8 connected to the bottom end of the mounting platform body 1;

[0034] The mounting platform body 1 includes a straight plate 11 perpendicular to the horizontal plane, and an inclined plate 12 connected to the straight plate 11 and inclined to the horizontal plane. The straight plate 11 is provided with an operation hole 13 and an operation hole cover 14. The inclined plate 12 is provided with a mounting groove 121. The middle cover plate 3 is connected to the inclined plate 12 through the mounting groove 121. The microscope 2 is placed on the bottom plate 8. The middle cover plate 3 is provided with a notch 31. The eyepiece 21 of the microscope 2 is exposed on the outer surface of the middle cover plate 3 through the notch 31.

[0035] The first cover plate 6 is provided with a first slot 61, and the product inlet cover plate 4 is detachably mounted on the first cover plate 6 through the first slot 61; the second cover plate 7 is provided with a second slot 71, and the microscope inlet cover plate 5 is detachably mounted on the second cover plate 7 through the second slot 71;

[0036] A cavity 9 is formed between the mounting platform body 1, the base plate 8, the first cover plate 6 and the second cover plate 7, and the cavity 9 is connected with a nitrogen inflation pipe and an air pressure detection tube. The nitrogen inflation pipe is a nitrogen inflation pipe for introducing nitrogen, and the air pressure detection tube is connected to a barometer 91 for detecting the air pressure in the cavity 9.

[0037] Specifically, the shapes of the installation groove 121, the notch 31, the first slot 61 and the second slot 71 are all rectangular, which facilitates the installation of the middle cover plate 3, the product entrance cover plate 4 and the microscope entrance cover plate 5 and improves the sealing of the interior of the mounting platform; the setting of the operation hole 13 makes it convenient for the operator to insert his hand for operation.

[0038] Specifically, the mounting platform body 1 , the bottom plate 8 , the first cover plate 6 and the second cover plate 7 are all made of stainless steel plates, which may be AISI 304.

[0039] Specifically, the mounting platform body 1 is spliced ​​into one piece with the bottom plate 8, the first cover plate 6 and the second cover plate 7 by welding.

[0040] Specifically, there are slots 70 on the first cover plate 6 at both sides of the first slot 61 and on the second cover plate 7 at both sides of the second slot 71 , so that the middle cover plate 3 and the product inlet cover plate 4 can be easily installed and removed through the slots 70 .

[0041] Specifically, the middle cover plate 3 is a transparent acrylic plate, which is convenient for observing the internal state of the mounting platform.

[0042] Example 2

[0043] Reference Figures 1 to 4 As shown, in this embodiment, the mounting platform includes a mounting platform body 1, a microscope 2, a middle cover plate 3, a product entrance cover plate 4, a microscope entrance cover plate 5, a first cover plate 6 and a second cover plate 7 respectively connected to both side ends of the mounting platform body 1, and a bottom plate 8 connected to the bottom end of the mounting platform body 1;

[0044] The mounting platform body 1 includes a straight plate 11 perpendicular to the horizontal plane, and an inclined plate 12 connected to the straight plate 11 and inclined to the horizontal plane. The straight plate 11 is provided with an operation hole 13 and an operation hole cover 14. The inclined plate 12 is provided with a mounting groove. The middle cover plate 3 is connected to the inclined plate 12 through the mounting groove. The microscope 2 is placed on the bottom plate 8. The middle cover plate 3 is provided with a notch 31.

[0045] Wherein, it also includes a plate pressure strip 32 and a movable scribing piece 33, the plate pressure strip 32 is connected to the middle cover plate 3, the plate pressure strips 32 are respectively provided on both sides of the notch 31, the movable scribing piece 33 is connected to the middle cover plate 3 through two plate pressure strips 32 and can move along the surface of the notch 31, the movable scribing piece 33 is provided with an opening 331, and the eyepiece 21 of the microscope 2 is exposed from the opening 331; a rubber strip 332 is provided around the opening 331, and the eyepiece 21 of the microscope 2 contacts the rubber strip 332 to prevent scratches around the eyepiece 21 of the microscope 2, and the middle cover plate 3 and the movable scribing piece 33 are both transparent acrylic plates; the position of the eyepiece 21 can be adjusted by moving the movable scribing piece 33 up and down, and the eyepiece 21 is wrapped by the rubber strip 332 to prevent excessive leakage of nitrogen in the cavity 9 through the notch 31;

[0046] The first cover plate 6 is provided with a first slot 61, and the product inlet cover plate 4 is detachably mounted on the first cover plate 6 through the first slot 61; the second cover plate 7 is provided with a second slot 71, and the microscope inlet cover plate 5 is detachably mounted on the second cover plate 7 through the second slot 71;

[0047] A cavity 9 is formed between the mounting platform body 1, the bottom plate 8, the first cover plate 6 and the second cover plate 7. The cavity 9 is connected with a nitrogen filling pipe and an air pressure detection pipe. The nitrogen filling pipe is used to introduce nitrogen, and the air pressure detection pipe is connected to a barometer 91 for detecting the air pressure in the cavity 9. Through the above arrangement, by arranging the microscope 2 in the mounting platform, the problem of accuracy in capping small-sized circuits is solved, and at the same time, the problem of air leakage in the mounting platform is avoided during the capping process.

[0048] Example 3

[0049] This embodiment provides a mounting method using the mounting platform, comprising the following steps:

[0050] S1: Open the microscope entrance cover 5, place the microscope 2 on the bottom plate 8 at the bottom end of the mounting platform body 1, cover the microscope entrance cover 5, and adjust the microscope 2 so that its eyepiece 21 is exposed in the notch 31 of the middle cover 3;

[0051] S2: Open the product entrance cover plate 4, place the circuit components to be capped in the tray on the bottom plate 8 at the bottom end of the mounting platform body 1, and cover the product entrance cover plate 4, wherein the capped circuit components include a tube shell chip and a capping plate, and a solder ring is provided on one side of the capping plate;

[0052] S3: nitrogen is filled into the cavity 9 of the mounting platform through the nitrogen filling pipe until the value of the barometer 91 shows a preset value;

[0053] S4: Open the operation hole cover 14, use tweezers to pick up the cover plate through the operation hole 13, and check and confirm through the microscope 2 that there are no scratches or stains on the surface of the cover plate and no defects on the solder ring;

[0054] S5: Use an ear-cleaning ball to blow around the tube shell chip through the operation hole 13, then use tweezers or a suction pen to fix the cover plate, use the ear-cleaning ball to blow the solder ring on the cover plate, place the cover plate with the solder ring facing down, place the cover plate on the welding frame of the tube shell chip, use tweezers to adjust the position of the cover plate so that it is in the middle of the welding frame, and cap. After the capping is completed, observe the capping effect through the eyepiece 21 of the microscope 2;

[0055] S6: Stop filling nitrogen into the cavity 9 of the mounting table, open the product inlet cover 4, place the capped circuit on the tray and then take it out.

[0056] In step S1 , the eyepiece 21 is exposed from the opening 331 of the movable scribing piece 33 , and the position of the eyepiece 21 is adjusted by moving the movable scribing piece 33 .

[0057] Finally, it should be noted that the above specific implementation methods are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to examples, those skilled in the art should understand that the technical solution of the present invention can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present invention, which should be included in the scope of the claims of the present invention.

Claims

1. A mounting platform, characterized in that: It comprises a mounting platform body (1), a microscope (2), a middle cover plate (3), a product entrance cover plate (4), a microscope entrance cover plate (5), a first cover plate (6) and a second cover plate (7) respectively connected to both side ends of the mounting platform body (1), and a bottom plate (8) connected to the bottom end of the mounting platform body (1); The mounting platform body (1) comprises a straight plate (11) perpendicular to a horizontal plane, and an inclined plate (12) connected to the straight plate (11) and inclined to the horizontal plane, the straight plate (11) being provided with an operation hole (13) and an operation hole cover (14), the inclined plate (12) being provided with a mounting groove (121), the middle cover plate (3) being connected to the inclined plate (12) via the mounting groove (121), the microscope (2) being placed on the bottom plate (8), the middle cover plate (3) being provided with a notch (31), and the eyepiece (21) of the microscope (2) being exposed on the outer surface of the middle cover plate (3) via the notch (31); The first cover plate (6) is provided with a first slot (61), and the product inlet cover plate (4) is detachably mounted on the first cover plate (6) via the first slot (61); the second cover plate (7) is provided with a second slot (71), and the microscope inlet cover plate (5) is detachably mounted on the second cover plate (7) via the second slot (71); A cavity (9) is formed between the mounting platform body (1), the bottom plate (8), the first cover plate (6) and the second cover plate (7); the cavity (9) is connected to a nitrogen filling pipe and an air pressure detection pipe, the nitrogen filling pipe is used to introduce nitrogen, and the air pressure detection pipe is connected to a barometer (91) used to detect the air pressure in the cavity (9); It also includes a plate pressure strip (32) and a movable scribing piece (33), wherein the plate pressure strip (32) is connected to the middle cover plate (3), the plate pressure strips (32) are respectively provided on both sides of the notch (31), the movable scribing piece (33) is connected to the middle cover plate (3) via the two plate pressure strips (32) and is capable of moving along the surface of the notch (31), the movable scribing piece (33) is provided with an opening (331), and the eyepiece (21) of the microscope (2) is exposed from the opening (331); A rubber strip (332) is provided around the opening (331), and the eyepiece (21) of the microscope (2) is in contact with the rubber strip (332).

2. A mounting platform according to claim 1, characterized in that: The shapes of the mounting groove (121), the notch (31), the first slot (61) and the second slot (71) are all rectangular.

3. A mounting platform according to claim 1, characterized in that: The mounting platform body (1), the bottom plate (8), the first cover plate (6) and the second cover plate (7) are all made of stainless steel plates.

4. A mounting platform according to claim 1, characterized in that: The mounting platform body (1) is joined to a base plate (8), a first cover plate (6) and a second cover plate (7) by welding.

5. The mounting platform according to claim 1, characterized in that: The first cover plate (6) on both sides of the first slot (61) and the second cover plate (7) on both sides of the second slot (71) are both provided with slots (70).

6. The mounting platform according to claim 1, characterized in that: The middle cover plate (3) and the movable scribing sheet (33) are both transparent acrylic plates.

7. A mounting method using the mounting platform according to any one of claims 1 to 6, characterized in that: The steps include: S1: Open the microscope entrance cover (5), place the microscope (2) on the bottom plate (8) at the bottom end of the mounting platform body (1), cover the microscope entrance cover (5), and adjust the microscope (2) so that the eyepiece (21) is exposed in the notch (31) of the middle cover (3); S2: Open the product entrance cover plate (4), place the circuit components to be capped placed in the tray on the bottom plate (8) at the bottom end of the mounting platform body (1), and cover the product entrance cover plate (4), wherein the capped circuit components include a tube shell chip and a capping plate, and a solder ring is provided on one side of the capping plate; S3: Filling nitrogen into the cavity (9) of the mounting platform through the nitrogen filling pipe until the value of the barometer (91) reaches a preset value; S4: Open the operating hole cover (14), use tweezers to pick up the cover plate through the operating hole (13), and check and confirm through a microscope (2) that there are no scratches or stains on the surface of the cover plate and that the solder ring is not damaged; S5: Use an ear-cleaning ball to blow air around the tube shell chip through the operation hole (13), then use tweezers or a suction pen to fix the cover plate, use the ear-cleaning ball to blow air on the solder ring on the cover plate, place the cover plate on the solder frame of the tube shell chip with the side of the cover plate provided with the solder ring facing downward, use tweezers to adjust the position of the cover plate so that it is located in the center of the solder frame, and perform capping. After the capping is completed, observe the capping effect through the eyepiece (21) of the microscope (2); S6: Stop filling the cavity (9) of the mounting table with nitrogen, open the product inlet cover (4), place the capped circuit on the tray and then take it out.

8. The mounting method using a mounting platform as claimed in claim 7, characterized in that: In step S1, the eyepiece (21) is exposed from the opening (331) of the movable scribing sheet (33), and the position of the eyepiece (21) is adjusted by moving the movable scribing sheet (33).

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