Loading and unloading equipment

Abstract

This invention provides a loading and unloading tool for loading and unloading chuck worktables. When an operator manually changes a chuck worktable without handles, the tool allows for stable handling without contaminating cleanroom gloves. With the handle integrally fitted into the outer periphery of the chuck worktable, the operator grasps the handle to load and unload the chuck worktable relative to the processing device. Therefore, when an operator wearing cleanroom gloves manually loads and unloads the chuck worktable relative to the processing device, the tool allows for stable handling without contaminating cleanroom gloves.

Description

Technical Field

[0001] This invention relates to a loading and unloading tool used in loading and unloading a chuck table relative to a processing apparatus having a chuck table and a processing unit. The chuck table is circular and has a holding surface on its front for holding the workpiece. The processing unit processes the workpiece held by the chuck table. Background Technology

[0002] Semiconductor chips, such as ICs (Integrated Circuits) and LSIs (Large Scale Integration), are indispensable components in various electronic devices, including mobile phones and personal computers. These chips are typically manufactured by dicing a workpiece, such as a wafer on which numerous semiconductor devices are formed on the front side.

[0003] The workpiece can be divided, for example, using a processing apparatus (such as a cutting apparatus or a laser processing apparatus) placed in a clean room. Such a processing apparatus typically has a chuck table (see, for example, Patent Document 1) that generates negative pressure on the front side of the workpiece to attract and hold it.

[0004] Patent Document 1: Japanese Patent Application Publication No. 11-254259

[0005] The size of the workpieces and the processing conditions vary, and the chuck table suitable for processing the workpieces also varies accordingly. Therefore, in most processing equipment, the chuck table is set up in a way that allows it to be changed according to the size of the workpiece and the processing conditions.

[0006] However, the chuck table can sometimes become contaminated due to machining debris and / or the adhering of liquids used in machining. Therefore, when operators wearing cleanroom gloves manually change the chuck table, these gloves can sometimes also become contaminated.

[0007] Furthermore, although chuck tables are typically heavy structures, they are not equipped with handles. Therefore, there is a concern that the operator might drop and damage the chuck table when manually moving it.

[0008] On the other hand, there are concerns that installing handles on the chuck table would increase its size and require modifications to the machining apparatus that mounts it. Additionally, there are concerns that the chuck table handles might become contaminated. Summary of the Invention

[0009] In view of the above, the object of the present invention is to provide a loading and unloading tool that allows an operator to load and unload a chuck worktable without handles in a stable manner without contaminating cleanroom gloves or the like when manually loading and unloading the worktable relative to the processing device.

[0010] According to the present invention, a loading and unloading device is provided for loading and unloading a chuck table relative to a processing apparatus having a chuck table and a processing unit. The chuck table is circular and has a holding surface on its front side for holding a workpiece. The processing unit processes the workpiece held by the chuck table. The loading and unloading device includes: a first fitting portion that fits into a first outer peripheral region of the chuck table; a second fitting portion that fits into a second outer peripheral region of the chuck table located opposite to the first outer peripheral region when viewed from the center of the chuck table; a first main body portion having the upper portion of the first fitting portion fixed to its lower surface at one end, and extending toward the second fitting portion; and a second main body portion having the upper portion of the second fitting portion fixed to its lower surface at one end, and a portion of the first main body portion or a portion of the second main body portion being inserted into the first main body portion. The first main body and the second main body are connected in such a way that the first fitting part has a first fitting surface facing the side of the chuck table when it is fitted into the first outer peripheral region and a second fitting surface facing the lower surface of the chuck table. The second fitting part has a third fitting surface facing the side of the chuck table when it is fitted into the second outer peripheral region and a fourth fitting surface facing the lower surface of the chuck table. The first main body and the second main body are connected in such a way that the first fitting part and the second fitting part can be positioned in either a fitting position or a retracted position. In the fitting position, the distance between the first fitting surface and the third fitting surface is equal to the diameter of the chuck table. In the retracted position, the distance between the end of the second fitting surface away from the first fitting surface and the end of the fourth fitting surface away from the third fitting surface is longer than the diameter of the chuck table.

[0011] Furthermore, in this invention, it is preferable that the first main body and the second main body are connected by a spring. In both cases where the first fitting part and the second fitting part are positioned in the fitting position and in the retracted position, the spring applies force to the first main body and the second main body in the direction that brings the first fitting part and the second fitting part closer to each other.

[0012] When loading and unloading the chuck worktable using the loading and unloading tool of the present invention, with the fitting part integrally provided with the handle part fitted into the outer peripheral area of ​​the chuck worktable, the operator grasps the handle part and loads or unloads the chuck worktable relative to the processing device. Therefore, when an operator wearing cleanroom gloves or the like manually loads or unloads the chuck worktable relative to the processing device, the chuck worktable can be loaded or unloaded stably without contaminating the cleanroom gloves or the like. Attached Figure Description

[0013] Figure 1 This is a perspective view schematically showing an example of a processing device.

[0014] Figure 2 (A) is an exploded perspective view schematically showing an example of a chuck worktable, etc. Figure 2 (B) is a schematic side view of an example of a chuck worktable.

[0015] Figure 3 This is a perspective view schematically illustrating an example of loading and unloading equipment.

[0016] Figure 4 This is a perspective view schematically showing an example of a loading and unloading tool mounted on a chuck worktable.

[0017] Figure 5 It is a perspective view schematically showing a modified example of loading and unloading equipment.

[0018] Figure 6 It is a perspective view schematically showing a modified example of a loading and unloading tool mounted on a chuck worktable.

[0019] Label Explanation

[0020] 1: Workpiece; 3: Scribing belt; 5: Annular frame; 11: Frame unit; 2: Cutting device; 4: Base (4a, 4b: Openings); 6: Box platform (6a: Box); 8: Temporary stage; 10: Guide rail; 12: Transfer unit; 14, 16: Covers; 18: Worktable base (18a: Base section; 18b, 18c, 18d: Protrusions); 20: Chuck worktable (20a: Frame; 20b: Perforated plate; 20c: Groove); 22a, 22b: Flow path; 24: Spindle; 26: Fixture; 28: Transfer unit; 30: Support structure; 32: Imaging unit; 34: Cutting unit (machining unit) ); 36: Cutting tool; 38: Spindle; 40: Cleaning unit; 42: Conveying unit; 44: Loading and unloading tool; 46: First main body (46a: First surface (upper surface); 46b: Groove) (46c: Third surface (front surface); 46d: Fifth surface (right side)); 48: Handle (48a, 48b: Foot; 48c: Connecting part); 50: First fitting part (50a: Upper part; 50b: Lower part; 50c: Connecting part); 52a, 52b: Spring connecting part; 54a, 54b: Tension spring; 56: Second main body (56a: First surface (front surface); 56b: Groove) (56 c: 3rd surface (top surface); 56d: through hole (56e: 5th surface (right side surface)); 58: 2nd fitting part (58a: upper part; 58b: lower part; 58c: connecting part); 60a, 60b: spring connecting part; 62: stop; 64: loading and unloading tool; 66: 1st main body part (66a: 1st surface (top surface); 66b: 3rd surface (front surface) (66c: 5th surface (rear right side surface)); 68: handle part (68a, 68b: foot; 68c: connecting part); 70: handle part (70a, 70b: foot; 70c: connecting part); 72: protrusion (72a: 2nd fitting part) 1. Top surface; 72b: Third surface (right side); 74: Stop (74a: First surface (front surface)); 76: First fitting part (76a: upper part; 76b: lower part; 76c: connecting part); 78a, 78b: Spring connecting part; 80a, 80b: Tension spring; 82: Second main body part (82a: First surface (front surface); 82b: Third surface (top surface)) (82c: Through hole; 82d: Fifth surface (right side)); 84: Second fitting part (84a: upper part; 84b: lower part; 84c: connecting part); 86a, 86b: Spring connecting part; 88: Stop. Detailed Implementation

[0021] The embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a perspective view schematically illustrating an example of a machining device (cutting device). Additionally, Figure 1The X-axis (front-back direction) and Y-axis (left-right direction) shown are perpendicular to each other on the horizontal plane. In addition, the Z-axis (up-down direction) is perpendicular to the X-axis and Y-axis (vertical direction).

[0022] Figure 1 The cutting device 2 shown has a base 4. A box platform 6 for holding a box 6a is provided at the upper corner of the base 4. The box platform 6 can be raised and lowered by a lifting mechanism (not shown). Additionally, in... Figure 1 In the image, the outline of box 6a, which is placed on box platform 6, is shown by a double-dotted line.

[0023] Multiple workpieces 1 are stored in box 6a. The workpiece 1 is, for example, a disc-shaped wafer formed of semiconductor materials such as Si (silicon), SiC (silicon carbide), or GaN (gallium nitride). A large number of semiconductor devices are formed on the front side of the workpiece 1, and a disc-shaped dicing tape 3 with a diameter larger than that of the workpiece 1 is attached to the back side of the workpiece 1.

[0024] The dicing tape 3, for example, has: a flexible, film-like substrate layer; and an adhesive layer (paste layer) disposed between the substrate layer and the workpiece 1. In addition, an annular frame 5 with an inner diameter larger than that of the workpiece 1 is attached to the outer peripheral region of the side of the dicing tape 3 that is attached to it.

[0025] The annular frame 5 is formed of a metal material such as aluminum or stainless steel, and the central opening is sealed by attaching the scribbling strip 3. Furthermore, multiple workpieces 1 are stored in the box 6a in a state where they are integrated with the annular frame 5 by means of the scribbling strip 3 (the state of frame unit 11).

[0026] A temporary platform 8 is provided in the area adjacent to the box platform 6 in the Y-axis direction on the upper surface of the base 4. The temporary platform 8 has a pair of guide rails 10 extending in the Y-axis direction and capable of approaching or moving away from each other in the X-axis direction.

[0027] A transfer unit 12 is provided on the upper surface of the base 4, which can slide between a pair of guide rails 10 along the Y-axis. The transfer unit 12 has a holding part on the side of the box platform 6, which has the function of holding the annular frame 5.

[0028] When removing the frame unit 11 stored in the box 6a, the removal unit 12 is first slid along the Y-axis direction to approach the box 6a. Next, the ring-shaped frame 5 is gripped by the gripping part of the removal unit 12. Then, the removal unit 12 is slid along the Y-axis direction to move away from the box 6a.

[0029] Therefore, the frame unit 11 is pulled out of the box 6a onto the temporary stage 8. Next, the pair of guide rails 10 are brought close together until both of the guide rails 10 contact the annular frame 5. As a result, the frame unit 11 is positioned at a predetermined position in the X-axis direction.

[0030] An opening 4a extending in the X-axis direction is formed in the region adjacent to the box stage 6 on the upper surface of the base 4. A flat cover 14 and a pleated cover 16 that expand and contract with the movement of the cover 14 are provided in the opening 4a in a manner that seals the opening 4a.

[0031] A circular plate-shaped worktable base 18 is disposed above the cover 14. In addition, a circular plate-shaped chuck worktable 20 is replaceably mounted on the upper surface of the worktable base 18. Figure 2 (A) is an exploded perspective view schematically showing the worktable base 18 and the chuck worktable 20, etc. Figure 2 (B) is a schematic side view showing the worktable base 18 and the chuck worktable 20, etc.

[0032] The chuck worktable 20 has, for example, a frame 20a made of a metal material such as stainless steel. The frame 20a has a circular plate-shaped bottom wall and an annular side wall extending upward from the outer periphery of the bottom wall, with the bottom wall and the side wall dividing a recess. A circular plate-shaped perforated plate 20b made of ceramic or the like is fixed in this recess.

[0033] Furthermore, a through hole extending through the bottom wall along the thickness direction is formed in the center of the bottom wall of the frame 20a. That is, the lower surface of the perforated plate 20b is exposed through this through hole. In addition, a groove 20c with a circular cross-section is provided on the lower surface of the frame 20a. This groove 20c is used to ensure that the center of the frame 20a accurately overlaps with the center of the worktable base 18, that is, for alignment.

[0034] The worktable base 18 has a circular plate-shaped base portion 18a. A first protrusion 18b with a circular cross-section is provided on the upper surface of the base portion 18a. A second protrusion 18c with an annular cross-section is provided on the upper surface of the first protrusion 18b. Furthermore, the second protrusion 18c and the first protrusion 18b are arranged in a concentric circle.

[0035] Furthermore, a third protrusion 18d with a circular cross-section is provided on the upper surface of the first protrusion 18b in a region outer of the second protrusion 18c. This third protrusion 18d is used for the aforementioned alignment. That is, the chuck table 20 is mounted on the table base 18 by inserting the third protrusion 18d into the slot 20c.

[0036] In addition, a flow path 22a is provided at the center of the base portion 18a and the first protrusion 18b, extending through the base portion 18a and the first protrusion 18b in the thickness direction. When the chuck worktable 20 is installed on the worktable base 18, the flow path 22a communicates with the through hole formed in the frame 20a.

[0037] The upper part of the main shaft 24 is fixed to the lower part of the worktable base 18. A flow path 22b communicating with the flow path 22a is formed inside the main shaft 24. This flow path 22b is connected to an suction source (not shown) such as an injector.

[0038] Therefore, when the suction source is activated with the chuck table 20 mounted on the table base 18, a negative pressure is generated on the upper surface of the perforated plate 20b (the holding surface of the chuck table 20). As a result, the workpiece 1 (frame unit 11) can be attracted and held on the holding surface of the chuck table 20.

[0039] In addition, the lower end of the spindle 24 is connected to a rotary drive source (not shown) such as an electric motor. Therefore, when the rotary drive source is operated with the chuck table 20 mounted on the table base 18, the chuck table 20 and the table base 18 rotate about a straight line along the Z-axis passing through the center of the chuck table 20 as the axis of rotation.

[0040] In addition, a plurality of (e.g., four) clamps 26 are provided on the upper surface of the workbench base 18 in a region that is outside the first protrusion 18b. The plurality of clamps 26 are arranged at approximately equal intervals along the circumference of the base portion 18a and have the function of holding the annular frame 5.

[0041] In addition, Figure 1 Below the covers 14 and 16 shown, there is an X-axis moving mechanism (not shown) that moves the worktable base 18 and the chuck worktable 20 mounted on the worktable base 18 along the X-axis direction. This X-axis moving mechanism can position the chuck worktable 20 at any position between the loading / unloading position and the processing position.

[0042] The loading / unloading position refers to the position of the chuck table 20 when the workpiece 1 (frame unit 11) is loaded onto and unloaded from the chuck table 20. The machining position refers to the position of the chuck table 20 when cutting the workpiece 1 held and attracted by the chuck table 20. Furthermore, in Figure 1 The image shows a chuck table 20 positioned at the loading / unloading location.

[0043] The frame unit 11, placed on the temporary stage 8, is moved into the chuck worktable 20 by the transfer unit 28. The transfer unit 28 has: a shaft portion that protrudes upward from the area between the opening 4a on the upper surface of the base 4 and the temporary stage 8; an arm portion that extends horizontally from the upper end of the shaft portion; and a holding portion that is provided downward from the front end of the arm portion (the end opposite to the side connected to the shaft portion).

[0044] Furthermore, the shaft is connected to a lifting mechanism (not shown) such as a cylinder in a way that it can be raised and lowered, and to a rotational drive source such as an electric motor in a way that it can be rotated. In addition, the holding part is connected to a suction source (not shown) such as an injector via a pipe (not shown) in a way that it can attract and hold the retaining ring frame 5 (frame unit 11).

[0045] When moving the frame unit 11 placed on the temporary stage 8 into the chuck worktable 20, the chuck worktable 20 is first positioned in the loading / unloading area. Then, the annular frame 5 of the frame unit 11 placed on the temporary stage 8 is attracted and held in the holding part of the transport unit 28.

[0046] Next, the shaft of the conveying unit 28 is raised and then rotated, thereby positioning the frame unit 11 above the chuck table 20. Then, the shaft of the conveying unit 28 is lowered and the frame unit 11 is placed on the holding surface of the chuck table 20.

[0047] Next, after the holding part of the stop conveying unit 28 attracts the annular frame 5, the shaft of the conveying unit 28 is raised. As a result, the frame unit 11 is moved into the chuck table 20.

[0048] Above the chuck table 20 along its movement path from the loading / unloading position to the machining position, a portion of a support structure 30 is provided in a manner that traverses the opening 4a. A camera unit 32 for capturing images of the chuck table 20 is provided within this support structure 30.

[0049] The imaging unit 32 is, for example, a camera with a CMOS (Complementary Metal Oxide Semiconductor) image sensor or a CCD (Charge Coupled Device) image sensor. The imaging unit 32, for example, images the workpiece 1 held and attracted by the chuck stage 20 from above.

[0050] Above the chuck table 20 positioned at the machining location, a cutting unit (machining unit) 34 is provided for cutting the workpiece 1 held by the frame unit 11 attracted by the chuck table 20. The cutting unit 34 includes: a cutting tool 36; and a spindle 38 extending along the Y-axis direction and having the cutting tool 36 mounted at its front end.

[0051] A rotary drive source (not shown) such as an electric motor is connected to the base end of the spindle 38. Therefore, when the rotary drive source is activated, the cutting tool 36 rotates about a straight line along the Y-axis. The cutting tool 36 has, for example, an annular base made of aluminum or the like, and an annular cutting edge fixed to the outer periphery of the base. This cutting edge is formed, for example, by fixing abrasive grains such as diamond using a bonding material such as resin or metal.

[0052] In addition, a Y-axis moving mechanism (not shown) and a Z-axis moving mechanism (not shown) that move the cutting unit 34 along the Y-axis direction are provided inside the support structure 30. These moving mechanisms can position the cutting unit 34 so that the cutting tool 36 contacts the workpiece 1 held by the chuck table 20 at the desired location.

[0053] The cutting of the workpiece 1 held by the chuck table 20 is performed, for example, in the following sequence. First, the imaging unit 32 photographs the workpiece 1 to determine the predetermined cutting line. Then, the chuck table 20 is rotated so that the predetermined cutting line is parallel to the X-axis direction and / or the cutting unit 34 is moved along the Y-axis direction so that the cutting tool 36 is positioned in the X-axis direction when viewed from the predetermined cutting line.

[0054] Next, the cutting unit 34 is moved along the Z-axis so that the lower end of the cutting tool 36 is below the lower surface of the workpiece 1. Then, while rotating the cutting tool 36, the chuck table 20 is moved along the X-axis so that the cutting tool 36 moves from one end of the workpiece 1 to the other in the X-axis direction. As a result, the workpiece 1 is cut along the predetermined cutting line.

[0055] An opening 4b is formed in the area between the temporary platform 8 on the upper surface of the base 4 and the support structure 30. A cleaning unit 40 for cleaning the workpiece 1 (frame unit 11) after cutting is housed in the opening 4b. The cleaning unit 40 has a rotary table for holding the frame unit 11.

[0056] The cut frame unit 11 is transported to the cleaning unit 40 via the conveying unit 42. The conveying unit 42 has an arm that is connected to the support structure 30 in a manner that allows it to move along the Y-axis; and a holding part that is disposed below the front end of the arm. In addition, the holding part is connected to the arm via a lifting mechanism (not shown) such as a cylinder in a manner that allows it to be raised and lowered, and is connected to a suction source (not shown) such as an injector via a pipe (not shown) in a manner that allows it to attract and hold the ring-shaped frame 5 (frame unit 11).

[0057] When the frame unit 11, held by the chuck table 20, is moved into the cleaning unit 40, the chuck table 20 is first positioned in the loading / unloading area. Then, the holding part of the conveying unit 42 is lowered in such a way that it contacts the annular frame 5 of the frame unit 11.

[0058] Next, after stopping the chuck table 20 from attracting the frame unit 11, the annular frame 5 is attracted and held in the holding part of the transfer unit 42. Then, after raising the holding part of the transfer unit 42, the transfer unit 42 is moved along the Y-axis in such a way that the frame unit 11 is positioned above the cleaning unit 40.

[0059] Next, the holding part of the conveying unit 42 is lowered to place the frame unit 11 on the rotary table of the cleaning unit 40. Then, after stopping the attraction of the holding part of the conveying unit 42 to the annular frame 5, the holding part is raised. As a result, the frame unit 11 is moved into the cleaning unit 40.

[0060] In the cleaning unit 40, a cleaning fluid (typically a mixture of water and air) is sprayed toward the front of the workpiece 1 while the rotary table is rotated. The frame unit 11, which has been cleaned by the cleaning unit 40, is then placed in a box 6a mounted on the box platform 6.

[0061] When storing the frame unit 11 in the box 6a, the frame unit 11 is transferred from the cleaning unit 40 to the temporary storage table 8 using the transfer unit 28. Furthermore, the transfer unit 28 is moved toward the box 6a, thereby pushing the frame unit 11 into the box 6a.

[0062] Figure 3 This is a perspective view schematically showing an example of the loading and unloading tools used when loading and unloading the chuck worktable 20 relative to the worktable base 18 of the cutting device 2. Figure 3 The loading and unloading tool 44 shown has a first main body 46 in the shape of a cuboid.

[0063] The first main body 46 has a first surface (upper surface) 46a and a second surface (lower surface) that are generally parallel to each other and have a rectangular shape. A handle portion 48 is provided on the upper surface 46a. The handle portion 48 has a pair of feet 48a and 48b; and a connecting portion 48c that connects the pair of feet 48a and 48b.

[0064] A pair of feet 48a and 48b extend in a direction substantially perpendicular to the upper surface 46a, and their lower parts are fixed to the upper part of the first main body 46. Additionally, a connecting portion 48c extends in a direction substantially parallel to the long side of the upper surface 46a. Furthermore, one end (rear end) of the connecting portion 48c is connected to the upper part of the foot 48a, and the other end (front end) is connected to the upper part of the foot 48b.

[0065] Furthermore, a groove 46b is provided on the upper surface 46a of the first main body 46. The groove 46b is provided between the short side of one end (rear end) of the upper surface 46a and the area where the foot 48a is fixed. In addition, the groove 46b extends in a direction substantially parallel to the short side of the upper surface 46a, and the length of the groove 46b is shorter than the short side of the upper surface 46a.

[0066] In addition, the first main body 46 has: a rectangular third surface (front surface) 46c, which shares a short side located at the other end (front end) of the upper surface 46a as a long side; and a rectangular fourth surface (rear surface), which shares a short side located at the rear end of the upper surface 46a and the lower surface as a long side.

[0067] A first fitting portion 50 is provided on the lower surface side of the end portion on the front surface 46c side of the first main body portion 46. The first fitting portion 50 has: an upper portion 50a, which is fixed to the first main body portion 46 and has a surface (lower surface) at its lower end that is substantially parallel to the upper surface 46a and the lower surface of the first main body portion 46; a lower portion 50b, which has a surface (upper surface (second fitting surface)) at its upper end that is substantially parallel to the upper surface 46a and the lower surface of the first main body portion 46; and a connecting portion 50c, which has a surface (front surface) that is substantially coplanar with the front surface 46c, connecting the upper portion 50a and the lower portion 50b.

[0068] Furthermore, the gap between the lower surface of the upper part 50a and the upper surface (second mating surface) of the lower part 50b is slightly longer than the thickness of the chuck table 20. Additionally, the surface of the connecting part 50c located opposite to the front surface (the rear surface (first mating surface)) is concave with a predetermined curvature, curving along the outer periphery of the chuck table 20. Furthermore, the surface of the lower part 50b on the side furthest from the connecting part 50c (the rear surface) has the same curved shape as the rear surface of the connecting part 50c.

[0069] Furthermore, the first main body 46 has a fifth (right side) 46d and a sixth (left side) surface with a rectangular shape shared by one long side of each of the upper surface 46a and the lower surface. Rectangular spring connecting portions 52a and 52b are respectively provided on the right side 46d and the left side surface. Additionally, the spring connecting portions 52a and 52b are located on the first main body 46 at a position closer to the rear surface than the front surface 46c.

[0070] The spring connecting portions 52a and 52b have a pair of surfaces that are substantially parallel to the front surface 46c and the rear surface of the first main body portion 46, and one end of the tension spring 54a and 54b is fixed on the surface of the pair of surfaces that is closer to the rear surface of the first main body portion 46.

[0071] In addition, the loading and unloading tool 44 has a second main body 56 in the shape of a cuboid. The second main body 56 has a first surface (front surface) 56a in the shape of a cuboid that is arranged to face the rear surface of the first main body 46, and a second surface (rear surface) that is substantially parallel to the front surface 56a.

[0072] The long side of the front surface 56a extends in a direction substantially parallel to the long side of the rear surface of the first main body portion 46 and is longer than the long side of the rear surface of the first main body portion 46. Furthermore, the short side of the front surface 56a extends in a direction substantially parallel to the short side of the rear surface of the first main body portion 46 and is longer than the short side of the rear surface of the first main body portion 46. That is, the area of ​​the front surface 56a is larger than the area of ​​the rear surface of the first main body portion 46.

[0073] A groove 56b is provided on the front surface 56a. A portion of the rear surface side of the first main body 46 is inserted into the groove 56b. Therefore, the groove 56b is configured such that its length in the direction parallel to the long side of the front surface 56a is slightly longer than the long side of the rear surface of the first main body 46, and its width in the direction parallel to the short side of the front surface 56a is slightly longer than the short side of the rear surface of the first main body 46.

[0074] Furthermore, the second main body 56 has: a rectangular third surface (upper surface) 56c, which shares a long side located at the upper end of both the front surface 56a and the rear surface; and a rectangular fourth surface (lower surface), which shares a long side located at the lower end of the front surface 56a. Additionally, the second main body 56 is provided with a through hole 56d extending from the upper surface 56c to the groove 56b.

[0075] The through hole 56d extends in a direction substantially parallel to the long side of the upper surface 56c, and its length is shorter than the long side of the upper surface 56c. Furthermore, the through hole 56d is located on the second main body 56 at a position closer to the front surface 56a than the rear surface.

[0076] Furthermore, the length of the through hole 56d, which is approximately parallel to the long side of the upper surface 56c, is approximately equal to the length of the groove 46b provided on the upper surface 46a of the first main body 46. Similarly, the width of the through hole 56d, which is approximately parallel to the short side of the upper surface 56c, is approximately equal to the width of the groove 46b provided on the upper surface 46a of the first main body 46.

[0077] A second fitting portion 58 is provided on the lower surface side of the rear surface side of the second main body portion 56. The second fitting portion 58 has: an upper portion 58a, which is fixed to the second main body portion 56 and has a surface (lower surface) at its lower end that is substantially parallel to the upper surface 56c and the lower surface of the second main body portion 56; a lower portion 58b, which has a surface (upper surface (fourth fitting surface)) at its upper end that is substantially parallel to the upper surface 56c and the lower surface of the second main body portion 56; and a connecting portion 58c, which has a surface (rear surface) that is substantially coplanar with the rear surface of the second main body portion 56, connecting the upper portion 58a and the lower portion 58b.

[0078] Furthermore, the distance between the lower surface of the upper part 58a and the upper surface (fourth mating surface) of the lower part 58b is slightly longer than the thickness of the chuck table 20 and is approximately equal to the distance between the lower surface of the upper part 50a and the upper surface (second mating surface) of the lower part 50b of the first mating part 50. Additionally, the surface of the connecting part 58c located opposite to the rear surface (the front surface (third mating surface)) is concave with a predetermined curvature, curving along the outer periphery of the chuck table 20. Furthermore, the surface of the lower part 58b on the side furthest from the connecting part 58c (the front surface) has the same curved shape as the front surface of the connecting part 58c.

[0079] Furthermore, the second main body 56 has a fifth (right side) 56e and a sixth (left side) with a rectangular shape, sharing a short side as the long side between the upper surface 56c and the lower surface. Rectangular spring connecting portions 60a and 60b are respectively provided on the right side 56e and the left side. Additionally, the spring connecting portions 60a and 60b are located on the second main body 56 at a position closer to the front surface 56a than the rear surface.

[0080] The spring connecting portions 60a and 60b have a pair of surfaces that are substantially parallel to the front surface 56a and the rear surface of the second main body portion 56, and the other end of the tension spring 54a and 54b is fixed on the surface closer to the front surface 56a in the pair of surfaces.

[0081] Therefore, the second main body 56 is connected to the first main body 46 by means of tension springs 54a and 54b, one end of which is fixed to the spring connecting portions 52a and 52b. Additionally, in Figure 3 The figures show tension springs 54a and 54b in a state where they are stretched beyond their natural length.

[0082] When the distance (first gap) between the rear surface (first mating surface) of the connecting portion 50c of the first mating portion 50 and the front surface (third mating surface) of the connecting portion 58c of the second mating portion 58 is equal to or longer than the diameter of the chuck table 20, the tension springs 54a and 54b apply force to the first main body portion 46 and the second main body portion 56 in a manner that brings the first mating portion 50 and the second mating portion 58 closer together.

[0083] In addition, the loading and unloading tool 44 is designed such that when a portion of the rear surface side of the first main body 46 is inserted into the groove 56b provided on the front surface 56a of the second main body 56, such that the through hole 56d overlaps with the groove 46b, the aforementioned first interval is equal to the diameter of the chuck worktable 20.

[0084] In addition, the loading and unloading tool 44 is designed such that by extending the tension springs 54a and 54b, the distance (second gap) between the end (rear end) of the upper surface (second mating surface) of the lower part 50b of the first mating part 50 away from the rear surface (first mating surface) of the connecting part 50c and the end (front end) of the upper surface (fourth mating surface) of the lower part 58b of the second mating part 58 away from the front surface (third mating surface) of the connecting part 58c is longer than the diameter of the chuck table 20.

[0085] Furthermore, the loading and unloading device 44 includes a cuboid stop 62 that is inserted into the through hole 56d and the groove 46b when they overlap. The height of the stop 62 is longer than the distance between the upper surface 56c of the second main body 56 and the bottom surface of the groove 46b when they overlap. The length of the stop 62 is slightly shorter than the length of both the through hole 56d and the groove 46b. The width of the stop 62 is also slightly shorter than the width of both the through hole 56d and the groove 46b.

[0086] The chuck table 20 is removed from the cutting device 2 using the loading and unloading tool 44, for example, in the following order. First, an external force is applied to the loading and unloading tool 44 to extend the tension springs 54a and 54b to a length greater than the diameter of the chuck table 20.

[0087] For example, the operator uses both hands to grasp the first main body 46 and the second main body 56 respectively and stretches them in a way that moves them apart, so that the second interval is longer than the diameter of the chuck table 20. As a result, the first fitting part 50 and the second fitting part 58 are positioned in a retracted position where the second interval is longer than the diameter of the chuck table 20.

[0088] Next, the loading and unloading tool 44 and / or the chuck table 20 are arranged such that the center of the chuck table 20 is positioned in the center of the space between the first fitting part 50 and the second fitting part 58. For example, the operator arranges the loading and unloading tool 44 such that the lower surface of the first main body part 46 contacts the center of the holding surface of the chuck table 20.

[0089] Next, the external force applied to the tension springs 54a and 54b is removed. For example, the operator removes their hand from the first main body portion 46 and the second main body portion 56. As a result, the first fitting portion 50 is fitted in the first outer peripheral region and the second fitting portion 58 is fitted in the second outer peripheral region. That is, the first fitting portion 50 and the second fitting portion 58 are positioned at a fitting position where the first interval is equal to the diameter of the chuck worktable 20.

[0090] At this time, the rear surface (first mating surface) of the connecting portion 50c of the first mating portion 50 and the front surface (third mating surface) of the connecting portion 58c of the second mating portion 58 face the side surface of the chuck table 20. In addition, the upper surface (second mating surface) of the lower portion 50b of the first mating portion 50 and the upper surface (fourth mating surface) of the lower portion 58b of the second mating portion 58 face the lower surface of the chuck table 20.

[0091] Furthermore, in both cases where the first fitting portion 50 and the second fitting portion 58 are positioned in the retracted position and in the fitting position, the tension springs 54a and 54b apply force to the first main body portion 46 and the second main body portion 56 in the direction that brings the first fitting portion 50 and the second fitting portion 58 closer together.

[0092] Next, the stop member 62 is inserted into the through hole 56d provided in the second main body 56 and the groove 46b provided in the upper surface 46a of the first main body 46. In this case, even if an external force is applied to extend the tension springs 54a and 54b, the second gap will not be longer than the diameter of the chuck table 20. This prevents the chuck table 20 from falling off the loading and unloading device 44 during transport.

[0093] The loading and unloading tool 44 is then installed on the chuck worktable 20. Figure 4 This is a schematic perspective view of the loading and unloading tool 44 mounted on the chuck table 20. Next, the operator grasps the handle 48 to remove the chuck table 20 from the cutting device 2.

[0094] When using the loading and unloading tool 44 to load and unload the chuck worktable 20, with the first fitting portion 50 and the second fitting portion 58, which are integrally provided with the handle portion 48, engaged in the outer peripheral area of ​​the chuck worktable 20, the operator grasps the handle portion 48 to load and unload the chuck worktable 20 relative to the cutting device 2. Therefore, when an operator wearing cleanroom gloves or similar items manually loads and unloads the chuck worktable 20 relative to the cutting device 2, the chuck worktable 20 can be loaded and unloaded stably without contaminating the cleanroom gloves or similar items.

[0095] Furthermore, the loading and unloading device 44 is one aspect of the present invention, and the loading and unloading device of the present invention is not limited to the structure of the loading and unloading device 44. For example, the loading and unloading device of the present invention may not include the stop member 62. That is, the loading and unloading device 44 without the stop member 62, the groove 46b provided on the upper surface 46a of the first main body 46, and the through hole 56d provided on the second main body 56 is also an aspect of the present invention.

[0096] Alternatively, in the loading and unloading device of the present invention, a portion of the second main body 56 may be inserted into the first main body 46. For example, in this case, a groove may be provided on the rear surface of the first main body 46 and a protrusion inserted into the groove may be provided on the front surface 56a side of the second main body 56. Alternatively, in this case, the first main body 46 may not be provided with a protrusion. Figure 3 The groove 46b shown is not provided on the second main body 56. Figure 3 The groove 56b and through hole 56d are shown.

[0097] Furthermore, the loading and unloading tool of the present invention is not limited to having only one handle. For example, the loading and unloading tool of the present invention may include two handles. When the loading and unloading tool includes two handles, it is preferable in that the chuck table can be loaded and unloaded in a more stable state. On the other hand, when the loading and unloading tool, such as loading and unloading tool 44, includes only one handle, it is preferable in that the loading and unloading tool can be miniaturized.

[0098] Therefore, a loading / unloading tool with two handles is suitable for loading / unloading larger chuck tables (e.g., chuck tables used when processing wafers 12 inches or larger). On the other hand, a loading / unloading tool with one handle is suitable for loading / unloading smaller chuck tables (e.g., chuck tables used when processing wafers 8 inches or smaller).

[0099] Figure 5 This is a perspective view schematically showing an example of a loading and unloading tool with two handles. Figure 5The loading and unloading tool 64 shown has a first main body 66 in the shape of a cuboid. The first main body 66 has a first surface (upper surface) 66a and a second surface (lower surface) that are approximately parallel to each other. The upper surface 66a and the lower surface are cross-shaped surfaces that overlap with the long sides of the longer rectangle and the shorter rectangle perpendicular to each other.

[0100] A pair of handle portions 68 and 70 are provided at both ends (left and right ends) of the shorter rectangular portion of the upper surface 66a, facing each other. The handle portion 68 has a pair of feet 68a and 68b and a connecting portion 68c connecting the pair of feet 68a and 68b. Similarly, the handle portion 70 has a pair of feet 70a and 70b and a connecting portion 70c connecting the pair of feet 70a and 70b.

[0101] A pair of feet 68a and 68b and a pair of feet 70a and 70b extend in a direction substantially perpendicular to the upper surface 66a, and their lower parts are fixed to the upper part of the first main body 66. Connecting portions 68c and 70c extend in a direction substantially parallel to the upper surface 66a. Regarding connecting portion 68c, one end (rear end) is connected to the upper part of foot 68a, and the other end (front end) is connected to the upper part of foot 68b. Similarly, regarding connecting portion 70c, one end (rear end) is connected to the upper part of foot 70a, and the other end (front end) is connected to the upper part of foot 70b.

[0102] In addition, the first main body 66 has: a rectangular third surface (front surface) 66b, which shares a short side of the upper surface 66a located at one end (front end) of the longer rectangular portion as a long side; and a rectangular fourth surface (rear surface), which shares a short side of the upper surface 66a and the lower surface located at the other end (rear end) of the longer rectangular portion as a long side.

[0103] Furthermore, the first main body 66 has a cuboid protrusion 72 extending in a direction substantially perpendicular to the rear surface. The protrusion 72 has: a first surface (upper surface) 72a and a second surface (lower surface) that are substantially parallel to the upper surface 66a and the lower surface of the first main body 66; and a third surface (right side surface) 72b and a fourth surface (left side surface) that are substantially perpendicular to the upper surface 72a and the lower surface.

[0104] The short sides of the upper surface 72a and the lower surface of the protrusion 72 extend in a direction substantially parallel to the long sides of the front surface 66b and the rear surface of the first main body 66 and are shorter than them. In addition, the short sides of the right side surface 72b and the left side surface of the protrusion 72 extend in a direction substantially parallel to the short sides of the front surface 66b and the rear surface of the first main body 66 and are shorter than them.

[0105] As described later, the protrusion 72 penetrates the second main body portion 82. Furthermore, a groove (not shown) is provided on the upper surface 72a of the protrusion 72. This groove extends in a direction substantially parallel to the short side of the upper surface 72a, and its length is shorter than the short side of the upper surface 72a. Additionally, a cuboid-shaped stop 74 is provided at the front end of the protrusion 72 (the end furthest from the rear surface of the first main body portion 66).

[0106] The stop portion 74 has a first surface (front surface) 74a and a second surface (rear surface) that are substantially perpendicular to the upper surface 72a and the right side surface 72b of the protrusion 72. The long sides of both the front and rear surfaces of the stop portion 74 extend in a direction substantially parallel to the short side of the upper surface 72a of the protrusion 72, and the short sides of both the front and rear surfaces extend in a direction substantially parallel to the short side of the right side surface 72b of the protrusion 72. Furthermore, the lengths of the long sides of both the front and rear surfaces of the stop portion 74 are substantially equal to the length of the short side of the upper surface 72a of the protrusion 72. On the other hand, the short sides of both the front and rear surfaces of the stop portion 74 are longer than the short side of the right side surface 72b of the protrusion 72.

[0107] A first fitting portion 76 is provided on the lower surface side of the end of the first main body portion 66 on the front surface 66b side. The first fitting portion 76 has: an upper portion 76a, which is fixed to the first main body portion 66 and has a surface (lower surface) at the lower end that is substantially parallel to the upper surface 66a and the lower surface of the first main body portion 66; a lower portion 76b, which has a surface (upper surface (second fitting surface)) at the upper end that is substantially parallel to the upper surface 66a and the lower surface of the first main body portion 66; and a connecting portion 76c, which has a surface (front surface) that is substantially coplanar with the front surface 66b, connecting the upper portion 76a and the lower portion 76b.

[0108] Furthermore, the gap between the lower surface of the upper part 76a and the upper surface (second mating surface) of the lower part 76b is slightly longer than the thickness of the chuck table 20. Additionally, the surface of the connecting part 76c located opposite to the front surface (the rear surface (first mating surface)) is concave with a predetermined curvature, curving along the outer periphery of the chuck table 20. Furthermore, the surface of the lower part 76b on the side furthest from the connecting part 76c (the rear surface) has the same curved shape as the rear surface of the connecting part 76c.

[0109] In addition, the first main body 66 has a fifth surface (rear right side surface) 66c and a sixth surface (rear left side surface) that are rectangular in shape and share a short side of the rear surface as a common short side. Rectangular spring connecting parts 78a and 78b are respectively provided on the rear right side surface 66c and the rear left side surface.

[0110] The spring connecting portions 78a and 78b have a pair of surfaces that are substantially parallel to the front surface 66b and the rear surface of the first main body portion 66, and one end of the tension spring 80a and 80b is fixed on the surface of the pair of surfaces that is closer to the rear surface of the first main body portion 66.

[0111] Furthermore, the loading and unloading device 64 has a second main body portion 82 in the shape of a cuboid. The second main body portion 82 has a first rectangular surface (front surface) 82a arranged facing the rear surface of the first main body portion 66, and a second rectangular surface (rear surface) that is substantially parallel to the front surface 82a. The shapes of the front surface 82a and the rear surface of the second main body portion 82 are substantially equal to the shape of the rear surface of the first main body portion 66. In addition, the distance between the front surface 82a and the rear surface of the second main body portion 82 is shorter than the distance between the rear surface of the first main body portion 66 and the front surface 74a of the stop portion 74.

[0112] Furthermore, a through hole extending from the front surface 82a to the rear surface is provided in the second main body portion 82, and the protrusion 72 of the first main body portion 66 is inserted into this through hole. Therefore, the length of this through hole in the direction parallel to the long side of the front surface 82a is slightly longer than the short sides of the upper and lower surfaces of the protrusion 72, and the width in the direction parallel to the short side of the front surface 82a is slightly longer than the short sides of the right and left sides of the protrusion 72.

[0113] Furthermore, the width of the through hole is shorter than the short side of the front surface 74a of the stop portion 74. As a result, the protrusion 72 of the first main body portion 66 can slide in the through hole, but can be inserted into the second main body portion 82 in a manner that prevents it from being pulled out of the through hole.

[0114] Furthermore, the second main body 82 has: a rectangular third surface (upper surface) 82b, which shares a long side located at the upper end of both the front surface 82a and the rear surface; and a rectangular fourth surface (lower surface), which shares a long side located at the lower end of the front surface 82a. Additionally, the second main body 82 is provided with a through hole 82c extending from the upper surface 82b to the through hole into which the protrusion 72 is inserted.

[0115] The through hole 82c extends in a direction substantially parallel to the long side of the upper surface 82b, and its length is shorter than the long side of the upper surface 82b. Furthermore, the through hole 82c is located on the second main body portion 82 at a position closer to the front surface 82a than the rear surface.

[0116] Furthermore, the length of the through hole 82c, which is approximately parallel to the long side of the upper surface 82b, is approximately equal to the length of the groove provided on the upper surface 72a of the protrusion 72. Similarly, the width of the through hole 82c, which is approximately parallel to the short side of the upper surface 82b, is approximately equal to the width of the groove provided on the upper surface 72a of the protrusion 72.

[0117] A second fitting portion 84 is provided on the lower surface side of the rear surface side of the second main body portion 82. The second fitting portion 84 has: an upper portion 84a, which is fixed to the second main body portion 82 and has a surface (lower surface) at its lower end that is substantially parallel to the upper surface 82b and the lower surface of the second main body portion 82; a lower portion 84b, which has a surface (upper surface (fourth fitting surface)) at its upper end that is substantially parallel to the upper surface 82b and the lower surface of the second main body portion 82; and a connecting portion 84c, which has a surface (rear surface) that is substantially coplanar with the rear surface of the second main body portion 82, connecting the upper portion 84a and the lower portion 84b.

[0118] Furthermore, the distance between the lower surface of the upper part 84a and the upper surface (fourth mating surface) of the lower part 84b is slightly longer than the thickness of the chuck table 20 and is approximately equal to the distance between the lower surface of the upper part 76a and the upper surface (second mating surface) of the lower part 76b of the first mating part 76. Additionally, the surface of the connecting part 84c located opposite to the rear surface (the front surface (third mating surface)) is concave with a predetermined curvature along the outer periphery of the chuck table 20. Furthermore, the surface of the lower part 84b on the side furthest from the connecting part 84c (the front surface) has the same curved shape as the front surface of the connecting part 84c.

[0119] Furthermore, the second main body 82 has a fifth (right side) 82d and a sixth (left side) with a rectangular shape shared by one short side of the upper surface 82b and one short side of the lower surface. Rectangular spring connecting portions 86a and 86b are respectively provided on the right side 82d and the left side. Additionally, the spring connecting portions 86a and 86b are located on the second main body 82 at a position closer to the front surface 82a than the rear surface.

[0120] The spring connecting portions 86a and 86b have a pair of surfaces that are substantially parallel to the front surface 82a and the rear surface of the second main body portion 82, and the other end of the tension spring 80a and 80b is fixed on the surface closer to the front surface 82a in the pair of surfaces.

[0121] Therefore, the second main body 82 is connected to the first main body 66 by means of tension springs 80a and 80b, one end of which is fixed to the spring connecting portions 78a and 78b. Additionally, in Figure 5 The figures show tension springs 80a and 80b in a state where they are stretched beyond their natural length.

[0122] When the distance (third distance) between the rear surface (first mating surface) of the connecting portion 76c of the first mating portion 76 and the front surface (third mating surface) of the connecting portion 84c of the second mating portion 84 is equal to or longer than the diameter of the chuck table 20, the tension springs 80a and 80b apply force to the first main body portion 66 and the second main body portion 82 in a manner that brings the first mating portion 76 and the second mating portion 84 closer together.

[0123] In addition, the loading and unloading tool 64 is designed such that, when the through hole 82c provided in the second main body 82 overlaps with the groove on the upper surface 72a of the protrusion 72 provided in the first main body 66, the aforementioned third interval is equal to the diameter of the chuck worktable 20.

[0124] In addition, the loading and unloading tool 64 is designed such that by extending the tension springs 80a and 80b, the gap (fourth gap) between the end (rear end) of the upper surface (second mating surface) of the lower part 76b of the first mating part 76 away from the rear surface (first mating surface) of the connecting part 76c and the end (front end) of the upper surface (fourth mating surface) of the lower part 84b of the second mating part 84 away from the front surface (third mating surface) of the connecting part 84c is longer than the diameter of the chuck table 20.

[0125] In addition, the loading and unloading tool 64 is designed such that, when the tension springs 80a and 80b are extended and the rear surface of the second main body 82 contacts the front surface 74a of the stop 74, the aforementioned fourth interval is longer than the diameter of the chuck table 20.

[0126] In addition, the loading and unloading tool 64 has a cuboid stop 88. When the through hole 82c provided in the second main body 82 overlaps with the groove on the upper surface 72a of the protrusion 72 provided in the first main body 66, the stop 88 is inserted into the through hole 82c and the groove.

[0127] The height of the stop member 88 is longer than the distance between the upper surface 82b of the second main body 82 and the bottom surface of the groove when the through hole 82c overlaps with the groove. Furthermore, the length of the stop member 88 is slightly shorter than the length of the through hole 82c and the length of the groove. Additionally, the width of the stop member 88 is slightly shorter than the width of the through hole 82c and the width of the groove.

[0128] The chuck table 20 is removed from the cutting device 2 using the loading and unloading tool 64, for example, in the following order. First, an external force is applied to the loading and unloading tool 64 to extend the tension springs 80a and 80b to a length greater than the diameter of the chuck table 20 at the fourth interval mentioned above.

[0129] For example, the operator uses both hands to grasp the first main body 66 and the second main body 82 respectively and pulls them apart until the rear surface of the second main body 82 contacts the front surface 74a of the stop 74. Thus, the first fitting part 76 and the second fitting part 84 are positioned in the aforementioned fourth retraction position, which is longer than the diameter of the chuck table 20.

[0130] Next, the loading and unloading tool 64 and / or the chuck table 20 are arranged such that the center of the chuck table 20 is located in the center of the space between the first fitting part 76 and the second fitting part 84. For example, the operator arranges the loading and unloading tool 64 so that the lower surface of the first main body part 66 contacts the center of the holding surface of the chuck table 20.

[0131] Next, the external force applied to the tension springs 80a and 80b is removed. For example, the operator removes their hand from the first main body 66 and the second main body 82. As a result, the first fitting part 76 is engaged in the first outer peripheral region and the second fitting part 84 is engaged in the second outer peripheral region. That is, the first fitting part 76 and the second fitting part 84 are positioned at a fitting position where the first interval is equal to the diameter of the chuck table 20.

[0132] At this time, the rear surface (first mating surface) of the connecting portion 76c of the first mating portion 76 and the front surface (third mating surface) of the connecting portion 84c of the second mating portion 84 face the side surface of the chuck table 20. In addition, the upper surface (second mating surface) of the lower portion 76b of the first mating portion 76 and the upper surface (fourth mating surface) of the lower portion 84b of the second mating portion 84 face the lower surface of the chuck table 20.

[0133] Furthermore, in both cases where the first fitting portion 76 and the second fitting portion 84 are positioned in the retracted position and in the fitting position, the tension springs 80a and 80b apply force to the first main body portion 66 and the second main body portion 82 in the direction that brings the first fitting portion 76 and the second fitting portion 84 closer together.

[0134] Next, a stopper 88 is inserted into the through hole 82c provided in the second main body 82 and the groove on the upper surface 72a of the protrusion 72 provided in the first main body 66. In this case, even if an external force is applied to extend the tension springs 80a and 80b, the fourth interval will not be longer than the diameter of the chuck table 20. This prevents the chuck table 20 from falling off the loading and unloading device 64 during transport.

[0135] The loading and unloading tool 64 is then installed on the chuck worktable 20. Figure 6This is a schematic perspective view of the loading and unloading tool 64 mounted on the chuck table 20. Next, the operator uses both hands to grasp a pair of handles 68 and 70 to remove the chuck table 20 from the cutting device 2.

[0136] When using the loading and unloading tool 64 to load and unload the chuck worktable 20, with the first fitting part 76 and the second fitting part 84, which are integrally provided with the pair of handle parts 68 and 70, engaged in the outer peripheral area of ​​the chuck worktable 20, the operator grasps the pair of handle parts 68 and 70 to load and unload the chuck worktable 20 relative to the cutting device 2. Therefore, when an operator wearing cleanroom gloves or the like manually loads and unloads the chuck worktable 20 relative to the cutting device 2, the chuck worktable 20 can be loaded and unloaded stably without contaminating the cleanroom gloves or the like.

[0137] In addition, the above-described embodiments and variations can be appropriately modified and implemented as long as they do not depart from the scope of the present invention.

Claims

1. An attachment and detachment tool used when attaching and detaching a chuck table with respect to a processing device having the chuck table and a processing unit, the chuck table being a circular plate having a holding surface that holds a workpiece on a front surface, the processing unit processing the workpiece held by the chuck table, wherein the attachment and detachment tool has: a first fitting portion that fits with a first outer peripheral region of the chuck table; a second fitting portion that fits with a second outer peripheral region of the chuck table that is located opposite the first outer peripheral region when viewed from the center of the chuck table; a first body portion that has an upper portion of the first fitting portion fixed on a lower surface side of one end portion, and that extends toward the second fitting portion; a second body portion that has an upper portion of the second fitting portion fixed on a lower surface side of one end portion, and that has a portion of the first body portion inserted therein or a portion of the second body portion inserted in the first body portion; and a handle portion fixed to the first body portion, the first fitting portion has a first fitting surface that faces a side surface of the chuck table in a state of fitting with the first outer peripheral region, and a second fitting surface that faces a lower surface of the chuck table, the second fitting portion has a third fitting surface that faces a side surface of the chuck table in a state of fitting with the second outer peripheral region, and a fourth fitting surface that faces a lower surface of the chuck table, the first body portion and the second body portion are joined in a manner that enables positioning of the first fitting portion and the second fitting portion in either a fitting position at which a gap between the first fitting surface and the third fitting surface is equal to a diameter of the chuck table, or a retreat position at which a gap between an end portion of the second fitting surface that is distal from the first fitting surface and an end portion of the fourth fitting surface that is distal from the third fitting surface is longer than the diameter of the chuck table.

2. The attachment and detachment tool according to claim 1, wherein the first body portion and the second body portion are joined by a spring that exerts a force on the first body portion and the second body portion in a direction in which the first fitting portion and the second fitting portion approach each other, in both a case in which the first fitting portion and the second fitting portion are positioned in the fitting position, and a case in which the first fitting portion and the second fitting portion are positioned in the retreat position. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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