Solid vaporizer

Abstract

The vaporizer container includes one or more reagent support panels that, in a vertical orientation, such as when the vaporizer container is filled, serve as dividers for the interior space of the container, and when rotated to a horizontal orientation, the panels support vaporizable solid materials disposed in one or more chambers formed by the panels and the interior walls of the container and are capable of transferring heat to the solid materials. The chambers provide void spaces for any or all chambers filled with the vaporizable solid materials to allow the solid materials to vaporize and allow gases to move through the vaporizer container when heated, allowing efficient vaporization of the solid materials and further allowing vapor generated by the solid materials to move to an outlet of the container where the vapor can be provided as part of a process.

Description

Technical Field

[0001] The present disclosure relates to vaporizers for solid materials, and in particular, to vaporizers having a container including one or more panels configured to support the solid material when the vaporizer is in a horizontal orientation. Background Art

[0002] Some manufacturing processes, such as atomic layer deposition (ALD), plasma enhanced chemical vapor deposition (PECVD), low pressure chemical vapor deposition (LPCVD) or any other suitable deposition method or combination thereof may utilize a vaporized material flow. For example, chemical vapor deposition is a process for forming a solid layer or film of a material on a substrate surface using a vaporized material flow. In another manufacturing process, a material is injected into a substrate using a vaporized material flow. This material may be referred to as a reagent. In semiconductor manufacturing, chemical vapor deposition can be used to form one or more precision films of a solid source material on a substrate. The vaporization container may be configured to provide a vaporized reagent flow by vaporizing a solid source material with a carrier gas flow. The solid source material may be in the form of particles, such as sintered or non-sintered particles or liquids. The vaporization container may include a plurality of trays that are individually filled to distribute solid materials and conduct heat to the solid materials to vaporize the materials. These containers provide a high degree of consistency in the delivered steam and a high utilization rate of the contained materials, but require filling each tray therein and stacking or otherwise assembling the trays, thereby increasing the time, cost and contamination risk of the filling process. Summary of the invention

[0003] The present disclosure relates to vaporizers for solid materials, and in particular, to vaporizers having a container including one or more panels configured to support the solid material when the vaporizer is in a horizontal orientation.

[0004] The use of one or more support panels (hereinafter referred to as "support panels" or "reagent support panels") to divide the container allows the addition of vaporizable solid materials to the container through a simple filling process in a first orientation in which the support panels extend vertically, while allowing the same support panels to support the material and transfer heat to the material in a second orientation in which the support panels extend horizontally. In the second orientation, the support panels also define sufficient void space to promote vaporization of solids resting on each of the support panels.

[0005] Such containers can reduce the difficulty and workload of filling standard vaporizer containers. In standard vaporizer containers, individual trays (usually between 6 and 16 trays) need to be filled separately and installed in the container. The outer diameter of the tray may be close to the inner diameter of the standard vaporizer container, so that extremely high precision can be inserted without clogging. In addition, the precision operation required for the standard vaporizer container may become more complicated due to the cleanliness requirements of the vaporizer container, so a large number of skilled labor (including years or more of training) and / or automation are required to fill. In contrast, the vaporizer container of the present invention using a support panel instead of a separate tray can be filled in batches in a single filling operation, thereby significantly reducing the filling cost while still providing acceptable vaporization performance for many applications. By eliminating the high precision required for a separate tray, the vaporizer container using a support panel can also be more cost-effective in the case of larger sizes. Using a fixed reagent support panel instead of a tray can also simplify the cleaning process of the vaporizer container before filling because it does not need to clean a separate tray, and its structure may be simpler. Fixed reagent support panels can further improve structural strength and better resist impact during transportation, further simplifying logistics and reducing the professional training and attention required during container handling.

[0006] In an embodiment, a vaporizer container for vaporizable solid source material includes: a vaporizer container body including an inner surface defining an interior volume; an inlet configured to introduce a carrier gas into the interior volume of the vaporizer container, causing the carrier gas to flow through the interior volume to contact the vaporizable solid source material to form a carrier gas / solid source vapor mixture; and an outlet configured to allow the carrier gas / solid source vapor mixture to be discharged from the vaporizer container. The container further includes at least one thermally conductive reagent support panel, which is located within the interior volume and is joined to the vaporizer container body at the inner surface using a thermally conductive joint. When the vaporizer container body is oriented so that the outlet is at an end of the container in a longitudinal direction, each of the at least one thermally conductive reagent support panel extends through the interior volume in a horizontal direction so that at least a portion of the vaporizable solid source material can rest on the thermally conductive reagent support panel, and there is a void space between the upper surface of the portion of the vaporizable solid source material and the inner surface of the vaporizer container or another of the at least one thermally conductive reagent support panel. Each of the at least one thermally conductive reagent support panel is joined to the vaporizer container body by a thermally conductive joint. The at least one thermally conductive agent support panel may be stainless steel (eg, 304, 316), nickel, aluminum, graphite, or other suitable material.

[0007] In an embodiment, the vaporizer container includes a plurality of thermally conductive reagent support panels. In some embodiments, the vaporizer container includes a single thermally conductive reagent support panel. In other embodiments, the vaporizer container includes 2, 3, 4, 5, 6, 7, 8, 9, 10 or more thermally conductive reagent support panels. In an embodiment, the vaporizer container includes up to 20 thermally conductive reagent support panels. The thermally conductive reagent support panels may extend in a common direction, for example, vertically when the vaporizer container is in a filling orientation, and horizontally when the vaporizer container is in a use orientation. The thermally conductive reagent support panels may be inert to the precursor used with the vaporizer container, be able to support the weight of the precursor, and be able to withstand the temperature of the vaporizer container during use at a variable temperature. In some embodiments, the temperature may be higher than 150°C, higher than 200°C, higher than 250°C, higher than 300°C, or higher than 350°C.

[0008] In an embodiment, each of the plurality of thermally conductive reagent support panels is parallel to each other. The thermally conductive reagent support panels form a chamber for containing reagents. The plurality of chambers may have similar sizes or different sizes.

[0009] In an embodiment, each of a plurality of thermally conductive reagent support panels extends from the inner surface of the vaporizer container body to the centerline of the internal volume. The thermally conductive reagent support panels may form a plurality of similar chambers for accommodating reagents. When in a filling orientation, such as when the thermally conductive reagent support panels are vertical, each chamber may have a substantially uniform horizontal cross-section. In some embodiments, the chambers share a common horizontal cross-section. In other embodiments, the chambers have different horizontal cross-sections from each other.

[0010] In an embodiment, a plurality of thermally conductive reagent support panels are uniformly distributed radially around the center line of the internal volume. In an embodiment, the vaporizer container includes four thermally conductive reagent support panels. In an embodiment, the angle between any thermally conductive reagent support panel and any adjacent thermally conductive reagent support panel is 90°. Other numbers of reagent support panels and different angles are also disclosed. In one embodiment, two thermally conductive reagent support panels can form an angle between 15° and 180°. For example, two thermally conductive reagent support panels can form an angle between 45° and 120°. In another example, the thermally conductive reagent support panel can form an angle between 60° and 90°. The angle formed by the thermally conductive reagent support panel can be different based on the number of thermally conductive reagent support panels, its configuration, the type of reagent used with the vaporizer container, the size of the vaporizer container, etc. In some embodiments, the thermally conductive reagent support panels form the same angle. In other embodiments, the reagent support panels form different angles between them, such as 90° and 45° or 60° and 120°.

[0011] The thermally conductive reagent support panel may have a coating. In an embodiment, the coating is a metal cladding, such as stainless steel on an aluminum core. In an embodiment, the coating enhances the thermal emissivity of the surface of the thermally conductive reagent support panel to enhance heat transfer from the surface of the thermally conductive reagent support panel to the reagent on the thermally conductive reagent support panel. In some embodiments, the coating enhances the chemical inertness of the thermally conductive reagent support panel or enhances other properties of the thermally conductive reagent support panel. Example coatings include magnesium fluoride (MgF 2 ), aluminum nitride, molybdenum carbide, silicon oxide, aluminum oxide, yttrium oxide and anodizing.

[0012] In an embodiment, the thermally conductive joint extends along the entire length of at least one thermally conductive reagent support panel. This configuration can improve heat transfer from the vaporizer container wall to the thermally conductive reagent support panel.

[0013] In an embodiment, each of the at least one thermally conductive reagent support panel is joined to the inner surface of the vaporizer container body by a plurality of thermally conductive joints. In an embodiment, between the plurality of thermally conductive joints, there is a gap between the thermally conductive reagent support panel and the inner surface of the vaporizer container body. The gap can be used to allow the carrier gas to circulate between the chambers of the vaporizer container.

[0014] In an embodiment, the thermally conductive joint is a welded part. The thermally conductive joint can be a brazed joint. The thermally conductive joint can be a press fit between the thermally conductive reagent support panel and the inner surface of the vaporizer container body. The purpose of the thermally conductive joint is to transfer heat from the inner surface of the vaporizer container body to the thermally conductive reagent support panel, and then the heat is used to heat the reagent and generate steam provided to the outlet for final deposition through the vapor deposition system. The heat transfer through the thermally conductive joint can be enhanced by contacting the thermally conductive reagent support panel and the inner surface of the vaporization container body. In some embodiments, the thermally conductive joint includes a lug or flange to increase the contact area between the thermally conductive reagent support panel and the inner surface of the vaporization container body. In an embodiment, the thermally conductive joint and the thermally conductive reagent support panel are three-dimensionally printed or cast to form the internal structure of the vaporizer container.

[0015] In an embodiment, the vaporizer container body has an opening, the opening including a fill port, the fill port is spaced apart from the thermally conductive reagent support panel so that the fill port communicates with all spaces defined by at least one thermally conductive reagent support panel. The fill port can allow for simultaneous or sequential filling of multiple chambers defined by the thermally conductive reagent support panel. In some embodiments, all chambers can be filled simultaneously.

[0016] In an embodiment, at least one of the plurality of thermally conductive reagent support panels includes one or more openings through the reagent support panel. The openings can provide gas flow (e.g., carrier gas flow, reagent vapor) between different chambers of the vaporizer container. The openings can include slits, holes, and / or other shapes.

[0017] In an embodiment, a method for filling a vaporizer container is provided. The vaporizer container includes a vaporizer container body. The vaporizer container body includes: an end including a filling port; and an inner surface defining an interior volume; and at least one thermally conductive reagent support panel, which is located within the interior volume and joined to the vaporizer container body at the inner surface, each of the at least one thermally conductive reagent support panel extending through the interior volume. Each of the at least one thermally conductive reagent support panel is joined to the vaporizer container body by a thermally conductive joint. The method includes: orienting the vaporizer container so that each of the at least one thermally conductive reagent support panel extends in a vertical direction and the filling port is disposed at the top of the vaporizer container; and adding at least one vaporizable solid source material to the interior volume of the vaporizer container by means of the filling port, so that the at least one vaporizable solid source material is present in each space defined by the at least one thermally conductive reagent support panel and the inner surface.

[0018] In an embodiment, at least one vaporizable solid source material comprises a tungsten precursor material or a molybdenum precursor material. Other suitable materials include, but are not limited to, dimethylhydrazine, trimethylaluminum (TMA), hafnium chloride (HfCl 4 ), zirconium chloride (ZrCl 4 ), indium trichloride, aluminum trichloride, titanium iodide, tungsten carbonyl, Ba(DPM) 2 、bis-diisovaleryl methyl strontium (Sr(DPM) 2 )、TiO(DPM) 2 、Zr(DPM) 4 ), decaborane, boron, magnesium, gallium, indium, antimony, copper, phosphorus, arsenic, lithium, sodium tetrafluoroborate, precursors of alkyl amidine ligands, organometallic precursors, zirconium tert-butylate (Zr(t-OBu) 4 )、Tetrakis-diethylaminozirconium (Zr(Net2) 4 ), tetrakis-diethylamino hafnium (Hf(Net2) 4 ), tetrakis(dimethylamino)titanium (TDMAT), tert-butylimino(diethylamino)tantalum (TBTDET), penta(dimethylamino)tantalum (PDMAT), penta(ethylmethylamino)tantalum (PEMAT), tetrakis(dimethylamino)zirconium (Zr(NMe 2 ) 4 ), Hafnium tert-butylate (Hf(tOBu) 4 ), Xenon difluoride (XeF 2 ), xenon tetrafluoride (XeF 4 ), xenon hexafluoride (XeF 6 ), molybdenum formation (including but not limited to MoO 2 Cl 2 、MoO2 、MoOCl 4 、MoCl 5 、Mo(CO) 6 ), tungsten formation (including but not limited to WCl 5 and WCl 6 、W(CO) 6 ), and compatible combinations and mixtures of two or more of the above.

[0019] In an embodiment, when at least one vaporizable solid source material is added to the interior volume of the vaporizer container, the at least one vaporizable solid source material is in powder form. When the vaporizer container is in a first orientation, the at least one vaporizable solid source material can be poured into the interior volume of the vaporizer container, and then the vaporizer container can be rotated to a second orientation, wherein the vaporizable solid source material is offset to be located on the thermally conductive reagent support panel. In some embodiments, the interior of the vaporizer container includes a plurality of chambers defined by the thermally conductive reagent support panel and / or the interior surface of the vaporizer container. The plurality of chambers can be filled simultaneously or sequentially. The vaporizer container can then be heated in the second orientation, and the thermally conductive reagent support panel can conduct heat to contact the vaporizable solid source material.

[0020] In an embodiment, a method for vaporizing a vaporizable solid source material includes orienting a vaporizer container containing a solid. The vaporizer container includes a vaporizer container body, the vaporizer container body including an inner surface defining an internal volume, an inlet, an outlet, and at least one thermally conductive reagent support panel, the thermally conductive reagent support panel is located within the internal volume and is joined to the vaporizer container body at the inner surface. Each of the at least one thermally conductive reagent support panel extends through the internal volume. The vaporizer container is oriented so that each of the at least one thermally conductive reagent support panel extends in a horizontal direction, and at least a portion of the vaporizable solid source material rests on one or more of the at least one thermally conductive reagent support panel. The method includes heating the vaporizer container body and transferring heat from the vaporizer container body to the at least one thermally conductive reagent support panel by means of a thermally conductive joint, wherein the at least one thermally conductive reagent support panel is joined to the inner surface of the vaporizer container body. The method further includes transferring heat from each of the at least one thermally conductive reagent support panel to the vaporizable solid source material in contact with the thermally conductive reagent support panel to vaporize the vaporizable solid source material.

[0021] In an embodiment, the method further comprises extracting vapor comprising at least some vaporizable solid source material from the vaporizer vessel via the outlet.The extracted vapor may be used in a vapor deposition process.

[0022] In an embodiment, at least one vaporizable solid source material comprises a tungsten precursor material or a molybdenum precursor material. The solid source material may be other precursor materials as discussed above. Alternatively, the precursor material may be a liquid at room temperature and / or use temperature.

[0023] In an embodiment, when the vaporizer vessel is oriented in the use orientation, the at least one vaporizable solid source material is in the form of a powder. The powder may rest on a support panel and receive heat from the support panel to induce vaporization of the powder. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A perspective view of a vaporizer container is shown according to an embodiment.

[0025] Figure 2 A front view of a vaporizer container is shown according to an embodiment.

[0026] Figure 3 A cross-sectional view of a vaporizer vessel is shown according to an embodiment.

[0027] Figure 4 Another cross-sectional view of a vaporizer vessel is shown according to an embodiment.

[0028] Figures 5A-5D Several cross-sectional views of a vaporizer vessel are shown according to various embodiments. DETAILED DESCRIPTION

[0029] The present disclosure relates to vaporizers for solid materials, and in particular, to vaporizers having a container including one or more panels configured to support the solid material when the vaporizer is in a horizontal orientation.

[0030] Figure 1 A perspective view of a vaporizer container 100 according to an embodiment is shown. The vaporizer container 100 includes a container body 102. The container body 102 has an interior surface 104. A reagent support panel 106 is located within a space defined by the interior surface 104. The reagent support panel 106 is joined to the interior surface 104 by a joint 108. A gap 110 may be included between the reagent support panel 106 and the interior surface 104. A lid (e.g., Figure 2 ) can be attached to the container body 102 to close the interior space defined by the interior surface 104.

[0031] The vaporizer container 100 is a container for containing vaporizable solid materials, in which the vaporizable solid materials can be vaporized to provide vapor for processes such as deposition processes. The vaporizer container 100 may also be referred to as a solid vaporizer, an ampoule, or other such terms. The vaporizer container 100 is configured to be heated and transfer heat to the vaporizable solid material to generate vapor. The vaporizer container 100 may be configured to be used with a tool for a deposition process, such as a vapor deposition tool, such as atomic layer deposition (ALD), plasma enhanced chemical vapor deposition (PECVD), low pressure chemical vapor deposition (LPCVD), or any other suitable deposition method or combination thereof.

[0032] The container body 102 forms a part of the vaporizer container 100. The container body 102 is thermally conductive so that heating applied to the outside of the container body 102, for example from a heating jacket or an oven, is transferred to the interior surface 104. The container body 102 may include, for example, a metal material, such as steel, stainless steel (e.g., 304, 316), nickel, aluminum, etc. The container body 102 may have any suitable shape, such as cylindrical, rectangular, prismatic, etc. In one embodiment, the shape of the container body 102 is cylindrical. The container body 102 includes an interior surface 104. The interior surface 104 is a surface of the container body 102 that defines a space within the container body 102. The interior surface 104, in combination with the reagent support panel 106, may define a plurality of chambers within the space within the container body 102. The material and thickness of the container body 102 may be selected to, but not limited to, enable the vaporizer container 100 to comply with drop test and / or pressure test standards, such as the Department of Transportation (DOT) standards for such containers, without using additional outer packaging. In some embodiments, the construction of the vaporizer container 100 complies with the latest version of UN / DOT CFR 49 Part 171-180 and ASME specifications and appendixes. In other embodiments, the material and thickness of the container body 102 can be selected at least in part based on the heat transfer property so that the container body 102 can conduct heat from the heating jacket or oven to the inner space defined by the inner surface 104 and to the reagent support panel 106. In an embodiment, the thickness of the container body 102 can be but not limited to 2mm to 10mm. For example, the thickness of the container body 102 can be about 5mm. In an embodiment, the container body 102 may include stainless steel (such as 304, 316), aluminum, graphite and / or nickel or its alloy. The inner surface 104 of the container body 102 may include a coating. In an embodiment, the coating promotes the heat transfer from the inner surface 104 to the chamber formed by the inner surface 104 and the reagent support panel 106 inside the vaporization container 100. Example coatings include but are not limited to metals, ceramics, fluorides, carbides, nitrides and oxides.

[0033] Reagent support panel 106 is a panel included in the space limited by inner surface 104. Reagent support panel 106 is configured to support vaporizable solids during using vaporizer container 100 in vaporization process. Reagent support panel 106 can be planar, shaped or curved. In an embodiment, reagent support panel 106 provides in the form of a tube positioned in the space limited by inner surface 104. Reagent support panel 106 can extend in a certain direction, so that when vaporizer container 100 is in a first orientation, reagent support panel extends in a vertical direction, and when vaporizer container 100 is in a second orientation, reagent support panel 106 extends in a horizontal direction. For example, reagent support panel 106 can be heat-conducting by comprising a heat-conducting material such as steel (such as 304 or 316 stainless steels) and / or other materials such as nickel, aluminum, graphite or other suitable materials, so that reagent support panel 106 can conduct heat from container body 102 to the material in contact with reagent support panel 106, such as vaporizable solid material. In an embodiment, the reagent support panel 106 does not extend the entire height of the space defined by the interior surface 104 of the container body 102, e.g., a gap is left between the reagent support panel 106 and an open end of the container body 102, such as a lid (e.g., Figure 2 A lid 204, shown and described below, may be attached to the end of the container body 102. The reagent support panel 106 may be configured to serve as a support member that contributes to the structural strength and pressure drop performance of the container body 102 as discussed above.

[0034] The reagent support panels 106 may be included in any suitable number and configuration such that when the vaporizer container 100 is in a predetermined orientation, the reagent support panels 106 may support the vaporizable solid material, wherein the reagent support panels 106 extend in a horizontal direction. For example, the reagent support panels 106 may form a structure such as a grid or honeycomb pattern. Figure 1 In the illustrated embodiment, the reagent support panels 106 are a plurality of planar panels, each extending from the inner surface 104 of the container body 102 toward the center of the container body 102, wherein each reagent support panel 106 is connected to other reagent support panels 106. In an embodiment, the reagent support panels 106 are evenly distributed radially around the center of the container body 102, so that the angle formed by each pair of adjacent reagent support panels is the same. Figure 1 In the illustrated embodiment, the reagent support panel 106 includes four panels, wherein adjacent panels form an angle of 90 degrees with respect to each other. In an embodiment, a coating may be provided on the reagent support panel 106 to increase the thermal radiation from those reagent support panels. The coating may be any suitable heat dissipation coating, a non-limiting example of which is an aluminum oxide coating provided by atomic layer deposition (ALD). Other examples of coatings include, but are not limited to, MgF 2, aluminum nitride, molybdenum carbide, silicon oxide, yttrium oxide, and anodic oxide. The vaporizable solid materials included in the reagent support panel are selected so that they do not compromise the cleanliness of the interior relative to the vaporizable solid materials included in the vaporizer container 100. For example, the vaporizable solid materials can be selected so that they do not react with the vaporizable solid or undergo gas volatilization when the contained solid is vaporized.

[0035] The reagent support panel 106 and the interior surface 104 combination can divide the space defined by the interior surface 104 to provide a plurality of chambers, each of which can contain one or more vaporizable solid materials, such as tungsten precursors, molybdenum precursors, etc. The chambers can be sections of a grid or honeycomb pattern, spaces within a tube, or any other suitable space defined by the reagent support panel 106. Non-limiting examples of vaporizable solid materials can include: AlCl 3 , tungsten halides and their oxyhalides, including but not limited to WCl 5 、WCl 6 and WOCl 4 ; Molybdenum halides and their oxyhalides, including but not limited to MoCl 5 、MoOCl 4 and MoO 2 Cl 2 ; Zirconium chloride or its oxyhalide, including but not limited to ZrCl 4 and ZrOCl 2 ; and hafnium chlorides or oxyhalides, including HfCl 4 But not limited to HfOCl 2; and combinations thereof. The vaporizable solid material can be a source material for a manufacturing process, such as a vapor deposition process. The vaporizable solid material can be a form that allows it to be offset or flowed when the orientation of the vaporizer container 100 changes. In an embodiment, in an orientation in which the reagent support panel 106 extends in a vertical direction, the chambers can be filled with the reagent support panel separately, used as a partition separating each chamber. In an embodiment, the filling process of the vaporizer container 100 can distribute the vaporizable solid material in all chambers defined by the inner surface 104 and the reagent support panel 106. In an embodiment, each chamber is filled to less than 100% of the internal volume of the vaporizer container 100, such as between about 80% and about 90% of the capacity, so that when the vaporizer container 100 is oriented so that the reagent support panel 106 extends in a horizontal direction and the vaporizable solid is placed on the reagent support panel 106, a void space without vaporizable solid material and except for the pores in the vaporizable solid material can be formed above a large amount of vaporizable solid material. Filling of the vaporizer container 100 can be performed in a single filling step without filling individual trays and then installing each tray into the container. The described embodiments can simplify filling operations, reduce costs, shorten filling time, and reduce contamination risks.

[0036] The reagent support panel 106 can be formed by metal plate. In certain embodiments, the reagent support panel 106 is formed by cladding material, for example the aluminum with stainless steel cladding. The material of the reagent support panel 106 can be selected based on its cost, formability, thermal conductivity and / or inertia. The reagent support panel 106 can be formed with spring configuration so that the reagent support panel 106 is pressed against the inner surface 104 of the container body 102. In certain embodiments, the reagent support panel 106 is formed by a plurality of material plates.

[0037] The chamber can have a substantially uniform volume, so that the volume of all chambers is approximately the same, and holds the vaporizable solid material of the same amount. This may prompt the vaporizable solid material to be more uniformly vaporized in the chamber, so that all chambers are exhausted after similar use time. In other embodiments, the chamber can have a uniform height between parallel reagent support panels 106. In certain embodiments, the chamber of the vaporizer container 100 can contain a vaporizable solid material between one hundred grams and several kilograms. In one embodiment, the vaporizer container 100 can include approximately 20 liters of volume, and needs to take approximately 30 minutes to fill. Also considered larger or smaller vaporizer container 100. For example, the vaporizer container 100 can contain 10 liters or less to 90 liters or more. Larger vaporizer container 100 can hold a larger amount of reagent, and may have a longer time between refilling. In certain embodiments, larger vaporizer container 100 includes more reagent support panels 106. The time to fill the vaporizer container 100 may depend on the size of the vaporizer container 100, the flow characteristics of the reagents, the size of the fill port, etc.

[0038] Joint 108 is the heat conduction connection between inner surface 104 and reagent support panel 106.Joint 108 can allow the heating of container body 102 to be transferred to reagent support panel 106, thereby heat is transferred to the vaporizable solid material on corresponding reagent support panel 106 in turn, to promote the vaporization of material.Joint 108 can be any suitable heat conduction connector of reagent support panel 106 to inner surface 104, and one of non-limiting examples is welding piece.In an embodiment, gap 110 may exist between some joints 108.Gap 110 can be provided to allow gas to move in container 100, small particles of solid source material to pass between chambers etc.Gap 110 can be at the point between the part along joint 108 or the part of joint 108.In an embodiment, gap 110 can be provided as opening in one or more reagent support panels 106.When container 100 is in use orientation, gap 110 can be positioned to allow gas to flow between chambers. The joint 108 may include screws or similar hardware for securing the thermally conductive reagent support panel 106 to the container body 102. In some embodiments, the joint 108 is a press fit of the reagent support panel 106 to the interior surface 104 of the container body 102.

[0039] Figure 2 A front view of a vaporizer container 200 is shown according to an embodiment. The vaporizer container 200 includes a container body 202 and a lid 204. The vaporizer container 200 includes a fill port 206. The vaporizer container 200 may also include a carrier gas inlet 208. The vaporizer container 200 also includes an outlet 210.

[0040] The container body 202 defines a container including an interior space. The container body 202 may include an open end that may be closed by a lid 204. The container body 202 may optionally include one or more features for engaging with the lid 204 and / or receiving a mechanical fastener to engage the lid 204 to the container body 202. The container body 202 may include a reagent support panel 106 in the container body 202, such as those described above and Figure 1 The reagent support panel 106 is shown. Figure 2 In the orientation of the container body 202 shown, the reagent support panel 106 contained within the container body 202 can extend in a vertical direction, acting as a divider between multiple chambers defined within the container body 202. The container body 202 can be thermally conductive, so that heat provided to the exterior of the container body 202 can be easily transferred to the interior space within the container body 202 using the reagent support panel. The interior space within the container body 202 can contain one or more vaporizable solid materials, such as vaporizable solid source materials, such as precursors for vapor deposition processes and the like.

[0041] The lid 204 may be disposed at the end of the container body 202. The lid 204 may be configured to close the container body 202 at the end to which the lid 204 is attached. The lid 204 may be any suitable shape for closing the container body 202. The lid 204 may include a plurality of ports, allowing material to be added to and / or removed from the interior space defined by the container body 202 and the lid 204. The lid 204 may be sealed to the container body 202 such that all inflow and outflow of the interior space occurs through one or more openings disposed on the lid 204 or the container body 202, such as a filling port 206, an optional carrier gas inlet 208, and / or an outlet 210. The lid 204 may be secured to the container body 202 by any suitable connector, such as threaded fastening, mechanical fasteners such as bolts, engaging features such as flanges or edges, adhesives, or any other suitable connector. In an embodiment, the fixing of the lid 204 to the container body 202 can be sealed, for example, by including a gasket, an O-ring or other seal, etc. to seal the interior space defined by the container body 202 and the lid 204.

[0042] Filling port 206 is a port that allows any suitable vaporizable solid, such as vaporizable solid source material to be introduced into the space in container body 202. When container body 202 is oriented so that reagent support panel extends in the vertical direction, filling port 206 can be provided at the end of vaporizer container 200, and the end is located at the top of vaporizer container 200. Filling port 206 can be provided at the top or side of lid 204. Filling port 206 can be resized and / or positioned relative to reagent support panel 106 so that when vaporizable solid is added by filling port 206, each chamber receives at least some vaporizable solid. In an embodiment, when reagent support panel is connected at the center of container body 202, filling port 206 is located at the center of reagent support panel, and when container body 202 is oriented so that reagent support panel 106 extends in the vertical direction, a portion of the area of ​​filling port 206 is provided above each chamber in a plan view. For example, the vaporizer container 200 can be filled by orienting the vaporizer container 200 so that the filling port 206 is located at the top end of the vaporizer container 200 and the reagent support panel extends in the vertical direction and by introducing a vaporizable solid such as a vaporizable solid source material into each chamber in the container body 202 by means of the filling port 206. The filling port 206 allows the vaporizer container 200 to be filled in a single step without having to fill and install multiple trays. The filling port 206 allows the vaporizer container 200 to be filled without removing the lid 204 from the vaporizer container 200. In some embodiments, the lid 204 is removed as part of filling the chamber. The lid 204 can be reinstalled before the vaporizer container 200 is oriented to be used.

[0043] In an embodiment, the vaporizer container 200 may include a carrier gas inlet 208. The carrier gas inlet 208 may be disposed at any suitable position on the vaporizer container 200. In an embodiment, the carrier gas inlet 208 is disposed at the bottom or side of the container body 202. In an embodiment, the carrier gas inlet 208 is disposed on the lid 204. In an embodiment, the carrier gas inlet 208 and the outlet 210 are disposed at the same end of the vaporizer container 200. The carrier gas inlet 208 is a gas inlet that allows a carrier gas to be introduced into the interior space within the container body 202. For example, the carrier gas may be an inert gas. In an embodiment, the carrier gas may include a reaction gas or a mixture of an inert gas and a reaction gas. The carrier gas may be used to promote the generation and / or extraction of gases including steam from the vaporizable solid material contained in the container body 202. The carrier gas inlet 208 may include a valve that controls the flow of the carrier gas into the space within the container body 202. The carrier gas inlet 208 may include a fixture or fitting that allows the carrier gas inlet 208 to be connected to a carrier gas source, such as a carrier gas tank, a carrier gas output included on a deposition tool, or any other suitable carrier gas source. The carrier gas inlet 208 provides communication with the interior space within the container body 202. In an embodiment, the carrier gas inlet 208 may be connected to one or more conduits that are configured to deliver carrier gas to a space at one or more predetermined locations within the container body 202. For example, the carrier gas may be delivered to each of a plurality of chambers in the interior space within the container body 202.

[0044] The outlet 210 is a port configured to allow a fluid, such as a gas containing vapor generated by vaporization of a vaporizable solid material and an optional carrier gas, to leave the interior space within the container body 202. The outlet 210 can be configured to be connected to a tool, such as a deposition tool, using the vapor provided at the outlet 210. The outlet 210 can include a valve for controlling the flow rate of the fluid leaving the interior space within the container body 202 via the outlet 210. The outlet 210 can include a fitting or a fixture for connecting to a tool used by the vaporizer container 200. The outlet 210 can be included at any position on the container body 202 or the lid 204. The outlet 210 can be located at any suitable position for delivering a fluid, such as a vapor containing a vaporizable solid material, to a point outside the container body 202. In an embodiment, the outlet 210 is disposed at a closed end of the container body 202. In an embodiment, the outlet 210 is disposed along the side of the container body 202. In an embodiment, when the vaporizer container 200 is oriented so that the reagent support panel 106 extends in the horizontal direction, the outlet 210 is located at a position where the outlet 210 is lower, the same, or higher than the horizontal plane of the vaporizable solid placed on the reagent support panel 106 in the container body 202. In an embodiment, the outlet 210 may include a sensor 212, which is configured to measure steam flow and / or steam characteristics, such as the amount of vaporized solids. The sensor 212 may be included in a feedback loop (not shown) to control the generation of steam, such as to improve the consistency of vaporized solids delivered from the vaporizer container 200. In an embodiment, the sensor 212 may be located downstream of the outlet 210, such as, along a pipeline connected to the outlet 210 or at the inlet of a tool using the steam provided from the vaporizer container 200. The feedback loop may include controlling the carrier gas flow and / or heating the vaporizer container 200.

[0045] Figure 3 A cross-sectional view of a vaporizer container 300 according to an embodiment is shown. The vaporizer container 300 includes a container body 302 and a plurality of reagent support panels 304. A vaporizable solid material 306 is placed in each chamber defined by the container body 302 and the reagent support panels 304. Each chamber also includes a void space 308 in a portion not occupied by the vaporizable solid material 306. The void space 308 can be formed by partially filling the chamber in a filling orientation and then adjusting the orientation to a use orientation so that the vaporizable solid material 306 is offset under gravity to occupy the bottom portion of the chamber.

[0046] The vaporizer container 300 is a vaporizer container for containing vaporizable solid material 306. The container body 302 forms a continuous perimeter defining an interior space. Figure 3 In the illustrated embodiment, the container body 302 has, for example, a cylindrical shape, thereby providing Figure 3The container body 302 can be thermally conductive so that heating provided by a jacket (not shown) or an oven (not shown), etc. (not shown) can be conducted to the interior space within the container body 302. As discussed above with respect to the container bodies 102 and 202 and Figure 1 and 2 As shown in , container body 302 can be made of any suitable material for a vaporizer container.

[0047] The reagent support panel 304 extends through the interior space defined by the container body 302. Figure 3 In the cross-sectional view of the illustrated embodiment, the reagent support panel extends into and out of the page. The reagent support panel 304 can be planar. Figure 3 In the illustrated embodiment, the reagent support panels are multiple parallel planes. Two or more of the reagent support panels 304 may be arranged non-parallel to each other. The reagent support panels 304 may be thermally conductive so that they can transfer heat to the vaporizable solid material 306. The reagent support panels 304 may be provided by, for example, the above-discussed and Figure 1 A thermally conductive joint, such as the joint 108 shown, is joined to the container body 302 so that when the container body 302 is heated, for example using a heating jacket or by being placed in an oven, the heat is transferred to the reagent support panel 304 and then to the vaporizable solid material 306 to promote vaporization of the vaporizable solid material 306.

[0048] The container body 302 and the reagent support panel 304 define a plurality of chambers within the interior space defined by the container body 302. Figure 3 In the illustrated embodiment, the chambers are a series of volumes defined by having the container body 302 provide the side walls and the reagent support panel 304 provide the respective floor and ceiling of each chamber.

[0049] When the vaporizer container is Figure 3 In the orientation shown, vaporizable solid material 306 is placed on container body 302 and / or reagent support panel 304. Vaporizable solid material 306 can be any solid suitable for vaporization, such as precursor materials including tungsten precursors, molybdenum precursors, etc. Non-limiting examples of vaporizable solid materials can include: AlCl 3 , tungsten halides and oxyhalides, including but not limited to WCl 5 、WCl 6 and WOCl 4 ; Molybdenum halides and oxyhalides, including but not limited to MoCl 5 、MoOCl 4 and MoO 2 Cl 2 ; Zirconium chlorides or oxyhalides, including ZrCl 4; and hafnium chlorides or oxyhalides, including HfCl 4 ; and combinations thereof. In an embodiment, the vaporizable solid material 306 may be in a form that allows the vaporizable solid material 306 to deflect or flow in response to a change in orientation of the vaporizer container 300. In an embodiment, the vaporizable solid material 306 is in a powder form. In an embodiment, the vaporizable solid material 306 may be in a form other than a powder. In an embodiment, the vaporizable solid material 306 is in the form of a plurality of pellets or other formed shapes. The vaporizable solid material 306 may be configured, for example, as a crystal and / or aggregate structure. The vaporizable solid material 306 may include a suitable vaporizable solid source material, for example, a precursor for a vapor deposition process, etc. In an embodiment, the vaporizer container 300 may be agitated, for example, by shaking or vibrating, to distribute the vaporizable solid material 306 along the reagent support panel 304 and / or along the inner surface of the container body 302.

[0050] The void space 308 is an open space formed above the vaporizable solid material 306 within each chamber. The void space 308 can receive the vaporizable solid material 306 as it is vaporized and facilitate the flow of vapor to the outlet. In embodiments, the void space 308 can further allow a carrier gas to pass through the vaporizable solid material 306. The vaporizer vessel 300 can be filled with the vaporizable solid material 306 based on the effect of the filling level on the formation of the void space 308. In embodiments, the vaporizer vessel 300 can be filled with the vaporizable solid material 306 to a volume that is less than 100% capacity, such as between about 80% and about 90% capacity, so that open space remains within the vaporizable vessel so that when the vaporizer vessel 300 is placed in a horizontal orientation, the void space 308 can be formed. Vapor and / or carrier gas can pass through the void space 308 to the outlet, such as described above and Figure 2 The outlet 210 is shown to exit the vaporizer vessel 300, for example to be extracted for use in a process such as deposition of at least one material included in the vapor. In an embodiment, each chamber contains or supports the same amount of vaporizable solid material 306. In an embodiment, each or some of the chambers may contain or support a different amount of vaporizable solid material 306. In an embodiment, the amount of void space 308 in each chamber is the same. In an embodiment, the amount of void space 308 in each or some of the chambers may be different.

[0051] Figure 4 A cross-sectional view of a vaporizer container according to an embodiment is shown. The vaporizer container 400 includes a container body 402 and a plurality of reagent support panels 404. A vaporizable solid material 406 may be placed in any or all of one or more chambers defined by the container body 402 and the reagent support panels 404. The chambers including the vaporizable solid material 406 also include void spaces 408 in portions of the chambers not occupied by the vaporizable solid material 406.

[0052] The vaporizer container 400 is a vaporizer container for containing vaporizable solid material 406. The container body 402 forms a continuous perimeter defining an interior space. Figure 4 In the embodiment shown, the container body 402 has, for example, a cylindrical shape, thereby providing Figure 4 The container body 402 can be thermally conductive so that heating provided by a jacket (not shown) or an oven (not shown), etc. (not shown) can be conducted to the interior space within the container body 402. As discussed above with respect to the container bodies 102 and 202 and Figure 1 and 2 As shown in FIG. 4 , container body 402 may be any suitable material for a vaporizer container.

[0053] The reagent support panel 404 extends through the interior space defined by the container body 402. Figure 4 In the cross-sectional view of the illustrated embodiment, the reagent support panel extends into and out of the page. The reagent support panel 404 can be planar. Figure 4 In the illustrated embodiment, the reagent support panels 404 are a plurality of planar panels, each of which extends from the inner surface of the container body 402 toward the center of the container body 402, wherein each reagent support panel 404 is connected to other reagent support panels 404. In an embodiment, the reagent support panels 404 are evenly radially distributed around the center of the container body 402, so that the angle formed by each pair of adjacent reagent support panels 404 is the same. Figure 4 In the illustrated embodiment, the reagent support panel 404 includes four panels, wherein adjacent panels form a 90 degree angle with each other, similar to Figure 1 However, the angles formed with a pair of adjacent reagent support panels 404 may be different in the container body 402. The reagent support panels 404 may be thermally conductive so that they can transfer heat to the vaporizable solid material 406. The reagent support panels 404 may be thermally conductive, such that they can transfer heat to the vaporizable solid material 406. The reagent support panels 404 may be thermally conductive, such as those discussed above and Figure 1 A thermally conductive joint, such as the joint 108 shown, is joined to the container body 402 so that when the container body 402 is heated, for example using a heating jacket or by being placed in an oven, the heat is transferred to the reagent support panel 404 and then to the vaporizable solid material 406 to promote vaporization of the vaporizable solid material 406.

[0054] The container body 402 and the reagent support panel 404 define a plurality of chambers within the interior space defined by the container body 402. Figure 4In the illustrated embodiment, the chamber is a series of volumes defined by two reagent support panels 404 and a portion of the inner surface of the container body 402 that provides the chamber perimeter. Other embodiments may define the chamber using a different number of reagent support panels 404. In some embodiments, the chamber may be defined by the reagent support panels 404 and not by a portion of the inner surface of the container body 402. For example, the chamber may be circular, rectangular, or hexagonal.

[0055] When the vaporizer container 400 is Figure 4 In the orientation shown, vaporizable solid material 406 is placed on container body 402 and / or reagent support panel 404. Vaporizable solid material 406 can be any vaporizable solid source material, such as a precursor for a vapor deposition process, etc. Non-limiting examples of vaporizable solids include tungsten precursors, molybdenum precursors, etc. Non-limiting examples of vaporizable solid materials can include: AlCl 3 , tungsten halides and oxyhalides, including but not limited to WCl 5 、WCl 6 and WOCl 4 ; Molybdenum halides and oxyhalides, including but not limited to MoCl 5 、MoOCl 4 and MoO 2 Cl 2 ; Zirconium chlorides or oxyhalides, including ZrCl 4 ; and hafnium chlorides or oxyhalides, including HfCl 4 ; and combinations thereof. In an embodiment, the vaporizable solid material 406 may be in a form that allows the vaporizable solid material 406 to shift or flow in response to a change in orientation of the vaporizer container 400. For example, when the vaporizer container 400 changes from a filling orientation to a use orientation, the vaporizable solid material 406 may shift position in the corresponding chamber. In an embodiment, the vaporizable solid material 406 is in a powder form. In an embodiment, the vaporizable solid material 406 is in a form other than a powder. In an embodiment, the vaporizable solid material 406 is in the form of a pellet or other formed shape. The vaporizable solid material 406 may be configured, for example, as a crystal and / or aggregate structure. The vaporizable solid material 406 may include a suitable vaporizable solid source material, for example, a precursor for a vapor deposition process, etc. In an embodiment, the vaporizer container 400 may be agitated, for example, by shaking or vibrating, to distribute the vaporizable solid material 406 along the reagent support panel 404 and / or along the inner surface of the container body 402.

[0056] The void space 408 is an open space formed above the vaporizable solid material 406 within each chamber. The void space 408 can receive the vaporizable solid material 406 as it is vaporized and allow the vapor to flow toward the outlet. In embodiments, the void space 408 can further allow a carrier gas to pass through the vaporizable solid material 406. The vaporizer vessel 400 can be filled with the vaporizable solid material 406 based on the effect of the filling level on the formation of the void space 408. In embodiments, the vaporizer vessel 400 can be filled with the vaporizable solid material 406, which occupies a volume less than 100% of the internal volume of the vaporizer vessel 400, such as between about 80% and about 90% of the internal volume of the vaporizer vessel 400, so that open space remains within the vaporizable vessel so that when the vaporizer vessel 400 is placed in a horizontal orientation, the void space 408 can be formed. The vapor and / or carrier gas can pass through the void space 408 to reach the outlet, such as described above and Figure 2 The outlet 210 is shown to exit the vaporizer vessel 400, for example to be extracted for use in a process such as deposition of at least one material included in the vapor.

[0057] The described filling process of the vaporizer container 400 may include orienting the vaporizer container 400 to a first orientation in which the thermally conductive reagent support panel 404 is oriented vertically to allow the chamber to be filled. The chamber may be filled using a fill port until it is 80% to 90% full. The vaporizer container 400 may be oriented to use an orientation in which the thermally conductive reagent support panel 404 extends in a horizontal direction. The vaporizable solid material 406 is offset in response to the change in orientation to be placed on the thermally conductive reagent support panel 404.

[0058] Figures 5A-5D Several cross-sectional views of the vaporizer container 500 according to various embodiments are shown. The vaporizer container 500 includes a plurality of heat-conducting reagent support panels 502, which support reagents during processing. The heat-conducting reagent support panels 502 can be straight or curved. The heat-conducting reagent support panels 502 can be zigzag. Various different configurations of the heat-conducting reagent support panels 502 are shown. The design of the heat-conducting reagent support panels 502 can take into account thermal conductivity, the volume of the formed chamber, the nature or form of the reagent (e.g., pellets, particles) and other design considerations. The design of the heat-conducting reagent support panels 502 can be selected to produce vaporization of reagents with different levels of reagents in the vaporizer container 500. For example, as the amount of the reagent in the vaporizer container 500 decreases, the amount of the surface area of ​​the heat-conducting reagent support panels 502 in contact with the reagent may decrease. In other embodiments, as the reagent level decreases, the contact area of ​​the reagent with the heat-conducting reagent support panels 502 can reasonably remain constant.

[0059] aspect:

[0060] It should be understood that, to the extent feasible, any one of aspects 1 to 14 may be combined with any one of aspects 15 to 17 or 18 to 21. It should be understood that, to the extent feasible, any one of aspects 15 to 17 may be combined with any one of aspects 18 to 21.

[0061] Aspect 1. A vaporizer container for vaporizing a solid source material, comprising:

[0062] a vaporizer vessel body including an interior surface defining an interior volume;

[0063] an inlet configured to introduce a carrier gas into the interior volume of the vaporizer vessel, causing the carrier gas to flow through the interior volume to contact the vaporizable solid source material to form a carrier gas / solid source vapor mixture; and

[0064] an outlet configured to allow exhaust of the carrier gas / solid source vapor mixture from the vaporizer vessel; and

[0065] and at least one thermally conductive reagent support panel positioned within the interior volume and joined to the vaporizer container body at the interior surface by a thermally conductive joint, each of the at least one thermally conductive reagent support panel extending in a first vertical direction when the vaporizer container body is oriented in a filling orientation and extending horizontally to support a portion of the vaporizable solid source material when in a second, use orientation.

[0066] Aspect 2. The vaporizer container according to aspect 1, wherein the vaporizer container comprises a plurality of the thermally conductive reagent support panels.

[0067] Aspect 3. The vaporizer container of aspect 2, wherein each of the plurality of thermally conductive reagent support panels are respectively parallel to each other.

[0068] Aspect 4. The vaporizer container according to any one of aspects 2 to 3, wherein each of the plurality of thermally conductive reagent support panels extends from the inner surface of the vaporizer container body to a centerline of the interior volume.

[0069] Aspect 5. The vaporizer container of aspect 4, wherein the plurality of thermally conductive reagent support panels are evenly distributed radially around a centerline of the interior volume.

[0070] Aspect 6. The vaporizer container according to any one of aspects 1 to 5, wherein the vaporizer container comprises four thermally conductive reagent support panels.

[0071] Aspect 7. The vaporizer container according to aspect 6, wherein the angle between any of the thermally conductive reagent support panels and any adjacent thermally conductive reagent support panel is 90°.

[0072] Aspect 8. The vaporizer container of any one of aspects 1 to 7, wherein the thermally conductive joint extends along the entire length of the at least one thermally conductive reagent support panel.

[0073] Aspect 9. The vaporizer container according to any one of aspects 1 to 8, wherein each of the at least one thermally conductive reagent support panel is joined to the inner surface of the vaporizer container body by a plurality of the thermally conductive joints.

[0074] Aspect 10. The vaporizer container of aspect 9, wherein between the plurality of thermally conductive joints, there are gaps between the thermally conductive reagent support panel and the inner surface of the vaporizer container body.

[0075] Aspect 11. The vaporizer vessel of any one of aspects 1 to 10, wherein the thermally conductive joint is a weld.

[0076] Aspect 12. A vaporizer container according to any one of Aspects 1 to 11, wherein the vaporizer container further comprises an opening, the opening comprising a fill port, the fill port being spaced apart from the thermally conductive reagent support panel such that the fill port is in communication with all spaces defined by the at least one thermally conductive reagent support panel.

[0077] Aspect 13. The vaporizer container of any one of aspects 1 to 12, wherein at least one thermally conductive reagent support panel comprises one or more openings through the reagent support panel.

[0078] Aspect 14. The vaporizer container according to any one of aspects 1 to 13, wherein the material of the at least one thermally conductive reagent support panel is selected from the group consisting of: stainless steel, nickel, aluminum, and graphite.

[0079] Aspect 15. A method of filling a vaporizer container for vaporizable solid source material,

[0080] The vaporizer container includes a vaporizer container body including: an end including a fill port; and an interior surface defining an interior volume; and

[0081] at least one thermally conductive reagent support panel located within the interior volume and joined to the vaporizer vessel body at the interior surface, each of the at least one thermally conductive reagent support panel extending through the interior volume,

[0082] wherein each of the at least one thermally conductive reagent support panel is joined to the vaporizer container body by a thermally conductive joint,

[0083] The method comprises:

[0084] orienting the vaporizer container such that each of the at least one thermally conductive reagent support panel extends in a vertical direction and the fill port is disposed at a top of the vaporizer container; and

[0085] At least one vaporizable solid source material is added to the interior volume of the vaporizer vessel via the fill port such that the at least one vaporizable solid source material is present in each space defined by the at least one thermally conductive agent support panel and the interior surface.

[0086] Aspect 16. The method according to aspect 15, wherein the at least one vaporizable solid source material comprises a tungsten precursor material or a molybdenum precursor material.

[0087] Aspect 17. The method of any one of aspects 15 to 16, wherein the at least one vaporizable solid source material is in powder form when the at least one vaporizable solid source material is added to the interior volume of the vaporizer vessel.

[0088] Aspect 18. A method of vaporizing a vaporizable solid source material, comprising:

[0089] orienting a vaporizer container containing the vaporizable solid source material therein, the vaporizer container comprising:

[0090] a vaporizer vessel body including an interior surface defining an interior volume;

[0091] Entrance;

[0092] export; and

[0093] at least one thermally conductive reagent support panel located within the interior volume and joined to the vaporizer vessel body at the interior surface, each of the at least one thermally conductive reagent support panel extending through the interior volume;

[0094] wherein the vaporizer vessel is oriented such that each of the at least one thermally conductive reagent support panels extends in a horizontal direction and at least a portion of the vaporizable solid source material rests on one or more of the at least one thermally conductive reagent support panels;

[0095] heating the vaporizer container body,

[0096] transferring heat from the vaporizer vessel body to the at least one thermally conductive reagent support panel by means of a thermally conductive joint, wherein the at least one thermally conductive reagent support panel is joined to the inner surface of the vaporizer vessel body,

[0097] Heat is transferred from each of the at least one thermally conductive agent support panel to the vaporizable solid source material in contact with the thermally conductive agent support panel to vaporize the vaporizable solid source material.

[0098] Aspect 19. The method of aspect 18, further comprising extracting vapor including at least some of the vaporizable solid source material from the vaporizer vessel via the outlet.

[0099] Aspect 20. The method according to any one of aspects 18 to 19, wherein the at least one vaporizable solid source material comprises a tungsten precursor material or a molybdenum precursor material.

[0100] Aspect 21. The method of any one of aspects 18 to 20, wherein the at least one vaporizable solid source material is in powder form when the vaporizer vessel is oriented.

[0101] The examples disclosed in this application are to be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the appended claims rather than the foregoing description; and all changes within the equivalent meaning and range of the claims should be encompassed therein.

Claims

1. A vaporizer container for vaporizing a solid source material, comprising: a vaporizer vessel body including an interior surface defining an interior volume; an inlet configured to introduce a carrier gas into the interior volume of the vaporizer vessel, causing the carrier gas to flow through the interior volume to contact the vaporizable solid source material to form a carrier gas / solid source vapor mixture; and an outlet configured to allow exhaust of the carrier gas / solid source vapor mixture from the vaporizer vessel; as well as at least one thermally conductive reagent support panel located within the interior volume and joined to the vaporizer container body at the interior surface by a thermally conductive joint, each of the at least one thermally conductive reagent support panel extending in a first vertical direction when the vaporizer container body is oriented in a filling orientation and extending horizontally to support a portion of the vaporizable solid source material when in a second, use orientation, Each of the at least one thermally conductive reagent support panel is joined to the inner surface of the vaporizer container body by a plurality of thermally conductive joints, wherein there is a gap between the plurality of thermally conductive joints and the inner surface of the vaporizer container body, and the at least one thermally conductive reagent support panel is formed of a metal plate.

2. The vaporizer container of claim 1, wherein the vaporizer container comprises a plurality of the thermally conductive reagent support panels.

3. The vaporizer container of claim 2, wherein each of the plurality of thermally conductive reagent support panels are each parallel to one another.

4. The vaporizer container of claim 2, wherein each of the plurality of thermally conductive reagent support panels extends from the inner surface of the vaporizer container body to a centerline of the interior volume.

5. The vaporizer container of claim 1, wherein the opening comprises a fill port spaced apart from the thermally conductive reagent support panel such that the fill port communicates with all of the space defined by the at least one thermally conductive reagent support panel.

6. A method of filling a vaporizer container for vaporizable solid source material, The vaporizer container comprises a vaporizer container body, and the vaporizer container body comprises: an end portion including a fill port; and an interior surface defining an interior volume; as well as at least one thermally conductive reagent support panel located within the interior volume and joined to the vaporizer vessel body at the interior surface, each of the at least one thermally conductive reagent support panel extending through the interior volume, wherein each of the at least one thermally conductive reagent support panel is joined to the vaporizer container body by a thermally conductive joint, The method comprises: orienting the vaporizer container such that each of the at least one thermally conductive reagent support panel extends in a vertical direction and the fill port is disposed at a top of the vaporizer container; as well as At least one vaporizable solid source material is added to the interior volume of the vaporizer vessel via the fill port such that at least one vaporizable solid source material is present in each space defined by the at least one thermally conductive agent support panel and the interior surface.

7. The method of claim 6, wherein the at least one vaporizable solid source material is in powder form when the at least one vaporizable solid source material is added to the interior volume of the vaporizer vessel.

8. A method of vaporizing a vaporizable solid source material, comprising: orienting a vaporizer container having a solid contained therein, the vaporizer container comprising: a vaporizer vessel body including an interior surface defining an interior volume; Entrance; exit; as well as at least one thermally conductive reagent support panel located within the interior volume and joined to the vaporizer vessel body at the interior surface, each of the at least one thermally conductive reagent support panel extending through the interior volume; wherein the vaporizer vessel is oriented such that each of the at least one thermally conductive reagent support panels extends in a horizontal direction and at least a portion of the vaporizable solid source material rests on one or more of the at least one thermally conductive reagent support panels; heating the vaporizer container body, transferring heat from the vaporizer vessel body to the at least one thermally conductive reagent support panel by means of a thermally conductive joint, wherein the at least one thermally conductive reagent support panel is joined to the inner surface of the vaporizer vessel body, Heat is transferred from each of the at least one thermally conductive agent support panel to the vaporizable solid source material in contact with the thermally conductive agent support panel to vaporize the vaporizable solid source material.

9. The method of claim 8, further comprising extracting vapor including at least some of the vaporizable solid source material from the vaporizer vessel via the outlet.

Images