A magnetic levitation spool type ultra-clean valve

Abstract

The present invention relates to a magnetic levitation spool type ultra-clean valve. The ultra-clean valve includes a valve body, a magnetic control mechanism disposed outside the valve body, and a spool disposed inside the valve body. The valve body is provided with an ultra-clean flow channel and a valve cavity, and a section of the ultra-clean flow channel coincides with a part of the valve cavity in space. The spool is configured to be suspended in the valve cavity under the control of the magnetic control mechanism and to be magnetically controlled to change its position in the valve cavity. When the spool moves to the coincident spatial position, the spool blocks the ultra-clean flow channel. The ultra-clean valve of the present invention is completely sealed inside and outside when controlling the opening and closing of the valve, reducing the risk of medium pollution caused by poor sealing of traditional valves. The spool is in a suspended state in the valve cavity, reducing the debris pollution generated by friction during the opening and closing of the spool. By controlling the magnitude of the current of the magnetic control mechanism, the movement speed and amplitude of the spool can be accurately controlled.

Description

Technical Field

[0001] The present invention belongs to the technical field of ultra-clean valves, and particularly relates to a magnetic levitation spool type ultra-clean valve. Background Art

[0002] In fields such as semiconductors, biopharmaceuticals, and electronic-grade chemicals, the requirements for pollutants such as particulate matter are extremely strict. Moreover, for the cleanliness of the production environment of liquids or gases required for production processes, the requirements are very high. When materials or processes that meet certain cleanliness standards are called ultra-clean materials or ultra-clean processes. In an environment where ultra-clean fluids or corrosive fluids need to be transported, the structure of the valve must be safe and reliable, and its materials need to be corrosion-resistant. It is strictly necessary to prevent the internal medium of the valve from communicating with the outside world. At the same time, no wear and particulate matter should be generated during the opening and closing process of the valve.

[0003] In addition, traditional valves generally have sliding sealing pairs. These components will themselves generate wear and particle shedding during long-term sealing operations, resulting in medium contamination and poor sealing. During long-term and multiple opening and closing processes, external leakage is likely to occur, and even cause the internal medium to communicate with the outside world, further leading to fluid contamination and causing huge financial losses due to major safety hazards. In order to overcome the interference factors in ultra-clean production, the research and development of ultra-clean valves has become one of the most important topics.

[0004] Currently, for the research and development of ultra-clean valves, generally, they are made of clean materials and designed in the form of direct internal and external connection. When the spool switches between the open and closed states, debris contamination may be brought about due to friction. The internal and external connection also makes the sealing performance of the valve a great challenge.

[0005] Therefore, there is an urgent need in this field for a valve body structure with excellent internal and external sealing performance. Summary of the Invention

[0006] Based on the above-mentioned disadvantages and deficiencies existing in the prior art, one of the purposes of the present invention is to at least solve one or more of the above-mentioned problems existing in the prior art. In other words, one of the purposes of the present invention is to provide a magnetic levitation spool type ultra-clean valve that meets one or more of the foregoing requirements.

[0007] In order to achieve the above-mentioned invention purpose, the present invention adopts the following technical solutions:

[0008] A magnetic levitation spool type ultra-clean valve, the ultra-clean valve includes a valve body, a magnetic control mechanism arranged outside the valve body, and a spool arranged inside the valve body;

[0009] The valve body is provided with an ultra-clean flow channel and a valve cavity, and a section of the ultra-clean flow channel coincides with a part of the valve cavity in space; the valve core is configured to be suspended in the valve cavity under the control of a magnetic control mechanism and is magnetically controlled to change its position in the valve cavity; when the valve core moves to the coincident spatial position, the valve core blocks the ultra-clean flow channel.

[0010] As a preferred solution, the ultra-clean flow channel opened in the valve body includes four shunt flow channels and one confluence flow channel, and the valve cavity is a cylindrical cavity; the four shunt flow channels and the confluence flow channel converge at one end of the valve cavity, and when the valve core moves to one end of the valve cavity, the communication between all the shunt flow channels and the confluence flow channel is blocked.

[0011] As a further preferred solution, the confluence flow channel coincides with the central axis of the valve cavity, the central axes of the four shunt flow channels are perpendicular to the central axis of the confluence flow channel, and the central axes of the four shunt flow channels are uniformly arranged at a certain angle.

[0012] As a preferred solution, the valve body includes an inner valve cavity wall, an outer valve cavity wall and a valve seat integrally formed at the valve seat end, and also includes an inner valve cavity cover and an outer valve cavity cover. The inner valve cavity wall encloses the valve cavity, and the valve cavity is closed by the inner valve cavity cover at the valve cover end; the outer valve cavity wall and the inner valve cavity wall enclose an outer valve cavity, and the outer valve cavity is closed by the outer valve cavity cover at the valve cover end;

[0013] The shunt flow channels penetrate through the inner valve cavity wall to connect the inner valve cavity and the outer valve cavity; the outer valve cavity wall is provided with a liquid inlet flow channel to connect the external liquid inlet and the outer valve cavity.

[0014] As a preferred solution, a magnetic control mechanism is provided at each end of the valve body.

[0015] As a preferred solution, the magnetic control mechanism specifically includes a coil circuit board, a coil group and a coil housing.

[0016] As a preferred solution, a shock-absorbing housing is further provided outside the valve body. The shock-absorbing housing is composed of an upper housing and a lower housing, and the upper housing and the lower housing are respectively abutted against one end of the valve body through shock-absorbing springs.

[0017] As a further preferred solution, the shock-absorbing housing is made of permalloy.

[0018] As a preferred solution, the valve core has a positioning protrusion for preventing the valve core from shifting.

[0019] As a preferred solution, the valve body is made of fluorine-containing plastic or fluorine-lined metal.

[0020] Compared with the prior art, the beneficial effects of the present invention are:

[0021] When the ultra-clean valve of the present invention controls the opening and closing of the valve, it is completely sealed inside and outside, reducing the risk of medium pollution caused by poor sealing of traditional valves;

[0022] The spool is in a suspended state in the valve cavity, reducing debris pollution caused by friction during the opening and closing of the spool;

[0023] By controlling the magnitude of the current of the magnetic control mechanism, the moving speed and amplitude of the spool can be precisely controlled. Description of the Drawings

[0024] Figure 1 is a schematic structural diagram of the open valve state of a magnetic levitation spool type ultra-clean valve according to an embodiment of the present invention;

[0025] Figure 2 is a schematic structural diagram of the closed valve state of a magnetic levitation spool type ultra-clean valve according to an embodiment of the present invention. Detailed Embodiments

[0026] In order to more clearly illustrate the embodiments of the present invention, the specific embodiments of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings and other embodiments can be obtained.

[0027] Embodiment:

[0028] A magnetic levitation spool type ultra-clean valve of the present invention has a structural schematic diagram as Figure 1 shown. The main body part includes a valve body 11, an inner valve cavity cover 12 and an outer valve cavity cover 13 fixedly connected to the valve body 11, and a spool 2. Among them, the valve body 11 is an integrally formed double-layer wall structure, with a circular valve seat at the bottom, and an inner valve cavity wall and an outer valve cavity wall that enclose inner and outer cylindrical walls are integrally connected to the circular valve seat. The inner valve cavity cover 12 is buckled on the cylindrical cavity surrounded by the inner valve cavity wall to form a hollow cylindrical inner valve cavity space, and the outer valve cavity cover 13 is buckled on the outer valve cavity surrounded by the outer valve cavity wall on top of the inner valve cavity cover 12 to form an annular cylindrical outer valve cavity space between the inner valve cavity wall and the outer valve cavity wall.

[0029] A diversion flow channel 111 is opened on the inner valve cavity wall, and a confluence flow channel 112 is opened on the valve seat. The diversion flow channel 111 penetrates through the inner valve cavity wall to reach the inner valve cavity, and the confluence flow channel 112 also penetrates through the base to reach the inner valve cavity, so that the imaginary extension lines of the two flow channels overlap in space at the bottom of the inner valve cavity. A spool 2 with a shape that can occupy a part of the inner valve cavity is arranged in the inner valve cavity. A permanent magnet 21 is arranged inside the spool. When the spool moves to the bottom of the inner valve cavity, its shape can completely block the overlapping part of the two flow channels at the bottom of the inner valve cavity, thereby blocking the working medium flow between the diversion flow channel 111 and the confluence flow channel 112.

[0030] A magnetic control mechanism 3 is respectively provided at the bottom of the valve body 11 and the top of the outer valve cavity cover 13. The magnetic control mechanism 3 specifically includes a coil housing 31 buckled on the valve body 11 or the outer valve cavity cover 13, a coil circuit board 32 arranged in the coil housing 31, and a coil group 33. The magnetic control mechanism 3 and the valve core 2 jointly form the opening and closing drive mechanism of the ultra-clean valve. The two coil circuit boards 32 at both ends can adjust the magnetic force generated by the coil group 33, thereby pulling the valve core and controlling the axial displacement of the valve core 2 in the inner valve cavity to realize the opening and closing actions of the ultra-clean valve.

[0031] As an improved scheme, after the confluence flow channel 112 axially penetrates the valve seat, it then turns to the radial direction and penetrates out from the side of the valve seat. And there are four shunt flow channels 111, and their central axes are all perpendicular to the central axis of the confluence flow channel 112 and are evenly staggered by a certain angle at 90 degrees to form four shunt flow channels with equal specifications, so as to make the flow of the working medium more stable and gentle when the valve is opened.

[0032] In order to improve the stability of the ultra-clean valve during operation, a shock-absorbing outer shell is also provided outside the valve body. The shock-absorbing outer shell is formed by buckling and splicing an upper shell 41 and a lower shell 42, and the valve body is buckled inside it. The upper shell 41 and the lower shell 42 are respectively abutted against the coil housing 31 through shock-absorbing springs 43, and the ultra-clean valve body is fixed inside the shock-absorbing outer shell in a shock-absorbing form, so as to protect it from corrosion, vibration damage or external damage. The shock-absorbing springs are clamped between the shell and the coil housing through grooves, and the material is preferably made of stainless steel 1Cr18Ni9Ti. Heat treatment must be carried out before use for 23 hours. Its thermal stability coefficient is good, it does not deform, has no magnetism and is corrosion-resistant.

[0033] Furthermore, the upper shell 41 and the lower shell 42 are preferably made of permalloy. When the nickel content in the permalloy is higher than 40%, the magnetic permeability and electrical conductivity are both very good. It is also possible to use a magnetic shielding material of iron-aluminum alloy containing about 15% - 16% aluminum.

[0034] As a preferred scheme of the above structure, the valve body 11, the inner valve cavity cover 12, the outer valve cavity cover 13, and the valve core 2 are made of fluoroplastics, such as perfluoroalkoxy, polytetrafluoroethylene or polyvinylidene fluoride, or any combination thereof. Or a fluorine lining processing technology is adopted on the inner surface of the high-purity metal. There are many types of fluoroplastics to choose from, including polytetrafluoroethylene (PTFE), perfluoroethylene-propylene copolymer (FEP) and polychlorotrifluoroethylene (PCTFE), etc. The specific situation is determined according to the use environment. The valve core 2 is further preferably made of polytetrafluoroethylene. The surface of the permanent magnet inside it needs to be plated with a metal coating during manufacturing, and the coating is a metal film with a thickness of more than micron level. At the same time, the permanent magnet is embedded in the valve core 2 by injection molding.

[0035] As an improved solution, both axial ends of the valve core 2 have positioning protrusions with a trapezoidal cross-section. When the valve core 2 is located at the top or bottom of the inner valve cavity, the positioning protrusions can be snapped into the confluence flow channel 112, thereby ensuring that the position of the valve core 2 does not shift.

[0036] As another improved solution, a displacement sensor is also provided on the valve core, or a flow meter is installed in the confluence flow channel to monitor the flow rate, so as to realize real-time monitoring of the position or moving speed of the valve core for precise adjustment.

[0037] The structural schematic diagram of the magnetic levitation valve core type ultra-clean valve based on the above structure in the open valve state is as shown Figure 1 before, and when the valve is closed, its structural schematic diagram is as Figure 2 shown:

[0038] When the valve is closed, in the initial state, both coil plates are energized simultaneously to generate an axial repulsive force, suspending the valve core in the inner valve cavity. As the input current of the coil plate below the valve seat decreases, the axial repulsive force of the coil plate upward decreases, causing the permanent magnet to drive the valve core to move downward along the axis of the inner valve cavity until the coil plate below the valve seat is completely de-energized. The repulsive force on the other side moves the valve core to the bottom of the inner valve cavity and abuts against the valve seat, thereby blocking the passage between the shunt flow channel and the confluence flow channel, and switching the ultra-clean valve to the closed valve state.

[0039] The same principle applies when opening the valve.

[0040] Compared with traditional polytetrafluoroethylene solenoid valves, the magnetic levitation valve core type ultra-clean valve can achieve complete internal and external sealing when controlling the opening and closing of the valve, reducing the risk of medium pollution caused by poor sealing in traditional valves. Among them, the valve core is in a suspended state in the inner cavity flow chamber, reducing the debris pollution caused by friction of the valve core in the internal flow chamber. The coil drive assembly of the present invention is small in volume and has a short distance between them, with a fast speed response for opening and closing the valve port. By adjusting the current magnitude of a single or two coil groups, the moving speed and amplitude of the valve core can be controlled, and the opening and closing of the valve core can be controlled more precisely. The coil plates on the valve cover side and the valve seat side of the present invention are both provided with shock-absorbing shells to prevent the coil groups from being damaged and corroded, thereby ensuring the normal operation of the coil groups on both sides of the valve cover and the valve seat.

[0041] It should be noted that the above embodiments only elaborate in detail on the preferred embodiments and principles of the present invention. For those of ordinary skill in the art, according to the idea provided by the present invention, there will be changes in the specific implementation manners, and these changes should also be regarded as the protection scope of the present invention.

Claims

1. A magnetic levitation spool type ultra-clean valve, characterized in that, The ultra-clean valve includes a valve body, a magnetic control mechanism disposed outside the valve body, and a valve core disposed inside the valve body; The valve body is provided with an ultra-clean flow channel and a valve cavity, and a section of the ultra-clean flow channel coincides with a part of the valve cavity in space; the valve core is configured to be suspended in the valve cavity under the control of the magnetic control mechanism and is magnetically controlled to change its position in the valve cavity; when the valve core moves to the coincident spatial position, the valve core blocks the ultra-clean flow channel; the ultra-clean flow channel includes four shunt flow channels and a confluence flow channel, the shunt flow channels penetrate the inner valve cavity wall along the radial direction and extend into the inner valve cavity, the confluence flow channel extends from the valve seat into the inner valve cavity, and the shunt flow channels and the confluence flow channel intersect in the inner valve cavity internal space to form the spatial coincidence; the magnetic control mechanism is provided with one at each end of the valve body; the central axes of the four shunt flow channels are uniformly arranged at a certain angle.

2. The magnetically levitated spool type ultra-clean valve according to claim 1, characterized in that, The valve cavity is a cylindrical cavity; the four shunt flow channels and the confluence flow channel converge at one end of the valve cavity, and when the valve core moves to one end of the valve cavity, the communication between all the shunt flow channels and the confluence flow channel is blocked.

3. The magnetic levitation spool type ultra-clean valve according to claim 2, wherein, The confluence flow channel coincides with the central axis of the valve cavity, the central axes of the four shunt flow channels are perpendicular to the central axis of the confluence flow channel, and the central axes of the four shunt flow channels are uniformly arranged at a certain angle.

4. The magnetic levitation spool type ultra-clean valve according to claim 1, wherein, The valve body includes an inner valve cavity wall, an outer valve cavity wall and a valve seat integrally formed at the valve seat end, and also includes an inner valve cavity cover and an outer valve cavity cover. The inner valve cavity wall encloses the valve cavity, and the valve cavity is closed by the inner valve cavity cover at the valve cover end; the outer valve cavity wall and the inner valve cavity wall enclose an outer valve cavity, and the outer valve cavity is closed by the outer valve cavity cover at the valve cover end; The shunt flow channel penetrates the inner valve cavity wall to connect the inner valve cavity and the outer valve cavity; The outer valve cavity wall is provided with a liquid inlet flow channel to connect the external liquid inlet and the outer valve cavity.

5. The magnetically levitated spool type ultra-clean valve according to claim 1, characterized in that, The magnetic control mechanism specifically includes a coil circuit board, a coil group and a coil housing.

6. The magnetically levitated spool type ultra-clean valve according to claim 1, wherein, An anti-vibration housing is further provided outside the valve body. The anti-vibration housing is composed of an upper housing and a lower housing, and the upper housing and the lower housing are respectively abutted against one end of the valve body through anti-vibration springs.

7. The magnetically levitated spool type ultra-clean valve according to claim 6, wherein The anti-vibration housing is made of permalloy.

8. The magnetically levitated spool type ultra-clean valve according to claim 1, characterized in that, The valve core has a positioning protrusion for preventing the valve core from shifting.

9. The magnetically levitated spool type ultra-clean valve according to claim 1, wherein, The valve body is made of fluorine-containing plastic or fluorine-lined metal.

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