Sensors and electronics

Abstract

The present invention provides a sensor and an electronic device capable of improving detection accuracy. According to an embodiment, the sensor includes a first detection element. The first detection element includes a base, a first supporting member fixed to the base, a conductive first movable member, and a first conductive portion fixed to the base. The first movable member includes first to fifth movable portions. The second movable portion includes a first movable opposing portion opposing the first conductive portion. The first movable opposing portion includes a first movable protrusion protruding toward the first conductive portion. The first conductive portion includes a first conductive opposing portion opposing the first movable opposing portion. The first conductive opposing portion includes a first conductive protrusion protruding toward the first movable opposing portion. The first conductive protrusion overlaps with the first movable protrusion in a first radial direction.

Description

[0001] This application is based upon and claims the benefit of priority from Japanese Patent Application No. 2021-023043 (filing date: February 17, 2021), the entire contents of which are incorporated herein by reference. Technical Field

[0002] Embodiments of the present invention relate to sensors and electronic devices. Background Art

[0003] For example, there are sensors using a MEMS structure. In sensors, it is desired to improve detection accuracy. Summary of the Invention

[0004] Embodiments of the present invention provide a sensor and an electronic device capable of improving detection accuracy.

[0005] Means for solving problems

[0006] According to an embodiment, a sensor includes a first detection element. The first detection element includes a base, a first supporting member fixed to the base, a conductive first movable member, and a first conductive portion fixed to the base. The first movable member includes a first movable portion, a second movable portion, a third movable portion, a fourth movable portion, and a fifth movable portion. In a second direction intersecting the first direction from the base toward the first movable member, the third movable portion is located between the first movable portion and the second movable portion, in the second direction, the fourth movable portion is located between the first movable portion and the third movable portion, and in the second direction, the fifth movable portion is located between the third movable portion and the second movable portion. The first movable portion is supported by the first supporting member. The second movable portion, the third movable portion, the fourth movable portion, and the fifth movable portion are separated from the base. A first width of the first movable portion along the third direction is greater than a fourth width of the fourth movable portion along the third direction and greater than a fifth width of the fifth movable portion along the third direction. The third direction intersects a first plane including the first and second directions. A third width of the third movable portion is smaller than the fourth width and smaller than the fifth width. A second width of the second movable portion along the third direction is greater than the fourth width and greater than the fifth width. A third length of the third movable portion along the second direction is shorter than a fourth length of the fourth movable portion along the second direction and shorter than a fifth length of the fifth movable portion along the second direction. The second movable portion includes a first movable opposing portion that opposes the first conductive portion in a second plane including the second and third directions. The first movable opposing portion includes a first movable protrusion that protrudes toward the first conductive portion. The first conductive portion includes a first conductive opposing portion that opposes the first movable opposing portion. The first conductive opposing portion includes a first conductive protrusion that protrudes toward the first movable opposing portion. The first conductive protrusion overlaps the first movable protrusion in a first radial direction that passes through the third movable portion and along the second plane.

[0007] According to the sensor having the above configuration, a sensor and an electronic device capable of improving detection accuracy can be provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 (a) and Figure 1 (b) is a schematic diagram illustrating the sensor according to the first embodiment.

[0009] Figure 2 (a) and Figure 2 (b) is a schematic diagram illustrating the sensor according to the first embodiment.

[0010] Figure 3 This is a schematic diagram illustrating the sensor according to the first embodiment.

[0011] Figure 4 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0012] Figure 5 (a) and Figure 5 (b) is a schematic plan view illustrating the operation of the sensor according to the first embodiment.

[0013] Figure 6 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0014] Figure 7 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0015] Figure 8 (a) and Figure 8 (b) is a schematic plan view illustrating the operation of the sensor according to the first embodiment.

[0016] Figure 9 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0017] Figure 10 (a) and Figure 10 (b) is a schematic plan view illustrating the operation of the sensor according to the first embodiment.

[0018] Figure 11 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0019] Figure 12 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0020] Figure 13 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0021] Figure 14 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0022] Figure 15 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0023] Figure 16 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0024] Figure 17 This is a flowchart illustrating the operation of the sensor according to the first embodiment.

[0025] Figure 18 This is a flowchart illustrating the operation of the sensor according to the first embodiment.

[0026] Figure 19 It is a schematic cross-sectional view illustrating a sensor according to a second embodiment.

[0027] Figure 20 This is a schematic diagram illustrating an electronic device according to a third embodiment.

[0028] Figure 21 (a)~ Figure 21 (h) is a schematic diagram illustrating an application of an electronic device.

[0029] Figure 22 (a) and Figure 22 (b) is a schematic diagram illustrating a sensor according to a fourth embodiment.

[0030]

Number Description

[0031] 10…1st movable member, 10E…electrode, 10R…cover, 10S…2nd movable member, 10U…1st detection element, 10V…2nd detection element, 10Z…gap, 10a to 10e…1st to 5th movable parts, 10ba, 10bb…1st and 2nd partial regions, 11, 12…1st and 2nd beams, 11A, 12A…1st and 2nd movable conductive parts, 11C, 12C…1st and 2nd connecting regions, 11M, 12M…1st and 2nd movable beams, 11c, 12c…1st and 2nd intermediate parts, 11e, 12e…1st , 2nd end portion, 11f, 12f…1st, 2nd other end portion, 21-24…1st, 4th movable convex portion, 21F-24F…1st, 4th movable opposing portion, 41-44…1st, 4th conductive convex portion, 41F-44F…1st, 4th conductive opposing portion, 50A, 50B…1st, 2nd supporting member, 50S…base, 50Sf…1st surface, 51-54…1st, 4th conductive portion, 51E-54E…electrode, 61, 62…1st, 2nd fixed conductive portion, 61E, 62E…electrode, 65, 66…5th, 6th Conductive portion, 65A, 66A...Conductive portion, 65E, 65AE, 66E, 66AE...Electrode, 70...Control portion, 70M...Storage portion, 75...Processing circuit, 78a, 78b...Wiring, 110-116, 120, 121, 122, 430...Sensor, 170...Circuit control portion, 180...Circuit, 185...Drive device, 310...Electronic device, 400...Road, 410...Slope, 420...Transmitter / receiver, 440...Pier, 450...Main beam, 460...Bridge, 470...River, Dcr1-Dcr4... 1st to 4th conductive radiation directions, Dcx1 to Dcx4…1st to 4th conductive arc directions, Dmr1 to Dmr4…1st to 4th movable radiation directions, Dmx1 to Dmx4…1st to 4th movable arc directions, Dr1 to Dr4…1st to 4th radiation directions, L3 to L5…3rd to 5th lengths, S1…signal, SP…space, ST1, ST2…1st and 2nd voltage application actions, V1, V2…1st and 2nd voltages, sig1, sig2…1st and 2nd signals, w1 to w5…1st to 5th widths, wr1, wr2…length DETAILED DESCRIPTION

[0032] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0033] The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as the actual ones. Even when showing the same parts, the sizes and ratios shown may be different according to the drawings.

[0034] In the present specification and each drawing, the same elements as those described with respect to the already mentioned drawings are denoted by the same reference numerals, and detailed description thereof will be appropriately omitted.

[0035] (First embodiment)

[0036] Figure 1 (a) Figure 1 (b) Figure 2 (a) Figure 2 (b) and Figure 3 This is a schematic diagram illustrating the sensor according to the first embodiment.

[0037] Figure 1 (a) is a top view. Figure 1 (b) Yes Figure 1 (a) is a cross-sectional view along the line X1-X2. Figure 2 (a) is magnification Figure 1 (a) A top view of a portion. Figure 2 (b) Yes Figure 2 (a) Y1-Y2 line cross-sectional view. Figure 3 It is a top view.

[0038] like Figure 1 (a) and Figure 1 As shown in FIG. ( b ), the sensor 110 of the embodiment includes a first detection element 10U. The first detection element 10U includes a base 50S, a first support member 50A, a first movable member 10 , and a first conductive portion 51 .

[0039] like Figure 1 As shown in (a), a control unit 70 may be provided. For example, the sensor 110 may include the control unit 70. The control unit 70 may also be provided separately from the sensor 110. For example, the control unit 70 is electrically connected to the electrode 10E, which is electrically connected to the first movable member 10. The control unit 70 may obtain information from the storage unit 70M. The control unit 70 may store information in the storage unit 70M. The storage unit 70M may be included in the sensor 110. The storage unit 70M may also be provided separately from the sensor 110.

[0040] The first support member 50A is fixed to the base 50S. The first support member 50A may be, for example, insulating.

[0041] The first movable member 10 is conductive. The first movable member 10 may include, for example, a semiconductor containing impurities (e.g., silicon). A portion of the first movable member 10 is supported by the first supporting member 50A. The first movable member 10 is separated from the base 50S. For example, another portion of the first movable member 10 is separated from the base 50S. Figure 1As shown in (b), a gap 10Z is provided between the first surface 50Sf of the base 50S and a portion of the first movable member 10. The first surface 50Sf is, for example, an upper surface.

[0042] The first direction from the base 50S toward the first movable member 10 is referred to as the Z-axis direction. A direction perpendicular to the Z-axis direction is referred to as the X-axis direction. A direction perpendicular to both the Z-axis direction and the X-axis direction is referred to as the Y-axis direction. For example, the XY plane extends along the first surface 50Sf.

[0043] The first movable member 10 includes a first movable portion 10a, a second movable portion 10b, a third movable portion 10c, a fourth movable portion 10d, and a fifth movable portion 10e. In the second direction, the third movable portion 10c is located between the first movable portion 10a and the second movable portion 10b. The second direction intersects the first direction (Z-axis direction) from the base 50S toward the first movable member 10. The second direction is, for example, the X-axis direction.

[0044] In the second direction (e.g., the X-axis direction), the fourth movable portion 10d is located between the first movable portion 10a and the third movable portion 10c. In the second direction, the fifth movable portion 10e is located between the third movable portion 10c and the second movable portion 10b. For example, the first to fifth movable portions 10a to 10e are continuous with each other.

[0045] like Figure 1 As shown in (b), the first movable portion 10a is supported by the first supporting member 50A, and the second movable portion 10b, the third movable portion 10c, the fourth movable portion 10d, and the fifth movable portion 10e are separated from the base 50S.

[0046] like Figure 3 As shown, the width of the first movable portion 10a along the third direction is referred to as the first width w1. The third direction intersects with the first plane including the first direction (Z-axis direction) and the second direction (for example, the X-axis direction). The third direction is, for example, the Y-axis direction. The width of the second movable portion 10b along the third direction is referred to as the second width w2. The width of the third movable portion 10c along the third direction is referred to as the third width w3. The width of the fourth movable portion 10d along the third direction is referred to as the fourth width w4. The width of the fifth movable portion 10e along the third direction is referred to as the fifth width w5. In the case where the width varies along the X-axis direction, the width may be a maximum value.

[0047] The first width w1 is larger than the fourth width w4 and larger than the fifth width w5. The third width w3 is smaller than the fourth width w4 and smaller than the fifth width w5. The second width w2 is larger than the fourth width w4 and larger than the fifth width w5.

[0048] The length of the third movable portion 10c along the second direction (X-axis direction) is referred to as third length L3. The length of the fourth movable portion 10d along the second direction is referred to as fourth length L4. The length of the fifth movable portion 10e along the second direction is referred to as fifth length L5. Third length L3 is shorter than fourth length L4 and shorter than fifth length L5. The third movable portion 10c is, for example, a pivot portion or a hinge portion.

[0049] For example, if the first detection element 10U is subjected to acceleration (or force), the second movable portion 10b can be displaced in the XY plane in a rotational direction (arc direction) around the third movable portion 10c. The second movable portion 10b is, for example, a "proof mass".

[0050] like Figure 3 As shown, the second movable portion 10b includes a first partial region 10ba and a second partial region 10bb. The first partial region 10ba is located between the fifth movable portion 10e and the second partial region 10bb. The length wr1 of the first partial region 10ba along the third direction (e.g., the Y-axis direction) is shorter than the length wr2 of the second partial region 10bb along the third direction. The planar shape of the second movable portion 10b is, for example, a fan-shaped.

[0051] like Figure 2 As shown in (a), in this example, the first movable member 10 includes a first beam 11 and a second beam 12. The first beam 11 includes a first end 11e and a first other end 11f. The first end 11e is connected to the first movable portion 10a. The first other end 11f is connected to the second movable portion 10b. The second beam 12 includes a second end 12e and a second other end 12f. The second end 12e is connected to the first movable portion 10a. The second other end 12f is connected to the second movable portion 10b. In the third direction (Y-axis direction), the third movable portion 10c is located between the first beam 11 and the second beam 12.

[0052] As already explained, the second movable portion 10b displaces in response to the acceleration applied to the first detection element 10U. The displacement of the second movable portion 10b can change the difference between the first resonant frequency of the first beam 11 and the second resonant frequency of the second beam 12. For example, depending on the acceleration, compressive stress and tensile stress are applied to the first beam 11, while compressive stress and tensile stress are applied to the second beam 12. This causes the resonant frequencies of these beams to change. In one example, acceleration can be detected by detecting these changes in resonant frequencies.

[0053] like Figure 2As shown in (a), the first beam 11 is included in the first movable beam 11M. The second beam 12 is included in the second movable beam 12M. For example, the first movable beam 11M includes a first movable conductive portion 11A and a first movable connecting portion 11C. The first beam 11 includes a first intermediate portion 11c between a first end portion 11e and a first other end portion 11f. The first movable connecting portion 11C connects the first intermediate portion 11c and the first movable conductive portion 11A to each other. For example, the second movable beam 12M includes a second movable conductive portion 12A and a second movable connecting portion 12C. The second beam 12 includes a second intermediate portion 12c between a second end portion 12e and a second other end portion 12f. The second movable connecting portion 12C connects the second intermediate portion 12c and the second movable conductive portion 12A to each other.

[0054] like Figure 2 As shown, in this example, a first fixed conductive portion 61 and a second fixed conductive portion 62 are provided. These fixed conductive portions can be fixed to the base 50S, for example. The first fixed conductive portion 61 is opposed to the first movable conductive portion 11A, for example, in the Y-axis direction. The second fixed conductive portion 62 is opposed to the second movable conductive portion 12A, for example, in the Y-axis direction. For example, the first fixed conductive portion 61 and the second fixed conductive portion 62 can detect the displacement of the first movable beam 11M and the second movable beam 12M. The first fixed conductive portion 61 and the second fixed conductive portion 62 can function as detection electrodes, for example.

[0055] like Figure 2 As shown, in this example, a fifth conductive portion 65, a sixth conductive portion 66, a conductive portion 65A, and a conductive portion 66A are provided. These conductive portions can be fixed to the base 50S. The fifth conductive portion 65 and the conductive portion 65A may, for example, face the first movable conductive portion 11A in the Y-axis direction. The fifth conductive portion 65 and the conductive portion 65A may, for example, face the first beam 11 in the Y-axis direction. The sixth conductive portion 66 and the conductive portion 66A may, for example, face the second movable conductive portion 12A in the Y-axis direction. The fifth conductive portion 66 and the conductive portion 66A may, for example, face the second beam 12 in the Y-axis direction. For example, the first movable beam 11M can vibrate under the action of a voltage applied to the fifth conductive portion 65 and the conductive portion 65A. For example, the second movable beam 12M can vibrate under the action of a voltage applied to the sixth conductive portion 66 and the conductive portion 66A. The fifth conductive portion 65 , the conductive portion 65A, the sixth conductive portion 66 , and the conductive portion 66A can function as at least one of a driving electrode and an adjustment electrode, for example.

[0056] like Figure 2As shown in FIG. 1 , the control unit 70 is electrically connected to the first fixed conductive portion 61, the second fixed conductive portion 62, the fifth conductive portion 65, the conductive portion 65A, the sixth conductive portion 66, and the conductive portion 66A. The electrical connection is established, for example, via the electrodes 61E, 62E, 65E, 65AE, 66E, and 66AE.

[0057] like Figure 2 As shown in (a), the length of the first movable conductive portion 11A along the X-axis is longer than the length of the first movable connecting portion 11C along the X-axis. The length of the second movable conductive portion 12A along the X-axis is longer than the length of the second movable connecting portion 12C along the X-axis. This configuration increases the width of the region where the movable conductive portion and the fixed conductive portion face each other, enabling higher-precision detection.

[0058] Figure 1 The first conductive portion 51 shown in (a) is fixed to the base 50S. Figure 1 As shown in FIG. 1 (a), the first conductive portion 51 faces the second movable portion 10b in the XY plane. For example, the second movable portion 10b includes a first movable opposing portion 21F. The first movable opposing portion 21F faces the first conductive portion 51 in a second plane (XY plane) that includes the second and third directions. The first movable opposing portion 21F includes a first movable protrusion 21 that protrudes toward the first conductive portion 51.

[0059] like Figure 1 As shown in (a), the first conductive portion 51 includes a first conductive opposing portion 41F. The first conductive opposing portion 41F faces the first movable opposing portion 21F in the XY plane. The first conductive opposing portion 41F includes a first conductive protrusion 41 that protrudes toward the first movable opposing portion 21F.

[0060] The first conductive protrusion 41 overlaps with the first movable protrusion 21 in the first radiation direction Dr1. The first radiation direction Dr1 is a direction passing through the third movable portion 10c and along the second plane (XY plane).

[0061] like Figure 1 As shown in (a), for example, the first movable opposing portion 21F includes a plurality of first movable protrusions 21. The areas between the plurality of first movable protrusions 21 are recessed. The first movable opposing portion 21F includes a plurality of recessed and projecting portions. The first conductive opposing portion 41F includes a plurality of first conductive protrusions 41. The areas between the plurality of first conductive protrusions 41 are recessed. The first conductive opposing portion 41F includes a plurality of recessed and projecting portions.

[0062] One of the plurality of first conductive protrusions 41 is located between one of the plurality of first movable protrusions 21 and another of the plurality of first movable protrusions 21 in the first radial direction Dr1. One of the plurality of first movable protrusions 21 is located between one of the plurality of first conductive protrusions 41 and another of the plurality of first conductive protrusions 41 in the first radial direction Dr1. The plurality of first movable protrusions 21 and the plurality of first conductive protrusions 41 form a comb-teeth-shaped electrode pair. This comb-teeth-shaped electrode pair enables, for example, more effective control of the second movable portion 10b.

[0063] like Figure 1 As shown in (a), the comb-shaped electrode pairs are arranged along the first radial direction Dr1 passing through the third movable portion 10c. For example, the second movable portion 10b can easily rotate around the third movable portion 10c. For example, when a voltage is applied between the first conductive portion 51 and the second movable portion 10b, the second movable portion 10b can stably displace along the rotational direction (arc direction) around the third movable portion 10c. The rotation (displacement) of the second movable portion 10b with acceleration can be obtained more stably. For example, a sensor with improved detection accuracy can be provided.

[0064] like Figure 1 As shown in (a), the control unit 70 is electrically connected to the first conductive part 51. In this example, the control unit 70 is electrically connected to the first conductive part 51 via the electrode 51E. On the other hand, the control unit 70 is electrically connected to the first movable member 10 via the electrode 10E, for example. The control unit 70 can apply a voltage between the first conductive part 51 and the second movable part 10b. The control unit 70 can displace the second movable part 10b relative to the first conductive part 51 by the voltage. For example, the control unit 70 can control the voltage applied between the first conductive part 51 and the second movable part 10b so as to control the difference in the resonant frequency of the two beams. In this way, acceleration can be detected with high precision. An example of detection will be described later.

[0065] like Figure 1 As shown in (a), the plurality of first movable protrusions 21 are arranged along the first movable radiation direction Dmr1. The first movable radiation direction Dmr1 passes through the third movable portion 10c and is along the second plane (XY plane). The plurality of first conductive protrusions 41 are arranged along the first conductive radiation direction Dcr1. The first conductive radiation direction Dcr1 passes through the third movable portion 10c and is along the second plane (XY plane). The first movable radiation direction Dmr1 may be substantially parallel to the first conductive radiation direction Dcr1. Alternatively, the first movable radiation direction Dmr1 and the first conductive radiation direction Dcr1 may be substantially parallel to the first radiation direction Dr1.

[0066] like Figure 1As shown in FIG. 1A , the first detection element 10U may further include a second conductive portion 52. The second conductive portion 52 is fixed to the base 50S. The second movable portion 10b includes a second movable opposing portion 22F. The second movable opposing portion 22F opposes the second conductive portion 52 in the second plane (XY plane). The second movable opposing portion 22F includes a second movable protrusion 22 that protrudes toward the front second conductive portion 52.

[0067] like Figure 1 As shown in (a), the second conductive portion 52 includes a second conductive opposing portion 42F. The second conductive opposing portion 42F opposes the second movable opposing portion 22F. The second conductive opposing portion 42F includes a second conductive protrusion 42 that protrudes toward the second movable opposing portion 22F. The second conductive protrusion 42 overlaps the second movable protrusion 22 in the second radial direction Dr2. The second radial direction Dr2 passes through the third movable portion 10c and is along the second plane (XY plane).

[0068] like Figure 1 As shown in (a), for example, the second movable opposing portion 22F includes a plurality of second movable protrusions 22. The areas between the plurality of second movable protrusions 22 are recessed. The second movable opposing portion 22F includes a plurality of recessed and projecting portions. The second conductive opposing portion 42F includes a plurality of second conductive protrusions 42. The areas between the plurality of second conductive protrusions 42 are recessed. The second conductive opposing portion 42F includes a plurality of recessed and projecting portions.

[0069] One of the plurality of second conductive protrusions 42 is located between one of the plurality of second movable protrusions 22 and another of the plurality of second movable protrusions 22 in the second radial direction Dr2. One of the plurality of second movable protrusions 22 is located between one of the plurality of second conductive protrusions 42 and another of the plurality of second conductive protrusions 42 in the second radial direction Dr2. The plurality of second movable protrusions 22 and the plurality of first conductive protrusions 42 form a comb-teeth-shaped electrode pair. This comb-teeth-shaped electrode pair enables, for example, more effective control of the second movable portion 10b.

[0070] The comb-shaped electrode pairs are arranged along the second radial direction Dr2 passing through the third movable portion 10c. For example, the second movable portion 10b can easily rotate about the third movable portion 10c. For example, when a voltage is applied between the second conductive portion 52 and the second movable portion 10b, the second movable portion 10b can stably displace in the rotational direction (arc direction) about the third movable portion 10c. This allows for more stable rotation (displacement) of the second movable portion 10b in response to acceleration. For example, a sensor with improved detection accuracy can be provided.

[0071] For example, the second radiation direction Dr2 intersects with the first radiation direction Dr1. Figure 1As shown in FIG. 5A , the control unit 70 is electrically connected to the second conductive portion 52 via the electrode 52E. For example, as described later, by switching the voltage applied to the first conductive portion 51 and the voltage applied to the second conductive portion 52, the second movable portion 10b can be easily displaced in a desired direction along the rotational direction.

[0072] like Figure 1 As shown in (a), the plurality of second movable protrusions 22 are arranged along the second movable radiation direction Dmr2. The second movable radiation direction Dmr2 passes through the third movable portion 10c and is along the second plane (XY plane). The plurality of second conductive protrusions 42 are arranged along the second conductive radiation direction Dcr2. The second conductive radiation direction Dcr2 passes through the third movable portion 10c and is along the second plane (XY plane). The second movable radiation direction Dmr2 may be substantially parallel to the second conductive radiation direction Dcr2. Alternatively, the second movable radiation direction Dmr2 and the second conductive radiation direction Dcr2 may be substantially parallel to the second radiation direction Dr2.

[0073] Figure 4 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0074] like Figure 4 As shown, the length of the plurality of first movable protrusions 21 in the protruding direction can be changed according to the distance of the plurality of first movable protrusions 21 from the third movable part 10c. For example, the direction along the second plane (XY plane) and intersecting with the first movable radial direction Dmr1 is referred to as the first movable arc direction Dmx1. The length of the plurality of first movable protrusions 21 along the first movable arc direction Dmx1 becomes longer as the distance from the third movable part 10c becomes longer. For example, the distance between one of the plurality of first movable protrusions 21 and the third movable part 10c is longer than the distance between another of the plurality of first movable protrusions 21 and the third movable part 10c. The length of the above-mentioned one of the plurality of first movable protrusions 21 along the first movable arc direction Dmx1 is longer than the length of the above-mentioned other of the plurality of first movable protrusions 21 along the first movable arc direction Dmx1. The length in the protruding direction may also be the length along the arc.

[0075] like Figure 4 As shown, the direction in the second plane (XY plane) that intersects the first conductive radiation direction Dcr1 is referred to as the first conductive arc direction Dcx1. The distance between one of the plurality of first conductive protrusions 41 and the third movable portion 10c is longer than the distance between another of the plurality of first conductive protrusions 41 and the third movable portion 10c. The length of the one of the plurality of first conductive protrusions 41 along the first conductive arc direction Dcx1 is longer than the length of the other of the plurality of first conductive protrusions 41 along the first conductive arc direction Dcx1. The distance may also be along the length of an arc.

[0076] The second movable portion 10 b can be controlled more effectively by the plurality of first movable protrusions 21 and the plurality of first conductive protrusions 41 .

[0077] For example, the length of the plurality of first movable protrusions 21 along the first movable arc direction Dmx1 increases in proportion to the distance between the plurality of first movable protrusions 21 and the third movable portion 10b. For example, the length of the plurality of first conductive protrusions 41 along the first conductive arc direction Dcx1 increases in proportion to the distance between the plurality of first conductive protrusions 41 and the third movable portion 10c. This allows for more effective control of the second movable portion 10b. The length of the protrusions may also be the length along the arc.

[0078] like Figure 4 As shown, for example, the direction along the second plane (XY plane) and intersecting the second movable radial direction Dmr2 is defined as the second movable arc direction Dmx2. For example, the distance between one of the plurality of second movable protrusions 22 and the third movable portion 10c is longer than the distance between another of the plurality of second movable protrusions 22 and the third movable portion 10c. The length of one of the plurality of second movable protrusions 22 along the second movable arc direction Dmx2 is longer than the length of another of the plurality of second movable protrusions 22 along the second movable arc direction Dmx2. The distance may also be the length along the arc.

[0079] like Figure 4 As shown, the direction along the second plane (XY plane) and intersecting the second conductive radiation direction Dcr2 is referred to as the second conductive arc direction Dcx2. The distance between one of the plurality of second conductive protrusions 42 and the third movable portion 10c is longer than the distance between another of the plurality of second conductive protrusions 42 and the third movable portion 10c. The length of the one of the plurality of second conductive protrusions 42 along the second conductive arc direction Dcx2 is longer than the length of the other of the plurality of second conductive protrusions 42 along the second conductive arc direction Dcx2.

[0080] like Figure 4 As shown, at least a portion of the second movable portion 10 b is located between the first conductive portion 51 and the second conductive portion 52 .

[0081] Figure 5 (a) and Figure 5 (b) is a schematic plan view illustrating the operation of the sensor according to the first embodiment.

[0082] like Figure 5As shown in FIG. 1 (a), for example, in the first voltage application operation ST1, the control unit 70 applies a first voltage V1 between the first movable member 10 and the second conductive portion 52. In the first voltage application operation ST1, the control unit 70 applies a second voltage V2 between the first movable member 10 and the first conductive portion 51. The absolute value of the second voltage V2 is smaller than the absolute value of the first voltage V1. The second voltage V2 can be, for example, a ground voltage. This first voltage application operation ST1 causes the second movable portion 10b to rotate, for example, clockwise.

[0083] like Figure 5 As shown in FIG. 2 (b), for example, in the second voltage application operation ST2, the control unit 70 applies the first voltage V1 between the first movable member 10 and the first conductive portion 51. In the second voltage application operation ST2, the control unit 70 applies the second voltage V2 between the first movable member 10 and the second conductive portion 51. This second voltage application operation ST2 causes the second movable portion 10b to rotate, for example, counterclockwise.

[0084] The value of the first voltage V1 can be set to, for example, a value equal to or greater than a voltage that cancels the displacement of the second movable portion 10 b due to the acceleration received by the first detection element 10U.

[0085] Several examples of sensors according to the embodiments are described below. In the following drawings, for easier viewing, portions of the first movable beam 11M, a portion of the second movable beam 12M, the first fixed conductive portion 61, the second fixed conductive portion 62, the fifth conductive portion 65, the conductive portion 65A, the sixth conductive portion 66, the conductive portion 66A, the electrodes 61E, 62E, 65E, 65AE, 66E, and 66AE are omitted.

[0086] Figure 6 and Figure 7 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0087] like Figure 6 As shown, in the sensor 111 of the embodiment, the first detecting element 10U includes a third conductive portion 53 in addition to the first conductive portion 51 and the second conductive portion 52. The third conductive portion 53 is fixed to the base 50S. The second movable portion 10b includes a third movable opposing portion 23F. The third movable opposing portion 23F opposes the third conductive portion 53 in the second plane (XY plane). The third movable opposing portion 23F includes a third movable protrusion 23 that protrudes toward the third conductive portion 53.

[0088] The third conductive portion 53 includes a third conductive opposing portion 43F. The third conductive opposing portion 43F opposes the third movable opposing portion 23F. The third conductive opposing portion 43F includes a third conductive protrusion 43 that protrudes toward the third movable opposing portion 23F. The third conductive protrusion 43 overlaps the third movable protrusion 23 in the third radial direction Dr3. The third radial direction Dr3 passes through the third movable portion 10c and is along the second plane (XY plane).

[0089] A portion of the second movable portion 10 b is located between the first conductive portion 51 and the third conductive portion 53 in the rotation direction (arc direction) centered on the third movable portion 10 c .

[0090] In this example, the first detection element 10U further includes a fourth conductive portion 54. The fourth conductive portion 54 is fixed to the base 50S. The second movable portion 10b includes a fourth movable opposing portion 24F. The fourth movable opposing portion 24F faces the fourth conductive portion 54 in the second plane (XY plane). The fourth movable opposing portion 24F includes a fourth movable protrusion 24 that protrudes toward the fourth conductive portion 54.

[0091] The fourth conductive portion 54 includes a fourth conductive opposing portion 44F. The fourth conductive opposing portion 44F faces the fourth movable opposing portion 24F. The fourth conductive opposing portion 44F includes a fourth conductive protrusion 44 that protrudes toward the fourth movable opposing portion 24F.

[0092] The fourth conductive protrusion 44 overlaps with the fourth movable protrusion 24 in the fourth radial direction Dr4. The fourth radial direction Dr4 passes through the third movable portion 10c and is along the second plane (XY plane). A portion of the second movable portion 10b is located between the second conductive portion 52 and the fourth conductive portion 54 in the rotational direction (arc direction) centered on the third movable portion 10c. For example, the third radial direction Dr3 is located between the first radial direction Dr1 and the second radial direction Dr2. The fourth radial direction Dr4 is located between the third radial direction Dr3 and the second radial direction Dr2.

[0093] like Figure 6 As shown, for example, the plurality of third movable protrusions 23 are arranged along the third movable radial direction Dmr3. The third movable radial direction Dmr3 passes through the third movable portion 10c and is along the second plane (XY plane). The plurality of third conductive protrusions 43 are arranged along the third conductive radial direction Dcr3. The third conductive radial direction Dcr3 passes through the third movable portion 10c and is along the second plane (XY plane). The third movable radial direction Dmr3 may be substantially parallel to the third conductive radial direction Dcr3. Alternatively, the third movable radial direction Dmr3 and the third conductive radial direction Dcr3 may be substantially parallel to the third radial direction Dr3.

[0094] like Figure 6 As shown, for example, a plurality of fourth movable protrusions 24 are arranged along a fourth movable radiation direction Dmr4. The fourth movable radiation direction Dmr4 passes through the third movable portion 10c and is along the second plane (XY plane). A plurality of fourth conductive protrusions 44 are arranged along a fourth conductive radiation direction Dcr4. The fourth conductive radiation direction Dcr4 passes through the third movable portion 10c and is along the second plane (XY plane). The fourth movable radiation direction Dmr4 may be substantially parallel to the fourth conductive radiation direction Dcr4. The fourth movable radiation direction Dmr4 and the fourth conductive radiation direction Dcr4 may be substantially parallel to the fourth radiation direction Dr4. For example, the fourth radiation direction Dr4 intersects with the third radiation direction Dr3.

[0095] like Figure 7 As shown, for example, the direction along the second plane (XY plane) and intersecting the third movable radial direction Dmr3 is referred to as the third movable arc direction Dmx3. For example, the distance between one of the plurality of third movable protrusions 23 and the third movable portion 10c is longer than the distance between another of the plurality of third movable protrusions 23 and the third movable portion 10c. The length of one of the plurality of third movable protrusions 23 along the third movable arc direction Dmx3 is longer than the length of another of the plurality of third movable protrusions 23 along the third movable arc direction Dmx3. The distance may also be the length along the arc.

[0096] like Figure 7 As shown, for example, the direction along the second plane (XY plane) and intersecting the third conductive radiation direction Dcr3 is referred to as the third conductive arc direction Dcx3. For example, the distance between one of the plurality of third conductive protrusions 43 and the third movable portion 10c is longer than the distance between another of the plurality of third conductive protrusions 43 and the third movable portion 10c. The length of one of the plurality of third conductive protrusions 43 along the third conductive arc direction Dcx3 is longer than the length of another of the plurality of third conductive protrusions 43 along the third conductive arc direction Dcx3. The distance may also be the length along the arc.

[0097] like Figure 7 As shown, for example, the direction along the second plane (XY plane) and intersecting the fourth movable radial direction Dmr4 is defined as the fourth movable arc direction Dmx4. For example, the distance between one of the plurality of fourth movable protrusions 24 and the third movable portion 10c is longer than the distance between another of the plurality of fourth movable protrusions 24 and the third movable portion 10c. The length of one of the plurality of fourth movable protrusions 24 along the fourth movable arc direction Dmx4 is longer than the length of another of the plurality of fourth movable protrusions 24 along the fourth movable arc direction Dmx4. The distance may also be the length along the arc.

[0098] like Figure 7 As shown, for example, the direction along the second plane (XY plane) and intersecting the fourth conductive radiation direction Dcr4 is referred to as the fourth conductive arc direction Dcx4. For example, the distance between one of the plurality of fourth conductive protrusions 44 and the third movable portion 10c is longer than the distance between another of the plurality of fourth conductive protrusions 44 and the third movable portion 10c. The length of one of the plurality of fourth conductive protrusions 44 along the fourth conductive arc direction Dcx4 is longer than the length of another of the plurality of fourth conductive protrusions 44 along the fourth conductive arc direction Dcx4. The distance may also be the length along the arc.

[0099] like Figure 7 As shown, at least a portion of the third conductive portion 53 is located between the first conductive portion 51 and the second conductive portion 52 . At least a portion of the fourth conductive portion 54 is located between the third conductive portion 53 and the second conductive portion 52 .

[0100] like Figure 6 As shown, in the sensor 111 , the third conductive portion 53 is located between the third movable opposing portion 23F and the first conductive portion 51 . The fourth conductive portion 54 is located between the fourth movable opposing portion 24F and the fourth conductive portion 54 .

[0101] Figure 8 (a) and Figure 8 (b) is a schematic plan view illustrating the operation of the sensor according to the first embodiment.

[0102] like Figure 8 As shown in (a), in the sensor 111, the third conductive portion 53 is electrically connected to the first conductive portion 51. The fourth conductive portion 54 is electrically connected to the second conductive portion 52. The control unit 70 is electrically connected to the third conductive portion 53, for example, via the electrode 53E. The control unit 70 is electrically connected to the fourth conductive portion 54, for example, via the electrode 54E.

[0103] like Figure 8 As shown in FIG. 1A , for example, in the first voltage application operation ST1, the control unit 70 applies a first voltage V1 between the first movable member 10 and the second conductive portion 52, and between the first movable member 10 and the fourth conductive portion 54. In the first voltage application operation ST1, the control unit 70 applies a second voltage V2 between the first movable member 10 and the first conductive portion 51, and between the first movable member 10 and the third conductive portion 53. This first voltage application operation ST1 causes the second movable portion 10b to rotate, for example, clockwise.

[0104] like Figure 8As shown in FIG. 2( b ), for example, in the second voltage application operation ST2, the control unit 70 applies the first voltage V1 between the first movable member 10 and the first conductive portion 51, and between the first movable member 10 and the third conductive portion 53. In the second voltage application operation ST2, the control unit 70 applies the second voltage V2 between the first movable member 10 and the second conductive portion 52, and between the first movable member 10 and the fourth conductive portion 54. This second voltage application operation ST2 causes the second movable member 10b to rotate, for example, counterclockwise.

[0105] Figure 9 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0106] like Figure 9 As shown, in the sensor 112 of the embodiment, the first detection element 10U includes a first conductive portion 51, a second conductive portion 52, a third conductive portion 53, and a fourth conductive portion 54. The first movable member 10 includes a first movable opposing portion 21F, a second movable opposing portion 22F, a third movable opposing portion 23F, and a fourth movable opposing portion 24F. In the sensor 112, the third movable opposing portion 23F is located between the first conductive portion 51 and the third conductive portion 53. The fourth movable opposing portion 24F is located between the second conductive portion 52 and the fourth conductive portion 54. The remaining configuration of the sensor 112 may be the same as that of the sensor 111.

[0107] Figure 10 (a) and Figure 10 (b) is a schematic plan view illustrating the operation of the sensor according to the first embodiment.

[0108] like Figure 10 As shown in FIG. 1( a ), in the sensor 112 , the third conductive portion 53 is electrically connected to the second conductive portion 52 , and the fourth conductive portion 54 is electrically connected to the first conductive portion 51 .

[0109] like Figure 10 As shown in FIG. 1A , for example, in the first voltage application operation ST1, the control unit 70 applies a first voltage V1 between the first movable member 10 and the second conductive portion 52, and between the first movable member 10 and the third conductive portion 53. In the first voltage application operation ST1, the control unit 70 applies a second voltage V2 between the first movable member 10 and the first conductive portion 51, and between the first movable member 10 and the fourth conductive portion 54. This first voltage application operation ST1 causes the second movable portion 10b to rotate, for example, clockwise.

[0110] like Figure 10As shown in FIG. 2( b ), for example, in the second voltage application operation ST2, the control unit 70 applies the second voltage V2 between the first movable member 10 and the first conductive portion 51, and between the first movable member 10 and the fourth conductive portion 54. In the second voltage application operation ST2, the control unit 70 applies the second voltage V2 between the first movable member 10 and the second conductive portion 52, and between the first movable member 10 and the third conductive portion 53. This second voltage application operation ST2 causes the second movable member 10b to rotate, for example, counterclockwise.

[0111] Like the sensors 111 and 112 , the second movable portion 10 b exists around at least a portion of the third conductive portion 53 and the fourth conductive portion 54 in the second plane (XY plane).

[0112] Figure 11 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0113] like Figure 11 As shown, in the sensor 113 of the embodiment, the first detection element 10U also includes a first conductive portion 51, a second conductive portion 52, a third conductive portion 53, and a fourth conductive portion 54. A portion of the third conductive portion 53 may not be surrounded by the second movable portion 10b. A portion of the fourth conductive portion 54 may not be surrounded by the second movable portion 10b. The remaining configuration of the sensor 113 may be the same as that of the sensor 111.

[0114] Figure 12 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0115] like Figure 12 As shown, in sensor 114 of the embodiment, the first detection element 10U also includes a first conductive portion 51, a second conductive portion 52, a third conductive portion 53, and a fourth conductive portion 54. A portion of the third conductive portion 53 may not be surrounded by the second movable portion 10b. A portion of the fourth conductive portion 54 may not be surrounded by the second movable portion 10b. The remaining configuration of sensor 114 may be the same as that of sensor 112. Similarly, detection accuracy can be improved in sensors 111 to 114.

[0116] Figure 13 and Figure 14 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0117] like Figure 13 and Figure 14As shown, in the sensors 115 and 116 of the embodiment, the first movable opposing portion 21F includes the first movable protrusion 21, and the first conductive opposing portion 41F includes the first conductive protrusion 41. The second movable opposing portion 22F includes the second movable protrusion 22, and the second conductive opposing portion 42F includes the second conductive protrusion 42. In the sensors 115 and 116, detection accuracy can also be improved.

[0118] Figure 15 and Figure 16 It is a schematic plan view illustrating the sensor according to the first embodiment.

[0119] like Figure 15 and Figure 16 As shown, in the sensors 121 and 122 of the embodiment, the second movable portion 10b also includes the first movable opposing portion 21F and the second movable opposing portion 22F. The first conductive portion 51 includes the first conductive opposing portion 41F. The second conductive portion 52 includes the second conductive opposing portion 42F.

[0120] The first movable opposing portion 21F faces the first conductive portion 51 in the second plane (XY plane). The first conductive opposing portion 41F faces the first movable opposing portion 21F. The first movable opposing portion 21F and the first conductive opposing portion 41F extend along the first radial direction Dr1. The first radial direction Dr1 passes through the third movable portion 10c and along the second plane.

[0121] The second movable opposing portion 22F opposes the second conductive portion 52 in the second plane (XY plane). The second conductive opposing portion 42F opposes the second movable opposing portion 22F. The second movable opposing portion 22F and the second conductive opposing portion 42F extend along the second radial direction Dr2. The second radial direction Dr2 passes through the third movable portion 10c and extends along the second plane. Similarly, detection accuracy can be improved in sensors 121 and 122.

[0122] As described above, in the sensor of the embodiment, the rotation (displacement) of the second movable part 10b with acceleration can be obtained more stably. For example, if the second movable part 10b rotates, one of the tensile stress and the compressive stress is applied to one side of the first movable beam 11M and the second movable beam 12M, and the other of the tensile stress and the compressive stress is applied to the other side of the first movable beam 11M and the second movable beam 12M. The polarity of the stress is based on the direction of rotation. According to the stress, the difference between the first resonant frequency of the first beam 11 and the second resonant frequency of the second beam 12 changes. In one example, in the case of clockwise rotation, the first resonant frequency increases and the second resonant frequency decreases. For example, in the case of counterclockwise rotation, the first resonant frequency decreases and the second resonant frequency increases. By stable rotation, for example, a stable change in the resonant frequency is obtained. Thus, for example, a sensor that can improve detection accuracy can be provided.

[0123] Hereinafter, an example of the detection operation of the sensor according to the embodiment will be described.

[0124] For example, the control unit 70 (see Figure 1 (a)) The first operation can be performed. In the first operation, the control unit 70 obtains the first signal sig1 (see Figure 2 (a)) and the second signal sig2 obtained from the second fixed conductive portion 62 (see Figure 2 (a)). The control unit 70 can output information related to the acceleration applied to the first detection element 10U and the temperature of the first detection element 10U based on the first signal sig1 and the second signal sig2. The first action may also include outputting temperature-compensated acceleration. Depending on the embodiment, a sensor that can improve detection accuracy can be provided. The control unit 70 may also include a processing circuit (e.g., a circuit) such as a processing unit (e.g., a CPU: Central Processing Unit).

[0125] The second movable portion 10b generates a rotational displacement in response to the acceleration applied to the first detection element 10U. The first operation includes, for example, the first voltage application operation ST1 and the second voltage application operation ST2 described above. The first voltage application operation ST1 and the second voltage application operation ST2 can reduce (e.g., offset) the rotational displacement of the second movable portion 10b caused by the acceleration. Based on the voltages applied during the first voltage application operation ST1 and the second voltage application operation ST2, information related to the acceleration applied to the first detection element 10U and the temperature of the first detection element 10U is obtained.

[0126] In one example, the first action may include maintaining the rotational displacement of the second movable portion 10b at substantially zero. Acceleration is detected by measuring the voltage that maintains the rotational displacement at substantially zero. When performing this first action, for example, when a large acceleration is applied to the first detection element 10U, measurement can be performed without the second movable portion 10b contacting other side walls. This increases the range of measurable acceleration magnitudes.

[0127] For example, the first operation includes deriving information related to acceleration and temperature based on the difference and sum between the first resonant frequency of the first movable beam 11M and the second resonant frequency of the second movable beam 12M. The first resonant frequency is obtained from the first signal sig1, and the second resonant frequency is obtained from the second signal sig2.

[0128] For example, a PLL (phase locked loop) circuit is used to process the signal to obtain the resonant frequency. For example, the PLL circuit may be included in the control unit 70. The PLL circuit may also be provided separately from the control unit 70.

[0129] For example, the first operation may include deriving information related to acceleration and temperature based on data related to the relationship between the first resonant frequency, the second resonant frequency, multiple accelerations, multiple temperatures, the first voltage V1, and the second voltage V2. This data is stored in the storage unit 70M (see Figure 1 (a) The control unit 70 acquires data from the storage unit 70M storing data. For example, the first operation may include deriving information related to acceleration and temperature based on the acquired data.

[0130] Figure 17 This is a flowchart illustrating the operation of the sensor according to the first embodiment.

[0131] Figure 17 At least a part of the operations shown is performed by the control unit 70 .

[0132] like Figure 17 As shown, data related to the relationship between the resonant frequencies (first resonant frequency f1 and second resonant frequency f2), the first voltage V1, the second voltage V2, the acceleration G, and the temperature T is acquired (step S105). As already described, this data is acquired in advance. For example, the control unit 70 can acquire data stored in the storage unit 70M.

[0133] like Figure 17 As shown, the control unit 70 obtains the first signal sig1 obtained from the first fixed conductive portion 61 and the second signal sig2 obtained from the second fixed conductive portion 62 (step S110 ).

[0134] The control unit 70 derives the first resonance frequency f1 of the first movable beam 11M based on the first signal sig1 and derives the second resonance frequency f2 of the second movable beam 12M based on the second signal sig2 (step S120 ). As already described, processing using the PLL circuit and the like is performed.

[0135] The control unit 70 calculates the difference between the first resonant frequency f1 and the second resonant frequency f2 (resonant frequency difference) and the sum of the first resonant frequency f1 and the second resonant frequency f2 (resonant frequency sum) based on the first resonant frequency f1 and the second resonant frequency f2 (step S130 ).

[0136] The control unit 70 calculates the change in the difference (resonance frequency difference) (step S140). The change includes, for example, the difference between the difference obtained in step S130 and the initial difference. The change includes, for example, the difference between the difference obtained in the latest step S130 and the difference obtained in the previous step S130.

[0137] The control unit 70 determines whether the absolute value of the change is less than or equal to the reference value (step S150). If the absolute value of the change is greater than the reference value, the first voltage V1 and the second voltage V2 are changed (step S155), and the process proceeds to step S110. Steps S110 to S150 are repeated until the absolute value of the change is less than or equal to the reference value.

[0138] If the absolute value of the change is less than the reference value, the process proceeds to step S160. In step S160, the control unit 70 estimates the acceleration G and the temperature T based on the first voltage V1 and the second voltage V2 (the voltages during the first voltage application operation ST1 and the second voltage application operation ST2). The control unit 70 outputs information related to the acceleration G and the temperature T (step S170).

[0139] In this way, in the embodiment, acceleration G and temperature T can be output. In the embodiment, the above-mentioned first movable relative portion 21F and first conductive relative portion 41F are provided. Thus, the second movable portion 10b can be displaced more effectively by the first voltage V1. In the embodiment, a first beam 11 and a second beam 12 are provided. In these beams, a change in the resonant frequency occurs according to the acceleration G. By utilizing the relationship between acceleration, temperature, and the first voltage V1 and the second voltage V2, high-precision detection can be performed. In the embodiment, for example, detection utilizing force rebalancing can be performed. The control unit 70 can, for example, control the potential difference (first voltage V1) between the first movable component 10 and the first conductive portion 51 so as to reduce the change in the difference between the first resonant frequency f1 and the second resonant frequency f2.

[0140] As described above, the first operation can include changing the first voltage V1 to reduce the difference between the first resonant frequency f1 and the second resonant frequency f2. For example, the first voltage V1 can be applied to the conductive portion so that the difference between the first resonant frequency f1 and the second resonant frequency f2 is substantially zero. Data related to the relationship between the first voltage V1, the first resonant frequency f1, the second resonant frequency f2, the acceleration G, and the temperature T in this state can be acquired in advance. The acquired data can be stored in the storage unit 70M, for example. The control unit 70 can calculate (estimate) the acceleration G and the temperature T based on the stored data.

[0141] As described above, in the first operation, the control unit 70 can output the acceleration G and temperature T applied to the first detection element 10U when the change in the difference between the first resonant frequency f1 and the second resonant frequency f2 is smaller than the reference value.

[0142] The following describes an example of obtaining data related to the relationship between the first resonant frequency f1, the second resonant frequency f2, the acceleration G, the temperature T, the first voltage V1, and the second voltage V2. The second voltage V2 can be 0. In this case, the description of the second voltage V2 is omitted. In this case, the first voltage V1 can be "the difference between the first voltage V1 and the second voltage V2."

[0143] Figure 18 This is a flowchart illustrating the operation of the sensor according to the first embodiment.

[0144] Figure 18 At least a part of the actions shown can be performed by the control unit 70. Other control units can also perform Figure 18 The operations shown are performed, and the obtained data is stored in the storage unit 70M and the like.

[0145] like Figure 18 As shown, the acceleration G is set (step S205). For example, in the initial operation, the acceleration G is set to 0.

[0146] Set the temperature T (step S206). For example, the temperature of the first detection element 10U is set to one of several temperatures within the target temperature range. The target temperature range is, for example, the operating temperature range of the sensor. The target temperature range is, for example, -20°C to 80°C.

[0147] The first voltage V1 and the second voltage V2 (voltages in the first voltage application operation ST1 and the second voltage application operation ST2) are set (step S207). These voltages are set within the control range of the first voltage V1, for example, 0V to 40V.

[0148] A first signal sig1 obtained from the first fixed conductive portion 61 and a second signal sig2 obtained from the second fixed conductive portion 62 are acquired (step S210 ).

[0149] The first resonant frequency f1 of the first movable beam 11M is calculated based on the first signal sig1, and the second resonant frequency f2 of the second movable beam 12M is calculated based on the second signal sig2 (step S220). As already described, processing using the PLL circuit and the like is performed.

[0150] It is determined whether the measurement within the target voltage range has been completed (step S230). If the measurement within the target voltage range has not been completed, the process proceeds to step S235. In step S235, the first voltage V1 and the second voltage V2 are changed, and the process returns to step S207.

[0151] If the measurement within the target voltage range is complete, it is determined whether the measurement within the target temperature range is complete (step S240). If the measurement within the target temperature range is not complete, the process proceeds to step S245. In step S245, the temperature of the first detection element 10U is changed, and the process returns to step S206.

[0152] If the measurement within the target temperature range is complete, the process proceeds to step S250. In step S250, it is determined whether the measurement within the target acceleration range is complete. If the measurement within the target acceleration range is not complete, the process proceeds to step S255. In step S255, the acceleration is changed. The process then returns to step S205.

[0153] When the measurement within the target acceleration range is completed, the measurement result is stored (step S260 ).

[0154] For example, 27 conditions including 3 accelerations G, 3 temperatures T and 3 first voltages V1 can be used. Figure 18 The three accelerations G include, for example, -1G, 0G, and +1G. The three temperatures T include -20°C, +20°C, and +80°C. The three first voltages V1 (which may be the difference between the first voltage V1 and the second voltage V2) include 0V, 20V, and 40V.

[0155] By such an operation, for example, data related to the relationship between the first resonance frequency f1, the second resonance frequency f2, the acceleration G, the temperature T and the driving / adjusting voltage is acquired and stored. Figure 17 Describe the action.

[0156] (Second embodiment)

[0157] Figure 19It is a schematic cross-sectional view illustrating a sensor according to a second embodiment.

[0158] like Figure 19 As shown, the sensor 120 of the embodiment includes a second detection element 10V in addition to the first detection element 10U described in the first embodiment. The second detection element 10V includes, for example, a second support member 50B and a second movable member 10S. The second support member 50B is fixed to a base 50S. The second movable member 10S is supported by the second support member 50B and separated from the base 50S. The sensor 120 can detect the angle of the sensor 120 based on a signal corresponding to the movement of the second movable member 10S. For example, at least a portion of the second movable member 10S vibrates. The angle can be detected by detecting the vibration state that changes with the angle. For example, angle detection is performed based on the Foucault pendulum principle. The second movable member 10S is, for example, a direct angle detection gyroscope (RIG: Rate Integrating Gyroscope). The sensor 120 is, for example, an inertial measurement unit (IMU).

[0159] In the sensor 120 , the configurations of the base 50S, the first supporting member 50A, the first movable member 10 , and the like can be applied to the configurations described in relation to the first embodiment.

[0160] like Figure 19 As shown, the sensor 120 can be provided with a cover 10R. The cover 10R is connected to the base 50S. Between the base 50S and the cover 10R are located the first support member 50A, the first movable member 10, the second support member 50B, and the second movable member 10S. For example, the pressure in the space SP enclosed by the base 50S and the cover 10R is less than 1 atmosphere. By reducing the pressure in the space SP, higher-precision detection can be achieved. For example, the pressure in the space SP is less than 0.1 Pa.

[0161] like Figure 19 As shown, the electrical signal obtained from the first movable part 10 and the electrical signal obtained from the second movable part 10S can be supplied to the processing circuit 75. For example, the first movable part 10 and the processing circuit 75 are electrically connected by wiring 78a. The second movable part 10S and the processing circuit 75 are electrically connected by wiring 78b. The processing circuit 75 is, for example, a PLL circuit. The processing circuit 75 is, for example, included in the control unit 70. The processing circuit 75 can detect changes in the resonant frequency obtained from the first movable part 10. Thus, for example, acceleration can be detected. The processing circuit 75 can detect changes in the resonant frequency obtained from the second movable part 10S. Thus, for example, angle can be detected. Angular velocity can also be detected. A compact sensor can be obtained.

[0162] (Third embodiment)

[0163] The third embodiment relates to an electronic device.

[0164] Figure 20 This is a schematic diagram illustrating an electronic device according to a third embodiment.

[0165] like Figure 20 As shown in FIG. 3 , the electronic device 310 of the third embodiment includes the sensor of the first embodiment or the second embodiment and the circuit control unit 170. Figure 20 In the example, sensor 110 is depicted as a sensor. Circuit control unit 170 can control circuit 180 based on signal S1 obtained from the sensor. Circuit 180 is, for example, a control circuit for driver 185. According to the embodiment, circuit 180, etc., which controls driver 185, can be controlled with high precision based on highly accurate detection results.

[0166] Figure 21 (a)~ Figure 21 (h) is a schematic diagram illustrating an application of an electronic device.

[0167] like Figure 21 As shown in (a), the electronic device 310 can also be at least a part of the robot. Figure 21 As shown in (b), the electronic device 310 may also be at least a part of a working robot installed in a manufacturing plant or the like. Figure 21 As shown in (c), the electronic device 310 may also be at least a part of an automatic transport vehicle in a factory. Figure 21 As shown in (d), the electronic device 310 may also be at least a part of a drone (unmanned aerial vehicle). Figure 21 As shown in (e), the electronic device 310 may also be at least a part of the aircraft. Figure 21 As shown in (f), the electronic device 310 may also be at least a part of the vessel. Figure 21 As shown in (g), the electronic device 310 may also be at least a part of the submarine. Figure 21 As shown in (h), the electronic device 310 may be at least a part of a vehicle. The electronic device 310 of the third embodiment may include, for example, at least one of a robot and a mobile object.

[0168] (Fourth embodiment)

[0169] Figure 22 (a) and Figure 22 (b) is a schematic diagram illustrating a sensor according to a fourth embodiment.

[0170] like Figure 22As shown in (a), the sensor 430 of the fourth embodiment includes the sensor of the first embodiment or the second embodiment and the transceiver 420. Figure 22 In the example of (a), sensor 110 is depicted as a sensor. Transceiver 420 can transmit the signal received from sensor 110 via at least one of wireless and wired methods. Sensor 430 is installed, for example, on a slope 410 of a road 400. Sensor 430 can monitor the status of a facility (e.g., infrastructure). Sensor 430 can be, for example, a status monitoring device.

[0171] For example, sensor 430 can accurately detect changes in the state of slope 410 of road 400. Changes in the state of slope 410 include, for example, at least one of a change in inclination angle and a change in vibration. Signals (inspection results) obtained from sensor 110 can be transmitted by transceiver 420. For example, the state of facilities (e.g., infrastructure) can be continuously monitored.

[0172] like Figure 22 As shown in (b), sensor 430 is installed on a portion of bridge 460, for example. Bridge 460 is installed over river 470. For example, bridge 460 includes a main beam 450 and at least one of piers 440. Sensor 430 is installed on at least one of main beam 450 and piers 440. For example, the angle of at least one of main beam 450 and piers 440 may change due to deterioration. For example, the vibration state of at least one of main beam 450 and piers 440 may change. Sensor 430 can detect these changes with high precision. The detection results can be transmitted to any location by transceiver 420. Abnormalities can be effectively detected.

[0173] The implementation method may include, for example, the following technical solutions.

[0174] (Technical Solution 1)

[0175] A sensor comprising a first detection element,

[0176] The first detection element includes:

[0177] matrix;

[0178] a first supporting member fixed to the base;

[0179] a conductive first movable member, the first movable member including a first movable portion, a second movable portion, a third movable portion, a fourth movable portion, and a fifth movable portion,

[0180] In a second direction intersecting with a first direction from the base toward the first movable member, the third movable portion is located between the first movable portion and the second movable portion, in the second direction, the fourth movable portion is located between the first movable portion and the third movable portion, and in the second direction, the fifth movable portion is located between the third movable portion and the second movable portion.

[0181] The first movable portion is supported by the first supporting member, and the second movable portion, the third movable portion, the fourth movable portion, and the fifth movable portion are separated from the base.

[0182] a first width of the first movable portion along a third direction is larger than a fourth width of the fourth movable portion along the third direction and larger than a fifth width of the fifth movable portion along the third direction, the third direction intersects a first plane including the first direction and the second direction, a third width of the third movable portion is smaller than the fourth width and smaller than the fifth width, a second width of the second movable portion along the third direction is larger than the fourth width and larger than the fifth width, a third length of the third movable portion along the second direction is shorter than a fourth length of the fourth movable portion along the second direction and shorter than a fifth length of the fifth movable portion along the second direction; and

[0183] a first conductive portion fixed to the substrate;

[0184] The second movable portion includes a first movable opposing portion that is opposed to the first conductive portion in a second plane including the second direction and the third direction, and the first movable opposing portion includes a first movable protrusion that protrudes toward the first conductive portion;

[0185] The first conductive portion includes a first conductive opposing portion facing the first movable opposing portion, and the first conductive opposing portion includes a first conductive protrusion protruding toward the first movable opposing portion;

[0186] The first conductive protrusion overlaps with the first movable protrusion in a first radial direction passing through the third movable portion and along the second plane.

[0187] (Technical Solution 2)

[0188] In the sensor described in Technical Solution 1,

[0189] The first movable opposing portion includes a plurality of first movable protrusions;

[0190] The first conductive opposing portion includes a plurality of first conductive protrusions;

[0191] One of the plurality of first conductive protrusions is located between one of the plurality of first movable protrusions and another of the plurality of first movable protrusions in the first radiation direction.

[0192] (Technical Solution 3)

[0193] In the sensor described in Technical Solution 2,

[0194] The plurality of first movable protrusions are arranged along a first movable radial direction passing through the third movable portion and along the second plane;

[0195] The plurality of first conductive protrusions are arranged along a first conductive radiation direction passing through the third movable portion and along the second plane.

[0196] (Technical Solution 4)

[0197] In the sensor described in Technical Solution 3,

[0198] The lengths of the plurality of first movable protrusions along a first movable arc direction increase in proportion to the distance between the plurality of first movable protrusions and the third movable portion, and the first movable arc direction is along the second plane and intersects the first movable radial direction;

[0199] The lengths of the plurality of first conductive protrusions along a first conductive arc direction increase in proportion to the distance between the plurality of first conductive protrusions and the third movable portion. The first conductive arc direction is along the second plane and intersects the first conductive radiation direction.

[0200] (Technical Solution 5)

[0201] In the sensor described in Technical Solution 1,

[0202] The first movable opposing portion includes a plurality of first movable protrusions;

[0203] The plurality of first movable protrusions are arranged along a first movable radial direction passing through the third movable portion and along the second plane;

[0204] a distance between one of the plurality of first movable protrusions and the third movable portion is longer than a distance between another one of the plurality of first movable protrusions and the third movable portion;

[0205] The length of one of the plurality of first movable protrusions along a first movable arc direction is longer than the length of another of the plurality of first movable protrusions along the first movable arc direction, and the first movable arc direction is along the second plane and intersects with the first movable radial direction.

[0206] (Technical Solution 6)

[0207] In the sensor described in technical solution 5,

[0208] The first conductive opposing portion includes a plurality of first conductive protrusions;

[0209] One of the plurality of first conductive protrusions is located between one of the plurality of first movable protrusions and another of the plurality of first movable protrusions in the first radial direction;

[0210] The plurality of first conductive protrusions are arranged along a first conductive radiation direction passing through the third movable portion and along the second plane;

[0211] a distance between one of the plurality of first conductive protrusions and the third movable portion is longer than a distance between another of the plurality of first conductive protrusions and the third movable portion;

[0212] A length of one of the plurality of first conductive protrusions along a first conductive arc direction is longer than a length of another of the plurality of first conductive protrusions along the first conductive arc direction, and the first conductive arc direction is along the second plane and intersects the first conductive radiation direction.

[0213] (Technical Solution 7)

[0214] In the sensor according to any one of technical solutions 1 to 6,

[0215] The first detection element further includes a second conductive portion fixed to the substrate;

[0216] The second movable portion includes a second movable opposing portion facing the second conductive portion in the second plane, and the second movable opposing portion includes a second movable protrusion protruding toward the second conductive portion;

[0217] The second conductive portion includes a second conductive opposing portion facing the second movable opposing portion; the second conductive opposing portion includes a second conductive protrusion protruding toward the second movable opposing portion;

[0218] The second conductive protrusion overlaps with the second movable protrusion in a second radial direction passing through the third movable portion and along the second plane.

[0219] (Technical Solution 8)

[0220] In the sensor described in Technical Solution 7,

[0221] At least a portion of the second movable portion is located between the first conductive portion and the second conductive portion.

[0222] (Technical Solution 9)

[0223] In the sensor described in technical solution 7 or 8,

[0224] The second movable opposing portion includes a plurality of second movable protrusions;

[0225] The plurality of second movable protrusions are arranged along a second movable radial direction passing through the third movable portion and along the second plane;

[0226] a distance between one of the plurality of second movable protrusions and the third movable portion is longer than a distance between another of the plurality of second movable protrusions and the third movable portion;

[0227] The length of one of the plurality of second movable protrusions along the second movable arc direction is longer than the length of the other of the plurality of second movable protrusions along the second movable arc direction, and the second movable arc direction is along the second plane and intersects with the second movable radial direction.

[0228] (Technical Solution 10)

[0229] In the sensor described in Technical Solution 9,

[0230] The second conductive opposing portion includes a plurality of second conductive protrusions;

[0231] One of the plurality of second conductive protrusions is located between one of the plurality of second movable protrusions and another of the plurality of second movable protrusions in the second radial direction;

[0232] The plurality of second conductive protrusions are arranged along a second conductive radiation direction passing through the third movable portion and along the second plane;

[0233] a distance between one of the plurality of second conductive protrusions and the third movable portion is longer than a distance between another of the plurality of second conductive protrusions and the third movable portion;

[0234] The length of one of the plurality of second conductive protrusions along a second conductive arc direction is longer than the length of another of the plurality of second conductive protrusions along the second conductive arc direction, and the second conductive arc direction is along the second plane and intersects the second conductive radiation direction.

[0235] (Technical Solution 11)

[0236] In the sensor according to any one of technical solutions 7 to 10,

[0237] The first detection element further includes a third conductive portion fixed to the substrate;

[0238] The second movable portion includes a third movable opposing portion facing the third conductive portion in the second plane, and the third movable opposing portion includes a third movable protrusion protruding toward the third conductive portion;

[0239] The third conductive portion includes a third conductive opposing portion facing the third movable opposing portion, and the third conductive opposing portion includes a third conductive protrusion protruding toward the third movable opposing portion;

[0240] The third conductive protrusion overlaps with the third movable protrusion in a third radial direction passing through the third movable portion and along the second plane;

[0241] At least a portion of the second movable portion is located between the first conductive portion and the third conductive portion in an arc direction centered on the third movable portion.

[0242] (Technical Solution 12)

[0243] In the sensor described in technical solution 11,

[0244] The first detection element further includes a fourth conductive portion fixed to the substrate;

[0245] The second movable portion includes a fourth movable opposing portion facing the fourth conductive portion in the second plane, and the fourth movable opposing portion includes a fourth movable protrusion protruding toward the fourth conductive portion;

[0246] The fourth conductive portion includes a fourth conductive opposing portion facing the fourth movable opposing portion, and the fourth conductive opposing portion includes a fourth conductive protrusion protruding toward the fourth movable opposing portion;

[0247] The fourth conductive protrusion overlaps with the fourth movable protrusion in a fourth radial direction passing through the third movable portion and along the second plane;

[0248] At least a portion of the second movable portion is located between the second conductive portion and the fourth conductive portion in the arc direction centered on the third movable portion.

[0249] (Technical Solution 13)

[0250] In the sensor described in technical solution 12,

[0251] At least a portion of the third conductive portion is located between the first conductive portion and the second conductive portion;

[0252] At least a portion of the fourth conductive portion is located between the third conductive portion and the second conductive portion;

[0253] The third conductive portion is electrically connected to the first conductive portion;

[0254] The fourth conductive portion is electrically connected to the second conductive portion.

[0255] (Technical Solution 14)

[0256] In the sensor according to any one of technical solutions 11 to 13,

[0257] In the second plane, the second movable portion exists around at least a portion of the third conductive portion.

[0258] (Technical Solution 15)

[0259] A sensor comprising a first detection element,

[0260] The first detection element includes:

[0261] matrix;

[0262] a first supporting member fixed to the base;

[0263] a conductive first movable member, the first movable member including a first movable portion, a second movable portion, a third movable portion, a fourth movable portion, and a fifth movable portion,

[0264] In a second direction intersecting with a first direction from the base toward the first movable member, the third movable portion is located between the first movable portion and the second movable portion, in the second direction, the fourth movable portion is located between the first movable portion and the third movable portion, and in the second direction, the fifth movable portion is located between the third movable portion and the second movable portion.

[0265] The first movable portion is supported by the first supporting member, and the second movable portion, the third movable portion, the fourth movable portion, and the fifth movable portion are separated from the base.

[0266] a first width of the first movable portion along a third direction is larger than a fourth width of the fourth movable portion along the third direction and larger than a fifth width of the fifth movable portion along the third direction, the third direction intersects a first plane including the first direction and the second direction, a third width of the third movable portion is smaller than the fourth width and smaller than the fifth width, a second width of the second movable portion along the third direction is larger than the fourth width and larger than the fifth width, a third length of the third movable portion along the second direction is shorter than a fourth length of the fourth movable portion along the second direction and shorter than a fifth length of the fifth movable portion along the second direction; and

[0267] a first conductive portion fixed to the substrate;

[0268] The second movable portion includes a first movable opposing portion that is opposed to the first conductive portion in a second plane including the second direction and the third direction;

[0269] The first conductive portion includes a first conductive opposing portion opposing the first movable opposing portion;

[0270] The first movable opposing portion and the first conductive opposing portion extend along a first radial direction passing through the third movable portion and along the second plane.

[0271] (Technical Solution 16)

[0272] In the sensor according to any one of technical solutions 1 to 15,

[0273] The first movable component includes a first beam and a second beam;

[0274] The first beam includes a first end portion and a first other end portion, the first end portion is connected to the first movable portion, and the first other end portion is connected to the second movable portion;

[0275] The second beam includes a second end portion and a second other end portion, the second end portion is connected to the first movable portion, and the second other end portion is connected to the second movable portion;

[0276] In the third direction, the third movable portion is located between the first beam and the second beam;

[0277] At least one of a first resonance frequency of the first beam and a second resonance frequency of the second beam can be changed according to a displacement of the second movable portion in accordance with the received acceleration.

[0278] (Technical Solution 17)

[0279] In the sensor described in Technical Solution 16,

[0280] It also has a control unit;

[0281] The first movable member includes a first fixed conductive portion facing the first beam and a second fixed conductive portion facing the second beam;

[0282] The control portion is electrically connected to the first fixed conductive portion and the second fixed conductive portion;

[0283] The control unit can derive the first resonant frequency and the second resonant frequency based on a first signal obtained from the first fixed conductive part and a second signal obtained from the second fixed conductive part.

[0284] (Technical Solution 18)

[0285] In the sensor described in Technical Solution 17,

[0286] The first movable member includes a fifth conductive portion facing the first beam and a sixth conductive portion facing the second beam;

[0287] The control unit is electrically connected to the fifth conductive unit and the sixth conductive unit;

[0288] The control unit can control the potential difference between the first movable unit and the first conductive unit so as to reduce a change in the difference between the first resonant frequency and the second resonant frequency.

[0289] (Technical Solution 19)

[0290] In the sensor according to any one of technical solutions 1 to 18,

[0291] further comprising a second detecting element including a second supporting member fixed to the base, and a second movable member supported by the second supporting member and separated from the base;

[0292] The angle can be detected based on a signal corresponding to the movement of the second movable member.

[0293] (Technical Solution 20)

[0294] An electronic device includes the sensor according to any one of claims 1 to 19, and a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor.

[0295] According to the embodiment, a sensor and an electronic device capable of improving detection accuracy can be provided.

[0296] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of the various elements of the sensor, such as the base, support portion, movable portion, movable member, and control portion, are encompassed within the scope of the present invention as long as those skilled in the art can appropriately select from the known ranges and implement the present invention in the same manner to achieve the same effects.

[0297] Furthermore, any configuration obtained by combining two or more elements of the specific examples within a technically possible range is also included in the scope of the present invention as long as it includes the gist of the present invention.

[0298] Furthermore, all sensors and electronic devices that can be implemented by those skilled in the art through appropriate design changes based on the sensors and electronic devices described as embodiments of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0299] Furthermore, it should be understood that within the scope of the concept of the present invention, those skilled in the art can conceive of various changes and modifications, and these changes and modifications also fall within the scope of the present invention.

[0300] While several embodiments of the present invention have been described, these embodiments are presented merely as examples and are not intended to limit the scope of the invention. These novel embodiments may be implemented in various other ways, and various omissions, substitutions, and modifications may be made without departing from the gist of the invention. These embodiments and their variations are intended to be within the scope and spirit of the invention and are encompassed by the invention set forth in the claims and their equivalents.

Claims

1. A sensor comprising a first detection element, The first detection element includes: matrix; a first supporting member fixed to the base; a conductive first movable member, the first movable member including a first movable portion, a second movable portion, a third movable portion, a fourth movable portion, and a fifth movable portion, In a second direction intersecting with a first direction from the base toward the first movable member, the third movable portion is located between the first movable portion and the second movable portion, in the second direction, the fourth movable portion is located between the first movable portion and the third movable portion, and in the second direction, the fifth movable portion is located between the third movable portion and the second movable portion. The first movable portion is supported by the first supporting member, and the second movable portion, the third movable portion, the fourth movable portion, and the fifth movable portion are separated from the base. a first width of the first movable portion along a third direction is larger than a fourth width of the fourth movable portion along the third direction and larger than a fifth width of the fifth movable portion along the third direction, the third direction intersects a first plane including the first direction and the second direction, a third width of the third movable portion is smaller than the fourth width and smaller than the fifth width, a second width of the second movable portion along the third direction is larger than the fourth width and larger than the fifth width, and a third length of the third movable portion along the second direction is shorter than a fourth length of the fourth movable portion along the second direction and shorter than a fifth length of the fifth movable portion along the second direction; as well as a first conductive portion fixed to the substrate; The second movable portion includes a first movable opposing portion that is opposed to the first conductive portion in a second plane including the second direction and the third direction, and the first movable opposing portion includes a first movable protrusion that protrudes toward the first conductive portion; The first conductive portion includes a first conductive opposing portion facing the first movable opposing portion, and the first conductive opposing portion includes a first conductive protrusion protruding toward the first movable opposing portion; The first conductive protrusion overlaps with the first movable protrusion in a first radial direction passing through the third movable portion and along the second plane. The first detection element further includes a second conductive portion fixed to the substrate; The second movable portion includes a second movable opposing portion facing the second conductive portion in the second plane, and the second movable opposing portion includes a second movable protrusion protruding toward the second conductive portion; The second conductive portion includes a second conductive opposing portion facing the second movable opposing portion, and the second conductive opposing portion includes a second conductive protrusion protruding toward the second movable opposing portion; The second conductive protrusion overlaps with the second movable protrusion in a second radial direction passing through the third movable portion and along the second plane. The first detection element further includes a third conductive portion fixed to the substrate; The second movable portion includes a third movable opposing portion facing the third conductive portion in the second plane, and the third movable opposing portion includes a third movable protrusion protruding toward the third conductive portion; The third conductive portion includes a third conductive opposing portion facing the third movable opposing portion, and the third conductive opposing portion includes a third conductive protrusion protruding toward the third movable opposing portion; The third conductive protrusion overlaps with the third movable protrusion in a third radial direction passing through the third movable portion and along the second plane; At least a portion of the second movable portion is located between the first conductive portion and the third conductive portion in an arc direction centered on the third movable portion. The first detection element further includes a fourth conductive portion fixed to the substrate; The second movable portion includes a fourth movable opposing portion facing the fourth conductive portion in the second plane, and the fourth movable opposing portion includes a fourth movable protrusion protruding toward the fourth conductive portion; The fourth conductive portion includes a fourth conductive opposing portion facing the fourth movable opposing portion, and the fourth conductive opposing portion includes a fourth conductive protrusion protruding toward the fourth movable opposing portion; The fourth conductive protrusion overlaps with the fourth movable protrusion in a fourth radial direction passing through the third movable portion and along the second plane; At least a portion of the second movable portion is located between the second conductive portion and the fourth conductive portion in an arc direction centered on the third movable portion. At least a portion of the third conductive portion is located between the first conductive portion and the second conductive portion. At least a portion of the fourth conductive portion is located between the third conductive portion and the second conductive portion. The third conductive portion is electrically connected to the first conductive portion, The fourth conductive portion is electrically connected to the second conductive portion.

2. The sensor according to claim 1, The first movable opposing portion includes a plurality of first movable protrusions; The first conductive opposing portion includes a plurality of first conductive protrusions; One of the plurality of first conductive protrusions is located between one of the plurality of first movable protrusions and another of the plurality of first movable protrusions in the first radiation direction.

3. The sensor according to claim 1, The first movable opposing portion includes a plurality of first movable protrusions; The plurality of first movable protrusions are arranged along a first movable radial direction passing through the third movable portion and along the second plane; a distance between one of the plurality of first movable protrusions and the third movable portion is longer than a distance between another one of the plurality of first movable protrusions and the third movable portion; The length of one of the plurality of first movable protrusions along a first movable arc direction is longer than the length of another of the plurality of first movable protrusions along the first movable arc direction, and the first movable arc direction is along the second plane and intersects with the first movable radial direction.

4. The sensor according to claim 3, The first conductive opposing portion includes a plurality of first conductive protrusions; One of the plurality of first conductive protrusions is located between one of the plurality of first movable protrusions and another of the plurality of first movable protrusions in the first radial direction; The plurality of first conductive protrusions are arranged along a first conductive radiation direction passing through the third movable portion and along the second plane; a distance between one of the plurality of first conductive protrusions and the third movable portion is longer than a distance between another of the plurality of first conductive protrusions and the third movable portion; A length of one of the plurality of first conductive protrusions along a first conductive arc direction is longer than a length of another of the plurality of first conductive protrusions along the first conductive arc direction, and the first conductive arc direction is along the second plane and intersects the first conductive radiation direction.

5. A sensor comprising a first detection element, The first detection element includes: matrix; a first supporting member fixed to the base; a conductive first movable member, the first movable member including a first movable portion, a second movable portion, a third movable portion, a fourth movable portion, and a fifth movable portion, In a second direction intersecting with a first direction from the base toward the first movable member, the third movable portion is located between the first movable portion and the second movable portion, in the second direction, the fourth movable portion is located between the first movable portion and the third movable portion, and in the second direction, the fifth movable portion is located between the third movable portion and the second movable portion. The first movable portion is supported by the first supporting member, and the second movable portion, the third movable portion, the fourth movable portion, and the fifth movable portion are separated from the base. a first width of the first movable portion along a third direction is larger than a fourth width of the fourth movable portion along the third direction and larger than a fifth width of the fifth movable portion along the third direction, the third direction intersects a first plane including the first direction and the second direction, a third width of the third movable portion is smaller than the fourth width and smaller than the fifth width, a second width of the second movable portion along the third direction is larger than the fourth width and larger than the fifth width, and a third length of the third movable portion along the second direction is shorter than a fourth length of the fourth movable portion along the second direction and shorter than a fifth length of the fifth movable portion along the second direction; as well as a first conductive portion fixed to the substrate; The second movable portion includes a first movable opposing portion that is opposed to the first conductive portion in a second plane including the second direction and the third direction; The first conductive portion includes a first conductive opposing portion opposing the first movable opposing portion; The first movable opposing portion and the first conductive opposing portion extend along a first radial direction passing through the third movable portion and along the second plane. The first movable component includes a first beam and a second beam; The first beam includes a first end portion and a first other end portion, the first end portion is connected to the first movable portion, and the first other end portion is connected to the second movable portion; The second beam includes a second end portion and a second other end portion, the second end portion is connected to the first movable portion, and the second other end portion is connected to the second movable portion; In the third direction, the third movable portion is located between the first beam and the second beam; At least one of a first resonance frequency of the first beam and a second resonance frequency of the second beam can be changed according to a displacement of the second movable portion in accordance with the received acceleration. 6 . An electronic device comprising the sensor according to claim 1 , and a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor.

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