Vacuum chamber seals
By using an intermediate insulation block with a groove structure and a seal with an insulating sheet arranged in the groove in the vacuum chamber, the inductor and electric breakdown risks caused by the insulating material during high-voltage power transmission is solved, and good sealing, insulation and low inductance effects are achieved.
Patent Information
- Application Number
- CN202180010543.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2020-01-24
- Filing Date
- 2021-01-22
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2041-01-22
Smart Images
Figure CN115004320B_ABST
Abstract
Description
[0001] The present invention relates to a seal for a vacuum chamber, and in particular to a seal between a wall of a vacuum chamber and a pair of power transmission plates extending into the vacuum chamber.
[0002] Many different applications require that a high voltage power supply be fed into a vacuum chamber for delivery to a load in the vacuum chamber, for example, via a pair of power transmission plates. In order to maintain an effective vacuum in the vacuum chamber, it is necessary to provide a good seal around the location where the power supply enters the vacuum chamber. An effective vacuum helps reduce the risk of electrical breakdown in the vacuum chamber. The seal also provides insulation between the power supply and the walls of the vacuum chamber, and between the power transmission plates of the high voltage power supply. This insulation also helps reduce the risk of electrical breakdown between the power transmission plates of the high voltage power supply, for example in the form of surface tracking.
[0003] However, the presence of insulation creates inductance in the high voltage power supply (e.g., between power transmission plates). For certain applications, such as when a high voltage power supply is required to quickly discharge a load in a vacuum chamber, it may be beneficial to reduce the inductance as much as possible. However, if the inductance is to be reduced, this usually means that the insulation (e.g., the thickness of the insulation) must be reduced, which may increase the risk of electrical breakdown, especially when high voltages are being used.
[0004] The present invention seeks to provide an improved seal for a pair of power transmission plates extending through the wall of a vacuum chamber.
[0005] From a first aspect, the present invention provides a seal for a vacuum chamber, wherein the vacuum chamber comprises a first wall and a second wall, the seal comprising:
[0006] a first outer insulating block for sealing between the first wall of the vacuum chamber and a first power transmission plate extending from the inside of the vacuum chamber to the outside of the vacuum chamber between the first wall and the second wall of the vacuum chamber;
[0007] a second outer insulating block for sealing between the second wall of the vacuum chamber and a second power transmission plate extending from the interior of the vacuum chamber to the exterior of the vacuum chamber between the first wall and the second wall of the vacuum chamber;
[0008] an intermediate insulating block for sealing between the first power transmission plate and the second power transmission plate, wherein the intermediate insulating block comprises one or more grooves formed in a first side of the intermediate insulating block for facing the interior of the vacuum chamber and one or more grooves formed in a second side of the intermediate insulating block for facing the exterior of the vacuum chamber;
[0009] one or more internal insulating sheets for extending between the first power transmission plate and the second power transmission plate inside the vacuum chamber, wherein the one or more internal insulating sheets are arranged in the one or more grooves in the first side of the intermediate insulating block; and
[0010] one or more external insulating sheets for extending between the first power transmission plate and the second power transmission plate outside the vacuum chamber, wherein the one or more external insulating sheets are arranged in the one or more grooves in the second side of the intermediate insulating block.
[0011] The present invention provides a vacuum chamber seal for sealing between the walls of a vacuum chamber (e.g. the two halves of the vacuum chamber) and a pair of electrical power transmission plates extending through the vacuum chamber walls. The seal consists of three insulating blocks interleaving the two vacuum chamber walls with the pair of power transmission plates. When installed in the vacuum chamber, the insulating blocks are arranged so that there is a (first outer) insulating block between one of the vacuum chamber walls and one of the power transmission plates, another (second outer) insulating block between the other of the vacuum chamber walls and the other of the power transmission plates, and a final (intermediate) insulating block between the pair of power transmission plates. Each insulating block is thus arranged for sealing against the vacuum chamber walls and the power transmission plates as appropriate. It will be seen that when the seal is assembled, the intermediate insulating block is positioned between the first and second outer insulating blocks, which are located at the outer edges of the seal.
[0012] The intermediate insulating block has one or more slots formed in both sides of the insulating block. On a first side of the intermediate insulating block, in order to face the interior of the vacuum chamber, one or more internal insulating sheets are positioned in the slots on this side of the intermediate insulating block. On a second side of the intermediate insulating block, in order to face the exterior of the vacuum chamber, one or more external insulating sheets are positioned in the slots on this side of the intermediate insulating block. Thus, the insulating sheets extend from the slots on both sides of the intermediate insulating block. The insulating sheets are configured to extend between the pair of power transmission plates on both the interior and exterior of the vacuum chamber.
[0013] It will therefore be appreciated that by providing a seal comprising an insulating block for positioning between the wall of the vacuum and the pair of power transmission plates, an effective seal may be provided between the wall of the vacuum and the pair of power transmission plates due to the nature of the insulating block (e.g., being strong and solid), which helps to enable a good vacuum to be established in the vacuum chamber. The insulating sheet of the seal for extending between the pair of power transmission plates (e.g., away from the wall of the vacuum chamber) helps to allow the pair of power transmission plates to be closer together (e.g., than if they passed through the insulating block), thus helping to reduce the inductance between the pair of power transmission plates, while still providing sufficient insulation between them (e.g., to prevent electrical punch-through even when subjected to high electric field gradients).
[0014] It will also be appreciated that while the insulating sheet can provide good insulation between the pair of power transfer plates, the insulating sheet is less suitable for forming a seal directly between the wall of the vacuum chamber and the pair of power transfer plates; such a seal is best provided by an insulating block. Thus, the seal of the present invention utilizes the beneficial properties of both the insulating block (i.e., a good seal) and the insulating sheet (i.e., providing a high dielectric strength barrier, thereby facilitating low inductance).
[0015] The transition between the insulating sheets and the insulating blocks of the seal is provided by arranging the insulating sheets in slots on either of the intermediate insulating blocks. This helps reduce the extent of the insulating blocks (e.g., confining them to the vicinity of the walls of the vacuum chamber), which helps reduce the inductance between the pair of power transmission plates while still allowing a good seal to be provided and the power transmission plates to be insulated from each other (and, e.g., from the walls of the vacuum chamber). This helps allow the power transmission plates to deliver high voltages and currents into the vacuum chamber (e.g., to a load in the vacuum chamber), for example, at high discharge rates.
[0016] The slots in the intermediate insulating blocks also help to increase the path length between the power transfer plates. This helps to reduce the risk of electrical breakdown due to surface tracking. Arranging the insulating sheets in the slots can also allow the insulating sheets to be replaced when required, therefore helping to provide an easily maintainable seal.
[0017] Thus, the seal of the present invention helps provide a good seal for a vacuum chamber where a pair of high voltage power transmission boards need to be fed into the vacuum chamber. The seal helps provide low inductance between the power transmission boards while providing good insulation and a good vacuum seal. This can allow the power transmission boards to deliver high voltages and currents to the vacuum chamber that can be discharged quickly (e.g., a load in the vacuum chamber) while reducing the risk of electrical breakdown (e.g., when the power transmission boards are discharging).
[0018] The vacuum chamber may be any suitable and desired type of vacuum chamber, wherein the first and second walls are arranged in any suitable and desired configuration. In a preferred embodiment, the vacuum chamber comprises a load, wherein the first power transmission plate and the second power transmission plate are arranged to deliver a voltage (and current) to the load. The invention extends to the vacuum chamber itself, and thus when viewed from another aspect, the invention provides a vacuum chamber, the vacuum chamber comprising:
[0019] a first wall and a second wall defining an outer surface of the vacuum chamber;
[0020] A load in the vacuum chamber;
[0021] a first power transmission plate extending from an interior of the vacuum chamber to an exterior of the vacuum chamber between the first wall and the second wall of the vacuum chamber;
[0022] a second power transmission plate extending from an interior of the vacuum chamber to an exterior of the vacuum chamber between the first wall and the second wall of the vacuum chamber, wherein the first power transmission plate and the second power transmission plate are arranged to deliver a voltage to the load; and
[0023] a seal for sealing between the first wall and the second wall and between the first power transmission plate and the second power transmission plate;
[0024] Wherein, the sealing element comprises:
[0025] a first outer insulating block, the first outer insulating block sealing between the first wall of the vacuum chamber and the first power transmission plate;
[0026] a second outer insulating block, the second outer insulating block sealing between the second wall of the vacuum chamber and the second power transmission plate;
[0027] an intermediate insulating block that seals between the first power transmission plate and the second power transmission plate, wherein the intermediate insulating block includes one or more grooves formed in a first side of the intermediate insulating block facing the interior of the vacuum chamber and one or more grooves formed in a second side of the intermediate insulating block facing the exterior of the vacuum chamber;
[0028] one or more internal insulating sheets extending between the first power transmission plate and the second power transmission plate inside the vacuum chamber, wherein the one or more internal insulating sheets are arranged in the one or more grooves in the first side of the intermediate insulating block; and
[0029] One or more external insulating sheets extending between the first power transmission plate and the second power transmission plate outside the vacuum chamber, wherein the one or more external insulating sheets are arranged in the one or more grooves in the second side of the intermediate insulating block.
[0030] It will be appreciated that the subject matter of this aspect of the invention may (and preferably does) include one or more (eg all) of the optional and preferred features of the other aspects of the invention outlined herein.
[0031] The first wall and the second wall may be arranged in any suitable and desired manner, for example to form a vacuum chamber. Preferably the first wall and the second wall comprise an outer wall of the vacuum chamber. In one embodiment, the vacuum chamber is substantially cylindrical, although the vacuum chamber may be of any suitable and desired shape and size, for example depending on the intended use of the vacuum chamber. Thus preferably the first wall and the second wall together define a cylindrical outer wall of the vacuum chamber. Preferably the first wall and / or the second wall (each) are substantially cylindrical.
[0032] It will therefore be appreciated that preferably the first and second walls of the vacuum chamber (and their edges sealed together by the seal of the invention) extend around (e.g. all) the periphery of the vacuum chamber. It is therefore preferred that the seal (and its components, e.g. insulating blocks and insulating sheets) extend around (e.g. all) the periphery of the vacuum chamber. It is therefore preferred that the seal (and its components) comprise an annulus extending around the periphery of the vacuum chamber between the first and second walls of the vacuum chamber.
[0033] Preferably, the first and second walls of the vacuum chamber are held (e.g., clamped) together around the seal. Preferably, the seal (e.g., a component of the seal) is held in a compressed state. This helps to increase the effectiveness of the seal and therefore the vacuum in the chamber, because the seal forms an effective barrier to the pressure difference formed from the inside to the outside of the vacuum chamber across the wall of the vacuum chamber, and air is vented from the seal from the seal, for example to reduce the risk of electrical breakdown. Therefore, preferably, the first and second walls of the vacuum chamber are arranged to compress the seal (e.g., a component of the seal). Preferably, the weight of the vacuum chamber is arranged to act on the first and second walls of the vacuum chamber to compress the seal. Evacuating the vacuum chamber to form a vacuum also helps to pull the walls of the vacuum chamber together to compress the seal.
[0034] The vacuum chamber (e.g., the first and second walls of the vacuum chamber) can be made of any suitable and desired material. Preferably, the first and second walls of the vacuum chamber are made of metal. This helps to provide a strong wall of the vacuum chamber that can also generate a vacuum.
[0035] The vacuum chamber (and its seals) may be arranged to form any suitable and desired level of vacuum within the interior of the vacuum chamber. In one embodiment, the vacuum chamber (and its seals) is arranged to form less than 10 -4 This helps to reduce the risk of electrical breakdown in the vacuum chamber.
[0036] The power transmission plates may be arranged in any suitable and desired manner. Preferably, the power transmission plates (each) are substantially planar, in particular when they pass through the seal and the first and second walls of the vacuum chamber. It is therefore preferred that the power transmission plates (each) have a thickness that is substantially smaller than the length and / or width of the power transmission plates.
[0037] The power transmission plate is preferably arranged to pass between the first wall and the second wall of the vacuum chamber such that the thickness of the power transmission plate extends in a direction between (e.g., parallel to) the first wall and the second wall of the vacuum chamber. In other words, the power transmission plate is preferably arranged to pass between the first wall and the second wall of the vacuum chamber such that the thickness of the power transmission plate extends through the intermediate insulating block in a direction transverse to (e.g., parallel to) the seal, i.e., parallel to the direction between the first outer insulating block and the second outer insulating block.
[0038] The first power transfer plate and the second power transfer plate may be made of any suitable and desired material.Preferably the first power transfer plate and the second power transfer plate (each) are electrically conductive, for example made of metal.
[0039] The first power transmission plate and the second power transmission plate may be arranged to deliver any suitable and desired voltage and / or current to the vacuum chamber (e.g., a load in the vacuum chamber). Preferably, the first power transmission plate and the second power transmission plate are arranged to deliver a (required) high voltage of at least 50 kV, such as at least 100 kV, such as about 200 kV, to the vacuum chamber (e.g., a load in the vacuum chamber). The first power transmission plate and the second power transmission plate may be arranged such that one of the plates is a ground plate and one of the plates is a positive (or negative) plate (e.g., a charged plate). However, preferably, the first power transmission plate and the second power transmission plate are arranged such that one of the plates is maintained at a positive voltage and one of the plates is maintained at a negative voltage (e.g., of equal magnitude).
[0040] Preferably, the first power transfer plate and the second power transfer plate are arranged to deliver a (eg high) current to the vacuum chamber (eg a load in the vacuum chamber) (eg when the voltage is discharged).
[0041] The invention also extends to a power feeder and thus when viewed from a further aspect provides a power feeder for delivering a voltage to a load within a vacuum chamber, wherein the vacuum chamber comprises a first wall and a second wall, the power feeder comprising:
[0042] a first power transmission plate extending from the inside of the vacuum chamber to the outside of the vacuum chamber between the first wall and the second wall of the vacuum chamber;
[0043] a second power transmission plate extending from the interior of the vacuum chamber to the exterior of the vacuum chamber between the first wall and the second wall of the vacuum chamber, wherein the first power transmission plate and the second power transmission plate are arranged to deliver a voltage to the load; and
[0044] a seal for sealing between the first wall and the second wall and between the first power transmission board and the second power transmission board, wherein the seal comprises:
[0045] a first outer insulating block for sealing between the first wall of the vacuum chamber and the first power transmission plate;
[0046] a second outer insulating block for sealing between the second wall of the vacuum chamber and the second power transmission plate;
[0047] an intermediate insulating block that seals between the first power transmission plate and the second power transmission plate, wherein the intermediate insulating block includes one or more grooves formed in a first side of the intermediate insulating block for facing the interior of the vacuum chamber and one or more grooves formed in a second side of the intermediate insulating block for facing the exterior of the vacuum chamber;
[0048] one or more internal insulating sheets extending between the first power transmission plate and the second power transmission plate inside the vacuum chamber, wherein the one or more internal insulating sheets are arranged in the one or more grooves in the first side of the intermediate insulating block; and
[0049] One or more external insulating sheets extending between the first power transmission plate and the second power transmission plate outside the vacuum chamber, wherein the one or more external insulating sheets are arranged in the one or more grooves in the second side of the intermediate insulating block.
[0050] It will be appreciated that the subject matter of this aspect of the invention may (and preferably does) include one or more (eg all) of the optional and preferred features of the other aspects of the invention outlined herein.
[0051] Preferably, the power feeding device includes a voltage generating system for applying a voltage between the first power transmission plate and the second power transmission plate. The power feeding device preferably includes a mechanism for discharging the voltage on the first power transmission plate and the second power transmission plate to a load in the vacuum chamber.
[0052] The vacuum chamber may be used for any suitable and desired purpose. In one embodiment, the vacuum chamber is used as part of a pulsed power (e.g., high energy density physics) device. The present invention extends to a pulsed power (e.g., high energy density physics) device and therefore when viewed from a further aspect, the present invention provides a pulsed power (e.g., high energy density physics) device comprising:
[0053] A vacuum chamber, comprising:
[0054] A first wall and a second wall defining an outer surface of the vacuum chamber; and
[0055] A load in the vacuum chamber;
[0056] The pulse power device further comprises:
[0057] a first power transmission plate extending from an interior of the vacuum chamber to an exterior of the vacuum chamber between the first wall and the second wall of the vacuum chamber;
[0058] a second power transmission plate extending between the first wall and the second wall of the vacuum chamber from an interior of the vacuum chamber to an exterior of the vacuum chamber, wherein the first power transmission plate and the second power transmission plate are arranged to deliver a voltage to the load;
[0059] a voltage generating system for applying a voltage between the first power transmission board and the second power transmission board; and
[0060] a seal for sealing between the first wall and the second wall and between the first power transmission plate and the second power transmission plate;
[0061] Wherein, the sealing element comprises:
[0062] a first outer insulating block, the first outer insulating block sealing between the first wall of the vacuum chamber and the first power transmission plate;
[0063] a second outer insulating block, the second outer insulating block sealing between the second wall of the vacuum chamber and the second power transmission plate;
[0064] an intermediate insulating block that seals between the first power transmission plate and the second power transmission plate, wherein the intermediate insulating block includes one or more grooves formed in a first side of the intermediate insulating block facing the interior of the vacuum chamber and one or more grooves formed in a second side of the intermediate insulating block facing the exterior of the vacuum chamber;
[0065] one or more inner insulating sheets extending between the first power transmission plate and the second power transmission plate inside the vacuum chamber, wherein the one or more inner insulating sheets are arranged in the one or more grooves in the first side of the intermediate insulating block; and one or more outer insulating sheets extending between the first power transmission plate and the second power transmission plate outside the vacuum chamber, wherein the one or more outer insulating sheets are arranged in the one or more grooves in the second side of the intermediate insulating block.
[0066] It will be appreciated that the subject matter of this aspect of the invention may (and preferably does) include one or more (eg all) of the optional and preferred features of the other aspects of the invention outlined herein.
[0067] The voltage generating system preferably comprises one or more capacitors arranged to be charged for applying voltage to the first power transmission plate and the second power transmission plate.The pulse power device preferably comprises a mechanism for discharging the voltage on the first power transmission plate and the second power transmission plate to a load in the vacuum chamber.
[0068] Although the seal may be used in a vacuum chamber, such as part of a pulsed power device, the seal may alternatively be used in different types of chambers requiring a seal (such as pressurized chambers and / or chambers including dielectric liquids or gases).
[0069] The first and second outer insulating blocks and the intermediate insulating blocks may be arranged in any suitable and desired manner to seal against the wall of the vacuum chamber and the power transmission plate. Preferably, the first outer insulating block includes a mating surface for sealing against the first wall of the vacuum chamber and the first power transmission plate (and between the first wall of the vacuum chamber and the first power transmission plate). Preferably, the second outer insulating block includes a mating surface for sealing against the second wall of the vacuum chamber and the second power transmission plate (and between the second wall of the vacuum chamber and the second power transmission plate). Preferably, the intermediate insulating block includes a mating surface for sealing against the first power transmission plate and the second power transmission plate (and between the first power transmission plate and the second power transmission plate).
[0070] Preferably, the mating surfaces are shaped to match the shapes of the walls of the vacuum chamber and the surfaces of the power transmission board that are sealed against the mating surfaces. Preferably, the mating surfaces (e.g., each) are substantially planar. This helps to form a good seal between the insulating block and the walls of the vacuum chamber and the power transmission board.
[0071] In one embodiment, the seal includes a compressible (e.g., dielectric) material (e.g., layer) between the insulating blocks (e.g., mating surfaces of the insulating blocks) and the respective components against which they are sealing. The compressible material helps provide an airtight seal between the components against which the insulating blocks are sealing, which can help create a better seal for the vacuum chamber and therefore help create a more efficient vacuum. The compressible material between the insulating blocks and the respective components against which they are sealing also helps reduce the risk of surface tracking across the insulating blocks from the inside to the outside of the vacuum chamber (or vice versa) through the seal.
[0072] Preferably, the compressible material is arranged to be compressed between the insulating block (eg a mating surface of the insulating block) and a corresponding component against which they are sealing, eg when the seal is in a compressed state.
[0073] The compressible material may be arranged in any suitable and desired manner. In one embodiment, one or more (e.g., any combination or all of the mating surfaces) of the insulating block (e.g., each of the insulating blocks) include one or more grooves, wherein the compressible material is arranged in the groove (e.g., each of the grooves). Preferably, the compressible material includes a gasket, such as a linear cord or an O-ring.
[0074] The mating surfaces of the insulating blocks may include any suitable number of grooves in which the compressible material is placed. In one embodiment, (e.g. each) mating surface includes only a single groove. Preferably, the grooves in the mating surfaces are offset from each other. It is therefore preferred that the grooves in the mating surfaces are offset from the grooves in the adjacent mating surface (e.g. closer to the interior or exterior of the vacuum chamber). For example, the grooves in the mating surface of the first outer insulating block that seals against the first power transmission plate are preferably offset from the grooves in the mating surface of the middle insulating block that seals against the first power transmission plate.
[0075] The first and second outer insulating blocks and the intermediate insulating blocks may be made of any suitable and desired (dielectric) material. Preferably, the first and second outer insulating blocks and the intermediate insulating blocks (e.g., each) comprise a solid (e.g., substantially incompressible, e.g., rigid) block. Preferably, the first and second outer insulating blocks and the intermediate insulating blocks (e.g., each) comprise a (e.g., thermoplastic) polymer, such as high-density polyethylene (HDPE). Preferably, the first and second outer insulating blocks (e.g., each of these outer insulating blocks) and the intermediate insulating blocks have a dielectric strength greater than 10 kV / mm, such as greater than 20 kV / mm, such as about 22 kV / mm.
[0076] The first and second outer insulating blocks and the intermediate insulating blocks may have any suitable and desired dimensions. For example, the dimensions of the insulating blocks may depend on one or more (e.g., all) of the dimensions of the walls of the vacuum chamber, the dimensions of the power transmission board, and the voltages carried by the power transmission board. In one embodiment, the dimensions of the first and second outer insulating blocks and the intermediate insulating blocks (e.g., each of these insulating blocks) in a (e.g., radial) direction across the wall of the vacuum chamber are greater than or equal to the dimensions of the first and second walls of the vacuum chamber in a direction across the wall of the vacuum chamber.
[0077] In one embodiment, the dimension (thickness) of the intermediate insulating block in the direction between the first wall and the second wall of the vacuum chamber (e.g., parallel to the direction) is greater than the ratio of the voltage across the power transmission plates to the dielectric strength of the intermediate insulating block, for example, at least twice the ratio of the voltage across the power transmission plates to the dielectric strength of the intermediate insulating block. Thus, in a particularly preferred embodiment, when the intermediate insulating block is made of HDPE (having a dielectric strength of 22 kV / mm) and the voltage across the pair of power transmission plates is 200 kV, the thickness of the intermediate insulating block is 18 mm (i.e., giving a safety factor of 2).
[0078] The first and second outer insulating blocks may have any suitable and desired shape for being retained at (e.g., attached to) the first and second walls of the vacuum chamber, respectively. For example, the mating surface of the outer insulating block for sealing against the corresponding wall of the vacuum chamber may extend all the way across the outer insulating block. However, in a preferred embodiment, the first and second outer insulating blocks are shaped to extend upwardly along the sides of the first and second walls of the vacuum chamber, respectively. It is therefore preferred that the first and second outer insulating blocks are U-shaped.
[0079] The slots in the sides of the intermediate insulating block for receiving insulating sheets may be arranged in any suitable and desired manner. Preferably, the slots are arranged so that the ends of multiple (e.g., multiple groups) of insulating sheets sandwich portions of the sides of the intermediate insulating block and / or multiple portions of the sides of the intermediate insulating block sandwich the ends of the insulating sheets. This helps to increase the length of the path around the edge of the intermediate insulating block and the ends of the insulating sheets, which therefore helps to reduce the risk of surface tracking along this path between the power transmission plates.
[0080] Preferably, one or more grooves (e.g. each) extend in a (e.g. radial) direction across the wall of the vacuum chamber (i.e. between the interior and the exterior of the vacuum chamber). Thus preferably, one or more grooves formed on the inner side of the intermediate insulating block preferably extend in a direction towards the interior of the vacuum chamber. Preferably, one or more grooves formed on the outer side of the intermediate insulating block preferably extend in a direction towards the exterior of the vacuum chamber. When the intermediate insulating block comprises a plurality of grooves, preferably the grooves extend in respective parallel directions.
[0081] The intermediate insulating block may include any suitable and desired number of slots on each side. Preferably, the intermediate insulating block includes the same number of slots on the inner side as on the outer side. The number of slots provided in the intermediate insulating block (e.g., each side of the intermediate insulating block) may be a trade-off between the depth and number of slots (and therefore groups of insulating sheets), for example, in order to increase the path length around the edges of the intermediate insulating block and insulating sheets. Preferably, the intermediate insulating block includes at least two (e.g., three) slots formed in the first side. Preferably, the intermediate insulating block includes at least two (e.g., three) slots formed in the second side. When the intermediate insulating block includes multiple slots formed in the first side and / or the second side, preferably the depth of these slots (e.g., on the first side and / or the second side) into the intermediate insulating block is substantially the same.
[0082] In one embodiment, the intermediate insulating block comprises one or more grooves formed in one or more edges of the first side and / or one or more grooves formed in one or more edges of the second side. Preferably, the edges of the first side and the second side of the intermediate insulating block are (e.g., each) adjacent to (and, e.g., facing) the first power transmission board and the second power transmission board, respectively. Preferably, therefore, one or more insulating sheets arranged in these edge grooves are sandwiched (e.g., clamped) between the intermediate insulating block and the corresponding power transmission board. It will be understood that preferably the edge grooves are adjacent to (e.g., arranged on either side of) the mating surface of the intermediate insulating block.
[0083] Preferably, one or more edge grooves are formed in the intermediate insulating block as steps or tapers. Providing steps may help to form stops in the edge grooves for insulating sheets or the like to abut against. Preferably, the edge grooves extend from a mating surface of the intermediate insulating block.
[0084] Preferably, the size of the mating surface of the intermediate insulating block (e.g., each) in the (e.g., radial) direction across the wall of the vacuum chamber is substantially equal to the size of the mating surface of the adjacent outer insulating block in the (e.g., radial) direction across the wall of the vacuum chamber. It is therefore preferred that the size of the intermediate insulating block (e.g., including the portion in which the one or more grooves are formed) in the (e.g., radial) direction across the wall of the vacuum chamber is greater than the size of the first insulating block and / or the second insulating block in the (e.g., radial) direction across the wall of the vacuum chamber.
[0085] In one embodiment, the intermediate insulating block comprises one or more grooves formed away from the edge of the first side and / or the second side (e.g. in a central area). In this embodiment, these central grooves have a portion of the intermediate insulating block on each side of the groove. It is therefore preferred that one or more insulating sheets arranged in these central grooves are sandwiched (e.g. clamped) between (e.g. protruding) portions of the intermediate insulating block.
[0086] It will be appreciated that the intermediate insulating block may include any suitable and desired slot arrangement, for example, edge slots and / or central slots. However, in a preferred embodiment, the intermediate insulating block includes two slots formed in two edges of a first side (i.e., adjacent to the power transmission board), a central slot formed in the first side, two slots formed in two edges of a second side (i.e., adjacent to the power transmission board), and a central slot formed in the second side.
[0087] The intermediate insulating block can be formed as a single, unitary block of material. However, in some embodiments, for example, when the intermediate insulating block includes a plurality of slots in a first side and a second side (e.g., each of these sides), the intermediate insulating block includes a plurality of sub-blocks, wherein, for example, when the plurality of sub-blocks are placed together, at least one of the one or more (e.g., a plurality of) (e.g., a center) slots is formed between the plurality of sub-blocks (e.g., each of these sub-blocks).
[0088] Forming the intermediate insulating block from two or more sub-blocks may facilitate manufacturing of the intermediate insulating block. This is because it may not be necessary to form the slots away from the edges of the intermediate insulating block as cavities in the intermediate insulating block (i.e., surrounded by slots on both sides) because the slots are formed between the sub-blocks. It will be appreciated that if the intermediate insulating block is formed with one or more slots away from its edges as cavities, this may be difficult to form as a single block due to the physical geometry of the (e.g., relatively large and thin radius) protruding portions of the intermediate insulating block between or to the sides of the one or more slots (at least in preferred embodiments). Therefore, preferably one or more (e.g., each) of the sub-blocks includes one or more slots formed in one or more edges of a first side of the sub-block and / or one or more slots formed in one or more edges of a second side of the sub-block.
[0089] Preferably, a sub-block (e.g., each of the sub-blocks) comprises an (inner) mating surface for sealing against another of the sub-blocks. Preferably, therefore, two sub-blocks comprise respective (inner) mating surfaces for sealing against each other (and, e.g., as (outer) mating surfaces for sealing against the power transmission plate). In one embodiment, one or more (e.g., any combination or all) of the mating surfaces of the sub-block (e.g., each of the sub-blocks) comprise one or more grooves, wherein a compressible material is arranged in the grooves (e.g., each of the grooves). Preferably, the compressible material comprises a gasket, such as a linear cord or an O-ring. Preferably, the grooves of adjacent mating surfaces of the sub-blocks are offset from each other (e.g., in the manner outlined above for the insulating blocks).
[0090] One or more (e.g., center) grooves away from the edge of the intermediate block can have any suitable and desired shape. As with the edge grooves, the center groove can be stepped (e.g., rectangular). However, in a preferred embodiment, the center groove is tapered (e.g., widening toward the opening of the groove at the end surface of the first side or the second side, as appropriate). This helps insert one or more insulating sheets into the groove (e.g., due to the wider opening) and helps retain the insulating sheets in the groove (e.g., due to the narrower end of the groove). The tapered groove also helps reduce the material thickness of the intermediate insulating block on the side facing the intermediate insulating block. This helps increase the body insulation of the seal where the insulating sheet ends and may increase the risk of dielectric breakdown.
[0091] The one or more grooves (and therefore the overlap between the intermediate insulating block and the one or more insulating sheets) may have any suitable and desired depth (e.g. in a direction towards the interior or exterior of the vacuum chamber as appropriate). In one embodiment, the one or more grooves have a depth greater than 5 cm, such as greater than 8 cm, such as about 10 cm. The depth of the one or more grooves is preferably greater than the tracking distance that the seal is protecting against. When there are fewer grooves, the one or more grooves may have a greater depth. When there are more grooves, the grooves may be able to have a smaller depth.
[0092] One or more (inner and outer) insulating sheets may be arranged in any suitable manner in the one or more slots of the intermediate insulating block. Preferably, the seal comprises the same number of groups of one or more insulating sheets as the number of slots in the intermediate insulating block, such that there is one or more insulating sheets extending from each of the one or more slots. Thus, preferably the seal comprises at least two (e.g. three) groups of one or more inner insulating sheets for extending between the first power transmission plate and the second power transmission plate on the interior of the vacuum chamber, wherein the at least two (e.g. three) groups of one or more inner insulating sheets are arranged in at least two (e.g. three) groups of slots in the first side of the intermediate insulating block.
[0093] Similarly, preferably the seal comprises at least two (e.g. three) groups of one or more external insulating sheets for extending between the first power transmission plate and the second power transmission plate on the exterior of the vacuum chamber wherein the at least two (e.g. three) groups of one or more external insulating sheets are arranged in at least two (e.g. three) groups of slots in the second side of the intermediate insulating block. As with the plurality of slots on (e.g. each side of) the intermediate insulating block, the provision of a plurality of groups of insulating sheets helps to increase the insulation between the power transmission plates and helps to increase the path length between them, which reduces the risk of surface tracking between the plates.
[0094] In a preferred embodiment, the seal comprises a plurality of insulating sheets in one or more slots (e.g., each of these slots) of the intermediate insulating block. The plurality of insulating sheets in (e.g., each) group of insulating sheets preferably comprises at least ten insulating sheets, e.g., at least fifteen insulating sheets, e.g., at least twenty insulating sheets. Providing a plurality of sheets in each group of insulating sheets helps to increase the amount of insulation between the power transmission plates. Preferably, the plurality of insulating sheets are evenly distributed between the one or more slots of the intermediate insulating block.
[0095] The (internal and external) insulating sheets may have any suitable and desired geometry. Preferably, one or more insulating sheets (e.g., each of these insulating sheets) have a thickness (in the direction between the first wall and the second wall of the vacuum chamber (e.g., parallel to the direction)) of less than 200 microns, such as less than 100 microns, such as about 75 microns. A greater number of thinner sheets provides greater protection against electrical breakdown. However, thinner sheets are more susceptible to mechanical damage, so a balance may be provided between the number of sheets and their thickness to achieve a particular dielectric strength.
[0096] Preferably, the (inner and outer) insulating sheets extend between the power transmission plates from the slots of the intermediate insulating block into the vacuum chamber (inside and outside) a distance significantly greater than the depth of the slots of the intermediate insulating block. This means that the insulating sheets provide a significant majority of the insulation between the power transmission plates, which helps to reduce the inductance between the power transmission plates.
[0097] When the seal extends around the periphery of the vacuum chamber, for example, such that the insulating sheet extends around the periphery of the vacuum chamber, each insulating sheet may extend continuously around the periphery. However, in a preferred embodiment, the seal comprises a plurality of overlapping insulating sheets arranged in one or more grooves (e.g., each of the grooves), wherein each of the plurality of overlapping insulating sheets extends around a periphery that is less than the vacuum chamber, and at least one of the plurality of overlapping insulating sheets (e.g., an adjacent one) extends around a common periphery portion with at least another of the plurality of overlapping insulating sheets. The overlapping insulating sheets may include overlapping inner insulating sheets and / or overlapping outer insulating sheets.
[0098] The plurality of overlapping insulating sheets may be arranged in any suitable and desired configuration. In a preferred embodiment, each of the plurality of overlapping insulating sheets extends around half of the circumference of the vacuum chamber. Preferably, adjacent insulating sheets (e.g., each pair) of the plurality of overlapping insulating sheets overlap about one-sixth of the circumference of the vacuum chamber, for example, overlapping at an angle of about 60 degrees around the circumference of the vacuum chamber (e.g., towards the center of the vacuum chamber). Thus preferably, three adjacent insulating sheets (e.g., equally spaced) are arranged around the circumference of the vacuum chamber to provide two overlapping insulating sheet layers.
[0099] The inner and outer insulating sheets may be made of any suitable and desired (dielectric) material (e.g., film). In a preferred embodiment, the inner and outer insulating sheets are made of polyester, e.g., bi-oriented polyethylene terephthalate (boPET) such as Mylar (RTM).
[0100] The seal (e.g., components of the seal) can be arranged to provide any suitable and desired (e.g., reduced, e.g., minimized) inductance. In one embodiment, the seal has an inductance of less than 10 nH, such as less than 5 nH, such as less than 3 nH. These inductance values of the seal facilitate delivering a high voltage with a high discharge to the vacuum chamber (e.g., a load in the vacuum chamber) through the power transmission board.
[0101] Preferred embodiments of the present invention will now be described, by way of example only, with reference to the accompanying drawings, in which:
[0102] Figure 1 Schematically shows a pulse power device according to an embodiment of the present invention;
[0103] Figure 2 shows a cross section of a power feeding device according to an embodiment of the present invention; and
[0104] Figure 3 An embodiment of the present invention is shown. Figure 2 A set of insulating sheets used in a power feeder is shown.
[0105] Embodiments of the present invention will now be described, which provide a vacuum chamber for use in a pulsed power (e.g., high energy density physics) device. Such a pulsed power device requires a high voltage power supply to be fed into the vacuum chamber so that high voltage pulses are delivered to a load in the vacuum chamber. In order to maintain an effective vacuum in the vacuum chamber, it is necessary to provide a good seal around the location where the power supply enters the vacuum chamber. An effective vacuum helps to reduce the risk of electrical breakdown in the vacuum chamber. As will be described, a seal according to an embodiment of the present invention helps to minimize the inductance caused by the insulation of the seal between the power transmission plates of the power supply.
[0106] Figure 1 A pulse power device 201 according to an embodiment of the invention is shown. The pulse power device 201 comprises a voltage generation system 202 arranged to apply a voltage V between a pair of power transmission plates 203, 204. The power transmission plates 203, 204 are arranged to deliver the voltage to a load 205 in a vacuum chamber 206. The vacuum chamber 206 has a seal 207, wherein the power transmission plates 203, 204 pass through the wall of the vacuum chamber 206.
[0107] Figure 2 The power feeding device 1 for a vacuum chamber according to an embodiment of the present invention is shown, for example, Figure 1 The pulse power device 201 is shown for use. Figure 2A section is shown through the walls 2, 4 of the vacuum chamber, which together with the power feed 1 extend around the periphery of the vacuum chamber. The walls 2, 4 of the vacuum chamber thus define a boundary between an interior 6 and an exterior 8 of the vacuum chamber.
[0108] The power feeder 1 comprises a seal for sealing a gap between the walls 2, 4 of the vacuum chamber through which a pair of power transmission plates 10, 12 pass. The power transmission plates 10, 12 are arranged to deliver a high voltage to a load inside the vacuum chamber.
[0109] The power feeder 1 comprises two U-shaped outer insulating blocks 14, 16 which are arranged around the edges of the walls 2, 4 of the vacuum chamber. Each outer insulating block 14, 16 has a planar mating surface 18, 20 respectively sealed against the respective edges of the walls 2, 4 of the vacuum chamber. Each outer insulating block 14, 16 also has a planar mating surface 22, 24 respectively sealed against the respective power transmission board 10, 12. A groove 26, 28 is defined in each of the planar mating surfaces 22, 24 facing the power transmission board 10, 12 and an O-ring 30, 32 is located in each groove 26, 28.
[0110] The intermediate insulating block formed by the two sub-blocks 34, 36 is sandwiched between the two power transmission plates 10, 12. Each sub-block 34, 36 has a planar mating surface 38, 40, 42, 44 on either side, an outer mating surface 38, 44 for sealing against the power transmission plates 10, 12, and an inner mating surface 40, 42 for sealing against each other. A groove 46, 48, 50, 52 is defined in each mating surface 38, 40, 42, 44 and an O-ring 54, 56, 58, 60 is located in each groove 46, 48, 50, 52. As can be seen from Figure 2 It is seen that the grooves 26 , 28 , 46 , 48 , 50 , 52 (and therefore the O-rings 30 , 32 , 54 , 56 , 58 , 60 ) are offset from one another in the mating surfaces 22 , 24 , 38 , 40 , 42 , 44 adjacent one another.
[0111] The sub-blocks 34, 36 of the middle insulating block extend further outward than the outer insulating blocks 14, 16, wherein the edges of the sub-blocks 34, 36 are tapered. This taper of the sub-blocks 34, 36 forms three slots 62, 64, 66, 68, 70, 72 on either side of the middle insulating block. A set of 20 Mylar (RTM) insulating sheets 74, 76, 78, 80, 82, 84 is located in each of the slots 62, 64, 66, 68, 70, 72, such that three sets of insulating sheets 74, 76, 78 extend into the interior 6 of the vacuum chamber and three sets of insulating sheets 80, 82, 84 extend between the power transmission plates 10, 12 to the exterior 8 of the vacuum chamber.
[0112] In the interior 6 of the vacuum chamber, the power transmission plates 10, 12 are closer together than they are at the walls 2, 4 of the vacuum chamber and extend to a load (not shown) at the center of the vacuum chamber. At the exterior 8 of the vacuum chamber, the power transmission plates 10, 12 are closer together than they are at the walls 2, 4 of the vacuum chamber and extend to a voltage generating system (e.g., as in FIG. 1 ) for charging the power transmission plates 10, 12 to a high voltage. Figure 1 ).
[0113] Figure 3 An embodiment of the present invention is shown. Figure 2 Configuration of a set of insulating sheets of the power feeding device 1 shown in FIG. Figure 3 The insulating sheets 101, 102, 103 shown in FIG. 1 can form Figure 2 Thus, each layer (for example, there may be twenty layers) of the plurality of insulating sheets 74, 76, 78, 80, 82, 84 may be composed of three insulating sheets 101, 102, 103.
[0114] Figure 3 The insulating sheets 101, 102, 103 are shown to each extend around half of the circumference of the vacuum chamber. The insulating sheets 101, 102, 103 in the set each overlap the adjacent insulating sheet by approximately 60 degrees.
[0115] In operation, the vacuum chamber and the power feed device are assembled as follows Figure 1 and Figure 2 . The power transmission plates 10, 12 are charged to a high voltage (e.g., ±100 kV) by a voltage generating system connected to the power transmission plates 10, 12. The seals between the power transmission plates 10, 12 and between the walls 2, 4 of the vacuum chamber function to insulate the power transmission plates 10, 12 from each other and from the walls 2, 4 of the vacuum chamber. This helps to allow the power transmission plates 10, 12 to be charged to a high voltage and to maintain the high voltage without risk of electrical breakdown. The high voltage is then discharged to a load in the vacuum chamber, for example, as in Figure 1 Parts of the pulse power system are shown in FIG.
[0116] It will be seen from the above that, in at least preferred embodiments, the vacuum chamber seal of the present invention provides an effective seal between the walls of the vacuum and the pair of power transmission plates due to the solid insulating blocks. The insulating sheets of the seal help to allow the pair of power transmission plates to be brought closer together, thereby helping to reduce the inductance between the pair of power transmission plates, while still providing sufficient insulation between them, for example, to prevent electrical punch-through even when subjected to high electric field gradients. The seal of the present invention thus exploits the beneficial properties of both insulating blocks (i.e., good seals) and insulating plates (i.e., low inductance).
[0117] The transition between the insulating sheet and the insulating block via the slot helps to reduce the extent of the insulating block, which also helps to reduce the inductance between the pair of power transfer plates while still allowing a good seal to be provided and the power transfer plates to be insulated from each other. This helps to allow the power transfer plates to deliver high voltages and currents to the load in the vacuum chamber at high discharge rates. The slots in the middle insulating block also help to increase the path length between the power transfer plates. This helps to reduce the risk of electrical breakdown due to surface tracking.
Claims
1. A seal for a vacuum chamber, wherein: The vacuum chamber comprises a first wall and a second wall, and the sealing member comprises: a first outer insulating block for sealing between the first wall of the vacuum chamber and a first power transmission plate extending from the inside of the vacuum chamber to the outside of the vacuum chamber between the first wall and the second wall of the vacuum chamber; a second outer insulating block for sealing between the second wall of the vacuum chamber and a second power transmission plate extending from the interior of the vacuum chamber to the exterior of the vacuum chamber between the first wall and the second wall of the vacuum chamber; an intermediate insulating block for sealing between the first power transmission plate and the second power transmission plate, wherein the intermediate insulating block comprises one or more grooves formed in a first side of the intermediate insulating block for facing the interior of the vacuum chamber and one or more grooves formed in a second side of the intermediate insulating block for facing the exterior of the vacuum chamber; one or more internal insulating sheets for extending between the first power transmission plate and the second power transmission plate inside the vacuum chamber, wherein the one or more internal insulating sheets are arranged in the one or more grooves in the first side of the intermediate insulating block; and one or more external insulating sheets for extending between the first power transmission plate and the second power transmission plate outside the vacuum chamber, wherein the one or more external insulating sheets are arranged in the one or more grooves in the second side of the intermediate insulating block.
2. The seal according to claim 1, wherein: The first power transmission plate and the second power transmission plate are arranged to deliver high voltage and / or high current to a load in the vacuum chamber.
3. The seal according to claim 1 or 2, wherein: The first outer insulating block comprises a mating surface for sealing against the first wall of the vacuum chamber and the first power transmission plate, wherein the second outer insulating block comprises a mating surface for sealing against the second wall of the vacuum chamber and the second power transmission plate, and wherein the intermediate insulating block comprises a mating surface for sealing against the first power transmission plate and the second power transmission plate.
4. The seal according to claim 3, wherein: The mating surface of each of the insulating blocks includes one or more grooves, wherein a compressible material is disposed in each of the grooves.
5. The seal according to claim 4, wherein: The grooves in the mating surfaces are offset from each other.
6. The seal according to claim 3, wherein: The dimension of the mating surface of the middle insulating block in a direction across the first and second walls of the vacuum chamber is substantially equal to the dimension of the mating surface of an adjacent outer insulating block in a direction across the wall of the vacuum chamber.
7. The seal of claim 1, wherein: The first and second outer insulating blocks and the middle insulating block include a polymer.
8. The seal of claim 1, wherein: The dimensions of the first and second outer insulating blocks and the middle insulating block in a direction across the first and second walls of the vacuum chamber are greater than or equal to the dimensions of the first and second walls of the vacuum chamber in a direction across the wall of the vacuum chamber.
9. The seal of claim 1, wherein: A dimension of the intermediate insulating block in a direction between the first wall and the second wall of the vacuum chamber is greater than a ratio of a voltage across the power transmission plate to a dielectric strength of the intermediate insulating block.
10. The seal of claim 1, wherein: The first and second outer insulating blocks are shaped to extend upward along sides of the first and second walls of the vacuum chamber, respectively.
11. The seal of claim 1, wherein: The intermediate insulating block includes at least two slots formed in the first side of the intermediate insulating block, and wherein the intermediate insulating block includes at least two slots formed in the second side of the intermediate insulating block.
12. The seal of claim 1, wherein: The intermediate insulating block includes one or more grooves formed in one or more edges of the first side adjacent to the first power transmission plate and / or one or more grooves formed in one or more edges of the second side adjacent to the second power transmission plate.
13. The seal of claim 12, wherein: The one or more edge grooves are formed as steps or tapers in the intermediate insulating block.
14. A seal according to claim 12 or 13, wherein: The intermediate insulating block includes one or more grooves formed away from the edges of the first side and / or the second side of the intermediate insulating block.
15. The seal of claim 1, wherein: The intermediate insulating block includes a plurality of sub-blocks, wherein at least one of the one or more grooves is formed between the plurality of sub-blocks.
16. The seal of claim 15, wherein: One or more of the sub-blocks include one or more grooves formed in one or more edges of a first side of the sub-block and / or one or more grooves formed in one or more edges of a second side of the sub-block.
17. The seal of claim 15, wherein: The sub-blocks include mating surfaces for sealing against another of the sub-blocks, wherein one or more of the mating surfaces of the sub-blocks include one or more grooves, wherein a compressible material is disposed in the grooves.
18. The seal of claim 1, wherein: The seal includes a plurality of insulating sheets in each of the one or more grooves of the intermediate insulating block.
19. The seal of claim 1, wherein: The seal includes a plurality of overlapping insulating sheets arranged in the one or more grooves, wherein each of the plurality of overlapping insulating sheets extends around a perimeter that is less than the vacuum chamber, and at least one of the plurality of overlapping insulating sheets extends around a common perimeter portion with at least another of the plurality of overlapping insulating sheets.
20. The seal of claim 1, wherein: The one or more inner insulating sheets and the outer insulating sheet are made of polyester.
21. The seal of claim 1, wherein: The seal has an inductance of less than 10 nH.
22. A vacuum chamber comprising: a first wall and a second wall defining an outer surface of the vacuum chamber; A load in the vacuum chamber; a first power transmission plate extending from an interior of the vacuum chamber to an exterior of the vacuum chamber between the first wall and the second wall of the vacuum chamber; a second power transmission plate extending from an interior of the vacuum chamber to an exterior of the vacuum chamber between the first wall and the second wall of the vacuum chamber, wherein the first power transmission plate and the second power transmission plate are arranged to deliver a voltage to the load; and a seal for sealing between the first wall and the second wall and between the first power transmission plate and the second power transmission plate; Wherein, the sealing element comprises: a first outer insulating block, the first outer insulating block sealing between the first wall of the vacuum chamber and the first power transmission plate; a second outer insulating block, the second outer insulating block sealing between the second wall of the vacuum chamber and the second power transmission plate; an intermediate insulating block that seals between the first power transmission plate and the second power transmission plate, wherein the intermediate insulating block includes one or more grooves formed in a first side of the intermediate insulating block facing the interior of the vacuum chamber and one or more grooves formed in a second side of the intermediate insulating block facing the exterior of the vacuum chamber; one or more internal insulating sheets extending between the first power transmission plate and the second power transmission plate inside the vacuum chamber, wherein the one or more internal insulating sheets are arranged in the one or more grooves in the first side of the intermediate insulating block; and One or more external insulating sheets extending between the first power transmission plate and the second power transmission plate outside the vacuum chamber, wherein the one or more external insulating sheets are arranged in the one or more grooves in the second side of the intermediate insulating block.
23. A power feeder for delivering voltage to a load in a vacuum chamber, wherein: The vacuum chamber comprises a first wall and a second wall, and the power feeding device comprises: a first power transmission plate extending from the inside of the vacuum chamber to the outside of the vacuum chamber between the first wall and the second wall of the vacuum chamber; a second power transmission plate extending from the interior of the vacuum chamber to the exterior of the vacuum chamber between the first wall and the second wall of the vacuum chamber, wherein the first power transmission plate and the second power transmission plate are arranged to deliver a voltage to the load; and a seal for sealing between the first wall and the second wall and between the first power transmission board and the second power transmission board, wherein the seal comprises: a first outer insulating block for sealing between the first wall of the vacuum chamber and the first power transmission plate; a second outer insulating block for sealing between the second wall of the vacuum chamber and the second power transmission plate; an intermediate insulating block that seals between the first power transmission plate and the second power transmission plate, wherein the intermediate insulating block includes one or more grooves formed in a first side of the intermediate insulating block for facing the interior of the vacuum chamber and one or more grooves formed in a second side of the intermediate insulating block for facing the exterior of the vacuum chamber; one or more internal insulating sheets extending between the first power transmission plate and the second power transmission plate inside the vacuum chamber, wherein the one or more internal insulating sheets are arranged in the one or more grooves in the first side of the intermediate insulating block; and One or more external insulating sheets extending between the first power transmission plate and the second power transmission plate outside the vacuum chamber, wherein the one or more external insulating sheets are arranged in the one or more grooves in the second side of the intermediate insulating block.
24. A pulse power device comprising: A vacuum chamber, comprising: A first wall and a second wall defining an outer surface of the vacuum chamber; and A load in the vacuum chamber; The pulse power device further comprises: a first power transmission plate extending from an interior of the vacuum chamber to an exterior of the vacuum chamber between the first wall and the second wall of the vacuum chamber; a second power transmission plate extending between the first wall and the second wall of the vacuum chamber from an interior of the vacuum chamber to an exterior of the vacuum chamber, wherein the first power transmission plate and the second power transmission plate are arranged to deliver a voltage to the load; a voltage generating system for applying a voltage between the first power transmission board and the second power transmission board; and a seal for sealing between the first wall and the second wall and between the first power transmission plate and the second power transmission plate; Wherein, the sealing element comprises: a first outer insulating block, the first outer insulating block sealing between the first wall of the vacuum chamber and the first power transmission plate; a second outer insulating block, the second outer insulating block sealing between the second wall of the vacuum chamber and the second power transmission plate; an intermediate insulating block that seals between the first power transmission plate and the second power transmission plate, wherein the intermediate insulating block includes one or more grooves formed in a first side of the intermediate insulating block facing the interior of the vacuum chamber and one or more grooves formed in a second side of the intermediate insulating block facing the exterior of the vacuum chamber; one or more inner insulating sheets extending between the first power transmission plate and the second power transmission plate inside the vacuum chamber, wherein the one or more inner insulating sheets are arranged in the one or more grooves in the first side of the intermediate insulating block; and one or more outer insulating sheets extending between the first power transmission plate and the second power transmission plate outside the vacuum chamber, wherein the one or more outer insulating sheets are arranged in the one or more grooves in the second side of the intermediate insulating block.
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