acceleration sensor

Abstract

The embodiment of the application provides an acceleration sensor, and belongs to the technical field of sensors. The acceleration sensor comprises a shell and a sensing assembly. The shell has an inner cavity; the sensing assembly is arranged in the inner cavity. The sensing assembly comprises an elastic piece, an inertial piece and a sensing piece which are sequentially abutted, and the elastic piece and the sensing piece are fixed in the inner cavity. The sensing piece comprises a first substrate and a second substrate which are oppositely arranged along a first direction, and the edges of the first substrate and the second substrate are connected to form a closed accommodation cavity between the first substrate and the second substrate. When the acceleration sensor has acceleration due to the movement of the component, the inertial piece can move along the first direction to abut the middle part of the first substrate under the action of the elastic force of the elastic piece and the inertial force of the inertial piece, so as to apply actual pressure to the first substrate, make the first substrate rapidly produce corresponding actual deformation, and then make the sensing piece rapidly produce an actual signal based on the actual deformation, so that the corresponding acceleration can be reflected according to the actual signal.

Description

TECHNICAL FIELD

[0001] Embodiments of the present application relate to the technical field of sensor, in particular to an acceleration sensor. BACKGROUND

[0002] Acceleration sensor is a very important inertial sensor and measuring device, which is widely used in aerospace, vibration monitoring, industrial control, vehicle, geophysical exploration and other fields.

[0003] With the improvement of the sensitivity of application devices and product components, the requirement for the sensitivity of acceleration sensor is also higher and higher. The existing acceleration sensor cannot meet the use requirement of high sensitivity devices and products. Therefore, it is urgent to develop high sensitivity acceleration sensor. SUMMARY

[0004] In view of the above problems, embodiments of the present application provide an acceleration sensor to solve the problem of complex structure and low sensitivity of the existing acceleration sensor.

[0005] Embodiments of the present application provide an acceleration sensor. The acceleration sensor comprises a shell and a sensing assembly. The shell has an inner cavity, and the sensing assembly is arranged in the inner cavity. The sensing assembly comprises an elastic member, an inertial member and a sensing member which are sequentially abutted, and the elastic member and the sensing member are fixed in the inner cavity. The sensing member comprises a first substrate and a second substrate which are oppositely arranged along a first direction, and the edges of the first substrate and the second substrate are connected to form a closed accommodating cavity between the first substrate and the second substrate. The inertial member can move along the first direction under the action of the elastic force of the elastic member and / or the inertial force of the inertial member, so as to abut the middle part of the first substrate and make the first substrate deform towards the second substrate; the first direction is parallel to the thickness direction of the first substrate.

[0006] The embodiment of the present application connects the edge parts of the first substrate and the second substrate to form the inductor with the accommodating cavity, and sequentially assembles the elastic member, the inertial member and the inductor in the shell, so that the inertial member abuts against the middle part of the first substrate in the inductor. When the acceleration sensor has acceleration with the movement of the component, the first substrate can rapidly generate a larger degree of actual deformation under the action of the actual pressure (the combined force of the elastic force of the elastic member and the inertial force of the inertial member). This is because, when the accommodating cavity is formed between the first substrate and the second substrate, the middle part of the first substrate is not supported by the second substrate relative to the edge part, and further, when the inertial member abuts against the middle part of the first substrate, the middle part is more likely to generate a faster and larger degree of deformation under the action of the actual pressure due to the lack of support. Further, when the inertial member abuts against the middle part of the first substrate, the possibility of the inertial member abutting against other components (such as the shell) other than the first substrate is smaller, and the first substrate can almost completely receive the actual pressure from the inertial member, and is more likely to rapidly generate a larger degree of actual deformation under the action of the actual pressure. On the basis that the first substrate can rapidly generate a larger degree of actual deformation, the inductor can rapidly generate a larger value of actual signal based on the actual deformation of the first substrate, so as to obtain the actual deformation of the first substrate according to the actual signal, and then calculate the deformation amount of the first substrate based on the actual deformation and the preset deformation, and further obtain the acceleration of the inertial member according to the deformation amount. The preset deformation is the deformation of the first substrate under the preset pressure of the inertial member (i.e. the elastic force of the elastic member applied to the inertial member) during assembly. Since the acceleration of the inertial member is generated with the acceleration of the acceleration sensor, and the acceleration of the acceleration sensor is generated with the acceleration of the component, the acceleration of the inertial member is approximately equal to the acceleration of the acceleration sensor, and is approximately equal to the acceleration of the component using the acceleration sensor. Therefore, on the basis that the acceleration of the inertial member can be rapidly obtained, the acceleration of the acceleration sensor and the acceleration of the component can also be rapidly obtained, so that the sensitivity and the precision of the acceleration sensor prepared by the embodiment of the present application are improved.

[0007] In some embodiments, the thickness of the first substrate is less than or equal to 3 millimeters.

[0008] Through the above scheme, the stiffness coefficient of the first substrate can be smaller, the sensitivity to the actual pressure is improved, and further, the first substrate is more likely to generate a faster and larger degree of actual deformation under the action of the actual pressure. The inductor can rapidly generate a larger value of actual signal based on the actual deformation of the first substrate, so as to obtain the specific deformation amount of the actual deformation of the first substrate according to the actual signal, and further rapidly obtain the acceleration of the inertial member according to the deformation amount, which is more conducive to improving the sensitivity and the precision of the acceleration sensor of the embodiment of the present application.

[0009] In some embodiments, the first substrate and the second substrate are both provided as the pole plate including the conductive layer.

[0010] By the above scheme, the inductor can be used as a capacitor, and the inductor can generate an actual capacitance signal based on the distance between the first substrate and the second substrate. As the first substrate rapidly deforms to a large extent under the actual pressure, the inductor can rapidly generate an actual capacitance signal with a large value based on the distance between the first substrate and the second substrate, so as to facilitate obtaining the acceleration of the inertial member quickly according to the actual capacitance signal. Since the actual capacitance signal is a specific value after quantization, the corresponding acceleration value obtained according to the actual capacitance signal has higher precision, so that the sensitivity and precision of the acceleration sensor prepared in the embodiments of the present application are further improved.

[0011] In some embodiments, the accommodating cavity contains a medium, and the dielectric constant of the medium is greater than or equal to 1 F / m.

[0012] When the inductor is used as a capacitor, and the dielectric constant of the medium is greater than or equal to 1 F / m, the medium has a strong ability to store charges in the electric field of the inductor. Under the condition that the distance between the first substrate and the second substrate is constant, a larger dielectric constant can generate an actual capacitance signal with a larger value between the first substrate and the second substrate, so as to amplify the actual capacitance signal. That is, even if the acceleration changes slightly in different states, it can also cause a large change in the actual capacitance signal, facilitating reading of the actual capacitance signal and obtaining different acceleration values with small differences through the actual capacitance signal, so that the sensitivity and precision of the acceleration sensor prepared in the embodiments of the present application are improved.

[0013] In some embodiments, the medium includes at least one of liquid crystal, ester oil or mineral oil.

[0014] Since the dipole moment, polarity and dielectric constant of liquid crystal, ester oil and mineral oil are large, when the medium includes liquid crystal, ester oil and mineral oil, the ability of the inductor to store charges can be increased, so that the sensitivity and precision of the acceleration sensor prepared in the embodiments of the present application are improved.

[0015] In some embodiments, the shell includes a cylindrical side wall, the axis of the side wall is parallel to the first direction, and the inertial member is in contact with the side wall to provide guidance to the inertial member, so that the inertial member moves along the first direction to abut against the middle part of the first substrate.

[0016] By the above scheme, the inertial part can be attached to the side wall and guided by the side wall to move along the first direction to abut the middle part of the first substrate. Further, since the first direction is parallel to the thickness direction of the first substrate, when the inertial part abuts the first substrate along the first direction, the direction of the abutting force is almost parallel to the thickness direction of the first substrate, so that the first substrate can produce greater actual deformation in the direction of the second substrate (i.e. the thickness direction of the first substrate) to improve the sensitivity of the acceleration sensor, so that the acceleration sensor of the embodiment can measure smaller acceleration values.

[0017] In some embodiments, the inertial part includes a guiding part and a force applying part, the force applying part is arranged on the side of the guiding part facing the first substrate, the guiding part is in contact with the side wall to make the inertial part move along the first direction, and the end surface area of the force applying part close to the first substrate is smaller than the end surface area of the first substrate close to the force applying part.

[0018] By the above scheme, first, since the guiding part is in contact with the side wall, the guiding part can be attached to the side wall and guided by the side wall to make the inertial part move along the first direction to abut the middle part of the first substrate; second, the guiding part as a part of the inertial part is in contact with the side wall to guide the inertial part and reduce the contact area between the inertial part and the side wall, so that the frictional resistance between the inertial part and the side wall is reduced during the movement of the inertial part towards the first substrate, and the pressure on the first substrate is closer to the actual pressure; finally, the end surface area of the force applying part close to the first substrate is set to be smaller than the end surface area of the first substrate close to the force applying part, so that the pressure on the middle part of the first substrate is increased, the actual deformation of the first substrate is easier to occur, the actual signal of the inductive part is easier to produce, and the sensitivity of the acceleration sensor is higher.

[0019] In some embodiments, the guiding part includes a body and multiple protrusions arranged on the body, the protrusions are arranged protruding towards the side wall, and the guiding part is in linear contact with the side wall along the first direction through the protrusions.

[0020] The protrusions are arranged to be in contact with the side wall, so that the protrusions can guide the inertial part to move along the first direction to abut the middle part of the first substrate, and the contact area between the guiding part and the side wall is reduced, so that the frictional resistance between the guiding part and the side wall is reduced during the movement of the inertial part towards the first substrate, and the pressure on the first substrate is closer to the actual pressure, the sensitivity of the actual deformation of the first substrate is improved, the sensitivity of the actual signal of the inductive part is improved, and the sensitivity of the acceleration sensor is improved.

[0021] In some embodiments, the guiding part is configured as a prism structure, and the prism structure is in linear contact with the side wall along the first direction through multiple side edges.

[0022] The side edge of the prism structure is arranged in contact with the side wall, so that the side edge can guide the inertial piece with the side wall as the support, and the inertial piece moves along the first direction to abut the middle part of the first substrate, and the contact area between the guide part and the side wall is reduced, the friction resistance between the guide part and the side wall is reduced, and the inductive piece can receive a pressure closer to the actual pressure, the sensitivity of the first substrate to generate actual deformation, the sensitivity of the inductive piece to generate actual signals, and the sensitivity of the acceleration sensor are improved. In addition, the guide part is arranged as a more conventional prism structure, which not only facilitates the processing of the guide part, but also reduces the manufacturing cost of the acceleration sensor.

[0023] In some embodiments, the side wall is provided with a guide groove along the first direction, and at least part of the guide part is located in the guide groove.

[0024] Through the above scheme, at least part of the guide part can move along the first direction towards the first substrate in the guide groove, and during the movement of the guide part, the at least part of the guide part is limited by the groove wall of the guide groove to reduce the possibility of rotation or direction deviation of the inertial piece when moving towards the first substrate, improve the accuracy of the force applying part abutting the middle part of the first substrate, and the sensitivity of the first substrate to generate actual deformation under the abutment of the force applying part.

[0025] In some embodiments, the acceleration sensor further comprises a positioning piece arranged on the side of the first substrate facing the inertial piece, and the positioning piece is used to position the force applying part.

[0026] Through the above scheme, when the inertial piece moves along the first direction towards the first substrate, the positioning piece can limit the force applying part to reduce the possibility of movement of the force applying part in other directions except the first direction, improve the accuracy of the force applying part abutting the middle part of the first substrate, and the sensitivity of the first substrate to generate actual deformation under the abutment of the force applying part, so as to improve the sensitivity of the acceleration sensor.

[0027] In some embodiments, the positioning piece is configured as a ring structure, at least part of the force applying part is located in the ring structure, and the ring structure is used to limit the position of the force applying part abutting the first substrate.

[0028] Through the above scheme, the ring structure can accommodate at least part of the force applying part, limit at least part of the force applying part, reduce the possibility of movement of the force applying part in other directions except the first direction, improve the accuracy of the force applying part abutting the middle part of the first substrate, and the sensitivity of the first substrate to generate actual deformation under the abutment of the force applying part, so as to improve the sensitivity of the acceleration sensor.

[0029] The above description is only a summary of the technical solutions of the embodiments of the present application. In order to enable a clearer understanding of the technical means of the embodiments of the present application, the embodiments of the present application can be implemented according to the content of the description, and in order to enable the above and other purposes, characteristics and advantages of the embodiments of the present application to be more obvious and easy to understand, the specific implementation manner of the present application is described below. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiment description will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0031] Figure 1 It is an exploded view of the acceleration sensor in some embodiments.

[0032] Figure 2 It is an exploded view of the sensing assembly in some embodiments.

[0033] Figure 3 It is an exploded view of the sensing piece in some embodiments.

[0034] Figure 4 It is a schematic view of the abutment of the inertial piece and the first substrate in some embodiments.

[0035] Figure 5 It is a schematic view of the first substrate or the second substrate in some embodiments.

[0036] Figure 6 It is an exploded view of the shell in some embodiments.

[0037] Figure 7 It is an exploded view of the inertial piece in some embodiments.

[0038] Figure 8 It is a schematic view of the contact of the first guide part with the side wall in some embodiments.

[0039] Figure 9 It is a schematic view of the contact of the second guide part with the side wall in some embodiments.

[0040] Figure 10 It is a layout of the guide groove on the side wall in some embodiments.

[0041] Figure 11 It is a layout of the force applying part, the positioning piece and the first substrate in some embodiments.

[0042] BRIEF DESCRIPTION OF DRAWINGS:

[0043] The shell 1, the side wall 11, the guide groove 110, the first cover 12, the second cover 13; the induction assembly 2; the elastic member 21; the inertial member 22, the guide portion 221, the main body 2211, the protrusion 2212, the force applying portion 222; the induction member 23, the first substrate 231, the second substrate 232, the base layer A, the conductive layer B, the insulating layer C, the medium 233; the positioning member 24;

[0044] The first direction Y. DETAILED DESCRIPTION

[0045] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0046] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the specification herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application; the terms "comprising" and "having", and any variations thereof, as used in the specification and claims herein, are intended to cover not only the inclusive but also the exclusive.

[0047] Reference herein to "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase "embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive or alternative embodiments. It is expressly understood that the embodiments described herein are merely examples from a whole class of comparable embodiments which those skilled in the art will readily appreciate. It is further understood that the description and drawings included herein are not intended to limit the claims to the specific embodiments.

[0048] The term "and / or", merely describes an associated relationship of associated objects, which means that there can be three relationships, for example, A and / or B, which can represent the three cases of existence of A, existence of A and B, and existence of B. In addition, the character " / " herein generally represents an "or" relationship between the front and rear associated objects.

[0049] The orientation words appearing in the following description are the directions shown in the drawings, and are not intended to limit the specific structure of the present application. For example, in the description of the present application, the terms "thickness", "inner", "outer", "axial", "radial", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only intended to facilitate the description of the present application and simplify the description, and are not intended to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0050] In addition, expressions such as the Y direction for indicating the directions of the operation and structure of the components of the present embodiment are not absolute but relative, and although the indications are appropriate when the components are in the positions shown in the drawings, the directions should be interpreted differently when the positions are changed to correspond to the changes.

[0051] In addition, the terms "first", "second", and the like in the description and claims of the present application or the above drawings are used to distinguish different objects, and are not intended to describe a particular order, and can explicitly or implicitly include one or more of the features.

[0052] In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more (including two), and similarly, "a plurality of groups" means two or more groups (including two groups).

[0053] In the description of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", and "connection" should be broadly understood, for example, the "connection" or "connection" of mechanical structures can mean physical connection, for example, physical connection can be fixed connection, for example, fixed connection by fixing member, for example, fixed connection by screw, bolt or other fixing member; physical connection can also be detachable connection, for example, mutual clamping or clamping connection; physical connection can also be integrally connected, for example, welding, bonding or integrally formed connection for connection.

[0054] An acceleration sensor is a testing instrument that converts pressure generated by physical phenomena such as acceleration, vibration, impact, etc. into a signal that is easy to measure. With the improvement of technology in the technology industry, the requirement for the sensitivity of the acceleration sensor in the fields of industrial monitoring, mechanical health diagnosis, aviation, aerospace, military industry, vehicles, etc. is increasing, and the market demand for high-sensitivity acceleration sensors is also increasing.

[0055] The inventor finds that the structure of the existing acceleration sensor is unreasonable, so that the pressure conversion element in the acceleration sensor cannot fully and accurately receive the pressure generated by physical phenomena such as speed, vibration and impact, thereby reducing the accuracy of the acceleration sensor. In addition, due to the insensitivity of the pressure conversion element in the existing acceleration sensor to pressure, it cannot quickly generate accurate signals based on pressure, resulting in poor sensitivity of the acceleration sensor.

[0056] In order to alleviate the problem of poor sensitivity of the existing acceleration sensor, the inventor finds that the structure of the acceleration sensor and the structure of the pressure conversion element in the acceleration sensor can be improved to improve the sensitivity of the acceleration sensor.

[0057] Based on the above considerations, in order to solve the problems of poor sensitivity and low accuracy of the acceleration sensor, the inventor has designed an acceleration sensor after deep research, which has higher sensitivity and accuracy when detecting acceleration.

[0058] In order to fully and accurately understand the acceleration sensor of the embodiments of the present application, the acceleration sensor of the embodiments of the present application will be explained and described in detail below in conjunction with the drawings.

[0059] Please refer to Figures 1 to 4 , Figure 1 for the exploded view of the acceleration sensor in some embodiments; Figure 2 for the exploded view of the sensing assembly 2 in some embodiments; Figure 3 for the exploded view of the sensing piece 23 in some embodiments, Figure 4 for the schematic view of the inertia piece 22 and the first substrate 231 abutting in some embodiments. The embodiments of the present application provide an acceleration sensor. As shown in Figure 1 , the acceleration sensor comprises a shell 1 and a sensing assembly 2; the shell 1 has an inner cavity, and the sensing assembly 2 is arranged in the inner cavity. As shown in Figure 2 , the sensing assembly 2 comprises an elastic piece 21, an inertia piece 22 and a sensing piece 23 which are abutted in sequence, and the elastic piece 21 and the sensing piece 23 are fixed in the inner cavity. As shown in Figure 3 , the sensing piece 23 comprises a first substrate 231 and a second substrate 232 which are oppositely arranged along a first direction Y, and the edges of the first substrate 231 and the second substrate 232 are connected to form a closed accommodating cavity between the first substrate 231 and the second substrate 232. As shown in Figure 4 , the inertia piece 22 can move along the first direction Y under the action of the elastic force of the elastic piece 21 and / or its own inertia force to abut the middle part of the first substrate 231, so that the first substrate 231 is deformed towards the second substrate 232. The first direction Y is parallel to the thickness direction of the first substrate 231.

[0060] The shell 1 is a component for containing and enclosing the sensing assembly 2. The shell 1 can be provided in various shapes, such as a cuboid, a cylinder, a hexagonal prism, etc. The shell 1 can be made of a material with certain hardness and strength (e.g. stainless steel, aluminum alloy, etc.), so that the shell 1 is not easily deformed when subjected to external pressure or impact, thereby reducing the possibility of affecting the sensing assembly 2 due to deformation of the shell 1.

[0061] The inner cavity is a chamber for containing the sensing assembly 2. The cavity wall of the inner cavity can be provided in a smooth planar or curved structure, such as when the shell 1 is provided in a cuboid shape, the cavity wall can be formed by four smooth planes, and when the shell 1 is provided in a cylindrical shape, the cavity wall can be provided in a smooth curved surface. By providing the cavity wall in a smooth structure, the frictional resistance between the cavity wall and the sensing assembly 2 can be reduced when the sensing assembly 2 detects acceleration, thereby improving the detection accuracy of the sensing assembly 2 on acceleration.

[0062] The elastic member 21 is a component for providing elastic force to the inertial member 22. During assembly of the acceleration sensor, the elastic member 21 can be in a pre-compressed state, with one end of the elastic member 21 abutting against the cavity wall of the inner cavity and the other end abutting against the inertial member 22. In this way, even when the acceleration sensor is stationary or moving at a constant speed, since the elastic member 21 is in a pre-compressed state, the elastic member 21 can exert elastic force to the inertial member 22 in order to restore the normal state, so that the inertial member 22 abuts against the sensing member 23, so that when the acceleration sensor has acceleration due to movement of the component, the inertial member 22 can still abut against the sensing member 23. Conversely, if the elastic member 21 is not assembled in a pre-compressed state, when the acceleration sensor is stationary or moving at a constant speed, the elastic member 21 will not exert elastic force to the inertial member 22, so that the inertial member 22 can not abut against the sensing member 23, thereby resulting in no actual pressure acting on the sensing member 23 when the acceleration sensor is stationary or moving at a constant speed, and the sensing member 23 will not produce actual deformation. By way of example, assuming that the signal of the sensing member 23 in the state of not being subjected to actual pressure is a preset signal, when the acceleration sensor has a small acceleration or produces an acceleration less than zero due to movement of the component, the actual pressure generated by the inertial member 22 can be insufficient to cause the sensing member 23 to produce actual deformation, and the inertial member 22 can even not abut against the sensing member 23, so that the actual deformation of the sensing member 23 is the same as that in the stationary state or the constant speed state, and the actual signal of the sensing member 23 is the same as the preset signal, making it difficult to accurately obtain the direction and size of the acceleration, and even possibly resulting in the acceleration sensor being unable to be used normally. The elastic member 21 can be made of a material with high fatigue limit, high elastic limit, good toughness and good plasticity, such as carbon spring steel, low manganese spring steel, silicon manganese spring steel, chromium vanadium steel, stainless steel, bronze, etc., so that the elastic force exerted by the elastic member 21 to the inertial member 22 is constant. The elastic member 21 can be a spring.

[0063] The inertial member 22 is a component that applies a preset pressure to the sensing member 23 under the elastic force of the elastic member 21, and is also a component that applies an actual pressure to the sensing member 23 under the combined force of the elastic force of the elastic member 21 and the inertial force of the inertial member 22. When the acceleration sensor is not in use or moves at a constant speed with the component, the inertial member 22 is only subjected to the elastic force of the elastic member 21 and applies a preset pressure to the sensing member 23 under the elastic force. When the acceleration sensor moves with acceleration, the inertial member 22 is subjected to not only the elastic force of the elastic member 21 but also the inertial force, and can apply an actual pressure to the sensing member 23 under the combined force of the elastic force and the inertial force. The inertial member 22 can be made of a material with high hardness (for example, iron, copper, stainless steel, etc.), so that the inertial member 22 is not easily deformed by the elastic member 21 and the sensing member 23 when being pressed by the elastic member 21 or applying a preset pressure or an actual pressure to the sensing member 23.

[0064] The sensing member 23 is a component that produces a preset deformation under the preset pressure applied by the inertial member 22 and generates a preset signal based on the preset deformation, and is also a component that produces an actual deformation under the actual pressure applied by the inertial member 22 and generates an actual signal based on the actual deformation. Specifically, when the acceleration sensor is stationary or moves at a constant speed with the component, the sensing member 23 produces a preset deformation under the preset pressure and generates a preset signal based on the preset deformation. When the acceleration sensor moves with acceleration, the sensing member 23 produces an actual deformation under the actual pressure based on the preset deformation and generates an actual signal based on the actual deformation. The sensing member 23 can be provided in various structures, such as a cylindrical shape, a cuboid shape, etc. When the sensing member 23 is provided in a cylindrical shape, the inertial member 22 abuts against any one end surface of the sensing member 23.

[0065] The first substrate 231 is a component that produces a preset deformation based on the preset pressure applied by the inertial member 22, or produces an actual deformation based on the actual pressure applied by the inertial member 22. When the first substrate 231 produces a preset deformation, the preset signal generated by the sensing member 23 can be a preset distance signal between the central part of the first substrate 231 and the central part of the second substrate 232, or a preset current signal, a preset voltage signal, or a preset capacitance signal. When the first substrate 231 produces an actual deformation, the actual signal generated by the sensing member 23 can be an actual distance signal between the central part of the first substrate 231 and the central part of the second substrate 232, or an actual current signal, an actual voltage signal, or an actual capacitance signal.

[0066] In some embodiments, when the preset signal generated by the inductive element 23 is a preset distance signal and the actual signal is an actual distance signal, a distance detecting element can be arranged in the inductive element 23 to detect the preset distance signal or the actual distance signal. Exemplarily, the distance detecting element can be a measuring scale, a distance sensor, an optical imaging distance detector, or the like, and the embodiments of the present application do not make special limitation to the distance detecting element.

[0067] The second substrate 232 is a component abutting against the shell 1 to fix the inductive element 23. After the second substrate 232 abuts against the shell 1, when the inertial element 22 applies the preset pressure or the actual pressure to the first substrate 231, the inductive element 23 as a whole is not easy to move away from the inertial element 22 under the action of the preset pressure or the actual pressure, which is beneficial to ensure that the first substrate 231 receives a pressure closer to the preset pressure or the actual pressure.

[0068] In order to more clearly understand the principle of the acceleration sensor detecting acceleration according to the embodiments of the present application, the following is exemplarily described.

[0069] Suppose that the stiffness coefficient of the elastic element 21 is K, and the first substrate 231 in the inductive element 23 has a stiffness coefficient K', wherein K and K' are both related to the properties of the material itself and are certain values.

[0070] When the acceleration sensor does not have acceleration (the acceleration a of the inertial element 22 is 0), the elastic element 21 has a preset deformation amount X1 compared with the natural state, and the first substrate 231 in the inductive element 23 has a preset deformation amount H1 compared with the natural state. At this time, according to Hooke's law, the elastic force of the elastic element 21 is F1=KX1, and the force of the first substrate 231 is F2=K'H1. In the case of acceleration a being 0, F1=F2, i.e. KX1=K'H1.

[0071] When the acceleration sensor has an acceleration a (the acceleration a of the inertial member 22 is not 0), the elastic member 21 has an actual deformation amount X1+Δd compared with the natural state, wherein Δd is a deformation amount of the elastic member 21 caused by the inertial force of the inertial member 22 on the basis of the preset deformation amount. The deformation space of the deformation amount Δd of the elastic member 21 is almost completely generated by the deformation of the first substrate 231, so the first substrate 231 in the sensing member 23 has an actual deformation amount H1+Δd compared with the natural state, that is, when the acceleration sensor has an acceleration, the elastic member 21 and the first substrate 231 both increase the deformation amount Δd compared with the preset state; wherein the preset state of the elastic member 21 is the state of having the preset deformation amount X1, and the preset state of the first substrate 231 is the state of having the preset deformation amount H1. At this time, according to the formula of the inertial force, the inertial force of the inertial member 22 is F3=am; according to Hooke's law, the elastic force of the elastic member 21 is F4=K(X1+Δd), and the force of the first substrate 231 is F5=K'(H1+Δd). It can be known by force analysis that the force F5 of the first substrate 231 mainly comes from two parts, the first part is the inertial force F3 of the inertial member 22, and the second part is the elastic force F4 of the elastic member 21, so in this case, F5=F3+F4, that is, K'(H1+Δd)=am+K(X1+Δd), and because KX1=K'H1, finally the deformation is obtained as a=(K'-K)Δd / m.

[0072] According to the above calculation formula of the acceleration, in the case that K, K' and m are all constant values, the acceleration a of the acceleration sensor and the component moving together is proportional to the deformation amount Δd of the first substrate 231, wherein the deformation amount Δd refers to the deformation amount of the first substrate 231 at the time when the actual acceleration a is generated compared with the preset state.

[0073] Therefore, when the acceleration sensor in the embodiment of the present application is used, as long as the deformation amount Δd of the first substrate 231 in the sensing member 23 at a certain time is measured, the acceleration of the acceleration sensor and the component at this time can be obtained.

[0074] Because the embodiment of the present application sets the accommodating cavity between the first substrate 231 and the second substrate 232 to reduce the supporting force of the second substrate 232 on the first substrate 231, the first substrate 231 can generate the measurable deformation amount Δd more quickly under the same acceleration. In addition, because the embodiment of the present application abuts the inertial member 22 at the middle part of the first substrate 231, the first substrate 231 can generate the measurable deformation amount Δd more quickly under the same acceleration. Therefore, the sensitivity of the acceleration sensor adopting the embodiment of the present application is higher, the precision is also higher, and it is more suitable for the devices and scenes such as automobiles and aerospace equipment which have higher requirements for the precision of the acceleration sensor.

[0075] Based on the foregoing statements, since the actual signal of the inductor 23 is generated based on the actual deformation of the first substrate 231, the deformation amount Δd of the first substrate 231 can be inversely calculated by the actual signal generated by the inductor 23, the preset signal and the relationship between the actual signal and the preset signal and the deformation amount Δd of the first substrate 231, and then the acceleration of the inertial element 22 is calculated. For example, when the preset signal generated by the inductor 23 is a preset distance signal between the central part of the first substrate 231 and the central part of the second substrate 232, and the actual signal is an actual distance signal between the central part of the first substrate 231 and the central part of the second substrate 232, the deformation amount Δd of the first substrate 231 is the difference between the actual distance signal and the preset distance signal. Similarly, when the preset signal and the actual signal are current signals, voltage signals or capacitance signals, the deformation amount Δd of the first substrate 231 can be calculated according to the relationship between the current signal, the voltage signal or the capacitance signal and the deformation amount Δd of the first substrate 231, and the acceleration of the acceleration sensor and the component where the acceleration sensor is located is calculated using the above acceleration formula.

[0076] According to some other embodiments of the present application, the thickness of the first substrate 231 is less than or equal to 3 millimeters.

[0077] If the thickness of the first substrate 231 is greater than 3 millimeters, since the thickness of the first substrate 231 is large, the stiffness coefficient of the first substrate 231 increases, the sensitivity of the first substrate 231 to the actual pressure decreases, and then even if the inertial element 22 abuts the middle part of the first substrate 231, the first substrate 231 cannot generate a more obvious actual deformation based on the actual pressure, resulting in that the inductor 23 cannot quickly generate the actual signal, which is not conducive to improving the sensitivity of the acceleration sensor.

[0078] The technical scheme of the embodiments of the present application sets the thickness of the first substrate 231 to be less than or equal to 3 millimeters, which can make the stiffness coefficient of the first substrate 231 smaller, improve the sensitivity of the first substrate 231 to the actual pressure, and then make the first substrate 231 more easily generate faster and larger actual deformation under the action of the actual pressure, and the inductor 23 more easily generate faster and larger actual signal based on the actual deformation of the first substrate 231, which is convenient for obtaining the specific deformation amount of the actual deformation of the first substrate 231 according to the actual signal, and then quickly obtaining the acceleration of the inertial element 22 according to the deformation amount, which is more conducive to improving the sensitivity and accuracy of the acceleration sensor of the embodiments of the present application.

[0079] According to some other embodiments of the present application, the first substrate 231 and the second substrate 232 are both set as the pole plate including the conductive layer B.

[0080] When the first substrate 231 and the second substrate 232 are both provided as the electrode plate including the conductive layer B, the edges of the first substrate 231 and the second substrate 232 can be connected by the frame glue to make the inductive element 23 a capacitor, that is, the inductive element 23 can be used as a capacitor. When the inductive element 23 is used as a capacitor, the actual signal generated by the inductive element 23 is an actual capacitance signal.

[0081] Please refer to Figure 5 , Figure 5 The schematic diagram of the first substrate 231 or the second substrate 232 in some embodiments. As shown in Figure 5 , the first substrate 231 and the second substrate 232 both include the base layer A, the conductive layer B and the insulating layer C which are sequentially stacked. The base layer A is provided on the side of the first substrate 231 and the second substrate 232 away from each other, wherein the base layer A in the first substrate 231 receives the pressure applied by the inertial element 22. The base layer A can be made of glass, quartz, organic polymer and the like. When the base layer A is made of glass material, the thickness of the first substrate 231 is more easily processed to be less than or equal to 3 millimeters due to the more mature processing technology of glass at present. The conductive layer B is a component for generating an actual capacitance signal based on the distance between the first substrate 231 and the second substrate 232 and outputting the actual capacitance signal through the output terminal. The conductive layer B can be made of materials with conductive properties (such as indium tin oxide, indium zinc oxide, aluminum tin oxide, aluminum zinc oxide, indium gallium zinc oxide, gold, silver, copper, etc.). The insulating layer C is a component for insulating and isolating the two conductive layers B and the medium 233. The insulating layer C can include photoresist or other organic materials.

[0082] When the preset signal generated by the inductive element 23 is a preset capacitance signal and the actual signal is an actual capacitance signal, the process of obtaining the acceleration according to the preset capacitance signal and the actual capacitance signal is as follows.

[0083] Based on the capacitance formula C = εS / d, where ε is the dielectric constant of air, which is a constant after the inductive element 23 is formed, and S is the surface area of the opposite faces of the first substrate 231 or the second substrate 232, which is also a constant after the inductive element 23 is formed.

[0084] When the first substrate 231 in the inductive element 23 has a preset deformation amount H1, based on C0 = εS / d0, the preset distance d0 between the center part of the first substrate 231 and the center part of the second substrate 232 can be calculated as d0 = εS / C0 under the condition that the preset capacitance signal C0 generated by the inductive element 23 can be measured.

[0085] When the first substrate 231 in the inductive element 23 has an actual deformation amount X1+Δd, based on C1=εS / d1, the actual distance d1 between the center of the first substrate 231 and the center of the second substrate 232 can be calculated as d1=εS / C1 in the case that the actual capacitance signal C1 generated by the inductive element 23 can be measured.

[0086] Since the distance between the center of the first substrate 231 and the center of the second substrate 232 changes with the deformation of the first substrate 231, the deformation amount Δd of the first substrate 231 increased compared with the preset state can be obtained by calculating the difference between the actual distance d1 and the preset distance d0, and the calculation formula is Δd=d0-d1. 1＝ εS / C0-εS / C1=εS(C1-C0) / C1C0, and based on the calculation formula a=(K'-K)Δd / m of the deformation amount Δd and the aforementioned acceleration, the relationship between the acceleration of the inertial element 22 and the preset capacitance signal and the actual capacitance signal of the inductive element 23 is a=εS(K'-K)(C1-C0) / C1C0m.

[0087] According to the above calculation formula of the acceleration, in the case that K, K', m, ε and S are all constant values, and the preset capacitance signal C0 can be measured in advance, the acceleration a of the acceleration sensor with the component movement can be obtained by measuring the actual capacitance signal C1 of the inductive element 23 at any time.

[0088] The technical scheme of the embodiment of the application can make the inductive element 23 used as a capacitor, and the inductive element 23 can generate an actual capacitance signal based on the distance between the first substrate 231 and the second substrate 232. With the first substrate 231 rapidly generating a large degree of actual deformation under the action of the actual pressure, the inductive element 23 can rapidly generate an actual capacitance signal with a large value, which is convenient for quickly obtaining the acceleration of the inertial element 22 according to the actual capacitance signal, so that the sensitivity of the acceleration sensor of the embodiment of the application is improved.

[0089] According to some other embodiments of the application, the accommodation cavity contains a medium 233, and the dielectric constant of the medium 233 is greater than or equal to 1 F / m.

[0090] Based on the foregoing statements, and combined with the formula C=εS / d of capacitance, it can be seen that the actual capacitance value C generated by the inductive element 23 is positively correlated with the dielectric constant value ε of the medium 233, so when the dielectric constant is greater than 1 F / m, and the distance d between the center of the first substrate 231 and the center of the second substrate 232 is the same, the inductive element 23 can output a larger actual capacitance signal, so that the reaction to the distance change is more sensitive, which is conducive to improving the sensitivity of the acceleration sensor.

[0091] For example, it is assumed that the area of ​​the first substrate 231 and the second substrate 232 is 4×10 -4 square meters, the actual pressure makes the distance between the first substrate 231 and the second substrate 232 increase by 4×10 -4 Meter reduced to 2×10 -4 When the dielectric constant of the medium 233 is 1 Farad / meter, the actual capacitance signal C generated by the sensing element 23 is 2 Farads; when the dielectric constant of the medium 233 is 10 Farad / meter, the actual capacitance signal C generated by the sensing element 23 is 20 Farads. It can be seen that when the dielectric constant of the medium 233 is larger, the sensing element 23 can still generate a larger actual capacitance signal even if the deformation of the sensing element 23 is small. As a result, the acceleration sensor in the embodiment of the present application has a better detection effect when the acceleration change is small.

[0092] According to other embodiments of the present application, the medium 233 includes at least one of liquid crystal, ester oil, or mineral oil.

[0093] The medium 233 can be one of liquid crystal, ester oil or mineral oil, or any two of them, or a mixture of liquid crystal, ester oil or mineral oil.

[0094] In some feasible embodiments, when both the first substrate 231 and the second substrate 232 are provided with electrodes having a conductive layer B, and the medium 233 is provided with liquid crystal, the sensing element 23 can be used as a liquid crystal cell. When the sensing element 23 is used as a liquid crystal cell, the acceleration sensor is easier to manufacture due to the mature processing technology of liquid crystal cells.

[0095] In the technical solution of the embodiment of the present application, since liquid crystal, ester oil and mineral oil have large dipole moments, large polarity and dielectric constants greater than 1 Farad / meter, when the medium 233 includes liquid crystal, ester oil and mineral oil, the ability of the sensing element 23 to store charge can be increased, thereby improving the sensitivity and accuracy of the acceleration sensor prepared in the embodiment of the present application.

[0096] According to other embodiments of the present application, see Figure 6 , Figure 6 FIG. 1 is an exploded view of the housing 1 in some embodiments. Figure 6 As shown, the housing 1 includes a cylindrical side wall 11 , the axis OO′ of the side wall 11 is parallel to the first direction Y, and the inertial member 22 contacts the side wall 11 to provide guidance for the inertial member 22 , so that the inertial member 22 moves along the first direction Y and abuts against the middle portion of the first substrate 231 .

[0097] It is worth noting that the cylindrical side wall 11 is not limited to a cylindrical shape, and in fact, the cylindrical side wall 11 can also refer to the side wall 11 comprising a plurality of surfaces, each of which can be a plane or a curved surface, and the plurality of surfaces are connected end to end to form a cylindrical structure, that is, the cross section of the cylindrical structure can be a closed circle, a closed polygon or other special-shaped structure, as long as the shape and size of the cross section of the side wall 11 formed at any plane perpendicular to the axis of the side wall 11 are the same.

[0098] The side wall 11 is the main component for accommodating the elastic member 21, the inertial member 22 and the sensing member 23. The side wall 11 has the aforementioned inner cavity to accommodate the elastic member 21, the inertial member 22 and the sensing member 23.

[0099] The contact between the inertial member 22 and the side wall 11 to provide guidance to the inertial member 22 can be explained as follows: since the axis direction of the side wall 11 is parallel to the first direction Y, the extension direction of the side wall 11 is parallel to the first direction Y, and on this basis, the inertial member 22 can move along the side wall 11 towards the first direction Y after contacting the side wall 11 to provide guidance to itself.

[0100] In the technical solution of the embodiment of the present application, the inertial member 22 is arranged to contact the side wall 11, so that the inertial member 22 can be attached to the side wall 11 and move along the first direction Y under the restriction of the inner cavity wall to provide guidance to itself to abut against the middle part of the first substrate 231. Further, since the first direction Y is parallel to the thickness direction of the first substrate 231, when the inertial member 22 abuts against the first substrate 231 along the first direction Y, the direction of the abutting force is almost parallel to the thickness direction of the first substrate 231, so that the first substrate 231 can produce greater actual deformation in the direction of the second substrate 232 (i.e. the thickness direction of the first substrate 231) to improve the sensitivity of the acceleration sensor, and the acceleration sensor in the present application can measure smaller acceleration.

[0101] On the basis of the foregoing, please continue to refer to Figure 6The shell 1 further comprises a first cover 12 and a second cover 13 arranged at two ends of the side wall 11 respectively. The first cover 12 and the second cover 13 can be detachably connected with the side wall 11. For example, in one possible manner, internal threads can be arranged on the inner walls at the two ends of the side wall 11, and external threads can be arranged on the sides of the first cover 12 and the second cover 13 facing the side wall 11, so that the first cover 12, the second cover 13 and the side wall 11 are detachably connected together through the external threads and the internal threads. In another possible manner, the thickness of the side wall 11 can be made larger, blind holes can be formed in the end faces of the side wall 11, and through holes can be arranged on the first cover 12 and the second cover 13, so that the first cover 12, the second cover 13 and the side wall 11 are detachably connected together by inserting one end of a screw through the through holes and fixing it in the blind holes.

[0102] After the first cover 12 is connected with the side wall 11, the elastic member 21 can be fixed through the first cover 12 and the inertial member 22. Specifically, a mounting groove can be arranged on the inner side of the first cover 12, and a fixing groove opposite to the mounting groove in position can be arranged on the side of the inertial member 22 facing the first cover 12, so that one end of the elastic member 21 is fixed in the mounting groove and the other end is fixed in the fixing groove. After the elastic member 21 is fixed, it cannot slide on the end faces of the first cover 12 and the inertial member 22, which is conducive to maintaining the abutting relationship between the elastic member 21, the inertial member 22 and the sensing member 23. After the second cover 13 is connected with the side wall 11, the second cover 13 can be abutted with the sensing member 23 to fix the sensing member 23. After the sensing member 23 is fixed, it cannot move away from the inertial member 22 under the pressure of the inertial member 22, which is conducive to the contact between the inertial member 22 and the sensing member 23 and improves the sensitivity of the acceleration sensor.

[0103] It should be noted that an interface connected with the output terminal of the aforementioned conductive layer B can also be arranged on the side wall 11 or the second cover 13, so that the actual capacitance signal generated by the sensing member 23 is output to other devices outside the acceleration sensor through the interface.

[0104] According to some other embodiments of the present application, please refer to Figure 7 , Figure 7 which is an exploded view of the inertial member 22 in some embodiments. As shown in Figure 7 , the inertial member 22 comprises a guide portion 221 and a force applying portion 222, the force applying portion 222 is arranged on the side of the guide portion 221 facing the first substrate 231, the guide portion 221 is in contact with the side wall 11 to make the inertial member 22 move along the first direction Y, and the end face area of the force applying portion 222 close to the first substrate 231 is smaller than the end face area of the first substrate 231 close to the force applying portion 222.

[0105] The guide portion 221 is a component that is in contact with the side wall 11 and guides the inertial element 22.

[0106] The force applying portion 222 is a component that moves along the first direction Y towards the first substrate 231 with the movement of the guide portion 221 and abuts against the first substrate 231. The force applying portion 222 can be provided in various shapes, such as a cylindrical shape, a prismatic shape, a circular truncated cone shape, etc. The force applying portion 222 can be made of a material with high hardness (such as iron, copper, stainless steel, etc.), so that the force applying portion 222 is not easily deformed when abutting against the first substrate 231.

[0107] When the force applying portion 222 is provided on the side of the guide portion 221 facing the first substrate 231, the force applying portion 222 can be welded together with the guide portion 221, or can be detachably connected together with the guide portion 221. When the force applying portion 222 is detachably connected with the guide portion 221, for example, a blind hole that is adapted to the force applying portion 222 can be provided on the side of the guide portion 221 facing the first substrate 231, so as to connect the force applying portion 222 to the guide portion 221 in a partially interference fit; or a threaded hole can be provided on the side of the guide portion 221 facing the first substrate 231, and an external thread can be provided on the force applying portion 222, so as to connect the force applying portion 222 to the guide portion 221 in a threaded connection.

[0108] In the technical solution of the embodiments of the present application, first, since the guide portion 221 is in contact with the side wall 11, the guide portion 221 can be attached to the side wall 11 and provide guidance to the inertial element 22 under the limiting action of the side wall 11, so as to make the inertial element 22 move along the first direction Y and abut against the middle part of the first substrate 231; second, the guide portion 221, as a part of the inertial element 22, is in contact with the side wall 11, and can reduce the contact area between the inertial element 22 and the side wall 11 while providing guidance to the inertial element 22, so as to reduce the frictional resistance between the inertial element 22 and the side wall 11 during the movement of the inertial element 22 towards the first substrate 231, and make the pressure received by the inductive element 23 closer to the actual pressure; and finally, the end surface area of the force applying portion 222 close to the first substrate 231 is set to be smaller than the end surface area of the first substrate 231 close to the force applying portion 222, so as to increase the pressure of the force applying portion 222 on the middle part of the first substrate 231, make the first substrate 231 more easily deformed, the inductive element 23 more easily generate an actual signal, and the sensitivity of the acceleration sensor higher.

[0109] According to some other embodiments of the present application, please refer to Figure 8 , Figure 8 Fig. 1 shows a schematic view of the first guide portion 221 in contact with the side wall 11 in some embodiments. As shown in Fig. 1, the guide portion 221 is in contact with the side wall 11, and the force applying portion 222 is provided on the side of the guide portion 221 facing the first substrate 231. Figure 8As shown, the guiding part 221 comprises a body 2211 and a plurality of protrusions 2212 arranged on the body 2211, the protrusions 2212 are arranged protruding towards the side wall 11, and the guiding part 221 is linearly contacted with the side wall 11 along the first direction Y through the protrusions 2212.

[0110] The body 2211 is a component connected with the force applying part 222. The body 2211 can be arranged in various shapes, such as a cylindrical shape, a circular truncated cone shape, etc.

[0111] The protrusions 2212 are components contacted with the side wall 11. The protrusions 2212 can be arranged in a strip shape along the first direction Y to realize linear contact of the protrusions 2212 with the side wall 11 along the first direction Y. The protrusions 2212 can also be a plurality of groups of linearly arranged protrusions along the first direction Y, so as to be linearly contacted with the side wall 11 along the first direction Y when the inertial element 22 moves along the first direction. The side contacted with the side wall 11 of the protrusions 2212 can be arranged in an arc structure, so that the protrusions 2212 are not easy to scratch the side wall 11 when the protrusions 2212 are contacted with the side wall 11, which is beneficial to ensure the smoothness of the side wall 11.

[0112] In a feasible embodiment, three protrusions 2212 can be arranged on the body 2211 at intervals, and the three protrusions 2212 can be contacted with the side wall 11 from three directions, so as to improve the stability of the inertial element 22 in the inner cavity of the side wall 11, reduce the contact area of the guiding part 221 with the side wall 11, and reduce the frictional resistance between the guiding part 221 and the side wall 11.

[0113] The technical scheme of the embodiment of the application realizes guiding of the inertial element 22 by arranging the protrusions 2212 to be contacted with the side wall 11, so that the protrusions 2212 can guide the inertial element 22 along the side wall 11, and the inertial element 22 is moved along the first direction Y to abut against the middle part of the first substrate 231. In addition, the contact area of the guiding part 221 with the side wall 11 is reduced, the frictional resistance between the guiding part 221 and the side wall 11 is reduced during the movement of the inertial element 22 towards the first substrate 231, and then the first substrate 231 can receive a more actual pressure, so as to improve the sensitivity of the first substrate 231 to actual deformation based on the actual pressure, the sensitivity of the sensing element 23 to actual signals, and the sensitivity of the acceleration sensor.

[0114] According to some other embodiments of the application, please refer to Figure 9 , Figure 9 for a schematic view of the second guiding part 221 contacted with the side wall 11 in some embodiments. As shown in the figure, the guiding part 221 is configured as a prism structure, and the prism structure is linearly contacted with the side wall 11 along the first direction Y through a plurality of side edges. Figure 9

[0115] ​The prism structure can be a triangular prism structure, a cuboid structure, a hexagonal prism structure, or the like. The specific structure of the prism structure is not specially limited in the embodiments of the present application.

[0116] When the side edges contact the side wall 11, the side edges can be chamfered to reduce the sharpness of the side edges and avoid scratching the side wall 11, thereby affecting the movement of the inertial part 22 along the first direction Y.

[0117] In the technical solution of the embodiments of the present application, the side edges are arranged to contact the side wall 11, so that the side edges can guide the inertial part 22 along the side wall 11, and the inertial part 22 moves along the first direction Y to abut against the middle part of the first substrate 231. In addition, the contact area between the guiding part 221 and the side wall 11 is reduced, and the frictional resistance between the guiding part 221 and the side wall 11 is reduced, so that the first substrate 231 can accurately receive a pressure closer to the actual pressure, thereby improving the sensitivity of the first substrate 231 to generate an actual deformation based on the actual pressure, the sensitivity of the sensing part 23 to generate an actual signal, and the sensitivity of the acceleration sensor. In addition, the guiding part 221 is arranged in a relatively conventional prism structure, which not only facilitates the processing of the guiding part 221, but also reduces the manufacturing cost of the acceleration sensor.

[0118] According to some other embodiments of the present application, please refer to Figure 10 , Figure 10 The figure shows the layout of the guiding groove 110 on the side wall 11 in some embodiments. As Figure 10 shown, the side wall 11 is provided with a guiding groove 110 along the first direction Y, and at least part of the guiding part 221 is located in the guiding groove 110.

[0119] The cross-sectional shape of the guiding groove 110 can be V-shaped, U-shaped, or the like. The cross-sectional shape of the guiding groove 110 is not specially limited in the embodiments of the present application.

[0120] The size of the guiding groove 110 can be adapted to the size of the aforementioned protrusion 2212, or can be adapted to the size of the aforementioned side edge.

[0121] The number of guiding grooves 110 can be adapted to the number of the aforementioned protrusions 2212, or can be adapted to the number of the aforementioned side edges.

[0122] By the above scheme, at least part of the guide portion 221 can move in the guide groove 110 along the first direction Y towards the first substrate 231, and in the process of moving of the guide portion 221, at least part of the guide portion 221 is limited by the groove wall of the guide groove 110, so as to reduce the possibility of rotation or deflection of the inertial element 22 when moving towards the first substrate 231, improve the accuracy of the abutment of the force applying portion 222 to the middle part of the first substrate 231, and the sensitivity of the actual deformation of the first substrate 231 under the abutment of the force applying portion 222.

[0123] According to some embodiments of the present application, the acceleration sensor further comprises a positioning element 24, please refer to Figure 11 , Figure 11 The layout of the force applying portion 222, the positioning element 24 and the first substrate 231 in some embodiments. As Figure 11 shown, the positioning element 24 is arranged on the side of the first substrate 231 facing the inertial element 22, and the positioning element 24 is used to position the force applying portion 222.

[0124] The positioning element 24 is a component for guiding the inertial element 22 so that the inertial element 22 can abut the middle part of the first substrate 231. The positioning element 24 can be made of glass, quartz, organic polymer or other materials.

[0125] When the positioning element 24 is arranged on the side of the first substrate 231 facing the inertial element 22, the positioning element 24 can be bonded to the middle part of the first substrate 231 by adhesive, for example.

[0126] In the technical scheme of the embodiments of the present application, by arranging the positioning element 24 on the middle part of the first substrate 231, when the inertial element 22 moves towards the first substrate 231 along the first direction Y, the positioning element 24 can limit the force applying portion 222, reduce the possibility of movement of the force applying portion 222 in other directions except the first direction Y, improve the accuracy of the abutment of the force applying portion 222 to the middle part of the first substrate 231, and the sensitivity of the actual deformation of the first substrate 231 under the abutment of the force applying portion 222, so as to improve the sensitivity of the acceleration sensor.

[0127] According to some other embodiments of the present application, please continue to refer to Figure 11 , the positioning element 24 is configured as a ring structure, at least part of the force applying portion 222 is located in the ring structure, and the ring structure is used to limit the position of the force applying portion 222 abutting the first substrate 231.

[0128] The ring structure can be a circular ring structure, a square ring structure, or a polygonal ring structure. When the positioning member 24 is configured as a ring structure, an adhesive can be arranged on one of the ring surfaces of the ring structure to fix the ring structure to the middle part of the first substrate 231. The inner shape of the ring structure can be adapted to the shape of the force applying part 222 to better limit the force applying part 222.

[0129] When the force applying part 222 is at least partially located in the ring structure, the size of the force applying part 222 along the first direction Y can be greater than the size of the ring structure along the first direction Y, so that the ring structure does not affect the force applying part 222 when the force applying part 222 abuts against the first substrate 231 along the first direction Y.

[0130] In the technical solution of the embodiments of the present application, the ring structure can accommodate at least part of the force applying part 222 to limit the at least part of the force applying part 222, reduce the possibility of the force applying part 222 moving in other directions except the first direction Y, improve the accuracy of the force applying part 222 abutting against the middle part of the first substrate 231, and improve the sensitivity of the actual deformation of the first substrate 231 under the abutment of the force applying part 222, so that the sensitivity of the acceleration sensor is improved.

[0131] According to some embodiments of the present application, referring to Figures 1 to 11 The present application provides an acceleration sensor. The acceleration sensor comprises a housing 1 and a sensing assembly 2. The housing 1 comprises a side wall 11, a first cover 12 and a second cover 13, and the first cover 12 and the second cover 13 cover the two ends of the side wall 11, respectively. The sensing assembly 2 comprises an elastic member 21, an inertial member 22 and a sensing member 23 which are sequentially abutted. The end of the elastic member 21 away from the inertial member 22 is fixed to the first cover 12, and the end of the elastic member 21 towards the inertial member 22 is fixed to the inertial member 22. The end of the sensing member 23 towards the inertial member 22 abuts against the inertial member 22, and the end of the sensing member 23 away from the inertial member 22 abuts against the second cover 13. The elastic member 21 is arranged as a spring. The inertial member 22 is arranged as a mass block comprising a guide part 221 and a force applying part 222. The guide part 221 is arranged as a prismatic structure and contacts the side wall 11 through a side edge. The force applying part 222 is fixed to the side of the guide part 221 towards the sensing member 23. The sensing member 23 is arranged as a liquid crystal box comprising a first substrate 231, a second substrate 232 and a liquid crystal. The force applying part 222 abuts against the middle part of the first substrate 231.

[0132] The acceleration sensor of the embodiment of the present application sets the sensing part 231 as a liquid crystal box, and sequentially assembles the elastic part 21, the inertial part 22 and the sensing part 23 in the shell 1, so that the inertial part 22 abuts against the middle part of the first substrate 231 in the sensing part 23. When the acceleration sensor has acceleration with the movement of the parts, the first substrate 231 can rapidly generate a large degree of actual deformation under the combined force of the elastic force of the elastic part 21 and the inertial force of the inertial part 22, the sensing part 23 can generate a large actual capacitance signal between the first substrate 231 and the second substrate 232 based on the actual deformation of the first substrate 231, so as to obtain the acceleration of the inertial part 22 based on the actual capacitance signal, and the sensitivity and the accuracy of the acceleration sensor in the embodiment of the present application are improved.

[0133] The above-described embodiments are only used to illustrate the technical solutions of the present application, rather than limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. An acceleration sensor, characterized by, The application relates to a shell with an inner cavity, an inductive assembly arranged in the inner cavity, the inductive assembly comprising an elastic member, an inertial member and an inductive member arranged in sequence, the elastic member and the inductive member being fixed in the inner cavity, the inductive member comprising a first substrate and a second substrate arranged oppositely along a first direction, the edges of the first substrate and the second substrate being connected to form a closed accommodating cavity between the first substrate and the second substrate, the inertial member being capable of moving along the first direction under the elastic force of the elastic member and / or the inertial force of the inertial member to abut against the middle part of the first substrate, so that the first substrate is deformed towards the second substrate, the first direction being parallel to the thickness direction of the first substrate, the elastic member being fixed in the inner cavity in a pre-compressed state, the first substrate and the second substrate being arranged as polar plates comprising a conductive layer, the accommodating cavity containing a medium, the medium comprising at least one of liquid crystal, ester oil and mineral oil, the thickness of the first substrate being less than or equal to 3 mm, the dielectric constant of the medium being greater than or equal to 1 F / m, the shell comprising a cylindrical side wall, the axis of the side wall being parallel to the first direction, the inertial member being in contact with the side wall to provide guidance for the inertial member, so that the inertial member moves along the first direction to abut against the middle part of the first substrate, the inertial member comprising a guiding part and a force applying part, the guiding part being in contact with the side wall to enable the inertial member to move along the first direction, the force applying part being arranged on the side of the guiding part facing the first substrate, and the end surface area of the first substrate close to the force applying part being smaller than the end surface area of the first substrate close to the force applying part, the guiding part comprising a body and multiple protrusions arranged on the body and protruding towards the side wall, the guiding part being in linear contact with the side wall along the first direction through the protrusions, the guiding part being configured as a prism structure, the prism structure being in linear contact with the side wall along the first direction through multiple side edges, the side wall being provided with a guiding groove along the first direction, at least part of the guiding part being located in the guiding groove, the first substrate being provided with a positioning member on the side facing the inertial member, the positioning member being used for positioning the force applying part, the positioning member being configured as a ring structure, at least part of the force applying part being located in the ring structure, the ring structure being used for limiting the position of the force applying part abutting against the first substrate. ​ ​ ​ ​ ​ 2. The acceleration sensor according to claim 1, characterized in that ​ 3. The acceleration sensor according to claim 1, characterized in that ​ 4. The acceleration sensor according to claim 1, characterized in that, ​ 5. The acceleration sensor according to claim 4, characterized in that ​ 6. The acceleration sensor according to claim 5, characterized in that ​ 7. The acceleration sensor according to claim 5, characterized in that ​ 8. The acceleration sensor according to claim 5, characterized in that ​ 9. The acceleration sensor according to claim 5, characterized in that ​ 10. The acceleration sensor according to claim 9, characterized in that ​

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