A highly integrated vacuum integration system

Abstract

The patent discloses a highly integrated vacuum integrated system, which comprises a box, a first high-speed vacuum pump and a second high-speed vacuum pump; the box comprises a containing cavity, a first air inlet and a first air outlet, and the first air inlet and the first air outlet are communicated with the containing cavity; the box is further provided with a cooling water device, a nitrogen device and an electrical system; the first high-speed vacuum pump and the second high-speed vacuum pump are fixedly arranged in the containing cavity, the first air inlet is sequentially and sealingly connected with the first high-speed vacuum pump and the second high-speed vacuum pump through an air inlet pipe, and the exhaust outlet of the second high-speed vacuum pump is sealingly connected with the first air outlet; the cooling water device can provide cooling circulating water, the nitrogen device can provide nitrogen for the system, and the electrical system is configured to control the operation of the system. The highly integrated vacuum integrated system is convenient for adapting to the on-site conditions of customers, flexible and convenient to assemble, and does not need to disassemble the installation pipeline of the customers.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum pump system, and particularly relates to a highly integrated vacuum integrated system which is generally applicable to the fields of vacuum applications such as photovoltaic, semiconductor and fine chemical industry. BACKGROUND

[0002] In many fields of vacuum applications, only one vacuum pump cannot completely achieve the actual process requirements. The most cost-effective limit vacuum or pumping capacity that can be achieved by different types of vacuum pumps is completely different. Different types of vacuum pumps also have different adaptability to different process media. In addition, different vacuum processes also need to be equipped with various auxiliary systems to ensure that the vacuum pump or vacuum pump group can be stably and reliably operated.

[0003] Therefore, in the actual requirements of customers, the vacuum pump manufacturer or integrator needs to first prepare a scheme to explain the content of system integration to obtain the recognition of customers, and then start to design the system, produce and manufacture, deliver to the customer site, and perform on-site debugging and acceptance. The entire vacuum system is like a small engineering project. Due to different customer requirements, such as different process media, required pumping capacity, limit vacuum, control requirements, auxiliary systems and the like, the designed vacuum system belongs to non-standard customization most of the time, and can only meet the use of the corresponding customer. Although non-standard customization can better meet the needs of customers, it is difficult for the vacuum pump manufacturer to achieve large-scale customized production due to the consumption of a large amount of manpower and material resources, thereby leading to two problems. First, it is difficult to improve production efficiency on the basis of existing production capacity. Second, due to the difficulty in improving production efficiency, it is difficult to reduce production cost, thereby reducing market competitiveness. In the case of meeting the same function and quality, the price factor is the only core factor in market competition.

[0004] Therefore, in combination with the above-mentioned technical problems, it is necessary to provide a new technical solution. SUMMARY

[0005] To solve the technical problems existing in the prior art, the purpose of the present application is to provide a highly integrated vacuum system. It is very important for the vacuum pump manufacturer to obtain stronger competitiveness in future market competition, so that it is more convenient for customers to use and maintain, without considering the various components and internal control of the system, but regarding it as an indivisible whole product like a single vacuum pump. The specific technical solution is as follows:

[0006] The present application provides a highly integrated vacuum integrated system, comprising a box body, a first high-speed vacuum pump and a second high-speed vacuum pump.

[0007] The box comprises a containing cavity, a first air inlet and a first air outlet, the first air inlet and the first air outlet are both communicated with the containing cavity; the box is further integrally provided with a cooling water device, a nitrogen device and an electrical system;

[0008] The first high-speed vacuum pump and the second high-speed vacuum pump are both fixedly contained in the containing cavity, the first air inlet is sealingly connected with the air inlet of the first high-speed vacuum pump through an air inlet pipe, the air outlet of the first high-speed vacuum pump is sealingly connected with the air inlet of the second high-speed vacuum pump, and the air outlet of the second high-speed vacuum pump is sealingly connected with the first air outlet; the cooling water device can provide cooling circulating water for the first high-speed vacuum pump and the second high-speed vacuum pump, the nitrogen device can provide nitrogen compressed gas for the second high-speed vacuum pump and the electrical system, and the electrical system is configured to control the operation of the vacuum integrated system.

[0009] Further, a silencing device is further included, which is fixedly arranged in the containing cavity, and is arranged between the air outlet of the second high-speed vacuum pump and the first air outlet;

[0010] The silencing device comprises a silencing groove and a second cover plate covering the silencing groove, a plurality of partitions are arranged in the silencing groove, the partitions divide the silencing groove into a plurality of isolated cavities, a plurality of through air holes are formed in the partitions, adjacent isolated cavities are communicated with each other through the air holes, and the isolated cavities are provided with sound-absorbing cotton or activated carbon; one end of the silencing device is provided with a second air inlet connected with the air outlet of the second high-speed vacuum pump, and the other end of the silencing device is provided with a second air outlet connected with the first air outlet.

[0011] Further, the containing cavity is provided with a liquid discharge channel, and the vacuum oil and water flowing out of the first high-speed vacuum pump and / or the second high-speed vacuum pump can be discharged through the liquid discharge channel;

[0012] The first high-speed vacuum pump is a Roots vacuum pump, and the second high-speed vacuum pump is a dry vacuum pump.

[0013] Further, an air inlet main pipe is arranged between the first air inlet and the air inlet of the first high-speed vacuum pump, one end of the air inlet main pipe is provided with a filter condensing port, the filter condensing port penetrates and extends to the outer surface of the box, and the filter condensing port is configured to place a filter and a condenser.

[0014] Further, the cooling water device is contained in the containing cavity, the cooling water device comprises a water inlet main pipe and a water outlet main pipe, the water inlet main pipe and the water outlet main pipe are fixedly arranged on the side wall in the containing cavity, a plurality of distribution openings are arranged on the water inlet main pipe and the water outlet main pipe, the distribution openings on the water inlet main pipe are sealingly connected with the water inlet of the first high-speed vacuum pump or the second high-speed vacuum pump through water pipes, and the distribution openings on the water outlet main pipe are sealingly connected with the water outlet of the first high-speed vacuum pump or the second high-speed vacuum pump through water pipes.

[0015] Further, the box is further provided with a solvent washing device, the solvent washing device comprises a solvent washing tank, the solvent washing tank is fixedly arranged in the containing cavity, and the opening of the solvent washing tank is arranged on the top surface of the box.

[0016] Further, the nitrogen device comprises a nitrogen inlet and a nitrogen pressure reducing valve, and the nitrogen inlet and the nitrogen pressure reducing valve are arranged on the surface of the box.

[0017] Further, the first inlet is provided with an inlet flange, and the first outlet is provided with an outlet flange.

[0018] The box comprises a base and a support frame, the support frame is fixedly installed on the base, and the support frame is provided with a detachable top cover plate and a first side plate.

[0019] Further, the air holes on every two adjacent partition plates are arranged in a staggered mode.

[0020] Further, a transmitter mounting port is arranged at one end of the air inlet main pipe away from the filter condensing port, and a vacuum pressure transmitter is mounted in the transmitter mounting port.

[0021] Compared with the prior art, the technical scheme disclosed by the patent has at least one or more beneficial effects as follows:

[0022] The patent is a highly integrated vacuum integrated system, and the sound attenuation device, the air inlet device, the cooling water device, the solvent washing device, the nitrogen device and the electrical system are integrated on the box, so that the system is convenient to assemble and flexible to adapt to the on-site situation of customers. When the vacuum integrated system is installed, maintained and repaired, the installation pipeline of the customer does not need to be disassembled, and the customer's operation is facilitated.

[0023] The sound attenuation device is arranged on the base, fully utilizes the space of the base, does not occupy the space of the side wall of the side plate, is not directly connected with the pipeline of the customer, can replace the sound attenuation cotton and / or activated carbon in the sound attenuation device without disassembling the exhaust pipeline of the customer, the activated carbon can adsorb harmful particles and harmful gases, reduces the pollutant content of the gas at the exhaust port, and plays an environmental protection role.

[0024] The liquid medium outlet channel is arranged, so that the vacuum oil and water flowing out of the first high-speed vacuum pump and the second high-speed vacuum pump can be collected, so that the vacuum oil and water are not everywhere and the environment is not polluted.

[0025] Meanwhile, the pulley and the lifting bolt are arranged, so that flexible operation is facilitated, and when the system is moved, the system can be removed through the pulley, can be lifted and removed through the forklift, and can be lifted and removed through the lifting bolt, so that the system is easily moved and placed in any environment, and the convenience of high integration is achieved.

[0026] The first air inlet is provided with an air inlet flange, and the first air outlet is provided with an air outlet flange, so that different standards can be adopted according to the requirements of the exhaust pipe of a customer, and the flange of the first vacuum pump does not need to be customized, so that the docking requirements of the customer can be met, and flexibility and adaptability are increased.

[0027] The air inlet main pipe is provided with a filter and a condenser, so that the exhaust gas of the customer can be preliminarily treated, and the vacuum integrated system is protected. The solvent washing device is arranged, so that the air inlet pipe is more conveniently cleaned.

[0028] Additional aspects and advantages of the present application will be described in part in the following description, some of which will become apparent from the following description, or will be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0030] Figure 1 is a perspective structural schematic view of one view of the high-integration vacuum integrated system described in the present patent;

[0031] Figure 2 is another perspective structural schematic view of the high-integration vacuum integrated system described in the present patent;

[0032] Figure 3 is a perspective structural schematic view of the box, the first high-speed vacuum pump and the second high-speed vacuum pump described in the present patent;

[0033] Figure 4 is an exploded structural schematic view of the base described in the present patent;

[0034] Figure 5 is a perspective structural schematic view of one view of the second side plate, the third side plate and the fourth side plate described in the present patent;

[0035] Figure 6 is another perspective view of the second side plate, the third side plate and the fourth side plate described in the patent;

[0036] Figure 7 is an exploded structural schematic view of the box described in the patent.

[0037] Wherein, 1-box, 2-first high-speed vacuum pump, 3-second high-speed vacuum pump, 4-silencer device, 5-air inlet device, 6-cooling water device, 7-solvent washing device, 8-nitrogen device, 9-electrical system, 11-housing cavity, 12-base, 121-mounting bracket, 122-drainage channel, 123-pulley, 124-fixing hole, 13-supporting frame, 131-supporting frame main body, 1311-lifting bolt, 1312-stud, 132-top cover plate, 133-first side plate, 134-second side plate, 135-third side plate, 136-fourth side plate, 141-first air inlet, 1411-air inlet flange, 142-first air outlet, 1421-air outlet flange, 41-silencer groove, 411-baffle, 412-isolation cavity, 413-vent hole, 42-second cover plate, 421-second air inlet, 422-second air outlet, 51-air inlet main pipe, 511-connection port, 512-filtered condensate port, 513-transmitter installation port, 52-air inlet connection pipe, 53-quick-connection corrugated pipe, 61-water inlet main pipe, 611-first opening, 612-water inlet, 62-drainage main pipe, 621-second opening, 622-drainage outlet, 63-distribution port, 64-protection plate, 71-solvent washing tank, 711-liquid level sight glass, 712-drainage pipe, 81-nitrogen air inlet, 82-nitrogen pressure reducing valve, 83-nitrogen pressure gauge, 91-electrical control cabinet, 911-control cabinet door, 92-frequency converter, 93-air exchange filter fan. DETAILED DESCRIPTION

[0038] The embodiments of the present application are described in detail below with reference to the accompanying drawings. The same or similar components are denoted by the same or similar reference numerals throughout the drawings. The embodiments described below are exemplary and are intended to explain the present application, and should not be understood as limiting the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor fall within the scope of the present application.

[0039] In the description of the present application, it should be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited. In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0040] In the description of the present application, unless otherwise explicitly specified and limited, the terms "provided with", "provided with", "connected", "provided with", "provided with", "provided with", "fixed" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0041] Embodiment

[0042] Please refer to Figures 1-7 As Figures 1-7 shown, the highly integrated vacuum integrated system provided by the embodiment of the present application comprises a box body 1, a first high-speed vacuum pump 2, a second high-speed vacuum pump 3, a silencer 4, an air inlet device 5, a cooling water device 6, a solvent washing device 7, a nitrogen device 8 and an electrical system 9.

[0043] The box body comprises a containing cavity 11, a first air inlet 141 and a first air outlet 142, and the first air inlet 141 and the first air outlet 142 are both in communication with the containing cavity; the silencer 4, the air inlet device 5, the cooling water device 6, the solvent washing device 7, the nitrogen device 8 and the electrical system 9 are all arranged in the box body.

[0044] The first high-speed vacuum pump and the second high-speed vacuum pump are both fixedly accommodated in the containing cavity, the first air inlet is sealingly connected with the air inlet of the first high-speed vacuum pump through an air inlet pipe, the air outlet of the first high-speed vacuum pump is sealingly connected with the air inlet of the second high-speed vacuum pump, and the air outlet of the second high-speed vacuum pump is sealingly connected with the first air outlet. Preferably, the first air inlet 141 is provided with an air inlet flange 1411, and the first air outlet 142 is provided with an air outlet flange 1421. In the example, the air outlet of the first high-speed vacuum pump and the air inlet of the second high-speed vacuum pump are sealingly connected through a corrugated pipe,

[0045] The box 1 comprises a base 12 and a support frame 13 fixedly installed on the base 12, the base 12 and the support frame 13 jointly form a containing cavity 11, the support frame 13 comprises a support frame body 131, a top cover plate 132 and side plates, the side plates are arranged on the side of the support frame body, and the top cover plate 132 is arranged on the top of the support frame body; the side plates comprise a first side plate 133, a second side plate 134, a third side plate 135 and a fourth side plate 136; the top cover plate 132 is detachably installed on the top of the support frame body, and the first side plate 133 is detachably installed on the side of the support frame body.

[0046] The second high-speed vacuum pump 3 is fixedly installed on the base 12, the base 12 is provided with a mounting frame 121, the mounting frame 121 is detachably installed on the base 12, the second high-speed vacuum pump 3 is contained in an open cavity below the mounting frame 121, the first high-speed vacuum pump 2 is detachably fixedly installed on the mounting frame 121, and the second high-speed vacuum pump 3 is located above the first high-speed vacuum pump 2.

[0047] The base 12 is further provided with a sound attenuation device 4, which is accommodated in the accommodating cavity 11 and is arranged between the exhaust port of the second high-speed vacuum pump and the first exhaust port 142. The sound attenuation device 4 comprises a sound attenuation groove 41 with an opening and a second cover plate 42 covering the sound attenuation groove 41. A plurality of partitions 411 are arranged in the sound attenuation groove 41, which divide the sound attenuation groove 41 into a plurality of isolated cavities 412. A plurality of through air holes 413 are formed in the partitions 411, and adjacent isolated cavities 412 are connected to each other through the air holes 413. The isolated cavities 412 are provided with sound attenuation cotton or activated carbon. Preferably, the air holes 413 on every two adjacent partitions 411 are arranged in a staggered manner. The second cover plate 42 is provided with a through second air inlet 421 and a second air outlet 422. The second air inlet 421 is sealingly connected to the exhaust port of the second high-speed vacuum pump 3 through an exhaust pipe, and the second air outlet 422 is sealingly connected to the first exhaust port 142 through an exhaust pipe. Preferably, the second air inlet 421 is arranged at one end of the second cover plate 42 along the axial direction, and the second air outlet 422 is arranged at the other end of the second cover plate 42 along the axial direction. Of course, the second air inlet 421 and the second air outlet 422 can also be arranged on the sound attenuation groove 41. The gas discharged by the second high-speed vacuum pump, i.e. the dry vacuum pump, enters the second air inlet at one end of the second cover plate, sequentially passes through each isolated cavity, and the staggered arrangement of the air holes on adjacent partitions enables the gas flow to pass between the partitions and fully contact the activated cotton and / or activated carbon in the isolated cavities. After passing through the isolated cavities, the gas is discharged from the second air outlet at the other end of the second cover plate, and finally discharged to the first exhaust port through the exhaust pipe. The sound attenuation device is arranged on the base, fully utilizes the space of the base, and does not occupy the space of the side wall of the side plate. At the same time, there is no direct connection with the pipeline of the customer, so that the sound attenuation cotton and / or activated carbon in the sound attenuation device can be directly replaced without disassembling the first exhaust port pipeline of the customer. Different sound attenuation cotton or activated carbon can further reduce the harmful gas remaining in the exhaust port, reduce the pollutant content of the gas in the exhaust port, and play an environmental protection role.

[0048] The base 12 is provided with a liquid discharge channel 122, and preferably the liquid discharge port of the liquid discharge channel is arranged on the side close to the first side plate. During maintenance and maintenance of the first high-speed vacuum pump 2 and / or the second high-speed vacuum pump 3, the liquid medium such as vacuum oil and water flowing out therefrom is intercepted on the base, and then discharged through the liquid discharge channel 122. The customer can place a collection vessel at the liquid discharge port of the liquid discharge channel to collect the discharged liquid medium such as vacuum oil and water. Even if the base is cleaned by water washing or other methods, or the vacuum oil of the first high-speed vacuum pump or the second high-speed vacuum pump is accidentally completely flowed onto the base, the liquid discharge channel can be used for collection, and the traditional vacuum skid-mounted system or other reasons will not cause the waste water or vacuum oil to flow everywhere on the ground, polluting the environment.

[0049] The bottom of the base 12 is provided with a pulley 123, which is a Forma wheel or a universal wheel in the example. The Forma wheel or universal wheel facilitates the movement of the vacuum integrated system, is conducive to the movement of the customer in a small space, and is more convenient for the customer to connect and install the pipeline with the vacuum integrated system. In the example, the periphery of the base is fixed to form a base frame by square steel, the square steel is provided with a fixing hole 124, and the bottom of the square steel is provided with a through hole with a diameter larger than that of the fixing hole. The bottom of the support frame body 131 is provided with an outwardly protruding stud 1312, which can pass through the fixing hole 124 and extend into the square steel. The nut and elastic washer can pass through the through hole and extend into the square steel. The nut is fixed on the stud 1312, so that the support frame body 131 is fixed on the base 12. The nut and elastic washer are hidden in the square steel and cannot be seen from the outside, which increases the aesthetic appearance of the vacuum integrated system.

[0050] A plurality of lifting bolts 1311 are provided on the support frame body 131, preferably a plurality of lifting bolts 1311 are provided on the top surface of the support frame body 131. In the example, the support frame body 131 is a square column, and the lifting bolts 1311 are four, which are preferably arranged at the peripheral position of the top surface of the support frame body 131. The length of the top cover plate 132 is not less than the length of the first high-speed vacuum pump 2 or the second high-speed vacuum pump 3. The top cover plate 132 is detachably mounted on the top of the support frame body. After the top cover plate 132 is detached from the support frame body 131, the first high-speed vacuum pump 2 and the second high-speed vacuum pump 3 can be sequentially removed from the top of the support frame body 131. In the example, the first inlet 141 is provided on the top of the support frame body 131, and the inlet flange 1411 is provided on the first inlet 141. The customer's exhaust pipeline is sealingly connected to the inlet flange 1411, so that the first high-speed vacuum pump 2 or the second high-speed vacuum pump 3 can be disassembled or installed without disassembling the customer's exhaust pipeline. The first side plate 133 is detachably mounted on the side of the support frame body, and the running condition of the first high-speed vacuum pump 2 and the second high-speed vacuum pump 3 can be observed in detail after the first side plate 133 is detached. In the example, the support frame body 131 is fixedly composed of section steel, which ensures that the support frame body has sufficient rigidity, and four lifting bolts are installed to facilitate the overall lifting and disassembly of the vacuum integrated system. When the support frame body is fixedly connected to the base, the entire box body can be moved away through the pulley, or can be moved away through the bottom of the forklift, or can be lifted and moved away through the four lifting bolts at the top, which is suitable for easy moving and placing in any environment, and is also highly integrated and convenient.

[0051] The first air inlet 141 is provided with an air inlet flange 1411, which can be customized according to the requirements of the customer's exhaust pipe, and is connected in different standards without the need to customize the flange of the first vacuum pump, so as to meet the requirements of any air inlet flange of the customer, increase flexibility and adaptability. The first air inlet 141 is preferably arranged at the peripheral position of the top surface of the support frame body, unlike the traditional vacuum unit arranged above the inlet of the vacuum pump, which affects the disassembly and installation of the vacuum pump. The exhaust pipe of the customer is sealed and connected to the first air inlet through the air inlet flange, and the exhaust pipe of the customer is not directly connected to the first high-speed vacuum pump and the second high-speed vacuum pump, which facilitates the disassembly of the first high-speed vacuum pump and the second high-speed vacuum pump. When the first high-speed vacuum pump and the second high-speed vacuum pump are disassembled or installed, the exhaust pipe of the customer does not need to be disassembled.

[0052] The box body 1 is a highly integrated box body, and the box body is provided with a sound attenuation device 4, an air inlet device 5, a cooling water device 6, a solvent washing device 7, a nitrogen device 8 and an electrical system;

[0053] The air inlet device 5 includes a first air inlet 141 and an air inlet main pipe 51, the air inlet main pipe 51 is fixedly arranged on the inner wall of the side plate, the air inlet main pipe 51 is horizontally placed, the axis direction of the air inlet main pipe 51 is consistent with the axis direction of the first high-speed vacuum pump, the first air inlet 141 is connected with the air inlet main pipe 51 through a connecting pipe, the air inlet main pipe 51 is provided with a connecting port 511, and the connecting port 511 is connected with the air inlet of the first high-speed vacuum pump through a connecting pipe. In the example, the air inlet main pipe 51 is fixedly arranged on the inner wall of the third side plate 135. In the example, an air inlet connecting pipe 52 is also arranged, the air inlet connecting pipe 52 is arranged above the air inlet main pipe 51, the air inlet connecting pipe 52 is detachably fixed on the inner wall of the third side plate 135, the air inlet connecting pipe 52 is provided with a first connecting port and a second connecting port, the connecting port 511 is sealingly connected with the first connecting port through a quick-connection corrugated pipe 53, and the second connecting port is fixedly connected with the air inlet of the first high-speed vacuum pump through a flange. Of course, the second connecting port can also be connected with the air inlet of the first high-speed vacuum pump through a corrugated pipe or other types of connecting pipes.

[0054] Preferably, one end of the air inlet main pipe 51 is provided with a filter condensing port 512, which penetrates and extends to the outer surface of the second side plate 134, and is provided with a filter condensing port flange. A filter and / or condenser can be placed in the air inlet main pipe 51 through the filter condensing port 512. The filter condensing port can be used to place or replace a bag filter, or to place a fin condenser, thereby ensuring the replacement or maintenance of the filter and / or condenser without the need to disassemble the pipe connected to the customer, greatly reducing the workload. Preferably, the filter condensing port flange has the same size as the air inlet flange 1411. According to the actual application of the customer, the filter condensing port and the first air inlet can be interchanged in position. The vertical first air inlet or the horizontal filter condensing port can be selected as the installation position of the customer's exhaust pipe, and then the other unused filter condensing port or first air inlet is used as the filter and / or condenser placement port. The placement position of the filter and / or condenser is slightly different, and the installation position of the customer's exhaust pipe can be flexibly selected, providing more options for high integration.

[0055] Preferably, the air inlet main pipe 51 is also provided with a condensate discharge port, which is configured to periodically discharge the residual liquid condensed out or the waste liquid discharged during the cleaning of the air inlet pipe. In the example, the condensate discharge port is arranged at the bottom of the air inlet main pipe 51. Preferably, the air inlet main pipe 51 is provided with a transmitter mounting port 513 at the end away from the filter condensing port 512, which can mount a vacuum pressure transmitter. The purpose of arranging the vacuum pressure transmitter is to analyze and judge whether the decrease in vacuum degree is caused by the blockage of the filter in the air inlet main pipe or the failure of the first high-speed vacuum pump or the second high-speed vacuum pump when the vacuum degree of the customer's application decreases.

[0056] The cooling water device 6 is accommodated in the accommodating cavity 11, the cooling water device 6 includes a water inlet main pipe 61 and a water outlet main pipe 62, the water inlet main pipe 61 and the water outlet main pipe 62 are fixedly arranged on the side wall in the accommodating cavity 11, a plurality of distribution openings 63 are arranged on the water inlet main pipe 61 and the water outlet main pipe 62, the distribution openings 63 on the water inlet main pipe 61 are sealingly connected with the water inlets of the first high-speed vacuum pump or the second high-speed vacuum pump through water pipes, and the distribution openings 63 on the water outlet main pipe 62 are sealingly connected with the water outlets of the first high-speed vacuum pump or the second high-speed vacuum pump through water pipes. Since the number of water inlets or water outlets of different models of the first high-speed vacuum pump or the second high-speed vacuum pump is different or there is no water inlet or water outlet, the water inlets or water outlets of the first high-speed vacuum pump or the second high-speed vacuum pump are connected with the distribution openings according to the actual number. Preferably, a hand valve can also be arranged between the water inlet main pipe 61 and the water outlet main pipe 62, the hand valve is arranged on a distribution pipe, one end of the distribution pipe is connected with the distribution opening 63 on the water inlet main pipe 61, and the other end of the distribution pipe is connected with the distribution opening 63 on the water outlet main pipe 62, and the hand valve can adjust and control the water inlet pressure.

[0057] One end of the water inlet main pipe 61 is provided with a first opening 611 penetrating and extending to the outer surface of the second side plate 134, and a thermometer or a pressure gauge is arranged in the first opening 611; a branched water inlet 612 is arranged on one end of the water inlet main pipe 61 close to the first opening 611, and the water inlet 612 penetrates and extends to the outer surface of the second side plate 134. One end of the water outlet main pipe 62 is provided with a second opening 621 penetrating and extending to the outer surface of the second side plate 134, and a pressure gauge or a thermometer is arranged in the second opening 621; a branched water outlet 622 is arranged on one end of the water outlet main pipe 62 close to the second opening 621, and the water outlet 622 penetrates and extends to the outer surface of the second side plate 134. In the example, the water inlet main pipe 61 and the water outlet main pipe 62 are fixedly arranged on the third side plate 135, of course, the water inlet main pipe 61 and the water outlet main pipe 62 can be interchanged, and the water inlet main pipe 61 and the water outlet main pipe 62 are arranged below the air inlet main pipe 51. Preferably, a mechanical pressure gauge is arranged on the first opening 611, and a mechanical thermometer is arranged on the second opening 621, which are used for directly observing the running state of the cooling water. The first opening 611 and the second opening 621 are both arranged by means of thread holes.

[0058] The third side plate 135 is provided with an adjusting opening corresponding to the positions of the water inlet pipe 61 and the drain pipe 62, and a protective plate 64 is detachably installed on the adjusting opening. The protective plate 64 can be removed to adjust the hand valve through the adjusting opening. Generally, the protective plate 64 is removed for operation when the vacuum integrated system is installed and debugged at the beginning or when the vacuum integrated system is maintained. The opening or closing of the hand valve is adjusted. When the vacuum integrated system is normally put into operation, the protective plate plays a protective role to avoid misoperation by the operator.

[0059] The box 1 is also provided with a solvent washing device 7. In the example, the solvent washing device 7 includes a solvent washing tank 71, which is fixedly arranged in the containing cavity 11 of the support frame body 131. The opening of the solvent washing tank 71 is arranged on the top surface of the support frame body 131. The solvent washing tank 71 contains solvent washing liquid, and a sealing cover is detachably installed on the opening of the solvent washing tank 71. Preferably, a liquid level sight glass 711 is arranged on the solvent washing tank 71 and fixedly arranged on the second side plate 134. Preferably, the opening of the solvent washing tank 71 can be connected with the solvent washing mother liquid pipeline of the customer, or the solvent washing liquid can be added to the solvent washing tank by periodic replenishment. Preferably, the bottom of the solvent washing tank 71 is provided with a drain pipe 712, which extends to the outside of the box 1. The drain pipe 712 is provided with a plug, which can block the drain pipe to prevent the solvent washing liquid from being discharged from the drain pipe. When the solvent washing liquid is stored in the solvent washing tank for a long time, the solvent washing liquid in the solvent washing tank can be discharged through the drain pipe to replace the new solvent washing liquid to avoid deterioration of the solvent washing liquid. The solvent washing device is arranged to wash and maintain the first high-speed vacuum pump and / or the second high-speed vacuum pump with the solvent washing liquid in the solvent washing device, which helps to prolong the service life and maintain the high performance.

[0060] The vacuum integrated system is provided with a pneumatic actuator configured to execute the action instruction of the control system.

[0061] The nitrogen device 8 includes a nitrogen inlet 81, a nitrogen pressure reducing valve 82 and a nitrogen pressure gauge 83, which are arranged on the surface of the box body 1. Preferably, the nitrogen inlet 81 and the nitrogen pressure gauge 83 are arranged on the second side plate 134, and the nitrogen pressure reducing valve 82 is arranged on the top surface of the support frame body 131. The nitrogen device 8 is configured to provide nitrogen for pneumatic actuators and dry vacuum pumps. The customer's nitrogen pipeline is installed on the nitrogen inlet 81, which is connected with a nitrogen distributor. The nitrogen distributor can distribute the nitrogen gas path in one-to-many mode to form multiple gas paths. In the example, the nitrogen distributor divides the nitrogen gas path into a first gas path and a second gas path. The first gas path is connected with the pneumatic actuator to provide compressed nitrogen gas for the pneumatic actuator, so as to facilitate the pneumatic actuator to perform actions. The second gas path is provided with the nitrogen pressure reducing valve 82. The second gas path provided with the nitrogen pressure reducing valve is connected with the nitrogen inlet of the dry vacuum pump. The nitrogen pressure reducing valve 82 provides nitrogen for the dry vacuum pump, so as to replace the gas in the dry vacuum pump, to provide the dry vacuum pump with an air inlet purge and a gas seal. When the dry vacuum pump is started, the humid residual air in the pump cavity is replaced under the working of the cold pump in the dry vacuum pump. After the dry vacuum pump is stopped, the residual process gas which may have corrosive property in the pump cavity is replaced when the heat pump in the dry vacuum pump gradually cools down. Thus, it is ensured that the dry vacuum pump will not be seriously corroded, and it is ensured that the pump cavity is kept dry when the dry vacuum pump is stopped for a long time, so as to avoid rust.

[0062] The electrical system 9 comprises an electrical control cabinet 91 fixedly arranged on the inner wall of the accommodating cavity 11, and the electrical control cabinet 91 comprises electrical elements such as relays, switches, protection devices, PLCs and touch screens. The PLC is provided with logic for controlling various protections in the highly integrated vacuum integrated system. The PLC can set various parameters of the vacuum pump, such as the rotating speed, current, frequency and operation mode, for matching the control mode of the customer, and can also realize centralized control of the above parameters. The electrical control cabinet 91 can make full use of the space of the accommodating cavity, including the arrangement of internal cables. In the example, the electrical control cabinet 91 is fixedly arranged on the inner wall of the third side plate 135, and the third side plate is provided with a control cabinet door 911 corresponding to the position of the electrical control cabinet 91. The control cabinet door can facilitate the operation of the electrical elements in the electrical control cabinet without the need to disassemble the side plate. Preferably, the electrical system 9 further comprises at least one frequency converter 92 fixedly arranged on the inner wall of the side plate. The frequency converter 92 is arranged outside the electrical control cabinet 91. The arrangement of the frequency converter outside the electrical control cabinet is beneficial to the internal space of the electrical control cabinet and the heat dissipation of the frequency converter. In addition, the replacement of the frequency converter does not require the opening of the electrical control cabinet, but only the opening of the first side plate. In the example, the frequency converter 92 has two frequency converters 92, and the two frequency converters 92 are arranged on the inner wall of the fourth side plate 136. In the example, at least one air exchange filter fan 93 is arranged in the accommodating cavity 11, and the air exchange filter fan 93 can discharge heat in the accommodating cavity. In the example, the air exchange filter fan 93 is fixedly arranged on the inner wall of the fourth side plate 136.

[0063] All features of the above components can be freely combined without conflict. In addition, changes, variations and modifications of the component structure are also within the protection scope of the patent.

[0064] A highly integrated vacuum integrated system requires two high-speed vacuum pumps, one of which is a Roots vacuum pump, and the other of which is a dry vacuum pump. The two vacuum pumps are combined in series, and the exhaust port of the Roots vacuum pump is connected to the air inlet of the dry vacuum pump. The high-speed vacuum pump refers to a motor rotating speed that can be adjusted by a frequency converter to 2400-3000 rpm, and the vacuum pump uses a variable speed gear to achieve a rotating speed of 2400-6500 rpm, i.e. the pumping capacity can be changed by 80%-240%. In this way, the use range of the entire vacuum integrated system in pumping capacity becomes very large. If the material strength and machining precision of these vacuum pumps cannot ensure stable operation at more than 3000 rpm, they do not belong to high-speed vacuum pumps.

[0065] Adopt the series combination of Roots vacuum pump + dry vacuum pump, then the ultimate vacuum can reach 0.05Pa, almost meet all the industrial vacuum degree demand. Here high-speed dry vacuum pump refers to its single pump can reach 4200rpm, can meet the ultimate vacuum of <0.5Pa. Like the traditional screw vacuum pump in China, the ultimate vacuum can only reach 5-10Pa, the rated speed is not more than 3000rpm, which does not belong to high-speed dry vacuum pump.

[0066] Therefore, only by adopting a high-speed Roots vacuum pump and a high-speed dry vacuum pump can the most basic high integration vacuum integrated system be achieved. It can cover the basic pumping capacity of 80%-240% of the pumping range, can meet the vacuum degree of 0.05Pa-atmospheric pressure, so as to be more suitable for market demand. Otherwise, a single ordinary Roots vacuum pump + a single ordinary screw vacuum pump, its pumping capacity can only be 80%-110% of the ordinary basic pumping. Because the pumping range is too small, it leads to the need of more pump combination to meet the needs, and more vacuum pump combination together cannot constitute a truly high integration vacuum integrated system to realize mass production.

[0067] In addition to the adoption of two high-speed vacuum pumps, more other practical application factors need to be considered. First, the gas at the first inlet of the vacuum pump needs to be filtered to avoid particulate impurities and excessive dust. If the inlet temperature is too high, the gas needs to be quenched, and at the same time, the condensate in the process needs to be removed to avoid corrosion and condensation caused by pumping into the pump cavity. The filter and condenser at the first inlet of the vacuum pump need to be cleaned and washed regularly to avoid performance decline caused by filter screen blockage and condenser pipe adhesion. This requires that the device must be easy to clean and maintain, especially in some cases it can be done without disassembling the inlet pipe. Here we also need to consider that the flange standards of the inlet of different customers are not the same.

[0068] The vacuum pump needs to be cooled by water. In order to facilitate the use of customers, all the places where cooling water is needed in the entire vacuum integrated system are connected to the water inlet and outlet mother pipes, leaving only the water inlet and outlet for the customer to connect.

[0069] For the noise of the exhaust port of the dry vacuum pump, and for some applications of the customer, the exhaust gas also contains liquid components generated by compression. In order to facilitate the use of the customer and the use of the site space, the noise reduction and liquid discharge device is highly integrated, instead of connecting a larger noise reduction and liquid discharge device to the exhaust port of the traditional dry screw pump, which occupies a very large space. The patent uses a noise reduction device to fully utilize the space of the base. The device is integrated in the box and is not directly connected to the customer's exhaust pipeline. When the noise reduction cotton or activated carbon needs to be replaced, the pipeline does not need to be disassembled. It belongs to a part of high integration and easy operation.

[0070] For some process applications, the pumped medium belongs to hydrocarbons, or is severely corrosive, and a solvent washing device is required. By regularly inhaling solvent washing liquid, not only can the residual process medium in the pump cavity during long-term pumping of hydrocarbons be effectively dissolved, but also the rotor and pump cavity can be lubricated, the residual dust can be washed out, and a protective film can be formed on the surface of the pump cavity and the rotor to avoid corrosion by corrosive gas and condensate. The solvent washing tank of the solvent washing device is generally hung on the rack or placed at the inlet of the vacuum pump. Not only does it occupy space, but it also has certain requirements for users in terms of operation, and is not highly integrated.

[0071] Many vacuum pump manufacturers also make integrated vacuum integrated systems, but they only put the vacuum pump in a closed box with a cover. This not only makes the customer feel that it is not easy to operate, but also makes maintenance and use more complicated, and is just a show. Often, the replacement of an auxiliary part requires disassembly of the box, which causes many customers to eventually throw the system aside when using it. Not only does it not serve the purpose of high integration, but it also increases the manufacturing cost and the degree of difficulty for the customer to use it.

[0072] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "yet another embodiment", "another embodiment", "other embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in the present specification.

[0073] Although the embodiments of the present application have been shown and described above, it is understood that the above-described embodiments are exemplary and are not to be construed as limiting the present application, and that variations, modifications and alterations of the embodiments can be made by those skilled in the art within the scope of the present application.

Claims

1. A highly integrated vacuum integrated system, characterized by, The box (1), the first high-speed vacuum pump (2) and the second high-speed vacuum pump (3) are arranged in the accommodating cavity. The box (1) comprises an accommodating cavity (11), a first air inlet (141) and a first air outlet (142), the first air inlet (141) and the first air outlet (142) are communicated with the accommodating cavity (11); the box (1) is further provided with a cooling water device (6), a nitrogen device (8) and an electrical system (9); The first high-speed vacuum pump (2) and the second high-speed vacuum pump (3) are fixedly arranged in the accommodating cavity, the first air inlet (141) is sealingly connected with the air inlet of the first high-speed vacuum pump (2) through an air inlet pipe, the air outlet of the first high-speed vacuum pump (2) is sealingly connected with the air inlet of the second high-speed vacuum pump (3), and the air outlet of the second high-speed vacuum pump (3) is sealingly connected with the first air outlet (142); the cooling water device (6) can provide cooling circulating water for the first high-speed vacuum pump (2) and the second high-speed vacuum pump (3), the nitrogen device (8) can provide nitrogen compressed gas for the second high-speed vacuum pump (3) and the electrical system (9), and the electrical system (9) is configured to control the operation of the vacuum integrated system; The box (1) further comprises a silencing device (4) and an air inlet device (5), the silencing device (4) is fixedly arranged in the accommodating cavity (11), and the silencing device (4) is arranged between the air outlet of the second high-speed vacuum pump (3) and the first air outlet (142); The silencing device (4) comprises a silencing groove (41) and a second cover plate (42) covering the silencing groove (41), a plurality of partitions (411) are arranged in the silencing groove (41), the partitions (411) divide the silencing groove (41) into a plurality of isolated cavities (412), a plurality of through air holes (413) are formed in the partitions (411), adjacent isolated cavities (412) are communicated with each other through the air holes (413), and the isolated cavities (412) are provided with sound-absorbing cotton or activated carbon; one end of the silencing device (4) is provided with a second air inlet (421) connected with the air outlet of the second high-speed vacuum pump (3), and the other end of the silencing device (4) is provided with a second air outlet (422) connected with the first air outlet (142); The box (1) comprises a base (12) and a support frame (13), the base (12) is provided with a liquid discharge channel (122), and the vacuum oil and water and other liquid media flowing out of the first high-speed vacuum pump (2) and / or the second high-speed vacuum pump (3) during maintenance and maintenance are intercepted on the base and then discharged through the liquid discharge channel (122). The air inlet device (5) comprises a first air inlet (141), an air inlet main pipe (51) and an air inlet connecting pipe (52), the air inlet main pipe (51) is fixedly arranged on the inner wall of the side plate, the air inlet main pipe (51) is horizontally placed, the axis direction of the air inlet main pipe (51) is consistent with the axis direction of the first high-speed vacuum pump, the first air inlet (141) is connected with the air inlet main pipe (51) through a connecting pipe, a connecting port (511) is formed in the air inlet main pipe (51), the connecting port (511) is connected with the air inlet of the first high-speed vacuum pump through a connecting pipe, the air inlet connecting pipe (52) is arranged above the air inlet main pipe (51), the air inlet connecting pipe (52) is provided with a first connecting port and a second connecting port, the connecting port (511) is sealingly connected with the first connecting port through a quick-connection corrugated pipe (53), the second connecting port is fixedly connected with the air inlet of the first high-speed vacuum pump through a flange, one end of the air inlet main pipe (51) is provided with a filtering and condensing port (512), the filtering and condensing port (512) penetrates and extends to the outer surface of the box body, and the filtering and condensing port (512) is configured to be capable of placing a filter and a condenser; The cooling water device (6) is contained in the containing cavity (11), the cooling water device (6) comprises a water inlet main pipe (61) and a water outlet main pipe (62), the water inlet main pipe (61) and the water outlet main pipe (62) are fixedly arranged on the side wall in the containing cavity (11), a plurality of distribution ports (63) are formed in the water inlet main pipe (61) and the water outlet main pipe (62), the distribution ports (63) on the water inlet main pipe (61) are sealingly connected with the water inlets of the first high-speed vacuum pump or the second high-speed vacuum pump through water pipes, and the distribution ports (63) on the water outlet main pipe (62) are sealingly connected with the water outlets of the first high-speed vacuum pump or the second high-speed vacuum pump through water pipes. A transmitter mounting port (513) is formed in one end of the air inlet main pipe (51) away from the filtering and condensing port (512), and a vacuum pressure transmitter is mounted in the transmitter mounting port (513).

2. The highly integrated vacuum integration system of claim 1, wherein, The first high-speed vacuum pump (2) is a Roots vacuum pump, and the second high-speed vacuum pump (3) is a dry vacuum pump.

3. The highly integrated vacuum integration system of claim 1, wherein, The box body (1) is further provided with a solvent washing device (7), the solvent washing device (7) comprises a solvent washing tank (71), the solvent washing tank (71) is fixedly arranged in the containing cavity (11), and the opening of the solvent washing tank (71) is arranged on the top surface of the box body.

4. The highly integrated vacuum integration system of claim 2, wherein, The nitrogen device (8) comprises a nitrogen air inlet (81) and a nitrogen pressure reducing valve (82), the nitrogen air inlet (81) and the nitrogen pressure reducing valve (82) are arranged on the surface of the box body (1), and the nitrogen device (8) is configured to provide nitrogen for the dry vacuum pump.

5. The highly integrated vacuum integration system of claim 1, wherein, The first air inlet (141) is provided with an air inlet flange (1411), and the first air outlet (142) is provided with an air outlet flange (1421). The support frame (13) is fixedly installed on the base (12), and the support frame (13) is provided with a detachable top cover plate (132) and a first side plate (133).

6. The highly integrated vacuum integration system of claim 1, wherein, The air holes (413) on every two adjacent partition plates (411) are arranged in a staggered manner.

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