High cleanliness baking equipment

Abstract

A high-cleanliness baking equipment comprises a heating furnace including a furnace tube device, a shelf unit and at least one transverse air jet pipe. The furnace tube device has a furnace base assembly. The furnace base assembly has a furnace base outer frame and a furnace bottom base. The furnace base outer frame has an outer frame body with a bottom opening and a lower layer flow channel. The furnace bottom base has a bottom sealing ring that can be crimped to the bottom surface of the outer frame body. The lower layer flow channel extends along the length direction of the bottom sealing ring and is used to conduct heat energy from the outer frame body. The shelf unit has a plurality of longitudinally arranged layered carriers. The transverse air jet pipe has a plurality of longitudinally arranged air outlets. The air outlets are respectively aligned between the two adjacent layered carriers and blow out high-temperature gas transversely to adjust and control the temperature between the layered carriers so that the objects to be heated placed on the layered carriers are heated to a similar degree, thereby achieving the purpose of improving the process yield.

Description

Technical Field

[0001] The invention relates to a baking device, in particular to a high-cleanliness baking device suitable for performing heat treatment on objects to be heated. Background Art

[0002] In order to meet the needs of electronic products for more and faster computing power, in the semiconductor industry, the wire diameter specifications of the circuit patterns on the chip have been reduced, and therefore the impact of circuit pattern defects caused by dust adhesion in the semiconductor process has become more significant. In order to overcome the problem of circuit pattern defects in the semiconductor process, the cleanliness requirements for equipment in the semiconductor process have also increased. However, in terms of the heat treatment process, during the heating process of the existing wafer, since the wafer is heat treated by thermal convection in the heating furnace, the dust in the heating furnace will fall onto the surface of the wafer with the circulation of the airflow, resulting in damage to the circuit pattern. In addition, during the heating process, since the airflow of thermal convection cannot be locally controlled, the degree of heating of the wafers in different areas of the heating chamber varies, which may affect the yield. Summary of the invention

[0003] The object of the present invention is to provide a high-cleanliness baking device which can improve the process yield.

[0004] The high-cleanliness baking equipment of the present invention comprises a heating furnace, which comprises a furnace tube device, a shelf unit and at least one transverse air injection pipe.

[0005] The furnace tube device comprises a furnace tube body, a heating component group which is arranged inside the furnace tube body and can generate heat in a controlled manner, and a furnace base assembly which is located at the bottom of the furnace tube body. The furnace base assembly comprises a furnace base outer frame which is connected to the bottom of the furnace tube body and passes through to the outside, a furnace bottom base which is removably sealed to the furnace base outer frame, and at least one exhaust pipe which passes through the furnace tube body and can be used to discharge gas to the outside. The furnace base outer frame comprises an outer frame body, and a lower layer flow channel which is embedded in the outer frame body. The bottom surface of the outer frame body forms a bottom opening. The furnace bottom base comprises a bottom sealing ring which surrounds the periphery of the bottom opening. The bottom sealing ring can be crimped to the bottom surface of the outer frame body to seal the furnace tube device. The lower layer flow channel is adjacent to the bottom opening and extends along the length direction of the bottom sealing ring, and is used for the circulation of a heat-conducting fluid to conduct heat energy of the outer frame body.

[0006] The shelf unit is detachably mounted in the furnace tube device and comprises a frame body and a plurality of layered carriers arranged longitudinally on the frame body. The layered carriers are respectively suitable for carrying objects to be heated.

[0007] The transverse air injection pipe is vertically installed in the furnace tube device and adjacent to the shelf unit, and has a plurality of longitudinally arranged air outlets. The air outlets are respectively aligned between the two adjacent layered platforms, and can blow out high-temperature gas horizontally to adjust and control the temperature between the layered platforms. When the air outlet blows air horizontally and the exhaust pipe exhausts air below the furnace tube body, the gas in the furnace tube body can flow from top to bottom.

[0008] The high-cleanliness baking equipment of the present invention, the heating furnace comprises a hot air inlet pipe group installed in the furnace tube device, and the hot air inlet pipe group has a plurality of horizontal air injection pipes which are respectively erected and arranged around the shelf unit.

[0009] The high-cleanliness baking equipment of the present invention comprises: a furnace tube device having at least one cold air intake module which passes through the furnace tube body and is used for guiding the gas to enter, a cold air exhaust module which passes through the furnace tube body and is used for guiding the gas to flow to the outside, and an inner furnace unit which is arranged in the furnace tube body and covers the shelf unit and the hot air intake pipe group and is sealed with the outer frame of the furnace base; the space between the inner furnace unit and the furnace tube body forms a cooling chamber which is connected to the cold air intake module and the cold air exhaust module; the gas can be guided by the cold air intake module to enter the furnace tube body, and flow through the cooling chamber and be discharged from the cold air exhaust module, so that the temperature of the inner furnace unit is reduced.

[0010] The high-cleanliness baking equipment of the present invention is characterized in that the top surface of the outer frame body also forms a top opening opposite to the bottom opening, the inner furnace unit has an inner furnace body, and at least one top sealing ring arranged between the inner furnace body and the outer frame body, the top sealing ring surrounds the outer periphery of the top opening to seal the inner furnace body and the outer frame body, the furnace base outer frame also has an upper flow channel embedded in the outer frame body and located above the lower flow channel, the upper flow channel is adjacent to the top opening and extends along the length direction of the top sealing ring, and is used for the circulation of a heat-conducting fluid to extract the heat energy of the outer frame body.

[0011] In the high-cleanliness baking equipment of the present invention, the cold air intake module is arranged at the bottom of the furnace tube body, and the cold air exhaust module is arranged at the top of the furnace tube body. When the cold air intake module and the cold air exhaust module are actuated, the gas in the cooling chamber can flow from bottom to top.

[0012] The high-cleanliness baking equipment of the present invention, the furnace tube device also has a plurality of thermocouple components arranged around the shelf unit, and the thermocouple components are used to sense the temperature around the shelf unit.

[0013] The high-cleanliness baking equipment of the present invention comprises a heating component group having a plurality of ceramic electric heating plates arranged in a ring shape along the furnace tube body, and each of the ceramic electric heating plates can be controlled to adjust the temperature separately.

[0014] The high-cleanliness baking equipment of the present invention, the furnace base assembly also has two connecting pieces respectively connected to the left and right sides of the furnace bottom base, the high-cleanliness baking equipment also includes two lifting mechanisms, the lifting mechanisms are respectively arranged below the left and right sides of the heating furnace, each lifting mechanism includes a dustproof shell, a lifting cylinder, at least two guide wheels and a dustproof belt, each dustproof shell forms a longitudinally extending slideway, each lifting cylinder has a cylinder body, and a piston block arranged in the corresponding slideway and capable of moving up and down relative to the cylinder body, the piston block is away from the One end of the cylinder body is connected to the connecting piece respectively, so that the furnace bottom base can move up and down as the piston block is actuated. The guide wheels of each lifting mechanism are laterally arranged at the top and bottom of the slideway, and each guide wheel can pivot around the horizontal axis. Each dustproof belt surrounds the guide wheel of the corresponding lifting mechanism, and the two opposite ends of the dustproof belt are respectively connected to the corresponding connecting piece. The dustproof belt is covered on the outer periphery of the corresponding piston block and can pivot as the connecting piece is moved, so that the opening of the slideway can be shielded by the dustproof belt.

[0015] In the high-cleanliness baking equipment of the present invention, each lifting mechanism further comprises at least one exhaust unit penetrating the bottom of the corresponding dustproof shell, so that the gas in the dustproof shell is discharged from top to bottom.

[0016] The high-cleanliness baking equipment of the present invention also includes a gas filtering device, which includes an outer cylinder structure connected to the exhaust pipe and a condensation structure with high heat transfer characteristics. The condensation structure is not connected to the outer cylinder structure and is used to extract the heat energy in the outer cylinder structure, so that the gas in the outer cylinder structure and the condensation structure produce heat exchange, so that some components in the gas are cooled and condensed.

[0017] The beneficial effect of the present invention is that the high-temperature gas is blown out horizontally between the layered platforms by the air outlet holes of each of the horizontal air injection pipes, thereby controlling the temperature between the layered platforms, so that the objects to be heated placed on the layered platforms are heated to a similar degree, thereby achieving the purpose of improving the process yield. In addition, when the air outlet holes blow air horizontally and the exhaust pipe exhausts air below the furnace tube body, the gas in the furnace tube body can be discharged from top to bottom to the outside, so as to avoid the dust deposited below the furnace tube body from floating toward the layered platforms with the up and down circulating airflow and adhering to the surface of the object to be heated, which can also achieve the purpose of improving the process yield. In addition, the opening of the slideway of each of the lifting mechanisms is shielded by the dustproof belt, so that the dust in each of the dustproof shells cannot float into the inner furnace body through the bottom opening, which can avoid the increase of dust in the inner furnace body and contamination of the object to be heated, thereby achieving the purpose of improving the process yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Other features and effects of the present invention will be clearly presented in the embodiments with reference to the accompanying drawings, in which:

[0019] Figure 1 is a schematic diagram illustrating an embodiment of a high cleanliness baking device of the present invention;

[0020] Figure 2 is a schematic cross-sectional view illustrating a heating furnace of the embodiment;

[0021] Figure 3 is a cross-sectional schematic diagram of the heating furnace from another viewing angle;

[0022] Figure 4 yes Figure 2 A partial enlarged view of the heating furnace, illustrating the connection relationship between the furnace base assembly and an inner furnace unit;

[0023] Figure 5 Yes Figure 1 A cross-sectional schematic diagram from a perspective illustrating the connection relationship between the two lifting mechanisms of the embodiment and the furnace bottom base of the heating furnace;

[0024] Figure 6 is a schematic cross-sectional view illustrating the gas filtering device; and

[0025] Figure 7 It is another state schematic diagram of the high cleanliness baking equipment. DETAILED DESCRIPTION

[0026] See also Figure 1 and Figure 2, which is an embodiment of the high-cleanliness baking equipment of the present invention. The high-cleanliness baking equipment is suitable for heat treating a plurality of objects to be heated 9 such as wafers, and comprises a heating furnace 1, two lifting mechanisms 2 and a gas filtering device 3.

[0027] See also Figure 2 The heating furnace 1 includes a furnace tube device 4, a shelf unit 5 detachably installed in the furnace tube device 4 and suitable for carrying the object to be heated 9, and a hot air inlet pipe group 6 installed in the furnace tube device 4. The furnace tube device 4 comprises a furnace tube body 41, a heating component group 42 which is arranged on the inner side of the furnace tube body 41 and can generate heat in a controllable manner, a furnace base assembly 43 which is located at the bottom of the furnace tube body 41, four groups of cold air intake modules 44 which are arranged on the bottom of the furnace tube body 41 and can be controlled to move, a cold air exhaust module 45 which is installed on the top of the furnace tube body 41 and can be controlled to move, an inner furnace unit 46 which is arranged in the furnace tube body 41 and covers the shelf unit 5 and the hot air intake pipe group 6, a cooling chamber 47 which is defined by the outer wall of the inner furnace unit 46 and the inner side of the furnace tube body 41, and a plurality of thermocouple components 48 which are arranged around the shelf unit 5.

[0028] See also Figure 2 In this embodiment, the furnace tube body 41 is in the form of a cylinder with its opening facing downward, but the present invention is not limited to this form. The heating component group 42 has several ceramic electric heating plates (not shown) arranged in a ring along the furnace tube body 41. Each of the ceramic electric heating plates can be controlled to adjust the temperature separately, so that the temperature of each area in the furnace tube body 41 can be adjusted to be almost the same, so that the degree of heating of the object to be heated 9 in different areas of the furnace tube body 41 is similar. The ceramic electric heating plate can increase the temperature in the furnace tube body 41 by heat radiation. Compared with the method of heating by introducing hot air, it can prevent the gas in the furnace tube body 41 from being disturbed up and down by thermal convection, thereby reducing the flying of dust in the furnace tube body 41. However, the implementation of the heating component group 42 is not limited to the type of heat radiation, and can also be a common heat convection type heater, and then the inner furnace unit 46 is covered on the shelf unit 5 to isolate the air flow between the heating component group 42 and the shelf unit 5, so as to prevent the dust generated by the heating component group 42 from drifting to the shelf unit 5 and affecting the cleanliness of the object to be heated 9.

[0029] See also Figure 1 and Figure 2The furnace base assembly 43 comprises a furnace base outer frame 431, a furnace bottom base 432, four exhaust pipes 433, and two connectors 434 respectively connected to the left and right sides of the furnace bottom base 432. The furnace base outer frame 431 is connected to the bottom of the furnace tube body 41, and comprises an outer frame body 435 that passes through the inside and outside of the furnace tube body 41, and a lower layer flow channel 436 and an upper layer flow channel 437 respectively embedded in the outer frame body 435. The bottom surface and the top surface of the outer frame body 435 respectively form a top opening 4351 and a bottom opening 4352 in opposite directions. The lower flow channel 436 and the upper flow channel 437 are respectively adjacent to the bottom opening 4352 and the top opening 4351, and surround the channel that longitudinally penetrates the outer frame body 435, and both the lower flow channel 436 and the upper flow channel 437 can allow heat transfer fluid to flow, so as to extract the heat energy of the outer frame body 435. In this embodiment, the lower flow channel 436 and the upper flow channel 437 are both used to guide nitrogen gas at room temperature to pass through, but the composition of the heat transfer fluid that can be guided is not limited thereto.

[0030] See also Figure 2 , the furnace bottom base 432 is detachably sealed to the furnace bottom outer frame 431, and has a bottom sealing ring 438 surrounding the periphery of the bottom opening 4352. The bottom sealing ring 438 can be pressed against the bottom surface of the outer frame body 435 to ensure the airtightness between the furnace bottom outer frame 431 and the furnace bottom base 432. In this embodiment, the setting position of the bottom sealing ring 438 is aligned with the lower layer flow channel 436, that is, the lower layer flow channel 436 extends along the length direction of the bottom sealing ring 438, so that the lower layer flow channel 436 can conduct away the heat energy of the outer frame body 435 abutting against the bottom sealing ring 438, and prevent the bottom sealing ring 438 from being affected by the heat conduction of the outer frame body 435 and being deformed by heat. The exhaust pipes 433 are respectively installed on the left and right sides of the furnace base outer frame 431 and connect the inside of the furnace tube body 41 with the outside, and can be used to discharge the gas inside the furnace tube body 41 to the outside. However, the exhaust pipes 433 can also be respectively installed on the furnace bottom base 432, and can also discharge the gas inside the furnace tube body 41 to the outside. Although the number of the exhaust pipes 433 is four, it is not limited to a specific number, and can also be one, two, three or more than five.

[0031] See also Figure 2, the cold air intake modules 44 respectively penetrate the bottom of the furnace tube body 41 and are used to guide the gas from the outside to flow into the cooling chamber 47. The cold air exhaust module 45 penetrates the top of the furnace tube body 41 and is used to guide the gas from the cooling chamber 47 to the outside. When the cold air intake module 44 and the cold air exhaust module 45 are activated, the gas in the cooling chamber 47 can flow from bottom to top, so as to extract the heat energy of the inner furnace unit 46. In this embodiment, the cold air intake module 44 and the cold air exhaust module 45 each include a pipeline connected to the cooling chamber 47 and an exhaust fan installed at the pipeline, so as to realize the function of air flow and guidance. In addition, in this embodiment, the cold air intake modules 44 are installed at the bottom of the furnace tube body 41 in an equidistant manner, so that the four sides of the inner furnace unit 46 are evenly cooled. However, the number of the cold air intake modules 44 is not limited to a specific number. On the other hand, the cold air intake module 44 and the cold air exhaust module 45 can also be arranged upside down, that is, the cold air intake module 44 is arranged above the cold air exhaust module 45, so that the gas in the cooling chamber 47 is discharged from the bottom. The implementation method of the cold air intake module 44 and the cold air exhaust module 45 depends on actual needs.

[0032] See also Figure 3 to Figure 4 , the inner furnace unit 46 has an inner furnace body 461, and two top sealing rings 462 arranged between the inner furnace body 461 and the outer frame body 435. The inner furnace body 461 covers the shelf unit 5 and the hot air inlet pipe group 6 to separate the shelf unit 5 from the heating component group 42, so that the dust generated by the heating component group 42 cannot drift to the shelf unit 5 and affect the cleanliness of the object to be heated 9. In the present embodiment, the material of the inner furnace body 461 is quartz, which is resistant to high temperatures and can absorb the heat energy in the furnace tube body 41 and radiate heat to the shelf unit 5. However, the material of the inner furnace body 461 can also be a high-temperature resistant material such as aluminum or stainless steel, depending on actual needs. In the present embodiment, the cross-section of the inner furnace body 461 is as follows Figure 3The inner furnace body 461 is shown as a circle, but the shape is not limited to a circle. The cross-sectional shape of the inner furnace body 461 can also be a polygon. The ceramic electric heating plates corresponding to the heating component group 42 are spaced through the inner furnace body 461, and the ceramic electric heating plates are evenly distributed on the circumference of the inner furnace body 461, so that each part of the inner furnace body 461 absorbs the heat energy of the ceramic electric heating plates respectively, and then transfers the heat energy to the shelf unit 5 in the form of heat radiation from different directions to ensure the uniformity of temperature distribution. The top sealing ring 462 surrounds the outer periphery of the top opening 4351 of the outer frame body 435 to ensure the airtightness between the inner furnace body 461 and the outer frame body 435. In this embodiment, the top sealing ring 462 is arranged at a position aligned with the upper flow channel 437, that is, the upper flow channel 437 extends along the length direction of the top sealing ring 462, so that the upper flow channel 437 can conduct heat energy of the outer frame body 435 close to the top sealing ring 462, and prevent the top sealing ring 462 from being affected by the heat conduction of the outer frame body 435 and deformed by heat. In this embodiment, the number of the top sealing rings 462 can also be one or more than three, depending on the sealing effect of the inner furnace body 461 and the outer frame body 435.

[0033] See also Figure 2 and Figure 3 , the cooling chamber 47 is connected to the cold air intake module 44 and the cold air exhaust module 45. Among them, the external gas can be guided by the cold air intake module 44 to enter the furnace tube body 41, and flow through the cooling chamber 47 and be discharged from the cold air exhaust module 45, so that the temperature of the inner furnace unit 46 decreases. In other words, when the heat treatment process of the object to be heated 9 is completed, the object to be heated 9 in the inner furnace unit 46 must be cooled down before the object to be heated 9 can be taken out from the inner furnace unit 46. Therefore, the design of using the cooling chamber 47 to cool down the inner furnace unit 46 can save the time of waiting for the object to be heated 9 to cool down, so as to improve the process efficiency. The thermocouple component 48 extends longitudinally upward from the furnace base assembly 43, and is used to sense the temperature around the shelf unit 5. In this embodiment, the extension lengths of each of the thermocouple components 48 are different to sense the ambient temperature of each layer of the shelf unit 5.

[0034] See also Figure 2 and Figure 3The shelf unit 5 has a frame 51 and a plurality of layered carriers 52 arranged longitudinally on the frame 51 and respectively suitable for carrying the objects to be heated 9. The frame 51 is installed above the furnace bottom base 432 and can be moved out of the furnace tube body 41 as the furnace bottom base 432 moves away from the furnace base outer frame 431, so as to facilitate the objects to be heated 9 to be loaded on the layered carriers 52 or moved from the layered carriers 52 to other places. In this embodiment, the frame 51 is implemented as four vertical poles symmetrically arranged above the furnace bottom base 432, and each of the layered carriers 52 is implemented as four flat plates respectively connected to the vertical poles, and the flat plates are not connected to each other, so that only four corners of each of the objects to be heated 9 are supported by the flat plates, and the middle part of each of the objects to be heated 9 can be suspended and loaded on the shelf unit 5.

[0035] See also Figure 2 and Figure 3 The hot air inlet pipe group 6 is installed above the furnace bottom base 432 and can be exposed outside the furnace tube body 41 as the furnace bottom base 432 moves away from the furnace base outer frame 431, and has a plurality of transverse air jet pipes 61 respectively erected and arranged around the shelf unit 5, a front longitudinal air jet pipe 62 and a rear longitudinal air jet pipe 63 with an opening facing upward. Each transverse air jet pipe 61 has a plurality of longitudinally arranged air outlet holes 611. The air outlet holes 611 are respectively aligned between the two adjacent layered platforms 52, and can blow out high-temperature gas horizontally to adjust and control the temperature between the layered platforms 52. In this embodiment, the hot air inlet pipe group 6 is used to guide the high-temperature nitrogen flow, and the number of the transverse air jet pipes 61 is four, and the transverse air jet pipes 61 are arranged in groups of two on the left and right sides of the shelf unit 5, so that the object to be heated 9 is heated from four directions more evenly. However, the number of the transverse air injection pipes 61 is not limited to a specific number, and is determined according to actual needs. The opening of the front longitudinal air injection pipe 62 and the opening of the rear longitudinal air injection pipe 63 are respectively arranged at the front and rear sides of the shelf unit 5, and can blow high-temperature gas upward so that the gas in the furnace tube device 4 flows downward from the top. In this embodiment, the bottom end of the front longitudinal air injection pipe 62 is connected to the furnace bottom base 432 behind the shelf unit 5, and extends longitudinally to the top of the shelf unit 5, and then as shown in FIG. Figure 3As shown, the front longitudinal air jet pipe 62 extends from the top of the layered platform 52 toward the front side of the shelf unit 5, and finally the top opening of the front longitudinal air jet pipe 62 is set in front of the shelf unit 5, so that the front longitudinal air jet pipe 62 can still blow air toward the top front side of the shelf unit 5 without blocking the object to be heated 9 from entering and exiting from the front side of the shelf unit 5. In addition, the bottom end of the rear longitudinal air jet pipe 63 is also connected to the furnace bottom base 432 behind the shelf unit 5, just like the front longitudinal air jet pipe 62, but the difference from the front longitudinal air jet pipe 62 is that the rear longitudinal air jet pipe 63 extends longitudinally from the furnace bottom base 432 to the top rear side of the shelf unit 5. In this way, when the air outlet 611 blows air horizontally and the exhaust pipe 433 exhausts air at the bottom of the inner furnace unit 46, and then cooperates with the front longitudinal jet pipe 62 and the rear longitudinal jet pipe 63 to blow air upward, the gas in the shelf unit 5 can flow from the inside to the outside, and the gas in the inner furnace unit 46 flows from top to bottom, which can prevent dust from floating from the outside of the shelf unit 5 to the surface of the object to be heated 9, so as to ensure the surface cleanliness of the object to be heated 9.

[0036] See also Figure 1 , Figure 2 and Figure 5, the lifting mechanisms 2 are respectively arranged below the left and right sides of the heating furnace 1. Each lifting mechanism 2 includes a dustproof shell 21, a lifting cylinder 22, four guide wheels 23, a dustproof belt 24, an exhaust unit 25, and lifting components and chain belts arranged in the dustproof shell 21 and which can also assist in supporting the furnace bottom base 432, which are not shown in detail. Each dustproof shell 21 forms a longitudinally extending slide 211, and an opening 212 connecting the slide 211 with the outside, and is used to cover the structure generated by friction when the lifting cylinder 22 and the guide wheel 23 are actuated, so that the dust generated by the friction is not easy to float to the external environment. Each opening 212 is used for the corresponding connecting member 434 to extend into the corresponding slide 211. Each lifting cylinder 22 has a cylinder body 221, and a piston block 222 arranged in the corresponding slide 211 and capable of moving up and down relative to the cylinder body 221. The piston block 222 is respectively connected to the connecting piece 434 and connected to the corresponding cylinder body 221, so that the furnace bottom base 432 connected to the connecting piece 434 can be displaced up and down with the movement of the piston block 222. The guide wheels 23 of each lifting mechanism 2 are respectively arranged laterally at the top and bottom of the slideway 211. Each guide wheel 23 can pivot around the horizontal axis. Each dustproof belt 24 surrounds the guide wheel 23 of the corresponding lifting mechanism 2, and the two opposite ends of the dustproof belt 24 are respectively connected to the top and bottom of the corresponding connecting piece 434. It should be particularly noted that the width of each dustproof belt 24 is slightly larger than the width of the corresponding opening 212. Figure 5 As shown, in this embodiment, the guide wheels 23 are implemented by horizontally setting two of the guide wheels 23 at intervals at the bottom of the slideway 211, so that the bottom of the dustproof belt 24 is horizontally bypassed around the two guide wheels 23, and the remaining two guide wheels 23 are also horizontally set at intervals at the top of the slideway 211, so that the top of the dustproof belt 24 is horizontally extended and bypassed around the remaining two guide wheels 23, thereby making the dustproof belt 24 separate the cylinder body 221 and the piston block 222 to avoid friction with the piston block 222 and reduce the generation of dust. Moreover, the upper and lower guide wheels 23 close to the corresponding opening 212 make the part of the dustproof belt 24 adjacent to the opening 212 parallel to the extension direction of the opening 212, and almost close to but not in contact with the inner surface of the dustproof housing 21, so that the opening 212 can be shielded and the dust generated by the friction between the dustproof belt 24 and the inner surface of the dustproof housing 21 can be avoided. Of course, the number of the guide wheels 23 may be two, three, or more than five, and they are respectively disposed at the top and the bottom of the slideway 211 , and are not limited to a specific implementation.

[0037] More specifically, the dustproof belt 24 is wrapped around the outer periphery of the corresponding piston block 222. When each of the connecting pieces 434 moves up and down as the corresponding piston block 222 is actuated, the corresponding dustproof belt 24 can be driven to pivot bidirectionally along a circulation path. In this way, when the lifting mechanism 2 is actuated, since each of the dustproof belts 24 can pivot as the corresponding connecting piece 434 is displaced, the corresponding opening 212 can be continuously shielded by the corresponding dustproof belt 24. In other words, the only opening 212 of each of the dustproof housings 21 is closed by the corresponding dustproof belt 24, so that the dust in each of the dustproof housings 21 cannot be dispersed to the external environment through the opening 212.

[0038] See also Figure 1 and Figure 5 Each of the exhaust units 25 is installed at the bottom of the corresponding dustproof shell 21, and connects the interior of the corresponding dustproof shell 21 with the outside world, so that the gas in the corresponding dustproof shell 21 is discharged from the corresponding exhaust unit 25 to the outside world from top to bottom, so as to reduce the amount of dust in the dustproof shell 21.

[0039] See also Figure 1 and Figure 6 , the gas filter device 3 includes an outer cylinder structure 31 connected to the exhaust pipe 433, a condensation structure 32 with high heat transfer characteristics and not connected to the outer cylinder structure 31, and a pressure detector (not shown). The outer cylinder structure 31 includes an outer cylinder 311, and a cylinder cover 312 that can be detachably locked to the outer cylinder 311. An exhaust outlet 313 is formed at one end of the outer cylinder 311 away from the cylinder cover 312. In this embodiment, the outer cylinder 311 is a cylindrical cylinder with openings on both the top and the bottom. The cylinder cover 312 covers the top of the outer cylinder 311 to close the opening at the top of the outer cylinder 311. The exhaust outlet 313 is formed at the bottom of the outer cylinder 311 to be away from the top opening of the outer cylinder 311. However, the shape of the outer cylinder 311 and the implementation method of the opening position of the outer cylinder 311 can be adjusted according to actual needs. The cylinder cover 312 forms an air inlet 314 penetrating to the outer cylinder 311, and a detection port 315 penetrating to the outer cylinder 311. The air inlet 314 is connected to the exhaust pipe 433, so that the gas in the inner furnace unit 46 can flow into the outer cylinder 311. The detection port 315 is used for the pressure detector to be inserted into the outer cylinder 311 from the outside, so as to facilitate monitoring the pressure of the gas flowing in the outer cylinder 311.

[0040] The condensation structure 32 includes an inner cylinder 321 extending from the inner side of the cylinder cover 312 toward the exhaust outlet 313, an inflow pipe 322 and an outflow pipe 323 respectively connected to the inner cylinder 321, and a plurality of condensation plates 324 connected to the outer side of the inner cylinder 321 and arranged at intervals along the extension direction of the inner cylinder 321. More specifically, the inner cylinder 321 and the condensation plates 324 are both accommodated in the outer cylinder body 311 to provide air from the inner furnace unit 46 (see Figure 2 ) and the outer wall of the inner cylinder 321 and the condensation plate 324 perform condensation of impurities in the gas by heat conduction. In this embodiment, the inner cylinder 321 and the condensation plate 324 are made of materials with high heat transfer properties. The inflow pipe 322 and the outflow pipe 323 both penetrate the cylinder cover 312, and respectively guide the heat-conducting fluid to flow into the inner cylinder 321, and guide the heat-conducting fluid to flow out of the inner cylinder 321 so as to export the heat energy of the inner cylinder 321 and the condensation plate 324 through the heat-conducting fluid. In this embodiment, the inflow pipe 322 extends from the cylinder cover 312 toward the bottom of the inner cylinder 321. More specifically, the distance from the inflow pipe 322 to the bottom of the inner cylinder 321 is smaller than the distance from the outflow pipe 323 to the bottom of the inner cylinder 321. In this way, the heat transfer fluid can flow directly into the bottom of the inner cylinder 321 and flow toward the top of the inner cylinder 321, so as to ensure that the heat transfer fluid fully flows through the inner cylinder 321, thereby increasing the heat exchange efficiency of the condensation structure 32. In addition, the outer diameter of the inner cylinder 321 is larger than the outer diameters of the inflow pipe 322 and the outflow pipe 323, so as to increase the overall surface area of ​​the condensation structure 32, thereby improving the heat exchange efficiency of the condensation structure 32.

[0041] Each condensation plate 324 forms a communication hole 325 penetrating two opposite plate surfaces of the condensation plate 324 , and the communication holes 325 of two adjacent condensation plates 324 are staggered with each other. In this embodiment, on the radial projection of the condensation plate 324, the air inlet 314 and the connecting holes 325 of the adjacent condensation plates 324 are symmetrically formed on the cylinder cover 312 and the corresponding condensation plate 324 with the axis of the inner cylinder 321 as the center. In addition, on the radial projection of the condensation plate 324, the connecting holes 325 of two adjacent condensation plates 324 are symmetrically formed on the condensation plates 324 with the axis of the inner cylinder 321 as the center. At the same time, there is only one connecting hole 325 in each condensation plate 324, and the gap between the side edge of the condensation plate 324 and the inner surface of the outer cylinder body 311 is very small, so that the gas in the outer cylinder body 311 can only pass through the connecting holes 325 in sequence and finally flow out from the exhaust outlet 313. In other words, the gas in the outer cylinder 311 can pass through the outer cylinder 311 along the longest path to increase the time for heat exchange between the gas in the outer cylinder 311 and the condensation structure 32. However, the number of the connecting holes 325 of each of the condensation plates 324 is not limited to a specific number, but depends on actual needs. In the present embodiment, the aperture of each connecting hole 325 is greater than the thickness of each of the condensation plates 324. In other words, the gas in the outer cylinder 311 has not been compressed and cooled by the hole walls of each of the connecting holes 325, that is, it has passed through the connecting holes 325 in sequence, but has reached some components (mainly such as Figure 2 The impurities volatilized from the coating applied on the object to be heated 9 are cooled and condensed to achieve gas purification.

[0042] See also Figure 1 , Figure 2 and Figure 7 During the heat treatment process, the furnace bottom base 432 will first Figure 1 , 7Generally, as the lifting mechanism 2 is actuated, the shelf unit 5 is separated from the furnace base outer frame 431 and descends to the bottom of the lifting mechanism 2 together with the shelf unit 5. At this time, the shelf unit 5 is exposed outside the furnace tube body 41, so that the objects to be heated 9 can be placed on the layered carriers 52. Then, the furnace bottom base 432 moves upward as the lifting mechanism 2 is actuated, and is sealed with the furnace base outer frame 431 through the bottom sealing ring 438, so that the shelf unit 5 is accommodated in the enclosed space of the inner furnace unit 46. Subsequently, the ceramic electric heating plates of the heating component group 42 are respectively actuated to maintain the temperature in the inner furnace unit 46 within the process temperature range, and in conjunction with the temperature of different areas around the shelf unit 5 sensed by the thermocouple component 48, the transverse jet pipes 61 of the hot air inlet pipe group 6 are driven to respectively spray high-temperature nitrogen gas with different air volumes to the object to be heated 9, so as to fine-tune the degree of heating of the object to be heated 9, so that the degree of heating of the object to be heated 9 in different areas is similar. At the same time, the lower layer flow channel 436 and the upper layer flow channel 437 both guide the passage of hot fluid, which can guide the heat energy conducted from the inner furnace unit 46 to the outer frame body 435, so as to locally cool the outer frame body 435 and prevent the bottom sealing ring 438 and the top sealing ring 462 from being deformed due to heat. Finally, when the heating process of the heating furnace 1 is completed, the cold air intake module 44 and the cold air exhaust module 45 are activated to cause heat exchange between the temperature in the inner furnace unit 46 and the temperature in the cooling chamber 47 to cool down, and then the aforementioned actions can be repeated to lower the furnace bottom base 432 to take out the object to be heated 9.

[0043] See also Figure 1 , Figure 2 and Figure 6When the heating furnace 1 performs heat treatment on the object to be heated 9, the coating applied on the object to be heated 9 will volatilize due to heat to generate volatile gas. Then, the volatile gas in the heating furnace 1 is guided by the exhaust pipe 433, passes through the air inlet 314, the connecting hole 325 and the exhaust outlet 313 in sequence, and exchanges heat with the inner cylinder 321 and the condensation plate 324 to cool down and condense, forming liquid or gel-like organic substances remaining in the outer cylinder 311. At the same time, the inflow pipe 322, the inner cylinder 321 and the outflow pipe 323 can guide the heat transfer fluid to pass through in sequence, so as to extract the heat energy of the inner cylinder 321 and the condensation plate 324 through the heat transfer fluid, so that the condensation structure 32 maintains a temperature lower than that of the volatile gas. It is worth mentioning that the organic matter remaining in the outer cylinder 311 will adhere to the plate surface of the condensation plate 324 and the hole wall of the connecting hole 325, resulting in the blockage of the connecting hole 325. At this time, the pressure detector will show that the pressure value in the outer cylinder 311 is too high, thereby prompting the user to separate the cylinder cover 312 from the outer cylinder 311, so that the condensation structure 32 connected to the cylinder cover 312 can be removed from the outer cylinder 311 as the cylinder cover 312 moves, so as to facilitate the subsequent cleaning of the condensation structure 32.

[0044] In summary, by aiming the air outlets 611 of each of the transverse air injection pipes 61 at the layered carriers 52 and blowing out high-temperature gas laterally, the temperature between the layered carriers 52 is controlled, so that the objects to be heated 9 placed on the layered carriers 52 are heated to a similar degree, so as to ensure that each object to be heated 9 can be subjected to the same heat treatment conditions, thereby achieving the purpose of improving the process yield. In addition, when the air outlets 611 blow air laterally and the exhaust pipe 433 exhausts air below the furnace tube body 41, the gas in the furnace tube body 41 can be discharged from top to bottom to the outside, so as to prevent the dust deposited below the furnace tube body 41 from floating toward the layered carrier 52 with the up-and-down circulating airflow and adhering to the surface of the object to be heated 9, which can also achieve the purpose of improving the process yield. In addition, since the opening of the slide 211 of each of the lifting mechanisms 2 is shielded by the dustproof belt 24, the dust in each of the dustproof shells 21 cannot drift into the inner furnace body 461 through the bottom opening 4352, thereby preventing the amount of dust in the inner furnace body 461 from increasing and ensuring the cleanliness of the object to be heated 9, thereby achieving the purpose of improving the process yield, and thus the purpose of the present invention can be achieved.

[0045] The above are merely embodiments of the present invention and should not be used to limit the scope of the present invention. That is, any simple equivalent changes and modifications made according to the claims and description of the present invention still fall within the scope of the present invention.

Claims

1. A high cleanliness baking equipment, characterized in that: It contains: Heating furnace, including A furnace tube device comprises a furnace tube body, a heating component group which is arranged inside the furnace tube body and can controllably generate heat, and a furnace base assembly which is located at the bottom of the furnace tube body, wherein the furnace base assembly comprises a furnace base outer frame which is connected to the bottom of the furnace tube body and passes through to the outside, a furnace bottom base which is detachably sealed to the furnace base outer frame, at least one exhaust pipe which passes through the furnace tube body and can be used to exhaust gas to the outside, and two connectors which are respectively connected to the left and right sides of the furnace bottom base, wherein the furnace base outer frame comprises an outer frame body, and A lower layer flow channel is embedded in the outer frame body, the bottom surface of the outer frame body forms a bottom opening, the furnace bottom base has a bottom sealing ring surrounding the periphery of the bottom opening, the bottom sealing ring can be crimped to the bottom surface of the outer frame body to seal the furnace tube device, the lower layer flow channel is adjacent to the bottom opening and extends along the length direction of the bottom sealing ring, and is used for heat transfer fluid to flow, so as to extract the heat energy of the outer frame body. The shelf unit is detachably mounted in the furnace tube device and comprises a frame body and a plurality of layered carriers arranged longitudinally on the frame body, wherein the layered carriers are respectively suitable for carrying objects to be heated. At least one transverse air injection pipe is vertically installed in the furnace tube device and adjacent to the shelf unit, and has a plurality of longitudinally arranged air outlets, the air outlets are respectively aligned between the two adjacent layered platforms, and can blow out high-temperature gas horizontally to adjust and control the temperature between the layered platforms, and two lifting mechanisms, the lifting mechanisms are respectively arranged below the left and right sides of the heating furnace, each lifting mechanism includes a dustproof shell, a lifting cylinder, at least two guide wheels and a dustproof belt, each dustproof shell forms a longitudinally extending slideway, each lifting cylinder has a cylinder body, and is arranged in the corresponding slideway and can be relative to the cylinder body A piston block that moves up and down, one end of the piston block away from the cylinder body is respectively connected to the connecting piece, so that the furnace bottom base can move up and down with the actuation of the piston block, the guide wheels of each lifting mechanism are respectively arranged transversely at the top and bottom of the slideway, each guide wheel can pivot with the transverse axis as the axis, each dustproof belt surrounds the guide wheel of the corresponding lifting mechanism, and the two opposite ends of the dustproof belt are respectively connected to the corresponding connecting piece, wherein the dustproof belt is covered on the outer periphery of the corresponding piston block and can pivot with the displacement of the connecting piece, so that the opening of the slideway can be shielded by the dustproof belt, When the air outlet blows air horizontally and the exhaust pipe exhausts air below the furnace tube body, the gas in the furnace tube body can flow from top to bottom.

2. The high cleanliness baking equipment according to claim 1, characterized in that: The heating furnace comprises a hot air inlet pipe group installed in the furnace tube device, and the hot air inlet pipe group has a plurality of transverse air injection pipes which are respectively erected and arranged around the shelf unit.

3. The high cleanliness baking equipment according to claim 2, characterized in that: The furnace tube device comprises at least one cold air intake module which passes through the furnace tube body and is used to guide the gas to enter, a cold air exhaust module which passes through the furnace tube body and is used to guide the gas to flow to the outside, and an inner furnace unit which is arranged in the furnace tube body and covers the shelf unit and the hot air intake pipe group and is sealed with the outer frame of the furnace base. The space between the inner furnace unit and the furnace tube body forms a cooling chamber, and the cooling chamber connects the cold air intake module and the cold air exhaust module, wherein the gas can be guided by the cold air intake module to enter the furnace tube body, flow through the cooling chamber and be discharged from the cold air exhaust module, so that the temperature of the inner furnace unit is reduced.

4. The high cleanliness baking equipment according to claim 3, characterized in that: The top surface of the outer frame body also forms a top opening opposite to the bottom opening. The inner furnace unit has an inner furnace body and at least one top sealing ring arranged between the inner furnace body and the outer frame body. The top sealing ring surrounds the outer periphery of the top opening to seal the inner furnace body and the outer frame body. The furnace base outer frame also has an upper flow channel embedded in the outer frame body and located above the lower flow channel. The upper flow channel is adjacent to the top opening and extends along the length direction of the top sealing ring, and is used for heat transfer fluid to flow, so as to export the heat energy of the outer frame body.

5. The high cleanliness baking equipment according to claim 3, characterized in that: The cold air intake module is arranged at the bottom of the furnace tube body, and the cold air exhaust module is arranged at the top of the furnace tube body. When the cold air intake module and the cold air exhaust module are actuated, the gas in the cooling chamber can flow from bottom to top.

6. The high cleanliness baking equipment according to claim 1, characterized in that: The furnace tube device also has a plurality of thermocouple components circumferentially arranged around the shelf unit, and the thermocouple components are used to sense the temperature around the shelf unit.

7. The high cleanliness baking equipment according to claim 1, characterized in that: The heating component group comprises a plurality of ceramic electric heating plates arranged in a ring shape along the furnace tube body, and the temperature of each ceramic electric heating plate can be controlled and adjusted respectively.

8. The high cleanliness baking equipment according to claim 1, characterized in that: Each lifting mechanism further includes at least one air extraction unit penetrating the bottom of the corresponding dustproof housing so that the gas in the dustproof housing is discharged from top to bottom.

9. The high cleanliness baking equipment according to claim 1, characterized in that: The high-cleanliness baking equipment also includes a gas purification device, which includes an outer cylinder structure connected to the exhaust pipe and a condensation structure with high heat transfer characteristics. The condensation structure is not connected to the outer cylinder structure and is used to extract the heat energy in the outer cylinder structure, so that the gas in the outer cylinder structure and the condensation structure produce heat exchange, so that some components in the gas are cooled and condensed.

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