Power supply cutoff device and power supply cutoff method

Abstract

A power supply cutoff device includes a movable section, a drive section, a power supply device, a power distribution section, a power supply circuit, and a supply control section. The movable section is capable of traveling on a travel path provided along a substrate production line. The substrate production line is provided with a plurality of substrate processing machines that perform predetermined substrate processing on a substrate. The drive section is provided to the movable section and causes the movable section to travel using supply power supplied from the substrate processing machines by non-contact power feeding. The power supply device generates power. The power distribution section distributes the power generated by the power supply device to the plurality of substrate processing machines. The power supply circuit is provided to the plurality of substrate processing machines and generates the supply power supplied to the drive section using the power distributed via the power distribution section. When drive power for driving the substrate processing machines is cut off in at least one of the plurality of substrate processing machines, the supply control section stops the supply of power to the power supply circuit.

Description

Technical Field

[0001] This specification discloses technology related to power disconnection devices and power disconnection methods. Background Technology

[0002] In the non-contact power supply device described in Patent Document 1, the fixing part is a substrate production line with multiple substrate production machines arranged in a row, and the moving direction of the moving body is set in the arrangement direction of the multiple substrate production machines. Each of the multiple substrate production machines is equipped with the same number of power supply coils, and the moving body is equipped with at least one receiving coil. If the power supply coil of one substrate production machine can supply power to the receiving coil, then power is supplied to the receiving coil starting from the power supply coil.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: International Publication No. 2017 / 163388 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] In the contactless power supply device described in Patent Document 1, it is assumed that the power supply circuits are respectively provided in multiple substrate working machines. The power supply circuits use power distributed via the power distribution unit to generate supply power for the drive unit. In this configuration, even if the drive power for driving the substrate working machines is cut off, there is a possibility that power will continue to be supplied to the power supply circuits via the power distribution unit. If the drive power for driving the substrate working machines is cut off, there is a possibility that the operator may need to perform maintenance work, etc. Therefore, it is preferable to stop the supply of power to the power supply circuits when the drive power for driving the substrate working machines is cut off.

[0008] In view of this situation, this specification discloses a power cutting-off device that can stop the power supply to the power supply circuit when the drive power for driving the substrate working machine is cut off.

[0009] Technical solutions for solving the problem

[0010] This specification discloses a power-cutting device comprising a movable part, a drive unit, a power supply device, a power distribution unit, a power supply circuit, and a supply control unit. The movable part is capable of moving along a travel path provided along a substrate production line, which includes multiple substrate-mounting machines arranged to perform predetermined substrate-mounting operations. The drive unit is located on the movable part and uses supply power supplied from the substrate-mounting machines via contactless power supply to move the movable part. The power supply device generates electricity. The power distribution unit distributes the electricity generated by the power supply device to the multiple substrate-mounting machines. The power supply circuit is located on each of the multiple substrate-mounting machines and uses the electricity distributed via the power distribution unit to generate the supply power supplied to the drive unit. The supply control unit stops the supply of power to the power supply circuit when the drive power driving at least one of the multiple substrate-mounting machines is cut off.

[0011] Furthermore, this specification discloses a power cutting-off method applied to a power supply system comprising a movable part, a drive part, a power supply device, a power distribution part, and a power supply circuit, and includes a supply control step. The movable part is capable of moving along a travel path provided along a substrate production line, which is equipped with multiple substrate-mounting machines arranged to perform predetermined substrate-mounting operations on substrates. The drive part is provided on the movable part and uses supply power supplied from the substrate-mounting machines via contactless power supply to move the movable part. The power supply device generates electricity. The power distribution part distributes the electricity generated by the power supply device to the multiple substrate-mounting machines. The power supply circuit is provided on each of the multiple substrate-mounting machines and uses the electricity distributed via the power distribution part to generate the supply power supplied to the drive part. In the supply control step, when the drive power driving at least one of the multiple substrate-mounting machines is cut off, the supply of power to the power supply circuit is stopped.

[0012] Invention Effects

[0013] The aforementioned power-off device includes a supply control unit. Therefore, the power-off device can stop the supply of power to the power supply circuit when the drive power for driving the substrate cutting machine is cut off. The same applies to the power-off method. Attached Figure Description

[0014] Figure 1 This is a top view showing a structural example of a substrate production line equipped with a power supply system.

[0015] Figure 2 It means Figure 1 A three-dimensional diagram of the general structure of the walking device and component assembly machine.

[0016] Figure 3 It means Figure 1 Side view of the walking device.

[0017] Figure 4 This is a schematic diagram illustrating a structural example of a power cut-off device equipped with a first-type supply control unit.

[0018] Figure 5 This is a circuit diagram illustrating an example of a power supply circuit that provides non-contact power between the substrate processing machine and the drive unit.

[0019] Figure 6 This is a schematic diagram illustrating a structural example of a power cut-off device equipped with a second-type power supply control unit.

[0020] Figure 7 This is a block diagram representing an example of a control block in the second form of the supply control department.

[0021] Figure 8 This is a flowchart illustrating an example of the control sequence based on the second form of the supply control unit.

[0022] Figure 9 This is a side view schematic diagram showing an example of the structure of a component assembly machine. Detailed Implementation

[0023] 1. Implementation Method

[0024] 1-1. Example of the structure of substrate production line 1

[0025] The power cutting device 70 in this embodiment is applied to the substrate production line 1. For example... Figure 1 As shown, for substrate production line 1, multiple (four in this figure) component assembly machines 10 are arranged along... Figure 2 The substrate 90 shown is arranged in the transport direction. The component assembly machine 10 includes a substrate mounting machine WM0 that performs predetermined substrate mounting operations on the substrate 90. It should be noted that the substrate production line 1 can be equipped with various substrate mounting machines WM0, such as screen printers, solder inspection machines, appearance inspection machines, and reflow ovens.

[0026] Additionally, on the substrate loading side of substrate production line 1 ( Figure 1On the left side of the paper, a feeder storage device BS0 for storing the cassette feeder 20 is provided. In this embodiment, the substrate production line 1 is provided with a traveling device 50, which serves as a work machine, performing predetermined operations on multiple (4) component assembly machines 10 and the feeder storage device BS0 respectively. Each device constituting the substrate production line 1 and the traveling device 50 are configured to input and output various data with the line control device LC0 via a network. The detailed structure of the traveling device 50 will be described later.

[0027] The feeder storage device BS0 has multiple slots. The feeder storage device BS0 stores feeders 20, each equipped in one of the multiple slots. The feeders 20 equipped in the slots of the feeder storage device BS0 are in a state where they can communicate with the line control device LC0. Therefore, the identification information of the slots of the feeder storage device BS0 and the feeders 20 equipped in those slots is associated with and recorded in the line control device LC0.

[0028] The line control device LC0 monitors the operation of the substrate production line 1 and controls the production equipment, including the component assembly machine 10, the feeder storage device BS0, and the traveling device 50. For example, the line control device LC0 stores various data for controlling the component assembly machine 10. The line control device LC0 appropriately sends various data, such as control programs, to each production equipment during production processing.

[0029] 1-2. Structural Example of Component Assembly Machine 10

[0030] like Figure 2 As shown, the multiple (4) component assembly machines 10 constituting the substrate production line 1 include a substrate handling device 11, a component supply device 12, and a head drive device 13. In the following description, the horizontal width direction of the component assembly machine 10 and the transport direction of the substrate 90 are referred to as the X direction, the horizontal depth direction of the component assembly machine 10 are referred to as the Y direction, and the vertical direction perpendicular to the X and Y directions is referred to as the Y direction. Figure 2 The Z direction is defined as the vertical direction on the paper.

[0031] The substrate transport device 11 consists of a conveyor belt and a positioning device. The substrate transport device 11 transports the substrates 90 sequentially along the transport direction (X direction) and positions the substrates 90 at predetermined positions within the machine. After the assembly process performed by the component assembly machine 10 is completed, the substrate transport device 11 removes the substrates 90 from the outside of the component assembly machine 10.

[0032] The component supply device 12 supplies components to be assembled onto the substrate 90. The component supply device 12 includes an upper slot 121 and a lower slot 122 for mounting a feeder 20. The upper slot 121 is disposed on the upper part of the front side of the component assembler 10 and holds the mounted feeder 20 in an operable manner. In other words, the feeder 20 mounted on the upper slot 121 is controlled to operate during the assembly process based on the component assembler 10, supplying components to a take-out section located at a predetermined position on the upper part of the feeder 20.

[0033] The lower slot 122 is positioned below the upper slot 121 and stores the equipped feeder 20. In other words, the lower slot 122 is prepared to hold the feeder 20 for production. Additionally, the lower slot 122 temporarily holds the feeder 20 after it has been used for production. It should be noted that the replacement of the feeder 20 between the upper slot 121 and the lower slot 122 is performed either automatically based on the traveling device 50 (described later) or manually by the operator.

[0034] Furthermore, if the feeder 20 is equipped in the upper slot 121 or the lower slot 122 of the component supply device 12, it is powered from the component assembly machine 10 via a connector. Moreover, the feeder 20 is capable of communicating with the component assembly machine 10. The feeder 20 equipped in the upper slot 121 controls the feeding action of the carrier tape containing the components based on control commands from the component assembly machine 10. Thus, the feeder 20 supplies components in the take-out section located at the top of the feeder 20 in a manner that allows the components to be picked up by the holding member of the assembly head 30, as described later.

[0035] The head drive device 13 transfers the components supplied by the component supply device 12 to a predetermined assembly position on the substrate 90 that is brought into the machine by the substrate transport device 11. The head drive device 13 moves the moving stage 131 horizontally (in the X and Y directions) via a linear motion mechanism. The assembly head 30 is fixed to the moving stage 131 in a replaceable manner by clamping members. The assembly head 30 picks up the components and adjusts the vertical position and angle of the components to assemble them onto the substrate 90.

[0036] Specifically, a holding member for holding the components supplied by the feeder 20 is mounted on the assembly head 30. The holding member can be, for example, a nozzle that holds the components using supplied negative pressure air, or a chuck that grips and holds the components. The assembly head 30 holds the holding member so that it can move in the Z direction and rotate about an θ axis parallel to the Z axis. The assembly head 30 moves in the horizontal direction (X and Y directions) via the direct-acting mechanism of the head drive device 13.

[0037] The component assembly machine 10 described above performs an assembly process of assembling components onto the substrate 90. During the assembly process, the component assembly machine 10 sends control signals to the head drive device 13 based on image processing results, detection results from various sensors, and pre-stored control programs. This controls the position and angle of the multiple holding components (e.g., nozzles) supported by the assembly head 30.

[0038] It should be noted that the holding component (e.g., the nozzle) held on the assembly head 30 can be appropriately changed during the assembly process depending on the type of component being assembled on the substrate 90. For example, if the nozzle used in the assembly process performed by the component assembly machine 10 is not held on the assembly head 30, the assembly head 30 will hold the nozzle housed in the nozzle station. The nozzle station can be detachably mounted at a predetermined position within the component assembly machine 10.

[0039] 1-3. Structural examples of replacing system 40 and walking device 50

[0040] like Figures 1-3 As shown, the replacement system 40 includes a first guide rail 41, a second guide rail 42, and a traveling device 50. (As shown...) Figure 1 As shown, the first guide rail 41 and the second guide rail 42 are fixed parts fixed to the front of the multi-component assembly machine 10. In this embodiment, the first guide rail 41 and the second guide rail 42 are formed of conductive material and constitute the travel path 40R of the travel device 50.

[0041] The first guide rail 41 is disposed between the upper slot 121 and the lower slot 122 of each of the multiple (4) component assembly machines 10 in the vertical direction. The second guide rail 42 is disposed below the lower slot 122 of the component assembly machine 10. The first guide rail 41 and the second guide rail 42 extend substantially throughout the entire transport direction (X direction) of the substrate production line 1 and the substrate 90.

[0042] In addition, such as Figure 3 As shown, the first guide rail 41 is formed into an upwardly opening groove shape. A plurality of magnets 43 are arranged along the X direction on a pair of sidewall portions of the first guide rail 41. The magnets 43 are respectively configured to alternately display N and S poles in the X direction. A linear scale 44 extending along the X direction is provided on the upper surface of the first guide rail 41. At the bottom of the groove of the first guide rail 41, a pair of power transmission sections 45 are arranged along the Y direction. The pair of power transmission sections 45 are power transmission coils extending along the X direction. The pair of power transmission sections 45 supply power to the power receiving section 52 of the traveling device 50 (described later) in a non-contact manner.

[0043] Furthermore, in a pair of sidewall portions of the first guide rail 41, a plurality of first guide rollers 512 constituting the movable portion 51 of the traveling device 50 are supported and rotatable. A traveling groove 46 is formed at the center of the groove bottom in the Y direction of the first guide rail 41, allowing the plurality of traveling rollers 514 constituting the movable portion 51 to rotate. In the second guide rail 42, a second guide roller 513 constituting the movable portion 51 of the traveling device 50 is supported and rotatable. According to the above structure, the first guide rail 41 and the second guide rail 42 support the traveling device 50 in the vertical direction and suppress tilting of the traveling device 50.

[0044] The walking device 50 includes a movable part 51, a power receiving part 52, a drive part 53, a position detection part 54, a working robot 55, a maintenance switch 56, a human sensing sensor 57, and a control device 58. The movable part 51 is the main body of the walking device 50. The movable part 51 is configured to move along a walking path 40R formed by the first guide rail 41 and the second guide rail 42. The movable part 51 includes a bracket 511, a first guide roller 512, a second guide roller 513, and a walking roller 514.

[0045] The bracket 511 is a frame component that supports the drive unit 53, etc. A first guide roller 512 is disposed on the bracket 511 and rotatably engaged with the upper part of the first guide rail 41. At this time, the first guide roller 512 allows movement in the X direction but restricts movement in the Y and Z directions. A second guide roller 513 is disposed on the bracket 511 and rotates along the second guide rail 42.

[0046] The traveling roller 514 rotatably arranges a pair of sidewall portions of the traveling groove 46 formed at the bottom of the groove of the first guide rail 41 along the Y direction and sets them on the bracket 511 in pairs. According to the above structure, the movable part 51 maintains the posture of the traveling device 50 and can travel along the traveling path 40R formed by the first guide rail 41 and the second guide rail 42.

[0047] The receiving parts 52 are arranged in pairs on the outer side of the traveling roller 514 in the Y direction within the bracket 511. In this embodiment, each pair of receiving parts 52 is a receiving coil extending in the X direction. Regardless of the X-direction position of the movable part 51, the receiving parts 52 face at least one power transmission part 45 provided on the first guide rail 41. As described later, AC power is supplied to the power transmission parts 45 from power supply circuits 73, which are respectively provided on the multiple (4) component assembly machines 10. The power supply circuits 73 generate AC power using the power output from the power supply device 71.

[0048] Based on these, the power transmission section 45 and the power receiving section 52 are electromagnetically coupled to form a magnetic circuit. In this way, the power receiving section 52 can receive power from the power transmission section 45, for example, through contactless power supply via electromagnetic coupling. The power received by the power receiving section 52 is supplied to the drive section 53, the working robot 55, the control device 58, etc., via the power receiving circuit PR0 described later.

[0049] A drive unit 53 is provided on the movable part 51. The drive unit 53 uses power supplied from the substrate processing machine WM0 via contactless power supply to move the movable part 51. Specifically, the drive unit 53 uses a moving coil 531. The moving coil 531 is arranged facing a magnet 43 provided on the first guide rail 41. The drive unit 53 energizes the moving coil 531 by supplying power to it. As a result, the drive unit 53 generates a thrust in the X direction between itself and the magnet 43. Thus, the drive unit 53 and the magnet 43 arranged along the first guide rail 41, which serves as a fixed part, together constitute a linear motor.

[0050] The position detection unit 54 is disposed on the bracket 511 facing the linear scale 44 provided on the first guide rail 41. The position detection unit 54 detects the scale of the linear scale 44 and detects the current position of the movable part 51 on the travel path 40R. The position detection unit 54 can detect the current position of the movable part 51 by various methods. For example, the position detection unit 54 can detect the current position of the movable part 51 by optical detection methods, detection methods using electromagnetic induction, etc.

[0051] The work robot 55 is installed in the movable part 51 and performs a predetermined task. This predetermined task includes a replacement task, in which a replacement element, detachably mounted on the component assembly machine 10 or other substrate assembly machine WM0, is replaced between the substrate assembly machine WM0 and the component assembly machine WM0. In this embodiment, the work robot 55 uses a feeder 20, which supplies components assembled onto the substrate 90, as a replacement element, and performs feeder 20 replacement tasks between multiple (four) component assembly machines 10 constituting the substrate production line 1 and between the feeder storage device BS0. The replacement task includes at least one of a feeder 20 retrieval task and a feeder 20 replenishment task.

[0052] In this embodiment, the work robot 55 transports the feeder 20 from the feeder storage device BS0 to the upper slot 121 or lower slot 122 of the component assembly machine 10. Furthermore, the work robot 55 changes the feeder 20 between the upper slot 121 and lower slot 122 of the component assembly machine 10. Also, the work robot 55 transports the feeder storage device BS0 from the component assembly machine 10 to the feeder 20 after use. Figure 3As shown, the holding part 551 of the working robot 55 holds the feeder 20. The holding part 551 is provided in a movable manner along the assembly / disassembly direction (Y direction in this embodiment) and the vertical direction (Z direction) of the feeder 20.

[0053] The maintenance switch 56 receives an operation from the operator and sends a signal to the control device 58. Based on the state of the maintenance switch 56, the control device 58 switches the control mode of the walking device 50 to either the normal operation mode or the maintenance mode. For example, in cases where the walking device 50 stops moving, the work robot 55 malfunctions, or maintenance is being performed on the equipment used in the substrate production line 1, the operator operates the maintenance switch 56. In maintenance mode, the movement of the movable part 51 and the operation of the work robot 55 are restricted.

[0054] Human sensor 57 detects the presence of nearby workers and sends a detection signal to control device 58. Human sensor 57 uses, for example, infrared or ultrasonic waves to detect workers. Control device 58 can identify whether a worker is approaching a predetermined range of walking device 50 based on the presence or absence of a detection signal from human sensor 57.

[0055] The control device 58 includes a computing unit, a storage unit, and a control circuit. The control device 58 is configured to communicate with and control multiple (4) component assembly machines 10, a feeder storage device BS0, a replacement system 40 including a traveling device 50, and a line control device LC0. For example, the traveling device 50 is driven and controlled by the control device 58 to move along the first guide rail 41 and the second guide rail 42 to a predetermined position, and at the stop position, the feeder 20, as a replacement element, is replaced.

[0056] 1-4. Structural Examples of Power Supply System 60 and Power Cut-off Device 70

[0057] like Figure 1 and Figure 4 As shown, the power supply system 60 includes a movable part 51, a drive part 53, a power supply device 71, a power distribution part 72, and a power supply circuit 73. The power cut-off device 70 includes a movable part 51, a drive part 53, a power supply device 71, a power distribution part 72, a power supply circuit 73, and a supply control part 74. As already described, the movable part 51 can move along a travel path 40R provided along the substrate production line 1, which is equipped with a plurality of substrate processing machines WM0 that perform predetermined substrate processing operations on substrates 90. The drive part 53 is provided on the movable part 51 and uses the supply power supplied from the substrate processing machines WM0 through non-contact power supply to move the movable part 51.

[0058] Power supply device 71 generates electricity. Power supply device 71 can use known power supply devices and can generate various types of DC or AC power. In this embodiment, power supply device 71 is a power converter that converts three-phase (R-phase, S-phase, T-phase) AC power into DC power, and generates DC power from input AC power. Furthermore, power supply device 71 can, for example, be installed on a work machine at one end of the substrate production line 1. In this embodiment, power supply device 71 is installed in the feeder storage device BS0.

[0059] The power distribution unit 72 distributes the power generated by the power supply unit 71 to multiple substrate mounting machines WM0. The power supply unit 71 and the multiple substrate mounting machines WM0 are electrically connected, for example, via a daisy-chain connection, a bus connection, or a star connection. In this embodiment, the power distribution unit 72 connects the power supply unit 71 and the multiple substrate mounting machines WM0 in a daisy-chain configuration, and the power distribution unit 72 distributes the power generated by the power supply unit 71 sequentially from the substrate mounting machines WM0 at one end of the substrate production line 1 to the substrate mounting machines WM0 at the other end. In this figure, for ease of illustration, the power supply unit 71 and the multiple (two) component assembly machines 10 are shown connected in a daisy-chain configuration, but in reality, the power supply unit 71 and... Figure 1 The multiple (4) component assembly machines 10 shown are connected in a daisy chain manner.

[0060] Power supply circuits 73 are respectively provided in multiple substrate processing machines WM0, and use the power distributed via the power distribution unit 72 to generate supply power to the drive unit 53. For example, the supply power is transmitted via... Figure 5 The power supply circuit PS0, as shown, supplies power to the drive unit 53. The power supply circuit PS0 is a circuit that provides non-contact power between the substrate processing machine WM0 and the drive unit 53, and includes a power transmission circuit PT0 and a power receiving circuit PR0. The power supply circuit 73 supplies AC power to the power transmission circuit PT0.

[0061] like Figure 5 As shown, the power supply circuit 73 includes a smoothing capacitor C0, a discharge circuit DS0, and a power converter INV0. The smoothing capacitor C0 and the discharge circuit DS0 are connected in parallel on the input side of the power converter INV0. The DC power input via the power distribution unit 72 (represented as DC power Vdc1 in this figure) is smoothed by the smoothing capacitor C0 and converted into AC power by the power converter INV0. The power converter INV0 is a power converter that converts DC power to AC power, and a known power converter can be used. It should be noted that the discharge circuit DS0 will be described later.

[0062] For the transmission circuit PT0, the transmission-side resonant section RT1 is connected in series with the transmission section 45 to form a transmission-side resonant circuit. For example, the transmission-side resonant section RT1 can be a capacitor. The transmission section 45 can be a coil. The receiving circuit PR0 includes a receiving section 52, a receiving-side resonant section RR1, and a rectifier circuit RC0. The receiving section 52 and the receiving-side resonant section RR1 are connected in parallel on the input side of the rectifier circuit RC0 to form a receiving-side resonant circuit. For example, the receiving section 52 can be a coil. The receiving-side resonant section RR1 can be a capacitor.

[0063] The rectifier circuit RC0 is a rectifier circuit that rectifies the AC power supplied from the transmission circuit PT0, and a known rectifier circuit can be used. As already described, in this embodiment, the DC power rectified by the rectifier circuit RC0 (represented as DC power Vdc2 in this figure) is supplied to the drive unit 53, the work robot 55, the control device 58, etc. It should be noted that the receiving circuit PR0 can also be equipped with a power converter that converts the DC power rectified by the rectifier circuit RC0 into AC power.

[0064] When the drive power supply for driving at least one of the plurality of substrate processing machines WM0 is cut off, the supply control unit 74 stops the power supply to the power supply circuit 73. The supply control unit 74 can take various forms, as long as it can stop the power supply to the power supply circuit 73 when the drive power for driving the substrate processing machine WM0 is cut off. For example, the supply control unit 74 can be either the first form shown below or the second form. Alternatively, the supply control unit 74 can be a combination of the first and second forms.

[0065] 1-5. Structural Examples of the First Type of Supply Control Unit 74

[0066] like Figure 4 As shown, the first type of supply control unit 74 includes an electromagnetic contactor 75, an excitation circuit 76, and a machine-side switch 77. The electromagnetic contactor 75 is located on the input side of the power supply unit 71 and can input AC power to the power supply unit 71 when the electromagnetic coil 751 is energized. Specifically, when the electromagnetic coil 751 is energized, the contacts of the electromagnetic contactor 75 are closed, inputting three-phase (R-phase, S-phase, T-phase) AC power to the power supply unit 71. Conversely, when the electromagnetic coil 751 is not energized, the contacts of the electromagnetic contactor 75 are open, and no three-phase (R-phase, S-phase, T-phase) AC power is input to the power supply unit 71.

[0067] The excitation circuit 76 excites the electromagnetic coil 751. In this type of circuit, the excitation circuit 76 excites the electromagnetic coil 751 using DC power output from the DC power supply DC1. A switch 77 is installed on each of the plurality of substrate mounting machines WM0, and disconnects the excitation circuit 76 when the drive power to at least one of the substrate mounting machines WM0 is cut off.

[0068] The excitation circuit 76 is connected in series with the electromagnetic coil 751 and the machine-side switch 77. Therefore, if the machine-side switch 77 of at least one of the multiple substrate-mounting machines WM0 switches from the closed state to the open state, the excitation circuit 76 is disconnected. As a result, the electromagnetic coil 751 is not energized, and the three-phase (R-phase, S-phase, T-phase) AC power is not input to the power supply device 71. In other words, the power supply to the power supply circuit 73 stops.

[0069] The machine-side switch 77 can be switched from a closed state to an open state in conjunction with the disconnection of the drive power to the substrate work machine WM0, and can take various forms. In this form, the machine-side switch 77 is a circuit breaker that allows the operator to connect or disconnect the drive power to the substrate work machine WM0. In this case, if the operator closes all the circuit breakers for multiple substrate work machines WM0, connecting the drive power to all substrate work machines WM0, the excitation circuit 76 closes, and the electromagnetic coil 751 is energized. As a result, the contacts of the electromagnetic contactor 75 close, and three-phase (R-phase, S-phase, T-phase) AC power is input to the power supply unit 71, supplying DC power to the power supply circuit 73.

[0070] If the operator disconnects the drive power to at least one of the substrate mounting machines WM0 by opening the circuit breaker of at least one substrate mounting machine WM0, the excitation circuit 76 is disconnected, and the electromagnetic coil 751 is not energized. As a result, the contacts of the electromagnetic contactor 75 are open, and the three-phase (R-phase, S-phase, T-phase) AC power is not input to the power supply device 71, and the power supply to the power supply circuit 73 is stopped. Thus, the machine-side switch 77 of this type is a circuit breaker that allows the operator to connect or disconnect the drive power to the substrate mounting machine WM0. Therefore, the machine-side switch 77 can be easily switched from a closed state to an open state in conjunction with the disconnection of the drive power to the substrate mounting machine WM0.

[0071] 1-6. Structural Examples of the Second Form of Supply Control Unit 74

[0072] like Figure 6As shown, the second type of supply control unit 74 includes an electromagnetic contactor 75, an excitation circuit 76, a power supply side switch 78, and a normal state confirmation unit 80. The electromagnetic contactor 75 is the same as that in the first type of supply control unit 74. The power supply side switch 78 is provided on the work machine equipped with a power supply device 71, and disconnects the excitation circuit 76 when the drive power of at least one of the plurality of substrate work machines WM0 is cut off. As already described, the power supply device 71 is provided on the feeder storage device BS0, and the power supply side switch 78 of this type is provided on the feeder storage device BS0.

[0073] The excitation circuit 76, like the supply control unit 74 of the first type, excites the electromagnetic coil 751. In this type, the excitation circuit 76 connects the electromagnetic coil 751 and the power supply side switch 78 in series. Therefore, if the power supply side switch 78 installed in the feeder storage device BS0 switches from the closed state to the open state, the excitation circuit 76 is disconnected. As a result, the electromagnetic coil 751 is not energized, and the three-phase (R-phase, S-phase, T-phase) AC power is not input to the power supply device 71. In other words, the power supply to the power supply circuit 73 stops.

[0074] The normal state confirmation unit 80 checks the normal operating status of multiple substrate mounting machines WM0 at predetermined intervals. If a normal operating status cannot be confirmed for at least one of the multiple substrate mounting machines WM0, the normal state confirmation unit 80 disconnects the power supply side switch 78. Figure 7 As shown, the normal state confirmation unit 80 of this type is provided in Figure 1 The line control device LC0 is shown. It should be noted that the normal status verification unit 80 can also be provided in a management device that manages multiple substrate production lines 1. Furthermore, the normal status verification unit 80 can also be formed on a cloud.

[0075] The normal state confirmation unit 80 confirms the normal state of multiple substrate mounting machines WM0. It can be configured to disconnect the power supply side switch 78 if a normal state cannot be confirmed for at least one substrate mounting machine WM0. Various forms are possible. For example, the normal state confirmation unit 80 may attempt to communicate with the multiple substrate mounting machines WM0 at predetermined intervals. If communication with at least one of the multiple substrate mounting machines WM0 is unsuccessful, it can determine that a normal state cannot be confirmed.

[0076] Normal status confirmation unit 80 according to Figure 8The flowchart shown illustrates the opening and closing control of the power supply side switch 78. Specifically, the normal state verification unit 80 attempts to communicate with multiple substrate mounting machines WM0 every predetermined time interval to determine whether communication with at least one of the multiple substrate mounting machines WM0 is unavailable (step S11). As already described, the multiple substrate mounting machines WM0 constituting the substrate production line 1 are configured to input and output various data with the line control device LC0 via a network. The normal state verification unit 80, for example, controls the opening and closing of the power supply side switch 78. Figure 7 The control device 14 of the substrate processing machine WM0 shown sends a normal status confirmation signal. The control device 14 drives and controls each device constituting the substrate processing machine WM0.

[0077] The normal status confirmation signal is not limited. For example, a PING signal can be used. In this case, the normal status confirmation unit 80 sends a predetermined message to the control device 14 of each of the multiple substrate processing machines WM0. Furthermore, the normal status confirmation unit 80 measures the time required from sending the message to receiving a reply to the message. If the normal status confirmation unit 80 receives a reply within the predetermined time, it determines that communication with the substrate processing machine WM0 is possible; if no reply is received within the predetermined time, it determines that communication with the substrate processing machine WM0 is impossible.

[0078] If communication with at least one substrate processing machine WM0 is not possible (if "Yes" is stated in step S11), the normal state confirmation unit 80 determines that the normal state of the substrate processing machine WM0 cannot be confirmed (step S12). Then, the normal state confirmation unit 80 sets the power supply side switch 78 to the open state (step S13), and control is temporarily terminated. If communication with all substrate processing machines WM0 is possible (if "No" is stated in step S11), the normal state confirmation unit 80 determines that the normal state of the substrate processing machine WM0 can be confirmed (step S14), and control is temporarily terminated.

[0079] The power supply circuit 73 can also be equipped with a watchdog timer. The watchdog timer resets the counter before it reaches a predetermined value with a period shorter than a predetermined time, and outputs a timeout status signal when the predetermined time has elapsed and the counter reaches the predetermined value. In this case, when the normal state confirmation unit 80 receives the timeout status signal from the watchdog timer, it can determine that a normal state cannot be confirmed.

[0080] Watchdog timers, for example, can be set to... Figure 5The power supply circuit 73 shown is a control device that drives and controls the discharge circuit DS0 and the power converter INV0. Additionally, a watchdog timer can be set in a power monitoring device that monitors the DC power (DC power Vdc1) input via the power distribution unit 72. Thus, the watchdog timer can be implemented in hardware. Alternatively, the watchdog timer can also be implemented in software.

[0081] In addition, the normal state confirmation unit 80 attempts to communicate with multiple substrate mounting machines WM0 every predetermined time. If it is unable to communicate with at least one of the multiple substrate mounting machines WM0 and obtains a status signal indicating a timeout from the watchdog timer, it can also determine that the normal state cannot be confirmed.

[0082] Furthermore, the supply control unit 74 can be a combination of the first and second forms. Specifically, the supply control unit 74 includes an electromagnetic contactor 75, an excitation circuit 76, a machine-side switch 77, a power supply-side switch 78, and a normal state confirmation unit 80. Additionally, the excitation circuit 76 is connected in series with an electromagnetic coil 751, the machine-side switch 77, and the power supply-side switch 78. In this form, two stopping units are provided to stop the supply of power to the power supply circuit 73. Therefore, even if one stopping unit malfunctions, the other stopping unit can stop the supply of power to the power supply circuit 73, thus improving the reliability of the power cut-off device 70 compared to a form with only one stopping unit.

[0083] 1-7. Other

[0084] like Figure 5 As shown, DC power is supplied to the power supply circuit 73 via the power distribution unit 72. Therefore, the power supply circuit 73 has a smoothing capacitor C0 that smooths the DC power generated by the power supply device 71. Even if the power supply to the power supply circuit 73 is stopped by the supply control unit 74, there is a possibility that residual charge may remain in the smoothing capacitor C0.

[0085] Here, it is preferable that the power supply circuit 73 includes a discharge circuit DS0. When the DC power output is stopped by the supply control unit 74, the discharge circuit DS0 discharges the charge remaining in the smoothing capacitor C0. The discharge circuit DS0 can be implemented in various forms to discharge the charge remaining in the smoothing capacitor C0 when the DC power output is stopped by the supply control unit 74.

[0086] The discharge circuit DS0 in this embodiment includes a switching element TR0 and a resistor R0. The switching element TR0 and the resistor R0 are connected in series and connected in parallel with the smoothing capacitor C0. When the power supply circuit 73 stops the output of DC power through the supply control unit 74, the control device can control the switching element TR0 from the open state to the closed state at a predetermined time, thereby discharging the charge remaining in the smoothing capacitor C0.

[0087] Furthermore, the discharge circuit DS0 can also be equipped with a current detector that detects the current flowing in the resistor R0. In this case, the control device of the power supply circuit 73 can also perform constant current control to control the opening and closing of the switching element TR0 in a manner that keeps the current flowing in the resistor R0 constant, based on the detection result of the current detector.

[0088] As already described, a bus connection is considered as a form in which the power generated by the power supply unit 71 is supplied to multiple substrate mounting machines WM0 respectively. In a bus connection, the power supply circuits 73 of each of the multiple substrate mounting machines WM0 are connected in parallel on a common power line. However, in this form, the power line needs to be pre-configured, and it is difficult to extend or retract the power line. Therefore, in this form, for example, it is difficult to increase or decrease the number of substrate mounting machines WM0 according to the production plan.

[0089] Therefore, in this embodiment, the power supply device 71 and the plurality of substrate mounting machines WM0 are connected in a daisy-chain manner. This allows for easy addition or removal of substrate mounting machines WM0. For example, if a substrate mounting machine WM0 is added, the power supply circuit 73 of the last substrate mounting machine WM0 before the addition is electrically connected to the power supply circuit 73 of the added substrate mounting machine WM0. Furthermore, the excitation circuit 76 is formed... Figure 4 and Figure 6 The connecting part 761 shown is electrically disconnected in the final substrate alignment machine WM0 before its addition, and electrically connected in the added substrate alignment machine WM0. It should be noted that... Figure 4 and Figure 6 For clarity, the connection points indicated by white circles are offset to the right of the paper. Additionally, the disconnected sections are indicated by dashed lines.

[0090] In addition, such as Figure 9 As shown, the substrate production line 1 of this embodiment is configured to allow the substrate handling machine WM0 to be added or removed. The substrate handling machine WM0 includes a base B0 and a work module M0 that can be pulled out and mounted on the base B0. The work module M0 is equipped with a substrate transport device 11, an assembly head 30, etc., as described above. Therefore, a power supply circuit 73 is provided on the base B0.

[0091] It should be noted that, Figure 9The solid line indicates the state of the work module M0 mounted on the base B0. The dashed line indicates the state of the work module M0 being pulled out from the mounting position. For example, when performing maintenance on the substrate processing machine WM0, the operator can pull out the work module M0 after operating the circuit breaker to cut off the drive power to the substrate processing machine WM0. If the maintenance is completed, the operator pulls the work module M0 back to the mounting position on the base B0. If the work module M0 is pulled back to the mounting position on the base B0, the operator can operate the circuit breaker to restore the drive power to the substrate processing machine WM0.

[0092] The power supply unit 71 can also generate AC power. In this case, the power distribution unit 72 sequentially distributes the AC power generated by the power supply unit 71 from the substrate assembly machine WM0 at one end of the substrate production line 1 to the substrate assembly machine WM0 at the other end. However, in this form, each of the multiple substrate assembly machines WM0 requires a power converter to convert the input AC power into DC power. Therefore, the power supply unit 71 in this embodiment generates DC power. Alternatively, a switch can be provided on the output side of the power supply unit 71 that generates DC power, but compared to the case of intermittent AC power, the switch becomes larger, potentially increasing costs. Therefore, in this embodiment, an electromagnetic contactor 75 is provided on the input side of the power supply unit 71.

[0093] Furthermore, a star connection is considered as a form in which the power generated by the power supply unit 71 is supplied to multiple substrate mounting machines WM0. In this form, the power distribution unit 72 can also distribute the power generated by the power supply unit 71 to the multiple substrate mounting machines WM0. In this form, the power cut-off device 70 can include an excitation circuit 76 and a power-side switch 78 in a second form of supply control unit 74 provided in the machine equipped with the power supply unit 71, but it is difficult to include a first form of supply control unit 74. Therefore, in this embodiment, the power supply unit 71 and the multiple substrate mounting machines WM0 are connected in a daisy-chain manner. As a result, the changes to the supply control unit 74 are increased, and as already described, the reliability of the power cut-off device 70 can be improved by using multiple stop units.

[0094] 2. Power disconnection method

[0095] The same applies to the power cutting-off device 70 and the power cutting-off method. The power cutting-off method is applied to a power supply system 60, which includes a movable part 51, a drive part 53, a power supply device 71, a power distribution part 72, a power supply circuit 73, and a supply control process. The supply control process is equivalent to the control performed by the supply control unit 74. The power cutting-off method may also include a normal state confirmation process. The normal state confirmation process is equivalent to the control performed by the normal state confirmation unit 80.

[0096] 3. An example of the effect of the implementation method

[0097] The power cut-off device 70 includes a supply control unit 74. Therefore, when the drive power for driving the substrate working machine WM0 is cut off, the power cut-off device 70 can stop the supply of power to the power supply circuit 73. The above description applies to the power cut-off method as well as to the power cut-off device 70.

[0098] Explanation of reference numerals in the attached figures

[0099] 1: Substrate production line; 40R: Travel path; 51: Movable part; 53: Drive unit.

[0100] 60: Power supply system; 70: Power disconnection device; 71: Power supply unit.

[0101] 72: Power Distribution Department; 73: Power Supply Circuit; 74: Power Supply Control Department

[0102] 75: Electromagnetic contactor; 751: Electromagnetic coil; 76: Excitation circuit.

[0103] 77: Machine side switch, 78: Power supply side switch, 80: Normal state confirmation unit, C0: Smoothing capacitor, DS0: Discharge circuit, 90: Board.

[0104] B0: Base, M0: Working module, WM0: Substrate processing machine.

Claims

1. A power cutting-off device, comprising: The movable part is able to move along the travel path set up along the substrate production line, which is equipped with multiple substrate-mounting machines that perform predetermined substrate-mounting operations on the substrates. A drive unit is provided on the movable part, and the movable part is moved by the power supplied from the substrate processing machine through non-contact power supply. Power supply device, generates electricity; The power distribution unit distributes the power generated by the power supply device to multiple substrate processing machines; A power supply circuit is provided in a plurality of the aforementioned substrate processing machines, and uses the power distributed via the power distribution unit to generate the supply power supplied to the drive unit; and The supply control unit stops the supply of power to the power supply circuit when the drive power for driving at least one of the plurality of substrate mounting machines is cut off. The supply control unit includes: An electromagnetic contactor is provided on the input side of the power supply device and is capable of inputting AC power into the power supply device when the electromagnetic coil is energized; An excitation circuit is used to excite the electromagnetic coil; A power supply side switch is provided on a work machine equipped with the power supply device, which disconnects the excitation circuit when the drive power of at least one of the plurality of substrate work machines is cut off. and The normal status verification unit verifies the normal operating status of the multiple substrate mounting machines at predetermined intervals. The excitation circuit is connected in series with the electromagnetic coil and the power supply side switch. When the normal state cannot be confirmed for at least one of the multiple substrate mounting machines, the normal state confirmation unit disconnects the power supply side switch.

2. The power cutting-off device according to claim 1, wherein, The power supply and the plurality of substrate processing machines are connected in a daisy-chain manner. The power distribution unit distributes the power generated by the power supply device from the substrate assembly machine at one end of the substrate production line to the substrate assembly machine at the other end.

3. The power cutting-off device according to claim 2, wherein, The supply control unit includes: An electromagnetic contactor is provided on the input side of the power supply device and is capable of inputting AC power into the power supply device when the electromagnetic coil is energized; An excitation circuit is used to excite the electromagnetic coil; and A switch on the working machine side is respectively installed on a plurality of substrate working machines. When the drive power of at least one of the substrate working machines is cut off, the excitation circuit is disconnected. The excitation circuit is connected in series with the electromagnetic coil and the machine-side switch.

4. The power cutting-off device according to claim 3, wherein, The machine-side switch is a circuit breaker that allows the operator to connect or disconnect the drive power to the substrate machine.

5. The power cutting device according to any one of claims 1 to 4, wherein, The normal state confirmation unit attempts to communicate with multiple substrate processing machines every predetermined time interval. If it is unable to communicate with at least one of the multiple substrate processing machines, it determines that the normal state cannot be confirmed.

6. The power cutting device according to any one of claims 1 to 4, wherein, The power supply circuit includes a watchdog timer that resets the counter before it reaches a predetermined value with a period shorter than the predetermined time. When the predetermined time has elapsed and the counter has reached the predetermined value, the watchdog timer outputs a timeout status signal. When the status signal is obtained from the watchdog timer, the normal status confirmation unit determines that the normal status cannot be confirmed.

7. The power cutting device according to any one of claims 1 to 4, wherein, The power supply device generates DC power. The power supply circuit includes: A smoothing capacitor is used to smooth the DC power; and The discharge circuit discharges the charge remaining in the smoothing capacitor when the DC power output is stopped by the supply control unit.

8. The power cutting device according to any one of claims 1 to 4, wherein, The substrate production line is configured such that the substrate plating machine can be added to or removed from the line. The substrate plating machine has a base and a working module, and the working module is mounted on the base in a pull-out manner. The power supply circuit is located on the base.

9. The power cutting device according to any one of claims 1 to 4, wherein, The power supply device generates DC power.

10. A power supply interruption method, applied to a power supply system, the power supply system comprising: The movable part is able to move along the travel path set up along the substrate production line, which is equipped with multiple substrate-mounting machines that perform predetermined substrate-mounting operations on the substrates. A drive unit is provided on the movable part, and the movable part is moved by the power supplied from the substrate processing machine through non-contact power supply. Power supply device, generates electricity; The power distribution unit distributes the power generated by the power supply device to multiple substrate processing machines; A power supply circuit is provided in a plurality of the aforementioned substrate processing machines, and uses the power distributed via the power distribution unit to generate the supply power supplied to the drive unit; An electromagnetic contactor is provided on the input side of the power supply device and is capable of inputting AC power into the power supply device when the electromagnetic coil is energized; An excitation circuit is used to excite the electromagnetic coil; A power supply side switch, provided on a work machine equipped with the power supply device, disconnects the excitation circuit when the drive power of at least one of the plurality of substrate work machines is cut off; and The excitation circuit is connected in series with the electromagnetic coil and the power supply side switch. The power cut-off method includes the following supply control steps: When the drive power that drives the substrate mounting machine in at least one of the plurality of substrate mounting machines is cut off, the supply of power to the power supply circuit is stopped. At predetermined intervals, the normal operating status of the multiple substrate mounting machines is checked. If the normal operating status cannot be checked for at least one of the multiple substrate mounting machines, the power supply side switch is turned off.

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