Transmission electron microscope sample holder vacuum pre-storage equipment

Abstract

The present application relates to a transmission electron microscope (TEM) sample holder vacuum pre-storage device. The vacuum storage chamber is sealed and connected to the transmission electron microscope sample holder via a transmission electron microscope sample holder adapter flange. The high vacuum chamber is sealed and connected to a vacuum pump assembly. The high vacuum airway adapter is sealed and connected to the high vacuum chamber via a high vacuum airway angle valve. The vacuum adapter is sealed and connected to the high vacuum airway adapter via a vacuum pipeline. When not in use or temporarily stored, the transmission electron microscope sample holder is stored in the TEM sample holder vacuum pre-storage device. When needed, the transmission electron microscope sample holder is removed from the TEM sample holder vacuum pre-storage device and inserted into the corresponding position of the transmission electron microscope. This helps to ensure that the transmission electron microscope sample holder is isolated from water vapor and pollutants in the atmosphere to the greatest extent, greatly shortening the vacuum pumping time of the electron microscope sample. A high vacuum heating and degassing design is provided for frozen transmission electron microscope sample holders, simultaneously realizing the high vacuum heating and degassing function of the frozen electron microscope sample holder and the daily vacuum storage function of the conventional sample holder.

Description

Technical Field

[0001] The present application relates to the field of electron microscope equipment, and in particular to a transmission electron microscope sample holder vacuum pre-storage device. Background Art

[0002] Conventional electron microscopes (TEMs), also known as transmission electron microscopes (TEMs), use vacuum storage in transmission electron microscope (TEM) specimen holders. These specimens and holders are exposed to the atmosphere for extended periods, allowing moisture and residual contaminants in the air to adhere to the surfaces of the specimens and holders. When the specimen or holder enters the TEM, the remaining moisture on the specimen or holder's surfaces, including both the inner and outer surfaces, is slowly released, significantly prolonging the TEM's evacuation time. This delay is particularly pronounced in situ TEM specimen holders, which have complex internal structures and a significantly increased internal surface area. Furthermore, residual contaminants can contaminate the specimen being observed and even contaminate the TEM's vacuum chamber, internal pole pieces, detectors, and other related components.

[0003] For the above two problems, the traditional solution is to use a heating table or halogen lamp to heat the sample or sample rod to above 100°C to evaporate the residual water vapor and pollutants as much as possible; at the same time, the sample rod and sample are stored in a drying oven containing desiccant to isolate the water vapor and pollutants in the atmosphere.

[0004] However, this method of storing samples in a drying oven and removing moisture and contaminants by heating still carries significant risks, including the need to frequently replace the desiccant, the inability to completely isolate moisture and contaminants in the drying oven from the atmosphere, the possibility of sample modification during baking, and the prolonged sample pretreatment time.

[0005] Furthermore, for vacuum storage and moisture removal of cryo-transmission sample holders, the traditional method involves partially filling the cryo-transmission sample holder's dewar with liquid nitrogen. This low-temperature heat is then transferred to the sample at the end of the holder through an internal device, ensuring that samples requiring low-temperature transfer, storage, or observation remain frozen. To isolate the cryogenic liquid nitrogen within the dewar and minimize heat exchange with the ambient air, the dewar is designed with a double-layer structure, with a vacuum insulation layer in the middle, similar to the structure of a vacuum flask. In addition to maintaining a certain vacuum level, the dewar's vacuum insulation layer also contains a cryogenic adsorption molecular sieve to absorb trace amounts of water vapor, preventing heat transfer through both conduction and convection.

[0006] Furthermore, after each use, when a cryo-transmission specimen holder is removed from the TEM stage, the exposed portion of the specimen holder, exposed to the atmosphere, will instantly condense and adsorb a large amount of water vapor and other gases from the air due to the low temperature of liquid nitrogen (usually no higher than -196°C), forming frost on the specimen holder's surface. Therefore, to ensure rapid recovery of the cryo-transmission specimen holder after use, both the specimen holder and the molecular sieve vacuum interlayer of the Dewar jar must be vacuum-heated and degassed for "regeneration." This requires degassing both the cryo-transmission specimen holder and the Dewar jar vacuum interlayer separately, with the specimen holder utilizing its own built-in heating and temperature-controlled power supply. Even after completing this vacuum-heated degassing and "regeneration" process, the cryo-transmission specimen holder must continue to maintain a vacuum state to isolate it from atmospheric water vapor and contaminants.

[0007] However, the mainstream vacuum storage stations in traditional electron microscopy cannot simultaneously meet the differentiated vacuum storage requirements of both transmission sample holders. Furthermore, current vacuum storage station designs utilize multiple sample holder vacuum chambers connected in series, making it impossible to independently control the vacuum pumping and de-vacuuming of a single sample holder without affecting the vacuum storage of other sample holders. Summary of the Invention

[0008] Based on this, it is necessary to provide a transmission electron microscope sample holder vacuum pre-storage device.

[0009] In one embodiment, a transmission electron microscope sample holder vacuum pre-storage device includes:

[0010] The vacuum storage chamber is sealed and connected to the transmission sample holder through a transmission sample holder adapter flange;

[0011] Solenoid valve;

[0012] A vacuum pump group, wherein each of the vacuum storage chambers is sealed and connected to the vacuum pump group via each of the solenoid valves in a one-to-one correspondence;

[0013] A high vacuum chamber, sealed and connected to the vacuum pump group;

[0014] High vacuum air path angle valve;

[0015] A high vacuum air path adapter, sealed and connected to the high vacuum chamber via the high vacuum air path angle valve;

[0016] The vacuum adapter is sealed and connected to the high vacuum air path adapter via a vacuum pipeline.

[0017] When not in use or temporarily stored, the transmission sample holder is stored in the above-mentioned transmission electron microscope sample holder vacuum pre-storage device. When needed, the transmission sample holder is taken out of the above-mentioned transmission electron microscope sample holder vacuum pre-storage device and inserted into the corresponding position of the transmission electron microscope. The vacuum degree of each vacuum storage chamber is independently controlled by each solenoid valve, so that they can work independently without interfering with each other; this is conducive to ensuring that the transmission sample holder of the transmission electron microscope is isolated from water vapor and pollutants in the atmosphere to the greatest extent, thereby greatly shortening the vacuum pumping time of the electron microscope sample. A high vacuum heating and degassing design is also provided for the frozen transmission sample holder, which can simultaneously realize the high vacuum heating and degassing function of the frozen electron microscope sample holder and the daily vacuum storage function of the conventional sample holder, and is conducive to reducing the pollution of the electron microscope vacuum chamber and related components, thereby ensuring the service life of the electron microscope system.

[0018] In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further includes a control system, which is respectively connected to the vacuum pump group, the high vacuum air path angle valve and each of the solenoid valves.

[0019] In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further includes a machine frame assembly, the vacuum storage chamber, the high vacuum chamber, and the control system are disposed on the machine frame assembly, and the solenoid valve and the vacuum pump assembly are fixed inside the machine frame assembly; and / or,

[0020] The control system is a touch control system; and / or,

[0021] The transmission electron microscope sample holder vacuum pre-storage device further includes a full-range vacuum gauge sealed with the vacuum pump group, and the full-range vacuum gauge is used to detect and provide the system vacuum degree of the vacuum pump group in real time.

[0022] Furthermore, in one embodiment, the control system is also connected to the full-scale vacuum gauge, for controlling the vacuum pump group to stop and maintain pressure when the system vacuum degree reaches the system set vacuum pressure lower limit, and when the system vacuum degree reaches the set vacuum pressure upper limit, controlling the vacuum pump group to automatically start until the system vacuum degree reaches the system set vacuum pressure lower limit.

[0023] In one embodiment, the full-scale vacuum gauge is fixed inside the machine frame assembly; and / or,

[0024] The high vacuum chamber and each of the vacuum storage chambers are arranged in a row; and / or,

[0025] The vacuum storage chamber is disposed on top of the machine frame assembly; and / or,

[0026] The control system is disposed on the top or side of the machine frame assembly; and / or,

[0027] The control switch of the high vacuum chamber is arranged on the top of the high vacuum chamber.

[0028] In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further includes a power supply assembly, which is respectively connected to the control system, the vacuum pump group, the high vacuum air path angle valve and each of the solenoid valves.

[0029] In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further includes a machine frame assembly, the vacuum storage chamber, the high vacuum chamber, and the control system are disposed on the machine frame assembly, the power supply assembly, the solenoid valve, and the vacuum pump assembly are fixed inside the machine frame assembly, and the power switch of the power supply assembly is exposed outside the machine frame assembly; and / or,

[0030] The control system is a touch control system; and / or,

[0031] The transmission electron microscope sample holder vacuum pre-storage device further includes a full-range vacuum gauge sealed with the vacuum pump group, and the full-range vacuum gauge is used to detect and provide the system vacuum degree of the vacuum pump group in real time.

[0032] In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further comprises a transmission sample holder, wherein the transmission sample holder comprises a conventional transmission sample holder and a frozen transmission sample holder; and / or,

[0033] The transmission electron microscope sample holder vacuum pre-storage device further includes a vacuum pipe plugging piece, and the vacuum storage chamber is sealedly connected to the transmission sample holder or the vacuum pipe plugging piece via the transmission sample holder adapter flange.

[0034] In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further includes a transparent glass tube, and each of the vacuum storage chambers is connected to one of the transparent glass tubes and one of the transmission sample holder adapter flanges.

[0035] In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further comprises an infrared lamp, wherein the hot end of the infrared lamp is arranged toward the transparent glass tube, and is used to bake the transparent glass tube to heat the transmission sample holder therein. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 This is a schematic structural diagram of an embodiment of a transmission electron microscope sample holder vacuum pre-storage device described in this application.

[0038] Figure 2 for Figure 1 A schematic diagram of another direction of the embodiment shown.

[0039] Figure 3 for Figure 1 A schematic perspective view of the embodiment shown in another direction.

[0040] Figure 4 for Figure 3 A schematic perspective view of the embodiment shown in another direction.

[0041] Figure 5 for Figure 4 Schematic diagram of point A of the illustrated embodiment.

[0042] Figure 6 This is a schematic diagram of the application of another embodiment of the transmission electron microscope sample holder vacuum pre-storage device described in this application.

[0043] Figure 7 This is a schematic diagram of the application of another embodiment of the transmission electron microscope sample holder vacuum pre-storage device described in this application.

[0044] Reference numerals:

[0045] Machine stand assembly 100, control system 200, transmission sample holder 310, vacuum tube plug 320, transparent glass tube 340, high vacuum air path angle valve 350, high vacuum air path adapter 360, high vacuum chamber 370, transmission sample holder adapter flange 380, vacuum adapter 390, vacuum storage chamber 400, power supply assembly 500, solenoid valve 600, vacuum pump assembly 700, full-range vacuum gauge 800;

[0046] Conventional transmission sample holder 311 , frozen transmission sample holder 312 , control switch 371 , vacuum line 391 , power switch 510 . DETAILED DESCRIPTION

[0047] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0048] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0049] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0050] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it can mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it can mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. When a first feature is "below," "below," or "below" a second feature, it can mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0051] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more of the relevant listed items.

[0052] The present application discloses a transmission electron microscope sample holder vacuum pre-storage device, which includes some or all of the structures of the following embodiments; that is, the transmission electron microscope sample holder vacuum pre-storage device includes some or all of the following technical features. In one embodiment of the present application, a transmission electron microscope sample holder vacuum pre-storage device includes: a vacuum storage chamber, which is sealed and connected to the transmission sample holder via a transmission sample holder adapter flange; a solenoid valve; a vacuum pump group, wherein each vacuum storage chamber is sealed and connected to the vacuum pump group via each solenoid valve; a high vacuum chamber, which is sealed and connected to the vacuum pump group; a high vacuum airway angle valve; a high vacuum airway adapter, which is sealed and connected to the high vacuum chamber via the high vacuum airway angle valve; and a vacuum adapter, which is sealed and connected to the high vacuum airway adapter via a vacuum pipeline. When not in use or temporarily stored, the transmission sample holder is stored in the above-mentioned transmission electron microscope sample holder vacuum pre-storage device. When needed, the transmission sample holder is taken out of the above-mentioned transmission electron microscope sample holder vacuum pre-storage device and inserted into the corresponding position of the transmission electron microscope. The vacuum degree of each vacuum storage chamber is independently controlled by each solenoid valve, so that they can work independently without interfering with each other; this is conducive to ensuring that the transmission sample holder of the transmission electron microscope is isolated from water vapor and pollutants in the atmosphere to the greatest extent, thereby greatly shortening the vacuum pumping time of the electron microscope sample. A high vacuum heating and degassing design is also provided for the frozen transmission sample holder, which can simultaneously realize the high vacuum heating and degassing function of the frozen electron microscope sample holder and the daily vacuum storage function of the conventional sample holder, and is conducive to reducing the pollution of the electron microscope vacuum chamber and related components, thereby ensuring the service life of the electron microscope system.

[0053] The following combination Figures 1 to 7 The transmission electron microscope sample holder vacuum pre-storage device described in this application is described in detail. In one embodiment, a transmission electron microscope sample holder vacuum pre-storage device is as follows: Figure 1 and Figure 2 As shown, it includes a transmission sample holder adapter flange 380, a vacuum storage chamber 400, a solenoid valve 600, and a vacuum pump assembly 700. The vacuum storage chamber 400 is sealedly connected to the transmission sample holder 310 via the transmission sample holder adapter flange 380; the vacuum storage chamber 400 is sealedly connected to the vacuum pump assembly 700 via the solenoid valve 600. In each embodiment, the sealed connection prevents air leakage, thereby ensuring and maintaining the vacuum level in the corresponding compartment. With this design, when samples are not in use or temporarily stored, the transmission sample holder containing the sample is stored in the transmission electron microscope sample holder vacuum pre-storage device. When needed, the transmission sample holder containing the sample is removed from the transmission electron microscope sample holder vacuum pre-storage device and inserted into the corresponding position of the transmission electron microscope.

[0054] Furthermore, the principle of conventional transmission sample holder vacuum storage is described as follows. A vacuum pump group 700, for example, a vacuum pump group 700 composed of a turbomolecular pump and an oil-free diaphragm pump, is used to provide a completely oil-free vacuum environment for the system. When the transmission sample holder 310 is idle, the sample and the sample holder need to be stored in the transmission electron microscope sample holder vacuum pre-storage device, that is, the vacuum storage station; when the transmission sample holder 310 needs to be used, the sample and the transmission sample holder 310 are taken out of the vacuum storage station and inserted into the electron microscope. In this way, the electron microscope sample and the sample holder can be isolated from the water vapor and pollutants in the atmosphere to the greatest extent, and the residual gas and pollutants on the surface of the sample holder can be removed, avoiding the secondary contamination problem caused by sample pretreatment. At the same time, it can effectively ensure that the vacuum pumping time of the electron microscope sample is greatly shortened, and reduce the contamination of the electron microscope vacuum chamber and components. In contrast, conventional transmission electron microscope (TEM) sample holders are exposed to the atmosphere for extended periods, causing moisture and contaminants in the air to adhere to their surfaces. When these contaminated sample holders are inserted into an electron microscope, the contaminants on the sample holder surfaces are released, prolonging the microscope's evacuation time and contaminating the microscope's vacuum chamber, internal pole pieces, detectors, and other components. This contamination is long-lasting and cumulative, making it difficult to remove even with normal microscope maintenance, shortening the microscope's service life. This application utilizes a vacuum pump assembly 700 to separately control each vacuum storage chamber 400, specifically an oil-free vacuum pump assembly 700 utilizing a turbomolecular pump and a diaphragm pump. This creates a clean, high-vacuum environment for the TEM sample holders. Testing has shown that six months of vacuum storage of a transmission electron microscope (TEM) sample holder 310 only adsorbs approximately the same amount of water vapor as one day of storage in the atmosphere. Therefore, this application isolates the transmission electron microscope from atmospheric contaminants, extending the life of the TEM mainframe and facilitating the proper operation and long-term stability of the TEM instrument.

[0055] Combine Figures 1 to 7 In one embodiment, the transmission sample holder 310 includes a conventional transmission sample holder 311 and a frozen transmission sample holder 312 . Figures 1 to 4 The transmission sample holder 310 shown is a frozen transmission sample holder 312. Figure 6 The transmission sample holder 310 shown is a conventional transmission sample holder 311. Figure 7The transmission sample holder 310 shown is a frozen transmission sample holder 312. To store the frozen transmission sample holder 312, in one embodiment, the transmission sample holder 310 includes a conventional transmission sample holder 311 and a frozen transmission sample holder 312. Furthermore, the transmission electron microscope sample holder vacuum pre-storage device also includes a high vacuum airway angle valve 350, a high vacuum airway adapter 360, a high vacuum chamber 370, and a vacuum adapter 390. The vacuum adapter 390 is sealedly connected to the high vacuum airway adapter 360 via a vacuum line 391. The high vacuum airway adapter 360 is sealedly connected to the high vacuum chamber 370 via the high vacuum airway angle valve 350. The high vacuum chamber 370 is sealedly connected to the vacuum pump assembly 700. In each embodiment, the vacuum level of the high vacuum chamber 370 is the same as or higher than that of the vacuum storage chamber 400. The vacuum adapter 390 is used for vacuum connection to a Dewar tank for frozen transmission sample holders. Specifically, in one embodiment, a transmission electron microscope sample holder vacuum pre-storage device such as Figure 1 and Figure 2 As shown, it includes a high vacuum airway angle valve 350, a high vacuum airway adapter 360, a high vacuum chamber 370, a transmission sample holder adapter flange 380, a vacuum adapter 390, a vacuum line 391, a vacuum storage chamber 400, a solenoid valve 600, and a vacuum pump assembly 700. The vacuum storage chamber 400 is sealedly connected to the transmission sample holder 310 via the transmission sample holder adapter flange 380; the vacuum storage chamber 400 is sealedly connected to the vacuum pump assembly 700 via the solenoid valve 600; the high vacuum chamber 370 is sealedly connected to the vacuum pump assembly 700; the high vacuum airway adapter 360 is sealedly connected to the high vacuum chamber 370 via the high vacuum airway angle valve 350; and the vacuum adapter 390 is sealedly connected to the high vacuum airway adapter 360 via the vacuum line 391. The remaining embodiments are similar and are not described in detail here. In one embodiment, the TEM sample holder vacuum pre-storage device further includes the transmission sample holder 310, which includes a conventional transmission sample holder 311 and a cryo-transmission sample holder 312. This design provides high-vacuum heating and degassing for cryo-transmission sample holders, meeting the vacuum storage and moisture removal requirements for cryo-transmission sample holders. This facilitates both high-vacuum heating and degassing functions for cryo-TEM sample holders and routine vacuum storage for conventional sample holders.

[0056] Furthermore, considering that both the sample holder and the vacuum interlayer of the cryo-transmission sample holder 312 require vacuum degassing, in one embodiment, the high vacuum air path angle valve 350 is linked to each of the solenoid valves 600. The solenoid valve 600 is configured to automatically start when the high vacuum air path angle valve 350 is in the working state, that is, for the cryo-transmission sample holder 312, its sample holder and the vacuum interlayer of the Dewar tank are vacuum degassed at the same time.

[0057] Furthermore, the principle of high-vacuum heating and degassing of the cryo-TEM sample holder 312, or cryo-EM sample holder, is explained as follows. The cryo-TEM sample holder requires degassing from two main components: the sample holder and the Dewar's vacuum compartment. Degassing of the sample holder is accomplished using a conventional TEM sample holder vacuum storage station. Degassing of the Dewar's vacuum compartment is accomplished by connecting the vacuum adapter 390 through a vacuum line and vacuum-sealing it to the high-vacuum airway adapter 360, which is then vacuum-connected to the high-vacuum chamber 370. The high-vacuum airway angle valve 350 controls the opening or closing of this vacuum system to achieve the corresponding function. This design combines the high-vacuum heating and degassing functions of cryo-TEM sample holders with the routine vacuum storage functions of conventional TEM sample holders. It is understood that the heating method described is based on traditional methods for removing moisture. The TEM sample holder vacuum pre-storage device described in this application can achieve vacuum degassing, namely, the vacuum heating degassing function or the high-vacuum heating degassing function, without the need for a heating device. Of course, heating can also be achieved in conjunction with a baking device. Furthermore, this application overcomes the limitations of traditional TEM sample holder vacuum pre-storage devices, which primarily focus on vacuum degassing of cryo-TEM sample holders while also providing storage for conventional transmission sample holders. By adopting a compact modular design, it innovatively integrates the functions of heating degassing, vacuum pre-storage, and vacuum storage for cryo-TEM sample holders. This device is particularly suitable for laboratories that require both high-vacuum heating degassing of cryo-TEM sample holders and routine vacuum storage of conventional sample holders. It can simultaneously perform both high-vacuum heating degassing and routine vacuum storage for cryo-TEM sample holders, or independently. Without the need to add or remove functional accessories, this device seamlessly switches between two functions, improving equipment efficiency.

[0058] From a practical perspective, in one embodiment, there are at least two vacuum storage chambers 400 for simultaneously storing a corresponding number of transmission sample holders 310, i.e., each vacuum storage chamber 400 stores one transmission sample holder 310. Furthermore, in one embodiment, the vacuum storage chambers 400 form a two-layer structure with different spatial heights. Furthermore, in one embodiment, the vacuum storage chambers 400 are arranged in a row, either at the same height or at different heights. For embodiments having a high vacuum chamber 370, in one embodiment, the high vacuum chamber 370 and the vacuum storage chambers 400 are arranged in a row. Furthermore, in one embodiment, the vacuum storage chambers 400 are arranged in a row and located at the same height. Furthermore, in one embodiment, the vacuum storage chambers 400 are arranged in two rows, forming a two-layer structure with different spatial heights. This design creates multiple storage stations and is compatible with specific models of transmission electron microscope sample holders, such as Thermo, JEOL, and HITACHI. The present application is designed with multiple storage stations to meet the needs of simultaneous or time-sharing vacuum pre-storage of multiple sample holders. Furthermore, each station in the present application is compatible with sample holders of mainstream transmission electron microscope brands and models currently on the market, making it plug-and-play, safe, and efficient. Furthermore, multiple sample holders are connected in parallel through independent sample holder adapters, and the vacuum storage chamber 400 and solenoid valve 600 are connected to the vacuum pump assembly 700. This means that each storage station is independently interlocked for evacuation or de-evacuation. Furthermore, through the vacuum interlocking of each independent solenoid valve 600, evacuation or de-evacuation operation at any storage station does not affect the vacuum storage status of other storage stations. Furthermore, this facilitates the formation of regular transmission sample holders 310, making them easier for users to access and place, making them particularly suitable for use with automated robots.

[0059] Further, combined with Figure 2 、 Figure 4 and Figure 5 The high vacuum chamber 370 and the five vacuum storage chambers 400 are arranged in a row. The transmission electron microscope sample holder vacuum pre-storage device is correspondingly provided with five solenoid valves 600, thus forming five transmission sample holder storage stations, which can be connected to the five transmission sample holders 310. Because the vacuum storage chamber 400 is sealedly connected to the vacuum pump assembly 700 via the solenoid valve 600, each storage station can be independently started and stopped, and vacuum safety interlock protection is provided. In this application, each transmission sample holder storage station is designed to utilize independent vacuum solenoid valves connected in parallel to the vacuum pump assembly 700, so that each storage station can independently control the vacuum pumping or de-vacuuming operation. That is, the vacuum pumping or de-vacuuming operation of any storage station does not affect the vacuum storage status of other storage stations. In other words, it has an interlock protection function for misoperation, ensuring the independent vacuum interlocking of each transmission electron microscope storage station.

[0060] Furthermore, in one embodiment, the TEM sample holder vacuum pre-storage device also includes a transparent glass tube 340. Each of the vacuum storage chambers 400 is connected to one of the transparent glass tubes 340 and one of the transmission sample holder adapter flanges 380. Furthermore, in one embodiment, the transmission sample holder 310 is inserted into the vacuum storage chamber 400 through the transmission sample holder adapter flange 380 and is partially located within the transparent glass tube 340. This design facilitates operator observation of the end of the TEM sample holder and the state of the sample it holds. Infrared lamps can also be used to heat the sample holder end and the sample to achieve degassing. Furthermore, in one embodiment, the TEM sample holder vacuum pre-storage device also includes or is connected to an infrared lamp, with the hot end of the infrared lamp positioned toward the transparent glass tube 340 to heat the transmission sample holder 310 therein. Furthermore, the transparent glass tube 340 is made of quartz glass. Furthermore, in one embodiment, the transparent glass tube 340 and the transmission sample holder adapter flange 380 connected to the vacuum storage chamber 400 are coaxially arranged and respectively located on opposite sides of the vacuum storage chamber 400. Furthermore, in one embodiment, for two adjacent vacuum storage chambers 400, the two transmission sample holder adapter flanges 380 are located on opposite sides. Such a design provides a compact and highly efficient transmission electron microscope sample holder vacuum pre-storage device, which can meet the high vacuum heating and degassing functions of cryo-electron microscope sample holders and the daily vacuum storage functions of conventional sample holders. It can simultaneously realize the high vacuum heating and degassing functions of cryo-electron microscope sample holders and the daily vacuum storage functions of conventional sample holders, and can also realize the two functional applications independently; without adding or subtracting functional accessories, a seamless switching between two functions can be achieved in one machine, which solves the problem of low versatility and high cost of transmission sample holder vacuum storage due to the complex structure and low versatility of the existing related systems. It is conducive to adapting to conventional transmission sample holders 311 and cryo-transmission sample holders 312 of different volumes, making full use of space, and reducing the volume of the product under the premise of the same transmission sample holder 310 capacity.

[0061] When the number of transmission sample holders 310 is insufficient, or too many samples are temporarily not needed, or the transmission sample holders 310 are in external use, in one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further includes a vacuum pipe plug 320, and the vacuum storage chamber 400 is sealedly connected to the transmission sample holder 310 or the vacuum pipe plug 320 via the transmission sample holder adapter flange 380. In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further includes a vacuum pipe plug 320, and the transmission sample holder adapter flange 380 is sealedly connected to the transmission sample holder 310 or the vacuum pipe plug 320, so that the vacuum storage chamber 400 is sealedly connected to the transmission sample holder 310 or the vacuum pipe plug 320 via the transmission sample holder adapter flange 380. That is, the vacuum tube plug 320 can be used to seal the transmission sample holder adapter flange 380. In this case, the transmission sample holder adapter flange 380 no longer needs to be connected to the transmission sample holder 310. The design of the vacuum tube plug 320 is conducive to maintaining the cleanliness of the vacuum storage chamber 400 and the transmission sample holder adapter flange 380 when the transmission sample holder 310 is not connected, for example, when the transmission sample holder 310 is loaded on the electron microscope or when there is no transmission sample holder 310. In this case, the sample can also be stored in the vacuum storage chamber 400.

[0062] In one embodiment, the TEM sample holder vacuum pre-storage device further includes a control system 200, which is connected to the vacuum pump assembly 700, the high vacuum airway angle valve 350, and each of the solenoid valves 600. In one embodiment, the control system 200 is a touch control system. The control system 200 is used to control the operating states of the vacuum pump assembly 700, the high vacuum airway angle valve 350, and each of the solenoid valves 600. In one embodiment, for embodiments having the control system 200, the TEM sample holder vacuum pre-storage device further includes a power supply assembly 500, which is connected to the control system 200, the vacuum pump assembly 700, the high vacuum airway angle valve 350, and each of the solenoid valves 600 for power supply.

[0063] In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further includes a machine frame assembly 100, the vacuum storage chamber 400, the high vacuum chamber 370 and the control system 200 are arranged on the machine frame assembly 100, and the solenoid valve 600 and the vacuum pump group 700 are fixed inside the machine frame assembly 100; Figure 3 and Figure 4In one embodiment, the solenoid valve 600, the vacuum pump assembly 700, and the full-scale vacuum gauge 800 are all fixed inside the machine frame assembly 100; in one embodiment, the vacuum storage chamber 400 is disposed on the top of the machine frame assembly 100; in one embodiment, for an embodiment having a control system 200, the control system 200 is disposed on the top or side of the machine frame assembly 100. Furthermore, in one embodiment, for an embodiment having a high vacuum chamber 370, as Figure 2 As shown, the control switch 371 of the high vacuum chamber 370 is provided on the top of the high vacuum chamber 370. Furthermore, the number of the high vacuum air path adapter 360 and the high vacuum air path angle valve 350 are both two, and the two high vacuum air path adapters 360 are symmetrically arranged relative to the high vacuum chamber 370, and the two high vacuum air path angle valves 350 are also symmetrically arranged relative to the high vacuum chamber 370. One high vacuum chamber 370 is sealed and connected to the two high vacuum air path adapters 360 through the two high vacuum air path angle valves 350, respectively, for connecting to two vacuum pipelines 391 individually or simultaneously, and connecting to the two vacuum adapters 390 individually or simultaneously through the two vacuum pipelines 391, that is, the transmission electron microscope sample holder vacuum pre-storage device has the storage capacity of connecting to two frozen transmission sample holders 312 at the same time. As shown Figure 2 As shown, the transmission electron microscope sample holder vacuum pre-storage device has five vacuum storage chambers 400, which can simultaneously connect to five transmission sample holders 310, two of which can be frozen transmission sample holders 312; the available status of the high vacuum chamber 370 relative to the two high vacuum air path angle valves 350 can also be independently controlled by the control switch 371.

[0064] In one embodiment, a device for vacuum storage and moisture removal of transmission electron microscope (TEM) sample holders is provided. This device belongs to the field of electron microscope equipment and can be used as an accessory for electron microscopes. The TEM sample holder vacuum pre-storage device includes a machine stand assembly 100, a control system 200, a transparent glass tube 340, a high-vacuum airway angle valve 350, a high-vacuum airway adapter 360, a high-vacuum chamber 370, a transmission electron microscope sample holder adapter flange 380, a vacuum adapter 390, a vacuum storage chamber 400, a power supply assembly 500, a solenoid valve 600, and a vacuum pump assembly 700. This embodiment combines high-vacuum heating and degassing functions for cryo-EM sample holders with routine vacuum storage for conventional TEM sample holders. This ensures vacuum degassing of cryo-EM sample holders and Dewar jars while maintaining zero noise and vibration during conventional sample holder vacuum storage. This embodiment also features an automatic vacuum pressure maintenance function, allowing for independent control of each vacuum storage station.

[0065] In one embodiment, the TEM sample holder vacuum pre-storage device further includes a power supply assembly 500, which is respectively connected to the control system 200, the vacuum pump assembly 700, the high vacuum airway angle valve 350, and each of the solenoid valves 600. In one embodiment, the TEM sample holder vacuum pre-storage device further includes a machine stand assembly 100, wherein the vacuum storage chamber 400, the high vacuum chamber 370, and the control system 200 are disposed on the machine stand assembly 100, the power supply assembly 500, the solenoid valve 600, and the vacuum pump assembly 700 are fixed inside the machine stand assembly 100, and the power switch 510 of the power supply assembly 500 is exposed outside the machine stand assembly 100. In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device includes a machine stand assembly 100, a control system 200, a transparent glass tube 340, a high vacuum air path angle valve 350, a high vacuum air path adapter 360, a high vacuum chamber 370, a transmission sample holder adapter flange 380, a vacuum adapter 390, a vacuum storage chamber 400, a power supply assembly 500, a solenoid valve 600 and a vacuum pump assembly 700; the transparent glass tube 340 and the transmission sample holder adapter flange 380 are vacuum-sealed and connected to A vacuum storage chamber 400; a conventional transmission sample holder or a frozen transmission sample holder or a vacuum tube plug 320 is connected via a transmission sample holder adapter flange 380 and vacuum-sealed within the vacuum storage chamber 400; the transmission electron microscope sample holder vacuum pre-storage device comprises x sets of vacuum storage chambers 400, i.e., x conventional transmission sample holders or frozen transmission sample holders or vacuum tube plugs 320 are connected via x transmission sample holder adapter flanges 380 and vacuum-sealed within x sets of vacuum storage chambers 400; x is an integer greater than or equal to 1. In one embodiment, y high vacuum airway adapters 360 are connected to a high vacuum chamber 370 via y high vacuum airway angle valves 350; a vacuum adapter 390 is connected via a vacuum line and vacuum-sealed to the high vacuum airway adapter 360, thereby being vacuum-connected to the high vacuum chamber 370; y is an integer, and x is greater than or equal to y and y is greater than or equal to 1. In one embodiment, x sets of vacuum storage chambers 400 are vacuum-connected to the vacuum pump group 700 through x solenoid valves 600; the high vacuum chamber 370 is vacuum-connected to the vacuum pump group 700; the full-scale vacuum gauge is vacuum-connected to the vacuum pump group 700, and the system vacuum degree is displayed in real time; in this embodiment, the vacuum pump group 700 includes a turbomolecular pump and a diaphragm pump to achieve high vacuum oil-free environment storage and ensure the cleanliness of the vacuum system; x is an integer greater than or equal to 1.

[0066] In one embodiment, the transmission electron microscope sample holder vacuum pre-storage device further includes a full-scale vacuum gauge 800 hermetically connected to the vacuum pump assembly 700. The full-scale vacuum gauge 800 is used to detect and provide real-time system vacuum levels of the vacuum pump assembly 700. In one embodiment, for an embodiment having a machine stand assembly 100, the full-scale vacuum gauge 800 is fixed within the machine stand assembly 100. Furthermore, in one embodiment, for an embodiment having a control system 200, the control system 200 is further connected to the full-scale vacuum gauge 800 and is used to control the vacuum pump assembly 700 to shut down and maintain pressure when the system vacuum reaches a set lower vacuum pressure limit, and to control the vacuum pump assembly 700 to automatically start when the system vacuum reaches a set upper vacuum pressure limit until the system vacuum reaches the set lower vacuum pressure limit. In one embodiment, x sets of vacuum storage chambers 400, a high vacuum chamber 370, and a control system 200 are fixed to the exterior of the machine frame assembly 100; x solenoid valves 600, a vacuum pump assembly 700, and a full-range vacuum gauge are fixed to the interior of the machine frame assembly 100. The entire device is powered by a power supply assembly 500 and controlled by the control system 200; x is an integer greater than or equal to 1. This design allows each independent transmission electron microscope (TEM) specimen holder storage station to utilize automatic vacuum pressure maintenance. Specifically, when the system's set vacuum pressure lower limit is reached, the vacuum pump assembly 700 shuts down to maintain pressure. When the system pressure slowly increases to the set vacuum pressure upper limit, the vacuum pump assembly 700 automatically restarts until the system pressure reaches the set vacuum pressure lower limit. This automatic vacuum pressure maintenance design ensures zero noise and vibration during specimen holder vacuum storage, minimizing external interference with transmission electron microscope operation. This enables the automatic vacuum pressure maintenance setting of the vacuum pre-storage station to be realized, so that the automatic vacuum pressure maintenance design of this application can achieve the purpose of zero noise and zero vibration during the vacuum storage of the sample holder, minimizing external interference with the operation of the transmission electron microscope host.

[0067] In one embodiment, the transparent glass tube 340 and the transmission sample holder adapter flange 380 are vacuum-sealed and connected to the vacuum storage chamber 400; the conventional transmission sample holder 311 or the frozen transmission sample holder 312 or the vacuum tube plug 320 are connected and vacuum-sealed in the vacuum storage chamber 400 via the transmission sample holder adapter flange 380; the high vacuum airway adapter 360 is connected to the high vacuum chamber 370 via the high vacuum airway angle valve 350; the vacuum adapter 390 is connected via a vacuum pipeline and vacuum-sealed to the high vacuum airway adapter 360, thereby being vacuum-connected to the high vacuum chamber 370. In the figure, the vacuum storage chamber 400 is vacuum-connected to the vacuum pump group 700 through the solenoid valve 600; the high vacuum chamber 370 is vacuum-connected to the vacuum pump group 700; the full-scale vacuum gauge 800 is vacuum-connected to the vacuum pump group 700, and the system vacuum degree is displayed in real time; the vacuum storage chamber 400, the high vacuum chamber 370 and the control system 200 are fixed on the outside of the machine frame assembly 100; the solenoid valve 600, the vacuum pump group 700 and the full-scale vacuum gauge 800 are fixed on the inside of the machine frame assembly 100; the entire equipment is powered by the power supply assembly 500 and is operated and controlled by the control system 200.

[0068] Furthermore, in one embodiment, a transmission electron microscope sample holder vacuum pre-storage device includes: a machine frame assembly 100, a control system 200, a transmission sample holder 310, a transparent glass tube 340, a transmission sample holder adapter flange 380, a vacuum storage chamber 400, a power supply assembly 500, a solenoid valve 600, and a vacuum pump group 700; the vacuum storage chamber 400 and the control system 200 are arranged on the machine frame assembly 100, the power supply assembly 500, the solenoid valve 600, and the vacuum pump group 700 are fixed inside the machine frame assembly 100, and the power switch 510 of the power supply assembly 500 is exposed outside the machine frame assembly 100, and the power supply assembly 500 is respectively connected to the control system 200, the solenoid valve 600, and the vacuum pump assembly 700; the control system 200 is respectively connected to the vacuum pump assembly 700, the high vacuum airway angle valve 350, and each of the solenoid valves 600; the vacuum storage chamber 400 is respectively connected to a transparent glass tube 340 and a transmission sample holder adapter flange 380, and the vacuum storage chamber 400 is sealed to the vacuum pump assembly 700 via the solenoid valve 600; the transmission sample holder adapter flange 380 is sealed to the transmission sample holder 310, so that the vacuum storage chamber 400 is sealed to the transmission sample holder 310 via the transmission sample holder adapter flange 380. This design has a high degree of automation, one-button start and stop, and plug-and-play operation. This application uses a control system 200 to control vacuum acquisition and release, the pumping and degassing operations of the multi-channel transmission electron microscope sample holder vacuum pre-storage station, and the display of real-time system air pressure, molecular pump temperature, and speed data, as well as power on and off. It has good mobility, high degree of integration, and small footprint. For example, it is only about the size of a desktop printer and can be operated anytime and anywhere after being connected to a 220V civilian power supply.

[0069] Furthermore, in one embodiment, a transmission electron microscope sample holder vacuum pre-storage device includes a machine frame assembly 100, a control system 200, a transmission sample holder 310, a vacuum pipe plug 320, a transparent glass tube 340, a high vacuum air path angle valve 350, a high vacuum air path adapter 360, a high vacuum chamber 370, a transmission sample holder adapter flange 380, a vacuum adapter 390, a vacuum storage chamber 400, a power supply assembly 500, a solenoid valve 600, a vacuum pump assembly 700, and a full-range vacuum gauge 800; the vacuum storage chamber 400, the high vacuum chamber 370, and the control system 200 are disposed on the machine frame assembly 100. The power supply assembly 500, the solenoid valve 600 and the vacuum pump group 700 are fixed inside the machine stand assembly 100, and the power switch 510 of the power supply assembly 500 is exposed outside the machine stand assembly 100. The power supply assembly 500 is respectively connected to the control system 200, the solenoid valve 600 and the vacuum pump group 700; the control system 200 is respectively connected to the full-scale vacuum gauge 800, the vacuum pump group 700, the high vacuum air path angle valve 350 and each of the solenoid valves 600. The full-scale vacuum gauge 800 is used to detect and provide the system vacuum degree of the vacuum pump group 700 in real time. The control system 200 controls the vacuum pump group 700 to stop and maintain pressure when the system vacuum degree reaches the set vacuum pressure lower limit, and controls the vacuum pump group 700 to automatically start until the system vacuum degree reaches the set vacuum pressure lower limit when the system vacuum degree reaches the set vacuum pressure upper limit; the vacuum storage chamber 400 is respectively connected to one of the transparent glass tubes 340 and one of the transmission sample holder adapter flanges 380, and the vacuum storage chamber 400 is sealed and connected to the vacuum pump group 700 through the solenoid valve 600; the transmission sample holder adapter flange 380 is sealed and connected to the transmission sample holder 310 or the vacuum pipe plug 320. The vacuum storage chamber 400 is sealedly connected to the transmission sample holder 310 or the vacuum pipe plug 320 through the transmission sample holder adapter flange 380. The vacuum pipe plug 320 is used to seal the transmission sample holder adapter flange 380 to ensure the vacuum degree of the system, or to replace it with the transmission sample holder 310 storing the sample during testing. The vacuum adapter 390 is sealedly connected to the high vacuum air path adapter 360 through the vacuum pipeline 391. The high vacuum air path adapter 360 is sealedly connected to the high vacuum chamber 370 through the high vacuum air path angle valve 350. The high vacuum chamber 370 is sealedly connected to the vacuum pump assembly 700.

[0070] Furthermore, in one embodiment, the number of vacuum storage chambers 400 and the number of solenoid valves 600 are both five, and the number of high vacuum airway angle valves 350 and high vacuum airway adapters 360 are both two. Alternatively, in one embodiment, the number of vacuum storage chambers 400 and the number of solenoid valves 600 are both three, and the number of high vacuum airway angle valves 350 and high vacuum airway adapters 360 are both one. In one embodiment, x is 5 and y is 2; five conventional transmission sample holders, cryo-transmission sample holders, or vacuum tube plugs 320 are connected and vacuum-sealed in five sets of vacuum storage chambers 400 via five transmission sample holder adapter flanges 380, and are vacuum-connected to a vacuum pump assembly 700 via five solenoid valves 600; two high vacuum airway adapters 360 are connected to a high vacuum chamber 370 via two high vacuum airway angle valves 350 and directly connected to the vacuum pump assembly 700. In one embodiment, x is 3 and y is 1; three conventional transmission sample holders 311, frozen transmission sample holders 312, or vacuum tube plugs 320 are connected and vacuum-sealed in three vacuum storage chambers 400 via three transmission sample holder adapter flanges 380. These are then vacuum-connected to a vacuum pump assembly 700 via three solenoid valves 600. A high-vacuum airway adapter 360 is connected to a high-vacuum chamber 370 via a high-vacuum airway angle valve 350 and directly connected to the vacuum pump assembly 700. This design, utilizing a groundbreaking dual vacuum pumping airway design, achieves both high-vacuum heating and degassing of cryo-EM sample holders and routine vacuum storage of conventional transmission electron microscope sample holders, forming a vacuum pre-storage device for transmission electron microscope sample holders. This application addresses the need for vacuum heating and degassing of frozen sample holders while also meeting the requirements for zero noise and vibration during vacuum storage of conventional sample holders. At the same time, in response to the needs of independent storage operations of multiple transmission electron microscope sample rods, a parallel pumping system was creatively designed. The vacuum or release operation of each storage station is independently controlled by the touch screen, cleverly realizing the automatic vacuum pressure maintenance function of each transmission electron microscope sample rod storage station.

[0071] The implementation of a specific application is as follows Figure 6As shown, two conventional transmission sample holders 311 and three vacuum plugs 320 are connected via respective transmission sample holder adapter flanges 380 and independently vacuum-sealed within five vacuum storage chambers 400. This means that the two conventional transmission sample holders 311 are vacuum-stored within the transmission electron microscope sample holder vacuum pre-storage device of this application. To remove one or two of the vacuum-stored conventional transmission sample holders, the corresponding vacuum storage chamber 400 button in the control system 200 is clicked. The corresponding vacuum chamber is then vented and the stored transmission sample holders 311 are removed, while the other workstations remain in a vacuum state. Once the vented storage station has been reinserted with a transmission sample holder 311 or vacuum plug 320, the corresponding vacuum storage chamber 400 button in the control system 200 is clicked again. The vacuum pump assembly 700 then starts evacuating the corresponding workstation until the system-set lower vacuum pressure limit is reached, at which point the vacuum pump assembly 700 shuts down to maintain pressure.

[0072] Another specific application example is Figure 7 As shown, a cryo-transmission sample holder 312 and four vacuum pipe plugs 320 are connected via respective transmission sample holder adapter flanges 380 and independently vacuum-sealed within five vacuum storage chambers 400. This means that one cryo-transmission sample holder 312 is heated, degassed, and vacuum-stored in the transmission electron microscope sample holder vacuum pre-storage device of this application. The high-vacuum airway adapter 360 is vacuum-sealed to the vacuum adapter 390 via a vacuum pipeline. The high-vacuum airway angle valve 350 is opened to ensure that the vacuum pump assembly 700 can provide a high vacuum environment to the cryo-transmission sample holder's dewar. Simultaneously, the cryo-transmission sample holder dewar heating device is activated, enabling vacuum heating and degassing of the cryo-transmission sample holder's dewar portion. When the cryo-transmission sample holder heating and degassing operation is complete, the high-vacuum airway angle valve 350 is closed, effectively shutting down the vacuum pump assembly 700 to allow the cryo-transmission sample holder's dewar portion to be vacuum-evacuated. At the same time, when it is necessary to remove the cryo-radiograph holder stored in vacuum, the corresponding vacuum storage chamber 400 button in the control system 200 is clicked. The corresponding vacuum chamber is then vented and the stored cryo-radiograph holder is removed, while the other workstations remain in a vacuum state. After the vented storage station is reinserted with a cryo-radiograph holder or vacuum tube plug 320, the corresponding vacuum storage chamber 400 button in the control system 200 is clicked again. The vacuum pump assembly 700 starts and evacuates the corresponding workstation until the system-set vacuum pressure lower limit is reached, at which point the vacuum pump assembly 700 shuts down to maintain pressure.

[0073] It should be noted that other embodiments of the present application also include a transmission electron microscope sample holder vacuum pre-storage device that can be implemented by combining the technical features of the above embodiments.

[0074] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0075] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of patent protection for the present application shall be determined by the appended claims.

Claims

1. A transmission electron microscope sample holder vacuum pre-storage device, characterized in that: include: A vacuum storage chamber (400) is sealed and connected to the transmission sample holder (310) via a transmission sample holder adapter flange (380); Solenoid valve (600); A vacuum pump group (700), wherein each of the vacuum storage chambers (400) is sealed and connected to the vacuum pump group (700) via each of the solenoid valves (600) in a one-to-one correspondence; A high vacuum chamber (370) is sealed and connected to the vacuum pump assembly (700); High vacuum air path angle valve (350); A high vacuum air path adapter (360) is sealed and connected to the high vacuum chamber (370) via the high vacuum air path angle valve (350); The vacuum adapter (390) is sealed and connected to the high vacuum air path adapter (360) via a vacuum line (391); and the vacuum adapter (390) is used to connect the Dewar tank of the frozen transmission sample rod (312) of the transmission sample rod (310).

2. The transmission electron microscope sample holder vacuum pre-storage device according to claim 1, characterized in that: It also includes a control system (200), wherein the control system (200) is respectively connected to the vacuum pump group (700), the high vacuum air path angle valve (350), and each of the solenoid valves (600).

3. The transmission electron microscope sample holder vacuum pre-storage device according to claim 2, characterized in that: The invention also includes a machine frame assembly (100), wherein the vacuum storage chamber (400), the high vacuum chamber (370) and the control system (200) are arranged on the machine frame assembly (100), and the solenoid valve (600) and the vacuum pump group (700) are fixed inside the machine frame assembly (100).

4. The transmission electron microscope sample holder vacuum pre-storage device according to claim 2, characterized in that: The control system (200) is a touch control system.

5. The transmission electron microscope sample holder vacuum pre-storage device according to claim 3, characterized in that: The transmission electron microscope sample holder vacuum pre-storage device further comprises a full-scale vacuum gauge (800) sealedly connected to the vacuum pump group (700), wherein the full-scale vacuum gauge (800) is used for real-time detection and provision of the system vacuum degree of the vacuum pump group (700).

6. The transmission electron microscope sample holder vacuum pre-storage device according to claim 5, characterized in that: The full-scale vacuum gauge (800) is fixed inside the machine frame assembly (100).

7. The transmission electron microscope sample holder vacuum pre-storage device according to claim 3, characterized in that: The vacuum storage chamber (400) is arranged on the top of the machine frame assembly (100).

8. The transmission electron microscope sample holder vacuum pre-storage device according to claim 3, characterized in that: The control system (200) is arranged on the top or side of the machine frame assembly (100).

9. The transmission electron microscope sample holder vacuum pre-storage device according to claim 3, characterized in that: The control switch (371) of the high vacuum chamber (370) is arranged on the top of the high vacuum chamber (370).

10. The transmission electron microscope sample holder vacuum pre-storage device according to claim 2, characterized in that: It also includes a power supply assembly (500), wherein the power supply assembly (500) is respectively connected to the control system (200), the vacuum pump group (700), the high vacuum air path angle valve (350), and each of the solenoid valves (600).

11. The transmission electron microscope sample holder vacuum pre-storage device according to claim 10, characterized in that: The invention also includes a machine frame assembly (100), wherein the vacuum storage chamber (400), the high vacuum chamber (370) and the control system (200) are arranged on the machine frame assembly (100), the power supply assembly (500), the solenoid valve (600) and the vacuum pump group (700) are fixed inside the machine frame assembly (100), and the power switch (510) of the power supply assembly (500) is exposed outside the machine frame assembly (100).

12. The transmission electron microscope sample holder vacuum pre-storage device according to claim 10, characterized in that: The control system (200) is a touch control system.

13. The transmission electron microscope sample holder vacuum pre-storage device according to claim 11, characterized in that: The transmission electron microscope sample holder vacuum pre-storage device further comprises a full-scale vacuum gauge (800) sealedly connected to the vacuum pump group (700), wherein the full-scale vacuum gauge (800) is used for real-time detection and provision of the system vacuum degree of the vacuum pump group (700).

14. The transmission electron microscope sample holder vacuum pre-storage device according to claim 13, characterized in that: The full-scale vacuum gauge (800) is fixed inside the machine frame assembly (100).

15. The transmission electron microscope sample holder vacuum pre-storage device according to claim 11, characterized in that: The high vacuum chamber (370) and each of the vacuum storage chambers (400) are arranged in a row.

16. The transmission electron microscope sample holder vacuum pre-storage device according to claim 11, characterized in that: The vacuum storage chamber (400) is arranged on the top of the machine frame assembly (100).

17. The transmission electron microscope sample holder vacuum pre-storage device according to claim 11, characterized in that: The control system (200) is arranged on the top or side of the machine frame assembly (100).

18. The transmission electron microscope sample holder vacuum pre-storage device according to claim 11, characterized in that: The control switch (371) of the high vacuum chamber (370) is arranged on the top of the high vacuum chamber (370).

19. The transmission electron microscope sample holder vacuum pre-storage device according to claim 1, characterized in that: The invention also includes the transmission sample rod (310), which includes a conventional transmission sample rod (311) and a frozen transmission sample rod (312).

20. The transmission electron microscope sample holder vacuum pre-storage device according to claim 1, characterized in that: The transmission electron microscope sample holder vacuum pre-storage device further comprises a vacuum pipe plug (320), and the vacuum storage chamber (400) is sealedly connected to the transmission sample holder (310) or the vacuum pipe plug (320) via the transmission sample holder adapter flange (380).

21. The transmission electron microscope sample holder vacuum pre-storage device according to any one of claims 1 to 20, characterized in that: It also includes a transparent glass tube (340), and each of the vacuum storage chambers (400) is connected to one of the transparent glass tubes (340) and one of the transmission sample rod adapter flanges (380).

22. The transmission electron microscope sample holder vacuum pre-storage device according to claim 21, characterized in that: It also includes an infrared lamp, wherein the hot end of the infrared lamp is arranged toward the transparent glass tube (340) and is used to bake the transparent glass tube (340) to heat the transmission sample rod (310) therein.

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