A high temperature hot furnace

Abstract

The application discloses a high-temperature furnace, which comprises a shell, a quartz tube and a lock structure, the shell comprises a plurality of side plates which are spliced and enclose a containing cavity, the quartz tube is arranged in the containing cavity, and the lock structure is used for releasing or locking any two of the plurality of side plates which are arranged adjacently. The high-temperature furnace can conveniently install and dismount the quartz tube, does not need to reserve a large assembly space, reduces the floor area of the high-temperature furnace, and can adjust the size according to actual production capacity demand, and has good compatibility.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more particularly to a high-temperature furnace. Background Technology

[0002] The structure of existing hot furnaces is as follows: Figures 1-2 As shown, the furnace body 1' is cylindrical, with an insulation layer 2' on its inner wall. Heating wires 3' are located on the inner wall of the insulation layer 2'. A quartz tube 4' is located inside the furnace body 1', which houses silicon wafers 5'. During actual assembly, loading and unloading can only be performed along the length of the quartz tube 4', which is typically 3-4 meters long. Therefore, existing furnaces require 3-5 meters of space for the installation and removal of the quartz tube 4', resulting in a significant space requirement. Furthermore, because the existing furnace body 1' is a monolithic structure, its dimensions cannot be adjusted according to production capacity requirements, leading to poor compatibility. Summary of the Invention

[0003] The purpose of this invention is to provide a high-temperature furnace that allows for easy installation and disassembly of quartz tubes without requiring a large assembly space, thus reducing the furnace's footprint. Furthermore, the furnace's dimensions can be adjusted according to actual production capacity requirements, demonstrating good compatibility.

[0004] To achieve the above-mentioned technical effects, the technical solution of the present invention is as follows:

[0005] This invention discloses a high-temperature furnace, comprising: a shell, the shell including multiple side plates joined together, the multiple side plates forming a receiving cavity; a quartz tube disposed within the receiving cavity; and a locking structure for releasing or locking any two adjacent side plates.

[0006] In some embodiments, the plurality of side panels include a front side panel, a rear side panel, a left side panel, a right side panel, an upper side panel, and a lower side panel; wherein: the upper side panel and the lower side panel are respectively connected to the left side panel through a plurality of locking structures; the upper side panel and the lower side panel are respectively connected to the right side panel through a plurality of locking structures; the left side wall and the right side wall of the front side panel are respectively connected to the upper side panel and the lower side panel through a plurality of locking structures; the left side wall and the right side wall of the rear side panel are respectively connected to the upper side panel and the lower side panel through a plurality of locking structures.

[0007] In some specific embodiments, the front side panel includes two splicing plates, which are spliced ​​together by the locking structure or splicing fasteners.

[0008] In some embodiments, the locking structure includes a locking member and an operating member, the locking member and the operating member being respectively disposed on two side plates of the housing, the operating member having a locked state cooperating with the locking member and a released state separating from the locking member; in the locked state, the locking structure is capable of locking the two side plates of the housing; in the released state, the locking structure is capable of releasing the two side plates of the housing.

[0009] In some specific embodiments, the locking member is provided with a locking groove, and the operating member includes: a support connected to the side plate of the housing; a rotating handle rotatably disposed on the support; and a locking member, one end of which is rotatably connected to the rotating handle. In the locked state, the other end of the locking member can engage in the locking groove, and in the released state, the other end of the locking member disengages from the locking groove.

[0010] In some specific embodiments, the rotating handle is provided with a rotating shaft hole, and a rotating shaft is fitted inside the rotating shaft hole; the locking member is a U-shaped rod, and in the locked state, the closed end of the U-shaped rod is fitted inside the locking groove, and the two branch rods of the U-shaped rod pass through the rotating shaft and are fixed by a limiting nut.

[0011] In some specific embodiments, the operating component further includes: an adjusting plate for supporting the support, the adjusting plate having a first adjusting elongated hole; and an adjusting seat connected to the side plate of the housing, the adjusting seat having a second adjusting elongated hole, the adjusting plate and the adjusting seat being connected by adjusting fasteners passing through the first adjusting elongated hole and the second adjusting elongated hole.

[0012] In some more specific embodiments, the adjusting plate is a U-shaped plate, and there are two adjusting seats, which are respectively connected to the two side walls of the U-shaped plate.

[0013] In some embodiments, the side plate includes: a housing having a mounting groove; an insulation element disposed in the mounting groove and having a receiving groove on the insulation element; and a heating element disposed in the receiving groove.

[0014] In some specific embodiments, there are multiple sets of heating wires, and each set of heating wires can be controlled individually; the outer casing is provided with multiple pairs of insulated lead holders, and each pair of insulated lead holders cooperates with the lead wires of one set of heating wires.

[0015] The beneficial effects of the high-temperature furnace of the present invention are as follows: Since the shell includes multiple spliced ​​side plates, any two adjacent side plates can be assembled or released through a locking structure. When actually assembling or disassembling the quartz tube, it is not necessary to pull out or push the quartz tube along its length, and there is no need to reserve a large space for quartz tube assembly, thus reducing the floor space of the high-temperature furnace. In actual production, the dimensions of the receiving cavity along the horizontal or vertical direction can be adjusted according to the size of the quartz tube, so that the high-temperature furnace can better meet the needs of various production capacities and improve the compatibility of the high-temperature furnace.

[0016] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of an existing hot furnace structure;

[0018] Figure 2 This is a schematic diagram of the structure of a conventional furnace from another direction.

[0019] Figure 3 This is a schematic diagram of the high-temperature furnace according to Embodiment 1 of the present invention;

[0020] Figure 4 This is a cross-sectional view of the high-temperature furnace according to Embodiment 1 of the present invention;

[0021] Figure 5 This is a schematic diagram of the exploded structure of the high-temperature furnace according to Embodiment 1 of the present invention;

[0022] Figure 6 This is a schematic diagram of the locking structure of the high-temperature furnace in Embodiment 1 of the present invention in the locked state;

[0023] Figure 7 This is a schematic diagram of the locking structure of the high-temperature furnace in Embodiment 1 of the present invention in the released state;

[0024] Figure 8 This is an exploded structural diagram of the locking structure of the high-temperature furnace according to Embodiment 1 of the present invention;

[0025] Figure 9 This is an exploded structural diagram of the lower side plate of the high-temperature furnace according to Embodiment 1 of the present invention;

[0026] Figure 10 This is a schematic diagram of the structure of the lower side plate of the high-temperature furnace according to Embodiment 1 of the present invention;

[0027] Figure 11 This is a schematic diagram of the structure of a front side plate of a high-temperature furnace according to Embodiment 1 of the present invention;

[0028] Figure 12 This is a schematic diagram of another front side plate of the high-temperature furnace according to Embodiment 1 of the present invention;

[0029] Figure 13 This is a schematic diagram of the high-temperature furnace according to Embodiment 2 of the present invention;

[0030] Figure 14 This is a cross-sectional view of the high-temperature furnace according to Embodiment 2 of the present invention;

[0031] Figure 15 This is an exploded structural diagram of the high-temperature furnace according to Embodiment 2 of the present invention;

[0032] Figure 16 This is a schematic diagram of the structure of the high-temperature furnace according to Embodiment 3 of the present invention;

[0033] Figure 17 This is an exploded structural diagram of the high-temperature furnace according to Embodiment 3 of the present invention;

[0034] Figure 18 This is a schematic diagram of the structure of the high-temperature furnace according to embodiment four of the present invention;

[0035] Figure 19 This is an exploded structural diagram of the high-temperature furnace of Embodiment 4 of the present invention.

[0036] Figure label:

[0037] Figures 1-2 middle:

[0038] 1' Furnace body; 2' Insulation layer; 3' Heating wire; 4' Quartz tube; 5' Silicon wafer.

[0039] Figures 3-15 middle:

[0040] 1. Shell; 11. Front side panel; 12. Rear side panel; 13. Upper side panel; 14. Lower side panel; 15. Left side panel; 16. Right side panel; 101. Outer shell; 1011. Mounting groove; 102. Insulation component; 1021. Receiving groove; 103. Pressure plate; 104. Heating wire; 105. Insulating lead holder; 106. Splicing sub-plate; 107. Semi-circular side panel;

[0041] 2. Locking structure; 21. Locking component; 211. Locking groove; 22. Operating component; 221. Support; 222. Rotating handle; 223. Locking component; 224. Adjusting plate; 2241. First adjusting elongated hole; 225. Adjusting seat; 2251. Second adjusting elongated hole; 226. Rotating shaft; 227. Limiting nut;

[0042] 3. Quartz tube;

[0043] 4. Splicing fasteners; 41. Fixing lugs; 42. Fixing bolts;

[0044] 5. Silicon wafer; 6. Support block. Detailed Implementation

[0045] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0046] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0047] Furthermore, features specified as "first" or "second" may explicitly or implicitly include one or more of those features, used to distinguish and describe features, without any order or emphasis. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0048] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0049] The following is for reference. Figures 3-19 The specific structure of the high-temperature furnace in an embodiment of the present invention is described.

[0050] This invention discloses a high-temperature furnace, such as Figures 3-4As shown, the high-temperature furnace of this embodiment includes a shell 1, a quartz tube 3, and a locking structure 2. The shell 1 includes multiple spliced ​​side plates, which together form a receiving cavity. The quartz tube 3 is disposed within the receiving cavity. The locking structure 2 is used to release or lock any two adjacent side plates. It can be understood that, since the shell 1 includes multiple spliced ​​side plates, and the side plates are connected by the locking structure 2, in the actual assembly process, the multiple side plates can be locked sequentially through the locking structure 2, leaving only one side plate extending along the length direction of the quartz tube 3 unlocked. Then, the quartz tube 3 is inserted into the receiving cavity from a direction perpendicular to the length direction of the quartz tube 3. Finally, this side plate is locked to the other side plates. This way, when actually assembling or disassembling the quartz tube 3, it is not necessary to pull out or push the quartz tube 3 along its length direction, eliminating the need to reserve a large assembly space for the quartz tube 3 and reducing the footprint of the high-temperature furnace. Meanwhile, since multiple side plates are locked together by the locking structure 2, the dimensions of the accommodating cavity can be adjusted in the horizontal or vertical direction according to the size of the quartz tube 3 during actual operation. This allows the high-temperature furnace of this embodiment to better meet the needs of various production capacities and improve the compatibility of the high-temperature furnace.

[0051] Furthermore, in existing technologies, the insulation material used with cylindrical furnace plates requires multiple processes, including inner circle positioning, outer circle trimming, and end face cutting, resulting in complex manufacturing. In this embodiment, however, the insulation material can be divided into multiple pieces, with one piece of insulation material on each side plate. This eliminates the need for the inner circle positioning, outer circle trimming, and end face cutting processes required in existing technologies, simplifying the manufacturing process and reducing the manufacturing cost of the high-temperature furnace.

[0052] In some embodiments, such as Figure 5 As shown, the multiple side panels include a front side panel 11, a rear side panel 12, a left side panel 15, a right side panel 16, an upper side panel 14, and a lower side panel 13; wherein: the upper side panel 14 and the lower side panel 13 are respectively connected to the left side panel 15 through multiple locking structures 2; the upper side panel 14 and the lower side panel 13 are respectively connected to the right side panel 16 through multiple locking structures 2; the left and right walls of the front side panel 11 are respectively connected to the upper side panel 14 and the lower side panel 13 through multiple locking structures 2; the left and right walls of the rear side panel 12 are respectively connected to the upper side panel 14 and the lower side panel 13 through multiple locking structures 2.

[0053] It is understood that, since the multiple side plates include the front side plate 11, rear side plate 12, left side plate 15, right side plate 16, upper side plate 14, and lower side plate 13, the cross-section of the shell 1 of the high-temperature furnace is quadrilateral, thus forming a cuboid shape. This shape facilitates installation and disassembly and provides good stability during use. In other embodiments of the present invention, the cross-section of the high-temperature furnace can also be other shapes, such as triangular, pentagonal, hexagonal, etc., and is not limited to the quadrilateral shape of this embodiment.

[0054] It should be further explained that, in this embodiment, the upper side plate 14 and the lower side plate 13 are respectively connected to the left side plate 15 through multiple locking structures 2; the upper side plate 14 and the lower side plate 13 are respectively connected to the right side plate 16 through multiple locking structures 2; the left and right walls of the front side plate 11 are respectively connected to the upper side plate 14 and the lower side plate 13 through multiple locking structures 2; the left and right walls of the rear side plate 12 are respectively connected to the upper side plate 14 and the lower side plate 13 through multiple locking structures 2. That is to say, in the technical solution disclosed in this embodiment, no locking structures 2 are provided between the front side plate 11 and the left side plate 15, the front side plate 11 and the right side plate 16, the rear side plate 12 and the left side plate 15, and the rear side plate 12 and the right side plate 16. In this way, while ensuring the assembly stability of the entire shell 1, the number of locking structures 2 is reduced, the assembly efficiency of the shell 1 is improved, and the manufacturing cost of the shell 1 is reduced. Of course, in other embodiments of the present invention, the specific connection forms of the front side plate 11, rear side plate 12, upper side plate 14, lower side plate 13, left side plate 15 and right side plate 16 can be selected according to actual needs, and the position and number of the locking structure 2 can also be selected according to actual assembly requirements, and are not limited to the structure described above.

[0055] Preferably, the shell 1 of the high-temperature furnace has a quadrilateral cross-section. It is understood that, because existing furnaces are cylindrical, the distance between the rectangular silicon wafer 5 and the heating elements inside the furnace is not uniform during actual heating, resulting in uneven heating of the silicon wafer 5. In this embodiment, however, the shell 1 of the high-temperature furnace has a quadrilateral cross-section. During actual heating, the distance between the sidewall of the silicon wafer 5 and the four sidewalls of the high-temperature furnace is fixed, allowing the silicon wafer 5 to be heated more evenly.

[0056] In some specific embodiments, such as Figures 11-12As shown, the front panel 11 includes two splicing plates, which are spliced ​​together by a locking structure 2 or a splicing fastener 4. It can be understood that in actual assembly, the front panel 11 generally has mating holes for the quartz tube 3 to pass through. If the front panel 11 is designed as a single piece, when the quartz tube 3 is removed from the mounting cavity, it will also be attached to the front panel 11. The front panel 11 can only be removed along the length of the quartz tube 3, increasing the difficulty of replacing or installing the quartz tube 3. In this embodiment, the front panel 11 is designed as a splicing plate, so that only the two splicing plates need to be disassembled to remove the front panel 11 from the quartz tube 3, making installation and disassembly very convenient.

[0057] In some more specific embodiments, such as Figure 11 As shown, the splicing fastener 4 includes two fixing ears 41 and two fixing bolts 42. The two fixing ears 41 are connected to the splicing plate by welding or by connectors (which can be any of screws, pins, or rivets). Therefore, in the actual installation or disassembly process, it is only necessary to remove the fixing bolts 42 from the two fixing ears 41, which not only facilitates the installation and disassembly of the two splicing plates, but also ensures the connection stability of the two splicing plates.

[0058] In some embodiments, such as Figures 6-7 As shown, the locking structure 2 includes a locking element 21 and an operating element 22. The locking element 21 and operating element 22 are respectively disposed on two side plates of the housing 1. The operating element 22 has a locked state that cooperates with the locking element 21 and a released state that is separated from the locking element 21. In the locked state, the locking structure 2 can lock the two side plates of the housing 1; in the released state, the locking structure 2 can release the two side plates of the housing 1. It can be understood that in the actual structure, the locking element 21 and operating element 22 can be positioned according to actual needs. In actual use, the operator only needs to drive the operating element 22 to complete the connection and disassembly between the two side plates. Specifically, during installation, after placing the two side plates in the designated position, the operator only needs to drive the operating element 22 from the released state to the locked state, so that the operating element 22 and the locking element 21 are locked, thus completing the assembly of the two side plates. During disassembly, the operator only needs to drive the operating element 22 from the locked state to the released state, so that the operating element 22 and the locking element 21 are disengaged, thus completing the disassembly of the two side plates.

[0059] In some specific embodiments, such as Figure 8As shown, the locking member 21 is provided with a locking groove 211. The operating member 22 includes a support 221, a rotating handle 222 and a locking member 223. The support 221 is connected to the side plate of the housing 1. The rotating handle 222 is rotatably mounted on the support 221. One end of the locking member 223 is rotatably connected to the rotating handle 222. In the locked state, the other end of the locking member 223 can engage in the locking groove 211. In the released state, the other end of the locking member 223 disengages from the locking groove 211. Understandably, in actual operation, if the operating component 22 is in the released state, it is only necessary to first rotate the locking component 223 to engage it in the latching groove 211, and then drive the rotating handle 222 to rotate, so that the rotating handle 222 and the locking component 223 are collinear. At this time, the rotating handle 222 is locked against the locking component 223, and even if a force is applied to the locking component 223, the locking component 223 will not rotate, thus ensuring the locking stability of the locking component 223 and the latching component 21 in the locked state, thereby ensuring the connection stability of the two side plates. If the operating component 22 is in the locked state, it is only necessary to drive the rotating handle 222 to release it from the locking component 223, and then rotate the locking component 223 to disengage it from the latching groove 211, thus completing the release of the locking component 223.

[0060] In some specific embodiments, such as Figure 8 As shown, the rotating handle 222 has a pivot hole, and a rotating shaft 226 fits into the pivot hole; the locking member 223 is a U-shaped rod. In the locked state, the closed end of the U-shaped rod fits into the locking groove 211, and the two branches of the U-shaped rod pass through the rotating shaft 226 and are fixed by the limiting nut 227. It can be understood that the U-shaped rod of the locking member 223 can improve the connection stability between the locking member 223 and the locking groove 211, thereby ensuring that the locking member 223 and the locking member 21 can be stably locked in the locked state. The two branch rods of the U-shaped rod are inserted through the rotating shaft 226 and fixed by the limiting nut 227. That is to say, in the actual working process, the distance between the mating position of the entire locking part 223 and the locking groove and the rotating shaft 226 line of the locking part 223 can be adjusted by adjusting the position of the branch rod. As mentioned above, the dimensions of the receiving cavity in the horizontal or vertical direction can be adjusted. That is to say, the position of the side plate will change. The distance between the mating position of the locking part 223 and the locking groove and the rotating shaft 226 line of the locking part 223 is adjustable, which can ensure that after the position of the side plate changes, the locking part 223 can still be stably locked with the locking buckle 21, ensuring the locking stability of the entire locking structure 2 for the two adjacent side plates.

[0061] Of course, it should be noted that in other embodiments of the present invention, the connection form of the locking member 21 and the operating member 22 can be selected according to actual needs. For example, in some embodiments, the locking member 21 is formed as a locking block, and the operating member 22 is provided with a locking groove. When locking is required, the operating member 22 is rotated so that the locking groove on the operating member 22 engages with the locking block. That is to say, the form of the locking member 21 and the operating member 22 is not limited to the above description.

[0062] In some specific embodiments, such as Figure 8 As shown, the operating component 22 also includes an adjusting plate 224 and an adjusting seat 225. The adjusting plate 224 is used to support the support 221. The adjusting plate 224 is provided with a first adjusting elongated hole 2241. The adjusting seat 225 is connected to the side plate of the housing 1. The adjusting seat 225 is provided with a second adjusting elongated hole 2251. The adjusting plate 224 and the adjusting seat 225 are connected by adjusting fixing members passing through the first adjusting elongated hole 2241 and the second adjusting elongated hole 2251. Understandably, as mentioned above, the dimensions of the receiving cavity along the horizontal or vertical direction are adjustable, and the position of the side plate will change. Therefore, after the side plate position changes, the engagement of the locking member 223 and the latching member 21 becomes difficult, and in some cases, the locking member 223 and the latching member 21 may not be able to engage at all. In this embodiment, by adding an adjusting plate 224 and an adjusting seat 225, the position of the operating member 22 on the side plate can be adjusted, thereby ensuring that the locking member 223 can still stably engage with the latching member 21 after the side plate position changes, ensuring the locking stability of the entire latching structure 2 for the two adjacent side plates. It should be noted that the adjusting fixing member in this embodiment can be selected from screws, bolts with nuts, pins, etc., according to actual needs; the specific type of adjusting fixing member is not limited here. Furthermore, the adjusting seat 225 can be fixed to the side plate by screws, pins, rivets, welding, etc.; the connection method between the adjusting seat 225 and the side plate of the housing 1 is not limited here.

[0063] In some more specific embodiments, such as Figure 8 As shown, the adjusting plate 224 is a U-shaped plate, and there are two adjusting seats 225, which are respectively connected to the two side walls of the U-shaped plate. This ensures the connection stability of the adjusting plate 224 and the adjusting seats 225, indirectly ensuring that the support 221, the rotating handle 222, and the locking member 223 can be stably held on the side plate, thereby ensuring that the locking member 223 can be stably locked with the locking buckle 21, and ensuring the locking stability of the entire locking structure 2 for adjacent side plates. Of course, it should be noted that in other embodiments of the present invention, the structure of the adjusting plate 224 and the adjusting seat 225 can be selected according to actual needs and is not limited to the description above.

[0064] In some embodiments, such as Figures 9-10 As shown, the side panel includes a shell 101, an insulation component 102, and a heating element 104. The shell has a mounting groove 1011, the insulation component 102 is disposed within the mounting groove 1011, and the insulation component 102 has a receiving groove 1021, within which the heating element 104 is disposed. It is understood that in the prior art, the furnace body is cylindrical, requiring the insulation component to also be cylindrical, and the furnace body needs a groove for mounting the heating element, resulting in an exceptionally complex manufacturing process. In this embodiment, the shell 1 is polygonal and composed of multiple side panels, allowing each side panel to have its own insulation component 102 and heating element 104, simplifying the processing and assembly process, improving the manufacturing efficiency of the high-temperature furnace, and reducing its manufacturing cost.

[0065] In some specific embodiments, such as Figures 9-10 As shown, there are multiple sets of heating wires 104, each of which can be controlled individually. The outer casing has multiple pairs of insulated lead holders 105, each pair of which engages with the lead wire of one set of heating wires 104. It can be understood that because multiple sets of heating wires 104 can be controlled individually, different temperature zones can be formed inside the casing according to actual needs during operation, thereby better heating of the silicon wafer. At the same time, the added insulated lead holders 105 facilitate the lead wires of the heating wires 104, thus simplifying assembly.

[0066] In some embodiments, such as Figures 16-17 As shown, the side plate extending along the length of the shell includes multiple splicing sub-plates 106, which are sequentially spliced ​​together along the length of the shell via a locking structure 2. It can be understood that since the side plate extending along the length of the shell includes multiple splicing sub-plates 106, the length of the entire shell can be adjusted according to the length of the quartz tube 3 during actual use. This allows the high-temperature furnace of this embodiment to be compatible with quartz tubes of multiple sizes, better meeting user needs.

[0067] Example 1:

[0068] like Figures 3-12As shown, the high-temperature furnace of this embodiment includes a shell 1, a quartz tube 3, and a locking structure 2. The shell 1 includes a front side plate 11, a rear side plate 12, a left side plate 15, a right side plate 16, an upper side plate 14, and a lower side plate 13, and the shell 1 defines an installation cavity. The quartz tube 3 is disposed in the installation cavity. The quartz tube 3 is cylindrical, and multiple support blocks 6 for supporting the quartz tube 3 are provided between the quartz tube 3 and the lower side plate 13. The left side plate 15 is connected to the upper side plate 14 through four spaced-apart locking structures 2, and is also connected to the lower side plate 13 through four spaced-apart locking structures 2. The right side plate 16 is connected to the upper side plate 14 through four spaced-apart locking structures 2, and is also connected to the lower side plate 13 through four spaced-apart locking structures 2. The left side wall of the front side plate 11 is connected to the upper side plate 14 and the lower side plate 13 through two locking structures 2, respectively. The right side wall of the front side plate 11 is connected to the upper side plate 14 and the lower side plate 13 through two locking structures 2, respectively. The left side wall of the rear side panel 12 is connected to the upper side panel 14 and the lower side panel 13 respectively via two locking structures 2, and the right side wall of the rear side panel 12 is connected to the upper side panel 14 and the lower side panel 13 respectively via two locking structures 2. Figures 9-10 As shown, the upper side plate 14, lower side plate 13, left side plate 15, and rear side plate 12 each include a housing 101, an insulation component 102, a pressure plate 103, and a heating wire 104. The housing 101 has a mounting groove 1011, the insulation component 102 is disposed in the mounting groove 1011, and the insulation component 102 has a receiving groove 1021, in which the heating wire 104 is disposed. The pressure plate 103 is connected to the housing 101 and is used to press the insulation component 102 into the mounting groove 1011. The housing 101 of the left side plate 15 and the right side plate 16 is provided with an insulating lead seat 105, and the left side wall of the upper side plate 14 and the lower side plate 13 and the right side plate 16 are provided with an insulating lead seat 105. The front side plate 11 has two structures, such as... Figure 11 As shown, the front panel 11 includes two splicing plates, which are joined together by a splicing fastener 4. The splicing fastener 4 includes two fixing ears 41 and two fixing bolts 42. The two fixing ears 41 are connected to the splicing plates by screws. Figure 12 As shown, the front panel 11 includes two splicing plates, which are locked together by a locking structure 2.

[0069] like Figures 6-8As shown, the locking structure 2 includes a locking element 21 and an operating element 22, which are respectively disposed on the two side plates of the housing 1. The operating element 22 has a locked state that cooperates with the locking element 21 and a released state that is separated from the locking element 21; in the locked state, the locking structure 2 can lock the two side plates of the housing 1; in the released state, the locking structure 2 can release the two side plates of the housing 1. The locking element 21 is provided with a locking groove 211 and is connected to the side plate of the housing 1 by screws. The operating element 22 includes a support 221, a rotating handle 222, a locking element 223, an adjusting plate 224, and an adjusting seat 225. The support 221 is connected to the adjusting seat 225 plate by four screws. The rotating handle 222 is rotatably disposed on the support 221. The rotating handle 222 is provided with a rotating shaft hole, and a rotating shaft 226 is fitted in the rotating shaft hole. The locking component 223 is a U-shaped rod. In the locked state, the closed end of the U-shaped rod fits into the locking groove 211. The two branches of the U-shaped rod pass through the rotating shaft 226 and are fixed by the limiting nut 227. The adjusting plate 224 is provided with a first adjusting elongated hole 2241. The adjusting seat 225 is connected to the side plate of the housing 1 by screws. The adjusting seat 225 is provided with a second adjusting elongated hole 2251. The adjusting plate 224 and the adjusting seat 225 are connected by adjusting fixing components passing through the first adjusting elongated hole 2241 and the second adjusting elongated hole 2251.

[0070] Example 2:

[0071] like Figures 13-15 As shown, the structure of the high-temperature furnace in this embodiment is roughly the same as that in Embodiment 1, except that the quartz tube 3 in this embodiment is a square tube.

[0072] Example 3:

[0073] like Figures 16-17 As shown, the structure of the high-temperature furnace in this embodiment is roughly the same as that in Embodiment 1. The difference is that the left side plate 15, right side plate 16, upper side plate 14 and lower side plate 13 in this embodiment are all spliced ​​together by two splicing sub-plates 106 through the locking structure 2.

[0074] Example 4:

[0075] like Figures 18-19 As shown, the structure of the high-temperature furnace in this embodiment is roughly the same as that in Embodiment 1. The difference is that the shell in this embodiment includes a semi-circular side plate 107, and the two semi-circular side plates 107 are spliced ​​together by a plurality of locking structures 2 spaced apart along the length direction.

[0076] The advantages of the high-temperature furnace in this embodiment of the invention are as follows:

[0077] First: Since the shell 1 includes multiple spliced ​​side plates, and the side plates are connected by the locking structure 2, when actually assembling or disassembling the quartz tube 3, it is not necessary to pull out or push the quartz tube 3 from the length direction of the quartz tube 3, and there is no need to reserve a large assembly space for the quartz tube 3, thus reducing the floor area of ​​the high-temperature furnace.

[0078] Second: Since multiple side plates are locked together by the locking structure 2, the dimensions of the accommodating cavity along the horizontal or vertical direction can be adjusted according to the size of the quartz tube 3 during actual operation, so that the high-temperature furnace of this embodiment can better meet the needs of various production capacities and improve the compatibility of the high-temperature furnace.

[0079] Third: The operating component 22 of the locking structure 2 includes an adjusting seat 225 and an adjusting plate 224. The positions of the adjusting seat 225 and the adjusting plate 224 can be adjusted according to actual needs, thereby ensuring that after the position of the side plate changes, the locking component 223 can still be stably locked with the locking component 21, thus ensuring the locking stability of the entire locking structure 2 for the two adjacent side plates.

[0080] Fourth: In Examples 1-3, heating wires 104 and heat preservation components 102 are provided on the left side plate 15, right side plate 16, upper side plate 14 and lower side plate 13. Compared with the structure of the cylindrical furnace body in the prior art, the processing technology and assembly process of this high-temperature furnace are relatively simple, which can improve manufacturing efficiency and reduce the manufacturing cost of the high-temperature furnace.

[0081] Fifth: The insulating lead holders 105 are all located on the left and right sides of the housing 1, which avoids the risk of short circuit when the lead wire of the heating wire 104 passes through the inside of the insulation component 102. The side lead wire is convenient for connecting to the external control circuit. At the same time, even if the side insulation component 102 is thickened, it will not affect the height dimension of the machine tool, and the insulation performance can be better.

[0082] Sixth: In Examples 1-3, the cross-section of the mounting cavity is rectangular, and the silicon wafer 5 itself is also rectangular. The heating wires 104 are arranged on the four sides of the silicon wafer 5, and the heat transfer distance from the heating wires 104 to the product is basically the same, which makes the temperature uniformity around the product better.

[0083] In the description of this specification, references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0084] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A high-temperature furnace, characterized in that, include: The housing (1) includes multiple side plates that are spliced ​​together, and the multiple side plates enclose a receiving cavity; Quartz tube (3), wherein the quartz tube (3) is disposed within the receiving cavity; The locking structure (2) is used to release or lock any two adjacent side plates among the plurality of side plates; The plurality of side panels include a front side panel (11), a rear side panel (12), a left side panel (15), a right side panel (16), an upper side panel (14), and a lower side panel (13); wherein: The upper side plate (14) and the lower side plate (13) are respectively connected to the left side plate (15) through multiple locking structures (2); The upper side plate (14) and the lower side plate (13) are respectively connected to the right side plate (16) through multiple locking structures (2); The left and right sides of the front side panel (11) are connected to the upper side panel (14) and the lower side panel (13) respectively by a plurality of the locking structures (2); The left and right sides of the rear side panel (12) are connected to the upper side panel (14) and the lower side panel (13) respectively by a plurality of the locking structures (2); The locking structure (2) includes a locking element (21) and an operating element (22). The locking element (21) and the operating element (22) are respectively disposed on the two side plates of the housing (1). The operating element (22) has a locked state that cooperates with the locking element (21) and a released state that is separated from the locking element (21). In the locked state, the locking structure (2) can lock the two side plates of the housing (1). In the released state, the locking structure (2) can release the two side plates of the housing (1).

2. The high-temperature furnace according to claim 1, characterized in that, The front panel (11) includes two splicing panels, which are spliced ​​together by the locking structure (2) or the splicing fastener (4).

3. The high-temperature furnace according to claim 1, characterized in that, The locking member (21) is provided with a locking groove (211), and the operating member (22) includes: Support (221), said support (221) being connected to the side plate of the housing (1); Rotate the handle (222), which is rotatably mounted on the support (221); A locking member (223) is provided, one end of which is rotatably connected to the rotating handle (222). In the locked state, the other end of the locking member (223) can engage in the latch groove (211). In the released state, the other end of the locking member (223) disengages from the latch groove (211).

4. The high-temperature furnace according to claim 3, characterized in that, The rotating handle (222) is provided with a rotating shaft hole, and a rotating shaft (226) is fitted in the rotating shaft hole; the locking member (223) is a U-shaped rod. In the locked state, the closed end of the U-shaped rod is fitted in the locking groove (211), and the two branch rods of the U-shaped rod pass through the rotating shaft (226) and are fixed by the limiting nut (227).

5. The high-temperature furnace according to claim 3, characterized in that, The operating element (22) also includes: An adjusting plate (224) is provided to support the support (221), and the adjusting plate (224) is provided with a first adjusting elongated hole (2241); An adjusting seat (225) is connected to the side plate of the housing (1). The adjusting seat (225) is provided with a second adjusting elongated hole (2251). The adjusting plate (224) and the adjusting seat (225) are connected by adjusting fasteners passing through the first adjusting elongated hole (2241) and the second adjusting elongated hole (2251).

6. The high-temperature furnace according to claim 5, characterized in that, The adjusting plate (224) is a U-shaped plate, and there are two adjusting seats (225), which are respectively connected to the two side walls of the U-shaped plate.

7. The high-temperature furnace according to any one of claims 1-6, characterized in that, The side plate includes: The housing (101) has a mounting groove (1011); Insulation component (102), wherein the insulation component (102) is disposed in the mounting groove (1011), and the insulation component (102) is provided with a receiving groove (1021); Heating wire (104) is disposed in the receiving tank (1021).

8. The high-temperature furnace according to claim 7, characterized in that, The heating element (104) is in multiple sets, and each set of heating element (104) can be controlled individually; the outer shell (101) is provided with multiple pairs of insulated lead seats (105), and each pair of insulated lead seats (105) is matched with the lead wire of one set of heating element (104).

9. The high-temperature furnace according to any one of claims 1-6, characterized in that, The side panel extending along the length of the housing includes multiple splicing sub-panels (106), which are sequentially spliced ​​together along the length of the housing via the locking structure (2).

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