Light source detection device and UV curing machine

Abstract

An embodiment of the present invention provides a light source detection device and a UV curing machine, relating to the field of semiconductor technology. The light source detection device includes a mounting body, a blocking piece, and a light intensity detection component. The mounting body is provided with an opening, and the opening is used to connect the inner cavity of the UV curing machine with the outside. The blocking piece is movably provided on the mounting body, and the blocking piece can be moved relative to the mounting body to open or close the opening. The light intensity detection component is used to extend into the inner cavity of the UV curing machine through the opening when the blocking piece opens the opening to detect the light intensity of the UV light source in the UV curing machine. The light source detection device can conveniently realize the light intensity detection of the UV light source of the UV curing machine.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, in particular to a light source detection device and a UV curing machine. Background Art

[0002] In the semiconductor industry, wafers require UV light to rapidly cure photoresist after the lithography and development processes. The uniformity of the UV light source's illumination during the curing process is a critical parameter. To ensure this uniformity, UV illumination often requires measurement at multiple locations.

[0003] Direct exposure to UV light can cause adverse reactions in people, and prolonged exposure can cause harm to the human body. However, existing measurement methods require frequent opening and closing of light sources and hatches when measuring multiple different points, making detection more troublesome. Summary of the Invention

[0004] The objects of the present invention include, for example, providing a light source detection device and a UV curing machine, which can conveniently realize the illumination measurement of the UV light source of the UV curing machine.

[0005] The embodiments of the present invention can be implemented as follows:

[0006] In a first aspect, the present invention provides a light source detection device for use in a UV curing machine, wherein the light source detection device comprises a mounting body, a blocking member, and a light intensity detection assembly;

[0007] The mounting body is provided with an opening, and the opening is used to connect the inner cavity of the UV curing machine with the outside;

[0008] The blocking member is movably disposed on the mounting body, and the blocking member can move relative to the mounting body to open or close the opening;

[0009] The light intensity detection component is used to extend into the inner cavity of the UV curing machine through the opening when the blocking member opens the opening to detect the light intensity of the UV light source in the UV curing machine.

[0010] In an optional embodiment, the blocking member is rotatably disposed on the mounting body, and a through groove is provided on the blocking member;

[0011] When the blocking member rotates to a position where the through groove is connected to the opening, the opening is in an open state;

[0012] When the blocking member rotates to a position where the through groove is not connected to the opening, the opening is in a closed state.

[0013] In an optional embodiment, when the opening is in an open state, the light intensity detection component extends into the opening and the through groove in sequence, and the light intensity detection component can move relative to the blocking member and / or drive the blocking member to rotate to adjust the angle and length of the light intensity detection component extending into the inner cavity of the UV curing machine.

[0014] In an optional embodiment, the light source detection device further includes a positioning component, which is disposed on the mounting body. The light intensity detection component is movable relative to the positioning component to position the angle at which the light intensity detection component extends into the opening.

[0015] In an optional embodiment, the positioning assembly includes a positioning plate and a plurality of positioning posts spaced apart on the positioning plate, the positioning plate is arranged on the mounting body, the light intensity detection assembly is provided with a positioning groove, one of the plurality of positioning posts is inserted in the positioning groove, and the light intensity detection assembly can slide relative to the positioning post, so that the light intensity detection assembly can extend into the inner cavity of the UV curing machine at a preset angle to the positioning post inserted in the positioning groove.

[0016] In an optional embodiment, the positioning assembly further includes a second torsion spring and a fixing member, the positioning plate is rotatably disposed on the mounting body via the fixing member, the second torsion spring is sleeved on the fixing member, and one end of the second torsion spring is connected to the positioning plate, and the other end is connected to the mounting body, the second torsion spring is used to reset the positioning plate so that one of the multiple positioning columns is inserted into the positioning slot.

[0017] In an optional embodiment, the light source detection device further includes an elastic member, one end of which is connected to the blocking member, and the other end of which is connected to the mounting body, and the elastic member is used to reset the blocking member so that the blocking member closes the opening.

[0018] In an optional embodiment, the elastic member is a torsion spring, a connecting portion is provided on the sealing member, a fixing portion is provided on the mounting body, the torsion spring is sleeved on the sealing member, and one end of the torsion spring is connected to the fixing portion, and the other end is connected to the connecting portion.

[0019] In an optional embodiment, the light intensity detection component includes a guide rod and a UV light intensity measuring sensor, the UV light intensity measuring sensor is arranged on the guide rod, the guide rod is used to cooperate with the mounting body or the blocking member for guidance, and the UV light intensity measuring sensor is used to detect the light intensity of the UV curing machine.

[0020] In an optional embodiment, the light intensity detection component includes a total reflection prism, the UV light illuminance measurement sensor is arranged at the end of the guide rod along the axial direction of the guide rod, the total reflection prism is arranged on the guide rod, and the total reflection prism is located in the light incident direction of the UV light illuminance measurement sensor, and the total reflection prism is used to reflect light to the UV light illuminance measurement sensor.

[0021] In an optional embodiment, the light intensity detection assembly further includes a metal guide block, which is disposed on a side of the total reflection prism away from the UV light intensity measurement sensor, and is used to protect the total reflection prism and provide guidance.

[0022] In an optional embodiment, a ruler is provided on the guide rod, and the ruler is used to read the length of the light intensity detection component extending into the inner cavity of the UV curing machine.

[0023] In an optional embodiment, the light intensity detection assembly further includes a handle and a signal amplifier, wherein the handle is disposed at an end of the guide rod away from the UV light intensity measurement sensor, and the signal amplifier is disposed in the handle and electrically connected to the UV light intensity measurement sensor.

[0024] In an optional embodiment, the light source detection device further includes a driving member connected to the blocking member, and the driving member is used to drive the blocking member to move so that the blocking member opens and / or closes the opening.

[0025] In the second aspect, the present invention provides a UV curing machine, comprising a UV curing machine body and a light source detection device described in any one of the aforementioned embodiments, the UV curing machine having an inner cavity, the side wall of the inner cavity being provided with a through hole, the mounting body being provided on the UV curing machine body, and the through hole corresponding to the opening.

[0026] The beneficial effects of the light source detection device and UV curing machine provided by the embodiments of the present invention include:

[0027] The present application arranges a blocking piece movably on the mounting body, thereby conveniently opening the opening arranged on the mounting body through the blocking piece to allow the light intensity detection component to extend into the inner cavity of the UV curing machine through the opening, and by controlling the length and angle of the light intensity detection component extending into the inner cavity, it is possible to measure multiple points of the UV light source without frequently opening the hatch of the UV curing machine and closing the UV light source. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 A schematic diagram of the structure of a UV curing machine provided in an embodiment of the present invention;

[0030] Figure 2 A schematic structural diagram of a light source detection device provided in an embodiment of the present invention;

[0031] Figure 3 A schematic cross-sectional view of the structure of a light source detection device provided in an embodiment of the present invention;

[0032] Figure 4 A schematic structural diagram of a light intensity detection component of a light source detection device provided in an embodiment of the present invention;

[0033] Figure 5 This is a structural diagram of the light source detection device provided by an embodiment of the present invention without the light intensity detection component.

[0034] Icons: 100-light source detection device; 110-mounting body; 111-opening; 113-fixing plate; 115-rotating shaft hole; 117-fixing part; 130-sealing part; 131-through groove; 133-rotating shaft; 135-connecting part; 150-light intensity detection component; 151-guide rod; 153-UV light intensity measurement sensor; 155-total reflection prism; 157-metal guide block; 159-handle; 161-signal amplifier; 163-positioning slide; 165-scale; 170-elastic part; 180-wrench; 190-positioning component; 191-positioning plate; 193-guide column; 195-second torsion spring; 197-fixing part; 210-scale baffle; 220-wear-resistant sheet; 300-UV glue curing machine; 310-UV glue curing machine body. DETAILED DESCRIPTION

[0035] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0036] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0037] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0038] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the accompanying drawings, or is the orientation or position relationship in which the product of the invention is usually placed when in use. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be understood as a limitation on the present invention.

[0039] In addition, the terms "first", "second", etc., if used, are merely used to distinguish and describe, and should not be understood as indicating or implying relative importance.

[0040] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0041] Please refer to Figure 1 , this embodiment provides a UV curing machine 300. The UV curing machine 300 includes a UV curing machine body 310 and a light source detection device 100. The UV curing machine body 310 has an inner cavity, in which a UV light source for curing photoresist is provided (not shown). The side wall of the inner cavity is provided with a through hole (not shown). The light source detection device 100 is arranged on the outside of the UV curing machine body 310 and corresponds to the through hole.

[0042] Please refer to Figure 2 、 Figure 3 、 Figure 4 and Figure 5In this embodiment, the light source detection device 100 includes a mounting body 110, a blocking member 130 and a light intensity detection assembly 150. The mounting body 110 is provided with an opening 111, and the mounting body 110 is fixedly connected to the UV curing machine 300, and the opening 111 is connected to the through hole. The blocking member 130 is movably provided on the mounting body 110, and the blocking member 130 can move relative to the mounting body 110 to open or close the opening 111. The light intensity detection assembly 150 is used to extend into the inner cavity of the UV curing machine 300 through the opening 111 when the blocking member 130 opens the opening 111 to detect the light intensity of the UV light source in the UV curing machine 300.

[0043] In this embodiment, a blocking member 130 is movably provided on the mounting body 110, so that the opening 111 provided on the mounting body 110 can be conveniently opened through the blocking member 130 to allow the light intensity detection component 150 to extend into the inner cavity of the UV curing machine 300 through the opening 111, and by controlling the length and angle of the light intensity detection component 150 extending into the inner cavity, it is possible to measure multiple points of the UV light source without frequently opening the hatch of the UV curing machine 300 and closing the UV light source.

[0044] In this embodiment, the light intensity detection assembly 150 includes a guide rod 151 and a UV light intensity measurement sensor 153. The UV light intensity measurement sensor 153 is disposed within the guide rod 151. The guide rod 151 is configured to extend into the opening 111 to insert the UV light intensity measurement sensor 153 into the inner cavity to detect the light intensity of the UV light source in the UV curing machine 300.

[0045] In this embodiment, the guide rod 151 is provided so that the UV light intensity measurement sensor 153 can be conveniently delivered into the inner cavity by using the guide rod 151 , and the position of the UV light intensity measurement sensor 153 can be conveniently changed.

[0046] In this embodiment, the guide rod 151 is a hollow rectangular structure. The light intensity detection assembly 150 also includes a total reflection prism 155. The UV light intensity measurement sensor 153 is disposed within the guide rod 151 along the axial direction (i.e., the length direction) of the guide rod 151. The total reflection prism 155 is disposed on the guide rod 151 and is located in the direction of light incident on the UV light intensity measurement sensor 153. The total reflection prism 155 is used to reflect light to the UV light intensity measurement sensor 153.

[0047] In this embodiment, the UV light intensity measurement sensor 153 is arranged along the axial direction of the guide rod 151 and the total reflection prism 155 is provided so that the cross section of the light intensity detection component 150 can be made smaller, so that it can be better inserted into the inner cavity.

[0048] In this embodiment, the light intensity detection assembly 150 further includes a metal guide block 157 , which is disposed on a side of the total reflection prism 155 away from the UV light intensity measurement sensor 153 . The metal guide block 157 is used to protect the total reflection prism 155 and provide guidance.

[0049] In this embodiment, the metal guide block 157 is provided to prevent the total reflection prism 155 from being hit and causing the setting position to be changed or damaged when the light intensity detection component 150 hits other components in the inner cavity during movement and rotation.

[0050] Please refer to Figure 2 、 Figure 3 、 Figure 4 and Figure 5 In this embodiment, a scale 165 is provided on the guide rod 151 , and the scale 165 is used to read the length of the light intensity detection component 150 extending into the inner cavity of the UV curing machine 300 .

[0051] In this embodiment, the light intensity detection component 150 also includes a handle 159 and a signal amplifier 161. The handle 159 is arranged at one end of the guide rod 151 away from the UV light intensity measurement sensor 153. The signal amplifier 161 is arranged in the handle 159 and is electrically connected to the UV light intensity measurement sensor 153.

[0052] In this embodiment, the light intensity detection assembly 150 further includes a conversion display device, which is electrically connected to the amplifier and is used to display the light intensity measured by the UV light intensity sensor. Of course, in other embodiments of the present application, the conversion display device can also be integrated into the handle 159.

[0053] In this embodiment, a fixing plate 113 is provided on the mounting body 110 , and the fixing plate 113 is assembled to the UV curing machine body 310 by means of bolts.

[0054] In this embodiment, a blocking member 130 is rotatably mounted on the mounting body 110 and is provided with a through-slot 131. When the blocking member 130 is rotated to a position where the through-slot 131 communicates with the opening 111, the opening 111 is opened, allowing the guide rod 151 to extend through the through-slot 131 into the inner cavity of the UV curing machine 300. When the blocking member 130 is rotated to a position where the through-slot 131 is disconnected from the opening 111, the opening 111 is closed.

[0055] In this embodiment, the blocking member 130 is rotatably disposed on the mounting body 110 , thereby conveniently realizing the opening and closing of the opening 111 and changing the angle at which the light intensity detection assembly 150 enters the inner cavity.

[0056] Please refer to Figure 2 、 Figure 3 and Figure 4 In this embodiment, the blocking member 130 is cylindrical. The through-slot 131 is shaped identically to the guide rod 151 and slightly larger than the guide rod 151. The blocking member 130 is rotatably disposed within the opening 111, and the through-slot 131 is oriented in the same direction as the opening 111. This ensures that the guide rod 151 can be inserted into the through-slot 131 and can move while also providing a seal to prevent light from escaping.

[0057] In this embodiment, the blocking member 130 is rotatably disposed within the opening 111. The sidewalls of the blocking member 130 abut against the sidewalls of the opening 111, and the blocking member 130 is rotatable relative to the sidewalls of the opening 111. When the blocking member 130 rotates until the through-groove 131 and the opening 111 are oriented in the same direction, the opening 111 is opened. When the blocking member 130 rotates until the through-groove 131 is blocked by the sidewalls of the opening 111, the opening 111 is closed.

[0058] Specifically, the upper side wall and the lower side wall of the opening 111 are both provided with a shaft hole 115, and the two ends of the blocking member 130 are both provided with a shaft 133, which can be rotatably assembled in the shaft hole 115. The blocking member 130 can rotate along the shaft 133 to open or close the opening 111.

[0059] In this embodiment, the mounting body 110 comprises a base and a cover. A through-channel is recessed in the top of the mounting body 110, and the cover is mounted on the base. The cover and base enclose a channel to form an opening 111. Two rotational shaft holes 115 are respectively provided in the bottom wall of the through-channel and the cover. A guide sleeve and a spacer ring are sleeved around the rotational shaft 133 at the upper end of the end cap, facilitating the rotation of the end cap 130. Arc grooves with the same diameter as the end cap are provided on the sidewalls on either side of the opening 111, within which the end cap 130 is rotatably mounted.

[0060] Please refer to Figure 2 、 Figure 3 、 Figure 4 and Figure 5 In this embodiment, both ends of the opening 111 are diffused, that is, the cross-sectional area gradually increases toward both sides away from the end sealing member, so that the rotation angle of the guide rod 151 can be larger while the overall volume remains unchanged, thereby making the measurement area of the UV light intensity measurement sensor 153 larger.

[0061] In this embodiment, the light source detection device 100 further includes an elastic member 170, one end of which is connected to the blocking member 130 and the other end of which is connected to the mounting body 110. The elastic member 170 is used to reset the blocking member 130 so that the blocking member 130 closes the opening 111. By providing the elastic member 170, after the light intensity detection assembly 150 is withdrawn from the through-slot 131, the elastic member 170 can automatically and immediately drive the blocking member 130 to rotate, causing the blocking member to close the outlet and prevent light from being emitted.

[0062] Specifically, the elastic member 170 is a torsion spring. A connecting portion 135 is provided on the rotating shaft 133 at the lower portion of the blocking member 130. A fixing portion 117 is provided on the mounting body 110. The torsion spring is sleeved around the rotating shaft 133, with one end connected to the fixing portion 117 and the other end connected to the connecting portion 135. When the end member is rotated to open the opening 111, the torsion spring deforms, thereby storing force. When the light intensity detection assembly 150 is withdrawn from the through-slot 131, the torsion spring recovers its deformation, driving the blocking member 130 to rotate, thereby closing the opening 111.

[0063] In this embodiment, the light source detection device 100 further includes a wrench 180 . The wrench 180 is connected to a rotating shaft 133 provided on the blocking member 130 , so that the blocking member 130 can be driven to rotate by the wrench 180 .

[0064] Of course, in some other embodiments of the present application, the rotation of the blocking member 130 can be automatically controlled by a motor, a sensor and a switch to enable the blocking member 130 to open the opening 111 and automatically control the blocking member 130 to reset when the light intensity detection assembly 150 is pulled out.

[0065] Please refer to Figure 2 、 Figure 3 and Figure 4 Often, in a specific model of UV curing machine 300, the optimal detection point is also determined. In order to be able to quickly find the detection position during detection, in this embodiment, the light source detection device 100 also includes a positioning component 190, and the positioning component 190 is arranged on the mounting body 110. The light intensity detection component 150 can move relative to the positioning component 190 to locate the angle at which the light intensity detection component 150 extends into the opening 111.

[0066] Specifically, the positioning assembly 190 includes a positioning plate 191 and a plurality of positioning posts spaced apart on the positioning plate 191. The positioning plate 191 is mounted on the mounting body 110. A positioning slot 163 is provided on the guide post 193. One of the plurality of positioning posts is inserted into the positioning slot 163. The light intensity detection assembly 150 can slide relative to the positioning post, allowing the light intensity detection assembly 150 to extend into the inner cavity of the UV adhesive curing machine 300 at a preset angle corresponding to the positioning post inserted into the positioning slot 163.

[0067] The specific positioning principle is to use two points to determine a unique straight line. In this embodiment, the intersection of one of the multiple positioning posts and the guide rod 151, and the intersection of the rotation centerline of the blocking member 130 and the guide rod 151, can be used to determine the angle at which the light intensity detection assembly 150 extends into the cavity. The optimal measurement position can then be quickly and easily found by using the matching positioning point of the scale 165 on the guide rod 151 and the positioning post, thereby making the measurement more accurate and rapid. The location of each of the multiple positioning posts corresponds to a detection point corresponding to a preset insertion angle and preset insertion length.

[0068] Please refer to Figure 2 、 Figure 3 and Figure 4 In this embodiment, the positioning assembly 190 further includes a second torsion spring 195 and a fixing member 197. The positioning plate 191 is rotatably mounted on the mounting body 110 via the fixing member 197. The second torsion spring 195 is sleeved on the fixing member 197. One end of the second torsion spring 195 is connected to the positioning plate 191, and the other end is connected to the mounting body 110. The second torsion spring 195 is used to reset the positioning plate 191 so that the multiple positioning posts are selectively inserted into the positioning slots 163. The provision of the second torsion spring 195 facilitates the insertion of the positioning posts into the positioning slots 163.

[0069] In this embodiment, the number of the second torsion springs 195 and the number of the fixing members 197 are both two, so that the two sides of the positioning plate 191 are connected to the mounting body 110 in a one-to-one combination.

[0070] In this embodiment, the light source detection device 100 also includes a scale baffle 210, which is arranged on the mounting base body. A notch is provided on the scale baffle 210. When the guide rod 151 is extended into the through groove 131, it can move relative to the scale baffle 210, so that the value of the scale 165 of the guide rod 151 can be read through the notch.

[0071] In this embodiment, a wear-resistant sheet 220 is provided on the lower wall of the opening 111 . The wear-resistant sheet 220 is made of Teflon material, thereby preventing the guide rod 151 from being worn during movement and rotation.

[0072] The specific operating steps of the light source detection device 100 provided in this embodiment are:

[0073] 1. First, use the wrench 180 to drive the end sealing member to rotate so that the opening 111 is opened;

[0074] 2. Press down the positioning baffle, and extend the light intensity detection assembly 150 from the opening 111 into the through slot 131 , and push the light intensity detection assembly 150 to move so that the light intensity detection assembly 150 extends into the inner cavity;

[0075] 3. Loosen the positioning baffle and rotate the light intensity detection assembly 150 so that one of the multiple positioning posts extends into the positioning slot 163;

[0076] 4. Control the movement of the light intensity detection assembly 150 and read the value of the scale 165 through the notch of the scale baffle 210. Stop moving and rotating the light intensity detection assembly 150 when the value of the scale 165 corresponds to the value of the positioning post inserted into the positioning slot 163;

[0077] 5. Read the test results;

[0078] 6. Press down the positioning baffle and rotate the angle of the light intensity detection assembly 150 so that the other positioning post extends into the positioning slot 163;

[0079] 7. Repeat the above steps (4)-(6) until the measurement of the detection points is completed.

[0080] 8. Remove the light intensity detection component 150.

[0081] It should be noted that the sequence of the above operation steps can be adaptively adjusted and is not specifically limited in this embodiment.

[0082] In summary, the working principles and beneficial effects of the light source detection device 100 and UV curing machine 300 provided in the embodiments of the present invention include:

[0083] In this embodiment, a blocking member 130 is movably provided on the mounting body 110, so that the opening 111 provided on the mounting body 110 can be conveniently opened through the blocking member 130 to allow the light intensity detection component 150 to extend into the inner cavity of the UV curing machine 300 through the opening 111, and by controlling the length and angle of the light intensity detection component 150 extending into the inner cavity, it is possible to measure multiple points of the UV light source without frequently opening the hatch of the UV curing machine 300 and closing the UV light source.

[0084] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A light source detection device, characterized in that: Applied to UV curing machine, the light source detection device includes a mounting body, a blocking piece and a light intensity detection component; The mounting body is provided with an opening, and the opening is used to connect the inner cavity of the UV curing machine with the outside; The blocking member is movably disposed on the mounting body, and the blocking member can move relative to the mounting body to open or close the opening; The light intensity detection component is used to extend into the inner cavity of the UV curing machine through the opening when the blocking member opens the opening to detect the light intensity of the UV light source in the UV curing machine; The light source detection device further includes an elastic member, one end of which is connected to the blocking member, and the other end of which is connected to the mounting body. The elastic member is used to reset the blocking member so that the blocking member closes the opening.

2. The light source detection device according to claim 1, wherein: The blocking member is rotatably mounted on the mounting body, and a through slot is provided on the blocking member; When the blocking member rotates to a position where the through groove is connected to the opening, the opening is in an open state; When the blocking member rotates to a position where the through groove is not connected to the opening, the opening is in a closed state.

3. The light source detection device according to claim 2, wherein: When the opening is in an open state, the light intensity detection component extends into the opening and the through groove in sequence, and the light intensity detection component can move relative to the blocking member and / or drive the blocking member to rotate to adjust the angle and / or length of the light intensity detection component extending into the inner cavity of the UV curing machine.

4. The light source detection device according to claim 3, characterized in that: The light source detection device further includes a positioning component, which is disposed on the mounting body. The light intensity detection component is movable relative to the positioning component to position the angle at which the light intensity detection component extends into the opening.

5. The light source detection device according to claim 4, characterized in that: The positioning assembly includes a positioning plate and a plurality of positioning posts arranged at intervals on the positioning plate. The positioning plate is arranged on the mounting body. The light intensity detection assembly is provided with a positioning slot. One of the plurality of positioning posts is inserted into the positioning slot, and the light intensity detection assembly can slide relative to the positioning post, so that the light intensity detection assembly can extend into the inner cavity of the UV curing machine at a preset angle of the positioning post inserted in the positioning slot.

6. The light source detection device according to claim 5, characterized in that: The positioning assembly also includes a second torsion spring and a fixing piece, and the positioning plate is rotatably set on the mounting body through the fixing piece. The second torsion spring is sleeved on the fixing piece, and one end of the second torsion spring is connected to the positioning plate, and the other end is connected to the mounting body. The second torsion spring is used to reset the positioning plate so that one of the multiple positioning columns is inserted into the positioning slot.

7. The light source detection device according to claim 1, characterized in that: The elastic member is a torsion spring, the blocking member is provided with a connecting portion, the mounting body is provided with a fixing portion, the torsion spring is sleeved on the blocking member, and one end of the torsion spring is connected to the fixing portion, and the other end is connected to the connecting portion.

8. The light source detection device according to any one of claims 1 to 6, characterized in that: The light intensity detection component includes a guide rod and a UV light intensity measuring sensor. The UV light intensity measuring sensor is arranged on the guide rod. The guide rod is used to cooperate with the mounting body or the blocking member for guidance. The UV light intensity measuring sensor is used to detect the light intensity of the UV curing machine.

9. The light source detection device according to claim 8, characterized in that: The light intensity detection component includes a total reflection prism, the UV light illuminance measurement sensor is arranged at the end of the guide rod along the axial direction of the guide rod, the total reflection prism is arranged on the guide rod, and the total reflection prism is located in the light incident direction of the UV light illuminance measurement sensor, and the total reflection prism is used to reflect light to the UV light illuminance measurement sensor.

10. The light source detection device according to claim 9, characterized in that: The light intensity detection assembly further comprises a metal guide block, which is arranged on a side of the total reflection prism away from the UV light illumination measurement sensor, and is used to protect the total reflection prism and provide guidance.

11. The light source detection device according to claim 8, characterized in that: A ruler is provided on the guide rod, and the ruler is used to read the length of the light intensity detection component extending into the inner cavity of the UV glue curing machine.

12. The light source detection device according to claim 9, wherein: The light intensity detection component also includes a handle and a signal amplifier. The handle is arranged at an end of the guide rod away from the UV light intensity measurement sensor. The signal amplifier is arranged in the handle and is electrically connected to the UV light intensity measurement sensor.

13. The light source detection device according to any one of claims 1 to 6, characterized in that: The light source detection device further includes a driving member connected to the blocking member, and the driving member is used to drive the blocking member to move so that the blocking member opens and / or closes the opening.

14. A UV curing machine, characterized in that: It comprises a UV curing machine body and a light source detection device according to any one of claims 1 to 13, wherein the UV curing machine body has an inner cavity, the side wall of the inner cavity is provided with a through hole, the mounting body is provided on the UV curing machine body, and the through hole corresponds to the opening.

Images