Batch heat treatment furnace and heat treatment furnace system

Abstract

The present invention relates to an intermittent heat treatment furnace and a heat treatment furnace system, which can simply perform the installation operation of a treatment table. The treatment table for placing the treated object can be disassembled and assembled relative to the lifting bed of the heat treatment furnace body. When the treatment table is stopped from rotating at a speed V1 in the forward direction, first, when a detection signal is output from a position sensor (YES in S12), the treatment table is further rotated in the forward direction while the detection signal is output, and when the output detection signal stops (YES in S14), the rotation of the treatment table is stopped (S16). Next, the treatment table is rotated at a speed V2 in the reverse direction (S18), and when a detection signal is output from the position sensor (YES in S20), the rotation of the treatment table in the reverse direction is stopped (S22).

Description

Technical Field

[0001] The technology disclosed in this specification relates to a batch heat treatment furnace for heat-treating a workpiece (for example, a laminated ceramic component such as a ceramic capacitor, a ceramic piezoelectric element, or a ceramic resistor). Background Art

[0002] In the case of simultaneously performing heat treatment on multiple objects to be treated arranged in a furnace, in order to stabilize the characteristics of the multiple objects to be treated after heat treatment, it is necessary to give the same thermal history to the multiple objects to be treated. Therefore, in the intermittent heat treatment furnace of patent document 1, the furnace bed for carrying the objects to be treated is composed of a main furnace bed and a secondary furnace bed. The main furnace bed has a circular shape when viewed from above and can rotate around an axis passing through its center. The secondary furnace bed is arranged in an opening formed in the main furnace bed. The secondary furnace bed has a circular shape when viewed from above and can rotate around an axis passing through its center. The objects to be treated are placed on the upper surface of the secondary furnace bed. When the objects to be treated are heat treated, the secondary furnace bed itself rotates (so-called rotation), and the main furnace bed rotates so that the secondary furnace bed also rotates around the axis passing through the center of the main furnace bed (so-called revolution). Accordingly, the multiple objects to be treated placed on the upper surface of the secondary furnace bed are evenly heated and the objects to be treated are given the same thermal history.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2005-77001 Summary of the invention

[0006] However, in order to perform heat treatment on the treated object using an intermittent heat treatment furnace, it is necessary to place the treated object in the heat treatment furnace, perform heat treatment on the treated object placed in the furnace, and take the treated object out of the heat treatment furnace after heat treatment. In order to achieve efficient placement of the treated object in the furnace and taking it out of the furnace, the following scheme has been studied: a processing table is configured to be detachable relative to the bed surface of the furnace body and the treated object is placed on the detachable processing table. However, in the case of a structure in which the processing table is configured to be detachable relative to the bed surface of the furnace body, a driving device for rotationally driving the processing table is arranged on the bed surface of the furnace body. Therefore, in order to install the processing table on the bed surface of the furnace body, the processing table must be aligned in the rotation direction relative to the driving part of the driving device and they must be connected, which results in a problem that the operation for installing the processing table on the bed surface of the furnace body becomes complicated.

[0007] This specification discloses a technique for easily performing installation work of a processing table in a batch heat treatment furnace in which a processing table is detachably mounted on a floor of a furnace body.

[0008] The first batch heat treatment furnace disclosed in this specification comprises: a furnace body, which comprises a top wall, a side wall and a lifting bed; a processing table, which is configured to be rotatable relative to the lifting bed and can be used to carry a processed object; a driving device, which is arranged on the lifting bed, and the processing table is connected in a detachable manner and drives the processing table to rotate; a position sensor, which detects the position of the processing table in the rotation direction relative to the lifting bed; and a control device, which controls the driving device based on the detection result of the position sensor. The processing table comprises: a first rotating table, which is configured to have a circular shape when viewed from above and can rotate around a first axis passing through its center and extending in the vertical direction; and at least one second rotating table, which is configured to be arranged on the inner side of the first rotating table when viewed from above and can rotate around a second axis passing through its center and extending in the vertical direction. When viewed from above, the position of the center of the second rotating table is at a different position from the position of the center of the first rotating table. The lift bed is capable of moving between a first position in which the lower end of the side wall is open and a second position in which the lower end of the side wall is closed. When the lift bed is located at the first position, the processing table can be detached relative to the driving device. When the lift bed is located at the second position in a state in which the processing table is connected to the driving device, the upper surface of the first turntable and the upper surface of the second turntable are exposed in the furnace body. The driving device comprises: a first driving unit, which is arranged on a first axis and rotationally drives the first turntable; and a second driving unit, which is arranged on a second axis and rotationally drives the second turntable. The position sensor outputs a detection signal when the first turntable is within a preset angle range relative to the lift bed.

[0009] The control device is configured as follows: when the rotation of the first rotating table is stopped from a state where the first rotating table is rotating at a first speed along a first rotation direction, (1) when the detection signal is output from the position sensor, the first rotating table further rotates along the first rotation direction in the state where the detection signal is output, and when the output detection signal stops, the first rotating table is stopped; (2) after (1), the first rotating table is rotated in a second rotation direction in a direction opposite to the first rotation direction at a speed lower than the first speed, i.e., a second speed; and (3) when the detection signal is output from the position sensor in the state of (2), the first rotating table is stopped.

[0010] In the first intermittent heat treatment furnace described above, for example, when the object to be treated is subjected to heat treatment, the first turntable can be rotated at a first speed corresponding to the heat treatment to be applied to the object to be treated. On the other hand, when the heat treatment of the object to be treated is completed and the first turntable is stopped, the first turntable is stopped from a state of rotating along a second direction at a second speed in the order of (1) to (3) described above. The second speed can be set to: a constant speed that is less than the first speed and has nothing to do with the heat treatment applied to the object to be treated. Therefore, the first turntable stops when its position in the direction of rotation is a prescribed position (angle), and in addition, the driving unit (first driving unit and second driving unit) of the driving device connected to the first turntable also stops at an angle corresponding to the prescribed angle. Therefore, when installing the first turntable, the processing table can be connected to the driving unit of the driving device by adjusting the processing table to a prescribed angle in advance. Accordingly, the installation operation of the processing table to the driving device can be easily performed.

[0011] The second batch heat treatment furnace disclosed in this specification comprises: a furnace body, which comprises a top wall, a side wall and a lifting bed; a processing table, which is configured to be rotatable relative to the lifting bed and can be used to carry a processed object; a driving device, which is arranged on the lifting bed, and the processing table is connected in a detachable manner and drives the processing table to rotate; a position sensor, which detects the position of the processing table in the rotation direction relative to the lifting bed; and a control device, which controls the driving device based on the detection result of the position sensor. The processing table comprises: a first rotating table, which is configured to have a circular shape when viewed from above and can rotate around a first axis passing through its center and extending in the vertical direction; and at least one second rotating table, which is configured to be arranged on the inner side of the first rotating table when viewed from above and can rotate around a second axis passing through its center and extending in the vertical direction. When viewed from above, the position of the center of the second rotating table is at a different position from the position of the center of the first rotating table. The lift bed is capable of moving between a first position in which the lower end of the side wall is open and a second position in which the lower end of the side wall is closed. When the lift bed is located at the first position, the processing table can be detached relative to the driving device. When the lift bed is located at the second position in a state in which the processing table is connected to the driving device, the upper surface of the first turntable and the upper surface of the second turntable are exposed in the furnace body. The driving device comprises: a first driving unit, which is arranged on a first axis and rotationally drives the first turntable; and a second driving unit, which is arranged on a second axis and rotationally drives the second turntable. The position sensor outputs a detection signal when the first turntable is within a preset angle range relative to the lift bed.

[0012] The control device is configured as follows: when the rotation of the first rotating table is stopped from a state where the first rotating table rotates at a first speed along a first rotation direction, (1) when a detection signal is output from a position sensor, the first rotating table is stopped within a set angle range; (2) after (1), the first rotating table is rotated in a second rotation direction opposite to the first rotation direction; (3) when the detection signal output from the position sensor stops in the state of (2), the first rotating table is stopped; (4) after (3), the first rotating table is rotated in the first rotation direction at a second speed lower than the first speed; (5) when a detection signal is output from the position sensor in the state of (4), the first rotating table is stopped.

[0013] In the above-mentioned second intermittent heat treatment furnace, when the object to be treated is subjected to heat treatment, the first turntable can also be rotated at a first speed corresponding to the heat treatment to be applied to the object to be treated. On the other hand, when the heat treatment of the object to be treated is completed and the first turntable is stopped, the first turntable is stopped from a state of rotating along the first direction at a second speed in the order of (1) to (5) above. The second speed can be set to: a constant speed that is less than the first speed and has nothing to do with the heat treatment applied to the object to be treated. Therefore, in the second intermittent heat treatment furnace, when the first turntable is installed, the driving part of the driving device also changes to an angle corresponding to the specified angle. Therefore, the installation operation of the processing table to the driving device can be facilitated.

[0014] It should be noted that in the first batch heat treatment furnace or the second batch heat treatment furnace, the processing stage may include a plurality of second rotating tables. In a plan view, the plurality of second rotating tables may be arranged at different positions of the first rotating table without interfering with each other.

[0015] In addition, the heat treatment furnace system disclosed in this specification comprises: a plurality of intermittent heat treatment furnace bodies; and at least one processing table, which can be respectively detached and assembled with respect to the plurality of intermittent heat treatment furnace bodies. The processing table can be set as a processing table assembled in the first intermittent heat treatment furnace or the second intermittent heat treatment furnace. In addition, the plurality of intermittent heat treatment furnace bodies can respectively comprise: a furnace body assembled in the first intermittent heat treatment furnace or the second intermittent heat treatment furnace, a driving device, a position sensor, and a control device. In the above-mentioned heat treatment furnace system, the processing table can be shared for a plurality of intermittent heat treatment furnace bodies.

[0016] In addition, the heat treatment furnace system may further include: a transport vehicle for transporting the treatment stages to the plurality of batch heat treatment furnace bodies. Since the treatment stages can be shared, the transport vehicle for transporting the treatment stages can also be shared. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1This is a schematic diagram showing the schematic structure of the heat treatment furnace system according to Example 1.

[0018] Figure 2 This is a schematic diagram showing a batch-type heat treatment furnace body according to Example 1, a processing stage detachably provided with respect to the heat treatment furnace body, and a transport vehicle for transporting the processing stage.

[0019] Figure 3 It is a cross-sectional view showing a state where a processing table is installed in a heat treatment furnace body (a state where the lifting bed is lowered).

[0020] Figure 4 It is a cross-sectional view showing a state where a processing table is installed in a heat treatment furnace body (a state where the lifting bed is raised).

[0021] Figure 5 is a cross-sectional view of a heat treatment furnace body provided with a treatment station ( Figure 4 V-V cross-section diagram).

[0022] Figure 6 This is a side view showing a state where a processing table is installed on a lifting bed (however, illustration of the driving devices (20, 22) is omitted).

[0023] Figure 7 : is a top view showing a state where a processing table is installed on a lifting bed ( Figure 6 (above) The processing table and lifting bed are viewed from above.

[0024] Figure 8 This is a schematic diagram showing a schematic structure of a connection portion connecting the processing stage and the driving mechanism (a diagram showing a state where the processing stage and the driving mechanism are not connected).

[0025] Fig. 9 This is a schematic diagram showing a schematic structure of a connection portion connecting a processing table and a driving mechanism (a diagram showing a state where the processing table and the driving mechanism are connected).

[0026] Fig.10 This is a block diagram showing the structure of a control system of the heat treatment furnace body according to the first embodiment.

[0027] Fig.11 This is a flowchart showing the procedure of the stop process performed by the control unit when the rotation of the processing table is stopped in the heat treatment furnace body according to the first embodiment.

[0028] Fig.12 This is a timing chart for explaining the relationship between the driving state of the driving device when a stop signal is received from the production management device in the heat treatment furnace body involved in Example 1 and the signal output from the position sensor.

[0029] Fig.13 This is a flowchart showing the procedure of the stop processing performed by the control unit when the rotation of the processing table is stopped in the heat treatment furnace body according to the second embodiment.

[0030] Fig.14 This is a timing chart for explaining the relationship between the driving state of the driving device when a stop signal is received from the production management device in the heat treatment furnace body involved in Example 2 and the signal output from the position sensor.

[0031] Description of Reference Numerals

[0032] 100…heat treatment furnace system, A…loading area, B…unloading area, W…processed object, 10…heat treatment furnace, 11…furnace body, 12…ceiling wall, 14…side wall, 16…stand, 18…lifting bed, 20…driving mechanism, 22…driving device, 24…lifting device, 26…furnace interior space, 28…opening, 30…processing table, 32…large diameter portion, 33…small diameter portion, 34…main hearth, 36…auxiliary hearth, 38…claw, 40…position sensor, 42…second driving shaft, 44…second connecting portion, 46…first connecting portion, 48…support plate, 50…heater, 52…gas supply device, 54…control unit, 70…transport carriage. DETAILED DESCRIPTION

[0033] (Example 1) Hereinafter, a heat treatment furnace system 100 according to this embodiment will be described. First, a general structure of the heat treatment furnace system 100 will be described. Figure 1 As shown, a loading area A, an unloading area B, and a heat treatment area C are provided in the area where the heat treatment furnace system 100 is provided. The heat treatment furnace system 100 includes: a plurality of processing stations 30; a plurality of heat treatment furnace bodies 10, which are provided in the heat treatment area C; and a transport vehicle 70, which transports the processing stations 30 between the areas A, B, and C.

[0034] The processing table 30 has an upper surface for placing the processed object W. In the loading area A, the processed object W before heat treatment is placed on the upper surface of the processing table 30. The processing table 30 carrying the processed object W is transported to the heat treatment area C by using a conveying trolley 70. In the heat treatment area C, a conveying path connecting the loading area A and the unloading area B is provided, and a plurality of heat treatment furnace bodies 10 are provided along the conveying path. The heat treatment furnace body 10 is an intermittent heat treatment furnace for heat treating the processed object W. In the present embodiment, the processing table 30 can be installed on a plurality of heat treatment furnace bodies 10, respectively. Therefore, in the heat treatment furnace body 10 for installing the processing table 30, an appropriate heat treatment furnace body 10 is selected according to the operating conditions of the heat treatment furnace system 100. The processing table 30 transported to the heat treatment area C is transported to the selected heat treatment furnace body 10 and installed in the selected heat treatment furnace body 10. If the processing table 30 is installed, the heat treatment furnace body 10 performs heat treatment on the object W placed on the processing table 30. When the heat treatment of the object W is completed, the processing table 30 is taken out from the heat treatment furnace body 10. The taken out processing table 30 is transported to the unloading area B by the transport cart 70, and each processing table 30 is unloaded to the unloading area B.

[0035] It is clear from the above description that the heat treatment furnace system 100 of the present embodiment is equipped with: a plurality of heat treatment furnace bodies 10; and a plurality of processing tables 30, which are respectively installed on the above-mentioned plurality of heat treatment furnace bodies 10 in a detachable manner. Therefore, during the operation of the heat treatment furnace body 10 (for example, during the heat treatment of the object W), the object W to be heat treated next can be placed on other processing tables 30 for standby. In addition, after the heat treatment of the object W, the processing table 30 on which the object W after the heat treatment is placed can be removed from the heat treatment furnace body 10. Therefore, a new processing table 30 (that is, the processing table 30 on which the object W before the heat treatment is placed) can be installed on the heat treatment furnace body 10 after the processing table 30 is removed, and the next object W can be heat treated. Therefore, according to the heat treatment furnace system of the present embodiment, a plurality of heat treatment furnace bodies 10 can be operated efficiently, so that the heat treatment of the object W can be efficiently performed. It should be noted that the processing table 30 removed from the heat treatment furnace main body 10 may be placed in the unloading area B to cool the processed object W after the heat treatment.

[0036] On the other hand, if a plurality of heat treatment furnace bodies 10 share a processing table 30, it is necessary to install the processing table 30 on the heat treatment furnace body 10. As described later, the processing table 30 of the present embodiment has a main hearth 34 and a sub-hearth 36. In order to install the processing table 30 on the heat treatment furnace body 10, it is necessary to accurately position the processing table 30 in the rotation direction relative to the heat treatment furnace body 10. Therefore, in the heat treatment furnace body 10 of the present embodiment, when the rotation of the processing table 30 is stopped, the processing table 30 is stopped at a preset position (position in the rotation direction). Accordingly, it is possible to easily install the processing table 30 on the heat treatment furnace body 10. Below, the processing table 30, the conveying trolley 70 and the heat treatment furnace body 10 are described in detail.

[0037] First, the processing station 30 will be described. Figure 6 to Figure 9 As shown, the processing table 30 includes: a main hearth 34; and four auxiliary hearths 36 arranged on the main hearth 34. The main hearth 34 includes: a small diameter portion 33 located at the upper end; and a large diameter portion 32 located below the small diameter portion 33. The small diameter portion 33 and the large diameter portion 32 have a disc-shaped appearance, and are integrated in a manner such that their central axes are located on the same straight line. A recessed portion 34a that can engage with the drive mechanism 20 of the heat treatment furnace body 10 described later is formed in the center of the lower surface of the large diameter portion 32. In addition, a claw 38 (see Figure 6 , Figure 7 ). The claw 38 is constructed such that its upper end is fixed near the outer peripheral edge of the large diameter portion 32, and its lower end extends downward from the lower surface of the large diameter portion 32. The circumferential position of the large diameter portion 32 to which the claw 38 is fixed becomes a reference position for controlling the rotation stop position of the processing table 30. When the processing table 30 is installed on the heat treatment furnace body 10, the central axis of the main hearth 34 (small diameter portion 33 and large diameter portion 32) (i.e., a line passing through the center of the small diameter portion 33 and the large diameter portion 32 and extending in the up-down direction) is consistent with the axis of the heat treatment furnace body 10.

[0038] The auxiliary hearth 36 has a disc-like shape and is arranged to be rotatable relative to the main hearth 34. Specifically, a through hole is formed in the main hearth 34, which passes through the upper end surface (small diameter portion 33) to the lower end surface (large diameter portion 32), and the auxiliary hearth 36 is arranged in the through hole in a rotatable manner. That is, the auxiliary hearths 36 can respectively rotate around their axes (that is, lines passing through the center of the auxiliary hearth 36 and extending in the up-down direction). In the present embodiment, the four auxiliary hearths 36 are arranged at equal intervals in the circumferential direction (that is, the four auxiliary hearths 36 are arranged at intervals of 90° in the circumferential direction). The four auxiliary hearths 36 respectively have an engaging surface 36a (refer to FIG. 1 ) at their lower ends that can engage with the drive mechanism 20 described later. Figure 8 , Fig. 9The axes of the four auxiliary hearths 36 are parallel to the axis of the main hearth 34 and are arranged at equal distances from the axis of the main hearth 34. The upper surface of the main hearth 34 is flush with the upper surface of the auxiliary hearths 36, and the processed object W can be placed on the upper surface of the auxiliary hearths 36.

[0039] The main hearth 34 and the auxiliary hearth 36 can each change and stop the rotation direction and the rotation speed. Since the workpiece W is placed on the upper surface of the auxiliary hearth 36, the main hearth 34 rotates to make the workpiece W perform so-called revolution, and the auxiliary hearth 36 rotates to make the workpiece W perform so-called rotation. The rotation direction of each hearth 34, 36 can be set arbitrarily. For example, Figure 5 As shown, the main hearth 34 and the auxiliary hearth 36 may both rotate counterclockwise, or both rotate clockwise. Alternatively, the main hearth 34 may rotate clockwise while the auxiliary hearth 36 rotates counterclockwise, or the main hearth 34 may rotate counterclockwise while the auxiliary hearth 36 rotates clockwise. By appropriately controlling the rotation speed and rotation direction of the main hearth 34 and the auxiliary hearth 36, the workpiece W placed on the auxiliary hearth 36 can be uniformly heated.

[0040] It is clear from the above description that when the main hearth 34 rotates, the auxiliary hearth 36 also rotates (revolves) around the axis of the main hearth 34 accordingly. Therefore, when the position where the main hearth 34 stops rotating changes, the position where the auxiliary hearth 36 stops also changes. As described above, a recess 34a is formed on the lower surface of the main hearth 34, and a snap-fit ​​surface 36a is formed on the lower surface of the auxiliary hearth 36, and the recess 34a and the snap-fit ​​surface 36a are respectively connected to the driving mechanism 20 of the heat treatment furnace body 10. Therefore, if the position where the main hearth 34 stops rotating is set to the same position, the position where the auxiliary hearth 36 stops is also always a constant position, so that it is possible to facilitate the alignment when the processing table 30 is connected to the driving mechanism 20 of the heat treatment furnace body 10.

[0041] It should be noted that the processing station 30 is transported by a transport vehicle 70 operated by an operator. Figure 2 As shown, the transport carriage 70 includes an arm 72 for holding the processing table 30. The arm 72 can be raised and lowered, and the processing table 30 held by the arm 72 can be raised and lowered by raising and lowering the arm 72. The processing table 30 can be raised and lowered to be attached to and detached from the driving mechanism 20 (described in detail below) of the heat treatment furnace body 10.

[0042] Next, the heat treatment furnace body 10 will be described. Figure 2 to Figure 5As shown, the heat treatment furnace body 10 includes a stand 16 and a furnace body 11 supported by the stand 16. The stand 16 is provided at a predetermined position of the heat treatment region C. The stand 16 supports the furnace body 11, so that a space for mounting and dismounting the processing table 30 is formed below the furnace body 11.

[0043] The furnace body 11 is made of refractory material and has a cylindrical side wall 14 and a disc-shaped top wall 12. The side wall 14 is configured such that its lower end is fixed to the frame 16 and its upper end extends to the top wall 12. The top wall 12 abuts against the upper end of the side wall 14 and closes the opening at the upper end of the side wall 14. An exhaust port (not shown) is formed in the center of the top wall 12.

[0044] The furnace body 11 further includes a lifting bed 18. The lifting bed 18 is formed into a square box shape when viewed from above, and a driving device (20, 22) for rotationally driving the processing table 30 is accommodated therein. The driving device (20, 22) includes a driving source 22 and a driving mechanism 20. The driving source 22 is a general motor (i.e., a motor without a servo function) for rotationally driving the processing table 30. The driving force generated by the driving source 22 is transmitted to the processing table 30 (specifically, the main hearth 34 and the auxiliary hearth 36) via the driving mechanism 20.

[0045] like Figure 8 , Fig. 9 As shown, the drive mechanism 20 includes: a first connection part 46 connected to the recessed part 34a of the main hearth 34; and a second connection part 44 connected to the lower surface of the auxiliary hearth 36. The rotational driving force of the drive source 22 is transmitted to the first connection part 46 via a transmission member (chain, etc.) not shown. A disc-shaped support plate 48 is fixed to the lower end of the first connection part 46. The support plate 48 abuts against the lower surface of the main hearth 34 to support the main hearth 34. A second drive shaft 42 is fixed to the lower surface of the second connection part 44. The second drive shaft 42 passes through a through hole (not shown) of the support plate 48, and the rotational driving force of the drive source 22 is transmitted to the lower end thereof via a transmission member (chain, etc.) not shown. The rotational driving force of the driving source 22 is transmitted to the first connecting portion 46 and the second connecting portion 44 , respectively, so that the main hearth 34 rotates (rotates), and accordingly, the auxiliary hearth 36 rotates and revolves.

[0046] The recessed portion 34a of the processing table 30 (main hearth 34) is connected to the first connecting portion 46, and the engaging surface 36a of the processing table 30 (sub-hearth 36) is connected to the second connecting portion 44, thereby mounting the processing table 30 on the drive mechanism 20. In this way, the processing table 30 is placed on the upper surface of the support plate 48 of the drive mechanism 20, and the processing table 30 is supported by the drive mechanism 20. If the processing table 30 is mounted on the drive mechanism 20, Figure 2 to Figure 4As shown, the processing table 30 is supported above the lifting bed 18. Here, the lifting bed 18 can be raised and lowered between a position near the lower end of the furnace body 11 (an example of the second position described in the claims) and a position near the bed surface (an example of the first position described in the claims) by using the lifting device 24 provided on the frame 16. If the lifting bed 18 is positioned near the bed surface, the lower end of the side wall 14 is open, and the processing table 30 can be detached from the drive mechanism 20 ( Figure 3 status shown).

[0047] In addition, when the lift bed 18 is positioned near the lower end of the furnace body 11 with the processing table 30 installed in the driving mechanism 20, the processing table 30 closes the lower end opening of the side wall 14 ( Figure 4 If the processing table 30 closes the lower end opening of the side wall 14, the processing table 30 and the furnace body 11 form a furnace space 26 for heat treatment of the object W. Figure 4 , Figure 5 As shown in FIG. 2 , in the furnace space 26, the upper surface of the main hearth 34 and the upper surface of the auxiliary hearth 36 are exposed, and the processed object W placed on the upper surface of the auxiliary hearth 36 is stored in the furnace space 26. It should be noted that a heater 50 (not shown) is provided in the furnace space 26. Fig.10 ) and the gas supply device 52 ( Fig.10 The object W is heated by the heater 50 , and the atmosphere of the furnace space 26 is controlled by the gas supply device 52 .

[0048] It should be explained, such as Figure 6 , Figure 7 As shown in FIG. 1 , a position sensor 40 is provided on the lifting bed 18 for detecting the claw 38 mounted on the processing table 30. The detection signal output from the position sensor 40 is turned on when facing the claw 38, and turned off when not facing the claw 38. Figure 7 As shown, the claw 38 is a plate having a certain width, and therefore, when the main hearth 34 is in a preset angle range, the detection signal output from the position sensor 40 is ON.

[0049] like Fig.10As shown, the heat treatment furnace body 10 also includes a control unit 54. The control unit 54 is composed of a computer including a CPU, a ROM, and a RAM, for example. The control unit 54 is connected to the production management device 60 and the position sensor 40, and is input with instructions from the production management device 60 and detection signals from the position sensor 40. The control unit 54 controls the actions of various parts of the heat treatment furnace body 10 based on the input instructions and detection signals. That is, the control unit 54 controls the lifting device 24 to lift the lifting bed 18, controls the driving device (20, 22) to control the rotation of the processing table 30, and controls the temperature and atmosphere in the furnace by controlling the heater 50 and the gas supply device 52. It should be noted that in this embodiment, the action (stop processing) of the control unit 54 when the rotation of the processing table 30 is stopped is characteristic, and other than this, it is the same as the prior art. Therefore, only the stop processing when the rotation of the processing table 30 is stopped is described in detail.

[0050] Fig.11 FIG. 2 shows an example of the stop process performed by the control unit 54 when the rotation of the processing table 30 is stopped. Fig.11 As shown, the control unit 54 first monitors whether a stop signal (S10) is received from the production management device 60. That is, the production management device 60 of the present embodiment controls the heat treatment of the object W in each heat treatment furnace body 10, and when the desired heat treatment is completed in each heat treatment furnace body 10, a stop signal for stopping the heat treatment is output to the heat treatment furnace body 10. The control unit 54 first monitors whether a stop signal from the production management device 60 is received in S10. When the stop signal is not received (NO in S10), the control unit 54 continues to drive the drive device (20, 22) to rotate the processing table 30 in the forward direction at a speed V1. It should be noted that the speed V1 is the rotation speed of the processing table 30 when the object W is subjected to heat treatment, and is set to a speed corresponding to the heat treatment of the object W. Therefore, the speed V1 is appropriately set according to the type of heat treatment applied to the object W.

[0051] When a stop signal is received (YES in S10), next, the control unit 54 monitors whether the detection signal output from the position sensor 40 is ON (S12). As described above, in the present embodiment, when a stop signal is received, the processing table 30 rotates in the forward direction at a speed V1 set for heat treatment. Therefore, even if the rotation of the processing table 30 is stopped immediately after receiving the stop signal, since the speed V1 is appropriately set according to the type of heat treatment, etc., the position (angular position) at which the processing table 30 stops will also deviate. In the present embodiment, only the stop signal is received without immediately stopping the rotation of the processing table 30. First, the processing table 30 is continuously rotated, and the signal from the position sensor 40 is monitored to see whether it is ON.

[0052] When the detection signal output from the position sensor 40 is ON (YES in S12), the control unit 54 then monitors whether the detection signal output from the position sensor 40 is OFF (S14). That is, the processing table 30 is continuously rotated in the forward direction until the claw 38 fixed to the lower surface of the processing table 30 is at a position not facing the position sensor 40.

[0053] When the detection signal output from the position sensor 40 is OFF (YES in S14), the control unit 54 stops driving the drive device (20, 22) to stop the rotation of the processing table 30 in the forward direction (S16). Next, the control unit 54 drives the drive device (20, 22) in the opposite direction to the previous direction to rotate the processing table 30 in the reverse direction at a speed V2 (S18). Here, the speed V2 is a constant value that is not related to the heat treatment and is set to a value smaller than the speed V1 in order to improve the stopping accuracy of the processing table 30.

[0054] Next, the control unit 54 monitors whether the detection signal output from the position sensor 40 is ON (S20). When the detection signal output from the position sensor 40 is OFF (NO in S20), the control unit 54 continues to drive the drive device (20, 22) to rotate the processing table 30 in the reverse direction at a speed V2. On the other hand, when the detection signal output from the position sensor 40 is ON (YES in S20), the control unit 54 stops the drive of the drive device (20, 22), thereby stopping the rotation of the processing table 30 in the reverse direction (S22).

[0055] Fig.12 1 is a timing chart showing the change in the state of the stop signal, the state of the drive device (20, 22), and the state of the detection signal from the position sensor 40 when the control unit 54 implements the above-mentioned stop processing. Fig.12As shown, the drive device (20, 22) rotates the processing table 30 at a speed V1 in the forward direction. In this state, even if a stop signal is output from the production management device 60, the drive device (20, 22) rotates the processing table 30 at a speed V1 in the forward direction. Then, when the detection signal from the position sensor 40 becomes ON and then becomes OFF, the drive device (20, 22) stops the rotation of the processing table 30 in the forward direction. Next, the drive device (20, 22) rotates the processing table 30 at a speed V2 (<V1) in the reverse direction, and when the detection signal from the position sensor 40 becomes ON, the rotation of the processing table 30 in the reverse direction is stopped. Since the processing table 30 stops from a state of rotating at a constant and small rotation speed V2 that is unrelated to the heat treatment, the processing table 30 can stop at a preset position (angular position) with high precision. It should be noted that the use of a servo motor for the drive source 22 can also improve the stop position accuracy of the processing table 30. However, by executing the stop process of this embodiment, the stop position accuracy of the processing table 30 can be improved even if a general motor without a servo function is used for the drive source 22.

[0056] The heat treatment furnace system 100 of the present embodiment is provided with: a plurality of heat treatment furnace bodies 10; and a plurality of processing tables 30 respectively shared by the plurality of heat treatment furnace bodies 10. Therefore, the plurality of heat treatment furnace bodies 10 can be operated efficiently, so that the heat treatment of the object W can be efficiently performed. In addition, although it is necessary to install the processing table 30 on the heat treatment furnace body 10, as described above, the position where the processing table 30 stops rotating is controlled to a pre-set position. In particular, the rotation speed of the processing table 30 when the processing table 30 stops rotating is not the rotation speed V1 during heat treatment, but a rotation speed V2 which is less than the rotation speed V1 and is a constant speed. Accordingly, the processing table 30 can stop at a set position with good accuracy. Therefore, the operation of installing the processing table 30 on the heat treatment furnace body 10 can be facilitated. For example, the processing table 30 may be held in a predetermined positional relationship relative to the transport cart 70, and the processing table 30 may be positioned in a positional relationship that allows connection with respect to the drive mechanism 20 by simply positioning the transport cart 70 in a predetermined positional relationship relative to the heat treatment furnace body 10. As a result, the operation of attaching the processing table 30 to the heat treatment furnace body 10 can be facilitated.

[0057] It should be noted that in the above-mentioned embodiment, the operator operates the conveying trolley 70, and the operator connects the processing table 30 to the driving mechanism 20 of the heat treatment furnace body 10, but the technology disclosed in this specification is not limited to such a scheme. For example, the conveying trolley can be automated so that the conveying trolley autonomously connects the processing table 30 to the driving mechanism 20. In particular, if the technology disclosed in this specification is used, when the processing table 30 stops rotating, the processing table 30 stops at a predetermined position (angle position). Therefore, only by maintaining the processing table 30 in a predetermined positional relationship relative to the conveying trolley 70 and positioning the conveying trolley 70 in a predetermined positional relationship relative to the heat treatment furnace body 10, the processing table 30 can be positioned at an appropriate position relative to the driving mechanism 20. Accordingly, the conveying trolley can be automated and the heat treatment furnace system can be labor-saving.

[0058] (Example 2) Next, the heat treatment furnace system involved in Example 2 is described. The heat treatment furnace system of Example 2 is different from Example 1 only in the stop process performed by the control unit when the rotation of the processing table is stopped, and has the same structure as the heat treatment furnace system 100 of Example 1 in other aspects. Hereinafter, only the stop process performed by the control unit of Example 2 will be described. It should be noted that the same reference numerals are used for the common structures in Example 1.

[0059] Fig.13 FIG. 2 shows the sequence of the stop process performed by the control unit 54 when the rotation of the processing table 30 is stopped. Fig.13 As shown, the control unit 54 first monitors whether a stop signal (S24) is received from the production management device 60. When the stop signal is not received (NO in S24), the control unit 54 continues to drive the drive device (20, 22) so that the processing table 30 rotates at a speed V1 along the forward direction. On the other hand, when a stop signal is received (YES in S24), the control unit 54 monitors whether the detection signal output from the position sensor 40 is ON (S26). Then, when the detection signal output from the position sensor 40 is ON (YES in S26), the control unit 54 stops the drive device (20, 22) immediately, thereby stopping the rotation of the processing table 30 (S28). Therefore, when the rotation of the processing table 30 stops in S28, the detection signal output from the position sensor 40 is still ON.

[0060] Next, the control unit 54 drives the driving device (20, 22) in the reverse direction so that the processing table 30 rotates in the reverse direction at a speed V1 (S30). Then, the control unit 54 monitors whether the detection signal output from the position sensor 40 is OFF (S32). That is, at the moment of S30, the detection signal output from the position sensor 30 is ON. Therefore, in S32, it is monitored whether the detection signal output from the position sensor 40 changes from ON to OFF.

[0061] When the detection signal output from the position sensor 40 is OFF (YES in S32), the control unit 54 immediately stops the reverse driving of the driving device (20, 22), so that the rotation of the processing table 30 in the reverse direction stops (S34). Next, the control unit 54 drives the driving device (20, 22) in the forward direction, so that the processing table 30 rotates in the forward direction at a speed V2 (S36). The speed V2 is a constant value regardless of the type of heat treatment, etc., and is set to a value smaller than the speed V1.

[0062] Next, the control unit 54 monitors whether the detection signal output from the position sensor 40 is on (S38). Then, when the detection signal output from the position sensor 40 is on (YES in S38), the control unit 54 stops the forward driving of the driving device (20, 22), so that the rotation of the processing table 30 in the forward direction stops (S40).

[0063] Fig.14 1 is a timing chart showing the change in the state of the stop signal, the state of the drive device (20, 22), and the state of the detection signal from the position sensor 40 when the control unit 54 implements the above-mentioned stop processing. Fig.14 As shown, the drive device (20, 22) rotates the processing table 30 in the forward direction at a speed V1. In this state, even if a stop signal is output from the production management device 60, the drive device (20, 22) rotates the processing table 30 in the forward direction at a speed V1. Then, when the detection signal from the position sensor 40 becomes ON, the rotation of the processing table 30 in the forward direction is stopped. At this time, the detection signal from the position sensor 40 is still ON. Next, the drive device (20, 22) rotates the processing table 30 in the reverse direction at a speed V1, and when the detection signal from the position sensor 40 becomes OFF, the rotation of the processing table 30 in the reverse direction is stopped. Next, the processing table 30 rotates in the forward direction at a speed V2 less than the speed V1, and when the detection signal from the position sensor 40 becomes ON, the rotation of the processing table 30 in the forward direction is stopped.

[0064] In the heat treatment furnace system of Example 2, the rotation of the treatment table 30 is also stopped from the state where the treatment table 30 rotates at a constant speed V2 that is irrelevant to the type of heat treatment. In addition, the rotation speed V2 of the treatment table 30 is set to a value smaller than the rotation speed V1 during the heat treatment. Therefore, the treatment table 30 can be stopped at a pre-set position (angular position) with good accuracy. Accordingly, the operation of installing the treatment table 30 on the heat treatment furnace body 10 can be facilitated.

[0065] The above is a detailed description of the specific examples of the technology disclosed in this specification. However, these are only examples and do not limit the claims. The technology described in the claims includes various modifications and changes to the specific examples shown above. In addition, the technical elements described in this specification or the drawings exert technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of application.

Claims

1. An intermittent heat treatment furnace, characterized in that: have: A furnace body, the furnace body comprising a top wall, side walls and a lifting bed; a processing table configured to be rotatable relative to the lifting bed and capable of placing a processed object; A driving device, the driving device is arranged on the lifting bed, the driving device is connected to the processing table in a detachable manner, and the driving device drives the processing table to rotate; a position sensor for detecting a position of the processing table relative to the lifting bed in a rotation direction; and a control device for controlling the drive device based on the detection result of the position sensor, The processing station has: A first rotating table, the first rotating table having a circular shape in a plan view and capable of rotating about a first axis passing through the center thereof and extending in the up-down direction; and at least one second rotating table, which is arranged inside the first rotating table in a plan view and is rotatable around a second axis passing through the center and extending in the up-down direction. In a plan view, the center of the second rotating table is located at a position different from the center of the first rotating table. The lifting bed is movable between a first position in which the lower end of the side wall is open and a second position in which the lower end of the side wall is closed. When the lifting bed is located at the first position, the processing table can be detached relative to the driving device. When the lifting bed is located at the second position in a state where the processing table is connected to the driving device, the upper surface of the first rotating table and the upper surface of the second rotating table are exposed in the furnace body. The driving device comprises: a first driving unit, the first driving unit being disposed on the first axis and driving the first rotating table to rotate; as well as a second driving unit, the second driving unit being arranged on the second axis and driving the second rotating table to rotate; The position sensor outputs a detection signal when the first rotating platform is within a preset angle range relative to the lifting bed. The control device is composed of: When the first rotating table is stopped from rotating at a first speed in a first rotating direction, (1) when the detection signal is output from the position sensor, the first rotating table further rotates along the first rotation direction in a state where the detection signal is output, and when the output detection signal stops, the first rotating table stops; (2) after the step (1), rotating the first rotating table in a second rotating direction opposite to the first rotating direction at a second speed lower than the first speed; (3) When the detection signal is output from the position sensor in the state of (2), the first rotating table is stopped.

2. An intermittent heat treatment furnace, characterized in that: have: A furnace body, the furnace body comprising a top wall, side walls and a lifting bed; a processing table configured to be rotatable relative to the lifting bed and capable of placing a processed object; A driving device, the driving device is arranged on the lifting bed, the driving device is connected to the processing table in a detachable manner, and the driving device drives the processing table to rotate; a position sensor for detecting a position of the processing table relative to the lifting bed in a rotation direction; and a control device for controlling the drive device based on the detection result of the position sensor, The processing station has: A first rotating table, the first rotating table having a circular shape in a plan view and capable of rotating about a first axis passing through the center thereof and extending in the up-down direction; and at least one second rotating table, which is arranged inside the first rotating table in a plan view and is rotatable around a second axis passing through the center and extending in the up-down direction. In a plan view, the center of the second rotating table is located at a position different from the center of the first rotating table. The lifting bed is movable between a first position in which the lower end of the side wall is open and a second position in which the lower end of the side wall is closed. When the lifting bed is located at the first position, the processing table can be detached relative to the driving device. When the lifting bed is located at the second position in a state where the processing table is connected to the driving device, the upper surface of the first rotating table and the upper surface of the second rotating table are exposed in the furnace body. The driving device comprises: a first driving unit, the first driving unit being disposed on the first axis and driving the first rotating table to rotate; as well as a second driving unit, the second driving unit being arranged on the second axis and driving the second rotating table to rotate; The position sensor outputs a detection signal when the first rotating platform is within a preset angle range relative to the lifting bed. The control device is composed of: When the first rotating table is stopped from rotating at a first speed in a first rotating direction, (1) when the detection signal is output from the position sensor, stopping the first rotating table within the set angle range; (2) After step (1), the first rotating table is rotated in a second rotating direction opposite to the first rotating direction; (3) when the detection signal output from the position sensor stops in the state of (2), stopping the first rotating table; (4) After the step (3), the first rotating table is rotated along the first rotation direction at a second speed which is lower than the first speed; (5) When the detection signal is output from the position sensor in the state of (4), the first rotating table is stopped.

3. The intermittent heat treatment furnace according to claim 1 or 2, characterized in that: The processing station includes a plurality of the second rotating tables. In a plan view, the plurality of second rotating tables are arranged at different positions of the first rotating table without interfering with each other.

4. A heat treatment furnace system, characterized in that: have: a plurality of batch heat treatment furnace bodies; and at least one processing station, which can be detached from each of the plurality of intermittent heat treatment furnace bodies; The plurality of intermittent heat treatment furnace bodies respectively include: a furnace body, a driving device, a position sensor and a control device. The furnace body comprises a top wall, a side wall and a lifting bed. The processing table is configured to be rotatable relative to the lifting bed and can be used to place the processed object. The driving device is disposed on the lifting bed, to which the processing table is detachably connected, and to drive the processing table to rotate. The position sensor detects the position of the processing table relative to the lifting bed in the rotation direction. The control device controls the driving device based on the detection result of the position sensor. The processing station has: A first rotating table, the first rotating table having a circular shape in a plan view and capable of rotating about a first axis passing through the center thereof and extending in the up-down direction; and at least one second rotating table, which is arranged inside the first rotating table in a plan view and is rotatable around a second axis passing through the center and extending in the up-down direction. In a plan view, the center of the second rotating table is located at a position different from the center of the first rotating table. The lifting bed is movable between a first position in which the lower end of the side wall is open and a second position in which the lower end of the side wall is closed. When the lifting bed is located at the first position, the processing table can be detached relative to the driving device. When the lifting bed is located at the second position in a state where the processing table is connected to the driving device, the upper surface of the first rotating table and the upper surface of the second rotating table are exposed in the furnace body. The driving device comprises: a first driving unit, the first driving unit being disposed on the first axis and driving the first rotating table to rotate; as well as a second driving unit, the second driving unit being arranged on the second axis and driving the second rotating table to rotate; The position sensor outputs a detection signal when the first rotating platform is within a preset angle range relative to the lifting bed. The control device is composed of: When the first rotating table is stopped from rotating at a first speed in a first rotating direction, (1) when the detection signal is output from the position sensor, the first rotating table further rotates along the first rotation direction in a state where the detection signal is output, and when the output detection signal stops, the first rotating table stops; (2) after the step (1), rotating the first rotating table in a second rotating direction opposite to the first rotating direction at a second speed lower than the first speed; (3) When the detection signal is output from the position sensor in the state of (2), the first rotating table is stopped.

5. A heat treatment furnace system, characterized in that: have: a plurality of batch heat treatment furnace bodies; and at least one processing station, which can be detached from each of the plurality of intermittent heat treatment furnace bodies; The plurality of intermittent heat treatment furnace bodies respectively include: a furnace body, a driving device, a position sensor and a control device. The furnace body comprises a top wall, a side wall and a lifting bed. The processing table is configured to be rotatable relative to the lifting bed and can be used to place the processed object. The driving device is disposed on the lifting bed, to which the processing table is detachably connected, and to drive the processing table to rotate. The position sensor detects the position of the processing table relative to the lifting bed in the rotation direction. The control device controls the driving device based on the detection result of the position sensor. The processing station has: A first rotating table, the first rotating table having a circular shape in a plan view and capable of rotating about a first axis passing through the center thereof and extending in the up-down direction; and at least one second rotating table, which is arranged inside the first rotating table in a plan view and is rotatable around a second axis passing through the center and extending in the up-down direction. In a plan view, the center of the second rotating table is located at a position different from the center of the first rotating table. The lifting bed is movable between a first position in which the lower end of the side wall is open and a second position in which the lower end of the side wall is closed. When the lifting bed is located at the first position, the processing table can be detached relative to the driving device. When the lifting bed is located at the second position in a state where the processing table is connected to the driving device, the upper surface of the first rotating table and the upper surface of the second rotating table are exposed in the furnace body. The driving device comprises: a first driving unit, the first driving unit being disposed on the first axis and driving the first rotating table to rotate; as well as a second driving unit, the second driving unit being arranged on the second axis and driving the second rotating table to rotate; The position sensor outputs a detection signal when the first rotating platform is within a preset angle range relative to the lifting bed. The control device is composed of: When the first rotating table is stopped from rotating at a first speed in a first rotating direction, (1) when the detection signal is output from the position sensor, stopping the first rotating table within the set angle range; (2) After step (1), the first rotating table is rotated in a second rotating direction opposite to the first rotating direction; (3) when the detection signal output from the position sensor stops in the state of (2), stopping the first rotating table; (4) After the step (3), the first rotating table is rotated along the first rotation direction at a second speed which is lower than the first speed; (5) When the detection signal is output from the position sensor in the state of (4), the first rotating table is stopped.

6. The heat treatment furnace system according to claim 4 or 5, characterized in that: The invention further includes a transport vehicle for transporting the processing stages to the plurality of batch heat treatment furnace bodies.

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