Control method and detection device

Abstract

The present invention discloses a control method and a detection device, the detection device includes a cavity, a moving component, a bearing component and at least two distance measuring sensors, the cavity forms a chamber, the moving component is located in the chamber, the bearing component is connected to the moving component, the moving component is used to drive the bearing component to move, the bearing component includes a suction cup, and at least two distance measuring sensors are installed at a preset position of the suction cup, and the control method includes: detecting a first distance formed between the suction cup and the inner wall of the chamber by at least two distance measuring sensors; obtaining a moving speed of the suction cup when the first distance is less than a preset distance; determining an adjustment rate for adjusting the suction cup according to the moving speed of the suction cup; and adjusting the suction cup according to the adjustment rate. The above control method can reduce the risk of damage to the suction cup and the wafer adsorbed thereon.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer detection, and in particular to a control method and a detection device. Background Art

[0002] In the related art, the suction cup fixes the wafer by vacuum adsorption, so as to measure the wafer. In the actual measurement process, it is easy to make a control process error, which may cause the vacuum of the suction cup to be lost, causing the wafer to shift. If the measurement is continued, it is easy to increase the risk of damaging the wafer and the suction cup. Summary of the invention

[0003] The embodiments of the present invention provide a control method and a detection device.

[0004] An embodiment of the present invention provides a control method for a detection device, wherein the detection device includes a cavity, a moving component, a bearing component, and at least two ranging sensors, wherein the cavity forms a chamber, the moving component is located in the chamber, the bearing component is connected to the moving component, the moving component is used to drive the bearing component to move, the bearing component includes a suction cup, and the at least two ranging sensors are installed at preset positions of the suction cup. The control method includes:

[0005] Detecting a first distance formed between the suction cup and the inner wall of the chamber by the at least two distance measuring sensors;

[0006] When the first distance is less than a preset distance, obtaining a moving speed of the suction cup;

[0007] Determining an adjustment rate for adjusting the suction cup according to the moving speed of the suction cup;

[0008] The suction cup is adjusted according to the adjustment rate.

[0009] The above control method can determine whether the suction cup is offset by detecting the distance between the suction cup and the inner wall of the chamber, and can adjust the suction cup so that the suction cup returns to the position before the offset, thereby reducing the risk of damage to the suction cup and the wafer adsorbed thereon.

[0010] In some embodiments, when the first distance is less than a preset distance, obtaining the moving speed of the suction cup includes:

[0011] Acquire first coordinate information of the suction cup corresponding to a first time point and second coordinate information corresponding to a second time point;

[0012] determining a time difference according to the first time point and the second time point;

[0013] The moving speed of the suction cup is determined according to the time difference, the first coordinate information and the second coordinate information.

[0014] In some embodiments, determining an adjustment rate for adjusting the suction cup according to a moving speed of the suction cup comprises:

[0015] When the moving speed of the suction cup is greater than a preset speed, determining the current position information of the suction cup;

[0016] An adjustment rate of the suction cup is determined according to the position information and / or the moving speed.

[0017] In some embodiments, when the moving speed of the suction cup is greater than a preset speed, determining the current position information of the suction cup includes:

[0018] When the moving speed of the suction cup is greater than a preset speed, determining the position coordinates of the moving component;

[0019] The current position information of the suction cup is determined according to the position coordinates.

[0020] In some embodiments, the moving assembly includes a first sliding assembly and a second sliding assembly, wherein the first sliding assembly is used to drive the suction cup to move along a first direction, and the second sliding assembly is used to drive the suction cup to move along a second direction.

[0021] Adjusting the suction cup according to the adjustment rate includes:

[0022] Determining the offset direction of the suction cup according to the at least two distance measuring sensors;

[0023] Determine a first direction component of the offset direction along the first direction and a second direction component along the second direction;

[0024] determining a first rate component of the adjustment rate along the first direction and a second rate component along the second direction;

[0025] According to the first direction component and the first speed component, the first sliding assembly is controlled to drive the suction cup to move along the first direction, and / or, according to the second direction component and the second speed component, the second sliding assembly is controlled to drive the suction cup to move along the second direction.

[0026] An embodiment of the present invention provides a detection device, comprising:

[0027] a cavity formed with a chamber;

[0028] a moving assembly, located in the chamber;

[0029] A bearing assembly connected to the moving assembly, the moving assembly is used to drive the bearing assembly to move, and the bearing assembly includes a suction cup;

[0030] At least two distance measuring sensors installed at preset positions of the suction cup; and

[0031] A controller, the controller being used to:

[0032] Detecting a first distance formed between the suction cup and the inner wall of the chamber by the at least two distance measuring sensors;

[0033] When the first distance is less than a preset distance, obtaining a moving speed of the suction cup;

[0034] Determining an adjustment rate for adjusting the suction cup according to the moving speed of the suction cup;

[0035] The suction cup is adjusted according to the adjustment rate.

[0036] The above-mentioned detection device can determine whether the suction cup is offset by detecting the distance between the suction cup and the inner wall of the chamber, and can adjust the suction cup so that the suction cup returns to the position before the offset, thereby reducing the risk of damage to the suction cup and the wafer adsorbed thereon.

[0037] In certain embodiments, the controller is configured to:

[0038] Acquire first coordinate information of the suction cup corresponding to a first time point and second coordinate information corresponding to a second time point;

[0039] determining a time difference according to the first time point and the second time point;

[0040] The moving speed of the suction cup is determined according to the time difference, the first coordinate information and the second coordinate information.

[0041] In certain embodiments, the controller is configured to:

[0042] When the moving speed of the suction cup is greater than a preset speed, determining the current position information of the suction cup;

[0043] An adjustment rate of the suction cup is determined according to the position information and / or the moving speed.

[0044] In certain embodiments, the controller is configured to:

[0045] When the moving speed of the suction cup is greater than a preset speed, determining the position coordinates of the moving component;

[0046] The current position information of the suction cup is determined according to the position coordinates.

[0047] In some embodiments, the moving assembly includes a first sliding assembly and a second sliding assembly, the first sliding assembly is used to drive the suction cup to move along a first direction, the second sliding assembly is used to drive the suction cup to move along a second direction, and the controller is used to:

[0048] Determining the offset direction of the suction cup according to the at least two distance measuring sensors;

[0049] Determine a first direction component of the offset direction along the first direction and a second direction component along the second direction;

[0050] determining a first rate component of the adjustment rate along the first direction and a second rate component along the second direction;

[0051] According to the first direction component and the first speed component, the first sliding assembly is controlled to drive the suction cup to move along the first direction, and / or, according to the second direction component and the second speed component, the second sliding assembly is controlled to drive the suction cup to move along the second direction.

[0052] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0054] Figure 1 It is a partial structural schematic diagram of a detection device according to an embodiment of the present invention;

[0055] Figure 2 is a schematic diagram of a module of a detection device according to an embodiment of the present invention;

[0056] Figure 3 is a flow chart of a control method according to an embodiment of the present invention;

[0057] Figure 4 It is a partial structural schematic diagram of a detection device according to an embodiment of the present invention;

[0058] Figure 5 is another flow chart of a control method according to an embodiment of the present invention;

[0059] Figure 6 is another partial structural schematic diagram of the detection device according to the embodiment of the present invention;

[0060] Figure 7 is another flow chart of a control method according to an embodiment of the present invention;

[0061] Figure 8 is another flow chart of the control method according to the embodiment of the present invention;

[0062] Fig. 9 It is a schematic diagram of another part of the structure of the detection device according to the embodiment of the present invention;

[0063] Fig.10 It is a schematic diagram of another part of the structure of the detection device according to the embodiment of the present invention;

[0064] Fig.11 It is a schematic diagram of another part of the structure of the detection device according to the embodiment of the present invention;

[0065] Fig.12 is another flow chart of the control method according to the embodiment of the present invention;

[0066] Fig.13 Schematic diagram of determining the adjustment rate of the suction cup according to an embodiment of the present invention.

[0067] Description of main component symbols:

[0068] Detection device 100;

[0069] Cavity 110, chamber 111, chamber inner wall 113, moving assembly 120, first sliding assembly 121, first driving member 122, first slide rail 123, second sliding assembly 125, second driving member 126, second slide rail 127, supporting assembly 130, suction cup 131, ranging sensor 140, controller 150. DETAILED DESCRIPTION

[0070] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0071] In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0072] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0073] Many different embodiments or examples are provided in the disclosure of the present invention to realize different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present invention. In addition, the present invention can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplicity and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides various specific examples of processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0074] Please refer to Figure 1 and Figure 2 , an embodiment of the present invention provides a control method for a detection device 100. The detection device 100 includes a cavity 110, a moving component 120, a bearing component 130 and at least two distance measuring sensors 140. The cavity 110 is formed with a chamber 111. The moving component 120 is located in the chamber 111. The bearing component 130 is connected to the moving component 120. The moving component 120 is used to drive the bearing component 130 to move. The bearing component 130 includes a suction cup 131. At least two distance measuring sensors 140 are installed at preset positions of the suction cup 131. Please refer to Figure 3 , control methods include:

[0075] Step S100: Detecting a first distance between the suction cup 131 and the inner wall 113 of the chamber by at least two distance measuring sensors 140;

[0076] Step S200: when the first distance is less than the preset distance, obtaining the moving speed of the suction cup 131;

[0077] Step S300: determining an adjustment rate for adjusting the suction cup 131 according to the moving speed of the suction cup 131;

[0078] Step S400: adjusting the suction cup 131 according to the adjustment rate.

[0079] The control method of the embodiment of the present invention can be implemented by the detection device 100 of the embodiment of the present invention. Figure 1 and Figure 2 The detection device 100 includes a cavity 110, a moving component 120, a receiving component and at least two distance measuring sensors 140. The cavity 110 is formed with a chamber 111. The moving component 120 is located in the chamber 111. The bearing component 130 is connected to the moving component 120. The moving component 120 is used to drive the bearing component 130 to move. The bearing component 130 includes a suction cup 131. At least two distance measuring sensors 140 are installed at a preset position of the suction cup 131.

[0080] The detection device 100 also includes a controller 150, which is used to: detect a first distance formed between the suction cup 131 and the inner wall 113 of the chamber through at least two ranging sensors 140; obtain a moving speed of the suction cup 131 when the first distance is less than a preset distance; determine an adjustment rate for adjusting the suction cup 131 according to the moving speed of the suction cup 131; and adjust the suction cup 131 according to the adjustment rate.

[0081] In the above-mentioned control method and detection device 100, by detecting the distance between the suction cup 131 and the inner wall 113 of the chamber, it is possible to determine whether the suction cup 131 is offset, and the position of the suction cup 131 can be adjusted so that the suction cup 131 returns to its position before the offset, thereby reducing the risk of damage to the suction cup 131 and the wafer adsorbed thereon.

[0082] The control method and the detection device 100 provided in the embodiment of the present invention can be used in the field of wafer processing technology. Specifically, the test piece of the detection device 100 is a wafer, and the wafer is placed on the suction cup 131. The suction cup 131 fixes the wafer by extracting air to form a vacuum, so as to facilitate subsequent detection and processing of the wafer.

[0083] In the actual process, the vacuum of the suction cup 131 may be lost due to an error in the control process, which may cause the suction cup 131 to shift relative to the wafer. In this case, if the processing flow continues, it may easily cause damage to the wafer and / or the suction cup 131.

[0084] Specifically, please combine Figure 1 and Figure 2, along the up-down direction, the receiving assembly is connected to the top of the moving assembly 120, and the suction cup 131 fixes the wafer above the moving assembly 120. In such an embodiment, the suction cup 131 is a disc-shaped structure, and the preset position is the edge of the suction cup 131 along the circumferential direction. At least two distance measuring sensors 140 are arranged at intervals along the circumferential direction of the disc at the edge of the suction cup 131, and both face the direction away from the center of the disc, so that the distance (i.e., the first distance) between the chamber inner wall 113 and the disc can be measured. When the first distance is less than the preset distance, it can be determined that the suction cup 131 has a tendency to approach the direction of the chamber inner wall 113, so that the moving speed of the suction cup 131 can be obtained, and the adjustment rate of adjusting the suction cup 131 can be determined according to the obtained moving speed of the suction cup 131, so that the suction cup 131 can be adjusted according to the adjustment rate, and finally the suction cup 131 can be restored to the position before the displacement occurs, so as to avoid the offset distance between the suction cup 131 and the wafer being too large. In other implementations, the preset position may be adjusted according to actual conditions, or may be calibrated to a corresponding specific position through actual testing.

[0085] In addition, please combine Figure 4 ,exist Figure 4 In the illustrated embodiment, there are four distance measuring sensors 140, and the cavity 110 is formed with four inner walls. Each distance measuring sensor 140 is correspondingly arranged toward one of the inner walls 113 of the cavity, so that the distance information formed between the suction cup 131 and the inner wall can be determined, and the distance information can be transmitted to the controller 150, so that the first distance can be determined according to the distance information.

[0086] In some embodiments, the preset distance is determined according to the preset position of the distance measuring sensor 140. In other words, the preset distances corresponding to the distance measuring sensors 140 at different positions may be different.

[0087] It can be understood that, according to the specific structure in the cavity 110 and the specific position where the receiving assembly is installed in the chamber 111, even if the suction cup 131 is not displaced, the first distance measured by each distance measuring sensor 140 may be different. In this case, the preset distance is determined by the preset position where the distance measuring sensor 140 is installed on the suction cup 131, rather than uniformly setting the preset distance for all the distance measuring sensors 140. This can avoid the situation where the first distance detected by one of the distance measuring sensors 140 is less than the preset distance when the suction cup 131 is not displaced, and the situation where the first distance detected by one of the distance measuring sensors 140 is still greater than the preset distance when the suction cup 131 is displaced, which is conducive to improving the detection accuracy of the first distance by the distance measuring sensor 140.

[0088] On the basis of the above-mentioned implementation mode, according to different specific situations (such as the specific structure inside the cavity 110, the specific position where the suction cup 131 is installed in the cavity 111), the preset distance corresponding to each ranging sensor 140 can be adjusted accordingly, so that the position relationship of the suction cup 131 relative to all the inner walls of the cavity 110 can be accurately detected.

[0089] In addition, in other embodiments, the distance measuring sensor 140 includes but is not limited to an infrared sensor, a laser distance measuring sensor 140, and a radar microwave sensor. In some such embodiments, the distance measuring sensor 140 may include a transmitter and a receiver. When the transmitter transmits a medium (such as an infrared signal, a laser signal, or a microwave signal), the medium is received by the receiver, and then the first distance can be determined based on the time difference between the transmission and the reception. The distance measuring sensor 140 may be a transmitter and a receiver, one of which is set at a preset position of the suction cup 131, and the other of which is set at the chamber inner wall 113, or both the transmitter and the receiver are installed at the preset position of the suction cup 131. No further details are given here.

[0090] It should be pointed out that the embodiment of the present invention is described with the wafer as the part to be tested. For those skilled in the art, when the suction cup 131 is used to fix the part to be tested by vacuum adsorption, the control method and detection device 100 of the embodiment of the present invention can be used to adjust the offset of the suction cup 131, thereby avoiding damage to the suction cup 131 and the part to be tested, thereby achieving the same or similar technical effects.

[0091] Please refer to Figure 5 In some embodiments, step S200 includes:

[0092] Step S210: acquiring first coordinate information of the suction cup 131 corresponding to a first time point and second coordinate information corresponding to a second time point;

[0093] Step S220: determining a time difference according to the first time point and the second time point;

[0094] Step S230: determining the moving speed of the suction cup 131 according to the time difference, the first coordinate information and the second coordinate information.

[0095] The control method of the embodiment of the present invention can be implemented by the detection device 100 of the embodiment of the present invention. Specifically, please refer to Figure 2 The controller 150 is used to: obtain first coordinate information of the suction cup 131 corresponding to a first time point and second coordinate information corresponding to a second time point; determine a time difference according to the first time point and the second time point; and determine a moving speed of the suction cup 131 according to the time difference, the first coordinate information, and the second coordinate information.

[0096] In this way, the deviation of the suction cup 131 can be detected.

[0097] Specifically, please combine Figure 6 , when the mobile component 120 is displaced, the suction cup 131 can be driven to move. When a coordinate system is established for the mobile component 120 to characterize its specific position, the position of the suction cup 131 can be correspondingly characterized according to the coordinate information of the mobile component 120 in the coordinate system. In such an embodiment, when it is detected that the first distance is less than the preset distance, it can be determined that the mobile component 120 has also been displaced, so that the coordinate information of the mobile component 120 in the coordinate system can be determined at a first time point, and the coordinate information of the mobile component 120 in the coordinate system can be determined at a second time point. On the basis of the above, the first coordinate information of the suction cup 131 corresponding to the first time point and the second coordinate information corresponding to the second time point can be correspondingly determined.

[0098] In one embodiment, the coordinate information of the mobile component 120 at the first time point is the first coordinate information of the suction cup 131, and the coordinate information of the mobile component 120 at the second time point is the second coordinate information of the suction cup 131. In other embodiments, the first coordinate information and the second coordinate information of the suction cup 131 can also be determined by combining the coordinate information of the mobile component 120 with a preset corresponding relationship. The preset corresponding relationship can be to add an offset value to the coordinate information of the mobile component 120, and the offset value can be fixed or adjusted accordingly according to different situations. It will not be expanded in detail here.

[0099] It can be understood that, based on the first coordinate information and the second coordinate information, the displacement distance of the suction cup 131 between the first time point and the second time point can be determined. When the time difference between the first time point and the second time point is determined, the moving speed of the suction cup 131 can be determined. In some embodiments, the first coordinate information includes the coordinate parameters of the suction cup 131 at the first time point, the second coordinate information includes the coordinate parameters of the suction cup 131 at the second time point, and the coordinate information may include the coordinate parameters of the preset point on the mobile component 120 in the coordinate system. For the preset point and the origin O of the coordinate system, it can be determined according to the actual situation, and can also be calibrated through testing. In one embodiment, the origin O can be the position of the center of the suction cup 131 before the displacement occurs. It will not be described in detail here.

[0100] In addition, in other embodiments, the first time point and the second time point can be determined according to specific circumstances, or can be calibrated through actual tests. In such an embodiment, the moment when the first distance is detected to be less than the preset distance can be set as the zero time point, the first time point is the moment after the first time length starts from the zero time point, the second time point is the moment after the second time length starts from the zero time point, and the first time length is less than the second time length. The first time length can be 0 seconds, that is, the first coordinate information of the suction cup 131 is directly obtained at the zero time point. In one embodiment, the first time length is 1 second and the second time length is 3 seconds.

[0101] Please refer to Figure 7 In some embodiments, step S300 includes:

[0102] Step S310: when the moving speed of the suction cup 131 is greater than a preset speed, determining the current position information of the suction cup 131;

[0103] Step S320: determining the adjustment rate of the suction cup 131 according to the position information and / or the moving speed.

[0104] The control method of the embodiment of the present invention can be implemented by the detection device 100 of the embodiment of the present invention. Specifically, please refer to Figure 2 The controller 150 is used to: determine the current position information of the suction cup 131 when the moving speed of the suction cup 131 is greater than a preset speed; and determine the adjustment rate of the suction cup 131 according to the position information and / or the moving speed.

[0105] In this way, the degree of deviation of the suction cup 131 can be conveniently determined, and the adjustment rate of the suction cup 131 can be determined according to the degree of deviation of the suction cup 131 .

[0106] In some embodiments, when it is determined that the moving speed of the suction cup 131 is greater than the preset speed, it can be determined that the tendency of the suction cup 131 to approach the chamber inner wall 113 is increasing, and there is a possibility of increasing the risk of component damage. In this case, by determining the current position information of the suction cup 131 and adjusting the adjustment rate of the suction cup 131 accordingly according to the position information, the magnitude of the adjustment rate can be determined accordingly according to the offset of the suction cup 131. The position information can be determined according to the minimum distance between the suction cup 131 and one of the chamber inner walls 113, or according to the distance between the center of the suction cup 131 and the chamber inner wall 113. In one embodiment, the position information can include a first distance between the suction cup 131 and all chamber inner walls 113.

[0107] In addition, the adjustment direction of the suction cup 131 can be determined according to the moving speed of the suction cup 131, or can be determined according to the position information of the suction cup 131. Preferably, the adjustment direction of the suction cup 131 is opposite to the direction corresponding to the moving speed of the suction cup 131, so that the offset of the suction cup 131 can be adjusted in time.

[0108] On the basis of the above, determining the adjustment rate of the suction cup 131 according to the position information and the moving speed can help improve the calculation accuracy of the adjustment rate.

[0109] In addition, the adjustment rate of the suction cup 131 may be determined based on the current position information of the suction cup 131 , may be determined based on the moving speed of the suction cup 131 , or may be determined by combining the position information and the moving speed.

[0110] Please refer to Figure 8 In some embodiments, step S310 includes:

[0111] Step S311: when the moving speed of the suction cup 131 is greater than a preset speed, determining the position coordinates of the moving component 120;

[0112] Step S312: Determine the current position information of the suction cup 131 according to the position coordinates.

[0113] The control method of the embodiment of the present invention can be implemented by the detection device 100 of the embodiment of the present invention. Specifically, please refer to Figure 2 The controller 150 is used to: determine the position coordinates of the moving component 120 when the moving speed of the suction cup 131 is greater than a preset speed; and determine the current position information of the suction cup 131 according to the position coordinates.

[0114] In this way, the positional relationship between the suction cup 131 and the chamber inner wall 113 can be conveniently and quickly determined.

[0115] Please combine Fig. 9 and Fig.10 Specifically, in the illustrated embodiment, a coordinate system can be established for the mobile component 120, and the specific coordinates of the mobile component 120 and the suction cup 131 can be correspondingly determined according to the coordinate system, so that the actual spatial position in the chamber 111 can be determined. Fig. 9 In the embodiment, the suction cup 131 does not deviate relatively, and the position coordinates of the moving component 120 before the suction cup 131 deviates can be determined according to the coordinate system. Fig.10In the embodiment, the moving speed of the suction cup 131 is greater than the preset speed, and the position coordinates of the moving component 120 after the suction cup 131 is offset can be determined according to the coordinate system. When the position coordinates of the suction cup 131 before and after the offset are determined, the first distance detected by the distance measuring sensor 140 and the specific structure size of the suction cup 131 can be combined to determine the position information including the relative position relationship between the suction cup 131 and the chamber inner wall 113, and the degree to which the suction cup 131 approaches the chamber inner wall 113 can be determined according to the current position information of the suction cup 131.

[0116] In addition, Fig. 9 and Fig.10 In the illustrated embodiment, the position information is determined based on the center A of the suction cup 131 . In other embodiments, the position information may be determined based on other positions of the suction cup 131 .

[0117] Please refer to Figure 1 and Fig.11 In some embodiments, the moving assembly 120 includes a first sliding assembly 121 and a second sliding assembly 125. The first sliding assembly 121 is used to drive the suction cup 131 to move along a first direction. The second sliding assembly 125 is used to drive the suction cup 131 to move along a second direction. Fig.12 , step S400, comprising:

[0118] Step S410: determining the offset direction of the suction cup 131 according to at least two distance measuring sensors 140;

[0119] Step S420: determining a first direction component of the offset direction along the first direction and a second direction component along the second direction;

[0120] Step S430: determining a first rate component of the adjustment rate along the first direction and a second rate component along the second direction;

[0121] Step S440: Control the first sliding assembly 121 to drive the suction cup 131 to move in the first direction according to the first direction component and the first speed component, and / or control the second sliding assembly 125 to drive the suction cup 131 to move in the second direction according to the second direction component and the second speed component.

[0122] The control method of the embodiment of the present invention can be implemented by the detection device 100 of the embodiment of the present invention. Specifically, please refer to Figure 2The controller 150 is used to: determine the offset direction of the suction cup 131 according to at least two ranging sensors 140; determine a first direction component of the offset direction along the first direction and a second direction component along the second direction; determine a first rate component of the adjustment rate along the first direction and a second rate component along the second direction; control the first sliding component 121 to drive the suction cup 131 to move along the first direction according to the first direction component and the first rate component, and / or, control the second sliding component 125 to drive the suction cup 131 to move along the second direction according to the second direction component and the second rate component.

[0123] In this way, the suction cup 131 can be driven to move to the position before the deviation.

[0124] Specifically, please combine Fig.13 ,exist Fig.13 In the illustrated embodiment, the first sliding assembly 121 includes a first driving member 122 and a first slide rail 123, the first driving member 122 is movably connected to the suction cup 131, the first driving member 122 is slidably connected to the first slide rail 123, and the first slide rail 123 is arranged along the first direction. The second sliding assembly 125 includes a second driving member 126 and a second slide rail 127, the second driving member 126 is movably connected to the suction cup 131, the second driving member 126 is slidably connected to the second slide rail 127, and the second slide rail 127 is arranged along the second direction. When the first driving member 122 slides back and forth along the first slide rail 123, the suction cup 131 can be driven to move back and forth accordingly along the first direction. When the second driving member 126 slides back and forth along the second slide rail 127, the suction cup 131 can be driven to move back and forth accordingly along the second direction.

[0125] In such an embodiment, when the offset direction of the suction cup 131 is determined according to the distance measuring sensor 140, the first direction component of the offset direction along the first direction and the second direction component along the second direction can be determined. When the adjustment rate of adjusting the suction cup 131 is determined, the first rate component of the adjustment rate in the first direction and the second rate component in the second direction can be determined. On the basis of the above, the first sliding component 121 can be controlled to drive the suction cup 131 to move at the first rate component along the direction corresponding to the first direction component, and the second sliding component 125 can be controlled to drive the suction cup 131 to move at the second rate component along the direction corresponding to the second direction component, so as to achieve the effect of driving the suction cup 131 to move toward the position before the offset.

[0126] In addition, it can be understood that in other embodiments, when the offset direction of the suction cup 131 is parallel to the first direction, the first direction component can be determined to be the offset direction, the second direction component can be 0, the first speed component can be the adjustment speed, and the second speed component can be 0, so that the suction cup 131 can be driven to move along the direction corresponding to the first direction component at the first speed component. When the offset direction of the suction cup 131 is parallel to the second direction, the first direction component can be determined to be 0, the second direction component can be the offset direction, the first speed component can be 0, and the second speed component can be the adjustment speed, so that the suction cup 131 can be driven to move along the direction corresponding to the second direction component at the second speed component.

[0127] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "certain embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0128] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A control method, characterized in that: The control method is used for a detection device, the detection device includes a cavity, a moving component, a bearing component and at least two ranging sensors, the cavity forms a chamber, the moving component is located in the chamber, the bearing component is connected to the moving component, the moving component is used to drive the bearing component to move, the bearing component includes a suction cup, and the at least two ranging sensors are installed at preset positions of the suction cup. The control method includes: Detecting a first distance formed between the suction cup and the inner wall of the chamber by the at least two distance measuring sensors; When the first distance is less than a preset distance, obtaining a moving speed of the suction cup; Determining an adjustment rate for adjusting the suction cup according to the moving speed of the suction cup; The suction cup is adjusted according to the adjustment rate so that the suction cup returns to the position before the displacement occurs.

2. The control method according to claim 1, characterized in that: When the first distance is less than a preset distance, obtaining the moving speed of the suction cup includes: Acquire first coordinate information of the suction cup corresponding to a first time point and second coordinate information corresponding to a second time point; determining a time difference according to the first time point and the second time point; The moving speed of the suction cup is determined according to the time difference, the first coordinate information and the second coordinate information.

3. The control method according to claim 1, characterized in that: Determining an adjustment rate for adjusting the suction cup according to the moving speed of the suction cup includes: When the moving speed of the suction cup is greater than a preset speed, determining the current position information of the suction cup; An adjustment rate of the suction cup is determined according to the position information and / or the moving speed.

4. The control method according to claim 3, characterized in that: When the moving speed of the suction cup is greater than a preset speed, determining the current position information of the suction cup includes: When the moving speed of the suction cup is greater than a preset speed, determining the position coordinates of the moving component; The current position information of the suction cup is determined according to the position coordinates.

5. The control method according to claim 1, characterized in that: The moving assembly includes a first sliding assembly and a second sliding assembly, wherein the first sliding assembly is used to drive the suction cup to move along a first direction, and the second sliding assembly is used to drive the suction cup to move along a second direction. Adjusting the suction cup according to the adjustment rate includes: Determining the offset direction of the suction cup according to the at least two distance measuring sensors; Determine a first direction component of the offset direction along the first direction and a second direction component along the second direction; determining a first rate component of the adjustment rate along the first direction and a second rate component along the second direction; According to the first direction component and the first speed component, the first sliding assembly is controlled to drive the suction cup to move along the first direction, and / or, according to the second direction component and the second speed component, the second sliding assembly is controlled to drive the suction cup to move along the second direction.

6. A detection device, characterized in that: include: a cavity formed with a chamber; a moving assembly, located in the chamber; A bearing assembly connected to the moving assembly, the moving assembly is used to drive the bearing assembly to move, and the bearing assembly includes a suction cup; At least two distance measuring sensors installed at preset positions of the suction cup; and A controller, the controller being used to: Detecting a first distance formed between the suction cup and the inner wall of the chamber by the at least two distance measuring sensors; When the first distance is less than a preset distance, obtaining a moving speed of the suction cup; Determining an adjustment rate for adjusting the suction cup according to the moving speed of the suction cup; The suction cup is adjusted according to the adjustment rate so that the suction cup returns to the position before the displacement occurs.

7. The detection device according to claim 6, characterized in that: The controller is used to: Acquire first coordinate information of the suction cup corresponding to a first time point and second coordinate information corresponding to a second time point; determining a time difference according to the first time point and the second time point; The moving speed of the suction cup is determined according to the time difference, the first coordinate information and the second coordinate information.

8. The detection device according to claim 6, characterized in that: The controller is used to: When the moving speed of the suction cup is greater than a preset speed, determining the current position information of the suction cup; An adjustment rate of the suction cup is determined according to the position information and / or the moving speed.

9. The detection device according to claim 8, characterized in that: The controller is used to: When the moving speed of the suction cup is greater than a preset speed, determining the position coordinates of the moving component; The current position information of the suction cup is determined according to the position coordinates.

10. The detection device according to claim 6, characterized in that: The moving assembly includes a first sliding assembly and a second sliding assembly, wherein the first sliding assembly is used to drive the suction cup to move along a first direction, and the second sliding assembly is used to drive the suction cup to move along a second direction, and the controller is used to: Determining the offset direction of the suction cup according to the at least two distance measuring sensors; Determine a first direction component of the offset direction along the first direction and a second direction component along the second direction; determining a first rate component of the adjustment rate along the first direction and a second rate component along the second direction; According to the first direction component and the first speed component, the first sliding assembly is controlled to drive the suction cup to move along the first direction, and / or, according to the second direction component and the second speed component, the second sliding assembly is controlled to drive the suction cup to move along the second direction.

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