Substrate tray

By designing the storage and support structure of the substrate pallet, the damage and pollution problems of AMB substrate during transportation are solved, and the storage and transportation effects without damage, scratches and pollution are achieved.

CN115136747BActive Publication Date: 2025-08-19AMOGREENTECH CO LTD
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Patent Information

Application Number
CN202180014236.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2020-02-14
Filing Date
2021-01-28
Publication Date
2025-08-19
Estimated Expiration
2041-01-28

AI Technical Summary

Technical Problem

In the prior art, AMB substrates are prone to surface scratches or contamination during transportation, resulting in subsequent process welding defects and cannot be stored and transported without damage, scratches and pollution.

Method used

A substrate tray is designed, including a receiving part and a supporting part. The supporting part is composed of an inner wall, an outer wall and an upper surface. The inner wall and the outer wall are spaced a predetermined distance to form a "∩" shape. Another tray can be inserted into a closed receiving part. There are clamping grooves and corner grooves on the inner wall, and the outer wall has a protruding portion and a receiving groove to prevent shaking and contamination.

Benefits of technology

Effectively prevent AMB substrate from being damaged and contaminated during transportation, sealing through laminated pallets to avoid additional sealing components, ensuring that the substrate is free of damage, scratches and pollution.

✦ Generated by Eureka AI based on patent content.

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Abstract

One aspect of the present invention provides a substrate tray for accommodating at least one ceramic substrate, the substrate tray comprising: a accommodating portion including a first opening portion open on the upper side for accommodating and removing the ceramic substrate; and a supporting portion formed at the edge of the accommodating portion to support the edge of the side wall of the ceramic substrate, wherein the supporting portion comprises: an inner wall, at least one surface of which contacts the ceramic substrate; an outer wall spaced a predetermined distance from the inner wall; an upper surface connecting the inner wall and the outer wall; and a second opening portion formed between the inner wall and the outer wall and opening in a direction opposite to the first opening portion at a position opposite to the upper surface, whereby the upper surface of another substrate tray is inserted through the second opening portion, so that the first opening portion of the accommodating portion of the inserted other substrate tray is closed by the accommodating portion of the substrate tray.
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Description

Technical Field

[0001] The present invention relates to a substrate tray, and more particularly, to a substrate tray capable of storing or transporting manufactured substrates without damage or contamination. Background Art

[0002] When manufacturing electronic products, circuit boards are generally used to mount components.

[0003] Among these components, those that generate a large amount of heat require cooling measures such as heat dissipation.

[0004] Typically, cooling fans, radiators, heat pipes, and the like are used to promote cooling. However, due to space limitations or other restrictions, it is sometimes difficult to use separate cooling devices such as cooling fans, radiators, and heat pipes. In some cases, it is necessary not only to dissipate heat from the components but also from the circuit substrate.

[0005] On the other hand, active metal brazing (AMB) substrates have recently been introduced. Such AMB substrates are circuit boards made by brazing metal foil on one or both sides of a ceramic substrate.

[0006] This AMB substrate has excellent heat dissipation effect through the metal foil, so it can be used in power semiconductor mounting substrates, etc. where heat dissipation is more important.

[0007] This type of AMB substrate is shipped to the demand side after production is completed, but the surface of the produced AMB substrate may have surface scratches or contamination during transportation, which may lead to welding defects in subsequent processes.

[0008] Therefore, there is an urgent need to develop a packaging container that can transport AMB substrates without damage, scratches or contamination. Summary of the Invention

[0009] Technical issues

[0010] The present invention aims to solve the above-mentioned problems and aims to provide a substrate tray capable of transporting and storing AMB substrates without damage, scratches or contamination.

[0011] The subjects of the present invention are not limited to the above-mentioned subjects, and other subjects not mentioned will be clearly understood by those skilled in the art through the following description.

[0012] Means of solving the problem

[0013] In order to solve the above-mentioned problems, according to one aspect of the present invention, there is provided a substrate tray for accommodating at least one ceramic substrate, the substrate tray comprising: a accommodating portion including a first opening portion opened on the upper side so as to accommodate and remove the ceramic substrate; and a supporting portion formed at the edge of the accommodating portion to support the edge of the side wall of the ceramic substrate, wherein the supporting portion comprises: an inner wall, at least one surface of which contacts the ceramic substrate; an outer wall, which is spaced a predetermined distance from the inner wall; an upper surface connecting the inner wall and the outer wall; and a second opening portion formed between the inner wall and the outer wall, and forming an opening at a position opposite to the upper surface in a direction opposite to the first opening portion, whereby the upper surface of another substrate tray is inserted through the second opening portion, so that the first opening portion of the accommodating portion of the inserted other substrate tray is closed by the accommodating portion of the substrate tray.

[0014] The substrate tray may form a flange portion extending from a bottom end of the outer wall toward an outer side opposite to the receiving portion.

[0015] At least one bottom surface protrusion may be formed on the bottom surface of the accommodation portion.

[0016] The bottom surface protrusion may be formed of a straight line or two straight lines intersecting at a predetermined angle.

[0017] The bottom surface protrusion may include: a first bottom surface protrusion, which extends radially at equal angles to each other from the center of the bottom surface of the accommodating portion toward the inner wall; a second bottom surface protrusion, which is formed to be orthogonal to the first bottom surface protrusion extending perpendicular to the inner wall in the first bottom surface protrusion; and a third bottom surface protrusion, in which the end of the first bottom surface protrusion extending toward the corner of the inner wall in the first bottom surface protrusion is formed into a triangular shape.

[0018] A clamping groove is formed on the inner wall, and the clamping groove is used to pick up a substrate entering the accommodating portion or take out a substrate from the accommodating portion.

[0019] The clamping grooves may be formed at symmetrical positions facing each other.

[0020] Corners at the intersections of the inner walls may form corner grooves recessed toward the outside of the accommodation portion.

[0021] The corner portions of the corner grooves may be formed to be curved with a preset curvature.

[0022] A plurality of protruding outer protrusions may be formed on the outer surface of the outer wall, the outer protrusions having length directions in the up-down direction and being spaced apart from each other in the horizontal direction.

[0023] The inner surface of the outer wall may form a plurality of outer receiving grooves having a length direction in an up-down direction and spaced apart from each other at horizontal intervals so as to receive the outer protrusion at a position corresponding to the outer protrusion.

[0024] The distance between the outer wall and the inner wall may be formed into a shape that is wide at the bottom and narrow at the top and gradually narrows toward the upper surface.

[0025] Effects of the Invention

[0026] According to the substrate tray of the present invention, the AMB substrate is stored in the tray, because it can prevent impact from the outside, thereby preventing damage to the substrate. In addition, since the AMB substrate is loaded in the tray in a non-shaking manner, it can prevent scratches, etc., and can prevent contamination caused by the influx of external substances.

[0027] Furthermore, since the accommodating portion can be sealed while the substrate trays are stacked, there is an effect that sealing can be achieved by stacking the substrate trays without requiring an additional sealing member.

[0028] The effects of the present invention are not limited to the above-mentioned effects, and other effects not mentioned will be clearly understood from the description of the claims by those skilled in the art. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 is a perspective view showing a substrate tray according to one embodiment of the present invention;

[0030] Figure 2 yes Figure 1 A top view of

[0031] Figure 3 yes Figure 1 Bottom view of

[0032] Figure 4 It shows Figure 1 A bottom view of another form of the bottom protrusion;

[0033] Figure 5 1 is a perspective view showing a state in which another substrate tray is coupled to the upper side of the substrate tray containing the AMB substrate;

[0034] Figure 6 yes Figure 5 side profile of;

[0035] Figure 7 is a perspective view showing a substrate tray according to another embodiment of the present invention;

[0036] Figure 8 yes Figure 7 Top view of .

[0037] Description of Reference Numerals

[0038] 10: Ceramic substrate 100: Substrate tray

[0039] 110: Accommodation portion 112: First opening

[0040] 114: bottom surface 120: bottom surface protrusion

[0041] 130: Inner wall 132: Clamping groove

[0042] 134: Angle groove 136: Side protrusion

[0043] 138: Side accommodating portion 140: Upper surface

[0044] 150: Outer wall 152: Outer protrusion

[0045] 154: Outer accommodating portion 160: Flange portion

[0046] 170: Second opening 180: Hollow space DETAILED DESCRIPTION

[0047] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. In the accompanying drawings, parts not related to the present invention are omitted for clarity of explanation, and identical or similar parts throughout the specification are given the same reference numerals. Hereinafter, a substrate tray according to an embodiment of the present invention will be described.

[0048] like Figures 1 to 3 As shown, the substrate tray 100 according to an embodiment of the present invention may include a receiving portion 110 and a supporting portion.

[0049] The substrate tray 100 of this embodiment is used to accommodate a ceramic substrate 10. The ceramic substrate 10 is a circuit substrate formed by brazing a metal foil on one or both sides of a ceramic substrate.

[0050] This type of ceramic substrate 10 has an excellent heat dissipation effect due to the metal foil, and is therefore used in power semiconductor mounting substrates and the like where heat dissipation is important.

[0051] In addition, the ceramic substrate 10 may have dividing lines formed thereon during initial production so as to be subsequently divided into a plurality of substrates.

[0052] In order to sell the thus produced ceramic substrates 10 or transport them to a demand side, a substrate tray 100 capable of storing or transporting the produced ceramic substrates 10 without scratches, damages, or contamination is required.

[0053] The receiving portion 110 forms a space for receiving the ceramic substrate 10 , and may be formed with a bottom surface 114 for closing the bottom and a first opening 112 with an open top, so as to receive and remove the ceramic substrate 10 .

[0054] Also, the support portion may be formed at an edge of the receiving portion to support a sidewall edge of the ceramic substrate 10 received in the receiving portion 110 . That is, the support portion constitutes a sidewall of the receiving portion 110 .

[0055] The support portion as described above may include an inner wall 130 , an outer wall 150 , an upper surface 140 , and a second opening portion 170 .

[0056] In this embodiment, the ceramic substrate 10 is formed into a quadrilateral. Accordingly, the support portions formed on the edges of the receiving portion 110 will be described using the quadrilateral as an example. However, the present invention is not limited thereto. When the ceramic substrate is triangular or a polygon with four or more sides, the support portions can be positioned accordingly based on the shape of the ceramic substrate.

[0057] The receiving portion 110 and the supporting portion are made of a synthetic resin material such as PP or PET and can be integrally formed by injection molding. However, the present invention is not limited to the above materials and can be formed of different materials as needed, or can be formed into separate parts and then assembled to form a substrate tray.

[0058] As described above, the support portion may include the inner wall 130 , the outer wall 150 , and the upper surface 140 .

[0059] The inner wall 130 may be formed to extend upward from the bottom surface 114 of the support portion to form a side surface of the receiving portion 110 .

[0060] The outer wall 150 may be formed at a position spaced apart from the inner wall 130 by a predetermined distance.

[0061] In addition, an upper surface 140 may be formed to connect the upper end of the inner wall 130 and the upper end of the outer wall 150. That is, the upper surface 140 may extend outward from the upper end of the inner wall 130, and the outer wall 150 may extend downward from the outer edge of the upper surface 140.

[0062] Furthermore, a second opening 170 may be formed between the inner wall 130 and the outer wall 150, and may be opened at a position opposite to the upper surface 140 and in a direction opposite to the first opening 112. In other words, an open hollow space 180 may be formed between the inner wall 130, the upper surface 140, and the outer wall 150.

[0063] Therefore, the cross-sections of the inner wall 130 , the upper surface 140 , and the outer wall 150 may be in a “∩” shape.

[0064] In addition, if Figure 5 As shown, the inner wall 130 , the upper surface 140 , and the outer wall 150 of another substrate tray 102 may be inserted into and coupled to the inner wall 130 , the upper surface 140 , and the open hollow space 180 surrounded by the outer wall.

[0065] Furthermore, a flange portion 160 may be formed at the lower end of the outer wall 150. The flange portion 160 may be formed to extend from the lower end of the outer wall 150 toward the outer side opposite to the receiving portion 110. The flange portion 160 as described above can increase the rigidity of the outer wall 150 and facilitate easy separation of the stacked and combined substrate trays 100.

[0066] In this embodiment, the inner wall 130 is described as having a length of 172 mm×130 mm, but the invention is not limited thereto. The length of the inner wall 130 may be formed differently according to the size of the ceramic substrate 10 accommodated in the accommodation portion 110 .

[0067] The depth of the receiving portion 110 , that is, the height of the inner wall 130 , may be a depth capable of accommodating 10 to 15 ceramic substrates 10 in the receiving portion 110 . However, this depth may vary depending on product requirements and the weight and thickness of the ceramic substrate 10 .

[0068] In addition, at least one bottom protrusion 120 may be formed on the bottom surface 114 of the receiving portion 110. The bottom protrusion 120 separates the ceramic substrate 10 received in the receiving portion 110 from the bottom surface of the receiving portion 110 to prevent vibration transmission, and may be configured to absorb shock through the elasticity of the material of the bottom protrusion 120 itself.

[0069] like Figures 1 to 3 As shown, the bottom surface protrusion 120 as described above can be formed in a straight line shape or a shape of two straight lines intersecting at a predetermined angle (a straight line bent or an X shape), and can be formed in a plurality of intervals. Figure 4As shown, the bottom surface protrusions 120 may be arranged in a manner such that two straight lines (in a bent straight line or X-shaped form) intersecting at a predetermined angle are spaced apart from each other.

[0070] The bottom protrusion 120 not only absorbs impact but also minimizes the contact area with the ceramic substrate 10 to prevent contamination. In addition, since the bottom surface 114 of the receiving portion 110 can be spaced apart from the ceramic substrate 10, scratches on the ceramic substrate 10 caused by foreign matter can be prevented.

[0071] In addition, a clamping groove 132 may be formed in the inner wall 130. The clamping groove 132 may form a space into which a picker for picking up the ceramic substrate 110 entering or being carried out of the receiving portion 110 may enter.

[0072] The clamping groove 132 may be formed at a position facing the inner wall 130 .

[0073] In addition, corner grooves 134 may be formed. The corner grooves 134 may be formed at the four corners of the receiving portion 110, that is, at the intersections of the inner walls 130 and 130, and may be recessed toward the outside of the receiving portion 110.

[0074] The corner grooves 134 are used to protect the corners of the ceramic substrate 10 accommodated in the accommodation portion 110 . By forming gaps to concentrate the stress on the corners of the ceramic substrate 10 so that they do not contact the inner wall 130 of the accommodation portion 110 , the ceramic substrate 10 can be prevented from being damaged.

[0075] At this time, the corner portion of the corner groove 134 can be curved with a preset curvature. In this embodiment, the curvature radius of the corner portion of the corner groove 134 is 3.0 mm as an example for description. However, the present invention is not necessarily limited thereto and can be formed into other sizes.

[0076] Furthermore, an outer protrusion 152 may be formed on the outer surface of the outer wall 150. A plurality of the outer protrusions 152 may be formed to be spaced apart from each other at predetermined intervals in the horizontal direction, and the plurality of the outer protrusions 152 may be formed to have a length in the vertical direction. The outer protrusions 152 not only enhance strength but also guide the position of the substrate trays 100 and 102 when they are joined together via the outer receiving grooves, which will be described later.

[0077] On the other hand, a plurality of outer accommodating grooves 154 corresponding to the shape of the outer protrusion 152 can be formed on the inner surface of the outer wall 150, and the plurality of outer accommodating grooves 154 have a length direction in the up and down directions and are spaced apart from each other at horizontal intervals so as to accommodate the outer protrusion 152 at a position corresponding to the outer protrusion 152.

[0078] Therefore, when the pair of substrate trays 100 and 102 are stacked up and down, the outer protrusions 152 of the substrate tray 100 on the lower side may be received in the outer receiving grooves 154 of the substrate tray 102 on the upper side and coupled to each other.

[0079] The outer protrusion 152 and the outer receiving groove 154 are both longitudinally oriented, so as to not interfere with each other in the longitudinal direction and guide the coupling position of the upper substrate tray 102 and the lower substrate tray 100 .

[0080] In addition, a side protrusion 136 may be formed on an outer surface of the receiving portion facing the inner wall 130. The side protrusion 136 may be formed to protrude toward the inner side of the receiving portion 110 from the surface of the inner wall 130.

[0081] One or more side protrusions 136 may be formed spaced apart from each other. In this case, the surface of the side protrusion 136 facing the receiving portion 110 may be formed into a flat surface to stably support the side of the ceramic substrate 10 received in the receiving portion 110 .

[0082] Due to the provision of the side protrusions 136, the side protrusions 136 support the ceramic substrate 10 with a small area, rather than being supported by the entire surface of the inner wall 130. This can stably support the ceramic substrate 10 and minimize the possibility of contamination. In addition, the side protrusions 136 can provide a predetermined fixing force for the ceramic substrate 10 through the elasticity of the material itself.

[0083] Furthermore, side receiving grooves 138 corresponding to the side protrusions 136 may be formed on the inner surface of the inner wall 130. A plurality of side receiving grooves 138 corresponding to the shape of the side protrusions 136 and having a length direction in the vertical direction may be formed at positions corresponding to the side protrusions 136 to accommodate the side protrusions 136. The side receiving grooves 138 may be spaced apart at horizontal intervals.

[0084] Therefore, when the pair of substrate trays 100 and 102 are stacked up and down, the side protrusions 136 of the substrate tray 100 on the lower side may be received in the side receiving grooves 138 of the substrate tray 102 on the upper side and coupled to each other.

[0085] The side protrusions 136 and the side receiving grooves 138 are both longitudinally oriented, so that they are not interfered with in the longitudinal direction and can guide the coupling positions of the upper substrate tray 102 and the lower substrate tray 100 .

[0086] That is, Figure 6 As shown, the interior of the second opening portion 170 formed between the inner wall 130, the upper surface 140 and the outer wall 150 is formed by a hollow space 180, and the inner wall 130, the upper surface 140 and the outer wall 150 of another substrate tray 102 can be inserted into the second opening portion 170 and the hollow space 180. At this time, the distance between the inner wall 130 and the outer wall 150 can be formed into a shape that is wide at the bottom and narrow at the top and gradually narrows toward the upper surface in the second opening portion 170 to facilitate smooth insertion.

[0087] That is, the interval L1 of the second openings 170 may be wider than the interval L2 on the upper surface 140 side.

[0088] Therefore, the substrate tray 100 located at the lower side may be guided to be inserted, and at the same time may be tightly coupled to apply a predetermined fixing force when inserted.

[0089] like Figure 5 and Figure 6 As shown, one or more produced ceramic substrates 10 can be stacked and accommodated in the receiving portion 110. In addition, when the ceramic substrates are accommodated in the accommodating portion 110, another substrate tray 102 is overlapped and coupled to the upper side of the accommodating portion 110, thereby allowing the bottom surface of the accommodating portion 110 of the upper substrate tray 102 to cover and close the upper surface of the accommodating portion 110 of the lower substrate tray 100.

[0090] At this time, the inner wall 130, the upper surface 140 and the outer wall 150 of the substrate tray 100 located on the lower side are inserted and combined into the center hole 180 between the inner wall 130, the upper surface 140 and the outer wall 150 of the substrate tray 102 overlapping the upper side, so that the ceramic substrate 10 can be stored in isolation from the outside while being accommodated in the accommodating portion 110.

[0091] In addition, if Figure 7 and Figure 8 As shown, the width of the upper surface 240 and the shape of the bottom protrusion 220 may vary.

[0092] That is, if necessary, the width of the upper surface 240 may be wider than that of the above embodiment. This is to accommodate a ceramic substrate 10 of a smaller size in a substrate tray 200 of the same size without shaking.

[0093] Alternatively, if the storage environment of the ceramic substrate 10 is to be further prepared for lateral impact, the width of the upper surface 240 may be further increased. Alternatively, this may be to cope with changes in the vertical load applied to the substrate tray 200 .

[0094] In addition, the shape of the bottom protrusion 220 may be changed.

[0095] The bottom protrusion 120 in the above embodiment is a straight line or a combination of two straight lines bent in a “^” shape. However, in this embodiment, the bottom protrusion 222 includes a first bottom protrusion 222a, a second bottom protrusion 222b and a third bottom protrusion 222c.

[0096] The first bottom surface protrusions 222a may have a linear shape extending radially in eight directions on the bottom surface 214. In this case, the first bottom surface protrusions 222a may extend at equal angles to one another. That is, the first bottom surface protrusions 222a may extend vertically toward the inner wall 230 and toward the corner grooves 234 at each corner intersecting the inner wall 230.

[0097] The second bottom protrusion 222 b may be formed at a portion of the first bottom protrusion 222 a extending perpendicularly to the inner wall 230 , and may be formed to have a length direction perpendicular to the first bottom protrusion 222 a .

[0098] Also, the third bottom protrusion 222 c may be formed at an end portion of a portion of the first bottom protrusion 222 a extending toward the corner groove 234 and may be formed in a triangular shape.

[0099] That is, the first bottom surface protrusion 222 a , the second bottom surface protrusion 222 b , and the third bottom surface protrusion 222 c may be formed symmetrically with respect to the center of the bottom surface 214 .

[0100] Therefore, by symmetrically supporting the ceramic substrate 10 , stable support can be performed.

[0101] While the preferred embodiments of the present invention have been reviewed above, it will be apparent to those skilled in the art that, in addition to the embodiments described above, the present invention may be embodied in other specific forms without departing from the spirit and scope of the present invention. Therefore, the embodiments described above should be considered illustrative rather than restrictive, and the present invention is not limited to the foregoing description and may be modified within the scope of the appended claims and their equivalents.

Claims

1. A substrate tray, accommodating at least one ceramic substrate, The substrate tray comprises: The receiving portion includes a first opening portion with an upper side open so as to receive and remove the ceramic substrate; as well as a supporting portion formed at an edge of the receiving portion to support an edge of a side wall of the ceramic substrate, The support portion includes: an inner wall, at least one surface of which contacts the ceramic substrate; an outer wall spaced a predetermined distance from the inner wall; an upper surface connecting the inner wall and the outer wall; and The second opening is formed between the inner wall and the outer wall and is opened in a direction opposite to the first opening at a position opposite to the upper surface. The upper surface of another substrate tray is inserted through the second opening portion, so that the first opening portion of the receiving portion of the inserted other substrate tray is closed by the receiving portion of the substrate tray. The outer surface of the outer wall is formed with a plurality of protruding outer protrusions, the outer protrusions have a length direction in the up-down direction and are spaced apart from each other in the horizontal direction. wherein the inner surface of the outer wall is formed with a plurality of outer accommodating grooves, the plurality of outer accommodating grooves having a length direction in the up-down direction and being spaced apart from each other at horizontal intervals so as to accommodate the outer protrusion at a position corresponding to the outer protrusion; wherein, when the upper substrate tray is combined with the other substrate tray at the lower side in the up-down direction, the plurality of outer protrusions and the plurality of outer receiving grooves guide the combined position, wherein a plurality of side protrusions are formed on the outer surface of the inner wall facing the receiving portion, wherein a plurality of side receiving grooves corresponding to the plurality of side protrusions are formed on the inner surface of the inner wall, When the upper substrate tray is combined with the other lower substrate tray in the up-down direction, the plurality of side protrusions and the plurality of side receiving grooves guide the combined position.

2. The substrate tray according to claim 1, wherein A flange portion is formed, extending from a bottom end of the outer wall toward an outer side opposite to the accommodation portion.

3. The substrate tray according to claim 1, wherein At least one bottom surface protrusion is formed on the bottom surface of the accommodation portion.

4. The substrate tray according to claim 3, wherein: The bottom surface protrusion is formed by a straight line or by two straight lines intersecting at a predetermined angle.

5. The substrate tray according to claim 3, wherein The bottom protrusion comprises: first bottom surface protrusions extending radially from the center of the bottom surface of the receiving portion toward the inner wall at equal angles to each other; a second bottom surface protrusion formed to be orthogonal to a first bottom surface protrusion extending perpendicularly to the inner wall among the first bottom surface protrusions; and The third bottom surface protrusion is formed in a triangular shape at an end portion of the first bottom surface protrusion extending toward a corner of the inner wall of the first bottom surface protrusion.

6. The substrate tray according to claim 1, wherein A clamping groove is formed on the inner wall, and the clamping groove is used to pick up a substrate entering the accommodating portion or take out a substrate from the accommodating portion.

7. The substrate tray according to claim 6, wherein: The clamping grooves are formed at symmetrical positions facing each other.

8. The substrate tray according to claim 1, wherein Corners at the intersections of the inner walls are formed with corner grooves recessed toward the outside of the accommodation portion.

9. The substrate tray according to claim 8, wherein: The corner portions of the corner grooves are formed to be curved with a preset curvature.

10. The substrate tray according to claim 1, wherein The distance between the outer wall and the inner wall is formed into a shape that is wide at the bottom and narrow at the top and gradually narrows toward the upper surface.

Citation Information

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